Cryopumps, Cryogenics - Ideal Vacuum Products, LLC

Cryopumps, Cryogenics - Ideal Vacuum Products, LLC
Cryopumps,
Cryogenics
182.01.02
Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog
Product Section C12
Edition 2010
Contents
General
Applications and Accessories
Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.03
Cryogenics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.04
General
Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Multiple Operation of Refrigerator Cryopumps . . . . . . . . . . . . .
Regenerating Cryopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Refrigerating Capacity of Cryogenic Cold Heads . . . . . . . . . . .
Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Compressor Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
C12.05
C12.06
C12.06
C12.07
C12.08
C12.11
Products
Cryopumps
Standard Cryopumps
BasicLine
COOLVAC 800 BL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.12
Cryopumps with Fully Automatic Control
ClassicLine
COOLVAC 800 CL, 1.500 CL . . . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 2.000 CL, 3.000 CL . . . . . . . . . . . . . . . . . . . . . .
COOLVAC 5.000 CL, 10.000 CL . . . . . . . . . . . . . . . . . . . . .
COOLVAC 18.000 CL, 30.000, 60.000 . . . . . . . . . . . . . . . . .
Conversion of Units
Celsius, Fahrenheit, Kelvin
Kelvin (abbreviated as K) is the unit of
temperature.
Temperatures on the Kelvin scale are
converted into temperatures on the
Celsius scale as follows:
n °C = (n + 273.15) K.
Since the following equation applies
between Celsius scale and Fahrenheit
scale
n °F = 5/9 (n – 32) °C
it follows that
n °F = 5/9 (n + 459.67) K.
C12.14
C12.18
C12.22
C12.26
The inverse equations are as follows:
m K = (m – 273.15) °C
Cryogenics
m °C = (1.8 m + 32) °F
Cold Heads, pneumatically driven
Single Stage Cold Head
COOLPOWER 140 T . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.28
Dual Stage Cold Heads
COOLPOWER 7/25, 5/100 and 5/100 T . . . . . . . . . . . . . . . . C12.30
m K = (1.8 m – 459.67) °F.
Cold Head, mechanically driven
Dual Stage Cold Heads
COOLPOWER 10 MD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.32
Compressor Units
for pneumatically driven cold heads and pumps
with air cooling
COOLPAK 2000 A/2200 A . . . . . . . . . . . . . . . . . . . . . . . .
with water cooling
COOLPAK 2000/2200 . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLPAK 4000/4200 . . . . . . . . . . . . . . . . . . . . . . . . . . .
COOLPAK 6000/6200 . . . . . . . . . . . . . . . . . . . . . . . . . . .
for mechanically driven cold heads and pumps
with water cooling
COOLPAK 6000 MD/6200 MD . . . . . . . . . . . . . . . . . . . . .
General Accessories for Compressor Units COOLPAK . . . . . . . . .
The following applies in particular to
absolute Zero:
0 K = -273.15 °C ; -459.67 °F.
1 bar = 14.5 psi
1 MPa = 10 bar
C12.34
C12.36
C12.38
C12.38
C12.40
C12.42
Refrigerator Cryostats
based on the RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.43
optical, based on the RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . C12.44
Accessories
Cryopumps / Cryogenics
Controllers and Monitoring Units for Cryopumps . . . . . . . . . . . . . .
COOLVAC ClassicLine, System Configuration
Single Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dual Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Dual and Mutiple Operation . . . . . . . . . . . . . . . . . . . . . . . . . . .
Low Temperature Controller Modell 9700 . . . . . . . . . . . . . . . . . .
Low Temperature Measurement Instrument MODEL211S . . . . . .
Temperature Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Safety Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Precision Manometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
C12 02
C12.46
C12.49
C12.50
C12.51
C12.52
C12.53
C12.54
C12.55
C12.56
Oerlikon Leybold Vacuum Full Line Catalog
General
C
ry
o
pu
m
ps
CO
O
LV
AC
CO
80
OL
0
VA
BL
C
CO
80
OL
0
CL
VA
C
CO
1
.
OL
50
VA
0C
C
L
CO
2.0
OL
00
VA
CL
C
CO
3.0
00
OL
VA
CL
C
CO
5.0
OL
00
VA
CL
C
CO
10
.00
OL
VA
0C
C
L
CO
18
OL
.00
VA
0C
L
CO C 3
0
OL
.00
VA
0
C
60
.00
0
Applications and Accessories, Cryopumps
Application
UHV systems
■
■
■
■
Beam tubes in particle accelerators
■
Transfer chambers / Loadlock
■
■
■
■
■
General research
■
■
■
■
■
■
■
■
■
■
Evaporation coating systems
■
■
■
■
■
■
■
■
■
Sputtering systems
■
■
■
■
Ion implanters
■
■
■
■
■
Metallization systems
■
■
■
■
■
■
■
■
■
■
Space simulation chambers
■
■
■
■
■
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■
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■
Electron beam welding systems
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
Accessories
Compressor unit
COOLPAK 2000 (A)/2200 (A)
Page
C12.34/36
Compressor unit
COOLPAK 6000/6200
C12.38
Low temperature controller Modell 9700
C12.52
■
Temperature sensor
C12.54
■
Gas manifold GD 2
C12.42
■
■
■
■
Gas manifold GD 4
C12.42
■
■
■
■
[■] [■] [■] [■] [■]
■
■
■
[ ■ ] = For dual and mutiple operation only
Oerlikon Leybold Vacuum Full Line Catalog
03 C12
C
ol
d
he
ad
s
CO
OL
PO
W
ER
CO
14
OL
0
PO
T
W
ER
CO
7/
OL
25
PO
W
ER
CO
5/
OL
10
PO
0
W
ER
CO
5/
OL
10
PO
0
T
W
ER
10
M
D
Applications and Accessories, Cryogenics
Application
■
■
■
■
■
(■)
■
■
■
■
Cooling of cryopanels
■
■
■
■
■
Cleaning of gases
■
■
■
■
■
Calibration of sensors
■
■
■
■
Optical spectroscopy
■
■
■
■
Infrared spectroscopy
■
■
■
■
Matrix spectroscopy
■
■
■
■
Testing of superconductors
■
■
■
■
■
■
Cooling of samples and detectors
Cooling of superconductors
Cooling of superconducting magnets, coils and components HTC + LTC
Accessories
Compressor unit COOLPAK 2000 (A)/2200 (A)
(■)
Page
■
C12.34/36
Compressor unit COOLPAK 6000/6200
C12.38
Compressor unit COOLPAK 6000 MD/6200 MD
C12.40
Low temperature controller Modell 9700
C12.52
Low temperature measurement instrument MODEL 211S
C12.53
Temperature sensor
C12.54
■
■
■
■
■
■
■
■
■
■
■
■
■
( ■ ) = Only high Tc superconductors
C12 04
Oerlikon Leybold Vacuum Full Line Catalog
Cryopumps
Cryopumps are gas entrapment
vacuum pumps for the pressure range
from 10-3 to < 10-11 mbar (0.75 x 10-3
to ⱕ 0.75 x 10-11 Torr). The principle of
operation is that gaseous substances
are bound to the cold surfaces within
the pump by means of cryocondensation, cryosorption or cryotrapping.
Further Advantages
In order to be able to produce a high
or ultra-high vacuum the cold surfaces
(cryopanels) must be cooled to a sufficiently low temperature. Depending on
the type of cooling system used a difference is made between refrigerator
cryopumps, bath cryopumps and evaporator cryopumps.
- Easy process control and pump
control via computer
Oerlikon Leybold Vacuum manufactures only cryopumps which are cooled
by means of a refrigerator.
Advantages to the User
Advantages offered by the Pumping
Principle
- High effective pumping speed for all
gases
- Much more compact than comparable pump systems offering a
pumping speed of over 1500 l x s-1
- Backing pump is only required
during start-up and during regeneration
- Favorable price-to-performance
ratio and low running costs especially at higher pumping speeds
The cryopumps are cooled by the wellproven two-stage cold heads from
Oerlikon Leybold Vacuum’s
COOLPOWER line (Gifford/McMahon
principle).
The design of a refrigerator cryopump
from the COOLVAC range is shown
schematically in the figure below.
The first stage of the cold head (9)
cools the thermal radiation shield (5)
and the baffle (6) of the pump.
- Extremely high pumping speed for
water vapor
For a given diameter of the high
vacuum flange, the cryopump offers
the highest pumping speed of all high
vacuum pumps.
Depending on the type of pump and
the operating conditions operating
temperatures of 45 to 80 K are
attained. Correspondingly water vapor
condenses at this temperature.
The thermal shield and baffle are made
of copper which conducts heat very
well so as to optimally utilize the refrigerating capacity which is available.
Moreover, the thermal shield is metallized so that reflective losses will be
minimal.
The second stage of the cold head (7)
is used to cool the cryopanels (8).
Depending on the operating conditions, operating temperatures of 10 to
20 K are attained.
Here the process of cryocondensation
of N2, O2 and argon will take place.
The active pumping surfaces are made
of copper of high thermal conductivity
and they are tightly linked thermally to
the second stage of the cold head.
H2, Ne and He are also adsorbed on
to these surfaces which are partly
covered with activated charcoal.
6
1
7
Advantages offered by Design
In contrast to gas transfer high vacuum
pumps (mechanically suspended turbomolecular pumps, for example),
cryopumps do not have any mechanically moving, oil, or grease lubricated
parts on the vacuum side.
The following advantages are a direct
result of this design characteristic:
- Hydrocarbon-free vacuum in the
pressure range from 10-3 to
< 10-11 mbar (0.75 x 10-3 to
ⱕ 0.75 x 10-11 Torr).
- Insensitivity to mechanical disturbances from particles coming from
the process or external vibrations.
Oerlikon Leybold Vacuum Full Line Catalog
1
2
3
4
High vacuum flange
Pump body
Foreline flange
Safety valve with flange
connection for connection
of an exhaust line
5 Thermal radiation shield
6 Baffle
7 Second stage of the cold head
8 Cryopanels
9 First stage of the cold head
10 Helium gas connections
11 Cold head motor with housing
and electrical connections
2
3
10
11
5
4
8
9
COOLVAC refrigerator cryopump
05 C12
All cryopumps from the COOLVAC
range are equipped with a safety valve
(respectively with a bursting disk in the
case of the UHV variants) which is set
in the factory so that it will open at an
overpressure of 150 mbar (113 Torr).
In order to be able to safely remove
any gases which may present a health
hazard when the safety valve responds, the valve is equipped with an
additional DN 40 KF flange where an
exhaust line is connected.
Multiple Operation of
Refrigerator Cryopumps
Advantages to the User
The powerful Oerlikon Leybold Vacuum
compressor units COOLPAK 4000 D
and 6000 D open up the possibility of
operating two cold heads or refrigerator cryopumps simultaneously.
Regenerating Cryopumps
An important aspect in the operation of
cryopumps is that of regeneration.
Since a cryopump is a gas entrapment
pump, the gasses which have accumulated in the pump during the “pumping” mode must from time to time be
removed from the pump. This is done
by switching the compressor unit off
and by warming up the cryopanels to
room temperature or sightly higher so
that the released substances can be
pumped out by a forevacuum pump.
Cryopumps without Electric
Regeneration System
The cryopump is warmed up to room
temperature by purging the inside of
the pump with a dry, pre-warmed inert
gas (such as nitrogen). In this case it is
not possible to set up defined and
controlled temperatures within the
cryopump. Thus the simultaneous presence of gases such as hydrogen and
oxygen in the pump can not be entirely
excluded. The formation of ignitable
gas mixtures is only prevented by the
diluting effect of the dry inert gas.
Cryopumps with Fully Automatic
Electric Regeneration System from
Oerlikon Leybold Vacuum
The cryopump is warmed up to room
temperature by heating the 1st and
2nd stages of the cold head with elec-
C12 06
The pump’s body, all flanges and the
safety valve are made of high-quality
stainless steel.
- Significantly reduced investment
and operating costs
- Small footprint
tric heaters. In this case, a defined and
controlled temperature distribution
within the cryopump can be set up.
This controlled warming process
ensures that the pumped gases are
removed sequentially, i.e. the pumped
gases are released one after the other
in the following sequence:
- Gases adsorbed at the cryopanels
(e.g. hydrogen, helium, neon),
- Gases condensed at the cryopanels
(e.g. nitrogen, oxygen, argon),
- Gases and vapors which have condensed on to the baffle and thermal
radiation shield (e.g. water vapor).
The electric method of regeneration
from Oerlikon Leybold Vacuum prevents gases such as hydrogen and
oxygen from being present in the
pump at the same time. This excludes
the formation of ignitable gas mixtures
right from the start.
Cryopumps without fully automatic
control and without electric regeneration system belong to the BasicLine
(BL), like the COOLVAC 800 BL, for
example.
The warming up process is fully automatic. Pressure and temperature distribution within the pump are set up and
controlled by the control system at all
times. The sequential regeneration of
pumped gases prevents the forma-tion
of ignitable gases right from the start.
This ensures the utmost safety during
the regeneration of cryopumps from
Oerlikon Leybold Vacuum.
In the case of cryogenic pumps with
fully automatic control there exist two
cryopump lines.
1. The COOLVAC BasicLine
(COOLVAC BL) offering the following
pumping speed class for Nitrogen in
l/s: 800; COOLVAC 800 BL, for
example.
Other pumping speed classes from
1 500 to 18 000 l/s are available on
request.
For more information please contact
your local Oerlikon Leybold Vacuum
representative.
