Mag-NetX

Mag-NetX
™
Blending precision floor vibration control with a commitment to manufacturing™
Technical Manufacturing Corporation
™
Mag-NetX
Magnetic Field Cancelling System
Helmholtz coils in a
structural casing
Technical Manufacturing Corporation (TMC), the world’s
leading designer and manufacturer of precision vibration
isolation systems introduces Mag-NetX.
Building upon our ability to use advanced
control techniques to actively sense and
cancel building floor vibrations, we now
offer a product that actively compensates
for magnetic field fluctuations.
Frame sized
for user-specific
requirements
Designed both for point-of-use and oem
applications, Mag-NetX is ideal for scanning
and transmission electron microscopes,
electron beam lithography systems, ion
beam instruments, and any tools that incorporate a charged beam. Combined with TMC’s
advanced vibration isolation systems, Mag-NetX provides the
ultimate control of vibration and magnetic fields.
Floor mounted or
tool mounted
Features:
◆ Continuous field cancelling
◆ Continuous field monitoring
◆ Set and forget operation
◆ AC field cancelling
◆ Wideband DC field cancelling
Dedicated controller with automated calibration and self-test
◆ 50 x field improvement (typical)
◆ Dynamic, 100 µs response
◆ Accurate field measurement
◆ Interface for computer monitoring
◆ Feedforward compensation of line frequency and harmonics
◆ Feedforward capability for other inputs
www.gmp.ch
GMP
SA Manufacturing
Siège principale:
des Drive
Baumettes
Technical
Corporation Avenue
I 15 Centennial
I Peabody,17
MA
GMP SA
Büro Zürich: Dübendorfstrasse 11a
CH-1020
Renens I Fax: 978-531-8682
+41 21 633
21 21
Fax.
+41 21 633 21
29 info@gmp.ch
01960
USA I 978-532-6330
I sales@techmfg.com
I 1-800-542-9725
I www.techmfg.com
CH-8117 Fällanden
+41 44 825 34 00
Fax. +41 44 825 34 01 so@gmp.ch
Mag-NetX™ Magnetic Field Cancelling System
Plot 1. Transfer function at the exact sensor location.
Excitation coil is not the part of cancellation system.
Sensor is the magnetic flux gauge and it is part of cancellation system.
Plot 2. Transfer functions in the volume of 0.5*0.5*2.5 feet.
Excitation and sensor coils are NOT the part of cancellation system.
Excitation coil positioned outside Helmholtz cage, sensor coil positioned
near magnetic flax gauge and has dimensions of 0.5 x 2.5 feet.
GENERAL SPECIFICATIONS
1. SYSTEM COMPONENTS:
Up to 3-axes orthogonal magnetic
sensor, EM Cancellation Controller,
Up to 6 orthogonal coils
2. PERFORMANCE:
Active magnetic field cancellation axes X, Y, Z
Controlling volume vs. field flax density 60 m3 at 10 µT RMS
20 m3 at 50 µT RMS
(able to cancel Earth magnetic field)
Max ambient DC field
± 100 µT max
Dynamic range
± 100 µT (60dB max)
Field reduction ratio at sensor location 40dB [100 x] (typical)
in 0.5 - 100 Hz
25dB [20 x] (typical) in 100 - 500 Hz
(See Plot 1)
Field reduction ratio in a typical
33dB [30 x] (typical) in 0.5 - 100 Hz
volume of Electronic Microscope
20dB [10 x] (typical) in 100 - 500 Hz
0 dB at 1000 Hz
column: h*w*t = 2.5*0.5*0.5 feet
(75*15*15 cm)
(See Plot 2)
Bandwidth
0.5 - 1000 Hz
Noise threshold
0.1 nT/√Hz at 50-60 Hz
3. EMC CONTROLLER:
Dimensions of controller:
Operational modes:
Front panel controls:
“OK” LED indicator
LCD 2*32 symbols indicator
Bar-LED indicators
2 rocker switches
BNC socket
Interfaces:
RS-232 socket
GO - NO GO signal
Power:
Supply voltage:
Internal line feedforward input:
3 Auxiliary inputs:
3 channels for X, Y, Z cancellation,
1U standard case
19"-1U, 14.2” deep (48 x 4 x 36 cm)
After power-on: Automatic self test/
calibration and switch to controlled
mode in 30-45 sec, no user involvement
required.
Manual test/debug mode.
Green - OK, Yellow - Warning / Error
Show menu and status
Show X, Y, Z, real time field strength
For menu access
For calibration / testing / debugging
For external interface, accepts ASCII
commands
Binary, for usage as input for protected
system
200 VA max
90 - 240 VAC 50/60 Hz
Cancels line frequency
(50/60 Hz and Harmonics)
allows increased loop gain for better
suppression of other frequencies
Can be used as feedforward to cancel
disturbances from moving objects
(sample on X-Y stage, for example)
www.gmp.ch
GMP SA
Siège principale: Avenue des Baumettes 17
CH-1020 Renens
Technical Manufacturing Corporation I 15 Centennial Drive I Peabody, MA 01960 USA I 978-532-6330 I
GMP SA
Büro Zürich: Dübendorfstrasse 11a
CH-8117 Fällanden
+41 21 633 21 21
+41 44 825 34 00
Fax. +41 21 633 21 29 info@gmp.ch
Fax.
+41 44
8252005
34Technical
01 so@gmp.ch
Form: Sales
–08-2005-1
Copyright
Manufacturing Corp.
Fax: 978-531-8682 I sales@techmfg.com I 1-800-542-9725 I www.techmfg.com
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertising