Granville-Phillips Vacuum Measurement Product

Granville-Phillips Vacuum Measurement Product
Pressure & Vacuum Measurement
Solutions
Advanced Vacuum
Measurement Solutions
product guide for VACUUM GAUGES,
controllers and MODULES
Advanced Vacuum Measurement Solutions
MKS is proud to welcome Granville-Phillips® into our
family of vacuum measurement products. Users worldwide
turn to Granville-Phillips for reliable, precise and
dependable vacuum measurement technology.
Granville-Phillips vacuum gauges, electronics, modular
vacuum products, and tailored solutions provide the
flexibility, reliability, and precise performance that are
essential for your application. Combined with our existing
line of vacuum measurement products, that measure from
10-11 to 1500 Torr, MKS offers the best and broadest range
of vacuum and pressure measurement solutions.
Our vacuum gauges, transducers, sensors and controllers
are based on multiple pressure measurement technologies
including Convectron®, Micro-Ion®, MicroPirani™, Piezo, hot
and cold cathode, Stabil-Ion®, and MEMS-based
multi-sensor technology. These vacuum gauge and
transducer products are used individually or integrated
in combination, providing a wide variety of pressure
and vacuum measurement options in terms of gas
independence, covered pressure ranges and tolerance
to aggressive gases.
If your vacuum systems are used for semiconductor
process tools, analytical instruments, educational or
governmental research, or industrial processes, you
face an assortment of challenges. MKS is the solution—
providing accuracy, stability and dependability to improve
the quality and productivity of your vacuum processes.
Stabil-Ion® Gauges, Controllers and Modules
Stabil-Ion® products are the most accurate products in Bayard-Alpert (B-A) hot cathode gauge technology and
electronics. They are used in vacuum research and manufacturing processes where accurate and repeatable vacuum
pressure indication is critical. Stabil-Ion gauges are an all-metal B-A style gauge that was developed to provide and
maintain long-term accuracy over the life of the product. Many patented design features have removed the inaccuracies
and pressure indication changes that occur with typical B-A gauge products.
Series 360 and 370 Stabil-Ion® Gauges
• All-metal with precision-wound, stress-relieved anode retains shape for the life of the gauge
• Rugged stainless steel construction prevents grid and filament damage
• Tensioned dual filaments stay precisely positioned to maintain stability and calibration
• Vacuum-fired components prevent contamination and speed system pumpdown
• Unique design and precise manufacturing processes assure long-term, accurate measurement
Series 370 Stabil-Ion® Vacuum Measurement System
• All-metal, rack-mount controller for Stabil-Ion and Convectron is noise-immune and CE compliant
• Provides accurate pressure measurement from the 10-11 Torr range
• Dual convectron gauge option extends pressure measurement to atmosphere and allows
automatic turn on/turn off of the Stabil-Ion gauge
• Simultaneous 3-digit display pressure for three gauges
• RS-232 and RS-485 computer interface options
Series 347 Stabil-Ion® Modules
• Superior Stabil-Ion gauge performance in a compact package
• Accurate vacuum pressure measurement from the 10-10 Torr range (10-10 mbar, 10-8 Pa)
• Dual gauge filaments that increase equipment uptime
• All-metal design that eliminates glass and provides high immunity to RF
• Modular design that allows for quick and easy gauge replacement
Vacuum Measurement Products
Micro-Ion® Gauges, Controllers and Modules
The Micro-Ion® gauge is the world’s smallest B-A style gauge in an all-metal, rugged enclosure. Micro-Ion gauges are
compact, reliable, cost-effective, and measure a wide range of vacuum pressure. Micro-Ion modules are available with
dozens of different options and capabilities to meet any need for accurate pressure measurement from 10-9 Torr to atmosphere.
Series 355 Miniature Bayard-Alpert Gauges
• Rugged all-metal enclosure prevents grid and filament damage and eliminates the risk of glass breakage
• Measures pressure from 5x10-10 to 5x10-2 Torr
• Less than 5% of the volume of conventional glass B-A gauges
• Only 8% of the power consumption of typical glass or nude B-A gauges
• Dual tungsten or burn-out resistant yttria-coated iridium filaments provide long gauge life
Series 358 Micro-Ion® Vacuum Gauge Controller
• Compact, reliable, rack-mount controller for optimum Micro-Ion gauge performance
• Vacuum pressure measurement from 10-10 Torr range
• Dual Convectron gauge option extends pressure measurement to atmosphere and allows automatic turn on/turn off of the Micro-Ion gauge
• Process control options with up to six set point relays and manual override
• RS-232 or RS-485 computer interface options
Series 354, 392, 390 Micro-Ion® Modules
• Series 354: Micro-Ion module provides vacuum pressure measurement from 5x10-9 Torr to 10-2 Torr
• Series 392: Combines Micro-Ion and Conductron® sensors to provide measurement
from 10-9 Torr to atmosphere
• Series 390: Combines Micro-Ion, Conductron and Piezo resistive sensors to provide measurement from 10-9 Torr to atmosphere, along with gas independent atmospheric pressure indication
Bayard-Alpert Vacuum Gauges and Controllers
Classic glass and nude B-A gauges provide good vacuum measurement at an economical cost. Nude B-A gauges
for use in UHV systems are commonly used with the Series 307 and the Series 350 UHV vacuum gauge controller to
measure pressures down to the 10-11 Torr range. The Series 307 and 350 controllers are easy to use and offer optional
pressure set points that allow control of various system functions such as switching valves, interlocks, alarms, etc.
Series 274 Glass and Nude B-A Gauges
• Industry standard electrode voltages, wide range electron emission currents 10 µA to 10 mA
• Available with burn-out resistant filaments and standard vacuum connections
• Can be degassed by electron bombardment (EB); some can be degassed by resistance (I2R)
• Provides good vacuum pressure measurement from 1x10-9 to <1x10-3 for economical cost
• Available in tubulated (glass) or nude models
Series 307 and 350 UHV Controllers
• Lower measurement limit of <2x10-11 Torr or the X-ray limit of a B-A gauge with 10 mA emission and gauge sensitivity of 25 Torr
• Upper measurement limit of 1x10-2 Torr with 0.1 mA emission and gauge sensitivity of 25 Torr
• Controlled, adjustable emission current from 0.01 to 10 mA
• Logarithmic analog output of 1 V/decade, 0 to 10 VDC
• Up to 6-channel process set points with SPDT relays that can be set over the entire pressure range with manual override switches
• RS-232 and RS-485 interfaces
Vacuum Measurement Products
Cold Cathode Gauges, Modules and Transducers
The new Series 500 CCG provides unsurpassed accuracy for a cold cathode gauge. Modern design techniques together
with microprocessor monitoring and control deliver long life, high accuracy and predictive and easy maintenance. The
970 Series is a family of compact, low cost, general-purpose transducers that utilize from one to three sensors — cold
cathode, MicroPirani™ and Piezo technologies. Combining these sensing technologies enables a wide measurement
range from 10-8 Torr to atmosphere. In addition to its small size, broad range and lower cost, the 970 Series can be
operated via digital communication or as an autonomous analog unit. The family comprises of three transducer models,
the 971B UniMag (cold cathode), 972B DualMag (MicroPirani/cold cathode) and the 974B QuadMag (Piezo/MicroPirani/
cold cathode). Options include a display and an IP54 enclosure.
Series 500 Cold Cathode Gauge Module
• Wide measurement range from 10-10 to 10-2 Torr
• Calibrated gauge option provides ±10% accuracy
• Predictive and easy maintenance
• USB interface and GP connect software to setup and monitor gauge operation and usage
• Baffle keeps sputtered material from entering your process chamber
Series 970B Cold Cathode Transducer Family
• Wide measurement range 10-8 to 1000 Torr
• Low CCG turn on pressure (5x10-4 Torr) for longer lifetime
• Small footprint design provides a compact solution saving tool real estate
• User-serviceable anode module designed to decrease downtime to save external repair costs
• All transducers include both analog and digital communication for ease of operation
• Simplified interface via single analog output combining individual sensor measurements
422, 423 & 431 I-Mag® Cold Cathode Vacuum Sensors
• Wide measurement range from 10-11 to 10-2 Torr
• Dual feedthrough ion collection for increased accuracy
• Optional radiation resistance and high temperature versions
• Cleaning of sensor is easy with a demountable tube
• Sensor tube less susceptible to contamination due to isolated collector
Vacuum Gauge Transducers & Modules
901P
MicroPirani™/
Piezo Loadlock
902B
Absolute Piezo
910
DualTrans
MicroPirani/
Absolute Piezo
™
925
MicroPirani
PRESSURE MEASUREMENT RANGE
10-11
10-10
10-9
10-8
10-7
10-6
10-5
10-4
MicroPirani &
differential Piezo for
fast, accurate, gasindependent atmospheric
measurement on
loadlocks
10-3
10-2
10-1
1
10 1001000
HEAT-LOSS SENSOR
ABSOLUTE / DIFFERENTIAL
DIAPHRAGM SENSOR
HEAT-LOSS SENSOR
ABSOLUTE
DIAPHRAGM SENSOR
MEMS based
Piezo sensor for
gas-independent
measurement
MicroPirani & Absolute
Piezo for increased
accuracy & gasindependent
measurement at higher
pressures
MicroPirani provides
measurement 1 – 2
decades lower than
standard Pirani gauges
275
Convection enhanced
Pirani is factory
347
Stabil-Ion gauge provides
unmatched stability/
repeatability over time
354
Micro-Ion gauge provides
high sensitivity for low
noise & higher accuracy
Mini-Convectron® calibrated
Stabil-Ion®
Micro-Ion®
Micro-Ion, Conductron,
and two Piezo sensors
provide extended range
& gas-independent high
pressure measurement
HOT CATHODE ION SENSOR
392
Micro-Ion & Conductron
are combined for full
range measurement
HOT CATHODE ION SENSOR
500
Double inverted
magnetron provides
unprecedented accuracy
& predictive maintenance
971B
Stand-alone compact
cold cathode
972B
Combination cold
cathode, MicroPirani
COLD CATHODE ION SENSOR
974B
Combination cold
cathode, MicroPirani,
differential Piezo
COLD CATHODE ION SENSOR
390
Micro-Ion ATM
Micro-Ion Plus
Cold Cathode
Gauge
UniMag™
DualMag™
QuadMag™
Vacuum Quality Monitor (VQM®) Systems
HEAT-LOSS SENSOR
HEAT-LOSS SENSOR
HEAT-LOSS SENSOR
ABSOLUTE / DIFFERENTIAL
DIAPHRAGM SENSOR
OPERATING PRESSURE RANGE
10-11
World’s fastest, lowest
power mass spectrometer;
full data collection,
spectral deconvolution
& data logging
835
Extends pressure range
of VQM for process
monitoring & control
applications up to 3 Torr
VQM Differential
Pump System
ABSOLUTE / DIFFERENTIAL
DIAPHRAGM SENSOR
COLD CATHODE ION SENSOR
835
Vacuum Quality
Monitor (VQM)
System
HEAT-LOSS SENSOR
10-10
10-9
10-8
10-7
10-6
10-5
10-4
10-3
10-2
10-1
1
10 1001000
PRESSURE MEASUREMENT RANGE
Vacuum Gauges
10-11
274
Glass/Nude
Bayard-Alpert
Ionization
275
Convectron®
Pirani
355
Micro-Ion
Bayard-Alpert
®
370
Stabil-Ion®
Bayard-Alpert
423, 431
I-Mag® Cold
Cathode
10-10
10-9
10-8
10-7
Pressure measurement
for an economical cost,
available with burn-out
resistant filaments &
standard connections
10-6
10-5
10-4
10-3
10-2
10-1
1
10 1001000
10-1
1
10 1001000
GLASS
NUDE
Convection-enhanced
Pirani gauge provides
high accuracy &
repeatability
Smallest Bayard-Alpert
style, more rugged with
wide range, generates
less heat, greater burnout
resistance
Most accurate BayardAlpert features an all
metal gauge tube for
stability & long-term
repeatability
Based on inverted
magnetron design with
unique dual feedthrough
for increased range &
accuracy
PRESSURE MEASUREMENT RANGE
Vacuum Gauge Controllers
10-11
10-10
10-9
10-8
10-7
10-6
10-5
10-4
10-3
10-2
1 OR 2 BAYARD-ALPERT GAUGES
307
Bayard-Alpert
Bayard-Alpert full rack
controller with optional
two Convectron gauges
OPTIONAL: UHV BAYARD-ALPERT GAUGE
OPTIONAL: 2 CONVECTRON GAUGES
350
Bayard-Alpert
UHV
358
Micro-Ion half rack with
optional two Convectrons
Micro-Ion
®
Dual (sequential)
Stabil-Ion full rack
controller w/optional two
Convectrons provides
high accuracy &
repeatable measurement
370
Stabil-Ion®
475
Convectron
®
937B
Vacuum Gauge
Controller
946
Vacuum System
Controller
PDR900
Bayard-Alpert UHV half
rack controller with
optional two Convectron
gauges
For Series 900
Transducers
1 UHV BAYARD-ALPERT GAUGE
OPTIONAL: 2 CONVECTRON GAUGES
1 MICRO-ION GAUGE
OPTIONAL: 2 CONVECTRON GAUGES
1 OR 2 STABIL-ION GAUGE
OPTIONAL: 2 CONVECTRON GAUGES
Single Convectron
controller includes preprogrammed gas curves
Supports a wide range
of sensor technologies
including cold & hot
cathode, Pirani, Piezo &
Baratron® gauges
Versatile half-rack
controller provide
pressure measurement
along with flow &
pressure control
Stand-alone, single
channel, or tool for
configuration & for
advanced system
diagnostics
1 CONVECTRON GAUGE
COLD CATHODE SENSOR
HEAT-LOSS SENSOR
CAPACITANCE DIAPHRAGM GAUGE AND PIEZO DIAPHRAGM GAUGE
FLOW RANGE - 2.0 x 10-3 SCCM to 1,000 SLM
PRESSURE CONTROL RANGE
Mini-Convectron®, Convectron® Gauges, Controllers and Modules
Convectron gauges have been the world-standard convection-enhanced pirani gauge for over three decades and are
used in thousands of vacuum processes to accurately measure pressure from 10-4 Torr to atmosphere. Every Convectron
gauge is individually calibrated before shipping from the factory. The Series 475 Convectron gauge controller incorporates
the latest technological advances in electronics and design. Mini-Convectron modules combine the Convectron gauge
with electronics in a compact modular design and are available with dozens of different options and capabilities to meet
any need for accurate pressure measurement from 10-3 Torr to atmosphere.
Series 275 Mini-Convectron® Module
• DeviceNet digital interface facilitates easy system integration
• Wide range pressure measurement from 10-3 Torr (10-3 mbar, 10-1 Pa) to atmosphere
• Individually calibrated gauges assure highest measurement performance
• Compact, rugged, RF and noise-immune module is CE compliant
• Two software-controlled set point relays provide safety interlocking
Series 275 Convectron® Vacuum Gauge
• Wide range vacuum pressure measurement from 1x10-4 Torr to atmosphere
• Individually calibrated gauges assure the highest measurement performance
• Easy installation in space-restricted locations
• Wide selection of vacuum fittings simplifies installation on your vacuum system
• Rugged construction
Series 475 Convectron® Gauge Controller
• High-performance, compact controller for bench top or panel mount applications
• Wide range vacuum pressure measurement from 1x10-4 Torr to atmosphere
• I/O options including an analog output, set point relays, serial communication interface
• Pre-programmed gas curves for N2, Ar, He, CO2, and O2
• Intuitive menu control for simplified configuration, calibration, and parameter setup
• Self diagnostics
• RS-232 and RS-485 interfaces
Vacuum Measurement Products
Series 900 Transducers
The Series 900 vacuum tranducers are microprocessor-based, stand-alone gauges that offer ultra compact design and
a wide pressure measurement range. Designed for system integration, the Series 900 transducers offer both analog
and digital communication and incorporate MEMS-based (Micro Electro-Mechanical Systems) technologies including
MicroPirani™ and Piezo sensors. These transducers are mountable in any orientation without loss of accuracy for ease
of installation. Common features and functions of the Series 900 include:
• 1x10-5 to 1500 Torr
• Up to 3 set point relays for process controlling
• Analog voltage output • Integrated display available
• RS-232 or RS-485 digital interface
Series 901P MicroPirani™/Piezo Loadlock Transducer
• Accurate absolute measurement from 10-5 to 1000 Torr, gas independent (60 to 1000 Torr)
• Fast, accurate, and repeatable pressure measurements reduces process cycle time
• Ease of integration via analog output and digital communication
Series 902B Absolute Piezo Transducer
• Measurement range of 0.1 to 1000 Torr Full Scale
• Low cost transducer alternative to more expensive conventional transducers
• Gas independent pressure measurement for accurate, total pressure measurement
• Sensor is suitable for harsh processes due to robust design and stainless steel construction
• Solid state Piezo sensor resistant to damage from air inrush and vibrations
Series 910 DualTrans™ MicroPirani™/Absolute Piezo Transducer
• Two sensors in a single transducer for space savings and wide measurement range
• Absolute pressure measurement from 10-5 to 1500 Torr
• Gas independent absolute pressure measurement from 11 to 1500 Torr
• Fast, accurate and repeatable pressure measurements reduces process cycle time
Series 925 MicroPirani™ Transducer
• Measurement range from 10-5 Torr to atmosphere, 2 decades beyond a standard Pirani
• High accuracy for improved process control
• Pre-programmed gas curves for N2, Ar, He, H2, H2O, Xe and CO2
Series 900 VacuumLog Software
• Datalogger software for Series 900 transducers
• Diagnostic tool
• Pump down curve plotting
• Freeware, no license
• Rate of rise leak testing
Combination Gauge/System Controllers
MKS offers highly flexible vacuum gauge controllers that enable a wide range of gauging technologies, tailoring the
system to each individual application. These versatile vacuum controllers provide power and simultaneous readouts for
up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure, calibration, and
system diagnostics. These instruments set new standards in vacuum gauge control for OEM applications.
