Catalogue eddyNCDT Sensors - Micro

Catalogue eddyNCDT Sensors  - Micro
More Precision
eddyNCDT // Eddy current sensors for displacement and position
2
Measuring principle
eddyNCDT
Electromagnetic
alternating field
Sensor with coil
Eddy currents
Distance
Metal plate
Measuring principle
The eddy current principle occupies a unique
position amongst inductive measuring methods. The measuring principle is based on
the extraction of energy from an oscillating circuit. This energy is required for the induction
of eddy currents in electrically-conductive materials. Here, a coil is supplied with an alternating current, causing a magnetic field to form
around the coil. If an electrically conducting
object is placed in this magnetic field, eddy
currents are induced which form a field according to Faraday‘s induction law.
This field acts against the field of the coil,
which also causes a change in the impedance
of the coil. The impedance can be calculated
by the controller by looking at the change in
the amplitude and phase position of the sensor coil.
Eddy current sensors
For many years, Micro-Epsilon has been a
pioneer in displacement measurement using
eddy current technology. Eddy current sensors from Micro-Epsilon are designed for
non-contact measurement of displacement,
distance, position, oscillation and vibrations.
Eddy current sensors from Micro-Epsilon are
extremely robust and precise.
Advantages
ƒƒWear-free and non-contact measurement
ƒƒHigh precision and resolution
ƒƒHigh temperature stability
ƒƒFerromagnetic and non-ferromagnetic
materials
ƒƒFor demanding, industrial environments:
dirt, pressure, temperature
ƒƒFast measurements up to 100kHz
3
eddyNCDT: Robust sensors with unmatched precision
Eddy current sensors from Micro-Epsilon are often used in applications where harsh ambient
conditions are present and where maximum precision is required. Immunity to dirt, pressure and
extreme temperature are distinctive features. The many designs of eddy current sensors enable
engineers to select the optimal sensor for their particular application.
Custom sensors for automation and OEMs
Application examples are often found where the standard versions of the sensors and the controller are performing at their limits. For these special tasks, the measuring systems can be modified
according to a customer’s specific individual requirements. Changes requested include, for example, modified designs, target calibration, mounting options, individual cable lengths, modified
measuring ranges or sensors with integrated controller.
-40 °C
+200 °C
Ideal for temperature fluctuations
Robust sensors
Comprehensive product range
ƒƒ Active temperature compensation of sensor,
ƒƒ Robust and reliable sensors IP67
ƒƒ More than 400 sensor models
ƒƒ Pressure-resistant models up to 2,000 bar
ƒƒ Miniature sensors smaller than 2mm
ƒƒ Resistant to oil, dust & dirt
ƒƒ Custom sensors and OEMs
cable and controller
ƒƒ Temperature range -40°C to 200°C and higher
Eddy current sensor with integrated electronics Page 4 - 5
Compact eddy current sensor system eddyNCDT 3001
eddyNCDT 3005
ƒƒMeasuring range 2 / 4mm
ƒƒResolution 4μm
ƒƒBandwidth 5kHz
ƒƒMeasuring range 1 - 6mm
ƒƒResolution ≥ 0.5µm
ƒƒBandwidth 5kHz
Robust eddy current sensor system Page 10 - 13
Flexible eddy current sensor system eddyNCDT 3010
eddyNCDT 3100
ƒƒMeasuring range 0.5 - 15mm
ƒƒResolution ≥ 0.025μm
ƒƒBandwidth 25kHz
ƒƒMeasuring range 0.5 - 15mm
ƒƒResolution ≥ 0.025μm
ƒƒBandwidth 25kHz
High precision eddy current sensor system Page 18 - 25
Turbocharger speed sensors eddyNCDT 3300
turboSPEED DZ140
ƒƒMeasuring range 0.4 - 80mm
ƒƒResolution ≥ 0.02μm
ƒƒBandwidth up to 100kHz
ƒƒMeasuring range 0.5 - 1mm
ƒƒSpeed range 200 RPM to 400,000 RPM
ƒƒOperating temperature up to 285°C
Spindle Growth System
eddyNCDT SGS4701
ƒƒMeasuring range 500µm
ƒƒResolution ≥ 0.5μm
ƒƒBandwidth 2kHz
Page 30 - 31
Page 6 - 9
Page 14 - 17
Page 26 - 29
Application examples/Accessories
Page 32 - 33
Technical information
Page 34 - 39
Compact eddy current sensors with integrated electronics
eddyNCDT 3001
-C
ompact M12 sensor design with
integrated controller
- Bandwidth 5kHz (-3dB)
-S
ensor for ferro- and nonferromagnetic targets
- Temperature compensation up to 70°C
- Easy to use (plug & play)
- Robust design to IP67
- Ideal for OEM applications
Installation instructions
The relative size of the measurement object to
the sensor and the position of the mounting
nut have effects on the linearity deviation for
eddy current sensors.
Please note:
ƒƒDepending on the sensor model, the measurement object geometry shall be 4 times
the sensor diameter.
ƒƒThe mounting nut should not exceed the
indicated dimension A.
and can be modified if required for higher volume applications.
The sensor is factory calibrated with both ferrous and non-ferromagnetic materials, which
eliminates the need for onsite linearisation
of the sensor. The robust construction, combined with true eddy current measurement
principle, enables measurements in harsh industrial environments (oil, pressure, dirt). Additionally, the eddy NCDT 3001 is also suitable
for offshore and marine applications (saltwater resistant).
min 48
Robust miniature eddy current sensor
The eddyNCDT 3001 is a completely new
high performance eddy current sensor platform. Although it is a similar size to currently
available proximity and inductive sensors, the
measuring performance is much greater. With
integrated electronics including active temperature compensation, the sensor provides
high measurement stability even in fluctuating
temperature environments. Combined with an
extremely competitive pricing structure, this
is an ideal OEM solution. The device can be
supplied in single quantities for evaluation
4 x Sensor ø
4
A: 22
±0.2
5
Model
DT3001-U2A-SA DT3001-U2M-SA DT3001-U4A-SA DT3001-U4M-SA
Measurement object 1)
aluminium
Measuring range
steel
aluminium
DT3001-U4A-Cx
DT3001-U4M-Cx
aluminium
steel
steel
2mm
4mm
Offset distance
0.4mm
Linearity
28µm
Resolution 2)
4µm
Bandwidth
5kHz (-3 dB)
Temperature stability
0.03% FSO / °C
Temperature compensation range
0°C …+70°C
Ambient temperature
0°C …+70°C
Installation
unshielded
Recommended measurement object
geometry (flat)
48mm
Connection
connector 5-pin M12
Output
integrated cable, 5-pin, length 3/6/9m
0.5 ... 9.5V
0.5 ... 4.5V
Power supply
12V … 32V
Protection class
Weight
IP67 (connected)
IP67
25g
60g (3m)
100g (6m)
140g (9m)
FSO = of full scale output
1)
Steel: ST37 DIN 1.0037 / aluminium: AlCuMgPb3.1645
2)
RMS noise relates to centre of measuring range with a bandwith of 5kHz
DT3001-SA
DT3001-Cx
ø10.5
4
4
WS19
11.5
WS19
11.5
ø10.5
Pin assignment
Description
Colour Description
1
supply +24V
brown
supply +24V
2
displacement signal
green
displacement signal
3
ground
white
ground
4
internal
yellow
internal
5
internal
grey
internal
82.5
Pin
12
M12x1
28.6
8
17.6
71.5
Pin assignment 5-pin M12-connector
ø4.3
Dimensions in mm, not to scale.
M12x1
6
Compact eddy current sensor system
eddyNCDT 3005
- Compact and robust design
- Temperature compensation up to 180°C
- High precision measurement accuracy
- High bandwidth
-S
ensor for ferro- and non-ferromagnetic
targets
- Easy to use (plug & play)
-P
erfect for machine integration
Eddy current displacement measurement
Eddy current sensors from Micro-Epsilon are designed for displacement, distance, movement and position measurements, but also for
detecting oscillations and vibrations. Non-contact operating eddy current sensors from Micro-Epsilon are renowned for their extreme precision, and are even used for micrometre-accuracy measurements.
Multi-channel operation without mutual interference
If two or more systems operate next to one another, there is no need
for synchronisation. For operating several systems, a new frequency
separation is provided, which enables to operate these systems in parallel without influencing one another. Tuning via synchronisation cable
is not necessary.
Robust eddy current measurement system
The eddyNCDT 3005 is a new, powerful eddy current measurement
system for fast, high precision displacement measurements. The system comprises a compact controller, a sensor and an integrated cable
and is factory-calibrated for ferromagnetic and non-ferromagnetic materials.
As sensor and controller are temperature-compensated, high measurement accuracies can be achieved even in fluctuating temperatures. The
sensors are designed for ambient temperatures up to max. +125°C but
can optionally be custom engineered for temperatures from -30°C to
+180°C. The measurement system is pressure-resistant up to 10 bar
and so is ideally suited to machine integration.
Ideal for integration into plant and machinery
The eddyNCDT 3005 provides ease of use and high measurement accuracy, offering an outstanding price/performance ratio. Therefore, the
sensor is ideally suited to OEM integration and mechanical engineering
applications. Particularly where pressure, dirt, oil and high temperatures are present, the eddyNCDT 3005 is suitable. Where high volume
orders are required, customer-specific designs can be tailored to suit
individual requirements.
