M-212LD(-D)
BEST SELECTION
MEASUREMENT INSTRUMENTS & CONTROLLERS
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SERIES
HELIUM LEAK DETECTOR
Series
Portabie Model
● M-212LD
● M-212LD-D
● M-222LD
● M-222LD-D
● M-232LD
BEST SEL
Vacuum components
Model:
M-212LD(-D)
Field Service-oriented!
Compact design for maneuverability
Diaphragm pump types
(compact & dry) also available
Model:
M-222LD
High Power!
Increased power realized through installing
the Model 212 toughened roughing pump.
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ECTION
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SERIES
SERIES
Automobile Industry
Medical Industry
Model:
M-222LD-D
High Power and Dry!
Includes drying pump
Suitable for clean environment
Vacuum components
Model:
M-232LD
Sniffer!
Electronics Devices
Designed for Sniffing
Methods
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Portable
HELEN M-212LD(-D)/M-222LD(-D)/M-232LD
Compact!
Outline
M-212LD (-D)
・Best for inspections and field servicing of various vacuum systems
HELEN portable series products have been conceptually
・ Leak testing of various small vacuum parts
developed with the emphasis on compactness, lightness, and
portability.
High Power!
The M-212LD, a lightweight and general-purpose model, is
・Maintenance of various vacuum systems
specifically intended for use in the field. The diaphragm-pump
・ Leak testing of various large vacuum chambers such as
particle accelerators
・Analyses of leak testing systems
driven type M-212LD-D is also available.
Dry! & High Power!
M-222LD-D As the M-222LD is equipped with a large roughing vacuum
pump it can implement leak testing on large vacuum vessels
itself, without the need for any pump installation on the equipment.
In addition, the highly-sensitive type M-222LD-H is also
・Adaptable to clean rooms
available. And with the M-222LD-D type vacuum vessels
・Supports oil-free leak testing
( or vacuum system parts ) can be protected from oil
・Maintenance of various vacuum systems
contamination with the dry pump in the exhaust system.
Sniffer!
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M-222LD The functions of the Model M-232LD are concentrated on the
M-232LD
sniffer method, and is thus most suited to a variety of gas
・Leak testing of automobile parts, air-conditioned refrigerators
piping systems and pressurized parts.
・Leak testing of food and medicine packaging
Select the most suitable model for your intended applica-
・Leak testing of water and gas pipe systems
tions from the variety of models provided in the HELEN series.
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SERIES
Features
1) Easy Operation
3) Easy Carry
Operation from start up to measuring is performed by a single
HELEN series have been fitted
button. Measurement is performed by setting the leak detec-
with large casters and handles
tor to the optimum conditions that correspond to the condi-
to devise an optimum user in-
tions for each type of test item.
terface for moving from place-
Also, sensitivity calibration, etc., is performed automatically.
to-place.
2) Worlds’top level Sensitivity,
Stability and Response realized.
4) Robust Design
Utilizes a 180 magnetic deflection
feature for instant response to operator errors and environ-
。
analyzer head
Easy Carry
The HELEN series are completed with each type of safety
mass spectrometer tube. Furthermore, mental failures. By using a long life tungsten filament, high
an MCP ( Micro-Channel Plate with a sensitivity measurements can be performed over an exten-
secondary-electron multiplier ) has been installed for
sive period of time under normal operating conditions. Also,
amplifying helium ions. As a result, even standard models
each part has been purposely solidly designed for connecting
can realize sensitivity as high as 10
-12
3
Pa・m /s and are
the HELEN series to 24-hour operating systems.
coupled with high stability throughout a long-term service
period.
5) Versatile functions
These new types are based on the easy operation of former models, and thus users can still operate them by simply pushing
the start/stop button. Additionally, modifications can be flexibly made to satisfy specific customer requests for more complicated
settings. The display consists of a 3.8-inch color LCD (320 x 240 dots), increasing legibility. The standard, status and trend
screens are shown below. As an example of the functions, reading internal temperature variations and compensating for
temperature drift of the preamplifier have realized improved precision of measurements. (M-212LD, M-222LD)
■Hand Controller
Standard screen
Status screen
Trend screen
Hand Controller
Analog screen
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Specifications
Type
Version
M-212LD(-H)
M-212LD-D
M-222LD(-H)
M-222LD-D(H)
Compact
Compact dry
High power
High power & dry
Quantitativemeasurement
range
(Pa・m3/s)
10
~10
-13
-3
(-H:10
~10 )
Inlet portexhaust speed(He)
(L/s)
0.5(Gross Mode)
2.0(Middle Mode)
(5.0(-H:Fine Mode))
0.2(Gross Mode)
0.3(Middle1 Mode)
1.3(Middle2 Mode)
3.0(Fine Mode)
NW25(ISO)
NW25(ISO)
Inlet port shape
-12
-3
-12
10
-12
~10
Sniffer
-8
-1
10
~10
-13
-3
(-H:10
~10 )
10 ~10
-2
5
(10 ~10 ppm)
1.8(Gross Mode)
2.0(Gross Mode)
2.0(Middle Mode)
2.0(Middle Mode)
(5.0(-H:Fine Mode)) (5.0(-H:Fine Mode))
Probe suction speed
0.3Pa・m3/s
NW25(ISO)
RP 30L/min
Diaphragm pump
20L/min
RP 142L/min
NW25(ISO)
-
*1
Dry Pumps250L/min
RP30L/min+DRP
AC 100V-115V, 10A
AC 100V 8A
RS-232C Analog I/O
External interface
Color LCD
Display
Option
Sniffer probe
*2
AC 100V 8A
AC 100V-115V, 6.3A
435×487×363
Dimensions (W×H×D)(mm)
42
39
Standard
AC 100V-115V, 15A
462×867×715
435×487×363
75
42
*1: Can be optionally upgraded to the roughing pump with a pumping rate of 275 L/min at the maximum.
*2: Can be optionally changed to overseas voltage specifications.
External Dimensions Drawing
6
-3
TMP 50L/s
Roughing pump
Weight (kg)
-12
10
~10
-13
-3
(-H:10
~10 )
-3
Main pump
Power requirements
-3
M-232LD
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SERIES
Other
VersatileAccessories(Optional)
Filament Maintenance Kit
(consists of filament assy,
ion chamber 114CF gasket)
Various cart
Sniffer probe
Flex Tube and Reducer (KF40 _ KF25)
He STD Leak Device
Bombing System
Special pc softwear
Helium Spray Gun
OrderingInformation
Product
code
26610
26611
26620
26621
26622
26623
26630
26302
26801
26802
26810
26811
26830
26850
26851
26681
26682
Model
M-212LD
M-212LD-D
M-222LD
M-222LD-D
M-222LD-H
M-222LD-M1
M-232LD
SNC1E1T1
981-9361
981-9370
981-9371
981-9790
981-9351
981-9350
Product name
Description
Helium leak detector (HELEN 212)
Helium leak detector (HELEN 212D)
Helium leak detector (HELEN 222)
Helium leak detector (HELEN 222D)
Helium leak detector (HELEN 222H)
Helium leak detector (HELEN 222M1)
Helium leak detector (HELEN 232)
Sniffer probe CAN, 5SR9 NIPPLEPENCIL
ASL25V Helium calibration leakage
ASL25V Helium calibration leakage
Sniffer probe for HELEN 212
Sniffer probe for HELEN 222
Helium spray gun
HELEN Filament maintenance kit
HELEN Filament assembly
HELEN 212 Transport case
HELEN 222 Transport case
Remarks
100 V AC, Compact type
100 V AC, Compact, Dry Pump type
100 V AC, High Power type
100 V AC, Dry Pump type
100 V AC, High Power, High Sensitivity type
100 V AC, Sniffer-dedicated type
100 V AC, Sniffer-dedicated type
NW25, calibrated leak rate with valve: 5 x 10-9 to 2 x 10-8 Pa・m3/s
NW25, calibrated leak rate: 5 x 10-9 to 2 x 10-8 Pa・m3/s
Suction rate: 0.1 Pa・m3/s (compatible with HELEN 212)
Suction rate: 0.3 Pa・m3/s (compatible with HELEN 222)
Filament assembly, gasket, and ion chamber: One each (compatible with HELEN/ALD)
Filament only
On casters
On casters
7
Canon ANELVA Corporation is constantly improving, its products, hence specifications are subject to change without notice.
February 2011
Sales Promotion Center of Head Office
5-1 Kurigi 2-chome, Asao-ku, Kawasaki-shi, Kanagawa 215-8550, Japan
TEL: +81-44-980-3502 FAX : +81-44-986-4236
U.S.A. Branch Office
3300 North First Street San Jose, CA 95134 ,U.S.A. TEL: +1-408-894-0101 FAX : +1-408-894-9360
Korea Branch Office
Canon Bldg.,10F 168-12, Samsung-dong, Kangnam-gu, Seoul,Korea
TEL: +82-2-3450-0871 FAX : +82-2-3450-0860
Canon Semiconductor equipment TAIWAN, INC V.E Center
9F, No.25, Pu-Ding Road, Hsinchu, 300, Taiwan
TEL: +886-3-668-6600 FAX :+886-3-668-6969
Canon Singapore Pte Ltd Anelva Products Department
1 HarbourFront Avenue #4-01 Keppel Bay Tower Singapore098632 TEL: +65-6799-8888 FAX : +65-6271-4226
Canon Optical Industrial Equipment (Shanghai)Inc.
Room1604-1607, 16F, Harbour Ring Plaza, No.18 Middle Xi Zang Road Shanghai 200001, China TEL: +86-21-5385-2255 FAX :+86-21-5385-2033
URL : http://www.canon-anelva.co. jp/
1102-0500
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