MicroTorr 11D Vacuum Barrier Corporation Diffusion Pump Service

MicroTorr 11D Vacuum Barrier Corporation Diffusion Pump Service
VACUUM BARRIER CORPORATION
Barten Lane
Woburn, Massachusetts 01801-5601
(781) 933 3570
OPERATION AND MAINTENANCE MANUAL
MICROtorr 11 HIGH VACUUM PUMPING STATION
P/N 40110 AND 40220
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
TABLE OF CONTENTS
Page
I.
Contents
4
II.
Description
4
III.
Installation
5
IV.
Operation
6
V.
Normal Operation Check List
7
VI.
Routine Maintenance
8
VII.
Troubleshooting Guide
9
VIII.
Spare Parts List
11
IX.
Accessory Items
12
X.
Technical Data
13
XI.
APPENDIX
A-1
A-2, A-3:
Vacuum Pump Data
A-4:
Vacuum Pump Parts
A-5:
Port Termination Pump Connections
A-6:
Separator Pump Connections
A-7:
Bayonet Connections
VBC Dwg. No. A-39176:
Wiring and Hook-Up DiagramVacuum Pump (115V/60Hz, 220V/50Hz)
PUMP MANUAL - PAGE 3
Apr-99
VACUUM
BARRIER
CORPORATION
I.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
CONTENTS
The box should contain the following items:
1
High vacuum pumping station
1
Foreline hose
P/N 16508
1
Copper adapter
P/N 15352
1
Exhaust port adapter
P/N 16389
1
Tygon vacuum hose, pre-greased with Apiezon
P/N 7130
2
Hose clamps
P/N 6790
1
Installation and Maintenance Manual
NOTE:
II.
115V/60Hz
or 220V/50Hz
P/N 40110
P/N 40220
The Alcatel mechanical pump manual is appended at the end
and can be used for supplemental information.
DESCRIPTION - Refer to A-2 Thru A-4 in Appendix
MICROtorr 11 is a small, highly reliable, high vacuum pumping station. Primary use of the
MICROtorr 11 is for the maintenance of an insulating vacuum in SEMIFLEX® cryogenic pipe
systems. It is a complete unit requiring only connection to the annulus of the system to be
evacuated, and an appropriate source of electric power.
The basic unit consists of a two-stage mechanical forepump, air-cooled oil diffusion pump and
cooling fan, all assembled on a small base which includes rubber foot pads.
Internally, the mechanical pump is equipped with an "anti-suckback" valve, which effectively
isolates the high vacuum side when the shaft ceases to rotate, as would occur with power failure or
motor problems.
Accessories available include Convectron vacuum measuring tube and gauges, manual operated
vacuum valve, and exhaust port oil mist filter.
PUMP MANUAL - PAGE 4
Apr-99
VACUUM
BARRIER
CORPORATION
III.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
INSTALLATION - Refer to A-5 Thru A-7 in Appendix
A.
Remove the six lag screws from the bottom of all four sides which secure box cover to base
(as noted on outside of box cover). Remove box cover.
B.
Unfasten the four lag screws from wooden braces securing pump base to box base.
C.
Remove clamp, centering ring and brass cap from mechanical pump outlet (red dot) and
mount Exhaust Port Adapter (P/N 16389) matching red dot, with clamp and centering ring.
CAUTION:
PUMP MUST NEVER BE OPERATED WITH EXHAUST
PORT CAPPED OR PLUGGED.
D.
Remove clamp, centering ring and brass cap from mechanical pump inlet. Remove black
dust caps from diffusion pump connections.
E.
Connect Foreline Hose (P/N 16508) between mechanical pump inlet and diffusion pump
(matching blue dots) using the standard clamps and centering rings.
F.
55 cc of Diffusion Pump Oil (P/N 3396) has been installed prior to shipment.
G.
Connect Copper Adapter (P/N 15352) to vertical diffusion pump port with clamp and
centering ring (matching yellow dots).
H.
Remove dust plugs from Tygon Hose (P/N 7130) and insert over end of Copper Adapter
(P/N 15352). Tighten hose clamp.
I.
Connection from Tygon open end to the appropriate SEMIFLEX® piping or phase
separator vacuum connection should be made with 1" nominal copper (1.125" OD or 28
mm OD). This line must be vacuum tight, clean and any intermediate joints must be brazed
with silver solder (NOT soft soldered). VBC recommends use of Tygon hose pump
connection as shown on Fig. 1 to assure proper alignment of flanges and to facilitate
removal of pump for servicing in the future.
NOTE:
Pumping station should be as close as practical to system to be evacuated.
However, where circumstances dictate a connection length greater than 70 feet,
the size of the tubing must increase to assure adequate pumping. Consult VBC
with specific information.
J.
A suitable amount of mechanical pump oil has been added at the factory. However, a
check of the oil level should be made after the pump has reached operating temperature
and conditions.
K.
The unit should be protected from the environment and maintained within the 40°F to
100°F (5°C to 40°C) operating temperature range.
PUMP MANUAL - PAGE 5
Apr-99
VACUUM
BARRIER
CORPORATION
L.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
Electrical Considerations -- The vacuum pump is provided with overcurrent protection..
See the following chart.
Voltage
Current Protection Required
120 VAC 50-60 Hz
220 VAC 50-60 Hz
IV.
20 Amps
16 Amps
OPERATION
A.
Starting condition is with both pump switches OFF, power connected and all vacuum piping
and connections secured.
B.
Turn ON mechanical pump. At first a "popping" or gurgling noise is heard, accompanied by
noticeable exhaust vapor from the exhaust port. This is normal and should slowly
disappear as the vacuum improves. Failure of the "popping" to slowly diminish may be due
to:
1.
Vacuum leak in system
2.
Wet or dirty system
3.
Pump oil level low
4.
Faulty pump
The mechanical pump is equipped with a gas ballast valve. If moisture is present or
suspected, pump down may be enhanced by opening the valve (turn counterclockwise) for
about 1/2 hour, then closing and observing vacuum change.
C.
When "popping" and exhaust vapor disappear (within one to two hours per 100 feet of
SEMIFLEX® piping or when the pressure drops below 100 millitorr for a system with a
vacuum gauge) turn ON diffusion pump. At this time leave mechanical pump ON.
Pressure should continue to drop and stabilize in the low millitorr range and pump
conditions should be as shown in Section V. Normal Operation Check List.
D.
The pumping unit is designed for long, trouble-free life and should be left running
continuously (24 hours/day) for optimum performance.
E.
Routine maintenance should be performed periodically to insure optimum performance
and long system life. See Section VI.
PUMP MANUAL - PAGE 6
Apr-99
VACUUM
BARRIER
CORPORATION
V.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
NORMAL OPERATION CHECK LIST - After initial pumpdown
ITEM
CONDITION
1.
Mechanical pump switch
ON
2.
Diffusion pump switch
ON
3.
Gas ballast valve
CLOSED (CLOCKWISE)
4.
Oil level and color
Center of sight glass, Light amber color
5.
Mechanical pump temperature
Approximately 95°F (35°C)*
6.
Motor temperature
Approximately 100°F (38°C)*
7.
Diffusion pump cooling fan
Operating
8.
Gurgling or "popping" noise
None
9.
Oil leakage
None
*With ambient temperature 70°(20°C)
VI.
ROUTINE MAINTENANCE
A.
Periodic Inspection
ITEM
B.
FREQUENCY
1. Review items on Normal Operation
Check List
Every month
2. Change mechanical pump oil
Every 3 months
3. Change diffusion pump oil
Every 2 years or if system was down
because of vacuum failure.
Oil Change - Mechanical Pump
1. Isolate pumping station from system being evacuated by closing the appropriate valves.
2. Shut OFF diffusion pump.
3. Wait 20 minutes then turn OFF mechanical pump.
PUMP MANUAL - PAGE 7
Apr-99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
4. Draining the pump - An oil change is most easily accomplished when the pump is warm
and the oil is less viscous. Remove drain plug allowing old oil to drain into a container.
At this point run the pump for several seconds to expel oil trapped inside the pump
stages. Replace drain plug.
5. Refilling the pump - Open fill plug and add Alcatel 100 oil to bring oil level to center of
sight glass (approx. .85 liters). Re-install fill plug. Turn ON mechanical pump with local
isolation valve still closed. A gurgling noise is characteristic when air is drawn through
the pump. It should disappear quickly as pressure within the pump is reduced.
C.
Oil Change - Diffusion Pump
1. Isolate pumping station from system being evacuated by closing appropriate vacuum
valves.
2. Turn OFF diffusion pump.
3. After 20 minutes turn OFF mechanical pump and disconnect power.
4. Disconnect pumping station from connecting line to system being evacuated.
5
Disconnect foreline hose between mechanical pump and diffusion pump.
6. Remove two screws through diffusion pump mounting ears.
7. Carefully lift the pump and tip it to empty out oil. The electrical leads should be long
enough to do this without their being removed or disconnected.
8. Put small amount (about 4 oz, 120cc.) of acetone or alcohol in the vertical port to flush
remainder of oil. Shake then empty as before. Repeat flushing once more.
9. Dry inside of diffusion pump with dry nitrogen.
10. Reposition pump on mount and re-install the two screws through the ears.
11 Pour 55 cc. of diffusion pump oil (P/N 3396) into the vertical port.
12. Reinstall foreline hose and reconnect the pumping station to the system being
evacuated.
13. Reconnect power, start mechanical pump, and follow the procedure described in Section
IV. Operation, above. NOTE: As the diffusion pump oil heats up, the pressure will
rise as a result of outgassing. This is normal, and the pressure will soon resume
its drop toward the lower end of the scale.
PUMP MANUAL - PAGE 8
Apr-99
VACUUM
BARRIER
CORPORATION
VII.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
TROUBLESHOOTING GUIDE
SYMPTOM A.
Poor vacuum accompanied by "popping" and smoking.
POSSIBLE CAUSE
ACTION
l.
Large system volume
1.
Allow appropriate time.
2.
Large leak in system.
2.
Leak check and repair.
3.
Wet or dirty system.
3.
Open gas ballast valve. Change oil in mechanical pump.
4.
Low mechanical pump oil level.
4.
Add oil.
5.
Faulty pump.
5.
Troubleshoot. Contact VBC
SYMPTOM B.
Poor vacuum but without noticeable "popping" or smoking.
POSSIBLE CAUSE
ACTION
1.
Small leak in system being evacuated
1.
Leak check system and repair.
2.
Diffusion pump switch off.
2.
Turn switch on.
3.
No oil in diffusion pump.
3.
Add oil.
4.
Diffusion pump heater burned out.
4.
Replace heater.
5.
Fan burned out.
5.
Replace fan.
SYMPTOM C.
Unit will not operate.
POSSIBLE CAUSE
ACTION
1.
No power.
1.
Check fuses and main power
2.
Mechanical pump is seized.
2.
Replace pump. Contact VBC
3.
Motor burned out.
3.
Replace pump. Contact VBC
SYMPTOM D.
Diffusion pump body cold even though power & system are on.
POSSIBLE CAUSE
ACTION
1.
Diffusion pump heater burned out.
1.
Electrically test; replace
2.
Faulty wire connection.
2.
Electrically test; repair.
PUMP MANUAL - PAGE 9
Apr-99
VACUUM
BARRIER
CORPORATION
SYMPTOM E.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
Fan does not operate though power and switch are on
POSSIBLE CAUSE
ACTION
1.
