Turbomolecular Vacuum Pumps Sysgtems

Turbomolecular Vacuum Pumps Sysgtems
PT
Turbomolecular
Pump Systems
30 - 400 l · s-1
Calibration Systems
178.01.02
Excerpt from the Oerlikon Leybold Vacuum Full Line Catalog
Product Section C10
Edition 2010
Contents
General
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.03
Applications and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.03
Products
Global Versions
Turbomolecular Pump Systems
Oil sealed
PT 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.04
PT 151 / PT 361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.08
PT 50 KIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.12
PT 151 / PT 361 KIT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.12
Dry
PT 80 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.14
TURBOLAB 80. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.16
PT 151 Dry / PT 361 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.20
PT 300 Dry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.22
CS Calibration Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.24
Accessories
Control Unit for Turbomolecular Pump Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.26
Adsorption Traps with Aluminium Oxide Insert . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.27
Products
Versions for the North and South American Continents
Turbomolecular Pump Systems
PT-Flex . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.28
Accessories
TSC - TurboSystem Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.32
TPC - TurboPump Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10.34
C10 02
Oerlikon Leybold Vacuum Full Line Catalog
General
The requirements of production or
research engineers concerning the
vacuum technology they have to
employ are usually widely different.
In most cases pumping speed and
operating pressure must be accurately
matched to suit a particular process.
The wide range of vacuum pumps and
standard accessories available offers
many options.
Sometimes it is just this flexibility which
causes difficulties when having to decide between the various configurations
of a particular pump system. Based on
our experience and by listening to our
customers’ demands, we have therefore compiled a range of turn-key
vacuum systems based on standard
components. Before leaving the factory
they are subjected to both functional
tests and leak tests. By adding components from our standard range of
accessories they may be easily adapted to meet specific requirements.
PT
PT
15
1
/
50 PT
PT KI 36
T
1
15
1
PT K
36 IT
PT 1 K
80 it
TU D
RB ry
PT OLA
15 B
PT 1 D 80
36 ry
PT 1 D
30 ry
PT 0 D
-F ry
lex
PT
50
Pu
m
sy p
st
em
s
Application and Accessories
Microbalances
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Sputtering
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Spectroscopy
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Production of TV and monitor picture tubes
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Surface refining
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Evaporation coating systems
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Beam guidance systems
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Laboratory pump systems
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Application
Accessories
Page
Control unit for turbomolecular pump systems
–
■
■
■
Air cooling unit
–
■
■
■
■
■
Flange heater
–
■
■
■
■
■
Venting valve
–
■
■
■
■
■
Power failure venting valve
–
■
■
■
■
■
Purge gas and venting valve
–
■
■
■
■
■
C10.26
■
■
■
■
■
■
■
Exhaust filter
–
■
■
■
■
■
■
■
Water cooling unit
–
Adsorption traps with aluminium oxide insert
Oerlikon Leybold Vacuum Full Line Catalog
■
■
■
03 C10
Products
Oil Sealed Pump Systems
PT 50 Turbomolecular Pump System
This turbomolecular pump system is a
fully assembled and ready-to-operate
ultra high vacuum system as a table
top unit for processes which require
hydrocarbon-free high and ultra high
vacuum.
Advantages to the User
- High effective pumping speed
- Low ultimate pressure
(< 10-8 mbar (< 0.75 x 10-8 Torr))
- High pumping speed of the backing
pump
- Compact, small, rugged unit
- Simple to operate
- High level of reliability
- Maintenance-friendly design
- For use world-wide
- Installation of standard vacuum
components in an open frame
- Components such as the backing
pump, frequency converter,
vacuum gauge and power failure
venting valve are controlled via a
rotary switch
- Service friendly assembly for maintenance without the need to disassemble backing or high vacuum
pump
- The high vacuum pump can be
removed from the pump system
- CE approval
C10 04
The turbomolecular pump system consists of the following principal components:
- Grease lubricated turbomolecular
pump TURBOVAC 50 with ceramic
ball bearings, convection cooling
and splinter guard
- Electronic frequency converter
NT 10
- Dual-stage, oil sealed rotary vane
vacuum pump TRIVAC D 2,5 E
as backing pump
- Switchbox with rotary switch for
driving the backing pump, the
turbomolecular pump, a vacuum
gauge (optional) and a power
failure venting valve (optional)
- Mains connection 230 V, 50 Hz with
EURO plug
- Rugged table top unit which may
also carry heavy assemblies
- All required connecting and
sealing components are located
within the pump system assembly
The pump system is prepared for
installation of further components:
- Vacuum gauge
- Power failure venting valve
- Air cooling unit
- Assembly on the intake side with
manifold, valves, gauge heads etc.
- Adsorption trap
- Exhaust filter
- Rotatable castors
- Mains cable with connection plug
for UK, US, Switzerland, Japan
Typical Applications
- Spectroscopy
- Tube manufacturing
- Beam guidance systems
- Micro balances
- Sputtering and evaporation systems
- Surface physics
- Laboratory pump systems
- Production of gas Lasers
Oerlikon Leybold Vacuum Full Line Catalog
Vacuum gauge (option)
b1
Turbomolecular pump
mm
in.
h
b
b1
l
456 430 117.5 420
17.95 16.93 4.63 16.54
h
Frequency converter
b
l
TRIVAC E backing pump
Dimensional drawing for the PT 50 turbomolecular pump system
Technical Data
PT 50
Turbomolecular pump
High vacuum connection
Pumping speed for N2
Compression for N2 / H2
Speed of the TURBOVAC
TURBOVAC 50
40 KF
33
2 x 107 / 102
72 000
TURBOVAC 50
63 ISO-K
55
2 x 107 / 102
72 000
TURBOVAC 50
63 CF
55
2 x 107 / 102
72 000
TRIVAC D 2,5 E
TRIVAC D 2,5 E
TRIVAC D 2,5 E
2.7 (1.6)
10-3 (0.75 x 10-3)
2.7 (1.6)
10-3 (0.75 x 10-3)
2.7 (1.6)
10-3 (0.75 x 10-3)
mbar (Torr)
10-7 (0.75 x 10-7)
10-7 (0.75 x 10-7)
10-7 (0.75 x 10-7)
mbar (Torr)
–
–
10-9 (0.75 x 10-9)
100-120 / 200-240 ± 5%
100-120 / 200-240 ± 5%
100-120 / 200-240 ± 5%
VA
500
500
500
mm
(in.)
430 x 456 x 420
(16.93 x 17.95 x 16.54)
430 x 456 x 420
430 x 456 x 420
430 x 456 x 420
430 x 456 x 420
27 (59.4)
27 (59.4)
27 (59.4)
DN
l x s-1
rpm
Dual-stage rotary vane vacuum pump
nominal pumping speed
acc. to PNEUROP
m3 x h-1 (cfm)
Ultimate total pressure
mbar (Torr)
Attainable ultimate pressure
with FPM (FKM) gasket
with aluminum
or Cu gasket 1)
Main supply, 50/60 Hz
V
Rated power consumption, approx.
Dimensions (W x H x D)
Weight, approx.
1)
kg (lbs)
use only for CF flanges
Oerlikon Leybold Vacuum Full Line Catalog
05 C10
PT 50
Ordering Information
PT 50 turbomolecular pump system
DN 40 KF
DN 63 ISO-K
Part No. 128 80
–
–
–
Part No. 128 81
–
–
–
Part No. 128 83
–
Part No. 854 06
Part No. 854 05
Part No. 800152V0015
Part No. 854 06
Part No. 854 05
Part No. 800152V0015
Part No. 854 06
Part No. 854 05
Flange heater
DN 63 CF, 115 V
DN 63 CF, 230 V
Part No. 854 07
Part No. 854 04
Part No. 854 07
Part No. 854 04
Part No. 854 07
Part No. 854 04
Venting valve, DN 10 KF
manually operated
Part No. 173 24
Part No. 173 24
Part No. 173 24
Part No. 174 46
Part No. 174 26
Part No. 174 46
Part No. 174 26
Part No. 174 46
Part No. 174 26
Adsorption trap, DN 16 KF
Adsorbent
Part No. 854 14
Part No. 854 10
Part No. 854 14
Part No. 854 10
Part No. 854 14
Part No. 854 10
Exhaust filter AF 8
Part No. 190 50
Part No. 190 50
Part No. 190 50
DN 63 CF
Air cooling unit
100 V
115 V
230 V
Power failure venting valve, DN 10 KF
024 V DC
230 V, 50/60 Hz
Mains cord
US/Japan
US/Japan
CH
UK
115
230
230
230
V,
V,
V,
V,
50/60
50/60
50/60
50/60
Hz
Hz
Hz
Hz
Connecting cable for operating
the TURBOVAC outside the pump system
03 m (07.0 ft)
05 m (17.5 ft)
10 m (35.0 ft)
15 m (52.5 ft)
Part
Part
Part
Part
No.
