Gas Mixing System for Tube furnace Operation Manual MTI

Gas Mixing System for Tube furnace Operation Manual MTI
Gas Mixing System for Tube furnace
Operation Manual
MTI Corporation
860 S 19th Street, Richmond, CA 94804, USA
Tel: 510-525-3070
Fax: 510-525-4705
Web site:
1. This mixer is specified for mixing 3 gases or continuously supplies one gas under small gas
flowing rate and low pressure. The air can not get in whenever you switch the different
gases into use.
2. Gas flowing rate and pressure can be exactly displayed in one screen for an efficient control.
3. Easy installation and repair of the valve and meter because of dual-union-adapter between
Float flowing meter: 10~100ml/min, 16~160ml/min. 25~250ml/min. (optional)
Gas mixing tank: Φ80X120mm
Stop valve: 160P stainless steel needle valve, Φ1/4’’
Connection pipe: PTFE (Teflon)or stainless steel, Φ1/4’’
Vacuum gauge: (Φ60) -0.1~0.15Mpa, accuracy 0.01Mpa.
Working Voltage: 220V+/-10% 50~60Hz
Power: 1KW
System Final Vacuum: 4.3×10-3Pa
1. Assemble vacuum fittings and connect them with the quartz tube in furnace. (Detail process
please read the OTF-1200X-III Split Three-Zone Tube Furnace operational manual)
SS deflation valve
SS vacuum flange to quartz
tube. (Double Hi-temp
silicone O-ring)
Vacuum valve
(Vacuum pressure sensor)
Pipe orifice
2. When first open the door on Mixer. Such scene appears as the following picture shows.
Ionization gauge
Turbo molecular
Rotary Vane
Vacuum Pump
Outlet port
Exhaust gases during vacuuming
Ionization gauge
(Already installed)
Molecular pump release valve
Piranigauge socket
(Connect with Piranigauge manually)
2. Connect Mixer with furnace by vacuum pipe (KF D-40) and clamp tightly by quick clamp. (KF
You will see a pair of yellow lids. One is on the vacuum valve which connected with flange, and
the other is in Mixer as the following figure illustrates.
Right hand side of Mixer
3. Connect pirani gauge.
4. Finish installation.
1. Power on the machine (AC220V/50HZ, 1KW);
2. Turn on the valve TV5 clockwise and then open the power of mechanical pump (fore pump) to
3. When the pressure of the system reaches to 10 Pa, the powers of molecular pumps will startup
automatically with the “High Speed”, “Rotation Speed” indicating light on. Press down the
working button, “working” indicating light will be on which means the molecular pump starts to
work. As the speedup of the pump’s rotation, number displayed on LED possessing 4 digits
increases until at 704±10Hz, when the pump enters stable rotation state. During this process, the
customer can freely adjust the value of rotation speed, current and voltage by operating the button
on panel.
4. Turn off the valve TV5 after vacuuming to the ideal state (normally, 10x10-3 Pa after 2 hours);
Press down the working button again, the working indicating light will be off, and then, cut off
the power of molecular pump to cease it. In order to extend the durability of this molecular pump,
please turn on the valve TV6 used for inching adjustment of exhaust before the pump speed
decreases to the half of rated rotation speed to make the molecular pump get through the resonance
point. Meanwhile, this operation can farthest prevent the forepump oil from reverse diffusion.
When exhausting, please be advised to let the pressure in the molecular pump gradually increase to
40000 Pa, then to atmospheric pressure, also, shut down the mechanical pump.
5. Turn on valve TV4 to put the protect gas in, and out from TV7.
6. High polluting, corrosive and explosive gas is forbidden to use for this system.
Note: When operating the pump, please open the front panel so that the system can get good heat
Rotary Vane Vacuum Pump
This rotary vane vacuum pump features:
1. High ultimate vacuum degree
2. Low noise
3. No oil leaking or spurting
4. Convenient pressure control
1. Oil Check: Oil level should be in the domain of level mark when pump working.
2. Keep oil clean and proper amount: Normal oil should be fair and clear, please change the oil
regularly or whenever it is dark.
3. Shut down the pump and change the oil in a warm environment: Firstly, open the oil outlet to
release the polluted oil into a tank. Secondly, open the gas inlet, fill some clean oil in, and then run
the pump less than 10 seconds to expel the remnant. Finally, open the oil inlet to fill the clean oil in
and then tighten the cap (Specific pump oil like MR-200 or PV-200 is advised)
Turbo Molecular Pump
1. Cooling:
The bearing and motor of molecular pump should be cooled when it is working because of
frictional heat by bearing, dissipation of heater and lower natural cooling rate in vacuum. Air
cooling is for a general use when the ambient temperature is lower than 32°C and, water cooling is
preferable if the temperature is high and long time operating the machine (4 hours or more),
remember that the flowing rate of water (no more than 25 °C) should be higher than 1L/minute and
the inner diameter of the hose matching with the nozzle on the pump, is 10mm.
2. Lubricant
Change the lube every 3000 working hours of the pump (lube is enough for the first time use since
we had it full before shipping), which means the customer can change it every one year and a half
if for general use. However, please increase the change frequency if use the machine too often.
Follow the instruction below to change the lube:
a. Accordingly, loosen off two screws on the oil inlet (upper) and oil outlet (lower) which on the
upper bearing and then, the two on the lower.
b. Remove the pump from the whole system and horizontally place it on a flat to ensure the inlet
face up, and then, inject the lube into the two inlets and dispose the oil from another side, tighten
the four M5 screws when done.
Note: 1.When tightens the screws please well seal the black o-ring to avoid air leakage.
2. Do not use any substitute of the specific lubricant, otherwise, it may damage your pump.
3. Startup
When the system pressure reaches to 10 Pa, you can start this pump.
4. Speed up
Generally, the molecular pump should go to 700 Hz within 2 minutes, if it can not approach 400 Hz
within 3 minutes, the power will cut off the power.
5. Baking
To bake the pump and vacuum system to get an ultimate pressure, please plug the power cable to
the socket supplying single phase 220v.
Note: 1. Baking temperature for pump should be lower than 100 °C, for flange connecting to pump
lower 120 °C, for vacuum system lower than 300 °C.
2. To obtain vacuum with 10-3 Pa, no need to bake, if 10-4 Pa bake the system, and higher to
bake both system and pump.
6. Shut down:
Power off the pump and the pump gradually decelerate until stop, please release the pump no late
than the decelerating speed to the half of rate speed (make the pump quickly pass the resonate point
to prolong the pump’s life). When release the pump, please strictly follow the releasing rule,
otherwise, it may cause danger! Do not let the pump in a long time vacuum state; the oil pump
steam may diffuse into this pump from fore-pump. Please stop water cooling after shutting down
the pump.
7. Cleaning
Contact MTI for a cleaning service.
8. Troubleshooting
Problem Description
Pump can not start
Pump can not reach to the rate
speed after a long time running
Possible Reason
1. Cable broken or not contact
2. Other reason
1. Vacuum system leakage
2. Oil pollution or Lube lack
3. Bearing broken
Big noise or abnormal
vibration when operating
1. Lube lack
2. Pump works in resonate
3. Bearing broken
Lowe vacuum degree
1. Fore vacuum leakage
2. High vacuum leakage
3. Fore pump works
1. Fore pressure is high
2. Pump pollution
System can not reach the
desired vacuum degree after a
1. Change one or contact well
2. Inform us
1. Eliminate the leakage and
the fore pressure should be
lower than 5 Pa.
2. Change lube
3. Change bearing
1. Fill lube
2. Change connection position
and size, and fix the moving
part and add damping O-ring
3. Change bearing
1. Seal the fore vacuum
2. Repair and seal the system
3. Check and repair the pump
1. Fore pressure should be
lower than 5 Pa
2. Contact us to clean
9. To derive the ultimate vacuum, please bake the pump and testing hood for more than 48 hours,
and pump the hood to get the lowest pressure in the testing hood, which is the total air pressure
remain in the hood.
Molecular Pump Controlling Power
1. Pump startup:
When fore pump get a pressure lower than 10 Pa, the system will automatically power on with
“High Speed” and “Rotation” on the front panel brightens up, press “Working” button to start the
pump. The pump will accelerate the rotating speed with the number on 4-digit LED increasing until
pump stays at 704HZ±10. Customer can use keypad to change the rotation speed, current, voltage,
low speed and high speed.
2. Pump Stop:
Press “Working” button again, the working indication light will get off with the rotation speed
decelerating to “0000” on the panel. When the system pressure is higher than 60 Pa, pump will be
shut down automatically.
3. Troubleshooting
Overtime indicating light is on,
Buzzer is on.
Overheating indicating light is
on, and the buzzer is on
Overheating indicating light is
on, and the buzzer is on
Both overtime and overcurrent
indicating light are on, buzzer
is on.
No indication after power on
the machine
Both rotating speed and switch
voltage maintain the value
“0000” when press working
Rotating speed is small but no
Increase but with the switch
Possible Reason
Air pressure is too high,
P≥1mbar,the system can
not reach to 400 Hz when the
acceleration time is over 3
minutes, or, the four-terminal
output is damaged.
Check the fore pump, system
leakage and the four tubes
IRFP460 in the power box,
change them if needed.
Motor is overheated, no air or
water cooling for the pump
System decreases to 400 Hz
but with normal power, fourterminal output tube or core
power circuit is damaged.
System leakage
Check the cooling system
No power
Output stage is open circuit or
core power is damaged.
Sensor (Hall element) is
Check four tubes IRFP460 or
send back to the manufactory for
Check the leakage
Check the 3A fuse in the power
Check the 7A fuse on the power
board which is in the power box
or send back for mending.
Send the molecular pump back
for mending
Compound vacuum gauge with digital display
1. Introduction
ZDF-III-LED compound vacuum gauge consists of ZJ-52T pirani gauge and ZJ-27 ionization
gauge which could accordingly measure the low vacuum (105 ~10-1 pa) and high vacuum (100~
10-5 pa). This device will automatically measure the vacuum degree when the system is powered on.
2. Pirani gauge (on the left):
2-1. Pirani gauge is used for measuring low vacuum (higher than 10-1 pa).
2-2. Calibrate this gauge when first time use: Set the device as “Manual”, press “Open ionization”
to monitor the system vacuum degree, calibrate potentiometer to “ZERO” to display 1.0E-1 when
the system vacuum is about 1.0X10-1, and adjust it to “F.S” when at atmosphere to display 1.0E5.
2-3. When the gauge is broken, the unit will display “------” and enter the state of “manual”.
3. Ionization gauge
3-1. Continuous measurement
3-1-1. Make sure the both pirani gauge and ionization gauge are to measure the same system.
3-1-1. The pirani gauge will automatically measure the vacuum degree after system starts, and
when the vacuum is higher than 200 pa, ionization gauge will be on.
3-2. Separate measurement
3-2-1. Press “auto” button to disable auto function (the “auto” LED will be off).
3-2-2. Press “Ionization” button until the “Ionization” LED is on to enable the ionization gauge.
3-2-3. Again press down “Ionization” button to check the emit current and release the button to
display vacuum degree. If the current is “-----”, please check if the vacuum is too low or change a
new gauge to measure.
3-2-4. Air release for 3~5 minutes to decrease the measurement error, when the vacuum is higher
than 10-2 Pa, press “release” to release the air and the unit will display the time for releasing, press
“ionization” to stop
3-2-5. When the vacuum is lower than 10 Pa, the system will go to self-protection and displays
“----”, the ionization measurement will recover after the vacuum is higher than 10 Pa.
4. Controlling and setting:
This function is used for setting the upper and lower limit for the system.
4-1. Hold “set 1” and the upper limit LED is on, release the button until to your target.
4-2. Again hold “set 1” and the lower limit LED is on, release the button until to your target.
5. Notice
5-1. Auto-self-lock function will forbid system releasing the air when the vacuum is lower than 10-2.
5-2. Data protection can save the setting for next time use.
5-3. A measurement drift may happen at 105 but does nothing to the accuracy when lower than 103.
If any questions please contact us 1-510-525-3070 or email, we will help you out
within 24 hours.
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