Model 959 and 959D Mass Spectrometer Helium Leak Detectors

Model 959 and 959D Mass Spectrometer Helium Leak Detectors
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
Manual No. 699909750
Revision U
September 2010
OPERATIONS MANUAL
Draft 9/22/10
Model 959 and 959D
Mass Spectrometer
Helium Leak
Detectors
Draft
9/22/10
Models 959 and 959D
Helium Mass Spectrometer
Leak Detectors
Contra-Flow, TriScroll and VacuSolv are trademarks of Varian Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Alconox is a registered trademark of Alconox, Inc.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M.
Skid-Mate is a registered Trademark of Hardigg Industries, Inc.
Switchcraft is a registered trademark of Switchcraft.
Copyright 2010
Varian Inc.
959 and 959D Leak Detectors
Table of Contents
Preface ...............................................................................................................................................ix
Warranty ......................................................................................................................................ix
Hazard and Safety Information .................................................................................................... x
Varian Services ..........................................................................................................................xvi
Contacting Varian Varian ...........................................................................................................xvi
Section 2. Operation ....................................................................................................................... 2-1
2.1 Operator Interface ............................................................................................................... 2-1
2.1.1 Primary Controls and Indicators.................................................................................. 2-2
2.1.2 Secondary Controls and Indicators ............................................................................. 2-3
2.1.3 Rear Panel Components............................................................................................. 2-5
2.1.4 Connecting to the Test Port ........................................................................................ 2-6
2.2 Startup Procedure................................................................................................................ 2-8
2.3 Changing the Audible Threshold.......................................................................................... 2-9
2.4 Running a Leak Test............................................................................................................ 2-9
2.4.1 Basic Test Procedure.................................................................................................. 2-9
2.4.2 Out-of-Range Situations............................................................................................ 2-11
2.4.3 Testing 1 Torr Range ................................................................................................ 2-11
2.5 Calibration and Tuning....................................................................................................... 2-12
2.5.1 Calibrating with a Calibrated Leak ............................................................................ 2-13
2.5.2 Tuning to He Using a Capillary Calibrated Leak ....................................................... 2-14
2.5.3 Tuning the Spectrometer Tube Using a Calibrated Leak for Tuning to He ............... 2-15
2.5.4 Tuning the Spectrometer Tube Using a Tuning Leak ............................................... 2-16
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DRAFT 9/22/10
Section 1. Introduction .................................................................................................................... 1-1
1.1 959 and 959D Mass Spectrometer Helium Leak Detectors ................................................ 1-1
1.2 Unpacking ............................................................................................................................ 1-4
1.2.1 Unpacking Instructions................................................................................................ 1-4
1.2.2 Removing the System from the Skid........................................................................... 1-5
1.3 Preparation for Operation .................................................................................................... 1-6
1.4 Installation............................................................................................................................ 1-6
1.4.1 Electrical Connections................................................................................................. 1-7
1.4.2 Gas Requirements ...................................................................................................... 1-8
1.4.3 Clean Room Use of the 959D ..................................................................................... 1-8
1.4.4 Bench System Installations ......................................................................................... 1-8
1.5 Vacuum System Description................................................................................................ 1-9
1.5.1 Measurement System ................................................................................................. 1-9
1.6 Internal Valving .................................................................................................................. 1-11
1.6.1 Direct Operation of the Valves .................................................................................. 1-11
1.6.2 Automatic Valve Operation for Large Volume Leak Checks ..................................... 1-12
1.6.3 Main Electronics Assembly and Circuit Boards......................................................... 1-13
1.7 Specifications..................................................................................................................... 1-14
959 and 959D Leak Detectors
DRAFT 9/22/10
2.6 Residual Background Check.............................................................................................. 2-18
2.6.1 Measuring the Background ....................................................................................... 2-18
2.6.2 Zero the Background ................................................................................................ 2-19
2.7 Shutdown and Restart Procedures .................................................................................... 2-19
2.7.1 Standby..................................................................................................................... 2-19
2.7.2 Shutdown .................................................................................................................. 2-19
2.7.3 Restarting After Short-Term Shutdown (Standby) .................................................... 2-19
2.7.4 Temporary Power Loss ............................................................................................. 2-20
Section 3. Maintenance and Parts Replacements .......................................................................... 3-1
3.1 Safety and Maintenance ...................................................................................................... 3-1
3.1.1 AC Power.................................................................................................................... 3-1
3.1.2 Static Charge .............................................................................................................. 3-1
3.1.3 Ion Source................................................................................................................... 3-1
3.1.4 O-rings ........................................................................................................................ 3-2
3.1.5 Cleaning Kit................................................................................................................. 3-2
3.1.6 Maintenance Schedules.............................................................................................. 3-3
3.2 Cleaning the Test Port ......................................................................................................... 3-4
3.3 Removing the Cover ............................................................................................................ 3-7
3.4 Cleaning or Replacing the Spectrometer Tube.................................................................... 3-8
3.4.1 Removing the Ion Source ........................................................................................... 3-8
3.4.2 Cleaning or Replacing the Ion Source ...................................................................... 3-13
3.4.3 Cleaning the Ground Slit Plate.................................................................................. 3-15
3.4.4 Installing the Ion Source ........................................................................................... 3-17
3.4.5 Cleaning the Preamplifier Cavity............................................................................... 3-20
3.4.6 Replacing the Preamplifier........................................................................................ 3-20
3.4.7 Installing the Spectrometer Tube .............................................................................. 3-21
3.5 Replacement Parts ............................................................................................................ 3-22
3.6 Accessories........................................................................................................................ 3-22
A.1 Why Leak Testing is Necessary ..........................................................................................A-1
A.2 Classes of Leak Detection...................................................................................................A-1