2. The COOLVAC ClassicLine
(COOLVAC CL) offering the following
pumping speed classes for nitrogen
in l/s: 800, 1 500, 2 000, 3 000,
5 000, 10 000 and 18 000;
COOLVAC 1500 CL, for example.
In the price list the designators “V”
appears in connection with the pump
designations.
“V”:
The high-vacuum flange is located
at the top and the cold head below, as
is the case for the
COOLVAC 1500 CL-V, DN 200 CF.
Oerlikon Leybold Vacuum Full Line Catalog
Refrigerating Capacity of
Cryogenic Cold Heads
200
W
35
175
10W
2nd Stage Temperature
Cooling Capacity
150
125
100
75
50
25
30
K
25
2nd Stage
Refrigeration
Capacity
7W
6W
15
20
30
40
50
60
70
80
90
100
5
40
12W
35
30 2nd
Stage
25 Refriga20 ration
Capacity
15
10W
8W
6W
4W
2W
10
0W
5
100W
80W
40W
120W
140W
1st Stage Refrigaration Capacity
20
40
60
80
30
K
25
100
120
1st Stage
Refrigeration Capacity
100
60
80
1st Stage Temperature
120
K
140
10W
2nd
Stage
20 Refrigeration
15 Capacity
10
K
8W
6W
4W
2W
0W
0W 20W
5
0
0
40
35W
25W
Typical refrigerating capacity of the cold head COOLPOWER 7/25
2 nd Stage Temperature
2 nd Stage Temperature
Typical refrigerating capacity of the cold head COOLPOWER 140 T
K
20
0
120
K
Temperature
5W
4W
3W
2W
1W
0W
10W
10
0
10
8W
20
0
0
9W
40W 60W
140
80W
100W
120W
140W
1st Stage Refrigeration Capacity
0
1st Stage Temperature
0
20
40
60
80
100
120
K
140
1st Stage Temperature
Typical refrigerating capacity of the cold head COOLPOWER 5/100 T
2 st Stage Temperature
Typical refrigerating capacity of the cold head COOLPOWER 5/100
25
K
20 W
0W
20
17.5 W
25 W
150 W
50 W
75 W
2st Stage
15 W
Refrigeration
12.5 W
Capacity
10 W
7.5 W
5W
2.5 W
0W
15
10
5
0
20
125 W
100 W
1st Stage
Refrigeration Capacity
40
60
80
100
K
120
1st Stage Temperature
Typical refrigerating capacity of the cold head COOLPOWER 10 MD
The refrigerating capacities stated apply to vertical operation with the cold end at the bottom.
Oerlikon Leybold Vacuum Full Line Catalog
07 C12
Cold Heads
A refrigerator (cold head) is a gas
cooling machine which operates on
the basis of a thermodynamic cycle to
produce cryogenic temperatures
(T ⱕ 120 K).
Refrigerators operating according to
the Gifford/McMahon principle have
succeeded over other methods of
cooling cryopumps and cryostats. It is
thus employed exclusively by Oerlikon
Leybold Vacuum.
In order to account for individual requirements from customers, Oerlikon
Leybold Vacuum offers customized
cryostats as well.
Advantages by Design
- No space problems since cold head
and compressor unit can be installed and operated apart
- Installation of the cold head basically in any orientation
- High refrigerating capacity from a
small volume
- Easy process control and temperature control via a computer
- high temperature superconductors
- superconductors and semiconductors
Typical Applications
- Cooling of cryopanels in cryopumps
thereby producing high or ultra high
vacuum
- infrared and gamma detectors
- Calibration of sensors
13
Advantages to the User
- Very simple to operate
- samples for spectroscopic analysis in the areas of solid state
and surface physics
- Long periods of operation without
maintenance
1
- No liquid helium and no liquid nitrogen are required
- Cooling of samples and detectors;
especially for cooling of
- High reliability
Gifford/McMahonRefrigerators
- Low temperatures on a single key
press
- Cooling of superconducting magnets; in magnetic resonance tomographs, for example
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
Electrical connection and current
lead-through for cold head motor
Helium high pressure connection
Helium low pressure connection
Cylinder, 1st stage
Displacement piston, 1st stage
Regenerator, 1st stage
Expansion volume, 1st stage
1st (refrigerator) stage (copper flange)
Cylinder, 2nd stage
Displacement piston, 2nd stage
Refrigerator, 2nd stage
Expansion volume, 2nd stage
2nd (refrigerator) stage (copper flange)
Vapor pressure measurement chamber
Control piston
Control volume
Control disc
Control valve
Cold head motor
12
11
10
9
8
7
6
5
4
3
2
1
14
15
16
17
18
19
Dual-stage Gifford/McMahon cold head (schematic diagram)
C12 08
Oerlikon Leybold Vacuum Full Line Catalog
Cold Heads from the
COOLPOWER Range
Pneumatically driven
Cold Heads
Advantages Through High
Reliability
The standard range of single-stage
and two-stage cold heads matches a
wide range of applications.
Advantages
As to reliability, Oerlikon Leybold
Vacuum cold heads are top performers.
Oerlikon Leybold Vacuum is offering
refrigerators with usable refrigerating
powers of 140 W at 80 K
(COOLPOWER 140 T, single-stage)
and down to 3.5 W at 10 K
(COOLPOWER 5/100 T; dual-stage).
The cold heads basically consist of
three subassemblies:
- Drive and control unit for the displacer
- Displacer
- First stage of the cold head (and
second stage in the case of twostage cold heads).
W
200
100
7/25
50
0
0
50 100 150 200 250 300 K
T1
Refrigerating capacity as a function of temperature; operation in connection with the recommended compressor unit at 50 Hz; measured
under standard acceptance conditions:
Refrigerating capacity Q1 of the first stage as
a function of temperature T1 of the first stage
(2nd stage: Q2 = 0)
.
.
W
30
Advantages
In the case of the mechanically driven
Oerlikon Leybold Vacuum cold heads,
the displacer is moved through the socalled “Scotch yoke” directly by the
drive motor. This elaborate mechanism
allows the gas flow and the movement
of the displacer to be precisely controlled through which it is possible to attain
with two-stage cold heads especially
high refrigerating capacities in the
range of lowest temperatures (refrigerators of the COOLPOWER 10 MD line).
7/25
25
2
The leading manufacturers of nuclear
spin tomographs have therefore
decided to use Oerlikon Leybold
Vacuum cold heads to cool the superconducting magnets.
Mechanically driven Cold
Heads
Q1
.
Q
- Easy and quick maintenance
All Oerlikon Leybold Vacuum cryopumps from the COOLVAC range
are equipped with pneumatically driven Oerlikon Leybold Vacuum cold
heads.
Owing to the simple design of the
built-in cold heads, maintenance is
easy. Maintenance can be performed
in place without detaching the cryopump from the vacuum chamber.
Especially high reliability is required for
medical instrumentation, specifically in
connection with nuclear spin tomographs. In this application cold heads are
used to cool superconducting magnets
and they are thus exposed to strong
magnetic fields.
5/100
150
.
- Simple Design
The pneumatic drive system for the
displacer of these cold heads from
Oerlikon Leybold Vacuum consists
of only two mechanically moving
components: the rotating control
valve and the synchronous motor
driving the control valve.
20
5/100
15
10
5
0
0
50 100 150 200 250 300 K
T2
.
Refrigerating capacity Q2 of the second stage as
a function of temperature T2, of the second
stage (1st stage: T1 = 80 K = constant).
Standard acceptance conditions:
Cold head in a vacuum, 2nd cold stage thermally shielded by a radiation shield (high-gloss
nickel-plated) attached to the 1st stage, thermal
loading Q simulated by electrical heating.
.
Oerlikon Leybold Vacuum Full Line Catalog
09 C12
Refrigerator Cryostats
(Basic Units)
Advantages to the User
- Can be installed basically in any
orientation thereby offering a high
degree of flexibility in experimental
arrangements
- Can be set to any temperature
within 6.5 and 320 K
- High refrigerating capacity, constant
temperatures
- No liquid refrigerants are required
- Very simple to operate
Typical Applications
Especially in connection with:
- Cooling of
- Spectroscopic investigations in the
infrared, visible and ultraviolet spectral ranges
- high temperature superconductors
- Matrix spectroscopy
- superconductors and semiconductors
- Moessbauer spectroscopy
- infrared and gamma detectors
- Magneto-optic experiments
- Measurement of electric and thermal transport quantities, as a function of the temperature, such as
- electric and thermal conductance
- electromotive force
- Temperature control without problems through standardized control
and connecting components
- Possible high throughput of
samples due to short cooldown and
warming-up periods
C12 10
Oerlikon Leybold Vacuum Full Line Catalog
Compressor Units
COOLPAK 2000 to 6000 compressors
are available for single operation of the
remaining cold heads from the
COOLPOWER line as well as for multiple operation of cryopumps and
cryostats.
The period during which no maintenance will be required on the Oerlikon
Leybold Vacuum compressor units
depends on the service life of the
adsorber. If the values for the ambient
temperature and the cooling water
entry temperature remain within the
specified range, Oerlikon Leybold
Vacuum guarantees a service life for
the adsorber – and thus a period
during which no maintenance will be
required – of 18 000 operating hours.
The possibilities for single and multiple operation of refrigerator cryopumps are given in the following table:
For the operation of
Compressor unit
Cold head
Cryopumps
COOLPAK 2000/2200
1 x COOLPOWER 7/25
1 x COOLVAC 800/1500/2000/3000
COOLPAK 2000 (A)/2200 (A)
1 x COOLPOWER 7/25
1 x COOLVAC 800/1500/2000/3000
2 x COOLPOWER 7/25
2 x COOLPOWER 5/100 1)
2 x COOLVAC 800/1500/2000/3000
2 x COOLVAC 5000 1)
COOLPAK 6000/6200
1 x COOLPOWER 140 T
1 x COOLPOWER 5/100
3 x COOLVAC 800/1500/2000
2 x COOLVAC 3000 (5000 1))
1 x COOLVAC 5000/10000
COOLPAK 6000 MD/6200 MD
1 x COOLPOWER 10 MD
COOLPAK 6000 D
up to
1)
at reduced power
UL Approval
The Oerlikon Leybold Vacuum refrigerators in this catalog (consisting of
compressor unit COOLPAK
(4000/4200, 6000/6200, flexlines FL
and the cold head COOLPOWER 2)
meet – as complete systems – the
requirements of the Underwriter
Laboratories (UL) as Recognised
Components (Urus) as well as the
approval cUR performed through the
Underwriter Laboratories for the
Canadian Standards Association.
2)
Oerlikon Leybold Vacuum refrigerators
are listed under the UL/cUL reference
number SA 8676. The marks as
shown on the right for the entire
system can only be found on the
name plate of the compressor unit.
®
C
CE Approval
The Oerlikon Leybold Vacuum compressor units RW and COOLPAK meet
the basic requirements regarding
safety and health of the relevant EC
directives. They carry on the name plates of the compressor units the following mark.
US
resp. formerly RGD
Oerlikon Leybold Vacuum Full Line Catalog
11 C12
Products Cryopumps
Standard Cryopumps, BasicLine
COOLVAC 800 BL
Advantages to the User
Advantages to the User
Advantages to the User
- Hydrocarbon-free high vacuum
- Hydrocarbon-free ultra-high vacuum
- Hydrocarbon-free ultra-high vacuum
- High capacity for argon and hydrogen
- High pumping speed for water
vapor, nitrogen and hydrogen
- High pumping speed for water
vapor, nitrogen and hydrogen
Typical Applications
Typical Applications
Typical Applications
- Beam tubes in particle accelerators
- Beam tubes in particle accelerators
- Lamps and tubes manufacture
- General research
- UHV systems
- High pumping speed for water
vapor, argon and hydrogen
- Transfer chambers / Loadlock
- General research
Top turned by 90°
Top turned by 90°
ø180
ø202,5
ø202,5
78,5
22
153,5
188,5
386
389
418
535
13,5°
Top turned by 90°
156
156
191
389
420
420
538
538
13,5°
13,5°
81
81
45°
13,5°
45°
45°
45°
13,5°
13,5°
ø181
ø181
45°
Dimensional drawing for the
COOLVAC 800 BL (160 ISO-K)
C12 12
45°
9°
Dimensional drawing for the
COOLVAC 800 BL (160 CF)
9°
Dimensional for the
COOLVAC 800 BL UHV (160 CF)
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
800 BL (ISO-K)
COOLVAC
800 BL (CF)
800 BL UHV (CF)
High vacuum flange
DN
160 ISO-K
160 CF
160 CF
Fore vacuum flange
DN
25 KF
25 KF
40 CF
Flange for other purposes
DN
16 KF (2x)
16 KF (2x)
16 CF (1x), 40 CF (1x)
welded-in
welded-in
burst disk
mounted on DN 16 CF
2600
640 / 800
1000 / 300
2600
640 / 800
1000 / 300
2600
640 / 800
1000 / 300
Safety valve with DN 40 KF flange
connection for gas exhaust line
Pumping speed
H2O
Ar / N2
H2 / He
l x s-1
l x s-1
l x s-1
Capacity
Ar/N2
H2 at 10-6 mbar
He
bar x l (Torr x l)
bar x l (Torr x l)
bar x l (Torr x l)
300 (225 000)
4.3 (3225)
0.5 (375)
300 (225 000)
4.3 (3225)
0.5 (375)
300 (225 000)
4.3 (3225)
0.5 (375)
Built-in cold head
COOLPOWER
7/25
7/25
7/25
4 (3)
2 (1.5)
4 (3)
2 (1.5)
4 (3)
2 (1.5)
150 (112)
150 (112)
150 (112)
50
50
50
mm (in.)
