Datasheet

Datasheet
Semiconductor
Characterization System
4200-SCS
4200-SPEC Rev. F
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Semiconductor
Characterization System
SEMICONDUCTOR
Model 4200-SCS Technical Data
4200-SCS
2
Introduction
3
Configuration Options
5
Hardware Specifications
7
KTE Interactive Software Tools
7
Microsoft Windows NT
8
The Keithley Interactive Test
Environment (KITE)
14
User Libraries (KULT)
18
System Configuration and
Diagnostics (KCON)
18
Keithley External Control
Interface (KXCI)
18
Accessories Supplied
19
Support Options
18
Optional Instrumentation
19
Calibration Options
19
Repair Options
19
Instrumentation Upgrades
20
Embedded PC Policy
20
Optional Accessories
20
Computer Options
20
Remote PreAmp Mounting
Accessories
20
Other Accessories
20
C-V Options
20
Warranty Information
21
Switch Matrix Options
21
Ultra-Low Current/Local
Sense Configuration
(4200-UL-LS-XX)
22
Ultra-Low Current/Remote
Sense Configuration
(4200-UL-RS-XX)
23
Low Current/Remote Sense
Configuration
(4200-LC-RS-XX)
24
General-Purpose Remote
Sense Configuration
(4200-GP-RS-XX)
25
Cabinets and Mounting
Accessories
25
Additional Cables and
Connectors
26
Front and Rear Panel
Photographs
27
PreAmp Mounting and Cabling
28
4200-SCS Accessories
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The Keithley Interactive Test Environment allows users to gain familiarity
quickly with tasks such as managing tests and results and generating reports.
Sophisticated and simple test sequencing and external instrument drivers
simplify performing automated device and wafer testing with combined I-V
and C-V measurements.
The 4200-SCS is modular and configurable. The system supports up to eight
Source-Measure Units, including up to four high power SMUs with 1A/20W
capability. An optional Remote PreAmp extends the resolution of any SourceMeasure Unit from 100fA to 0.1fA.
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Introduction
The Model 4200-SCS provides a total system solution for DC characterization
and stress-measure/reliability testing of semiconductor devices and test structures. This advanced parameter analyzer provides intuitive and sophisticated
capabilities for semiconductor device characterization. The 4200-SCS combines unprecedented measurement speed and accuracy with an embedded
Windows NT- or XP-based PC and the Keithley Interactive Test Environment
(KITE) to provide a powerful single-box solution.
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Semiconductor
Characterization System
4200-SCS
Configuration Options
The 4200-SCS supports many instrument configurations. The standard configuration includes two
medium power Source-Measure Units (SMUs) and a Ground Unit.
4200-SCS/C
Model 4200-SCS Technical Data
Standard 4200-SCS Models
4200-SCS/F
Chassis
12.1˝ flat panel display
Two (2) Model 4200-SMU medium power SMUs
One (1) Remote Sense Ground Unit
LAN, GPIB, RS-232, parallel port, hard disk, floppy disk drive, CD-RW, USB
Chassis
Composite Front Bezel (CRT/FPD sold separately, Model 4200-CRT or 4200-FPD-RM)
Two (2) Model 4200-SMU medium power SMUs
One (1) Remote Sense Ground Unit
LAN, GPIB, RS-232, parallel port, hard disk, floppy disk drive, CD-RW, USB
Source-Measure Units
Each system can be configured with up to six additional SMUs, for a total of eight SMUs. Two different
SMU models are available: a medium power (100mA, 2W) version (Model 4200-SMU) and a high power
(1A, 20W) version (Model 4210-SMU). The system can support up to four high power SMUs. Optional
SMUs are installed beginning with the medium power version first, then the high power version.
4200-SCS Source-Measure Units
Maximum
Voltage
Maximum
Current
Maximum
Power
4200-SMU (medium power)
210V
100mA
2W
4210-SMU (high power)
210V
1A
20W
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Remote PreAmp
The low current measurement capabilities of any SMU can be extended by adding an optional Remote
PreAmp (Model 4200-PA). The 4200-PA provides 0.1fA resolution by effectively adding five current ranges
to either SMU model. The PreAmp module is fully integrated with the system; to the user, the SMU simply
appears to have additional measurement resolution available. The Remote PreAmp is shipped installed on
the back panel of the 4200-SCS for local operation. This installation allows for standard cabling to a
prober, test fixture, or switch matrix. Users can remove the PreAmp from the back panel and place it in a
remote location (such as in a light-tight enclosure or on the prober platen) to eliminate measurement
problems due to long cables. Platen mounts and triax panel mount accessories are available. Remote
PreAmps are installed at the factory in numerical order, i.e., SMU1, SMU2, SMU3... up to the number of
PreAmps specified. Note: All medium power SMUs must have PreAmps installed before PreAmps can be
installed on high power SMUs.
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Semiconductor
Characterization System
4200-SCS
Configuration Examples
The 4200-SCS’s plug-in chassis design offers exceptional configuration flexibility, as these examples
illustrate. Any of these configurations can be specified without a flat panel display by substituting the
4200-SCS/C for the 4200-SCS/F. However, an external SVGA monitor is required to operate the
4200-SCS/C.
Model 4200-SCS Technical Data
Base Configuration with Ultra-Low Current
Configuration:
One (1) Model 4200-SCS/F
One (1) Model 4200-PA Remote PreAmp module
Description:
Includes 4200-SCS with flat panel display, two 4200-SMU medium power SMUs, one
4200-PA remote PreAmp factory installed on SMU1 and a ground unit. Provides
3-terminal device characterization using the built-in ground unit with 0.1fA sensitivity
on SMU1.
General-Purpose Configuration (comparable to Agilent 4155)
Configuration:
One (1) Model 4200-SCS/F
Two (2) Model 4200-SMUs
Description:
Includes 4200-SCS with flat panel display, four 4200-SMU medium power SMUs and
a ground unit with 0.1pA sensitivity.
Ultra-Low Current Configuration (comparable to Agilent 4156)
Configuration:
One (1) Model 4200-SCS/F
Two (2) Model 4200-SMUs
Four (4) Model 4200-PA Remote PreAmp modules
Description:
Includes four medium power SMUs, four Remote PreAmps factory installed on SMUs
1-4, and a ground unit. This system provides 0.1fA sensitivity on all four SMUs. An
excellent configuration for standard parameter analysis plus ultra-low current
measurement of MOSFET off current or dielectric leakage currents.
Ultra-Low Current, High Power Configuration
Configuration:
One (1) Model 4200-SCS/F
Two (2) Model 4200-SMUs
One (1) Model 4210-SMU
Five (5) Model 4200-PA Remote PreAmp modules
SEMICONDUCTOR
Description:
Maximum Configuration
Configuration:
One (1) Model 4200-SCS/F
Two (2) Model 4200-SMUs
Four (4) Model 4210-SMUs
Eight (8) Model 4200-PA Remote PreAmp modules
Description:
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Includes four medium power SMUs, four high power SMUs, eight Remote PreAmps
factory installed on SMUs 1-8 and a ground unit. Provides an eight SMU system with
0.1fA sensitivity on all eight SMUs and 1A capability on four channels.
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Includes four medium power SMUs, one high power SMU, five Remote PreAmps factory
installed on SMUs 1-5, and a ground unit. Provides a five SMU system with 0.1fA
sensitivity on all SMUs and 1A capability on SMU5.
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Characterization System
4200-SCS
Hardware
Specifications
Current
Range1
Max.
Voltage
Measure
Resolution3
4210-SMU2
High
Power
SMU
1
100
100
10
1
100
10
1
100
10
1
100
10
1
4200-SMU2
Medium
Power
SMU
4200-SMU and 4210-SMU with optional
4200-PA PreAmp
A
mA
mA
mA
mA
µA
µA
µA
nA
nA
nA
pA
pA
pA
21 V
210 V
21 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
1
100
100
10
1
100
10
1
100
10
3
1
0.3
100
µA
nA
nA
nA
nA
pA
pA
pA
fA
fA
fA
fA
fA
aA
Source
Accuracy
±(% rdg + amps)
0.100 %
0.045 %
0.045 %
0.037 %
0.035 %
0.033 %
0.050%
0.050%
0.050%
0.050 %
0.050 %
0.100 %
0.500%
1.000%
+
+
+
+
+
+
+
+
+
+
+
+
+
+
Accuracy
±(% rdg + amps)
Resolution3
200 µA
3 µA
3 µA
300 nA
30 nA
3 nA
600 pA
100 pA
30 pA
1 pA
100 fA
30 fA
15 fA
10 fA
50
5
5
500
50
5
500
50
5
500
50
15
5
1.5
µA
µA
µA
nA
nA
nA
pA
pA
pA
fA
fA
fA
fA
fA
0.100 %
0.050%
0.050 %
0.042 %
0.040 %
0.038 %
0.060%
0.060%
0.060%
0.060 %
0.060 %
0.100 %
0.500%
1.000%
+
+
+
+
+
+
+
+
+
+
+
+
+
+
350 µA
15 µA
15 µA
1.5 µA
150 nA
15 nA
1.5 nA
200 pA
30 pA
3 pA
300 fA
80 fA
50 fA
40 fA
VOLTAGE COMPLIANCE: Bipolar limits set with a single value between full scale and 10% of selected voltage range.
VOLTAGE
SPECIFICATIONS
Voltage
Range1
Max.
Current
Measure
4200-SMU 4210-SMU
200 V 4
20 V
2 V
200 mV
10.5
105
105
105
mA
mA
mA
mA
105 mA
1.05 A
1.05 A
1.05 A
Resolution3
200 µV
20 µV
2 µV
1 µV
Source
Accuracy
±(% rdg + volts)
0.015
0.01
0.012
0.012
Model 4200-SCS Technical Data
CURRENT
SPECIFICATIONS
% + 3 mV
% + 1 mV
% + 150 µV
% + 100 µV
Resolution3
5
500
50
5
mV
µV
µV
µV
Accuracy
±(% rdg + volts)
0.02% + 15 mV
0.02% + 1.5 mV
0.02% + 300 µV
0.02% + 150 µV
CURRENT COMPLIANCE: Bipolar limits set with a single value between full scale and 10% of selected current range.
Supplemental information is not warranted, but provides useful information about the
4200-SMU, 4210-SMU, and 4200-PA.
COMPLIANCE ACCURACY:
Voltage compliance equals the voltage source specifications.
Current compliance equals the current source specifications.
OVERSHOOT: <0.1% typical.
Voltage: Full scale step, resistive load, and 10mA range.
Current: 1mA step, RL = 10kΩ, 20V range.
RANGE CHANGE TRANSIENT:
Voltage Ranging: <200mV.
Current Ranging: <200mV.
ACCURACY SPECIFICATIONS: Accuracy specifications are multiplied by one of the
following factors, depending upon the ambient temperature and humidity.
% Relative Humidity
Temperature
5–60
60–80
10°–18°C
×3
×3
18°–28°C
×1
×3
28°–40°C
×3
×5
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REMOTE SENSE:
<10Ω in series with FORCE terminal not to exceed a 5V difference between FORCE
and SENSE terminals.
±30V maximum between COMMON and SENSE LO.
MAXIMUM LOAD CAPACITANCE: 10nF.
MAXIMUM GUARD OFFSET VOLTAGE: 3mV from FORCE.
GUARD OUTPUT IMPEDANCE: 100kΩ.
MAXIMUM GUARD CAPACITANCE: 1500pF.
MAXIMUM SHIELD CAPACITANCE: 3300pF.
4200-SMU and 4210-SMU SHUNT RESISTANCE (FORCE to COMMON): >1012Ω
(100nA–1µA ranges).
4200-PA SHUNT RESISTANCE (FORCE to COMMON): >1016Ω (1pA and 10pA
ranges), >1013Ω (100pA–100nA ranges).
OUTPUT TERMINAL CONNECTION: Dual triaxial connectors for 4200-PA, dual minitriaxial connectors for 4200-SMU and 4210-SMU.
NOISE CHARACTERISTICS (typical):
Voltage Source (rms):
0.01% of output range.
Current Source (rms):
0.1% of output range.
Voltage Measure (p-p):
0.02% of measurement range.
Current Measure (p-p):
0.2% of measurement range.
MAXIMUM SLEW RATE: 0.2V/µs.
SEMICONDUCTOR
Supplemental Information
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Semiconductor
Characterization System
4200-SCS
Additional Specifications
GENERAL
MAX. OUTPUT POWER: 22 watts for 4210-SMU and 2.2 watts for 4200-SMU (both are four-quadrant
source/sink operation).
DC FLOATING VOLTAGE: COMMON can be floated ±32 volts from chassis ground.
SEMICONDUCTOR
Model 4200-SCS Technical Data
VOLTAGE MONITOR (SMU in VMU mode):
Voltage
Range
200 V
20 V
2 V
200 mV
Measure
Accuracy
±(%rdg + volts)
0.015% +
3 mV
0.01% + 1 mV
0.012% + 110 µV
0.012% + 80 µV
Measure
Resolution
200 µV
20 µV
2 µV
1 µV
INPUT IMPEDANCE: >1013Ω.
INPUT LEAKAGE CURRENT: <30pA.
MEASUREMENT NOISE: 0.02% of measurement range (rms).
DIFFERENTIAL VOLTAGE MONITOR:
Differential Voltage Monitor is available by measuring with two SMUs in VMU mode, or by using the
low sense terminal provided with each SMU.
GROUND UNIT
Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU, and 4200-PA specifications. No additional errors are introduced when using the ground unit.
OUTPUT TERMINAL CONNECTION: Dual triaxial, 5-way binding post.
MAXIMUM CURRENT: 2.6A using dual triaxial connection; 4.4A using
5-way binding posts.
LOAD CAPACITANCE: No limit.
CABLE RESISTANCE: FORCE ≤1Ω, SENSE ≤10Ω.
SPECIFICATION CONDITIONS
NOTES
Specifications are the performance standards against which the 4200-SMU, 4210-SMU, and 4200-PA
are tested. The measurement and source accuracy are specified at the termination of the supplied
cables.
• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warm-up.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.
1 All ranges extend to 105% of full scale.
2 Specifications apply on these ranges with or without a 4200-PA.
3 Specified resolution is limited by fundamental noise limits. Measured resolution is 61⁄2 digits on each range. Source
resolution is 41⁄2 digits on each range.
4 Interlock must be engaged to use the 200V range.
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TEMPERATURE RANGE
Operating: +10° to +40°C.
Storage:
–15° to +60°C.
HUMIDITY RANGE
Operating: 5% to 80% RH, non-condensing.
Storage:
5% to 90% RH, non-condensing.
ALTITUDE
Operating: 0 to 2000m.
Storage:
0 to 4600m.
POWER REQUIREMENTS: 100V to 240V, 50 to 60Hz.
MAXIMUM VA: 500VA.
REGULATORY COMPLIANCE:
Safety: Low Voltage Directive 73/23/EEC.
EMC: Directive 89/336/EEC.
DIMENSIONS: 43.6cm wide × 22.3cm high × 56.5cm deep (175⁄32 in × 83⁄4 in × 221⁄4 in).
WEIGHT (approx.): 29.7kg (65.5 lbs) for typical configuration of four SMUs.
I/O PORTS: SVGA, Printer, RS-232, GPIB, Ethernet, Mouse, Keyboard.
ACCESSORIES SUPPLIED:
4200-MTRX-2
Ultra Low Noise SMU Triax Cable (2 supplied for
each SMU), 2m (6.6 ft). Not included with SMUs
configured with a 4200-PA PreAmp.
4200-TRX-2
Ultra Low Noise PreAmp Triax Cables, 2m (6.6 ft).
2 supplied for Ground Unit. 2 supplied in
replacement of 4200-MTRX-2 cables for each SMU
configured with a 4200-PA.
4200-RPC-2
Remote PreAmp Cable (1 supplied for each
PreAmp), 2m (6.6 ft).
236-ILC-3
Interlock Cable, 3m (10 ft)
Line Cord
NEMA 5-15P for 100–115VAC.
CEE 7/7 (Continental European) for 240VAC.
Keyboard and Pointing Device
User Manual
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Semiconductor
Characterization System
4200-SCS
KTE Interactive Software Tools
KTE Interactive includes four software tools for operating and maintaining the 4200-SCS:
• Keithley Interactive Test Environment (KITE)—The 4200-SCS device characterization application
• Keithley User Library Tool (KULT)—Allows test engineers to integrate custom algorithms into KITE
using 4200-SCS or external instruments.
Model 4200-SCS Technical Data
• Keithley Configuration Utility (KCON)—Allows test engineers to define the configuration of GPIB
instruments, switch matrices, and analytical probers connected to the 4200-SCS. It also provides system diagnostics functions.
• Keithley External Control Interface (KXCI)—The 4200-SCS application for controlling the 4200-SCS
from an external computer via the GPIB bus.
Microsoft Windows NT/XP
Windows NT/XP Operating System
The operating system is a standard distribution of Microsoft Windows NT or XP. Newer systems are configured with the Windows XP Professional Operating System. Upgrades are available for older systems.
Contact the Keithley factory for supported versions and service packs.
Security and Administration Management
A third-party administration package is installed and configured on each system. This package provides
lab supervisors a simple interface for managing system security. The 4200-SCS is factory configured with
two accounts. The administrator account allows access to all system resources without limitation. The
administrator account has complete access to the security settings of the user account, which is designed
for day-to-day use.
Data Storage
Fixed disk
Internal high capacity fixed disk drive stores the operating system, application programs, and data files.
1.44MB Flexible Diskette Drive
Standard 3.5 inch, 1.44MB flexible diskette drive.
CD-RW Drive
Standard CD read-write drive is provided for data storage and retrieval.
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Connectivity
The 4200-SCS includes a 10/100BASET Ethernet interface with software drivers installed.
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Semiconductor
Characterization System
4200-SCS
The Keithley Interactive Test Environment (KITE)
The Keithley Interactive Test Environment (KITE) is the Model 4200-SCS Windows device characterization
application. It provides advanced test definition, parameter analysis
and graphing, and automation capabilities required for modern semiconductor characterization.
Model 4200-SCS Technical Data
KITE Projects
A project is a collection of related tests, organized in a hierarchy that parallels the physical layout of the
devices on a wafer. KITE operates on projects using an interface called the project navigator. The project
navigator simplifies organizing test files, test execution, and test sequencing.
The project navigator organizes tests into a logical hierarchy presented in a browser style format. This
structure allows users to define projects around wafer testing:
The project level organizes subsites and controls wafer looping execution.
The subsite level organizes devices and controls subsite test sequencing.
The device level organizes test modules, manages test module libraries and controls device
test sequencing.
The test module level performs tests, analyzes data, and plots results.
Selectable checkboxes allow enabling/disabling individual tests/plans.
Test Modules
Within KITE, two types of test modules are provided to capture the test input parameters, data analysis,
and plot setting for data. “Interactive Test Modules” provide a point-and-click interface for defining test
input parameters and controlling the 4200-SCS SMUs. “User Test Modules” provide a fill-in-the-blank interface to either factory-provided or user-written C language subroutines. These subroutines can control
internal 4200-SCS instruments and/or external instruments and systems through the RS-232 or GPIB
interface. This dual approach provides an extendable test environment that gives the users the same capabilities for data analysis, plotting, and output and automation, whether the instrument used is part of the
base system or an external instrument. It also offers users the flexibility to write complex test algorithms
for control of either internal or external instruments.
Definition Tab—Interactive Test Module
The Definition Tab of an ITM provides a point-and-click interface for setting test input parameters that
control the 4200-SCS SMUs and defining parameter extractions. Two modes are available:
Sweep Mode
Forcing
Functions:
Common, Voltage Bias, Current Bias (VMU), Voltage Sweep, Current
Sweep, Voltage Step, Current Step, Voltage List Sweep, Current List
Sweep.
Measuring
Functions:
Measure Current or Programmed Current, Measure Voltage or
Programmed Voltage.
Fast, Normal, Quiet, and Custom Integration Times
SEMICONDUCTOR
Measure voltage, current or both on each sweep point, regardless of
forcing function.
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4200-SCS
Interactive Test Modules (ITM) are built from
three different major functions: Definition, Sheet
and Graph. The Definition Tab allows the operator to define a sweep or sampling mode test
using a graphical approach. The Sheet Tab stores
acquired data and provides an Excel®-like workbook for viewing and analyzing test results. The
Graph Tab provides a full-featured data plotting
tool capable of producing report-ready graphs.
The Status Tab reports any errors that would
interfere with test execution.
Definition Tab—User Test Module
The Definition Tab of a UTM presents users a tabular fill-in-the-blank interface for entering input parameters to call a C language subroutine. UTMs provide the ability to control internal SMUs and GPIB and RS232 devices. This screen allows the user to select a user library, a subroutine module, and then enter the
desired input parameters. Test results are returned to the Sheet Tab for viewing and analysis.
Model 4200-SCS Technical Data
Sampling Mode
Linear sampling of up to 4096 points. Sampling period is programmable from 1ms to 1000s. Additional
hold delay before first sample of up to 1000s.
Two methods of parameter extraction are available. The Formulator provides automated line fits and
parameter extraction. A spreadsheet offers standard spreadsheet analysis tools.
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SEMICONDUCTOR
The User Test Module (UTM) has virtually identical functionality as the ITM. However, users
enter input parameters for subroutine calls in a
tabular interface in the UTM’s Definition Tab.
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Semiconductor
Characterization System
4200-SCS
Formulator functions
The Formulator performs data transformations for performing parameter analysis and line fits. The
Formulator supports the following functions:
• Mathematical Functions
Model 4200-SCS Technical Data
Addition (+), subtraction (-), division (/), multiplication (*), exponent (^), absolute value (ABS),
value at an index position (AT), Average (AVG), moving average (MAVG), conditional computation
(COND), derivative (DELTA), differential coefficient (DIFF), exponential (EXP), square root (SQRT),
natural logarithm (LN), logarithm (LOG), integral (INTG)
• Line Fits and Parameter Extraction Functions
Exponential line fit (EXPFIT), coefficient a (EXPFITA), coefficient b (EXPFITB)
Linear Fit (LINFIT), linear slope (LINFITSLP), x intercept (LINFITXINT), y intercept (LINFITYINT)
Logarithmic line fit (LOGFIT), coefficient a (LOGFITA), coefficient b (LOGFITB)
Linear Regression line fit (REGFIT), slope (REGFITSLP), x intercept (REGFITXINT), y intercept (REGFITYINT)
Tangent line fit (TANFIT), slope (TANFITSLP), x intercept (TANFITXINT), y intercept (TANFITYINT)
Maximum value (MAX), minimum value (MIN)
• Search Functions
Find Down (FINDD), Find Up (FINDU)
Maximum position (MAXPOS), minimum position (MINPOS)
First Position (FIRSTPOS), Last Position (LASTPOS)
Sub Array (subarray)
Formulator Constants
The Formulator supports user-supplied constants for use in parameter extractions. These constants are
factory installed:
PI = 3.14159 rad
K = 1.38065 × 10–23 J/K
Q = 1.60218 × 10–19 C
M 0 = 9.10938 × 10 –31 kg
EV = 1.60218 × 10–19 J
U0 = 1.25664 × 10–6 N/A
2
E0 = 8.85419 × 10 –12 F/m
SEMICONDUCTOR
H = 6.62607 × 10 –34 J-s
C = 2.99792 × 10 +8 m/s
KT/Q = 0.02568 V
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4200-SCS
Model 4200-SCS Technical Data
Sheet Tab—Data Viewing and Analysis
The Sheet Tab of a test module captures data from a test execution and allows calculations in a spreadsheet. The Sheet Tab operates like an Excel workbook with the following spreadsheets: the Data sheet,
the Calc sheet, the Settings sheet, and Append sheets.
Data Sheet
The Data sheet displays test results in real time. It is read-only so that results cannot be modified.
Calc Sheet
A spreadsheet that operates much like a standard Microsoft Excel® spreadsheet is available for computation with each test. The spreadsheet tool supports these functions:
Functions in the KITE Calc sheet
ABS
ACOS
ACOSH
ASIN
ASINH
ATAN
ATAN2
ATANH
AVERAGE
COS
COSH
EXP
FIXED
IF
LN
LOG
LOG10
LOOKUP
MATCH
MAX
MIN
NOW
PI
PRODUCT
ROUND
SIGN
SIN
SINH
SQRT
STDEVP
SUM
SUMSQ
TAN
TANH
VARP
Settings Sheet
The Settings sheet stores the test setup so that when the Sheet tab is exported as a workbook, users can
refer to the test configuration.
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SEMICONDUCTOR
Append Sheet
Append sheets store test results when the Append button is clicked. Data in Append sheets is automatically plotted on the graph. Test modules support up to twenty Append sheets.
