teaching fab agilent iv/cv operating manual

teaching fab agilent iv/cv operating manual
DOCUMENT: Teaching Fab Electrical Test Station Standard Operating Procedure (SOP)
Version: 1.
HP 4145A & HP 4284A with Micromanipulator Probe
Station model 6000 Electrical Test Station
Standard Operating Procedure (SOP)
Version: 1.0
October 2014
UNIVERSITY OF TEXAS AT ARLINGTON
Nanofabrication Research Center
DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP)
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Version: 1.
TABLE OF CONTENTS
1. Introduction…………………………………………….……………………............3
1.1
Scope of Work……………………………………………………..............3
1.2
Description…………………………………….………………....………....3
1.3
Safety…………………………………………………………....…………..9
2. Hardware..............................…………………………………………….…..........10
3. Requirements……………………………………..….………………..…….……...13
3.1
Training…………………………………….…………………...…...……..13
3.2
System Restrictions………………………...……………………………..13
4 Operating Procedures.………………………..…..………….............................14
4.1
System Pre-Checks HP 4145A & HP4284……………………............14
4.2
Operating the Hewlett Packard 4145A Semiconductor
Parameter Analyzer with the Micromanipulator Probe Station
model 6000………………………………………………………………..15
4.3
Operating the Hewlett Packard 4284 Precision LCR Meter
with the Micromanipulator Probe Station model 6000.……………….35
4.4
Systems Shut down HP 4145A, HP4284 and MMC 6000…...….......48
4.5
Creating and Editing a Plot, Transforms and Saving Project Data. ....51
5 Technical Information…….………………………..…..……………….…..……56
5.1 Technical Information..........................................................................56
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DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP)
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Version: 1.
1.0 INTRODUCTION
1.1 Scope
These procedures apply to the Teaching Fab Electrical Test Station comprising of the Hewlett
Packard 4145A Semiconductor Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter,
Micromanipulator Probe Station model 6000, Agilent 82357A USB/GPIB Interface for Windows
and Metrics ICS (Interactive Characterization Software) version 4.0.0 measurement engine.
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All maintenance should follow the procedures set forth in the manufacturer’s maintenance and
operations manuals. This document is for reference only. Users must be trained by Nanofab staff
before operating this equipment.
1.2 Description
The Teaching Fab Electrical Test Station comprises the Hewlett Packard 4145A Semiconductor
Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter, Micromanipulator Probe
Station model 6000 and Metrics ICS (Interactive Characterization Software) version 4.0.0
measurement engine.
The HP 4145A Semiconductor Parameter Analyzer performs fast, accurate DC analysis of
semiconductor devices, semiconductor wafers , packaged devices, and thin films to develop new
semiconductor material technology and design architecture, to evaluate and control existing
materials and processes, to verify the quality of your fabrication process and to solve
semiconductor design and fabrication related problems. The HP 4145A can quickly evaluate
device performance to make a pass/fail test to improve device performance and yield while
decreasing semiconductor device development time.
The HP 4145A is configured with four Source Monitor Units (SMU). Each SMU can be used as a
voltage source/current monitor or as a current source/voltage monitor to stimulate and measure
voltage and current sensitive devices to help you analyze data. The SMU-based architecture
saves time and eliminates measurement instabilities caused by physically changing the device
under test (DUT) connections because each SMU can alternately act as a voltage source/current
monitor or as a current source/voltage monitor by changing the SMU’s programming/operating
mode. In addition to the four Source Monitor Units the HP 4145A is equipped two Voltage
Monitors (VM) and two Voltage Sources (VS). The HP 4145A is completely programmable to
control measurements, store data, and plot functions using the Metrics ICS (Interactive
Characterization Software) version 4.0.0 measurement engine.
HP 4145A Semiconductor Parameter Analyzer
Metrics ICS version 4.0.0
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The HP 4145A excels in both TEG (Test Element Group/ scribe line test dies) measurements
performed on semiconductor wafers and packaged devices, provides R&D capabilities that will
meet DC characterization requirements for current devices and also functions needed for the
development of new materials. A partial list of applications includes the DC characterization for
these devices.
Semiconductors and MEMs Devices
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Bipolar Transistors
MOS structures, Junction FETs,
GaAs FETs
Semiconductor Diodes
Resistance Measurements
Photodiodes and Phototransistors
Operational Amplifiers
Gated Diode
Static Electricity Induced Transistors
(SITs)
Accelerometers and Pressure
Sensors
Thin Film Transistors
New Materials
o
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o
o
o
o
o
o
o
o
Gallium Arsenide Devices
Liquid Crystal Structures
Carbon Nanotubes (CNTs)
Ceramic Semiconductors
Amorphous Silicon Devices
HEMT Devices
Solar Cell Elements
Solar Cell Arrays
Biomedical Engineering Devices
Polymer Organic Applications
Parameters which can be analyzed include:
Bipolar Device Parameter Analysis
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DC Current Gain(hFE, hFB)
Collector Current Characteristics
Emitter Current Characteristics
Evaluation of Surface Recombination
Current
PN Junction Forward Bias
Characteristics
PN Junction Reverse Bias
Characteristics
Breakdown Voltage(BVEBO, BVCBO, BVCEO)
Sheet Resistance
Resistivity
Collector- Emitter Saturation Voltage
Emitter-Base Saturation Voltage
Collector Cut-Off Current
MOS Structure Parameter Analysis
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Threshold Voltage Bulk Potential
Dependency
Extrapolated Threshold Voltage
Gain Factor ( ) in Saturated/NonSaturated Regions
Mutual Conductance ( gm)Drain and
Gate Voltage Dependency
Body Factor Effects Multiplication Factor
(M)
Punch-Through Voltage
PN Junction Break-Down Voltage
Channel Conductance-Gate Voltage
Characteristics
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The HP 4284 Precision LCR meter is a general purpose LCR meter for incoming
inspection of components, quality control, and research laboratory use. The HP 4284A is used
for evaluating LCR components, materials, and semiconductor devices over a wide range
frequencies (20 Hz to1 MHz) and test signal levels (5mVrms to 20Vrms , 50µA to 200mA) to
perform quick and accurate total Impedance |Z| or Admittance |Y| measurement evaluations and
calculates series and parallel impedance parameters such as C, L, R, G, X, B, θ, Q and D for
components such as capacitors, inductors, transformers, series and parallel LCR circuits,
electromechanical and MEMs sensor devices.
The HP 4284A precision LCR meter is a cost-effective solution for component, DUT and material
measurement to test devices to the most commonly-used test standards, such as IEC/MIL
standards, and under conditions that simulate the intended application.
The HP 4284 uses a four-terminal pair measurement configuration which permits easy, stable and
accurate measurements. The four-terminal pair measurement method has the advantage in both
low and high impedance measurements. The outer shield conductor works as a return path for the
measurement signal (not grounded). The same current flows through the center conductor and
outer shield thus cancelling out the magnetic fields generated by these opposite flows of current.
Therefore test leads do not contribute to additional errors due to self or mutual inductance
between individual leads.
The HP 4284 is completely programmable to control measurements, store data, and plot functions
using the Metrics ICS (Interactive Characterization Software) version 4.0.0 measurement engine.
HP 4284 Precision LCR meter
Four-Terminal Pair Measurement Principle
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Metrics ICS version 4.0.0
HC : High current
HP : High potential
LP : Low potential
LC : Low current
Setup, Execute, and Analyze
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Whether in research and development, quality assurance, or incoming inspection, the HP 4284A
will meet all of your LCR meter test and measurement requirements. A partial list of applications
includes the LCR characterization for these devices.
Semiconductors and MEMs Devices
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Multilayer Ceramic Capacitors
MOS type semiconductors
Bipolar Junction Transistors
JFETs
Switching Power Supply Inductors
Magnetic Heads
Polymer / Polyimide Films
Ferroelectrics
Photonic Devices
Static Electricity Induced Transistors
III–V Compound Devices
Accelerometers and Pressure
Sensors
New Materials
o
o
o
o
o
o
o
o
o
o
o
o
Gallium Arsenide Oxide Interfaces
Liquid Crystal Structures
Ceramic Semiconductors
Carbon Nanotubes (CNTs)
Organic Thin-Film Transistor (TFT)
Amorphous Silicon Devices
Solar Cell Elements
Solar Cell Arrays
Ferroelectrics Ceramics
Biomedical Engineering Devices
Polymer Organic Applications
HEMT devices
Parameters which can be analyzed include:
Measurement Functions and Parameters
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Absolute value of Impedance |Z|
Absolute value of Admittance |Y|
L =Inductance
C =Capacitance
R =Resistance
G =Conductance
D =Dissipation factor
Q =Quality factor
Rs =Equivalent series resistance
Rp =Parallel resistance
X =Reactance
B =Susceptance
θ =Phase angle
Semiconductor Device and Material
Parameters derived from C-V profiles
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Average Doping Concentrations
Doping Profiles and Carrier Lifetimes
Oxide Thickness and Oxide Charges
Gate Oxide Capacitance
Interface Trap Density of Charges
PN Junction Capacitance
Schottky Diode Barrier Height
Thin Film Capacitive Density Tests
Interlayer Dielectrics Thickness
Contamination from Mobile Ions
Boundary Defect Density Distribution
Threshold Voltage
Interface Trap Density in Wafer
Processing.
Mechanical characteristics of MEMs
sensor
Frequency Dependency of
Capacitance and Mechanical
Response a Diaphragm Spring
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The Micromanipulator Probe Station model 6000 provides excellent probing capabilities for
failure analysis, research and development, design analysis and device characterization analysis.
The MMC model 6000 has an extensive line of probes and accessories, making it an excellent
station on which to build a complete probing system.
The 6000 Test Station wafer chuck stage is manually operated utilizing X and Y direction control
knobs. Each of these control knobs have two knobs consisting of one small knob within a larger
knob that are used for coarse and fine adjustment. The wafer vacuum chuck is a standard 4 in.
(101.6 mm) diameter with dual tweezer slots and
for low contact resistance.
This electrical check station has four manipulators can be flexibly positioned on the platen probe
platform. The highly polished magnetic stainless surface accepts the magnetic base manipulators
The probe holders are Model 77A Probe Holders with 30° or 60° from horizontal probe
tip attack angles. Quick probe tip replacement is achieved by the spring load mechanism in the
Model 77A. This holder will accept all MMC model 7 probe points/ tips.
Ten isolated BNC feed throughs are provided to interface the DUT to the test equipment, five on
the left side of the platform and five on the right. They are to provide isolation and strain relief
between any probe cables and external test equipment. These connectors are mounted in delrin
in order to isolate them from the chassis. Each BNC is tested to ensure better than 5 teraohms
isolation between each conductor and its outer shell. Also each BNC has greater than 5
teraohms isolation between itself and any other BNC connector as well as test station.
The 6000 Series Test Station features the Olympus microscope which combines high
magnification of very small geometries and long working distance objectives for ease of probing.
The 6000 probe station is design for precise chuck movement of substrates, platen movement of
manipulators and micromanipulator movements of probes tips for ease of use in everyday failure
analysis, device characterization, process monitoring, and reliability testing applications.
Micromanipulator Probe Station model 6000
Model 77A Probe Holders with 30° or 60°
tip attack angles and spring load mechanism
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The Agilent 82357A USB/GPIB Interface Converter for Windows ® provides instant
connections, enabling a direct connection from the USB port on the PC to GPIB instruments
(HP 4145A Semiconductor Parameter Analyzer and HP 4284 Precision LCR meter).
The USB/GPIB Interface software allows transparent communication between the PC and up to
14 GPIB instruments and USB support is standard in Windows XP. The 82357A USB/GPIB
Interface also uses a thin, flexible, high quality USB cable that is USB 1.1 and 2.0 compliant.
The 82357A is capable of transfer rates over 750KBytes/sec with large block transfers.
Agilent 82357A USB/GPIB Interface Converter for Windows ®
The Metrics ICS (Interactive Characterization Software) version 4.0.0 measurement engine is
a uniquely powerful instrumentation control and data analysis software package. Metrics ICS is
designed to control semiconductor test equipment used for device characterization and other
microelectronics testing. Metrics ICS operates in the Microsoft Windows XP Professional
environment and eliminates the need for any programming or front-panel interaction with the
instrument. Each instrument supported by Metrics ICS is controlled from a user-interface
configured by point-and-click editing. Instruments supported by ICS drivers include:
Semiconductor Parameter Analyzers, DC Source Monitor Units, Curve Tracers, LCR Meters and
Impedance Analyzers.
Metrics ICS 4.00 Software allows provides an environment for the collection of data in three basic
steps: Setup, Execute, and Analyze. The Setup of a Measurement typically takes no more than
1-2 minutes. Metrics ICS supports several measurement modes to accommodate most testing
methods. The Analysis tools in this software include plotting and data extraction. Once the
functions are created, they can be saved with the data. The advantage of ICS is that once a test
is created and saved it can be re-opened and used again, including the analysis.
Metrics ICS version 4.0.0
Setup, Execute, and Analyze
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DOCUMENT: Electrical Test Station Standard Operating Procedure (SOP)
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1.3 Safety
1.3.1 The Teaching Fab Electrical Test station comprising the HP 4145A Semiconductor
Parameter Analyzer, HP 4284 Precision LCR meter, MMC Probe Station model 6000,
Agilent 82357A USB/GPIB instruments are all connected to HIGH VOLTAGE.
Be very careful and remain aware of any electrical hazards. If you encounter any electrical
malfunctions, contact NanoFAB staff immediately.
1.3.2 To minimize electrical shock hazard, these instrument chassis and cabinets must be
connected to an electrical ground. The instruments are equipped with a three-conductor ac
power cable. The power cable must either be plugged into an approved three-contact electrical
outlet.
1.3.3 Do not touch the probe tip holders or probe tips during a manual or automatic measurement
due to dangerous currents may be present.
1.3.4 Do not operate these instruments in the presence of flammable gases or fumes. Operation of
any of these electrical instruments in such an environment constitutes a definite safety
hazard.
1.3.5 Users are NOT allowed to remove instrument covers, replace internal parts, components or
make internal adjustments.
Dangerous voltages, capable of causing death, are present in this instrument.
1.3.6 Only staff maintenance is allowed to adjust or replace internal components.
Do not replace components with power cable connected. Under certain conditions, dangerous
voltages may exist even with the power cable removed. To avoid injuries, always
disconnect power and discharge circuits before touching them.
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1.3.7 Use caution when working near the cathode–ray tube (CRT). Breakage of the cathode-ray
tube causes a high velocity scattering of glass fragments (implosion).To prevent CRT
implosion avoid rough handling or jarring of the instrument.
1.3.8 Observe all Safety Symbols and their definitions used on equipment or in manuals.
http://cp.literature.agilent.com/litweb/pdf/54932-92003.pdf
1.3.9 Read any posted NanoFAB Engineering Change Notices (ECN) for any hardware, process
or safety changes before running the tool.
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2.0
2.0
Version: 1.
HARDWARE
HP 4145A Semiconductor Parameter Analyzer:
The instrument has four SMU’s. Each SMU can be used as a voltage source/current monitor or
as a current source/voltage monitor.
SMU Range:
Accuracy:
V: ± 1mV to ±100.0 Vdc
± 0.15% to (± 0.15% + 40mV)
I : ±1pAdc to ±100.0 mAdc
± 0.4% to ± 1.8%
(± 50fA resolution in current monitor mode)
2.1
HP 4145A makes up to 150 measurements per second.
2.2
HP 4145A has two Voltage Monitors (VM) built into the system.
VM Range:
Accuracy:
V: ± 20.000Vdc and ± 2.0000 Vdc
± 0.5% (20V range) and ± 0.2% (2V range)
Resolution : ±1 mV (20V range) and ± 100µV (2V range)
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2.3 HP 4145A has two voltage sources (VS) built into the system.
VS Output Range: V: ± 20.000Vdc
Accuracy: ± 0.5%
2.4 HP 4284 Precision LCR meter:
The instruments measurement terminals are four- terminal pair, auto and manual ranging,
equivalent circuit measurements for parallel and series circuits. Internal and external GPIB
trigger, program delay from trigger command to start of measurement of 0 to 60s in 1 ms steps.
Integration time is short, medium and long. Measurement cable length is 1 meter.
2.5 The 4284A has internal DC bias voltage selections of 0 V, 1.5 V, and 2.0 V. With option 001
installed, the dc bias voltage can be set from 0V to 40 V with a resolution listed below.
2.6 Test Signal frequency is 20Hz to 1MHz with 8610 selectable frequencies and accuracy ±0.01%.
2.7 Test signal and monitor modes, levels, ranges, setting accuracies and monitor accuracies.
More specific information and tables concerning accuracies can be found here:
http://cp.literature.agilent.com/litweb/pdf/5963-5390E.pdf
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2.6
MMC Probe Station model 6000:
2.8
The MMC 6000 provides X-Y stage range of motion 4 in. x 4 in. (101.6 mm x 101.6 mm). Theta
rotation control full 360º with conveniently located locking knob, control knobs coaxial X-Y for
single hand operation from either side, located center front.
Resolution of X-Y movement: 1.8 microns per degree revolution.
2.9
The Chuck is standard 4 in. (101.6 mm) diameter with dual tweezer slots and gold plated brass
for low contact resistance. The chuck flatness is ±0 .0005 in. (±12 microns), electrical isolation
exceeds 5000 megaohms at 500VDC and electrically connected to black terminal at rear of
baseplate.
2.10 The Platen is formed with 1 in (25.4 mm) thick honeycomb construction for maximum stability.
The top surface electrically grounded to white terminal at rear of baseplate. The platen
accepts 8 or more magnetic or vacuum base manipulators and 10 BNC strain relief's
connectors. The platen has fine lift control, true planar vertical motion and convenient knob
control. The vertical motion resolution: 0.3 micron per degree revolution Range: 0.5 in. (12.7
mm). The platen is also equipped with a quick lift control that raises platen and microscope with
adjustable microscope lift delay. Range: 1.35 in. (34.3 mm) Resolution: 10:1 reduction.
2.11 The magnetics manipulators are configured with Model 77A Probe Holders with 30° or 60° from
horizontal probe tip attack angles. Quick probe tip replacement is enhanced by
the spring load mechanism in the Model 77A. This holder will accept all Model 7 probe points.
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2.12 The Agilent 82357A USB/GPIB Interface Converter provides a direct interface connection from
the USB port on your PC to GPIB instruments.
2.13 The 82357A includes an attached USB cable that is USB 1.1 compliant. This cable is shielded
and the connector is specified for up to 1,500 insertions.
2.14 The 82357A is capable of transfer rates over 750KBytes/sec with large block transfers.
2.15 The 82357A USB/GPIB Interface Converter is supported ONLY for PCs with Windows Me,
Windows 2000, or Windows XP Professional operating systems. The 82357A USB/GPIB
interface is a Microsoft auto-detect plug and play device.
2.16 The minimum 82357A USB/GPIB hardware and software requirements:
2.17 The Metrics ICS (Interactive Characterization Software) version 4.0.0 measurement engine
performs I-V and C-V characterization measurements and analysis for design verification,
process troubleshooting, reliability engineering, and failure analysis.
2.18 The ICS Software includes full suite of data analysis tools and provides quick transfer of data to
popular software packages such as spreadsheets, Excel, word processors and databases
2.19 ICS software has Point, Click, and Measure Capabilities: Controls your instrumentation with one
easy-to-use graphical interface, provides programming-free test setup generation and supports
multiple measurement modes.
2.20 ICS software has Graphic and Data Analysis tools: ICS delivers spreadsheet functionality,
provides powerful plotting capabilities, dynamically links data to other spreadsheet programs and
databases, and uses Windows clipboard flexibility to incorporate plots into documents and
presentations.
2.21 ICS software has Comprehensive Data management: Uses project files as a central location to
store test setups and data, provides a hierarchical database engine that organizes and manages
your data while eliminating DOS file naming restrictions. ICS includes ASCII export of data which
allows for advanced analysis on workstation, Macintosh, PC-based engineering tools and
delivers advanced post-measurement search and report capabilities.
Metrics ICS version 4.0.0 : Setup, Execute, and Analyze
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3.0 REQUIREMENTS
3.1 Training
All users must be trained and authorized on the Teaching Fab Electrical Test Station comprising of
the Hewlett Packard 4145A Semiconductor Parameter Analyzer, Hewlett Packard 4284
Precision LCR meter, Micromanipulator Probe Station model 6000, Agilent 82357A USB/GPIB
Interface for Windows and the Metrics ICS (Interactive Characterization Software) version 4.0.0
measurement engine. Training is supplied by a Nanofab staff member please contact the tool owner
to schedule training.
3.2 System Restrictions
3.2.1 Users are NOT allowed to remove instrument covers, replace internal parts, components or
make internal adjustments. Dangerous voltages, capable of causing death, are present in this
instrument. .For any maintenance issues call staff to check the system.
3.2.2 Users are NOT allowed to operate these electrical instruments in the presence of flammable
gases or fumes. Operating any of these electrical instruments in such an environment
constitutes a definite safety hazard.
3.2.3 Users are NOT allowed to place any liquids (vessels containing fluids) on the chuck for
measuring special DUT measurements. Any non-standard set up needs staff approval.
3.2.4 Users are NOT to operate the electrical instruments outside or higher than the output voltage,
current, signal or frequency ranges in MANUAL or AUTOMATIC modes as specified in section
2.0 HARDWARE : sections :2.0 to 2.7
3.2.5 Users are required to allow 30 minutes for the instruments to warm up.
3.2.6 Users are NOT allowed to connect external voltage/current sources, meters, signal generators
or oscilloscopes unless authorized by staff.
3.2.7 Measure only clean dry samples (DUT’s).
3.2.8 Use clean dry probe tips. If probe tips need cleaning rinse in deionized water or spray
Methanol then use N2 to dry excess water from the tip. To remove oxide deposits, dip probe
tips into a 1.0 Normal sodium hydroxide (NaOH) solution for a few seconds
(http://www.grainger.com/product/LABCHEM-Sodium-Hydroxide-5CVX1).Then rinse with deionized
water and dry with N2. Store probe tips in sealed product box and store in the N2 desiccator.
3.2.9 The probe holders are very expensive so use extra caution when handing the probe holders,
probe holding springs locks and when inserting and removing the probe tips.
3.2.10 This system requires a NanoFab Management System reservation before using.
http://www.uta.edu/nano/reservation/
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4.0 OPERATING PROCEDURES
4.1. System Pre-Checks
4.1.1. The Teaching Fab Electrical Test Station comprising of the Hewlett Packard 4145A
Semiconductor Parameter Analyzer, Hewlett Packard 4284 Precision LCR meter,
Micromanipulator Probe Station model 6000, Agilent 82357A USB/GPIB Interface for
Windows and the Metrics ICS (Interactive Characterization Software) version 4.0.0
computer should already be plugged into the power strips and the power strip plugged into the
wall power. Check to ensure the connections before you start. If any on these instruments are
not plugged or the wall power is disconnect call staff to check.
4.1.2. Check to ensure the 82357A USB/GPIB Interface in plugged into the back of Hewlett
Packard 4145A Semiconductor Parameter Analyzer and the Hewlett Packard 4284
Precision LCR meter (they are piggyback connected). If they are not plugged in call staff to
check.
4.1.3. Carefully check to ensure the four blue triac SMU’s cables are connected properly to the
back of Hewlett Packard 4145A instrument. The triac connectors will lock in.
Check to ensure the four black bnc cables are properly connected to the front of the
Hewlett Packard 4284 Precision LCR meter. The bnc connectors will lock in.
HP 4145A
HP 4284 Precision LCR meter
4.1.4. Check to ensure the four blue triac SMU’s cables are connected properly to back side of the
triac-to-bnc converter box as shown.
If you are using the Hewlett Packard 4145A check to ensure all four micromanipulator bnc
cables are connected properly to the front the of the triac-to-bnc converter box as shown.
If you are using the Hewlett Packard 4284 four-terminal pair is connected to the bottom of
the bnc mounting plate and two of the micromanipulator bnc cables are connected properly to
the top the bnc mounting plate shown. The triac and bnc connectors will lock in.
Hewlett Packard 4145A back and front side of the triac-to-bnc converter
Hewlett Packard 4284 top and bottom side of the bnc plate
4.1.5. Check to ensure the USB security key in plugged into the computer.
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4.2. Operating the Hewlett Packard 4145A Semiconductor Parameter Analyzer
with the Micromanipulator Probe Station model 6000
4.2.1. If you have not completed the System Pre-Checks in steps 4.1.1 – 4.1.5 then you must
complete those before proceeding.
4.2.2. Turn ON the TF electrical test computer by pressing the front power button. At the Windows
XP login screen type in the password using: test. Computer will boot up to MS desktop
screen.
password use: test
TF Electrical Test computer MS screen.
4.2.3. Check to ensure the Agilent 82357A USB/GPIB interface converter power up sequence
completes normally (the TF electrical test computer needs to be ON). Initially only the red
FAIL LED should be ON. After a few seconds all three LEDs should be ON. After another
minute only the green READY LED should be ON. If all three LEDs remain ON notify staff to
check.
After a minute only the green READY LED should be ON
4.2.4
Check to ensure four blue triac SMU’s cables are connected properly to back side of the
triac-to-bnc converter box and all four micromanipulator bnc cables are connected properly to
the front the of the triac-to-bnc converter box. If the manipulator bnc’s are connected to the
HP 4284 bnc plate disconnect them and reconnect to the front side of the triac-to-bnc
converted box .
4.2.5
Turn the Hewlett Packard 4145A power ON by pressing the power switch button in. After
about 1 minute the cathode–ray tube (CRT) will display the HP 4145 Main Menu and the red
AUTO CAL led will be ON. The AUTO CAL will perform the auto calibration routine every 3
seconds. To disable the auto calibration press the AUTO CAL button and the red led will go
OFF.
4.2.6
Check to ensure the instrument cooling fan is ON at the back of the Hewlett Packard 4145A.
If the fan is not ON turn instrument’s power OFF and notify staff. Allow the instrument to
warm up 30 minutes.
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4.2.7 Turn the Olympus lamp power supply ON by moving the switch to the ON position. Adjust the
lamp voltage to less than ½ of the maximum as shown. Check the lamp housing to see if the
lamp is ON. If there is no light call staff to check. Do not remove lamp housing to check bulb,
dangerous ac voltages are present at the lamp connectors.
less than ½ of the maximum
4.2.8 Raise the Platen height by slowly rotating the stage Z knob CW and raise the manipulator
probe holder by rotating the manipulator’s top thumb screw CW until to have about 1/2" to
1 " clearance between the chuck and probe holder; otherwise you may break or damage the
prober tips and probe holders during the DUT, stage and manipulator set up.
Platen height Z knob
4.2.9
1/2" to 1 " clearance between the chuck and probe holder
Carefully check the probe holder collar is finger tight, if it is loose rotate the collar CW so that
it is finger tight. The probe holders are very expensive so use extra caution when
handing the probe holders, probe holding springs locks and when inserting and
removing the probe tips.
4.2.10 Move the manipulators away from the stage and carefully insert the Micromanipulator type 7
probe tips into the prober holder by gently holding the probe holder and pulling the
spring-load locking mechanism backwards and carefully inserting the probe tip through the
bottom hole 1st. Be careful not to accidentally bump the thinner measuring tip or it may bend
or break. When the probe is about ⅓ to ½ inserted slowly release the spring-load securing
the probe tip
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4.2.11 Insert all the probe tips the same length through the probe holders that you will be using and
adjust the manipulators top thumbscrews to adjust the probe holders and tips to the same
height above the stage.
4.2.12 Move the stage position to the center of the platen base plate by rotating the large outer
X-travel knob (left to right stage motion) and the smaller inner Y-travel knob (front to back
stage motion) as shown.
Larger outer X-travel knob (left to right stage motion) smaller inner Y-travel knob (front to back stage motion)
4.2.13 Carefully lift and move manipulators to the center of the stage. This places the manipulators
at the center of the Olympus microscope’s field of view. They are held to the platen by strong
magnet. Disconnect the probe holder grounding lead screw if necessary.
4.2.14 Re-connect the probe holder’s outer grounding lead to the closest platen terminal ground port
(color coded). The probes outer bnc connectors are already connected to earth ground. This
colored coded lead connection is for grounding the platen (the platen is isolated from ground
without connections made). Some of these connectors are alligator or small set screw type.
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4.2.15 If you need the platen grounded make an electrical connection between the color coded
terminal you have already connected in the previous step to the white terminal at the back
plane of the MMC 600 as shown. If you need the gold plated chuck grounded connect the
black terminal (chuck terminal) to the white terminal (earth ground) using the alligator wire
connectors.
4.2.16 Carefully place the DUT in the center of the stage without bumping the probe tips. Turn on
stage vacuum (¼” to 4" wafer will hold).
4.2.17 Make further DUT to stage centering and theta adjustments using X, Y and theta knobs.
After making your theta adjustments, tightened the theta rotation locking thumbscrew by
turning the smaller knob on top CW until it stops turning as shown.
This places the DUT near the center of the Olympus microscope’s field of view.
Larger outer X-travel knob (left to right stage motion), smaller inner Y-travel knob (front to back stage motion),
theta rotation is locked by turning the smaller top knob CW until it stops turning as shown
4.2.18 Adjust the platen height and micromanipulators probe heights using the top thumbscrews to
move the bottom of probe tips to 10mm to 20mm above the DUT measurement location.
After your probe tips are this close do not move the stage X, Y and theta knobs.
Platen height Z knob
10mm to 20mm clearance between probe tips and DUT
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4.2.19 Now use the Olympus microscope to locate and focus on the probe tip points in the center of
the objectives field of view. For most application the microscope 2X objective will be sufficient
to see the probe tips and device test locations. The eyepiece magnification is 10X.
2X objective
eyepiece is 10X magnification
4.2.20 The Microscopes lateral movement and vertical focusing is controlled by the following :
Vertical Lever front-back
Horizontal Lever left-right
Top Thumbscrew coarse focus
Side knob fine focus
Top Thumbscrew coarse focus
Horizontal Lever left-right
Vertical Lever front-back
Side knob fine focus
4.2.21 Adjust the eyepiece diopter cross hairs for more precise centering of the probe tips above the
DUT measurement locations and adjust the lamp intensity as needed.
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4.2.22 Focus the microscope over the DUT for each probe tip you will be using to make any final
adjustments to the stage X,Y or theta positions.
10mm to 20mm above the DUT
4.2.23 Very slowly lower the 1st probe tip to a height of 5mm to 10mm above the DUT
measurement site position by rotating the manipulator/probe holder top thumbscrew CCW.
Now adjust the 1st probe tip X and Y position to the center of the DUT measurement site by
rotating the manipulator/probe holder side and rear thumbscrew CW or CCW and constantly
adjusting the microscope fine focus and lamp intensity.
rear thumbscrew is forward-backward probe motion
side thumbscrew is left-right probe motion
 At this point you are at the center of the DUT measurement location and 5mm above
the surface.
4.2.24 Extremely slowly lower the 1st probe tip by rotating the manipulator/probe holder top
thumbscrew CCW and constantly adjusting the microscope fine focus and lamp intensity.
Focus to about 1mm above the DUT. You can use the
on the DUT
surface or features of the DUT such as surface grains, lines, patterns, pads as a reference
how close you are to making probe contact with the DUT test measurement location.
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4.2.25 When the probe tip makes contact with the DUT measurement site surface it will stop
moving. One final very small downward movement the probe tip will move (skip) forward
about 1-2 um. This will ensure you have made good contact with the surface.
 Do not go beyond this final downward motion or you will bend the probe tips
affecting your measurements and causing damage the probe tip.
4.2.26 Do not move the platen height or the stage X, Y and theta rotation until the all measurements
are completed.
Do not move the platen height or the stage X, Y and theta rotation
4.2.27 Slowly move the microscope position to the other probe tips and make contact with the DUT
the same way as the 1st probe tip as per sections 4.2.18 to 4.2.20 and 4.2.22 to 4.2.26 only.
Omit section 4.2.21.
4.2.28 Turn the microscope lamp voltage to 0V so no radiant energy will affect your measurements.
You are now ready to use the Metrics ICS software to set up measurement conditions to test
the DUT.
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4.2.29 On the TF electrical test computer at the MS Windows desktop screen double click on the
MT ICS icon to open the Metrics software.
TF Electrical Test computer MS screen and MT ICS icon
4.2.30 The Metrics software will boot up to and show a grey main menu screen with task bar at the
top header as shown.
Task bar at the top header
If you have previously made an ICS program click on the File tab to open the projects file to
access the saved program. The previously saved ICS programs have saved all previous
configuration and testing conditions/parameter settings the process to section: 4.2.35 to
4.2.39 to verify the testing conditions and SMU designations. To connect, check configuration
and test the communication of the instrument proceed to the next step 4.2.31
4.2.31 Click on the first icon on the task bar as show to connect an instrument.
In the Instruments menu the left window list the available instruments. Use the scroll down
tab to finds hp4145. Click on hp4145 it will be highlighted blue and then press
the Connect -> button.
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4.2.32 Next click on the Config... button to check the communication between the software and HP
4145A instrument. The GPIB address is set to 17.Verify the communication by clicking on
Poll button. You will hear the HP4145A clicking as a response to the polling.
Click the OK button to connect the HP4145A and get back to main screen.
For any instrument connection issues call staff to check.
4.2.33 Click on the second icon on the task bar as shown.
The Set Up editor menu will open automatically, click on the New button as and enter a file
name for this measurement test and press OK as shown.
4.2.34 Next click on the Devices box to choose the device type test for your DUT. Use the arrow up
and down slide bar to scroll through all the device type options.
Select the device type and polarity if needed for testing and then click on OK.
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4.2.35 To verify ICS is connected to HP4145A for this file name click on the Instruments tab.
4.2.36 Next Click on the Sources box to connect the SMU's to the appropriate manipulators and
probes. In this example click on HP4145.SMU1 in the Source Units window and then click on
box A (blue box) of the device. Then click on HP4145.SMU2 in the Source Units window and
click on box K (blue box) of the device as shown. The SMU icon will be displayed next to
box A and K. Then click on the Done box in the Source Units window when you are finished
connecting all the SMU you will be using. If you need additional voltage sources or
measuring sources (VS1,VS2,VM1,VM2) call staff check on Tirac and BNC cable availability.
4.2.37 Next Click on SMU1 icon to open SMU setup parameter page as shown and enter the
Source and Measure parameters conditions you want to test this DUT measurement site
under. Click on the remaining SMU icons and enter any allowed source and measuring
parameters you want to obtain.
A list of source and measuring parameters available and there functions are listed below
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4.2.38 The HP4145A Source and measuring parameters definitions, functions
and operating ranges are listed below.
Note: Most SMU's can only measure the signal that is not being sourced. Therefore in this case we
have selected the Stimulus to be Current resulting in the Voltage being measured. The values
returned for Current in this case would be the calculated current steps. The opposite is true when the
Stimulus mode is set to Voltage. The Sweep Time parameters are to control the rate of the sweep.
4.2.39 When you are done entering the source and measuring parameters for all the SMU locations
you are using press OK. If you want to discontinue the Setup press Cancel. This will return
the ICS software to the Setup Editor screen.
4.2.40 To set an integration time click on the Options tab. Integration time can be set to Short,
Medium or Long and the measurement can be set to Single or Repeat.
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4.2.41 Agilent 4155A integration time and Measure Modes are described as follows :
Integration time is used to reduce measurement errors caused by line frequency noise,
thermal noise, magnetic, vibrational, air currents or any other environmental noise source,
The 4155A/4155B takes a number of measurement samples and averages them to obtain a
measurement data. The number of measurement samples taken during each measurement
depends on integration time.
Setting a longer integration time increases the number of measurement samples, so
you can get more accurate measurement data.
Integration time is divided into three categories short, medium and long.
Short integration time is < 1 PLC (power line cycle).
To perform high-speed measurements, set integration time to short.
Short integration time is effective when you need high-speed measurements. But the
measurement data have lower resolution.
Medium integration time is 1 PLC (power line cycle).
Integration time depends on the power line cycle thus 1 PLC cannot change its value.
(for example, 20 ms for 50 Hz)
If you measure current in the 1 nA or lower ranges by using SMUs, integration time
of SMUs is automatically changed as follows:
Long integration time is > 1 PLC (power line cycle).
To perform more accurate measurements, set integration time to long.
Long integration time is effective when you need high resolution and noise
reduction measurement. But the measurement speed is slow
Power line cycle (PLC) integration eliminates measurement error cause by noise from the AC supply current and other
environmental noise sources by sampling over multiple power line cycles and averaging the samples.
There are three measurement execution modes Single, Repeat, and Append Measurement:
Single measurement Clears GRAPHICS or LIST page, then executes measurement
one time. Measurement results are displayed on GRAPHICS or LIST page
Repeat measurement executes measurements continuously. Before each measurement
is executed, the GRAPHICS or LIST page is cleared. Most recent measurement results are
displayed on GRAPHICS or LIST page.
Append measurement Executes measurement one time. Does not clear GRAPHICS or LIST
page. That is, measurement results are added to the existing results.
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4.2.42 To Copy, Rename or Delete your ICS measurement file name click on the appropriate tab
and enter file names and then press OK or Cancel to abort the operation.
4.2.43 If the DUT is using time based measurements click on the Time… tab and enter your time
domain conditions: time units, sampling type, wait time, start, stop, and step values. When
you are finished entering the time based conditions click on Done tab.
4.2.44 When you are done setting up all the SMU conditions and any Setup Editor test functions,
time domains, measurement mode and integration time changes, renaming or copy functions
and are ready to test the DUT press the Done button.
4.2.45 To create a measurement sequence click on the third icon of the task bar as shown.
4.2.46 Select or un-select the file name to create a test sequence as show. When you are done
creating the sequence click on the OK or Cancel tab to exit.
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4.2.47 To run an electrical test or a sequence test on the DUT click on the fourth icon of the
task bar as shown.
4.2.48 The Measurement pop-up window will be displayed as shown.
4.2.49 The Agilent 4155A integration time, Measuring Modes, history enable can be modified prior
to the DUT measurement as per sections 4.2.39 to 4.2.41. For time based measurements
you must specify the measurement mode as Time Meas.
4.2.50 To run the electrical test on the DUT click on the Single arrow button.
►
4.2.51 During the measurement the HP 4145A’s red measuring led will be ON, the instrument will
respond by a making clicking noises and an executing single measurement scan message
will be displayed on the bottom header of the ICS main screen. Allow sufficient time for the
measurement scan to complete. When the measurement is completed the red led will go off
and the scan message at the bottom header will be removed.
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4.2.52 To stop the electrical tests in progress click the Stop button.
4.2.53 After the electrical test has been completed the scan message at the bottom header will be
removed and test file name and results will be displayed on the lower header as shown
4.2.54 To define data view vectors for plotting graphics click on the 5th icon of the task bar
as shown.
4.2.55 Enable the Data View functions by clicking on the OK tab then click again on the 5th icon of
the task bar to display the define data view screen.
4.2.56 In the Define Data View screen there are Data Vectors and View Vectors.
Remove any view vectors you will not be using or are not available with the HP4145A
(ACCSTRESS is not available with model HP4145A ) by clicking on the appropriate Col X :
View Vectors and making them highlighted blue. Then click on the Remove tab to remove
from viewing. To add a Data Vector to the View Vector list click on the appropriate data
vector and then click on the Add-> tab. When you done removing or adding view vectors you
click on the Done tab upper right of the same widow.
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4.2.57 Next click on the 6th icon of the task bar to plot your data as shown.
4.2.58 The Set Plot View screen will be displayed. Click on X, Y, Z-axis.. tabs to name the X,Y,Z
axes on the graphics display. Enable grid line or invert axis if you want these options.
Click on X, Y, Z-axis.. tabs to name the X,Y,Z axes on the graphics display
Click on Data Groups (X, Y1, Y2) drop down menu to select the SMU data channel
(VK, IK, IA…) the selected channel will be highlighted blue.
Click on the Scale Type drop down menu for X, Y1, Y2 groups and choose linear or log
graphics scaling. To change the Min and Max Values of the SMU data collection by using
the computer keyboard to overwrite the current values . When you are done setting the plot
view click on the Done tab at the bottom left of this menu and the plot will be created.
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4.2.59 The plot is made from whatever data window is currently active. The name of the plot in the
Window title is the setup name followed by a dash and a number. Multiple plots can be
created from the same data set, the number will just increase.
If you want to enlarge or compress the graphics image, click in one corner of the plot and
drag the corner outward or inward. When the image is the size you want, release the mouse
button.
4.2.60 To copy the plot image to your files use Print Screen key on your keyboard.
1)
2)
3)
4)
5)
6)
7)
8)
9)
Press the Print Screen key on your keyboard. It may be labeled [PrtScn].
Open Microsoft Paint program.
Go to the Edit menu and choose Paste.
If prompted to enlarge the image, choose Yes.
Optional: Use your image editor's crop tool to crop out unnecessary portions of
the screen shot.
Go to the File Menu and choose Save As
Save images to the following path
:
C:\Documents and Settings\user\My Documents\USERS FILE\ “name of user”\
Type a file name for the image.
Microsoft Paint program
C:\Documents and Settings\user\My Documents\USERS FILE\ “name of user”\
4.2.61 For more information about the ICS software’s editing tools available for plots such as
changing the axis to linear or log, auto scaling, adding notes to the plot, overlaying plots,
zooming features and set up changes go to section: 4.5 Creating and Editing a Plot,
Transforms and Saving Project Data.
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4.2.62 To view electrical test data table click the data window tab at the bottom left header.
4.2.63 To save the data tables simply select File >> Save As and select the directory and enter a
filename. Metrics ICS version 4.0.0 allows the data to be stored anywhere within the windows
file system
Note: If you want the ICS Backup utility to save the data make sure
it is saved within the C:\ Metrics\ics\project\ USER FILE path
4.2.64 To save the Currently Opened Project simply click on the 8th icon of the task bar as shown.
The file path for automatically saving projects with the Save icon is :
C:\Metrics\ics\projects\USER FILE
4.2.65 To save ICS data tables to MS Excel spreadsheet simply click on the 10th icon of the task
bar as shown.
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4.2.66 Click on the Start tab at the lower left of the MS XP screen to open MS Excel 2010 software.
4.2.67 To paste ICS data table to MS Excel spreadsheet right click the mouse on box A1.
4.2.68 To save the Excel spread sheets simply select File >> Save As and select the directory and
enter a filename. Metrics ICS version 4.0.0 allows the data to be stored anywhere within the
windows file system. Use the following path for saving Excel spread sheets ONLY :
C:\Documents and Settings\user\My Documents\USERS FILE\ “name of user”\
C:\Documents and Settings\user\My Documents\USERS FILE\ “name of user”\
4.2.69 When you are finished measuring the 1st DUT component or measurement site and are
going to measure other DUTs device locations proceed to section 4.2.11 to 4.2.28. to set up
the probes on another DUT’s location on your wafer.
4.2.70 When you are finished measuring all the site locations you will be testing proceed to section
4.4 Systems Shut down HP 4145A, HP4284 and MMC 6000.
Sections 4.4.1 to 4.4.17 to raise the probes off the wafer and the removal of your probes
from the manipulators and then perform system shutdowns.
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4.2.71 To exit the Metrics ICS software click on the File header on the top left of the screen, the File
tab will open then click on the Exit option to exit the software.
4.2.72 The software will prompt you to save parameter changes for the measurement files you
created and modified. Click on Yes to save, No or Cancel.
4.2.73 Clicking on Yes to save will display the file path as in section 4.2.62 to 4.2.63.
Simply select File >> Save As and select the directory and enter a filename.
Metrics ICS version 4.0.0 allows the data to be stored anywhere within the windows file
system . Close any remaining open ICS files.
Note: If you want the ICS Backup utility to save the file and data make sure
it is saved within the C:\ Metrics\ics\project\ USER FILE path
4.2.74 Close the Metrics ICS software by clicking on the Close button at the upper right corner.
The ICS software will close and the MS XP desktop screen will be displayed.
4.2.75 Shutdown the Teaching Fab XP computer by clicking the desktop start tab and then the
Turn Off Computer button as shown.
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4.3. Operating the Hewlett Packard 4248 Precision LCR Meter with the
Micromanipulator Probe Station model 6000
4.3.1 If you have not completed the System Pre-Checks in steps 4.1.1 – 4.1.5 then you must
complete those before proceeding.
4.3.2 Turn ON the TF electrical test computer by pressing the front power button. At the Windows
XP login screen type in the password using: test. Computer will boot up to MS desktop
screen.
password use: test
TF Electrical Test computer MS screen.
4.3.3 Check to ensure the Agilent 82357A USB/GPIB interface converter power up sequence
completes normally (the TF electrical test computer needs to be ON). Initially only the red
FAIL LED should be ON. After a few seconds all three LEDs should be ON. After another
minute only the green READY LED should be ON. If all three LEDs remain ON notify staff to
check.
After a minute only the green READY LED should be ON
4.3.4 For the Hewlett Packard 4284 check to ensure the four-terminal pair bnc’s are connected the
bottom of the bnc mounting plate and two of the micromanipulator bnc cables are connected
properly to the top the bnc mounting plate shown. If the manipulator bnc cables are
connected to the triac-bnc converter box then disconnect two of them and connect the cables
to the top of the bnc mounting plate. The bnc plate is labeled H(pot/cur) and L(pot/curr) .
The bnc connectors will lock in.
Hewlett Packard 4284 top and bottom side of the bnc plate
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4.3.5 Turn HP4284 front panel power switch to the ON position by moving the switch to the ON
position.
4.3.6 Check to ensure the instruments cooling fan is ON at the back of the HP4284.
If the fan is not ON turn instrument’s power OFF and notify staff.
4.3.7 Allow the instrument to warm up 30 minutes.
4.3.8 Carefully place and position the DUT at center of the chuck per sections: 4.2.7 to 4.2.23.
Leave 5mm-10mm separation between the DUT surface and the probes to perform an
OPEN and SHORT test.
Position the DUT at center of the chuck per sections: 4.2.7 to 4.2.23
4.3.9 On the TF electrical test computer at the MS Windows desktop screen double click on the MT
ICS icon to open the Metrics software.
TF Electrical Test computer MS screen and MT ICS icon
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4.3.10 The Metrics software will boot up to and show a grey main menu screen with task bar at the
top header as shown.
Task bar at the top header
4.3.11 If you are going to run a previously saved ICS program click on the File tab to open the
Projects file to access the saved program. The previously saved ICS programs have saved
all previous configuration and testing conditions/parameter settings. Proceed to
section 4.3.23 to 4.3.27 to verify the program, perform any open and short test. To connect,
configure and test the communication of the instrument proceed to the next step 4.3.12
4.3.12 Click on the first icon on the task bar as show to connect an instrument.
In the Instruments menu the left window list the available instruments. Use the scroll down
tab to finds hp4284. Click on hp4284 it will be highlighted blue and then press
the Connect -> button.
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4.3.13 Next click on the Config... button to check the configuration setting and the communication
between the software and HP4284 instrument. Verify the GPIB address is set to 16, if it is not
set to 16 call staff to check. In the Options window click on the 001 Power Amp/ DC Bias
bubble to enable this configuration. Check the cable length is set to 1 meter, if it is not 1 meter
click on the cable length drop down menu and change to 1 meter.
4.3.14 Verify the communication by clicking on Poll button. The HP4284 the
led will flicker.
If
led flickers then the communication is working, then click on the OK tab.
Click on instruments screen OK to exit.
led flickers then
the communication is working
Click on instruments screen OK to exit.
4.3.15 To create a new program click on the second icon on the task bar as shown.
The Set Up editor menu will open automatically, click on the New button as and enter a file
name for this measurement test and press OK as shown.
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4.3.16 To measure the Impedance |Z| or Admittance |Y| of capacitors ,inductors, resistors, circuits
and other components click on the Devices box to choose the CAP device type.
Use the arrow up and down slide bar to scroll through all the device type options clicking on
the CAP device type. Click the OK button to and get back to Set Up editor main screen.
4.3.17 Next in the Set Up editor menu click on the Sources tab, a Source Units sub menu will drop
down.
4.3.18 To verify ICS is connected to HP4284 for this file name click on the Instruments tab to check
if HP4284 is displayed.
4.3.19 In the Source Units sub menu click on the Source Units tab to program and electrically
connect your DUT to the appropriate probe-manipulator high and low signal cables
labeled H(pot/cur) and L(pot/curr). After clicking on the Source Units tab the two terminals
will be displayed in the Source Units window HP4284 CMH and HP4284 CML .
4.3.20 Click on HP4284 CMH, it will be highlighted blue then click on box A (blue box) of the
device to designate the manipulator labeled H(pot/cur) as HP4284 CMH .
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4.3.21 Click on HP4284 CML in the Source Units window and click on box K (blue box) of the
device to designate the manipulator labeled L(pot/curr) as HP4284 CML.
4.3.22 The CMH and CML icons will be displayed next to box A and K as shown. Then click on the
Done box in the Source Units window when you are finished connecting CMH and CML to
the DUT.
4.3.23 Next Click on CMH icon to open the HP4284 Setup page to enter the HP4284
measurement conditions you want to test the DUT site with.
HP4284 Setup page
A list of HP4284 measurement conditions, functions and ranges available are listed below
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4.3.24 The HP4284 measurement setup parameters and conditions, parameters definition,
parameter functions ,operating ranges and the measurement display fields available are
listed in the two figures below.
HP 4284 notes : ALC ,Signal Level Monitors
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4.3.25 When you are you are done entering the HP4284 measurement setup parameters and
conditions for CMH box A press OK to return Setup Editor Screen.
If you want to discontinue the Setup press Cancel to return also to the Setup Editor screen.
press OK.
4.3.26 In the Setup Editor Screen CML box K requires no entries, if you click on CML icon the
following message will be displayed “No Parameter setting are required”
4.3.27 In the Setup Editor Screen click Options to perform the Open and Short compensation tests.
If you want to skip these test click on Done to continue.
4.3.28 If you click on Options the following sub-menu is displayed.
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4.3.29 Click on Open bubble to enable the Open circuit compensation test, then click on the
Cal at All Frequencies box to enable the Open test to be performed over a range of
Frequencies or run the test at single frequency.
Note: Leave 5mm-10mm separation between the DUT surface and the probes to
perform an OPEN test.
10mm to 20mm above the DUT
Note : Open correction compensates for stray Admittance due to the test fixture.
Note: Enabling the Cal at All Frequencies : option will collect open data at 48 preset
frequencies listed below , or you can collect data at a single frequency.
4.3.30 After you have set up your Open compensation test click on Calibrate to perform the test.
The test may take up to 2 minutes to complete.
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4.3.31 To perform the Short compensation test click on the Short bubble, then click on the
Cal at All Frequencies box to enable the Short test to be performed over a range of
frequencies or run the test at single frequency
Note: The Short compensation test the probes connection contacts need to shorted
together on the DUT conduction pad, conduction line or a shorting plate and the
probes should be shorted at a minimum separation distance to each other.
Per section 4.2.21 to 4.2.26
Do not go beyond this final downward
motion or you will bend the probe tips affecting your
measurements and causing damage the probe tip.
Note : Short correction compensates for stray resistance and inductance due to the test
fixture.
Note: Enabling the Cal at All Frequencies : option will collect open data at 48 preset
frequencies listed below , or you can collect data at a single frequency.
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4.3.32 After have set up your Short compensation test click on Calibrate to perform the test.
The test may take up to 2 minutes to complete.
4.3.33 To close HP4284 calibration sub menu click on the Close tab to return to the Setup Editor
screen.
4.3.34 To copy, delete, create time based measurements or make a measurement test sequence go
back to sections 4.2.41 to 4.2.46 and follow instructions.
If you are ready to run the test click on the Done tab.
4.3.35 To make any last probe placement adjustments go back to section 4.221 to 4.2.28.
4.3.36 To run an electrical test or a sequence test on the DUT click on the fourth icon of the
task bar as shown.
4.3.37 The Measurement pop-up window will be displayed as shown.
For time based measurements you must specify the measurement mode as Time Meas
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4.3.38 The default measurement mode is STANDARD.
4.3.39 To run the electrical test on the DUT click on the Single arrow button.
►
4.3.40 During the measurement the HP 4284A’s yellow
led flickers, and the HP 4284A LCD
displays the running test. The LCD will display the LCR measurements, DC bias sweeps,
oscillator levels ,frequencies and an executing measurement scan message will be displayed
on the bottom header of the ICS main screen. Allow sufficient time for the measurement scan
to complete. When the measurement is completed the scan message at the bottom header
will be removed.
4.3.41 To stop the electrical tests in progress click the Stop button.
4.3.42 After the electrical test has been completed the scan message at the bottom header will be
removed and test file name and results will be displayed on the lower header as shown.
.
4.3.43 To define Data View Vectors (Capacitance, Inductance, DC bias, oscillator levels,
frequencies, Q, D, Z, Y, etc...) Set Plot View screen, plot your data, save graphics and data
to MS Excel go to sections 4.2.54 to 4.2.68 and follow the instructions.
Sections 4.2.54 to 4.2.68
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4.3.44 When you are finished measuring the 1st DUT component or measurement site and are
going to measure other DUTs device locations proceed to section 4.2.11 to 4.2.28. to set up
the probes on another DUT’s location on your wafer. Then go to sections 4.3.16 to 4.3.43 to
check or change measurement conditions, run an open and short tests (optional) if you
desire and run the test.
4.3.45 When you are finished measuring all the site locations you will be testing proceed to section
4.4 Systems Shut down (HP 4145A, HP4284 and MMC 6000)
Sections 4.4.1 to 4.4.17 to raise the probes off the wafer and the removal of your probes
from the manipulators and then perform instrument and computer shutdowns.
4.4 Systems Shut down (HP 4145A, HP4284 and MMC 6000).
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4.4. Systems Shut down (HP 4145A, HP4284 and MMC 6000 )
4.4.1 Do not move the platen height or the stage X, Y and theta rotation until the all the
probes have been raised from the surface of the DUT.
Do not move the platen height or the stage X, Y and theta rotation
4.4.2 Extremely slowly raise the 1st probe tip by rotating the manipulator/probe holder top
thumbscrew CW several turns to raise the probe tip above the DUT’s device surface
to 10mm to 20mm separation distance.
Turn thumbscrew CW several turns to raise the probe tip
above the DUT to 10mm to 20mm separation distance.
4.4.3 Repeat this step (4.4.2) for the rest of the manipulator/probes that are in contact with the
DUT’s device surface.
4.4.4 Raise platen height by slowly rotating the platen Z knob CW and raise the manipulator
probe holder higher by rotating the manipulator’s top thumb screw CW until to have about
1/2" to 1 " clearance between the chuck and probe holder; otherwise you may break or
damage the prober tips and probe holders during the removal of the DUT .
Platen Z knob and Manipulator Thumbscrew CW to obtain ½” to 1” clearance
4.4.5 Turn the wafer vacuum switch to the OFF position and carefully remove your DUT from the
chuck.
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4.4.6 If you have more DUT’s to test on the HP 4145A or the HP 4284 go back to sections
4.2.11 to 4.2.28. to set up the probe contacts onto the next DUT.
4.4.7 To run the next electrical test using the HP 4145A go to sections 4.2.28 to 4.2.65.
4.4.8 To run the next electrical test using the HP 4284 go to sections 4.3.1 to 4.3.43.
4.4.9
If you are finished using the electrical station turn the HP 4145A or the HP 4284 power OFF
by pressing the power switch button out (HP 4145A) or turning the power switch to the OFF
position(HP 4284) before removing your probes.
Turn the HP 4145A or the HP 4284 power OFF before removing your probes.
4.4.10 Disconnect any of the manipulators-probe holder’s outer grounding lead from the platen
terminal connector post. Some of these connectors are alligator or small set screw type.
4.4.11 Carefully move the manipulators away from the stage and microscope to have better access
to the probes then carefully remove the Micromanipulator type 7 probe tips from the prober
holder by gently holding the probe holder and pulling the spring-load locking mechanism
slowly backwards and carefully removing the probe tip through the bottom hole. Be careful
not to accidentally bump the thinner measuring tip or it may bend or break.
When the probe is completely removed slowly release the spring-load mechanism and set
the manipulators back on the platen.
The probe holders are very expensive so use extra caution
when handing the probe holders, probe holding springs locks
and when inserting and removing the probe tips.
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4.4.12 If you have not exited the Metrics ICS software then click on the File header on the top left of
the screen, the File drop down menu will open then click on the Exit option to exit the
software.
4.4.13 The software will prompt you to save parameter changes for the measurement files you
created and modified. Click on Yes to save, No or Cancel.
4.4.14 Clicking on Yes to save will display the file path as in section 4.2.62 to 4.2.63.
Simply select File >> Save As and select the directory and enter a filename.
Metrics ICS version 4.0.0 allows the data to be stored anywhere within the windows file
system . Close any remaining open ICS files.
Note: If you want the ICS Backup utility to save the file and data make sure
it is saved within the C:\ Metrics\ics\project\ USER FILE path
4.4.15 Close the Metrics ICS software by clicking on the Close button at the upper right corner.
The ICS software will close and the MS XP desktop screen will be displayed.
4.4.16 Shutdown the Teaching Fab XP computer by clicking the desktop start tab and then the
Turn Off Computer button as shown.
4.4.17 Enter the required information into the logbook.
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4.5. Creating and Editing a Plot, Transforms and Saving Project Data
4.5.1 After the electrical test has been completed the scan message at the bottom header will be
removed and test file name and results will be displayed on the lower header as shown.
4.5.2 To define Data View Vectors (Capacitance, Inductance, DC bias, oscillator levels, frequencies,
Q, D, Z, Y, etc...) Set Plot View screen, plot your data, save graphics and data to MS Excel go
to sections 4.2.54 to 4.2.68 and follow the instructions.
Sections 4.2.54 to 4.2.68
4.5.3 The plot is made from the data window is currently active. The name of the plot in the
Window title is the setup name followed by a dash and a number. Multiple plots can be created
from the same data set, the number will just increase.
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4.5.4 To enlarge or compress the graphics image, click in one corner of the plot and drag the corner
outward or inward. When the image is the size you want, release the mouse button.
4.5.5 The plot window contains many editing tools for the plot.
 The Axis button reveals the tools to change the axis from linear to logarithmic and to
auto scale the plot.
 The Cursors button allows the addition and control of cursors on the plot.
 The Fits button allows the application of curve fits related to the cursors.
 The Opts button presents several options for adding notes to the plot, overlaying plots,
zooming features, and setup changes.
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4.5.6 To change the colors of the Axis, Numbers, Labels ,Titles and Curves right click on an axis to
open the drop down menu to change colors as shown.
4.5.7 To add or modify graph Title names and comments right click on the top title or click on the
Title icon in the plot window.
4.5.8 The editing functions are discussed in great detail within the ICS Reference Manual.
4.5.9 To create a transform or calculation of the data vectors click on the 7th icon on the task bar as
Shown to open the Transform Editor.
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4.5.10 Clicking on the Transform Editor icon the Transform Editor will be displayed.
4.5.11 The Transform Editor has several areas:
Transform Entry Box:
The location to enter a
transform or calculation
Edit Constants Button:
Allows constants to be
defines and edited
Defined Transform List:
A list of all transforms
defined for this setup
Function List:
Predefined functions
available for the
calculation of
parameters
Vector List:
A list of the measured and
calculated data vectors
Constants List:
A list of constants that
can be used in the
calculation
Action Buttons:
Controls for the saving of
transforms, deleting transforms
and exiting the transform editor.
4.5.12 To create a Transform calculation enter the calculation in the "Transform" box. The
calculation must be in the form result = function (vector).
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4.5.13 Examples of Transforms:
 Power=ABS(VA)*ABS(IK)
 Resistance= ABS(VA/IA)
 GM=DELTA(IG)/DELTA(VG)
 Q= 1/D
The calculation must be in the form result = function (vector).
4.5.14 Then click the Save button to save the new calculation.
4.5.15 After all the calculations have been saved, click the Done button.
4.5.16 To define the new Transform calculation as a Data View Vectors and Set Plot View screen,
plot your Transform, save graphics and data to MS Excel go to sections 4.2.54 to 4.2.68
and follow the instructions.
Sections 4.2.54 to 4.2.68
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5 Technical Information
5.1
5.1.1
HP 4284A Impedance Parameters
Impedance is a parameter used to evaluate the characteristics of electronic components.
Impedance (Z) is defined as the total opposition a component offers to the flow of an
alternating current (AC) at a given frequency.
Impedance is represented as a complex, vector quantity. A polar coordinate system is used
to map the vector, where quadrants one and two correspond respectively to passive
inductance and passive capacitance. Quadrants three and four correspond to negative
resistance.
The impedance vector consists of a real part, resistance (R), and an imaginary part,
reactance (X).
5.1.2
In some In some case, the reciprocal of Impedance (Admittance), Y is used.
As Z (Impedance), Y contains a real and an imaginary part, and is
expressed in rectangular form as Conductance and Susceptance, or in polar form as
magnitude of Admittance and Phase. The following are expressions for Admittance
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5.1.3 For your DUT serial or parallel circuit model , the HP 4284A will measure the same total
Impedance but the resistance and reactance calculation,L,C,D,Q will be different depending
on the measuring mode you have selected ( serial or parallel measuring mode). Choosing the
correct measuring mode is critical for attaining accurate measurements.
5.1.4 Oscillator level setting and HP4284 ALC ( Automatic Leveling Control) function:
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5.1.5 The HP4284 measurement setup parameters and conditions, parameters definition,
parameter functions ,operating ranges and the measurement display fields available are
listed below.
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5.1.6 The HP4145A Source and measuring parameters definitions, functions and operating
ranges are listed below.
Note: Most SMU's can only measure the signal that is not being sourced. Therefore in this case we
have selected the Stimulus to be Current resulting in the Voltage being measured. The values
returned for Current in this case would be the calculated current steps. The opposite is true when the
Stimulus mode is set to Voltage. The Sweep Time parameters are to control the rate of the sweep.
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5.1.7 Micromanipulator probe tips products, applications and prices shown below.
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