Customers Seminar - ACS Motion Control

Customers Seminar - ACS Motion Control
ACS Motion Control
Your Partner for High
Performance
Motion Control
SPS 2014
Agenda
> New Features (Maksim A., Oleg R.)
> Automatic setup of System & Network (Oleg R.)
> Case studies- (Boaz K.)
Touch screen testing
Alternative to moving magnet
> Short Brake
> New Products (Zeev K.)
>
products roadmap (Zeev K.)
> Q&A (open discussion)
2
Motion control
enhancement for laser
processing applications
XSEG, Geometrical processing
3
Laser Cutting
A Growing Market
> Industrial laser
applications revenue
According to http://www.laserstoday.com/
http://www.laserstoday.com/2012/12/u-s-strong-for-industrial-laser-processing-2/
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© 2014 ACS Motion Control Ltd
Laser Cutting
The Need
> Laser cutting applications require an input of pulses to control laser
power
> Pulses at high precise frequency ~1[MHz]
> Pulses with precise width
> Pulses with varying: frequency, width or frequency and width
> Fast and precise motion along complex trajectories
> Pulses parameters depend on velocity (in 1, 2 or 3 dimensions)
of the laser head
> Pulses should be fired along certain locations of the motion trajectory
> Treating faults reported by the laser
5
© 2014 ACS Motion Control Ltd
Laser Cutting with LC1
(Laser Control module)
> Laser control is provided (by ACS) as a programmable mode of P/D
> implemented in 2 ACS products: PDMNT and CMHP/BA with PD option
> LC1 features
>
>
>
>
Programmable pulse polarity
Enable/disable
Laser reported faults. LC1 enters disable mode upon receiving a fault
Programmable (Real time) pulses :
> At wide range of frequencies ~10[Hz]-1.2[MHz]
> With different pulse width ~6.7[nsec]-111[ms]
> Simultaneous initialization and activation of several Laser Control units
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© 2014 ACS Motion Control Ltd
LC1 modes
varying duty cycle (PWM)
> Real-time varying duty cycle , with a fixed (programmable) frequency
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© 2014 ACS Motion Control Ltd
LC1 modes
fixed pulse width
> Real-time varying frequency with fixed (programmable) positive pulse
width (P/D like)
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© 2014 ACS Motion Control Ltd
LC1 modes
varying frequency, fixed duty cycle
> Real-time varying frequency with fixed (programmable) duty cycle
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© 2014 ACS Motion Control Ltd
Laser Cutting with LC1
> Laser parameters may be changed by ACSPL+ parameters according to
> Laser velocity
> Laser position along the trajectory (XSEG)
> Different inputs supplied by the laser
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© 2014 ACS Motion Control Ltd
XSEG
Introduction
> XSEG (Extended Segmented Motion):
> XSEG is an extension of MSEG which is a Multi-Segment Motion
> Multi-axis motion (more than 3)
> Continuous 2D or 3D path
> Common in CAD applications
> Extensively used in Laser Cutting
applications
> Typically composed of ARC and
LINE segments
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© 2014 ACS Motion Control Ltd
XSEG
Example
ENABLE(0,1)
PTP(0,1), 0,0
XSEG(0,1), 0,0
LINE(0,1), 100, 0
LINE(0,1), 100, 70
ARC1(0,1),70, 70, 70, 100, +
LINE(0,1), 0, 100
LINE(0,1), 0, 0
ENDS(0,1)
STOP
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© 2014 ACS Motion Control Ltd
XSEG
Capabilities: throughput increase
> XSEG implements a special look ahead algorithm
> motion parameters according to the upcoming segments
> Corner detection
> User determines velocity at distant corners
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© 2014 ACS Motion Control Ltd
XSEG Enhancements
The Need
> Increase throughput
> Geometrical processing
> Jerk limitation at junctions
> Improve user experience
> Automatic mode
> Full control
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© 2014 ACS Motion Control Ltd
XSEG Enhancements
The Solution
> Geometrical processing of motion profile
> Predefined deviation
> Predefined curvature
*Motion along smoothed trajectory (lines and arcs) performed faster than motion along lines only!
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© 2014 ACS Motion Control Ltd
XSEG Enhancements
The Solution
> Automatic arc application
16
XSEG Enhancements Example
Simple Case
> Square 100x100
> Original profile without geometrical processing lasts 270[msec]
Square with permitted deviation of 1
Square with permitted deviation of 10
Profile time 265[msec] ~2% improve
Profile time 224[msec] ~17% improve
*Motion parameters (VEL, ACC,DEC, JERK) are same for all experiments
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© 2014 ACS Motion Control Ltd
XSEG Enhancements Example
Complex case
> Mickey Mouse shape ~500x500[mm]
~750 linear segments with average length of 6[mm]
> Trajectory duration
> Original - 7785[msec]
> Deviation of 0.1 - 5446[msec] ~30% improvement
> Deviation of 1 - 4204[msec] ~46% improvement
> Automatic processing of each segment < 6[mm] - 6400[msec]
~18% improvement
> Automatic processing of each segment < 10[mm] - 6400[msec]
~42% improvement
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© 2014 ACS Motion Control Ltd
Summary
LC1, XSEG
> Powerful programming with ACSPL+ and flexibility
of ACS SPiiPlus controllers allows to command the
laser with required modulating signal as a
function of velocity, position etc.
> Enhanced XSEG algorithm provides
> Better throughput
> Simple user interface
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© 2014 ACS Motion Control Ltd
NetworkBoost™ - Network Failure Detection
& Recovery
20
NetworkBoost™ - Introduction
> Motion control systems that utilize EtherCAT networks
are sensitive to failures of the network cables.
> Even an intermittent failure can have a detrimental
effect on motion which could significantly impact the
uptime of machines, especially those that include
many moving nodes and cables.
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© 2014 ACS Motion Control Ltd
EtherCAT Node / Cable Failure
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© 2014 ACS Motion Control Ltd
NetworkBoost™ - Requirements
>
is based on Ring Topology
> The PC used must have two Ethernet ports
> Other than one EtherCAT cable, there is no need for any additional
components
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© 2014 ACS Motion Control Ltd
NetworkBoost™ - based on
Ring Topology
> Enables the network to resume and
continue its normal operation
without replacing the failed cable
> As long as there is no additional
cable failure
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© 2014 ACS Motion Control Ltd
Network Failure Detection and
Recovery
> Cable Disconnection
> Failing cables / intermittent connection
> An intermittent disconnection of one wire (signal) within a cable
> RX-error / CRC-error
> Electrical noise that results
in a corrupted frame
> A single frame is lost
>
25
provides the possibility to switch to two separate line
topologies that avoid the use of the suspected link
© 2014 ACS Motion Control Ltd
Network Failure Detection and
Recovery - Functionality
> Detection of the location of the failure
> The system reactivation in the simple and quick way, with no need for
the machine re-initialization
> Ability to save the configuration after the failure, so at the subsequent
power-up, the system will be initialized correctly (even if the cable is
still broken)
> Quick and simple way to reinitialize the network after the failure repair
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© 2014 ACS Motion Control Ltd
Benefits of NetworkBoost ™
Maximize machine uptime
>
> Simple and easy troubleshooting and recovery
> Minimal intervention by the machine operator
> Currently
is supported by:
> SPiiPlusSC
> SPiiPlusEC
> MC4U with 2nd EtherCAT port will be available soon
> Support by additional Master Controllers will be available in the future
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© 2014 ACS Motion Control Ltd
NetworkBoost™ Video
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© 2014 ACS Motion Control Ltd
SPiiPlusSC
Enhancements
29
SPiiPlusSC Enhancements
> Windows 8.1 x86 support
> Windows 8.1 x64 support
> x86 UEFI systems support
> Hyper-threading support is optimized for x64 systems
> More Network Cards to be used for EtherCAT communication are
supported
>
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feature support
Position Events Generation (PEG)
Enhancements
31
Position Events Generation (PEG)
Enhancements
> Time-Based PEG support
> Incremental PEG Improvement
> Loading Random PEG Arrays - Time Improvements
32
Minimum HW Revision
> Minimum HW Revision that supports Position Events Generation (PEG)
Improvements:
33
Product
Minimum HW
Revision
Product
Minimum HW
Revision
SPiiPlusNT-LT / DC-LT
N/A
SPiiPlusCMBA / UDMBA
B8
SPiiPlusNT-HP / DC-HP
N/A
SPiiPlusCMHP / UDMHP
B8
SPiiPlusNT-LD / DC-LD
N/A
UDMLC
A8
UDMNT
A6
UDMMC
A1
SPiiPlusCMNT / UDMPM
B9/B8
UDILT
B2
UDMPC
C9
UDIHP
B2
SPiiPlusSANT / SPiiPlusSADC
N/A
PDICL
A2
Time-Based PEG
> The following optional parameters of PEG_I and PEG_R commands are
now supported:
Arguments
Comments
time-based-pulses
Optional parameter - number of time-based pulses generated
after each encoder-based pulse, the range is from 0 to 65,535
time-based-period
Optional parameter - period of time-based pulses
(milliseconds), the range is from 0.00005334 to 1.7476.