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Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
Graph Tab—Plotting
The Graph Tab is a full-featured plotting tool for creating report-ready graphs. It allows real-time X-Y plotting of acquired and extracted data with one or two Y axes.
• Linear, Semilog, and Log/Log graphs.
• Real-time auto scaling, end of test auto scaling, or manual scaling.
• Six cursors with X-Y readout.
• Graphical line fitting.
• Plot overlay of multiple test executions.
• Four data variable readouts.
• User-formatted comment box, title, and axis labels.
Output
Files
• Sheet tab test results can be saved as a Microsoft Excel Workbook or delimited ASCII text file.
• Plots can be saved as bit map image (.bmp), JPEG (.jpg), or TIFF (.tif) files.
SEMICONDUCTOR
Display
• Flat Panel: 800 by 600 resolution.
• External SVGA: 1024 by 768 or 800 by 600 resolution.
Printers
• A generic printer driver is factory installed using standard Windows NT printer support.
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Semiconductor
Characterization System
4200-SCS
Example Projects
The 4200-SCS includes the following KITE projects to facilitate rapid startup and provide examples for
common semiconductor lab applications.
1. DEFAULT—The default project includes standard tests for MOSFETs, BIPOLAR transistors, resistors,
and diodes. This project helps users to get started quickly.
Model 4200-SCS Technical Data
2. IVSWITCH—The ivswitch project integrates control of a Keithley Model 707 or Model 708 external
switch matrix with device testing.
3. IVCVSWITCH—The ivcvswitch project integrates control of the Keithley Model 590
C-V Analyzer, the HP 4284 and a Keithley switch matrix to configure a combined
I-V/C-V characterization station. This project includes extractions of High Frequency C-V parameters
for both the Agilent 4284 and Keithley 590 including High Frequency C-V and G or R vs. V with extraction of Oxide Capacitance, Effective Oxide Charge Density, Oxide Thickness, Series Resistance and
capacitance adjustment, Doping Profile, Depletion Length, Flatband C and V, Threshold Voltage, Bulk
Doping, Metal-Semiconductor Work Function, Debye Length, Bulk Potential and Average Doping;
Pulsed High-Frequency C-V and Capacitance vs. Time.
4. IVPGSWITCH—The ivpgswitch project integrates an external pulse generator and performs a stressmeasure sequence.
5. PROBESITES—The probesites project illustrates how KITE controls semi-automatic probe stations for
automated probing of one subsite per site on a single wafer.
6. PROBESUBSITES—The probesubsites project illustrates how KITE controls semi-automatic probe
stations when testing multiple subsites per site on a single wafer.
7. SIMCV—The simcv project provides routines for simultaneous C-V measurement using the Keithley
System 82. Typical MOS device parameters, such as doping profile, flat band voltage, threshold voltage, interface trap density, and band bending, are extracted.
8. STVS—The stvs project uses the Keithley System 82 to perform an STVS (Simultaneous Triangular
Voltage Sweep) measurement at high temperature. Mobile ion density is extracted.
9. LIFETIME—The lifetime project performs high frequency C-t measurements using the Keithley
System 82 on MOS capacitors. The minority carrier recombination lifetime and surface velocity are
extracted using a Zerbst Plot.
10. HCI_1_DUT—This is a Hot Carrier Injection (HCI) project on one four-terminal N-MOSFET. No
switch matrix is involved in the measurement. Parameters monitored between two successive stresses
include Idoff, Idon, Ig, Vt, and Gm. Those parameters are measured on both forward (normal operation
condition) and reverse (reverse source and drain bias) conditions. If only a subset of these parameters
is needed, it’s possible to deselect the test(s) that include the unwanted parametric measurements.
SEMICONDUCTOR
11. HCI_4_DUT—This is a Hot Carrier Injection (HCI) project on two four-terminal N-MOSFETs and two
four-terminal p-MOSFETs with a switch matrix. Before running the project, the switch matrix and correct pin assignment should be configured in the Keithley Configuration Utility (KCON). Parameters
monitored between two successive stresses include Idoff, Idon, Ig, Vt, and Gm. Those parameters are
measured on both forward (normal operation condition) and reverse (reverse source and drain bias)
conditions. If only a subset of these parameters is needed, it’s possible to deselect the test(s) that
include the unwanted parametric measurements. Also, if less than four devices are tested, it’s possible
to deselect the unwanted device plan in the project tree.
12. NBTI_1_DUT—This is a Negative Bias Temperature Instability (NBTI) project on one four-terminal
P-MOSFET. Parameters monitored between two successive stresses include Idoff, Idon, Ig, Vt, and Gm. If
only a subset of these parameters is needed, it’s possible to deselect the test(s) that include the
unwanted parametric measurements.
13. EM_const_I—In this electromigration project, first, the hotchuck is raised to the desired high temperature. Then, the resistance of the metal line is measured before it is stressed (using Kelvin connection). Then, constant current is forced to stress the device. During the stress, the resistance of the
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Semiconductor
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4200-SCS
metal line is measured. If the degradation of the metal line exceeds the design limit or voltage compliance is reached, the project will exit.
14. QBD—This charge-to-breakdown project consists of two QBD tests on gate dielectrics (V-Ramp and JRamp). Those two tests follow JEDEC Standard 35-A. An additional test performs an I-V measurement
under normal work conditions to obtain input parameters for the V-Ramp and J-Ramp tests.
Model 4200-SCS Technical Data
Automation
Test Sequencing
The Keithley Interactive Test Environment (KITE) provides “point and click” test sequencing on a device,
a group of devices (subsite, module, or test element group), or a user-programmable number of probe
sites on a wafer.
Prober Control
Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user-programmable number of probe sites on a wafer. Contact the factory for a list of supported analytical probers. A “manual” prober mode prompts the operator to perform prober operations during the test sequence.
Supported Probers
Manual Prober
Use the manual prober driver to test without utilizing automatic prober functionality. Manual prober
replaces all computer control of the prober with that of the operator. At each prober command, a dialog
box will appear, instructing the operator what operation is required.
Fake Prober
The Fake prober is useful when prober actions are not desired, such as when debugging, without having
to remove prober commands from a sequence.
Cascade Microtech Summit™ 12K Series, verified with Nucleus UI Version 2.0
Karl Suss Model PA-200, verified with Wafermap for ProberBench NT Version 3.1,
NI-GPIB Driver for ProberBench NT Version 3.10, PBRS232 Interface for ProberBench NT Version 3.00,
Navigator for ProberBench NT Version 3.1, Remote Communicator for ProberBench NT Version 3.00
MicroManipulator 8860 Prober, verified with pcBridge Version 2.0.2, pcLaunch Version 2.0.9, pcIndie
Version 2.0.7, pcWafer Version 2.0.8, pcNav Version 2.0.8, pcRouter Version 2.0.9
Keithley User Library Tool (KULT)
SEMICONDUCTOR
The Keithley User Library Tool supports creating and integrating C-language subroutine libraries with the
test environment. User library modules are accessed in KITE through User Test Modules. Factory supplied
libraries provide up and running capability for supported instruments. Users can edit and compile subroutines, then integrate libraries of subroutines with KITE, allowing the 4200-SCS to control an entire test
rack from a single user interface. KULT is derived from the Keithley S600 and S400 Series Parametric Test
Systems. This simplifies migration of test libraries between the 4200-SCS and Keithley parametric testsystems.
Standard User Libraries
The 4200-SCS includes the following useful subroutine libraries, which provide “out of the box” integration and control of Keithley switch matrix systems and other common device characterization equipment.
Users access these libraries using the UTM definition tab described on page 9.
parlib
The parlib user library is used for extracting device parameters on bipolar and MOSFET transistors.
Extracted parameters include Beta, resistance, threshold voltage, and Vds-id sweeps and Vgs-id sweeps for
MOSFETs.
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Semiconductor
Characterization System
4200-SCS
wlrlib
The wlrlib user library includes routines for performing charge-to-breakdown tests (QBD) on gate
dielectrics. Included modules are qbd_rampv (V-Ramp method) and qbd_rampj (J-Ramp method).
Model 4200-SCS Technical Data
hp4294ulib
The hp4294ulib user library performs capacitance measurements, C-V sweeps, and frequency sweeps
using the Hewlett-Packard (Agilent) 4294 LCR meter. This library also includes calibration routines to
perform phase, open, short, and load calibrations.
hotchuck_triotek
The hotchuck_triotek user library controls Triotek hotchucks. This library will set the target temperature and wait until the target is reached before exiting.
SEMICONDUCTOR
matrixulib
The matrixulib user library connects instrument terminals to output pins using a Keithley 707A or
708A switch system when configured as a general-purpose (Model 4200-GP-RS-XX), low current
(Model 4200-LC-LS-XX) or ultra-low current matrix (Model 4200-UL-RS-XX or Model 4200-UL-LS-XX).
ki590ulib
The ki590ulib user library performs 100kHz or 1MHz capacitance measurements, C-V sweeps, C-V
pulse sweeps, C-t sweeps, and cable compensation for the Keithley Model 590 C-V Analyzer.
hp4284ulib
The hp4284ulib user library performs capacitance measurements and C-V sweeps using the HewlettPackard 4284 LCR meter.
hp8110ulib
The hp8110ulib performs initialization, setup, and triggering for the Hewlett-Packard HP8110 (or
81110) pulse generator.
ki42xxulib
The ki42xxulib user library provides an example subroutine for performing a MOSFET ON resistance
(RON) test routine using the 4200-SCS LPTLIB interface. (See the next section for more information on
the LPTLIB interface.)
ki82ulib
The ki82ulib performs simultaneous C-V, C-t, and Q/t measurements and cable compensation for the
Keithley System 82 Simultaneous C-V System.
ki595ulib
The ki595ulib performs Q/t sweeps and C-V sweeps using the Keithley Model 595 Quasistatic C-V
Meter.
PRBGEN
The PRBGEN user library provides test modules to initialize the prober driver, move to the next site or
subsite in the prober’s wafer map, make or break contact between the probes and the wafer, and
obtain the X position and Y position of the prober. Contact the factory for supported probers.
winulib
The winulib user library provides user interface routines for operator prompting and input.
C language
Microsoft Visual C++ Standard Edition provides the compiler for the Keithley User Library Tool. Users
can develop test subroutine libraries using the full capabilities of C-language programming.
LPTLIB Control
The LPTLIB provides an application programming interface for developing C-language test routines that
control 4200-SMUs and supported external instruments and switches. This simple connect/source/
measure approach eliminates the need for low-level programming and allows the user to focus on creating new test routines quickly. The 4200-SCS LPTLIB is derived from the Keithley S600 series and S400
series parametric test systems to simplify migration of test routines between the 4200-SCS and Keithley
parametric test systems.
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Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
Table 1. 4200-SCS LPTLIB functions
GROUP
FUNCTION CALL
Instrument
devclr
devint
(Device clear)
(Device initialize)
Matrix
addcon
clrcon
conpin
conpth
delcon
(Add connection)
(Clear connection)
(Connect pin)
(Connect path)
(Delete connection)
Ranging
lorangeX
rangeX
setauto
(Define lowest range. X = i, v)
(Set active range. X = i, v)
(Re-enable autorange. RangeX automatically disables
autorange)
Sourcing
forceX
limitX
mpulse
pulseX
(Force i or v)
(Set the i or v limit/compliance)
(Generate voltage pulse and measure the current)
(Generate a pulse. X = i, v)
Measuring
avgX
measX
(Make multiple measurements and average them.
Return the result. X = i, v)
(Make a block of measurements and return the results.
X = i, v)
(Measure the timer immediately)
(Integrate. Measure i or v over a integer number of power
line cycles.)
(Measure. X = i, v, t)
Combination
asweepX
bsweepX
clrscn
clrtrg
rtfary
savgX
scnmeas
searchX
sintgX
smeasX
sweepX
trigXg
trigXl
(Array sweep. X = i, v)
(Linear breakdown sweep. X = i, v)
(Clear the scan table)
(Clear the active trigger condition)
(Return the FORCE array)
(Average measurements for each point in a sweep. X = i, v)
(Make measurements simultaneously on multiple instruments)
(Binary search measurement. X = i, v)
(Sweep integrate. X = i, v)
(Sweep measure. X = i, v, t)
(Linear sweep. X = i, v)
(Trigger if measurement ≥ value. X = i, v, t)
(Trigger if measurement ≤ value. X = i, v, t)
Timing
adelay
delay
disable
enable
rdelay
(Array delay)
(Delay)
(Disable timer)
(Enable timer)
(Realtime delay)
bmeasX
SEMICONDUCTOR
imeast
intgX
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Semiconductor
Characterization System
4200-SCS
GROUP
FUNCTION CALL
GPIB
kibcmd
kibdefclr
kibdefdelete
kibdefint
kibrcv
kibsnd
kibspl
kibsplw
(Send low level GPIB command to instrument)
(Define string to clear GPIB instrument on devclr)
(Delete GPIB definition strings for devclr and devint)
(Define string to clear GPIB instrument on devint)
(Read device dependent string)
(Send device dependent command)
(Serial poll an instrument)
(Synchronous serial poll)
RS-232
kspcfg
kspsnd
ksprcv
kspdefclr
kspdefdelete
kspdefint
(Configure the port)
(Read device dependent string)
(Send device dependent command string)
(Define string to clear RS-232 instrument on devclr)
(Delete RS-232 definition strings for devclr and devint)
(Define string to clear RS-232 instrument on devint)
General
getstatus
setmode
tstdsl
tstsel
(Read system and instrument status information)
(Set operating mode)
(Test station deselect)
(Test station select)
Execution*
execut
inshld
(Executes Devint)
(Executes No operation)
Arithmetic*
kfpabs
kfpadd
kfpdiv
kfpexp
kfplog
kfpmul
kfpneg
kfppwr
kfpsqrt
kfpsub
(Floating point absolute value)
(Floating point add)
(Floating point divide)
(Floating point raise e to a power)
(Floating point logarithm)
(Floating point multiply)
(Floating point negative value)
(Floating point raise a number to a power)
(Floating point square root)
(Floating point subtract)
Model 4200-SCS Technical Data
TTable 1. 4200-SCS LPTLIB functions (continued)
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*Provided for compatibility to other platform versions of LPTLIB.
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Semiconductor
Characterization System
4200-SCS
System Configuration and Diagnostics Keithley External Control Interface
(KCON)
(KXCI)
Model 4200-SCS Technical Data
The Keithley Configuration Utility (KCON) simplifies programming and maintaining a fully integrated test station. KCON provides a single interface for configuring external instruments, switch matrices, and analytical probers, and for
executing system diagnostics.
External Instrument Configuration
KCON allows lab managers to integrate external instruments with the 4200SCS and a supported switch matrix. After the user configures the GPIB
addresses for supported instruments Keithley-supplied libraries will function
and test modules can be transferred between 4200-SCS systems without any
user modification. In addition to the standard supported instruments, the
General Purpose Instrument allows users to develop subroutines and control
switches for a generic two-terminal or four-terminal instrument. For the
widest possible system extensibility, users can develop their own test libraries
for general purpose instruments.
Switch Matrix Configuration
Users define the connection of 4200-SCS instruments and external instruments to device under test (DUT) pins through a supported switch matrix
configuration. (See Switch Matrix Support and Standard Configurations). Once
connections are defined, users need only enter instrument terminal name and
pin number to establish connections. The 4200-SCS applications and standard
user libraries manage the routing of test signals between instrument terminals
and DUT pins. The user doesn’t need to remember and program row and column closures. Test modules can transfer between 4200-SCS systems without
re-entering connection information.
SEMICONDUCTOR
4200-SCS Instrument Diagnostics
Users can confirm system integrity of SMUs and Remote PreAmps by running
a system self-test. For more complex problems, the system’s configuration
analysis tool can generate reports that assist Keithley’s Technical Support staff
in diagnosing problems.
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• Common Mode Commands
IT, DR, BC, ID
RS (defines resolution of returned data up to 6 digits)
MP (allows mapping an SMU to a VS or VM and back to an SMU)
Accessories Supplied
4200-MTRX-2
Ultra Low Noise SMU Triax Cable (Two supplied for
each SMU), 2m (6.6ft). Not included with SMUs configured with a 4200-PA Remote PreAmp.
4200-TRX-2
Ultra Low Noise PreAmp Triax Cable, 2m (6.6 ft). Two
supplied for Ground Unit. Two supplied in replacement of 4200-MTRX-2 cables for each SMU configured
with a 4200-PA.
4200-RPC-2
Remote PreAmp Cable (One supplied for each
PreAmp), 2m (6.6 ft).
236-ILC-3
Interlock Cable, 3m (10ft).
Line Cord
NEMA 5-15P for 100-115VAC or CEE 7/7 (Continental
European) for 240VAC.
User Manual
Printed User Manual. User Manual and Reference
Manual are also supplied on the 4200-SCS Complete
Reference CD-ROM.
Optional Instrumentation
4200-SMU
Medium Power Source-Measure Unit for 4200-SCS.
100mA to 100fA, 200V to 1µV, 2 Watt
4210-SMU
High Power Source-Measure Unit for 4200-SCS. 1A to
100fA, 200V to 1µV, 20Watt
4200-PA
Remote PreAmp Option for 4200-SMU and 4210-SMU,
extends SMU to 0.1fA resolution
(U.S. only)
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Keithley External Control Interface provides external GPIB control of the
4200-SCS using a command interface designed for basic compatibility with the
4145B command set of the Hewlett-Packard HP4155/56. The following commands are supported.
• System Mode Commands
DE, CH, VS, VM
SS, VR, IR, VP, IP, VC, IC, SC, HT, DT
SM, WT, IN, NR, DM, XN, YA, YB, XT
MD, ME
SV, GT, DO
RG (defines lowest current range when autoranging, including ranges
below 1nA)
• User Mode Commands
US, DV, DI, DS, TV, TI
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4200-SCS
4200-CAL
4200-SCS Return Calibration Service
This is a single event return to factory calibration service. Includes calibration back to factory specifications,
before and after data reports compliant with ANSI/NCSL
Z540-1 and ISO 17025 report requirements. Does not
include shipping.
4200-3Y-CAL
4200-SCS 3 Year Return Calibration Service
This service provides 3 years of calibrated operation of
the 4200-SCS. Includes two calibrations back to factory
specifications, before and after data reports compliant
with ANSI/NCSL Z540-1 and ISO 17025 report requirements. Does not include shipping.
4200-5Y-CAL
4200-SCS 5 Year Return Calibration Service
This service provides 5 years of calibrated operation of
the 4200-SCS. Includes four calibrations back to factory
specifications, before and after data reports compliant
with ANSI/NCSL Z540-1 and ISO 17025 report requirements. Does not include shipping.
Repair Options
4200-REPAIR
4200-SCS Repair Service
Contact the factory for repair estimates.
4200-3Y-REPAIR
4200-5Y-REPAIR
4200-SCS 3 Year Hardware Warranty Extension
This service includes 3 years of return to factory repairs
from date of shipment (including the standard product
warranty) and return shipping. If an instrument proves
defective in parts or workmanship, Keithley will repair
and calibrate or replace the 4200-SCS and return it,
shipping prepaid. Must be ordered at the same time as
the 4200-SCS. (Rush shipping available with additional
charges.)
4200-SCS 5 Year Hardware Warranty Extension
This service includes 5 years of return to factory repairs
from date of shipment (including the standard product
warranty) and return shipping. If an instrument proves
defective in parts or workmanship, Keithley will repair
and calibrate or replace the 4200-SCS and return it,
shipping prepaid. Must be ordered at the same time as
the 4200-SCS. (Rush shipping available with additional
charges.)
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Instrumentation Upgrades
4200-UPGRADE
4200-SCS Hardware Upgrade Service
Includes installation of new instruments, calibration and
verification. This item must be included, in addition to
the price of any instruments purchased, when a system
is returned to the factory for an instrumentation
upgrade (adding SMUs or PreAmps). This fee is charged
only once for an upgrade event. The customer may add
any quantity or type of instrument to their system for
the upgrade fee. The service fee includes a system burnin and calibration. This service fee does not apply
to software upgrades or Model 4200-CPU-2G/C
and 4200-CPU-2G/F upgrades. Does not include
shipping.
4200KTEI-5.0
4200-SCS Keithley Test Environment Interactive (KTEI)
software test suite version 5.0; includes KTEIV5.0 CD
and Complete Reference V5.0 CD.
4200-CPU-2G/C
4200-SCS upgrade service; includes installation of new
2GHz single board computer (w/512MB SDRAM, 100BaseT network port, ATI M6 graphics controller), three
USB 1.1 ports (two front, one back), fresh installation of
Windows XP Professional operating system (not
upgrade—See Note). Also includes installation of
Model 4200KTEI-5.0 software test suite (for 4200-SCS/C
(CRT) systems only).
4200-CPU-2G/F
Same as 4200-CPU-2G/C except for 4200-SCS/F (Flat
Panel) systems only.
Note: The 4200-CPU-2G/C and -/F upgrades restore the 4200-SCS to
factory conditions. The hard drive is reformatted and all old data
and projects will NOT be preserved. Be sure to back up all data and
projects prior to ordering either of these upgrades.
Approved Third-Party Software:
Adobe Acrobat Reader 4.0 or later
Adobe Acrobat 4.0 or later
Diskeeper 5.0 or later
Microsoft Excel
Microsoft Word
Full Armor 5.5 or later
Internet Explorer 5.0 or later
Norton AntiVirus 2000 6.0 or later
Visual C++ .net
Windows NT 4.0 & service pack 6a OR Windows XP
Professional
McAfee VirusScan 7.0 or later
Symantec pcAnywhere 11.0
Novell Client Services
SEMICONDUCTOR
Calibration Options
Return to factory calibration services provide calibration back to factory specifications.
Model 4200-SCS Technical Data
Support Options
(U.S. only)
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19
Semiconductor
Characterization System
Model 4200-SCS Technical Data
4200-SCS
Warranty Summary
This section summarizes the warranties of the
4200-SCS. For complete warranty information,
refer to the 4200-SCS Reference Manual. Any
portion of the product which is not manufactured by Keithley is not covered by this warranty and Keithley will have no duty to
enforce any other manufacturer’s warranties.
Hardware Warranty
Keithley Instruments, Inc. warrants the
Keithley manufactured portion of the hardware for a period of one year from defects in
materials or workmanship; provided that such
defect has not been caused by use of the
Keithley hardware which is not in accordance
with the hardware instructions. The warranty
does not apply upon any modification of
Keithley hardware made by the customer or
operation of the hardware outside the environmental specifications.
Software Warranty
Keithley warrants for the Keithley produced
portion of the software or firmware will conform in all material respects with the published specifications for a period of ninety
(90) days; provided the software is used on
the product for which it is intended in accordance with the software instructions. Keithley
does not warrant that operation of the software will be uninterrupted or error-free, or
that the software will be adequate for the customer’s intended application. The warranty
does not apply upon any modification of the
software made by the customer.
Embedded PC Policy
Caution: Keithley Instruments warrants the performance of the Model 4200-SCS only with the factoryapproved Windows Operating system and applications software preinstalled on the 4200-SCS by Keithley
Instruments. Systems that have been modified by the addition of un-approved third-party application software (software that is not explicitly approved and supported by Keithley Instruments) are not covered
under the product warranty. Model 4200-SCS systems with unapproved software may need to be restored
to factory approved condition before any warranty serve can be performed (e.g., calibration, upgrade,
technical support). Services provided by Keithley Instruments to restore systems to factory approved condition will be treated as out-of-warranty services with associated time and material charges. Approved software is listed under “Approved Third-Party Software.” The Model 4200-SCS can safely use this third-party
software.
CAUTION: DO NOT reinstall or upgrade the Windows operating system (OS) on any Model
4200-SCS. This action should only be performed at an authorized Keithley service facility.
Violation of this precaution will void the Model 4200-SCS warranty and may render the
Model 4200-SCS unusable. Any attempt to reinstall or upgrade the Windows operating system
will require a return-to-factory repair and will be treated as an out-of-warranty service,
including time and material charges.
Optional Accessories
Computer Options
4200-CRT
17˝ SVGA Color Monitor
4200-MOUSE
Microsoft Ambidextrous 2 Button Mouse (Note: a pointing device is integrated
with the 4200 keyboard.)
