SQM-160 - INFICON

SQM-160 - INFICON
SQM-160
Multi-Film Rate/Thickness Monitor
MULTI -CH A N N E L Q U A R T Z CRYSTAL M ONITOR
The SQM-160 uses proven INFICON quartz crystal sensor
technology to measure rate and thickness in thin film
deposition processes. Two sensor inputs are standard and
four additional sensor inputs are optional. Two recorder
outputs provide analog rate and thickness signals.
Sensor inputs can be assigned to different materials,
FEATURES AT A GLANCE
■ Two measurement channels standard,
an additional four optional
■ Analog outputs for rate/thickness recording
averaged for accurate deposition control in large systems, or
■ High accuracy option: 0.03 Hz at 10 readings/s
configured for a dual sensor. The rate sampling mode allows a
■ RS-232 standard, USB or Ethernet optional
shuttered sensor to extend sensor life in high rate processes.
Rate displays of 0.1 Å/s or 0.01 Å/s are user selectable. In
addition, Frequency or Mass displays can be selected. Four
EASY TO USE
relay outputs allow the SQM-160 to control source or sensor
To start rate and thickness measurements, press Zero to null
shutters, signal time and thickness setpoints, and signal
the last thickness reading, then Shutter to open the source
crystal failure. Digital inputs allow external signals to start/stop
or sensor shutter. The large, bright indicators simultaneously
and zero readings.
show thickness and rate readings that are visible from across
The SQM-160 comes with an RS-232 port and Windows®
the room. When the desired thickness is reached, or time has
software that allows instrument setup from your computer. The
elapsed, the shutter closes and the appropriate front panel
software can be used to set and store all parameters, operate
annunciators light. Press the Xtal Life button at any time to
the instrument, and save process data in an
Excel®
file format.
USB or Ethernet options add to the communications flexibility.
view the remaining crystal life.
Two menus control instrument setup for the 99 stored films.
To access the menus, press Program. Turn the setting knob to
select/edit parameters. The main display shows menu prompts,
Sensor
Substrate
and values are shown in the auxiliary (Time) display.
Monitor
HIGH ACCURACY, LOW COST
In-vacuum cable
Source Shutter
Standard frequency resolution is 0.12 Hz at four readings
Feedthrough
15.2 cm
(6 in.)
BNC cable
per second. The high accuracy option increases resolution to
0.03 Hz at 10 readings per second. Temperature stability is
3 m (10 ft.)
BNC cable
Oscillator
A typical QCM system consists of the SQM-160 monitor (choose your
configuration at left) and at least one sensor/feedthrough combination and
an oscillator kit for each sensor.
2 ppm over the entire operating range. This combination
of high accuracy and high stability are unmatched in an
instrument at this price!
S Q M -16 0 T h i n F i l m R a t e / T h i c k n e s s M o n i t o r
SPECIFICATIONS
QCM Sensor Inputs
Standard: two; optional: six
Frequency Range
1-6.5 MHz
Frequency Resolution
Standard: ±0.12 Hz at four readings/s
Optional: ±0.03 Hz at 10 readings/s
Thickness Resolution
Standard: 0.15 Å*
Optional: 0.04 Å*
Selectable Measurement Period
0.10 to 2 sec (in .05 sec increments)
Measurement Filter
One to 20 readings
Stored Films
99
Analog Outputs
Two 0 to 5 V (dc), rate and thickness
Digital Inputs/Outputs
Two inputs, four relay outputs
Digital Interface
Standard: RS-232
Optional: USB or Ethernet
Power
100-120/200-240 V (ac), 50/60 Hz, 20 W
CE Compliance
Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD
RoHS Compliance
Yes
Housing/Mounting
1/2-rack
Weight
2.7 kg (6 lbs)
Windows Software
Provides remote setup and operation, (included) datalogging functions — see sample screenshot below.
cabinet, 3.5 in. high,
89 x 213 x 197 mm (3.5 x 8.5 x 7.75)
* Thickness resolution value given for Period = 0.25 s (standard) and 0.1 s (optional) and Density = 1.00 g/cm3
ACC E S S O RIE S
782-900-008
2U Rack Extender – mounts one SQM-160 or CI-100 instrument in a 48.3 cm (19 in.) rack
782-900-014
2U Rack Extender – mounts two SQM-160 or CI-100 instruments in a 48.3 cm (19 in.) rack
782-900-017
Handheld Power Control 3 m (10 ft.) coiled cable
782-934-003-10
3 m (10 ft.) Oscillator kit – includes Oscillator, 15.2 cm (6 in.) BNC, and 3 m (10 ft.) BNC
ORDERING INFORMATION
SQM160 – ___ – ___ – ___
Base Controller
Standard Resolution
High Resolution
S
H
Number of Channels
Standard
Optional
2
6
Interface
Standard RS-232
Optional USB
Optional Ethernet
R
U
E
Enhanced software provides a visual display of process data for easy process
analysis and documentation. Backup of the SQM-160 setup data allows for process
consistency.
®
www.inficon.com
r eachus @ i nfi c on.c om
Instruments for Intelligent Control is a registered trademark of INFICON. All other trademarks are the property of their respective owners.
Due to our continuing program of product improvements, specifications are subject to change without notice.
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©2014 INFICON
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