535 (21.06)
538 (21.18)
538 (21.18)
kg (lbs)
12 (26.5)
12 (26.5)
12 (26.5)
built-in to a DN 16 KF
with 4 way
HV current feedthrough
built-in to a DN 16 KF
with 4 way
HV current feedthrough
built-in to a DN 16 CF
with 4 way
with UHV feedthrough
800 BL (ISO-K)
COOLVAC
800 BL (CF)
800 BL UHV (CF)
COOLVAC
Part No.
844160V1006
Part No.
844160V1002
Part No.
844160V9002
Compressor unit
COOLPAK 2000
COOLPAK 2200
COOLPAK 2000 A
COOLPAK 2200 A
840000V2000
840000V2200
840000V2010
840000V2210
840000V2000
840000V2200
840000V2010
840000V2210
840000V2000
840000V2200
840000V2010
840000V2210
Connecting cable
Compressor – cold head, 4.5 m (15.75 ft)
E 400000323
E 400000323
E 400000323
Electric extension cable EL 4.5
893 74
893 74
893 74
Flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
892 87
892 88
892 87
892 88
892 87
892 88
Low temperature measuring instrument
upon request
upon request
upon request
Cable for the silicon diode,
10 m (35.0 ft) long
upon request
upon request
upon request
Max. throughput
Ar/N2
mbar x l x s-1 (Torr x l x s-1)
H2
mbar x l x s-1 (Torr x l x s-1)
Crossover value
mbar x l (Torr x l)
Cool down time to 20 K
Overall height
Weight
min
Silicon diode for temperature measurements
at second stage of the cold head
Ordering Information
Oerlikon Leybold Vacuum Full Line Catalog
13 C12
Cryopumps with
Fully Automatic Control, ClassicLine
COOLVAC 800 CL
COOLVAC 1.500 CL
COOLVAC 1.500 CL
Advantages to the User
Advantages to the User
- Hydrocarbon-free high vacuum
- Hydrocarbon-free high vacuum
- High capacity for argon and hydrogen
- High capacity for argon and hydrogen
- High crossover value
- High crossover value
- Simple operation
- Simple operation
- Trouble-free integration into complex systems
- Trouble-free integration into complex systems
- Fully automatic regeneration through Cryo Compact
Control
- Fully automatic regeneration through Cryo Compact
Control
- Easy servicing
- Easy servicing
Typical Applications
Typical Applications
- Evaporators
- Evaporators
- Sputtering systems
- Sputtering systems
- Ion implanters
- Ion implanters
- Optical coating systems
- Optical coating systems
- Metallization systems
- Metallization systems
Ø 180
DN 160 ISO-K
Ø 240
DN 40 KF
153
257
DN 16 KF
143
DN 25 KF
320
386
418
535
549
Dimensional drawing for the COOLVAC 800 CL (DN 160 ISO-K)
C12 14
Dimensional drawing for the COOLVAC 1.500 CL (DN 200 ISO-K)
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLVAC
800 CL
1.500 CL
High vacuum (HV) flange
DN
160 ISO-K / 160 CF
200 ISO-K / 200 CF / 6" ANSI
Fore vacuum flange
DN
25 KF
25 KF
Flange for connection a gauge head
DN
16 KF
16 KF
Flange for the electrical connection
DN
16 KF
16 KF
Safety valve with flange connection
for gas exhaust line
DN
40 KF
40 KF
4-way current feedthrough for
Si diode on a flange
DN
16 KF
16 KF
160
42
90
42
160
42
90
42
PT 100
Si diode
PT 100
Si diode
7/25
7/25
15 (33.1)
25 (55.2)
50
60
210 (157)
Heaters
1st stage
W
V AC
W
V AC
2nd stage
Temperature sensor
1st stage
2nd stage
Built-in cold head
COOLPOWER
Weight
kg (lbs)
Cooldown time to T2 = 20 K
min
Crossover value
mbar x l (Torr x l)
150 (112)
Pumping speed
H2O
Ar / N2
H2
l x s-1
l x s-1
l x s-1
2600
4600
640 / 800
1000
1200 / 1500
2500
Capacity
Ar/N2
H2 at 10-6 mbar
bar x l
bar x l
300
4.5
1000
12.0
4 (3)
2 (1.5)
12 (9)
6 (4.5)
1/2"
1/2"
Max. throughput
mbar x l x s-1 (Torr x l x s-1)
Ar/N2
H2O
mbar x l x s-1 (Torr x l x s-1)
Helium connections
(Self-sealing couplings:
outside thread, type 5400-S2-8)
Oerlikon Leybold Vacuum Full Line Catalog
DN
15 C12
Ordering Information
COOLVAC 800 CL
Single Operation
Europe
COOLVAC 800 CL
DN 160 CF
DN 160 ISO-K
USA/Japan
Dual operation
Europe
Part No.
844160V0002
844160V0006
Europe
Multiple Operation
USA/Japan
Part No.
844160V0002 (2x)
844160V0006 (2x)
Europe
USA/Japan
Part No.
844160V0002 (3x)
844160V0006 (3x)
Electronics and Cables
System controller SC
844 230
844 230
844 230
844 230
844 230
Power supply PS (50/60 Hz)
230 V, 1 ph. (switchable to 115 V)
200 V, 3 ph. (switchable to 400 V)
844 135
–
844 135
–
–
844 235
–
844 235
–
844 235
Network communication cable –
System controller to the pump(s)
10 m (35.0 ft)
20 m (70.0 ft)
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
Network PM cable for the link between
the pumps
03 m (10.5 ft)
10 m (35.0 ft)
–
–
844 256
844 258
844 256
844 258
844 256
844 258
844 256 (2x)
844 258 (2x)
Power supply cable from power supply
to pump
10 m (35.0 ft)
20 m (70.0 ft)
–
–
–
–
844 251 (2x)
844 252 (2x)
844 251 (2x)
844 252 (2x)
844 251 (3x)
844 252 (3x)
Remote control cable CP, 1 m (3.5 ft)
–
–
844 265
844 265
844 265
Cable compressor – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 129
844 139
844 129
844 139
–
–
–
–
–
–
Cable system controller – Power supply
01 m (3.5 ft)
844 141
844 141
–
–
–
Cable pump module PM – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 128
844 138
844 128 (2x)
844 138 (2x)
–
–
–
–
–
–
E 400000323
E 400000323
(2x)
–
–
–
893 74
893 74 (2x)
–
–
–
–
–
–
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
–
840000V6200
–
840000V6200
–
Connecting cable
compressor – pump, 4.5 m (15.75 ft)
Electric extension cable EL 4.5
Compressors and Flexlines
Compressor
CP 2000
CP 2000 A
CP 2200
CP 2200 A
CP 6000 D
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
–
–
840000V2000
840000V2010
–
–
–
–
–
840000V2200
840000V2210
–
–
–
892 46
–
E 840000133
1)
–
–
1)
1)
1)
1)
892 87
892 88
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (3x)
892 88 (3x)
–
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
Gas manifold (1 piece each)
GD 2
GD 4
–
–
–
–
–
–
–
–
–
840 253 (2x) 840 253 (2x) 840 253 (2x)
–
–
–
–
–
840 254 (2x)
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”.
1)
see Ordering Information for the compressor units COOLPAK
C12 16
Oerlikon Leybold Vacuum Full Line Catalog
COOLVAC 1.500 CL
Ordering Information
Single Operation
Europe
COOLVAC 1.500 CL
DN 200 CF
DN 6" ANSI
DN 200 ISO-K
USA/Japan
Dual operation
Europe
Part No.
844200V0002
844200V0004
844200V0006
Europe
Multiple Operation
USA/Japan
Part No.
844200V0002 (2x)
844200V0004 (2x)
844200V0006 (2x)
Europe
USA/Japan
Part No.
844200V0002 (3x)
844200V0004 (3x)
844200V0006 (3x)
Electronics and Cables
System controller SC
844 230
844 230
844 230
844 230
844 230
Power supply PS (50/60 Hz)
230 V, 1 ph. (switchable to 115 V)
200 V, 3 ph. (switchable to 400 V)
844 135
–
844 135
–
–
844 235
–
844 235
–
844 235
Network communication cable –
System controller to the pump(s)
10 m (35.0 ft)
20 m (70.0 ft)
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
Network PM cable for the link between
the pumps
03 m (10.5 ft)
10 m (35.0 ft)
–
–
844 256
844 258
844 256
844 258
844 256
844 258
844 256 (2x)
844 258 (2x)
Power supply cable from power supply
to pump
10 m (35.0 ft)
20 m (70.0 ft)
–
–
–
–
Remote control cable CP, 1 m (3.5 ft)
–
–
844 265
844 265
844 265
Cable compressor – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 129
844 139
844 129
844 139
–
–
–
–
–
–
Cable system controller – Power supply
01 m (3.5 ft)
844 141
844 141
–
–
–
Cable pump module PM – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 128
844 138
844 128 (2x)
844 138 (2x)
–
–
–
–
–
–
E 400000323
E 400000323
(2x)
–
–
–
893 74 (2x)
–
–
–
–
–
–
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
–
840000V6200
–
840000V6200
–
Connecting cable
compressor – pump, 4.5 m (15.75 ft)
893 74
Electric extension cable EL 4.5
844 251 (2x) 844 251 (2x)
844 252 (2x) 844 252 (2x)
844 251 (3x)
844 252 (3x)
Compressors and Flexlines
Compressor
CP 2000
CP 2000 A
CP 2200
CP 2200 A
CP 6000 D
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
–
–
840000V2000
840000V2010
–
–
–
–
–
840000V2200
840000V2210
–
–
–
892 46
–
E 840000133
1)
–
–
1)
1)
1)
1)
892 87
892 88
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (3x)
892 88 (3x)
–
Power supply cable for compressor
Set of FLEXLINES
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
Gas manifold (1 piece each)
GD 2
GD 4
–
–
–
–
–
–
–
–
–
840 253 (2x) 840 253 (2x) 840 253 (2x)
–
–
–
–
–
840 254 (2x)
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”.
1)
see Ordering Information for the compressor units COOLPAK
Oerlikon Leybold Vacuum Full Line Catalog
17 C12
COOLVAC 2.000 CL
COOLVAC 3.000 CL
COOLVAC 2.000 CL
COOLVAC 3.000 CL
Advantages to the User
Advantages to the User
- Hydrocarbon-free high vacuum
- Hydrocarbon-free high vacuum
- High capacity for argon and hydrogen
- High capacity for argon and hydrogen
- High crossover value
- High crossover value
- Simple operation
- Simple operation
- Trouble-free integration into complex systems
- Trouble-free integration into complex systems
- Fully automatic regeneration through Cryo Compact
Control
- Fully automatic regeneration through Cryo Compact
Control
- Easy servicing
- Easy servicing
Typical Applications
Typical Applications
- Evaporators
- Evaporators
- Sputtering systems
- Sputtering systems
- Ion implanters
- Ion implanters
- Optical coating systems
- Optical coating systems
- Metallization systems
- Metallization systems
Ø 370 (10" ANSI = Ø 406)
Ø 304
300
345
559
604
Dimensional drawing for the COOLVAC 2.000 CL (DN 250 CF)
C12 18
Dimensional drawing for the COOLVAC 3.000 CL (DN 320 ISO-K / 10" ANSI)
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLVAC
2.000 CL
3.000 CL
High vacuum (HV) flange
DN
250 ISO-K / 250 CF / 8" ANSI
320 ISO-K / 10" ANSI
Fore vacuum flange
DN
25 KF
25 KF
Flange for connection a gauge head
DN
16 KF
16 KF
Flange for the electrical connection
DN
16 CF
16 CF
Safety valve with flange connection
for gas exhaust line
DN
40 KF
40 KF
4-way current feedthrough for
Si diode on a flange
DN
16 KF
16 KF
160
42
90
42
160
42
90
42
PT 100
Si diode
PT 100
Si diode
7/25
7/25
25 (55.2)
35 (77.3)
70
80
250 (187)
500 (375)
Heaters
1st stage
W
V AC
W
V AC
2nd stage
Temperature sensor
1st stage
2nd stage
Built-in cold head
COOLPOWER
Weight
kg (lbs)
Cooldown time to T2 = 20 K
min
Crossover value
mbar x l (Torr x l)
Pumping speed
H2O
Ar / N2
H2
l x s-1
l x s-1
l x s-1
7000
1600 / 2100
3200
10500
2500 / 3000
6000
Capacity
Ar/N2
H2 at 10-6 mbar
bar x l
bar x l
1600
15
2500
28
Max. throughput
mbar x l x s-1 (Torr x l x s-1)
Ar/N2
H2O
mbar x l x s-1 (Torr x l x s-1)
12 (9)
6 (4.5)
15 (11.2)
10 (7.5)
1/2"
1/2"
Helium connections
(Self-sealing couplings:
outside thread, type 5400-S2-8)
Oerlikon Leybold Vacuum Full Line Catalog
DN
19 C12
COOLVAC 2.000 CL
Ordering Information
Single Operation
Europe
COOLVAC 2.000 CL
DN 250 CF
DN 8" ANSI
DN 250 ISO-K
USA/Japan
Dual operation
Europe
Part No.
844250V0002
844250V0004
844250V0006
Europe
Multiple Operation
USA/Japan
Part No.
844250V0002 (2x)
844250V0004 (2x)
844250V0006 (2x)
Europe
USA/Japan
Part No.
844250V0002 (3x)
844250V0004 (3x)
844250V0006 (3x)
Electronics and Cables
System controller SC
844 230
844 230
844 230
844 230
844 230
Power supply PS (50/60 Hz)
230 V, 1 ph. (switchable to 115 V)
200 V, 3 ph. (switchable to 400 V)
844 135
–
844 135
–
–
844 235
–
844 235
–
844 235
Network communication cable –
System controller to the pump(s)
10 m (35.0 ft)
20 m (70.0 ft)
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
Network PM cable for the link between
the pumps
03 m (10.5 ft)
10 m (35.0 ft)
–
–
844 256
844 258
844 256
844 258
844 256
844 258
844 256 (2x)
844 258 (2x)
Power supply cable from power supply
to pump
10 m (35.0 ft)
20 m (70.0 ft)
–
–
–
–
Remote control cable CP, 1 m (3.5 ft)
844 251 (2x) 844 251 (2x)
844 252 (2x) 844 252 (2x)
844 251 (3x)
844 252 (3x)
–
–
844 265
844 265
844 265
Cable compressor – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 129
844 139
844 129
844 139
–
–
–
–
–
–
Cable System Controller – Power Supply
01 m (3.5 ft)
844 141
844 141
–
–
–
Cable pump module PM – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 128
844 138
844 128 (2x)
844 138 (2x)
–
–
–
–
–
–
E 400000323
E 400000323
(2x)
–
–
–
893 74
893 74 (2x)
–
–
–
–
–
–
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
–
840000V6200
–
840000V6200
–
Connecting cable
compressor – pump, 4.5 m (15.75 ft)
Electric extension cable EL 4.5
Compressors and Flexlines
Compressor
CP 2000
CP 2000 A
CP 2200
CP 2200 A
CP 6000 D
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
–
–
840000V2000
840000V2010
–
–
–
–
–
840000V2200
840000V2210
–
–
–
892 46
–
E 840000133
1)
–
–
1)
1)
1)
1)
892 87
892 88
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (3x)
892 88 (3x)
–
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
Gas manifold (1 piece each)
GD 2
GD 4
–
–
–
–
–
–
–
–
–
840 253 (2x) 840 253 (2x) 840 253 (2x)
–
–
–
–
–
840 254 (2x)
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”.
1)
see Ordering Information for the compressor units COOLPAK
C12 20
Oerlikon Leybold Vacuum Full Line Catalog
COOLVAC 3.000 CL
Ordering Information
Single operation
Europe
COOLVAC 3.000 CL
DN 10" ANSI
DN 320 ISO-K
Dual operation
USA/Japan
Europe
Part No.
844320V0004
844320V0006
Europe
USA/Japan
Part No.
844320V0004 (2x)
844320V0006 (2x)
Electronics and Cables
System controller SC
844 230
844 230
844 230
844 230
844 230
Power supply PS (50/60 Hz)
230 V, 1 ph. (switchable to 115 V)
200 V, 3 ph. (switchable to 400 V)
844 135
–
844 135
–
844 135
–
–
844 235
–
844 235
Network communication cable –
System controller to the pump(s)
10 m (35.0 ft)
20 m (70.0 ft)
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
Network PM cable for the link between
the pumps
03 m (10.5 ft)
10 m (35.0 ft)
–
–
–
–
844 256
844 258
844 256
844 258
844 256
844 258
Power supply cable from power supply
to pump
10 m (35.0 ft)
20 m (70.0 ft)
–
–
–
–
–
–
Remote control cable CP, 1 m (3.5 ft)
844 251 (2x) 844 251 (2x)
844 252 (2x) 844 252 (2x)
–
–
–
844 265
844 265
Cable compressor – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 129
844 139
844 129
844 139
844 129
844 139
–
–
–
–
Cable system controller – Power supply
01 m (3.5 ft)
844 141
844 141
844 141
–
–
Cable pump module PM – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844128
844138
844128
844138
844128 (2x)
844138 (2x)
–
–
–
–
E 400000323
E 400000323
E 400000323
(2x)
–
–
Connecting cable
compressor – pump, 4.5 m (15.75 ft)
Electric extension cable EL 4.5
893 74
893 74 (2x)
–
–
–
840000V2000
840000V2010
–
–
–
–
–
–
–
840000V2200
840000V2210
–
–
–
–
892 46
–
–
–
–
–
–
840000V6000
–
–
–
–
–
–
–
840000V6200
–
–
Compressors and Flexlines
Compressor
CP 2000
CP 2000 A
CP 2200
CP 2200 A
CP 6000 D
CP 6000
CP 6200
Accessories
Water cooling discharge throttle
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
Gas manifold (1 piece each)
GD 2
–
–
–
1)
892 87
892 88
892 87 (2x)
892 88 (2x)
–
–
E 840000133
1)
–
–
1)
1)
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
892 87 (2x)
892 88 (2x)
840 253 (2x) 840 253 (2x) 840 253 (2x)
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”.
1)
see Ordering Information for the compressor units COOLPAK
Oerlikon Leybold Vacuum Full Line Catalog
21 C12
COOLVAC 5.000 CL
COOLVAC 10.000 CL
COOLVAC 5.000 CL
COOLVAC 10.000 CL
Advantages to the User
Advantages to the User
- Hydrocarbon-free high vacuum
- Hydrocarbon-free high vacuum
- High capacity for argon and hydrogen
- High capacity for argon and hydrogen
- High crossover value
- High crossover value
- Simple operation
- Simple operation
- Trouble-free integration into complex systems
- Trouble-free integration into complex systems
- Fully automatic regeneration through Cryo Compact
Control
- Fully automatic regeneration through Cryo Compact
Control
- Easy servicing
- Easy servicing
Typical Applications
Typical Applications
- Evaporators
- Evaporators
- Ion implanters
- Space simulation chambers
- Electron beam welding systems
- Electron beam welding systems
- Optical coating systems
- Optical coating systems
- Metallization systems
- Metallization systems
Ø 450
Ø 550
DN 400 ISO-K
640
704
Ø 105
Dimensional drawing for the COOLVAC 5.000 CL
C12 22
DN 500 ISO-K
Ø 105
Dimensional drawing for the COOLVAC 10.000 CL
Oerlikon Leybold Vacuum Full Line Catalog
COOLVAC
Technical Data
5.000 CL
10.000 CL
High vacuum (HV) flange
DN
400 ISO-K
500 ISO-K
Fore vacuum flange
DN
40 KF
40 KF
Flange for connection of a gauge head
DN
16 KF
16 KF
Flange for the electrical connection
DN
40 KF
40 KF
Safety valve with flange connection
for gas exhaust line
DN
40 KF
40 KF
4-way current feedthrough for
Si diode on a flange
DN
16 KF
16 KF
160
42
90
42
160
42
90
42
PT 100
Si diode
PT 100
Si diode
5/100
5/100
42 (92.7)
50 (110.4)
100
150
700 (525)
800 (600)
Heaters
1st stage
W
V AC
W
V AC
2nd stage
Temperature sensor
1st stage
2nd stage
Built-in cold head
COOLPOWER
Weight
kg (lbs)
Cooldown time to T2 = 20 K
min
Crossover value
mbar x l (Torr x l)
Pumping speed
H2O
Ar / N2
H2
l x s-1
l x s-1
l x s-1
18 000
4 000 / 5 200
6 200
30 000
8 400 / 10 000
12 000
Capacity
Ar/N2
H2 at 10-6 mbar
bar x l
bar x l
3 000
32
5 500
45
10 (7.5)
7 (5.3)
10 (7.5)
7 (5.3)
1/2"
1/2"
Max. throughput
mbar x l x s-1 (Torr x l x s-1)
Ar/N2
H2
mbar x l x s-1 (Torr x l x s-1)
Helium connection
(Self-sealing couplings:
outside thread, types 5400-S2-8
Oerlikon Leybold Vacuum Full Line Catalog
DN
23 C12
Ordering Information
COOLVAC 5.000 CL
Europe
USA/Japan
Part No.
844 410
–
Part No.
844 410
–
Part No.
844 230
Power supply PS
230 V, 1 ph.
COOLVAC 10.000 CL
Europe
USA/Japan
–
Part No.
844 610V0006
–
Part No.
844 610V0006
Part No.
844 230
Part No.
844 230
Part No.
844 230
844 135
844 135
844 135
844 135
Network communication cable –
System controller to the pump(s)
10 m (35.0 ft)
20 m (70.0 ft)
844 261
844 262
844 261
844 262
844 261
844 262
844 261
844 262
Cable compressor – Power supply PS
10 m (35.0 ft)
20 m (70.0 ft)
844 129
844 139
844 129
844 139
844 129
844 139
844 129
844 139
Cable system controller – Power supply
01 m (3.5 ft)
844 141
844 141
844 141
844 141
Cable pump module PM – Power supply
10 m (35.0 ft)
20 m (70.0 ft)
844 128
844 138
844 128
P844 138
844 128
844 138
844 128
844 138
Part No.
840000V6000
–
Part No.
–
840000V6200
Part No.
840000V6000
–
Part No.
–
840000V6200
see Ordering
see Ordering
see Ordering
see Ordering
Information
Information
Information
Information
for the Compressor
for the Compressor
for the Compressor
for the Compressor
Units COOLPAK
Units COOLPAK
Units COOLPAK
Units COOLPAK
892 87
892 88
893 74
892 87
892 88
893 74
892 87
892 88
893 74
892 87
892 88
893 74
COOLVAC
05.000 CL, DN 400 ISO-K
10.000 CL, DN 500 ISO-K
Electronics and Cables
System controller SC
Compressors and Flexlines
Compressor
CP 6000
CP 6200
Power supply cable for compressor
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
The arrangement of the components is shown in the section “Accessories” under the heading “COOLVAC ClassicLine, System Components”
C12 24
Oerlikon Leybold Vacuum Full Line Catalog
Notes
Oerlikon Leybold Vacuum Full Line Catalog
25 C12
COOLVAC
18.000 CL
COOLVAC
30.000
COOLVAC
60.000
COOLVAC 60.000 LN2 cooled
upon request
COOLVAC 18.000 CL with special flanges
COOLVAC 30.000 with special flanges
COOLVAC 60.000 with special flanges
Advantages to the User
Advantages to the User
Advantages to the User
- Hydrocarbon-free high vacuum
- Hydrocarbon-free high vacuum
- Hydrocarbon-free high vacuum
- High pumping speed for water
vapor and nitrogen
- High pumping speed for water
vapor and nitrogen
- High pumping speed for water
vapor and nitrogen
- Fast, safe and efficient regeneration
with the electric regeneration
system
- Fast, safe and efficient regeneration
with the electric regeneration
system
- Fast, safe and efficient regeneration
with the electric regeneration
system
- Simple operation
- Simple operation
- Simple operation
Typical Applications
Typical Applications
Typical Applications
- Space simulation chambers
- Space simulation chambers
- Space simulation chambers
- Evaporators
- Evaporators
- Evaporators
- Electron beam welding systems
- Electron beam welding systems
- Electron beam welding systems
- Optical coating systems
- Optical coating systems
- Optical coating systems
- Metallization systems
- Metallization systems
- Metallization systems
Ø 1060 (35" ANSI)
829
754
110
Ø1
37
0
5,625˚
11,25˚
Ø18
Ø1270
Ø1400
1550
Ø1305
714
,5˚
112
603
572
403
787
886
721
10
30 ϒ
200
DN
30
689
658
Ø1310
Flange DN 16 KF
608
400
130
125
Dimensional drawing for the COOLVAC 18.000 CL
C12 26
Dimensional drawing for the COOLVAC 30.000
Flange
DN 63 ISO-K
Dimensional drawing for the COOLVAC 60.000
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLVAC 18.000 CL COOLVAC 30.000
COOLVAC 60.000
High vacuum flange
DN
630 ISO-F
35” ANSI
1250 ISO-F
Fore vacuum flange
DN
63 ISO-K
63 ISO-K
63 ISO-K
Flange with current feedthrough
for silicon diode
DN
25 KF (2x)
16 KF (2x)
16 KF (2x)
Flange for other purposes
DN
40 KF
40 KF
40 KF
Safety valve with DN 40 KF flange
connection for gas exhaust line
(opening pressure)
DN
mbar
40 KF
1100
40 KF
1100
40 KF
1100
Pumping speed
H2O
Ar / N2
H2 / He
l x s-1
l x s-1
l x s-1
46 000
13 500 / 18 000
14 000 / 4 000
93 000
25 000 / 30 000
30 000 / 7 000
180 000
47 000 / 57 000
60 000 / 15 000
Capacity
Ar/N2
H2 at 10-6 mbar
H2O
bar x l
bar x l
bar x l
5 000
65
945
6500
100
9000
150
5/100 (2x)
5/100 (2x) and 140T (1x)
5/100 (2x) and 140T (2x)
Max. throughput
Ar/N2
mbar x l x s-1 (Torr x l x s-1)
H2
mbar x l x s-1 (Torr x l x s-1)
14
7
14
7
25
12
Crossover value at 20 K
mbar x l (Torr x l)
850
1200
1000
Cool down time to 20 K
min
180
260
330
Overall height
min
606
see drawing
see drawing
kg (lbs)
65
245
450
Silicon diode for temperature measurements
at the second stage of the cold head
built-in(2x)
built-in(2x)
built-in(2x)
Regeneration heaters at the first
and second stage of the cold head
built-in (2x)
–
–
Built-in cold head
COOLPOWER
Weight
Ordering Information
Cryopump
COOLVAC 18.000 CL, 630 ISO-F
COOLVAC 30.000, 35" ANSI
COOLVAC 60.000, 1250 ISO-F
Compressor unit
COOLPAK 6000
COOLPAK 6200
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Compact controller and cable kit
Oerlikon Leybold Vacuum Full Line Catalog
COOLVAC 18.000 CL COOLVAC 30.000
COOLVAC 60.000
Part No. 844630V0006
–
–
–
upon request
–
–
–
upon request
upon request (2x)
upon request (2x)
upon request (3x)
upon request (3x)
upon request (4x)
upon request (4x)
see Ordering Information for the compressor units COOLPAK
Part No. 892 87 (2x)
Part No. 892 88 (2x)
Part No. 893 74 (2x)
Part No. 892 87 (3x)
Part No. 892 88 (3x)
Part No. 893 74 (3x)
Part No. 892 87 (4x)
Part No. 892 88 (4x)
Part No. 893 74 (4x)
upon request
upon request
upon request
27 C12
Products Cryogenics
Cold Heads, Pneumatically Driven
Single Stage Cold Head COOLPOWER 140 T
Single stage cold head COOLPOWER 140 T
Advantages to the User
Typical Applications
- For installation mostly in any
orientation
- Cooling of cryopanels in cryopumps
and thus generation of high vacuum
and ultra-high vacuum pressuresCooling of samples and detectors;
especially for cooling of
- High refrigerating capacity
- No liquid refrigerants are required
- Very simple to operate
- samples for spectroscopic
investigations in solid state and
surface physics
- high temperature superconductor
and semiconductor conditions
- infrared and gamma detectors
- Short cooldown time
- Calibration of sensors
Ø 115
Ø 105
6
M4
(8x)
148.5
lenght
4.5 m
12
346
middle of clamp
DN 160 ISO-K
10°
Ø 105
approx. 121
Dimensional drawing for the COOLPOWER 140 T
C12 28
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLPOWER 140 T
Refrigeration capacity at 50/60 Hz 1)
at 80 K, approx.
at 20 K, approx.
W
W
140
20
Lowest attainable temperature 1)
K
ⱕ 15
min
ⱕ 55
°C
+10 to +40
bar
16
Cooldown time down to 20 K
Permissible ambient temperature
He filling pressure at room temperature
He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight
1/2" (#8 2) )
1/2" (#8)
kg (lbs)
Length of the electrical connection line
to the compressor unit
m (ft)
Ordering Information
Cold head COOLPOWER 140 T
with DN 160 ISO-K
Other flanges
12 (26.5)
4.5 (15.75)
COOLPOWER 140 T
Part No. 842 030
upon request
Accessories
Compressor unit
(for operation of one cold head)
COOLPAK 6000
400 V/50 Hz; 470 V/60 Hz
COOLPAK 6200
200 V/50 Hz; 200 V, 230 V/60 Hz
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Part No. 840000V6000
Part No. 840000V6200
see Ordering Information for the compressor units COOLPAK
Part No. 892 87
Part No. 892 88
Part No. 893 74
Options
Temperature measurement
Silicon diode
Low temperature measuring instrument
Measuring cable
1)
2)
Part No. 890 89
upon request
upon request
The refrigerating capacities and temperatures stated apply only to vertical operation with the cold end at the bottom
Series 8 from Aeroquip
Oerlikon Leybold Vacuum Full Line Catalog
29 C12
Dual Stage Cold Heads
COOLPOWER 7/25, 5/100 and 5/100 T
Dual stage cold head COOLPOWER 7/25
Dual stage cold heads COOLPOWER 5/100 and
COOLPOWER 5/100 T
Advantages to the User
Typical Applications
- For installation in any orientation
- Cooling of cryopanels in cryopumps
and thus generation of high vacuum
and ultra-high vacuum pressures
- high temperature superconductors
- Cooling of samples and detectors;
especially for cooling of
- infrared and gamma detectors
- High refrigerating capacity
- No liquid refrigerants are required
- Very simple to operate
- Short cooldown time
- samples for spectroscopic investigations in solid state and surface
physics
A
6
32,2
40
30°
6x
6
60
125,5
°
82,1
- Calibration of sensors
- Cooling of accelerator components
in the area of high energy physics
- Cooling of superconducting magnets;
in nuclear magnetic resonance tomographs, for example (only
COOLPOWER 5/100 and 5/100 T)
47,5
ø 47,5
View A
M4
- superconductors and semiconductors
129
27
ø 69
B
View B
18
M4 x 7
92,2
115
3
60
47,5
110
8
°
45
x
80
6
°
45
474,5
ø 87
inside ø 75,5
490
130
129
108,5
19
149
117,5
105
135
135
13,5°
40
13,5°
60
105
127
ca. 12
0
20
128,7
ca. 1
M4
ca. = approx.
Dimensional drawing for the COOLPOWER 7/24
C12 30
Dimensional drawing for the COOLPOWER 5/100
and COOLPOWER 5/100 T
Oerlikon Leybold Vacuum Full Line Catalog
7/25
COOLPOWER
5/100
5/100 T
W
W
W
W
25
7
–
–
100
5
–
–
100
7.5
3.5
35
K
K
ⱕ 35
ⱕ 10
ⱕ 35
ⱕ 10
ⱕ5
6
min
min
min
min
min
min
20
20
–
–
–
–
20
20
–
–
–
–
20
20
35
30
45
40
°C
+5 to +40
+5 to +40
+5 to +40
bar
16
16
16
1/2" (#8 2) )
1/2" (#8)
1/2" (#8 2) )
1/2" (#8)
1/2" (#8 2) )
1/2" (#8)
11 (24.3)
11 (24.3)
11 (24.3)
4.5 (15.75)
4.5 (15.75)
4.5 (15.75)
7/25
COOLPOWER
5/100
5/100 T
Part No.
842 040
–
–
Part No.
–
893 05
–
Part No.
–
–
129 78
Connecting cable
compressor – cold head, 4.5 m (15.75 ft)
E 400000323
included with
the cold head
included with
the cold head
Compressor unit
(for operation of one cold head)
COOLPAK 2000
COOLPAK 2000 A
COOLPAK 2200
COOLPAK 2200 A
COOLPAK 6000
COOLPAK 6200
840000V2000
840000V2010
840000V2200
840000V2210
–
–
–
–
–
–
840000V6000
840000V6200
–
–
–
–
840000V6000
840000V6200
3)
3)
3)
892 87
892 88
893 74
892 87
892 88
893 74
892 87
892 88
893 74
890 89
upon request
upon request
upon request
842 400
842 401
890 89
upon request
upon request
upon request
842 400
842 401
890 89
upon request
upon request
upon request
842 400
842 401
Technical Data
Refrigeration capacity at 50/60 Hz
1st stage at 80 K, approx.
2st stage at 20 K, approx.
2st stage at 10 K, approx.
2st stage at 40 K, approx.
1)
Lowest attainable temperature 1)
1st stage, approx.
2nd stage, approx.
Cooldown time of the
2nd stage to 20 K, approx.
1st stage to 80 K, approx.
2nd stage to 10 K, approx.
1st stage to 40 K, approx.
2nd stage to 6 K, approx.
1st stage to 30 K, approx.
Permissible ambient temperature
He filling pressure at room temperature
He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight
kg (lbs)
Length of the electrical connection line
to the compressor unit
(included with cold head)
m (ft)
Ordering Information
Cold head
COOLPOWER 7/25
COOLPOWER 5/100
COOLPOWER 5/100 T
Accessories
Power supply cable
Set of flexlines
FL 4.5 (1/2", 1/2")
or FL 9.0 (1/2", 1/2")
and EL 4.5 (electric extension cable)
Options
Temperature measurement / control
Silicon diode
Low temperature measuring instrument
Measuring cable
Electrical heaters
Low temperature controller Modell 9700
Measuring cable, 3 m (10.5 ft) long
1)
3)
The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom
see Ordering Information for the compressor units COOLPAK
Oerlikon Leybold Vacuum Full Line Catalog
2)
Series 8 from Aeroquip
31 C12
Cold Heads, Mechanically Driven
Dual Stage Cold Head COOLPOWER 10 MD
COOLPOWER 10 MD - the strongest
10 K GM cooler available on the
market:
- High 2nd. stage cooling capacity
of > 18 W at 20 K
- High 1st. stage cooling capacity of
> 25 W at 40 K and ˜ 110 W at 80 K
Dual Stage Cold Head COOLPOWER 10 MD
Advantages to the User
Typical Applications
- Excellent cooling performance
The COOLPOWER 10 MD is a mechanically driven double-stage Gifford
McMahon (GM) cryo cooler and ideally
suited for
- 18 W at 20 K by press-button
operation
- High reliability
- Design optimized for MTBF
100,000 h
- Long and maintenance-free
operation
- Low vibration due to directly driven
displacer
- No liquid refrigerants are required
- Very simple to operate
- Short cooldown time
- Easy operation
- Plug & Cool - as usual for all
Oerlikon Leybold Vacuum
GM coolers
- Simple variation of motor speed
via the new COOLPAK MD
compressor unit
- Cooling of cryo probes in NMR
spectrometers
- Shield cooling of superconducting
magnets in MRI
- Cooling of cryopanels in special
cryopumps and thus generation of
high vacuum and ultra high vacuum
pressures
- Cooling of larger samples and
devices; especially
- High temperature superconductor
coils, wires and bulk materials
- Recondensation of liquid refrigerants such as H2, Ne
- Samples for spectroscopic investigations in solid state and surface physics
- Infrared and gamma detectors
- Calibration of sensors
C12 32
Oerlikon Leybold Vacuum Full Line Catalog
104
25
98
75
26
Ø 172
30°
22,5°
45
128
(179,3)
Ø 154
51,3
10
M4x6
Ø 120
Ø 190
Ø 8,5
Ø 84
Ø 85,5
Sealing area
for O-rings
Ø 96
56
12
Ø 47,2
364,2
214
Ø 112
Ø 96,5
Ø 38
200
Ø 122
Ø 47,5
62
125
160
12
Ø 56
Dimensional drawing for the COOLPOWER 10 MD
Technical Data
COOLPOWER 10 MD
Refrigeration capacity at 50/60 Hz 1)
1st stage at 80 K, approx.
2st stage at 20 K, approx.
W
W
110
18
Lowest attainable temperature 1)
1st stage, approx.
2nd stage, approx.
K
K
ⱕ 28
ⱕ8
Cooldown time of the
2nd stage to 20 K, approx.
Permissible ambient temperature
He filling pressure at room temperature
min
25
°C
+5 to +40
bar
16
He connections
Self-sealing screwed connections
High pressure connection
Low pressure connection
Weight
1/2" (#8 2))
1/2" (#8)
kg (lbs)
Ordering Information
Cold head COOLPOWER 10 MD
Accessories
1)
2)
20 (44.15)
COOLPOWER 10 MD
Part No. 842 010
see Ordering Information for the compressor unit COOLPAK 6000 MD/6200 MD,
connecting cable and flexline
The refrigerating capacities and temperatures stated apply to vertical operation with the cold end at the bottom
Series 8 from Aeroquip
Oerlikon Leybold Vacuum Full Line Catalog
33 C12
Compressor Units for Pneumatically Driven Cold
Heads and Pumps, Air Cooling
COOLPAK 2000 A/2200 A
Compressor unit COOLPAK 2000 A (2200 A is similar)
Advantages to the User
- High efficiency and increased performance for cryogenic pumps and
refrigerators
- High long-term reliability due to
long-life and highly efficient components and improved oil management
- Very quiet and low vibration operation through the innovative horizontally suspended scroll compressor
- Simple installation and operation
- Global mains voltage compatibility
- Perfect integration within complex
systems due to the 24 V Sub-D
interface
- Simple adsorber replacement,
otherwise maintenance-free
- Small footprint
- Low cost of ownership
Dimensional drawing of the COOLPAK 2000/2200
C12 34
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLPAK
2000 A (50 Hz)
2200 A (60 Hz)
1
1
bar
15
14
°C
+5 to +30
+5 to +30
Mains voltage (single phase)
V
230 ± 10%
208 ± 10%
Operating current
with cooled down cold head
with warmed up cold head
A
A
9.5 to 10.5
12.0
11.5 to 12.5
13.0
Electric power consumption
with cooled down cold head
with warmed up cold head
kW
kW
2.2
2.4
2.3
2.5
24 V DC
24 V DC
Helium connections
self-sealing fittings
high-pressure side (outside thread)
low-pressure side (outside thread)
1/2"
1/2"
1/2"
1/2"
Noise level
(at a distance of 1 m (3.5 ft))
< 55
< 55
mm (in.)