Time-based period must be at least pulse width + 26.6667 nsec
(minimum distance between two pulses)
> Supported by C and COM libraries as well
34
Incremental PEG Improvement
> PEG_I has a new /a switch for preventing error
accumulation by taking into account the distance
rounding between incremental PEG events
> This switch must be used if the distance between PEG
events, specified in user units, does not match the
whole number of encoder counts
> Using this switch is recommended for any application
that uses PEG_I command
35
Loading Random PEG Arrays Time Improvements
> The new /f switch should be specified for the ASSIGNPEG command
> Typical times to Load 3 PEG Engines in Parallel
[msec * CTIME] :
Number of
Points to Load
36
BEFORE
AFTER
Without
specifying PEG
states
With
specifying PEG
states
Without
specifying PEG
states
With
specifying PEG
states
1
29
30
15
15
16
73
100
16
18
64
218
315
24
27
256
800
1185
52
71
1024
3127
4667
168
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System and Network
Automatic Setup
37
Disadvantages of Current Process
> Two separate components:
> EtherCAT Configurator for EtherCAT network configuration
> System Configuration Wizard for system modules configuration.
> If EtherCAT network is not configured correctly, the
System Configuration Wizard will not work properly
> Configurations of SPiiPlusNTM/SC with only non ACS IO
modules (e.g. Beckhoff) are not supported by the
System Configuration Wizard
38
New System Setup Component
> Automatic Setup
> Fully automatic setup of the actual system
> Manual Setup
> Modifying System Configuration
> Modifying Configuration From Database
> Loading Configuration From Database
> Modifying Axes and I/O Allocation
> Modifying PDO Configuration of Non-ACS Drives
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Automatic Setup
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Automatic Setup
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Manual Setup
Load Configuration From Database
42
Manual Setup
Modify Axes and I/O Allocation
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Manual Setup
Modify PDO Configuration
44
Manual Setup
Conflicts
45
System Viewer and Diagnostics
46
System Viewer and Diagnostics
Conflicts
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Force Control
Applications
Force Control Applications
> Examples of applications
> Printed circuit board assembly
> Wire and die bonding
> Touch screen testing
> Thin flexible glass thickness measurement
> Typically, an XYZ stage where Z axis is a linear
actuator (i.e. voice coil) designed to apply force
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© 2014 ACS Motion Control Ltd
Force Control Characteristics
> An actuator should gently land on a delicate component
> Without impact
> Avoiding damage to the component, the underlying surface and the actuator itself
> The components may be placed at different heights
> After landing a controlled force should be applied for a certain duration
> The amount of force and duration are programmable
> The system should move to a next point and repeat the process as fast
as possible to increase throughput
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© 2014 ACS Motion Control Ltd
Soft Landing Routine
> Z axis approaches a surface at an unknown height and lands on it with
a programmed force that can be as low as 10 grams
> A typical soft landing routine :
> High speed approach in position mode to a "safe" height above the surface or part
> Switching to velocity mode and slowly approaching the part while monitoring a
touch-down criterion:
> Position error
> Drive command / motor current
> Load Cell feedback
> If one of the above measures is higher than a set threshold it indicates that Z axis
landed on the surface
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© 2014 ACS Motion Control Ltd
Soft Landing Routine
> If touch-down has not been identified within a certain distance the Z axis retracts
> After landing the axis is switched to force mode with the same amount of current as
in the switch-over point
> The current is then ramped to get the desired force value while monitoring deflection
or force feedback
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© 2014 ACS Motion Control Ltd
Force Control Method
> The controller may apply force in open or closed-loop
> Open loop force control
> Controlling motor current only, assuming a linear relation between current and force
> May Require an algorithm to dampen vibrations (based on the encoder)
> May require non-linear spring compensation
> Closed loop control
> Applications like Touch screen testing or thin glass thickness measurement typically
include a load cell mounted on the tip of the actuator
> A servo loop is closed on the force feedback
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© 2014 ACS Motion Control Ltd
Force Control Method
> Closed loop control
> It does not directly control the actuator
