Cool Drawer Dual Sensor

The Cool Drawer™ Dual Sensor is designed for use in critical processes where it is desirable to have a second crystal in the vacuum chamber. Water cooled, cast stainless steel sensor body, two Cool Drawer crystal holders and a pneumatically actuated shutter provide for a rugged sensor head with the extra reliability of a backup crystal. A cleaner, more reliable vacuum system installation is possible as there are no coaxial cables inside the chamber.

Sensor Configurations

Two sensor configurations are offered: The standard version and the right angle version. The standard version is designed for installation from the side or bottom of the chamber and the cooling tubes and the crystal face are parallel. The right angle version is designed for installation through the top of the vacuum system and the water cooling tubes are perpendicular to the crystal face. In either configuration, sensor head length can range from 10 to 66 cm (4" to 26").

Feedthroughs

INFICON offers two choices for feedthrough types: a 1" bolt feedthrough or a CF40 feedthrough.

Feedthrough Connections

Cool Drawer dual sensors must be ordered in combination with a feedthrough. The sensor / feedthrough connection can be either welded or made with compression fittings.

Compression fittings allow for easy adjustability without the need for brazing or welding. Sensor head length is adjustable from 10 to 66 cm (4" to 26"). When selected with the welded CF40, the sensor is designed for high temperature processes where reliability is critical. Constructed of stainless steel and ceramic materials, it is suitable for applications requiring high temperature bake out (see specifications).

The Cool Drawer Dual Sensor with the CF40 flange is pre-installed in a special two piece 7 cm (2 ¾") ConFlat

®

feedthrough. This allows the sensor head to be rotated independently of the flange and circumvents the dimensional limitations of the CF40 flange. Sensor / Feedthrough length can be specified between 10 and 66 cm (4" to 26").

ADVANTAGES

■

Dual crystals

■

Cool Drawer crystal holder

■

No internal cables

■

Crystal shutter

■

Available with:

- CF40 feedthrough

- 2.54 cm (1inch) bolt feedthrough

■

Bakeable if ordered with welded CF40 flange

■

Adjustable length if ordered with compression fittings

■

Sensor / Feedthrough combinations available welded to customer specified lengths

ORDERING INFORMATION

Cool Drawer Dual Sensor (with conductor tubes)

CDD –

Type of sensor (Includes User Manual. Crystals sold separately)

Standard Cool Drawer Dual Sensor (water lines parallel to crystal face) with shutter ................................................................................. A

Right Angle Cool Drawer Dual Sensor (water lines perpendicular to crystal face) with shutter .............................................................. B

Length of Sensor - SEE NOTE 3

Length (minimum 102 mm (4") to 660 mm (26")). (SEE NOTE 6)...

Feedthrough - SEE NOTE 2

1" bolt .........................................................................................

CF40 (two piece) ..........................................................................

Feedthrough Connection

Sensor welded to feedthrough ......................................................

Variable length with Ultra-Torr compression fittings. (Allows the sensor length to be variable by using Ultra-Torr compression fittings)

Not available with CF40 feedthrough.

The following combinations are not available: CDD-AF48, CDD-BF48

F

7

8

3

4

Custom parts, special bends and other non-standard parts available - Consult factory

Sensor

Substrate

Feedthrough

Short 6”

BNC cable

Oscillator or

XIU

Controller or Monitor

Oscillator (XIU) to instrument interconnect cable

NOTE 1:

Orders for sensors welded to feedthroughs cannot be entered without signed off dimensional drawing. Once special length or manufactured order is confirmed, it is not cancelable. INFICON will provide a sensor length specification form.

NOTE 2:

Feedthrough configuration varies depending on options selected (type of feedthrough, and connection). Example: CDD-AF47 and

-BF47 use a 2-piece hybrid feedthrough design due to dimensional limits of a standard CF40.

NOTE 3:

Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough (see drawing).

NOTE 6:

For sensors ordered without a weld connection (option “8”), tubes are made to a length of approximately 762mm (30") for standard sensors and approximately 660mm (26") for right angle sensors.

2

Cool Drawer Dual Sensor

SPECIFICATIONS

CDD Series Cool Drawer Dual Sensor Specifications

Finish

Cooling water

Crystal

Air supply

Stainless steel, gold plated Cool Drawer™

0.2 GPM using 1 /

8

" O.D. tube (Do not allow to freeze)

Industry standard 0.550” diameter

55 to 60 PSI regulated

Electrical connection (2) standard female BNCs on atmosphere side

1 inch bolt and compression fitting sealed terminations

Materials 304 stainless steel, Teflon

®

, ceramic, beryllium nickel, VITON

®

Temperature

Mounting

Operational environment to 300ºC with water cooling or 165ºC without

1.015" ±0.010" diameter aperture

CF40 welded terminations

Materials 304 stainless steel, ceramic, beryllium nickel

Temperature

Mounting

Operational environment to 450ºC with water cooling or 165ºC without

Mates with 2 ¾ " ConFlat

®

type flanges

SPARE PARTS LIST

147411

147424

084-205

800128

800371

800372

800416

803313

P/N

147401

147402

147403

147406

147407

147408

123223-2

803102

803261

Description

Shutter

Link

Actuator

Bellows Support

Bellows Cover

Threaded Shaft

Spacer

Bellows Tube

#4-40 x 3/16 Philips Screw

#4 Lockwasher

Shoulder Screw

Washer

6-32 x 3/16 in. Set Screw

Spring

Conduit Brazed Assembly - Short Pin

O-Ring for 5 port adjustable feedthrough

Washer for 5 port adjustable feedthrough

3

Cool Drawer Dual Sensor

DIMENSIONS

CDD-AF37, CDD-AF38 and CDD-BF38

Cool Drawer Dual Sensor / Feedthrough Combinations

1.27

(.50”)

5.08

(2.0”)

1.8

(.71”)

.76

(.300”)

6.35

(2.5”)

1.27

(.50”)

5.08

(2.0”)

1.8

(.71”)

.76

(.300”)

6.35

(2.5”)

4

Cool Drawer Dual Sensor

DIMENSIONS

CDD-AF47 and CDD-BF47

Cool Drawer Dual Sensor / Feedthrough Combinations

1.27

(.50”)

5.08

(2.0”)

1.8

(.71”)

.76

(.300”)

6.35

(2.5”)

DIMENSIONS

Sensor Length Specification for CDD-AF37 Sensor / Feedthrough Combination

1.27 cm

(0.50)

REF cm inches

Centerline of crystal aperture

DIMENSIONS

Sensor Length Specification for CDD-AF47 Sensor / Feedthrough Combination cm inches

This gap is shown for clarity.

The actual dimension equals 0”

1.27 cm

(0.50)

REF

Centerline of crystal aperture

5

Cool Drawer Dual Sensor

DIMENSIONS

Sensor Length Specification for CDD-BF47 Sensor / Feedthrough Combination cm inches

This gap is shown for clarity.

The actual dimension equals 0”

0.38 cm

(.150)

REF x

Surface of Sensor Crystal

DIMENSIONS

Sensor Length Specification for CDD-BF37 Sensor / Feedthrough Combination www.inficon.com [email protected]

Due to our continuing program of product improvements, specifications are subject to change without notice.

Cool Drawer is a trademark of INFICON. All other trademarks are the property of their respective owners.

cibe12a1-a ©2009 INFICON

®