Compact design
7
DT3005U1-A-C1
DT3005U1-M-C1
DT3005S2-A-C1
DT3005S2-M-C1
DT3005U3-A-C1
DT3005U3-M-C1
DT3005U6-A-C1
DT3005U6-M-C1
aluminium
steel
aluminium
steel
aluminium
steel
aluminium
steel
Model
Measurement object 1)
Measuring range
1mm
2mm
3mm
6mm
0.1mm
0.2mm
0.3mm
0.6mm
≤0.25% FSO
2.5µm
5µm
7.5µm
15µm
≤0.05% FSO
0.5µm
1µm
1.5µm
3µm
Offset distance
Linearity
Resolution
2)
Repeatability
≤0.05% FSO
Max. sensitivity deviation
≤1%
Bandwidth
5kHz(-3dB)
Temperature stability (MMR)
0.025% FSO / °C
sensor
Temperature
compensation range
10°C …+125°C (optional -30°C ... 180°C)
controller
10°C …+60°C
sensor
Ambient temperature
-30°C …+125°C (optional -30°C ... 180°C)
controller
-20°C …+70°C
Design
unshielded
shielded
unshielded
unshielded
ø24mm
ø24mm
ø48mm
ø72mm
Recommended measurement
object geometry (flat)
Sensor cable length
1m
Connection
connector 5-pin M12
Output
0.5 ... 9.5V
Power supply
12V … 32V
Protection class
IP67
Pressure resistance
10bar (sensor, cable and controller)
Weight
70g
75g
77g
95g
FSO = of full scale output
MMR = midrange
1)
Steel: ST37 DIN 1.0037 / aluminium: AlCuMgPb3.1645
2)
RMS noise relates to centre of measuring range with a bandwith of 5kHz
DT3005-S2
DT3005-U3
DT3005-U6
M6x0.5
ø4.5
M12x1
M12x1
ø9.9
M18x1
ø14.85
WS10
40.625
4
WS27
WS16
6
9.5
ø4.7
8
ø4.7
5
ø4.7
9.5
8
ø4.7
ø3.6
ø3.6
ø3.6
ø3.6
Controller
Pin assignment
104.8
M12x1
11.4
12
8
9.5
8
34
30
WS19
4
WS10
Measurement direction
6.125
6
15.5
4
WS19
5
WS10
25
3.2
4
DT3005-U1
Pin
Description
Colour
1
supply +24V
brown
2
displacement signal
white
3
ground
blue
4
internal
black
5
internal
grey
Installation conditions
8
eddyNCDT 3005
Installation instructions
The relative size of the measurement object to the sensor and the position of the mounting nut
have effects on the linearity deviation for eddy current sensors.
Please note:
ƒƒDepending on the sensor model, the measurement object geometry shall be 2 or 4 times the
sensor diameter.
ƒƒThe mounting nut should not exceed the indicated dimension A.
DT3005-S2-x-C1
Min. ø 24 mm
Min. ø 24 mm
DT3005-U1-x-C1
A: 8 mm
DT3005-U6-x-C1
Min. ø 48 mm
Min. ø 72 mm
DT3005-U3-x-C1
A: 4 mm
A: 13 mm
A: 10 mm
9
Multi-channel operation without mutual interference
If two or more systems operate next to one another, there is no need for synchronisation using a
synchronisation cable. For operating several systems, a new frequency separation is provided
(LF/HF), which enables to operate these systems in parallel without influencing one another.
Please note:
ƒƒThe LF/HF sensor arrangement enables to mount two sensors next to one another.
ƒƒThe distance between two pairs of sensors must be at least 6 times the sensor diameter.
ƒƒHowever, it is not possible to place 2 LF sensors or 2 HF sensors next to one another.
DT3005-S2-x-C1/LF
min. 6 x Sensor-Ø
min. 6 x Sensor-Ø
DT3005-S2-x-C1/HF
DT3005-S2-x-C1/LF
DT3005-S2-x-C1/HF
Correct LF/HF arrangement
DT3005-S2-x-C1/LF
DT3005-S2-x-C1/HF
DT3005-S2-x-C1/LF
DT3005-S2-x-C1/HF
Arrangement not possible
10
Compact eddy current sensor system
eddyNCDT 3010
- High accuracy and temperature stability
- Active temperature compensation
- Bandwidth 25kHz (-3dB)
- For integration in harsh, industrial
environments
-M
ulti-channel applications by
synchronisation
System structure
The eddyNCDT 3010 is a compact, singlechannel system consisting of an eddy current sensor, a sensor connecting cable and
an amplifier electronics (signal conditioning
unit). The sensors are factory-calibrated for
aluminium (non-ferromagnetic) or steel St37
(ferromagnetic). Using three-point linearisation, the user can also compensate on site for
other materials.
Temperature compensation
The eddyNCDT 3010 series is suitable in a wide
temperature range. In the case of fluctuating
ambient temperatures a stable output signal is
very important for reliable measurements. Due
to a patented temperature compensation method the eddyNCDT series 3010 offers a unique
thermal stability, which no other system can
offer.
The eddyNCDT 3010 is designed for industrial
use in production plants, for machine control
and for measuring and testing during in-process quality assurance.
Synchronisation
If several channels of series 3010 operate simultaneously close to one another, a mutual
interference is possible because of slight differences in the oscillator frequencies.
This can be avoided by synchronisation. Two
SMC connectors at the electronic box, one for
oscillator signal output (sync out) and one for
input (sync in) are standard equipment. The
electronics operate independently as long as
they are not interconnected. lf connected together, they automatically switch to synchronised operation and are controlled by the first
electronics (master). Any quantity of units can
be synchronised by serial connection.
Controller
DT3010
in sync out
Controller
DT3010
in sync out
SC30 – synchronization cable (accessory)
Controller
DT3010
in sync out
11
Controller
Material
Linearity
DT3010-A
DT3010-M
non-ferromagnetic target
ferromagnetic target
≤±0.25% FSO
0.005% FSO
Resolution 1)
Repeatability
0.01% FSO
Bandwidth
25kHz (-3dB)
Temperature compensation range
standard: 10 to 65°C optional 0 to 90°C
operation: 10 to 50°C
Temperature range controller
storage: -25 to 75°C
Temperature stability controller (MMR)
≤0.05 % FSO/ °C
Output
0 ... 10V / 10mA and 4 ... 20mA
Power supply
24 VDC (9 ... 30V) / 205mA
Electromagnetic compatibility (EMC)
acc. EN 50081-2 / EN 50082-2
Synchronisation
with cable SC 30 (accessory)
Protection class
controller
IP 54
FSO = of full scale output
MMR = midrange
1)
static resolution at midrange
Housing DT3010
54
150
sensor
OUTPUT/POWER
Mounting holes
for M4 screws
38
64
138
sync in
sync out
Sensors
eddyNCDT 3010
4
ø4
M3x0.35
M5x0.8
M12x1
WS 8
WS 13
13
20
Connector side
ø12
ø8
M8x1
18
ø2
4
Measurement direction
20
12
ø4
WS 10
3m±0.45m
ø8.9
20
20
16
ø8.9
ø4.6
16
ø4.6
3m ±0.45m integrated cable
0.25m ±0.03m
ø2
Sensor type
WS 19
ø3
ø3
Design
12
ø4
8
ø2.5
10
WS 5.5
U05(09)
U1
S1
S2
unshielded
unshielded
shielded
shielded
Measuring range
0.5mm
1mm
1mm
2mm
Offset distance
0.05mm
0.1mm
0.1mm
0.2mm
≤±1.25µm
≤±2.5µm
≤±2.5µm
≤±5µm
Resolution
0.025µm
0.05µm
0.05µm
0.1µm
Repeatability
0.05µm
0.1µm
0.1µm
0.2µm
≤±0.5µm/°C
Linearity
≤±0.125µm/°C
≤±0.25µm/°C
≤±0.25µm/°C
Integrated cable/ length
Temperature stability (MMR)
0.25m
3m
3m
-
Temperature sensor cable
180°C
180°C
180°C
-
stainless steel and ceramic
stainless steel and plastic
stainless steel and plastic
stainless steel and plastic
Housing material
MMR = midrange
Sensor
Ø3
Controller
Ø4.6
Ø8.9
Connecting cable C3; C6 for sensors U05, S2, U3, U6, U15
16
C3: 3m ±15%
C6: 6m ±15%
Sensor
20
20
16
15
Ø3
Controller
Ø4.6
Ø8.9
Connecting cable C3/90; C6/90 for sensors U05, S2, U3, U6, U15
C3/90: 3m ±15%
C6/90: 6m ±15%
open ends
for transition board
nsor
Ø3
Ø4.6
ntroller
Ø8.9
Connecting cable Cx/1
13
ø14
ø4.2
3 mounting holes
on bolt circle ø 20
25
20
M18x1
12
6
M12x1
Connector side
ø37
6
ø9
Measurement direction
WS 19
WS 10
WS 27
WS 16
Sensor
Ø3
Controller
Ø4.6
Ø8.9
Connecting cable C3; C6 for sensors U05, S2, U3, U6, U15
Design
20
U3
16
C3: 3m ±15%
unshielded
C6: 6m ±15%
Measuring range
Offset distance
Linearity
3mm
6mm
15mm
0.6mm
1.5mm
≤±7.5µm
≤±15µm
≤±37.5µm
0.15µm
0.3µm
0.75µm
0.3µm
0.6µm
≤±0.75µm/°C
≤±1.5µm/°C
≤±3.75 µm/°C
-
-
-
C3/90: 3m ±15% C6/90: 6m ±15%
-
-
stainless steel and plastic
epoxy
Integrated cable/ length
20 sensor cable16
Temperature
Housing material
1.5µm
15
Temperature stability (MMR)
Ø3
Ø4.6
Ø8.9
Controller
Repeatability
U15
unshielded
0.3mm
Connecting cable C3/90; C6/90 for sensors U05, S2, U3, U6, U15
Resolution
U6
unshielded
Sensor
Sensor type
stainless steel and plastic
MMR = midrange
open ends
for transition board
sensor
Ø3
Controller
Ø4.6
Ø8.9
Connecting cable Cx/1
20
16
C3/1: 3m ±15%
C6/1: 6m ±15%
Cable Cx / Cx1 / Cx/90 Cable design
Sheath material
Temperature resistance
Outer diameter
Bending radius
Suitable for use with robots
coaxial with sheath wire
FEP/Flour-Thermoplast
-50°C to +200°C
2.95mm ±0.05mm
one-time bending during installation: 2 x cable diameter
minimum bending radius for movement: 5 x cable diameter
optimum bending radius at continuous movement: 10 x cable diameter
no
Plug
Type
Locking method
Protection class
Temperature resistance
Material housing
Mechanical service life
Sensor side/Controller side
female connector, coaxial, SMC
screw
no details
-65 to +165°C
brass nickel-plated
> 500 mating cycles
14
Eddy current sensor system
with simple web browser configuration
eddyNCDT 3100
- Easy sensor replacement
- Configuration via web browser
- High temperature stability, resolution
and linearity
- Bandwidth 25 kHz (-3dB)
- Multi channel applications:
synchronisation of up to 10 controller
System design
The eddyNCDT 3100 includes an extremely
compact controller and a displacement sensor. The sensors are connected through a 3m
or 9m integrated, highly flexible cable and
connected to the controller by a user-friendly
push-pull plug-in connection.