A.3 Terminology.........................................................................................................................A-2
A.4 Leak Detection Methods......................................................................................................A-3
A.5 Helium Mass Spectrometer Leak Detection ........................................................................A-4
A.5.1 Principles of Mass Spectrometry ...............................................................................A-4
A.5.2 Application as a Leak Detector ..................................................................................A-4
A.5.3 The Nature of Flow in a Vacuum ...............................................................................A-4
A.5.4 Facts About Leak Rates ............................................................................................A-5
A.6 Using Helium for Leak Detection .........................................................................................A-6
A.6.1 Test Piece Evacuated ................................................................................................A-6
A.6.2 Test Piece Pressurized ..............................................................................................A-7
A.6.3 Test Piece Already Sealed ........................................................................................A-7
A.7 Mass Spectrometer Leak Detector ......................................................................................A-8
Index
iv
959 and 959D Leak Detectors
List of Figures
959 Wet Pump - Front and Side ......................................................................................... 1-2
959 Dry Pump – Front and Side ......................................................................................... 1-3
959 ISO View Wet and Dry Pump....................................................................................... 1-3
Rear Panel Circuit Breakers ............................................................................................... 1-7
959/959D Bench System Installation .................................................................................. 1-8
959 Front View.................................................................................................................... 1-9
Vacuum System................................................................................................................ 1-11
Primary (left) and Secondary (right) Controls ..................................................................... 2-1
Primary Controls and Indicators.......................................................................................... 2-2
Opening the Access Panel.................................................................................................. 2-3
Secondary Controls and Indicators..................................................................................... 2-4
Rear Panel Components..................................................................................................... 2-5
Test Port with Blank-Off Flange Cap .................................................................................. 2-6
Centering Ring with O-ring.................................................................................................. 2-7
O-ring and Centering Ring on Test Port ............................................................................. 2-7
Test Port with Connected Device........................................................................................ 2-7
Principal Test Controls........................................................................................................ 2-9
Range at Two Arcs ........................................................................................................... 2-17
Test Port with Blank-Off Flange Cap .................................................................................. 3-4
Centering Ring with O-ring.................................................................................................. 3-4
O-ring and Centering Ring on Test Port ............................................................................. 3-5
Test Port with Connected Device........................................................................................ 3-6
Test Port with Blank-Off Flange Cap .................................................................................. 3-7
Centering Ring with O-ring.................................................................................................. 3-7
Ion Source and Preamplifier Connectors ............................................................................ 3-9
Wing Nut and Clamp........................................................................................................... 3-9
Extracting the Spectrometer Tube .................................................................................... 3-10
Spectrometer Tube O-ring and Centering Ring ................................................................ 3-11
Removing Flange Cap Screws ......................................................................................... 3-11
Disengaging Flange Cap .................................................................................................. 3-12
Removing the Ion Source ................................................................................................. 3-12
Ion Source......................................................................................................................... 3-13
Ion Source Cavity.............................................................................................................. 3-14
Ground Slit Plate............................................................................................................... 3-15
Cleaning the Ground Slit Plate.......................................................................................... 3-15
Ground Slit Plate Properly Inserted .................................................................................. 3-17
Replacing the Ion Source O-ring....................................................................................... 3-18
Ion Source Alignment Pin ................................................................................................. 3-19
Replacing the Preamplifier................................................................................................ 3-20
Spectrometer Tube O-ring and Centering Ring ................................................................ 3-21
v
DRAFT 9/22/10
1-1
1-2
1-3
1-4
1-5
1-6
1-7
2-1
2-2
2-3
2-4
2-5
2-6
2-7
2-8
2-9
2-10
2-11
3-1
3-2
3-3
3-4
3-5
3-6
3-7
3-8
3-9
3-10
3-11
3-12
3-13
3-14
3-15
3-16
3-17
3-18
3-19
3-20
3-21
3-22
959 and 959D Leak Detectors
DRAFT 9/22/10
A-1
A-2
A-3
A-4
A-5
vi
Test Piece Evacuated: Tracer Probe Used to Locate Leak ................................................A-6
Test Piece Evacuated and Hooded with Helium.................................................................A-6
Test Piece Pressurized: Detector Probe Used to Locate Leak...........................................A-7
Test Piece Sealed with Helium and/or Other Gases ..........................................................A-7
Magnetic Separation Principle ............................................................................................A-9
959 and 959D Leak Detectors
List of Tables
1-1
1-2
1-3
3-1
3-2
3-3
3-4
A-1
Helium Sensitivity Ranges and MDL................................................................................ 1-10
Valve Operating States .................................................................................................... 1-12
Operating Specifications .................................................................................................. 1-14
Scheduled Maintenance .................................................................................................... 3-3
As-Required Maintenance ................................................................................................. 3-3
Replacement Parts .......................................................................................................... 3-22
959 and 959D Model Accessories ................................................................................... 3-22
Decimal Notation ................................................................................................................A-2
DRAFT 9/22/10
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959 and 959D Leak Detectors
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959 and 959D Leak Detectors
d
Preface
Warranty
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.
ix
DRAFT 9/22/10
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
959 and 959D Leak Detectors
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION
The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
DRAFT 9/22/10
NOTE
The notes contain important information.
Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions,
and know how to avoid them. The consequences of unskilled, improper, or careless operation of the equipment can be serious. This product must only be operated and maintained
by trained personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional information provided by Varian. All
warnings and cautions should be read carefully and strictly observed. Consult local, state,
and national agencies regarding specific requirements and regulations. Address any safety,
operation, and/or maintenance questions to your nearest Varian office.
x
959 and 959D Leak Detectors
Solvents
CAUTION
The mechanical components of leak detectors are typically
cleaned with alcohol, methanol, or other solvents. When
heated, sprayed, or exposed to high-temperature equipment,
these solvents become flammable and explosive, causing
serious injury or death. Do not use these solvents near a
high-temperature source. Ventilate the working area with a
blower and work in a large, well-ventilated room.
Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin results in absorption through
the skin and moderate toxicity. Always ensure that cleaning
operations are carried out in large, well-ventilated rooms, and
wear eyeshields, gloves, and protective clothing.
Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
NOTE
During reassembly, always use Loctite® PST®
(teflon-impregnated pipe thread compound) on pipe threads.
DRAFT 9/22/10
CAUTION
xi
959 and 959D Leak Detectors
DRAFT 9/22/10
Equipment, General
WARNING
The leak detector is not designed for use with hazardous gases.
Verify that the system to be tested has been purged of all
hazardous gases prior to using the leak detector.When testing a
system that contained hazardous gases, the exhaust of the leak
detector should be connected to a scrubbed or toxic
containment exhaust. Exposure to hazardous gases could result
in serious injury or death.
WARNING
Equipment tightness is guaranteed for normal operating
conditions when the equipment leaves the factory. It is the
user’s responsibility to maintain the level of tightness
particularly when pumping dangerous products.
CAUTION
The performance and operating safety of this equipment can be
guaranteed only if it is operated according to normal conditions
of use.
CAUTION
Always allow at least 4 inches of clearance adjacent to the
ventilation holes at the front, back, and bottom of the
equipment enclosure.
WARNING
Disconnect power from the leak detector before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
CAUTION
Many components of the leak detector are static-sensitive
devices. Varian recommends that you wear a grounding device
when performing any maintenance on the leak detector and
especially when performing maintenance of static-sensitive
parts.
Power and Static
xii
959 and 959D Leak Detectors
WARNING
Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended and
could result in damage to the equipment and loss of warranty.
To avoid electric shock, connect the product power cord to a
grounded power receptacle. A protective ground connection by
way of the grounding conductor in the power cord is essential
for safe operation.
Before powering up the leak detector for the first time, verify
that the leak detector is configured to operate from the local
mains supply voltage.
Opening the enclosure may expose hazardous voltages. Always
disconnect the power cord and any interface cables before
opening the enclosure. Do not touch the power inlet’s contacts
for at least 10 seconds after disconnecting the power cord.
This equipment generates, uses, and can radiate RF energy, and
if not installed and used in accordance with the instructional
manual, may cause harmful interference to radio
communications.
When this equipment is operated in a commercial
environment, operation is subject to the following conditions:
❑ This equipment may not cause harmful interference, and
❑ This equipment must accept any interference received,
including interference (RF and ESD) that may cause
undesired operation.
This equipment may need to be reset after RF and/or ESD events
by cycling the Power Switch/Circuit Breaker on the back panel
of the leak detector.
Operation of this equipment in a residential area is likely to
cause harmful radio communications interference, in which
case the user will be required to correct the interference at his
own expense.
xiii
DRAFT 9/22/10
CAUTION
959 and 959D Leak Detectors
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques that are more important in leak detector servicing than in general vacuum
work:
CAUTION
Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox®. Alconox is
not compatible with aluminum and will cause damage.
DRAFT 9/22/10
NOTE
Normally, it is unnecessary to use vacuum grease. However,
if it must be used, avoid silicone types, and use it sparingly.
Apiezon® L grease (Varian P/N 695400004) is recommended.
O-ring Care
When removing, checking, or replacing O-rings, keep in mind the following:
NOTE
CAUTION
Varian recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. Follow these guidelines to prevent scratching
of any sealing surfaces:
❑ Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑ Do not use grease or use other substances on O-rings that
will come in contact with the spectrometer tube.
❑ Do not use alcohol, methanol, or other solvents on O-rings.
To do so causes deterioration and reduces the O-ring’s
ability to hold a vacuum.
❑ In allowable situations, apply a small amount of Apiezon L
grease and wipe the O-rings “shiny” dry.
xiv
959 and 959D Leak Detectors
NOTE
VacuSolv, included in the Component and Spectrometer Tube
Cleaning Kit (P/N 670029096), is recommended for cleaning
the spectrometer tube components.
VacuSolv can also be used for fine cleaning of other parts in the
leak detector’s vacuum system, such as valves and fittings. No
rinsing steps or high-temperature drying is required following
cleaning with VacuSolv. Although appropriate precautions are
advised, VacuSolv is compatible with most materials and does
not contain toxic chemicals or CFCs (chlorofluorocarbons).
Spectrometer Tube
The spectrometer tube operates at a very high vacuum
produced by the high vacuum pump. Service of the
spectrometer tube requires that this vacuum be vented to the
atmosphere.
CAUTION
Do not use grease or other substance on O-rings that will come
in contact with the spectrometer tube.
CAUTION
If the spectrometer tube magnet comes in contact with a
magnetic surface, the magnet may lose its field strength,
causing the spectrometer tube to lose sensitivity.
WARNING
Store the ion source in a cool, dry area in a tightly sealed
container. Wash hands thoroughly after handling the ion
source, especially before smoking or eating.
DRAFT 9/22/10
CAUTION
xv
959 and 959D Leak Detectors
Pumps
WARNING
To avoid injury, use proper lifting techniques when moving
pumps. Your system may have pumps that require two people
to move them safely.
WARNING
The vacuum pumps are also compressors; incorrect operation
may be dangerous. Study the “Installation and Operation
Manual” enclosed with your pump before starting pumps.
Varian Services
DRAFT 9/22/10
The following are just a few of the many services that Varian offers its customers. Please see
our catalog, or contact us to learn of other services that are available. Contact Varian Customer Service at 1-800-8VARIAN for details.
❑ Rebuilt spectrometer tubes are available on an exchange basis.
❑ NIST-traceable calibrated leak testing and verification services.
❑ Courses in leak detection, including in-depth operational and maintenance
instruction for the leak detector.
Contacting Varian
In the United States, you can contact Varian Customer Service and Technical Support at
1-800-8VARIAN.
Internet users:
❑ Send email to Customer Service and Technical Support at
vpl.customer.support@varianinc.com
❑ Visit our web site at www.varianinc.com/vacuum
❑ Order on line at www.evarian.com
See the back cover of this manual for a listing of our sales and service offices.
xvi
959 and 959D Leak Detectors
Section 1. Introduction
1.1 959 and 959D Mass Spectrometer Helium Leak Detectors
The Varian Models 959 and 959D are portable, self-contained mass spectrometer helium
leak detectors using respectively dry and wet (oil-based) vacuum roughing pumps.
The dry pump in the 959D makes the system particularly useful in clean room environments
where a wet, oil-based pump cannot be tolerated. The pumps have identical operating characteristics, although the 959D is somewhat heavier. The wet pump meets most mechanical
vacuum pumping needs, except in clean room applications.
CAUTION
The basic pump components are:
❑ Test port that connects the leak detector to the unit under test or to an associated
vacuum system
❑ High vacuum turbo pump
❑ Spectrometer tube
❑ Valve block
❑ 959:
DS-302 oil-based mechanical vacuum pump
959D: TriScroll 310 dry mechanical roughing pump
❑ Leak detector electronics
❑ Front control panels, rear I/O, and power panel on cart
The systems provide clean and automatic leak detection utilizing the Contra-Flow™
vacuum system design that allows testing at high test point pressures. The 959D provides a
dry, oil-free vacuum pumping system. The TriScroll dry roughing pump evacuates the test
port to the appropriate transfer pressure and provides ultra-clean system roughing and
backing functions. The DS-302 high vacuum mechanical pump in the 959 provides the
same functions in situations where the oil-free aspects of the 959D are not required.
1-1
DRAFT 9/22/10
The 959D with a TriScroll™ 310 mechanical pump (or similar
TriScroll pump) is considerably heavier than the 959 oil-based
pump. Refer to Table 1-3 on page 1-14 for the weights of both.
959 and 959D Leak Detectors
A Varian Turbo pump is used to achieve very high vacuum in the spectrometer tube. The
roughing pump is located on the cart below the leak detector. An optional power probe
accessory allows the leak detector to operate as a quick-response, high-sensitivity sniffing
leak detector.
Operation is performed using primary controls located on the front of the leak detector and
secondary controls located behind a locking access door, also at the front of the leak detector. The front view is shown in Figure 1-1 and Figure 1-2. The leak detector electronics
operate the spectrometer assembly, control the high vacuum pump, control the valve block,
and provide leak rate and system status information to the operator through bar graph and
LED indicators on the front panel, through audio, or through an optional meter or chart
recorder.
DRAFT 9/22/10
The 959 pumps are shown in Figure 1-1 through Figure 1-3.
Figure 1-1
1-2
959 Wet Pump - Front and Side
959 and 959D Leak Detectors
959 Dry Pump – Front and Side
Figure 1-3
959 ISO View Wet and Dry Pump
DRAFT 9/22/10
Figure 1-2
1-3
959 and 959D Leak Detectors
1.2 Unpacking
The leak detectors are shipped in a single disposable shipping carton, completely assembled and ready for operation.
The following components are shipped with the system:
❑ This Operations Manual.
❑ The leak detector mounted on the top shelf of a cart with its power cable (115 VAC
or 230 VAC as ordered) connected to a main power strip located on the bottom shelf
of the cart.
❑ DS-302 or TriScroll 310 pump bolted to the bottom shelf of the cart, connected by an
NW-25 manifold to the 959.
The roughing pump power cable is connected to the main power strip on the bottom
shelf of the cart.
DRAFT 9/22/10
❑ Operation manuals for both:
❑ High vacuum Turbo pump
❑ Appropriate roughing pump
1.2.1 Unpacking Instructions
To unpack the 959D:
1. Inspect the container for evidence of damage in shipment.
Do not discard evidence of rough handling.
2. Report, without delay, any damage to both the carrier and to Varian Customer Service at
1-800-8VARIAN.
3. Carefully remove the outer shipping container.
4. Inspect the leak detector and related items immediately for any indication of shipping
damage.
5. Carefully cut the strapping holding the leak detector on the skid.
6. Remove any loose boxes or packages and put them aside. Keep the original packing for
reuse in the event that it is necessary to return the leak detector to Varian.
7. Remove the front brace by undoing the two lag bolts.
8. Remove the plastic bag covering the leak detector.
The leak detector is ready to be removed from the skid. See Section 1.2.2 “Removing the
System from the Skid” before proceeding.
1-4
959 and 959D Leak Detectors
1.2.2 Removing the System from the Skid
There are two methods for removing the system from the skid.
WARNING
Removal of the 959D from the skid requires two people.
Method 1
1. Carefully roll the system toward the front of the skid.
2. Lift the front end of the system and gently lower it onto the floor.
3. Lift the rear of the system and roll it on the front casters until it clears the skid.
4. Gently lower the rear end onto the floor.
Method 2
2. Hold the leak detector against the back brace, unscrew and remove the front two
Skid-Mates® by turning them counterclockwise.
3. Make sure the helper is still holding the system against the back of the skid, and then
gently lower the front of the skid to the floor.
