Zeiss SUPRA 35 VP SEM

Zeiss SUPRA 35 VP SEM
ZEISS SUPRA 35 VP SOP
October 2016
OPERATION PROCEDURE:
!!! Log into the tool by using FOM, it will turn on the left monitor.
Startup:
1. Login to Zeiss Computer, choose SEM user, PW guest
2. Start SMART SEM USER INTERFACE Software
.
3. Login to software [User: your SEM user ID, Password: your SEM password]. EM Server will
automatically start up.
4. VAC and GUN are ON
and operational, and EHT is OFF
.
5. <CTRL + G>, go to GUN tab, and record Extractor Current.
6. Toggle Data Zone if not visible <CTRL + D>
Loading/Changing Samples:
1. Scope to High Vac (HP) mode not VP mode.
2. Verify that VAC and GUN are ON
and operational, and EHT is OFF
.
3. Switch Signal-A to TV mode and make sure that stage is initialized or Initialize stage yourself.
4. Check sample/stage is clear of pole piece and BSD, lower stage (Z-control)
5. Left-click VAC indicator and click VENT
6. When vented roll out chamber door slowly, careful and watch out for gun
7. Always, use gloves to Remove/Load Samples.
8. Close chamber door and click PUMP.
9. Wait until VAC is ready .
General Operating Parameters:
InLens Detector: WD 3mm optimal
SE2 Detector: WD 6-8mm optimal, and longer
STEM, EDX and RBSD detector: please see MNTC staff to get additional training before use.
Generating an Image:
!!! Always start in High Vac and SE2 mode !!!
1. Verify that VAC and GUN are ON
and operational, and EHT is OFF
.
2. Set desired EHT (Double-Click EHT in Data zone or SEM CONTROL - GUN - EHT)
3. Left-click EHT indicator and click EHT ON; indicator transitions from
to ready
. Don’t touch
anything during that time.
4. Switch Signal-A to SE2/Inlens mode (Left-click on Detector menu and then select SE2 or Inlens)
5. Use faster scan rate (i.e. Scan rate 2 or 3) initially to setup imaging.
6. Left-click Contrast/Brightness
and Mag/Focus
appropriate knobs on the keyboard.
7. Use CTRL+F if you
8. Use slower scan rate to reduce the signal-to-noise.
controls to adjust the image or use
Astigmatism Correction:
1. <Shift+F2> to clear the lenses, and then focus the image
2. Choose suitably high mag (above 20K), and refocus the image
3. Toggle reduced scan area
, and scan rate 3
4. Open the SEM CONTROL panel, <CTRL + G>
5. Go to the APERTURES tab and select STIGMATION
6. Adjust X-slider to maximize image resolution, then Adjust Y-slider to maximize image resolution
7. Select MAG/FOCUS, focus image (MB Mouse)
8. Repeat Steps 5-7 until image does not streak at 90°
Warning: Make sure MAG/FOCUS is selected before exiting SEM CONTROL PANEL.
9. Toggle normal scanning
, and scan rate 3
Stigmator Sensitivity Setting (for high magnification work): TOOLS - GO TO PANEL - USER SETTINGS
Aperture Alignment:
1. <Shift+F2> to clear the lenses, and then focus the image
2. Choose suitably high mag (above 20K), and refocus the image
3. Toggle reduced scan area
, and scan rate 3
4. Open the SEM CONTROL panel, <CTRL + G>
5. Go to the APERTURES tab, select APERTURE ALIGN, then select FOCUS WOBBLE, set WOBBLE
AMPLITUDE
6. Adjust X-slider to minimize image shift, then Adjust Y-slider to minimize image shift
7. Repeat Step 6 until image does not streak at 180° - it should appear to pulse in & out
8. De-select FOCUS WOBBLE
9. Select MAG/FOCUS, and focus image (MB Mouse)
10. Goto Stigmation if needed
Warning: Make sure MAG/FOCUS is selected before exiting SEM CONTROL PANEL
11. Toggle normal scanning
, and scan rate 3
Capturing Images:
- Images are “captured” as they appear on the screen.
1. Change resolution if desired SCANNING - STORE RESOLUTION - 512*384 - rapid scan mode
- 1024*768 - normal operating mode
- 2048*1536
- 3072*2304 - High Resolution mode
2. Middle-click camera icon
, select “End of Frame”
3. Compose image, set brightness & contrast.
4. Left-click camera icon
to freeze image
5. FILE - SAVE IMAGE to store
Normal Shutdown:
1. Specimen(s) out, and chamber at High Vacuum.
2. VAC and GUN are ON
and operational, and EHT is OFF
3. Back off/Remove STEM, RBSD and EDAX detectors if you used any of them
4. Bring the stage down and go to Stage Initialization, wait until stage is stops at initial position
5. Click on VAC indicator and click VENT
6. When vented roll out chamber door slowly, careful and watch out for gun
7. Always, use gloves to remove your Samples.
8. Close chamber door and click PUMP.
9. Wait until VAC is ready
.
10. Exit/Log off of SMART SEM User interface.
11. Exit EM Server.
!!! Don’t forget to log out from tool by using your FOM account.
SMARTSEM USER INTERFACE
There are multiple ways to trigger the desired commands:
• Icons
• Pull- down Menus
• double-clicking in the Datazone or Status Bar
• <key> combinations.
Status Bar:
On;
Changing Status;
Off
Interactive Datazone:
- <Double-Click> on any parameter (i.e Mag., WD, EHT, Signal) to change
Toolbar Icons:
Dynamic Focus / Rotation & Tilt correction
BSD Controls (Back Scatter Detector)
Capture Control: Middle-click camera icon select “End of Frame” or “Freeze Now”
Left-click camera icon to freeze image
Scanning speeds
Scanning Speed pulldown menu.
Brightness contrast
Magnification and Focus (Wording Distance)
Toggle Spot Mode On/Off
Normal Scan Mode Reduced Scan area On/Off
Reduced Scan area On/Off
Switch detectors: In-Lens & SE2
Switch detectors: BSD & SE2
Current Meter
Button Function:
- Displays the current function of the LB: Left mouse Button and the MB Middle mouse
Button
KEYBOARD COMMANDS:
The following keys are shortcut keys and have special meaning
<F2>
Toggles Tool Bar on/off
<CTRL + D>
Toggle Data Zone ON/OFF
<CTRL + G>
Switches SEM Control Panel ON
<F2 + SHIFT>
Hysteresis removal
<Shift + Tab>
Performs Center Point function
<F3 + SHIFT>
Toggles PC Plane ON/OFF
<CTRL + A>
Switches Annotation panel ON
Image Buffer keys
See Image Buffer
<Alt + buffer #>
Saves Images to Buffer # 1-8
< Alt + N >
Saves Image to Next Buffer
<F4>
Step to next Magnification Table entry, or Undo Centre Feature Magnification
<F4 + CTRL>
Step to previous Magnification table entry.
<F4 + SHIFT>
Exit from Magnification Table mode.
Keypad < + >
Faster Scan
Keypad < – >
Slower Scan
<SCROLL LOCK>
Toggles Freeze/Unfreeze
<HOME>
Resets Beam Shift to zero.
<F12>, <F12 + SHIFT> Aborts Stage Movement.
<CTRL + F>
Starts Auto Focus fine
<CTRL + SHIFT + F> Starts Auto Focus coarse
<CTRL + S>
<CTRL + SHIFT + S>
<F9>
Performs Auto Astigmatism Correction
Performs Auto Astigmatism Correction with Auto Focus
Keys help (displays this information)
FULL KEYBOARD COMMAND SET:
The following keys are shortcut keys and have special meaning
<F9>
Keys help (displays this information)
<F2>
Toggles Tool Bar on/off
<CTRL + B>
Display Toolbar View dialog
<CTRL + D>
Toggle Data Zone ON/OFF
<CTRL + G>
Switches SEM Control Panel ON
<CTRL + I>
Switches SEM Status Panel ON
Operations:
<F2 + SHIFT>
<F3>
<F3 + SHIFT>
<F4>
<F4 + CTRL>
<F4 + SHIFT>
Keypad < + >
Keypad < – >
<PAUSE>
Hysteresis removal
Closes all windows except the Tool Bar and Status Bar
Toggles PC Plane ON/OFF
Step to next Magnification Table entry, or Undo Centre Feature Magnification
Step to previous Magnification table entry.
Exit from Magnification Table mode.
Faster Scan
Slower Scan
Causes currently executing macro to continue
Stage movement:
< Shift + Tab >
<SHIFT + double click > Performs Center Point function
ARROW Keys
Stage movement (See Use of ARROW Keys)
<F12>, <F12 + SHIFT> Aborts Stage Movement.
<HOME>
Resets Beam Shift to zero.
Imaging:
< SCROLL LOCK >
Toggles Freeze/Unfreeze
Image Buffer keys
<Alt + buffer #>
< Alt + N >
< CTRL + C >
<CTRL + V>
<CTRL + 2>
<’>
See Image Buffer
Saves Images to Buffer # 1-8
Saves Image to Next Buffer
Freezes & Saves Display to temporary buffer
Displays Temporary Image buffer
Loads Second Image Window from display
Performs Find Image function.
Annotation:
<CTRL + A>
<CTRL + T>
<CTRL + M>
<CTRL + E>
Switches Annotation panel ON
Calls Text Annotation
Switches to Annotation and inserts Point to Point Marker
Calls the Export TIFF dialog
<CTRL + O>
Calls the Import TIFF dialog
<CTRL + P> Performs the Print Image function.
Autofunctions:
<CTRL + F>
<CTRL + SHIFT + F>
<CTRL + S>
<CTRL + SHIFT + S>
Starts Auto Focus fine
Starts Auto Focus coarse
Performs Auto Astigmatism Correction
Performs Auto Astigmatism Correction with Auto Focus
User defined macros
<F5>, <F5 + SHIFT>, <F6>, <F6 + SHIFT> <F7>, <F7 + SHIFT>, <F8>, <F8 + SHIFT> <F11>, <F11 + SHIFT>
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