Piezo Actuator Type Mass Flow Controllers

Piezo Actuator Type Mass Flow Controllers
11
GAS
Piezo Actuator Type Mass Flow Controllers
Purifying the process gas is an extremely important part of forming the thin films
that are required in today’s semiconductor manufacturing. Improving the purity
of the gas involves increasing the effectiveness of purifiers and filters, as well as
using ultra-clean gas flow systems. Conventional wisdom indicates that to make
a gas supply system ultra clean, the areas that come in contact with the gas must
be extremely well polished, and the entire system should be metal.
In the mass flow controller field, where the structure of gas supply systems is
necessarily extremely complex, the above were considered difficult conditions
to meet. Yet HORIBA STEC succeeded in developing a method for massproducing metal diaphragm valves, and in 1984, the company released its SEC4000 series of all-metal mass flow controllers, which came to be known as
the ultra clean mass flow controllers. Research and development have
continued, and now HORIBA STEC offers a variety of mass flow controllers that
surpass the needs of the market—including the SEC-7300 series, which has
become the de facto standard in compact mass flow controllers.
Piezo Actuator Type Mass Flow Controllers 12
SEC-7300 series
Compact mass flow controllers
The series that became the de facto standard in compact mass flow controllers
sCompact: With just 106 mm between surfaces, can perform flow rate control
at up to 30 SLM (N2) (up to 50 SLM (N2) is available with this series).
sFlow rate control at extremely low flow rates: The SEC-7320 F.S. 1 SCCM
model offers flow rate control for flow rates as low as 0.02 SCCM.
sCompatible with SDS (Safe Delivery Source Model): The SEC-734 OLD model
offers differential pressure control from 1.33 kPa.
Conforming gases: SDS cylinders packed with
ASH3, BF3, SiF4, GeF4, etc.
(SDS is a registered trademark of Matheson Tri-Gas,
Semi-Gas, Semi-Gas Division, and ATMI, Inc.)
sUltra clean: All metal construction
(SEC-7300M type)
sAuto-close function is standard.
SEC-4400 series
Mass flow controllers
The best-selling series that showed the world what ultra-clean means
sUltra clean: All metal construction (SEC-4000M type)
sCompatible with a wide variety of flow rate control needs: Flow rate control between 0.1 SCCM and 100 SLM (N2) available in a single series.
sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4400MF/4500MF types).
Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction.
sConforming gases: C2F6, C3F8, C4F8, SF6, SiF4, etc,
sUltra clean: All metal construction (SEC-4000M type)
sAuto-close function is standard.
sModel with purge mode: SEC-4400SP type
sWide range model: SEC-4400SR type
SEC-4401/4501
The ultimate in analog mass flow controllers
sHigh reliability: New sensor design, stable zero point: achieve ±20
mV/y (typical)
sHigh precision: ±0.8 F.S. (SEC-4401 type)
sFast response: Feature an ultra-quick start function and offer
response times under a second over the entire flow rate range.
sModels that prevent thermal siphoning: Mass flow controllers that
are not affected by the installation orientation (SEC-4000MF type).
Feature a new sensor (patent pending) that prevents thermal
siphoning through the very principles of its construction.
Conforming gases: C3F6, C3F8, C4F8, SF6, SiF4, etc,
sUltra clean: All metal construction (SEC-4001M type)
sAuto-close function is standard.
Mass flow controllers
13
GAS
SEC-7300 series
Model
flow
SEC- ( mass
controller )
flow
)
SEF- ( mass
meter
7320
——
7330
7330
7340
——
7350
7350
7355
7355
7340LD
——
2/3/5/10 SCCM
20 SCCM 2kPa
30 SCCM 2.7kPa
——
——
5/10/20/50/100
200/500 SCCM
1/2/3/5/10 SLM
——
7140
®
M: type, SUS316L, R: type, SUS316L, Viton
Materials used in gas contact area
Valve type
Open at power-off: O Close at power-off: C
Standard flow rate range
(N2 equivalent F.S.)
1/2/3 SCCM
3/5/10 SLM
20/30 SLM
50 SLM
(H2:100 SLM)
——
5/10/20/50/100
200/500 SCCM
1/2/3/5/10 SLM
——
20/30 SLM
50/100 SLM
(for SEC series)
Standard flow rate range
(N2 equivalent F.S.)
——
5/10/20/50/100
200/500 SCCM
1/2 SLM
(for SEF series)
Flow rate control range
0 to 100% F.S.
2 to 100% F.S.
Response speed
Less than 1 sec (T98)
± 1% F.S.
Accuracy
± 1% F.S.
Linearity
± 0.5% F.S.
± 0.2% F.S.
Repeatability
1 SCCM to 5 SLM: 50 to 300 kPa (d)
10 SLM: 100 to 300 kPa (d)
Operating differential pressure
(for SEC series)
20 SLM: 100 to 300 kPa (d)
30 SLM: 150 to 300 kPa (d)
Maximum operating pressure
150 to 300 kPa (d)
——
1.33 to 101.3 kPa (d)
300 kPa (G)
Pressure Resistance
1 MPa (G)
M: 5 x 10-12 Pa·m3/s (He) R: 1 x 10-8 Pa·m /s (He)
Leak Integrity
Operating temperature
5 to 50°C (accuracy guaranteed between 15 and 35°C)
Flow rate setting signal
0.1 to 5VDC (Input impedance : more then 1MΩ)
Flow rate output signal
0 to 5VDC (Minimun load resistance 2kΩ)
+15 VDC ± 5%, 60 mA
-15 VDC ± 5%, 60 mA, 1.8 VA
+15VDC ± 5%, 60 mA; -15 VDC ± 5%, 60 mA, 2.7 VA
Drive power source
1/4 VCR type or IGS
Standard Fitting*1
1/4 VCR type or IGS
3/8 VCR type
*1 Can be made compatible with an integrated unit flange. * A model that has a signal cable connector on the side is available for use with integrated gas panels (for SEC-7340/7350/7355 series).
* The standard flow rate range and operating differential pressure are different in the mass flow controllers (SEC series) versus the mass flow meters (SEF series).
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton® is registered trademark of E. I. DuPont de Nemours.
SEC-4400 series
Model
flow
SEC- ( mass
controller )
flow
)
SEF- ( mass
meter
4500(MK3)
4500
4400(MK3)
4400
4550
4550
4600
4600
M: type, SUS316L, R: type, SUS316L, Viton
Materials used in gas contact area
Standard flow rate range
(N2 equivalent F.S.)
5/10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM
10 SLM
20 SLM
50 SLM
30 SLM
50 SLM
4400SR
——
Open at power-off: O
Open at power-off: O
5/10/20/50
100/200 SCCM
500 SCCM
1/2/3/5 SLM
100 SLM
2 to 100% F.S.
Flow rate control range
4400MF
——
4500MF
——
SUS316L
Open at power-off: O Close at power-off: C
Valve type
4400SP
——
®
Open at power-off: O Close at power-off: C
5/10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM
10 SLM
0.5 to 100% F.S.
2 to 100% F.S.
± 1% F.S. (10 to 100%)
± 0.2% F.S. (0.5 to 10%)
± 1% F.S.
Less than 1 sec (T98)
Response speed
± 1% F.S. (MK3: ± 2% F.S.)
Accuracy
± 1% F.S.
± 0.5% F.S. (MK3: ± 1% F.S.)
Linearity
± 0.2% F.S.
Repeatability
Operating differential pressure
(for SEC series)
*1
50 to 300kPa (d)
100 to 300kPa (d)
*1
*1
150 to 300kPa (d) 100 to 300kPa (d) 150 to 300kPa (d)
1 MPa (G)
Pressure Resistance
M: 1 x 10-11Pa·m3/s (He) R: 1 x 10-8Pa·m3/s (He)
Leak Integrity
Operating temperature
5 to 50°C (accuracy guaranteed between 15 and 35°C)
Flow rate setting signal
0.1 to 5VDC (Input impedance : more then 1MΩ)
0 to 5VDC (Minimun load resistance 2kΩ)
Flow rate output signal
+15VDC ± 5% 80mA -15VDC ± 5% 80mA 2.4VA
+15VDC ± 5% 60mA -15VDC ± 5% 60mA 1.8VA
Drive power source
Standard Fitting
100 to 300kPa (d)
50 to 300kPa (d)
300 kPa (G)
Maximum operating pressure
1/4 VCR type
3/8 VCR type
1/4 VCR type
*1 Operating pressure under atmospheric pressure conditions on the secondary side. * SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Gases used by the SEC-400MK3: N2, H2, O2, He, Ar. Gases used by the SEC-4500MK3: N2, H2, O2.