4. Slowly and carefully roll the system off the skid and onto the floor.
1-5
DRAFT 9/22/10
1. Using the brace removed in step 7 of Section 1.2.1 “Unpacking Instructions” as a lever,
carefully raise the front edge of the skid between 1" and 2".
959 and 959D Leak Detectors
1.3 Preparation for Operation
NOTE
Before operating the leak detector, read and understand the
warranty and safety information in the preface of this manual.
Be sure all packing materials have been removed and that appropriate power connections
are available before setting up the leak detector.
If you have purchased optional equipment for the 959D, set it up in accordance with the
operations manuals that were supplied with the equipment.
1.4 Installation
DRAFT 9/22/10
The system is delivered completely assembled as ordered. Locate the system close to its
power source and leave sufficient room for the operator to safely maneuver while performing tests. If additional ventilation is required for your application, provide it at this point (see
Section 1.4.3 “Clean Room Use of the 959D”).
1-6
NOTE
Refer to Section 1.4.4 “Bench System Installations” on page 1-8
for bench system installation, which requires some customer
assembly.
CAUTION
Allow at least a 4" of clearance to ensure that air flows freely
around the leak detector. Do not block the exhaust fans at the
rear of the leak detector.
959 and 959D Leak Detectors
1.4.1 Electrical Connections
The 959 and 959D cart-mounted systems operate from a single AC power source and can
be configured for either:
❑ 115 VAC, 50/60 Hz, 15 Amps
❑ 230 VAC, 50/60 Hz, 10 Amps
The cart has a power strip equipped with a single 3-prong cable that attaches to an appropriate power line. The DS-302 wet roughing pump has an on/off switch that should be left
ON at all times. The TriScroll dry roughing pump does not have a power on-off switch; it
turns on when the leak detector is powered up from the AC input power strip located on the
cart.
WARNING
Use only the power cord provided with your leak detector. The
use of extension cords is not recommended and could result in
damage to the equipment and loss of warranty.
DRAFT 9/22/10
As shown in Figure 1-4, two circuit breakers are located on the rear panel:
❑ 3 Amp breaker for the leak detector main POWER
❑ 1.5 Amp breaker for the ELECTRONICS
Figure 1-4
Rear Panel Circuit Breakers
1. Before making power connections, verify the following:
❑ The MAIN POWER switch (secondary controls behind the access door) on the
leak detector is OFF (down).
❑ The power switch on the AC input power strip located at the bottom of the cart
is OFF.
❑ An appropriately grounded receptacle is available.
2. Plug the AC power cable into the receptacle.
1-7
959 and 959D Leak Detectors
1.4.2 Gas Requirements
For testing products or checking leaks, use welding grade helium in a standard cylinder with
a pressure regulating valve.
1.4.3 Clean Room Use of the 959D
The 959D is highly recommended for leak detection in a clean room such as those used in
semiconductor manufacturing. The employment of a dry roughing pump (TriScroll 310) in
the 959D avoids possible contamination of the ambient atmosphere by vapors from the
oil-based DS-302 pump.
Particulate matter that is ejected by the roughing pump can be kept from the environment
by connecting an exhaust hose at the NW-25 pump exhaust connection and running the
hose outside. This procedure also reduces the background helium leak signal while lowering the possibility of particulate distribution in sensitive installations.
DRAFT 9/22/10
1.4.4 Bench System Installations
Figure 1-5 represents the process for installation of a bench system version of the 959/959D.
Note, cut the 3/4" black tubing into 2 equal lengths for use as shown.
Figure 1-5 959/959D Bench System Installation
1-8
959 and 959D Leak Detectors
1.5 Vacuum System Description
A front view of the leak detector is shown in Figure 1-6. The test port connects to the equipment to be tested. A front panel user interface displays the test port pressure and leak rate of
the test object. The spectrometer tube, high vacuum pump, and electronics assembly are
enclosed in the cabinet. Abbreviated operating instructions are located behind the locking
access door.
959 Front View
1.5.1 Measurement System
The system utilizes a Contra-Flow™ vacuum system that allows testing at high test point
pressures. The leak detector vacuum system connects to the unit to be tested at the test port,
maintains the required vacuum in the spectrometer tube, and removes helium after a test.
An optional probe provides fast response, high sensitivity sniffing mode operations. The system includes the following components:
Spectrometer tube
The spectrometer tube measures the helium concentration in the
object under test. The information is sent to the leak rate indicator
to provide a visual representation of the helium concentration. The
spectrometer consists of a dual thoriated iridium filament ion
source, a preamplifier, and a magnet assembly.
High vacuum pump
Both the 959 and 959D achieve high vacuum for the spectrometer
tube using the Varian V81 pump.
The helium sensitivity ranges resulting from the use of these pumps
are given in Table 1-1. See page 2-4 (➉ SENSITIVITY) for information on the HI and LO sensitivity switches.
1-9
DRAFT 9/22/10
Figure 1-6
959 and 959D Leak Detectors
Table 1-1
Helium Sensitivity Ranges and MDL
Helium Sensitivity in atm cc/sec
HI
MDL*
2x10−9
LO
Range
10−8 to 10−5
MDL*
2x10−8
Range
10−7 to 10−4
*MDL - minimum detectable leak
TriScroll 310 or
DS-302 Roughing
Pump
The roughing pump provides:
❑ The intermediate vacuum required to operate
the high vacuum pump (as low as 10 mTorr).
The roughing pump discharges into the atmosphere.
❑ The pumping capacity required to evacuate the test
DRAFT 9/22/10
object to prepare it for testing.
Optional Components Optional components for use with the leak detector include:
❑ A Power Probe sniffer (P/N K9565301) for fast response,
high sensitivity sniffing mode operations.