> An external loop that creates position or velocity corrections to the inner position or
velocity loops
> The position/velocity loops are used for smoothing and damping
> Example for closed loop topology:
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© 2014 ACS Motion Control Ltd
Typical Requirements
> Very aggressive XYZ moves (high acceleration > 10g)
> Fast settling
> Few msec from touchdown till the required force has stabilized
> Very small overshoot in force (<10%)
> Wide range of forces 10gF – 2000gF with high accuracy (+/- 2%)
> Fast removal of force and back to retract position
> Seamless transitions from position/velocity modes <->force mode
Force signal
gF
Velocity signal
Final
Velocity
POSITION
MODE
VELOCITY
MODE
FORCE
MODE
POSITION
MODE
t
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© 2014 ACS Motion Control Ltd
Force Control
Examples
Apply 1000gF
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Apply 200gF
© 2014 ACS Motion Control Ltd
Force Control Applications
Summary
> Force control applications require very fast responses
of the motion axes and force applying axis
> Require landing on delicate components with no
impact or damage
> May operate in either open or closed-loop force modes
> The process should be done as fast as possible for
maximal throughput
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© 2014 ACS Motion Control Ltd
Force Control Applications
Summary (Cont.)
> ACS Motion Control solution
addresses all the requirements
> Special soft-landing algorithm that allows to land
and apply the required force with no overshoot
> 20kHz implementation for the maximum possible
responsiveness
> Seamless transitions between the various servo
modes
>
algorithm for maximal bandwidth
with zero settling time to sub-micron resolution
> Special profiles to prevent excitation of vibrations
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© 2014 ACS Motion Control Ltd
Alternative to
Moving Magnet
Advantages of Moving Magnet
Solution
> Typically used for transport systems
> Fixed coil tracks and magnetic movers
> Can move along curved tracks
> In a closed track the magnets can move in
an endless loop
> No moving cables
> Each magnet can be controlled individually and
independently
carrier
coil
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coil
© 2014 ACS Motion Control Ltd
Disadvantages of Moving Magnet
Solution
> Non-standard components
> Few companies offer moving magnet solution
> Non-standard drives and controls
> Complexity
> Complex commutation control
> Multiplexing between sensors
> Cost
> Many drives are required, one for each coil
Number of drives increases with track length
> Non standard components
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© 2014 ACS Motion Control Ltd
Disadvantages of Moving Magnet
Solution
> Limited performance
> Typically 6-step “trapezoidal” commutation is used
> Strong cogging - most severe during passage from coil to coil
> Sensors are typically hall-based with limited resolution and accuracy
> Not suitable for many applications like high performance printing machines
> Limited force constant (up to 230N continuous)
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© 2014 ACS Motion Control Ltd
Alternative to Moving Magnet
> Standard Linear motors that move on a closed track
> Coils
> Standard iron-core coils, offered by many companies
> Magnets
> Standard linear motor magnets
> Special curved magnets may be used
on the curved tracks for smoother motion
> Feedback
> Hall-based sensors: analog sin-cos interpolated for high resolution
> May be combined with high resolution encoders
for higher resolution and accuracy
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© 2014 ACS Motion Control Ltd
Advantages of the Alternative
Solution
> Assembled from off-the-shelf standard components
> Standard iron-core linear motors
> Standard drives and motion controller
> Only one drive is required for each moving coil
> Number of drives is not dependent on the track length
> High resolution encoder may cover only the important regions of
the track (i.e. printing zone)
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© 2014 ACS Motion Control Ltd
Advantages of the Alternative
Solution
> Higher performance
> Sinusoidal commutation for considerably smoother motion
> High resolution optical encoders may be used at the required regions
> Lower cogging that can be completely compensated by algorithms
> Few microns of position error is possible
> Lower cost
> Higher force constant of the linear motors (up to 1900N
continuous)
> Simple control scheme, easy to use
> Controlled like a regular brushless motor
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© 2014 ACS Motion Control Ltd
Challenges of the Alternative
Solution
> If standard linear motors are used for the curved tracks, there
are “pizza slice” shape gaps between the magnets
> How to pass smoothly?
> Commutation cycle may not be uniform during
the curved portions
> Commutation scheme may still be not standard
> Requires on-the-fly switching between feedbacks
> From hall-based coarse feedback to high resolution feedback and back
> Can it be done smoothly without stopping?
> Controller and drive will have to move together with the coils
> Requires a method to provide voltages and communication
e.g.- slip rings/bars
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© 2014 ACS Motion Control Ltd
ACS Motion Control Solution
> Special commutation algorithm
> Adaptively compensates changes in the
commutation period
> Compensates force reduction due to
“pizza slice” shape gaps
> Feedback switching algorithm
allows seamless transitions
during motion
> Advanced control algorithms may be used for higher
performance (
, cogging compensation)
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© 2014 ACS Motion Control Ltd
Summary
> Alternative solution for closed track transport
systems
> Capable of achieving significantly better
performance
> Significantly cheaper than the moving magnet
solution
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© 2014 ACS Motion Control Ltd
New Products
69
Expanding ACS EtherCAT Line of
Higher Performance Motion Control
EtherCAT
70
SPiiPlusEC
The Most Powerful EtherCAT Motion
Controller
> Up to 64 axes and thousands of I/O
> 1 to 5KHz profile generation & EtherCAT cycle
failure detection & recovery
>
> 1GbE Ethernet host communication
> Powerful Processor:
Intel Atom™ N2600 1.6 GHz
> Memory:
> RAM- 1Gb
> Flash NV memory- 1Gb
> Replacing the SPiiPlusNTM
71
EtherCAT
SPiiPlusCMHV Control Module
EtherCAT Master + 2 built-in Drives
> Up to 32 axes and thousands of I/O
> 2 built-in high power universal drives
> 230-480Vac
> 5/10A, 10/20A, 15/30A
> 20/20A+5/10A
> Up to 400Vac, the current is 25% higher
> 230Vac (3/2015)
> 5/15A, 10/30A, 15/45A, 20/60A
> STO
> Internal shunt regulator
> Dimensions: 260 x 246 x 119 mm3
72
EtherCAT
SPiiPlusCMHV Control Module
EtherCAT Master + 2 built-in Drives
> Feedback
> 4 incremental digital encoders
> 2 Analog SIN-COS encoder
> 2 absolute encoders
> 2 resolvers
> I/O
> Digital: 8/8
> Analog: 4/2
> Registration Mark: 4
> PEG: 4
> Motor Brake: 2, 24V/1A
73
EtherCAT
UDMMC Universal Drive Module
2/4 Drives
> Motor supply: 12Vdc to 80Vdc
> Current
> 5/10A, 10/20A, 20/40A
> Four axis with mix current levels:
> 2 x 5A & 2 x 10A
> 2 x 5A & 2 x 20A
> 2 x 10A & 2 x 20A
> STO
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EtherCAT
UDMMC Universal Drive Module
2/4 Drives
> Feedback
> 4 digital incremental encoders
> 4 absolute encoders
> I/O
> Registration Mark: 4
> PEG: 1
> Motor Brake: 4, 24V/0.5A.
EtherCAT
> Dimensions: 152 x 138 x 48 mm3
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UDMHV Universal Drive Module
2 Drives
> 2 built-in high power universal drives
> 230-480Vac
> 5/10A, 10/20A, 15/30A
> 20/20A+5/10A
> 230Vac (3/2015)
> 5/15A, 10/30A, 15/45A, 20/60A
> STO
> Internal shunt regulator
> Dimensions: 260 x 246 x 119 mm3
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EtherCAT
UDMHV Universal Drive Module
2 Drives
> Feedback
> 4 incremental digital encoders
> 2 Analog SIN-COS encoders
> 2 absolute encoders
> 2 resolvers
> I/O
> Digital: 8/8
> Analog: 4/2
> Registration Mark: 4
> PEG: 4
> Motor Brake: 2, 24V/1A
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EtherCAT
PDICL Pulse Direction Interface
4-Axis, with Feedback
> Step motor control with position feedback
verification
> Drive interface:
> Speed up to 4M pulses per second
> Programmable pulse 80nS to 80 S
> Position feedback
> 4 digital incremental digital encoders
> 4 absolute encoders
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EtherCAT
PDICL Pulse Direction Interface
4-Axis, with Feedback
> Digital I/O:
> 4 general purpose inputs
> 4 Registration Mark
> Four motor brake outputs, 24V, 0.2A
> One PEG (Position Event Generator)
> Dimensions: 121x100x48 mm3
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EtherCAT
EM64
SIN-COS Encoder Multiplier & Splitter
> Sub-count PEG & position registration
> Interfacing analog Sin-Cos encoders to drives
such as UDMMC & UDMLC
> Digital encoder signals to external
devices (camera triggering boards)
> Splitting encoder signals
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EM64
SIN-COS Encoder Multiplier & Splitter
> Programmable multiplication up to 64 counts per encoder cycle
> High speed
Sin-Cos Maximum
frequency [KHz]
Multiplication
Factor
Quadrature
resolution
800
4
16
640
5
20
400
8
32
320
10
40
200
16
64
> 2 output connectors, each comprises of both
> The original analog encoder signals buffered
> Post multiplication digital signals
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NanoPWM Roadmap
A Comprehensive product line Offering
For Nanometer Positioning Stages
2015
Confidential
NanoPWM™
Revolutionary PWM Drive
Technology (Patent Pending)
>
>
>
Better performance when compared to commercially available
linear drives - Guaranteed
Sub-Nanometer position jitter
Excellent constant velocity smoothness & error tracking
±0.4nm
jitter
1nm
steps
83
Expanding The Line of NanoPWM
Drives Line of 2-Axis Drives
> Two lines
> EtherCAT slaves– Similar to other ACS’ drive modules
> Expending the line of ACS’ EtherCAT drives
> Drive with ±10V current commutation commands
Direct
replacement to
Linear drive
> Direct replacement for linear drives
> Works also with non-ACS motion controllers
Motion
Controller
+/-10V
NanoPWM
Drive
M
E
84
Main Specifications
(per axis/motor)
Max
Voltage [Vdc]
Cont
Current [A]
Peak
current [A]
Cont
Power [W}
Peak
Power [W]
100
3.3
10
340
950
100
6.6
20
680
1900
100
10
30
1,020
2850
100
13.3
40
1,380
3,800
> Common to both lines
EtherCAT slaves
> Two-axis design (for Gantry)
4x SIN-COS encoder 10MHz
> Motor over temp inputs
2 x absolute encoder
> Mechanical brake outputs
4 x 12bit GP analog inputs
> STO (Safe Torque Off)
4 x 16bits analog outputs (for IDE)
4 Registration Mark inputs
4 PEG outputs
85
Three Form Factors
> Chip like
> Bookshelf, panel mounted
> Rack mounted
86
Product Names
EtherCAT
+/-10V
Chip-like
NPMpc
NPDpc
Bookshelf
NPMpm
NPDpm
MC4U enclosure
NPMrm
NPDrm
NPM – NanoPwm Module - EtherCAT slave
NPD - NanoPWM Drive -
+/-10V commutation commands
pc – printed circuit version
pm – panel mounted version
rm – rack mounted version
87
NPMpc, NPDpc
Chip-Like
> Designed to be incorporated into
custom designed carrier board
> Small: 155x85x30mm
> Light: 150gr per axis (300gr total)
> Fed by:
> 24Vdc control supply
> 24Vdc – 100Vdc drive supply
88
NPMpm, NPDpm
Panel mounted
> Based on the chip-like unit
> Dimensions: 240x155x50mm