* Viton® is registered trademark of E. I. DuPont de Nemours.
SEC-4001series
Model
20 SLM
flow
SEC- ( mass
controller )
flow
)
SEF- ( mass
meter
4401
4401
4501
4501
M: type, SUS316L, R: type, SUS316L, Viton®
Materials used in gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)*1
Open at power-off: O Close at power-off: C
5/10/20/30/50/100/200/300/500 SCCM
1/2/3/5 SLM
10 SLM
Flow rate control range
2 to 100% F.S.
Response speed*2
Accuracy
Less than 1 sec across the entire flow rate control range (T98)
± 0.8% F.S.
± 1% F.S.
± 0.5% F.S.
Linearity
± 0.2% F.S.
Repeatability
Operating differential pressure (for SEC series)
Maximum operating pressure
Pressure Resistance
Leak Integrity
100 to 300kPa (d)
50 to 300kPa (d)
300 kPa (G)
1MPa (G)
M: 5 x 10-12 Pa·m3/s (He), R: 1 x 10-8 Pa·m3/s (He)
Operating temperature
5 to 50°C (accuracy guaranteed between 15 and 45°C)
Flow rate setting signal
0.1 to 5VDC (Input impedance : more then 1MΩ)
Flow rate output signal
Drive power source
Standard Fitting
Long-term zero point stability*3
Standard functions
Options
20 SLM
0 to 5VDC (Minimun load resistance 2kΩ)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 60 mA, 1.8 VA
1/4 VCR type
20 mV/y typical
Auto-close (AC), ultra-quick start function standard
Mount-free sensor (precision ± 1% F.S.) *4
*1 SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa). *2 Responsiveness from 0% setting (fully closed setting) until entire flow range is reached.
*3 Value under set conditions (ambient temperature change within ± 2°C). *4 Models with mount-free sensor: Mass flow controllers: SEC-4401MF, SEC-4501MF; Mass flow meters: SEF-4401MF, SEF-4501MF
* Viton® is registered trademark of E. I. DuPont de Nemours.
Piezo Actuator Type Mass Flow Controllers 14
High-speed response with ultra quick start (within one second for the entire flow control range)
s Ultra quick start function’s responsiveness
s Remarkable improvement in responsiveness during startup
during startup of each line
Mass flow controller valve control has traditionally been carried out through
PID control, in which the sensor output signal is compared with the flow
rate settings signal from the exterior of the unit. With this method, control is
applied starting when the valve is still closed and continuing until an
extremely low flow rate (2% F.S.) is achieved, so it takes time until the valve
is able to begin controlling the gas flow rate effectively, and responsiveness
within one second of start up is extremely difficult to achieve while meeting
all the specified conditions. The ultra quick start function opens the valve
for a brief moment, until the sensor output reaches a fixed value, after
which the unit is transferred to PID control. This results in a dramatic
improvement in the start-up response speed from the time when the valve
is still closed until a low flow rate is achieved, and enables responsiveness
across the entire flow rate control range within one second. The processes
developed in recent years require low flow rate control and almost full scale
flow rate control within a very short time, and since the mass flow range
that a single unit can cover is quite large, a mass flow controller with ultra
quick start can significantly increase both quality and throughput.
Gas A
5V
4V
Gas B
3V
2V
Gas C
Gas D
Gas E
1V
0
1
2
3
4
5
6
seconds
Time required to achieve set flow rate, starting at 0
Characteristics of the mount-free sensor (MF sensor)
s What is thermal siphoning?
Thermal siphoning is a kind of convection that can occur within the flow
rate sensor as the sensor is heated up. This convection can result in
the output of a flow rate signal that resembles zero point drift, even when
the flow rate is not being controlled. Thermal siphoning is more likely to
be affected if the mass flow controller is installed vertically. The effect
created varies in proportion with the molecular weight and pressure.
s The design of the mount-free sensor (MF sensor)
1000
The mount-free sensor is
a newly designed sensor
(patent pending) that prevents
the orientation of the unit from
being a factor through the very
principles of its construction.
The equivalent heater is
constructed to prevent
convection. It is suitable for
use with C3F8, C4F8, SF6, SiF4,
and other similar gases.
Gas: C4F8
Primary pressure: 200 kPa
800
Heater
600
400
200
Zero output 0
voltage (mV)
-200
Bypass
Sensor
1
2
3
4
5
2
3
4
5
6
-400
-600
-800
-1000
Gas Inlet
1
6
Connecting the SEC-4400SP/SR
s SEC-4400SP
s SEC-4400SR
This model offers improved purge efficiency.
Signal cable: When the valve open signal is input to the valve
open/close signal input pin through an SC-EH2 type cable, it is
possible to achieve a purge flow rate several times higher than
that of ordinary models.
This model offers improved purge efficiency.
Signal cable: When the valve open signal is input to the valve open/close
signal input pin through an SC-EH2 type cable, it is possible to achieve
a purge flow rate several times higher than that of ordinary models.
SC-EH2 type/DH2 type
SC-EH2 type cable
Purge input
Conversion
adapter
F.G. ground
Zero adjustment
SP
SU
SR
Communications
PAC
DU
SC-E4/D4: CA-4W
SC-EH2/DH2: CA-HW
GAS
Mass flow controllers for integrated gas panels
Integrated gas panels are made up of separate modules, including
mass flow controllers, valves, regulators, filters, and so on, that perform
the functions that were traditionally performed by parts in gas supply
systems. Integrated gas panels can be manufactured without welding
joints and piping since individual modules are used, and they are smaller
and easier to maintain than traditional gas supply systems.
Air valve
Filter
· Compatible with a wide variety of fittings
Compatible with every type of fitting, including C seals, CS seals,
and W seals.
· Easier to maintain
Unidirectional desorption makes it easier to desorb the mass flow
controller.
· Less dead volume
The amount of useless volume at the joint area is greatly reduced.
Compatible model series
SEC-Z512 series
SEC-Z10D series
(DeviceNet™ compatible mass flow controllers)
SEC-7300 series
SEC-Z512/522 series
SEC-Z10DW series
(DeviceNet™ compatible mass flow controllers)
SEC-F700 series
SEC-F400 series
SEC-V100D series
SEC-7300 series
Pitch size
1.125 inch
s Sample integrated gas panel design
Hand valve Regulator
s Advantages
Air valve
1.5 inch
Flow
SUC processing
CRP processing
After machining, the surface of the stainless steel (SUS316L) that makes
up the unit is polished until its roughness is at the sub-micron level.
After machining, the surface of the stainless steel (SUS316L) that
makes up the unit is subjected to composite electrolytic polishing, and
then a 100% Cr2O3 oxidation film is formed on the surface.
s Advantages
s Advantages
· Improves gas emission characteristics.
· Controls particle generation.
· Reduces outgassing of moisture and hydrocarbon gases.
· Increases resistance to corrosion by chlorine gases
(highly corrosive gases).
· Has a non-catalytic effect on the spontaneous decomposition of
SiH4/B2He and other similar chemicals.
· Suppresses contamination by particles from certain corrosive gases.
Valve
Sensor
OUT
s Outgas data
1/4 x 2 Ar, 1.2 L/min, RT 10 hours
IN
H2O concentration (ppb)
100
Surface roughness measurement
s Results of surface roughness measurement
0.2 µm
0.1 µm
EP
CRPS
30
10
3
1
0.3
0.1
0
100
200
300
400
500
600
Time (minutes)
s Non-catalytic data
1/4 x 1 m
120
Ra
RMS
Rt
Ro
Rv
Rz
Sm
SC
Slope
0.035
0.035
0.120
0.06
0.06
0.090
0.113
13
0.003
µm
µm
µm
µm
µm
µm
µm
TL
Rmax
0.31
µm
Measurement conditions
Measurement
scaling factor
Results
5000
Drive speed
Cutoff
Measurement length
0.3 mm/s
0.8 mm
2.5 mm
SiH4 concentration (ppm)
21
100
SUS316L
-CRPS
80
60
Pure Ni
Hastelloy-EP
SUS316L
-EP
40
20
0
50
100
150
200
250
300
Temperature (°C)
350
400
450
500
Mass Flow Controllers 22
Connecting analog mass flow controllers (examples)
s Connecting to a digital power source, display unit, and settings unit
Basic connections
Signal cable
Display unit
SC-Eseries
DU-102
Settings unit
SU-502
PAC
SEC
series
s Connecting to a dedicated controller
Control using PAC-S6
Control using PAC-D2
Signal cable
Signal cable
SC-Dseries
SC-Dseries
Flow rate output
PAC
-S6
SEC
Flow rate alarm (high/low)
Flow rate output
SEC
PAC
-D2
Flow rate alarm (high/low)
External control mode
· Flow rate setting
· Valve fully open/fully closed signal
Etc.
Program control
External control mode
· Flow rate setting
· Valve fully open/fully closed signal
Etc.
Control using an FI-1100 integrator/control unit
Signal cable
SC-Dseries
Flow rate output
FI1100
SEC
Flow rate alarm (high/low)
Integrated flow rate control
External control mode
· Flow rate setting
· Valve fully open/fully closed signal
Etc.
sConnecting to an external controller
Basic connections
Connector connections
Signal cable
SC-Aseries
Flow rate setting signal: 0 to 5 VDC
Flow rate output signal: 0 to 5 VDC
Alarm output (for some models)
SEC
Valve control signal:
Fully open/fully closed
Drive power source: ±15 VDC
Pin no.
1
2
3
4
5
6
7
8
9
Signal name
Valve forced open/close signal
Analog flow rate output signal (0 to 5 VDC)
Power source input (+15 VDC)
COMMON power source
Power source input (-15 VDC)
Analog flow rate setting signal (0 to 5 VDC)
COMMON signal
Alarm (option)
Valve voltage monitor (option)
Connector used: D-subminiature 9 contact pin connector
(with M3 fitting screws)
Mass Flow Controllers 26
Choosing the appropriate mass flow controller model and specifications
s SEC series
SEC-7330
Model
M
*1
O
*2
Seal material
SUC
*3
Valve
Gas contact area
structure surface processing
Ar
*4
100SCCM
*5
1/4VCR
*6
Gas types
Full-scale flow
rate and unit
Fitting
*1
Select the seal material.
M: Metal seal
R: Rubber seal
If you are using poisonous or corrosive gases, we recommend using M (metal) as the seal material.
(Examples: AsH3, B2H6, PH3, GeH4, H2Se, BCl3, BF3, Cl2, F2, HBr, HF, SiCl4, TiCl4, CiF3, HCI, WF6, etc.)
*2
Select the desired valve state for when there is no electricity. (Select the desired normal valve state.)
O: Open
C: Closed
(This option is not available for flow meters.)
*3
Gas contact area surface processing
The gas contact area can be processed to ultra clean levels (option).
SUC: Surfaces are polished until the roughness is at the sub-micron level.
CRP: A CRP film (passivation film) is formed on the gas contact surfaces
(stainless steel).
*4
Select the types of gas you wish to use.
*5
Select the full scale flow rate and flow rate unit. The flow rate unit is usually
noted at 0°C or 25°C (101.3 kPa). See Chart 1 for more information.
Individual
specifications
*7
Chart 1
*6
Fitting
A variety of contact joints other than 1/4 VCR type fitting can be used. Units can
also be made compatible with integrated gas panels. Please contact HORIBA
STEC for more information.
*7
Units can be adjusted to meet non-standard specifications. Please contact
HORIBA STEC for more information.
Flow rate unit
L/min
mL/min
0°C display
SLM
SCCM
25°C display
LM
CCM
s Digital interface
RS-485.F-Net protocol :
SEC-Z512MG/Z522MG
RS-422A.F-Net protocol : SEC-F700series SEC-V100Dseries
DeviceNet™ :
Series
SEC-Z500
SEC-Z10D/DW
SEC-F700
SEC-V100D
SEC-7300
SEC-4400
SEC-4001
SEC-G100A
SEC-E400J
SEC-E40
SEC-8000
SEC-2000
SEC-400
SEC-Z514MG/Z524MG
SEC-Z10D/Z10DWseries
Operating temparture
Standard Flow Range Normal
High
(N2 Equivalent F.S.) temp model temp model
5SCCM to 50SLM
5SCCM to 100SLM
5SCCM to 30SLM
10SCCM to 50SLM
1SCCM to 100SLM
5SCCM to 100SLM
5SCCM to 20SLM
10SCCM to 5SLM
10SCCM to 30SLM
10SCCM to 500SLM
5SCCM to 100SLM
10SCCM to 100SLM
5SCCM to 200SLM
Seal material
Metal
Rubber
Internal
surface
polishing
Analog
Interface
Fitting
Digital (F-Net)
Digital
IGS
VCR Type Swagelok
type
RS-422A RS-485 DeviceNet™
1.125inch 1.5inch
Standard
Standard
Option
Option
Option
Option
Option
Standard
Option
—
Option
—
—
Mass flow meters: For the SEF series, please start by deciding without valve structure and then consider the other options.
GAS
Dimensions
<1>
SEC-Z522
<2>
SEC-V100 series
SEC-Z10D series
2-M4
P.C.D.42±0.1
2-M4
P.C.D.42±0.1
45°
31.9
H
C
A
T
31.9
<3>
SEC-4600
SEC-Z13DW
D
E
W
45°
37.5
<4>
SEC-600
4-M8
4-M4
50
61
60M4, depth 5
B
.4
R25
I
33.5
50
27
*Please contact HORIBA STEC for information on details not shown here.
Model
SEC-Z512
SEC-Z522
SEC-Z11D
SEC-Z12D
SEC-Z13D
SEC-Z11DW
SEC-Z12DW
SEC-Z13DW
SEC-F730
SEC-F740
SEC-F750
SEC-F440
SEC-F450
SEC/SEF-V110DM
SEC/SEF-V120DM
SEC-7320
SEC/SEF-7330
SEC-7340(LD)
SEC/SEF-7350
SEC/SEF-7355
SEF-7140
SEC/SEF-4400(MF)
SEC/SEF-4500(MF)
SEC/SEF-4550
SEC/SEF-4600
SEC-4400SP/SR
SEC-4401(MF)
SEC-4501(MF)
SEC-E440J
SEC-E450J
SEC-E40(MK3)
SEC-E50(MK3)
SEC-E60
SEC-E70
SEC/SEF-6470 *1
SEC/SEF-6480 *1
SEC-8340
SEC/SEF-8440
SEC/SEF-8450
SEC/SEF-8455
SEC/SEF-8460
SEC/SEF-2410
SEC/SEF-2510
SEC/SEF-2551
SEC/SEF-310
SEC/SEF-320
SEC/SEF-400
SEC/SEF-500
SEC/SEF-550
SEC/SEF-600 *1
SEC-400MK2·3
SEC-500MK2·3
*1
*2
*
*
H
T
W
126
143
127
127
151.3
140
140
172
106
126
140
112
112
116.5
116.5
106
106
126
140
145
106
126
132
150
150
126
126
132
112
112
126
126
159
159
147
152.5
130.5
120.5
127
150
150
122
131.5
137
80
80
122
131.5
137
140
115.5
125
28
38.5
28.5
28.5
38.6
38.6
38.6
80
35
35
40
38
38
37.6
37.6
28
28
28
34
49
32
32
32
50
80
32
32
32
38
38
32
32
44
44
40
108
48
32
32
50
80
25.5
32
44
20
20
25.5
32
44
67
25.5
32
63.8
63.8
81.8
81.8
63.8
63.8
63.8
125
64.2
64.2
64.2
76.2
76.2
63.8
63.8
63.8
63.8
63.8
63.5
80.8
47
76
108
108
125
76
76
108
76.2
76.2
76
76
95
95
150
204
76
76
108
108
125
76
108
136
60
60
76
108
136
122
76
108
I
(1/4 VCR)
I
(1/4 Swagelok)
I
(3/8 VCR)
31.5
I
(3/8 Swagelok)
106
106
124
124
150.4
106
106
177
106 *2
106 *2
106 *2
124
124
106 *2
106 *2
106 *2
106 *2
106 *2
106 *2
124
87
124
156
156
124
124
156
124
124
118
127
127
110
127
127
127
127
159
159
132
135
160
177
163
179
164
127
127
127
127
150.8
150.8
124
124
156
156
172
124
156
184
106
106
124
156
184
170
124
156
127
127
159
159
172
110
110
127
160
188
173
127
160
Please contact HORIBA STEC for details on the dimensions of the SEC/SEF-6470/6480.
Surface dimensions: 124 mm models can also be produced.
Please contact HORIBA STEC to request a copy of the dimension drawing.
Equivalent products are sometimes used in place of the joints listed here.
160
177
131
163
191
163
179
131
163
191
177
131
163
190
175
131
163
163
80
30
80
A
B
C
D
E
21.9
See <1>
See <2>
See <2>
21.9
See <2>
See <2>
See <3>
22.1
22.1
19.4
19.1
19.1
See <2>
See <2>
21.9
21.9
21.9
19.2
20.4
27.6
19
20.2
20.1
See <3>
19
19
20.2
19.1
19.1
3.5
3.5
3.5
3.5
—
—
19
19
20.2
20.1
31.5
3.5
17.2
30
20
20
3.5
9
17.2
See <4>
3.5
9
20
6.5
15
20
4.8
29
20
20
25
38.1
38.1
10
10
7.5
9.75
9.75
15
15
25
18.5
18.5
20
20
20
25
40
0
38.1
67.7
67.7
6.5
6.5
6.5
4.5
12
9
6.75
3.7
12.7
15
15
15
25
25
14
18.5
24.6
24.6
38.1
38.1
67.7
38.1
38.1
69
69
50
50
45
—
38.1
38.1
67.7
67.7
80
69
101.6
80
20
20
69
80
101.6
6.75
6.75
3.7
9.75
9.75
6.75
6.75
8
8
—
—
6.75
6.75
3.7
12.7
15
3.5
9.3
33.5
10
10
3.5
3.7
9.3
18.5
18.5
24.6
18.5
18.5
18.5
18.5
28
28
20
—
18.5
18.5
24.6
24.6
50
18.5
25.4
—
—
—
18.5
24.6
25.4
69
90
3.5
3.7
18.5
24.6
12.7
12.7
12.7
12.7
15.6
12.7
12.7
20
12.7
12.7
12.7
12.7
12.7
12.7
12.7
12.7
12.7
12.7
12.7
20
12.7
12.7
14.6 inner ; 12 outer
14.6 inner ; 12 outer
20
12.7
12.7
14.6 inner ; 12 outer
12.7
12.7
12.75
12.75
22
22
35
50
22.7
12.7
14.6 inner ; 12 outer
14.6 inner ; 12 outer
20
12.7
14.6 inner ; 12 outer
14.6 inner ; 12 outer
10
10
12.7
14.6 inner ; 12 outer
14.9
20
12.7
14.6 inner ; 12 outer
Mass Flow Controllers 28
Accessory dimensions
s PAC-S6
46
2.5
190
+0.5
0
sPAC-D1/D2
3 or higher
Max. 22
1.6
+0.5
0
*10 or higher
*3 or higher
92
93 +0.5
0
2.5
46
93 +0.5
0
96
*10 or higher
189+0.5
0
187.6
192
Max. 21
170
48n-2
1.8
2.5
48
45
+0.5
0
2
2.5
1.5
2.2
189+0.5
0
48
44.4
1.6
48n-2 +0.5
0
*Where n is the number of
PAC-S6 units installed.
*Where n is the number of
PAC-D1/D2 units installed.
sPAC-4I/6I
120 ±0.3
118±2
80±2
sPAC-1I
167.5±2
(220±2)
56 ±0.2
60
4-M4
10
6.5
4-M3
17
45 ±0.3
32 ±0.2
90 ±0.3
39
sDU-102E
100
* Dimensions in parentheses
( ) are for the PAC-61.
sDU-102K
2-M3 tap
44.7±0.3
+0.5
77
45
86
80 -0
80
94
22.2
25 -0
+0.6
0
+0.5
2-ø3.5
45
86±0.2
50±1
22
9
22
7
27
83±1
23
24
80
25
7
+0.6
0
Panel thickness: 0.8 mm to 3.0 mm
21
48
5 20
35
19
sSU-502ED
sSU-502EA
Digital dial
sSettings unit
Analog dial
Panel installation
opening
3.3 dia.
9.5
3/8-32 UNEF thread
1.58
2 dia.
14
26.4
sFI-1100
109
48
96
9.5 dia.
*
13.5 dia.
22/2 dia.
19
19
49.5
168 dia.
44
32
24
10.5 dia.
19.2
+0.8
70
134.2
+0.5
45 -0
92 -0
120
20.6±0.79
ø6
19.1
Panel installation
opening
10.5 dia.
ø10.3
2.2
25.4
7.9
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