4200-FPD-RM
Rack mounted 1U, 17˝ FPD with keyboard and trackball (See photo on back
cover)
Remote PreAmp
4200-MAG-BASE
4200-VAC-BASE
4200-TMB
Mounting Accessories
Magnetic base for mounting 4200-PA on a prober platen
Vacuum base for mounting 4200-PA on a prober platen
Triaxial mounting bracket for mounting 4200-PA on a triaxial mounting panel
SEMICONDUCTOR
Other Accessories
4200-MAN
Printed Manual set for 4200-SCS (Manual on CD-ROM is included in Base Unit)
4200-CART
Roll-around cart for 4200-SCS
Model 8006
Component Test Fixture
Model 8007
Semiconductor Test Fixture
C-V Options
4200-590
Model 5909
1.888.KEITHLEY
(U.S. only)
www.keithley.com
20
Model 590/100k/1M C-V Analyzer with IEEE-488 Interface, 1m IEEE cable,
2 ea. BNC-Triaxial Adapters
Calibration Sources for Model 590 C-V Analyzer
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Semiconductor
Characterization System
4200-SCS
Switch Matrix Options
Model 4200-SCS Technical Data
Overview
A number of useful standard switch matrix configurations are available for 4200-SCS. Each standard configuration includes all components, cabling, and instructions for the user to assemble the switch matrix
and add the matrix configuration to the 4200-SCS test environment. Once a supported configuration is
added to the test environment, the 4200-SCS standard user library (matrixulib) connects instrument terminals to output pins through a simple “fill-in-the-blank” interface.
Ultra-Low Current/Local Sense Configuration (4200-UL-LS-XX)
The Ultra-Low Current/Local Sense switch configuration is built using the Keithley Model 7174A Low
Current Matrix Card, which is designed for semiconductor research, development and production applications requiring high quality, high performance switching of I-V and C-V signals. This configuration provides eight instrument inputs with up to 72 output pins at only 10fA typical offset current.
4200-UL-LS-XX
4200
SMU1
SMU2
SMU3
SMU4
GNDU
TYPICAL BLOCK DIAGRAM
4200-PA
4200-TRX-2
4200-TRX-2
4200-MTRX-2
4200-MTRX-2
4200-TRX-2
7174A
Card 1
7174A
Card 2
7174A
Card 6
Pins 1–12
4200-TRX-3
Pins 13–24
4200-TRX-3
Pins 61–72
4200-TRX-3
A
B
C
D
E
F
590
C-V Meter
IN
OUT
7051-5
G
7051-5
H
7078-TRX-BNC
OR
HP4284
HP
HI
G
LP
LI
H
708A
(or 707A)
707A
(CS-701)
4200-UL-LS-12 (or -12/707A)
4200-UL-LS-24, -36, -48, -60, -72
4200-590
1 ea. 708A (or 707A) Switch Mainframe
1 ea. 7174A Switch Card
12 ea. 4200-TRX-3 Cable
1 ea. 7007-1 IEEE Cable
2 ea. 7078-TRX-BNC Adapter
1 ea. 7078-PEN Light Pen
1 ea. 707A Switch Mainframe
1 ea. 7174A for each 12 pins
12 ea. 4200-TRX-3 Cable for each 12 pins
1 ea. 7007-1 IEEE Cable
2 ea. 7078-TRX-BNC Adapter
1 ea. 7078-PEN Light Pen
1 ea. 590/100k/1M
C-V Meter
2 ea. 7078-TRX-BNC
Adapter
1 ea. 7007-1 IEEE
Cable
Connector Type: 3-lug Triax
Maximum Signal Level: 200V, 2A
Offset Current: 100fA max, 10fA typical
1.888.KEITHLEY
Maximum Leakage: 0.01pA/V
3dB Bandwidth: 30MHz typical
SEMICONDUCTOR
Coax tees not included
(U.S. only)
www.keithley.com
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O F
C O N F I D E N C E
21
Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
Ultra-Low Current/Remote Sense Configuration (4200-UL-RS-XX)
Remote sensing is more accurate for voltage sourcing and measuring, particularly at currents greater than
approximately 10mA, but degrades the performance of C-V meters and pulse generators. The Ultra-Low
Current/Remote Sense switch configuration is built using the Keithley Model 7174A Low Current Matrix
Card, which is designed for semiconductor research, development and production applications requiring
high quality, high performance switching of I-V and C-V signals. The configuration provides six instrument
inputs with up to 30 output pins at only 10fA typical offset current.
4200-UL-RS-XX
TYPICAL BLOCK DIAGRAM
4200-PA
4200
SMU1
4200-TRX-2
1
4200-TRX-2
2
4200-MTRX-2
3
4200-MTRX-2
4
4200-MTRX-2
5
4200-MTRX-2
6
4200-MTRX-2
7
4200-MTRX-2
8
FORCE
SENSE
SMU2
FORCE
SENSE
SMU3
FORCE
SENSE
SMU4 FORCE
or GNDU SENSE
(4) 7078-TRX-BNC
HP4284
9
HP
10
HI
11
LP
12
LI
OR
7174A
Card 2
590
IN
OUT
9
Pins 1-6
4200-TRX-3
10
7174A
Card 6
SEMICONDUCTOR
4200-UL-RS-6, -12, -18, -24, -30
Pins 24-30
4200-TRX-3
1 ea. 707A Switch Mainframe
1 ea. 7174A for input card
1 ea. 7174A for each 6 DUT pins
12 ea. 4200-TRX-3 for each 6 DUT pins
1 ea. 7007-1 IEEE Cable
4 ea. 7078-TRX-BNC Adapter
1 ea. 7078-PEN Light Pen
4200-590
1 ea. 590/100k/1M C-V Meter
1 ea. 7007-1 IEEE Cable
2 ea. 7078-TRX-BNC Adapter
1.888.KEITHLEY
707A
Connector Type: 3-lug Triax
Maximum Signal Level: 200V, 2A
Offset Current: 100fA max, 10fA typical
Maximum Leakage: 0.01pA/V
(U.S. only)
www.keithley.com
22
7174A
Card 1
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Semiconductor
Characterization System
4200-SCS
Low Current/Local Sense Configuration (4200-LC-LS-XX)
The Low Current/Local Sense switch configuration is built using the Keithley Model 7072 Semiconductor Matrix
Card, which is designed for semiconductor applications requiring good quality of I-V and C-V signals. The configuration provides eight instrument inputs with up to 72 output pins with less than 1pA offset current.
4200
SMU1
SMU2
SMU3
SMU4
GNDU
TYPICAL BLOCK DIAGRAM
4200-PA
4200-TRX-2
4200-TRX-2
4200-MTRX-2
4200-MTRX-2
4200-TRX-2
7072
Card 1
7072
Card 2
7072
Card 6
Pins 1–12
4200-TRX-3
Pins 13–24
4200-TRX-3
Pins 61–72
4200-TRX-3
Model 4200-SCS Technical Data
4200-LC-LS-XX
A
B
C
D
E
F
590
C-V Meter
IN
OUT
7051-5
G
7051-5
H
7078-TRX-BNC
OR
HP4284
HP
HI
708A
(or 707A)
G
707A
(CS-701)
LP
LI
H
Coax tees not included
4200-LC-LS-12 (or -12/707A)
4200-LC-LS-24, -36, -48, -60, -72
1 ea. 708A (or 707A) Switch Mainframe
1 ea. 7072 Matrix Switch Card
12 ea. 4200-TRX-3 Cable
1 ea. 7007-1 IEEE Cable
2 ea. 7078-TRX-BNC Adapter
1 ea. 7078-PEN Light Pen
1 ea. 707A Switch Mainframe
1 ea. 7072 for each 12 pins
12 ea. 4200-TRX-3 Cable for each 12 pins
1 ea. 7007-1 IEEE Cable
2 ea. 7078-TRX-BNC Adapter
1 ea. 7078-PEN Light Pen
1.888.KEITHLEY
SEMICONDUCTOR
Connector Type: 3-lug triax
Maximum Signal Level: 200V, 1A
Offset Current: <1pA (Rows A - B)
Maximum Leakage: 0.1pA/V
3dB Bandwidth: 5MHz typical (Rows G - H)
(U.S. only)
www.keithley.com
A
G R E A T E R
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O F
C O N F I D E N C E
23
Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
General-Purpose/Remote Sense Configuration (4200-GP-RS-XX)
The General-Purpose/Remote Sense switch configuration is built using the Keithley Model 7071 GeneralPurpose Matrix Card, which is designed for applications requiring cost-effective switching of I-V and C-V
signals. Remote sensing is more accurate for voltage sourcing and measuring, particularly at currents
greater than approximately 10mA. The configuration provides eight instrument inputs with up to 72 output pins with less than 100pA offset current. Each crosspoint provides HI, LO, and GUARD signal
switching.
4200-GP-RS-XX
4200
SMU1
FORCE
SENSE
SMU2
FORCE
SENSE
SMU3
FORCE
SENSE
SMU4
FORCE
SENSE
GNDU
FORCE
SENSE
590
C-V Meter
IN
OUT
TYPICAL BLOCK DIAGRAM
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
4200-MTRX-2
7051-5
7051-5
OR
SEMICONDUCTOR
HP
HI
G
G
LP
LI
H
H
7071
Card 2
7071
Card 6
Pins 13–24
7078-MTC-20
Pins 61–72
7078-MTC-20
A
A
B
B Screw
Terminals
C Strip
& Tin
C
D
D
E
E
F
F
G
G
H
H
Pins 1–12
7078-MTC-20
HP4284
708A
(or 707A)
707A
4200-GP-RS-12 (or -12/707A)
4200-GP-RS-24, -36, -48, -60, -72
1 ea.
1 ea.
1 ea.
1 ea.
1 ea.
1 ea.
1 ea.
1 ea.
1 ea.
1 ea.
708A (or 707A) Switch Mainframe
7071 Switch Card
7078-MTC-20 Cable
7007-1 IEEE Cable
7078-PEN Light Pen
707A Switch Mainframe
7071 for each 12 pins
7078-MTC-20 Cable for each 12 pins
7007-1 IEEE Cable
7078-PEN Light Pen
Maximum Signal Level: 200V, 1A
Offset Current: <100pA
Maximum Leakage: 100pA/V
3dB Bandwidth: 5MHz typical
Connector Type: Quick disconnect using 38-pin connectors or screw terminals.
1.888.KEITHLEY
(U.S. only)
www.keithley.com
24
7071
Card 1
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Semiconductor
Characterization System
4200-SCS
4200-CAB-20UX
20U Cabinet (35 in.)
4200-CAB-25UX
25U Cabinet (44 in.)
4200-CAB-34UX
34U Cabinet (60 in.)
4200-RM
Slide Rack Mounting Kit for 4200-SCS/F and 4200-SCS/C
4200-CRT-RM
Fixed Rack Mounting Kit for 4200-CRT
4200-KEY-RM
Slide Rack Mounting Kit for standard keyboard and pointing device
4200-FPD-RM
Rack mounted 1U, 17˝ FPD with keyboard and trackball (See photo on back cover)
Model 2288-1G
Model 590 Rack Mount Kit
Model 4200-SCS Technical Data
Cabinets and Mounting Accessories
Additional Cables and Connectors1
Remote PreAmp Cable, 0.3m (for use inside prober shield)
4200-RPC-2
Remote PreAmp Cable, 2m (for remote location of 4200-PA, one included with
each 4200-PA)
4200-RPC-3
Remote PreAmp Cable, 3m (for remote location of 4200-PA)
4200-RPC-6
Remote PreAmp Cable, 6m (for remote location of 4200-PA)
4200-TRX-0.3
Ultra Low Noise PreAmp Triax Cable, 0.3m, (Triax-Triax, connects 4200-PA to a test
fixture, recommended for remote location of the 4200-PA)
4200-TRX-1
Ultra Low Noise PreAmp Triax Cable, 1m, (Triax-Triax, connects
4200-PA to a test fixture)
4200-TRX-2
Ultra Low Noise PreAmp Triax Cable, 2m, (Triax-Triax, connects
4200-PA to a test fixture, two included with each 4200-PA)
4200-TRX-3
Ultra Low Noise PreAmp Triax Cable, 3m, (Triax-Triax, connects
4200-PA to a test fixture)
4200-MTRX-1
Ultra Low Noise SMU Triax Cable, 1m (Mini Triax-Triax, connects 4200 SMUs to a
test fixture)
4200-MTRX-2
Ultra Low Noise SMU Triax Cable, 2m (Mini Triax-Triax, connects 4200 SMUs to a
test fixture, two included with each 4200 SMU that is not configured with a Remote
PreAmp )
4200-MTRX-3
Ultra Low Noise SMU Triax Cable, 3m (Mini Triax-Triax, connects 4200 SMUs to a
test fixture)
236-ILC-3
Interlock Cable, 3m (one included with each 4200-SCS)
7007-1
Shielded IEEE-488 Cable (1m)
7007-2
Shielded IEEE-488 Cable (2m)
7078-TRX-BNC
Coaxial connector for connecting coax instruments to a triax matrix
1
SEMICONDUCTOR
4200-RPC-0.3
All 4200-SCS systems and instrument options are supplied with required cables (2m length).
1.888.KEITHLEY
(U.S. only)
www.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
25
Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
Front and Rear Panel Photographs
The 4200-SCS is designed for rack mounting. It has the same dimensions and occupies the same
rack space as semiconducor parametric analyzers that may already be in use. The 4200-SCS/C
(Composite Front Bezel) eliminates the flat panel display for users planning to use an external CRT
exclusively. Excellent for use with the 4200-FPD-RM rack mount display with keyboard.
Standard parallel printer port
SEMICONDUCTOR
RS-232 port
Configurable
from 2 to 8
SMUs
10/100BASE-T LAN port
SVGA monitor port
1.888.KEITHLEY
GPIB interface controls external instruments or
allows external control of the 4200-SCS using
an HP 4145 style command language.
(U.S. only)
www.keithley.com
26
Low-noise ground unit with remote sense
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
PreAmp Mounting and Cabling
PreAmps ship factory installed for local operation in numerical order, i.e.,
SMU1, SMU2, SMU3… up to the number of PreAmps specified.
Remote PreAmp Cables (4200-RPC) provide analog signal paths and digital control when the 4200-PA is placed in a remote location.
An optional vacuum (Model 4200-VAC-BASE) or magnetic (Model 4200-MAG-BASE) platen mounting base
allows the PreAmp to be located next to manipulators
on the chuck platen, eliminating measurement problems caused by long cable lengths when performing
ultra-low current measurements.
1.888.KEITHLEY
SEMICONDUCTOR
If platen space is not available, the triax mounting
bracket (Model 4200-TMB) allows users to locate the
PreAmp on dual triaxial connectors that may already
be installed for HP4156 Kelvin triax cables. This
mounting option reduces problems caused by long
cables without occupying platen space.
(U.S. only)
www.keithley.com
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
27
Semiconductor
Characterization System
4200-SCS
Model 4200-SCS Technical Data
4200-SCS Accessories
Model 4200-KEY-RM
Keyboard Rack Mount
Model 4200-CRT-RM
The CRT rack mount accepts up to 17 inch
monitors.
Model 4200-CART
Model 4200-FPD-RM
Roll-Around Cart for 4200-SCS
17˝ high resolution TFT display with keyboard and
trackball pointing device in a 1U high slide rack
mounting kit. Complete with cables and accessories to connect directly to the Model 4200-SCS.
Note: Unit is not CE marked for sale in EEC
countries.
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
SEMICONDUCTOR
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Keithley Instruments, Inc.
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com
Belgium: Sint-Pieters-Leeuw • 02-363 00 40 • Fax: 02-363 00 64 • www.keithley.nl
Italy: Milano • 02-48 39 16 01 • Fax: 02-48 30 22 74 • www.keithley.it
China: Beijing • 8610-82251886 • Fax: 8610-82251892 • www.keithley.com.cn
Japan: Tokyo • 81-3-5733-7555 • Fax: 81-3-5733-7556 • www.keithley.jp
Finland: Helsinki • 09-5306-6560 • Fax: 09-5306-6565 • www.keithley.com
Korea: Seoul • 82-2-574-7778 • Fax: 82-2-574-7838 • www.keithley.com
France: Palaiseau Cédex • 01-64 53 20 20 • Fax: 01-60 11 77 26 • www.keithley.fr
Netherlands: Gorinchem • 0183-635333 • Fax: 0183-630821 • www.keithley.nl
Germany: Germering • 089/84 93 07-40 • Fax: 089/84 93 07-34 • www.keithley.de
Singapore: Singapore • 65-6747-9077 • Fax: 65-6747-2991 • www.keithley.com
Great Britain: Theale • 0118 929 7500 • Fax: 0118 929 7519 • www.keithley.co.uk
Sweden: Solna • 08-509 04 600 • Fax: 08-655 26 10 • www.keithley.com
Switzerland: Zurich • 01-821 94 44 • Fax: 01-820 30 81 • www.keithley.ch
India: Bangalore • 080 212 8027 • Fax : 080 212 8005 • www.keithley.com
Taiwan: Hsinchu • 886-3-572-9077 • Fax: 886-3-572-9031 • www.keithley.com.tw
© Copyright 2003 Keithley Instruments, Inc.
Printed in U.S.A
No. 2199
110310KGW
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