Zygo NewView 600 Interferometer

Zygo NewView 600 Interferometer
Basic Operator Procedure Training
NewView 600
GROWING IN A SHRINKING WORLD
NewView 600
• System Overview
Objective
X-Y and Tip-Tilt
Controls
Live Image
Monitor
Manual Z
Controls
Application
Monitor
NewView Theory of Operation
• Measurement Technology:
Scanning White-light
Interferometry (SWLI)
– Interferometric objective
mounted in a piezo scanning
device that moves vertically
– Camera detects
interferogram intensities
– Computer stores only good
(modulating) data as 3D
interferogram
– Frequency domain analysis
(FDA) determines heights of
each pixel to <0.1nm
resolution and <0.3 nm
repeatability
Operator Process Flow
Load Application
Set Measurement Controls
Select Objective
Set Analyze Controls
Load Sample
MEASURE
Find and Null Fringes
Save Results
Set Light Level
Load Application
• Open the MetroPro Shortcut on the Desktop
• Click on the desired application to open
Load Application
• If application not on desktop, right-click to “Load Application”
• Select and load application from list
Typical MetroPro Layout
• Micro.app: generic application for measuring surface
structure and roughness of samples
Objective
Button
3D Model
Buttons
Control
Windows
Filled Plot
Solid Plot
Numerical
Results
Surface
Profile
Measure
Attributes
Select Objective
• Click the Objective Button to select the objective
• For automated turret, ensure sample stage is clear first
• Choose objective based on resolution and desired field
of view
– Tradeoff: Lower magnification yields a wider field of view but
provides coarser lateral resolution
Focus Sample
• Adjust z using manual z controls until sample is focused
• Focus is found when fringes appear on Live Display
– Fringes are the light and dark bands produced by the interference
of light
• Hints: if having trouble focusing, press “F5” to set the light
level automatically for viewing, or try using the field stop
Example: Part focused with fringes
Focus Sample: Field Stop Focus Aid
• The field stop on the side of the NewView can be used as a
focus aid
• When the sample gets close to focus, a second image of
the iris will appear blurred; when they exactly overlap,
fringes should appear
• Most effective for high magnifications and smooth samples
Null Fringes
• Nulling is the process of minimizing the number of fringes
• Null sample by adjusting tip/tilt or “R P” using the knobs
on the stage.
• As the tip/tilt is adjusted, it may be necessary to make
fine z-adjustments to keep the fringes viewable on the
live display monitor
Fringes due to Tilt
NOT NULLED
Minimum Fringes
NULLED
Null Fringes
• Note: The null fringe location will
look different depending on the
part
– in most cases, think of
“spreading out” the fringes
– for a spherical part, center
the bulls eye
Set Light Level
• Set automatically by pressing “F5”
– Must be centered on the brightest fringe
• Set manually by pressing “F4”
– Use numeric keypad to set peak intensity to approx 90 – 99 %
– Make sure there is no saturation (red)
Set Measurement Controls
Measurement Controls
• FDA Res control sets how the software processes the
data collected
– “High 2G” for smooth surfaces
– “Normal” for rough surfaces, typically > 75 nm Ra
– “Low” required for extended scans
• Camera Mode
– Selects effective camera size for collecting data
– More pixels resolve smaller details but result in increased
processing time
Measurement Controls
• Scan Length
–
–
–
–
Select length of measurement scan
Ranges from 5 um to 15 mm
Longer scan = Longer acquisition time
Bipolar Scan: from initial position, objective moves down half the
scan length and then scans upward
Bipolar Scan
Start position
Sample
Measurement Controls
• Min Mod (%)
– Specifies minimum modulation or intensity range for a valid
data point
– Setting can range from 0 to 100 %
Analyze Controls
• Note: Changes to these controls can be made after measurement
Press “F2” or
button to re-analyze after changes
Analyze Controls
• Remove specifies the surface to remove to minimize
form
– As a general rule of thumb, remove a plane for flatness or a
cylinder for roughness
• Turn Data Fill On to fill missing data points; The
maximum number of pixels that will be filled is based
on the Data Fill Max control
• If Remove Spikes is On, a pixel will be removed if its
height is greater than the surrounding pixel heights by
the Spike Height value
Analyze Controls
• Filtering
– Low pass, high pass, band pass or band reject filters are
available in the Filter control (Off by default)
• Low pass highlights waviness or form; high pass
highlights roughness
– Use Filter Type to choose an average, median, 2 sigma, FFT
or Gaussian type filter
– For FFT fixed, enter cutoff values in the high and low
wavelength (or frequency) controls
Measure
• Press “F1” or click
button to measure
• System will scan then display results
– Do not touch vibration isolation table or sample stage until
measurement is complete
Numerical Results
Save Data: Store screenshot
• Options to Save Data: Save a screenshot, save the raw
data or save process stats
• To acquire a screenshot from MetroPro
1. Click on the Zygo button on the upper left corner of the application
2. Choose File, .bmp, Color from the Print Panel then click Print
3. Save the file with a .bmp extension
Save Results: Save Process Stats
• Click the process icon to open the process window
• To save a series of data as a txt or csv file, press the
zygo button and choose to print to a file
Save Results: Data
• Press
button
• In the file handler, enter a name for the file ending with
“.dat”
• Raw data is saved; Can be post-analyzed
Troubleshooting
• What to do if MetroPro returns “No Valid Data” error or if
there is too much data dropout
– Check Focus: Do you see fringes and are they nulled? (Or for an
extended scan, are you positioned below focus?) 3 or fewer
fringes is a good rule of thumb
– Check Scan Length: Is your scan long enough? Do you see all of
the fringes go by?
– Check Light Level (F4): Is light level in green zone?
– Check Min Mod %: Does it need to be lowered?
Resources
• NewView 600 Operating Manual, OMP-0528
• NewView Microscope Application Booklet, OMP-0360
• MetroPro Reference Guide, OMP-0347
• Available for download online:
http://www.zygo.com/?sup=/resource/manuals.cgi
User ID: manuals
Password: d5g2r8
Note: User ID and password periodically changing; Contact
Zygo if unable to access
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