The controller housing is made from solid
cast aluminium and is protected to IP65.
Alternative mounting options are slot nuts,
mounting holes or a mounting rail. The robust
sensors make the eddyNCDT 3100 system
ideally suited to measurement tasks in the industrial environment.
Versatile in application
The eddyNCDT 3100 series is the new generation of eddy current displacement measurement systems. The measurement system
uses a patented temperature compensation
method to provide firstclass stability even with
fluctuating temperatures. These sensors are
an excellent choice when you need high precision in harsh industrial environments (pressure, dust, temperature).
Sensors and cables come with an integrated
memory module that stores all the major sensor and cable data. All sensors are factory
calibrated to adjust to ferromagnetic and nonferromagnetic materials.
Multi-channel synchronisation
In the case that more sensors of the series
eddyNCDT 3100 are operated next to each
other, an influence due to a hardly different
oscillator frequency (beat frequency) is possible. This can be avoided by synchronisation.
The eddyNCDT 3100-SM is equipped with two
additional connectors for the oscillator output
(„SYNC OUT“) and for the input („SYNC IN).
The electronics is working independently until
a connection is built. By means of the connections with the synchronisation cable SC31000,3, the electronics switch automatically to
synchronisation mode. In this way, two up to
ten systems can be synchronised with each
other.
Controller
DT3100
in sync out
Controller
DT3100
in sync out
Controller
DT3100
in sync out
SC3100-03 - synchronisation cable (accessory)
All settings are made in the intuitive web interface, eliminating the need for any special
software.
15
Controller
DT3100
Linearity
<± 0.25 % FSO
0.005 % FSO
Resolution 1)
voltage output: 25kHz (-3dB)
Bandwidth
digital (Ethernet): 14.4kHz; 7.2kHz; 3.6kHz (each 16 bit)
Temperature compensation range
standard: 10 ... 65 °C
Temperature range
controller
Temperature stability
operation: 10 ... 50 °C
controller (MMR)
0.05 % FSO / °C
Outputs
0 ... 10 V / - 5 ... + 5 V / 4 ... 20 mA / Ethernet
Power supply
24 VDC (11 ... 30V) / ca. 5W
Synchronisation
only DT3100-SM
Protection class
controller
via cable SC 3100-0,3 (accessories)
IP65 (connected plug-in connections/covers)
FSO = of full scale output
MMR = midrange
1)
Static resolution, relates to centre of measuring range; effective value (RMS)
Controller housing DT3100 / DT3100-SM
82
SENSOR
SUPPLY / OUTPUT
SYNC IN
ETHERNET
SYNC OUT
118
52
128
47,5
Sensors
eddyNCDT 3100
M5x0.5
M6x0.5
ø 4.3
M12x1
4
9
14
25
13
WS4
WS 10
30
21
15
M3x0.35
WS 19
15.5
4
ø2.35
5
Measurement direction
22
WS 4.5
26.7
Sensor type
Design
Measuring range
Offset distance
Linearity
Resolution
EPU05
EPS08
EPU1
EPS2
unshielded
shielded
unshielded
shielded
0.5mm
0.8mm
1mm
2mm
0.05mm
0.08mm
0.1mm
0.2mm
≤±1.25µm
≤±2µm
≤±2.5µm
≤±5µm
0.025µm
0.04µm
0.05µm
0.1µm
≤±0.25µm/°C
≤±0.4 µm/°C
≤±0.5µm/°C
≤±1µm/°C
100°C
100°C
100°C
100°C
Protection class (front and rear)
IP67
IP67
IP67
IP67
Integrated cable/ length
3m
3m
3m/9m
3m/9m
Temperature stability (MMR)
Temperature max.
Temperature sensor cable
Housing material
100°C
100°C
100°C
100°C
stainless steel and ceramic
stainless steel and plastic
stainless steel and plastic
stainless steel and plastic
Sensor
Controller
Ø3
Sensor cable EPCx
ø11.9
MMR = midrange
approx. 54
16
20
60
approx. 78
40
EPC3: 3m ±15%
EPC6: 6m ±15%
Controller
ø 12.5
Sensor
Ø3
Sensor cable EPCx/90
16
20
60
approx. 62
40
EPC3/90: 3m ±15%
EPC6/90: 6m ±15%
16
Controller
triax connector
Ø3
34
25,5
ø11.9
Sensor cable EPCx/triax
Sensor
ø5
16
approx. 54
17
Measurement direction
ø 9.925
ø 38
2
26
WS 27
M18x1
Sensor
Controller
Ø3
Sensor cable EPCx
ø11.9
WS 16
6
5
M12x1
WS 10
40.625
31.125
34
24.5
WS 19
12
6
ø14.25
approx. 54
16
60
EPU3
EPC3: 3m ±15%
EPC6: 6m ±15%
unshielded
Design
Measuring range
Offset distance
Resolution
Temperature stability (MMR)
EPU6
approx. 78
unshielded
3mm
Linearity
EPU15
unshielded
6mm
15mm
Controller
0.3mm
0.6mm
ø1.5mm
12.5
≤±7.5µm
≤±15µm
≤±37.5µm
0.15µm
0.3µm
0.75µm
≤±1.5µm/°C
≤±3µm/°C
≤±7.5µm/°C
100°C
100°C
100°C
Temperature
max.
Sensor cable
EPCx/90
IP67
Sensor
Protection class (front and rear)
Integrated cable/ length
3m/9m
Temperature sensor cable
20
Housing material
40
Ø3
Sensor type
20
IP67
IP67
3m/9m
3m/9m
100°C
16
100°C
stainless steel60and plastic
40 steel and plastic
stainless
MMR = midrange
100°C
approx. 62
epoxy
EPC3/90: 3m ±15%
EPC6/90: 6m ±15%
ø11.9
34
25,5
triax connector
Controller
Ø3
Sensor
ø5
Sensor cable EPCx/triax
approx. 54
16
60
40
approx. 78
EPC3/triax: 3m ±15%
EPC6/triax: 6m ±15%
Cable
Cable design
Sheath material
Temperature resistance
Outer diameter
Length tolerance
Bending radius
Suitable for use with robots
coaxial
TPE-U/ thermoplastic elastomers
-40°C to +90°C
2.90mm ±0.2mm
±15%
one-time bending during installation: 7.5 x cable diameter
minimum bending radius for movement: 15 x cable diameter
no
Plug
Controller side Model
Type
6-pole male connector
Locking methodpush-pull
Protection class
IP68 (when connected)
Temperature resistance
-40 to +120°C
Material housing
Copper, nickel-plated
Mechanical service life
> 500 mating cycles
Sensor side
EPCx / EPCx/90
EPCx/triax
female connector, coaxial, SMC
male connector, triaxial
screw
push-pull
no details
IP67 (when connected)
-65 to +165°C
-30 to +150°C
Brass, gold plated
Brass nickel-plated, mat
> 500 mating cycles
> 500 mating cycles
High precision eddy current displacement measurement
eddyNCDT 3300
- Micrometer accuracy
- Ideal for fast measurements:
Bandwidth up to 100kHz (-3dB)
-N
umerous sensor models even for
customer-specific applications
-R
obust sensor construction for
harsh environments
- S ynchronised multi-channel
measurement
The eddyNCDT 3300 eddy current measuring system is one of the most flexible and highest performing eddy current displacement measurement systems worldwide. Due to a mature technical
design, the system offers numerous benefits to customers in multiple application areas such as
manufacturing automation, machine monitoring and quality control.
