MPI IMPACTTM Test Solutions |ITS150

MPI IMPACTTM Test Solutions |ITS150
Ready for “The Test”
www.mpi-corporation.com
MPI IMPACTTM Test Solutions | ITS150-TRIAX
150 mm Manual Probe System for accurate and reliable DC/CV measurements
Microscope Mount and Movement
Microscope and Optics Options
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Stable bridge for high quality optics
90° tilt for easy reconfiguration
25 x 25 mm air bearing or optional 50 x 50 mm
linear XY movement
Stereo MPI ST45
Various optics options available
Optional HDMI cameras, monitor user interface without
computer
Adjustable Platen Height
MicroPositioners
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Micrometer control for precise adjustment
20 mm range for various applications
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Probe Platen
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Stable and rigid design
Supports DC/CV and RF measurements
Rectangular adjustments for RF positioners
Designed for maximum thermal stability
Modular Chuck
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Unique Platen Lift
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Three discrete positions for contact, separation
(300 µm) and safety loading (3 mm)
Safety lock function at loading position
“Auto Contact” position with ±1 µm repeatability
for consistent contact quality
150 mm non-thermal triaxial chuck
Wide range of optional thermal chucks up to 300 °C
Field upgradeable for reduced cost of ownership
Easy switch between center and small wafer size
control
Chuck XY-Theta Stage Movement
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Ultra Small Footprint
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Includes four MP25 DC positioners with triaxial probe arms and 2 m triaxial cables
Supports up to 4 RF and 10 DC positioners
Wide range of positioners available
Optional probe arms for coaxial, Kelvin and RF measurements
Designed for bench top use
Comes with vibration absorber base
Low profile design for maximum usability
Ideal for load pull applications
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Unique puck controlled air bearing stage for quick
single-handed operation
180 x 230 mm XY total stage movement
Including 25 x 25 mm fine micrometer control
Resolution < 1.0 µm (0.04 mils) @ 500 µm/rev
Extra wide Y-range for easy loading
±5° Theta fine adjustment
Front Mounted Vacuum Control
***Available Options***
SZ10U-ITS150
50X50MU-ITS150
MP40U-ITS
FACILITY-ITS
TC-150EU-ITS
FACT SHEET-ITS150-TRIAX v1.0, 09-2016 © MPI Corporation 2016 - Data subject to change without further notice.
SUPERZOOM 10X / UPGRADE ITS150
50x50MM LINEAR MICROSCOPE MOVEMENT / UPGRADE ITS150
MP40 UPGRADE IMPACT - COAX / TRIAX
FACILITY UPGRADE IMPACT / 110 - 230V
150MM THERMAL CHUCK SYSTEM COAX / 150C / UPGR
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Easy access
Clearly marked
Ready for “The Test”
www.mpi-corporation.com
The complete test package includes:
59.2
TS150 Manual Test System with puck controlled air-bearing stage
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50
37
65.3
Y1=20
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180 x 230 mm (7.1 x 9.1 in) XY total stage movement
25 x 25 mm micrometer fine stage movement
+/- 5 degree fine chuck Theta rotation
Platen lift with discrete contact, separation (300 µm) and loading (3 mm) positions for ease of use, safety lock function at
loading position
Dedicated 20 mm fine platen height adjustment
Stable microscope bridge mount
Vibration absorbing base
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138
44.5
Y2=14
Stainless steel chuck top with vacuum rills
Triax (female) chuck connection
2 m triaxial cable (male-male)
52.6
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75.6
66.6
150 mm Coax Chuck, non-thermal
Precision 25 mm x 25 mm X-Y microscope transport
Very easy to operate, vacuum fixation with convenient On-Off switch
90 degree tilt for easy and safety probe replacement or reconfiguration
50 mm focus block
ST45 Stereo Microscope with 6.7:1 zoom ratio
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Set of 25x eyepieces for optimal magnification
Working distance 100 mm, C-mount adapter
72 LED ring illumination, four-zone selectable, external remote control
100-240V AC, CE
4x MP25 DC MicroPositioners for backlash-free probe positioning
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10 mm travel range in XYZ, 500 µm screw resolution
Universal adapter for DC arms
Easy, convenient, and tool-less arm exchange or height adjustment
Strong magnet base
4x Triax Probe Arms, with 2 m triaxial cables
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Ultra, low-noise triaxial cable
High-end triaxial connector with cable strain relief
Tungsten Probe Tips, 7 micron tip radius, one set of 25 tips
Accessories, wafer tweezers, L-key set
FACT SHEET-ITS150-TRIAX v1.0, 09-2016 © MPI Corporation 2016 - Data subject to change without further notice.
28.5
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15.9
Air-Bearing Microscope Movement / 25x25 mm
125.3
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