Fan motor burned out.
1.
Replace.
2.
Faulty wire connection.
2.
Electrically test; repair.
SYMPTOM F. Evidence of oil accumulation around unit or in mounting base cavity.
POSSIBLE CAUSE
ACTION
1.
Splash from initial pump-down
1.
Clean up and observe for several days.
2.
Shaft seal leakage.
2.
Replace seal. Contact VBC
3.
Main seal leakage.
3.
Replace seal. Contact VBC
4.
Sight glass leakage.
4.
Replace seal. Contact VBC
PUMP MANUAL - PAGE 10
Apr-99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
VIII. SPARE PARTS LIST
QTY
DESCRIPTION
VBC P/N
1
MICROtorr 11 High Vacuum Pump System
115V/60Hz
220V/50Hz
40110
40220
1
Heater - Diffusion Pump
115V/60Hz
220V/50Hz
4275
4842
1
Oil, Mechanical Pump - 1 Liter
16647
1
Oil, Diffusion Pump - 55 cc
3396
1
Fan
1
Clamp - Vacuum flange
14770
1
Centering Ring Assembly
14768
1
O-Ring - for Centering Ring
15341
1
Plastic Blank Flange
17841
1
Copper Adapter
15352
1
Tygon Hose Assemlby
7130
1
Hose Clamp
6790
1
Foreline Hose
16508
1
Exhaust Port Adapter
16389
1
Rocker Switch Body
36970
1
Rocker Switch Operator
36971
1
Minor Maintenance Kit
39638
1
Major Maintenance Kit
39639
1
Exhaust Oil Mist Replacement Filter
(Set of five)
31614
115V/60Hz
220V/50Hz
PUMP MANUAL - PAGE 11
16380
16496
Apr-99
VACUUM
BARRIER
CORPORATION
IX.
QTY
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
ACCESSORY ITEMS
DESCRIPTION
VBC P/N
2
Convectron Gauge Tube
23399
1
Vacuum Gauge With Digital Readout
Single set point (Unmounted)23397
23397
1
Vacuum Gauge With Digital Readout
Single set point (Console)
23398
1
Vacuum Ball Valve - Manual
15099
1
Exhaust Oil Mist Filter
31613
PUMP MANUAL - PAGE 12
Apr-99
VACUUM
BARRIER
CORPORATION
X.
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
TECHNICAL DATA
MICROtorr 11 High Vacuum Pumping Station
Part Number
40110
40220
Voltage - Single Phase
115V/60Hz
220V/50Hz
Current
8.2 Amps.
4.3 Amps.
Power
950 Watts
Dimensions - Overall Length
Overall Width
Overall Height
16.5"
8.0"
22.75"
420 mm
205 mm
580 mm
Weight
65 Lbs.
29.5Kg.
Shipping Weight
97 Lbs.
44.1 Kg.
Mechanical Pump Speed
3.4 CFM
4.8 M3/Hr.
Diffusion Pump Speed
11 Liters/Sec.
Ultimate Vacuum
9x10-6 Torr.
Oil - Mechanical Pump - Capacity .
.83 Liters
Oil - Mechanical Pump - Type
Alcatel 100 or Equivalent
Oil - Diffusion Pump - Capacity
55 cc.
Oil - Diffusion Pump - Type
Dow-Corning DC-704 or Equivalent
Ambient Temperature Operating Range
40°F to 100°F (5°C to 40°C)
Airborne noise emission level
Less than 70 dBA
Altitude Rating
Equipment capable of operation at
altitudes of 3000M (9840 ft)
Humidity Rating
Operates at 30%-90% Relative Humidity
(Noncondensing)
PUMP MANUAL - PAGE 13
Apr-99
X.
Vacpump.doc
APPENDIX.
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
MICROtorr 11 VACUUM PUMP
DIFFUSION
PUMP
MECHANICAL
PUMP
MICROtorr 11 ENGINEERING DATA
Part Number
Ultimate Vacuum
Diffusion Pump Speed
Mechanical Pump Speed
Electrical
Dimensions
Length
Width
Height
Weight
Wiring Diagram
40110
10-6 torr range
11 liters/sec
3.4 CFM
115 VAC, 60 Hz, 8.2 amps
40220
10-6 torr range
11 liters/sec
4.8M3/hr
220 VAC, 50 Hz, 4.3 amps
16.5 in
8 in
22.75 in
65 lbs
A-39176
470 mm
213 mm
457 mm
29.5kg
A-39176
A-2
Apr 99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
MICROtorr 11 VACUUM PUMP
P/N
P/N
40110 - 115V 60Hz
40220 - 220V 50Hz
PURPOSE
To maintain high vacuum in the annulus of SEMIFLEX® liquid nitrogen pipe systems.
DESCRIPTION
An air-cooled diffusion pump is backed by two-stage mechanical (roughing) pump,
compactly mounted on a small frame. Internal mechanical pump valve closes high vacuum
side in the event of power interruption.
CHARACTERISTICS
-
Low power requirements.
-
Continuous duty.
-
Low maintenance requirements.
-
Includes gas ballast valve (for initial pumping).
NOTE - Do not open this valve when pump is stopped - with vacuum on system.
-
Operating temperature 40º F to 100º F (5º C to 40º C).
-
Accessories include manual and automatic valving, exhaust oil mist filter, and
vacuum monitoring equipment.
A-3
Apr 99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
A-4
Apr 99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
PUMP
CONNECTIONS
Bayonet
Port Termination
KF Adapter to 1” Nominal Copper. PN-15352
1” Nominal Copper Tubing by others
Tygon Sleve PN-7130 w/clamps
KF Adapter to 1” Nominal Copper PN-15352
Clamp PN-14770
“O”-Ring PN-15341
Annulus Relief Valve PN-15342 (Towards System)
Optional Vacuum Valve PN-15099
with Annulus Relief Valve
DIFFUSION
PUMP
Optional Convectron Gauge Tubes PN-23399
(Position as shown on Vacuum Valve)
MECHANICAL
PUMP
VACUUM PUMPING STATION
MICROtorr 11
A-5
Apr 99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
PUMP CONNECTIONS
L/V Separator
L/V Separator
KF Adapter to 1” Nominal Copper PN-15352
1” Nominal Copper Tubing by others
Tygon Sleve PN-7130 w/clamps
KF Adapter to 1” Nominal Cu. PN-15352
Clamp PN-14770
“O”-Ring PN-15341
Annulus Relief Valve PN-15342 (Towards System)
Optional Vacuum Valve PN-15099
with Annulus Relief Valve
DIFFUSION
PUMP
MECHANICAL
PUMP
Optional Convectron Gauge Tubes PN-23399
(Position as shown on Vacuum Valve)
VACUUM PUMPING STATION
MICROtorr 11
A-6
Apr 99
VACUUM
BARRIER
CORPORATION
VACUUM PUMP OPERATION
AND MAINTENANCE MANUAL
PUMP
CONNECTIONS
Bayonet
Jumper Hose PN-16190
KF Tee PN-16040
KF Adapter to 1” Nominal Copper PN-15352
1” Nominal Copper. Tubing by others
Tygon Sleve PN-7130 w/clamps
KF Adapter to 1” Nominal Copper PN-15352
Clamp PN-14770
“O”-Ring PN-15341
Annulus Relief Valve PN-15342 (Towards System)
Optional Vacuum Valve PN-15099
with Annulus Relief Valve
DIFFUSION
PUMP
MECHANICAL
PUMP
Optional Convectron Gauge Tubes PN-23399
(Position as shown on Vacuum Valve)
VACUUM PUMPING STATION
MICROtorr 11
A-7
Apr 99
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