Multifunctional controller
The eddyNCDT 3300 system includes high-performance processors for reliable signal conditioning and further processing. The innovative three-point linearisation technique it uses enables
almost completely automatic linearisation which makes possible the optimum accuracies for
every metallic measuring object and every installation environment. Operation is supported by
an illuminated LC graphical display and on-screen prompts.
signal
18
Linearisation and calibration
Systems in the eddyNCDT 3300 series can be
individually linearised and calibrated by the
user. Therefore, optimum measurement accuracies will always be achieved, even in the
case of failed measuring object materials or
harsh ambient conditions. The adjustment is
made using three distance points (,,)
which are defined by a reference standard.
Maximum precision due to field calibration
In order to achieve maximum precision, eddyNCDT 3300 provides the field calibration
function for achieving extremely precise measurement results. The following influences are
taken into account:
A: Different target materials
B: Different target sizes (measuring spot)
C: Target shape
D: Side preattenuation
E: Target tilt angle
The measuring range can also be extended
using the field calibration.
1/1
3
1/2
2
1
sensor
measuring
range
1/2
1/1
target
3-point linearisation
signal
A
Synchronisation for
multi-channel applications
The MCT304 multi-channel platform is available for thickness and displacement measurements with up to four channels. Up to four
controllers can be integrated in a single MCT
platform. The platforms can be synchronised
with each other, whereby the simultaneous
operation of any number of eddyNCDT sensors is possible. In order to compensate for
opposing sensor influences, there are synchronisation inputs and outputs.
signal
AC
B
ED
C
B
linearity
±0.2 % FSO
E
D
measuring
range
Conventional sensor without field calibration
Massive linearity deviation results from the
different influences
measuring
range
Best practice:
eddyNCDT 3300 with Micro-Epsilon field calibration
High accuracy though compensation of the influences
19
Controller
DT3300
DT3301
Linearity
≤±0.2 % FSO
up to 25Hz
Resolution 2)
≤0.005 % FSO (≤0.01 % FSO using ES04, ES05 and EU05)
up to 2.5kHz
≤0.01 % FSO
up to 25 / 100kHz
≤0.2 % FSO
Bandwidth
selectable 25kHz / 2.5kHz / 25Hz (-3 dB); 100kHz for measuring ranges ≤1mm
Temperature compensation
Temperature range
10 ... 100°C (option TCS: -40 ... 180°C) 3)
controller
5 ... 50°C
Outputs
Multifunction controller
Power supply
LED green
Synchronisation
ready
selectable 0 ... 5V / 0 ... 10V / ±2.5V / ±5V / ±10V (or inverted) / 4 ... 20mA (load 350 ohm)
11 - 32VDC / 700mA
±12VDC / 100mA, 5.2VDC / 220mA 1)
LED yellow
limit Switch A
LED red
limit switch B
via cable PSC 30 (accessories)
Electromagnetic compatibility
via cable E SC 30 (accessories)
acc. to EN 50081-2 / EN 61000-6-2
Controller functions
limit switches, auto-zero, peak-to-peak, minimum, maximum, average,
storage of 3 configurations (calibrations)
ESC
FSO = Full Scale Output
Reference material: Aluminum (non-ferromagnetic) and Mild Steel DIN 1.0037 (ferromagnetic)
Reference temperature for reported data is 20°C (70°F); Resolution and temperature stability refer to midrange
Data may differ with magnetic inhomogeneous material.
1)
additional 24VDC for external reset and limit switch
2)
resolution data are based on noise peak-to-peak values
3)
datadifferselectable
status / stability may
limits
temperature
with option TCS
information
(mm / inch)
min-max-data
Controller dimensions
10
191
155
ANALOG - I/O
±12V/5.2V
SYNCHR
IN
mounting holes ø4.6
Output analog (U+I)
Input power / sync.
97
110
SENSOR
IN/OUT/24V IN
SYNCHR
OUT
appr. 204
Quadruple limit switch
ƒƒTwo freely definable minimum and
maximum limit values
ƒƒIndividual switching threshold
ƒƒLED display for upper and lower limit
warnings
Automatic calibration
ƒƒThree-point linearisation for optimum
onsite calibration
Four configurations can be stored
ƒƒFactory calibration and three individual
configurations can be stored
ƒƒSimple microprocessor-controlled
singlecycle calibration
Sensor
Output power / sync.
Switches input/output
24 VDC In
45
Types of output
ƒƒVoltage / current
ƒƒMetric / inch and graphical display
ƒƒDisplay of auto-zero, peak-to-peak value,
minimum, maximum
ƒƒScalable display for conversion to indirect
measured values
Sensors
eddyNCDT 3300
Measurement direction
ø2
M4x0.35
M5x0.5
M3x0,35
13
0.3x45°
M3
21
13±0.1
3
4 5°
21
13.75
4
Connector side
WS4
8
WS 3.2
ø2
ø2.5
ø2
ø2
Cable length 0.25 m ±0.04 m
1:1
Design
Offset distance
EU05
ES08
unshielded
shielded
0.4mm
0.4mm
0.8mm
0.04mm
0.05mm
0.08mm
≤±0.8µm
≤±1µm
≤±1.6µm
0.02µm
0.025µm
0.04µm
≤±0.06µm/°C
≤±0.075µm/°C
≤±0.12µm/°C
150°C
150°C
150°C
Temperature max.
Pressure resistance sensor front
Integrated cable/ length
100bar
-
20bar
approx. 0.25m
approx. 0.25m
approx. 0.25m
Temperature sensor cable
Housing material
180°C
180°C
180°C
stainless steel
stainless steel and ceramic
stainless steel and plastic
MMR = midrange
ECx sensor cable, length is selectable up to x≤15m
55
36
ø13
ø14
Controller
ø13
ø14
Controller
Controller
ø4.5
ø4
ø13
ø14
26
40
26
ø13
Sensor
ø9
36
Triax connector
WS10
60
WS12
ECx/1 extension cable for solder connection, length is selectable up to x≤15 m
55
ø4.5
ø4
ø13
Sensor
36
26
40
open ends for transition board
WS10
60
WS12
ECx/2 extension cable for plug connection, length is selectable up to x≤15 m
55
34
25.5
36
3
ø4.5
ø13
ø4
40
Triax connector
WS10
60
WS12
ECEx sensor cable extension, length is selectable up to x≤15 m
39
Cable length 0.25 m
ES04
Resolution
Temperature stability (MMR)
1:1
shielded
Measuring range
Linearity
1:1
Cable length 0.25 m ±0.04 m
Sensor type
Sensor
ø5
20
55
36
21
Measurement direction
M5
M8*1
ø9.9
6
4
Connector side
M12x1
M12x1
ø4
25
31
6
WS10
ø3
ø3.8
WS10
ø3
1:1 Cable length 0.25 m ±0.04 m
Sensor type
Design
Measuring range
1:1
6
ø3.8
WS19 mm
8
11
3
WS19
16
M5
WS4
45°
28
WS7
28
18
M8
Cable length 0.25m ±0.04m
1:1
1:2
ES1
EU1
ES2
EU3
shielded
unshielded
shielded
unshielded
1mm
1mm
2mm
3mm
Offset distance
0.1mm
0.1mm
0.2mm
0.3mm
Linearity
≤±2µm
≤±2µm
≤±4µm
≤±6µm
Resolution
0.05µm
0.05µm
0.1µm
0.15µm
≤±0.15µm/°C
≤±0.15µm/°C
≤±0.3µm/°C
≤±0.45µm/°C
150°C
150°C
150°C
150°C
-
-
20 bar
20 bar
approx. 0.25m
approx. 0.25m
-
-
180 °C
180 °C
-
-
stainless steel and plastic
stainless steel and plastic
stainless steel and plastic
stainless steel and plastic
Temperature stability (MMR)
Temperature max.
Pressure resistance sensor front
Integrated cable/ length
Temperature sensor cable
Housing material
MMR = midrange
Cable
Cable design
Sheath material
Temperature resistance
Outer diameter
Bending radius
Suitable for use with robots
coaxial with sheath wire
FEP/Flour-Thermoplast
-30°C to +200°C
3.9mm ±0.1mm
one-time bending during installation: 2 x cable diameter
minimum bending radius for movement: 5 x cable diameter
optimum bending radius at continuous movement: 10 x cable diameter
no
Plug
Controller side
Model
Type
5-pole female connector, cable socket
Locking method
screw
Protection class
IP67
Temperature resistance
-30 to +85°C
Material housing
Brass nickel-plated
Mechanical service life
> 500 mating cycles
Sensor side
ECx ECx/1 ECx/2
male connector, triaxial
male connector 5-pol
male connector, triaxial
push-pull
IP67 (when connected)
-30 to +150°C
Brass nickel-plated, mat
> 500 mating cycles
screw
IP67 (when connected)
-40 to +85°C
Brass nickel-plated
> 500 mating cycles
push-pull
IP68
-65 to +135°C
Brass nickel-plated, mat
> 500 mating cycles
Sensors
22
eddyNCDT 3300
Measurement direction
M18x1
M18x1
M24x1.5
ø14.9
ø20.9
6
WS16
6
WS36
WS27
25
WS27
25
31
6
8.8
Connector side
6
WS19
ECx sensor cable, length is selectable up to x≤15m WS16
36
1:2
26
ø13
ø14
ø4
Triax connector
WS10
60 ES4
Design
WS12
EU6
shielded
Measuring range
4mm
ECx/1 extension cable for solder connection, length is selectable up to x≤15 m
Offset distance
0.4mm
55
≤±8µm
Temperature max.
