SourceMeter® SMU Instruments
SourceMeter® SMU Instruments
Selector Guide
Series 2600B
Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . 2
Source Measure Unit (SMU) Instruments . . . . . . . . . . 8
System SourceMeter
Multi-Channel I-V Test Solutions . . . . . . . . . . . . . . . . 10
2601B
2602B
2604B
2611B
2612B
2614B
2634B
2635B
2636B
Single-Channel System SourceMeter SMU Instrument
(3A DC, 10A Pulse)
Dual-Channel System SourceMeter SMU Instrument
(3A DC, 10A Pulse)
Dual-Channel System SourceMeter SMU Instrument
(3A DC, 10A Pulse, Benchtop Version)
Single-Channel System SourceMeter SMU Instrument
(200V, 10A Pulse)
Dual-Channel System SourceMeter SMU Instrument
(200V, 10A Pulse)
Dual-Channel System SourceMeter SMU Instrument
(200V, 10A Pulse, Benchtop Version)
Dual-Channel System SourceMeter SMU Instrument
(1fA, 10A Pulse, Benchtop Version)
Single-Channel System SourceMeter SMU Instrument
(0.1fA, 10A Pulse)
Dual-Channel System SourceMeter SMU Instrument
(0.1fA, 10A Pulse)
25
32
36
43
2400
2401
2410
2420
2425
2430
2440
General-Purpose SourceMeter SMU Instrument
21V SourceMeter SMU Instrument
High Voltage SourceMeter SMU Instrument
High Current SourceMeter SMU Instrument
100W SourceMeter SMU Instrument
1kW Pulse Mode SourceMeter SMU Instrument
5A SourceMeter SMU Instrument
6430
4200-SCS
Sub-Femtoamp Remote SourceMeter
SMU Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Parameter Analyzer . . . . . . . . . . . . . . . . . . . . . . . . . . 55
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
® (SMU ) INSTRUMENTS
SourceMeter
SMU INSTRUMENTS
2651A High Power System SourceMeter SMU
Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2657A High Power System SourceMeter SMU
Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
2450 SourceMeter SMU Instrument . . . . . . . . . . . . . . . . . .
Series 2400 SourceMeter SMU Instruments . . . . . . . . . . . . . . . . .
A Tektronix Company
1
SourceMeter® SMU Instruments
All of Keithley’s source measure unit (SMU)
instruments can source voltage while measuring
current and source current while measuring
voltage. Some also measure resistance. All are
fully programmable instruments that can stand
alone as complete source, measurement, and
automation solutions. They are also easy to integrate into larger systems.
Keithley’s SMU instruments are faster, easier to
use, and more economical than using individual
power supplies and measurement instruments
that are harnessed together. Additionally, they
provide more accurate and repeatable results.
Keithley’s SMU instruments are ideal for production and automation, yet precise and sensitive
enough for laboratory applications.
Keithley’s SMU instruments include our Series
2400 SourceMeter® SMU instruments, Series
2600B System SourceMeter SMU instruments, and Model 4200-SCS Semiconductor
Characterization System.
How does an SMU instrument work?
SMU instruments can be used as stand-alone
constant voltage or constant current sources and
as stand-alone voltmeters or ammeters. However,
their real strength is their ability to simultaneously source and measure—applying voltage to a
device under test (load) and measuring the current flowing through it, or supplying current to a
load and measuring the voltage drop across it.
The SMU instrument topology (Figure 1) protects the device under test (DUT) from damage
due to accidental overloads, thermal runaway,
and other problems. Both the current and voltage source are programmable with readback to
maximize device measurement integrity. If the
readback reaches a programmed compliance
limit, then the source is clamped at the limit,
providing fault protection.
Voltmeter Configuration
HI
Ileakage
I = 0A
Technical Tip: Use the lowest current range setting to
­minimize Ileakage.
V meter
LO
Source I = 0A, Measure V
Ammeter Configuration
+
I meter
V
V = 0V
HI
Technical Tip: Use the lowest voltage source range to
­minimize voltage burden.
Vburden
–
LO
Source V = 0V, Measure I
Ohmmeter Configuration
HI
I meter
I = test
current
Sense HI
V meter
Sense LO
LO
Source I = test current, Measure V and I, Remote Sense ON
Technical Tip: The Auto
Ohms feature in Series 2400
SourceMeter SMU instruments
automatically selects the
best test current and voltage
range for optimal resistance
measurements. Use 4-wire
remote sensing (Kelvin
sensing) for the best accuracy.
Power Supply Configuration
HI
Sense HI
I meter/
limit
Load
V
Sense LO
Technical Tip: Use 4-wire
remote sensing to deliver an
accurate voltage to the load at
high output current levels.
LO
Source V, Measure I, Remote Sense ON
SMU INSTRUMENTS
Power Load Configuration
HI
I meter
V
I
Sense HI
V meter
I = desired
load
current
V meter/
limit
Power
Source
Sense LO
LO
Sink I = Desired load current, Measure V, Remote Sense ON
Figure 1. Basic SMU instrument topology
Figure 2. SMU instrument configurations
1.888.KEITHLEY (U.S. only)
www.keithley.com
2
Technical Tip: Make sure the
voltage limit is set above the
maximum voltage output of
the power source. Use 4-wire
remote sensing to assure an
accurate voltage measurement
with a large sink current.
A Greater Measure of Confidence
A Tektronix Company
Technical information: Source Measure Unit (SMU) Instruments
Technical information: Source Measure Unit (SMU) Instruments
Technical
Information
Technical
Information
SourceMeter® SMU Instruments
Speed
0
Source/
Measure
Precision
1
2
3
4
ms
5
6
7
0
10µA measurement
uncertainty = 5nA
1
2
1µV
40V
1µV
3A
1pA
1mV
Current
Current
Source + Sink
6
7
40V
1mA
+I
II
I
–V
II
+V
IV
I
–V
+V
III
–I
SMU instruments offer a much broader
range of voltage and current resolution than
conventional power supplies. This allows
you to use SMU instruments in many more
types of applications.
3A
Source Only
+I
III
5
Voltage
1pA
4 Quadrant
Operation
4
ms
10µA measurement
uncertainty = 2500nA
Voltage
Voltage and
Current
Resolution
3
SMU instruments are optimized for speed
and precision. In most models, both the
source voltages and source currents settle
to within 0.01% of the specified accuracy
in as little as 50µs. This is 50 times faster
than what a conventional power supply
can provide.
IV
–I
A conventional power supply sources
(supplies) voltage and/or current. An
SMU instrument also sources power, but
it can additionally sink (dissipate) power.
It provides four-quadrant operation. In
quadrants I and III it sources power to a
load and in quadrants II and IV it sinks
power from a load. (Voltage, current, and
resistance can be measured during source
or sink operations.) A conventional power
supply only functions in quadrant IV.
Technical information: Source Measure Unit (SMU) Instruments
Typical Power Supply
Figure 3. Precision power supplies vs. SMU instruments
Advantages
Many advantages are achieved by combining
source and measurement circuitry into a single unit:
• Supports faster test times with improved
accuracy and repeatability
• Allows you to source voltage or current while
making time-stamped voltage, current, and
resistance measurements without changing
connections
• Eliminates many of the complex
synchronization, connection, and
programming issues associated with using
multiple instruments
• Minimizes the time required for test station
development, setup, and maintenance
• Lowers the overall cost of system ownership
What are the most popular SMU
instrument configurations?
The fully isolated, floating configuration of
Keithley’s SMU instruments provide maximum
flexibility in configuring test setups. SMU
instruments can be configured as many different
instruments (Figure 2). This makes them invaluable tools in flexible product test racks and in
R&D test bench tools.
How does an SMU instrument
compare to a precision power supply?
The power supply capabilities of Keithley’s
SMU instruments surpass those provided by
conventional power supplies. This is illustrated
in Figure 3. In addition to the highly stable
DC power source, low noise, and readback,
Keithley’s SMU instruments include other
features not usually available on conventional
power supplies. For example, most SMU instru-
ments offer a Pulse mode, include programmable delays, and provide a test sequencer that
allows you to set up and execute tests without
PC intervention. Figure 4 illustrates a typical
precision power supply test that uses an SMU
instrument.
I-V characterization
Keithley’s SMU instruments are core instruments
for I-V characterization tests. Their ability to
source voltage while simultaneously measuring
current or source current while simultaneously
measuring voltage can be combined with both
DC and sweep operations to perform measurements such as forward voltage (V F), reverse leakage, and reverse breakdown voltage (V B) without
changing a single connection to the device under
test (Figure 5).
Built-in features allow multiple SMU instruments
to be synchronized for parametric measure-
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Technical information: Source Measure Unit (SMU) Instruments
2602B SourceMeter SMU Instrument
A Tektronix Company
3
Technical
Information
SourceMeter® SMU Instruments
SMU Instrument
I (Amps)
Technical information: Source Measure Unit (SMU) Instruments
SMU
V
VD
Vbias
V
Test
Idd ON (5V)
IC
GND
Description
Power supply current,
V D = 5V, device active
Idd OFF (5V) Power supply current,
V D = 5V, device in standby
Idd ON (3.3V) Power supply current,
V D = 3.3V, device active
Idd ON (3.3V) Power supply current,
V D = 3.3V, device in standby
Input leakage current
IIL
Reading
14.294 mA
50.361 nA
–I
Figure 5. Typical diode characterization
c
42.198 nA
b
1.2358 µA
Figure 4. Typical precision power supply tests
ments like threshold voltage, beta, and transconductance. Output interlocks provide controlled
access to a test fixture, which is particularly
important for the extended voltage range of the
Model 2657A (up to 3000V). Guarded 4-wire
connections provide high quality measurements
over a wide range (0.1fA to 10A).
Built-In Sweeps
Keithley’s SMU instruments simplify capturing
the data needed to characterize a wide range
of devices with the SMU instruments’ builtin pulsed and DC sweeps, including linear
staircase, logarithmic staircase, and custom
sweeps (Figure 7). Sweeps coupled with other
throughput enhancements like built-in limit
inspection, digital I/O, and a component handling interface are ideal for high speed, nonstop
production environments. All sweep configurations can be programmed for single-event or
­continuous operation.
e
SMU
I source
SMU
I meter
V meter
IC
Ib4
Ib3
Ib2
V V Source
Ib1
VCE
Figure 6. Typical family of curves for transistors
Instrumentation and software solutions
for I-V characterization
Figure 8 illustrates various hardware and software solutions for I-V characterization. In the
first example, Series 2400 SourceMeter SMU
instruments are connected to a PC.
In the second example, selected Series 2600B
SourceMeter SMU instruments are connected
with TSP-Link Technology technology. TSP-Link
Technology seamlessly integrates multiple Series
2600B SMU instruments into a single system that
can be programmed and controlled as a single
instrument through the master 2600B SMU
instrument or the PC.
The third example is the Model 4200-SCS
Parameter Analyzer. This system includes an
embedded PC, Windows® operating system, and
mass storage. It is a complete DC characterization solution for semiconductor devices and test
structures. It supports up to nine SMU modules
and provides an array of Windows based software that is so intuitive that even a novice can
use the system with ease. This point-and-click
software supplies a full range of functionality,
including: managing tests, generating reports,
automating test sequencing, and creating user
libraries. The Model 4200-SCS is a complete
one box solution that combines sub-femtoamp
resolution with real-time plotting and analysis.
Key capabilities include instrument and prober
drivers, interfaces to popular modeling/circuit
simulation software, and WLR test capabilities.
High-Speed I-V Functional Testing
Keithey’s SMU instruments are designed for
maximum throughput on the production floor.
Each SMU instrument provides high-speed measurements, an internal pass/fail comparator, programmable test sequencing, and digital I/O to
control material handlers (Figure 9). Single- or
multi-point pass/fail testing can be performed on
a wide range of components, such as: network
devices, circuit protection devices, active discrete
devices, and sensors. The onboard pass/fail
comparator simplifies high-speed pass/fail tests
by avoiding the delay caused by computer and
GPIB bus interaction. The buffer memory stores
results, again avoiding the computer/GPIB bus
interaction delay.
1.888.KEITHLEY (U.S. only)
www.keithley.com
4
+100
+V
12.871 mA
A family of semiconductor curves can be
obtained with just two SMU instruments (Figure
6). At each step of base current from SMU1,
SMU2 sweeps VCE and measures IC. An SMU
instrument can store data from a sweep in its
buffer, thus reducing data transfer time to a computer. A family of curves could also be produced
using pulse-sweeps to reduce power dissipation
within a device.
SMU INSTRUMENTS
–100
–V
V meter
A Greater Measure of Confidence
A Tektronix Company
Technical information: Source Measure Unit (SMU) Instruments
+I
Level
Bias
Bias
Fixed Level
LEVEL, COUNT (number of DELAYMEASURE cycles), DELAY, BIAS
A fixed level sweep outputs a single level of voltage and ­current with
­multiple measurements to bias and/or
stress devices.
Technical information: Source Measure Unit (SMU) Instruments
Meas.
Delay
SourceMeter® SMU Instruments
Stop
Step
Start
Bias
Bias
Linear Stair
START, STOP, STEP, DELAY, BIAS
The linear staircase sweep goes from
the start level to the stop level in equal
­linear steps.
Stop
Start
Bias
Bias
START, STOP, POINTS/DECADE
(5, 10, 25, or 50), DELAY, BIAS
Logarithmic Stair
t off
The logarithmic staircase sweep is
­similar to the linear staircase sweep,
but it is done on a log scale with a
specified number of steps per decade.
t on
Level
Bias
Bias
Pulse
Start
LEVEL, COUNT, ton , toff , BIAS
Stop
Step
Pulsed sweeps greatly reduce the
power dissipation within a device, so
the effects of temperature (drift, device
failure, etc.) are virtually eliminated.
Bias
Bias
Linear Stair Pulse
START, STOP, STEP, ton , toff , BIAS
Stop
Start
Bias
Bias
Logarithmic Stair Pulse
Custom
START, STOP, POINTS/DECADE
(5, 10, 25, or 50), ton , toff , BIAS
Custom sweeps allow the user to
program individual steps to create
waveforms
SMU INSTRUMENTS
Technical information: Source Measure Unit (SMU) Instruments
Delay
Meas.
Technical
Information
The custom sweep allows you to
c­ onstruct special sweeps by specifying
the number of measurement points and
the source level at each point.
Figure 7. Various sweeps supported by SMU instruments.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
5
SourceMeter® SMU Instruments
Technical information: Source Measure Unit (SMU) Instruments
Discrete instruments with
remote control capability
PC
Series 2400
Low Cost
Series 2400
• Modular
• PC control with
LabVIEW, Labtracer, or
ACS Basic
Series 2400
Scalable, flexible instruments
with TSP-Link
PC
Series 2600B
Series 2600B
Series 2600B
Turnkey SMU systems with
built-in Graphical User Interface (GUI)
SMU
Modules
Model
4200-SCS
Parallel Test
• Expands test systems
without cost of
mainframe
• PC control or
self-contained
execution for highest
throughput
Performance +
Capability
• Complete
semiconductor
characterization system
• Configurable
SMU/Pulse/C-V
channels with remote
low current preamps
Figure 8. Examples of I-V characterization solutions
Need more test pins?
SMU INSTRUMENTS
Keithley’s new TSP-Link Technology is a high speed interface for system
expansion. It allows you to connect a virtually unlimited number of
Series 2600B SourceMeter SMU instruments in a master/slave c­onfiguration (Figure 10). All connected Series 2600B SMU instruments can be
programmed and operated under the control of the master instrument.
TSP-Link Technology provides an easy way to scale your system’s channel count up or down to match changing application needs. There is no
­chassis involved.
Advanced automation for system throughput
Series 2600B TSP® Technology
Any Series 2600B SMU instrument or 2600B-based system can run high
speed, embedded test scripts with Test Script Processor (TSP) technology.
TSP technology eliminates more than 90% of GPIB/LAN traffic and performs
advanced tests without PC intervention (Figure 11). TSP test scripts allow
throughput gains of up to 10× over equivalent PC-based programs controlling the same instruments via GPIB. TSP test scripts can be loaded and
run from the front panel or over the system’s GPIB interface. A single TSP
test script, running on the master 2600B unit, can control all Series 2600B
channels and acquire data from any Series 2600B SMU instrument connected to the system with TSP-Link Technology.
A Series 2600B-based system can stand alone as a complete measurement
and automation solution for semiconductor device or component testing
with the master 2600B unit controlling sourcing, measurements, pass/fail
decisions, test sequence flow control, binning, the component handler,
prober, and much more.
Source-Memory List
The Source-Memory List in Series 2400 SourceMeter SMU instruments,
now available in emulation mode on Series 2600B SourceMeter SMU
instruments, is a key feature for production testing. This programmable
sequencer lets you set up a complete sequence of up to 100 tests. Each test
can contain totally different test conditions, measurements, math, pass/fail,
and binning criteria. The tests are executed sequentially without additional
external commands. Conditional branching leads to different points on the
test list, depending on the results.
The Source-Memory Sweep feature allows you to store up to 100 unique
source and measure configurations in nonvolatile memory. This feature
makes it possible to sweep through a group of source memory locations
and execute a complete test sequence all at one time.
Digital I/O
Digital communication is one of the most common requirements of a production test system because of the need to communicate with handlers,
binning equipment, and user controls. The SMU instruments’ digital I/O
can also be used to interact with racks of instruments to trigger events,
start readings, and collect results. Digital triggering and response enable
fast and reliable results that are not dependent on the communication
bus in use. (Digital I/O is not available on the Model 2401, 2604B, 2614B,
and 2634B.)
Parallel test capability
Contact check
The optional Contact Check function eliminates measurement errors and
false product failures by verifying good connections to the DUT quickly
and easily before testing begins. In just 350µs (Series 2400) or 1ms (Series
2600B), this function’s verification and notification routine ensures that
you have good contact to a device before sending energy through it and
spending time testing it (Figure 12). (The Contact Check function is not
available on Models 2401, 2604B, 2614B, and 2634B.)
Series 2600B SMU instruments support true parallel testing. Each 2600B
in a system can run its own test sequences, so the number of devices that
can be tested in parallel is equivalent to the number of 2600B SMU instruments in the system. Parallel testing coupled with the 20,000 rdgs/s of each
2600B creates a system that offers extremely high throughput.
Some of the problems this function can detect while verifying connector,
fixture, and test harness integrity are contact fatigue, breakage, contamination, corrosion, loose or broken connections, and relay failures. If a bad
contact is detected, it can abort the measurement, protecting the DUT.
Three methods of fault notification are provided.
In Series 2400 SourceMeter SMU instruments, Trigger Link can be used to
coordinate multiple instruments with hardware triggers.
1.888.KEITHLEY (U.S. only)
www.keithley.com
6
A Greater Measure of Confidence
A Tektronix Company
Technical information: Source Measure Unit (SMU) Instruments
Technical
Information
Technical
Information
SourceMeter® SMU Instruments
I
Test A
Test A
Test B
Test C
Test D
V
Test C
Test D
Description
Forward voltage
test at 0.1A
Forward voltage
test at 1.0A
Reverse leakage
current at –10V
bias
Breakdown
voltage
Reading
0.6534 V
0.7268 V
Test
Time If Passes Test
300 µs Go to Test B
If A Test Fails
Figure 10. Series 2600B back panel
300 µs Go to Test C
10.122 nA
5 ms
Go to Test D
146.12 V
1 ms
1.Bin part to good bin.
2.Transmit readings to
computer while handler
is placing new part.
3.Return to Test A.
1.Bin part to bad bin.
2.Transmit data to
computer while
handler is placing new
part.
3.Return to Test A.
Figure 9. Typical high speed I-V functional test
Test Script
SMU Instument
Guard
+
• Conditional branching
• Advanced calculations
and flow control
• Variable Pass/Fail test
I meter
• Prober/Handler control
350µs
Contact
Check
(optional)
• Datalogging/
Formatting
DUT
V or I
Source
Guard Sense
V meter
Pass
In/Out HI
Sense HI
Sense LO
In/Out LO
Fail
DUT
Pass
Figure 11. Series 2600B test script
Figure 12. Series 2400 contact check
The Contact Check function was designed for high throughput 4-wire and
6-wire test applications. In Series 2400 SourceMeter SMU instruments,
three reference value choices (2W, 15W, and 50W) are supplied. If the
resistance of good connections normally exceeds 50W, then the built-in
contact check function is not suitable for that application and alternative
approaches should be considered. Series 2600B SMU instruments provide
more flexibility with programmable values.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
V meter
Pass/Fail Test
Check Vf(A) at 100mA
against pass/fail limits
Check Vf(B) at 1A
against pass/fail limits
Check leakage current,
Ir(C), at–10V and test
against pass/fail limits
Check Vbr(D)
Technical information: Source Measure Unit (SMU) Instruments
Test B
–
Technical information: Source Measure Unit (SMU) Instruments
SMU Instrument
A Tektronix Company
7
Selector Guide
SourceMeter® SMU Instruments
20–100W BENCH SMU INSTRUMENTS
2400, 2401
2400-C
2400-LV
43
2410
2410-C
43
2420
2420-C
43
2425
2425-C
43
2440
2440-C
43
2450
36
22 W
22 W
66 W
110W
55 W
20 W
Min.
±1 pA
±1 pA
±10 pA
±10 pA
±10 pA
±10 fA
Max
±1.05 A
±1.05 A
±3.15 A
±3.15 A
±5.25 A
±1.05 A
MODEL
Selector guide: Source Measure Unit (SMU) Instruments
Page
POWER OUTPUT
CURRENT Capability
VOLTAGE Capability
Min.
Max.
Ohms Range 3
Basic ACCURACY
I
V
W
READING SPEED
FEATURE Summary
Pulse Mode
Embedded Scripting/
Execution
Contact Check
Selectable Front/Rear Inputs
Test Leads/Cables
Computer Interface
SMU INSTRUMENTS
Digital I/O
Other
±100 nV
±100 nV
±100 nV
±100 nV
±100 nV
±1100 V
±63 V
±105 V
±42 V
±21/±210 V 2
<0.2 W to >200 MW <0.2 W to >200 MW <0.2 W to >200 MW <0.2 W to >200 MW <2.0 W to >200 MW
0.035%
0.015%
0.06 %
0.035%
0.015%
0.07 %
0.035%
0.015%
0.06 %
0.035%
0.015%
0.06 %
0.035%
0.015%
0.06 %
0.020%
0.012%
0.043%
2,081 rdgs/s
2,081 rdgs/s
2,081 rdgs/s
2,081 rdgs/s
2,081 rdgs/s
3,130 rdgs/s
No
No
No
No
No
Source-Memory List
Source-Memory List
Source-Memory List
Source-Memory List
Source-Memory List
No
Source-Memory List, Config
List, Test Script Processor
(TSP®) Technology
-C version
-C version
-C version
-C version
-C version
No
Yes
Yes
Yes
Yes
Yes
Yes
Banana
Banana
Banana
Banana
Banana
Front: Banana
Rear: Triax
IEEE-488, RS-232
IEEE-488, RS-232
IEEE-488, RS-232
IEEE-488, RS-232
IEEE-488, RS-232
USB 2.0, LAN/LXI 1.4 Core,
IEEE-488
1 In/4 Out with
built-in component
handler interfaces
(except Model 2401).
1 In/4 Out with
built-in component
handler interfaces.
1 In/4 Out with
built-in component
handler interfaces.
1 In/4 Out with
built-in component
handler interfaces.
1 In/4 Out with
built-in component
handler interfaces.
6 digital I/O-trigger lines
6½-digit resolution.
6 wire ohms mode.
LabView drivers.
6½-digit resolution.
6 wire ohms mode.
LabView drivers.
CE, UL
CE
Compliance
1. In pulse mode.
2. Models 2401 and 2400-LV 21V max.
3. Ohms measurements on Series 2600 instruments are user-calculated.
6½-digit resolution.
6 wire ohms mode.
LabView drivers.
6½-digit resolution.
6 wire ohms mode.
LabView drivers.
CE
CE
5 inch capacitive touchscreen.
6½-digit resolution. Built-in
“Quickset” configuration
6½-digit resolution.
modes. Context-sensitive
6 wire ohms mode. help. Scalable to 32 channels
LabView drivers.
with TSP-Link Technology.
KickStart out-of-the box
software. LabView drivers. IVI
drivers.
CE
CE, NRTL listed
1.888.KEITHLEY (U.S. only)
www.keithley.com
8
±10 nV
±210 V
<2.0 W to >200 MW
A Greater Measure of Confidence
A Tektronix Company
Selector Guide
SourceMeter® SMU Instruments
2601B
2602B
2604B
10
2611B
2612B
2614B
10
2430
2430-C
43
40 W/channel
30 W/channel
1100 W 1
±100 fA
±100 fA
±3 A DC/10 A pulsed
per channel
±100 nV
±40 V
0.5 µW to 40 TW
LOW CURRENT SMU INSTRUMENTS
2651A
25
2,000W pulsed/200W
DC
2657A
32
2634B
2635B
2636B
10
180 W
30 W/channel
2W
±10 pA
±100 fA
±1 fA
±0.1 fA (2635B, 2636B)
±1 fA (2634B)
±0.01 fA
±1.5 A DC/10 A pulsed
per channel
±10.5 A 1
±50A (±100 A when
two units are connected
in parallel)
±120 mA
±1.5 A DC/10 A pulsed
per channel
±105 mA
±100 nV
±200 V
0.5 µW to 100 TW
±100 nV
±105 V
<0.2 W to >200 MW
±100 nV
±40 V
<0.1 µW to 20 TW
±100 nV
±3000 V
<0.4 W to 100 PW
±100 nV
±200 V
0.5 µW to 10 PW
±1 µV
±210 V
<2.0 W to >20 TW
0.02 %
0.02 %
0.015%
0.015%
Based on V and I range Based on V and I range
0.035%
0.015%
0.06 %
6430
51
0.02 %
0.02 %
0.02 %
0.015%
0.015%
0.015%
Based on V and I range Based on V and I range Based on V and I range
0.035%
0.012%
0.063%
20,000 rdgs/s
20,000 rdgs/s
2,081 rdgs/s
38,500 rdgs/s and
1µs per pt digitzer
38,500 rdgs/s and
1µs per pt digitzer
20,000 rdgs/s
256 rdgs/s
Yes
Yes
Yes
Yes
Yes
Yes
No
Test Script Processor
(TSP®) Technology
Test Script Processor
(TSP®)
Source-Memory List
Test Script Processor
(TSP®)
Test Script Processor
(TSP®)
Test Script Processor
(TSP®)
Source-Memory List
Yes
Yes
Rear only
Screw terminal;
adapters
available for banana
or triax
LAN/LXI, IEEE-488,
RS-232
LAN/LXI-C, IEEE-488,
RS-232
14 digital I/O trigger
lines
14 digital I/O trigger
lines
6½-digit resolution.
Scalable to 32
channels with TSPLink Technology.
6 wire ohms mode.
Built-in Web-based
characterization
software.
LabView drivers.
CE, UL
6½-digit resolution.
Scalable to 32
channels with TSPLink Technology.
6 wire ohms mode.
Built-in Web-based
characterization
software.
LabView drivers.
CE, ETL
Yes (not available for
Yes (not available for
-C version
2604B)
2614B)
Rear only
Rear only
Yes
Screw terminal;
Screw terminal;
adapters
adapters
Banana
available for banana
available for banana
or triax
or triax
USB 2.0, LAN/LXI-C,
USB 2.0, LAN/LXI-C,
IEEE-488, RS-232
IEEE-488, RS-232
IEEE-488, RS-232
14 digital I/O-trigger
14 digital I/O-trigger 1 In/4 Out with built-in
lines
lines
component handler
(no digital I/O available (no digital I/O available
interfaces (except
for 2614B)
for 2604B)
Model 2401).
6½-digit resolution.
6½-digit resolution.
Scalable to 64
Scalable to 64
channels with TSPchannels with TSPLink Technology (not Link Technology (not
6½-digit resolution.
available for 2614B.)
available for 2604B).
6 wire ohms mode.
Built-in Web-based
Built-in Web-based
LabView drivers.
characterization
characterization
software.
software. LabView
LabView driver.
driver.
CE, UL
CE, UL
CE
Rear Only
Yes (not available for
2634B)
Rear only
Rear and Preamp
HV triax
Triax
Triax
No
USB 2.0, LAN/LXI,
IEEE-488, RS-232
IEEE-488, RS-232
14 digital I/O-trigger
1 In/4 Out with built-in
lines
component handler
(no digital I/O available
interfaces
for 2634B)
6½-digit measurement
resolution. Scalable
to 64+ channels with
TSP-Link Technology
6½-digit resolution.
(not available for
6 wire ohms mode.
2634B.) Built-in WebLabView drivers.
based characterization
software. LabView
driver.
CE, UL
CE
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
Selector guide: Source Measure Unit (SMU) Instruments
100–200W POWER SMU INSTRUMENTS
SMU INSTRUMENTS
20–100W SYSTEM
SMU INSTRUMENTS
A Tektronix Company
9
Series 2600B
System SourceMeter® SMU Instruments
• Family of models offer
industry’s widest dynamic
range: 10A pulse to 0.1fA and
200V to 100nV
• Built-in, Java-based test
software enables true plug &
play I/V characterization and
test through any browser.
• TSP (Test Script Processing)
technology embeds complete
test programs inside the
instrument for best-in-class
system-level throughput
• TSP-Link expansion technology
for multi-channel parallel test
without a mainframe
• Software emulation for
Keithley’s Model 2400
SourceMeter SMU Instrument
• USB 2.0, LXI-C, GPIB, RS-232,
and digital I/O interfaces
• Free software drivers and
development/debug tools
• Optional ACS-Basic
semiconductor component
characterization software
The Series 2600B System SourceMeter SMU Instruments are the industry’s leading current/voltage
source and measure solutions, and are built from Keithley’s third generation SMU technology. The
Series 2600B offers single- and dual-channel models that combine the capabilities of a precision
power supply, true current source, 6½-digit DMM, arbitrary waveform generator, pulse generator,
and electronic load – all into one tightly integrated instrument. The result is a powerful solution that
significantly boosts productivity in applications ranging from bench-top I-V characterization through
highly automated production test. For bench-top use, Series 2600B SMU instruments feature builtin, Java-based software that enables plug & play I-V testing through any browser, on any computer,
from anywhere in the world. For automated system applications, the Series 2600B’s Test Script
Processor (TSP®) runs complete test programs from inside the instrument for industry-best throughput. In larger, multi-channel applications, Keithley’s TSP-Link® Technology works together with TSP
Technology to enable high-speed, SMU-per-pin parallel testing. Because Series 2600B SourceMeter
SMU Instruments have fully isolated channels that do not require a mainframe, they can be easily
reconfigured and re-deployed as your test applications evolve.
Java-based Plug & Play I-V Test Software
The Series 2600B are the only SMU instruments to feature built-in, Java-based test software that
enables true plug & play I-V characterization through any browser, on any computer, from anywhere
in the world. This unique capability boosts productivity across a wide range of applications such as
R&D, education, QA/FA, and more. Simply connect the 2600B to the internet via the supplied LAN
cable, open a browser, type in the 2600B’s I.P. address, and begin testing. Resulting data can be
downloaded to a spreadsheet such as Excel for further analysis and formatting, or for inclusion in
other documents or presentations.
SMU INSTRUMENTS
Built-in, Java-based test software runs directly
from any web browser to boost productivity.
1.888.KEITHLEY (U.S. only)
www.keithley.com
10
A Greater Measure of Confidence
A Tektronix Company
Scalable, integrated source and measure solutions
Scalable, integrated source and measure solutions
• Tightly integrated, 4-quadrant
voltage/current source and
measure instruments offer
best in class performance with
6½-digit resolution
Scalable, integrated source and measure solutions
2601BSingle-channel System
SourceMeter SMU Instrument
(3A DC, 10A Pulse)
2602B Dual-channel System
SourceMeter SMU Instrument
(3A DC, 10A Pulse)
2604B Dual-channel System
SourceMeter SMU
Instrument (3A DC, 10A
Pulse, Benchtop Version)
2611BSingle-channel System
SourceMeter SMU Instrument
(200V, 10A Pulse)
2612B Dual-channel System
SourceMeter SMU Instrument
(200V, 10A Pulse)
2614B Dual-channel System
SourceMeter SMU
Instrument (200V, 10A
Pulse, Benchtop Version)
2634B Dual-channel System
SourceMeter SMU
Instrument (1fA, 10A Pulse,
Benchtop Version)
2635BSingle-channel System
SourceMeter SMU Instrument
(0.1fA, 10A Pulse)
2636B Dual-channel System
SourceMeter SMU Instrument
(0.1fA, 10A Pulse)
Accessories Supplied
Operators and Programming Manuals
2600-ALG-2: Low Noise Triax
Cable with Alligator Clips, 2m
(6.6 ft.) (two supplied with 2634B
and 2636B, one with 2635B)
2600-Kit: Screw Terminal
Connector Kit (2601B/
2602B/2604B/2611B/2612B/2614B)
2600B-800A: Series 2400 Emulation
Script for Series 2600B (supplied
on USB memory stick)
Unmatched Throughput for
Automated Test with TSP Technology
For test applications that demand the highest
levels of automation and throughput, the Model
2600B’s TSP technology delivers industry-best
performance. TSP technology goes far beyond
traditional test command sequencers… it fully
embeds then executes complete test programs
from within the SMU instrument itself. This
virtually eliminates all the time-consuming
bus communications to and from the PC controller, and thus dramatically improves overall
test times.
• Conditional branching
• Advanced calculations
and flow control
• Variables
• Pass/Fail test
• Prober/Handler control
• Datalogging/
Formatting
<500ns
SMU1
SMU2
SMU3
SMU4
All channels in the TSP-Link system are
synch­ronized to under 500ns.
Test Script
DUT
TSP technology executes complete test programs from the 2600B’s non-volatile memory.
SMU-Per-Pin Parallel Testing
with TSP-Link Technology
TSP-Link is a channel expansion bus that enables
multiple Series 2600B’s to be inter-connected
and function as a single, tightly-synchronized,
multi-channel system. The 2600B’s TSP-Link
Technology works together with its TSP technology to enable high-speed, SMU-per-pin parallel
testing. Unlike other high-speed solutions such
as large ATE systems, the 2600B achieves parallel
test performance without the cost or burden of
a mainframe. The TSP-Link based system also
enables superior flexibility, allowing for quick
and easy system re-configuration as test requirements change.
7709-308A: Digital I/O Connector
CA-180-3A: TSP-Link/Ethernet
Cable (two per unit)
Model 2400 Software Emulation
The Series 2600B is compatible with test
code developed for Keithley’s Model 2400
SourceMeter SMU instrument. This enables
an easier upgrade from Model 2400-based
test systems to Series 2600B, and can improve
test speeds by as much as 80%. In addition, it
provides a migration path from SCPI programming to Keithley’s TSP technology, which when
implemented can improve test times even more.
For complete support of legacy test systems, the
Model 2400’s Source-Memory-List test sequencer
is also fully supported in this mode.
Third-generation SMU Instrument
Design Ensures Faster Test Times
Based on the proven architecture of earlier Series
2600 instruments, the Series 2600B’s SMU instrument design enhances test speed in several ways.
For example, while earlier designs used a parallel
current ranging topology, the Series 2600B uses a
patented series ranging t­opology, which provides
faster and smoother range ­changes and outputs
that settle more quickly.
Test 1
running
Test 2
running
Test 3
running
To
Device 1
To
Device 2
To
Device 3
TSP Express Software Tool (embedded)
Test Script Builder Software (supplied
on CD)
LabVIEW Driver (supplied on CD)
ACS Basic Edition Software (optional)
GPIB, USB, or Ethernet
TSP-Link
Scalable, integrated source and measure solutions
Ordering Information
System SourceMeter® SMU Instruments
SMU-Per-Pin Parallel Testing using TSP and TSP-Link improves test throughput and lowers the
cost of test.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Series 2600B
A Tektronix Company
11
System SourceMeter® SMU Instruments
The Series 2600B SMU instrument design supports two modes of operation for use with a variety of loads. In normal mode, the SMU instrument provides high bandwidth performance
for maximum throughput. In high capacitance
(high-C) mode, the SMU instrument uses a slower bandwidth to provide robust performance
with higher capacitive loads.
Table 1. Series 2600B software tools
Simplify Semiconductor Component
Test, Verification, and Analysis
The optional ACS Basic Edition software
maximizes the productivity of customers who
perform packaged part characterization during
development, quality verification, or failure analysis. Key features include:
• Rich set of easy-to-access test libraries
• Script editor for fast customization of
existing tests
• Data tool for comparing results quickly
• Formulator tool that analyzes captured curves
and provides a wide range of math functions
Feature/
Functionality
ACS Basic Edition
Java-based Plug & Play
Test Script Builder (TSB)
Semiconductor
characterization software for
component test, verification,
and analysis
Series 2400, Series 2600B,
4200-SCS
Quick Start Java-based Plug &
Play Tool for fast and easy I-V
testing, primarily for bench and
lab users
Custom script writing tool for
TSP instruments
Series 2600B
Series 2600B, Series 3700
GPIB, LAN/LXI
LAN/LXI
GPIB, RS-232, LAN/LXI, USB
Functionality
Intuitive, wizard-based GUI,
Rich set of test libraries,
curve trace capability
Linear/Log Sweeps, Pulsing,
Custom sweeps, Single point
source-measures. Note: Uses
new 2600B’s new API’s for
precision timing and channel
synchronization
Custom scripts with total
flexibility, full featured
debugger
Data
management
Formulator tool with wide
range of math functions
.csv export
User defined
Optional purchase
Not necessary.
Embedded in the instrument.
Free Download or CD Install
on PC.
Description
Supported
hardware
Supported
buses
Installation
For more information about the ACS Basic
Edition software, please refer to the ACS Basic
Edition data sheet.
Powerful Software Tools
In addition to the embedded Java-based plug &
play software and optional ACS Basic Edition
software, the free Test Script Builder software
tool is provided to help users create, modify,
debug, and store TSP test scripts. Table 1
describes key features of Series 2600B software tools.
Three New Dual-Channel BenchTop Models of Series 2600B Offer
Industry-Best Value and Performance
For applications that do not require leading-edge
system-level automation capabilities, Keithley
has expanded the Series 2600B to include 3 new
value-priced “bench-top” models – the 2604B,
2614B, and 2634B. These models offer similar
performance to Models 2602B, 2612B, and
2636B, respectively, however do not include TSPLink, Contact Check, and Digital I/O capabilities.
Complete Automated
System Solutions
Keithley’s S500 Integrated Test Systems are
highly configurable, instrument-based systems
for semiconductor characterization at the
device, wafer, or cassette level. Built on our
proven Series 2600B System SourceMeter SMU
instruments, our S500 Integrated Test Systems
When you need to acquire data on a packaged
part quickly, the wizard-based user interface
of ACS Basic Edition makes it easy to find and
run the test you want, like this common FET
curve trace test.
provide innovative measurement features and
system flexibility, scalable to your needs. The
unique measurement capability, combined
with the powerful and flexible Automated
Characterization Suite (ACS) software, provides
a comprehensive range of applications and features not offered on other comparable systems
on the market.
The flexible software architecture of ACS Basic
Edition allows configuring systems with a wide
range of controllers and test fixtures, as well as the
exact number of SourceMeter SMU instruments the
application requires.
1.888.KEITHLEY (U.S. only)
www.keithley.com
12
A Greater Measure of Confidence
A Tektronix Company
Scalable, integrated source and measure solutions
Scalable, integrated source and measure solutions
SMU INSTRUMENTS
Series 2600B
System SourceMeter® SMU Instruments
Typical Applications
I-V functional test and characterization of a wide
range of devices, including:
–– Two-leaded – Sensors, disk drive heads,
metal oxide varistors (MOVs), diodes, zener
diodes, sensors, capacitors, thermistors
–– Three-leaded – Small signal bipolar junction
transistors (BJTs), field-effect transistors
(FETs), and more
• Simple ICs – Optos, drivers, switches, sensors,
converters, regulators
• Integrated devices – small scale integrated (SSI)
and large scale integrated (LSI)
–– Analog ICs
–– Radio frequency integrated circuits (RFICs)
–– Application specific integrated circuits (ASICs)
–– System on a chip (SOC) devices
• Optoelectronic devices such as light-emitting
diodes (LEDs), laser diodes, high brightness
LEDs (HBLEDs), vertical cavity surface-emitting
lasers (VCSELs), displays
+10A
+5A
+3A
+1.5A
+1A
DC
0A
Pulse
–1A
–1.5A
–3A
–5A
–10A
–40V
–35V
–20V
–6V 0V +6V
+20V
+35V
+40V
Models 2601B, 2602B, and 2604B I-V capability
+10A
• Wafer level reliability
–– NBTI, TDDB, HCI, electromigration
• Solar Cells
• Batteries
• And more...
+1.5A
+1A
+0.1A
0A
–0.1A
DC
Pulse
–1A
–1.5A
–10A
–200V –180V
–20V
–5V
0V
+5V
+20V
+180V +200V
Models 2611B, 2612B, and 2614B I-V capability
+10A
Model 2604B/2614B rear panel
(Single channels 2601B, 2611B, 2635B not shown)
+1.5A
+1A
+0.1A
0A
–0.1A
DC
Pulse
–1A
–1.5A
–10A
–200V –180V
Model 2636B rear panel
–20V
–5V
0V
+5V
+20V
+180V +200V
Models 2634B, 2635B, and 2636B I-V capability
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Scalable, integrated source and measure solutions
• Discrete and passive components
In the first and third quadrants, Series 2600B SMU instruments operate as
a source, delivering power to a load. In the second and fourth quadrants,
they operate as a sink, dissipating power internally.
Scalable, integrated source and measure solutions
Series 2600B
A Tektronix Company
13
System SourceMeter® SMU Instruments
Series 2600B specifications
SPECIFICATION CONDITIONS
ADDITIONAL SOURCE SPECIFICATIONS
This document contains specifications and supplemental information for the Models 2601B,
2602B, and 2604B System SourceMeter® SMU instruments. Specifications are the standards against
which the Models 2601B, 2602B, and 2604B are tested. Upon leaving the factory, the 2601B,
2602B, and 2604B meet these specifications. Supplemental and typical values are non-­warranted,
apply at 23°C, and are provided solely as useful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2601B,
2602B, and 2604B) or SourceMeter CHANNEL B (2602B and 2604B) terminals under the following
conditions:
1. 23°C ± 5°C, <70% relative humidity
2.After 2 hour warm-up
3. Speed normal (1 NPLC)
4. A/D auto-zero enabled
5. Remote sense operation or properly zeroed local operation
6.Calibration period = 1 year
SOURCE SPECIFICATIONS
Voltage Source Specifications
VOLTAGE PROGRAMMING ACCURACY1
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + volts)
100mV
  5 µV
0.02% +250 µV
0.02% +400 µV
1V
 50 µV
6V
 50 µV
0.02% + 1.8 mV
40V
500 µV
0.02% + 12 mV
Typical Noise
(peak-peak)
0.1Hz–10Hz
 20 µV
 50 µV
100 µV
500 µV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 40.4W per channel maximum.
±40.4V @ ±1.0A, ±6.06V @ ±3.0A, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 6V range.
CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.
Minimum value is 10nA. Accuracy same as current source.
OVERSHOOT: <±(0.1% + 10mV) typical. Step size = 10% to 90% of range, resistive load,
maximum c­ urrent limit/compliance.
GUARD OFFSET VOLTAGE: <4mV typical. Current <10mA.
SMU INSTRUMENTS
Current Source Specifications
CURRENT PROGRAMMING ACCURACY
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + amps)
100nA
2 pA
0.06% + 100 pA
1µA
20 pA
0.03% + 800 pA
10 µA
200 pA
0.03% + 5 nA
100µA
2 nA
0.03% + 60 nA
1mA
20 nA
0.03% + 300 nA
10mA
200 nA
0.03% + 6 µA
100mA
2 µA
0.03% + 30 µA
1A 5
20 µA
0.05% + 1.8mA
20 µA
0.06% + 4mA
3A 5
200 µA
0.5  % + 40mA (typical)
10A 5, 6
Typical Noise
(peak-peak)
0.1Hz–10Hz
5 pA
25 pA
60 pA
3 nA
6 nA
200 nA
600 nA
70 µA
150 µA
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range.
100mV, 1V Ranges: <50µs typical.
6V Range: <100µs typical.
40V Range 10: <150µs typical.
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Values below for Iout × R load = 1V
unless noted.
3A Range: <80µs typical (current less than 2.5A, R load >2W).
1A–10mA Ranges: <80µs typical (R load >6W).
1mA Range: <100µs typical.
100µA Range: <150µs typical.
10µA Range: <500µs typical.
1µA Range: <2.5ms typical.
100nA Range: <25ms typical.
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.
REMOTE SENSE OPERATING RANGE 11:
Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
40V Range: Max. output voltage = 42V – total voltage drop across source leads (maximum 1W
per source lead).
6V Range: Max. output voltage = 8V – total voltage drop across source leads (maximum 1W per
source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into an 100kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R load (typical
with source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling Time
for additional test conditions.
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating
information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating
information.
6. 10A range accessible only in pulse mode.
7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating
information.
9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 100mV range add an additional 60mV of uncertainty.
10.Add 150μs when measuring on the 1A range.
11.Add 50μV to source accuracy specifications per volt of HI lead drop.
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 7: ±(0.15 × accuracy specification)/°C.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 8: 40.4W per channel maximum.
±1.01A @ ±40.0V , ±3.03A @ ±6.0V , four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE 9: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 10mV. Accuracy is the same as voltage source.
OVERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load; see Current Source
Output Settling Time for additional test conditions).
1.888.KEITHLEY (U.S. only)
www.keithley.com
14
A Greater Measure of Confidence
A Tektronix Company
Series 2600B specifications
Series 2600B
2601B, 2602B,
2604B
System SourceMeter® SMU Instruments
METER SPECIFICATIONS
VOLTAGE MEASUREMENT ACCURACY 16, 17
PULSE SPECIFICATIONS
Maximum
Pulse Width 12
DC, no limit
DC, no limit
100 ms
4 ms
1.8 ms
Maximum
Duty Cycle 13
100%
100%
25%
4%
1%
MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100µs.
Pulse width programming resolution: 1µs.
Pulse width programming accuracy 15: ±5µs.
pulse width jitter: 2µs (typical).
Quadrant Diagram:
+10A
4
+5A
+3A
3
3
+1.5A
+1A
2
2
0A
1
DC
Pulse
–1A
–1.5A
Pulse
2
2
3
–5A
4
–10A
–40V
–35V
–20V
–6V 0V +6V
+20V
+35V
Pulse Level
90%
Start toff
10%
10%
t
t
on
off
13.Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equations in the reference manual for more information.
14.Typical performance for minimum settled pulse widths:
Source Settling
Source Value
Load
(% of range)
Min. Pulse Width
6V
20 V
35 V
40 V
1.5 A
3A
5A
10 A
2W
2W
7W
27 W
27 W
2W
7W
2W
0.2%
1%
0.5%
0.1%
0.1%
0.2%
0.5%
0.5%
150µs
200µs
500µs
400µs
1.5ms
150µs
500µs
200µs
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600B Reference Manual.
15.Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
90%
Start toff
Start ton
Bias Level
10%
10%
ton
toff
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 19: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
CURRENT MEASUREMENT ACCURACY 17
Default Display
Resolution 20
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
1 µA
10 µA
Range
100nA
1µA
10µA
100µA
1mA
10mA
100mA
1A
3A
10A 22
Voltage
Burden 21
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
Maximum Measurement
Time To Memory
For 60Hz (50Hz)
Speed
12.Times measured from the start of pulse to the start off-time; see figure below.
Bias Level
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.015% +150 µV
0.015% +200 µV
0.015% + 1mV
0.015% + 8mV
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.05% + 100 pA
0.025% + 500 pA
0.025% + 1.5 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5 µA
0.02% + 20 µA
0.03% + 1.5 mA
0.05% + 3.5 mA
0.4% +
25 mA (typical)
Contact Check 25 (not available on Model 2604B)
+40V
NOTES
Start ton
Range
100mV
1V
6V
40V
Input
Resistance
>10 GW
>10 GW
>10 GW
>10 GW
Current Measure Settling Time (Time for measurement to settle after a Vstep) 23: Time
required to reach within 0.1% of final value after source level command is processed on a fixed
range. Values for Vout = 1V unless noted. Current Range: 1mA. Settling Time: <100μs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 24: ±(0.15 × accuracy specification/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Pulse
3
–3A
Default Display
Resolution 18
100 nV
  1 µV
  10 µV
  10 µV
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
FAST
1 (1.2) ms
5% + 10 W
MEDIUM
SLOW
4 (5) ms
36 (42) ms
5% + 1 W
5% + 0.3 W
ADDITIONAL METER SPECIFICATIONS
Maximum LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >10GW.
NOTES
16.Add 50µV to source accuracy specifications per volt of HI lead drop.
17.De-rate accuracy specifications for NPLC setting < 1 by increasing error term.
Add appropriate % of range term using table below.
100mV
1V–40V
100nA
1μA–100mA
NPLC Setting
Range
Ranges
Range
Ranges
0.1
0.01%
0.01%
0.01%
0.01%
0.01
0.08%
0.07%
0.1%
0.05%
0.001
0.8 %
0.6 %
1%
0.5 %
1A–3A
Ranges
0.01%
0.05%
1.1 %
18.Applies when in single channel display mode.
19.High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
20.Applies when in single channel display mode.
21.Four-wire remote sense only with current meter mode selected. Voltage measure set to 100mV or 1V range only.
22.10A range accessible only in pulse mode.
23.Compliance equal to 100mA.
24.High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
25.Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Series 2600B specifications
Region
1
1
2
3
4
Maximum
Current Limit
1 A @40 V
3 A @ 6 V
1.5 A @40 V
5 A @35 V
10 A @20 V
Series 2600B specifications
SOURCE SPECIFICATIONS (continued)
A Tektronix Company
15
2601B, 2602B,
2604B
System SourceMeter® SMU Instruments
Voltage Source Output Settling Time: Time required to reach 0.1% of final value after
source level command is processed on a fixed range. Current limit = 1A.
Settling Time with Cload = 4.7μF
Voltage Source Range
100mV
200 μs (typical)
1 V
200 μs (typical)
6 V
200 μs (typical)
40 V 7 ms (typical)
Current Measure Settling Time: Time required to reach 0.1% of final value after voltage
source is stabilized on a fixed range. Values below for Vout = 1V unless noted.
Current Measure Range
Settling Time
3 A – 1 A
<120 μs (typical) (R load > 2W)
100 mA – 10 mA
<100 μs (typical)
1 mA
< 3 ms (typical)
100μA
< 3 ms (typical)
10μA
< 230 ms (typical)
1μA
< 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C scripts 29: Load = 5μF||10MW.
Test: 5V step and measure. 200ms (typical) @ 50nA.
NOTES
26.High Capacitance Mode specifications are for DC measurements only.
27.100nA range is not available in High Capacitance Mode.
28.High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
29.Part of KI Factory scripts. See reference manual for details.
GENERAL
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status
model topology.
USB Control (rear): USB 2.0 device, TMC488 protocol.
RS-232: Baud rates from 300bps to 115200bps.
Ethernet: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments to
trigger and communicate with each other. (Not available on Model 2604B.)
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument.
LXI Compliance: LXI Class C 1.4.
LXI Timing: Total Output Trigger Response Time: 245μs min., 280μs typ., (not
specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event
Delay: Unknown.
DIGITAL I/O INTERFACE: (Not available on Model 2604B)
+5V Pins
Solid State
Fuse
Digital I/O Pin
100Ω
+5VDC
(on DIGITAL I/O
connector)
5.1kΩ
(on DIGITAL I/O
connector)
Read by
firmware
Written by
firmware
GND Pin
(on DIGITAL I/O
connector)
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
SMU INSTRUMENTS
Mode Change Delay:
100μA Current Range and Above:
Delay into High Capacitance Mode: 10ms.
Delay out of High Capacitance Mode: 10ms.
1μA and 10μA Current Ranges:
Delay into High Capacitance Mode: 230ms.
Delay out of High Capacitance Mode: 10ms.
Voltmeter Input Impedance: 10GW in parallel with 3300pF.
Noise, 10Hz–20MHz (6V Range): <30mV peak-peak (typical).
Voltage Source Range Change Overshoot: <400mV + 0.1% of larger range (typical).
Overshoot into a 100kW load, 20MHz BW.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
Minimum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O bit): +960µA.
Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA (not including
Model 2604B).
5V Power Supply Pins: Limited to 250mA total for all three pins, solid state fuse protected.
Output Enable: Active high input pulled down internally to ground with a 10kΩ resistor;
when the output enable input function has been activated, each SourceMeter channel will
not turn on unless the output enable pin is driven to >2.1V (nominal current = 2.1V/10kΩ
= 210µA).
USB File System (Front): USB 2.0 Host: Mass storage class device.
POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.
COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when
rack mounted.
EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.
SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 83⁄8 in × 17½ in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in ×
93⁄8 in × 17½ in).
WEIGHT: 2601B: 4.75kg (10.4 lbs). 2602B, 2604B: 5.50kg (12.0 lbs).
ENVIRONMENT: For indoor use only.
Altitude: Maximum 2000 meters above sea level.
Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
See pages 23 and 24 for measurement speeds and other specifications.
1.888.KEITHLEY (U.S. only)
www.keithley.com
16
A Greater Measure of Confidence
A Tektronix Company
Series 2600B specifications
Series 2600B specifications
HIGH CAPACITANCE MODE 26, 27, 28
System SourceMeter® SMU Instruments
ADDITIONAL SOURCE SPECIFICATIONS
This document contains specifications and supplemental information for the Models 2611B, 2612B,
and 2614B System SourceMeter® SMU instruments. Specifications are the standards against which
the Models 2611B, 2612B, and 2614B are tested. Upon leaving the factory the 2611B, 2612B, and
2614B meet these specifications. Supplemental and typical values are non-­warranted, apply at
23°C, and are provided solely as useful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2611B,
2612B, and 2614B) or SourceMeter CHANNEL B (2612B, 2614B) terminals under the following
conditions:
1. 23°C ± 5°C, <70% relative humidity.
2.After 2 hour warm-up.
3. Speed normal (1 NPLC).
4. A/D auto-zero enabled.
5. Remote sense operation or properly zeroed local sense operation.
6.Calibration period = 1 year.
SOURCE SPECIFICATIONS
Voltage Source Specifications
VOLTAGE PROGRAMMING ACCURACY1
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + volts)
200mV
  5 µV
0.02% + 375 µV
2V
  50 µV
0.02% + 600 µV
500 µV
0.02% + 5 mV
20V
0.02% + 50 mV
200 V
  5 mV
Typical Noise
(Peak-Peak)
0.1Hz–10Hz
20 µV
50 µV
300 µV
2 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 30.3W per channel maximum.
±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 20V range.
CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.
Minimum value is 10nA. Accuracy is the same as current source.
OVERSHOOT: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maximum c­ urrent limit/compliance.
GUARD OFFSET VOLTAGE: <4mV (current <10mA).
Current Source Specifications
CURRENT PROGRAMMING ACCURACY 5
Range
100nA
1µA
10µA
100µA
1mA
10mA
100mA
1A 6
1.5A 6
10A 6, 7
Programming
Resolution
2 pA
20 pA
200 pA
2 nA
20 nA
200 nA
2 µA
20 µA
50 µA
200 µA
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.06% +100 pA
0.03% +800 pA
0.03% + 5 nA
0.03% + 60 nA
0.03% +300 nA
0.03% + 6 µA
0.03% + 30 µA
0.05% + 1.8mA
0.06% + 4mA
0.5% + 40mA (typical)
Typical Noise
(Peak-Peak)
0.1Hz–10Hz
5 pA
25 pA
60 pA
3 nA
6 nA
200 nA
600 nA
70 µA
150 µA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 8: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 9: 30.3W per channel maximum.
±1.515A @ ±20V , ±101mA @ ±200V , four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE 10: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 20mV. Accuracy is the same as voltage source.
OVERSHOOT: <±0.1% (typical). Step size = 10% to 90% of range, resistive load; see Current
Source Output Settling Time for additional test conditions.
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to within reach 0.1% of final value
after source level command is processed on a fixed range.
Settling Time
Range
200mV
<50 μs (typical)
2 V
<50 μs (typical)
20 V
<110 μs (typical)
200 V <700 μs (typical)
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value after
source level command is processed on a fixed range. Values below for Iout · R load = 2V unless noted.
Current Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load > 6W)
100 mA – 10 mA
<80 μs (typical)
1 mA
<100 μs (typical)
100μA
<150 μs (typical)
10μA
<500 μs (typical)
1μA
<2 ms (typical)
100 nA
<20 ms (typical)
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.
REMOTE SENSE OPERATING RANGE 11: Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum
1W per source lead).
20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum
1W per source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into a 200kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R load (typical
– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling
Time for additional test conditions.
Series 2600B specifications
Series 2600B specifications
SPECIFICATION CONDITIONS
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Accuracy specifications do not include connector leakage. Derate accuracy by Vout/2E11 per °C when operating
between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15·Vout/2E11) per °C when operating <18°C and >28°C.
6. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
7. 10A range accessible only in pulse mode.
8. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
9. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
10.For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.
11.Add 50μV to source accuracy specifications per volt of HI lead drop.
PULSE SPECIFICATIONS
Region
1
1
2
3 14
4
Maximum
Current Limit
100mA @200 V
1.5 A @ 20 V
1 A @180 V
1 A @200 V
10 A @ 5 V
Maximum
Pulse Width 12
DC, no limit
DC, no limit
8.5 ms
2.2 ms
1 ms
Maximum
Duty Cycle 13
100%
100%
1%
1%
2.2%
MINIMUM PROGRAMMABLE PULSE WIDTH 15, 16: 100µs. NOTE: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100µs.
Pulse width programming resolution: 1µs.
Pulse width programming accuracy 16: ±5µs.
pulse width jitter: 2µs (typical).
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
2611B, 2612B,
2614B
A Tektronix Company
17
2611B, 2612B,
2614B
System SourceMeter® SMU Instruments
SOURCE SPECIFICATIONS (continued)
METER SPECIFICATIONS
PULSE SPECIFICATIONS (continued)
VOLTAGE MEASUREMENT ACCURACY 17, 18
Quadrant Diagram:
+10A
Range
200mV
2V
20V
200 V
4
3
3
2
+0.1A
0A
–0.1A
2
Pulse
2
–1A
–1.5A
2
3
Pulse
3
CURRENT MEASUREMENT ACCURACY 18, 21
Pulse
4
–20V
0V
–5V
+5V
+20V
+180V +200V
NOTES
12.Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
90%
Start toff
Start ton
Bias Level
10%
10%
ton
toff
13.Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C.
See power equations in the reference manual for more information.
14.Voltage source operation with 1.5 A current limit.
15.Typical performance for minimum settled pulse widths:
Source Settling
Source Value
Load
(% of range)
Min. Pulse Width
5V
20 V
180 V
200 V (1.5 A Limit)
100 mA
1A
1A
10 A
0.5 W
200 W
180 W
200 W
200 W
200 W
180 W
0.5 W
1%
0.2%
0.2%
0.2%
1%
1%
0.2%
0.5%
Pulse Level
90%
Start toff
Start ton
Bias Level
10%
10%
ton
toff
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.06% + 100 pA
0.025% + 500 pA
0.025% + 1.5 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5 µA
0.02% + 20 µA
0.03% + 1.5mA
0.05% + 3.5mA
0.4% +
25mA (typical)
Voltage
Burden 23
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
Current Measure Settling Time (Time for measurement to settle after a Vstep) 25: Time
required to reach 0.1% of final value after source level command is processed on a fixed range.
Values for Vout = 2V unless noted. Current Range: 1mA. Settling Time: <100μs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 26: ±(0.15 × accuracy specfication)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Contact Check 27 (not available on Model 2614B)
Maximum Measurement
Time to Memory
For 60Hz (50Hz)
Speed
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
FAST
1 (1.2) ms
5% + 10 W
MEDIUM
4 (5) ms
5% + 1 W
SLOW
36 (42) ms
5% + 0.3 W
ADDITIONAL METER SPECIFICATIONS
Maximum LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >10GW.
SMU INSTRUMENTS
300 μs
200 μs
5 ms
1.5 ms
200 μs
500 μs
5 ms
300 μs
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600B Reference Manual.
16.Times measured from the start of pulse to the start off-time; see figure below.
Default Display
Resolution 22
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
1 µA
10 µA
Range
100nA
1µA
10µA
100µA
1mA
10mA
100mA
1A
1.5 A
10A 24
–10A
–200V –180V
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.015% +225 µV
0.02% + 350 µV
0.015% + 5mV
0.015% + 50mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 20: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
DC
1
Input
Resistance
>10 GW
>10 GW
>10 GW
>10 GW
1.888.KEITHLEY (U.S. only)
www.keithley.com
18
A Greater Measure of Confidence
A Tektronix Company
Series 2600B specifications
Series 2600B specifications
+1.5A
+1A
Default Display
Resolution 19
100nV
1µV
10µV
100µV
2611B, 2612B,
2614B
System SourceMeter® SMU Instruments
METER SPECIFICATIONS (continued)
17.Add 50µV to source accuracy specifications per volt of HI lead drop.
18.De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term
using table below.
Series 2600B specifications
NPLC Setting
0.1
0.01
0.001
200mV
Range
0.01%
0.08%
0.8 %
2V–200V
Ranges
0.01%
0.07%
0.6 %
100nA
Range
0.01%
0.1%
1%
1μA–100mA
Ranges
0.01%
0.05%
0.5 %
1A–1.5A
Ranges
0.01%
0.05%
1.1 %
19.Applies when in single channel display mode.
20.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
21.Accuracy specifications do not include connector leakage. De-rate accuracy by Vout/2E11 per °C when operating
between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15 * Vout/2E11) per °C when operating <18° and >28°C.
22.Applies when in single channel display mode.
23.Four-wire remote sense only and with current meter mode selected. Voltage measure set to 200mV or
2V range only.
24.10A range accessible only in pulse mode.
25.Compliance equal to 100mA.
26.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
27.Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
HIGH CAPACITANCE MODE 28, 29, 30
Voltage Source Output Settling Time: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Current limit = 1A.
Voltage Source Range
Settling Time with Cload = 4.7μF
200mV
600 μs (typical)
2 V
600 μs (typical)
20 V
1.5 ms (typical)
200 V 20 ms (typical)
Current Measure Settling Time: Time required to reach within 0.1% of final value after
voltage source is stabilized on a fixed range. Values below for Vout = 2V unless noted.
Current Measure Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load >6W)
100 mA – 10 mA
<100 μs (typical)
1 mA
< 3 ms (typical)
100μA
< 3 ms (typical)
10μA
< 230 ms (typical)
1μA
< 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C scripts 31: Load = 5μF||10MW.
Test: 5V step and measure. 200ms (typical) @ 50nA.
Mode Change Delay:
100μA Current Range and Above:
Delay into High Capacitance Mode: 10ms.
Delay out of High Capacitance Mode: 10ms.
1μA and 10μA Current Ranges:
Delay into High Capacitance Mode: 230ms.
Delay out of High Capacitance Mode: 10ms.
Voltmeter Input Impedance: 30GW in parallel with 3300pF.
Noise, 10Hz–20MHz (20V Range): <30mV peak-peak (typical).
Voltage Source Range Change Overshoot (for 20V range and below): <400mV + 0.1%
of larger range (typical). Overshoot into a 200kW load, 20MHz BW.
NOTES
28.High Capacitance Mode specifications are for DC measurements only.
29.100nA range is not available in High Capacitance Mode.
30.High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
31.Part of KI Factory scripts, See reference manual for details.
See pages 23 and 24 for measurement
speeds and other specifications.
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status
model topology.
USB Control (rear): USB 2.0 device, TMC488 protocol.
RS-232: Baud rates from 300bps to 115200bps.
Ethernet: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments
to trigger and communicate with each other. (Not available on Model 2614B.)
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument.
LXI Compliance: LXI Class C 1.4.
LXI Timing: Total Output Trigger Response Time: 245μs min., 280μs typ., (not specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:
Unknown.
DIGITAL I/O INTERFACE: (Not available on Model 2614B)
+5V Pins
Solid State
Fuse
Digital I/O Pin
100Ω
+5VDC
(on DIGITAL I/O
connector)
5.1kΩ
(on DIGITAL I/O
connector)
Read by
firmware
Written by
firmware
GND Pin
(on DIGITAL I/O
connector)
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
Minimum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O bit): +960µA.
Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA.
5V Power Supply Pins: Limited to 250mA total for all three pins, solid state fuse protected.
Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must
be externally applied to this pin to ensure 200V operation. This signal is pulled down
to chassis ground with a 10kW resistor. 200V operation will be blocked when the
INTERLOCK signal is <0.4V (absolute minimum –0.4V). See figure below:
Coil
Resistance
145Ω ±10%
INTERLOCK Pin
(on DIGITAL I/O
connector)
Read by firmware
+220V Supply
–220V Supply
10kΩ
Chassis
Ground
*
To output stage
Rear Panel
USB File System (Front): USB 2.0 Host: Mass storage class device.
POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.
COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when
rack mounted.
EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.
SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 83⁄8 in × 17½ in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in
× 93⁄8 in × 17½ in).
WEIGHT: 2611B: 4.75kg (10.4 lbs). 2612B, 2614B: 5.50kg (12.0 lbs).
ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.
Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
NOTES
Series 2600B specifications
GENERAL
A Tektronix Company
19
System SourceMeter® SMU Instruments
Series 2600B specifications
SPECIFICATION CONDITIONS
ADDITIONAL SOURCE SPECIFICATIONS
This document contains specifications and supplemental information for the Models 2634B,
2635B, and 2636B System SourceMeter® SMU instruments. Specifications are the standards against
which the Models 2634B, 2635B, and 2636B are tested. Upon leaving the factory the 2634B, 2635B,
and 2636B meet these specifications. Supplemental and typical values are non-­warranted, apply at
23°C, and are provided solely as u­ seful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2634B,
2635B, and 2636B) or SourceMeter CHANNEL B (2634B, 2636B) terminals under the following
conditions:
1. 23°C ± 5°C, <70% relative humidity.
2.After 2 hour warm-up
3. Speed normal (1 NPLC)
4. A/D auto-zero enabled
5. Remote sense operation or properly zeroed local sense operation
6.Calibration period = 1 year
SOURCE SPECIFICATIONS
Voltage Source Specifications
VOLTAGE PROGRAMMING ACCURACY1
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + volts)
200mV
  5 µV
0.02% + 375 µV
2V
  50 µV
0.02% + 600 µV
20V
500 µV
0.02% + 5 mV
0.02% + 50 mV
200 V
  5 mV
Typical Noise
(peak-peak)
0.1Hz–10Hz
20 µV
50 µV
300 µV
2 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 2: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 3: 30.3W per channel maximum.
±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV pk-pk (typical), <3mV rms (typical), 20V range.
CURRENT LIMIT/COMPLIANCE 4: Bipolar current limit (compliance) set with single value.
Minimum value is 100pA. Accuracy is the same as current source.
OVERSHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load,
maximum current limit/compliance).
GUARD OFFSET VOLTAGE: <4mV (current <10mA).
SMU INSTRUMENTS
Current Source Specifications
CURRENT PROGRAMMING ACCURACY
Accuracy (1 Year)
Programming
23°C ±5°C
Range
Resolution
±(% rdg. + amps)
1nA
20fA
0.15% + 2 pA
10nA
200fA
0.15% + 5 pA
100nA
2pA
0.06% + 50 pA
1µA
20pA
0.03% +700 pA
10µA
200 pA
0.03% + 5 nA
100µA
2 nA
0.03% + 60 nA
1mA
20 nA
0.03% +300 nA
10mA
200 nA
0.03% + 6 µA
100 mA
2µA
0.03% + 30 µA
20µA
0.05% + 1.8mA
1A 5
50µA
0.06% + 4mA
1.5A 5
200µA
0.5  % + 40mA (typical)
10A 5, 6 Typical Noise
(peak-peak)
0.1Hz–10Hz
800fA
2pA
5pA
25pA
60 pA
3 nA
6 nA
200 nA
600 nA
70µA
150µA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 7: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXiMUM OUTPUT POWER AND SOURCE/SINK LIMITS 8: 30.3W per channel maximum.
±1.515A @ ±20V, ±101mA @ ±200V, four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE 9: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 20mV. Accuracy is the same as voltage source.
OVERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load, maximum ­
current limit/compliance; see Current Source Output Settling Time for additional
test ­conditions).
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range.
Settling Time
Range
200mV
<50 μs (typical)
2 V
<50 μs (typical)
20 V
<110 μs (typical)
200 V <700 μs (typical)
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value after
source level command is processed on a fixed range. Values below for Iout · R load = 2V unless noted.
Current Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load > 6W)
100 mA – 10 mA
<80 μs (typical)
1 mA
<100 μs (typical)
100μA
<150 μs (typical)
10μA
<500 μs (typical)
1μA
<2 ms (typical)
100 nA
<20 ms (typical)
10 nA
<40 ms (typical)
1 nA
<150 ms (typical)
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC.
REMOTE SENSE OPERATING RANGE 10:Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum
1W per source lead).
20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum
1W per source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into a 200kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R load (typical
– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling
Time for additional test condtions.
PULSE SPECIFICATIONS
Region
1
1
2
3 13
4
Maximum
Current Limit
100mA @200 V
1.5 A @ 20 V
1 A @180 V
1 A @200 V
10 A @ 5 V
Maximum
Pulse Width 11
DC, no limit
DC, no limit
8.5 ms
2.2 ms
1 ms
MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for settled source at a given I/V output and load can be longer than 100µs.
Pulse width programming resolution: 1µs.
Pulse width programming accuracy 15: ±5µs.
pulse width jitter: 50µs (typical).
Quadrant Diagram:
+10A
4
+1.5A
+1A
3
–1A
–1.5A
3
2
+0.1A
0A
–0.1A
2
DC
1
Pulse
2
2
3
Pulse
3
Pulse
4
–10A
–200V –180V
–20V
–5V
0V
+5V
1.888.KEITHLEY (U.S. only)
www.keithley.com
20
Maximum
Duty Cycle 12
100%
100%
1%
1%
2.2%
A Greater Measure of Confidence
+20V
+180V +200V
A Tektronix Company
Series 2600B specifications
2634B, 2635B,
2636B
System SourceMeter® SMU Instruments
SOURCE SPECIFICATIONS (continued)
METER SPECIFICATIONS
NOTES
VOLTAGE MEASUREMENT ACCURACY 16, 17
Pulse Level
90%
Start toff
Start ton
Bias Level
10%
10%
ton
toff
12.Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equations in the Reference Manual for more information.
13.Voltage source operation with 1.5 A current limit.
14.Typical performance for minimum settled pulse widths:
Source Settling
Source Value
Load
(% of range)
Min. Pulse Width
5V
20 V
180 V
200 V (1.5 A Limit)
100 mA
1A
1A
10 A
0.5 W
200 W
180 W
200 W
200 W
200 W
180 W
0.5 W
1%
0.2%
0.2%
0.2%
1%
1%
0.2%
0.5%
300 μs
200 μs
5 ms
1.5 ms
200 μs
500 μs
5 ms
300 μs
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600B Reference Manual.
15.Times measured from the start of pulse to the start off-time; see figure below.
Default Display
Resolution 18
100nV
1µV
10µV
100µV
Range
200mV
2V
20V
200V
CURRENT MEASUREMENT ACCURACY 17
Range
*100pA 22, 23
1nA 22, 24
10nA
100nA
1µA
10µA
100µA
1mA
10mA
100mA
1A
1.5A
10A 25
Bias Level
10%
10%
ton
toff
Default Display
Resolution 20
0.1fA
1fA
10fA
100fA
1pA
10pA
100 pA
1nA
10nA
100nA
1µA
1µA
10µA
Voltage
Burden 21
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
<1 mV
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.15% + 120 fA
0.15% + 240 fA
0.15% +
3 pA
0.06% + 40 pA
0.025% + 400 pA
0.025% + 1.5 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5 µA
0.02% + 20 µA
0.03% + 1.5mA
0.05% + 3.5mA
0.4  % + 25mA
* 100 pA range not available on Model 2634B.
Current Measure Settling Time (Time for measurement to settle after a Vstep) 26: Time
required to reach within 0.1% of final value after source level command is processed on a fixed
range. Values for Vout = 2V unless noted. Current Range: 1mA. Settling Time: <100μs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 27: ±(0.15 × accuracy specfication)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Contact Check 28 (Not available on Model 2634B)
Maximum Measurement
Time to Memory
For 60Hz (50Hz)
Speed
Start toff
Start ton
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.015% +225 µV
0.02% + 350 µV
0.015% + 5mV
0.015% + 50mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C) 19: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
Pulse Level
90%
Input
Resistance
>1014 W
>1014 W
>1014 W
>1014 W
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
FAST
1 (1.2) ms
5% + 10 W
MEDIUM
4 (5) ms
5% + 1 W
SLOW
36 (42) ms
5% + 0.3 W
ADDITIONAL METER SPECIFICATIONS
Maximum LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >1014W.
Series 2600B specifications
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer
to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer
to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
6. 10A range accessible only in pulse mode.
7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power
derating information.
9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.
10.Add 50μV to source accuracy specifications per volt of HI lead drop.
11.Times measured from the start of pulse to the start off-time; see figure below.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Series 2600B specifications
2634B, 2635B,
2636B
A Tektronix Company
21
2634B, 2635B,
2636B
System SourceMeter® SMU Instruments
METER SPECIFICATIONS (continued)
GENERAL
16.Add 50µV to source accuracy specifications per volt of HI lead drop.
17.De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term
using table below.
Series 2600B specifications
NPLC Setting
0.1
0.01
0.001
200mV
Range
0.01%
0.08%
0.8 %
2V–200V
Ranges
0.01%
0.07%
0.6 %
100nA
Range
0.01%
0.1%
1%
1A–1.5A
Ranges
0.01%
0.05%
1.1 %
18.Applies when in single channel display mode.
19.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
20.Applies when in single channel display mode.
21.Four-wire remote sense only and with current meter mode selected. Voltage measure set to 200mV or
2V range only.
22.10-NPLC, 11-Point Median Filter, <200V range, measurements made within 1 hour after zeroing. 23°C ± 1°C
23.Under default specification conditions: ±(0.15% + 750fA).
24.Under default specification conditions: ±(0.15% + 1pA).
25.10A range accessible only in pulse mode.
26.Delay factor set to 1. Compliance equal to 100mA.
27.High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
28.Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
HIGH CAPACITANCE MODE 29, 30, 31
Voltage Source Output Settling Time: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Current limit = 1A.
Voltage Source Range
Settling Time with Cload = 4.7μF
200mV
600 μs (typical)
2 V
600 μs (typical)
20 V
1.5 ms (typical)
200 V 20 ms (typical)
Current Measure Settling Time: Time required to reach within 0.1% of final value after
voltage source is stabilized on a fixed range. Values below for Vout = 2V unless noted.
Current Measure Range
Settling Time
1.5 A – 1 A
<120 μs (typical) (R load >6W)
100 mA – 10 mA
<100 μs (typical)
1 mA
< 3 ms (typical)
100μA
< 3 ms (typical)
10μA
< 230 ms (typical)
1μA
< 230 ms (typical)
Capacitor Leakage Performance Using HIGH-C scripts 32: Load = 5μF||10MW.
Test: 5V step and measure. 200ms (typical) @ 50nA.
Mode Change Delay:
100μA Current Range and Above:
Delay into High Capacitance Mode: 10ms.
Delay out of High Capacitance Mode: 10ms.
1μA and 10μA Current Ranges:
Delay into High Capacitance Mode: 230ms.
Delay out of High Capacitance Mode: 10ms.
Voltmeter Input Impedance: 30GW in parallel with 3300pF.
Noise, 10Hz–20MHz (20V Range): <30mV peak-peak (typical).
Voltage Source Range Change Overshoot (for 20V range and below): <400mV + 0.1%
of larger range (typical). Overshoot into a 200kW load, 20MHz BW.
NOTES
SMU INSTRUMENTS
1μA–100mA
Ranges
0.01%
0.05%
0.5 %
29.High Capacitance Mode specifications are for DC measurements only.
30.100nA range and below are not available in high capacitance mode.
31.High Capacitance Mode utilizes locked ranges. Auto Range is disabled.
32.Part of KI Factory scripts. See reference manual for details.
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status
model topology.
USB Control (rear): USB 2.0 device, TMC488 protocol.
RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, p­ arity
type, and flow control (RTS/CTS hardware or none).
Ethernet: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX.
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments
to trigger and communicate with each other. (Not available on Model 2614B.)
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument.
LXI Compliance: LXI Class C 1.4.
LXI Timing: Total Output Trigger Response Time: 245μs min., 280μs typ., (not
specified) max. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event
Delay: Unknown.
DIGITAL I/O INTERFACE: (Not available on Model 2614B)
+5V Pins
Solid State
Fuse
Digital I/O Pin
100Ω
+5VDC
(on DIGITAL I/O
connector)
5.1kΩ
(on DIGITAL I/O
connector)
Written by
firmware
GND Pin
(on DIGITAL I/O
connector)
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850µA max.
Minimum Logic High Input Voltage: 2.1V, +570µA.
Maximum Source Current (flowing out of Digital I/O bit): +960µA.
Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA.
Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA.
5V Power Supply Pins: Limited to 250mA total for all three pins, solid state fuse protected.
Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must
be externally applied to this pin to ensure 200V operation. This signal is pulled down
to chassis ground with a 10kW resistor. 200V operation will be blocked when the
INTERLOCK signal is <0.4V (absolute minimum –0.4V). See figure below:
Coil
Resistance
145Ω ±10%
INTERLOCK Pin
(on DIGITAL I/O
connector)
Read by firmware
+220V Supply
–220V Supply
10kΩ
Chassis
Ground
*
To output stage
Rear Panel
USB File System (Front): USB 2.0 Host: Mass storage class device.
POWER SUPPLY: 100V to 250VAC, 50–60Hz (auto sensing), 240VA max.
COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when
rack mounted.
EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1.
SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1.
DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 83⁄8 in × 17½ in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in
× 93⁄8 in × 17½ in).
WEIGHT: 2635B: 4.75kg (10.4 lbs). 2634B, 2636B: 5.50kg (12.0 lbs).
See pages 23 and 24 for measurement
speeds and other specifications.
ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.
Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
1.888.KEITHLEY (U.S. only)
www.keithley.com
22
Read by
firmware
A Greater Measure of Confidence
A Tektronix Company
Series 2600B specifications
NOTES
Series 2600B
System SourceMeter® SMU Instruments
Applicable to Models 2601B, 2602B, 2604B, 2611B, 2612B, 2614B, 2634B, 2635B, and 2636B.
Measurement Speed Specifications 1, 2, 3
Trigger Origin
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Measure
To Memory Using
User Scripts
20000 (20000)
8100 (8100)
5000 (4000)
3650 (3200)
580 (490)
560 (470)
59 (49)
58 (48)
Measure
To Gpib Using
User Scripts
10500 (10500)
7100 (7100)
4000 (3500)
3400 (3000)
560 (475)
450 (460)
59 (49)
58 (49)
Source Measure
To Memory Using
User Scripts
7000 (7000)
5500 (5500)
3400 (3000)
3000 (2700)
550 (465)
545 (460)
59 (49)
59 (49)
Source Measure
To Gpib Using
User Scripts
6200 (6200)
5100 (5100)
3200 (2900)
2900 (2600)
550 (460)
540 (450)
59 (49)
59 (49)
Maximum SINGLE MEASUREMENT RATES (operations per second) FOR 60Hz (50Hz):
A/D Converter
Speed
Trigger Origin
Measure
To Gpib
Source Measure To
Gpib
Source Measure
Pass/Fail
To Gpib
0.001 NPLC
0.01 NPLC
0.1 NPLC
1.0 NPLC
Internal
Internal
Internal
Internal
1900 (1800)
1450 (1400)
450 (390)
58 (48)
1400 (1400)
1200 (1100)
425 (370)
57 (48)
1400 (1400)
1100 (1100)
425 (375)
57 (48)
Maximum Measurement RANGE CHANGE RATE: <150µs for ranges >10µA, typical. When changing to or from a range ≥1A,
maximum rate is <450µs, typical.
Maximum SOURCE Range CHANGE RATE: <2.5ms for ranges >10µA, typical. When changing to or from a range ≥1A, maximum
rate is <5.2ms, typical.
Maximum SOURCE FUNCTION CHANGE RATE: <1ms, typical.
COMMAND PROCESSING TIME: Maximum time required for the output to begin to change following the receipt of the smux.
source.levelv or smux.source.leveli command. <1ms typical.
Source Measure
To Memory Using
Sweep API
12000 (12000)
11200 (11200)
4200 (3700)
4150 (3650)
575 (480)
570 (480)
59 (49)
59 (49)
Source Measure
To Gpib Using
Sweep API
5900 (5900)
5700 (5700)
3100 (2800)
3050 (2775)
545 (460)
545 (460)
59 (49)
59 (49)
TRIGGERING AND
SYNCHRONIZATION
SPECIFICATIONS 1
Triggering:
Trigger in to trigger out: 0.5μs, typical.
Trigger in to source change:2 10 μs, typical.
Trigger Timer accuracy: ±2μs, typical.
Source change2 after LXI Trigger: 280μs, typical.
Synchronization:
Single-node synchronized source change:4 <0.5μs, typical.
Multi-node synchronized source change:4 <0.5μs, typical.
Series 2600B specifications
A/D Converter
Speed
0.001 NPLC
0.001 NPLC
0.01 NPLC
0.01 NPLC
0.1 NPLC
0.1 NPLC
1.0 NPLC
1.0 NPLC
NOTES
1. TSP-Link not available on Models 2604B, 2614B, and 2634B.
2. Fixed source range, with no polarity change.
NOTES
1. Tests performed with a 2602B, 2612B, or 2636B on Channel A using the following equipment: PC Hardware (Pentium® 4 2.4GHz, 512MB RAM,
National Instruments PCI-GPIB). Driver (NI-486.2 Version 2.2 PCI-GPIB). Software (Microsoft® Windows® 2000, Microsoft Visual Studio 2005, VISA
version 4.1).
2. Exclude current measurement ranges less than 1mA.
3. 2635B/2636B with default measurement delays and filters disabled.
SMU INSTRUMENTS
Series 2600B specifications
Maximum SWEEP OPERATION RATES (operations per second) FOR 60Hz (50Hz):
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
23
Series 2600B
System SourceMeter® SMU Instruments
Applicable to Models 2601B, 2602B, 2604B, 2611B, 2612B, 2614B, 2634B, 2635B, and 2636B.
FRONT PANEL INTERFACE: Two-line vacuum fluorescent display (VFD) with keypad and rotary knob.
Display:
Show error messages and user defined messages
Display source and limit settings
Show current and voltage measurements
View measurements stored in dedicated reading buffers
Keypad Operations:
Change host interface settings
Save and restore instrument setups
Load and run factory and user defined test scripts (i.e. sequences) that prompt for input and send
results to the display
Store measurements into dedicated reading buffers
PROGRAMMING: Embedded Test Script Processor (TSP) accessible from any host interface. Responds
to individual instrument control commands. Responds to high speed test scripts comprised of
instrument control commands and Test Script Language (TSL) statements (e.g. branching, looping,
math, etc.). Able to execute high speed test scripts stored in memory without host intervention.
Minimum Memory Available: 16MB (approximately 250,000 lines of TSL code).
Test Script Builder: Integrated development environment for building, running, and managing TSP
scripts. Includes an instrument console for communicating with any TSP enabled instrument in
an interactive manner. Requires:
Pentium III 800MHz or faster personal computer
VISA (NI-VISA included on CD)
Microsoft .NET Framework (included on CD) Microsoft Windows 98, NT, 2000, or XP
Keithley I/O Layer (included on CD)
Software Interface: TSP Express (embedded), Direct GPIB/VISA, READ/WRITE for VB, VC/C++,
LabVIEW, LabWindows/CVI, etc.
READING BUFFERS: Dedicated storage area(s) reserved for measurement data. Reading buffers are
arrays of measurement elements. Each element can hold the following items:
Measurement
Source setting (at the time the measurement was taken)
Range information
Measurement status
Timestamp
Two reading buffers are reserved for each SourceMeter channel. Reading buffers can be filled using
the front panel STORE key and retrieved using the RECALL key or host interface.
Buffer Size, with timestamp and source setting: >60,000 samples.
Buffer Size, without timestamp and source setting: >140,000 samples.
Accuracy: ±100ppm.
SYSTEM EXPANSION: The TSP-Link expansion interface allows TSP enabled instruments to
­trigger and communicate with each other. Not applicable for Models 2604B, 2614B, and 2634B.
See figure below:
Each SourceMeter SMU instrument has two TSP-Link connectors to facilitate chaining instruments together.
Once SourceMeter SMU instruments are interconnected via TSP-Link, a computer can access
all of the resources of each SourceMeter SMU instrument via the host interface of any
SourceMeter SMU instrument.
A maximum of 32 TSP-Link nodes can be interconnected. Each SourceMeter SMU instrument
consumes one TSP-Link node.
TIMER: Free running 47-bit counter with 1MHz clock input. Reset each time instrument powers
up. Rolls over every 4 years.
Timestamp: TIMER value automatically saved when each measurement is triggered.
Resolution: 1µs.
SERVICES AVAILABLE FOR ALL
SERIES 2600B MODELS
ACCESSORIES AVAILABLE
Software
ACS-BASIC
Component Characterization Software
SMU INSTRUMENTS
Rack Mount Kits
4299-1
Single Rack Mount Kit with front and rear support
4299-2
Dual Rack Mount Kit with front and rear support
4299-5
1U Vent Panel
Cables and Connectors
2600-BAN
Banana Test Leads/Adapter Cable. For a
single 2601B/2602B/2604B/2611B/261
2B/2614B SMU instrument channel
2600-KIT
Extra screw terminal connector, strain
relief, and cover for a single SourceMeter
channel (one supplied with 2601B/2611B,
two with 2602B/2604B/2612B/2614B)
2600-FIX-TRIAX Phoenix-to-Triax Adapter for 2 wire sensing
2600-TRIAX
Phoenix-to-Triax Adapter for 4 wire sensing
7078-TRX-*
3-Slot, Low Noise Triax Cable, 0.3m–6.1m.
For use with 2600-TRIAX Adapter
7078-TRX-GND 3-Slot male triax to BNC adapter
(guard removed)
7709-308A
Digital I/O Connector (model specific)
8606
High Performance Modular Probe
Kit. For use with 2600B-BAN
GPIB Interfaces and Cables
7007-1
Double Shielded GPIB Cable, 1m (3.3 ft.)
7007-2
Double Shielded GPIB Cable, 2m (6.6 ft.)
KPCI-488LPA
IEEE-488 Interface/Controller for the PCI Bus
Extended Warranties
26xxB-EW
1 Year Factory Warranty extended to 2 years
26xxB-3Y-EW
1 Year Factory Warranty extended to 3 years
26xxB-5Y-EW
1 Year Factory Warranty extended to 5 years
Digital I/O,
2600-TLINK
CA-126-1A
CA-180-3A
CALIBRATION CONTRACTS
C/26xxB-3Y-STD 3 Calibrations within 3 years
C/26xxB-5Y-STD 5 Calibrations within 5 years
C/26xxB-3Y-DATA 3 Calibrations within 3 years and includes
calibration data before and after adjustment
C/26xxB-5Y-DATA 5 Calibrations within 5 years and includes
calibration data before and after adjustment
C/26xxB-3Y-17025 3 IS0-17025 accredited calibrations within
3 years
C/26xxB-5Y-17025 5 IS0-17025 accredited calibrations within
5 years
Trigger Link, and TSP-Link
Digital I/O to TLINK Adapter Cable, 1m
Digital I/O and Trigger Cable, 1.5m
CAT5 Crossover Cable for TSP-Link and
direct Ethernet connection (two supplied)
TEST FIXTURES
8101-PIV
DC, Pulse I-V and C-V Component Test Fixture
8101-4TRX
4 Pin Transistor Fixture
LR8028
Component Test Fixture – Optimized for device
testing at up to 200V/1A
Switching
Series 3700A
707B
DMM/Switch Systems
Semiconductor Switching Matrix Mainframe
Calibration and Verification
2600-STD-RES Calibration Standard 1GW Resistor for
Models 2634B, 2635B, and 2636B
1.888.KEITHLEY (U.S. only)
www.keithley.com
24
A Greater Measure of Confidence
A Tektronix Company
Series 2600B specifications
Series 2600B specifications
SUPPLEMENTAL INFORMATION
• Source or sink:
–– 2,000W of pulsed power
(±40V, ±50A)
–– 200W of DC power
(±[email protected]±20A, ±[email protected]±10A,
±[email protected]±5A)
• Easily connect two units (in
series or parallel) to create
solutions up to ±100A or ±80V
• 1pA resolution enables precise
measurement of very low
leakage currents
• 1μs per point (1MHz),
18-bit sampling, accurately
characterizes transient behavior
• 1% to 100% pulse duty cycle for
pulse width modulated (PWM)
drive schemes and devicespecific drive stimulus
• Combines a precision power
supply, current source, DMM,
arbitrary waveform generator,
V or I pulse generator with
measurement, electronic load,
and trigger controller—all in one
instrument
• Includes TSP® Express I-V
characterization software,
LabVIEW® driver, and Keithley’s
Test Script Builder software
development environment
APPLICATIONS
The high power Model 2651A SourceMeter SMU Instrument is specifically designed to characterize
and test high power electronics. This SMU instrument can help you improve productivity in applications across the R&D, reliability, and production spectrums, including high brightness LEDs, power
semiconductors, DC-DC converters, batteries, solar cells, and other high power materials, components, modules, and subassemblies.
The Model 2651A offers a highly flexible, four-quadrant voltage and current source/load coupled with
precision voltage and current meters. It can be used as a:
• Semiconductor characterization instrument
• V or I waveform generator
• V or I pulse generator
• Precision power supply
• True current source
• Digital multimeter (DCV, DCI, ohms, and power with 6½-digit resolution)
• Precision electronic load
High power System SourceMeter SMU instrument
50A, High Power System
SourceMeter® SMU Instrument
+50A
+20A
+10A
+5A
0A
–5A
–10A
DC and
Pulse
Pulse
only
–20A
• Power semiconductor,
HBLED, and optical device
characterization and testing
• Solar cell characterization
and testing
• Characterization of GaN, SiC, and
other compound materials and
devices
• Semiconductor junction
temperature characterization
• High speed, high precision
digitization
• Electromigration studies
• High current, high power
device testing
–50A
–40V
–20V
–10V
0V
+10V
+20V
+40V
The Model 2651A can source or sink up to ±40V and ±50A.
Two Measurement Modes: Digitizing or Integrating
Precisely characterize transient and steady-state behavior, including rapidly changing thermal effects,
with the two measurement modes in the Model 2651A. Each mode is defined by its independent analog-to-digital (A/D) converters.
The Digitizing Measurement mode enables 1µs per point measurements. Its 18-bit A/D converters
allow you to precisely measure transient characteristics. For more accurate measurements, use its
Integrating Measurement mode, which is based on 22-bit A/D converters.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
High power System SourceMeter SMU instrument
2651A
A Tektronix Company
25
50A, High Power System
SourceMeter® SMU Instrument
unit can pulse up to 50A; combine two units
to pulse up to 100A.
2651A
Expansion Capabilities
Through TSP-Link Technology technology, multiple Model 2651As and selected Series 2600B
SMU instruments can be combined to form a
larger integrated system with up to 64 channels.
Precision timing and tight channel synchronization are guaranteed with built-in 500ns trigger
controllers. True SMU instrument-per-pin testing
is assured with the fully isolated, independent
channels of the SourceMeter SMU instruments.
High Power System
SourceMeter® SMU
Instrument
Accessories Supplied
2651A-KIT-1A: Low Impedance
Cable Assembly (1m)
CS-1592-2: High Current
Phoenix Connector (male)
CS-1626-2: High Current
Phoenix Connector (female)
CA-557-1: Sense Line
Cable Assembly (1m)
7709-308A: Digital I/O Connector
CA-180-3A: TSP-Link/Ethernet Cable
Documentation CD
Software Tools and Drivers CD
2651A
2651A
TSP-Link
Screw Terminal Connector Kit
Component Charaterization Software
Rack Mount Kit
Test Socket Kit
Two A/D converters are used with each
measurement mode (one for current and the
other for voltage), which run simultaneously for
accurate source readback that does not sacrifice
test throughput.
7
60
6
50
40
Current (A)
Voltage (V)
5
4
30
3
20
2
10
1
0
0
25
50
75
100
125
150
175
Keithley’s TSP and TSP-Link Technologies
enable true SMU-per-pin testing without
the power and/or channel limitations of a
mainframe-based system.
Also, when two Model 2651As are connected in
parallel with TSP-Link Technology, the current
range is expanded from 50A to 100A. When two
units are connected in series, the voltage range
is expanded from 40V to 80V. Built-in intelligence simplifies testing by enabling the units
to be addressed as a single instrument, thus
creating an industry-best dynamic range (100A
to 1pA). This c­ apability enables you to test a
much wider range of power semiconductors and
other devices.
0
200
60
Time (µs)
Volts
26xxB
LXI or GPIB
to PC
Controller
Accessories Available
2600-KIT
ACS-BASIC
4299-6
8011
Up to
100A
Current
High Speed Pulsing
The Model 2651A minimizes the unwanted
effects of self heating during tests by accurately
sourcing and measuring pulses as short as
100μs. Additional control flexibility enables you
to program the pulse width from 100μs to DC
and the duty cycle from 1% to 100%. A single
40
Id (A)
SMU INSTRUMENTS
50
The dual digitizing A/D converters sample at
up to 1μs/point, enabling full simultaneous
characterization of both current and
voltage waveforms.
Vgs = 2.01V
Vgs = 2.25V
Vgs = 2.50V
Vgs = 2.75V
Vgs = 3.00V
Vgs = 3.25V
Vgs = 3.51V
30
20
10
0
0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
0.020
0.018
0.014
0.012
0.010
0.008
0.006
0.004
0.002
0.000
2.0
2.5
3.0
3.5
4.0
4.5
5.0
5.5
6.0
6.5
Vgs (V)
1μV measurement resolution and current
sourcing up to 50A (100A with two units)
enable low-level Rds measurements to
support next-generation devices.
Standard Capabilities of Series
2600B SMU Instruments
Each Model 2651A includes all the features and
capabilities provided in most Series 2600B SMU
instruments, such as:
• Ability to be used as either a bench-top
I-V characterization tool or as a building
block component of multiple-channel I-V
test systems
• TSP Express software to quickly and
easily perform common I-V tests without
programming or installing software
• ACS Basic Edition software for semiconductor
component characterization (optional).
ACS Basic now features a Trace mode for
generating a suite of characteristic curves.
• Keithley’s Test Script Processor (TSP®)
Technology, which enables creation of
custom user test scripts to further automate
testing, and also supports the creation of
programming sequences that allow the
instrument to operate asynchronously
without direct PC control.
• Parallel test execution and precision
timing when multiple SMU instruments are
connected together in a system
• LXI compliance
• 14 digital I/O lines for direct interaction with
probe stations, component handlers, or other
automation tools
• USB port for extra data and test program
­storage via USB memory device
4.0
Vds (V)
Precision measurements to 50A (100A with
two units) enable a more complete and
accurate characterization.
1.888.KEITHLEY (U.S. only)
www.keithley.com
26
Id = 10A
Id = 20A
Id = 30A
Id = 40A
Id = 50A
0.016
Rds (ohms)
Ordering Information
A Greater Measure of Confidence
A Tektronix Company
High power System SourceMeter SMU instrument
High power System SourceMeter SMU instrument
2651A
2651A
50A, High Power System
SourceMeter® SMU Instrument
Specification Conditions
VOLTAGE ACCURACY SPECIFICATIONS 1, 2
SOURCE
Programming
Resolution
  5 μV
  50 μV
500 μV
500 μV
500 μV
Range
100.000 mV
1.00000 V
10.0000 V
20.0000 V
40.0000 V
Accuracy
±(% reading + volts)
0.02% + 500 μV
0.02% + 500 μV
0.02% +    5 mV
0.02% +    5 mV
0.02% +   12 mV
MEASURE
Noise (Vpp) (typical)
0.1 Hz to 10 Hz
100 μV
500 μV
  1 mV
  1 mV
  2 mV
Default
Display
Resolution
  1 μV
  10 μV
100 μV
100 μV
100 μV
Noise (Ipp) (typical)
0.1Hz to 10Hz
  50 pA
250 pA
500 pA
  5 nA
  10 nA
500 nA
  1 μA
300 μA
300 μA
500 μA
500 μA
N/A
Default
Display
Resolution
  1 pA
  10 pA
100 pA
  1 nA
  10 nA
100 nA
  1 μA
  10 μA
  10 μA
100 μA
100 μA
100 μA
Integrating ADC Accuracy 3
±(% reading + volts)
0.02% + 300 μV
0.02% + 300 μV
0.02% +    3 mV
0.02% +    5 mV
0.02% +   12 mV
High-Speed ADC Accuracy 4
±(% reading + volts)
0.05% + 600 μV
0.05% + 600 μV
0.05% +    8 mV
0.05% +    8 mV
0.05% +   15 mV
CURRENT ACCURACY SPECIFICATIONS 5
SOURCE
Range
100.000 nA
1.00000μA
10.0000μA
100.000μA
1.00000 m A
10.0000 m A
100.000 m A
1.00000 A
5.00000 A
10.0000 A
20.0000 A
50.0000 A 6
Programming
Resolution
2pA
20pA
200pA
2nA
20nA
200nA
2μA
200μA
200μA
500μA
500μA
2 mA
Accuracy
±(% reading + amps)
0.1  % +500 pA
0.1  % + 2 nA
0.1  % + 10 nA
0.03% + 60 nA
0.03% +300 nA
0.03% + 8μA
0.03% + 30μA
0.08% +3.5 mA
0.08% +3.5 mA
0.15% + 6 mA
0.15% + 8 mA
0.15% + 80 mA
MEASURE
Integrating ADC Accuracy 3
±(% reading + amps)
0.08% + 500 pA
0.08% + 2 nA
0.08% + 8 nA
0.02% + 25 nA
0.02% + 200 nA
0.02% + 2.5 µA
0.02% + 20 µA
0.05% + 3 mA
0.05% + 3 mA
0.12% + 6 mA
0.08% + 8 mA
0.05% + 50 mA 7
Model 2651A specifications
Source and measurement accuracies are specified at the Model 2651A terminals under
these conditions:
• 23° ±5°C, <70 percent relative humidity
• After two-hour warm-up
• Speed normal (1 NPLC)
• A/D autozero enabled
• Remote sense operation or properly zeroed local operation
• Calibration period: One year
High-Speed ADC Accuracy 4
±(% reading + amps)
0.08% + 800 pA
0.08% + 4 nA
0.08% + 10 nA
0.05% + 60 nA
0.05% + 500 nA
0.05% + 10 µA
0.05% + 50 µA
0.05% + 5 mA
0.05% + 5 mA
0.12% + 12 mA
0.08% + 15 mA
0.05% + 90 mA 8
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0.15 × accuracy specification)/°C.
High-capacitance mode accuracy is applicable at 23° ±5°C only.
3. Derate accuracy specification for NPLC setting <1 by increasing error term.
Add appropriate typical percent of range term for resistive loads using the table below.
NPLC Setting
100mV Range
1V to 40V Ranges
100nA Range
1µA to 100mA Ranges
1A to 20A Ranges
0.1
0.01
0.001
0.01%
0.08%
0.8 %
0.01%
0.07%
0.6 %
0.01%
0.1 %
1   %
0.01%
0.05%
0.5 %
0.01%
0.1 %
1.8 %
4. 18-bit ADC. Average of 1000 samples taken at 1µs intervals.
5. At temperatures 0° to 18°C and 28° to 50°C; 100nA to 10µA accuracy is degraded by ±(0.35 × accuracy specification)/°C.
100µA to 50A accuracy is degraded by ±(0.15 × accuracy specification)/°C.
High-capacitance mode accuracy is applicable at 23° ±5°C only.
6. 50A range accessible only in pulse mode.
7. 50A range accuracy measurements are taken at 0.008 NPLC.
8. Average of 100 samples taken at 1µs intervals.
SMU INSTRUMENTS
Model 2651A specifications
This document contains specifications and supplemental information for the Model 2651A High
Power System SourceMeter SMU instrument. Specifications are the standards against which the
Model 2651A is tested. Upon leaving the factory, the Model 2651A meets these specifications.
Supplemental and typical values are non-warranted, apply at 23°C, and are provided solely as
useful information.
Accuracy specifications are applicable for both normal and high-capacitance modes.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
27
2651A
50A, High Power System
SourceMeter® SMU Instrument
Maximum output power: 202W maximum.
Source/Sink Limits 1:
Voltage: ±10.1V at ±20.0A, ±20.2V at ±10.0A, ±40.4V at ±5.0A 2.
Four-quadrant source or sink operation.
Current: ±5.05A at ±40V 2, ±10.1A at ±20V, ±20.2A at ±10V
Four-quadrant source or sink operation.
+50A
CAUTION: Carefully consider and configure the appropriate output-off state and source and
compliance levels before connecting the Model 2651A to a device that can deliver energy. Failure to
consider the output-off state and source and compliance levels may result in damage to the instrument or to the device under test.
+10A
+5A
0A
–5A
–10A
Pulse SPECIFICATIONS
Minimum programmable pulse width 3: 100μs. Note: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100μs.
Pulse width programming resolution: 1μs.
Pulse width programming accuracy 3: ±5μs.
Pulse width jitter: 2μs (typical).
Pulse Rise Time (typical):
–20A
Current Range
50 A
50 A
50 A
20 A
50 A
20 A
10 A
 5A
R load
0.05 W
0.2  W
0.4  W
0.5  W
0.8  W
1   W
2   W
8.2  W
Rise Time (typical)
  26 μs
  57 μs
  85 μs
  95 μs
130 μs
180 μs
330 μs
400 μs
6
5
+30A
7
2
+20A
3
4
DC
1
Pulse
–30A
–50A
–40V
–20V
0V
–10V
Region
Maximums
  5 A at 40 V
10 A at 20 V
20 A at 10 V
30 A at 10 V
20 A at 20 V
10 A at 40 V
50 A at 10 V
50 A at 20 V
50 A at 40 V
Region
1
1
1
2
3
4
5
6
7
+10V
+20V
Maximum
Pulse Width 3
DC, no limit
DC, no limit
DC, no limit
  1 ms
  1.5 ms
  1.5 ms
  1 ms
330 μs
300 μs
+40V
Maximum
Duty Cycle 4
100%
100%
100%
 50%
 40%
 40%
 35%
 10%
  1%
NOTES
1. Full power source operation regardless of load to 30°C ambient. Above 30°C or power sink operation, refer to
“Operating Boundaries” in the Model 2651A Reference manual for additional power derating information.
2. Quadrants 2 and 4 power envelope is trimmed at 36V and 4.5A.
3. Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
90%
Start toff
Start ton
Bias Level
10%
10%
ton
toff
SMU INSTRUMENTS
4. Thermally limited in sink mode (quadrants 2 and 4) and ambient temperatures above 30°C. See power equations in the Model 2651A Reference Manual for more information.
The Model 2651A supports GPIB, LXI, Digital I/O, and Keithley’s TSP-Link Technology for multi-channel synchronization.
1.888.KEITHLEY (U.S. only)
www.keithley.com
28
A Greater Measure of Confidence
A Tektronix Company
Model 2651A specifications
Model 2651A specifications
DC POWER SPECIFICATIONS
50A, High Power System
SourceMeter® SMU Instrument
Noise (10Hz to 20MHz): <100mV peak-peak (typical), <30mV RMS (typical), 10V range with a
20A limit.
Overshoot:
Voltage: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maximum
current limit/compliance.
Current: <±(0.1% + 10mV) (typical). Step Size = 10% to 90% of range, resistive load. See
Current Source Output Settling Time specifications for additional test conditions.
Range change overshoot:
Voltage: <300mV + 0.1% of larger range (for <20V ranges) (typical).
<400mV + 0.1% of larger range (for ≥20V ranges) (typical).
Overshoot into a 100kW load, 20MHz bandwidth.
Current: <5% of larger range + 360mV/R load (for >10μA ranges) (typical). Iout × R load = 1V.
Voltage source output settling time: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. 1
Range
 1V
10 V
20 V
40 V
Settling Time (typical)
<  70 μs
<160 μs
<190 μs
<175 μs
Current source output settling time: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range. Values below for Iout × R load.
Current Range
R load
Settling time (typical)
20A
0.5 W
<195 μs
10A
1.5 W
<540 μs
5A
5W
<560 μs
1A
1W
<  80 μs
100mA
10W
<  80 μs
10mA
100 W
<210 μs
1mA
1kW
<300 μs
100μA
10kW
<500 μs
10μA
100kW
<  15 ms
1μA
1MW
<  35 ms
100nA
10MW
<110 ms
Transient response time:
10V and 20V Ranges: <70μs for the output to recover to within 0.1% for a 10% to 90% step
change in load.
40V Range: <110μs for the output to recover to within 0.1% for a 10% to 90% step change in load.
Guard offset voltage: <4mV, current <10mA.
Remote sense operating range 2:
Maximum Voltage between HI and SENSE HI: 3V.
Maximum Voltage between LO and SENSE LO: 3V.
Maximum impedance per source lead:
Maximum impedance limited by 3V drop by remote sense operating range.
Maximum resistance = 3V/source current value (amperes) (maximum of 1W per source lead).
3V = L di/dt.
Voltage output headroom:
5A Range: Maximum output voltage = 48.5V – (Total voltage drop across source leads).
10A Range: Maximum output voltage = 24.5V – (Total voltage drop across source leads).
20A Range: Maximum output voltage = 15.9V – (Total voltage drop across source leads).
Overtemperature protection: Internally sensed temperature overload puts unit in standby mode.
Limit/compliance: Bipolar limit (compliance) set with single value.
Voltage 3: Minimum value is 10mV; accuracy is the same as voltage source.
Current 4: Minimum value is 10nA; accuracy is the same as current source.
Additional Measurement specifications
Contact Check 1
Speed
Fast
Medium
Slow
Maximum Measurement
Time to Memory
for 60Hz (50Hz)
1.1 ms (1.2 ms)
4.1 ms (5 ms)
36 ms (42 ms)
Accuracy (1 Year)
23° ±5°C
±(% reading + ohms)
5% + 15 W
5% +   5 W
5% +   3 W
NOTES
1. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
Model 2651A specifications
Model 2651A specifications
ADDITIONAL SOURCE SPECIFICATIONS
Additional meter specifications
Maximum load impedance:
Normal Mode: 10nF (typical), 3μH (typical).
High-Capacitance Mode: 50μF (typical), 3μH (typical).
Common mode voltage: 250V DC.
Common mode isolation: >1GW, <4500pF.
Measure input impedance: >10GW.
Sense high input impedance: >10GW.
Maximum sense lead resistance: 1kW for rated accuracy.
Overrange: 101% of source range, 102% of measure range.
HIGH-CAPACITANCE mODE 1,2
Accuracy specifications 3: Accuracy specifications are applicable in both normal and
high-capacitance modes.
Voltage Source Output Settling Time: Time required to reach within 0.1 % of final value
after source level command is processed on a fixed range. 4
Voltage Source
Range
 1V
10 V
20 V
40 V
Settling Time with
Cload = 4.7μF (typical)
  75 μs
170 μs
200 μs
180 μs
Mode change delay:
100μA Current Range and Above:
Delay into High-Capacitance Mode: 11ms.
Delay out of High-Capacitance Mode: 11ms.
1μA and 10μA Current Ranges:
Delay into High-Capacitance Mode: 250ms.
Delay out of High-Capacitance Mode: 11ms.
Measure input impedance: >10GW in parallel with 25nF.
Voltage source range change overshoot: <400mV + 0.1% of larger range (typical).
Overshoot into a 100kW load, 20MHz bandwidth.
NOTES
1. High-capacitance mode specifications are for DC measurements only and use locked ranges. Autorange is disabled.
2. 100nA range is not available in high-capacitance mode.
3. Add an additional 2nA to the source current accuracy and measure current accuracy offset for the 1µA range.
4. With measure and compliance set to the maximum current for the specified voltage range.
SMU INSTRUMENTS
2651A
NOTES
1. With measure and compliance set to the maximum current for the specified voltage range.
2. Add 50µV to source accuracy specifications per volt of HI lead drop.
3. For sink mode operation (quadrants II and IV), add 0.6% of limit range to the corresponding voltage source
accuracy specifications. For 100mV range add an additional 60mV of uncertainty. Specifications apply with sink
mode enabled.
4. For sink mode operation (quadrants II and IV), add 0.6% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode enabled.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
29
2651A
50A, High Power System
SourceMeter® SMU Instrument
Measurement Speed Specifications 1, 2
A/D Converter
Speed
0.001 NPLC
0.001 NPLC
0.01 NPLC
0.01 NPLC
0.1 NPLC
0.1 NPLC
1.0 NPLC
1.0 NPLC
HS ADC
HS ADC
Trigger Origin
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Internal
Digital I/O
Measure
To Memory Using
User Scripts
20000 (20000)
8100 (8100)
4900 (4000)
3500 (3100)
580 (480)
550 (460)
59 (49)
58 (48)
38500 (38500)
12500 (12500)
Measure
To Gpib Using
User Scripts
9800 (9800)
7100 (7100)
3900 (3400)
3400 (3000)
560 (470)
550 (460)
59 (49)
58 (49)
18000 (18000)
11500 (11500)
Readings per
Second
Bursts per Second
 100
 500
1000
2500
5000
1,000,000
1,000,000
1,000,000
1,000,000
1,000,000
400
 80
 40
 16
  8
Source Measure
To Gpib Using
User Scripts
6200 (6200)
5100 (5100)
3200 (2900)
2900 (2600)
550 (460)
540 (450)
59 (49)
59 (49)
9500 (9500)
7000 (7000)
Source Measure
To Memory Using
Sweep API
12000 (12000)
11200 (11200)
4200 (3700)
4150 (3650)
560 (470)
560 (470)
59 (49)
59 (49)
14300 (14300)
13200 (13200)
Source Measure
To Gpib Using
Sweep API
5900 (5900)
5700 (5700)
4000 (3500)
3800 (3400)
545 (460)
545 (460)
59 (49)
59 (49)
6300 (6300)
6000 (6000)
TRIGGERING AND SYNCHRONIZATION
SPECIFICATIONS
High Speed ADC Burst MEASUREMENT RATES 3
Burst Length
(readings)
Source Measure
To Memory Using
User Scripts
7000 (7000)
5500 (5500)
3400 (3000)
3000 (2700)
550 (465)
540 (450)
59 (49)
59 (49)
10000 (10000)
7500 (7500)
Triggering:
Trigger In to Trigger Out: 0.5μs (typical).
Trigger In to Source Change 1: 10μs (typical).
Trigger Timer Accuracy: ±2μs (typical).
Source Change 1 After LXI Trigger: 280μs (typical).
Synchronization:
Single-Node Synchronized Source Change 1: <0.5μs (typical).
Multi-Node Synchronized Source Change 1: <0.5μs (typical).
Maximum SINGLE MEASUREMENT RATES (operations per
second) FOR 60Hz (50Hz)
A/D Converter
Speed
Trigger
Origin
Measure
To Gpib
Source
Measure
To Gpib
Source
Measure
Pass/Fail
To Gpib
0.001 NPLC
0.01  NPLC
0.1   NPLC
1.0   NPLC
Internal
Internal
Internal
Internal
1900 (1800)
1450 (1400)
450 (390)
58 (48)
1400 (1400)
1200 (1100)
425 (370)
57 (48)
1400 (1400)
1100 (1100)
425 (375)
57 (48)
NOTES
1. Fixed source range with no polarity change.
Maximum Measurement RANGE CHANGE RATE: >4000 per second for >10µA (typical).
Maximum SOURCE Range CHANGE RATE: >325 per second for >10µA, typical. When changing to or from a range ≥1A, maximum rate is >250 per second, typical.
COMMAND PROCESSING TIME: Maximum time required for the output to begin to change following the receipt of the smua.source.levelv or smua.source.leveli command. <1ms typical.
NOTES
SMU INSTRUMENTS
1. Tests performed with a Model 2651A on channel A using the following equipment: Computer hardware (Intel®
Pentium® 4 2.4GHz, 2GB RAM, National Instruments™ PCI-GPIB). Driver (NI-488.2 Version 2.2 PCI-GPIB).
Software (Microsoft® Windows® XP, Microsoft Visual Studio® 2010, VISA™ version 4.1).
2. Exclude current measurement ranges less than 1mA.
3. smua.measure.adc has to be enabled and the smua.measure.count set to the burst length.
1.888.KEITHLEY (U.S. only)
www.keithley.com
30
A Greater Measure of Confidence
A Tektronix Company
Model 2651A specifications
Model 2651A specifications
Maximum SWEEP OPERATION RATES (operations per second) FOR 60Hz (50Hz):
2651A
50A, High Power System
SourceMeter® SMU Instrument
SUPPLEMENTAL INFORMATION
To Host Computer
Node 1
Node 2
To Additional Nodes
Each Model 2651A has two TSP-Link connectors to make it easier to connect instruments
together in sequence.
Once source-measure instruments are interconnected through the TSP-Link expansion interface,
a computer can access all the resources of each source-measure instrument through the host
interface of any Model 2651A.
A maximum of 32 TSP-Link nodes can be interconnected. Each source-measure instrument
consumes one TSP-Link node.
TIMER: Free-running 47-bit counter with 1MHz clock input. Resets each time instrument power is
turned on. If the instrument is not turned off, the timer is reset to zero every 4 years.
Timestamp: TIMER value is automatically saved when each measurement is triggered.
Resolution: 1µs.
Timestamp Accuracy: ±100ppm.
+5V Pin
600mA
Solid State
Fuse
Digital I/O Pin
100�
+5VDC
(on DIGITAL I/O
connector)
5.1k�
(on DIGITAL I/O
connector)
Read by
firmware
Written by
firmware
GND Pin
(on DIGITAL I/O
connector)
Rear Panel
Connector: 25-pin female D.
Input/Output Pins: 14 open drain I/O bits.
Absolute Maximum Input Voltage: 5.25V.
Absolute Minimum Input Voltage: –0.25V.
Maximum Logic Low Input Voltage: 0.7V, +850μA max.
Minimum Logic High Input Voltage: 2.1V, +570μA.
Maximum Source Current (flowing out of digital I/O bit): +960μA.
Maximum Sink Current At Maximum Logic Low Voltage (0.7): –5.0mA.
Absolute Maximum Sink Current (flowing into digital I/O pin): –11mA.
5V Power Supply Pin: Limited to 250mA, solid-state fuse protected.
Output Enable Pin: Active high input pulled down internally to ground with a 10kW
resistor; when the output enable input function has been activated, the Model 2651A
channel will not turn on unless the output enable pin is driven to >2.1V (nominal
current = 2.1V/10kW = 210μA).
IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model
topology.
RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, parity
type, and flow control (RTS/CTS hardware or none). When not programmed as the
active host interface, the Model 2651A can use the RS-232 interface to control other
instrumentation.
Ethernet: RJ-45 connector, LXI, 10/100BT, Auto MDIX.
LXI compliance: LXI Class C 1.2.
Total Output Trigger Response Time: 245μs minimum, 280μs (typical), (not specified)
maximum.
Receive Lan[0-7] Event Delay: Unknown.
Generate Lan[0-7] Event Delay: Unknown.
Expansion interface: The TSP-Link Technology expansion interface allows TSP-enabled
instruments to trigger and communicate with each other.
Cable Type: Category 5e or higher LAN crossover cable. 3 meters maximum between each
TSP-enabled instrument.
USB: USB 2.0 host controller.
Power supply: 100V to 250V AC, 50Hz to 60Hz (autosensing), 550VA maximum.
Cooling: Forced air; side and top intake and rear exhaust.
Warranty: 1 year.
EMC: Conforms to European Union EMC Directive.
Safety: UL listed to UL61010-1:2004. Conforms to European Union Low Voltage Directive.
Dimensions: 89mm high × 435mm wide × 549mm deep (3.5 in. × 17.1 in. × 21.6 in.).
Bench Configuration (with handle and feet): 104mm high × 483mm wide × 620mm
deep (4.1 in. × 19 in. × 24.4 in.).
Weight: 9.98kg (22 lbs).
Environment: For indoor use only.
Altitude: Maximum 2000 meters above sea level.
Operating: 0° to 50°C, 70% relative humidity up to 35°C. Derate 3% relative humidity/°C,
35° to 50°C.
Storage: –25° to 65°C.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
Model 2651A specifications
Keypad Operations:
Change host interface settings.
Save and restore instrument setups.
Load and run factory and user defined test scripts that prompt for input and send results to
the display.
Store measurements into dedicated reading buffers.
PROGRAMMING: Embedded Test Script Processor (TSP®) scripting engine is accessible from any
host interface.
Responds to individual instrument control commands.
Responds to high speed test scripts comprised of instrument control commands and Test Script
Language (TSL) statements (for example, branching, looping, and math).
Able to execute high speed test scripts stored in memory without host intervention.
Minimum User Memory Available: 16MB (approximately 250,000 lines of TSP code).
Test Script Builder: Integrated development environment for building, running, and
managing TSP scripts. Includes an instrument console for communicating with any TSP enabled
instrument in an interactive manner. Requires:
VISA (NI-VISA included on CD),
Microsoft® .NET Framework (included on CD),
Keithley I/O Layer (included on CD),
Intel® Pentium III 800MHz or faster personal computer,
Microsoft Windows® 2000, XP, Vista®, or 7.
TSP Express (embedded): Tool that allows users to quickly and easily perform common I-V tests
without programming or installing software. To run TSP Express, you need:
Java™ Platform, Standard Edition 6,
Microsoft Internet Explorer®, Mozilla® Firefox®, or another Java-compatible web browser.
Software Interface: TSP Express (embedded), direct GPIB/VISA, read/write with Microsoft
Visual Basic®, Visual C/C++®, Visual C#®, LabVIEW™, CEC TestPoint™ Data Acquisition
Software Package, NI LabWindows™/CVI, etc.
READING BUFFERS: Nonvolatile memory uses dedicated storage areas reserved for measurement
data. Reading buffers are arrays of measurement elements. Each element can hold the
following items:
Source setting (at the time the measurement was taken)
Measurement
Range information
Measurement status
Timestamp
Two reading buffers are reserved for each Model 2651A channel. Reading buffers can be filled
using the front panel STORE key and retrieved using the RECALL key or host interface.
Buffer Size, with timestamp and source setting: >60,000 samples.
Buffer Size, without timestamp and source setting: >140,000 samples.
SYSTEM EXPANSION: The TSP-Link expansion interface allows TSP-enabled instruments to
­trigger and communicate with each other. See figure below.
Digital I/O Interface:
SMU INSTRUMENTS
Model 2651A specifications
FRONT PANEL INTERFACE: Two-line vacuum fluorescent display (VFD) with keypad and
navigation wheel.
Display:
Show error messages and user defined messages. Display source and limit settings.
Show current and voltage measurements
View measurements stored in dedicated
(6½-digit to 4½-digit).
reading buffers.
GENERAL
A Tektronix Company
31
• Source or sink up to 180W of DC
or pulsed power (±[email protected],
±[email protected])
• 1fA low current resolution
• Dual 22-bit precision ADCs
and dual 18-bit 1µs per point
digitizers for high accuracy and
high speed transient capture
• Fully TSP® compliant for
easy system integration
with Series 2600B System
SourceMeter models
• Combines a precision power
supply, current source, DMM,
arbitrary waveform generator, V
or I pulse generator, electronic
18-bit load, and trigger controller
– all in one instrument
• Includes TSP® Express
characterization software,
LabVIEW® driver, and Keithley’s
Test Script Builder software
development environment
High Power System SourceMeter
SMU Instrument
®
The Model 2657A is a high voltage, high power, low current source measure unit (SMU) instrument
that delivers unprecedented power, precision, speed, flexibility, and ease of use to improve productivity in R&D, production test, and reliability environments. The Model 2657A is designed specifically
for characterizing and testing high voltage electronics and power semiconductors, such as diodes,
FETs, and IGBTs, as well as other components and materials in which high voltage, fast response, and
precise measurements of voltage and current are required. The Model 2657A offers the highest power
and best low current performance in the industry. It is supported by the industry’s most powerful
parametric characterization software platforms to grow with you as your applications evolve.
The Model 2657A offers highly flexible, four-quadrant voltage and current source/load coupled with
precision voltage and current meters. It can be used as a:
• Semiconductor characterization instrument
• Digital multimeter (DCV, DCI, ohms, and
• V or I waveform generator
power with 6½-digit resolution)
• V or I pulse generator
• Precision power supply with V and I readback • Precision electronic load
• True current source
+120 mA
+60 mA
Typical Applications
SMU INSTRUMENTS
• Power semiconductor device
characterization and testing
+20 mA
0 mA
–20 mA
–60 mA
• Characterization of GaN, SiC,
and other compound materials
and devices
–120 mA
• Breakdown and leakage
testing to 3kV
• Characterization of
sub-millisecond transients
–3 kV
–1.5 kV
0 kV
+3 kV
The Model 2657A can source or sink up to 3000V @ 20mA or 1500V @ 120mA.
1.888.KEITHLEY (U.S. only)
www.keithley.com
32
+1.5 kV
A Greater Measure of Confidence
A Tektronix Company
High power SourceMeter SMU instrument
High power SourceMeter SMU instrument
2657A
2657A
High Power System SourceMeter
SMU Instrument
ACCESSORIES AVAILABLE
2657A-LIM-3
2657A-PM-200
4299-6
SHV-CA-553-x
HV-CA-554-x
HV-CA-571-3
HV-CS-1613
Low Interconnect Module
200V Protection Module
Fixed Rack Mount Kit
High Voltage Triax to SHV Cable (1, 2, 3m)
High Voltage Triax to Triax Cable (0.5, 1, 2, 3m)
High Voltage Triax to Unterminated Cable
High Voltage Triax Feedthrough Connector
Accessories
CA-558-2
CA-560-x
CA-562-x
CA-563
CA-568-120
8010-DTB
supplied with the 8010
25-pin D-sub Interlock Cable for 26xxA
4mm Black and Red Banana Cables, 8 in.
6mm Black and Red Banana Cables, 10 in.
BNC to Banana Cable, 9.5 in.
Safety Earth Ground Cable
Device Test Board with TO-247 Socket
Accessories available for the 8010
8010-CTB
Customizable Test Board
8010-DTB-220 Device Test Board with TO-220 Socket (1.5kV)
700
0.0010
0.0008
600
0.0006
Current
Voltage
0.0004
0.0002
500
400
0.0000
300
–0.0002
200
–0.0004
–0.0006
100
–0.0008
0
–0.0010
–0.0012
0.000
0.005
0.010
0.015
0.020
0.025
High power SourceMeter SMU instrument
Accessories Supplied
7709-308A Digital I/O and
Interlock Connector
CA-180-3A TSP-Link/Ethernet Cable
Documentation CD
Software tools and drivers CD
The digitizing measurement mode provides speeds up to 1µs per sample. The dual 18-bit digitizers
allow you to capture voltage and current transients simultaneously. In the integrating measurement
mode, the dual 22-bit integrating analog to digital converters allow more precise measurement of voltage and current. Two A/D converters are used with each measurement mode, one for current and
the other for voltage, that run simultaneously for accurate source readback that does not sacrifice
test throughput.
Voltage (V)
–100
0.030
Time (seconds)
The dual high speed A/D converters sample as fast as 1µs per point, enabling full simultaneous
characterization of both voltage and current.
Expansion Capabilities
Through TSP-Link Technology technology, the Model 2657A can be linked with Series 2600B SMU
instruments to form a larger integrated system with up to 32 nodes. Precision timing and tight channel synchronization are guaranteed with built-in 500ns trigger controllers. The fully isolated, independent channels of the SourceMeter SMU instruments make true SMU-per-pin testing possible.
2657A-PM-200
2657A
26xxB
2657A-LIM-3
The Model 2657A can be combined with
Series 2600B and Model 4200-SCS SMU
instruments to support multi-terminal
test capability. The Models 2657A-PM-200
Protection Module and 2657A-LIM-3 Low
Interconnect Module make it easier to connect multiple instruments to a probe station
safely (not required for connecting to the
Model 8010 High Power Device Test Fixture).
High Power Device Test Fixture
The Model 8010 High Power Device Test Fixture provides safe and easy connections for testing
­packaged high power devices at up to 3000V or 100A. The Model 8010 provides connections for a
high voltage SourceMeter SMU instrument (Model 2657A), one or two high current SourceMeter SMU
instruments (Model 2651A), and three low power SourceMeter SMU instruments (Series 2600B or
Model 4200-SCS SMU instruments). This allows devices with two terminals (diodes) or three terminals (transistors) or even four or five terminals to be characterized safely and accurately. The Model
8010 has full interlock capability for up to six SourceMeter SMU instruments. The Model 8010 has
integrated protection circuits that protect the low voltage SourceMeter SMU instruments from high
voltages the Model 2657A can output should a device fault occur. The Model 8010 includes both a
high current (100A) and a high voltage (3000V) test socket. Various replacement test socket modules
are available, including TO-247, TO-220, axial lead, and a blank socket module that allows building
a custom socket. In addition to standard banana jumpers, the Model 8010 has rear-panel scope and
thermal probe ports to simplify system integration.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
High power SourceMeter SMU instrument
2657A High Power System
SourceMeter SMU
Instrument
8010 High Power Device
Test Fixture
Two Measurement Modes: Digitizing or Integrating
Precisely characterize transient and steady-state behavior, including rapidly changing thermal effects,
with the two measurement modes in the Model 2657A. Each mode is defined by its independent analog-to-digital (A/D) converters.
Current (A)
Ordering Information
A Tektronix Company
33
High Power System SourceMeter
SMU Instrument
Standard Capabilities of Series
2600B SMU instruments
Each Model 2657A includes all the features
and capabilities provided in Series 2600B
SourceMeter SMU instruments:
• Flexibility for use as either a bench-top
I-V characterization tool or as a building
block component of multiple channel I-V
test systems.
• TSP Express software to perform common I-V
tests quickly and easily without programming
or installing software.
• ACS Basic Edition software for semiconductor
component characterization (optional). ACS
Basic Edition now features a “Trace” mode for
generating a suite of characteristic curves.
• Keithley’s Test Script Processor (TSP)
technology supports creating and running
custom user test scripts for high speed test
automation, as well as creating programming
sequences that allow the instrument to
operate asynchronously without direct
PC control.
• Parallel test execution and precision timing
when multiple Series 2600B SMU instruments
are connected together in a system.
• LXI Class C compliance.
• 14 digital I/O lines for direct connection to a
probe station, component handler, or other
automation tools.
• USB port for extra data and test program
­storage via USB memory device.
Model 2657A Condensed Specifications
VOLTAGE ACCURACY SPECIFICATIONS 1
Source
Range
200 V
500 V
1500 V
3000 V
Programming
Resolution
  5 mV
10 mV
40 mV
80 mV
Accuracy
±(% rdg + volts)
0.03% +   50 mV
0.03% + 125 mV
0.03% + 375 mV
0.03% + 750 mV
Display
Resolution
100 µV
100 µV
  1 mV
  1 mV
Measure
Integrating ADC
Accuracy 2
±(% rdg + volts)
0.025% +   50 mV
0.025% + 100 mV
0.025% + 300 mV
0.025% + 600 mV
High Speed
ADC Accuracy 3
±(% rdg + volts)
0.05% + 100 mV
0.05% + 200 mV
0.05% + 600 mV
0.05% +   1.2 V
Display
Resolution
  1 fA
  10 fA
100 fA
  1 pA
  10 pA
100 pA
  1 nA
  1 nA
  10 nA
100 nA
Measure
Integrating ADC
Accuracy 2
±(% rdg + amps)
0.1% + 6E –13 + VoE –15
0.1% + 5E –12 + VoE –15
0.1% + 6E –11 + VoE –13
0.025% + 400 pA
0.025% +   1.5 nA
0.02  % +   25 nA
0.02  % + 200 nA
0.02  % + 500 nA
0.02  % +     5 µA
0.02  % +   24 µA
High Speed
ADC Accuracy 3
±(% rdg + amps)
0.2% + 6E –13 + VoE –15
0.2% + 5E –12 + VoE –15
0.2% + 6E –11 + VoE –13
0.08% + 800 nA
0.08% +    3 nA
0.05% +   50 nA
0.05% + 400 nA
0.05% +    1 µA
0.05% +   10 µA
0.05% +   50 µA
CURRENT ACCURACY SPECIFICATIONS 4
Source
Range
1 nA
10 nA
100 nA
1 µA
10 µA
100 µA
1 mA
2 mA
20 mA
120 mA
Programming
Resolution
  30 fA
300 fA
  3 pA
  30 pA
300 pA
  3 nA
  30 nA
  60 nA
600 nA
  3 µA
Accuracy
±(% rdg + amps)
0.1% + 2E –12 + VoE –15
0.1% + 5E –12 + VoE –15
0.1% + 6E –11 + VoE –13
0.03% + 700 pA
0.03% +     5 nA
0.03% +   60 nA
0.03% + 300 nA
0.03% +   1.2 µA
0.03% +   12 µA
0.03% +   36 µA
1. For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0.15 × accuracy specification)/°C.
2. Derate accuracy specification for NPLC setting <1 by increasing error term. Add appropriate typical percent of range term for resistive loads using the
table below.
NPLC
Setting
0.1
0.01
0.001
200 V and 500 V
Ranges
0.01%
0.08%
0.8 %
1500 V and 3000 V
Ranges
0.01%
0.07%
0.6 %
100 nA Range
0.01%
0.1 %
1   %
1 µA to 120 mA
Ranges
0.01%
0.05%
0.5 %
3. 18-bit ADC. Average of 1000 samples taken at 1µs intervals.
4. For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0.35 × accuracy specification)/°C.
Supplemental Characteristics
Typical Voltage Source Noise: 0.005% of range.
Typical Current Source Noise: 0.08% of range.
Typical Voltage Source Settling: <1ms to 200V, <7ms to 3000V.
Typical Current Source Settling: <5ms to 120mA, <200ms to 1µA.
SMU INSTRUMENTS
Specifications are subject to change without notice.
Model 8010 High Power Device Test Fixture
Model 2657A rear panel
1.888.KEITHLEY (U.S. only)
www.keithley.com
34
A Greater Measure of Confidence
A Tektronix Company
Model 2657A specifications
Model 2657A specifications
2657A
High Power System SourceMeter
SMU Instrument
TRIGGERING AND SYNCHRONIZATION SPECIFICATIONS
Triggering: Trigger In to Trigger Out: 0.5μs, typical.
Synchronization: Single- or multi-node synchronized source change: <0.5μs, typical.
Programming
System Expansion
The TSP-Link expansion interface allows TSP-enabled instruments to trigger and communicate
with each other. See figure below:
To Host Computer
USB: USB 2.1 Host Controller, supports external data storage.
Contact Check: ±50W.
PC Interface: IEEE-488.1 and .2; LXI Ethernet; RS-232.
Digital I/O Interface: Input/Output Pins: 14 open drain I/O bits. 5.25V max.
Power Supply: 100V to 250VAC, 50Hz–60Hz (auto sensing), 550VA max.
Cooling: Forced air. Side and top intake and rear exhaust.
EMC: Conforms to European Union EMC Directive.
Safety: ETL listed (PENDING). Conforms to European Union Low Voltage Directive.
Warranty: 1 year.
Dimensions: 89mm high × 435mm wide × 549mm deep (3.5 in × 17.1 in × 21.6 in). Bench
Configuration (with handle and feet): 104mm high × 483mm wide × 620mm deep (4.1 in
× 19 in × 24.4 in).
Weight: 9.98kg (22 lbs).
Environment: For indoor use only.
Calibration Period: One year.
Node 1
Node 2
To Nodes 3–32
SMU INSTRUMENTS
Model 2657A specifications
Test Script Builder: Integrated development environment for building, running, and
managing TSP scripts.
TSP Express (Embedded): Tool that allows users to perform common I-V tests quickly and easily
without programming or installing software.
Software Interface: TSP Express (Embedded), Direct GPIB/VISA, Read/Write with VB,
VC/C++, VC#, LabVIEW™, TestPoint™, LabWindows™/CVI, etc.
General
Model 2657A specifications
2657A
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
35
SourceMeter® SMU Instrument
The Model 2450 is Keithley’s next-generation SourceMeter source measure
unit (SMU) Instrument that truly brings Ohm’s law (current, voltage, and
resistance) testing right to your fingertips. Its innovative graphical user
interface (GUI) and advanced, capacitive touchscreen technology allow
intuitive usage and minimize the learning curve to enable engineers and
scientists to learn faster, work smarter, and invent easier. The 2450 is the
SMU for everyone: a versatile instrument, particularly well-suited for characterizing modern scaled semiconductors, nano-scale devices and materials, organic semiconductors, printed electronics, and other small-geometry
and low-power devices. All this combined with Keithley SMU precision and
accuracy allow users to Touch, Test, InventTM with the new favorite go-to
instrument in the lab for years to come.
• Capabilities of analyzers, curve
tracers, and I-V systems at a
fraction of their cost.
• Five-inch, high resolution
capacitive touchscreen GUI
• 0.012% basic measure accuracy
with 6½-digit resolution
• Enhanced sensitivity with
new 20mV and 10nA source/
measure ranges
Learn Faster, Work Smarter, Invent Easier
Unlike conventional instruments with dedicated pushbutton technology and small, obscure, limited-character displays, the 2450 features a five-inch, full-color, high resolution touchscreen that facilitates ease of use, learning, and optimizes overall speed and productivity. A simple icon-based menu
structure reduces configuration steps by as much as 50 percent and eliminates the cumbersome
multi-layer menu structures typically used on soft-key instruments. Built-in, context-sensitive help
enables intuitive operation and minimizes the need to review a separate manual. These capabilities
combined with its application versatility make the 2450 the SMU instrument inherently easy to use
for basic and advanced measurement applications, regardless of your experience level with SMU
instruments.
• Source and sink (4-quadrant)
operation
• Four “Quickset” modes for fast
setup and measurements
• Built-in, context-sensitive front
panel help
• Front panel input banana
jacks; rear panel input triaxial
connections
• 2450 SCPI and TSP® scripting
programming modes
SMU INSTRUMENTS
• Model 2400 SCPI-compatible
programming mode
• Front panel USB memory
port for data/programming/
configuration I/O
2450 main home screen.
View of 2450 menu.
Fourth-Generation,
All-in-One SMU Instrument
The 2450 is the fourth-generation member of
Keithley’s award-winning SourceMeter family
of SMU instruments and leverages the proven
capabilities of the Model 2400 SourceMeter SMU
Instrument. It offers a highly flexible, four-quadrant voltage and current source/load coupled with
precision voltage and current meters. This all-inone instrument can be used as a:
• Precision power supply with V and I readback
• True current source
• Digital multimeter (DCV, DCI, ohms, and
power with 6½-digit resolution).
• Precision electronic load
Quad. II
+100mA
-200V
-20V
+20V
+200V
-100mA
Quad. III
-1A
Quad. IV
2450 power envelope.
• Trigger controller
1.888.KEITHLEY (U.S. only)
www.keithley.com
36
Quad. I
+1A
A Greater Measure of Confidence
A Tektronix Company
Model 2450 SourceMeter® SMU Instrument
Model 2450 SourceMeter® SMU Instrument
2450
Ordering Information
200V, 1A, 20W
SourceMeter Instrument
2450-NFP200V, 1A, 20W
SourceMeter Instrument,
with No Front Panel
2450-RACK
200V, 1A, 20W
SourceMeter Instrument,
without Handle
2450-NFP-RACK
200V, 1A, 20W
SourceMeter Instrument,
with No Front Panel
and No Handle
Accessories Supplied
8608
High Performance
Test Leads
USB-B-1USB Cable, Type A to
Type B, 1m (3.3 ft)
CS-1616-3Safety Interlock
Mating Connector
CA-180-3ATSP-Link/Ethernet Cable
Documentation CD
2450 QuickStart Guide
Test Script Builder Software
(supplied on CD)
KickStart Startup Software
(supplied on CD)
LabVIEW and IVI Drivers
available at www.keithley.com
Model 2400
V-Ranges: 200mV – 200V
I-Ranges: 1μA – 1A
0.012% Basic Accuracy
Wideband Noise: 4mVrms Typ.
Sweep Types:
Linear, Log, Custom,
Source-Memory
5000 Point Reading Buffer
>2000 Readings/Sec.
SCPI Programming
GPIB
Front/Rear Banana Jacks
Model 2450
V-Ranges: 20mV – 200V
I-Ranges: 10nA – 1A
0.012% Basic Accuracy
Wideband Noise: 2mVrms Typ.
Sweep Types:
Linear, Log, Dual Linear, Dual Log, Custom,
Source-Memory (SCPI 2400 Mode)
>250,000 Point Reading Buffer
>3000 Readings/Sec.
SCPI (2400 + 2450) + TSP Programming
GPIB, USB, Ethernet (LXI)
Front: Banana Jacks, Rear: Triax
Comparison of Model 2400 vs Model 2450.
Ease of Use Beyond the Touchscreen
In addition to its five-inch, color touchscreen, the 2450 front panel has many features that supplement its speed, user-friendliness, and learnability, including a USB 2.0 memory I/O port, a HELP key,
a rotary navigation/control knob, a front/rear input selector button, and banana jacks for basic bench
applications. The USB 2.0 memory port supports easy data storing, saving instrument configurations,
loading test scripts, and system upgrades. Plus, all front panel buttons are backlit to enhance visibility
in low-light environments.
5˝ color graphical touchscreen display
Rotary
navigation/
control knob
Online
HELP key
USB 2.0
memory I/O
Front/rear
input selector
Model 2450 front panel with high resolution, capacitive touchscreen.
Four “Quickset” modes simplify user setup. With one touch, the instrument can be quickly configured for various operating modes without the need to configure the instrument indirectly for this
operation.
Comprehensive Built-in Connectivity
Rear panel access to rear-input triax connectors,
remote control interfaces (GPIB, USB 2.0, and
LXI/Ethernet), D-sub 9-pin digital I/O port (for
internal/external trigger signals and handler
control), instrument interlock control, and
TSP-Link® jacks enables easy configuration of
multiple instrument test solutions and eliminates the need to invest in additional adapter accessories.
Quickset modes enable fast setup and time
to measurements.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Model 2450 SourceMeter® SMU Instrument
2450
SourceMeter® SMU Instrument
Model 2450 SourceMeter® SMU Instrument
2450
A Tektronix Company
37
2450
SourceMeter® SMU Instrument
Interlock
Triax inputs
TYPICAL APPLICATIONS
• Nanomaterials and Devices
–– Graphene
–– Carbon nanotubes
–– Nanowires
–– Low power nanostructures
Ethernet
USB Digital I/O
TSP-Link
GPIB
Rear panel connections are optimized for signal integrity.
Convert Raw Data to Information
The 2450 provides a full plotting and sheet view to display sweeps,
­measurement data, and charting right on the screen. It also supports
exporting to a spreadsheet for further analysis, dramatically improving productivity for research, bench-top testing, device qualification,
and ­debugging.
Model 2450 SourceMeter® SMU Instrument
Model 2450 SourceMeter® SMU Instrument
Ideal for current/voltage characterization and
functional test of a wide range of today’s modern
electronics and devices, including:
• Semiconductor Structures
–– Wafers
–– Thin films
• Organic Materials and Devices
–– E-inks
–– Printable electronics
• Energy Efficiency and Lighting
–– LEDs/AMOLEDs
–– Photovoltaics/Solar Cells
–– Batteries
• Discrete and Passive Components
–– Two-leaded: Resistors, diodes,
zener diodes, LEDs, disk drive
heads, sensors
–– Three-leaded: Small signal
bipolar junction transistors
(BJTs), field effect transistors
(FETs), and more
• Material Characterization
–– Resistivity
–– Hall Effect
SMU INSTRUMENTS
TriggerFlow™ Building Blocks for
Instrument Control and Execution
The 2450 incorporates Keithley’s new TriggerFlow triggering system
that allows user control of instrument execution. Similar to developing
a flow chart, TriggerFlow diagrams are created using four fundamental
­building blocks:
• Wait – Waits for an event to occur before the flow continues
• Branch – Branches when a condition has been satisfied
• Action – Initiates an action in the instrument, for example, measure,
source, delay, set digital I/O, etc.
• Notify – Notifies other equipment that an event has occurred
Full data display, charting, and export to a spreadsheet lets you
convert raw data to useful information.
1.888.KEITHLEY (U.S. only)
www.keithley.com
38
A Greater Measure of Confidence
A Tektronix Company
Parallel Test Capability
With the TSP technology in the 2450, multiple devices can be tested in
parallel to meet the needs of device research, advanced semiconductor
lab applications, and even high throughput production test. This parallel
testing capability enables each instrument in the system to run its own
complete test sequence, creating a fully multi-threaded test environment.
The number of tests that can be run in parallel on a 2450 can be as high as
the number of instruments in the system.
TriggerFlow building blocks let users create very simple to very
­complex triggering models.
A TriggerFlow model using a combination of these building blocks can be
created from the front panel or by sending remote commands. With the
TriggerFlow system, users can build triggering models from very simple to
complex with up to 255 block levels. The 2450 also includes basic triggering functions, including immediate, timer, and manual triggering.
Unmatched System Integration and
Programming Flexibility
When the 2450 is integrated as part of a multi-channel I-V test system, the
Test Script Processor (TSP®) embedded scripting capability allows test
scripts to be run by the instrument, enabling the user to create powerful
measurement applications with significantly reduced development times.
TSP technology also offers channel expansion without a mainframe.
Keithley’s TSP-Link® channel expansion bus, which uses a 100 Base T
Ethernet cable, connects multiple 2450 instruments and other TSP instruments such as Keithley’s Series 2600B SourceMeter SMU instruments and
Series 3700A Switch/Multimeter systems in a master-slave configuration
that behaves as one integrated system. The TSP-Link expansion bus
­supports up to 32 units per GPIB or IP address, making it easy to scale a
system to fit an application’s particular requirements.
Free Instrument Control Start-up
Software and Web Interface
KickStart, Keithley’s new instrument control non-programming start-up
software, lets users start taking measurements in minutes. In most cases,
users merely need to make quick measurements, graph the data, and
store the data to disk to perform analysis in software environments such
as Excel.
KickStart offers the following functionality:
• Instrument configuration control to perform I-V characterization
• Native X-Y graphing, panning, and zooming
• Spreadsheet/tabular viewing of data
• Saving and exporting data for further analysis
• Saving of test setups
• Screenshot capturing of graph
• Annotation of tests
• Command line dialog for sending and receiving data
• HTML help
• GPIB, USB 2.0, Ethernet compliant
Model 2450 SourceMeter® SMU Instrument
SourceMeter® SMU Instrument
The 2450 also includes a SCPI programming mode that optimizes the
instrument’s new features, as well as a SCPI 2400 mode that provides
backwards compatibility with the existing Model 2400 SourceMeter
instrument. Not only does this preserve your 2400 investment, but it also
eliminates re-work normally associated with upgrading to a new instrument with new capabilities.
With KickStart start-up software, users are ready to take
­measurements in minutes.
Simplified Programming with
Ready-to-Use Instrument Drivers
For users who want to create their own customized application software,
native National Instruments LabVIEW® drivers, IVI-C, and IVI-COM
­drivers are available at www.keithley.com.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Model 2450 SourceMeter® SMU Instrument
2450
A Tektronix Company
39
Accessories Available
Model 2450 specifications
Test Leads and Probes
1754
2-wire Universal 10-Piece Test Lead Kit
5804
Kelvin (4-Wire) Universal 10-Piece Test Lead Kit
5805 Kelvin (4-Wire) Spring-Loaded Probes
5806 Kelvin Clip Lead Set
5808 Low Cost Single-pin Kelvin Probe Set
5809 Low Cost Kelvin Clip Lead Set
8605 High Performance Modular Test Leads
8606
High Performance Modular Probe Kit
8608
High Performance Clip Lead Set
Cables, Connectors, Adapters
237-ALG-2
3-slot Male Triax Connector to 3 Alligator Clips
237-BAN-3A
Triax to Banana Plug
2450-TRX-BAN Triax to Banana Adapter. Converts the 4 Triax
adapters on the rear panel to 5 banana jacks
7078-TRX-*
3-slot, Low Noise Triax Cable
7078-TRX-GND 3-slot Male Triax To BNC Adapter
(guard removed)
8607
2-wire, 1000V Banana Cables, 1m (3.3 ft)
CA-18-1 Shielded Dual Banana Cable, 1.2m (4 ft)
CAP-31 Protective Shield/Cap for 3-lug Triax Connectors
CS-1546 Triax 3-lug Special Shorting Plug. Shorts center
pin to outer shield
CS-1616-3 Safety Interlock Mating Connector
Communication Interfaces & Cables
KPCI-488LPA IEEE-488 Interface for PCI Bus
KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter
7007-1 Shielded GPIB Cable, 1m (3.3 ft)
7007-2 Shielded GPIB Cable, 1m (6.6 ft)
CA-180-3A CAT5 Crossover Cable for TSP-Link/Ethernet
USB-B-1 USB Cable, Type A to Type B, 1m (3.3 ft)
Triggering
2450-TLINK
8501-1
8501-2
and Control
DB-9 to Trigger Link Connector Adapter.
Trigger Link Cable, DIN-to-DIN, 1m (3.3 ft)
Trigger Link Cable, DIN-to-DIN, 2m (6.6 ft)
Rack Mount Kits
4299-8 Single Fixed Rack Mount Kit
Dual Fixed Rack Mount Kit
4299-9 4299-10
Dual Fixed Rack Mount Kit. Mount one 2450
and one Series 26xxB
Dual Fixed Rack Mount Kit. Mount one 2450
4299-11 and one Series 2400, Series 2000, etc.
2450-BenchKit Ears and Handle for 2450-NFP-RACK and
2450-RACK models
SMU INSTRUMENTS
Test Fixtures
8101-PIV DC Test Fixture
Services Available
2450-3Y-EW
1 Year Factory Warranty extended to 3 years
from date of shipment
2450-5Y-EW
1 Year Factory Warranty extended to 5 years
from date of shipment
C/2450-3Y-17025KeithleyCare® 3 Year ISO 17025 Calibration Plan
C/2450-3Y-DATA KeithleyCare 3 Year Calibration w/Data Plan
C/2450-3Y-STD KeithleyCare 3 Year Std. Calibration Plan
C/2450-5Y-17025 KeithleyCare 5 Year ISO 17025 Calibration Plan
C/2450-5Y-DATA KeithleyCare 5 Year Calibration w/Data Plan
C/2450-5Y-STD KeithleyCare 5 Year Std. Calibration Plan
SourceMeter® SMU Instrument
Voltage Specifications1,2
Source
Range
20.00000 mV
200.0000 mV
2.000000 V
20.00000 V
200.0000 V
Measure3
Accuracy (23° ± 5°C) Noise
1 Year
(RMS)
Resolution ±(% setting + volts) (<10Hz)
500 nV
0.100% + 200 μV
1 μV
1 μV
5 μV
0.015% + 200 μV
10 μV
50 μV
0.020% + 300 μV
500 μV
0.015% + 2.4 mV
100 μV
5 mV
0.015% +   24 mV
1 mV
Input
Resolution Resistance
10 nV
>10 GW
100 nV
>10 GW
1 μV
>10 GW
10 μV
>10 GW
100 μV
>10 GW
Current Specifications1,2
Source
Range
10.00000 nA5
100.0000 nA5
1.000000 μA
10.00000 μA
100.0000 μA
1.000000 mA
10.00000 mA
100.0000 mA
1.000000 A
Measure3
Accuracy (23° ±5°C) 4 Noise
(RMS)
1 Year
Resolution ±(% setting + amps) (<10Hz)
500 fA
0.100% + 100 pA
500 fA
5 pA
0.060% + 150 pA
500 fA
50 pA
0.025% + 400 pA
5 pA
500 pA
0.025% +  1.5 nA
40 pA
0.020% +   15 nA
400 pA
5 nA
50 nA
0.020% + 150 nA
5 nA
40 nA
500 nA
0.020% +  1.5 μA
0.025% +   15 μA
100 nA
5 μA
50 μA
0.067% + 900 μA
3 μA
Resolution
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 μA
Voltage
Burden
<100 μV
<100 μV
<100 μV
<100 μV
<100 μV
<100 μV
<100 μV
<100 μV
<100 μV
Accuracy (23° ±5°C)
1 Year
±(% rdg. + amps)
0.100% +   50 pA
0.060% + 100 pA
0.025% + 300 pA
0.025% + 700 pA
0.020% +    6 nA
0.020% +   60 nA
0.020% + 600 nA
0.025% +    6 μA
0.030% + 500 μA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C): ±(0.15 × accuracy specification)/°C.
1. Speed = 1 PLC.
2. All specifications are guaranteed with output ON.
3. Accuracies apply to 2- and 4-wire mode when properly zeroed.
4. For sink mode, 1μA to 100mA range accuracy is ±(0.15% + offset × 4). For 1A range, accuracy is ±(1.5% + offset × 8).
5. Rear panel triax connections only.
Resistance Measurement Accuracy (Local or Remote Sense) 2,3
Range
<2.000000 W8
20.00000 W
200.0000 W
2.000000 kW
20.00000 kW
200.0000 kW
2.000000 MW
20.00000 MW
200.0000 MW
>200.0000 MW8
Default
Resolution6
1 μW
10 μW
100 μW
1 mW
10 mW
100 mW
1 W
10 W
100 W
—
Default
Test Current
User defined
100 mA
10 mA
1 mA
100 μA
10 μA
1 μA
1 μA
100 nA
User defined
Normal Accuracy
(23°C ±5°C)
1 Year, ±(% rdg. + ohms)
Source I ACC + Meas. VACC
0.098% + 0.003 W
0.077% +   0.03 W
0.066% +    0.3 W
0.063% +     3 W
0.065% +    30 W
0.110% +   300 W
0.110% +     1 kW
0.655% +    10 kW
Source I ACC + Meas. VACC
Enhanced Accuracy 7
(23°C ±5°C)
1 Year, ±(% rdg. + ohms)
Meas. I ACC + Meas. VACC
0.073% + 0.001 W
0.053% +   0.01 W
0.045% +    0.1 W
0.043% +     1 W
0.046% +    10 W
0.049% +   100 W
0.052% +   500 W
0.349% + 5k W
Meas. I ACC + Meas. VACC
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C): ±(0.15 × accuracy specification)/°C.
SOURCE CURRENT, MEASURE RESISTANCE MODE:
Total uncertainty = Isource accuracy + Vmeasure accuracy (4-wire remote sense).
SOURCE VOLTAGE, MEASURE RESISTANCE MODE:
Total uncertainty = Vsource accuracy + Imeasure accuracy (4-wire remote sense).
GUARD OUTPUT IMPEDANCE: 0.5W (DC) in ohms mode.
6. 6.5 digit measure resolution
7. Source readback enabled. Offset compensation ON.
8. Source Current, Measure Resistance or Source Voltage, Measure Resistance only.
1.888.KEITHLEY (U.S. only)
www.keithley.com
40
Accuracy (23° ± 5°C)
1 Year
±(% rdg. + volts)
0.100% + 150 μV
0.012% + 200 μV
0.012% + 300 μV
0.015% +    1 mV
0.015% +   10 mV
A Greater Measure of Confidence
A Tektronix Company
Model 2450 specifications
2450
2450
SourceMeter® SMU Instrument
20W, four-quadrant source or sink operation.
Vsource: ±21V (≤ 1A range), ±210V (≤ 100mA range)
Isource: ±1.05A (≤ 20V range), ±105mA (≤ 200V range)
105% of range, source and measure.
Voltage: Line: 0.01% of range. Load: 0.01% of range + 100µV.
Current: Line: 0.01% of range. Load: 0.01% of range + 100pA.
Voltage Source Current Limit: Bipolar current limit set with single value. Min. 10% of range.
Current Source Voltage Limit: Bipolar voltage limit set with single value. Min. 10% of range.
Add 0.3% of setting and ±0.02% of reading to base specification.
Voltage Source: <0.1% typical (full scale step, resistive load, 20V range, 10mA I-Limit.
Current Source: <0.1% typical (1mA step, R Load = 10kW, 20V range)
Overshoot into a fully resistive 100kW load, 10Hz to 20MHz BW, adjacent ranges: 250mV typical
Time required to reach 0.1% of final value, 20V range, 100mA I-Limit: <200µs typical.
0.2V/μs, 200V range, 100mA limit into a 2kW load (typical)
User selectable values, 5% tolerance. Factory default = none.
10Hz–1MHz (RMS): 2mV typical into a resistive load.
250V DC.
>1GW, <1000pF.
LOAD IMPEDANCE: 20nF typical (standard). Stable into 50μF typical (High-C mode).
High-C mode valid for ≥100µA ranges, ≥200mV ranges.
NPLC
0.01
0.1
1
NMRR
—
—
60 dB
Model 2450 specifications
MAX. OUTPUT POWER: SOURCE LIMITS:
OVERRANGE: REGULATION:
SOURCE LIMITS:
V-LIMIT / I-LIMIT ACCURACY: OVERSHOOT:
RANGE CHANGE OVERSHOOT:
OUTPUT SETTLING TIME:
MAXIMUM SLEW RATE: OVER VOLTAGE PROTECTION: VOLTAGE SOURCE NOISE:
COMMON MODE VOLTAGE: COMMON MODE ISOLATION: NOISE REJECTION (typical):
CMRR
60 dB
60 dB
100 dB*
* Except lowest two current ranges ~90dB.
MAX. VOLTAGE DROP BETWEEN FORCE and SENSE TERMINALS: 5V.
MAX. SENSE LEAD RESISTANCE: 1MW for rated accuracy.
SENSE INPUT IMPEDANCE: >10GW.
GUARD OFFSET VOLTAGE: <300µV, typical
System Measurement Speeds 9
Reading Rates (readings/second) typical FOR 60Hz (50Hz):
SCRIPT (TSP) Programmed
NPLC/Trigger Origin
To Mem.
0.01 / Internal
3130 (2800)
0.01 / External
2170 (2050)
0.1  / Internal
540 (460)
0.1  / External
500 (430)
1.00 / Internal
59 (49)
1.00 / External
58 (48)
SCPI Programmed 10
NPLC/Trigger Origin
To Mem.
0.01 / Internal
3130 (2800)
0.01 / External
2350 (2200)
0.1  / Internal
540 (460)
0.1  / External
510 (440)
1.00 / Internal
59 (49)
1.00 / External
58 (49)
Measure
To GPIB
2830 (2570)
2150 (2030)
530 (450)
490 (420)
58 (49)
57 (48)
To USB
2825 (2600)
2170 (2040)
530 (450)
500 (430)
59 (49)
58 (48)
Source-Measure Sweep
To LAN
2790 (2530)
2160 (1990)
530 (450)
500 (420)
59 (49)
58 (48)
To Mem.
1710 (1620)
1670 (1590)
470 (410)
470 (400)
58 (48)
57 (48)
Measure
To GPIB
3060 (2760)
2320 (2170)
540 (450)
510 (430)
59 (49)
58 (49)
To USB
3000 (2790)
2340 (2190)
540 (460)
510 (440)
59 (49)
58 (49)
To GPIB
1620 (1540)
1580 (1500)
460 (400)
460 (390)
58 (48)
57 (47)
To USB
1630 (1540)
1590 (1510)
470 (400)
460 (400)
58 (48)
57 (48)
To LAN
1620 (1540)
1580 (1510)
470 (400)
460 (400)
58 (48)
57 (48)
Source-Measure Sweep
To LAN
3010 (2710)
2320 (2130)
540 (450)
510 (430)
59 (49)
58 (49)
To Mem.
1710 (1630)
1680 (1590)
470 (410)
470 (400)
58 (48)
58 (48)
To GPIB
1610 (1600)
1560 (1570)
470 (410)
470 (400)
58 (48)
58 (48)
To USB
1440 (1380)
1410 (1360)
450 (390)
450 (390)
57 (48)
57 (47)
To LAN
1690 (1590)
1660 (1560)
470 (410)
470 (400)
58 (48)
58 (48)
SMU INSTRUMENTS
Model 2450 specifications
OPERATING CHARACTERISTICS
9. Reading rates applicable for voltage or current measurements, autozero off, autorange off, filter off, binary reading format, and source readback off.
10. SCPI programming mode. Speeds do not apply to SCPI 2400 mode.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
41
2450
SourceMeter® SMU Instrument
1.888.KEITHLEY (U.S. only)
www.keithley.com
42
A Greater Measure of Confidence
A Tektronix Company
Model 2450 specifications
COOLING: Forced air, variable speed.
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in standby mode.
POWER SUPPLY: 100V to 240V RMS, 50–60Hz (automatically detected at power up).
VA RATING: 190 volt-amps max.
ALTITUDE: Maximum 2000 meters above sea level.
EMC: Conforms to European Union EMC Directive.
SAFETY: NRTL listed to UL61010-1 and UL61010-2-30. Conforms with European Union Low
Voltage Directive.
VIBRATION: MIL-PRF-28800F Class 3 Random.
WARM-UP: 1 hour to rated accuracies.
DIMENSIONS: (With handle and bumpers): 106mm high × 255mm wide × 425mm deep
(4.18 in × 10.05 in × 16.75 in). (Without handle and bumpers): 88mm high × 213mm wide
× 403mm deep (3.46 in × 8.39 in × 15.87 in).
WEIGHT: With bumpers & handle: 4.04 kg (8.9 lbs.). Without bumpers & handle 3.58 kg (7.9 lbs.).
ENVIRONMENT: Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
ACCESSORIES SUPPLIED: Test Leads, USB Cable, Ethernet/TSP Cable, Interlock Adapter, Power
Cord, Quick Start Guide, CD User’s Manual.
SMU INSTRUMENTS
Model 2450 specifications
GENERAL CHARACTERISTICS (default mode unless specified)
FACTORY DEFAULT STANDARD POWER-UP: SCPI Mode.
SOURCE OUTPUT MODES: Fixed DC Level, Memory/Configuration
List (mixed function), Stair (linear and log).
SOURCE MEMORY LIST: 100 points max. (SCPI 2400 Mode only).
MEMORY BUFFER: >250,000 readings. Includes selected measured value(s)
and time stamp.
REAL-TIME CLOCK: Lithium battery backup (3 yr. + battery life).
REMOTE INTERFACES:
GPIB: IEEE-488.1 compliant. Supports IEEE-488.2 common commands
and status model topology.
USB Device (rear panel, type B): 2.0 Full Speed USBTMC.
USB Host (front panel, type A): USB 2.0, support for flash drives, FAT32.
Ethernet: RJ-45 (10/100BT)
PROGRAMMABILITY: SCPI or TSP command sets.
TSP Mode: Embedded Test Script Processor (TSP) accessible from any host interface.
IP CONFIGURATION: Static or DHCP
EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled
instruments to trigger and communicate with each other.
LXI COMPLIANCE: 1.4 LXI Core 2011.
DISPLAY: 5 inch capacitive touch, color TFT WVGA (800x480) with LED backlight.
INPUT SIGNAL CONNECTIONS: Front: Banana. Rear: Triaxial (3-Lug)
INTERLOCK: Active High Input
DIGITAL I/O INTERFACE:
Lines: 6 Input/Output user defined for digital I/O or triggering
Connector: 9-pin female D
Input Signal Levels: 0.7 V (maximum logic low), 3.7 V (minimum logic high)
Input Voltage Limits: -0.25 V (Abs. minimum), +5.25 V (Abs. maximum)
Maximum Source Current: +2.0 mA @ >2.7 V (per pin)
Maximum Sink Current: -50 mA @ 0.7 V (per pin, solid-state fuse protected)
5 V Power Supply Pin: Limited to 500 mA @ >4V (solid-state fuse protected)
Handler: User definable Start of Test, End of Test, 4 category bits
SourceMeter SMU Instruments
Keithley’s Series 2400 Source Measure Unit (SMU) Instruments
are designed specifically for test applications that demand tightly
coupled sourcing and measurement. All SourceMeter models
provide precision voltage and current sourcing as well as measurement capabilities. Each SourceMeter SMU instrument is both
a highly stable DC power source and a true instrument-grade
6½-digit multimeter. The power source characteristics include
low noise, precision, and readback. The multimeter capabilities
include high repeatability and low noise. The result is a compact,
single-channel, DC parametric tester. In operation, these instruments can act as a voltage source, a current source, a voltage
meter, a current meter, and an ohmmeter. Manufacturers of
components and modules for the communications, semiconductor, computer, automotive, and medical industries will find the
SourceMeter SMU instruments invaluable for a wide range of
characterization and production test applications.
• Five instruments in one
(IV Source, IVR Measure)
• Seven models: 20–100W DC,
1000W pulsed, 1100V to 1µV,
10A to 10pA
• Source and sink (4-quadrant)
operation
• 0.012% basic measure accuracy
with 6½-digit resolution
• 2-, 4-, and 6-wire remote
V-source and measure sensing
• 1700 readings/second at
4½ digits via GPIB
• Pass/Fail comparator for fast
sorting/binning
• Available high speed sense lead
contact check function
• Programmable DIO port for
automation/handler/prober
control (except Model 2401)
• Standard SCPI GPIB, RS-232 and
Keithley Trigger Link interfaces
• Keithley LabTracer 2.0 I-V curve
tracing application software
(download)
Advantages of a Tightly Integrated Instrument
By linking source and measurement circuitry in a single unit,
these instruments offer a variety of advantages over systems
configured with separate source and measurement instruments.
For example, they minimize the time required for test station
development, setup, and maintenance, while lowering the overall
cost of system ownership. They simplify the test process itself
by eliminating many of the complex synchronization and connection issues associated with using
multiple instruments. And, their compact half-rack size conserves precious “real estate” in the test
rack or bench.
Power of Five Instruments in One (IV Source, IVR Measure)
The tightly coupled nature of a SourceMeter SMU instrument provides many advantages over solutions configured from separate instruments, such as a precision power supply and a digital multimeter. For example, it provides faster test times by reducing GPIB traffic and simplifies the remote programming interface. It also protects the device under test from damage due to accidental overloads,
thermal runaway, etc. Both the current and voltage source are programmable with readback to help
maximize device measurement integrity. If the readback reaches a programmed compliance limit,
then the source is clamped at the limit, providing fault protection.
Tightly coupled precision sourcing and measurement
®
ACCESSORIES AVAILABLE
TEST LEADS
1754
5804
5805
5808
5809
8607
CA-18-1
AND PROBES
2-Wire Universal 10-Piece Test Lead Kit
Kelvin (4-Wire) Universal 10-Piece Test Lead Kit
Kelvin (4-Wire) Spring-Loaded Probes
Low Cost Single-pin Kelvin Probe Set
Low Cost Kelvin Clip Lead Set
2-Wire, 1000V Banana Cables, 1m (3.3 ft)
Shielded Dual Banana Cable, 1.2m (4 ft)
SWITCHING
7001
7002
7019-C
7053
HARDWARE
Two-Slot Switch System
Ten-Slot Switch System
6-Wire Ohms Switch Card
High-Current Switch Card
CABLES/ADAPTERS
7007-1
Shielded GPIB Cable, 1m (3.3 ft)
7007-2
Shielded GPIB Cable, 2m (6.6 ft)
7009-5
RS-232 Cable
8620
Shorting Plug
Communication Interface
KPCI-488LPA IEEE-488 Interface/Controller for the PCI Bus
KUSB-488B
IEEE-488 USB-to-GPIB Interface Adapter
Triggering and Control
2499-DIGIO Digital I/O Expander Assembly
(not for Model 2401)
8501-1
Trigger Link Cable, DIN-to-DIN, 1m (3.3 ft)
8501-2
Trigger Link Cable, DIN-to-DIN, 2m (6.6 ft)
8502
Trigger Link to BNC Breakout Box
8503
Trigger Link Cable, DIN-to-Dual BNC, 1m (3.3 ft)
8505
Male to 2-Female Y-DIN Cable for Trigger Link
RACK MOUNT KITS
4288-1
Single Fixed Rack Mount Kit
4288-2
Dual Fixed Rack Mount Kit
4288-4
Dual Fixed Rack Mount Kit
4288-5
Shelf Type Side by Side Rack Mounting Kit
4288-9
Dual Fixed Rack Mounting Kit
Software
LabTracer 2.0 Curve Tracing Software (downloadable)
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Tightly coupled precision sourcing and measurement
Series 2400
A Tektronix Company
43
Ordering Information
SMU INSTRUMENTS
Tightly coupled precision sourcing and measurement
2400
200V, 1A, 20W
SourceMeter SMU
Instrument
2400-C 200V, 1A, 20W
SourceMeter SMU
Instrument with Contact
Check
2401 20V, 1A, 20W SourceMeter
SMU Instrument
2410 1100V, 1A, 20W
SourceMeter SMU
Instrument
2410-C 1100V, 1A, 20W
SourceMeter SMU
Instrument with Contact
Check
2420 60V, 3A, 60W SourceMeter
SMU Instrument
2420-C 60V, 3A, 60W SourceMeter
SMU Instrument with
Contact Check
2425 100V, 3A, 100W
SourceMeter SMU
Instrument
2425-C 100V, 3A, 100W
SourceMeter SMU
Instrument with Contact
Check
2430 100V, 10A, 1000W
Pulse Mode SourceMeter
SMU Instrument
2430-C 100V, 10A, 1000W
Pulse Mode SourceMeter
SMU Instrument with
Contact Check
2440 40V, 5A, 50W SourceMeter
SMU Instrument
2440-C 40V, 5A, 50W SourceMeter
SMU Instrument with
Contact Check
Accessories Supplied
Model 8605 Test Leads
LabVIEW Software Driver
­(downloadable)
LabTracer Software
­(downloadable)
SourceMeter SMU Instruments
®
I-V Characteristics
All SourceMeter SMU instruments provide four-quadrant operation. In the first and third quadrants
they o­ perate as a source, delivering power to a load. In the second and fourth quadrants they operate as a sink, d­ issipating power internally. Voltage, current, and resistance can be measured during
source or sink ­operation.
Imeter
Local
IN/OUT HI
Remote
SENSE HI
Imeter/Compliance
Isource
IN/OUT HI
Remote
SENSE HI
Remote
SENSE LO
Local
IN/OUT LO
Vmeter
Vsource
DUT
DUT
Feedback to
Adjust Vsource
Vmeter/Compliance
Remote
SENSE LO
Local
IN/OUT LO
Source I–Measure V, I, or W configuration
Source V–Measure I, V, or W configuration
Series 2400 SourceMeter SMU Instruments
+1A
Model 2400
SourceMeter
SMU Instrument
–200V
+100mA
–20V
+20V
2400
only
+1A
Model 2401
Low-Voltage
SourceMeter
SMU Instrument
+200V
–200V
+100mA
–20V
+20V
2400
only
Duty cycle limited
Duty cycle limited
–1A
–1A
Model 2410
High-Voltage
SourceMeter
SMU Instrument
Model 2420
3A SourceMeter
SMU Instrument
+1A
+20V
Model 2425
100W SourceMeter
SMU Instrument
+200V +1100V
–60V
–20mA
Model 2430
1kW Pulse Mode
SourceMeter
SMU Instrument
+20V
+100mA
+60V
–100V
+10A
+3A
+1A
–3A
+100V
–1A
–1A
Duty cycle
limited
+20 +60
–100mA
Duty cycle
limited
–3A
Duty cycle
limited
5A
Model 2440
5A SourceMeter
SMU Instrument
3A
1A
+100mA
–100V –60 –20
–60 –20
–100mA
–100mA
–1A
–20V
+3A
+1A
+100mA
+20mA
–20V
+3A
+1A
+200mA
–1100V –200V
+200V
–100mA
–100mA
+20 +60 +100V
100mA
–40V
–10V
+10V
+40V
–100mA
–100mA
–1A
–1A
–3A
–3A
Duty cycle limited
Pulse mode only
–10A
1.888.KEITHLEY (U.S. only)
www.keithley.com
44
Local
A Greater Measure of Confidence
–5A
Duty cycle limited
A Tektronix Company
Tightly coupled precision sourcing and measurement
Series 2400
SourceMeter SMU Instruments
®
Standard and Custom Sweeps
Sweep solutions greatly accelerate testing with
automation hooks. Three basic sweep waveforms
are provided that can be programmed for single-event or continuous operation. They are ideal
for I/V, I/R, V/I, and V/R characterization.
• Linear Staircase Sweep: Moves from the start
level to the stop level in equal linear steps
• Logarithmic Staircase Sweep: Done on a
log scale with a specified number of steps
per decade
• Custom Sweep: Allows construction of
special sweeps by specifying the number of
measurement points and the source level at
each point
• Up to 1700 readings/second at 4½ digits to
the GPIB bus
• 5000 readings can be stored in the nonvolatile buffer memory
Stop
Start
Bias
Bias
Linear staircase sweep
Stop
Start
Bias
Bias
Logarithmic staircase sweep
Start
Stop
User
defined
steps
Built-In Test Sequencer
Bias
Bias
(Source Memory List)
The Source Memory list provides faster and easCustom sweep
ier testing by allowing you to setup and execute
up to 100 different tests that run without PC
intervention.
• Stores up to 100 instrument configurations, each containing source settings, measurement
­settings, pass/fail criteria, etc.
• Pass/fail limit test as fast as 500µs per point
• Onboard comparator eliminates the delay caused when sending data to the computer for analysis
• Built-in, user definable math functions to calculate derived parameters
Typical Applications
Devices:
• Discrete semiconductor devices
• Passive devices
• Transient suppression devices
• ICs, RFICs, MMICs
• Laser diodes, laser diode
modules, LEDs, photodetectors
• Circuit protection devices: TVS,
MOV, Fuses, etc.
• Airbags
• Connectors, switches, relays
• High brightness LEDs
(DC and pulse)
Tests:
• Leakage
• Low voltage/resistances
• LIV
• IDDQ
• I-V characterization
• Isolation and trace resistance
• Temperature coefficient
• Forward voltage, reverse
breakdown, leakage current
• DC parametric test
• DC power source
• HIPOT
• Photovoltaic cell efficiency
(source and sink)
• Dielectric withstanding
Tightly coupled precision sourcing and measurement
Automation for Speed
A SourceMeter SMU instrument streamlines production testing. It sources voltage or current while
making measurements without needing to change connections. It is designed for reliable operation
in non-stop production environments. To provide the throughput demanded by production applications, the SourceMeter SMU instrument offers many built-in features that allow it to run complex test
sequences without computer control or GPIB communications slowing things down.
Example Test Sequence
I
VF2
IR
VF1
Test 2
Test 1
Test 3
V
Test
Pass/Fail Test
If Passes Test
Test 1
Check V F1 at
100mA against
pass/fail limits
Go to Test 2
Test 2
Check V F2 at 1A
against pass/fail
limits
Go to Test 3
Test 3
Check leakage
­current at –500V
and test against
pass/fail limits
1.Bin part to good bin
2.Transmit readings to
computer while handler
is placing new part
3.Return to Test 1
If Fails Test
SMU INSTRUMENTS
Tightly coupled precision sourcing and measurement
Series 2400
1.Bin part to bad bin
2.Transmit data to
computer while
handler is placing
new part
3.Return to Test 1
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
45
SourceMeter SMU Instruments
®
Digital I/O Interface
The digital I/O interface can link a SourceMeter SMU instrument to many
popular component handlers, including Aetrium, Aeco, and Robotronics.
Other capabilities of the interface include:
• Tight systems integration for applications such as binning and sorting
• Built-in component handler interface
• Start of test and end of test signals
• 5V, 300mA power supply
• Optional expander accessory (Model 2499-DIGIO) adds 16 digital I/O lines
The digital I/O interface is available on all Series 2400 SoourceMeter
instruments except the Model 2401.
Trigger Link Interface
All SourceMeter SMU instruments include Keithley’s unique Trigger Link
interface which provides high-speed, seamless communications with many
of Keithley’s other instruments. For example, use the Trigger Link interface
to connect a SourceMeter SMU instrument with a Series 7000 Switching
System for a complete multi-point test solution. With Trigger Link, the
Series 7000 Switching Systems can be controlled by a SourceMeter SMU
instrument during a high-speed test sequence independent of a computer
and GPIB.
Optional Contact Check Function
The Contact Check function makes it simple to verify good connections
quickly and easily before an automated test sequence begins. This eliminates measurement errors and false product failures associated with contact fatigue, breakage, contamination, loose or broken connection, relay
failures, etc. Some capabilities of this function are:
• 350µs verification and notification process time
• The output of the SourceMeter SMU instrument is automatically shut
off after a fault and is not re-activated until good contact is verified,
protecting the device under test from damage and the operator from
potential safety h­ azards.
• 3 pass/fail threshold values: 2W, 15W, and 50W
• No energy passes through the device under test during the operation.
• Enabled either from the front panel or remotely over the GPIB
• 3 fault notification methods
SMU INSTRUMENTS
• Allows users to configure and plot data easily from Series 2400
SourceMeter SMU instruments, making characterization of two, three,
and four terminal devices a snap.
+
GUARD SENSE
Imeter
IN/OUT HI
SENSE HI
DUT
R2
Isource
Vmeter
R1
R3
SENSE LO
IN/OUT LO
6-Wire Ohms Circuit. All test current flows through R1 because the
high current guard drives the voltage across R2 to 0V.
350µs
Contact Check
IN/OUT HI
Fail
(optional)
SENSE LO
Pass
IN/OUT LO
Contact check option for 4-wire or 6-wire applications
Free LabTracer 2.0 device characterization software (downloadable)
1.888.KEITHLEY (U.S. only)
www.keithley.com
46
GUARD
-
Pass
-
Vmeter
• Locks out parallel current paths when measuring resistor networks or
hybrid c­ ircuits to isolate the component under test.
GUARD SENSE
SENSE HI
V or I
Source
• Uses guard and guard sense leads in addition to the 4-wire sense and
source leads.
GUARD
+
Imeter
Unique 6-Wire Ohms Technique
SourceMeter SMU instruments can make standard 4-wire, split Kelvin, and
6-wire, guarded ohms measurements and can be configured for either the
constant current or constant voltage method. The 6-wire ohms technique:
A Greater Measure of Confidence
A Tektronix Company
Tightly coupled precision sourcing and measurement
Tightly coupled precision sourcing and measurement
Series 2400
Series 2400
SourceMeter SMU Instruments
®
Voltage Accuracy (Local or Remote Sense)
2410, 2410-C
2420, 2420-C
2425, 2425-C
2430, 2430-C
2440, 2440-C
Programming
Resolution
5µV
50µV
500µV
5mV
5µV
50µV
500µV
50mV
5µV
50µV
500µV
1.5mV
5 µV
50µV
500µV
2.5mV
5µV
50µV
500µV
2.5mV
5µV
50µV
500µV
5mV
Measurement 2, 3, 4
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.012% + 300 µV
0.012% +300 µV
0.015% + 1.5 mV
0.015% + 10 mV
0.012% +300 µV
0.012% +300 µV
0.015% + 1 mV
0.015% + 50 mV
0.012% +300 µV
0.012% +300 µV
0.015% + 1 mV
0.015% + 3 mV
0.012% +300 µV
0.012% +300 µV
0.015% + 1 mV
0.015% + 5 mV
0.012% +300 µV
0.012% +300 µV
0.015% + 1 mV
0.015% + 5 mV
0.012% +300 µV
0.012% +300 µV
0.015% + 750 µV
0.015% + 3 mV
Output Slew Rate
(±30%)
Source/Sink Limit
0.08 V/µs
0.5 V/µs
0.15 V/µs
0.5 V/µs
0.08 V/µs
0.14 V/µs
0.08 V/µs
0.25 V/µs
±21 V @ ±1.05 A
±210 V @ ±105 mA*
±21 V @ ±1.05 A
±1100 V @ ±21 mA
±21 V @ ±3.15 A
±63 V @ ±1.05 A
±21 V @ ±3.15 A
±105 V @ ±1.05 A
±105 V @ ±1.05 A
0.08 V/µs
0.25 V/µs
0.08 V/µs
0.25 V/µs
±105 V @ ±10.5 A
(pulse mode only)
±10.5 V @ ±5.25 A
±42 V @ ±1.05 A
*Not available on Model 2401.
Temperature Coefficient (0°–18°C and 28°–50°C): ±(0.15 × accuracy specification)/°C.
Voltage Regulation: Line: 0.01% of range. Load: 0.01% of range + 100µV.
Over Voltage Protection: User selectable values, 5% tolerance. Factory default = none.
Current Limit: Bipolar current limit (compliance) set with single value. Min. 0.1% of range.
Overshoot: <0.1% typical (full scale step, resistive load, 10mA range).
ADDITIONAL SOURCE SPECIFICATIONS (All Models)
TRANSIENT RESPONSE TIME: 30µs minimum for the output to recover to its spec. following a
step change in load.
COMMAND PROCESSING TIME: Maximum time required for the output to begin to change
following the receipt of :SOURce:VOLTage|CURRent <nrf> command. Autorange On: 10ms.
Autorange Off: 7ms.
OUTPUT SETTLING TIME: Time required to reach 0.1% of final value after command is processed. 100µs typical. Resistive load. 10µA to 100mA range.
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC (Model 2440 ±40VDC) from
chassis ground.
REMOTE SENSE: Up to 1V drop per load lead.
COMPLIANCE ACCURACY: Add 0.3% of range and ±0.02% of reading to base specification.
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in standby mode.
RANGE CHANGE OVERSHOOT: Overshoot into a fully resistive 100kW load, 10Hz to 1MHz BW,
adjacent ranges: 100mV typical, except 20V/200V (20V/60V on Model 2420), 20V/100V on Model
2425 and 2430, range boundary, and Model 2440.
MINIMUM COMPLIANCE VALUE: 0.1% of range.
Additional Pulse Mode Source Specifications
(2430 and 2430-C only)
Maximum Duty Cycle: 8%, hardware limited, 10A range only. All other ranges 100%.
Maximum Pulse Width: 5ms from 90% rising to 90% falling edge, 2.5ms 10A range.
Minimum Pulse Width: 150µs.
Minimum Pulse Resolution: 50µs typical, 70µs max., limited by system ­jitter.
Source Accuracy: Determined by settling time and source range specifications.
Output Settling Time 0.1%:
800µs typ., source I = 10A into 10W, limited by voltage slew rate.
500µs typ., source I = 10A into 1W, limited by voltage slew rate.
Output Slew Rate:
Voltage (10W load): 0.25V/µs ±30% on 100V range. 0.08V/µs ±30% on 20V range, 10A range.
Current (0W load): 0.25A/µs ±30% on 100V range. 0.08A/µs ±30% on 20V range, 10A range.
NOTES
1. 2400, 2401, 2410 Only: Specifications valid for continuous output currents below 105mA. For operation above
105mA continuous for >1 minute, derate accuracy 10%/35mA above 105mA.
2. Speed = Normal (1 PLC). For 0.1 PLC, add 0.005% of range to offset specifications, except 200mV, 1A, 10A
ranges, add 0.05%. For 0.01 PLC, add 0.05% of range to offset specifications, except 200mV, 1A, 10A ranges, add
0.5%.
3. Accuracies apply to 2- or 4-wire mode when properly zeroed.
4. In pulse mode, limited to 0.1 PLC measurement.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Series 2400 condensed specifications
2400, 2400-C,
2401
Range
200.000mV
2.00000V
20.0000V
200.000V*
200.000mV
2.00000V
20.0000V
1000.00V
200.000mV
2.00000V
20.0000V
60.0000V
200.000mV
2.00000V
20.0000V
100.0000 V
200.000mV
2.00000V
20.0000V
100.0000 V
200.000mV
2.00000V
10.0000V
40.0000V
Default
Measurement
Resolution
1 µV
10 µV
100 µV
1 mV
1 µV
10 µV
100 µV
10 mV
1 µV
10 µV
100 µV
1 mV
1 µV
10 µV
100 µV
1 mV
1 µV
10 µV
100 µV
1 mV
1 µV
10 µV
100 µV
1 mV
Series 2400 condensed specifications
Model
Source1
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4 mV
0.02% + 24 mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4 mV
0.02% + 100 mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4 mV
0.02% + 7.2 mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4 mV
0.02% + 12 mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4 mV
0.02% + 12 mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 1.2 mV
0.02% + 4.8 mV
A Tektronix Company
47
Series 2400
SourceMeter SMU Instruments
®
Current Accuracy (Local or Remote Sense)
2400, 2400-C,
2401
2410, 2410-C
2420, 2420-C
2425, 2425-C
2430, 2430-C
SMU INSTRUMENTS
2440, 2440-C
Range
1.00000 µA
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
1.00000 A 2
1.00000 µA
10.0000 µA
100.000 µA
1.00000 mA
20.0000 mA
100.000 mA
1.00000 A 2
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
1.00000 A 2
3.00000 A 2
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
1.00000 A 2
3.00000 A 2
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
1.00000 A
3.00000 A 2
10.00000 A4
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
1.00000 A
5.00000 A
Programming
Resolution
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
50 µA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
50 µA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
500 µA
500 µA
500 pA
5 nA
50 nA
500 nA
5 µA
50 µA
50 µA
Temperature Coefficient (0°–18°C and 28°–50°C): ±(0.15 × accuracy specification)/°C.
CURRENT Regulation: Line: 0.01% of range. Load: 0.01% of range (except Model 2440
5A range 0.05%) + 100pA.
Voltage LIMIT: Bipolar voltage limit (compliance) set with single value. Min. 0.1% of range.
OVERSHOOT: <0.1% typical (1mA step, RL = 10kW, 20V range for Model 2400, 2401, 2410, 2420,
2425, 2430), (10V range for Model 2440).
Contact Check Specifications (requires -C version)
(Not available for Model 2401)
Speed: 350µs for verification and notification.
Contact Check:
2 W15 W50 W
No contact check failure
<1.00 W<13.5 W<47.5 W
Always contact check failure
>3.00 W>16.5 W>52.5 W
Default Measurement
Resolution
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 µA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 µA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 µA
10 µA
100 pA
1 nA
10 nA
100 nA
1 µA
10 µA
10 µA
Measurement 5, 6, 7
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
0.029% + 300 pA
0.027% + 700 pA
0.025% + 6 nA
0.027% + 60 nA
0.035% + 600 nA
0.055% + 6 µA
0.22 % + 570 µA
0.029% + 300 pA
0.027% + 700 pA
0.025% + 6 nA
0.027% + 60 nA
0.035% + 1.2 µA
0.055% + 6 µA
0.22 % + 570 µA
0.027% + 700 pA
0.025% + 6 nA
0.027% + 60 nA
0.035% + 600 nA
0.055% + 6 µA
0.066% + 570 µA
0.052% + 1.71 mA
0.027% + 700 pA
0.025% + 6 nA
0.027% + 60 nA
0.035% + 600 nA
0.055% + 6 µA
0.060% + 570 µA
0.052% + 1.71 mA
0.027% + 700 pA
0.025% + 6 nA
0.027% + 60 nA
0.035% + 600 nA
0.055% + 6 µA
0.060% + 570 µA
0.052% + 1.71 mA
0.082% + 1.71 mA
0.027% + 700 pA
0.025% + 6 nA
0.027% + 60 nA
0.035% + 600 nA
0.055% + 6 µA
0.060% + 570 µA
0.10 % + 3.42 mA
±1.05A @ ±21 V
±105 mA @ ±210 V 8
±1.05A @ ±21 V
±21 mA @ ±1100 V
±3.15A @ ±21 V
±1.05 A @ ±63 V
±3.15A @ ±21 V
±1.05 A @ ±105 V
±1.05A @ ±105 V
±10.5 A @ ±105 V
(pulse mode only)
±5.25A @ ±10.5 V
±1.05 A @ ±42 V
NOTES
1. 2400, 2401, 2410 Only: Specifications valid for continuous output currents below 105mA. For operation above
105mA continuous for >1 minute, derate accuracy 10%/35mA above 105mA.
2. Full operation (1A) regardless of load to 30°C (50°C for Model 2420 and 2440). Above 30°C (50°C for Model
2420 and 2440) ambient, derate 35mA/°C and prorate 35mA/W load. 4-wire mode. For current sink operation
on 1A, 3A, or 5A ranges, maximum continuous power is limited to approximately 1/2 rated power or less,
depending on current, up to 30°C ambient. See power equations in the User’s Manual to calculate allowable
duty cycle for specific conditions.
3. For sink mode, 1µA to 100mA range, accuracy is:
Model 2400, 2401: ±(0.15% + offset*4). Models 2410, 2420, 2425, 2430, 2440: ±(0.5% + offset*3).
For 1A range, accuracy is:
Model 2400, 2401: ±(1.5% + offset*8). Models 2410, 2420, 2425, 2430, 2440: ±(1.5% + offset*3).
4. 10A range only in pulse mode. Limited to 2.5ms pulse width maximum. 10% duty cycle maximum.
5. Speed = Normal (1 PLC). For 0.1 PLC, add 0.005% of range to offset specifications, except 200mV, 1A, 10A
ranges, add 0.05%. For 0.01 PLC, add 0.05% of range to offset specifications, except 200mV, 1A, 10A ranges,
add 0.5%.
6. Accuracies apply to 2- or 4-wire mode when properly zeroed.
7. In pulse mode, limited to 0.1 PLC measurement.
8. Model 2400 and 2400-C only.
1.888.KEITHLEY (U.S. only)
www.keithley.com
48
Source/Sink Limit
A Greater Measure of Confidence
A Tektronix Company
Series 2400 condensed specifications
Series 2400 condensed specifications
Model
Source 1, 3
Accuracy
(1 Year)
23°C ±5°C
±(% rdg. + amps)
0.035% + 600 pA
0.033% + 2 nA
0.031% + 20 nA
0.034% + 200 nA
0.045% + 2 µA
0.066% + 20 µA
0.27 % + 900 µA
0.035% + 600 pA
0.033% + 2 nA
0.031% + 20 nA
0.034% + 200 nA
0.045% + 4 µA
0.066% + 20 µA
0.27 % + 900 µA
0.033% + 2 nA
0.031% + 20 nA
0.034% + 200 nA
0.045% + 2 µA
0.066% + 20 µA
0.067% + 900 µA
0.059% + 2.7 mA
0.033% + 2 nA
0.031% + 20 nA
0.034% + 200 nA
0.045% + 2 µA
0.066% + 20 µA
0.067% + 900 µA
0.059% + 2.8 mA
0.033% + 2 nA
0.031% + 20 nA
0.034% + 200 nA
0.045% + 2 µA
0.066% + 20 µA
0.067% + 900 µA
0.059% + 2.8 mA
0.089% + 5.9 mA
0.033% + 2 nA
0.031% + 20 nA
0.034% + 200 nA
0.045% + 2 µA
0.066% + 20 µA
0.067% + 900 µA
0.10 % + 5.4 mA
Series 2400
SourceMeter SMU Instruments
®
Resistance Measurement Accuracy (Local or Remote Sense)1, 2, 5
Default
Resolution
<0.20000 W3
–
–
10µW
–
2400, 2401
2410
2420, 2425, 2430, 2440
2400, 2401
–
Source I ACC + Meas. VACC
Source I ACC + Meas. VACC
Source I ACC + Meas. VACC
Source I ACC + Meas. VACC
1A
Normal Accuracy (23°C ±5°C)
1 Year, ±(% rdg. + ohms)
Source I ACC + Meas VACC
Source I ACC + Meas. VACC 0.17% + 0.0003W
Source I ACC + Meas. VACC
20.0000 W 100µW
100mA
100mA
0.10% + 0.003W
0.11% + 0.006W
0.10% + 0.003 W
0.07% + 0.001
W
200.000 W 1mW
10mA
10mA
0.08% + 0.03 W
0.09% + 0.1 W
0.08% + 0.03 W
0.05% + 0.01
W
2.00000kW 10mW
1mA
1mA
0.07% + 0.3 W
0.08% + 0.6 W
0.07% + 0.3
W
0.05% + 0.1
W
20.0000kW 100mW
100µA
100µA
0.06% + 3
W
0.07% + 6
W
0.06% + 3
W
0.04% + 1
W
200.000kW 1
W
10µA
10µA
0.07% + 30
W
0.07% + 60
W
0.07% + 30
W
0.05% + 10
W
W
2.00000MW6 10
1µA
1µA
0.11% +300
W
0.12% +600
W
0.11% +300
W
0.05% +100
W
20.0000MW7 100W
1µA
1µA
0.11% + 1
kW
0.12% + 2.4 kW
0.11% + 1
kW
0.05% +500
W
200.000MW3 >200.000 MW3
100nA
–
1kW
–
–
–
0.66% + 10 kW
0.66% + 24 kW
Source I ACC + Meas. VACC Source I ACC + Meas. VACC
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C): ±(0.15 × accuracy specification)/°C.
Source I Mode, Manual Ohms: Total uncertainty = I source accuracy + V measure accuracy (4-wire remote sense).
Source V Mode, Manual Ohms: Total uncertainty = V source a­ ccuracy + I measure accuracy (4-wire remote sense).
6-wire ohms mode: Available using active ohms guard and guard sense. Max.
Guard Output Current: 50mA (except 1A range). Accuracy is load dependent.
Refer to White Paper no. 2033 for calculation f­ormula.
Guard Output Impedance: <0.1W in ohms mode.
Source I ACC + Meas. VACC
Source I ACC + Meas. VACC
0.35% + 5
kW
Source I ACC + Meas. VACC
NOTES
1. Speed = Normal (1 PLC). For 0.1 PLC, add 0.005% of range to offset specifications, except 200mV, 1A, 10A ranges, add 0.05%. For
0.01 PLC, add 0.05% of range to offset specifications, except 200mV, 1A, 10A ranges, add 0.5%.
2. Accuracies apply to 2- or 4-wire mode when properly zeroed.
3. Manual ohms only – except 2420, 2425, 2430, 2440 for 2W range and 2400, 2401, or 2410 for 200MW range.
4. Source readback enabled, offset compensation ON. Also available on 2410, 2420, 2425, 2430, and 2440 with similar a­ ccuracy
enhancement.
5. In pulse mode, limited to 0.1 PLC measurement.
6. Except 2440; default test current is 5µA.
7. Except 2440; default test current is 0.5µA.
Services Available
2400-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2400-C-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
2401-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2410-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2410-C-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
2420-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2420-C-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
2425-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2425-C-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
2430-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2430-C-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
2440-3Y-EW
1-year factory warranty extended to 3 years from date of shipment
2440-C-3Y-EW 1-year factory warranty extended to 3 years from date of shipment
C/2400-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Models 2400, 2400-C, 2400-LV*
C/2401-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Model 2401*
C/2410-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Models 2410, 2410-C*
C/2420-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Models 2420, 2420-C*
C/2425-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Models 2425, 2425-C*
C/2430-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Models 2430, 2430-C*
C/2440-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3 years of purchase for Models 2440, 2440-C*
TRN-2400-1-C Course: Unleashing the Power of Your SourceMeter SMU Instrument
*Not available in all countries
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Series 2400 condensed specifications
2.00000 W3 Enhanced Accuracy
(23°C ±5°C) 4
1 Year, ±(% rdg. + ohms)
Default Test
Current
2420, 2425,
2430, 2440
Series 2400 condensed specifications
Range
Default Test
Current
2400, 2401, 2410
A Tektronix Company
49
Series 2400
SourceMeter SMU Instruments
®
System Speeds
Measurement1
MAXIMUM RANGE CHANGE RATE: 75/second.
MAXIMUM MEASURE AUTORANGE TIME: 40ms (fixed source).2
Series 2400 condensed specifications
Speed
Fast
IEEE-488.1 Mode
Fast
IEEE-488.2 Mode
Medium
IEEE-488.2 Mode
Normal
IEEE-488.2 Mode
NPLC/Trigger Origin
0.01 / internal
0.01 / external
0.01 / internal
0.01 / external
0.10 / internal
0.10 / external
1.00 / internal
1.00 / external
Measure
To Mem.
To GPIB
2081 (2030) 1754
1239 (1200) 1254
2081 (2030) 1198 (1210)
1239 (1200) 1079 (1050)
510 (433)
509 (433)
438 (380)
438 (380)
59
(49)
59 (49)
57
(48)
57 (48)
Source-Measure
To Mem.
To GPIB
1551 (1515)
1369
1018 (990)
1035
1551 (1515)
1000 (900)
1018 (990)
916 (835)
470 (405)
470 (410)
409 (360)
409 (365)
58 (48)
58 (48)
57 (48)
57 (47)
Source-Measure5
Pass/Fail Test4, 5
To Mem.
To GPIB
902 (900)
981
830 (830)
886
902 (900)
809 (840)
830 (830)
756 (780)
389 (343)
388 (343)
374 (333)
374 (333)
56 (47)
56 (47)
56 (47)
56 (47)
Source-Memory4
To Mem.
To GPIB
165 (162)
165
163 (160)
163
165 (162)
164 (162)
163 (160)
162 (160)
133 (126)
132 (126)
131 (125)
131 (125)
44 (38)
44 (38)
44 (38)
44 (38)
Single Reading Operation Reading Rates (rdg./second) for 60Hz (50Hz):
Speed
Fast (488.1)
Fast (488.2)
Medium (488.2)
Normal (488.2)
Measure
To GPIB
537
256 (256)
167 (166)
49
(42)
NPLC/Trigger Origin
0.01 / internal
0.01 / internal
0.10 / internal
1.00 / internal
Source-Measure5
To GPIB
140
79 (83)
72 (70)
34 (31)
Source-Measure Pass/Fail Test4,5
To GPIB
135
79 (83)
69 (70)
35 (30)
Component for 60Hz (50Hz): 4, 6
Speed
Fast
Medium
Normal
NPLC/Trigger Origin
0.01 / external
0.10 / external
1.00 / external
Measure To GPIB
1.04 ms (1.08 ms)
2.55 ms (2.9 ms)
17.53 ms (20.9 ms)
Source Pass/Fail Test
0.5 ms (0.5 ms)
0.5 ms (0.5 ms)
0.5 ms (0.5 ms)
Source-Measure Pass/Fail Test5, 7
To GPIB
4.82 ms (5.3 ms)
6.27 ms (7.1 ms)
21.31 ms (25.0 ms)
NOTES
Reading rates applicable for voltage or current measurements. Auto zero off, autorange off, filter off, display off,
trigger delay = 0, and binary reading format.
Purely resistive lead. 1µA and 10µA ranges <65ms.
3 1000 point sweep was characterized with the source on a fixed range.
1
2
Pass/Fail test performed using one high limit and one low math limit.
Includes time to re-program source to a new level before making m
­ easurement.
6 Time from falling edge of START OF TEST signal to falling edge of end of test signal.
7 Command processing time of :SOURce:VOLTage|CURRent:TRIGgered <nrf> command not included.
4
5
general
Noise Rejection:
Fast
Medium
Slow
SMU INSTRUMENTS
1
NPLC
0.01
0.1
1
NMRR
—
—
60 dB
CMRR
80 dB
80 dB
100 dB1
Except lowest 2 current ranges = 90dB.
Load Impedance: Stable into 20,000pF typical.
Common mode voltage: 250V DC (40V DC for Model 2440).
Common Mode Isolation: >109W, <1000pF.
OVERRANGE: 105% of range, source and measure.
Max. Voltage Drop Between Input/Output and sense terminals: 5V.
Max. Sense Lead Resistance: 1MW for rated accuracy.
SENSE INPUT IMPEDANCE: >1010W.
GUARD OFFSET VOLTAGE: <150µV, typical (300µV for Models 2430, 2440).
Source Output modes:
Pulse (Model 2430 only)
Fixed DC level
Memory List (mixed function)
Stair (linear and log)
Memory Buffer: 5,000 readings @ 5 digits (two 2,500 point buffers). Includes selected measured
value(s) and time stamp. Lithium battery b­ ackup (3 yr+ battery life).
SOURCE MEMORY LIST: 100 points max.
Programmability: IEEE-488 (SCPI-1995.0), RS-232, 5 user-definable power-up states plus
factory default and *RST.
Digital Interface:
Interlock: Active low input.
Handler Interface: Start of test, end of test, 3 category bits. [email protected] 300mA supply.
Not available on Model 2401.
Digital I/O: 1 trigger input, 4 TTL/Relay Drive outputs (33V @ 500mA, diode clamped).
Not available on Model 2401.
Power Supply: 100V to 240V rms, 50–60Hz (automatically detected at power up). Model
2400, 2401: 190VA. Model 2410: 210VA. Model 2420: 220VA. Model 2425, 2430: 250VA.
Model 2440: 240VA.
COOLING: Model 2401: Convection. Model 2410, 2420, 2425, 2430, 2440: Forced air,
variable speed.
EMC: Conforms to European Union Directive 89/336/EEC, EN 61326-1.
Safety: UL listed to UL 61010B-1:2003: Conforms to European Union Low Voltage Directive.
Vibration: MIL-PRF-28800F Class 3 Random.
WARM-UP: 1 hour to rated accuracies.
DIMENSIONS: 89mm high × 213mm wide × 370mm deep (3½ in × 83⁄8 in × 149⁄16 in). Bench
Configuration (with handle and feet):104mm high × 238mm wide × 370mm deep (41⁄8 in ×
93⁄8 in × 149⁄16 in).
WEIGHT: 3.21kg (7.08 lbs) (Model 2425, 2430, 2440: 4.1kg, 9.0 lbs).
ENVIRONMENT: Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.
Storage: –25°C to 65°C.
1.888.KEITHLEY (U.S. only)
www.keithley.com
50
A Greater Measure of Confidence
A Tektronix Company
Series 2400 condensed specifications
Sweep Operation3 Reading Rates (rdg./second) for 60Hz (50Hz):
Sub-femtoamp Remote
SourceMeter SMU Instrument
The Model 6430 Sub-Femtoamp Remote
SourceMeter SMU Instrument combines the
voltage and current sourcing and measurement
functions of Keithley’s popular SourceMeter
SMU instruments with sensitivity, noise, and
input resistance specifications superior to
electrometers. This unique combination of broad
functionality and exceptional measurement
integrity is made possible by the Model 6430’s
Remote PreAmp, which offers a very sensitive
bi-directional amplifier with sensitive feedback
elements for measuring or sourcing currents at
the device being tested. The high level signals
output by the Remote PreAmp are sent to the
controlling mainframe via a two-meter cable.
This allows the user to make a direct or very
short connection to the signal, minimizing the
effects of cable noise.
• 0.4fA p-p (4E–16A) noise
(typical)
• Remote PreAmp can be located
at the signal source to minimize
cable noise
• >1016W input resistance on
voltage measurements
• High speed — up to 2000
readings/second
• Up to 6½-digit resolution
• Fast characterization
of components with
programmable digital I/O and
interfaces
The Model 6430 makes voltage, current, and
resistance measurements at speeds no electrometer can match. It can read up to 2000 source/
measure readings per second into internal memory. Currents can be measured in as little as 5ms on
the 100nA range, decreasing to just a few hundred microseconds on the higher ranges.
The Model 6430’s distinguishing features include its excellent low current sensitivity and the Remote
PreAmp, which makes this sensitivity useful by eliminating long input cables. The Remote PreAmp
is an integral part of the Model 6430’s feedback measuring system that cannot be operated independently from the measurement mainframe, although it can be separated from the mainframe by up
to two meters of connection cable carrying high level signals.
Applications
The Model 6430’s capabilities make it equally
useful for research work and for evaluating
sophisticated components in test labs for
low-current, high-resistance, or sensitive semiconductor m
­ easurements. The low noise and
drift performance of the Model 6430 also makes
it well suited for research studies in single
electron devices, highly resistive nanowires and
nanotubes, polymers, highly resistive nanomaterials, and electrochemical amperometry
applications.
High Speed Data Handling
The Model 6430 can read more than 2000 readings per second into its internal memory buffer.
The IEEE-488 bus output can transmit up to
75 source/measure readings per second to an
external computer controller, including pass/fail
i­ ndication.
+100mA
Combines broad functionality with exceptional measurement integrity
®
+10mA
–200V
–20V
+20V
+200V
–10mA
–100mA
The Model 6430 provides four-quadrant
­sourcing of up to 2.2W, as well as measurement ­sensitivity down to sub-femtoamp and
microvolt levels. It can measure currents
from the 1pA range (with just 0.4fA p-p noise
typical) up to the 100mA range at up to 20V.
Voltage ranges from 200mV to 200V are
available. Current and voltage range settings
define the maximum source or sink voltage
or current.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Combines broad functionality with exceptional measurement integrity
6430
A Tektronix Company
51
6430
Sub-Femtoamp Remote
SourceMeter SMU Instrument
®
Typical applications:
6430Sub-femtoamp
Remote SourceMeter
SMU Instrument
Accessories Available
Shielded GPIB Cable, 1m (3.3 ft)
Shielded GPIB Cable, 2m (6.6 ft)
Shielded GPIB Cable, 4m (13.1 ft)
Shielded GPIB Cable, 0.5m (1.6 ft)
3-slot, Low Noise, 0.15m (0.5 ft) Guarded
Triax Cable
Trigger Link Cable, 1m (3.3 ft.)
Trigger Link Cable, 2m (6.6 ft.)
Trigger Link Adapter Box
Trigger Link DIN-to-BNC Trigger Cable
IEEE-488 Interface/Controller for the PCI Bus
IEEE-488 USB-to-GPIB Interface Adapter
8501-1
8501-2
8502
8503
KPCI-488LPA
KUSB-488B
Services Available
TRN-2400-1-C
Course: Unleashing the Power of Your
SourceMeter SMU Instrument
6430-3Y-EW
1-year factory warranty extended to 3 years
from date of shipment
C/6430-3Y-ISO 3 (ISO-17025 accredited) calibrations within 3
years of purchase*
*Not available in all countries
SMU INSTRUMENTS
ID
A
D
Gate leakage or channel
D
I
leakage in FET-based comG
G
A
V
ponents can generate errors
+
in MOSFETs, JFETs, a­ nalog
V
switches, and many other
S
S
­circuits. By allowing researchModel 6430
Model 6430
ers to measure extremely
low-level ­currents and voltages, the Model 6430 can help
them understand the design
limitations of these components and investigate alternative device structures or materials.
G
Accessories Supplied
6430-322-1B
Low Noise Triax Cable,
3-slot triax to alligator
clips, 20cm (8 in)
8607Safety High Voltage
Dual Test Leads
CA-176-1E PreAmp Cable,
2m (6.6 ft)
CA-186-1BBanana Lead to
Screw Terminal
Adapter
CAP-31
3-lug Protective
Cap (2)
Instruction Manual
7007-1
7007-2
7007-4
7007-05
7078-TRX-6IN
Measuring FET Gate Leakage and Channel Currents
Semiconductor
measurements
GS
SET research
The Model 6430’s superior low current measurement ability (0.4fA p-p noise typical) makes it
extremely useful for single electron transistor (SET) and quantum-dot research. Using a technique
similar to a lock-in, the 6430 can measure currents with 1aA sensitivity (10 –18A = 6 electrons/second).
The Measurement Industry’s Lowest Noise and Drift
This data illustrates the Model 6430’s impressive s­ tability over a five-hour period, as well as its low
short-term noise performance. This signal trace was acquired using the instrument’s AUTOFILTER
with a 5-­second rise time on the 1pA range. The inset close-up is a snapshot of the filtered signal,
showing the Model 6430’s low noise during the first 100-second period. The data was taken in a
laboratory environment where temperature varied about 1°C, with the instrument’s IN/OUT HI and
SENSE leads capped.
2x10–15A
1 fA
1x10–15A
0
–1x10–15A
–2x10–15A
0
1
2
3
4
5
Hours
1x10–15A
1 fA
0
–1x10–15A
0
10
20
30
40
50
Seconds
60
70
80
90
100
1.888.KEITHLEY (U.S. only)
www.keithley.com
52
+
DS
A Greater Measure of Confidence
A Tektronix Company
Combines broad functionality with exceptional measurement integrity
Combines broad functionality with exceptional measurement integrity
Ordering Information
6430
Sub-Femtoamp Remote
SourceMeter SMU Instrument
®
Condensed Measure Specifications 1
200.000 mV
2.00000 V
20.0000 V
200.000 V
Max. Resolution
1µV
10µV
100µV
1mV
Input 2
Resistance
>1016W
>1016W
>1016W
>1016W
Accuracy (23°C ± 5°C)
1 Year, ±(%rdg + volts)
0.012% +350 µV
0.012% +350 µV
0.015% + 1.5mV
0.015% + 10 mV
Range
1.00000 pA
10.0000 pA
100.000 pA
1.00000 nA
10.0000 nA
100.000 nA
1.00000 µA
10.0000 µA
100.000 µA
1.00000 mA
10.0000 mA
100.000 mA
Model 6430 specifications
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Additional Measure Specifications
Output SETTLING Time (typical to 10% of final value): <2s, 1pA and 10pA ranges; <50ms,
100pA through 10nA ranges; <5ms, 100nA through 100mA ranges.
Current Noise: When observed over 1 minute intervals, peak to peak noise will be within
400aA (typical) during 90% of the intervals using Autofilter (5s 10% to 90% rise time), with triax
connectors capped, Autozero OFF, Source Delay = 0, on the 1pA range for at least 3 minutes.
Max.
Resolution
Voltage
Burden5
10 aA
100 aA
1 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
Accuracy
(23°C ± 5°C)
1 Year
±(%rdg + amps)
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
< 1mV
1.0
0.50
0.15
0.050
0.050
0.050
0.050
0.050
0.025
0.027
0.035
0.055
% + 7 fA
% + 7 fA
% + 30 fA
% + 200 fA
% + 2 pA
% + 20 pA
% + 300 pA
% + 2 nA
% + 6 nA
% + 60 nA
% + 600 nA
% + 6 µA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±[(0.15 × accuracy specification) +
1fA]/°C.
Input Current: <3fA at 23°C, <40% RH; typically ±0.5fA/°C around 23°C, <40% RH.
Resistance Measurement Accuracy (4-wire sense with remote preamp)
Source I Mode, Auto Ohms
Max.
Default
RangeResolution
Test Current
Normal Accuracy
(23°C ± 5°C)
1 Year, ±(%rdg + ohms)
<2.00000
W 6
1µW
—
20.0000
W
100µW
100mA
200.000
W
1mW
10mA
2.00000kW
10mW
1mA
20.0000kW
100mW
100µA
W
200.000kW1
10µA
2.00000MW10
W
1µA
20.0000MW100
W
1 µA
200.000MW
1kW
100 nA
2.00000GW
10kW
10 nA
20.0000GW
100kW
1 nA
200.000GW
1MW
100 pA
2.00000TW
10MW
10 pA
20.0000TW
100MW
1 pA
6
>20.0000TW — —
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Source I Mode, Manual Ohms: Total uncertainty = I source a­ ccuracy + V measure accuracy
(4-wire sense).
Source V Mode: Total uncertainty = V source accuracy + I measure accuracy (4-wire sense).
6-wire ohms mode: Available using active ohms guard and guard sense (mainframe rear panel
only). Max. Guard Output Current: 50 mA. Accuracy is load dependent. Refer to manual for
calculation formula.
Mainframe Guard Output Resistance: 0.1W in ohms mode.
Source I ACC + Measure VACC
0.098% +0.003 W
0.077% + 0.03 W
0.066% + 0.3 W
0.063%+ 3 W
0.082%+ 30 W
0.082%+ 300 W
0.085% +
1kW
0.085% + 10kW
0.085% + 100kW
0.085% +
1MW
0.205% + 10MW
0.822% + 100MW
2.06% +
1GW
Source I ACC + Measure VACC
Model 6430 specifications
Range
Current Measurement Accuracy (2- or 4-wire sense) 4
Enhanced Accuracy
(23°C ± 5°C) 7
1 Year, ±(%rdg + ohms)
Measure I ACC + Measure VACC
0.068% + 0.001 W
0.048% + 0.01 W
0.040% +
0.1 W
0.038% +
1 W
0.064% +
10 W
0.064% + 100 W
0.067% + 500 W
0.068% +
5 kW
0.070% +
50 kW
0.070% + 500 kW
0.185% +
5 MW
0.619% +
50 MW
1.54% + 500 MW
Measure I ACC + Measure VACC
NOTES
1.
2.
3.
4.
Speed = 10 PLC, Autofilter ON, properly zeroed and settled.
Source I mode, I = 0.
Voltage measurement accuracy is not affected by the remote preamp.
Current measurement accuracy is not affected by the remote preamp; however, the 1pA through 100nA ranges
are available only when using a preamp.
5. 4-wire mode.
6. Manual ohms mode only.
7. Source readback enabled, offset compensation ON. Source delay must be pro­g rammed such that the source is
fully settled for each reading.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Voltage Measurement Accuracy (4-wire sense) 3
A Tektronix Company
53
6430
Sub-Femtoamp Remote
SourceMeter SMU Instrument
®
Condensed System Speeds
Maximum Range Change Rate: 75/second.
Single Reading operation reading rates (rdg/second) for 60Hz (50Hz):
Model 6430 specifications
Speed
Fast
Medium
Normal
NPLC/
Trigger Origin
0.01 / internal
0.10 / internal
1.00 / internal
Measure
To GPIB
256 (256)
181 (166)
49 (42)
SourceMeasure 3
To GPIB
83 (83)
73 (70)
35 (31)
Source-Measure
Pass/Fail Test 2, 3
To GPIB
83 (83)
73 (70)
34 (30)
Condensed Source Specifications4
Voltage Programming Accuracy (4-wire sense) 5
Accuracy (1 Year)
Programming
23°C ±5°C
RangeResolution
±(% rdg. + volts)
200.000mV
2.00000 V
20.0000 V
200.000 V
5 µV
50 µV
500 µV
5mV
0.02% + 600 µV
0.02% + 600 µV
0.02% + 2.4mV
0.02% + 24mV
Noise
(peak-peak)
0.1Hz – 10Hz
5 µV
50 µV
500 µV
5mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Max. Output power: 2.2W (four quadrant source or sink operation).
Source/SINK Limits: ±21V @ ±105mA, ±210V @ ±10.5mA.
Voltage Regulation: Line: 0.01% of range. Load: 0.01% of range + 100µV.
NOISE 10Hz–1MHz (p-p): 10mV.
Over Voltage Protection: User selectable values, 5% tolerance. Factory default = None.
Current Limit: Bipolar current limit (compliance) set with single value. Min. 0.1% of range.
Current Programming Accuracy (with remote preamp)
Accuracy (1 Year) 4Noise
Programming
23°C ±5°C
(peak-peak)
RangeResolution
±(% rdg. + amps)
0.1Hz – 10Hz
SMU INSTRUMENTS
1.00000 pA
10.0000 pA
100.000 pA
1.00000 nA
10.0000 nA
100.000 nA
1.00000 µA
10.0000 µA
100.000 µA
1.00000mA
10.0000mA
100.000mA
50 aA
500 aA
5 fA
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
1.0 % + 10 fA
0.50 % + 30 fA
0.15 % + 40 fA
0.050% +200 f A
0.050% + 2 pA
0.050% + 20 pA
0.050% +300 pA
0.050% + 2 nA
0.031 % + 20 nA
0.034% +200 nA
0.045 % + 2 µA
0.066% + 20 µA
5 fA
10 fA
20 fA
50 fA
500 fA
3 pA
20 pA
200 pA
500 pA
5 nA
50 nA
500 nA
TEMPERATURE COEFFICIENT (0°–18°C and 28°–40°C): ±(0.15 × accuracy specification)/°C.
Max. output power: 2.2W (four quadrant source or sink operation).
Source/Sink Limits: ±10.5mA @ ±210V, ±105mA @ ±21V .
CURRENT Regulation: Line: 0.01% of range. Load: 0.01% of range + 1fA.
VOLTAGE Limit: Bipolar voltage limit (compliance) set with single value. Min. 0.1% of range.
NOTES
1. Reading rates applicable for voltage or current measurements. Auto zero off, autorange off, filter off, display
off, trigger delay = 0, source auto clear off, and b­ inary reading format.
2. Pass/Fail test performed using one high limit and one low math limit.
3. Includes time to re-program source to a new level before making m
­ easurement.
4. For sink mode, 1pA to 100mA range, accuracy is ±(0.15% + offset*4).
5. Voltage source accuracies are not affected by the remote preamp.
General
Noise Rejection:
Fast
Medium
Normal
NPLC
0.01
0.1
1
CMRR
80 dB
80 dB
90 dB
Load Impedance: Stable into 20,000pF on the 100mA through 100µA r­ anges, 470pF on the
10µA and 1µA ranges, and 100pF on the nA and pA ranges. Refer to the User’s Manual for
details on measuring large capacitive loads.
Common mode voltage: ±42VDC maximum.
Common Mode Isolation: >10 9W, <1000pF.
Overrange: 105% of range, source and measure.
Max. Voltage Drop Between Input/Output and sense terminals: 5V. (To meet
specified accuracy with 4-wire sense, refer to the User’s Manual.)
Max. Sense Lead Resistance: 10 W for rated accuracy.
SENSE INPUT ResistANCE: 1MW.
Mainframe Guard Offset Voltage: 300µV, typical.
Preamp Guard Offset Voltage: 1mV, typical.
Preamp Guard Output Resistance: 110kW.
Source Output modes: Fixed DC level, Memory List (mixed function), Stair (linear
and log).
Source Memory List: 100 points max.
Memory Buffer: 5,000 readings @ 5½ digits (two 2,500 point buffers). Includes
selected measured value(s) and time stamp. Lithium battery backup (3 yr+ battery life).
Digital Interface:
Safety Interlock: Active low input.
Handler Interface: Start of test, end of test, 3 category bits. +5V @ 300mA supply.
Digital I/O: 1 trigger input, 4 TTL/Relay Drive outputs (33V @ 500mA sink, diode
clamped).
Programmability: IEEE-488 (SCPI-1995.0), RS-232, 5 user-definable power-up states plus
factory default and *RST.
Power Supply: 100V–240V rms, 50–60Hz (automatically detected at power up),
100VA max.
EMC: Conforms with European Union Directive 89/336/EEC EN 55011, EN 50082-1, EN 610003-2 and 61000-3-3, FCC part 15 class B.
Safety: Conforms with European Union Directive 73/23/EEC EN 61010-1.
Vibration: MIL-PRF-28800F, Class 3.
WARM-UP: 1 hour to rated accuracies.
DIMENSIONS: 89mm high × 213mm wide × 370mm deep (3½ in × 8 3⁄8 in × 14 9⁄16 in). Bench
Configuration (with handle and feet): 104mm high × 238mm wide × 370mm deep (41 ⁄8 in
× 93⁄8 in × 149⁄16 in).
Amplifier: 20mm high × 57mm wide × 97mm deep (0.783 in × 2.225 in × 3.75 in).
WEIGHT: 5.9kg (13 lbs).
ENVIRONMENT: Operating: 0°–40°C, 60% R.H. (non-condensing) up to 35°C. Derate 5%
R.H./°C, 35°–40°C. Storage: –25°C to 65°C. Non-condensing humidity.
1.888.KEITHLEY (U.S. only)
www.keithley.com
54
NMRR
—
—
60 dB
A Greater Measure of Confidence
A Tektronix Company
Model 6430 specifications
Measurement1
The easy-to-use Model 4200-SCS performs laboratory grade DC I-V, C-V, and pulse device characterization, real-time plotting, and analysis with
high precision and sub-femtoamp resolution. It
is the best tool available for interactive parametric analysis and device characterization. It offers
the most advanced capabilities available in a
fully integrated characterization system, including a complete, embedded PC with Windows
operating system and mass storage. Its self-­
documenting, point-and-click interface speeds
and simplifies the process of taking data, so
users can begin analyzing their results sooner.
Its Keithley Interactive Test Environment (KITE)
is so intuitive that even a novice can use the
­system with ease. This point-and-click software
offers a full range of functionality, from managing tests, organizing results, and generating
reports to creating user libraries. Sophisticated
and simple test sequencing and external instrument drivers make it simple to perform auto­
mated testing with combined DC I-V, pulse, and
C-V ­measurements.
• Characterize devices with up to
9 source measure unit (SMU)
instruments
APPLICATIONS:
• Sub-femtoamp resolution
measurements with optional
preamps
• On-wafer parametric test
• Ultra-fast I-V module for pulse and
pulse I-V capabilities
• C-V instrument makes C-V
measurements as easy as DC I-V
• Ultra low frequency C-V
measurement capability
• Familiar, point-and-click Windows®
environment and intuitive GUI
• Easy to use for both interactive and
automated tests
• Real-time plotting and analysis
allow users to view results before
a test has completed and to take
preemptive action as needed
• Embedded PC provides the
additional benefits of a networked
instrument including mapping
network drives and making test
results available to the corporate
network
Semiconductor Devices
• Wafer level reliability
• Packaged device characterization
• High κ gate charge trapping
• Isothermal testing of devices
and materials subject to selfheating effects
• Charge pumping to characterize
interface state densities in
MOSFET devices
• Resistive or capacitive MEMS
drive characterization
Optoelectronic Devices
• Semiconductor laser diode
DC/CW characterization
• DC/CW characterization of
transceiver modules
• Simultaneously acquires data,
analyzes plots, and prints reports
• PIN and APD characterization
• Ideal for device character­iza­tion,
device modeling, reliability testing,
and failure analysis
Technology Development
• Includes instrument and prober
drivers as well as interfaces to
popular modeling and circuit
simulation software
• Carbon nanotube
characterization
• Materials research
• Electrochemistry
The modular design of the Model 4200-SCS provides you with tremendous flexibility. It supports
up to nine internal source measure unit (SMU)
instruments and optional Remote PreAmps that
extend the resolution of any SMU from 100fA
to 0.1fA. Its hardware options also include four
switch matrix configurations, meters, pulse
­generators, and more.
Lab grade DC device characterization
Parameter Analyzer
Optional instruments can be integrated into
the Model 4200-SCS, such as dual-channel
pulse generators, a dual-channel digital
­oscillo­scope, and a C-V instrument, which is a
capacitance-voltage instrument that performs
capacitance measurements from femtofarads to
nanofarads at frequencies from 1kHz to 10MHz.
The C-V option includes the new C-V Power
package, which supports high power C-V
measurements up to 400V and 300mA, up to
60V of differential DC bias, and quasistatic C-V
­measurements.
The exceptional low current performance of the
Model 4200-SCS makes it the perfect solution
for research studies of single electron transistors
(SETs), molecular electronic devices, and other
nanoelectronic devices that require I-V characterization. The 4200-SCS can also be used to
make four-probe van der Pauw resistivity and
Hall v­ oltage measurements.
For more information on the Model 4200-SCS,
see page 58.
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
SMU INSTRUMENTS
Lab grade DC device characterization
4200-SCS
A Tektronix Company
55
SMU INSTRUMENTS
1.888.KEITHLEY (U.S. only)
www.keithley.com
56
A Greater Measure of Confidence
A Tektronix Company
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertisement