Non-contact 3D metrology for aspheric and free - Pro

Non-contact 3D metrology for aspheric and free - Pro
Confocal Tracking
The measurement principle is based on Sensofar’s
proprietary algorithm Confocal tracking. Using structured
illumination and high numerical aperture microscope
objective allows a very precise determination of sample
focus. Once precise focus has been determined the
sample is moved along the horizontal axis while the
sensorhead executes a coordinate move along the
vertical axis to keep the sample in focus. The sample
profile is reconstructed by coupling the movement of the
horizontal and vertical axis.
1
2
3
Applications
Non-contact metrology plays a key role in aspheric and
free-form optics manufacturing industries, either in
machined optics and molds or molded optics applications.
Closed Loop Tracking
Optical
Linear
Scale
Confocal Sensorhead
Non-contact
3D metrology
for aspheric and
free-form optics
PLu apex is able to
measure any optical
surface from aspheric
to flat or free-form optics.
Its innovative design,
based on Sensofar’s core
technology, confocal
profilometry, allows
a non-contact and
high precision
measurement.
Machined optics & molds
Astronomical instrumentation
Digital cameras and projector lenses
Photolithography
LED
SLIT
CCD
Z
Stage
Objective
Sample
XY
Stage
System diagram
Measurement sequence
Automatic lens
center finding tool
Tilt alignment
3D
measurement
Automatic 0/90º
measurement
65º
1mm/s
Fast measurement across
the sample (1mm/s typical)
Ability to measure
up to 65º slope
Molded optics
Blu-ray and DVD lenses
Smartphone and tablet camera lenses
Optical fiber connector lenses
Contact and intraocular lenses
Software SensoTRACK
Powerful curve
analysis software
SensoTRACK software provides a user-friendly interface simplifying
sample measurement and a basic set of tools for displaying and
analyzing data. It also assists the user when aligning the sample for
measurement. A powerful analysis module provides form assessment
with respect to a design or a reference form.
Non-contact
3D profiler
for aspheric
and free-form
optics
Specifications
Displacement Range XY: 100 x 100 mm Z: 50 mm
Camera GigE CCD 768x576 pixels @ 50 Hz
Light source Green LED
Measurement objectives 10X – 100X
Measurement length (XY) 0.1 – 100 mm
Measurement range (Z) Up to 50 mm (1) (2)
Measurement speed 0.01 – 1 mm/s
System noise 1 nm
Radius uncertainty < 0.01 %
Form accuracy < 100 nm (3)
Sample Maximum Weight: 15 Kg
Maximum Height: 50 mm
System Dimensions: 550 x 580 x 770 (W x D x H)
Power: 115/230V AC
Anti-vibration system Passive air isolation (4)
SENSOFAR is a leading-edge
technology company that has the
highest quality standards within
the field of surface metrology.
Environment Temperature: 20 ºC
Operating System Microsoft Windows 7
Measurement type 2D, XY cross 2D, 3D
Software capabilities Powerful curve analysis, export data in txt, advanced reporting
Tip-tilt Manual or Motorized
1 See objectives table 2 Sample geometry dependent
3 Ttypically smaller than 50 nm (4) optional
Dimensions
(units: mm)
770
Sensofar Metrology provides high-accuracy optical profilers
based on confocal, interferometry and focus variation techniques,
from standard setups for R&D and quality inspection laboratories
to complete non-contact metrology solutions for in-line
production processes. Sensofar Metrology offers technology that
enables our customers to achieve real breakthroughs, particularly
in semiconductor, precision optics, data storage, display devices,
thick and thin film and materials testing technology fields.
The Sensofar Group has its headquarters in Barcelona, also known
as Spain’s technological heart. The Group is represented in over
20 countries through a global network of partners and has its
own offices in Asia and the United States.
HEADQUARTERS
SENSOFAR METROLOGY
Parc Audiovisual de Catalunya
Ctra. BV-1274, KM 1
08225 Terrassa (SPAIN)
T: +34 937 001492
F: +34 937 860116
info@sensofar.com
www.sensofar.com
SALES OFFICE
SENSOFAR USA
8655 E Via De Ventura
Suite G168
Scottsdale, AZ 85258 (USA)
T: +1 800 5303097
F: +1 419 7451506
info@sensofarusa.com
550
580
www.sensofarusa.com
Objectives
Working distance
SALES OFFICE
Numerical aperture
Max. slope
100x EPI 0.95
0.3 mm
0.95
± 65º
100x EPI
1.0 mm
0.90
± 60º
100x LWD
2.0 mm
0.90
± 60º
100x ELWD
4.5 mm
0.80
± 45º
100x SLWD
10.0 mm
0.60
± 35º
SENSOFAR ASIA
Room 102, Building C, No. 838
GUANGJI Road, HONGKOU District
Shanghai, 200434 (PR CHINA)
T: +86 216 1400058
F: +86 216 1400059
info.asia@sensofar.com
www.sensofar.com
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