Pressure resistance sensor front
Integrated cable/ length
8mm
150°C
≤±16µm
150°C
20bar
20bar
20bar
-
-
-
WS10
stainless steel and plastic
55
-
stainless steel and plastic
stainless steel and plastic
36
ø13
ø13
ø14
ø4
ø4.5
25.5
-
3
40
Triax connector
WS10
60
WS12
ECEx sensor cable extension, length is selectable up to x≤15 m
39
55
36
26
Controller
Controller
WS10
60
ø13
ø14
WS10
ø13
ø14
ø13
ø4
40
ø14
Sensor
26
WS12
WS12
ECx/90 sensor cable with 90°connector (sensor-sided), length is selectable up to x≤15 m
26
55
ø 13
10
ø4.5
ø4
ø13
35
60
Sensor
36
26
40
ø9
0.4µm
≤±1.2µm/°C
150°C
WS12
MMR = midrange
34
Sensor
ø5
0.8mm
≤±0.9µm/°C
Temperature
sensor cable
ECx/2 extension
cable for plug connection, length is selectable
up to x≤15 m
Housing material
0.6mm
ø13
ø14
≤±0.6µm/°C
60
6mm
≤±12µm
26
0.3µm
40
ø13
Sensor
Temperature stability (MMR)
0.2µm
unshielded
36
ø4.5
open ends for transition board
Resolution
ø4
Linearity
EU8
unshielded
Controller
Sensor type
Controller
1:2
ø4.5
40
1:1
Controller
55
26
ø13
Sensor
ø9
36
WS10
WS12
23
11
ø40
7.5
12
12.27
19.75
3*ø
38.5
.2
3*ø4
1:3
1:8
1:3
Design
EU15
EU22
EU40
EU80
unshielded
unshielded
unshielded
unshielded
80mm
Measuring range
15mm
22mm
40mm
Offset distance
1.5mm
2.2mm
4mm
8mm
≤±30µm
≤±44µm
≤±80µm
≤±160µm
Linearity
Resolution
Temperature stability (MMR)
Temperature max.
0.75µm
1.1µm
2µm
4µm
≤±2.25µm/°C
≤±3.3µm/°C
≤±6µm/°C
≤±12µm/°C
150°C
150°C
150°C
150°C
Pressure resistance sensor front
-
-
-
-
Integrated cable/ length
-
-
-
-
Temperature sensor cable
-
-
-
-
epoxy
epoxy
epoxy
epoxy
Housing material
MMR = midrange
Cable
Cable design
coaxial with sheath wire
Sheath material
FEP/Flour-Thermoplast
Temperature resistance
-30°C to +200°C Outer diameter
3.9mm ± 0.1mm
Bending radius
one-time bending during installation: 2 x cable diameter
minimum bending radius for movement: 5 x cable diameter
optimum bending radius at continuous movement: 10 x cable diameter
Suitable for use with robots
no
Plug
Controller side Sensor side
Model
ECEx
ECx/90
Type
5-pole female connector, cable socket 5-pole male connector
male connector, triaxial, angle
Locking method
screw
screw
push-pull
Protection class
IP67
IP67 (when connected)
IP67 (when connected)
Temperature resistance
-30 to +85°C
-30 to +85°C
-65 to +135°C
Material housing
Brass nickel-plated
Brass nickel-plated
Brass nickel-plated, mat
Mechanical service life
> 500 mating cycles
> 500 mating cycles
> 500 mating cycles
20°
1:2
3*1
0°
0°
12
12
3*
3*ø5
.5
45
3*
0°
12
3*
3*ø4.2
27.3
30
22
6.5
12
Sensor type
ø140.3
11
ø70.3
ø10
ø14
12.5
ø52
ø10
ø14
10
ø10
ø37
ø14
Connector side
11
ø14
ø10
11
ø18.5
Measurement direction
Miniature sensor designs
eddyNCDT 3300
Subminiature sensors for confined installation space
In addition to standard sensors in conventional designs, miniature sensors can also be supplied which achieve high precision measurement
results with the smallest possible dimensions. Pressure-resistant versions, screened housings, ceramic types and other special features characterise these sensors, which achieve highly accurate measurement
results despite the small dimensions. The miniature sensors are employed in high pressure applications, e.g. in combustion engines.
ø0.5
cable length 1m ±0.15m
2:1
10
M4x0.35
30
WS3.2
ES04/180(25) Shielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial cable
1m (ø 0.5mm), short silicon tube
at cable exit
Pressure resistance (static):
front 100bar
Max. operating temperature: 180°C
Housing material: stainless steel
Sensor cable: ECx/1 or ECx/2,
length ≤6m
ø3.7
5
2.5
8
M4x0.35
WS
4 5°
7.6
3
31
WS3.2
ø2.5
M4x0.35
8
23.4
M4
ES04(34) Shielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 2mm) with sealed
triaxial connector
Pressure resistance (static):
front 100bar / rear side splash water
Max. operating temperature: 150°C
Housing material:
stainless steel and ceramic
Sensor cable: ECx, length ≤6m
cable length 0.25 m
15
M4x0.35
ES04/180(27) Shielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with solder
connection board
Pressure resistance (static):
front 100bar
Max. operating temperature: 180°C
Housing material: stainless steel
Sensor cable: ECx/1, length ≤6m
3.2
1:1
ø2.5
ø1.5
ES04(35) Shielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 1.5mm) with
sealed triaxial connector
Pressure resistance (static):
front 100bar / rear side 5 bar
Max. operating temperature: 150°C
Housing material:
stainless steel and ceramic
Sensor cable: ECx/1, length ≤6m
ø2
M5x0.35
ø1.2
6.1
55
°±
1°
ø3.45
ø2.4
1
1
ES04(44) Shielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.2m (ø 1.2mm) with
sealed triaxial connector
Pressure resistance (static):
front 100bar / rear side splash water
Max. operating temperature: 150°C
Housing material:
stainless steel and ceramic
Sensor cable: ECx, length ≤6m
7.62
70°
9.7
1.64
ø4.6
cable length 0.25 m
2:1
cable length 0.25m ±0.04m
6.775
1:1
1.5
24
ø0.5
1
M4x0.35
2:1
cable length 0.2m
3:1
cable length 0.25m
ES04(70) Shielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Pressure resistance (static):
front 100bar / rear side splash water
Max. operating temperature: 150°C
Housing material:
stainless steel and ceramic
Sensor cable: ECx/1, length ≤6m
25
3
2.5
4
2
ø0.5
4.4±0.05
1.9±0.05
EU05(10) Unshielded Sensor
Measuring range 0.5mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Max. operating temperature: 150°C
Housing material:
stainless steel and ceramic
Sensor cable: ECx/1, length ≤6m
0.65
ø0.5
cable length 0.25m
ES05/180(16) Shielded Sensor
Measuring range 0.5mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Max. operating temperature: 180°C
Housing material:
stainless steel and epoxy
Sensor cable: ECx/1, length ≤6m
cable length 0.25m ±0.04m
3:1
1.95
15
ø0.5
4.5h6
ø0.5
cable length 0.25 m
3:1
R0
.1
ø2.3 - 0.05
ø0.5
ø2.95 - 0.05
3.07 + 0.05
5.15 - 0.05
O-Ring
2x0.5
cable length 0.25m
0
ø2.27±0.01
2.8 - 0.1
2.8 - 0.1
EU05(66) Unshielded Sensor
Measuring range 0.5mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Pressure resistance (static):
front 400bar / rear side splash water
Max. operating temperature: 150°C
Housing material: ceramic
Sensor cable: ECx/1, length ≤6m
3:1
2:1
cable length 0.25m
2:1
cable length 0.25m
.1
ø2.95 - 0.05
EU05(65) Unshielded Sensor
Measuring range 0.5mm
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Pressure resistance (static):
front 700bar / rear side splash water
Max. operating temperature: 150°C
Housing material: ceramic
Sensor cable: ECx/1, length ≤6m
ø0.5
3:1
ø0.5
R0
O-Ring
2x0.5
silicone tube
ø0.7mm
ø2.27±0.01
ø2.3 - 0.05
2.92 + 0.05
ES05(36) Shielded Sensor
Measuring range 0.5mm
Connection: integrated coaxial
cable 0.5m (ø 0.5mm) with
solder connection board
Max. operating temperature: 150°C
Housing material:
stainless steel and epoxy
Sensor cable: ECx/1, length ≤6m
5+0.05
cable length
0.5m
ø1.1
6±0.1
0.5x45°
3:1
EU05(93) Unshielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Pressure resistance (static):
front 2000bar / rear side splash water
Max. operating temperature: 150°C
Housing material: ceramic
Sensor cable: ECx/1, length ≤6m
EU05(72) Unshielded Sensor
Measuring range 0.4mm
Temperature stability ≤±0.025%FSO/°C
Connection: integrated coaxial
cable 0.25m (ø 0.5mm) with
solder connection board
Pressure resistance (static):
front 2000bar / rear side splash water
Max. operating temperature: 150°C
Housing material: ceramic
Sensor cable: ECx/1, length ≤6m
26
Turbocharger speed measurement
turboSPEED DZ140
-M
aximum speed range from 200
to 400,000 RPM
- Miniature sensor design from ø3mm
- Measurement on aluminium and titanium
- Distance to target up to 2.2mm
- No modification of the compressor wheel
-F
or test cell and on-vehicle
measurements
- Highest EMV immunity and stability
- Operating temperature up to 285°C
Measuring principle
A coil is integrated in a sensor housing and energised by a highfrequency alternating current. The electromagnetic field from the coil
generates eddy currents in the turbocharger blade, while every blade
generates a pulse. The controller identifies the speed (analogue 0–5V)
by considering the number of blades.
Robust miniature controller
As the entire electronics is in a sealed miniature housing and designed
for ambient temperatures up to 115°C, the controller is easy to integrate
into the engine compartment. turboSPEED DZ140 offers excellent EMV
immunity in test cells and road tests.
Reliable speed and temperature measurement
The DZ140 eddy current measuring system is resistant to oil and dirt,
which is a key advantage compared to optical speed measuring systems, as this helps to achieve high precision measurements on a continuous basis. The integrated temperature measurement feature records
as well the actual ambient temperature near to the sensor.
Extremely compact design
Ease of use
A tri-colour ‘status’ LED on the controller indicates when the sensor has
reached the ideal distance from the turbocharger blades. This simple
feature enables greatly reduced installation time. As the sensor is connected with the electronics via a special BNC connector, it is therefore
downward compatible with all previous sensor models. An industrial
push-pull connector guarantees a reliable connection between the
electronics and the power supply as well as the analogue outputs.
Measurement of aluminium and titanium blades
The DZ140 measures both aluminium and titanium blades. The sensors
can be mounted at a relatively large distance from the blade. The maximum distance of 2.2mm enables reliable operation.
axial installation
radial installation
Large measuring distances both at aluminium and titanium
27
Model
DZ140 (Controller)
Sensors
DS 05(03)
DS 05(04)
DS 05(07)
DS 05(14)
DS 05(15)
Measuring principle
eddy current principle
Target (blade material)
aluminium or titanium
Maximum speed range (measuring range)
DS 1/T
-20 ... +115°C
sensor
Distance sensor
to blade
(wall thickness 0.35mm)
DS 1(04)
200 ... 400,000RPM
controller
Operating
temperature
DS 1
-40 ... +235°C (short-term +285°C)
aluminium
radial 0.6mm / axial 1.1mm
radial 1.3mm / axial 1.6mm
titan
radial 0.6mm / axial 1.0mm
radial 1.2mm / axial 1.6mm
adjustment with three-state LED
0.5m
±0.15m
Integral sensor cable
Number of blades
0.75m
±0.15m
0.8m
±0.15m
rotary switch (accessible from the outside) for 1 up to 16 blades
1 pulse / blade (TTL-level, variable pulse duration)
or 1 pulse / revolution (TTL-level, pulse duration 100μs)
Output (digital)
0 ... 5V (200 ... 200,000RPM)
0 ... 5V (200 ... 400,000RPM)
adjustable, from the outside accessible via mode rotary switch
Output (analogue)
linearity
±0.2% FSO
resolution
0.1% FSO
test pulse generation to control the measurement chain; load resistance >5kOhm, load capacitance max. 1nF
Output sensor temperature
0 ... 5V (-50 ... +300°C)
RAW output (via BNC connector)
for easy sensor mounting via oscilloscope
Power supply
9V ... 30VDC / max. 50mA (short-term up to 36VDC)
PC140-3 supply and output cable 3m
Cable
PC140-6 supply and output cable 6m
Weight
controller DZ140: appr. 85g
Protection class
controller DZ140: IP 65
FSO = Full Scale Output
Controller DZ140
41.3
18
19,5
83.8
33.3
678
13 14 15
123
16
45
0 11 12
91
0 1
2 3
7 8 9
62
4 6
Sensors
turboSPEED DZ140
M5
ø3
ø3
M5
58+1
67.8
Sensor
67.8
46
approx. 10
Sensor
28
1
ø3
35
WS4
Sensor cable
ø approx. 3.5 mm
Length 0.5 m (±0.15 m)
with BNC connector
WS4
Sensor cable
ø approx. 3.5mm
Length 0.5m (±0.15m)
with BNC connector
Sensor type
Measuring range
ø3
WS4
approx. 10
0
.1
ox
pr
ap
Sensor cable ø approx. 3.5mm
Length 0.5 m (±0.15m)
with BNC connector
12
18
45°±3°
WS4
approx. 10
28
Sensor cable
ø approx. 3.5 mm
Length 0.5 m (±0.15 m)
with BNC connector
DS 05(03)
DS 05(04)
DS 05(07)
DS 05(14)
0.5mm
0.5mm
0.5mm
0.5mm
Thread length
-
-
45mm
28mm
Thread
-
-
M5 x 0.8
M5 x 0.8
0.5m
0.5m
0.5m
0.5m
curved housing
-
-
length of housing 42.5 mm
Integrated cable/ length
Special feature
Mounting adapter MA135
WS8
9
15
M6x1
For sensors DS05(03)
and DS05(04)included.
29
M5x0.5
M5
M5x0.5
M5x0.5
WS4
Sensor cable
ø approx. 3.5mm
Length 0.5m (±0.15m)
with BNC connector
WS4
Sensor cable
ø approx. 3.5mm
Length 0.75m (±0.15m)
with BNC connector
approx. 10
approx. 10
approx. 10
42
45
40
40
Measurement direction
WS6
Sensor cable
ø approx. 6.0
Stainless steel IP 40
Length 0.8m (±0.15m)
with BNC connector
Sensor cable
ø approx. 4.5mm
Length 0.8m (±0.15m)
with triax BNC connector
ø approx. 19
Sensor type
DS 05(15)
DS 1
DS 1(04)
DS 1/T
Measuring range
0.5 mm
1mm
1 mm
1mm
Thread length
45mm
40mm
40mm
40mm
M5 x 0.8
M5 x 0.5
M5 x 0.5
M5 x 0.5
0.5m
0.75m
0.8m
0.8m
-
-
stainless steel protection hose
-
Thread
Integrated cable/ length
Special feature
30
Spindle Growth System
eddyNCDT SGS4701
- Miniature sensor design
-S
ensor technology can be integrated
completely into the sensor
-M
iniature, compact controller – can be
integrated in the spindle or installed
on the housing via a flange
-S
uitable for ferro- and
non-ferromagnetic materials
- Temperature measurement
integrated in the sensor
- Cost-effective design
Measuring thermal expansion in spindles
The displacement measurement system SGS 4701 (Spindle Growth
System) has been developed specifically for high speed milling machine applications. Due to high machining speeds and the heat generated, the linear thermal expansion of the precision machine tool spindle
needs to be compensated for in order to keep the tool in a defined
position at all times. The SGS sensor measures the thermal and centrifugal force expansion of the spindle. These measurement values are
fed into the CNC machine tool as correction values, compensating for
any positioning errors.
The sensor cable must not be shortened as functionality loss may arise.
Removing the connector is only permitted behind the plug-sided crimp
when using the solder connections.
M
S
S = Signal = inner conductor
M = ground = shield = outer conductor
8-pin. M12 connector
The SGS 4701 operates on the eddy current measuring principle. This
non-contact measurement is wear-free. Furthermore, the measurement
procedure is resistant to disturbances such as heat, dust and oil.
5
8
7
System structure
The SGS 4701 consists of a sensor, a sensor cable and a controller,
factory calibrated for ferromagnetic and non-ferromagnetic measurement objects. Two miniature sensors enable it to be installed directly
in the spindle, where the measurements take place, typically on the
labyrinth-ring of the spindle. As well as measuring linear thermal expansion, the temperature of the sensor is also detected and output. The
compact controller can be installed on the spindle housing via a flange
or directly in the spindle.