No.
No.
No.
Part
Part
Part
Part
200
200
200
200
No.
No.
No.
No.
81
81
81
81
121
121
161
119
090
141
099
097
08
09
10
90
Part
Part
Part
Part
No.
No.
No.
No.
Part
Part
Part
Part
200
200
200
200
No.
No.
No.
No.
81
81
81
81
121
121
161
119
090
141
099
097
08
09
10
90
Part
Part
Part
Part
No.
No.
No.
No.
Part
Part
Part
Part
200
200
200
200
No.
No.
No.
No.
81
81
81
81
121
121
161
119
090
141
099
097
08
09
10
90
Control unit for turbomolecular pump systems
(see Section “Accessories”)
C10 06
Oerlikon Leybold Vacuum Full Line Catalog
Notes
Oerlikon Leybold Vacuum Full Line Catalog
07 C10
PT 151/PT 361
Turbomolecular Pump Systems
These turbomolecular pump systems
are ready-to-operate vacuum units for
generating a vacuum in the high and
ultra-high vacuum range which is free
of hydrocarbons.
When pumping aggressive or abrasive
process gases, a purge gas facility
must be used for the pumps.
Advantages to the User
Typical Applications
- Low ultimate pressure
(< 10-7 mbar /Torr), free of hydrocarbons
The turbomolecular pump systems
consists of the following principal components:
- High effective pumping speed
- Grease lubricated turbomolecular
pump TURBOVAC 151 or 361 with
splinter guard
- Compact, mobile unit
- Simple to operate
- High level of reliability
- Purge gas and venting ports
- Components such as backing
pump, frequency converter and
TURBOVAC, as well as venting or
degassing are controlled via a single
multi function switch
- Service friendly assembly for maintenance without the need to disassemble backing or high vacuum
pump
- Pump systems prepared for installation of larger backing pumps (for
barrier gas operation, for example)
- Additional mains sockets for accessories
- CE approval
C10 08
- Electronic frequency converter
TD 20 classic
- Spectroscopy
- Tube manufacturing
- Beam guidance systems
- Microbalances
- Sputtering and evaporation systems
- Surface physics
- Dual-stage, oil sealed TRIVAC
D 4 B or D 16 B rotary vane
vacuum pump as backing pump
- Switch box with mains power
outlet and rotary switch to operate
the connected units
The pump systems are prepared for
installation of further components:
- Vacuum gauges (up to two):
- Adsorption trap
- Exhaust filter
- Air cooling unit
- Flange heater
- Venting valve
Oerlikon Leybold Vacuum Full Line Catalog
Standard system
1
2
3
4
5
6
7
8
9
10
11
Systems with accessories
TURBOTRONIK
Vacuum gauge (optional)
Forevacuum gauge (optional)
High vacuum gauge (optional)
Flange heater (optional)
Venting valve (optional)
TURBOVAC
Corrugated tube
Adsorption trap (optional)
TRIVAC backing pump
Exhaust filter (optional)
Vacuum diagram of the PT 151/PT 361 turbomolecular pump systems
4
3
5
h
2
h1
1
l
500 wide
1
2
3
4
5
TRIVAC backing pump
Switch box
TURBOTRONIK
Vacuum gauge (optional)
TURBOVAC
mm
in.
h
h1
l
wide
800 890 484 500
31.50 35.04 19.06 19.69
PT 151 turbomolecular pump system
Oerlikon Leybold Vacuum Full Line Catalog
09 C10
Technical Data
Turbomolecular pump
High vacuum connection
Pumping speed for N2
Compression for N2/H2
Speed of the TURBOVAC
PT 151
DN
l x s-1
rpm
Dual-stage rotary vane vacuum pump
Nominal pumping speed
(DIN 28 400)
m3 x h-1 (cfm)
Exhaust connection
DN
Attainable ultimate pressure
with FPM (FKM) gasket
with Cu seal
mbar (Torr)
mbar (Torr)
Cooling water consumption
l/h
Cooling water connection,
hose nozzle, outside dia.
Power consumption
mm (in.)
kW
Main supply
EURO version
US version
Dimensions (W x H x D)
Weight, approx.
C10 10
PT 361
TURBOVAC 151
100 ISO-K
145
> 109
50 000
TURBOVAC 151
100 CF
145
8.5 x 102
50 000
TURBOVAC 361
100 ISO-K
345
> 109
50 000
TURBOVAC 361
100 CF
345
3.5 x 103
50 000
TRIVAC D 4 B
TRIVAC D 4 B
TRIVAC D 16 B
TRIVAC D 16 B
4.8 (2.83)
16 KF
4.8 (2.83)
16 KF
18.9 (11.13)
25 KF
18.9 (11.13)
25 KF
10-8 (0.75 x 10-8)
–
10-8 (0.75 x 10-8)
10-10 (0.75 x 10-10)
10-8 (0.75 x 10-8)
–
10-8 (0.75 x 10-8)
10-10 (0.75 x 10-10)
20
20
20
20
11 (0.43)
11 (0.43)
11 (0.43)
11 (0.43)
0.7
0.7
1.5
1.5
230 V, 50 Hz
115 V, 60 Hz
230 V, 50 Hz
115 V, 60 Hz
230 V, 50 Hz
115 V, 60 Hz
230 V, 50 Hz
115 V, 60 Hz
500 x 890 x 484
500 x 890 x 484
500 x 890 x 484
500 x 890 x 484
mm
(19.69
x
35.04
x
19.06)
(19.69
x
35.04
x
19.06)
(19.69
x
35.04
x
19.06)
(19.69
x 35.04 x 19.06)
(in.)
kg (lbs)
45 (99.2)
45 (99.2)
62 (136.7)
62 (136.7)
Oerlikon Leybold Vacuum Full Line Catalog
Ordering Information
PT 151
PT 361
Part No. 128 84
Part No. 128 85
Part No. 128 86
Part No. 128 88
Part No. 152 57
Part No. 152 58
Part No. 152 59
Part No. 152 60
Part No. 800152V0016
Part No. 894 08
Part No. 855 31
Part No. 800152V0016
Part No. 894 08
Part No. 855 31
Flange heater, DN 100 CF
115 V
230 V
Part No. 854 28
Part No. 854 27
Part No. 854 28
Part No. 854 27
Venting valve, DN 10 KF
manually operated
Part No. 173 24
Part No. 173 24
Power failure venting valve, DN 10 KF
024 V DC
230 V, 50/60 Hz
Part No. 174 46
Part No. 174 26
Part No. 174 46
Part No. 174 26
Adsorption trap
DN 16 KF
DN 25 KF
Adsorbent
Part No. 854 14
–
Part No. 854 10
–
Part No. 854 15
Part No. 854 10
Exhaust filter
AF 4-8
AF 16-25
Part No. 189 06
–
–
Part No. 189 11
Part No. 855 19
Part No. 855 19
upon request
upon request
Turbomolecular pump system
EURO version,
230 V / 50 Hz, Schuko plug
DN 100 ISO-K
DN 100 CF
US version,
115 V / 60 Hz, US plug
DN 100 ISO-K
DN 100 CF
Air cooling unit
100 V
115 V
230 V
Purge gas and venting valve, 230 V
0.2 mbar x l x s-1
Control unit for turbomolecular pump systems
(see Section “Accessories”)
Oerlikon Leybold Vacuum Full Line Catalog
11 C10
Turbomolecular Pump Systems
PT 50 KIT, PT 151 KIT, PT 361 KIT
Under the motto “Do-it-yourself and
save money” you may assemble the
turbomolecular pump systems
PT 50 KIT, PT 151 KIT and
PT 361 KIT yourself.
PT 50 KIT
PT 151 KIT/PT 361 KIT
Unpacking, 15 minutes, approx.
Unpacking, 15 minutes, approx.
After further 20 minutes
After further 30 minutes
After further 20 minutes
After further 30 minutes
After further 30 minutes
After further 50 minutes
The turbomolecular pump systems
PT 50 KIT, PT 151 KIT and PT 361 KIT
are made of the same components as
used for the turn-key systems:
- Base panel with column
- Turbomolecular pump
TURBOVAC 50
(PT 50 KIT) or 151 or 361
(PT 151 KIT or PT 361 KIT)
- Rotary vane vacuum pump
TRIVAC D 2,5 E
(PT 50 KIT) or D 4 B or D 16 B
(PT 151 KIT or PT 361 KIT)
- TURBOTRONIK NT 10
electronic frequency converter
(PT 50 KIT) or NT 20 (PT 151 KIT
and PT 361 KIT)
- All necessary mounting parts, connection parts and gaskets are supplied
- Simple and accurate assembly instructions
- Detailed exploded view
- Description which is easy to understand
- Additional detailed knowledge is
gained about the product by
assembling it yourself
- CE approval
The technical data, the areas of application and the design characteristics
correspond to the turbomolecular
pump systems PT 50, PT 151 and
PT 361 described on the preceding
pages.
Typical Applications
- Spectroscopy
- Tube manufacturing
- Beam guidance systems
- Surface physics
- Microbalances
- Laboratory pump systems
- Sputtering and evaporation systems
- Production of gas lasers
C10 12
Oerlikon Leybold Vacuum Full Line Catalog
PT 50 KIT
PT 151 KIT
PT 361 KIT
Part No. 128 70
Part No. 128 71
Part No. 128 73
–
–
–
–
–
–
PT 151 KIT turbomolecular pump system,
water-cooled
DN 100 ISO-K
DN 100 CF
–
–
Part No. 128 74
Part No. 128 75
–
–
PT 361 KIT turbomolecular pump system,
water-cooled
DN 100 ISO-K
DN 100 CF
DN 160 ISO-K
DN 160 CF
–
–
–
–
–
–
–
–
Part No. 128 76
Part No. 128 78
upon request
upon request
Air cooling unit
230 V
115 V
100 V
Part No. 854 05
Part No. 854 06
Part No. 800152V0015
Part No. 855 31
Part No. 894 08
Part No. 800152V0016
Part No. 855 31
Part No. 894 08
Part No. 800152V0016
Water cooling unit for the TURBOVAC
Part No. 800135V0003
–
–
Flange heater
DN 63 CF, 230 V
DN 63 CF, 115 V
DN 100 CF, 230 V
DN 100 CF, 115 V
Part No. 854 04
Part No. 854 07
–
–
–
–
Part No. 854 27
–
–
–
Part No. 854 27
Part No. 854 28
Adsorption trap
DN 16 KF
DN 25 KF
Adsorbent
Part No. 854 14
–
Part No. 854 10
Part No. 854 14
–
Part No. 854 10
–
Part No. 854 15
Part No. 854 10
Exhaust filter
AF 4-8
AF 8
AF 16-25
–
Part No. 190 50
–
Part No. 189 06
–
–
–
–
Part No. 189 11
Venting valve, DN 10 KF
manually operated
Part No. 173 24
Part No. 173 24
Part No. 173 24
–
Part No. 855 19
Part No. 855 19
Power failure venting valve, DN 10 KF
024 V DC
230 V, 50/60 Hz
Part No. 174 46
Part No. 174 26
Part No. 174 46
Part No. 174 26
Part No. 174 46
Part No. 174 26
Water cooling unit for the TURBOVAC
Part No. 854 08
–
–
–
Part No. 200 81 141
Part No. 200 81 099
Part No. 200 81 097
–
Part No. 200 81 141
Part No. 200 81 099
Part No. 200 81 097
–
Part No. 857 66
Part No. 857 67
–
Part No. 857 66
Part No. 857 67
Ordering Information
PT 50 KIT turbomolecular pump system
DN 40 KF
DN 63 ISO-K
DN 63 CF
Purge gas and venting valve, 230 V
0.2 mbar x l x s-1
Mains cord
US/Japan
US/Japan
CH
UK
115
230
230
230
V,
V,
V,
V,
50/60
50/60
50/60
50/60
Hz
Hz
Hz
Hz
Connecting cable for operating
the TURBOVAC outside the pump system
33 m (07.0 ft)
05 m (17.5 ft)
10 m (35.0 ft)
Oerlikon Leybold Vacuum Full Line Catalog
Part
Part
Part
Part
No.
No.
No.
No.
200
200
200
200
81
81
81
81
090
141
099
097
Part No. 121 08
Part No. 121 09
–
13 C10
Dry Pump Systems
PT 80 Dry Turbomolecular Pump System
The PT 80 Dry turbomolecular pump
system is a fully assembled and readyto-operate high vacuum system designed as a table top unit.
PT 80 Dry with diaphragm vacuum pump
PT 80 Dry with scroll pump and options
(measuring instrument, power failure venting
valves and intake section)
Advantages to the User
- Ceramic ball bearings
- Absolutely oil-free
- Grease lubrication
- Low ultimate pressure free of hydrocarbons (10-8 mbar/Torr)
- Pumping speed for nitrogen:
65 l x s-1
- High effective pumping speed
- High vacuum connection:
DN 63 ISO-K or DN 63 CF
- Compact, small unit
- Simple operation
- High level of reliability
- Maintenance-friendly design
- Air cooling
- Installation of standard vacuum
components in an open frame
- Components such as the diaphragm backing pump and turbomolecular pump are controlled via
switches
- Service-friendly assembly for maintenance without the need to disassemble backing or high vacuum
pump
- The high vacuum pump can be
removed (installation in any orientation)
The pump system is prepared for
installation of further components.
- Vacuum gauges
- Venting valve / Power failure venting
valve
- Junction box
- Integrated splinter guard
Typical Applications
- TURBO.POWER 300 power
supply.
The power supply supplies the
frequency converter with 24 V DC
- Spectroscopy
- Dual-stage, absolutely oil-free
DIVAC 0.8 T diaphragm vacuum
pump used as the backing pump
respectively scroll pump
SCROLLVAC SC 5D as the backing
pump
- Micro balances
- Valve manufacturing
- Beam guidance systems
- Sputtering and evaporation systems
- Surface physics
- Laboratory pump systems
- All required connection and
sealing components are located within the pump system assembly
b
430
16.93
mm
in.
b
313
12.32
b1
h
440
17.32
h1
16
0.63
l
420
16.54
l1
93
3.66
l1
- The pump systems are subjected to
a full functional test and a leak test
before delivery
The turbomolecular pump system consists of the following principal componentes:
h
- SL 80 wide range turbomolecular
pump system featuring
- Integrated frequency converter
- Integrated air cooling
C10 14
PT 70 Dry
h1
b
l
Dimensional drawing for the PT 80 Dry turbomolecular pump system
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
PT 80 Dry
Wide range turbomolecular pump
High vacuum connection
Pumping speed for N2
DN
l x s-1
TURBO VAC SL 80
63 ISO-K
65
TURBO VAC SL 80
63 CF
65
Diaphragm pump
Pumping speed, approx.
Ultimate pressure, approx.
m3 x h-1 (cfm)
mbar (Torr)
DIVAC 0.8 T
0.6 (0.35)
< 3 (< 2.3)
DIVAC 0.8 T
0.6 (0.35)
< 3 (< 2.3)
Scroll vacuum pump
Pumping speed, approx.
Ultimate pressure, approx.
m3 x h-1 (cfm)
mbar (Torr)
SCROLLVAC SC 5 D
5.4 (3.18)
< 0.05(0.03)
SCROLLVAC SC 5 D
5.4(3.18)
< 0.05(0.03)
Attainable ultimate pressure
mbar (Torr)
10-7 (0.75 x 10-7)
10-8 (0.75 x 10-8)
V
230 / 115
230 / 115
W
W
350
450
350
450
430 x 456 x 420 (16.93 x 17.95 x 16.54)
430 x 456 x 420 (16.93 x 17.95 x 16.54)
20 (44.15)
28(61.6)
20 (44.15)
28(61.6)
Main supply, 50/60 Hz
Rated power consumption, approx.
with diaphragm vacuum pump
with scroll vacuum pump
Dimensions (W x H x D)
mm (in.)
Weight, approx.
with diaphragm vacuum pump
with scroll vacuum pump
W
W
Ordering Information
PT 80 Dry turbomolecular pump system
with diaphragm vacuum pump,
without switch box
DN 63 ISO-K
230 V, 50 Hz
DN 63 ISO-K
115 V, 60 Hz
DN 63 CF
230 V, 50 Hz
DN 63 CF
115 V, 60 Hz
with scroll vacuum pump, switch box
and EURO mains cord for switchbox
DN 63 ISO-K
115/230 V, 50/60 Hz
DN 63 CF
115/230 V, 50/60 Hz
PT 80 Dry
Part No. 502 500
upon request
–
–
–
–
Part No. 502 501
upon request
upon request
upon request
upon request
upon request
Switch box, without mains cord
Part No. 200 06 393
Part No. 200 06 393
Mains adapter Schuko/US
Part No. 200 11 119
Part No. 200 11 119
Mains cord for junction box
EURO
230 V, 50 Hz
CH
230 V, 50/60 Hz
UK
230 V, 50/60 Hz
US/Japan
230 V, 50/60 Hz
US/Japan
115 V, 60 Hz
Part
Part
Part
Part
Part
Part
Part
Part
Part
Part
Power failure venting valve
230 V, 50/60 Hz
24 V DC mains cord
03 m (07.0 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Control unit for turbomolecular pump systems
(see Section “Accessories”)
Oerlikon Leybold Vacuum Full Line Catalog
No.
No.
No.
No.
No.
200
200
200
200
200
81
81
81
81
81
091
099
097
141
090
Part No. 174 26
Part
Part
Part
Part
No.
No.
No.
No.
800094V0300
800094V0500
800094V1000
800094V2000
upon request
No.
No.
No.
No.
No.
200
200
200
200
200
81
81
81
81
81
091
099
097
141
090
Part No. 174 26
Part
Part
Part
Part
No.
No.
No.
No.
800094V0300
800094V0500
800094V1000
800094V2000
upon request
15 C10
Turbomolecular Pump System
TURBOLAB 80
The TURBOLAB 80 turbomolecular
pump system is a fully assembled and
ready-to-operate high vacuum system
designed as a table top unit.
Turbomolecular pump system TURBOLAB 80 Basic (left) and TURBOLAB 80 Full Featured (right)
Advantages to the User
- Absolutely oil-free
- Operation parameter indication
- Low ultimate pressure free of hydrocarbons (10-8 mbar/Torr)
- Forevacuum pressure measurement optional (possible)
- High effective pumping speed
- Venting is possible (optional)
- Venting valve
- Compact and small unit
The turbomolecular pump system consists of the following principal componentes:
For operating the TURBOLAB 80
Full Featured version, an ITR 90 high
vacuum gauge (without display) and a
5 m (17.5 ft) long sensor cable are
needed.
- Simple operation
- High level of reliability
- Maintenance-friendly design
- SL 80 wide range turbomolecular
pump system featuring:
- Air cooling
- Integrated frequency converter
- Installation of standard vacuum
components in a portable sheet
metal frame enclosure
- Integrated air cooling
Only TURBOLAB 80 Basic:
- Manual operation
- Pressure measurement as an option
via ITR 90 with display
Only TURBOLAB 80 Full Featured:
- Graphic display of pressure curves
- Menu navigation in different languages
- Parameters of the turbomolecular
pump and pressures can be saved
to a computer
- PTR 90 or TTR 90 gauge heads
can be connected
- Displaying pressures is possible
- Manual or automatic operation
C10 16
- Ceramic ball bearings
- Grease lubrication
- Pumping speed for nitrogen:
65 l x s-1
- High vacuum connection:
DN 63 ISO-K or DN 63 CF
- Integrated splinter guard
- Dual-stage, absolutely oil-free
DIVAC 0.8 T diaphragm vacuum
pump used as the backing pump
with the following specifications:
Pumping speed:
0.7 m3 x h-1 (0.41 cfm)
The pump system is prepared for
installation of further components:
- Vacuum gauges
The pressure is read out through the
display of the pump system. The 24 V
DC power supply for operating an
ITR 90, respectively PTR 90 gauge is
supplied by the pump system.
Typical Applications
- Spectroscopy
- Valve manufacturing
- Beam guidance systems
- Micro balances
- Sputtering and evaporation systems
- Surface physics
- Laboratory pump systems
Ultimate pressure:
3 mbar ( 2.25 Torr)
- All required connection and sealing
components are located within the
pump system assembly
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
TURBOLAB 80 Basic
TURBOVAC SL 80
63 ISO-K / 63 CF
65
TURBOVAC SL 80
63 ISO-K / 63 CF
65
DIVAC 0.8 T
0.7 (0.41)
3 (2.25)
DIVAC 0.8 T
0.7 (0.41)
3 (2.25)
10-7 (0.75 x 10-7) / 10-8 (0.75 x 10-8)
10-7 (0.75 x 10-7) / 10-8 (0.75 x 10-8)
1.5
1.5
V
88 bis 264
88 bis 264
W
300
300
mm (in.)
255 x 355 x 355 (10.04 x 13.98 x 13.98)
255 x 355 x 355 (10.04 x 13.98 x 13.98)
kg (lbs)
14.5 (32.01)
14.5 (32.01)
Hybrid turbomolecular pump
High vacuum connection
Pumping speed for N2
DN
l x s-1
Diaphragm pump
Pumping speed, approx.
Ultimate pressure, approx.
m3 x h-1 (cfm)
mbar (Torr)
Attainable ultimate pressure
mbar (Torr)
Run-up time, approx.
min
Main supply, 50/60 Hz
Rated power consumption, approx.
Dimensions (W x H x D)
Weight, approx.
TURBOLAB 80 Full Featured
l
b
l
b
h
h
80
mm
in.
h
333 - 357
13.11 - 14.06
b
250
9.84
80
l
356
14.02
Dimensional drawing for the turbomolecular pump system TURBOLAB 80 Basic (left) and TURBOLAB 80 Full Featured (right)
Oerlikon Leybold Vacuum Full Line Catalog
17 C10
Ordering Information
Part No. 501590
V
Part No. 501591
V
0
TURBOLAB 80 Basic
High vacuum connection
DN 63 ISO-K
DN 63 CF
Sensor
without sensor
ITR 90/DN 25 KF
with display and 5 m (17.5 ft) cable
ITR 90/DN 40 CF
with display and 5 m (17.5 ft) cable
Venting valve
without venting valve
in the forevacuum line
with venting valve
in the forevacuum line
1
2
0
1
2
0
1
Ordering Information
TURBOLAB 80 Full Featured
High vacuum connection
DN 63 ISO-K
DN 63 CF
Sensor
without sensor, without cable
ITR 90/DN 25 KF
with display and 5 m (17.5 ft) cable
without display and 5 m (17.5 ft) cable
ITR 90/DN 40 CF
with display and 5 m (17.5 ft) cable
without display and 5 m (17.5 ft) cable
PTR 90/DN 25 KF
with cable and adapter
PTR 90/DN 40 KF
with cable and adapter
PTR 90/DN 40 CF
with cable and adapter
1
2
0
1
2
3
4
5
6
7
Sensor TTR 91
without sensor
in the forevacuum line
with sensor
in the forevacuum line
0
Venting valve
without venting valve
in the forevacuum line
with venting valve
in the forevacuum line
0
C10 18
1
1
Oerlikon Leybold Vacuum Full Line Catalog
Parts for Converting/Expanding Existing Systems
Ordering Information Conversion
TURBOLAB 80 Basic
TURBOLAB 80 Full Featured
Venting valve
24 V DC, normally open
–
Part No. 500 004 590
Sensor TTR 90
1/2" Rohr
–
Part No. 230 039
Part No. 120 91
Part No. 120 94
Part No. 124 55
Part No. 120 91
Part No. 120 94
Part No. 124 55
–
–
–
–
–
Part No. 230 070
Part No. 230 071
Part No. 230 072
Part No. 124 26
Part No. 500 008 229
Sensor ITR 90
DN 25 KF with display
DN 40 CF with display
ITR sensor cable, 5 m (17.5 ft)
Sensor PTR 90
DN 25 KF
DN 40 KF
DN 40 CF
PTR sensor cable, 5 m (17.5 ft) 1)
Adapter cable TURBOLAB 80/PTR sensor 1)
1)
Required for fitting a PTR 90
Oerlikon Leybold Vacuum Full Line Catalog
19 C10
PT 151 Dry / PT 361 Dry
Turbomolecular Pump Systems
These turbomolecular pump systems
are ready-to-operate vacuum units for
generating a vacuum in the high and
ultra-high vacuum range which is free
of hydrocarbons.
When pumping aggressive or abrasive
process gases, a purge gas facility
must be used for the pumps.
Typical Applications
- Spectroscopy
- Tube manufacturing
- Beam guidance systems
- Microbalances
- Sputtering and evaporation systems
- Surface physics
PT 361 Dry with scroll pump with options
(measuring instrument, forevacuum valve)
Advantages to the User
- Low ultimate pressure
(< 10-7 mbar /Torr), free of hydrocarbons
- Service friendly assembly for maintenance without the need to disassemble backing or high vacuum
pump
- Pump systems prepared for installation of larger backing pumps (for
barrier gas operation, for example)
- High effective pumping speed
- Compact, mobile unit
- Additional mains sockets for accessories
- Simple to operate
- High level of reliability
- CE approval
- Purge gas and venting ports
- Components such as backing
pump, frequency converter and
TURBOVAC, as well as venting or
degassing are controlled via a single
multi function switch
- Electronic frequency converter
TD 20 classic
- Dry compressing scroll pump
SCROLLVAC SC 15 D or SC 30 D
- Switch box with mains power
outlet and rotary switch to operate
the connected units
The pump systems are prepared for
installation of further components:
- Vacuum gauges (up to two):
The turbomolecular pump systems
consists of the following principal components:
- Grease lubricated turbomolecular
pump TURBOVAC 151 or 361 with
splinter guard
- Air cooling unit
- Flange heater
- Venting valve
mm
in.
h
887
34.92
h1
735
28.94
b
500
19.69
l
425
16.73
h1
h
l
b
PT 151 / 361 Dry turbomolecular pump system with scroll vacuum pump SCROLLVAC
C10 20
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
PT 151 Dry
151
100 ISO-K
145
> 109
50 000
151
100 CF
145
8.5 x 102
50 000
361
100 ISO-K
345
> 109
50 000
361
100 CF
345
3.5 x 103
50 000
SCROLLVAC
SC 5 D
SC 5 D
SC 15 D
SC 15 D
m3 x h-1 (cfm)
DN
15
16 KF
15
16 KF
30
25 KF
30
25 KF
10-8 (0.75 x 10-8)
–
10-8 (0.75 x 10-8)
10-10 (0.75 x 10-10)
10-8 (0.75 x 10-8)
–
10-8 (0.75 x 10-8)
10-10 (0.75 x 10-10)
20
20
20
20
11 (0.43)
11 (0.43)
11 (0.43)
11 (0.43)
0.7
0.7
1.5
1.5
230 V, 50 Hz
115 V, 60 Hz
230 V, 50 Hz
115 V, 60 Hz
230 V, 50 Hz
115 V, 60 Hz
230 V, 50 Hz
115 V, 60 Hz
Turbomolecular pump
High vacuum connection
Pumping speed for N2
Compression for N2/H2
Speed of the TURBOVAC
TURBOVAC
DN
l x s-1
Scroll vacuum pump
Nominal pumping speed
(DIN 28 400)
Exhaust connection
Attainable ultimate pressure
with FPM (FKM) gasket
with Cu seal
mbar (Torr)
mbar (Torr)
Cooling water consumption
l/h
rpm
Cooling water connection,
hose nozzle, outside dia.
mm (in.)
Power consumption
kW
Main supply
EURO version
US version
500 x 890 x 484
500 x 890 x 484
500 x 890 x 484
500 x 890 x 484
mm
(in.) (19.69 x 35.04 x 19.06) (19.69 x 35.04 x 19.06) (19.69 x 35.04 x 19.06) (19.69 x 35.04 x 19.06)
Dimensions (W x H x D)
Weight, approx.
kg (lbs)
Ordering Information
Turbomolecular pump system
230 V, 50/60 Hz / 115 V, 60 Hz
with Schuko plug
DN 100 ISO-K
DN 100 CF
Mains cord
CH
UK
US/Japan
US/Japan
230
230
230
115
PT 361 Dry
V,
V,
V,
V,
50 Hz
50/60 Hz
50/60 Hz
60 Hz
51 (112.6)
51 (112.6)
80 (176.6)
80 (176.6)
PT 151 Dry
PT 361 Dry
Part No. 502 440
Part No. 502 441
Part No. 502 442
Part No. 502 443
Part
Part
Part
Part
No.
No.
No.
No.
200
200
200
200
81
81
81
81
099
097
141
090
Part
Part
Part
Part
No.
No.
No.
No.
200
200
200
200
81
81
81
81
099
097
141
090
Air cooling unit
115 V
230 V
Part No. 894 08
Part No. 855 31
Part No. 894 08
Part No. 855 31
Flange heater, DN 100 CF
115 V
230 V
Part No. 854 28
Part No. 854 27
Part No. 854 28
Part No. 854 27
Venting valve, DN 10 KF
manually operated
Part No. 173 24
Part No. 173 24
Power failure venting valve, DN 10 KF
024 V DC
230 V, 50/60 Hz
Part No. 174 46
Part No. 174 26
Part No. 174 46
Part No. 174 26
Part No. 855 19
Part No. 855 19
upon request
upon request
Purge gas and venting valve, 230 V
0.2 mbar x l x s-1
Control unit for turbomolecular pump systems
(see Section “Accessories”)
Oerlikon Leybold Vacuum Full Line Catalog
21 C10
PT 300 Dry Turbomolecular Pump System
The PT 300 Dry turbomolecular pump
system is a fully assembled, ready-tooperate and mobile high vacuum
pump system which is based on a
column design.
Advantages to the User
- Absolutely oil-free
- Low ultimate pressure free of hydrocarbons (10-9 mbar/Torr)
- High effective pumping speed
- Compact, mobile unit
- Simple operation
- High level of reliability
- Maintenance-friendly design
- Installation in any orientation for
SL 300
- Air cooling
The turbomolecular pump system consists of the following principal componentes:
- SL 300 wide range turbomolecular
pump
- Two-stage, absolutely oil-free scroll
pump SCROLLVAC SC 5D as the
backing pump
- Switchbox for driving and interlocking of the two vacuum pumps
- Mobile base plate with column
- All required connection and sealing
components are located within the
pump system assembly
- Installation of standard vacuum
components in an open frame with
installation column and castors
- Components such as the diaphragm backing pump and turbomolecular pump as well as venting
or degassing are controlled via a
single rotary switch
- Service-friendly assembly for maintenance without the need to disassemble backing or high vacuum
pump
The pump systems are prepared for
installation of further components:
- Vacuum gauges
- Flange heater
- Venting valve
Typical Applications
- Spectroscopy
- Valve manufacturing
- Beam guidance systems
- Micro balances
- Sputtering and evaporation systems
- Surface physics
- Laboratory pump systems
mm
in.
h
887
34.92
h1
735
28.94
b
500
19,69
l
425
16,73
h1
h
- Pump systems prepared for installation of larger backing pumps
- Additional mains sockets for accessories
- The pump systems are subjected to
a full functional test and a leak test
before delivery
C10 22
b
l
Dimensional drawing for the PT 300 Dry turbo molecular pump system
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
PT 300 Dry
Wide range turbomolecular pump
High vacuum connection
Pumping speed for N2
DN
l x s-1
TURBOVAC SL 300
100 ISO-K
270
TURBOVAC SL 300
100 CF
270
Scroll vacuum pump
Pumping speed, approx.
Ultimate pressure, approx.
m3 x h-1 (cfm)
mbar (Torr)
SCROLLVAC SC 5 D
5.4 (3.18)
< 0.05 (0.03)
SCROLLVAC SC 5 D
5.4 (3.18)
< 0.05 (0.03)
Attainable ultimate pressure
mbar (Torr)
10-9 (0.75 x 10-9)
10-9 (0.75 x 10-9)
V
230 / 115
230 / 115
W
600
600
mm (in.)
500 x 887 x 425 (19.68 x 34.92 x 16.73)
500 x 887 x 425 (19.68 x 34.92 x 16.73)
kg (lbs)
44 (97.13)
44 (97.13)
Main supply, 50/60 Hz
Rated power consumption, approx.
Dimensions (W x H x D)
Weight, approx.
Ordering Information
PT 300 Dry turbomolecular pump system
DN 100 ISO-K 230 V, 50/60 Hz / 115 V, 60 Hz
DN 100 CF
230 V, 50/60 Hz / 115 V, 60 Hz
PT 300 Dry
Part No. 502 502
–
–
Part No. 502 503
Mains adapter Schuko/US
Part No. 200 11 119
Part No. 200 11 119
Mains cord for junction box
CH
230 V, 50/60 Hz
UK
230 V, 50/60 Hz
US/Japan
230 V, 50/60 Hz
US/Japan
115 V, 60 Hz
Part
Part
Part
Part
Part
Part
Part
Part
Power failure venting valve, DN 10 KF
024 V DC
230 V, 50/60 Hz
No.
No.
No.
No.
200
200
200
200
81
81
81
81
099
097
141
090
No.
No.
No.
No.
200
200
200
200
81
81
81
81
099
097
141
090
Part No. 800120V0021
Part No. 174 26
Part No. 800120V0021
Part No. 174 26
–
–
Part No. 854 28
Part No. 854 27
Water cooling unit
Part No. 800135V0002
Part No. 800135V0002
24 V DC mains cord
03 m (07.0 ft)
05 m (17.5 ft)
10 m (35.0 ft)
20 m (70.0 ft)
Part
Part
Part
Part
Part
Part
Part
Part
Flange heater for flange DN 100 CF,
115 V
230 V
Copper sealing rings for CF flanges
(set of 10 pieces)
Control unit for turbomolecular pump systems
(see Section "Accessories")
Oerlikon Leybold Vacuum Full Line Catalog
No.
No.
No.
No.
800094V0300
800094V0500
800094V1000
800094V2000
No.
No.
No.
No.
800094V0300
800094V0500
800094V1000
800094V2000
–
Part No. 839 45
upon request
upon request
23 C10
CS Calibration Systems
Routine calibrations of vacuum gauges
are an important component of quality
assurance schemes. The calibration
systems from Oerlikon Leybold
Vacuum put the customer in a position
to check and recalibrate on his own
the specified and necessary accuracy
of his vacuum gauges.
850 mm
(33.64 in.)
The requirements imposed on vacuum
engineering with regard to accuracy of
the measurements, reproducibility and
unambiguity of the determined vacuum
pressures have increased significantly
over the last years.
Each system is equipped with several
certified reference pressure sensors
(transmitter standards), which each
cover a part of the specified range of
calibration pressures. In the pump
system, turbomolecular pumps with
TRIVAC rotary vane or DIVAC diaphragm pumps are used. A variable
leak valve is used to admit the gas into
the calibration chamber. In the case of
the calibration system CS7, the gas
inlet line is, moreover, equipped with
it’s own pump system.
The CS7 is equipped with a heater for
the vacuum chamber, for the purpose
of attaining lower chamber pressures
more rapidly. The temperature of the
heating collars can be controlled
whereby the maximum degassing temperature will depend on the components installed (flanges, pressure sensors, valves).
mm
500
in.)
69
.
9
(1
500 mm
(19.69 in.)
Calibration systems are available for this
purpose which cover a calibration range
from 1000 mbar to 1 x 10-7 mbar
(750 to 0.75 x 10-7 Torr).
CS3 calibration system
Advantages to the User
- Vacuum gauges and measurement
systems of any make may be
calibrated
- Designed in accordance with
DIN 28 418/ISO/DIS 3567
1750 mm
(68.90 in.)
- Transfer standards with PTB-,
DKD- or factory certificate
- Easier DIN/ISO 9000 approval
- Reliable and reproducible measurements
- Quick start-up
depth
approx. 900 mm
(35.43 in.)
- Measurement system free of hydrocarbons when using dry compressing vacuum pumps
2100 mm
(82.68 in.)
- Simple operation
- CE approval
CS7 calibration system
C10 24
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
Calibration System
CS3
CS7
Calibration range
mbar
(Torr)
1000 to 1 x
(750 to 0.75 x 10-3)
1000 to 1 x 10-7
(750 to 0.75 x 10-7)
Pressure measurement range
mbar
(Torr)
1000 to 2 x 10-6
(750 to 1.5 x 10-6)
1000 to 2 x 10-9
(750 to 1.5 x 10-9)
5 (3) x DN 16 KF
1 (0) x DN 25 KF
6 (3) x DN 16 CF
6 (4) x DN 40 CF
via variable leak valve
via variable leak valve
Extra pump system for admitting gas
no
yes
Heater for the vacuum chamber
no
yes
Vacuum chamber connections
(in brackets: quantity available
on the side of the customer’s system)
Admitting gas
10-3
Application examples:
Which pressure sensors may be calibrated with which system?
Typ of Sensor
Calibration System
CS3
CS7
BOURDONVAC
■
■
Capsule vacuum gauges
■
■
DIAVAC DV 1000
■
■
DI 200, DI 2000
■
■
CTR 90, CTR 91, CTR 100
(1000 - 1 Torr full scale)
■
■
Diaphragm sensors
■
CTR 91 (0.1 Torr full scale)
THERMOVAC sensors
TR 301, TR 306
■
■
TR 211, TR 216, TTR 211, TTR 216,
TTR 90, TTR 91, TTR 96, TTR 100
■
■
VISCOVAC sensor
(spinning rotor viscosity gauge)
■
VK 201
PENNINGVAC sensors
PR 25, PR 26, PR 27, PR 35,
PR 36, PR 37, PTR 90, PTR 225
■
IONIVAC sensors
ITR 90, ITR 100, ITR 200
■
IE 414, IE 514
■
Calibration System
Ordering Information
CS3
Ordering information and options
Oerlikon Leybold Vacuum Full Line Catalog
upon request
CS7
upon request
25 C10
Accessories
Control Unit for Turbomolecular Pump Systems
The control unit is suited for operation
in connection with turbomolecular
pump systems PT 50, PT 80 Dry,
PT 151/361, PT 151/361 Dry,
PT 300 Dry; as well as custom pump
systems.
The graphic monochrome display with
its blue LED backlight offers excellent
visibility also under difficult conditions.
Control unit for turbomolecular pump systems
Control unit installed in the PT 80 Dry pump
system
Advantages to the User
- Either automatic/manual operation
- Pressure readout for forevacuum
and high vacuum is possible
- Selectable pressure units: mbar,
torr, Pa
- Graphic display of the pressure
curve
- Connectable high vacuum sensors:
PTR and ITR
- Setting up the cut-in pressure for
the turbomolecular pump is possible
- Venting of the pump system
through a delayed venting function
- Memory card for recording data is
connectable
- Data recording through a PC is possible
- Menu navigation in different languages
Ordering Information
Control unit for turbomolecular pump systems
C10 26
Control Unit for Turbomolecular Pump Systems
upon request
Oerlikon Leybold Vacuum Full Line Catalog
Adsorption Traps with Aluminium Oxide Insert
Adsorption traps are installed in all
those cases where an oil-free
vacuum is to be produced with oilsealed vacuum pumps.
Adsorption trap (left) and insert (right)
Advantages to the User
d
- Backstreaming of oil is reduced by
99%
DN
- Longer service life
- High conductance
h
- Filling can be easily exchanged
a1
- Improvement in the ultimate pressure attained by backing pumps by
one order of magnitude
h1
a
DN
- Stainless steel housing and insert
DN
16 KF
25 KF
40 KF
- NBR seal
a
82
102
132
a1
82
102
65
d
135
175
235
h
147
155
160
h1
32
33
20
Typical Applications
- Product of an oil-free vacuum
Supplied Equipment
Residual gas spectrum; top ahead of a rotary
vacuum pump, bottom ahead of a rotary vacuum
pump with adsorption trap
Technical Data
Adsorption Trap
16 KF
25 KF
40 KF
- Complete with insert
- Without adsorbent
Conductance at 10-2 mbar (Torr)
l x s (l x sec)
4
6
12
Service live with Al oxide
3
3
3
l (qts)
0.5 (0.53)
1.0 (1.06)
2.0 (2.1)
kg (lbs)
1.3 (2.9)
1.3 (2.9)
4.0 (8.8)
Al oxide filling
Weight, approx.
Ordering Information
Oerlikon Leybold Vacuum Full Line Catalog
Dimensional drawing for the adsorption traps
Months
Adsorption Trap
16 KF
25 KF
40 KF
Adsorption trap
Part No. 854 14 Part No. 854 15 Part No. 854 16
Activated aluminum oxide in tin
1.6 l (approx. 1.2 kg (2.65 lbs))
Part No. 854 10 Part No. 854 10 Part No. 854 10
27 C10
Only available for purchase
in North and South America
PT-FLEX Dry Turbomolecular Pump System
PT-FLEX pumping systems provide
unique flexibility, allowing the user to
define the optimum combination of
performance and price.
PT-FLEX pump systems are offered
with three sizes Compound Turbomolecular pumps, three sizes dry Scroll
backing pumps, a basic or full-featured
system controller and the ability to
incorporate and control multiple valves,
vacuum gauges, flange heaters and
other peripheral equipment.
PT-FLEX systems can be specially
configured with classic turbo pumps
and rotary vane forevacuum pumps.
Please consult Oerlikon Leybold
Vacuum for details.
Advantages to the User
- Oil free high vacuum
- Compact, mobile
PT-FLEX
with BASIC Controller
PT-FLEX
with TSC Controller
- Mains ON/OFF
(see separate catalog page for
in-depth description of features and
capabilities)
- Adjustable height
- Mains switch activated 115 V AC
output for use with vent valve or
gauge controller
- Fully assembled and tested
- Start / Stop switch for both pumps
- Air cooled
- Manual control and power for
Configuration and
Capabilities
- Pumps
- Vent valves
- Three sizes turbo pump
- Vacuum isolation valves
- Three sizes dry scroll forevacuum
pump
- Manual or powered height adjustment
- Ability to power and control multiple
peripheral devices (sold separately)
- Basic or full-featured TSC system
controller
- Flange heater
- Provides additional 115 V AC and
24 V DC outputs to power additional peripheral devices
- One button auto system control
- Monitors and displays all turbo
pump operating and diagnostic
parameters
- Acts as display for up to 3 “smart”
vacuum gauge sensors
- All features of PT-Flex BASIC
controller
- Additional power and control capabilities for peripheral equipment
- Vacuum Ion Gauge degas function
for gauge model ITR 90
- Turbo operation indicator
- Allows mounting of one or two rack
gauge controllers
C10 28
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
PT-FLEX
Turbomolecular pump
High vacuum connection
DN
Backing pumps
Cooling
Max. current requirements
(dependent on forepump)
V AC
Phase
Hz
A
Controller
Dimensional drawing for the PT-Flex (manual post)
Oerlikon Leybold Vacuum Full Line Catalog
TURBOVAC SL 80
63 ISO-K
63 CF
TURBOVAC SL 300
100 ISO-K
100 CF
SCROLLVAC SC 5 D
SCROLLVAC SC 5 D
SCROLLVAC SC 15 D
Air
Air (water option)
115
1
50/60
15
115
1
50/60
15
TSC Turbo System Controller
AUTO operation with gauge selection or Manual
TW monitoring status
Gauge sensor display with smart gauge selection
Accessory Control
Inlet, foreline and roughing valve
Vent/purge valve
Flange heater (CF flange only)
Ion sensor degas
Basic System Controller
Manual Start/Stop operation
Accessory Control
Vacuum valve
Vent valve
Flange heater (CF flange only)
Ion sensor degas
Column height adjustment (option)
Dimensional drawing (front view) for the PT-Flex
(powered support)
29 C10
Ordering Information
Part No. 1800
V
01
PT-Flex
Base number
Manual controls
- manual height adjustment
- electric height adjustment
Automated controls
- manual height adjustment
Turbomolecular pump
SL 80 with DN 63 ISO-K inlet
SL 80 with DN 63 CF inlet
SL 300 with DN 100 ISO-K inlet
SL 300 with DN 100 CF inlet
TW 250S with DN 100 ISO-K inlet
TW 250S with DN 100 CF inlet
16
17
18
1
2
3
5
6
7
Dry scroll pump
Not used
SC 5 D
Reserved for future use
SC 15 D (SL 300 only)
C10 30
0
1
2
3
Oerlikon Leybold Vacuum Full Line Catalog
Notes
Oerlikon Leybold Vacuum Full Line Catalog
31 C10
Only available for purchase
in North and South America
TSC-TurboSystem Controller
The TSC controler will:
- Power the turbomolecular pump
- Display all relevant turbo
information:
- Connected pump model
- Rotation frequency (Hz)
- Rotation speed (rpm)
- Bearing temperature (°C)
- Motor current (Amps)
- Motor temperature (°C)
- Supply voltage (V)
- Heatsink temperature (°C)
- Cumulative operating time
(hours)
- Power the fore/rough pump (up to
TRIVAC D 16 B or ECODRY M 15,
115 V single phase)
C10 32
- Power and display up to three of
any manufacturer’s smart gauges
(must have 0 - 10 V or 4 - 20 mA
output capability)
- Provide degas capability for a hotcathode ion gauge sensor
- Power up to three system valves
(electropneumatic with 24 V DC
coils; electromagnetic valves on
request) – typically an inlet valve,
foreline valve and roughing valve
- Power a turbomolecular pump vent
or purge/vent valve
- Power an inlet flange heater
(CF flanged pumps only)
- Control the turbomolecular pump,
fore/rough pump and all valves
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
For operating turbomolecular pump
TSC-S TurboSystem Controller
TSC-L TurboSystem Controller
TSC - TurboSystem Controller
TURBOVAC TW 300 / TW 70 H
–
Ordering Information
–
TURBOVAC TW 700
TSC - TurboSystem Controller
TSC - TurboSystem Controller
115 V, RS 485 C
TSC-S
Part No. 899 287
–
TSC-L
–
Part No. 899 288
115 V, RS 232 C
TSC-S
Part No. 899 289
–
TSC-L
–
Part No. 899 290
24 V DC, normally open
Part No. 899 813
Part No. 899 813
24 V DC, normally closed
Part No. 899 814
Part No. 899 814
Venting valve
Note:
All controllers include:
15 ft. (5 m) long cables between TSC controller and turbomolecular pump (power & communication)
06 ft. (2 m) power cord
Mating connectors for all accessoring outlets
Operating manual, electrical schematic, and spare parts list
Oerlikon Leybold Vacuum Full Line Catalog
33 C10
Only available for purchase
in North and South America
TPC-TurboPump Controller
The TPC controler will:
- Power the turbomolecular pump
- Display all relevant turbo
information:
- Connected pump model
- Rotation frequency (Hz)
- Rotation speed (rpm)
- Bearing temperature (°C)
- Motor current (Amps)
- Motor temperature (°C)
- Supply voltage (V)
- Heatsink temperature (°C)
- Cumulative operating time
(hours)
- Power a turbomolecular pump vent
or purge/vent valve
C10 34
- Power an inlet flange heater
(CF flanged pumps only)
- Control the turbomolecular pump,
flange heater and purge/vent valve
Oerlikon Leybold Vacuum Full Line Catalog
Technical Data
For operating turbomolecular pump
TPC-S TurboPump Controller
TPC-L TurboPump Controller
TPC-1600 TurboPump Controller
TPC - TurboPump Controller
TURBOVAC TW 300
TURBOVAC TW 70 H
–
–
Ordering Information
–
–
TURBOVAC TW 700
–
–
TURBOVAC T 1600
TURBOVAC TW 1600
TPC - TurboPump Controller
TPC - TurboPump Controller
115 V, RS 485 C
TPC-S
Part No. 899 281
–
–
TPC-L
–
Part No. 899 282
–
115 V, RS 232 C
TPC-S
Part No. 899 283
–
–
TPC-L
–
Part No. 899 284
–
–
–
Part No. 899 285
–
–
Part No. 899 286
–
–
Part No. 899 295
–
–
Part No. 899 296
24 V DC, normally open
Part No. 899 813
Part No. 899 813
Part No. 899 813
24 V DC, normally closed
Part No. 899 814
Part No. 899 814
Part No. 899 813
115 V, RS 485 C
TPC-1600
115 V, RS 232 C
TPC-1600
230 V, RS 485 C
TPC-1600
230 V, RS 232 C
TPC-1600
Venting valve
Note:
All controllers include:
15 ft. (5 m) long cables between TSC controller and turbomolecular pump (power & communication)
06 ft. (2 m) power cord
Mating connectors for all accessory‚ outlets
Operating manual, electrical schematic, and spare parts list
Oerlikon Leybold Vacuum Full Line Catalog
35 C10
Sales and Service
Germany
Europe
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
[email protected]
www.oerlikon.com
Belgium
Oerlikon
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax: +32-2-720 83 38
[email protected]
Service:
Phone: +32-2-711 00 82
Fax: +32-2-720 83 38
[email protected]
Spain
Oerlikon
Leybold Vacuum Spain, S.A.
C/ Huelva 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 43 11
Fax: +34-93-666 43 70
[email protected]
Service:
Phone: +34-93-666 46 16
Fax: +34-93-685 43 70
[email protected]
France
Oerlikon
Leybold Vacuum France S.A.
7, Avenue du Québec
Z.A. de Courtaboeuf 1 - B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax: +33-1-69 07 57 38
[email protected]
[email protected]
Sweden
Oerlikon
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Göteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax: +46-31-68 39 39
[email protected]
[email protected]
Visiting/delivery address:
Datavägen 57B
SE-43632 Askim
Oerlikon
Leybold Vacuum GmbH
Sales Area North/Northeast
Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone: +49-(0)30-435 609 0
Fax: +49-(0)30-435 609 10
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
Phone: +49-(0)89-357 33 9-10
Fax: +49-(0)89-357 33 9-33
[email protected]
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area West & Benelux
Branch Office Cologne
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1270
Fax: +49-(0)221-347 1291
[email protected]
Oerlikon
Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1439
Fax: +49-(0)221-347 1945
[email protected]
Oerlikon
Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1765
Fax: +49-(0)221-347 1944
[email protected]
Oerlikon
Leybold Vacuum
Dresden GmbH
Service Competence Center
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-(0)351-88 55 00
Fax: +49-(0)351-88 55 041
[email protected]
Oerlikon
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergès
B.P. 107 640
F-26501 Bourg-lès-Valence Cedex
Service:
Phone: +33-4-75 82 33 00
Fax: +33-4-75 82 92 69
[email protected]
Great Britain
Oerlikon
Leybold Vacuum UK LTD.
Silverglade Business Park
Leatherhead Road Unit 2
KT9 2QL Chessington, Surrey
(London)
Sales:
Phone: +44-13-7273 7300
Fax: +44-13-7273 7301
[email protected]
Service:
Phone: +44-20-8971 7030
Fax: +44-20-8971 7003
[email protected]
Italy
Oerlikon
Leybold Vacuum Italia S.r.l.
Via Trasimeno 8
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax: +39-02-27 20 96 41
[email protected]
Service:
Phone: +39-02-27 22 31
Fax: +39-02-27 22 32 17
[email protected]
Switzerland
Oerlikon
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: +41-44-308 40 50
Fax: +41-44-302 43 73
[email protected]
Service:
Phone: +41-44-308 40 62
Fax: +41-44-308 40 60
[email protected]
America
USA
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax: +1-724-325-3577
[email protected]
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax: +1-724-333-1217
Pacific, Mountain, Alaskan &
Hawaiian time zones
Phone: +1-408-436-2828
Fax: +1-408-436-2849
Service:
Phone: +1-724-327-5700
Fax: +1-724-325-3577
Latin America
Oerlikon
Leybold Vacuum USA Inc.
Brazilian Office
Av. Dória 360 cj. 12 Campo Belo
04635-070 São Paulo SP BRAZIL
Sales:
Phone: +55 11-3554 3117
Fax: +55 11-3554 3117
[email protected]
LV_10029_2009
P.R. China
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
(Tianjin) Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Shanghai Branch:
No.33
76 Fu Te Dong San Road
Waigaoqiao Free Trade Zone
Shanghai 200131
China
Sales and Service:
Phone: +86-21-5064-4666
Fax: +86-21-5064-4668
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Guangzhou Office and
Service Center
1st F, Main Building
Science City Plaza,
No.111 Science Revenue,
Guangzhou Science City
(GZSC) 510663, Guangzhou,
China
Sales:
Phone: +86-20-223 23 980
Fax:+86-20-223 23 990
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Beijing 100004
China
Sales:
Phone: +86-10-6590-7622
Fax: +86-10-6590-7607
[email protected]
[email protected]
India
Oerlikon
Leybold Vacuum India Pvt Ltd.
EL 22, J-Block
MIDC Bhosari
Pune 411026
India
Sales and Service:
Phone: +91-20-3061 6000
Fax: +91-20-2712 1571
[email protected]
[email protected]
08.09
Netherlands
Oerlikon
Leybold Vacuum Nederland B.V.
Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone: +31-(30) 242 6330
Fax: +31-(30) 242 6331
[email protected]
[email protected]
Asia
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax:
+49-(0)221-347 1250
[email protected]
Japan
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone: +81-45-471-3330
Fax: +81-45-471-3323
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Osaka Sales Office
3F, Shin-Osaka Terasaki
No.3 Bldg.
1-5-28 Nishi-Miyahara
Yodogawa-ku, Osaka-shi
Osaka 532-0004
Phone: +81-6-6399-6271
Fax: +81-6-6399-6273
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
Kogyo Danchi
21, Kasuminosato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298 89 2841
Fax: +81-298 89 2838
[email protected]
[email protected]
South Korea
Oerlikon
Leybold Vacuum Korea Ltd.
3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
Phone: +82-31 785 1367
Fax: +82-31 785 1359
[email protected]
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Phone: +82-41 589 3035
Fax: +82-41 588 0166
[email protected]
Singapore
Oerlikon
Leybold Vacuum
Singapore Pte Ltd.
1 Science Park Road
Singapore Science Park 2
#02-12, Capricorn Building
Singapore 117528
Sales and Service:
Phone: +65-6303 7000
Fax: +65-6773 0039
[email protected]
[email protected]
Taiwan
Oerlikon
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chunghsin Road., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-500 1688
Fax: +886-3-583 3999
[email protected]
[email protected]
www.oerlikon.com/
leyboldvacuum
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