Electron Beam Evaporator Power Supply EBV40A-PS

Electron Beam Evaporator Power Supply EBV40A-PS
Electron Beam
Evaporator Power
Supply EBV40A-PS
Operating Manual
ver. 2.1
May 2012
Operating manual ver. 2.1
Page 1
EBV40A-PS
CONTENTS
1
INTRODUCTION ...................................................................................................................................................4
1.1
1.2
1.3
1.3.1
1.3.2
1.3.3
1.4
1.4.1
1.4.2
1.4.3
1.4.4
2
INSTALLATION OF ELECTRON BEAM EVAPORATOR...........................................................................10
2.1
2.2
2.3
2.4
3
DESCRIPTION OF OPERATING ELECTRON BEAM EVAPORATOR .........................................................................4
POWER SUPPLY PURPOSE..................................................................................................................................5
SAFETY .............................................................................................................................................................5
SER QUALIFICATIONS ....................................................................................................................................5
SAFETY SYMBOLS ..........................................................................................................................................5
COMMON PRESCRIPTIONS OF SAFELY USE DEVICE ........................................................................................6
TECHNICAL SPECIFICATION ..............................................................................................................................7
GENERAL DATA .............................................................................................................................................7
POWER SUPPLY .............................................................................................................................................8
SPECIFICATION .............................................................................................................................................9
TECHNICAL PARAMETERS ..............................................................................................................................9
CONNECTION OF COOLING SYSTEM ................................................................................................................10
ASSEMBLY OF EVAPORATING MATERIAL .......................................................................................................10
WARMING FILAMENT PROCESS ......................................................................................................................10
CHECKING OF EVAPORATING CIRCUIT .............................................................................................................11
INSTALLATION OF POWER SUPPLY UNIT.................................................................................................12
3.1
UNWRAPPING..................................................................................................................................................12
3.2
ASSEMBLY ......................................................................................................................................................12
3.3
CONNECTIONS ................................................................................................................................................13
3.3.1
REAR PANEL OF DEVICE..............................................................................................................................13
3.3.2
POWER SUPPLY CONNECTING......................................................................................................................14
3.3.3
COMMUNICATION INTERFACE. .....................................................................................................................14
3.3.4
PROTECTION SIGNAL SOCKET INTERLOCK ....................................................................................................18
3.3.5
THERMOCATHODE PLUG WITH THERMOCOUPLE ..........................................................................................18
4
USE .........................................................................................................................................................................19
4.1
FRONT PANEL DESCRIPTION ...........................................................................................................................19
4.1.1
DIODE CONTROLS .......................................................................................................................................19
4.1.2
LCD DISPLAY .............................................................................................................................................19
4.1.3
ENCODER ...................................................................................................................................................19
4.1.4
STEERING KEYS ...........................................................................................................................................20
4.2
MAIN OPERATIONAL MENU ............................................................................................................................20
4.2.1
CHOICE OF WORK MODE – MANUAL / AUTO............................................................................................21
4.2.2
MAIN PARAMETERS ADJUSTMENT ................................................................................................................21
4.2.3
POWER ON PSU – CHANGE MODE STANDBY / OPERATE ..........................................................................21
4.3
FUNCTION MENU ............................................................................................................................................23
4.3.1
MAXIMAL EMISSION CURRENT– EMISSION MAX .......................................................................................23
4.3.2
PSU OPERATE TIME - OPERATE TIME ......................................................................................................24
4.3.3
DISPLAY ADJUSTMENTS ...............................................................................................................................24
4.3.4
SAVE AND LOAD CONFIGURATION OF POWER SUPPLY UNIT .........................................................................25
4.3.5
Transmission protocol menu .....................................................................................................................25
4.3.6
INFORMATION ABOUT POWER SUPPLY VERSION ...........................................................................................26
4.3.7
SERVICE SETTINGS ......................................................................................................................................26
5
STARTING THE EVAPORATE PROCESS......................................................................................................27
5.1
5.2
6
STARTING THE EVAPORATING PROCESS WITHOUT AUTOMATIC REGULATION ...............................................27
STARTING THE EVAPORATE PROCESS WITH AUTOMATIC REGULATION .........................................................28
DIAGNOSIS OF DAMAGES AND FAULTS.....................................................................................................29
6.1
6.2
6.3
6.4
6.5
6.6
6.7
NO THERMOCATHODE GLOWING CURRENT IFIL .............................................................................................29
ANODE VOLTAGE UENG FAULT ......................................................................................................................29
NO PROTECTION SIGNAL INTERLOCK .........................................................................................................30
TEMPERATURE FAULT ....................................................................................................................................30
ACHIEVEMENT OF MAXIMAL EMISSION CURRENT IE .....................................................................................30
NO EMISSION CURRENT IE..............................................................................................................................31
NO ION CURRENT FLUX ..................................................................................................................................31
Operating manual ver. 2.1
Page 2
EBV40A-PS
7
MAINTENANCE ..................................................................................................................................................32
7.1
8
STORAGE AND REMOVAL ..............................................................................................................................33
8.1
8.2
8.3
9
CLEANING.......................................................................................................................................................32
PACK ..............................................................................................................................................................33
STORAGE ........................................................................................................................................................33
REMOVAL .......................................................................................................................................................33
WARRANTY CONDITIONS ..............................................................................................................................34
Operating manual ver. 2.1
Page 3
EBV40A-PS
1 INTRODUCTION
Please read carefully following instructions to ensure proper function of device. Manual contains important
information concerning installation, running and operating Electron Beam Evaporator EBV40A.
