User`s Guide

User`s Guide
User’s Guide
THE CENTER FOR
NANOSCIENCE AND
NANOTECHNOLOGY
MA6 User’s Guide
MA6 MASK ALIGNER
December 2011
Machine Overview
1
6
13
7
10
4
9
8
5
11
3
2
12
8
Part #
Description
Part #
Description
1
Log book
8
Mask holder vacuum connector
2
MAIN POWER SWITCH
9
Slide
3
Lamp power supply
10
Chuck
4
Analog panel
11
5
Digital panel
Chuck positioning micrometers
Θ (front), x-axis (rear)
6
Microscope
12
Chuck positioning micrometer
y-axis
7
Mask holder
13
Shutter
MA6 User’s Guide
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December 2011
Lamp Start and Warm Up
1
2
Log in on Log Book
Turn MAIN POWER SWITCH
CLOCKWISE
ON displayed in small window
a
a
Power supply will read STAND-BY
a
Part # 1
Wait about 10 seconds and press
ON on the power supply
Power supply will read
3
b
Wait about 10 seconds and press
CP on the power supply
c
a
Power supply will read
c
Wait about 10 seconds and press
START on the power supply
b
Part # 2
Power supply will read
4
After several minutes values will
appear on screen
Wait about 15 minutes before
turning machine on
If power supply beeps
and displays VOLT ERROR
*
Press OFF and then ON
on the power supply
Wait until screen displays STAND BY
Perform STEP 3 again
MA6 User’s Guide
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December 2011
Machine Start
Turn machine on
5
Turn machine power switch
CLOCKWISE
Switch will spring back to middle
Wait until screen reads
Ready for Start
6
Press LOAD button
Wait until main screen is displayed
a
Contact PROGRAM
Main Screen
Vacuum, Low-Vacuum, Hard,
Soft and Proximity
7
b
a
Alignment type
BSA—backside alignment (default)
TSA—topside alignment
c
Alignment gap (in microns)
d
Microscope coordinates
c
b
d
Replace chuck (if necessary)
a
1. Gently pull slide out of machine
until stop
2. Raise chuck from underneath
8
3. Switch chuck with one from
shelf
4. Lower new chuck from underneath
5. Align white stripe with pin
a
6. Gently push slide into machine
7. Align white crosses
θ micrometer c
5. Realign
a
b
with
b
if necessary
MA6 User’s Guide
c
4
December 2011
Mask Insertion I
Replacing mask holder (if necessary)
9
Push red release ring
towards machine
Grasp metal connector
on vacuum tube
and extract from machine
Do NOT touch the spacer flags!
a
a
c
Switch mask holder on side tray with
one on shelf, holding at b and c
10
Place new mask holder on side tray
with spacer flags facing UP
a
a
Grasp metal connector
on vacuum tube
and insert into machine
11
Press CHANGE MASK
Mask vacuum is OFF by default
a
1. Place mask on holder,
chrome side UP
12
b
2. Align mask to left pin and top bar
3. Push down metal plate to
engage holder clip a
MA6 User’s Guide
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December 2011
Mask Insertion II
Press ENTER
To engage mask vacuum
13
Screen should read ON
Do not flip mask holder if mask is not
held securely by vacuum
c
14
15
Grasp mask holder at
b
and
c
b
Flip mask holder over
Align mask holder edge with rails
a
a
Gently slide mask holder
into machine until stop
Press CHANGE MASK
16
Engages vacuum between mask holder
and machine
Exits out of CHANGE MASK menu
Returns to Main Screen
MA6 User’s Guide
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December 2011
Exposure without Alignment I
17
Main screen
To change Contact PROGRAM
Press SELECT PROGRAM
18
Use Y arrows on digital keypad
to select program
Press SELECT PROGRAM again
to exit the menu
To change Exposure Time
Press EDIT PARAMETER
19
Use Y arrows on digital keypad
to change Exposure Time
Press EDIT PARAMETER again
to exit menu
Press LOAD
20
Gently pull slide out of machine
until stop
MA6 User’s Guide
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December 2011
Exposure without Alignment II
Place substrate on chuck and align
to pins on 3”, 4” and 6” chuck
(4” chuck shown)
21
or grooves on chip chuck
(not shown)
Do NOT let wafer sit on top of pin!
Shown:
4” wafer properly aligned to ½ pins
When in doubt, leave a small gap
(1 mm or so) between wafer and
pins
When wafer is seated properly,
press ENTER
To turn on substrate vacuum
22
Gently push slide into machine
until stop
Press ENTER again
Chuck raises automatically
Screen reads PERFORMING WEC
Make sure substrate is aligned to
mask!
23
If possible, align by looking
through mask at substrate edges
Otherwise, set X micrometer a
and Y micrometer b both
to 10 mm (center position)
a
b
24
Double check contact and
exposure parameters!
Put on UV protective glasses
Press EXPOSURE
MA6 User’s Guide
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December 2011
Exposure without Alignment III
Chuck will lower automatically
When screen reads
25
Pull slide and unload
expose substrate
Gently pull slide until stop
An audible beep is sounded when
substrate vacuum is released
26
Remove wafer from chuck
27
Gently push slide into machine
until stop
Removing mask
1. Press CHANGE MASK
To release vacuum between mask
holder and machine
2. Slide mask holder out of machine,
flip and place on side tray
spacer flags facing UP
3. Press ENTER
To release substrate vacuum
28
5. Insert fingernail into groove
and pull TOWARDS YOU
a
6. Remove mask from mask holder
a
7. Press CHANGE MASK
8. Press ENTER
To confirm mask holder is not in
place, returns to main screen
During the day, leave MA6 in this
state with Main Screen visible
29
Log out on Log Book
MA6 User’s Guide
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December 2011
Exposure with Alignment I
30
Main screen
To change Contact PROGRAM
Press SELECT PROGRAM
31
Use Y arrows on digital keypad
to select program
Press SELECT PROGRAM again
to exit the menu
To change Exposure Time
Press EDIT PARAMETER
32
Use Y arrows on digital keypad
to change Exposure Time
Press EDIT PARAMETER again
to exit menu
Press LOAD
33
Gently pull slide out of machine
until stop
MA6 User’s Guide
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December 2011
Exposure with Alignment II
Place substrate on chuck and align
to pins on 3”, 4” and 6” chuck
(4” chuck shown)
34
or grooves on chip chuck
(not shown)
Do NOT let wafer sit on top of pin!
Shown:
4” wafer properly aligned to ½ pins
When in doubt, leave a small gap
(1 mm or so) between wafer and
pins
When wafer is seated properly,
Press ENTER
To turn on substrate vacuum
35
Gently push slide into machine
until stop
Press ENTER again
Chuck raises automatically
Screen reads PERFORMING WEC
Press BSA MICROSCOPE
36
Turns off bottom side microscope
Turns on top side microscope
TSA displayed in main screen
Roughly align substrate to mask
37
View substrate features through
mask openings and use X ( a )
and Y ( b ) micrometers to align
Otherwise set
a
MA6 User’s Guide
and
b
to 10 mm
11
a
b
b
December 2011
Exposure with Alignment III
To lower microscope
Press F1 and then ENTER
38
Caution!
Make sure head is not under
When it is lowering!
39
Turn ILLUMINATION knob
to TSA
40
Rotate microscope objectives to
lowest magnification (5X)
Focus objectives with
TOP SUBSTRATE fine focus knobs
41
If focus is not possible,
rotate microscope Z adjustment
knob to the right of microscope
and refocus with fine focus knobs
b
Find alignment marks (AMs)
Press FAST button
42
a
Use digital keypad b to move
microscope and find AMs on one side
Once found, use manual X adjusts
to find AMs on other side
Use SPLITFIELD selector
MA6 User’s Guide
d
a
c
c
d
c
as needed
12
December 2011
Exposure with Alignment IV
Check wafer/mask separation!
43
Press SEP down button
to view separation on screen
While adjusting micrometers,
minimum Z separation is 20 µm
44
45
Adjust X, Y and θ ( a , b and c )
micrometers to align substrate to
mask
a
b
c
Rotate microscope objectives to 10X
to evaluate alignment
(if necessary)
Press SEP up button
to raise chuck
and evaluate alignment
(if necessary)
46
Caution!
Do NOT adjust micrometers if
Z separation is below 20 µm!
If re-alignment is required
Press SEP down button
until screen reads 20 µm
When alignment is achieved
47
Double check contact and
exposure parameters!
Put on UV protective glasses
Press EXPOSURE
MA6 User’s Guide
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December 2011
Exposure with Alignment V
Chuck will lower automatically
When screen reads
48
Pull slide and unload
expose substrate
Gently pull slide until stop
An audible beep is sounded when
substrate vacuum is released
49
Remove wafer from chuck
50
Gently push slide into machine
until stop
Removing mask
1. Press CHANGE MASK
To release vacuum between mask
holder and machine
2. Slide mask holder out of machine,
flip and place on side tray
spacer flags facing UP
3. Press ENTER
To release substrate vacuum
51
5. Insert fingernail into groove
and pull TOWARDS YOU
a
6. Remove mask from mask holder
a
7. Press CHANGE MASK
8. Press ENTER
To confirm mask holder is not in
place, returns to main screen
During the day, leave MA6 in this
state with Main Screen visible
52
Log out on Log Book
MA6 User’s Guide
14
December 2011
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