Instantly Observe Any Object Entirely in Focus

Instantly Observe Any Object Entirely in Focus
Digital Microscope
VHX-5000
Instantly Observe Any Object Entirely in Focus
The New Standard for Microscopes
The VHX is an all-in-one microscope that incorporates
observation, image capture, and measurement
capabilities. Any user, regardless of their experience, can
now obtain high-quality, fully-focused images in an instant.
2
View any area completely in focus in less than a second
Advanced functions eliminate the need for focus adjustment
Eliminate focus adjustment
Real-time depth composition
P. 8
3
EVOLUTION OF KEYENCE DIGITAL MICROSCOPES
Quick and easy observation - KEYENCE continues to develop easy-to-use products that enable high-quality imaging by anyone.
KEYENCE relies on customer feedback when developing future microscope products to ensure that each system meets and
exceeds the needs of users.
FIRST GEN ER ATIO N
Magnified observation without looking through eyepieces
For the first time, a group of people are able to observe a large depth-of-field image on a
monitor quickly and easily. Based on this concept, the first-generation model, VH-6000, made
its debut by using a 280,000 pixel CCD camera. Since then, development has continued to
increase the camera resolution while simplifying the imaging process.
1990
2003
FI RS T G EN ER AT I O N
S ECO N D G EN ER AT I O N
VH-6000
VH-6300
VH-7000
VH-8000
VHX-100
VHX-200
SECO N D G EN ER ATI O N
Marking the beginning of a digital era with 3D observation
A growing need to view objects entirely in focus, even at high magnification, led
to the development of a depth composition function (an algorithm that combines
several partially-focused images into a fully-focused image). This technology
paved the way for 3D observation.
4
TH IRD GEN ER ATIO N
16-bit imaging with high-level gradation
Two difficult types of samples to image are shiny surfaces and low contrast surfaces - one
produces too much glare while the other has few detectable features. These issues were
resolved with the development of a technology that captures images at different brightness
levels and then produces an image with a high level of color gradation. This made it possible to
thoroughly inspect even the most challenging materials.
2006
2014
T H I R D G EN ER AT I O N
FO U RT H G EN ER AT I O N
VHX-500
VHX-600
VHX-900
VHX-1000
VHX-2000
VHX-5000
FO U RTH G EN ER ATI O N
Fully-focused images in real-time
The ability for any user to be able to quickly see a fully-focused image at all times
was an increasing demand. Every component of the hardware had to be reviewed to
meet this request. The system will now automatically adjust focus as the user moves
a part so that focused images are seen at all times. The speed and ease with which
this is achieved mark the beginning of a new style of magnified observation.
5
Product Concept
Advanced usability
The VHX covers all basic analysis operations
- observation, image capture, and
measurement - in a single unit.
Achieves fast, easy, and accurate imaging
that cannot be accomplished with traditional
optical microscopes.
23-inch
full HD
LCD monitor
DVD
LAN
Light source
USB 3.0
Even large samples can be observed
non-destructively.
OBSERVATION
Depth-of-field 20 times greater than
optical microscopes
This is one of the fundamental features of VHX Digital
Microscopes that greatly increases ease-of-use.
The lenses, camera, and graphics engine are designed
to optimize the relationship between depth-of-field,
resolution, and brightness.
6
Pins (100x)
Multi-angle observation
View an object from any angle by tilting the lens up to
90 degrees and rotating the stage 360 degrees.
Because the stand and stage can be moved instead of
the actual part, observing a target from various angles
can be done without having to manipulate the part by
hand.
Easy Mode provides everyone with quick access to
advanced functions
Easy Mode contains frequently used functions to allow everyone to perform analysis
under optimal conditions. Even novice users can effectively utilize advanced
functions.
IMAGE CAPTURE
MEASUREMENT
Rapidly save images and data
Measure directly on the screen
The built-in 500 GB HDD allows images, videos, and
measurement data to be saved to the system. The saved
files can be viewed on a PC or other devices easily via
LAN or USB. Templates can also be created to generate
reports automatically.
Quality assurance/Research/
Development departments
Dimensional measurements can be made on the
microscope by just clicking the area to be measured
with the mouse. Measurement data is stored with the
image file for easy information sharing, and results can
even be exported as a CSV file.
Manufacturing/
Engineering departments
Company LAN
VHX-5000
Overseas offices
Other factories
Network
7
Advanced Functions
View any area completely in focus with
Real-time Depth Composition
Due to the high frame rate of its camera, the VHX can quickly scan through the focal
range of a sample and recognize areas of focus to build a fully-focused image. This
provides intuitive and instant focusing, and satisfies the universal need for focused
magnified observation.
Connector pins (50x)
You can observe a fully-focused image instantly by just moving the motorized X-Y stage to
a desired area.
Instant full focus
Faster observation and more thorough
eliminates manual adjustments
analysis using increased sample data
No need for focus adjustment
8
No need for manual depth composition
Fully-focused observation without any user adjustments
A fully-focused image can be captured in less than one second. To observe another area
of interest, just move the stage and the system will automatically generate a fully-focused
image of your target. The VHX has revolutionized observation by providing fully-focused
images of objects without the need for focus adjustments or manual depth composition.
Conventional
Select the field-of-view... adjust the focus...
move the lens through
the z range for
composition...
finally obtain a fullyfocused image
VHX-5000
A fully-focused image is
captured in under
one second. 3D image
data is captured
simultaneously.
Just select the area to
view...
view a fully-focused
image...
view a 3D image
KEYENCE’s original digital focusing technology
The industry’s fastest, 50 frames per second camera, sends out a large amount of image
data with every focus position, and the REMAX V next-generation graphics engine
processes this data at a super-high speed. This technology identifies the data with the
best focus for each pixel and generates a fully-focused, magnified image instantly on the
screen.
Industry’s fastest
50 frames/sec.
camera
REMAX V
Next-generation graphics
engine
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Advanced Functions
Improving image resolution:
High-resolution HDR
A high-resolution image is obtained by using short-wavelength light and the HDR (High
Dynamic Range) function to capture multiple images at varying shutter speeds. This
produces a high color gradation image with high resolution and sharp contrast that was
previously impossible to obtain.
Normal observation of IC (1500x)
High resolution HDR observation of IC (1500x)
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Pixel shift technology
Short-wavelength filter achieves higher resolution
The optimal wavelength of light is selected based on the characteristics of the lens to
capture sharp images with minimal chromatic aberration. By combining short wavelength
light with KEYENCE’s original pixel shift technology, image resolution can be increased
by up to 25%.
Chart
High resolution observation
Normal observation
HDR+ function
The camera captures multiple images at different brightness levels by varying the shutter
speed, and then produces an image with a high level of color gradation data. This allows for
clear observation of targets with glare or low contrast that would be impossible to image
accurately with traditional microscopes. A new algorithm that accurately represents the colors
of the target makes observation more similar to that with the naked eye.
Gradations obtained by using
a single shutter
8 bits
(256 levels)
Conventional
method
(65536 levels)
HDR
function
DISADVANTAGES
Contrast enhancement
Conventional [8 bits]
❚ A wider range of brightness levels diminishes the
perceived glare.
❚ Enhances low contrast areas for improved detail.
❚ Natural colors are accurately reproduced.
Glare removal
Conventional [8 bits]
Plastic cap (50x)
256 times the
gradations compared
to the conventional
method
ADVANTAGES
❚ The narrow range of brightness levels causes glare
in areas that are oversaturated.
❚ Subtle changes in contrast cannot be visualized
because of coarse color resolution.
❚ Colors differ between what the human eye sees and
the captured image.
HDR [16 bits]
Gradations obtained
by varying the
shutter speed
16 bits
HDR [16 bits]
Color reproduction
Conventional [8 bits]
Solar cell (50x)
HDR [16 bits]
PC board (50x)
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High-Resolution, Wide Area Imaging:
Ultra High-speed Image Stitching
With any optical system, as the magnification is increased the field-of-view decreases. The VHX
incorporates an image stitching algorithm with a motorized XY stage to automatically move and
stitch together adjacent images in real-time. This will provide users with a high-resolution (up to
20,000 x 20,000 pixels), overall view of the target, while preventing any misalignment typically
associated with other stitching techniques.
Obser vation area
expanded up to
200 times
Normal viewing area
(1600 × 1200 pixels)
Max.
20,000 pixels
20,000 pixels
20,000 pixels
Max.
20,000 pixels
Navigation function
ONE
TOUCH
The stitched image can be utilized as a navigation screen. Clicking
on the position that you wish to observe will automatically move the
stage to the selected location. The current field-of-view is outlined
in yellow and the previously viewed field-of-view is outlined in
red, making it easier to maneuver the stage. This function is also
extremely useful for understanding which area of the target is being
observed when imaging at a higher magnification.
Auto Correct function
Produces a high-quality stitched image
by automatically adjusting for brightness
changes that can result from aberrations
around the periphery of the lens.
Conventional
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Auto Correct
Optimal image function
ONE
TOUCH
One click of the OPTIMIZE button displays nine different lighting scenarios. From there,
all the user needs to do is to click the image that is ideal for observation. The optimal
observation conditions for any target can be found easily and repeatably.
Normal
Sharpen
Light Shift
Glare Removal
Glare Removal +
Sharpen
HDR + Light Shift
HDR1
HDR2
HDR3
Coin (100x)
Easily select the
ideal image!
Light Shift function
Coin (100×)
ONE
TOUCH
Simply pushing the Light Shift button on the console instantly changes the lighting. The
lighting can be switched from full illumination to partial illumination, which enhances the
projections and depressions of the target.
Full illumination
Partial illumination
The entire ring light is turned on.
Only 1/4 of the ring light is turned on to
enhance the surface texture of the object
being viewed.
Grind stone (50x)
Image stabilization function
Through advanced image processing,
ONE
TOUCH
Without camera-shake correction
With camera-shake correction
the VHX-5000 is able to correct for
position misalignments in an image at
the sub-pixel level. This function makes it
possible to perform high-magnification
imaging without being affected by
environmental vibrations.
LCD color filter (500×)
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3D Display Function
ONE
TOUCH
Even when a target’s surface has significant variation in height, a fully-focused image can
be obtained instantly by compiling images at different focal planes. After creating the
composite image, the focal position data can then be used to construct a 3D model.
When the motorized stage is used, this 3D image can be displayed easily by just pushing
An image that is in focus from the lowest to the highest plane.
a button on the console.
3D display
Composite
image
BGA (300x)
Accurate D.F.D. method
KEYENCE has developed a new
algorithm that uses fine changes in
texture to calculate height data. This
means a 3D image can be constructed
Conventional image
Accurate
D.F.D. method
Screw
threads
from fewer images.
[D.F.D. (Depth from Defocus) method]
The Depth from Defocus method obtains 3D information
by analyzing the focus of a 2D image. Even if an image
Method in which
accurate, focused
images are stacked
is not captured in complete focus, a calculation is made
to determine height data. This allows accurate 3D
image construction with fewer steps in the Z-axis.
D.F.D. processed
image
Auto Adjust function allows for depth composition even when
imaging at an angle
Edge displacement and vibration caused
during image capture are automatically
corrected and a comprehensive, fullyfocused image is constructed. The
composition can use not only images
captured perpendicular to the sample, but
also those captured from an angle.
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Conventional image
Auto Adjust function
Coil (20x)
3D Image Stitching &
Measurement Functions
Once a 3D image has been created, data can be collected to calculate the profile, height,
and volume for any area within the field-of-view. When used in conjunction with the image
stitching function, a wide-field 3D image can be generated to allow users the ability to
understand the topography over an entire target.
3D stitched image
Normal field-of-view
(1600 ×1200 pixels)
20000
pixels
20000
pixels
3D profile
measurement
Height color/Scale display
Color bars that indicate height are displayed on
a 3D image. The highest position is displayed
in red and the lowest position is displayed in
blue, allowing you to see height differences
clearly at a glance. The height data can also be
superimposed on a raw image.
Height
Arc radius
Cross
sectional area
Advanced measurement tools
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Easy Recording with Just the Press of a Button
The VHX has been equipped with a 500 GB
hard disk drive, so images and video can
be recorded during observation. Our
original high-speed filing system ensures
effortless handling of a high volume of
images. File names, titles, organization
names, lenses, and comments can be
registered with each image, providing for
quick database searches.
Split screen/Comment entry function
The viewing area can be split
horizontally, vertically, or in
quadrants. This can be used
to quickly perform side-byside image comparison of
good and bad parts or when
viewing a low-magnification
and high-magnification
image. Comments and scale
bars can also be inserted into
the image. Measurements
can be made independently
in each separate window.
Each display area can be moved Images of different magnifications
independently on the split screen. can be measured individually.
Video recording function
Accurately capture an object’s motion by recording a video at up to 50 frames per
second, with recording times of up to one hour. Users can fast forward, advance a single
frame, and capture still images from the video file. Each video is saved as an AVI file that
can be played on the VHX-5000 or a separate computer.
Video recording
up to 1 hour long
Ant (50×)
Timer capture function
The VHX can be programmed to capture
images based on a given time interval.
Users can monitor a process over a given
period of time by loading the saved
images to a PC via LAN.
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Bacterial growth
Observation settings are saved automatically
Parameters such as brightness level or camera settings will automatically be saved with each
image. Users can apply the exact same settings when observing similar parts by simply
loading the file.
Shutter Speed
Light Shift
White Balance
Gain
Edge Enhance
Light Intensity
PC mode/Anti-virus software
With the PC mode, various drivers for peripheral software or equipment can be installed
on the microscope, including drivers for printers, Microsoft Office, and anti-virus software.
This makes it possible to use the microscope in a way that best fits your operating
environment.
Report function (report preparation)
Create reports containing images by installing
Microsoft Word or Excel and then setting up a
standard template. Details such as the capture date,
lens, and magnification will be recorded
automatically.
Network compatible
The VHX can be connected to a network via LAN to allow sharing/transfer of images with
other departments or remote locations. This image and data sharing ensures immediate
and accurate action in urgent situations.
Quality assurance/Research/Development departments
Manufacturing/Engineering departments
Company LAN
VHX-5000
Other factories
Overseas offices
Network
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Real-time Measurement
Users can complete all measurements directly on the screen with just a few clicks
of the mouse. This is significantly easier and faster than systems that require a
user to capture images, import them to a PC, and then use external software to
complete measurements on the sample.
Various measurement tools
With 21 measurement tools available, nearly any feature of
interest can be inspected with the VHX.
Also, with the added ability to re-position a measurement
point, it is easier to make quick changes to measurements to
confirm accuracy.
TRIPLE‘R sensor automatically
recognizes lens/magnification
KEYENCE’s advanced sensor technology and
accumulated microscopy/optical expertise have been
combined to allow the VHX to recognize three types of
information: lens connection (no cable required), lens
type, and magnification. The system will automatically
adjust the stage movement speed and calibration data
when the magnification is changed.
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Edge detection function
Corrects the point
automatically
Even when the measurement point
selected on the image is not perfectly on
the edge of the target, this function will
adjust the measurement point to the correct
edge location. This reduces variation
Print pattern (150x)
between operators and ensures high
repeatability of dimensional measurements.
High-resolution measurements
TFT (500x)
By capturing a high-resolution image (4800
x 3600 pixels), measurements can be made
on an image that is nine times larger than a
standard image, increasing the accuracy
and repeatability of the measurements.
Normal
screen
Magnified
screen
FUSION OF A DIGITAL
MICROSCOPE AND A
MEASURING MICROSCOPE
Moving the stage allows you to
measure a target of up to
100 mm x 100 mm 3.94" x 3.94".
Measurements can even be
completed over an area that
exceeds the field-of-view of the
lens being used, allowing you
to perform both observation
and measurement of a larger
target with a single microscope.
Display unit
OP-84483
Digitally displays the
distance traveled by
the stage
Transmitted
illumination unit
OP-84484
Clearly projects edges
of a target
X-Y measurement system
VH-M100E
Supports traceability
The X-Y measurement system ensures highly reliable
measurements based on a traceability system that complies with
international standards.
Measurement software for improved usability VHX-H2M2
Real-time screen display
The XYD measurement results are displayed on the
monitor screen in real-time.
Various measurement modes
Distance, radius, angle and other measurement modes
are included.
Wide image capture
Once a wide-field image captured under low
magnification is registered, the current measurement
point is always indicated even after the field-of-view is
changed under higher magnification. The measurement
point can be easily checked for an entire image.
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One-click Auto-measurement
Until now, it was necessary to complete all measurements independently with the
mouse. With the VHX-5000, multiple measurements are stored in a template
(template data) and pattern matching technology is used to match the template to
a part to enable batch measurement and data compilation.
Automatic edge
extraction
Automatic Measurement
Industry’s first
Save measurement
templates
One-Click
AutoMeasurement
Measurement Measurement Measurement
area A
area B
area C
Template
[Template saving]
[1-click auto-measurement]
Template searching for pattern match
The appearance of auto-measurement
With template saving and automatic edge extraction
Measurement area A
Conventional Measurement 1 Measurement 2 Measurement 3
Measurement area A
1-click automeasurement Measurement 1,2,3
1-click
Industry’s first
Measurement area B
Measurement 4
Measurement 5
Measurement area B
Measurement area C
Measurement 4,5,6
Measurement 7,8,9
1-click
1-click
Measurement area C
Measurement 6
Measurement 7
Measurement 8
Measurement 9
Shortened time
One-push calibration
ONE
TOUCH
Conventionally, it was necessary to place the calibration scale in the correct
position to then obtain proper focus for calibration. With the VHX-5000, anyone
can easily perform proper calibration with the motorized XYZ stage.
Focus adjustment & position alignment are unnecessary
Calibration is possible just by placing the scale on the
stage and pressing a button. There is absolutely no
need to find the correct location and adjust the focus
manually.
Auto-focus
adjustment &
auto-position
alignment
Reading 2D codes
2D codes are embedded in a unique KEYENCE
scale that when read, move the XY stage to the
correct location based on the magnification of the
lens being used. Since the code is automatically
detected by the system, there are no calibration
errors, making this an essential function for
accurate measurements.
Reference
chart
3
2
OP-87427
3
2
At 200×
20
2
1
2
1
2
1
2
1
2
2
3
1
2
3
1
2
3
2
3
2D code
3
2
3
2
1
2
1
1
1
2
2
2
2
Area
Measurement
Binary
conversion
Particle count
Automatic area measurement/count
Easily extract target areas and quantify their area and other 2D parameters. Each
specified location can be edited to remove unnecessary areas or separate
overlapping targets.
Binary processing
Crystal (100×)
Measurement result list
Measurement result (histogram)
Measurement preview
Displays a preview of four binary conversion algorithms
so that users can select the one that best extracts the
areas that they are looking to measure. Even when
measuring an object with uneven brightness, with the
automatic shading correction function, it is possible to
perform binary processing easily.
Maximum area measurement
Measures the largest target area within a user-specified field by simply selecting
the area with the mouse. Measurements can be performed with ease even when
measuring complicated shapes.
Probe dent (1000×)
Extraction condition reproduction function
The system automatically saves the conditions that were used during extraction/
binarization. When analyzing different targets, it is possible to implement extraction with
the same conditions. This also ensures that the same conditions are applied when
multiple users measure the same object, eliminating user variation.
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Applications
STEREOSCOPIC MICROSCOPE
Solder (100x)
PCB through hole (100x)
Brush (50x)
Gear (50x)
Fiber (50x)
Fractured metal (200x)
METALLURGICAL MICROSCOPE
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CCD (500x)
IC pattern (1500x)
Emulsion (500x)
Solar cell (1000x)
Metal structure (2000x)
Residual stress (700x)
MEASURING MICROSCOPE
Screw measurement (50x)
Area measurement of emulsion (1000x)
Stereoscopic
microscope
Cross-section of multi-layered film (1000x)
Metallurgical
microscope
Achieves 0.1x to 5000×
with a single unit
Electron
microscope
Measuring
microscope
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Motorized XYZ Stand
Free-angle observation system (XYZ motorized)
This versatile stand includes XY and Z axes controls for adjusting position and focus, and the stage can be rotated freely.
A custom mechanism allows the camera and lens to be tilted around the object being viewed, while still keeping that
object perfectly centered in the field-of-view.
0°
0°
15°
15°
30°
45°
30°
45°
Easy-to-adjust
45°
45°
60°
Cable holder
Secures camera/lighting cables to
prevent vibration. The cables are
also protected against abrasions
and deterioration.
60°
75°
90°
90°
Oblique
axis
120°
0°
High-stability frame
90°
60°
Vibration-proof rubber
Rotation axis
Faster Z-axis
movement
Better viewing
repeatability
Improved seismic
capacity
Built-in tilt angle
sensor
The maximum speed of the
A new locking mechanism
By using an aluminum die-
A built-in sensor detects the
motorized Z-axis stage has
has been incorporated into
cast frame for the stand,
tilt angle of the stand. Now
increased to 17 mm 0.67"/
the stand to ensure that the
vibration-resistance has
it is possible to display the
sec. This significantly
lens is set to 0 degrees.
increased twofold over
angle on the observation
previous models.
screen or to save the
improves the auto-focus and
depth composition speeds.
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condition during recording.
LED transmitted illumination
Transmitted lighting comes standard with the motorized XY stage, producing
consistent brightness from low to high magnifications. It is also possible to use
the LED transmitted lighting in conjunction with reflected illumination from the lens.
The light from each source can be adjusted independently, making it possible to
perform observation with an optimum balance of light intensity.
Reflected illumination
Reflected +
transmitted illumination
PCB through-hole
(100×)
Transmitted light switching
filter
Diffuse illumination
Concentrated illumination
When viewing a sample at low
magnification, the light is applied
uniformly to the entire target. As the
magnification is increased, the light can
be concentrated to improve the contrast
of the image.
Slice of brain tissue
(200x, composite of 120 images)
Rotation sensor for accurate stage movement
Mouse kidney section
(150x comparison image)
Move the joystick to
desired locations
A sensor is built into the motorized XY stage that recognizes the amount of
rotation of the stage. Regardless of the angle of rotation, the stage will move
in the correct direction.
Rotation angle: 0 degree
Regardless of the rotation angle
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RZ Lenses − Highest Resolution in the Industry
Real Zoom Lens
High-Performance Low-Range Zoom Lens
VH-Z00R/Z00T
Macro zoom lens
Model
50
30x
10.2
0.40"
7.6
0.30"
12.7
0.50"
50x
6.1
0.24"
4.6
0.18"
7.6
0.30"
VH-Z00R / Z00T
0.1x
3200
Horizontal
125.98"
2400
Vertical
94.49"
4000
Diagonal
157.48"
Working distance Approx. 7700
(mm inch)
303.15"
Magnification 1.
Field-of-view
(mm inch)
With a range from 0.1x - 50x
magnification, a target can be viewed
from its entirety down to more in-depth
observation. This macro lens excels in
workability and high performance with
click-style magnification adjustment, an
aperture mechanism, and a viewing
distance of 95 mm 3.74" or more.
0.1
0.5x
1x
640
320
25.20" 12.60"
480
240
18.90" 9.45"
800
400
31.50" 15.75"
Approx. 1500 Approx. 720
59.06"
28.35"
5x
61
2.40"
45.5
1.79"
76.2
3.00"
10x
30.5
1.20"
22.8
0.90"
38.1
1.50"
95
3.74"
1. Magnification on a 15-inch monitor
Ultra-Small, High-Performance Zoom Lens VH-Z20R/Z20T
The VH-Z20R/Z20T offers highresolution observation at general
purpose magnifications of 20x - 200x.
This lens has been designed to optimize
both depth-of-field and resolution and
can also be used in handheld mode.
Model
Magnification 1.
Field-of-view
(mm inch)
Versatile lens provides
high-resolution imaging with
large depth-of-field
Horizontal
Vertical
Diagonal
Depth-of-field 2.
(mm inch)
20
200
VH-Z20R/Z20T
20x
15.24
0.60"
11.40
0.45"
19.05
0.75"
34
1.34"
30x
10.16
0.40"
7.60
0.299"
12.70
0.50"
15.5
0.61"
50x
6.10
0.240"
4.56
0.18"
7.62
0.300"
6.0
0.236"
100x
3.05
0.12"
2.28
0.09"
3.81
0.15"
1.6
0.063"
25.5
1.00"
Working distance
(mm inch)
150x
2.03
0.080"
1.52
0.060"
2.54
0.10"
0.74
0.03"
200x
1.52
0.060"
1.14
0.04"
1.91
0.075"
0.44
0.02"
1. Magnification on a 15-inch monitor
2. The value when the lens is set with priority to depth-of-field.
The depth-of-field changes depending on the setting of the aperture.
Wide-Range Zoom Lens VH-Z100R/Z100T
This innovative lens was developed to
satisfy the need for high-resolution, long
working distance, and large depth-offield.
Provides both ring light and bright field
illumination.
Model
Magnification 1.
Field-of-view
(mm inch)
High-performance lens with
long working distance
100
Horizontal
Vertical
Diagonal
1000
VH-Z100R/Z100T
100x
3.05
0.12"
2.28
0.09"
3.81
0.15"
200x
1.53
0.06"
1.14
0.045"
1.90
0.07"
Working distance
(mm inch)
300x
1.02
0.040"
0.76
0.03"
1.27
0.05"
500x
0.61
0.024"
0.46
0.018"
0.76
0.03"
700x
0.44
0.017"
0.33
0.013"
0.54
0.021"
1000x
0.30
0.012"
0.23
0.009"
0.38
0.015"
25 0.98" (20 0.79" 2.)
1. Magnification on a 15-inch monitor
2. When the triple illumination adapter is attached.
Dual Light High-Magnification Zoom Lens VH-Z250R/Z250T
Easily switch between ring light and
coaxial illumination with just the touch
of a button. View objects at up to 2500x
magnification while still maintaining a
6.5 mm 0.26" working distance.
Bright-field
Dark-field
Model
Magnification 1.
Field-of-view
(mm inch)
Observe with both bright field and
dark field at high-magnification
Horizontal
Vertical
Diagonal
250
2500
2000x
0.15
0.006"
0.11
0.004"
0.19
0.007"
2500x
0.12
0.005"
0.09
0.004"
0.15
0.006"
500
5000
NEW
VH-Z250R/Z250T
250x
1.22
0.048"
0.92
0.036"
1.52
0.060"
300x
1.02
0.040"
0.76
0.030"
1.27
0.050"
500x
0.61
0.024"
0.46
0.018"
0.76
0.030"
Working distance
(mm inch)
1000x
0.31
0.012"
0.23
0.009"
0.38
0.015"
1500x
0.2
0.008"
0.15
0.006"
0.25
0.010"
6.5
0.26"
1. Magnification on a 15-inch monitor
High-Resolution Zoom Lens VH-Z500R/Z500T
This zoom lens incorporates high-quality
fluorite optics to provide the highest
resolution in its class. With an N.A. of
0.82, achieve up to 5000x magnification
with a 4.4 mm 0.17" working distance.
Model
Magnification 1.
Field-of-view
(µm Mil)
Our highest magnification/
resolution zoom lens
Horizontal
Vertical
Diagonal
VH-Z500R/Z500T
500x
610
24.02
457
17.99
762
30.00
1000x
305
12.01
229
9.02
381
15.00
Working distance
(mm inch)
1. Magnification on a 15-inch monitor
The TRIPLE‘R compliant lenses are fitted with Automatic Lens/Zoom Recognition units.
26
2000x
152
5.98
114
4.49
191
7.52
4.4
0.17"
3000x
102
4.02
76
2.99
127
5.00
5000x
61
2.40
46
1.81
76
2.99
A single lens that can perform a variety of observations
Real Zoom Lens
Universal Zoom Lens VH-Z20UR/Z20UT
This newly-designed lens has the ability to
perform bright/dark field and DIC
observation, even at lower magnification
ranges. A unique illumination system allows
users to switch between three different
types of lighting by simply pressing a
button.
Bright-field
Dark-field
Partial
DIC
20
Model
Magnification 1.
Field-of-view
(mm inch)
Optimal lighting with the touch of
a button
NEW
Horizontal
Vertical
Diagonal
VH-Z20UR/Z20UT
20x
15.24
0.60"
11.40
0.45"
19.05
0.75"
40x
7.62
0.30"
5.70
0.22"
9.53
0.38"
Working distance
(mm inch)
80x
3.81
0.15"
2.85
0.11"
4.76
0.19"
100x
3.05
0.12"
2.28
0.090"
3.81
0.15"
160x
1.91
0.08"
1.43
0.056"
2.38
0.094"
1. Magnification on a 15-inch monitor.
2. With the wide-area illumination attachment equipped.
Model
Bright-field
Dark-field
Polarization
DIC
Field-of-view
(mm inch)
Magnification 1.
Bright/dark field, polarized transmitted, and DIC
observation can be performed with this lens. DIC
observation makes it possible to clearly visualize
surface topography of low-contrast and
transparent objects - typically difficult with
conventional bright field lighting.
200x
1.52
0.060"
1.14
0.04"
1.91
0.08"
20.8 0.82" 2.
Universal Zoom Lens VH-Z100UR/Z100UT
Differential Interference
Contrast (DIC) lens
200
Horizontal
Vertical
Diagonal
100
1000
VH-Z100UR/Z100UT
100x
200x
300x
500x
700x
1000x
3.05
0.12"
2.28
0.09"
3.81
0.15"
1.53
0.06"
1.14
0.045"
1.90
0.07"
1.02
0.040"
0.76
0.03"
1.27
0.05"
0.61
0.024"
0.46
0.018"
0.76
0.03"
0.44
0.017"
0.33
0.013"
0.54
0.021"
0.30
0.012"
0.23
0.009"
0.38
0.015"
Working distance
(mm inch)
25 0.98"(20 0.79" 2.)
1. Magnification on a 15-inch monitor.
2. When the triple illumination adapter is attached.
Change illumination with a single button
Easily switch the type of lighting being used by simply pushing a
button, eliminating the need for complex lighting adjustments.
Coin (60x)
Dark-field
Bright-field
Capture clear images from a distance
Long Working Lens
Long-Working-Distance, High-Performance Zoom Lens
VH-Z50L/Z50T
50
Enables high-magnification observation
while maintaining a long working distance.
This lens is ideal for viewing objects that
have highly-irregular surfaces or recesses
that cannot be observed up close.
Model
Magnification 1.
Field-of-view
(mm inch)
Long Range Lens with a 85 mm
3.35" Working Distance
Horizontal
Vertical
Diagonal
Working distance
(mm inch)
500
VH-Z50L/Z50T
50x
100x
200x
300x
400x
500x
6.09
0.24"
4.57
0.18"
7.62
0.30"
3.05
0.12"
2.28
0.09"
3.81
0.15"
1.53
0.06"
1.14
0.045"
1.90
0.07"
1.02
0.040"
0.76
0.03"
1.27
0.05"
0.76
0.03"
0.57
0.022"
0.95
0.037"
0.61
0.024"
0.46
0.018"
0.76
0.03"
85
3.35"
1. Magnification on a 15-inch monitor.
Long distance lens - 85 mm 3.35" working distance
With its cutting-edge optical design and advanced illumination
technology, the LW lens achieves a maximum magnification of
up to 500x and a working distance of 85 mm 3.35". The LW lens
can capture deep recessed features in the target clearly and
offers ample working space for dramatically improved imaging
Easy observation of deep, recessed
features of the target
Aluminum surface (500x)
efficiency.
The TRIPLE‘R compliant lenses are fitted with Automatic Lens/Zoom Recognition units.
27
VHX Series System Line Up
RZ LENS 1
High-resolution zoom lens
Polarized
illumination adapter
500x to 5000x
VH-Z500R/Z500T
OP-51649
Dual-light
High-magnification
zoom lens
Contact adapter
OP-81880
250x to 2500x
VH-Z250R/Z250T
Polarized
illumination adapter
OP-72405
2
OP-72407
Wide-range zoom lens
Polarization observation set
100x to 1000x
VH-Z100R/Z100T
OP-87821
Coaxial polarization adapter
OP-72406
Dark-field illumination adapter
OP-72402
Universal Zoom Lens
Ring illumination unit
for Z100/Z100U/Z20U
Adjustable
illumination adapter
Differential interference set
OP-72404
OP-86943
Wide area
illumination adapter
OP-87298
100x to 1000x
VH-Z100UR/Z100UT
OP-87792
Universal Zoom Lens
20x to 200x
VH-Z20UR/Z20UT
3
Ultra-small, high-performance zoom lens
Diffuse illumination adapter
OP-87299
DIC prism and filter set
OP-87297
Non-reflective
illumination ring
20x to 200x
VH-Z20R/Z20T
OP-32009
High-performance low-range zoom lens
0.1x to 50x
VH-Z00R/Z00T
Adjustable
illumination adapter
VH-K20
LW LENS
Super-diffuse
illumination adapter
OP-42305
Long-focal-distance,
high-performance zoom lens
Polarized illumination adapter
OP-87429
Diffuse illumination adapter
OP-35324
Non-contact diffusion
OP-35414
Multi-diffuse adapter
50x to 500x
VH-Z50L/Z50T
Free head contact adapter
OP-32348
ZOOM LENS
Zoom Lens
25x to 175x
VH-Z25
OP-35469
Coaxial
illumination adapter
OP-35416
Adjustable
illumination adapter
VH-K150
Long-focal-distance zoom lens
35x to 245x
VH-Z35
Middle-range zoom lens
150x to 800x
VH-Z150
BORESCOPE 4
VH-B55
VH-B18
VH-B100
VH-B27
VH-B40
FIBERSCOPE 5
VH-F61
28
VH-F111
VH-BA
Lens bracket
VHX-J00T/
J20T/J20UT/
J50T/J100T/
J250T/J500T Bayonet-type
VHX-H2M2 8.
XY measurement
software
standard attachment
OP-51478/
OP-66871 6
PC
PC
PC
VHX-5100
VHX-H4M 9.
3D measurement
software
VHX-5020
LAN
VHX-5000
Communication software
(2D measurement,
3D/HDR display software)
PC
CD-R/RW
USB memory, etc.
USB
Hard disk drive
DVI
VHX-1020
VHX-700FE
Monitor
A large screen monitor can be
connected when several people need
to view a target simultaneously.
Since the target image is magnified
further on the large screen, it can be
checked more thoroughly.
Bayonet-type C-mount
attachment
OP-51479
3D Profile measurement unit
VHX-S15
Camera lens (C-mount type)
Microscope
VH-F
Foot switch
7
❚ OPTION
Free-angle
observation system
(Z-axis motorized,
manual XY)
VHX-S500E
Free-angle observation
system (XYZ-axis motorized
with transmitted illumination)
VHX-S550E
High-precision stand
(with X-Y stage and
transmitted illumination)
VH-S5
VH lens mounting stand
(with XY stage)
OP-25539
OP-22124
X-Y measurement system
VH-M100E
Transmitted
illumination unit
OP-84484
1. TRIPLE‘R compliant lenses VH-Z00T/Z20T/Z20UT/Z50T/Z100UT/Z100T/Z250T/Z500T are fitted with Automatic Lens/Zoom Recognition units and connection recognition mount, respectively.
2. OP-72407 and OP-72406 are required when coaxial illumination is used.
3. Included with the VH-Z20UR/Z20UT.
4. The optional bore fiber cable (OP-87201) is required.
5. The optional light guide attachment (either OP-51482 or OP-87790) is required.
6. OP-66871 is required when the VH-Z00R, Z20R, or Z25 is used.
7. A C-mount adapter suitable for the microscope is required.
8. VHX-H1M1 is required for the VHX-700FE.
9. VHX-H3M is required for the VHX-700FE.
Display unit
OP-84483
29
SPECIFICATIONS
❚ Basic functions: Controller
Model
Image receiving element
Scan method
Frame rate
Normal
3CMOS1,3
Camera
Resolution High resolution3
Super high resolution3
Super high resolution x
3CMOS2,3
High Dynamic Range
Gain
Electronic shutter
LCD monitor5
CD-R/CD-RW/DVD drive
unit
Hard disk
drive unit
Supercharge shutter
White balance
Back-focus adjustment
Size
Panel size
Pixel pitch
Number of pixels
Display color
Brightness
Contrast ratio
Viewing angle
Unit
Applicable disk
Storage capacity
Storage capacity
Image format
Observable image size
Lamp
Lamp life
Color temperature
Video output
Output
Special LCD monitor
Scanning
frequency
External monitor
Mouse input
Input
Keyboard input
External remote input
LAN
Interface
USB 2.0 Series A
USB 3.0 Series A
Power supply voltage
Power supply
Power consumption
Ambient temperature
Environmental resistance
Relative humidity
Controller
Weight
Camera unit
Console
Dimensions (Excluding the projected areas)
Light source
VHX-5000
1/1.8-inch, CMOS image sensor
Virtual pixels: 1600 (H) x 1200 (V)
Progressive
50 frames/sec. (max.)
1600 (H) x 1200 (V) Approx. 1000 TV lines
1600 (H) x 1200 (V) Approx. 1200 TV lines
(2 million pixels x 3CMOS mode, Excellent color reproducibility)
3200 (H) x 2400 (V) Approx. 1600 TV lines
4800 (H) x 3600 (V) Approx. 2000 TV lines or more
4800 (H) x 3600 (V) Approx. 2000 TV lines or more
(18 million pixels x 3CMOS mode, Excellent color reproducibility)
16-bit resolution through RGB data from each pixel
AUTO, MANUAL, PRESET
AUTO, MANUAL, 1/60, 1/120, 1/250, 1/500, 1/1000,
1/2000, 1/5000, 1/9000, 1/19000
0.2 sec. to 4 sec. Can be set in increments of 0.1 sec.
AUTO, MANUAL, ONE-PUSH SET, PRESET (2700K, 3200K, 5600K, 9000K)
Not required
Color LCD (IPS) 23"
509.184 (H) x 286.416 (V) mm 20.05"(H) x 11.28"(V)
0.2652 mm (H) x 0.2652 mm (V) 0.01"(H) x 0.01"(V)
1920 (H) x 1080 (V) (FHD)
Approx. 16,770,000 colors4
300 cd/m2 (Center 1 Point, typical)
1000 : 1 (typical)
±89° (typical, horizontal), ±89° (typical, vertical)
DVD-ROM super-multi drive unit
CD-R/CD-RW/DVD±R/DVD±R DL/DVD±RW/DVD-RAM
8.7 GB (when DVD±R DL is used)
500 GB (including 165 GB reserved area)
Approx. 1680000 images (When a 2 million-pixel image is compressed) to
approx. 55000 images (When a 2 million-pixel image is not compressed)
JPEG (With compression), TIFF (No compression)
20000 (H) pixels x 20000 (V) pixels (when stitched)
High brightness LED
40000 hours (reference)
5700K (typical)
DVI-I (1920 x 1080 pixels)
66 kHz (H), 60 Hz (V)
66 kHz (H), 60 Hz (V)
USB mouse supported
USB keyboard supported
Pause/Recording, Non-voltage input (Contact/Noncontact)
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
6 types
2 types
100 to 240 VAC, 50/60 Hz
280 VA
+5 to 40°C 41 to 104°F
35 to 80% RH (No condensation)
Approx. 12.5 kg
Approx. 1.10 kg (VHX-5100), Approx.1.00 kg (VHX-5020)
Approx. 0.40 kg
550 (W) x 470 (H) x 200 (D) 21.65"(W) x 18.50"(H) x 7.87"(D) (when stored)
VHX-700FE
1/1.8-inch, CCD image sensor
Virtual pixels: 1600 (H) x 1200 (V)
Progressive
15 frames/sec. and 28 frames/sec. selectable
1600 (H) x 1200 (V) Approx. 1000 TV lines
–
–
AUTO, MANUAL, PRESET
AUTO, MANUAL, 1/15, 1/30, 1/60, 1/120, 1/250, 1/500,
1/1000, 1/2000, 1/5000, 1/9000, 1/19000
0.2 sec. to 17 sec. Can be set in increments of 0.1 sec.
AUTO, MANUAL, ONE-PUSH SET, PRESET (2700K, 3200K, 5600K, 9000K)
Not required
Color LCD (TFT) 17"
365.76 (H) x 228.60 (V) mm 14.40"(H) x 9.00"(V)
0.1905 mm (H) x 0.1905 mm (V) 0.008"(H) x 0.008"(V)
1920 (H) x 1200 (V) (WUXGA)
Approx. 16,770,000 colors4
270 cd/m2 (typical)
450 : 1 (typical)
±80° (typical, horizontal), ±70° (typical, vertical)
DVD-ROM super-multi drive unit
CD-R/CD-RW/DVD±R/DVD±R DL/DVD±RW/DVD-RAM
8.7 GB (when DVD±R DL is used)
500 GB (including 80 GB reserved area)
Approx. 2100000 images (When a 2 million-pixel image is compressed) to
approx. 70000 images (When a 2 million-pixel image is not compressed)
JPEG/HD Photo (With compression), TIFF (No compression)
1600 (H) pixels x 1200 (V) pixels
12 V, 100 W, Halogen lamp
1000 hours (average)
3100K (at maximum light intensity)
DVI-I (1920 x 1200 pixels)
75 kHz (H), 60 Hz (V)
75 kHz (H), 60 Hz (V)
USB mouse supported
USB keyboard supported
Pause/Recording, Non-voltage input (Contact/Noncontact)
RJ-45 (10BASE-T/1000BASE-T)
8 types
–
100 to 240 VAC, 50/60 Hz
340 VA
+5 to 40°C 41 to 104°F
35 to 80% RH (No condensation)
Approx. 11.6 kg
Approx. 0.90 kg (VHX-1020)
Approx. 0.40 kg
420 mm (W) x 416 mm (H) x 181 mm (D) 16.54"(W) x 16.38"(H) x 7.13"(D) (when stored)
❚ Basic functions: Stage
XYθ stage
XY stage: Electric/Manual
XY-motorized stage motor
XY-motorized stage resolution
XY-motorized stage movement speed
XY stage moving range
θ rotation angle
XYθ stage size
Transmitted light-compatible
magnification
Z stage: Electric/Manual
Z-motorized stage motor
Z stage
Z-motorized stage resolution
Z-motorized stage movement speed
Z stage moving range
Power supply voltage
Ratings
Power consumption
Ambient temperature
Environmental resistance
Relative humidity
Weight
Load capacity
VHX-S550E
Electric
2-phase stepping motor
1 μm 0.04 Mil (typical)
10 mm 0.39"/sec. (max.)
±20 mm ±0.79"
±90°
Top surface: 171 mm x 168 mm 6.73" x 6.61"
(Center disc: ø100 ø3.94")
VHX-S500E
Manual
–
–
–
±35 mm ±1.38"
360°
VH-S300
Manual
–
–
–
±35 mm ±1.38"
360°
Top surface: 190 mm x 150 mm 7.48" x 5.91"
Top surface: 190 mm x 150 mm 7.48" x 5.91"
20x or higher
–
–
Electric
5-phase stepping motor
0.1 μm 0.004 Mil (typical)
17 mm 0.67"/sec. (max.)
49 mm 1.93"
100 to 240 VAC, 50/60 Hz
60 VA
+5 to 40°C 41 to 104°F
35 to 80% RH (No condensation)
17.5 kg
1 kg
Electric
5-phase stepping motor
0.1 μm 0.004 Mil (typical)
17 mm 0.67"/sec. (max.)
49 mm 1.93"
100 to 240 VAC, 50/60 Hz
50 VA
+5 to 40°C 41 to 104°F
35 to 80% RH (No condensation)
17.0 kg
1 kg
Manual
–
–
–
56 mm 2.20"
–
–
–
–
17.4 kg
1 kg
❚ VHX-5000 (Software module details)
Software
30
Video recording software
High quality depth composition
software
Area measurement software
Time-lapse software
Screen splitting software
Comment input software
Image improvement software
Allows recording/playing back moving images.
Captures multiple images focused on different heights and composes a single image from them.
Measures an area of a 2D image.
Captures images automatically at specified time intervals.
Displays vertical, horizontal, or 4-part split screens.
Allows inputting and displaying comments such as characters and markers on the observation image.
Provides image processing functions for modifying images to make observation easier.
❚ Other functions
Model
Various
controller
functions
VHX-5000
Auto focus function
Image stitching
3D image stitching
High resolution image capture
Z-axis automatic stage control function
One-push quick 3D function
HDR+function
Side album function
Capture condition reproduction function
High quality depth composition
Accurate D.F.D. method 3D display function
3D simulated illumination function
3D comparison function
Real-time digital zoom
Light shift function
(Height difference enhancement)
e-Preview mode (9 types)
Glare removal function
Vivid & sharp image mode
Supercharge shutter function
Edge enhancement function
Gamma correcting function
Camera-shake correcting function
Split function
Video recording/playback function
Timer capture function
Automatic unit S15 control function
Eucentric setting function
Real-time depth composition function
High resolution HDR function
High resolution observation function
Simple mode
TRIPLE‘R function
Measuring
functions
High-resolution dimensional
measurement function
Distance, angle, radius, area, and other
measurement functions
Automatic count and area measurement
function
Scale display
Automatic edge detection
Auto calibration
One push calibration function
Measurement point replacement function
Measurement free display function
Specified dimension display function
Measurement auxiliary function
CSV storage
3D height color/scale display function
Manual XY
measurement
system
Measuring
functions
(Optional
functions of
VHX-H4M/
VHX-S15)6
Utility
Accompanying
software
(Free of
charge,
no copy
restriction)
(PC software)
Provided
Provided
Provided
Provided
Provided
Provided
Provided
Provided
Provided
Provided
Provided (Quick method)
Provided
Provided (Combination/Comparison/Difference display mode)
1.0x to 10.0x
Provided (Full, partial, lateral, dark-field, bright-field,
and combination illumination modes)
Provided (Automatically lists 9 types of image modes,
allowing selection of the optimal image)
Provided
Provided
Provided
Provided (200 steps), moving images supported
Provided
Provided (Moving images supported)
Vertical, horizontal, 4-part, and 9-part split and combination display
50 frames/sec. max. (Image size: 1600 x 1200, 800 x 600, 640 x 480)
Provided
Provided
Provides a guide for eucentric position observation.
Ensures constantly focused, high depth-of-field image.
Displays a high resolution and high gradation image.
Displays a high resolution image based on pixel shift technology.
Showing a group of functions selected according to the purpose.
Provided
(Automatic lens connection/lens type/magnification recognition function)
Console
compatible
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
VHX-700FE
Provided
Provided
Provided
Provided
Provided
Provided
Provided (Quick method)
Provided
Provided (Combination/Comparison/Difference display mode)
1.0x to 10.0x
Provided (Full, partial, and lateral illumination modes)
Provided (Automatically lists 9 types of image modes,
allowing selection of the optimal image)
Provided
Provided
Provided
Provided (200 steps), moving images supported
Provided
Provided (Moving images supported)
Vertical, horizontal and 4-part split
28 frames/sec. max. (Image size: 1600 x 1200, 800 x 600, 640 x 480)
Provided
Provided
–
–
–
–
–
Provided
Not provided
Various functions provided
Various functions provided
Provided
(Enables distance/area measurement through brightness/color extraction)
Various scales provided
Provided
Full-auto (Numerical input is not required)
Provided
Provided
Provided
Provided
Provided (Automatic edge extraction, multi-point input)
Provided
Provided
(Enables X/Y/Z-axis height scale display and color bar display related to height)
Provided
(Enables distance/area measurement through brightness/color extraction)
Various scales provided
Provided
Full-auto (Numerical input is not required)
–
Provided
Provided
Provided
Provided (Automatic edge extraction, multi-point input)
Provided
Provided
(Enables X/Y/Z-axis height scale display and color bar display related to height)
✓
✓
Provided
Provided
XY stage measurement
Provided
Provided
Wide image display function
Provided
Provided
Provided
(Displays height profile on a specified line on the 3D screen.)
Provided
(Displays height profile on a specified line on the 3D screen.)
Provided
Provided
3D cross section profile measurement
3D volume measurement
Complete style covering Observation,
Recording and Measurement
Filing system
Bayonet-type attachment
Keyboard entry
Compatible with a foot switch
User settings
PC mode
Function guide
PC communication software
✓
✓
✓
✓
✓
✓
✓
Not provided. A cable is required for lens connection.
Height between two points measurement
function
3D profile measurement
Console
compatible
✓
Provided
Provided
All-in-one system that enables all operations for Observation,
Recording, and Measurement without using a PC
Provided
Provided
Enabled
Enabled
Provided
Provided (System protection setting available)
Provided
Image data transfer between the VHX and PC can be performed easily.
(LAN)
All-in-one system that enables all operations for Observation,
Recording and Measurement without using a PC
Provided
Provided
Enabled
Enabled
Provided
Provided (System protection setting available)
Provided
Image data transfer between the VHX and PC can be performed easily.
(LAN)
3D reproduction software for the PC
The PC can reproduce a 3D image saved in the VHX.
(Available free of charge)
3D HDR playback/measurement/stitched image
Allows adjustment of HDR parameters and display/
playback software (Available free of charge)
measurement of stitched images.
One-click measurement compilation
Compiles the result of one-click measurement and transfers it to Excel*.
software (Available free of charge)
✓
The PC can reproduce a 3D image saved in the VHX.
Allows measurement on the PC.
–
1. Provides superior resolution and color reproduction to the normal mode.
2. Provides superior color reproduction to the high resolution mode.
3. Supported only when the multi-scan camera VHX-5100 is used.
4. Approximately 16,770,000 colors are realized with the FRC processing (dithering processing for the VHX-700FE) of the display controller.
5. The LCD monitor provided in the VHX Series is based on extremely advanced technology.
Rarely, an unlit pixel (black spot) or lit pixel (bright spot) may exist on the monitor screen. However, this is not an indication of the LCD monitor being defective.
6. The VHX-H3M is required for the VHX-700FE.
*Windows, Word and Excel are either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries.
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Automatically analyze and differentiate 3D surfaces
3D LASER SCANNING CONFOCAL MICROSCOPE
VK-X250/X150/X120
❙ Non-contact, ultra high-accuracy 3D measurement
❙ 60x - 28800x magnification range
❙ Fully-automated measurements with just one click
❙ Works on any surface shape regardless of material
❙ Process multiple files at once for faster results
❙ Easily evaluate up to 42 different roughness parameters
Measure form and contour over a wide area
ONE-SHOT 3D MEASURING MACROSCOPE
VR-3000
❙ Non-contact 3D measurement in as little as four seconds
❙ Measure areas up to 200 mm × 100 mm 7.87" × 3.94" with the motorized XY stage
❙ Place and press operation reduces user measurement variability
❙ XYZ calibration and traceability
❙ Measure profile, roughness, waviness, and other XYZ measurements
❙ Functions as an easy-to-use microscope
❙ Various tools and templates to improve accuracy and reduce measurement time
www.keyence.com
Copyright (c) 2014 KEYENCE CORPORATION. All rights reserved.
VHX5000-KA-C-US 1075-7 611826 Printed in Japan
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