1.1
DESCRIPTION OF OPERATING ELECTRON BEAM EVAPORATOR
Electron Beam Evaporator is designed to plate with evaporating material, surface of solid body. System type
EBV40A consists of two main devices :evaporator and power supply unit.
Electron Beam Evaporator utilizes during operation effect of thermoemission. Intensity of thermoemission
current , so quantity electrons emitted within unit of time from unit of area, depends mainly on temperature
and work exit of electrons particular metal. Increase of temperature causes increase quantity of electrons, for
that kinetic energy thermal movement is bigger than exit work. In cause of Electron Beam Evaporator
machine type EBV40A (Image 1.1), source of emitted electrons is thermocathode shaped as a circle.
Change of thermocathode temperature is realized through change intensity glow current flowing through
itself. Anode and simultaneously material to evaporate, is mounted in special holder wire or rod , it’s length
is 36 mm and diameter from 0,5 to 2,3 mm.
To achieve thermo electrons adequate acceleration and directions of move , high voltage is applied between
cathode and anode, that for system EBV40A can be regulated in range from 0 to 1500 V. Electrons flowing
from thermocathode to anode we call the emission current. To ensure, that character of current flow will be
not interfered freeway of electrons has to be longer than distance between thermocathode and anode. Very
important parameter is lifetime of cathode, depending from pressure inside evaporator chamber, and that ist
-6
the reason, for that pressure inside chamber should be lower than 9x10 mbar.
Stream of thermo electrons, directed to the surface of anode, through their bombing-causes on target’s
surface local increase of temperature. If value of temperature exceeds temperature of evaporate anode’s
material there will take place partial evaporate of it’s material. As a result of that process, neutral particles
are evaporating with small percentage of ion fraction. Adequate collimator ensures getting homogeneous
beam of neutral parts incidents on evaporated surface. Loaded particles (ions) could be captured through ion
collector circuit, and measured ion current gives information about material evaporate process, and can be
used after appropriate calibration as a speed control parameter of putting layers on subsoil. Beam diameter
incardinating on sample’s surface depends on distance and aperture diameter of collimator, and vary
between 4 and 15 mm. Anode’s area is surrounded through water cooling circuit, that prevents overheating
of evaporating device during evaporate of hard melting materials.
cooling system
collimator with collector
of ion current
Image 1.1 Sight of evaporator EBV40A
Operating manual ver. 2.1
Page 4
EBV40A-PS
1.2
POWER SUPPLY PURPOSE
Power supply EBV40A-PS serves to appropriate steering evaporating device EBV40A, for obtain correct
process of covering solid base with evaporated material. Power supply delivers anode’s voltage (called
energy voltage Ueng as well) and is a source of current flowing (Ifil) through thermocathode. Current of
electron emission (IE) and ion current (Flux) are measured, those are sources of information about
evaporating process run. There is temperature of evaporator measured as well, for overheating prevent
purposes. Device can operate two modes:
- AUTO – Power Supply automatically controls voltage Ueng and current Ifil for stabilization of desired
(programmed) value of ion current Flux.
- MANUAL – energy voltage Ueng and thermocathode current Ifil are adjusted through operator , and
Power Supply function is limited to read obtained current Flux.
1.3
SAFETY
1.3.1 SER QUALIFICATIONS
All activities connected to using the device , described in current operating manual, can be performed only
through qualified personnel, or special trained persons.
1.3.2 SAFETY SYMBOLS
There are different symbols of danger, used in operating manual:
! DANGER
Informs about possible danger of serious accident , or serious injury.
! WARNING
Informs about possible danger of serious damage or destruction the device.
! CAUTION
Informs about proper using the device. If that will not be followed, can threaten incorrect operation or
damage of the device.
Warning. There are very important information marked with this symbol, but they are not treating safety of
using the device.
Operating manual ver. 2.1
Page 5
EBV40A-PS
1.3.3 COMMON PRESCRIPTIONS OF SAFELY USE DEVICE
! DANGER
Dangerous voltage
Inserting objects into air vent of device, or pouring with liquids can cause electric
shock. Make sure, that air vent is free of external objects. Do not allow pour or wet the
device with liquids.
! WARNING
Incorrect use
Incorrect use can cause destruction of machine. Please use device following
manufacturer’s prescriptions
Operating manual ver. 2.1
Page 6
EBV40A-PS
! WARNING
Incorrect assembly and use
Incorrect assembly and use of the device can cause destruction of machine.
By assembly of the device strictly follow prescriptions this operating manual.
1.4
TECHNICAL SPECIFICATION
1.4.1 GENERAL DATA
Device dimensions:
Dimensions
Assembly
Width: 448,8 mm (84HP)
Height: 132,5 mm (3HU)
Depth: 375 mm
System Rack 19``
7,5
10
57,0
132,5
482,6
465,0
10,5
Image 1.2 Dimensions (mm)
Operating manual ver. 2.1
Page 7
EBV40A-PS
Operation conditions
Storage temperature :
-40…+70 °C
Operation temperature :
+5…+50 °C
Use only inside closed room.
! WARNING
EBV40A-PS can not be used in places endangered directly of water, or other liquids
influence. Can not be used after exceeding allowed range of operation temperature.
Operation
The device is operated manually, using 4 control keys and encoder.
1.4.2 POWER SUPPLY
Voltage
230 VAC (110 V optionally)
Frequency
50 - 60 Hz
Current consumption
Max. 3A
Power consumption
Max. 600 W
Protection class
II
Power socket
IEC 320 C14
Fuse
10A
Operating manual ver. 2.1
Page 8
EBV40A-PS
1.4.3 SPECIFICATION
Range of ion current regulation (Flux)
1,00nA to 99,9mA
Range of anode voltage regulation (Ueng)
0 to 1500V
Range of thermocathode current regulation
(Ifil)
Range of emission current limiter (IE)
0 to 2,50A
0 to 200mA
Switching on power supply conditioned by
presence INTERLOCK signal – for example,
Protections
this can be signal connected to presence of
high vacuum inside chamber.
Maximal cathode power supply voltage
8V
Power supply voltage
230VAC (110 V optionally)
Range of operation temperature
+5 ºC do +50 ºC
1.4.4 TECHNICAL PARAMETERS
Evaporated material diameter beam on
4 ÷ 15 mm, depending on distance between
sample’s surface
outlet of evaporator and sample.
Distance between end of evaporated material
Typical 100 ÷ 150 mm.
and sample
Evaporated materials temperature range
300 ÷ 2300 C (3300 C – after replacement
o
o
connector for molybdenum one).
Electron energy
0 ÷ 1500 eV
max. emission current – 200 mA,
max. power – 300 W.
Glowing Filament current range
Typical 1,8 ÷ 2,3 A; maximum – 2,5 A.
Evaporated material diameter
0,5 – 2,3 mm.
Cooling System
Water flow > 0,5 l/min at the temperature
o
T = 30 C on outlet
Maximal pressure – 6 bar.
Operating manual ver. 2.1
Page 9
EBV40A-PS
2
INSTALLATION OF ELECTRON BEAM EVAPORATOR
2.1
CONNECTION OF COOLING SYSTEM
After installing the Electron Beam Evaporator on the vacuum system, cooling system has to be connected.
Water cooling system enables water flow up to 0.5 l/min at the max. pressure of 6 bars. Water hoses have to
be mounted on two projecting out of evaporating device metal pipes. (Image 2.1 p. 6).
2.2
ASSEMBLY OF EVAPORATING MATERIAL
Material to evaporate can be mounted again after unscrewing manipulator , which serves to shift evaporated
wire. Manipulator is mounted on a collar DN 16CF (Image 2.1 p. 2).After unscrewing screws, carefully take
out whole manipulator, by shifting him along the device. Also the copper washer, located between collars of
evaporating device and manipulator, has to be taken out. For next assembly a new gasket (washer) has to
be placed. Material to evaporate is mounted on a connector made from hard melting material, and locked
with screw. It is important – to have straight wire.
2.3
WARMING FILAMENT PROCESS
This process is performed only at the first run after cathode replacement and consist in thermal cathode
shaping. To run cathode warming process, perform following instructions:
°
Close shutter in evaporator
°
Check, if pressure inside chamber is lower than 9x10 mbar
°
Slowly increase Filament glowing current intensity up to value of 0,5 A. Next, wait 30 seconds and
-6
again increase Filament glowing current intensity for value of 0,5 A. This procedure has to be
repeated until Filament glowing current intensity will be equal 2,5 A. After performing this whole
procedure, assume that Filament is correctly warmed and ready to operation.
! CAUTION
During performing Filament warming procedure, high voltage has to be set to value
close to 0 V.
Operating manual ver. 2.1
Page 10
EBV40A-PS
2.4
CHECKING OF EVAPORATING CIRCUIT
1
2
3
D
C
A
B
4
7
6
5
1)
2)
3)
4)
5)
6)
Image 2.1. Drawing of EBV 1 connectors set:
Ion current measurement socket,
Manipulator shifting anode handwheel-towards cathode or back from cathode,
High voltage BNC connector –“ internal needle”,
Switch to open or close of diaphragm for evaporated material,
Cooling system metal pipe,
4-contacts plug.
Checking of evaporating device consists on:
°
Filament glowing check.
Measure resistance between connectors A and B of 4-contacts plug. (Image 2.1 p. 7). Measured
resistance should be lower than 1 Ω.Bigger value can indicate damaged contacts or Filament.
°
Thermocouple check.
Measure resistance between connectors C and D of 4-contacts plug. (Image 2.1 p. 7). Measured
value of thermocouple resistance should not exceed single Ohm range.
°
Isolation between filament and ground check.
Measure resistance between one of connectors A or B of 4-contacts plug. (Image 2.1 p. 7) and
ground of evaporator. For proper operation, measured resistance value should exceed 2 MΩ.
°
Isolation between high voltage input and ground check.
Measure resistance between internal needle of high voltage BNC connector (Image 2.1 p. 3) and
ground of device. For proper operation, measured resistance value should exceed 2 MΩ.
°
Isolation between high voltage cylinder and ground check.
Measure resistance between internal needle of high voltage ion current BNC connector (Image 2.1
p. 1) and enclosure of device. For proper operation, measured resistance value should exceed
20MΩ.
Operating manual ver. 2.1
Page 11
EBV40A-PS
3
INSTALLATION OF POWER SUPPLY UNIT
3.1
UNWRAPPING
1 Check if pack was not mechanically damaged.
2 Take the device out of box. Store box. Device must be stored and transported in original box.
3 Check if device is complete.
4 Check if device does not have operation marks (after using).
! DANGER
Damaged device.
Destroyed device.
Use of destroyed or damaged device or connecting wires endanger electric shock.
Never run damaged device.Protect destroyed device against accidentally operation.
If any damage will be noticed, inform sedition company or insurance immediately.
3.2
ASSEMBLY
Device is fitted to mount inside cabinet Rack 19``, takes 4 height units (3HU) standard 19”
! WARNING
Surroundings temperature.
Exceeding maximal allowed surroundings temperature can cause destruction of the
device.
Ensure, that surroundings temperature, the device is operating in, does not exceed
maximum value, and free air flow through air vent is enabled. Do not expose the
device for direct sun radiation.
Operating manual ver. 2.1
Page 12
EBV40A-PS
3.3 CONNECTIONS
3.3.1 REAR PANEL OF DEVICE
Fig 3.1 Power Supply Rear Panel EBV40A-PS
A Serial protocol control socket (RS232 or RS485)
B Protection signal socket INTERLOCK
C Power Supply Fan
D Thermocouple of cooling block EBV evaportator
E Thermocathode powering wire
F Measurement of ion current socket Flux
G High voltage Anode socket High Voltage
H Grounding clamp
J Powering socket
K Fuse
! DANGER
Secure wire inside device is connected to enclosure through grounding clamp.
Do not unscrew grounding clamp.
Precise description off connectors from back panel will be presented in next part of operating manual.
Operating manual ver. 2.1
Page 13
EBV40A-PS
3.3.2 POWER SUPPLY CONNECTING
There is a socket for powering purposes, (See image 3.1 element H) model IEC 320 C14. Power cord must
2
be a 3 conductor wire with a safety wire. Cross section of every cord can not be smaller than 1.5 mm .
Fig 3.2 Power cord with a safety wire.
! DANGER
Device’s grounding
Wrong grounding can endanger a human with electric shock.
Use 3 conductors wire with a safety wire. Use sockets with grounding connector.
3.3.3
COMMUNICATION INTERFACE.
The EBV40A-PS has several types of interface as options: Ethernet, USB, RS232/485 and Bluetooth, based
on Anybus technology. The communication type depends on the installed/chosen module type on the rear
panel of the power supply. Before using the power supply please check that the correct interface is installed
according to the ordered option by selecting MENU->TRANSMISSION->. Several parameters have to be set
in the PARAMETERS menu. For serial protocols (RS232, RS485, USB and bluetooth) it is possible to select
the requierd baud rate. If the ethernet module is installed then ip address, subnet mask, gateway, dhcp, tcp
server, ports etc. can be changed.
If the power supply is connected to a PC , then the Customer name, which should be given in main menu
(Menu->Customer) must be set correctly as it is needed for activating the software license.
Operating manual ver. 2.1
Page 14
EBV40A-PS
Fig 3.3 Serial Interface Socket (DB9 male for RS232 and female for RS485)
Pin number
RS-485
RS-232
2
-
RxD
3
-
TxD
4
Mode Select : NC
-
5
GND
GND
7
-
RTS
8
RxD/ TxD
-
9
RxD/
-
TxD(inverted)
Shield
Shield
Shield
Table 3.1 Serial Interface Socket Connector Description
The Anybus interfaces modules can be exchanged any time on request. For the proper installation
please follow these instructions.
! CAUTION
Turn the unit off
Before proceeding ensure that the main power is off. This prevents any electrical
damage to the unit
! CAUTION
Screws fully loosened
Before inserting the module, ensure that the affixing screws have been fully loosened.
! CAUTION
Operating manual ver. 2.1
Page 15
EBV40A-PS
Proper insertion
Please carefully insert the module – parallel to the PCB board.
Operating manual ver. 2.1
Page 16
EBV40A
1
4
3
2
TORX 8
0.25Nm
Fig 3.4 Installation of an Anybus interface module
Operating manual ver. 2.1
Page 17
EBV40A
3.3.4 PROTECTION SIGNAL SOCKET INTERLOCK
To enable operation of power supply in mode OPERATE, short couples of connectors 1 and 4 in socket of
INTERLOCK signal. Missing protect signal (missing short of pins 1 and 4) causes run of power supply to
STANDBY mode and show warning on display
with simultaneous control LED
flashing.
.
Fig 3.5 Protection Signal Socket INTERLOCK
Pins 1,4 - Interlock
3.3.5 THERMOCATHODE PLUG WITH THERMOCOUPLE
The plug is an end of wire going out of choking coil , marked as „FILAMENT”. Through that cord flows
thermocathode glowing current Ifil, there is thermocouple for monitoring temperature of evaporator
connected as well.
Fig 3.6 Thermocathode plug with thermocouple
A and B – thermocathode
C – thermocouple (+)
D – thermocouple (-)
Operating manual ver. 2.1
Page 18
EBV40A
4
USE
4.1
FRONT PANEL DESCRIPTION
There are five blocks on front panel of power supply:
°
Graphic display
°
Steering keys
°
Diode controls
°
Handwheel (encoder) for adjustment of PSU parameters
°
PSU turn on and off button „POWER”
4.1.1 DIODE CONTROLS
POWER – indicator informing about power on the device
OPERATE – indicator informing if PSU is in OPERATE mode (thermocathode
current Ifil flows , anode voltage Ueng is present and delivered)
HV ON – warns about high anode voltage (higher than 48V)
FAILURE – flashing LED indicator – signalizes power supply failure
4.1.2 LCD DISPLAY
Main menu is displayed after switching on the device. The menu is described on the page 17.
4.1.3 ENCODER
Allows change adjusted parameters. Value of parameter, that could be changed through encoder, is usually,
marked with arrow (←).
Operating manual ver. 2.1
Page 19
EBV40A
4.1.4 STEERING KEYS
Steering of power supply , and movement between positions take place through 4 keys, which present
functions are described through LCD display.
Main functions of steering keys:
– serves to confirmation of choice, or to enter into next submenu
– serves to exit from menu/submenu, or cancellation performed operation
– serve to change options in menu or submenu
– serve to change between values of changed parameter
– serves to entering into functional menu of power supply
– switches device to operate mode OPERATE
– switches device to standby mode STANDBY
4.2
MAIN OPERATIONAL MENU
1 – Current keys functions
2 – Adjusted/measured value of ion current Flux
3 – Adjusted/measured value of anode voltage Ueng
4 – Adjusted/measured value of thermocathode current Ifil
5 – Actual power supply operation mode (AUTO / MANUAL)
6 – Information about operation mode of device – bar „INFO”
7 – Temperature of evaporator
8 – Value of emission current IE
9 – Adjusted value of ion current SET Flux
Operating manual ver. 2.1
Page 20
EBV40A
4.2.1 CHOICE OF WORK MODE – MANUAL / AUTO
As described at point 1.2 power supply can work in two modes - MANUAL or AUTO. Change of operation
mode is performed by encoder, after choosing position „MODE” in main operation menu.
Keeping main power supply parameters differs in both modes:
Operation
Ion current Flux
Anode voltage Ueng
Thermocathode current Ifil
There is only read value
User can set any voltage
User can set any current
displayed,
value. There is set value in
value. There is set value in
mode STANDBY displayed
mode STANDBY displayed
whereas in mode OPERATE
whereas in mode OPERATE
there is read value displayed.
there is read value displayed.
User can set any current
There is always automatic
There is automatic adjusted
value. There is set value in
adjusted(through
regulation
value displayed, but there is a
mode STANDBY displayed
circuit)
displayed,
possibility
whereas in mode OPERATE
without
there is read value displayed.
change.
mode
MANUAL
no
adjust
possibility.
AUTO
value
any
possibility
to
of
operator’s
change for a while.
Parameters, which can not be changed in current mode, are displayed as negated ones, for example
instead of
.
If device is in OPERATE mode and the encoder will be used to change particular parameter, then at place
of displayed read value for 2 seconds will be the adjusted value displayed, and then the read value will be
displayed again.
4.2.2 MAIN PARAMETERS ADJUSTMENT
For change of parameter in main operation menu, set with keys
The choice indicator ← at choose parameter , then set new value with encoder.
! CAUTION
Parameters, which symbol is displayed in negated form, can not be adjusted in present
operation mode.
4.2.3 POWER ON PSU – CHANGE MODE STANDBY / OPERATE
Change PSU operation mode, from OPERATE to STANDBY and reversed , is performed through keys:
and
. At the standby mode STANDBY voltages and currents are not delivered to PSU outputs (they
are turned off). There is info message ,
Operating manual ver. 2.1
, and switched off
Page 21
EBV40A
control diode,
which informs about such device status.
In OPERATE mode, voltages and currents are physically delivered to PSU outputs (they are turned on).
There is info message ,
, and switched on control
diode, which informs about such device status.
Information field displays also actually status of counting down clock „OPERATE” (described in point 4.3.2).
! CAUTION
Protect signals INTERLOCK
Switching PSU to OPERATE mode will not be possible, if the protect signal
INTERLOCK will not be present. There will be warning
displayed.
Operating manual ver. 2.1
Page 22
EBV40A
! CAUTION
Switching PSU to OPERATE mode will not be possible, if thermocouple is damaged.
(„SBR” at temperature display field).There will be
warning displayed.
4.3
FUNCTION MENU
Function menu of Power Supply enables configuration of PSU and change of all other device parameters.
Pressing the key
and
Pressing
causes entering to function menu, inside which operator can move using keys
.
key causes entering to chosen submenu. Key
causes
leaving
submenu,
or
entering into main operation menu.
Image 4.1 Function Menu
4.3.1 MAXIMAL EMISSION CURRENT– EMISSION MAX
Depending on material type, there are typical limited emission current values, they shouldn’t be exceeded.
For achievement of that objective , there is adjustment recommended, in submenu „EMISSION MAX”, value
of emission current limiter, which guarantee , that defined critical value will not be exceeded.
Image 4.2 Maximal emission current editor window
To set emission current limiter, enter submenu „EMISSION MAX” ,next use encoder to set desired value.
Pressing key
will accept entered changes, while key
will cancel entered changes.
! WARNING
Overflow of maximal emission current for evaporated material, can effect in mechanical
evaporator damage.
Operating manual ver. 2.1
Page 23
EBV40A
4.3.2 PSU OPERATE TIME - OPERATE TIME
Operation time counter (that count, how long PSU stays in OPERATE mode ) can work in two modes.
First mode-time counter work as a classic timer, counting up time of work in OPERATE mode, and change to
STANDBY mode is a result of user’s interaction.
Second mode-timer work as a countdown timer, from value adjusted by user, to value 0:00:00, afterwards
device automatically goes into STANDBY mode.
Actual timer operation mode is presented by arrow :
- „fi” – count up timer operation mode
- „‡” – count down timer operation mode – to automatic shutdown
For setting timer work period, and it’s operation mode, enter to submenu „OPERATE TIME”.
Image 4.3 PSU timer editor window
Adjusted position is highlighted by blinking. For change the value , use encoder, whereas position to change
has to be chosen by keys
and
End of operation by confirmation with
.
key, or cancel any time with
key.
If OPERATE mode will be activated when timer is set to 0:00:00 and work mode is „‡” , causes automatic
mode change to work mode „fi”.
Present state of PSU operation time counter is displayed on „INFO” bar, if device is in OPERATE mode.
4.3.3 DISPLAY ADJUSTMENTS
Contrast and brightness intensity of LCD display can be adjusted. This feature allows optimal setting of those
parameters, dependant of view angle. Keys
and
are used for choice of menu’s parameter
(submenu „DISPLAY”), that should be changed. Confirmation follows by pressing
key. Contrast and
brightness values can be adjusted with encoder, in range between 0% - 100%. Confirmation follows by
pressing key. Pressing causes restore
of previous settings. Changes of contrast and brightness
intensity are automatically stored in nonvolatile memory, and will be restored at next switching on the PSU.
Image 4.4 Submenu Display Adjustments
Device makes also screen saving mode possible (turns off the screen-„SCREEN SAVER”) , if during 15
minutes none key will be pressed, and encoder is not used.
Choice of option „SCREEN SAVER” in submenu „DISPLAY” causes display of window enabling switching on
„ON” or off „OFF” screen saver.
Operating manual ver. 2.1
Page 24
EBV40A
Image 4.5 Screen Saver switch on/off window – (submenu „SCREEN SAVER”)
4.3.4 SAVE AND LOAD CONFIGURATION OF POWER SUPPLY UNIT
Submenu „SAVE & LOAD” is used for save and load configuration data of evaporator EBV40A-PS PSU.
Image 4.6 Submenu Save and Load of PSU – „SAVE & LOAD”
Submenu „SAVE & LOAD” includes three positions, connected with execute of particular operation::
– operation writes all currently adjusted of PSU parameters, like a final current value Flux, anode
voltage in MANUAL mode, emission current limiter. Remember, after switching on PSU power, device
EBV40A-PS loads all parameters, which were saved as last ones.
– operation causes loading last written configuration of PSU.
– operation causes loading default configuration of PSU (manufacturer configuration).
4.3.5 Transmission protocol menu
The device has several modes of transmission including serial protocols RS232/485, USB, Ethernet and
Bluetooth. Exchanging modules for each protocol is very easy, via the Anybus interface. The
“TRANSMISSION MENU” and configuration options are described below.
Figure 3.12 Main submenu TRANSMISSION
The first option allows change to the desired transmission protocol.
Figure 3.13 Submenu MODULE KIND
Operating manual ver. 2.1
Page 25
EBV40A
The next option allows the chosen protocol to be configured. For serial protocols and Bluetooth it is possible
to change the baud rate from 2400 to 115200 bps. Parameters for Ethernet protocol are shown below. The
device may be operated over any network including the internet. Configuration is dependent on local network
settings and the user should refer to their IT professional for correct adjustment.
Figure 3.14 Sample parameters for Ethernet/IP configuration.
An example web-browser view is shown below.
4.3.6 INFORMATION ABOUT POWER SUPPLY VERSION
Submenu „INFORMATION” contains information about PSU EBV40A-PS software version.
Image 4.7 PSU EBV40A-PS version – submenu „INFORMATION”
4.3.7 SERVICE SETTINGS
Submenu SERVICE includes settings important only for PSU EBV40A-PS manufacturer, therefore entering
is secured by password.
Image 4.8
Operating manual ver. 2.1
Protection against entering submenu „SERVICE”
Page 26
EBV40A
5
STARTING THE EVAPORATE PROCESS
5.1
STARTING THE EVAPORATING PROCESS WITHOUT AUTOMATIC REGULATION
Procedure, that has to be executed, before operating OPERATE mode:
°
set the mode switch to MANUAL
°
set anode voltage Ueng to 0V
°
set thermocathode current Ifil to 0.00A
°
proper set emission current limiter (point 4.3.1)
°
then turn on OPERATE with
(point 4.2.3)
Image 5.1 Setting PSU before first run OPERATE
Activities , that has to be done during OPERATE mode:
°
Slowly increase high voltage Ueng up to about 600 – 800 V. If that is the first run since last
decompression of chamber, pay attention, if PSU does not emit strange noise, or sounds. If such a
thing take a place, please control emission current intensity IE, it’s value should be ≅ 0 mA.If current
has high value, and read voltage does not increase, turn off OPERATE and go to point 6.2 – „
Anode Voltage Fault Ueng”. If emission current value is ≅ 0 mA, and there are strange noises or
sounds from PSU audible, decrease voltage and check pressure inside chamber, which has to be
-6
lower than 9x10
mbar. If after next increase, time periods between strange sounds are getting
longer, treat that as a normal situation, and continue evaporate process.
°
Leave adjusted Voltage on desired level.
°
Slowly increasing thermocathode Filament glowing current Ifil, observe moment of increase
emission current IE and ion current intensity Flux. For Filament glowing current that has a value
about circa 2A, significant increase emission current intensity can be observed. If Filament glowing
current achieved value 2,5A without simultaneous increase of emission current and ion current,
decrease Filament glowing current to value 2,2A, and next approach anode (evaporated material) to
cathode. This process is realized by handwheel of shift manipulator (Image 2.1 p. 2). To approach
anode to cathode, handwheel has to be rotated clockwise. Excessive approaching evaporated wire
to cathode , can cause, that electrons will not bomb front side of anode, but only it’s lateral sides. As
a result of that process, following effects are present : anode material is melted , and there is a „ball”
shaped at the end of the anode. Emission conditions are deteriorated, there can even occur total
emission absence.
°
Increase emission current IE till achievement desired value of ion current Flux. Synchronous to
increase Filament glowing current Ifil, increase of emission and ion currents can have rapidly
Operating manual ver. 2.1
Page 27
EBV40A
character. When all parameters will be stabilized, it is allowed to open shutter inside evaporator
(Image 2.1 p. 5) and begin evaporating process.
5.2
STARTING THE EVAPORATE PROCESS WITH AUTOMATIC REGULATION
At the first run PSU since last chamber decompression, it is recommended to begin evaporating process, like
it is described in point 5.1. If the PSU behave itself correctly, you can start evaporating process with
automatic regulation:
°
In STANDBY mode switch operation mode to AUTO (point 4.2.1)
°
Adjust desired value of ion current Flux
°
Adjust correctly emission current limiter (point 4.3.1)
°
Turn on OPERATE with
key (point 4.2.3)
During PSU operation mode AUTO anode voltage Ueng and thermocathode current Ifil are regulated
automatically, to obtain stable ion current Flux, so close as it’s only possible, to user adjusted value.
