FMA 5400 Mass Flow Controller Manual

FMA 5400 Mass Flow Controller Manual
User’s Guide
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TABLE OF CONTENTS
1
1. UNPACKING THE FMA 5400/5500 MASS FLOW CONTROLLER............
1.1 Inspect Package for External Damage.............................................. 1
1.2 Unpack the Mass Flow Controller.......................................................1
1.3 Returning Merchandise for Repair.....................................................1
2. INSTALLATION....................................................................2
2.1 Primary Gas Connections.................................................................2
2.2 Electrical Connections...................................................................... 2
2.2.1 Valve Control Configuration....................................................... 4
2.2.2 Remote LCD Readouts.................................................................4
2.2.3 Panel Mounting Readouts............................................................5
3. PRINCIPLE OF OPERATION....................................................5
6
4. SPECIFICATIONS..................................................................
4.1 CE Compliance................................................................................ 7
4.2 Flow Ranges..................................................................................... 8
5. OPERATING INSTRUCTIONS...................................................9
5.1 Preparation and Warm Up................................................................9
10
5.2 Flow Signal Output Readings..............................................................
10
5.3 Swamping Condition...........................................................................
11
5.4 Setpoint Reference Signal..................................................................
12
5.5 Valve OFF Control (Open Collector NPN Compatible)..........................
12
5.6 Valve Test/Purge.................................................................................
13
6. MAINTENANCE....................................................................
13
6.1 Introduction........................................................................................
13
6.2 Flow Path Cleaning..............................................................................
13
6.2.1 Cleaning the Inlet Filter Screen in FMA Models............................
6.2.2 Valve Maintenance for FMA 5400/5500
Series Max. Flow 10, 50 and 100 L/min....................................14
16
7. CALIBRATION PROCEDURES....................................................
16
7.1 Flow Calibration...................................................................................
17
7.2 Calibration of FMA 5400/5500 Mass Flow Controllers.......................
7.2.1 Connections and Initial Warm Up...............................................17
17
7.2.2 Zero Adjustment...........................................................................
18
7.2.3 SPAN Adjustment.........................................................................
18
7.3 Linearity Adjustment..........................................................................
7.3.1.1 Disable Solenoid Valve in FMA 5400/5500
Series Max. Flow FMA 10, 50 and 100 L/min...........................
18
7.3.1.2 Open Motorized Valve in FMA 5400/5500
Series Max. Flow 200, 500 and 1000 L/min..........................18
7.3.2 Connections and Initial Warm..................................................
19
7.3.3 ZERO Adjustment...................................................................19
19
7.3.4 25% Flow Adjustment...............................................................
19
7.3.5 50% Flow Adjustment..............................................................
20
7.3.6 75% Flow Adjustment..............................................................
20
7.3.7 100% Flow Adjustment............................................................
7.3.8.1 Valve Adjustment for FMA 5400/5500
Series Max. Flow 10, 50 and 100 L/min............................... 20
7.3.8.2 Valve Adjustment for FMA 5400/5500
20
Series Max. Flow 200, 500 and 1000 L/min............................
7.3.9 Full Scale Flow Adjustment................................................... 20
7.3.10 25% Flow Adjustment........................................................... 20
7.3.11 50% Flow Adjustment........................................................... 20
7.3.12 75% Flow Adjustment.......................................................... 21
7.3.13 100% Flow Adjustment......................................................... 21
7.4
LCD Display Scaling.................................................................. 21
21
7.4.1 Access LCD Display Circuit......................................................
7.4.2 Adjust Scaling....................................................................... 21
7.4.3 Change Decimal Point........................................................... 22
22
8. TROUBLESHOOTING.............................................................
22
8.1 Common Conditions...........................................................................
23
8.2 Troubleshooting Guide.......................................................................
25
8.3 Technical Assistance............................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................25
APPENDIX 1
COMPONENT DIAGRAM.................................................... 26
APPENDIX 2
GAS FACTOR TABLE ("K" FACTORS).................................. 28
APPENDIX 3
DIMENSIONAL DRAWINGS.................................................32
APPENDIX 4
35
WARRANTY..........................................................................
TRADEMARKS
OMEGA®-is a registered trademark of OMEGA Engineering.
Buna®-is a registered trademark of DuPont Dow Elastometers.
Kalrez®-is a registered trademark of DuPont Dow Elastomers.
Neoprene®-is a registered trademark of DuPont.
VCR Swagelok®-is a registered trademark of Swagelok Marketing Co.
Viton®-is a registered trademark of Dupont Dow Elastomers L.L.C.
1.
UNPACKING THE FMA 5400/5500
MASS FLOW CONTROLLER
1.1
Inspect Package for External Damage
Your FMA 5400/5500 Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock.
Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately.
1.2
Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to OMEGA7 directly.
When unpacking the instrument please make sure that you have all the items indicated on the Packing List. Please report any shortages promptly.
1.3
Returning Merchandise for Repair
Please contact an OMEGA7 customer service representative and request a
Return Authorization Number (AR).
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
1
2.
INSTALLATION
2.1
Primary Gas Connections
Please note that the FMA 5400/5500 Mass Flow Controller will not operate with
liquids. Only clean gases are allowed to be introduced into the instrument. If
gases are contaminated they must be filtered to prevent the introduction of impediments into the sensor.

Caution: FMA 5400/5500 transducers should not be used for monitoring
OXYGEN gas unless specifically cleaned and prepared for such
application. For more information, contact OMEGA7.
Attitude sensitivity of the Mass Flow Controller is ±15F. This means that the gas
flow path of the flow meter must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the FMA 5400/5500 transducer in a stable
environment, free of frequent and sudden temperature changes, high moisture,
and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants. Be sure to observe the direction
of gas flow as indicated by the arrow on the front of the meter when connecting
the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tubings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
Compression fittings should not be removed unless the meter is being cleaned or
calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system. (All FMA 5400/5500’s are checked prior to shipment
for leakage within stated limits. See specifications in this manual.)
2.2
Electrical Connection
FMA 5400/5500 transducers require a +12VDC (+24VDC optional) power supply
with a minimum current rating of 800 mA to operate. The operating power input
is supplied via the 15-pin "D" connector located at the side of the flow transducer
enclosure. On FMA 5400/5500 purchased without an LCD readout, a readout
panel meter, digital multimeter, or other equivalent device is required to observe
the flow signal.
A built in SETPOINT potentiometer is supplied with all FMA 5400/5500 transducers for local control of the flow. A variable analog 0 to 5 VDC (or 4 to 20 mA) reference input is required for remote control.
2
PIN
FUNCTION
1
2
3
4
5
6
7
8
9
10
11
12
Flow Signal Common
0 to 5 VDC Flow Signal Output
Common
Open (Purge)
Common, Power Supply
(unassigned)
+12 VDC (+24 VDC*) Power Supply
Remote Setpoint
4 to 20 mA Return (Common)
Common, Setpoint Signal
+5VDC Reference for Remote Setpoint
Valve Off Control
(Open Collector Compatible)
+12 VDC (+24 VDC *) Power Supply
4 to 20 mA Flow Signal Output
Chassis Ground
13
14
15
FIGURE 2-1 FMA 5400/5500 15-PIN "D" CONNECTOR CONFIGURATION
*+24 VDC power supply configuration is optional only for
FMA 5400/5500 Series Max. Flow 10, 50 and 100 L/min.

WARNING: DO NOT CONNECT 24Vdc POWER SUPPLY UNLESS
YOUR FMA 5400/5500 CONTROLLER WAS ORDERED AND
CONFIGURED FOR 24Vdc.
Important notes:
In general, "D" Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the system.
The power input is protected by a 1600mA M (medium time-lag) resettable fuse.
If a shorting condition or polarity reversal occurs, the fuse will cut power to the
flow transducer circuit. Disconnect the power to the unit, remove the faulty condition, and reconnect the power. The fuse will reset once the faculty condition has
been removed.
Use of the FMA 5400/5500 flow transducer in a manner other than that specified in
this manual or in writing from OMEGA7, may impair the protection provided by the
equipment.
3
FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS
2.2.1
Valve Control Configuration
There are three basic valve control options. (a) LOCAL or REMOTE control; (b) 0
to 5 VDC or 4 to 20 mA setpoint signal - *note: this only applies for the REMOTE
control configuration; (c) 2% cutoff active or not active. NOTE: 2% cutoff not available for FMA 200, 500 and 1000 L/min. When active, the 2% cutoff will shut off
the power to the valve when a setpoint of less than 2% of the full scale flow range
is set. Figure 2-2 shows the jumper configurations for the three basic valve control options.
The factory default jumper settings are: LOCAL control, 2% cutoff off, and 0 to 5
VDC.
FUNCTION
NJ1A
NJ1B
NJ1C
0 to 5 VDC
4 to 20 mA
2-3
1-2
5-6
4-5
8-9
7-8
local
remote
NJ1D
NJ1E
11 - 12
10 - 11
13 - 14
14 - 15
2% cutoff on
2% cutoff off
FIGURE 2-3, VALVE CONTROL CONFIGURATION JUMPERS
2.2.2
Remote LCD Readouts
FMA 5400/5500 Mass Flow Controllers are available with optional remote reading
LCD displays supplied with a three foot long wire to accommodate most applications. This configuration includes the upper block element which serves as the
LCD readout mounting. Special lengths of remote extension wiring (up to 9.5 feet
[3 meters]) are available on request.
4
2.2.3
Panel Mounting Readouts
Another option for the FMA 5400/5500 Mass Flow Controller is the Panel
Mounting Remote Readout.
In this configuration the LCD readout is supplied with a three foot long extension
wire, and no aluminum housing around the LCD. The LCD readout for panel
mounting includes a bezel with two plastic screws which conveniently fit into a rectangular cut-out for panel mounting (see Figure 2-3).
FIGURE 2-3 CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING
3.
PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit. The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
FMA 5400/5500 Mass Flow Controller Series Max. Flow 10, 50 and 100 L/min
also incorporate a proportionating solenoid valve and Series Max. Flow 200, 500
and 1000 L/min a motorized valve. The closed loop control circuit of the FMA
5400/5500 continuously compares the mass flow output with the selected flow
rate. Deviations from the setpoint are corrected by compensating valve adjustments, thus maintaining the desired flow parameters.
5
4.
SPECIFICATIONS
FLOW MEDIUM: Please note that FMA 5400/5500 Mass Flow Controllers are designed to
work with clean gases only. Never try to meter or control flow rates of liquids with any
FMA 5400/5500.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70F F
(21.1F C)] unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
ACCURACY: ±1.5% of full scale, including linearity for gas temperatures ranging from
59F F to 77F F (15F C to 25F C) and pressures of 5 to 60 psia (0.35 to 4.1 bars).
REPEATABILITY: ±0.5% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale/ FC.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME:
FMA 5400/5500 SERIES MAX. FLOW 10 L/min:
300ms time constant; approximately 1 second to within
±2% of set flow rate for 25% to 100% of full scale flow.
FMA 5400/5500 SERIES MAX. FLOW 50 & 100 L/min:
600ms time constant; approximately 2 seconds to within
±2% of set flow rate for 25% to 100% of full scale flow.
FMA 5400/5500 SERIES MAX. FLOW 200, 500 & 1000 L/min:
1800ms time constant; approximately 5 seconds to within
± 2% of set flow rate for 25% to 100% of full scale flow.
GAS PRESSURE: 500 psig (34.5 bars) max; optimum pressure is 20 psig (1.4 bars).
MAX DIFFERENTIAL PRESSURE: 50 psid for FMA 5400/5500 Series Max. Flow 10, 50,
200, 500 and 1000 L/min, 40psid for FMA Series Max. Flow 100 L/min.
GAS AND AMBIENT TEMPERATURE: 32F F to 122F F (0F C to 50F C).
RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10-7 sccs He max to the outside environment.
ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal to vertical;
standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0 to 5 VDC (1000 Ω minimum load impedance) and 4 to 20
mA (0 to 500 Ω loop resistance); 20 mV peak to peak max noise for FMA 10, 50 and 100
L/min and 100 mV peak to peak max noise for FMA 200, 500 and 1000 L/min.
6
COMMAND SIGNAL: Analog 0 to 5 VDC (100 KΩ input impedance) or 4 to 20 mA (0 to
250 Ω input impedance).
Contact OMEGA7 for optional RS232 or IEEE488 interfaces.
TRANSDUCER INPUT POWER: +12 VDC, 800 mA maximum; FMA Series Max. Flow 10,
50 and 100 L/min have an OPTION of +24 VDC, 650 mA maximum - IF SPECIFIED AT
TIME OF ORDERING AND CONFIGURED ACCORDINGLY.
WETTED MATERIALS:
FMA Series Max. Flow 10, 50, 100, 200, 500 and 1000 L/min: Anodized aluminum,
brass, 416 Stainless Steel and 316 stainless steel with VITON® O-rings seals; BUNA-N®,
NEOPRENE® or KALREZ® O-rings are optional.
FMA Series Max. Flow 10, 50, 100, 200, 500 and 1000 L/min: 416 Stainless Steel and
316 stainless steel with VITON® O-rings seals; BUNA-N®, NEOPRENE® or KALREZ® O-rings
are optional.
OMEGA7 makes no expressed or implied guarantees of corrosion resistance of mass flow
meters as pertains to different flow media reacting with components of meters. It is the
customers sole responsibility to select the model suitable for a particular gas based on the
fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS:
FMA Series Max. Flow 10 and 50 L/min:
FMA Series Max. Flow 100 and 200 L/min:
FMA Series Max. Flow 500 L/min:
FMA Series Max. Flow 1000 L/min:
1/4" compression fittings.
3/8”compression fittings.
1/2” compression fittings.
3/4” FNPT ports.
Optional fittings are: 1/8" or 3/8" compression fittings and 1/4" VCR®.
LCD DISPLAY: 3½ digit LCD (maximum viewable digits "1999"), 0.5 inch high characters.
On FMA 5400/5500 aluminum or stainless steel models the LCD display is built into the
upper block element and may be tilted over 90 degrees for optimal viewing comfort.
Remote or panel mounting remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e. standard liters/minute [slpm], standard cubic centimeters/minute [sccm], standard cubic
feet/hour [scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of
order. Contact OMEGA7 when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the FMA
5400/5500 transducer 15-pin "D" connector.
4.1
CE Compliance
Any FMA 5400/5500 bearing a CE marking on it, is in compliance with the below
stated test standards currently accepted.
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991, Group 1, Class
B Immunity Standard: EN 55082-1:1992.
7
4.2 Flow Ranges
Table I Low Flow Mass Flow Controller*
code
scc/min [N2]
code
std liters/min [N2]
02
0 to 10
14
0 to 1
04
0 to 20
16
0 to 2
06
0 to 50
18
0 to 5
08
0 to 100
20
0 to 10
10
0 to 200
12
0 to 500
Table II Medium Flow Mass Flow Controller*
code
std liters/min [N2]
23
15
24
20
26
30
27
40
28
50
Table III High Flow Mass Flow Controller*
code
std liters/min [N2]
40
60
41
80
42
100
43
200
44
500
45
1000
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70FF (21.1FC) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
8
TABLE I PRESSURE DROPS
MAXIMUM
FLOW RATE
SERIES
10 L/min
50 L/min
100 L/min
200 L/min
FLOW RATE
[std liters/min]
MAXIMUM PRESSURE DROP
[mm H2O]
[psid]
up to 10
720
1.06
75
15
2630
3.87
266
20
1360
2.00
138
30
2380
3.50
241
40
3740
5.50
379
50
5440
8.00
551
60
7480
11.00
758
100
12850
18.89
1302
200
7031
10.00
690
[mbar]
500 L/min
500
8437
12.00
827
1000 L/min
1000
10547
15.00
1034
5.
OPERATING INSTRUCTIONS
5.1
Preparation and Warm Up
It is assumed that the Mass Flow Controller has been correctly installed and thoroughly leak tested as described in section (2). Make sure the flow source is OFF.
Apply power to the unit via the 15-pin "D" connector. Make certain that you are
using a power supply that is between +12 and +15 VDC with at least 800 mA current capacity (or optionally, for FMA Series Max. Flow 10, 50 and 100 L/min only,
+24 VDC 650 mA). Allow the Mass Flow Controller to warm-up for a minimum of
15 minutes.
During initial powering of the FMA 5400/5500 transducer, the flow output signal
will be indicating a higher than usual output. This is indication that the FMA
5400/5500 transducer has not yet attained it's minimum operating temperature.
This condition will automatically cancel within a few minutes and the transducer
should eventually zero.
If after the 15 minutes warm-up period, the display still indicates a reading of less
than ± 3.0 % of F.S., readjust the ZERO potentiometer [R34] through the access
window. Before zero adjustment it is good practice to temporarily disconnect the
gas source, to ensure that no seepage or leak occurs in to the meter.

If after the 15 minutes warm-up period, the display indicates a reading
of more than ±3.0 % of F.S., the unit has to be returned to the factory
for repair.
9
FMA Series Max. Flow 10, 50 and 100 L/min CAUTION:

CAUTION: If the valve is left in the AUTO (control) or OPEN (PURGE)
mode for an extended period of time, it may become warm or even hot
to the touch. Use care in avoiding direct contact with the valve during
operation.
Do not run FMA Series Max. Flow 10, 50 and 100 L/min for extended periods of
time with the valve in AUTO or PURGE mode without the flow of gas through the
transducer. Doing so may result in up to 2% f.s. shift in calibration.
5.2
Flow Signal Output Readings
The flow signal output can be viewed either on the LCD display, remote panel
meter, digital multimeter, or other display device used as shown in figure 2.1.
If an LCD display has been ordered with the FMA 5400/5500, the observed reading is in direct engineering units. Such as 0 to 10 sccm or 0 to 100 slpm (0 to
100% indication is optional). Engineering units are shown on the flow transducer's
front label.
Analog output flow signals of 0 to 5 VDC and 4 to 20 mA are attained at the appropriate pins of the 15-pin "D" connector (see Figure 2-1) on the side of the FMA
5400/5500 transducer.
Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. The full scale range and gas for which your meter has been
calibrated are shown on the flow transducer's front label.
The default calibration is performed for 0 to 5 VDC input/output signal. If 4-20 mA
output signal is used for flow indication on the FMA 5400/5500, which was calibrated against 0 to 5 VDC input signal, the accuracy of the actual flow rate will be
in the specified range (+1.5%) of full scale, but the total uncertainty of the output
reading may be in the range of +2.5% of full scale. Optional calibration for 4-20
mA output signal is available upon request at time of order.
For optional RS232 or IEEE488 interfaces please contact OMEGA7.
5.3
Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a condition known as "swamping" may occur. Readings
of a "swamped" meter cannot be assumed to be either accurate or linear. Flow
must be restored to below 110% of maximum meter range. Once flow rates are
lowered to within calibrated range, the swamping condition will end. Operation of
the meter above 110% of maximum calibrated flow may increase recovery time.
10
5.4
Setpoint Reference Signal
FMA 5400/5500 flow controllers have a built-in solenoid valve (FMA Series Max.
Flow 10, 50 and 100 L/min) or motorized valve (FMA Series Max. Flow 200, 500
and 1000 L/min) allow the user to set the flow to any desired flow rate within the
range of the particular model installed. The solenoid valve is normally closed
when no power is applied.
The motorized valve can be in any position depending on the operation mode of
the FMA 5400/5500 during disconnecting of the power. For example if the motorized valve was left in the OPEN purge position after disconnecting power from the
FMA 5400/5500 it will be in the OPEN position. It is the customers responsibility
to provide a solution to shut down the flow in case of a power outage. When
power is applied for the FMA Series Max. Flow 200, 500 and 1000 L/min the valve
automatically closes within the first ten seconds regardless of the set point and
valve override signals.
The setpoint is controlled either locally or remotely. The setpoint input responds
to an analog 0 to 5 VDC or 4 to 20 mA reference voltage (default jumper setting
is 0 to 5 VDC). This voltage is a linear representation of 0 to 100% of the full scale
mass flow rate. Response time to setpoint changes are 1 second (FMA Series
Max. Flow 10 L/min ), 2 seconds (FMA Series Max. Flow 50 and 100 L/min) and 5
seconds (FMA 200, 500 and 1000 L/min) within 2% of the final flow over 25 to
100% of full scale.
For LOCAL flow control, use the built-in setpoint potentiometer located on the
same side as the solenoid valve of the FMA 5400/5500 transducer. While applying flow to the transducer, adjust the setpoint with an insulated screwdriver until
the flow reading is the same as the desired control point. [The display will only
show the actual instantaneous flow rate. There is no separate display for setpoint.]
For REMOTE control of the FMA 5400/5500, an analog reference signal must be
supplied. On pin 11 of the FMA 5400/5500 transducer is a regulated and constant
+5VDC output signal. This signal may be used in conjunction with a local setpoint
potentiometer for flow setting.
FIGURE 5-1 LOCAL SETPOINT POTENTIOMETER CONNECTIONS
11
It is recommended that a potentiometer between 5K to 100K ohm and capable of
at least 10-turns or more for adjustment be used. Use the control potentiometer
to command the percentage of flow desired.
Alternatively, a variable 0 to 5VDC or 4 to 20 mA analog signal may be applied directly to the SETPOINT and COMMON connections of the FMA 5400/5500 transducer
(see Figure 2-1). Be sure to apply the appropriate signal for the designated jumper
settings.
5.5
Valve OFF Control
(Open Collector NPN Compatible)
It may be necessary or desirable to set the flow and maintain that setting while
being able to turn the flow control valve off and on again. Closing of the valve
(without changing the setpoint adjustment) can be accomplished by connecting
pin 12 of the 15-pin "D" connector to COMMON (or power ground). When pin 12
is connected to COMMON, the solenoid valve is not powered and therefore will
remain normally closed regardless of the setpoint. The Motorized valve will be
given the command to close indicated by a green light on top of the unit).
Conversely, when the connection is left open or pin 12 remains unconnected the
valve remains active. The valve will remain active when the VALVE OFF pin
remains "floating". This feature is compatible with open collector NPN transistor
switches, as found in DC output ports of programmable controllers and similar
devices.
The simplest means for utilizing the VALVE OFF control feature, is to connect a
toggle switch between the COMMON and VALVE OFF pins of the FMA 5400/5500
transducer. Toggling the switch on and off will allow for activating and deactivating
the solenoid valve.
5.6
Valve Test/Purge
At times, it may be necessary to purge the flow system with a neutralizing gas
such as pure dry nitrogen. The FMA 5400/5500 transducer is capable of a full
open condition for the valve, regardless of setpoint conditions. Connecting the
OPEN (PURGE) pin (pin 4 on 15-pin "D" connector) to ground will fully open the
valve.
The Motorized Valve: Connect pins 3 and 4 to OPEN the motorized control valve
A red light on top of the valve will indicated an OPEN valve condition, normal for
flow conditions.

Please Note: The motorized control valve stays OPEN even if power is
no longer applied. To CLOSE the Motorized Control Valve, connect pins
3 and 12.
12
6.
MAINTENANCE
6.1
Introduction
It is important that the Mass Flow Controller/Controller is used with clean, filtered
gases only. Liquids may not be metered. Since the RTD sensor consists, in part,
of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential
flow impediment. To protect the instrument a 50 micron (FMA Series Max. Flow 10
L/min) or 60 micron (FMA Series Max. Flow 50 and 100 L/min) filter is built into the
inlet of the flow transducer. The filter screen and the flow paths may require occasional cleaning as described below. There is no other recommended maintenance
required. It is good practice, however, to keep the meter away from vibration, hot
or corrosive environments and excessive RF or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section (7). It is recommended that units are returned to OMEGA7 for repair service and calibration.

6.2
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATORY THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY
PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY
INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS.
Flow Path Cleaning
Inspect visually the flow paths at the inlet and outlet ends of the meter for any
debris that may be clogging the flow through the meter. Remove debris carefully
using tweezers and blowing low pressure clean air or Nitrogen from the inlet side.
If the flow path is not unclogged, please return meter to OMEGA7 for servicing.

6.2.1
Do not attempt to disassemble the sensor. Disassembly will invalidate
calibration.
Cleaning the Inlet Filter Screen in
FMA Series Max. Flow 10 L/min
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths. The particular RFE used in a given Mass Flow Controller depends on
the gas and flow range of the instrument
13
Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible. Push the screen out through the inlet fitting. Clean
or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying before re-assembling.
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.

Note: Over tightening will deform and render the RFE defective.
It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).

6.2.2
IT IS NOT RECOMMENDED TO ATTEMPT TO DISASSEMBLE,
OR REPAIR FMA SERIES MAX. FLOW 50, 100, 200, 500
and 1000 L/min. DISASSEMBLY NECESSITATES RE-CALIBRATION.
Valve Maintenance for FMA Series Max. Flow
10, 50 and 100 L/min
The solenoid valve consists of 316 and 416 stainless steel, and VITON® (or
optional NEOPRENE® or KALREZ®) O-rings and seals. No regular maintenance
is required except for periodic cleaning.
It is advisable that at least one calibration point be checked after re-installing the
inlet fitting - see section (7).
14
ADJUST. SCREW
O-RING
COMPRESSION
SPRING
NUT
SPIRAL SPRING
GUARD
ASSEMBLY
CORE
SPIDER SPRING
STEM
SEAT-VITON
INSERT
O-RING
4-40 SOCKET
SCREW
ORIFICE
VALVE BODY
O-RING
BLOCK
05-19-2006
FIGURE 6-1 SOLENOID VALVE
Various corrosive gases may demand more frequent replacement of VITON®
O-rings and seals inside the valve. Be sure to use an elastomer material, appropriate for your specific gas application. Contact OMEGA7 for optional sealing
materials available.
Set the FMA 5400/5500 into PURGE mode, and attempt to flush through with a
clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening
the valve is to remove the plastic cap on top of the valve, and turn the set screw
counterclockwise until it stops. See section 7.3 for valve adjustment, to return the
valve to functional use.]
15
7.

7.1
CALIBRATION PROCEDURES
NOTE: Removal of the factory installed calibration seals and/or any
adjustments made to the meter, as described in this section, will void
any calibration warranty applicable.
Flow Calibration
OMEGA7 Engineering Flow Calibration Laboratory offers professional calibration
support for Mass Flow Meter and Controllers, using precision calibrators under
strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed at customers' site using available standards.
Factory calibrations are performed using NIST traceable precision volumetric calibrators incorporating liquid sealed frictionless actuators.
Generally, calibrations are performed using dry nitrogen gas. The calibration can
then be corrected to the appropriate gas desired based on relative correction [K]
factors shown in the gas factor table - see Appendix 2. A reference gas, other than
nitrogen, may be used to closer approximate the flow characteristics of certain
gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The appropriate relative correction factor should be recalculated - see section (9).
It is standard practice to calibrate Mass Flow Meter/Controllers with dry nitrogen
gas at 70F F (21.1F C), 20 psig (1.4 bars) [25 psig (1.7 bars) for FMA Series Max.
Flow 100 L/min ] inlet pressure and 0 psig (0 bar) outlet pressure. It is best to calibrate the FMA 5400/5500 transducers to actual operating conditions. Specific
gas calibrations of non-toxic and non-corrosive gases are available at specific
conditions. Please contact OMEGA7 for a price quotation.
It is recommended that a flow calibrator of at least four times better collective
accuracy than that of the Mass Flow Meter/Controller to be calibrated be used.
Equipment required for calibration includes a flow calibration standard and a certified high sensitivity multimeter (which together have a collective accuracy of
±0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example:
metering needle valve) installed upstream from the Mass Flow Controller and a
pressure regulated source of dry filtered nitrogen gas (or other suitable reference
gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.
16
CALIBRATION POTENTIOMETER LOCATIONS ARE ILLUSTRATED IN FIGURE 9-1.
FIGURE 7-1 CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS
(BACK OF FMA 5400/5500 )
7.2
Calibration of FMA 5400/5500
Mass Flow Controllers
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
FMA 5400/5500 Mass Flow Controllers may be field recalibrated/checked for the
same range they were originally factory calibrated for. When linearity adjustment
is needed, or flow range changes are being made proceed to step 7.3. Flow range
changes may require a different Restrictor Flow Element (RFE). Additionally, a different Solenoid Valve Orifice may also be required (see Table VI). Consult
OMEGA7 for more information.
7.2.1
Connections and Initial Warm Up
At the 15-pin "D" connector of the FMA 5400/5500 transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA)
- (see Figure 2-1).
When using a remote setpoint for flow control, the appropriate reference signal
should also be connected to the 15-pin "D" connector at pins [8] and [10] - (see
Figure 2-1). Power up the Mass Flow Controller for at least 30 minutes prior to
commencing the calibration procedure.
7.2.2
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage or
leak occurs into the meter, it is good practice to temporarily disconnect the gas source.
17
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively) at
zero flow.
7.2.3
SPAN Adjustment
Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow.
Check the flow rate indicated against the flow calibrator. If the deviation is less
than ±10% of full scale reading, correct the SPAN potentiometer [R33] setting by
using the insulated screwdriver through the access window, to eliminate any deviation. If the deviation is larger than ±10% of full scale reading, a defective condition may be present.
LIKELY REASONS FOR A MALFUNCTIONING SIGNAL MAY BE:
✓
✓
✓
✓
Occluded or contaminated sensor tube.
Leaking condition in the FMA 5400/5500 transducer or the gas line and fittings.
For gases other than nitrogen, recheck appropriate "K" factor from Gas Factor Table.
Temperature and/ or pressure correction errors.
See also section (8) TROUBLESHOOTING. If after attempting to remedy the
above conditions, a malfunction still persists, return the meter for factory service,
see section (1).
At this point the calibration is complete. However, it is advisable that several additional points between 0 and 100%, such as 25%, 50%, and 75% flow be checked.
If discrepancies are found, proceed to step 7.3 for Linearity Adjustment.
7.3
Linearity Adjustment
All adjustments in this section are made from the outside of the meter, there is no
need to disassemble any part of the instrument.
7.3.1.1
Disable Solenoid Valve in
FMA Series Max. Flow 10, 50 and 100 L/min
Set the valve into PURGE mode. This step essentially bypasses the flow control
properties of the transducer. The unit will now act as a Mass Flow Meter.
7.3.1.2 Open Motorized Valve in
FMA Series Max. Flow 200, 500 and 1000 L/min
Set the valve to PURGE mode by connecting pin 4 to pin 3 (ground), on 15pin
D-connector.

CAUTION: FOR FMA Series Max. Flow 10, 50 and 100 L/min - If the
valve is left in the AUTO (control) or OPEN (PURGE) mode for an
extended period of time, it may become warm or even hot to the touch.
Use care in avoiding direct contact with the valve during operation.
18
7.3.2
Connections and Initial Warm Up
On the transducer, connect the multimeter to output pins [1] and [2] for 0 to 5 VDC
(or pins [9] and [14] for 4 to 20 mA) of the 15-pin "D" connector - (see Figure 2-1).
If calibration to a new flow range or different gas is being performed, it may be
necessary to remove any jumpers at J1A, J1B, and J1C before beginning linearizing procedure.
Power up the Mass Flow Controller for at least 30 minutes prior to commencing
the calibration procedure.
7.3.3
ZERO Adjustment
Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage
or leak occurs into the meter, it is good practice to temporarily disconnect the gas
source.
Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively) at
zero flow.
7.3.4
25% Flow Adjustment
Reconnect the gas source. Using the flow regulator, adjust the flow rate to 25% of
full scale flow. Check the flow rate indicated against the flow calibrator. Adjust the
setting for potentiometer [R33] by using the insulated screwdriver through the
access window, until the output of the flow meter reads 1.25VDC ±63mV (or 8mA
±0.25mA).
Linearizer
Function
J1A
(50%)
J1B
(75%)
J1C
(100%)
Decrease
Increase
1-2
2-3
4-5
5-6
7-8
8-9
FIGURE 7-2 CALIBRATION POTENTIOMETER AND JUMPERS
7.3.5
50% Flow Adjustment
Using the flow regulator, increase the flow rate to 50% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 2.50VDC ±63mV (or 12mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1A] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R38] by using the insulated screwdriver through the
access window, until reading is within specification.
19
7.3.6
75% Flow Adjustment
Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. The output of the flow meter should
read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is outside of that range,
place the jumper at [J1B] as appropriate to increase or decrease the signal. Adjust
the setting for potentiometer [R39] by using the insulated screwdriver through the
access window, until reading is within specification.
7.3.7
100% Flow Adjustment
Using the flow regulator, increase the flow rate to 100% of full scale flow. Check
the flow rate indicated against the flow calibrator. The output of the flow meter
should read 5.00VDC ±63mV (or 20mA ±0.25mA). If the reading is outside of that
range, place the jumper at [J1C] as appropriate to increase or decrease the signal. Adjust the setting for potentiometer [R40] by using the insulated screwdriver
through the access window, until reading is within specification.
Repeat steps 7.3.4 to 7.3.7 at least once more.
7.3.8.1 Valve Adjustment for
FMA Series Max. Flow 10, 50 and 100 L/min
Discontinue the PURGE mode (set valve for the closed position). Apply an inlet
pressure of 5 psig, and atmospheric pressure at the outlet. If a small flow occurs,
turn the set screw on top of the solenoid valve clockwise until the flow through the
FMA 5400/5500 just stops.
7.3.8.2 Valve Adjustment for
FMA Series Max. Flow 200, 500 and 1000 L/min
DO NOT adjust the motorized valve for FMA Series Max. Flow 200, 500 and 1000
L/min. The motorized valve for these models has been pre-adjusted at the factory.
7.3.9
Full Scale Flow Adjustment
Fully open the flow regulator upstream of the FMA 5400/5500. Increase the inlet
pressure to 20 psig (25 psig for FMA Series Max. Flow 100 L/min). Apply a +5.00
VDC (100% full scale flow) setpoint reference. Using the calibrator check the flow
rate. If necessary, adjust R33 to match the desired full scale flow rate. [In control
mode, turning R33 clockwise will decrease the flow. Conversely, turning R33
counterclockwise will increase the flow through the FMA 5400/5500.]
7.3.10
25% Flow Adjustment
Change the setpoint to 1.25 VDC to control at 25% of full scale flow. Check the flow
rate indicated against the flow calibrator. If the flow rate is not within ±0.75% of full
scale, re-adjust the setting for potentiometer [R33], until the flow output is correct.
7.3.11
50% Flow Adjustment
Change the setpoint to 2.50 VDC to control at 50% of full scale flow. Check the flow
rate indicated against the flow calibrator. If the flow rate is not within ±0.75% of full
scale, re-adjust the setting for potentiometer [R38], until the flow output is correct.
20
7.3.12
75% Flow Adjustment
Change the setpoint to 3.75 VDC to control at 75% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R39], until the flow output is
correct.
7.3.13
100% Flow Adjustment
Change the setpoint to 5.00 VDC to control at 100% of full scale flow. Check the
flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75%
of full scale, re-adjust the setting for potentiometer [R40], until the flow output is
correct.
Repeat steps 7.3.10 to 7.3.13 at least once more.
TABLE II FMA 5400/5500 SOLENOID VALVE ORIFICE SELECTION TABLE
FLOW RATE [ N2 ]
under 10 sccm
10 to 1000 sccm
1 to 5 slpm
5 to 10 slpm
10 to 15 slpm
15 to 20 slpm
20 to 50 slpm
50 to 100 slpm
ORIFICE PART NUMBER
OR.010
OR.020
OR.040
OR.055
OR.063
OR.073
OR.094
OR.125
7.4
LCD Display Scaling
It may be desirable to re-scale the output reading on the LCD readout supplied
with certain FMA 5400/5500 transducers. Re-calibration for a new flow range or
different engineering units are two examples of when this may be necessary.
7.4.1
Access LCD Display Circuit
Carefully remove the LCD from the FMA 5400/5500 or panel mounted surface.
Remove the aluminum housing on the side of the connection cable. Slide the
LCD assembly out of the aluminum housing.
7.4.2
Adjust Scaling
Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA signal at the 15-pin "D" connector, set the flow rate on the FMA 5400/5500 to full
scale flow (5 VDC or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the LCD printed circuit board to desired full scale flow reading.
21
7.4.3
Change Decimal Point
To change the decimal place on the LCD display readout, simply move the jumper
to the appropriate location on the 8-pin header block. The numbers are printed to
the side of the connections. Do not attempt to place more than one jumper for
decimal setting.
JUMPER POSITION
"0"
"1"
"2"
"3"
MAXIMUM SCALABLE DISPLAY READING
1999
199.9
19.99
1.999
8.
TROUBLESHOOTING
8.1
Common Conditions
Your Mass Flow Controller/Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was
calibrated in accordance to your desired flow and pressure conditions for a given
gas or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
✓ Are all cables connected correctly?
✓ Are there any leaks in the installation?
✓ Is the power supply correctly selected according to requirements?
When several meters are used a power supply with appropriate current
rating should be selected.
✓ Were the connector pinouts matched properly? When interchanging with
other manufacturers' equipment, cables and connectors must be carefully
wired for correct pin configurations.
✓ Is the pressure differential across the instrument sufficient?
22
8.2
Troubleshooting Guide
INDICATION
LIKELY REASON
REMEDY
lack of reading
or output
power supply off
check connection of power supply
fuse blown
disconnect transducer from
power supply; remove the
shorting condition or check
polarities; fuse resets
automatically
filter screen
obstructed at inlet
flush clean or disassemble to
remove impediments or replace
occluded sensor tube
flush clean or disassemble to
remove impediments or return to
factory for replacement
pc board defect
return to factory for replacement
valve adjustment wrong
re-adjust valve (section 7.3)
inadequate gas pressure
apply appropriate gas pressure
filter screen obstructed
at inlet
flush clean or disassemble to
remove impediments or replace
ground loop
signal and power supply
commons are different
inadequate gas pressure
apply appropriate gas pressure
cable or connector malfunction
check cables and all connections
or replace
setpoint is too low
(<2% of full scale)
re adjust setpoint or disable 2%
cutoff feature (section 2.2)
valve adjustment wrong
re-adjust valve (section 7.3)
gas leak
locate and correct
pc board defective
return to factory for replacement
defective sensor
return to factory for replacement
gas leak
locate and repair
flow reading
does not
coincide with
the setpoint
no response
to setpoint
unstable or
no zero reading
full scale output
at "no flow"
condition or
with valve
closed
23
INDICATION
LIKELY REASON
REMEDY
calibration off
gas metered is not the same as
what meter was calibrated for
use matched calibration
composition of gas changed
see K factor tables in APPENDIX 2
gas leak
locate and correct
pc board defective
return to factory for replacement
RFE dirty
flush clean or disassemble to
remove impediments
occluded sensor tube
flush clean or disassemble to
remove impediments or return to
factory for replacement
filter screen obstructed
at inlet
flush clean or disassemble to
remove impediments or replace
transducer is not
mounted properly
check for any tilt or change in the
mounting of the transducer;
generally, units are calibrated for
horizontal installation
(relative to the sensor tube)
incorrect valve adjustment
re-adjust valve (section 7.3)
pc board defect
return to factory for replacement
cable or connectors
malfunction
check cable and connectors
or replace
differential pressure too high
decrease pressure to correct level
insufficient inlet pressure
adjust appropriately
incorrect valve adjustment
re-adjust valve (section 7.3)
pc board defect
return to factory for replacement
cable or connectors
malfunction
check cable and connectors
or replace
orifice obstructed
disassemble to remove
impediments or return to factory
FMA 5400/5500
does not work
in open position
FMA 5400/5500
valve does
not work in
closed position
24
For best results it is recommended that instruments are returned to the factory for
servicing. See section 1.3 for return procedures.
8.3
Technical Assistance
OMEGA7 Engineering will provide technical assistance over the phone to qualified repair personnel. Please call our Flow Department at 800-872-9436 Ext.
2298.
9.
CALIBRATION CONVERSIONS FROM
REFERENCE GASES
The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:
1
d X Cp
where d = gas density (gram/liter)
= coefficient of specific heat (cal/gram)
Cp
K gas =
Note: in the above relationship that d and Cp are usually chosen at the same conditions (temperature, pressure).
If the flow range of a Mass Flow Controller remains unchanged, a relative K factor is used to relate the calibration of the actual gas to the reference gas.
K =
where Qa
Qr
Ka
Kr
=
=
=
=
Qa
Qr
=
Ka
Kr
mass flow rate of an actual gas (sccm)
mass flow rate of a reference gas (sccm)
K factor of an actual gas
K factor of a reference gas
For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:
QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccm
where K = relative K factor to reference gas (oxygen to nitrogen)
25
APPENDIX 1
COMPONENTS DIAGRAM
FMA 5400/5500 METERING PC BOARD (TOP SIDE)
26
COMPONENTS DIAGRAM
METERING PC BOARD (BOTTOM SIDE)
27
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)
Actual Gas
K Factor
Relative to N2
Cp
[Cal/g]
Density
[g/I]
AcetyleneC2H2
Air
Allene (Propadiene) C3H4
Ammonia NH3
Argon Ar
Arsine AsH3
Boron Trichloride BCl3
Boron Trifluoride BF3
Bromine Br2
Boron Tribromide Br3
Bromine Pentaflouride BrF5
Bromine Trifluoride BrF3
Bromotrifluoromethane (Freon-13 B1) CBrF3
1,3-Butadiene C4H6
Butane C4H10
1-Butane C4H8
2-Butane C4H8 CIS
2-Butane C4H8 TRANS
Carbon Dioxide CO2
Carbon Disulfide CS2
Carbon Monoxide CO
Carbon Tetrachloride CCl4
Carbon Tetrafluoride (Freon-14)CF4
Carbonyl Fluoride COF2
Carbonyl Sulfide COS
Chlorine Cl2
Chlorine Trifluoride ClF3
Chlorodifluoromethane (Freon-22)CHClF2
Chloroform CHCl3
Chloropentafluoroethane(Freon-115)C2ClF5
Chlorotrifluromethane (Freon-13) CClF3
CyanogenC2N2
CyanogenChloride CICN
Cyclopropane C3H5
Deuterium D2
Diborane B2H6
.5829
1.0000
.4346
.7310
1.4573
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.7382
.6026
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
.6130
.4584
1.00
.4357
.4036
.240
.352
.492
.1244
.1167
.1279
.1778
.0539
.0647
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177
1.722
.508
1.162
1.293
1.787
.760
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877
1.799
1.235
28
Actual Gas
K Factor
Relative to N2
.1947
.3538
.4252
.2522
.4044
.2235
.4271
.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668
1.454
.2421
.1792
1.0106
1.000
1.000
1.070
Dibromodifluoromethane CBr2F2
Dichlorodifluoromethane (Freon-12) CCl2F2
Dichlofluoromethane (Freon-21) CHCl2F
Dichloromethylsilane (CH3)2SiCl2
Dichlorosilane SiH2Cl2
Dichlorotetrafluoroethane (Freon-114) C2Cl2F4
1,1-Difluoroethylene (Freon-1132A) C2H2F2
Dimethylamine (CH3)2NH
Dimethyl Ether (CH3)2O
2,2-Dimethylpropane C3H12
Ethane C2H6
Ethanol C2H6O
Ethyl Acetylene C4H6
Ethyl Chloride C2H5Cl
Ethylene C2H4
Ethylene Oxide C2H4O
Fluorine F2
Fluoroform (Freon-23) CHF3
Freon-11 CCl3F
Freon-12 CCl2F2
Freon-13 CClF3
Freon-13B1 CBrF3
Freon-14 CF4
Freon-21 CHCl2F
Freon-22 CHClF2
Freon-113 CCl2FCClF2
Freon-114 C2Cl2F4
Freon-115 C2ClF5
Freon-C318 C4F8
Germane GeH4
Germanium Tetrachloride GeCl4
Helium He
Hexafluoroethane C2F6 (Freon-116)
Hexane C6H14
Hydrogen H2
Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
29
Cp
[Cal/g]
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
.1834
.3968
3.419
.0861
.1912
.3171
Density
[g/I]
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786
6.157
3.845
.0899
3.610
1.627
1.206
Actual Gas
K Factor
Relative to N2
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H2Se
Hydrogen Sulfide H2S
Iodine Pentafluoride IF5
Isobutane CH(CH3)3
Isobutylene C4H6
Krypton Kr
Methane CH4
Methanol CH3
Methyl Acetylene C3H4
Methyl Bromide CH2Br
Methyl Chloride CH3Cl
Methyl Fluoride CH3F
Methyl Mercaptan CH3SH
Methyl Trichlorosilane (CH3)SiCl3
Molybdenum Hexafluoride MoF6
Monoethylamine C2H5NH2
Monomethylamine CH3NH2
Neon NE
Nitric Oxide NO
Nitrogen N2
Nitrogen Dioxide NO2
Nitrogen Trifluoride NF3
Nitrosyl Chloride NOCl
Nitrous Oxide N2O
Octafluorocyclobutane (Freon-C318) C4F8
Oxygen O2
Oxygen Difluoride OF2
Ozone
Pentaborane B5H9
Pentane C5H12
Perchloryl Fluoride ClO3F
Perfluoropropane C3F8
Phosgene COCl2
Phosphine PH3
Phosphorous Oxychloride POCl3
Phosphorous Pentafluoride PH5
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438
1.070
.36
.3021
30
Cp
[Cal/g]
Density
[g/I]
.3479
.0545
.1025
.2397
.1108
.3872
.3701
.0593
.5328
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
.1324
.1610
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.715
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
6.843
5.620
Actual Gas
K Factor
Relative to N2
Cp
[Cal/g]
Density
[g/I]
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
.2031
.161
8.36
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
Phosphorous Trichloride PCl3
Propane C3H8
Propylene C3H6
Silane SiH4
Silicon Tetrachloride SiCl4
Silicon Tetrafluoride SiF4
Sulfur Dioxide SO2
Sulfur Hexafluoride SF6
Sulfuryl Fluoride SO2F2
Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N2F4
Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl3
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl2FCClF2
Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl4
Trichloro Ethylene C2HCl3
Trimethylamine (CH3)3N
Tungsten Hexafluoride WF6
Uranium Hexafluoride UF6
Vinyl Bromide CH2CHBr
Vinyl Chloride CH2CHCl
Xenon Xe
31
APPENDIX 3
DIMENSIONAL DRAWINGS
SERIES MAX. FLOW 10 L/min MASS FLOW CONTROLLER
NOTE: OMEGA7 reserves the right to change designs and dimensions at its sole discretion at any time
without notice. For certified dimensions please contact OMEGA7.
32
SERIES MAX FLOW 50 and 100 L/min MASS FLOW CONTROLLER
SERIES MAX FLOW 200 L/min MASS FLOW CONTROLLER
NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time
without notice. For certified dimensions please contact OMEGA.
33
SERIES MAX FLOW 500 L/min MASS FLOW CONTROLLER
SERIES MAX FLOW 1000 L/min MASS FLOW CONTROLLER
NOTE: OMEGA reserves the right to change designs and dimensions at its sole discretion at any time
without notice. For certified dimensions please contact OMEGA.
34
WARRANTY/DISCLAIMER
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and workmanship for a
period of 13 months from date of purchase. OMEGA’s Warranty adds an additional one (1) month grace
period to the normal one (1) year product warranty to cover handling and shipping time. This ensures
that OMEGA’s customers receive maximum coverage on each product.
If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service
Department will issue an Authorized Return (AR) number immediately upon phone or written request.
Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no
charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser,
including but not limited to mishandling, improper interfacing, operation outside of design limits, improper
repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been
tampered with or shows evidence of having been damaged as a result of excessive corrosion; or current,
heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions
outside of OMEGA’s control. Components which wear are not warranted, including but not limited to contact points, fuses, and triacs.
OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA neither assumes responsibility for any omissions or errors nor assumes liability for any damages that
result from the use of its products in accordance with information provided by OMEGA, either verbal or written. OMEGA warrants only that the parts manufactured by it will be as specified and free
of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND
WHATSOEVER, EXPRESS OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL IMPLIED WARRANTIES
INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY: The remedies of purchaser set forth
herein are exclusive, and the total liability of OMEGA with respect to this order, whether based on
contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the
purchase price of the component upon which liability is based. In no event shall OMEGA be liable
for consequential, incidental or special damages.
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a
“Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in
medical applications or used on humans. Should any Product(s) be used in or with any nuclear
installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes
no responsibility as set forth in our basic WARRANTY / DISCLAIMER language, and, additionally,
purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever
arising out of the use of the Product(s) in such a manner.
RETURN REQUESTS/INQUIRIES
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department. BEFORE
RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN AUTHORIZED
RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN ORDER TO
AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the
return package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent
breakage in transit.
FOR WARRANTY RETURNS, please have
the following information available BEFORE
contacting OMEGA:
1. Purchase Order number under which
the product was PURCHASED,
2. Model and serial number of the product
under warranty, and
3. Repair instructions and/or specific
problems relative to the product.
FOR NON-WARRANTY REPAIRS, consult OMEGA
for current repair charges. Have the following
information available BEFORE contacting OMEGA:
1. Purchase Order number to cover the
COST of the repair,
2. Model and serial number of the
product, and
3. Repair instructions and/or specific problems
relative to the product.
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest in technology and engineering.
OMEGA is a registered trademark of OMEGA ENGINEERING, INC.
© Copyright 2001 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part,
without the prior written consent of OMEGA ENGINEERING, INC.
35
Where Do I Find Everything I Need for
Process Measurement and Control?
OMEGA… Of Course!
Shop online at www.omega.com
TEMPERATURE
5
5
5
5
5
Thermocouple, RTD & Thermistor Probes, Connectors, Panels & Assemblies
Wire: Thermocouple, RTD & Thermistor
Calibrators & Ice Point References
Recorders, Controllers & Process Monitors
Infrared Pyrometers
PRESSURE, STRAIN AND FORCE
5
5
5
5
Transducers & Strain Gages
Load Cells & Pressure Gages
Displacement Transducers
Instrumentation & Accessories
FLOW/LEVEL
5
5
5
5
Rotameters, Gas Mass Flow Meter & Flow Computers
Air Velocity Indicators
Turbine/Paddlewheel Systems
Totalizers & Batch Controllers
pH/CONDUCTIVITY
5
5
5
5
pH Electrodes, Testers & Accessories
Benchtop/Laboratory Meters
Controllers, Calibrators, Simulators & Pumps
Industrial pH & Conductivity Equipment
DATA ACQUISITION
5
5
5
5
5
Data Acquisition & Engineering Software
Communications-Based Acquisition Systems
Plug-in Cards for Apple, IBM & Compatibles
Datalogging Systems
Recorders, Printers & Plotters
HEATERS
5
5
5
5
5
Heating Cable
Cartridge & Strip Heaters
Immersion & Band Heaters
Flexible Heaters
Laboratory Heaters
ENVIRONMENTAL
MONITORING AND CONTROL
5
5
5
5
5
5
Metering & Control Instrumentation
Refractometers
Pumps & Tubing
Air, Soil & Water Monitors
Industrial Water & Wastewater Treatment
pH, Conductivity & Dissolved Oxygen Instruments
M2898/0506
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