445 x 607 x 400 (17.52 x 23.90 x 15.74)
445 x 607 x 400 (17.52 x 23.90 x 15.74)
kg (lbs)
69 (152.32)
69 (152.32)
Number of electrical connections
for cold heads
Helium system filling pressure
at room temperature
Ambient temperature
Remote control through interface
Dimensions (W x H x D)
dB(A)
Weight
Ordering Information
COOLPAK
2000 A (50 Hz)
2200 A (60 Hz)
Part No. 840000V2010
Part No. 840000V2210
Accessories, optional
19 in. installation kit
Part No. 840 022
Part No. 840 022
RC adapter box
Part No. 840 910
Part No. 840 910
Part No. E 840001973
Part No. E 840001973
Compressor unit
(for operating older cold heads of type
RGD, RGS or
COOLPOWER 20 / 210 / 30 / 510)
Spare parts
Absorber CPS-V8
Oerlikon Leybold Vacuum Full Line Catalog
35 C12
Compressor Units for Pneumatically Driven Cold
Heads and Pumps, Water Cooling
COOLPAK 2000/2200
Compressor unit COOLPAK 2000 (2200 is similar)
Advantages to the User
- High efficiency and increased performance for cryogenic pumps and
refrigerators
- High long-term reliability due to
long-life and highly efficient components and improved oil management
- Very quiet and low vibration operation through the innovative horizontally suspended scroll compressor
- Simple installation and operation
- Global mains voltage compatibility
- Perfect integration within complex
systems due to the 24 V Sub-D
interface
- Simple adsorber replacement,
otherwise maintenance-free
- Small footprint
- Low cost of ownership
Dimensional drawing of the COOLPAK 2000 A/2200 A
C12 36
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLPAK
2000 (50 Hz)
2200 (60 Hz)
1
1
bar
15
14
°C
+5 to +40
+5 to +40
<5
<5
°C
+5 to +25
+5 to +25
Mains voltage (single phase)
V
230 ± 10%
208 ± 10%
Operating current
with cooled down cold head
with warmed up cold head
A
A
9.5 to 10.5
12.0
11.5 to 12.5
13.0
Electric power consumption
with cooled down cold head
with warmed up cold head
kW
kW
2.2
2.4
2.3
2.5
V DC
24
24
1/2"
1/2"
1/2"
1/2"
10
10
< 55
< 55
mm (in.)
445 x 395 x 400 (17.52 x 15.55 x 15.74)
445 x 395 x 400 (17.52 x 15.55 x 15.74)
kg (lbs)
69 (152.32)
69 (152.32)
Number of electrical connections
for cold heads
Helium system filling pressure
at room temperature
Ambient temperature
Cooling water consumption
Cooling water feed temperature
Remote control through interface
Helium connections
self-sealing fittings
high-pressure side (outside thread)
low-pressure side (outside thread)
Water connections
DN
Noise level
(at a distance of 1 m (3.5 ft))
Dimensions (W x H x D)
dB(A)
Weight
Ordering Information
COOLPAK
2000 (50 Hz)
2200 (60 Hz)
Part No. 840000V2000
Part No. 840000V2200
Accessories, optional
19 in. installation kit
Part No. 840 022
Part No. 840 022
RC adapter box
Part No. 840 910
Part No. 840 910
Part No. E 840001973
Part No. E 840001973
Compressor unit
(for operating older cold heads of type
RGD, RGS or
COOLPOWER 20 / 210 / 30 / 510)
Spare parts
Absorber CPS-V8
Oerlikon Leybold Vacuum Full Line Catalog
37 C12
Compressor Units for Pneumatically Driven
Cold Heads and Pumps, Water Cooling
COOLPAK 4000/4200
COOLPAK 6000/6200
Compressor units COOLPAK 4000/4200 (COOLPAK 6000/6200 similar)
Advantages to the User
- Highly effective and even more
powerful when connected with
Oerlikon Leybold Vacuum cryopumps and refrigerators
- Simple installation and operation
- Global power supply compatibility
- Easy integration in complex systems
due to 24 V DC or RS 232 C interfaces
- Excellent long-term reliability owing
to the modular design and the long
life components
- Almost maintenance-free
- Small footprint
- Silent and low vibration operation
through scroll compressors
- Low cost of ownership
36
528
230
152
61
51
448
511
70
146
199
407
440
Dimensional drawing for the COOLPAK 4000/4200 and COOLPAK 6000/6200
C12 38
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
COOLPAK
4000
Number of electrical connections for
cold heads
Helium system filling pressure at
room temperature
bar
4200
6000
6200
50 Hz
60 Hz
50 Hz
60 Hz
50 Hz
60 Hz
50 Hz
60 Hz
1
1
1
1
1
1
1
1
14
13
14
13
15
14
14
13
°C +5 to +40 +5 to +40 +5 to +40 +5 to +40 +5 to +40 +5 to +40 +5 to +40 +5 to +40
Ambient temperature
Cooling-water consumption 1)
l/min
3.5
3.5
3.5
3.5
5.0
5.0
5.0
5.0
°C +5 to +25 +5 to +25 +5 to +25 +5 to +25 +5 to +25 +5 to +25 +5 to +25 +5 to +25
Cooling-water entry temperature
Main voltage (3 phase)
upon delivery
V
alternative setting
V
400
± 10%
–
A
A
6.4 to 7.4
8.5
6.2 to 7.3 14.6 to 16.5 13.8 to 17.0 9.5 to 10.5 9.0 to 10.0 15.5 to 22.0 16.0 to 23.0
8.1
18.3
19.5
13.7
12.0
25.0
25.0
kW
kW
3.8 to 4.5
5.3
4.2 to 5.3
5.8
4.0 to 4.6
5.3
4.4 to 5.3
5.9
6.0 to 6.5
8.2
6.5 to 6.9
8.7
5.5 to 6.2
7.6
5.9 to 6.7
7.8
A)
A)
A)
A)
A)
A)
A)
A)
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
1/2"
B)
B)
B)
B)
B)
B)
B)
B)
Operating currents
with the cold head cool
with the cold head warm
Electrical power consumption
with the cold head cool
with the cold head warm
Remote control via interface
Helium connections
Self-sealing couplings
High pressure connection (outside thread)
Low pressure connection (outside thread)
Water connections
Sound level (at 1 m (3.5 ft) distance)
Dimensions (W x H x D)
Weight
–
470
± 10%
200 2)
+10% -5%
230
± 10%
200
± 10%
230 3)
-10%
230
± 10%
200
± 10%
53
53
53
53
53
53
53
53
C)
C)
C)
C)
C)
C)
C)
C)
kg (lbs)
93 (205)
93 (205)
93 (205)
93 (205)
94 (207)
94 (207)
94 (207)
94 (207)
COOLPAK
Europe
Connection for 2 cold heads
Power supply cable
3.5 m (12.25 ft)
CEE plug, 32 A/6h, 3 pole+N+PE
NEMA plug, L 16-20 P,
20 A/480 V, 3 pole+PE (AWG 12)
NEMA plug, L 15-20 P,
20 A/250 V, 4 pole - PE (AWG 12)
10 m (35.0 ft)
with end splice (AWG 10)
20 m (70.0 ft)
with end splice (AWG 10)
Accessories
Water cooling discharge throttle
Spare parts
Adsorber CACP 4000/6000
At a cooling water entry temperature of 25 °C
COOLPAK 4000 D
24 V DC or RS 232 C
Oerlikon Leybold Vacuum Full Line Catalog
5)
B)
USA/Japan
USA/Japan
6000
Europe
6200
USA/Japan
USA/Japan
Part No.
Part No.
Part No.
892 31
892 33
840000V6000
or
892 36
840000V6200
or
892 37
892 3000 4)
–
892 46 5)
–
893 95
–
–
893 95
–
–
–
893 96
–
–
893 96
–
–
–
840 110
–
–
–
–
–
840 111 6)
–
–
840 111 6)
–
–
840 112 6)
–
–
840 112 6)
E 840000133
E 840000133
E 840000133
893 52
2)
4200
Part No.
Compressor unit
without power supply cable
Connection for 1 cold head
A)
470
± 10%
230 3)
- 10%
200
± 10%
dB(A)
4000
4)
–
mm (in.)
Ordering Information
1)
400
± 10%
–
893 52
893 52
± 10% at 12 bar filling pressure
COOLPAK 6000 D
Hose nozzle DN 12 / G 1/2" outside thread
893 52
3)
6)
C)
893 52
E 840000133
893 52
At 13 bar filling pressure
Also suitable for COOLPAK 4000(D)/6000(D)
440 x 589 x 511 (17.32 x 23.19 x 20.12)
39 C12
Compressor Units for Mechanically Driven
Cold Heads and Pumps, Water Cooling
COOLPAK 6000 MD/6200 MD
Serves the purpose of individually driving the cold heads with mechanically
driven displacers; i.e. COOLPOWER
10 MD, but also older cold heads like
COOLPOWER 150, 130, 4.2 GM,
0.5 WATT and 4.2 ONE WATT.
Compressor unit COOLPAK 6000 MD/6200 MD (similar COOLPAK 4000/4200)
Advantages to the User
- Compact
- Simple to operate
- Can be controlled remotely
- Selectable voltages
- Low noise
- UL approved
- Long maintenance-free period of
operation
- Variable cold head motor speed
36
528
230
152
61
51
448
511
70
146
199
407
440
Dimensional drawing for the COOLPAK 6000 MD/6200 MD
C12 40
Oerlikon Leybold Vacuum Full Line Catalog
COOLPAK
Technical Data
6000 MD
Mains voltage
6200 MD
50 Hz, 400 ± 10%
60 Hz, 460 ± 10%
50 Hz, 200 ± 10%
60 Hz, 200 - 230 ± 10%
For all other Technical Data, see COOLPAK 6000 and 6200
Ordering Information
COOLPAK
6000 MD
Compressor type
400 V/3-ph. 50 Hz or
460 V/3-ph. 60 Hz ± 10%
200 V/3-ph. 50 Hz or
200-230 V/3-ph. 60 Hz ± 10%
6200 MD
Part No.
Part No.
892 42
–
–
892 43
840 210
840 210
840 211
840 211
840 217
840 217
840 218
840 218
840 230
840 230
840 231
840 231
842 110
842 112
842 114
842 110
842 112
842 114
893 95
–
893 96
–
–
840 111 1)
–
840 112 1)
E 840000133
E 840000133
Flexible pressure line (for operating
mechanically driven cold heads)
06 m (21.0 ft) (High-pressure)
FL6 HP-DN 20 (8f/8f)
06 m (21.0 ft) (Low-pressure)
FL6 LP-DN 16 (8f/8f)
09 m (31.5 ft) (High-pressure)
FL9 HP-DN 20 (8f/8f)
09 m (31.5 ft) (Low-pressure)
FL9 LP-DN 16 (8f/8f)
20 m (75.0 ft) (High-pressure)
FL20 HP-DN 16 (8f/8f)
20 m (75.0 ft) (Low-pressure)
FL20 LP-DN 16 (8f/8f)
Connection cable for the cold heads
COOLPOWER 10 MD, 150, 130, 4.2 GM,
0.5 WATT and 4.2 ONE WATT
09.0 m (031.5 ft)
20.0 m (075.0 ft)
30.0 m (105.0 ft)
Power supply cable
3.5 m (12.25 ft)
CEE plug, 32 A/6h, 3 pol +N+PE
NEMA plug, L 16-20 P,
20 A/480 V, 3 pole+PE (AWG 12)
10 m (35.0 ft)
with end splice (AWG 10)
20 m (75.0 ft)
with end splice (AWG 10)
Accessories
Water cooling discharge throttle
1)
Also suitable for COOLPAK 4000(D)/6000(D)
Oerlikon Leybold Vacuum Full Line Catalog
41 C12
Accessories
General Accessories for
Compressor Units COOLPAK
Technical Data
Length
Connections on both sides (inside thread)
High pressure line (HD)
Low pressure line (ND)
1), 2)
Flexlines
FL 4.5 (1/2", 1/2")
FL 9.0 (1/2", 1/2")
4.5 m (15.75 ft)
9.0 m (31.50 ft)
Accessories for Flexlines
1/2"
1/2"
1/2"
1/2"
Adaptor
Adaptor
Outside thread (m)
Inside thread (f)
Adapter for flexlines
AD (1/2" m, 3/4" f)
AD (1/2" f, 3/4" m)
1/2"
3/4"
3/4"
1/2"
Connections
Connections
Outside thread (m)
Inside thread (f)
1/2"
1/2"
Elbow 1/2" for flexlines
Isolating piece 1/2" for flexlines
1/2"
1/2"
Connections on both sides
Outside thread (m)
Coupling 1/2" for
interconnecting two 1/2“ flexlines
1/2"
Gas distributors
required quantity
Gas manifold (1 piece each)
GD 2 (for dual operation) 2)
GD 4 (for up to quad operation) 2)
2
2
Gas manifold - Connections
At the compressor (inside thread)
At the cold head (outside thread)
1/2"
1/2"
2 x 1/2"
4 x 1/2"
Length
EL 4.5 extension cable for linking
cold head and compressor unit
Ordering Information
4.5 m (15.75 ft)
General Accessories
Flexlines 1), 2)
FL 4.5 (1/2", 1/2")
FL 9.0 (1/2", 1/2")
Part No.
892 87
892 88
Adaptor
AD (1/2" m, 3/4" f)
AD (1/2" f, 3/4" m)
892 89
892 90
Elbow 1/2"
891 73
Coupling 1/2"
891 71
Gas manifold (1 piece each)
GD 2 (for dual operation) 2)
GD 4 (for up to quad operation) 2)
840 253 (2x)
840 254 (2x)
EL 25 extension cable for linking cold head
and compressor unit 2)
200 20 900
EL 4.5 extension cable for linking cold head
and compressor unit 2)
893 74
All flexible pressure lines, adaptor pieces, bends, isolating pieces, line couplings and gas manifolds are equipped with self-sealing Aeroquip fittings and filled in
the factory with high-purity helium gas (purity: 99.999%). The filling pressure is 16 bar
1)
2)
Minimum bending radius: 30 cm (11.81 in.)
Only suited for pneumatically driven cold heads and cryopumps
C12 42
Oerlikon Leybold Vacuum Full Line Catalog
Refrigerator Cryostat
based on the RDK 6-320
1
233
274,5
124
42,5
The RDK 6-320 basic unit includes the
COOLPOWER 5/100 T two-stage cold
head. Its high refrigerating capacity at
low temperatures permits experiments
which previously could not be performed by relying on refrigerators and
which required the use of liquid helium.
The RDK 6-320 basic unit is a complete system for measurements in the
temperature range between 6 and
320 K.
ø30,2
30°
The COOLPOWER 5/100 cold head is
augmented by:
- Silicon diode for measuring the temperatures at the second stage of the
cold head
- Heater at the second stage of the
cold head provided with overheating
protection
Basic unit RDK 6-320
- 11-way current feedthrough with
matching external connector
Advantages to the User
- Compact
- Very reliable
- Comprehensive range of accessories from one source
- For installation in any orientation
- Simple to operate
- Short cooldown time
- Cost-effective in long-term experiments since no liquid helium is required
- Simple and rapid servicing through
the use of the standard
COOLPOWER 5/100 cold head
with pneumatic drive system for the
displacer
Typical Applications
- Cooling of samples and detectors
- DN 25 KF pumpdown port
- Material research and testing
- DN 160 ISO-K vacuum flange
- Spectroscopic applications
- Matrix isolation spectroscopy with
neon and argon
General Remarks on Refrigerator Cryostats
Isolating Vacuum
Temperature Measurement
Temperature Control
A two-stage rotary vacuum pump will
normally be adequate to produce an
isolating vacuum. However, this pump
should be equipped on the suction
side with an adsorption trap and a isolation valve.
In order to avoid measurement errors
due to thermal resistances, the temperature at the sample should preferably
be measured by a second optional
sicon diode which is installed as close
to the sample as possible. If possible it
should be maintained at the same
temperature level as that of the probe.
The temperature at the second stage
of the cold head (or that of the probe)
is controlled by heating against the
cooling effect produced by the refrigerator (while the cold head is running).
If the application requires that the cold
surfaces remain free of hydrocarbons,
we recommend the use of our small
turbomolecular pump system PT 50
(see Product Section C10).
Oerlikon Leybold Vacuum Full Line Catalog
43 C12
Optical Refrigerator Cryostat
based on the RDK 6-320
Upgraded as an optical cryostat
(option) the RDK 6-320 is tailor-made
for experiments involving temperatures
down to about 7 K.
Supplied Equipment
- Basic unit RDK 6-320
- Temperature attenuation disk out of
Pb Sn
- Sample holder out of Al 99.5
- Thermal radiation shield out of
E-Cu
- Vacuum jacket out of aluminum /
stainless steel
- Five exchangeable windows (four
windows on the sides, one window
in the longitudinal axis of the
cryostat); two windows on the sides
and the window in the longitudinal
axis are made of SUPRASIL I, the
two other windows are blanked off
and are made of brass
Optical refrigerator cryostat RDK 6-320
88
36,4°
ø15
ø26
ø80
ø60
317
269
ø130
4
Blank
panel
88
ø26
SUPRASIL I window
Section through the window area
Dimensional drawing for the optical refrigerator
cryostat
C12 44
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
RDK 6-320
Temperature range
2nd stage of the cold head
1st stage of the cold head
K
K
6 to 320
28 to 320
Silicon diode for temperature measurements
at the 2nd stage of the cold head
built-in
Heater
at the 2nd stage of the cold head
built-in
Heating power
W
50
Heating current
A
1
Heating voltage
V DC
50
Permissible ambient temperature
He filling pressure
at room temperature
°C
+5 to +40
bar
16
He connections
Self-sealing screwed connections
High pressure connection (outside thread)
Low pressure connection (outside thread)
Length of the connection cable
to the compressor unit
Weight
m (ft)
kg (lbs)
Ordering Information
1/2"
1/2"
4.5 (15.75) [included)]
13 (28.7)
RDK 6-320
Basic unit RDK 6-320
Part No. 842 403
Optical cryostat consisting of
RDK 6-320 and Expansion Kit ROK
Part No. 842 404
Compressor unit
COOLPAK 6000,
400 V/50 Hz; 470 V/60 Hz
COOLPAK 6200,
200 V/50 Hz; 200 V, 230 V/60 Hz
Part No. 840000V6000
Part No. 840000V6200
Power supply cable
see Ordering Information for the compressor units COOLPAK
Flexlines
FL 4.5 (1/2", 1/2")
Part No. 892 87
Temperature measurement at 2nd stage with
low temperature controller Modell 9700
Part No. 842 400
Sensor cable, 3 m (10.5 ft) long
Part No. 842 401
Oerlikon Leybold Vacuum Full Line Catalog
45 C12
Accessories for Cryopumps / Cryogenics
Controllers and Monitoring Units
for Cryopumps
Advantages to the User
Typical Applications
- Interface to external system
controller
- For automated operation of the
COOLVAC cryopumps of the
ClassicLine
- For easy integration with external
system controllers
- For safe pumping of hydrogen
System Controller COOLVAC SC
Design Features
- 1/4 19" rack module
- 3 height units (HU)
- Dimensions (W x H x D)
106 x 129 x 178 mm
(4.17 x 5.08 x 7.01)
- Operation through pushbuttons
System controller COOLVAC SC
The intelligent COOLVAC system
controller SC automatically controls
and monitors up to 30 COOLVAC
pumps.
Online monitoring, help functions and
a service interface for easy diagnostic
are just a few user friendly features.
It can be installed as a “stand alone
system” or remote controlled via an
interface.
Supplied equipment
- Network terminator
(Part No. 400 000 114)
- Hardware interlock plug
(Part No. 400 000 133)
- 0 modem adapter for connection to
the PC
COOLVAC SC
Technical Data
Operating voltage
Dimensions (W x H x D)
Supply through RS 485 C cable from COOLVAC PM
mm (in.)
106 x 129 x 178 (4.17 x 5.08 x 7.01) [1/4 19", 3 HU]
Ordering Information
COOLVAC SC
System controller COOLVAC SC
Part No. 844 230
System controller COOLVAC SC
with Profibus interface
Part No. 844230V0004
C12 46
Oerlikon Leybold Vacuum Full Line Catalog
Power Supply PS for up to Two Cryopumps
Design Features
The COOLVAC power supply PS
provides the power for the cold head
motor, the electrical heaters and the
supplies voltage to the electronics for
up to 2 COOLVAC pumps.
Controlled via the system controller SC
the PS turns the compressor unit on
and off if required by the connected
pumps.
- 19" rack module
- 3 height units (HIU)
- Dimensions (W x H x D)
483 x 135 x 320 mm
(19.02 x 5.31 x 12.60)
Power supply PS
Supplied equipment
The system controller COOLVAC SC
(not included) will fit into the empty
space.
- Approximately 3 m long mains cord
Technical Data
PS
for double connection
Power consumption, approx.
VA
Supply voltage, factory preset
(optional 115 V AC is possible 1))
V AC
Output power
W
Rack mounting
Dimensions (W x H x D)
Weight
900
230 ± 10%, 1 phase
2 x 250
Through 19" installation frame
mm (in.)
483 x 135 x 320 (19.02 x 5.31 x 12.60) [3/4 19", 3 HU]
kg (lbs)
10 (22.1)
Ordering Information
PS
for double connection
Power supply PS
for up to 2 Cryopumps
1)
Part No. 844 135
please contact Oerlikon Leybold Vacuum
Oerlikon Leybold Vacuum Full Line Catalog
47 C12
Power supply PS for up to Three Cryopumps
The COOLVAC power supply PS
provides the power for the cold head
motor, the electrical heaters and the
supplies voltage to the electronics for
up to 3 COOLVAC pumps.
Controlled via the system controller SC
the PS turns the compressor unit on
and off if required by the connected
pumps.
Design Features
- 19" rack module
- 4 height units (HU)
- Dimensions (W x H x D)
483 x 177 x 440 mm
(19.02 x 6.97 x 17.32)
Power supply PS
- Single LED indicates correct direction of rotation for the rotating field
Supplied equipment
- 20 m long mains cord, fitted,
without plug
- 19" mounting brackets for rack
mounting
Technical Data
PS
for multiple connection
Nominal voltage (3 phase)
factory default
switchable to
V AC
V AC
± 10%
Voltage tolerance
Frequency range
3 x 200 + PE
3 x 400 + PE
3 x 460 to 480 + PE
Hz
Fusing
47 to 63
Power switch
Ambient temperature range
°C
0 to +40
Protection type
IP
20
Dimensions (W x H x D)
[without handles]
mm (in.)
483 x 177 x 440 (19.02 x 6.97 x 17.32)
[19", 4 HU]
Weight (including cord)
kg (lbs)
38.8 (85.65)
Ordering Information
PS
for multiple connection
Power supply PS
for up to 3 cryopumps
C12 48
Part No. 844 235
Oerlikon Leybold Vacuum Full Line Catalog
COOLVAC ClassicLine,
Single System Configuration
COOLVAC
#1
PM
1
4
5
SC
3
PS
2
COMPRESSOR
6
RS 232 C
External PC
PM
SC
PS
1
2
3
4
5
6
=
=
=
=
=
=
=
=
=
Pump module (included with the pump)
System controller
Power supply
e.g. Part No. 844 262
e.g. Part No. 844 139
e.g. Part No. 844 138
Part No. E 400000323 (necessary only for COOLVAC 1500 CL, 2000 CL und 3000 CL)
Part No. 844 141
to be provided by the customer
Single System Configuration
Oerlikon Leybold Vacuum Full Line Catalog
49 C12
COOLVAC ClassicLine,
Dual System Configuration
Only for European mains voltages and for compressors suited for dual operation
7
COOLVAC
#1
COOLVAC
#2
PM
PM
1
3
3
4
5
SC
PS
2
4
COMPRESSOR
for dual operation
6
RS 232 C
External PC
PM =
SC =
PS =
1 =
2 =
3 =
4 =
5 =
6 =
7 =
Pump module (included with the pump)
System controller
Power supply
e.g. Part No. 844 262
e.g. Part No. 844 139
e.g. Part No. 844 138
Part No. E 400000323 (necessary only for COOLVAC 1500 CL, 2000 CL und 3000 CL)
Part No. 844 141
to be provided by the customer
e.g. Part No. 844 256
Dual System Configuration
C12 50
Oerlikon Leybold Vacuum Full Line Catalog
COOLVAC ClassicLine,
Dual and Mutiple System Configuration
7
7
COOLVAC
#1
7
COOLVAC
#2
PM
PM
COOLVAC
#3
PM
8
1
8
8
PS
SC
RS 232 C
9
6
External PC
PM =
SC =
PS =
1 =
6 =
7 =
8 =
9 =
COMPRESSOR
Pump module (included with the pump)
System controller
Power supply
e.g. Part No. 844 262
to be provided by the customer
e.g. Part No. 844 256
e.g. Part No. 844 252
Part No. 844 265
Dual and Mutiple System Configuration
Oerlikon Leybold Vacuum Full Line Catalog
51 C12
Low Temperature Controller Modell 9700
Technical Data
Modell 9700
Mains connection, 50/60 Hz
V AC
Power consumption, max.
W
3 x 4 membrane key pad
Data memory
EPROM
Two line, 20 digit LED digital display
Temperature measurement
Sensors
2 x silicon diodes type D or 2 x silicon diodes
with standard temperature
resistance characteristics
µA
10
K
1.5 to 450
Low temperature controller Modell 9700
Measurement current
Measurement range
- Microprocessor controlled PID controller
Measurement range of the
silicon diode type D
- Digital temperature readout in Kelvin
Number of channels
- Control by means of counter
heating
- High control accuracy over the entire temperatur range (1.5 to 450 K)
- Electric heating power up to 50 W
- Programmable heater power limit
- Generation of linear temperature
ramps
K
Resolution
Simultaneous display of both channels
A/D converter resolution
bit
Switching outputs
- Data from two sensors can be
displayed
- Analogue temperature outputs for
both channels
- Can be used in three operating
modes
- Manual
- Program
- External computer control
Typical Applications
- Temperature control at refrigerator
cryostats
C12 52
24
2 relays (n.o. and n.c. contacts)
Temperature resolution
K
Temperature control
0.1
PID controller
Heating power, max.
W
50
Heating current, max.
A
1
Heating voltage, max.
V DC
Permissible ambient temperature
Dimensions (W x H x D)
[high H without feet]
Weight
Dimensions of the packaging
(W x H x D)
0 to 50
RS 232 C and IEEE-488
°C
Mechanical design/cabinet
- Standard interface RS 232 C and
IEEE-488
1.4 to 325 K
2
Computer interface
- Up to 50 program steps are programmable
150
Entry of data
Display
Advantages to the User
85 to 240
+10 to +30
Table-top unit (8.5" x 3.5" x 12")
mm (in.)
kg (lbs)
mm
(in.)
215.9 x 88 x 304.8
(8.5 x 3.5 x 12.0)
2.3 (5)
360 x 230 x 450
(14.17 x 9.06 x 17.72)
Weight (inc. packaging, approx.)
Length of mains cord
kg (lbs)
4.2 (9.3)
m (ft)
2.5 (8.75)
Ordering Information
Modell 9700
Low temperature controller Modell 9700
Part No. 842 400
Sensor cable, 3 m (10.5 ft) long
Part No. 842 401
Silicon diode type D with
connection cable and miniature plugs
Part No. 890 89
Oerlikon Leybold Vacuum Full Line Catalog
Low Temperature Measuring Instrument
MODEL 211S
Low temperature measuring instrument MODEL 211S
Advantages to the User
- Supports one silicon diode
- 3-digit LED display
- Temperature readout between
1 and 450 Kelvin
- Two trigger thresholds
Technical Data
Measurement current
Display
Temperature range
Resolution
Power supply voltage
Typical Applications
Trigger thresholds
Switched output
Analog output
Voltage
Current
RS 232 C interface
- Temperature measurements on
cryopumps for monitoring their operation and to control pump systems
µA
K
Accuracy
- RS 232 C interface
- Temperature measurements on
cryostats
MODEL 211S
0 to 10
4 to 20
a) Temperature output
b) External adjustment of switching thresholds
+15 to +35
Admissible ambient temperature
°C
Benchtop unit
Mechanical design/housing
96 x 48 x 166 (3.78 x 1.89 x 6.54)
Dimensions (W x H x D)
mm (in.)
Weight (including packaging), approx.
0.45 (1.0)
kg (lbs)
V
mA
Ordering Information
Low temperature measuring instrument
MODEL 211S
HV cable 2 way
with plug, 10 m (35.0 ft) long 1)
HV cable 4 way
with plug, 10 m (35.0 ft) long 1)
UHV cable 4 way
with plug, 10 m (35.0 ft) long 1)
Silicon diode, type D,
with connecting cable and
micro plugs
- without current feedthrough
HV current feedthrough on a flange
DN 25 KF, 2 way
UHV current feedthrough on a flange
DN 16 CF, 4 way
1)
Oerlikon Leybold Vacuum Full Line Catalog
10
LED, 5-digits
1.4 to 475
0.001 K from 1.4 to 99.9 K
0.01 K from 100 to 475 K
±0.05 K from 1.5 to 99.9 K
±0.05 K from 100 to 475 K
5 V DC at 1 A through the supplied
100-240 V AC power adaptor
2
2 relays (n.c. and n.o.) 30 V DC at 1 A
MODEL 211S
Part No. 844 110
Part No. 844 112
Part No. 844 113
Part No. 844 114
Part No. 890 89
Part No. 200 19 256
Part No. 500 217
For COOLPOWER and COOLVAC pumps
53 C12
Temperature Sensor
In contrast to vapor pressure thermometers, electric temperature sensors
can be used for continuous measurements within a wide range of temperatures.
In systems which are degassed at high
temperatures, silicon diodes can only
be fitted after degassing has been
completed.
The silicon diode type D matches
the low temperature display unit and
the low temperature control unit
Modell 9700.
Silicon diodes offer a negative temperature coefficient of resistance, i.e. their
resistance drops as the temperature
increases. The slope of the temperature/resistance characteristic and the
absolute resistance are decisive regarding the suitability of these diodes.
The slope determines the sensitivity of
the sensor and a high electrical resistance permits accurate measurements
while keeping the thermal load small
(microwatts).
Dimensional drawing for the silicon diode, type D
Standard characteristic of the silicon diode
Technical Data
Temperature range
Silicon Diode Type D
K
Temperature coefficient (dR/dT)
qualitative
1.4 to 325
Ω/K
Negative in the entire temperature range
Non-linear characteristic
Measurement current
µA
10
Bakeable to
°C
+60
quantitative
Ordering Information
Temperature sensor
Silicon diode
Silicon Diode Type D
Part No. 890 89
Part No. 200 20 694
with 4way electrical feedthrough
Flange DN 16 ISO-KF
C12 54
Part No. 200 20 616
Oerlikon Leybold Vacuum Full Line Catalog
Safety Valve
Typical Applications
32
- Protecting sealed vacuum systems
like cryopumps, cryostats, lifting
devices, for example against internal
overpressures
28
- Mandatory for systems which are
separated when cold, as a means
of protection against overpressures
DN 16 KF
Dimensional drawing for the safety valve
Technical Data
Safety Valve
Responding pressure
Flow at 140 mbar
mbar
150 ± 40, over-pressure
l x h-1
500
Valve disk
Spring loaded, with O-ring seal
Leak rate in the closed state
mbar x l x s-1 (Torr x l x s-1)
Connection
Diameter
DN
mm (in.)
Material
Overall height
Weight
< 1 x 10-8 (< 0.75 x 10-8)
16 KF
32 (1.26)
Steel 1.4305
mm (in.)
28 (1.10)
kg (lbs)
0.3 (0.7)
Ordering Information
Safety Valve
Safety valve on DN 16 KF flange
Part No. 890 39
Oerlikon Leybold Vacuum Full Line Catalog
55 C12
Precision Manometer
Typical Applications
Technical Information
- Pressure readout for vapor pressure
thermometers
For operation and measurements at
pressures exceeding 1013 mbar
(760 Torr) the small flange seal must be
equipped with an outer centering ring
Part No. 183 53.
50
160
2000
0
226
133
DN 10 KF
Dimensional drawing for the precision manometer
Technical Data
Connection
Measurement range
Precision Manometer
DN
mbar (Torr)
Accuracy
10 KF
0 to 2000 (0 to 1500)
1 % of full scale
Diameter
mm (in.)
160 (6.3)
Length of the dial
mm (in.)
320 (12.6)
Internal volume, approx.
Overall height
Weight
Ordering Information
Precision manometer
C12 56
cm3
20
mm (in.)
226 (8.9)
kg (lbs)
1.4 (3.1)
Precision Manometer
Part No. 890 50
Oerlikon Leybold Vacuum Full Line Catalog
Notes
Oerlikon Leybold Vacuum Full Line Catalog
57 C12
Sales and Service
Germany
Europe
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
sales.vacuum@oerlikon.com
www.oerlikon.com
Belgium
Oerlikon
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax: +32-2-720 83 38
sales.vacuum.zv@oerlikon.com
Service:
Phone: +32-2-711 00 82
Fax: +32-2-720 83 38
service.vacuum.zv@oerlikon.com
Spain
Oerlikon
Leybold Vacuum Spain, S.A.
C/ Huelva 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 43 11
Fax: +34-93-666 43 70
sales.vacuum.ba@oerlikon.com
Service:
Phone: +34-93-666 46 16
Fax: +34-93-685 43 70
service.vacuum.ba@oerlikon.com
France
Oerlikon
Leybold Vacuum France S.A.
7, Avenue du Québec
Z.A. de Courtaboeuf 1 - B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax: +33-1-69 07 57 38
info.vacuum.ctb@oerlikon.com
sales.vacuum.ctb@oerlikon.com
Sweden
Oerlikon
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Göteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax: +46-31-68 39 39
info.vacuum.gt@oerlikon.com
sales.vacuum.gt@oerlikon.com
Visiting/delivery address:
Datavägen 57B
SE-43632 Askim
Oerlikon
Leybold Vacuum GmbH
Sales Area North/Northeast
Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone: +49-(0)30-435 609 0
Fax: +49-(0)30-435 609 10
sales.vacuum.bn@oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
Phone: +49-(0)89-357 33 9-10
Fax: +49-(0)89-357 33 9-33
sales.vacuum.mn@oerlikon.com
service.vacuum.mn@oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Sales Area West & Benelux
Branch Office Cologne
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1270
Fax: +49-(0)221-347 1291
sales.vacuum.kn@oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1439
Fax: +49-(0)221-347 1945
service.vacuum.kn@oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1765
Fax: +49-(0)221-347 1944
service.vacuum.kn@oerlikon.com
Oerlikon
Leybold Vacuum
Dresden GmbH
Service Competence Center
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-(0)351-88 55 00
Fax: +49-(0)351-88 55 041
info.vacuum.dr@oerlikon.com
Oerlikon
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergès
B.P. 107 640
F-26501 Bourg-lès-Valence Cedex
Service:
Phone: +33-4-75 82 33 00
Fax: +33-4-75 82 92 69
marketing.vacuum.vc@oerlikon.com
Great Britain
Oerlikon
Leybold Vacuum UK LTD.
Silverglade Business Park
Leatherhead Road Unit 2
KT9 2QL Chessington, Surrey
(London)
Sales:
Phone: +44-13-7273 7300
Fax: +44-13-7273 7301
sales.vacuum.ln@oerlikon.com
Service:
Phone: +44-20-8971 7030
Fax: +44-20-8971 7003
service.vacuum.ln@oerlikon.com
Italy
Oerlikon
Leybold Vacuum Italia S.r.l.
Via Trasimeno 8
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax: +39-02-27 20 96 41
sales.vacuum.mi@oerlikon.com
Service:
Phone: +39-02-27 22 31
Fax: +39-02-27 22 32 17
service.vacuum.mi@oerlikon.com
Switzerland
Oerlikon
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: +41-44-308 40 50
Fax: +41-44-302 43 73
sales.vacuum.zh@oerlikon.com
Service:
Phone: +41-44-308 40 62
Fax: +41-44-308 40 60
service.vacuum.zh@oerlikon.com
America
USA
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax: +1-724-325-3577
info.vacuum.ex@oerlikon.com
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax: +1-724-333-1217
Pacific, Mountain, Alaskan &
Hawaiian time zones
Phone: +1-408-436-2828
Fax: +1-408-436-2849
Service:
Phone: +1-724-327-5700
Fax: +1-724-325-3577
Latin America
Oerlikon
Leybold Vacuum USA Inc.
Brazilian Office
Av. Dória 360 cj. 12 Campo Belo
04635-070 São Paulo SP BRAZIL
Sales:
Phone: +55 11-3554 3117
Fax: +55 11-3554 3117
nelson.batistucci@oerlikon.com
LV_10029_2009
P.R. China
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
info.vacuum.tj@oerlikon.com
sales.vacuum.tj@oerlikon.com
service.vacuum.tj@oerlikon.com
Oerlikon
Leybold Vacuum
(Tianjin) Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
info.vacuum.tj@oerlikon.com
sales.vacuum.tj@oerlikon.com
service.vacuum.tj@oerlikon.com
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Shanghai Branch:
No.33
76 Fu Te Dong San Road
Waigaoqiao Free Trade Zone
Shanghai 200131
China
Sales and Service:
Phone: +86-21-5064-4666
Fax: +86-21-5064-4668
info.vacuum.sh@oerlikon.com
sales.vacuum.sh@oerlikon.com
service.vacuum.sh@oerlikon.com
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Guangzhou Office and
Service Center
1st F, Main Building
Science City Plaza,
No.111 Science Revenue,
Guangzhou Science City
(GZSC) 510663, Guangzhou,
China
Sales:
Phone: +86-20-223 23 980
Fax:+86-20-223 23 990
info.vacuum.gz@oerlikon.com
sales.vacuum.gz@oerlikon.com
service.vacuum.gz@oerlikon.com
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Beijing 100004
China
Sales:
Phone: +86-10-6590-7622
Fax: +86-10-6590-7607
sales.vacuum.bj@oerlikon.com
service.vacuum.bj@oerlikon.com
India
Oerlikon
Leybold Vacuum India Pvt Ltd.
EL 22, J-Block
MIDC Bhosari
Pune 411026
India
Sales and Service:
Phone: +91-20-3061 6000
Fax: +91-20-2712 1571
sales.vacuum.pu@oerlikon.com
service.vacuum.pu@oerlikon.com
08.09
Netherlands
Oerlikon
Leybold Vacuum Nederland B.V.
Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone: +31-(30) 242 6330
Fax: +31-(30) 242 6331
sales.vacuum.ut@oerlikon.com
service.vacuum.ut@oerlikon.com
Asia
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax:
+49-(0)221-347 1250
info.vacuum@oerlikon.com
Japan
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone: +81-45-471-3330
Fax: +81-45-471-3323
info.vacuum.yh@oerlikon.com
sales.vacuum.yh@oerlikon.com
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Osaka Sales Office
3F, Shin-Osaka Terasaki
No.3 Bldg.
1-5-28 Nishi-Miyahara
Yodogawa-ku, Osaka-shi
Osaka 532-0004
Phone: +81-6-6399-6271
Fax: +81-6-6399-6273
info.vacuum.os@oerlikon.com
sales.vacuum.os@oerlikon.com
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
Kogyo Danchi
21, Kasuminosato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298 89 2841
Fax: +81-298 89 2838
info.vacuum.iik@oerlikon.com
sales.vacuum.iik@oerlikon.com
South Korea
Oerlikon
Leybold Vacuum Korea Ltd.
3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
Phone: +82-31 785 1367
Fax: +82-31 785 1359
sales.vacuum.bd@oerlikon.com
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Phone: +82-41 589 3035
Fax: +82-41 588 0166
service.vacuum.cn@oerlikon.com
Singapore
Oerlikon
Leybold Vacuum
Singapore Pte Ltd.
1 Science Park Road
Singapore Science Park 2
#02-12, Capricorn Building
Singapore 117528
Sales and Service:
Phone: +65-6303 7000
Fax: +65-6773 0039
sales.vacuum.sg@oerlikon.com
service.vacuum.sg@oerlikon.com
Taiwan
Oerlikon
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chunghsin Road., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-500 1688
Fax: +886-3-583 3999
sales.vacuum.hc@oerlikon.com
service.vacuum.hc@oerlikon.com
www.oerlikon.com/
leyboldvacuum
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