> Built-in motor phases shortening relays
(“Dynamic brake”)
> Can be used for prototyping of the NPMpc,
NPDpc chip-like versions
> Fed by
> 24Vdc control supply
> 24Vdc – 100Vdc drive supply
89
NPMrm, NPDrm
Rack mounted
> Complete solution
> Based on the chip-like unit
> 11”, 19” racks
> 2, 4 axis solution
> 1, 2 units of NPMrm or NPDrm
> 48, 72, 100Vdc power supplies
AC input (the lowest required the better)
> Fed by
> 24Vdc control supply
> 100Vac – 230Vac drive supply
90
1, 2 NPMrm
or
NPDrm
Power
Supply
NPMpc
Revolutionary approach to
High precision positioning stages
91
Stage With External Drives
supply
Supply cable
Network communication cable
Encoder to drive cable
Motor to drive cable
Electrical cabinet
> All cables are moving cables
> All cables are long
92
Stage Moving Cables
Main Limitations to Performance
> Moving cables oscillate
> At low frequencies (<100Hz)
> The frequency changes as a function of position
> Input Shaping is not effective
> It eliminates the oscillations but increases the period of the
profile
> Increasing accelerations is not effective
> Induces more vibrations and increases settling time
93
Stage Moving Cables
Main Limitations to Performance
> Move and settle time
> Adds significantly to the settle time
> Large variance in results over different table position
> Standstill jitter and following error during Constant Velocity
> Increased significantly
> Large variance in results over different table position
> Limits reliability – Moving cables are prone to failures
> The longer the cable the more EM noise
> Expensive
> Complex mechanical design
94
Mounting the NanoPWM drives
on the positioning stage
> The NPMpc NanoPWM provides the performance
> Light weight - 150gr per axis
> Adds less than 5% heat to the motor heat dissipation
> Example:
Linear motor phase resistance: 1.0 Ohm
Current (cont/peak sine amp.)
95
10/30
13.3/40
Motor Heat dissipation
153W
265W
NPMpc Heat Dissipation
7W
9W
Added heat %
5%
3.3%
Stage With Integrated
UDMPC Drives
supply
supply cable
Electrical cabinet
Network communication cable
Supply cable
Communication cable
Encoder to drive cable
Motor to drive cable
96
The only Moving cables
Can be replaces by slip bars
NPMpc
Mounted On The Positioning Stage
> Most moving cable are eliminated
> All cables are significantly shorter
> Lighter weight
> Moving cables resonate at frequencies > 200Hz
> Input Shaping is effective
> Possible to increase acceleration
97
NPMpc
The Best Performance Possible
> The shortest Move & Settle times possible
> The lowest Standstill jitter possible
> The lowest following error during constant velocity
> Consistent over different stage locations
> Significantly less EM noise
> Lower cost of cables
> Enhanced reliability
> Simplified mechanical design
98
Enhance Performance Example
> A real 450mm wafer stage
> 25mm move
Settle to
50nm [msec]
Settle to
10nm [msec]
MC4U with NanoPWM
(actual, external mounted)
110
120
NPMpc (expected)
< 80
< 95
Product
99
NPMpc Carrier Board
> The NPMpc(s) will be mounted on a custom carrier board
> The carrier board should be specified together with the stage vendor and
the customer of the stage optimizing
> Form factor and fitting into the stage
> Connectivity
> Added functionality that may not even be related to motion control
> ACS will offer
> Carrier board design services
> Carrier production
> Design guidelines for carrier board design by others
100
NanoPWM Drives Roadmap
Chip
like
101
Panel
Rack-mount
mounted full solution
EtherCAT version
NPMpc
NPMpm
NPMrm
+/-10V version
NPDpc
NPDpm
NPDrm
Functional Prototype for testing 2/2015
2/2015
5/2015
Fully tested units
4/2015
4/2015
6/2015
Production units
5/2015
5/2015
7/2015
Summary
Manufacturers of
positioning stages can
achieve:
Higher performance
that is unachievable today
Simplified stage design
Lower cost of material
102
Questions & Answers
103
Smarter Motion
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