4
6
1
3
2
Pin assignment (view on controller)
Pin
Signal
1
Ground
2
+24V
3
Displacement signal
4
Temperature signal
5
not connected
6
do not connect
7
do not connect
8
not connected
31
Sensor system
SGS4701
Measuring range
500µm (option 250µm 2))
Offset
100µm (option 50µm 2))
Linearity
±2µm
Resolution 1)
0.5µm
Bandwidth
2000Hz
Target
ferromagnetic / non-ferromagnetic
6 mm (option 3.5 mm 2))
Minimum target diameter
sensor
Operating temperature
0 ... +90°C
controller
Temperature stability
Temperature compensation range
10 ... +70°C
sensor
±150ppm FSO/°C (MMR)
controller
±500ppm FSO/°C (MMR)
sensor
+10 ... +80°C
controller
+10 ... +70°C
Supply voltage
12 ... 32VDC
displacement
Analog out
0.5 - 9.5V � 100 - 600µm (option 50 - 300µm 2))
temperature
Protection class
0.5 - 9.5V (� 0 ... +90°C)
sensor / controller
Dimensions
IP67 3)
EMU04(102)
12x10x4.5mm 4)
EMU04(121)
10x4x4mm 4)
diameter
Ø 1.13mm
length
Sensor cable 3)
1000mm (400 - 1500mm on request)
min. bending radius
12mm
jacket
FEP
FSO = Full Scale Output; MMR = Midrange
1)
static, MMR
2)
For OEM modifications: sensor with measuring range 250µm and offset 50µm
3)
In mated condition
4)
Detailled cable specifications can be found in the operating manual
EMU04(102)
Controller
Cable diameter
ø1.13
6
2.5
ø12
-0.005
10 -0.027
20
15
4.5 ±0.05
ø2
94.2 ±0.1
1.75
9
102.2 ±0.5
0.3x45°
4 -0.03
1.5±0.05
4 -0.03
0.4
7
12
1.5±0.05
10 -0.2
Sensor coil
11.4
M2.5
Sealing
ø12 -0.1
17
6
5.3 ±0.3
removable sleeve for
sensor cable connection
appr. 8
1.44 ±0.2
Connector (max. 20 mating cycles possible)
3 ±0.2
Mounting flange (optional)
ws 8
M12x1
12.8
2.8
EMU04(121)
15
20
.7
32
Application examples
eddyNCDT
Eddy current sensors from Micro-Epsilon have many possible areas
of application. High measurement accuracy and bandwidth together
with an extremely robust design enable measurements where conventional sensors are not applicable.
Eddy current sensors from Micro-Epsilon represent high-performance
measurement, particularly under extreme operating conditions. Environmental influences such as oil, temperature, pressure and moisture
are largely compensated for and have a minimal effect on the signal.
For this reason, the sensors are ideal in challenging application areas,
such as industrial mechanical engineering and automotive inspection
systems.
Measuring the axial shaft oscillation
Position measurement for machine monitoring
Measuring the thermal expansion
Monitoring the lubricating gap in the combustion engine
Measurement of oil film thickness
Run-out monitoring of rollers
Measuring the radial shaft expansion
33
Accessories
eddyNCDT
3001
eddyNCDT
3005
eddyNCDT
3010
eddyNCDT
3100
eddyNCDT
3300
Articel
Description
PC3/8
Power- and output cable, 3m, 8 pin
PC5/5
Power- and signal cable
SC30
Synchronisation cable, 30cm
•
CSP 301
Digital signal processing and display unit up to 2 channels
•
PC3100-3/6/BNC
Outputcable and supply unit, 3m
•
PS2020
Power Supply 24V / 2.5A; Input 100-240 VAC; Output 24 VDC / 2.5A; DIN
rail mounting; 35mm x 7.5mm, DIN 50022
•
•
MC2.5
Micrometer calibration fixture, range 0 to 2.5 mm, division 1 μm, for
sensors EPU05 to EPS2, adjustable offset (zero)
•
•
•
MC25D
Micrometer calibration fixture, range 0 to 25mm, division 1 μm, for sensors
EPU05 to EPU15, adjustable offset (zero)
•
•
•
ECx
Sensor cable, length selectable up to 15m
•
ECx/90
Sensor cable with 90° connector (sensor-sided)
length selectable up to 15m
•
ECx/1
Extension cable for solder connection
•
ECx/2
Extension cable for plug connection
•
SCA3/5
Signal cable analogue, 3m
•
SCA3/5/BNC
Signal cable analogue with BNC connector, 3m
•
SCD3/8
Signal cable digital (switch input/outout), 3m
(also for supply 11 - 32VDC); for DT3301
•
SIC3(07)
Signal cable with BNC connector
for direct operation with oscilloscope
•
PSC30
Power / Synchronisation cable, 0.3m, for DT3300
•
ESC30
Synchronisation cable, 0.3m, for DT3301
•
PS300/12/5
Power supply Input 100 - 240VAC; Output ±12VDC / 5.2VDC integrated
cable 1.5m; for max. 4x DT3300
•
MBC300
Mounting base for controller DT330x,
fixing through M4 threaded holes 166x108x60mm
•
MCT304-SM
Tower for max. 4 controller DT 3300; supply 100 - 240VAC
•
MCT304(01)
Tower for max. 4 controller DT 3301; supply 11 - 32VDC
•
•
•
•
34
Technical information
eddyNCDT
Target size of eddy current sensors
Type ES:
Measuring spot =
1.5x sensor diameter
ES (shielded sensor)
Measuring spot = 1.5x sensor diameter
Type EU:
Measuring spot =
3x sensor diameter
EU (unshielded sensor)
Measuring spot = 3x sensor diameter
The relative size of the measuring object to the sensor affects the linearity deviation for eddy
current sensors. Ideally, the measuring object size for shielded sensors should be at least
1.5 times the diameter of the sensor and at least three times the diameter of the sensor for
unshielded ones. From this size, almost all lines of the magnetic field run from the sensor to
the target. Therefore, almost all magnetic field lines penetrate the target via the face and so
contribute to eddy current generation, where only a small linearity deviation occurs.
Factory calibration
As standard, the eddy current sensors are tuned to
ƒƒSt37 for ferromagnetic calibration.
ƒƒAluminium for non-ferromagnetic calibration
With other materials a factory calibration is recommended.
Choosing the right sensor
Eddy current sensors are grouped into shielded (e.g. ES05) and unshielded (e.g. EU05) sensors. With shielded sensors, the field lines run closer together due to a separate casing. These
are less sensitive to radial flanking metals. With unshielded sensors, the field lines emerge at
the side of the sensor normally causing an extended measuring range. Correct installation is
important for signal quality. The following information applies for mounting in ferromagnetic and
non-ferromagnetic materials.
Assembly references for shielded sensors (ES) in metal
Correct
Correct
Protruding mounting
Flush mounting
False
Surrounding material attenuates the sensor;
Measurement not possible.
Assembly references for unshielded sensors (EU) in metal
Correct
Correct
False
3 x sensor diameter
non-metallic material
e.g. epoxy
Sensor must be set up free-standing.
Minimum distance to the sensor: approx.
three times the diameter of the sensor
Protruding sensor mounting
(approx. half the sensor‘s length protruding)
Surrounding material attenuates sensor in the
standard version; Measurement not possible.
35
Tilt angle and measuring signal
The non-contacting displacement measuring system eddyNCDT is
often used because of its excellent linearity and high resolution. This
high resolution is achieved with right angle position, only. Sometimes
an exact right angle mounting of the sensor to the target is difficult or
αα
Angle
Angle
of of
inclination
inclination
impossible. In this case, the measured values deviate marginal from
values, measured in right angle position. Hence it is important to know
the influence to the measuring signal if the sensor is tilted. The following
graphs show the influence to themeasuring signal of a tilted sensor.
UU
+6°
+6°
0°0°
-6°-6°
Sensor
Sensor
ss
Distance
Distance
Example:
a sensor
with
3 mm
measuring
range,
means
a deviation
Example:
TiltTilt
a sensor
6°6°
with
3 mm
measuring
range,
means
a deviation
of of
5µm
5µm
at at
2/3measuring
2/3measuring
distance.
distance.
Target
Target
A permanent tilt angle can already be lodged at the controller with the
3-point linearisation. This avoids an influence of this tilt angle to the
signal.
Tilt angles, the controller not linearised for, cause deviations of the measured values in comparison to right angled measurements.
0.1
% Deviation
0.1
% Deviation
0
0
-0.2
-0.2
-0.4
-0.4
Angle
-6°
-4°
-2°
0°
2°
4°
6°
α
Tilt angle at 1/3 distance
The extent of deviation is different fromsensor to sensor. These diagrams were taken with a U6 sensor and aluminium target. The diagrams show, that an inclination of ±4 degrees can be accepted and
neglected in most applications.
A tilt angle of more than 6 degree is rather possible with unshielded
sensors than with shielded, but should be avoided. In principle, only a
special linearised sensor provides a precise signal.
Angle
-6°
-4°
-2°
0°
2°
Tilt angle at 2/3 distance
4°
6°
α
36
Technical information
eddyNCDT
Resolution of displacement measurement systems
Definition of terms
The resolution is a measure of the fineness with which a change of displacement is reliably detected by a measurement system and the clear
distinctive feature of two measurement values that are close to each
other. Such displacements can only be measured with high complexity,
because temperature effects, vibrations and other mechanical influences might disturb within measurement arrangement. Consequently, the
signal-to-noise ratio is used in determining the resolution of the respective measurement system. The signal-to-noise ratio describes the level
difference between the useful and interfering components of a signal.
Interfering component of a signal - thermal noise
The main constituents of the interfering component in a signal are the
sum of the thermal noise of the measurement system including sensor
cable, external interference effects and the residual ripple of the supply
voltage. The principal component is caused by noise in the electronics.
Due to the thermal movement of electrons in an electrical resistance, a
noise process is produced which is described by.
The noise power density:
=4kBT
kB= Boltzmann constant (1.3806504∙10-23 J/K)
T = absolute temperature
Measurement technology, effective noise voltage and RMS
For the random signals, electrical measurement technology makes use
of descriptive quantities which can be derived from the electrical measurement quantities of voltage or power. This is based on the assumption that the mean of the observed signals is zero, i.e. they have no constant component as they vary about the value „0“. Then the quadratic
mean is equal to the variance. If the root of the variance is then taken,
the dispersion is obtained which in turn describes the effective noise
voltage. The dispersion or effective noise voltage is measured with an
instrument which measures the effective value. Instruments from the
English-speaking regions also use the term RMS (Root Mean Square,
i.e. root of the squared mean) for the effective noise voltage.
The power developed across a resistance is termed as the noise power
Pn and is described by
the equation Pn=
Vn,rms
R
2
If the thermal noise on a resistance or system is measured with an
RMS instrument, it must be taken into account that the instruments are
restricted in their bandwidth (upper bandwidth - lower bandwidth).
Consequently, instead of acquiring the infinite variance, only an extract
of it is obtained. The RMS noise voltage can therefore be quoted as
follows:
Vn.rms=√4∙kB∙T∙R∙∆f
The noise voltage is then dependent on the absolute temperature and
the bandwidth considered.
Resolution and signal amplification
The theoretical infinite resolution is in practice limited by temperature
effects and the bandwidth. Amongst the temperature effects there is
also the response time of the electronics during which the measurement device reaches the operating temperature by self-heating. That
process is necessary in order to obtain reproducible measurement resultS. However, the noise voltage is inevitably increasing with the temperature.
As a rule, minor movements are associated with high speed. A corresponding high bandwidth is necessary in order to detect the high speed.
For measurement devices, a high frequency leads to increased noise
voltage and reduced resolution.
Systems with non-linear characteristics, such as for example the eddyNCDT are linearised through circuitry. The larger gain required here
for an increasing measurement distance also increases the noise voltage. Capacitive displacement measurement systems which exhibit an
inherently linear characteristic have better prerequisites with regard to
resolution.
Static or dynamic measurement
The resolution is given separately as static and dynamic values in the
technical data on displacement measurement systems. One speaks
of a static resolution when it can be assumed that the measurement
object or the sensor is at a standstill. In the technical data tables this
is occasionally quoted with the footnote f ≤ 1Hz or f ≤ 10Hz. The dynamic or effective resolution is related to the application and is always
subject to a footnote regarding the bandwidth. If there is no differentiation between statistic and dynamic, it is to be assumed that the statistic
value is given which appears to be the better one.
Micro-Epsilon‘s measurement methods for determining
the resolution.
The signal-to-noise ratio is determined using the following methods at
three different distances (SMR, CMR and EMR) in the enclosed EMC
cabin to avoid ambient effects, such as transmitter systems
1. RMS measurement
The bandwidth of the digital multimeter (DMM) is 150kHz. The output
voltage of the respective measurement system is amplified by a factor
of 100 with an AC amplifier. This voltage is passes through an RC lowpass filter, the output of which is connected to DMM. The filter frequencies of the RC low-pass filters of the 1st order are 16Hz, 150Hz, 1.4kHz,
14.92kHz and 148.7kHz. An AC measurement without amplifier and
low-pass filter is then made to determine possible residual carriers, etc.
2. Measurement of the noise peak value (Vpp) with the oscilloscope.
The measurements are carried out with a digital storage oscilloscope.
The measurement setup corresponds to the method for the RMS measurement. Then, also here an AC measurement without amplifier and
low-pass filter is carried directly on the output.
37
The assignment of LP filter frequency and time-base
on the oscilloscope:
16Hz/200ms150Hz/20ms
1.4kHz/2ms14.92kHz/200µs
148.7kHz/20µs
without LP/20µs
3. Measurement of the noise peak value (Vpp) with the oscilloscope
in the envelope-curve mode.
With this measurement, 128 measurement runs are recorded and displayed simultaneously. Isolated peaks and freak values also contribute
fully to the measurement. This measurement also enables low-frequency noise to be acquired which otherwise would not be detected.
4. Measurement using LF spectrum analyser.
This measurement is also carried out. The spectrum in the range of the
respective signal bandwidth is recorded here as well as the spectrum
with multiples of the respective carrier frequency. It is decisive for the
quality of the measurement that it occurs with adaptation of the power,
i.e. the output resistance of the controller is equal to the input resistance of the spectrum analyser.
Calculation of the resolution of the noise voltage
As briefly illustrated at the start, the resolution is given separately as
static and dynamic values in the technical data on displacement measurement systems. The resolution can be calculated from the noise
voltage using the following formula:
Resolutionrms [mm]=
Vn,rms[V]
VOutput, MR[V]
∙ MR[mm]
Vn,eff
= effective noise voltage
VOutput, MR = output voltage of the measuring range
MR
= measuring range of the sensor
RMS value or peak-peak value
With a standard deviation of 1 σ (sigma) the RMS value is obtained in
the Gaussian normal distribution. For signal components with a higher
amplitude the probability that they are present in the signal decreases.
For practical considerations a limit of ±3 σ is assumed. According to
this, the signal is located in this region with a confidence level of 99.7%.
In order that resolutions, RMS or peak-peak, can be compared against
one another, the following rule of thumb can be used:
Peak-peak value Vpp = 6 ∙ RMS value [±3 σ].
The figure for the noise voltage or resolution as the RMS or peak-peak
value depends on the objectives followed and has no influence on the
actual resolution of a displacement measurement system. RMS values
convey better values at first glance and are therefore the reason for
frequent use in the technical data.
Conclusion
The resolution of displacement measurement systems is measured
using two different methods. The background to both measurements
is the measurement of the noise voltage. The most common method is
the effective measurement which is usually quoted as RMS (Root Mean
Square) in technical documentation. Quoting the resolution as a peakpeak value is rare, because the values obtained appear subjectively
less favorable than for the RMS measurement.
Whether a manufacturer quotes the resolution as the RMS or peakpeak value depends on his objectives. It does not have any influence
on the actual resolution of a displacement measurement system. Micro-Epsilon normally uses the RMS value for figures in the data sheet
and identifies this with the note @RMS.
When considering technical data, it is decisive that RMS values and
peak-peak values are only compared like with like. For the conversion
the rule of thumb can be used the following formula:
Peak-peak value = 6 ∙ RMS value (at±3 σ).
38
Technical information
eddyNCDT
Required target thickness
The principle of eddy current displacement measurement requires a
minimum thickness for stable results. This minimum thickness depends
on the target material used and the sensor frequency. The sensor generates an alternating electromagnetic field which penetrates the target.
Eddy currents beeing formed in the target cause a secondary magnetic
field which attenuates the primary field.
Skin or penetration depth
Electromagnetic fields are attenuated on entering an electrically or
mag­netically conducting material. The reduction in the field strength
and therefore the current density is accompanied by losses which occur in the vicinity of the material surface. The characteristic length at
which the current density reduces to the value 1/e or to 37% is known
as the skin depth(see Fig. 2).
Surface
0
0.37
Skin depth
1
Normalised
current density
Target material
Skin depth in μm at
250kHz
1MHz
Aluminium
168
84
Lead
459
230
Gold
149
74
Graphite
2700
1350
Copper
134
67
Magnesium
209
104
Brass
249
124
Nickel
27
14
Permalloy
4
2
Phosphor Bronze
302
151
Silver
130
65
Steel DIN 1.1141
23
12
Steel DIN 1.4005
55
27
Steel DIN 1.4301
848
424
Tab. 1: Various skin depths
Depth
Fig. 2: Current density distribution in the target
Calculating the skin depth
The skin depth can be calculated with the following formula (it applies
to the ideal case of a plane boundary layer and an infinitely extended
object).
You can determine the permeability for some materials from Fig. 3. Or
you can read off the skin depth directly from Table1.
Calculating the minimum thickness
To calculate the minimum thickness of a material, take the appropriate
skin depth from Table 1 or read off the skin depth from Fig. 3. Then you
find the minimum thickness with the approximation value fromTable 2.
This calculation only applies when using a sensor with a frequency of
250kHz or 1MHz.
Measurement application
Object detection (without displacement
measurement)
Displacement measurement at approx.
constant (room)temperature
Displacement measurement with changing
temperature
Thickness measurement with two opposing
sensors
Minimum target thickness
"Skin depth" x 0.25
"Skin depth" x 1.00
"Skin depth" x 3.00
"Skin depth" x 6.00
Tab. 2: Approximation values for simple determination of the minimum thickness
39
µr=1
3000
µr=10
1000
µr=100
µr=1000
100
Tab. 3a: Skin depth at
250 kHz
µr=10.000
10
1
100
10
1
2000
0,1
µr=1
1000
µr=10
Tab. 3b: Skin depth at
1 MHz
µr=100
100
µr=1000
µr=1 0.000
10
1
100
10
1
0,1
Modifications reserved / Y9761509-B041057GKE
High performance sensors made by Micro-Epsilon
Sensors and systems for displacement
and position
Sensors and measurement devices for
non-contact temperature measurement
2D/3D profile sensors (laser scanner)
Optical micrometers, fibre
optic sensors and fibre optics
Colour recognition sensors, LED analyzers
and colour online spectrometer
Measurement and inspection systems
MICRO-EPSILON Headquarters
Koenigbacher Str. 15 ∙ 94496 Ortenburg / Germany
Tel. +49 (0) 8542 / 168-0 ∙ Fax +49 (0) 8542 / 168-90
info@micro-epsilon.com ∙ www.micro-epsilon.com
MICRO-EPSILON UK Ltd.
No.1 Shorelines Building · Shore Road · Birkenhead · CH41 1AU
Phone +44 (0) 151 355 6070 · Fax +44 (0) 151 355 6075
info@micro-epsilon.co.uk · www.micro-epsilon.co.uk
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertising