Standard Operating Procedure: Vega Keithley - CEN

Standard Operating Procedure: Vega Keithley - CEN
Standard Operating Procedure: Vega
Keithley 4200 Semiconductor Characterization System
Device Characterization Lab (3rd Floor), Nano Electronics Building, EE Dept, IIT Bombay
This system is used for room temperature IV/CV measurements. It is a product by Keithley
Instruments Model 4200 semiconductor characterization system (SCS).
Following Measurement can be done:
1. Room temperature 2, 3, 4 terminal IV.
2. Room temperature 2 terminal CV.
Following Measurement can be done:
1. Frequency/ Noise measurement.
2. Low temperature measurement.
Instruments Presents:
1. Keithley S4200 SMUs - 3
2. Keithley C4200 CV card – 1
3. Keithley 708 A switch matrix – 1
Specification:
1. Through SMU :
Max Voltage: 210 Volts
Max Current: 105 mA
2. Through LCR meter :
Min Frequency: 1KHz
Max Frequency: 10MHz
Instrument Connections:
1. Three SMUs are connected to switch matrix column 1 (SMU 1), 2 (SMU 2) and 3 (SMU 3)
respectively.
2. GNDU is connected to switch matrix column 4.
3. Manipulator A, B, C and D connected to switch matrix rows A, B, C & D respectively.
4. Chuck connected to row E.
5. CV High connected to column 10.
6. CV Low connected to column 11.
Device Characterization Lab (3rd Floor), Nano Electronics Building, EE Dept, IIT Bombay
Part A: Hardware Setup Usage Instruction
Step1:
Switch on the vacuum pump. Pull the lever up at the right side of chuck. The vacuum reaches
the center of the chuck through a hole. This creates a suction force to the DUT (Device under
test). The vacuum hold firmly holds the device on the chuck.
Step 2:
Switch on the light source. The intensity of light is controllable using knob.
Step 3:
The chuck is movable in X-Y plane by rotating the knob. Take the chuck out by rotating the
knob. Move chuck down by using lever. Place the DUT exactly at the center of the chuck. Then
move chuck up by using a lever.
(Caution: Before making the chuck up, make sure that probe needle is sufficiently up so that
chuck does not hit the probe tip.)
Step 4:
There are 4 manipulators named as A, B, C, D. The chuck is named as E. Focus the lens of
microscope properly till contacts of sample are clearly visible. Probe the DUT with probe
needle. Switch off the light source after probing is done
There are three knobs associated with each manipulator. These are used for moving the probe
needle in X, Y and Z direction. Once the probe tip makes contact with DUT, it will slide over DUT
indicating contact is done. Now Z- direction knob should not be rotated further otherwise it will
damage the DUT or the probe needle can break.
Part B: Software Setup Usage Instruction
1. Login using your charlab domain username and password.
2. If you are first time user, then “Initialize New User”.
(Start -> All Programs ->Keithley Instruments -> Initialize New User) and click OK.
3. Open KITE (Keithley Interactive Test Environment).
KITE Specific Instruction
Add the following
1. New Project
2. New Subsite plan
3. New Device plan
Device Characterization Lab (3rd Floor), Nano Electronics Building, EE Dept, IIT Bombay
4. New ITM

For Adding New Project
File -> New Project -> Project Name

For Adding New Subsite Plan
Click Subsite plan -> Give name and press OK.

For Adding New Device Plan
Click Device Plan -> A window by name “Add new device to project” will appear -> Select
the device plan -> Give the name and press OK.

For Adding New ITM
Click New ITM -> Give the name and press OK.
Part C: Switch Matrix Connection.
Switch matrix establishes connection between hardware and software setup. It consist
grid interconnection. Columns of switch matrix are connected to SMU/CMU. Rows of switch
matrix are connected to manipulators.
SMU 1, 2 and 3 represent column 1, 2 and 3 respectively
There are 2 CMU: CVH and CVL. These represents column 10 and 11.
Ground(GNDU): Column 4
Example: If you are doing a 2 terminal I-V measurement by using SMU 1 and SMU 2 and sample
is probed using manipulator A , C. If you want to make connection of SMU 1 with A and SMU 2
with C then it can be done by pressing the dot corressponding to A1 (Row A, Column 1) and C2
(Row C, Column 2) with the help of light pen. Then press copy button.
Post Measurement Steps:
1.
2.
3.
4.
5.
Switch off vaccum pump.
Move probe needle up by rotating the knob.
Move chuck down by using lever.
Safely remove the sample.
Close the KITE application.
Device Characterization Lab (3rd Floor), Nano Electronics Building, EE Dept, IIT Bombay
Device Characterization Lab (3rd Floor), Nano Electronics Building, EE Dept, IIT Bombay
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