Nikon V12A Profile Projector SOP

Nikon V12A Profile Projector SOP
Nikon V12A Profile Projector SOP
Page 1 of 3
Revision 1-060210
Nikon V12A Profile Projector SOP
1. Scope
1.1
This document provides operating procedures for the Nikon V12A profile projector.
2. Table of Contents
1. Scope ............................................................................................................................................................. 1
2. Table of Contents .......................................................................................................................................... 1
3. Reference Documents ................................................................................................................................... 1
3.1
Referenced within this Document .......................................................................................................... 1
3.2
External Documents ............................................................................................................................... 1
4. Equipment and/or Materials ......................................................................................................................... 1
5. Safety............................................................................................................................................................. 1
6. Setup Procedures .......................................................................................................................................... 2
7. Measurement Procedures ............................................................................................................................ 2
8. Shutdown ...................................................................................................................................................... 3
9. Revision History............................................................................................................................................. 3
Figure 1, Profile Projector Controls ............................................................................................................................ 2
Figure 2, Quick Chek Controls .................................................................................................................................... 3
3. Reference Documents
3.1
Referenced within this Document
3.1.1
3.2
None
External Documents
3.2.1
Nikon V12A Manual
4. Equipment and/or Materials
4.1
Nikon V12A
4.2
Sample
5. Safety
5.1
Follow all Nanofab safety procedures.
Nikon V12A Profile Projector SOP
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Revision 1-060210
Rotational
Alignment
Knob
X Knob
Y Knob
Z Knob
(Focus)
Quick Chek
Power
Switch
Illumination
Switches
Figure 1, Profile Projector Controls
6. Setup Procedures
6.1
Rotate the objectives to the 50x objective.
6.2
Turn on the power. See Figure 1.
6.3
Use the illumination switches to switch between contour (backside) and surface (frontside)
illumination. See Figure 1.
NOTE: Use the surface illumination for opaque samples.
6.4
Set the sample on the stage.
6.5
Move the sample into position using the X and Y knobs. See Figure 1.
6.6
Focus the image with the Z knob. See Figure 1.
6.7
Use the rotational alignment knob to align the crosshairs with the sample.
7. Measurement Procedures
7.1
Turn on the power switch on the back of the Quick Chek.
7.2
Press the Display On button. See Figure 2, Quick Chek Controls.
7.3
Move sample to first measurement point.
Nikon V12A Profile Projector SOP
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Revision 1-060210
7.4
Zero the Quick Chek displays. See
Figure 2, Quick Chek Controls.
7.5
Use the X and Y knobs to move the
sample to the second measurement
point. See Figure 1, Profile Projector
Controls.
7.6
Read the measurement on the Quick
Chek displays.
7.7
Rotate the objectives to a higher
magnification, as needed, for greater
accuracy.
Zero Buttons
Display On
Button
Figure 2, Quick Chek Controls
8. Shutdown
8.1
Turn off Quick Chek.
8.1.1
Turn off power switch located on the back of the Quick Chek.
8.2
Turn off Profile Projector. See Figure 1.
8.3
Rotate objectives to the 50x objective.
8.4
Remove sample.
9. Revision History
Rev
Date
1
2 June 2010
Originator
Sam Bell
Description of Changes
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