Series 937B Digital Combination Vacuum Gauge System
• Provides simultaneous readout for a combination of up to six vacuum gauges
• Wide measurement range of 10-11 to 10,000 Torr
• Intuitive menu for ease of setup
• Large easy to read backlit display
• User-configurable for units of pressure in Torr, millibar, Pascal, or microns
• Configurable for up to six heated MKS Baratron® capacitance manometers
• Twelve independent relay set points for improved process control with variable hysteresis
Series 946 Vacuum System Controller
• Simultaneous control and readout for up to six vacuum gauges and/or six mass flow controllers for ultimate versatility
• Provides pressure measurement, flow, valve, and pressure control
• Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
• RS-232/485 computer control standard in all configurations for ease of system interfacing
Series PDR900 Controller
• Single channel controller for use with 900 Series transducers
• LCD menu display for easy user interface
• Easy to read 5 digit LED display
•Three high power set point relays for process control
•Auto setup enables plug and play functionality
•Leak detection tool for system diagnostics
• Data logging tool for process monitoring
•Simplified setup and configuration of transducer parameters
•Front panel indicators provide clear, concise overview of set point relay status
Vacuum Measurement Products
Vacuum Gauge Controllers
307
350
358
370
475
Cold Cathode Gauge
946
Y(3)
Y(3)
Y(6)
Y(6)
Y(3)*
Y(3)*
Y(6)
Y(6)
Convectron Gauge
Y(2)
Y(2)
B-A Glass or Nude Gauge
Y(2)
Y(1)
Nude UHV Ionization Gauge
Y(2)
Y(1)
Thermocouple Gauge
Y(2)
Baratron® Capacitance
Manometer
Y(1)
Y(2)
Y(1)
Y(2)
Y(1)
Y(1)
Y(6)
Mass Flow Controllers
Features
For Use with Series 900 Transducers
Y(1)
Micro-Ion Gauge
Adjustable Process Control
Relays
PDR900
Y(2)
Stabil-Ion UHV Gauge
Gauges and Transducers
937B
Y(6)
Y(6)
Y(6)
Y(6)
Y(2)
Y(12)
Y(12)
Y(3)
Analog Output(s)
Y
Y
Y
Y
Y
Y
Y
Y
RS-232 Interface
Y
Y
Y
Y
Y
Y
Y
Y
RS-485 Interface
Y
Y
Y
Y
Y
Y
Y
IEEE 488 Interface
Y
Profibus Interface
Y= Yes Y + (#) = possible number of gauges or set points.
* Low power Nude gauge only.
Y
Y
Vacuum Quality Monitor™
Vacuum Quality Monitor (VQM®) Systems
Vacuum Quality Monitor systems are used by research labs and production facilities to monitor the quality and
composition of the gases in their vacuum system. Typical usage includes system baselining, post chamber PM
verification, leak detection, contamination checking, and monitoring the overall quality of the vacuum in the system.
The sensor used in the VQM system is an auto-resonant ion trap mass spectrometer gauge – the newest and fastest
technology in use today.
Series 835 VQM® Mass Spectrometer System
• 1-145 amu total and partial measurement information in 85 ms, or 1-300 amu in 120 ms
• Instant access to 10 most prevalent gases in normalized, percentage and absolute values, total pressure and partial pressure trend graphs
• Accurate hydrogen and helium measurements (no zero blast)
• Easy single-gas calibration using a gas already in your vacuum system
• Low power requirement - only 15 W
• Remotely mounted gauge using a 1-meter to 50-meter long cable
Series 835 VQM® Differential Pump System
• All the benefits of the 835 VQM with an extended operating range from 5x10-9 to 3 Torr
• Gate valve with orifice designed for operation at base and process pressures
• Scan range from 1-145 amu or optionally 1-300 amu
• Process control through software API, LabVIEW VIs, or dedicated output
Please contact your local MKS sales representative or visit www.mksinst.com for more information.
AVMS Product Guide - 3/17
P/N 138503-EN-US, Rev. F
© 2014 MKS Instruments, Inc.
All rights reserved.
MKS Instruments, Inc.
Global Headquarters
MKS Instruments, Inc.
Pressure & Vacuum Measurement Solutions
2 Tech Drive, Suite 201
Andover, MA 01810
6450 Dry Creek Parkway
Longmont, CO 80503
Tel:978.645.5500
Tel: 800.227.8766 (in USA)
Web: www.mksinst.com
Tel:303.652.4400
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice.
Granville-Phillips®, Stabil-Ion®, Micro-Ion®, Convectron®, Mini-Convectron®, Conductron® and VQM® are registered
trademarks and mksinst™, MicroPirani™ and Vacuum Quality Monitor™ are trademarks of MKS Instruments, Inc.
DeviceNet™ is a trademark of Open DeviceNet Vendor Association.
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