Independently from automatic regulation process, user has always possibility to interference to
thermocathode current Ifil adjusted through regulator.
Operating manual ver. 2.1
Page 28
EBV40A
6
DIAGNOSIS OF DAMAGES AND FAULTS
6.1
NO THERMOCATHODE GLOWING CURRENT IFIL
PSU EBV40A-PS controls automatically measured thermocathode current value, with adjusted value,
comparing them both. In case, that no current flows, or it’s incorrect value , PSU rapidly goes from
OPERATE mode to STANDBY mode and displays message.
by pressing
.
Message can be cleared,
button.
There will be constantly flashing diode control present
,
and blinking message on „INFO” bar as well
.
Such a failure can be caused by the following reasons:
°
Not plugged thermocathode plug to evaporator machine
°
Bad contact of plug’s by electric connection of evaporator
°
Burnout of a thermocathode (check if there is low resistance < 1Ω between contacts A and B 4contacts plug (Image 2.1 p. 7).)
°
Damage of a current power supply
In case , thermocathode failure occur „FILAMENT FAILURE” , it is recommended to try switch PSU to
OPERATE mode, by pressing
key .If failure was caused by short interference, PSU will enter
OPERATE mode, otherwise will the next error message appear.
User can also try out turn off and on power supply. If those activities will not cause lost of failure warning
message, there is repair of evaporator or power supply necessary.
6.2
ANODE VOLTAGE UENG FAULT
EBV40A-PS automatically controls conformity measured value of anode voltage with adjusted value. If there
is no supply voltage, or it’s incorrect value, power supply automatically goes from OPERATE mode to
STANDBY mode and displays message
.
Message can be hidden by pressing
There will be constantly flashing diode control present
,
and blinking message on „INFO” bar as well
Such a failure can be caused by the following reasons:
°
Short of evaporated material to circuit ground or to thermocathode (check the resistance between
HV input and ground, also resistance between HV input and A input or B input of thermocathode)
(Image 2.1 p. 7). Low resistance means adequate : short between ground or thermocathode.
°
Damage of high voltage power supply.
Operating manual ver. 2.1
Page 29
EBV40A
In case , thermocathode failure occur „Ueng FAILURE” , it is recommended to try switch PSU to OPERATE
mode, by pressing
key .If failure was caused by short interference, PSU will enter OPERATE mode,
otherwise will the next error message appear.
User can also try out turn off and on power supply. If those activities will not cause lost of failure warning
message, there is repair of gun or power supply necessary.
6.3
NO PROTECTION SIGNAL INTERLOCK
Lost of protection signal INTERLOCK during normal operation in OPERATE mode will rapidly cause entering
STANDBY mode and display of warning message
After pressing the
.
key message will be cancelled but
there will be constantly flashing diode control present
,
and blinking message on „INFO” bar as well
Protection signal INTERLOCK is usually related to existence of enough vacuum level inside the chamber.
Therefore it’s lost usually means about deterioration vacuum condition and necessity of immediate break the
evaporating process (it’s done automatically).
Lost of INTERLOCK signal can be also caused through pulling out the plug, or damage the wire.
6.4
TEMPERATURE FAULT
Exceeding of allowed evaporator temperature , or damage temperature sensor during operation in
OPERATE mode will immediately cause entering to STANDBY mode and display warning
messages:
Messages can cleared by pressing the
and
.
key.
There will be constantly flashing diode control present
,
and also blinking message on „INFO” bar
or
.
Such a failure can be caused by the following reasons:
°
Non-operational water cooling system of evaporator
°
Damage of thermocouple wire or pull out the plug
6.5
ACHIEVEMENT OF MAXIMAL EMISSION CURRENT IE
Achievement maximal emission current (defined as described at point 4.3.1) will be signalized by flashing
message on „INFO” bar
. If PSU work in AUTO mode, existence maximal
emission current through 1 minute time, will cause entering to STANDBY mode , to avoid damage of
evaporator.
There will be such a message displayed :
Operating manual ver. 2.1
Page 30
EBV40A
6.6
NO EMISSION CURRENT IE
Possible reasons of no emission current:
°
No Filament glowing cathode current, or to low value of it.
! CAUTION
New thermocathode will emit electrons by a higher value of glowing current intensity.
°
Disconnected plug of „High Voltage”.
°
Evaporated material is too far away from thermocathode. To approach wire to cathode, handwheel
of manipulator should be rotated in clockwise direction. (Image 2.1 p. 5).
6.7
NO ION CURRENT FLUX
Possible reasons of no ion current:
°
Short of ion collector to the ground. Check resistance between BNC input and ground (Image
2.1).Resistance value should be bigger than 20 MΩ.
°
Power dissipated on anode is too low, to get the parameters needed to evaporate the material.
Possible problem solution:
°
Check, if the measurement wire for ion current is connected.
°
Check if measurement cable for ion current is conducting from ground side. For that reason, wire
should be disconnected and checked with resistance meter. If the cable is damaged, replace it for a
new one.
Operating manual ver. 2.1
Page 31
EBV40A
7
MAINTENANCE
7.1
CLEANING
Power supply of evaporator EBV40A-PS does not need any special maintenance treatments.
Enclosure of device can be cleaned with light wetted cloth. Do not use any aggressive and abrasive cleaning
agents.
! DANGER
Dangerous voltage
Inserting objects into air vent, or flow it with liquids endanger the user with electric
shock. Do not allow to flow with liquids or to wet device.
Operating manual ver. 2.1
Page 32
EBV40A
8
STORAGE AND REMOVAL
8.1
PACK
Keep original pack evaporator’s PSU EBV40A-PS.This pack is needed by transporting devices to service
department of PREVAC company.
8.2
STORAGE
Power Supply Unit EBV40A-PS can be stored only in dry room, by keeping following conditions:
Surroundings temperature: -20….+60 °C
Humidity: so low as it is only possible. Recommended storage inside tight pack with humidity
absorbing agent.
8.3
REMOVAL
Removal of power supply has to be done according to law rules considering collect and utilization of
electronic devices.
Operating manual ver. 2.1
Page 33
EBV40A
9
WARRANTY CONDITIONS
The equipment is made of quality materials and built with good craftsmanship. Warranty for the equipment as delivered and initially installed is one year
from the final installation acceptance. The customer cannot use the instrument in any part before the acceptance agreement is approved. Any deviation
from the full acceptance should be noted carefully on the agreement form and the warranty of accepted components will start at the time of partial
acceptance. Conditions of warranty are applicable to the country of first delivery only (country of subsequent and/or final destination is excluded from
PREVAC’s warranty).
PREVAC will either replace or, at their option, repair such parts of the equipment, which within the warranty time may have defects or imperfections. The
warranty does not include:
a)
Normal wear and tear and the need for regular maintenance.
b)
Furnishing of supplies, consumables or accessories.
c)
Items not purchased through PREVAC or damages caused by items not purchased through PREVAC.
d)
Damages caused by the customer’s failure to provide continually a suitable installation environment for the equipment with all facilities
described by the PREVAC "Site preparation guide".
e)
Damages caused by the customer’s use of the equipment for other than the purpose for which it was designed.
f)
Damages caused by the customer’s improper use of the equipment or supplies in conjunction with the equipment.
g)
Damages caused by the customer’s physical, mechanical or electrical alteration of the equipment or transportation after its initial installation.
h)
Natural disaster, including but not limited to fire, flood, water, earthquake, wind and lightening.
i)
The customer’s contamination of vacuum enclosure parts thereof and vacuum pumps.
Upon PREVAC’s request the dismounting of parts to be replaced or repaired and the remounting of replacement parts or repaired parts may be made by
the customer without cost to the PREVAC, provided such work is of a reasonable extent and the customer has personnel competent to do such work. For
replaced or repaired parts PREVAC give one-year warranty from date of receipt of such parts by the customer.
For standard parts, PREVAC gives the same warranties as for the basic instrument, the warranty periods to be counted from the date of acceptance of
these parts.
PREVAC's liability for defects or nonconformity's shall not exceed the price plus transportation costs of the defective part.
PREVAC makes no implied warranties, whether of merchantability, fitness for purpose or otherwise. Consequential losses and/or damages are excluded
from warranty. The remedies stated herein are exclusive.
PERFORMANCE
All figures quoted by PREVAC for performance are given in good faith and PREVAC cannot accept any liability except in respect of any figures specifically
guaranteed in his tender.
DOCUMENTS AND INFORMATION
Technical documents, such as drawings, descriptions, illustrations and the like, and all weight data, shall serve as an approximate indication only, provided
they have not expressly been specified as binding. PREVAC reserves the right to make alterations considered necessary.
Customer shall:
a)
Keep all technical drawings and other detailed descriptive materials supplied by PREVAC and marked the property of PREVAC, in locked
files,
b)
Disclose information of proprietary or confidential nature supplied by PREVAC only to such customer's employees who are required to know
c)
Not make any technical drawings and other detailed descriptive materials supplied by PREVAC, or any part thereof, available to a third party
the same for the use of the equipment, and
for copying or any other use without PREVAC's written consent in each particular case.
RETURNING GOODS FOR REPAIR
Before returning your device for repair to Prevac:
a)
Contact the PREVAC service department to get RMA number (ZR#)
b)
Send the Declaration of Contaminations, which was delivered to customer. The Declaration document is ready for download from PREVAC web
c)
Send the product suitably packaged with carriage and insurance paid.
d)
Mark the RMA number on the outside of the package in such a way that it is visible and clearly legible.
page www.prevac.eu as well.
DAMAGE OR LOSS IN TRANSIT
Loss or damage to goods in transit shall be reported by the customer PREVAC and preferably to the carriers as soon as possible after the customer knows
the occurrence. The customer upon receipt shall inspect all goods.
FORCE MAJEURE
The delivery time shall be reasonably extended, if hindrances occur which, despite PREVAC’s due care, they cannot avoid, such as, but not limited to,
epidemics, natural catastrophes, mobilization, war, riots, labor conflicts, serious breakdowns, accidents, official measures, shortage of materials, transport
difficulties.
GENERAL CONDITIONS
Without prejudice to the provisions of any agreement between PREVAC and the customer the supply of equipment and services by PREVAC is subject to
the following general conditions.
a)
General Conditions for the Supply of Plant and Machinery No. 188, prepared under the auspices of the United Nation's Economic
Commission for Europe, Geneva, March 1953,
b)
Addendum to General Conditions under a) above, issued by the Federations of the Mechanical Engineering Industries in Denmark, Finland,
Norway and Sweden in 1972,
Operating manual ver. 2.1
Page 34
EBV40A
c)
Additional Clauses for Supervision of Erection of Plant and Machinery Abroad No. 188 B, prepared under the auspices of the United Nation's
Economic Commission for Europe, Geneva, April 1964.
In case of conflict between the provisions of any agreement between PREVAC and the customer and the general conditions under a) - c) above, the
provisions of the agreement shall thus prevail.
Operating manual ver. 2.1
Page 35
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertising