E500, E501 Modular Piezo Controller Rack, Piezo System

E500, E501 Modular Piezo Controller Rack, Piezo System
Piezo • Nano • Positioning
E-500 · E-501 Modular Piezo Controller
Flexible System for Piezo Actuators and Nanopositioners
Configuration example: E-500 Chassis with optional modules:
E-505 piezo amplifier (3 x), E-509.S servo-controller for SGS sensors, E517.i3 24-bit interface / display module
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
쮿 Up to 3 Axes, Custom Systems up to 12 Axes and More
쮿 Choice of Amplifier Modules for Low-Voltage and
High-Voltage, 14 to 400 W Peak Power
쮿 Choice of Position Servo Control Modules for SGS &
Capacitive Sensors, 1 to 3 Channels
쮿 Choice of PC Interface / Display Modules
쮿 19- & 9½-Inch Chassis
The E-500 modular piezo controller system offers a broad
choice of control modules for
nanopositoning systems and
actuators. This includes piezo
amplifier and position servo
controller modules for up to
three channels with different
features as well as display and
interface modules. Flexible
30-channel controller consisting
of 3 E-500.621 chassis, each of
which can accomodate up to
12 E-621 modules
Configuration example: E-501 chassis with optional modules:
E-503 piezo amplifier, E-509.C2A servo-controller for capacitive position sensors,
E-517.i3 24-bit interface / display module
configuration makes the system adaptable to a wide range
of applications.
Ordering Information
E-500.00
19"-Chassis for Modular Piezo
Controller System, 1 to 3 Channels
E-500 systems are assembled
to order, tested, and, if a servocontroller is present, calibrated
with the associated piezo
mechanics.
E-501.00
9½"-Chassis for Modular Piezo
Controller System, 1 to 3 Channels
Remote Control via Computer
Interface
E-500.HCD
HyperBit™ Functionality for
Enhanced System Resolution
(Supports Certain D/A Boards)
Installing the E-517, computer
interface/display module (see
p. 2-156) with 24-bit resolution
makes possible control from a
host PC.
Optionally, digital control via
an external D/A converter is
possible. For several D/A
boards from National Instruments, PI offers a corresponding LabVIEW driver set which
is compatible with the PI
General Command Set (GCS),
the command set used by all
PI controllers. A further option includes the patented
E-500.ACD
LabVIEW Driver Set for Analog
Controllers
Ask about custom designs!
HyperBit™ technology providing enhanced system resolution.
Two chassis are available:
The E-500.00 19'' rackmount
chassis provides operating
voltages for all compatible
modules including amplifiers,
servo-controllers, display and
interface modules (see system
configuration see p. 2-144).
Technical Data
Model
E-500.00
E-501.00
Function
19"-Chassis for Piezo Controller System: Amplifier Modules,
Sensor- / Servo-Control Modules, Interface / Display Modules
9.5"-Chassis for Piezo Controller System: Amplifier Modules,
Sensor- / Servo-Control Modules, Interface / Display Modules
1, 3 (1 amplifier module)
Channels
1, 2, 3 (up to 3 amplifier modules)
Dimensions
450 x 132 x 296 mm + handles
236 x 132 x 296 mm + handles
Operating voltage
90–264 VAC, 50–60 Hz
90–120 / 220–264 VAC, 50–60 Hz
Max. power consumption
180 W
80 W
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Piezo • Nano • Positioning
E-500 · E-501 Modular Piezo Controller
Module Survey & Ordering Information
A more compact 91/2-inch version of the system is available
as the E-501.00. It can hold one
amplifier module (1- or 3-channel units available), one servocontrol module (1- or 3-channel) and one display / interface
module (1- or 3-channel).
A modified E-500 chassis for
more channels is available on
request. For systems with up to
12 channels, the E-500.621
chassis with E-621 amplifier /
controller modules can be used
(see p. 2-160).
The following modules can be
installed in an E-500 / E-501 chassis:
Linear Actuators & Motors
External Piezo Amplifier
Nanopositioning / Piezoelectrics
쮿 Amplifier modules
E-515.E3
E-503.00
Piezo Amplifier Module, -20 to 120 V,
3 Channels
E-504.00F
High-Power-Piezo Amplifier Module,
1 Channel, 280 W Peak Power, 100 W
Average Power, -30 to 135 V
In- / Output Module for Servo Control
with External Piezo Amplifier,
3 Channels
Note: this module can only be used
together with an E-509 servo controller module and is installed in the
amplifier slot
쮿 Interface / Display Modules
E-505.00
Piezo Amplifier Module, 200 W,
-20 to 120 V, 1 Channel
E-508.00
HVPZT-Piezo Amplifier
+3 to +1100 V, 1 Channel
쮿 Module for Servo-Control for
Piezo Flexure Stages /
High-Speed Scanning Systems
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Single-Channel
Multi-Channel
E-517.i1
Modular
Interface / Display Module, 24-Bit D/A,
TCP / IP, USB, RS-232, 1 Channel
Accessories
Piezoelectrics in Positioning
Module,
쮿 Sensor and Servo-Control
Modules
E-509.C1A
Sensor / Piezo Servo-Control Module,
Capacitive Sensor, 1 Channel
E-509.C2A
Sensor / Piezo Servo-Control Module,
Capacitive Sensors, 2 Channels
E-517.i3
Interface / Display Module, 24-Bit D/A,
TCP / IP, USB, RS-232, 3 Channels
Nanometrology
Micropositioning
E-515.01
Display Module for Piezo Voltage and
Displacement, 1 Channel
Index
E-515.03
Display Module for Piezo Voltage and
Displacement, 3 Channels
E-509.C3A
Sensor / Piezo Servo-Control Module,
Capacitive Sensors, 3 Channels
E-509.S1
Sensor / Piezo Servo-Control Module,
SGS Sensor, 1 Channel
E-509.S3
Sensor / Piezo Servo-Control Module,
SGS-Sensors, 3 Channels
E-508, p. 2-150
E-505, p. 2-147
E-503, p. 2-146
E-515, p. 2-154
E-517, p. 2-156
E-509, p. 2-152
E-509.E3 (see p. 3-12)
PISeca™
Sensor / Piezo ServoControl Module for Single-Electrode
Capacitive Sensor Probes, 3 Channels
E-509.E03 (see p. 3-12)
PISeca™ Modular Signal Conditioner
Electronics for Single Electrode
Capacitive Sensors, 3 Channels
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Piezo • Nano • Positioning
E-500 · E-501 Modular Piezo Controller
System Configuration
E-500, 19” Chassis Models
E-501, 9.5” Chassis
E-500 chassis with the following optional
modules: E-503 LVPZT amplifier, three E-509
piezo servo-controllers (E-509.S1: strain
gauge; E-509.C1A: capacitive sensor) and
DAC interface/display.
Contr. Amplifier
Slot 3 Slot 3
Contr. Amplifier
Slot 2 Slot 2
Contr. Amplifier
Slot 1 Slot 1
Installable Amplifier Modules
E-503.00 (-20 to 120 V, 3 ch) / E-503.00S*
E-504.00 (-30 to 135 V, 1 ch) / E-504.00S*
E-505.00 (-20 to 120 V, 1 ch) / E-505.00S*
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
E-508.XX (+3 to 1100 V, 1 ch)
Installable Sensor & Position Servo-Control Modules
E-509.C1A (Capacitive, 1 ch)
E-509.S1 (SGS, 1 ch)
E-509.C2A (Capacitive, 2 ch)
E-509.C3A (Capacitive, 3 ch)
E-509.S3 (SGS, 3 ch)
Installable Display/Interface Modules
E-515 (1 / 3 ch)
E-517 (1 / 3 ch)
Minimal Configuration, Piezo Amplifier Function only
Extended Configuration, Piezo Amplifier with additional Position Servo-Controller
Extended Configuration, Piezo Amplifier with additional Display/Interface, no Servo-Controller
Extended Configuration, Piezo Amplifier with additional Servo-Controller and Display/Interface
Can be installed in E-500
* For differential tip/tilt systems with one fixed voltage of +100 V.
2-144
Can be installed in E-501 or E-500
Display/
Interface Slot
Piezo • Nano • Positioning
E-509 Signal Conditioner / Piezo Servo Module
3-Channel Servo-Controller Module for E-500 Piezo Controller System
Ordering Information
E-509.C1A
Sensor / Piezo Servo-Control
Module, Capacitive Sensor,
1 Channel
E-509.C2A
Sensor / Piezo Servo-Control
Module, Capacitive Sensors,
2 Channels
E-509.C3A
Sensor / Piezo Servo-Control
Module, Capacitive Sensors,
3 Channels
E-509.S1
Sensor / Piezo Servo-Control
Module, SGS Sensor, 1 Channel
E-509 3-channel servo-controller module for
nanopositioning systems with strain gauge sensors
쮿 Position Servo-Control for Piezo Mechanics with SGS or
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
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Capacitive Sensors
1-, 2- and 3-Channel Versions
Improves Linearity
Eliminates Drift and Hysteresis
Notch Filter for Higher Bandwidth
Increases Piezo Stiffness
ILS Circuitry Maximizes Capacitive Sensor Linearity
Plug-In Module for E-500 System
Prepared for Interfaces / Display Modules (optional)
The E-509 module is both a signal conditioner for high-resolution capacitive and SGS displacement sensors and a servocontroller for closed-loop piezo
nanopositioning mechanics. It
compensates for the drift and
hysteresis inherent in PZT
materials and quickly adjusts
the operating voltage on the
PZT as soon as a change in
force or load occurs. Singleand multi-channel versions for
strain gauge and capacitive
sensors are available.
Nanometer-Precise Piezo
Positioning
The proportional-integral (P-I)
algorithm used by the E-509
servo-controller is optimized
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for piezo operation. Both P and
I parameters as well as the control bandwidth can be set internally. The integrated notch filters (adjustable for each axis)
improve the stability and allow
high-bandwidth operation closer to the piezomechanics' resonant frequency. Closed-loop
piezo mechanics from PI can
provide positioning accuracy
and repeatability down to the
nanometer range and below.
Two Types of Sensors
PI employs proprietary position
sensors for fast response and
optimum positioning resolution and stability in the nanometer range and below. For
high-end applications, capaci-
E-509.S3
Sensor / Piezo Servo-Control
Module, SGS-Sensors, 3 Channels
Ask about custom designs!
tance sensors provide direct
and non-contact position feedback (direct metrology). Strain
gauge sensors (SGS) are available for cost-effective applications.
For PISeca™ single-plate highresolution capacitive sensors
(see p. 3-8), the E-509.E3 or
E-509.E03 versions are available (see p. 3-12).
Piezo • Nano • Positioning
Linear Actuators & Motors
Nanopositioning / Piezoelectrics
Piezo Flexure Stages /
High-Speed Scanning Systems
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Single-Channel
Multi-Channel
Modular
Accessories
Piezoelectrics in Positioning
Nanometrology
Technical Data
Model
E-509.C1A/E-509.C2A/E-509.C3A
E-509.S1/E-509.S3
Function
Signal conditioner & servo-controller
for piezo mechanics
Signal conditioner & servo-controller
for piezo mechanics
Channels
1/2/3
1/3
Servo characteristics
P-I (analog), notch filter
P-I (analog), notch filter
Sensor type
Capacitive
SGS
Sensor channels
1 / 2 /3
1/3
Sensor bandwidth
0.3 to 3 kHz (selectable with jumper);
up to 10 kHz on request
0.3; 1; 3 kHz
Noise factor
0.115 ppm/Hz½
Thermal drift
<0.3 mV / C°
<3 mV / C°
Linearity
<0.05 %
<0.2 %
Sensor connection
LEMO EPL.00.250.NTD
LEMO ERA.0S.304.CLL
Sensor monitor output
0–10 V
0–10 V
Sensor monitor socket
LEMO 6-pin FGG.0B.306.CLAD56
BNC (1-ch.) / 3-pin. LEMO (3-ch.)
Supported functionality
ILS (Integrated Linearization System)
ILS (Integrated Linearization System)
Display
Overflow LED
Overflow LED
Micropositioning
Index
Sensor
Interfaces and operation
Miscellaneous
Operating temperature range
+5 to +50 °C
+5 to +50 °C
Dimensions
7HP/3U
7HP/3U
Mass
0.35 kg
0.35 kg
Operating Voltage
E-500 System
E-500 System
Max. power consumption
4 to 8 W
4 to 8 W
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Piezo • Nano • Positioning
E-517 Digital Piezo Controller Operation Module
Wave Generator, Data Recorder, Display, Multiple Interfaces, for E-500 System
Ordering Information
E-517.i1
Interface / Display Module,
24 Bit D/A, TCP/IP, USB, RS-232,
Single Channel
E-517.i3
Interface / Display Module,
24 Bit D/A, TCP/IP, USB, RS-232,
3 Channels
Ask about custom designs!
The E-517 piezo display and D/A
converter module, provides USB and
TCP/IP connectivity
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
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Low-Noise 24-bit D/A Converter
Sample Rate 25 kHz
TCP/IP, USB, IEEE 488 and RS-232 Interfaces
6-Digit Display for Voltage and Position
1- & 3-Channel Versions
Wave Generator with Programmable Trigger-I/O
Module for E-500 Piezo Controller Rack
The E-517 is a microprocessor
controlled interface and display
module for the E-500 piezo controller system (see p. 2-142). It
is equipped with low-noise, 24bit D/A converters and can be
2-156
controlled through four digital
interfaces: TCP/IP, USB, RS-232
and IEEE 488 (GPIB).
Alternatively, stand-alone operation is possible by uploading
macro command sequences to
the internal non-volatile memory. For manual control a trackball interface is provided. An
LCD display indicates position
or operating voltages of the
individual channels / axes.
Wave Generator
The integrated wave generator
can output periodic motion
profiles. In addition to sine and
triangle waves, arbitrary, userdefined motion profiles can be
created and stored.
Extensive Software Support
The controllers are delivered
with Windows operating software. Comprehensive DLLs
and LabVIEW drivers are
available for automated control.
Piezo • Nano • Positioning
Linear Actuators & Motors
Technical Data
Model
E-517.i1
E-517.i3
Function
Digital operation module
Digital operation module
Nanopositioning / Piezoelectrics
Channels
1
3
Processor
DSP 60 MHz
DSP 60 MHz
Piezo Flexure Stages /
High-Speed Scanning Systems
Sampling rate, sensor
25 kHz, 8-times oversampling
25 kHz, 8-times oversampling
Linear
Thermal drift
Stability: 0.2 mV
Stability: 0.2 mV
Vertical & Tip/Tilt
Linearity @ nominal range
0.01 %
0.01 %
Resolution
DAC: 24 bit, ±12 V
ADC: 18 bit, sampling
DAC: 24 bit, ±12 V
ADC: 18 bit, sampling
Interfaces/communication
Ethernet (TCP/IP), USB, RS-232, IEEE 488
Ethernet (TCP/IP), USB, RS-232, IEEE 488
I/O ports
1 trigger input
1 trigger output
5V
MDR14 connector
3 trigger inputs
3 trigger outputs
5V
MDR14 connector
Command set
PI General Command Set (GCS)
PI General Command Set (GCS)
Modular
User software
PIMikroMove™
PIMikroMove™
Accessories
Software drivers
Lab VIEW drivers,
Windows and Linux Libraries (DLL)
Lab VIEW drivers,
Windows and Linux Libraries (DLL)
Supported functionality
Wave generator, data recorder,
macro programming
Wave generator, data recorder,
macro programming
Display
LCD display for monitor signals
(position and voltage),
states and trackball menus
LCD display for monitor signals
(position and voltage),
states and trackball menus
Manual control
Operation via trackball
Operation via trackball
Operating temperature range
+5 to +50° C
+5 to +50° C
Dimensions
21HP / 3U
21HP / 3U
Mass
0.37 kg
0.37 kg
Operating voltage
E-500 system
E-500 system
Interfaces and operation
Miscellaneous
2- and 3-Axis
6-Axis
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Single-Channel
Multi-Channel
Piezoelectrics in Positioning
Nanometrology
Micropositioning
Index
2-157
Piezo • Nano • Positioning
E-503 Piezo Amplifier Module
3 Channels, for E-500 Piezo Controller System
Modular Design for Flexibility:
Optional Servo Controller
Upgrade
E-503.00 Piezo
amplifier module
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. R1 11/05/02.0
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Module for E-500 Piezo Controller Rack
3 x 140 mA Peak Current
Output Voltage Range -30 to 130 V
Prepared for Position Servo-Control Upgrade (optional)
Prepared for Interfaces / Display Modules (optional)
The E-503 is a piezo driver
module for low-voltage piezo
actuators and positioners. It
contains three independent amplifiers that can output and sink
a peak current of 140 mA in the
-30 to 130 V voltage range. For
frequency response with selected capacitive loads, see
graph below. The piezo ampli-
fier module is designed to work
in the E-500 Controller system
(see p. 2-142).
The units are designed to provide high-resolution operation
of piezo actuators and positioning systems in voltage-controlled mode (open-loop) and
optionally in position-controlled
mode (closed-loop).
The E-503 amplifier module can
be installed in the E-500 / E-501
controller chassis. The modular
design makes the E-500 piezo
controller system very flexible.
An optional E-509 piezo servocontroller module can be installed along with the E-503
amplifier module, for closedloop piezo position control. In
this configuration, the E-503
output voltage is set by the
servo-control loop.
Voltage Controlled Piezo Positioning
In open-loop (voltage-controlled) piezo operation the amplifier
output
voltage
is
determined by an analog signal
at the Control Input optionally
combined with the DC-offset
potentiometer. Open-loop operation is ideal for applications
where fast response and very
Ordering Information
E-503.00
Piezo Amplifier Module,
-30 to 130 V, 3 Channels
E-503.00S
Piezo Amplifier Module,
-30 to 130 V, 2 Channels,
Modified E-503.00 for S-330, S-334,
S-340 Tip/Tilt Systems, with
One Fixed Voltage of +100 V,
Two Variable Voltages
Ask about custom designs
high resolution with maximum
bandwidth are essential. Here,
commanding and reading the
target position in absolute values is either not important or
carried out by external position
sensors. The precision 10-turn
potentiometer can also be used
alone to set the output voltage
manually.
Technical Data
Model
E-503.00
E-503.00S
Function
Power amplifier
Power amplifier
Channels
3
2
Amplifier
Control input voltage range
-2 to +12 V
-2 to +12 V
Output voltage
-30 bis 130 V
-30 bis 130 V; one
additional fixed
voltage of +100 V
Peak current per channel,
140 mA
140 mA
Average current per channel,
>5 ms
40 mA
40 mA
Current limitation
Short-circuit-proof
Short-circuit-proof
Voltage gain
10 ±0.1
10 ±0.1
Input impedance
100 kΩ / 1 nF
100 kΩ / 1 nF
<5 ms
Interfaces and operation
Piezo connector
LEMO ERA.00.250.CTL
LEMO ERA.00.250.CTL
Analog input
BNC
BNC
DC Offset
10-turn pot.,
adds 0 to 10 V
to Control In
10-turn pot.,
adds 0 to 10 V
to Control In
Miscellaneous
E-503: operating limits with various PZT loads (open-loop), capacitance
is measured in μF
Operating temperature range
5 to 50 °C
5 to 50 °C
Overheat protection
Deactivation at 85 °C
Deactivation at 85 °C
Dimensions
14HP/3U
14HP/3U
Mass
0.9 kg
0.9 kg
Operating Voltage
E-500 System
E-500 System
Max. power consumption
40 W
40 W
Piezo • Nano • Positioning
E-505 Piezo Amplifier Module
High Power, E-500 Piezo Controller System
tors and positioning systems
in voltage-controlled mode
(open-loop) and optionally in position-controlled mode (closedloop).
For switching applications the
E-505.10 version provides a peak
output current of up to 10 A.
E-505.00 is a highperformance amplifier
module for the piezo
servo-controller system E-500
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. R1 11/04/15.0
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For frequency response with
selected capacitive loads, see
graph below.
Ordering Information
E-505.00
Piezo Amplifier Module, 2 A,
-30 to 130 V, 1 Channel
E-505.10
Piezo Amplifier Module for
Switching Applications, 10 A,
-30 to 130 V, 1 Channel
E-505.00S
Offset Voltage Supply for Tip/Tilt
Systems, One Fixed Voltage of
+100 V
Up to 10 A Peak Current
Output Voltage Range -30 to 130 V
Module for E-500 Piezo Controller Rack
Prepared for Position Servo-Control Upgrade (optional)
Prepared for Interfaces / Display Modules (optional)
sitioners, that can output and
sink a peak current of up to
2000 mA in the -30 to 130 V voltage range. The E-505 units are
designed to provide high-resolution operation of piezo actua-
The E-505 piezo amplifier module is designed to work in the
E-500 Controller system (see p.
2-142). It features a low-noise,
high-power amplifier for lowvoltage piezo actuators and po-
E-505: operating limits
with various PZT loads
(open-loop), capacitance is measured in μF
Technical Data
Model
E-505.00
E-505.10
E-505.00S
Function
Power amplifier
Power Amplifier for
Switching Applications*
Offset Voltage Supply
for Tip/Tilt Systems
Channels
1
1
1
Control input voltage range
-2 to +12 V
-2 to +12 V
–
Output voltage
-30 to +130 V
-30 to +130 V
100 V
Peak current
2 A (<3 ms)
10 A (<200 μs)
2 A (<5 ms)
Average current
215 mA
215 mA
300 mA
Current limitation
Short-circuit-proof
Short-circuit-proof
Short-circuit-proof
Noise, 0 to 100 kHz
0.6 mVrms
1.0 mVrms
<0.7 mVrms
Voltage gain
10 ±0.1
10 ±0.1
–
Input impedance
1 MΩ / 1 nF
1 MΩ / 1 nF
–
Amplifier
Interfaces and operation
Piezo connector
LEMO ERA.00.250.CTL
LEMO ERA.00.250.CTL
LEMO ERA.00.250.CTL
Analog input
BNC
BNC
–
DC-Offset
10-turn pot., adds 0 to
10 V to Control In
10-turn pot., adds 0 to
10 V to Control In
–
Operating temperature range
+5 to +50 °C
+5 to +50 °C
+5 to +50 °C
Overheat protection
Deactivation at +85 °C
Deactivation at +85 °C
Deactivation at +85 °C
Dimensions
14HP/3U
14HP/3U
14HP/3U
Mass
0.9 kg
0.9 kg
0.9 kg
Operating Voltage
E-500 System
E-500 System
E-500 System
Max. power consumption
55 W
55 W
55 W
Miscellaneous
* For piezo actuators with special high-current layout
Modular Design for Flexibility:
Optional Servo Controller
Upgrade
Up to three E-505 amplifier modules can be installed in one
E-500 chassis. The flexible, modular design of the E-500 piezo
servo-controller system allows
easy installation of an optional
E.509 sensor- / servo-controller
module for closed-loop operation. The output voltage is then
set by the servo-control loop.
Closed-loop piezo mechanics
from PI can provide positioning
accuracy and repeatability down
to the nanometer range and
below.
Piezo • Nano • Positioning
E-506 Linearized Piezo Amplifier
Charge Control for High Dynamics
Ordering Information
E-506.10
High Linearity Piezo Amplifier
Module, 30 W Average Output
Power, -30 to 130 V, 1 Channel
Ask about custom designs!
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. R1 10/10/04.0
E-506.10 charge-controlled Piezo driver module
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Highly Linear Amplifier Module
280 W Peak Power
Output Voltage Range -30 to 130 V
Module for E-500 Piezo Controller Rack
Prepared for Position Servo-Control Upgrade (optional)
Prepared for Interfaces / Display Modules (optional)
The E-506.10 piezo amplifier
module uses a charge control
principle. Here, the input signal
controls the amount of electrical charge which is transferred
to the piezo actuator. The result
is a highly precise, linear dis-
placement of the piezo actuator
in high-dynamics operation.
The typical hysteresis which
piezo actuators show when
operated with a voltage-controlled piezo amplifier can such
be reduced to 2 % only. An
additional position feedback is
not required.
The E-506.10 piezo amplifier
module is designed to work in
the E-500 Controller system
(s. p. 2-142). It features a lownoise high-power amplifier for
low-voltage piezo actuators
and positioners, that can output and sink a peak current of
up to 2A in the -30 to 130 V
voltage range.
Piezo Over Temperature
Protection
The E-506 can evaluate a temperature sensor on the piezo
actuator in order to protect the
actuators, especially when
used in dynamic applications.
Automatic switch-off then reliably prevents the pre-set temperature threshold from being
exceeded.
For frequency response with
selected capacitive loads, see
graph below.
E-506.10: operating limits with
various PZT loads (open-loop),
capacitance is measured in μF.
The minimum capacitive load is 0.3 μF
Piezo • Nano • Positioning
Linear Actuators & Motors
Technical Data
Model
E-506.10
Function
Linearised amplifier module, charge-controlled
Channels
1
Nanopositioning / Piezoelectrics
Piezo Flexure Stages /
High-Speed Scanning Systems
Amplifier
Input voltage
-2 to +12 V
Output voltage*
-30 to 130 V
Peak output power, < 2.5 ms
280 W
max.
Average output power
30 W
max.
Peak current, < 2.5 ms
2A
Average current
215 mA
Current limitation
Short-circuit-proof
Ripple, noise
<0.6 mVrms
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Reference capacitance (adjustable)
1 to 280 μF
Single-Channel
Input impedance
1 MΩ / 1 nF
Multi-Channel
Interfaces and operation
Modular
Piezo connector (voltage output)
LEMO 2-pin EGG.0B.302.CLL
Analog input
BNC
DC Offset
10-turn pot., adds 0 to 10 V to Control In
Piezo temperature sensor (input)
PT 1000; LEMO socket; deactivation of the
piezo voltage output at 150°C
Accessories
Piezoelectrics in Positioning
Nanometrology
Miscellaneous
Operating temperature range
+5 to +50 °C
Dimensions
14HP / 3U
Mass
0.9 kg
Operating voltage
E-500 System
Power consumption
55 W
* Max. 85 °C, deactivation of the piezo voltage output (internal overtemp protection)
Minimum frequencies* for charge-controlled operation
Capacitance (piezo actuator)
ftrans
0.33 μF
250 mHz
1.06 μF
80 mHz
6.2 μF
9 mHz
14 μF
4 mHz
* Voltage-controlled operation for lower frequencies
Micropositioning
Index
max.
Piezo • Nano • Positioning
E-508 PICA™ Piezo Amplifier Module
High-Power Module with 1100 V Output Voltage, E-500 Piezo Controller System
cision 10-turn potentiometer
can also be used alone to set
the output voltage manually.
OEM Version for Fast
Switching Applications
The E-508.OE is the high-current OEM version, especially
designed for switching applications. It can output a peak current of 400 mA for 5 ms. The
E-508.OE is directly controlled
by an analog signal.
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18
E-508.00 Piezo
amplifier plug-in module
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Ordering Information
E-508.00
HVPZT Piezo Amplifier Module,
+3 to +1100 V, 1 Channel
E-508.OE
HVPZT Piezo Amplifier Module,
OEM Version, 400 mA Peak Current
Ask about custom designs!
For extensions, adapter cables
and connectors, see “Accessories” in the piezo electronics
chapter (see p. 2-168 ff ).
Peak Power up to 400 W
Output Voltage Range 3 to ±1100 V or bipolar
Plug-In Module for E-500 System
E-508.OE for Switching Applications
Prepared for Position Servo-Control Upgrade (optional)
Prepared for Interfaces / Display Modules (optional)
The E-508 plug-in module is a
piezo driver / amplifier for the
E-500 / E-501 piezo controller
systems suitable for PICA™
piezo actuators (HVPZT). Its
low-noise, 4-quadrant amplifiers can output and sink peak
currents of 50 mA (E-508.OE:
up to 400 mA) over an 1100 V
range. The units are designed
to provide high-resolution operation of piezo actuators and
positioning systems in voltagecontrolled mode (open-loop)
and optionally in position-controlled mode (closed-loop).
Modular Design for Flexibility:
Optional Servo Controller
Upgrade
Up to three E-500 piezo amplifier modules can be installed in
one E-500 chassis. The flexible,
modular design of the E-500
piezo controller system allows
easy installation of an optional
E.509 sensor- / servo-controller
2-150
module for closed-loop operation. The output voltage is then
set by the servo-control loop.
Closed-loop piezo mechanics
from PI can provide positioning
accuracy and repeatability
down to the nanometer range
and below.
Voltage Controlled Piezo
Positioning
In open-loop (voltage-controlled) piezo operation the amplifier output voltage is determined by an analog signal at
the Control Input optionally
combined with the DC-offset
potentiometer. Open-loop operation is ideal for applications
where fast response and very
high resolution with maximum
bandwidth are essential. Here,
commanding and reading the
target position in absolute values is either not important or
carried out by external position
sensors (see p. 2-104). The pre-
The E-508.00 plug-in module (right) and the E-508.OE,
OEM module optimized for switching applications
Piezo • Nano • Positioning
Linear Actuators & Motors
Nanopositioning / Piezoelectrics
Piezo Flexure Stages /
High-Speed Scanning Systems
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Single-Channel
Multi-Channel
Modular
Accessories
Piezoelectrics in Positioning
E-508: operating limits with various PZT loads (open-loop), capacitance is measured in nF
Nanometrology
Technical Data
Micropositioning
Model
E-508.00
E-508.OE
Function
Power amplifier for PICATM
high-voltage piezos
Power amplifier for PICATM
high-voltage piezos
Unit
Index
Amplifier
Output voltage
3 to +1100 (Standard)
3 to +1100 (Standard)
(-260 to +780
(-260 to +780
-550 to +550
-550 to +550
+260 to -780
+260 to -780
-3 to -1100) (jumper selectable)
-3 to-1100) (factory-settable)
Amplifier channels
1
1
V
Average output power
13
13
W
Peak output power, <5 ms
50
400
W
Average current
12
12
mA
Peak current, <5 ms
50
400
mA
Amplifier bandwidth, small signal
6
10
kHz
Amplifier bandwidth, large signal
50 (200 nF)
50 (200 nF)
Hz
Ripple, noise 0 to 100 kHz
5
20
mVRMS
50 (100 nF)
200 (100 nF)
mVP-P
Current limitation
Short-circuit-proof
Short-circuit-proof
Voltage gain
+100 ±1, -100 ±1 (selectable)
+100 ±1, -100 ±1 (selectable)
Control input voltage
Servo off: ±1/100 of selected output range Servo off: ±1/100 of selected output range
Servo on: 0 to 10 V
Servo on: 0 to 10 V
Input impedance
100
100
kΩ
Interfaces and operation
Piezo voltage output
LEMO EGG.0B.701.CJL.1173
LEMO EGG.0B.701.CJL.1173
Input
BNC
SMB
DC-Offset
10-turn pot., adds 0 to 10 V to Control In
–
Operating voltage
E-500 System
E-500 System
Operating temperature range
+5 to +50 °C (10 % derated over 40 °C)
+5 to +50 °C (10 % derated over 40 °C)
°C
Mass
0.75
0.75
kg
Dimensions
14 HP/3 U
14 HP/3 U
Miscellaneous
2-151
Piezo • Nano • Positioning
E-504 Piezo Amplifier Module
High Power through Energy Recovery, E-500 Piezo Controller System
tem allows easy installation of
an optional E-509 sensor- /
servo-controller module for
closed-loop operation. The output voltage of the E-504 is then
set by the servo-control loop.
Closed-loop piezo mechanics
from PI can provide positioning
accuracy and repeatability
down to the nanometer range
and below.
Open-Loop Operation
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. R2 10/10/07.0
E-504.00F High-power amplifier module
with energy recovery
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Peak Power 280 W
High Average Output Power 100 W
Very Energy Efficient Through Energy Recovery
Output Voltage Range -30 to 130 V
Module for E-500 Piezo Controller Rack
Prepared for Position Servo-Control Upgrade (optional)
Prepared for Interface / Display Modules (optional)
The E-504 power amplifier
extends the E-500 modular
piezo controller system with a
high-output amplifier for lowvoltage actuators and positioners.
The innovative, efficient energy
recovery circuitry reduces
power consumption and heat
dissipation, especially in dynamic applications. This makes
possible peak output currents
up to 2000 mA and a peak
power of 280 W, with an average output power of up to 100
W.
Working Principle
Charge is transferred to the
piezo actuator using low-loss
PWM techniques. When the
actuator is discharged, the
energy not consumed is fed
through the energy recovery
circuitry for reuse in the next
charging cycle.
The working principle of the
E-504 series is perfectly qualified for high-dynamics scanning and switching applications.
For applications where static
position stability in the subnanometer range is essential,
the E-505 (see p. 2-147) amplifier module is recommended.
Modular Design for Flexibility:
Optional Servo-Controller Upgrade
Up to three E-504 amplifier
modules can be installed in
one E-500 controller chassis.
The flexible, modular design of
the E-500 piezo controller sys-
In open-loop (voltage-controlled) piezo operation the amplifier output voltage is
determined by an analog signal
at the Control Input, optionally
combined with the DC-offset
potentiometer. Open-loop operation is ideal for applications
where fast response and very
high resolution with maximum
bandwidth are essential. Here,
commanding and reading the
target position in absolute values is either not important or
carried out by external position
sensors. The precision 10-turn
potentiometer can also be used
alone to set the output voltage
manually.
The same functionality and
specifications are available in
the E-617 amplifier module.
(see p. 2-112).
Ordering Information
E-504.00F
High-Power-Piezo Amplifier Module,
1 Channel, 280 W Peak Power,
100 W Average Power, -30 to 130 V
Piezo • Nano • Positioning
Linear Actuators & Motors
Nanopositioning / Piezoelectrics
Piezo Flexure Stages /
High-Speed Scanning Systems
Linear
Vertical & Tip/Tilt
2- and 3-Axis
6-Axis
Fast Steering Mirrors /
Active Optics
Piezo Drivers /
Servo Controllers
Single-Channel
Multi-Channel
Modular
Accessories
Piezoelectrics in Positioning
Nanometrology
Micropositioning
E-504: operating limits with various PZT loads (open-loop), capacitance is measured in μF
Index
Technical Data
Model
E-504.00F
Function
Power amplifier with energy recovery, 1 channel
Amplifier
Control input voltage range
-2 to +12 V
Output voltage
-30 V to 130 V
Peak output power <5 ms
280 W
Average output power
Equivalent to 100 W reactive power
Peak output current <5 ms
2000 mA
Average current
1000 mA
Current limitation
Short-circuit-proof
Voltage gain
10 ±0.1
Ripple, noise, 0 to 100 kHz
5 mVRMS
20 mVP-P
Output impedance
0,5 Ω / 2,5 μF
Interfaces and operation
Piezo connector
LEMO ERA.00.250.CTL
Analog input
SMB
DC-Offset
10-turn pot., adds 0 to +10 V to Control In
Miscellaneous
Operating temperature range
+5 to +50°C
Dimensions
One 14T slot wide, 3H high
Mass
0.9 kg
Operating voltage
E-500 System
Max. power consumption
<30 W
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