❑ The speaker with internal impedance between 4 Ω and
8 Ω, and a 5 watt minimum power capability can be up to
50 feet (15.24 m) from the leak detector. This jack can also
drive a set of headphones. The internal stereo loudspeaker is
disabled whenever there is a connection to this rear panel
jack.
❑ A leak rate meter or a chart recorder for connection to the
recorder output, at the rear of the leak detector to monitor
the results of leak tests.
The remote device should have a impedance > 500 kΩ in a
voltage range from 0 to −5 VDC. A mating plug is not
supplied. Use a Switchcraft® 260 monaural phone jack or
equivalent for connections.
1-10
959 and 959D Leak Detectors
1.6 Internal Valving
The vacuum system is shown in Figure 1-7.
Figure 1-7
Vacuum System
1.6.1 Direct Operation of the Valves
The leak detector valve system allows for evacuation, testing, and venting of the object to
be tested. The main electronics are responsible for automatically sequencing the testing
operation as described in the next section. The front panel operating buttons display the
current leak detector mode. All valve coils operate at line voltage.
There are four valves:
❑ (V1)
Roughing valve
❑ (V2)
Test valve
❑ (V3)
Vent valve
1-11
DRAFT 9/22/10
TriScroll 310 or DS-302
Roughing Pump
959 and 959D Leak Detectors
1.6.2 Automatic Valve Operation for Large Volume Leak Checks
The leak detector valve control system allows large volumes to be pumped without damaging the leak detector. If the leak detector is not advanced to Test or the test port pressure is
above 1 Torr, the system automatically switches between Start mode and Hold mode every
three minutes. When in Hold mode, V1 is closed, V2 is opened, and the TriScroll roughing
pump clears the foreline of any back pressure that may have built up in the time the leak
detector was pumping on the external volume.
The leak detector remains in Hold mode for 30 seconds. After this time, the Test valve V2
automatically closes and the Roughing valve V1 opens to continue pumping on the external
volume. This switching continues indefinitely if the leak detector is left in Start mode or
until the leak detector is switched into Test mode. If the test port pressure rises above 1 Torr,
overpressure protection automatically sets the leak detector into Hold mode. The valve
operating states are outlined in Table 1-2.
Table 1-2 Valve Operating States
DRAFT 9/22/10
Valve
Operating Mode
1-12
Roughing
(V1)
Test
(V2)
Vent
(V3)
VENT
Closed
Open
Open
START
Open
Closed
Closed
HOLD
Closed
Open
Closed
TEST
Open
Open
Closed
959 and 959D Leak Detectors
1.6.3 Main Electronics Assembly and Circuit Boards
The main electronics assembly and circuit boards provide control for the leak detector. The
main electronics assembly provides the following controls:
❑ Adjustment of spectrometer tube voltages for leak rate tuning
❑ Volume control and threshold adjustment
❑ Calibration
❑ Filament selection, activation, and emission adjustment
❑ Residual helium signal background check used during prolonged leak checking
The internal enclosure houses four circuit boards:
The display board controls the bar graph displays and associated
drivers.
Main electronics
board
The main electronics board operates and controls the
spectrometer tube.
Logic board
The logic board controls the front panel operation buttons.
Turbo pump
controller board
The turbo pump controller board powers the V81 pump. It is a
microprocessor-controlled, solid-state frequency converter with
self-protection features. The pump controller incorporates all the
facilities required for automatic operation of the turbo pump.
1-13
DRAFT 9/22/10
Display board
959 and 959D Leak Detectors
1.7 Specifications
Operating specifications for the 959 and 959D leak detectors are given in Table 1-3.
NOTE
For detailed specifications for the V81 high vacuum pump, and
the DS-302 and TriScroll roughing pumps refer to their
manuals.
Table 1-3
Operating Specifications
DRAFT 9/22/10
Parameter
Value
Electronic Response
Time
0.5 seconds for helium, in accordance with AVS Standard 2.1
Amplifier Drift
Less than 2% of most sensitive scale in accordance with AVS Standard 2.1
Noise Level
Less than 2% of full scale, peak-to-peak, in accordance with AVS Standard 2.1
Leak Indicator
50-segment bar graph with exponent display. Two sets of direct reading
sensitivity ranges comprise four decades in each range:
10-8 to 10-5 atm cc/sec (HI sensitivity, low speed)
10-7 to 10-4 atm cc/sec (LO sensitivity, high speed)
High Vacuum Pump
77 l/m, maintenance-free turbomolecular pump
Roughing Pumps
959: DS-302 Oil-based Pump
959D: TriScroll 310 Pump with 10 mTorr base pressure
Test Port
NW-25 fitting
Operating Temperature
5 oC to 35 oC (41 oF to 95 oF)
Power Requirements
❑ 115 VAC, 50/60 Hz, 15 Amps
❑ 230 VAC, 50/60 Hz, 10 Amps
Vacuum Gauges
Thermocouple gauges with ranges from ATM to 10−3 Torr monitor pressures in
the spectrometer tube and in the test port manifold.
1-14
959 and 959D Leak Detectors
Section 2. Operation
This section contains instructions for operating the leak detector in its test cycle. The test
cycle utilizes a connection between the test object and the leak detector so that helium
passing through a leak in the object can be detected. For optimal performance, Varian recommends tuning and calibrating the leak detector at the beginning of each day's testing. For
instructions, see Section 2.5 “Calibration and Tuning” on page 2-12.
2.1 Operator Interface
Figure 2-1 shows the Model 959D front panel primary controls and indicators. The 959
front panel is the same except for its nameplate.
❑ Primary controls and indicators are for performing tests
detector.
Figure 2-1
Primary (left) and Secondary (right) Controls
2-1
DRAFT 9/22/10
❑ Secondary controls, located behind an access panel to tune and calibrate the leak
959 and 959D Leak Detectors
2.1.1 Primary Controls and Indicators
The primary controls are shown in the front panel drawing of Figure 2-2.
1
2
3
4
5
➀ TEST button
Lights when leak detector moves into
TEST after START or when pressed
from HOLD.
➁ START button
This initiates test port roughing, which
then automatically transfers into TEST.
Lights while the test port is being
roughed down and when pressed from
HOLD.
6
7
➂ HOLD button
DRAFT 9/22/10
8
9
Lights when power is first applied and
when pressed.
In HOLD, the rough valve is OFF and
the test port is isolated.
The leak detector moves into HOLD if
spectrometer tube pressure is excessive or if there is an ion source filament failure.
12
\
10
11
Figure 2-2 Primary Controls and Indicators
➃ VENT button
➄ HI VAC OK
➅ PRESSURE
Lights when pressed to vent the test port to the atmosphere.
Green LED lights when operational vacuum is reached in the spectrometer tube. Remains lit until vacuum condition is lost.
Displays the test port pressure in milliTorr.
indicator
2-2
➆ FIL Indicator
Green LED indicates that the spectrometer tube filament is turned
on and emission is present.
➇ OVER range
Indicates an over-scale condition. See Section 2.4.2 “Out-of-Range
Situations” on page 2-11 for details.
959 and 959D Leak Detectors
➈ LEAK RATE display
Bar graph shows the leak rate of the object under test in atm cc/sec.
The mantissa (x10) is on the vertical bar graph; the exponent is
shown in the LCD window.
➉ UNDER range
Indicates an under-scale condition. See Section 2.4.2
“Out-of-Range Situations” on page 2-11 for details.
11
ZERO Adjustment
For fine control of the zero leak rate setting. The control is used in
conjunction with the COARSE ZERO adjustment on the secondary
control panel.
12
RANGE Switch
Clockwise:
Counterclockwise:
Low sensitivity, large leaks.
High sensitivity, small leaks.
See Table 1-1 on page 1-10 for range values.
2.1.2 Secondary Controls and Indicators
Figure 2-3
Opening the Access Panel
The secondary control panel is shown in Figure 2-4 on page 2-4.
The leak detector is tuned and calibrated at the factory prior to shipment. During normal
use, the leak detector should be recalibrated using the secondary controls. These controls
are grouped according to calibration and tuning functions. Refer to Section 2.5 “Calibration
and Tuning” on page 2-12 for information on how and when to calibrate.
2-3
DRAFT 9/22/10
The secondary controls are on the front of the leak detector behind a keyed access panel.
The partially open panel is shown in Figure 2-3.
959 and 959D Leak Detectors
MAXIMUM LEAK RATE Grouping
➀ FOCUS
Used for tuning the spectrometer tube by adjusting the focus
plate-to-chamber voltage.
➁ ION
A 10-position dial for adjusting the ion source chamber voltage.
Used for tuning the spectrometer tube.
➂ RESIDUAL
BACKGROUND
1
➃ COARSE ZERO
For large zero leak rate adjustments.
➄ FIL Grouping
Controls the filament in the ion source.
DRAFT 9/22/10
2
1 or 2 toggle switch Selects between ion source filaments
1 and 2.
ON/AUTO or OFF
toggle switch
ON/AUTO provides filament activation
when HI VAC OK is achieved. OFF disables filament emission.
EMIS
Adjusts the ion source emission voltage
when tuning the spectrometer tube.
➅ AUDIO
VOL outer ring: Controls the volume of
internal speaker, external speaker, or
headphones.
THOLD inner ring: Volume threshold for
an alarm.
➆
Adjusts amplifier gain to make the leak
rate reading agree with a calibrated leak.
3
4
5
6
7
8
CAL
➇ MAIN POWER
Main power control for the leak
detector.
➈ READY/TURBO
LED that indicates the Turbo pump is at
full operational speed.
➉ SENSITIVITY
Switches leak rate sensitivity between HI
and LO. Used in conjunction with the
RANGE switch.
9
10
Figure 2-4 Secondary Controls and Indicators
2-4
Kept in the RUN position except when
checking the background leak rate.
959 and 959D Leak Detectors
2.1.3 Rear Panel Components
Rear panel components are shown in Figure 2-5.
1
3
2
Figure 2-5
Rear Panel Components
➀ Exhaust fans
Two exhaust fans cool the high vacuum pump and internal
electronics.
➁ Speaker
➂ Power cable
➃ Phono Jack
Loud speaker provides an audible indication of leak rate.
(under manifold)
➄ Circuit Breakers
DRAFT 9/22/10
5
4
115 or 230 VAC line power cable. Voltage is factory-set.
Connection for loudspeaker or headphones, and a rate meter or
chart recorder.
The POWER circuit breaker provides AC to the leak detector.
The ELECTRONICS circuit breaker provides independent protection to the power distribution within the leak detector.
Both breakers are push-to-reset.
The MAIN POWER switch inside the front panel access door
subsequently turns the leak detector on or off. (see Figure 1-4 on
page 1-7).
The roughing pumps get their power directly from the power strip
at the base of the cart. The DS-302 wet pump has an on/off switch
that should always remain on.
2-5
959 and 959D Leak Detectors
2.1.4 Connecting to the Test Port
The unit under test or the associated vacuum system to be monitored is connected to the
test port at the top of the leak detector (Figure 2-6). Information regarding the various leak
detection methods is given in Appendix A “Introduction to Leak Detection”.
NOTE
You should have a variety of adapter tubulation sizes on hand
to fit the test port. The Test Port Adapter Kit (Varian
P/N 86428801) has twelve adapters ranging from
1/16" to 1" in diameter.
CAUTION
To avoid contamination of the vacuum system, the test port
blank-off flange cap should be in place when the leak detector
is not being used for testing.
DRAFT 9/22/10
The NW-25 uses the blank-off flange cap on top of the centering ring when the system is not
in use or when in use but not connected to a device.
To connect to the test port:
1. Turn the test port wing nut counterclockwise to loosen it (Figure 2-6) and remove the
quick clamp (Varian P/N KQ25AWP) from the test port.
CAUTION
Figure 2-6
2-6
Be careful not to drop the test port blank-off flange cap when
you remove the test port tightening nut. It is deceptively heavy
for its size.
Test Port with Blank-Off Flange Cap
959 and 959D Leak Detectors
2. Remove the test port blank-off flange cap, if present (Figure 2-7).
Figure 2-7
Centering Ring with O-ring
3. Place the centering ring onto the top of the test port (Figure 2-8).
O-ring and Centering Ring on Test Port
4. Insert the device for connection.
5. Replace the quick clamp onto the test port and tighten the wing nut clockwise until it is
just tight enough to stay in place.
Figure 2-9 shows the system with a connected device.
Figure 2-9
Test Port with Connected Device
2-7
DRAFT 9/22/10
Figure 2-8
959 and 959D Leak Detectors
2.2 Startup Procedure
The controls referred to in the following procedure are shown in Figure 2-2 on page 2-2 and
Figure 2-4 on page 2-4.
To perform this procedure:
1. Be sure that the NW-25 test port quick clamp is tight.
2. Check the vacuum connections at the top of the TriScroll 310 or DS-302 roughing pump
and at the rear of the system for tightness.
NOTE
On the 959, be sure the power switch on the DS-302 roughing
pump is on; this switch is left on at all times.
3. Turn the cart power strip on to start the roughing pump.
DRAFT 9/22/10
4. Open the access panel door and move the MAIN POWER switch to ON.
5. Check that the ON/AUTO switch is set to ON to start the turbo pump.
6. Set the FIL toggle to ON/AUTO.
❑ The HOLD button is lit.
❑ The HI VAC OK and TURBO READY indicator LEDs light.
Wait for the FIL indicator to light. You may have to repeat step 6 until the FIL light stays
lit. If the filament does not light after repeated attempts, the ion source may have to be
replaced.
Qualitative analysis for leak presence or absence can begin immediately, however, 1/2 hour
warm-up time is necessary before performing calibration and quantitative measurements.
To calibrate the leak detector, see Section 2.5 “Calibration and Tuning” on page 2-12.
2-8
959 and 959D Leak Detectors
2.3 Changing the Audible Threshold
The frequency of the signal is proportional to the leak rate. The controls referred to in the
procedure are shown in Figure 2-2 on page 2-2 and Figure 2-4 on page 2-4. The volume
control VOL for the speaker is located with the secondary controls behind the locking
access door. The audible threshold THOLD is set to zero at the factory.
To change the audible threshold:
1. Rotate the THOLD knob clockwise until the desired point is reached.
2. Note the position of the RANGE and ZERO controls.
3. Select a sensitivity range using the RANGE control.
4. Use the ZERO control to move the bar graph segment up scale.
5. Return the ZERO and RANGE controls to their original positions once verification is
complete.
2.4 Running a Leak Test
2.4.1 Basic Test Procedure
Allow 1/2 hour for the pumps to warm up completely and for the system to stabilize. Verify
that the leak detector has been recently tuned and calibrated as instructed in Section 2.2
“Startup Procedure”. The principal test controls are shown in Figure 2-10.
Figure 2-10
Principal Test Controls
2-9
DRAFT 9/22/10
The alarm should be audible and rise relative to the increase on the bar graph. If the
alarm is not audible, be sure that the threshold is set correctly and that the VOL is
turned up.
959 and 959D Leak Detectors
To perform this procedure:
1. Press VENT to vent the test port to atmosphere.
2. Connect a test object to the test port using the NW-25 test port connection.
Refer to Section 2.1.4 “Connecting to the Test Port” on page 2-6.
3. Press START.
When the test port pressure goes below 1 Torr (shown as the green band on the
PRESSURE display), the TEST button illuminates indicating a measurement is in
progress.
If the test port pressure does not get down to 1 Torr in three minutes, the system assumes
that there is a gross leak in the test object or the system is pumping down a very large volume. The system goes into HOLD to allow more time for pumpdown. When the pressure
drops below 1 Torr, the TEST reactivates.
DRAFT 9/22/10
The HOLD button illuminates for 30 seconds alternating with the START button every three
minutes if the test port pressure fails to drop below 1 Torr.
NOTE
If the HI VAC OK or the FIL LED turn off, contact Varian
Customer Service at 1-800-8VARIAN.
4. Observe the bar graph display to determine if the object passes or fails the leak test.
5. When the test is compete:
a. Press VENT.
b. Loosen the test port NW-25 quick clamp.
c. Remove the test object.
2-10
959 and 959D Leak Detectors
2.4.2 Out-of-Range Situations
The testing range of the leak detector is set by the RANGE switch. The leak rate within the
set range is displayed as a 0 to 10 vertical illumination on the primary front control panel of
Figure 2-2. Either the OVER or UNDER LED lights up if the measured leak rate is
out-of-range for the particular setting of the RANGE switch.
If the OVER LED is steadily ON and the vertical bar graph is at
maximum, rotate the RANGE switch clockwise until the vertical
display falls within its operating range. If the Range switch arrives
at its highest setting of 4 bars and the display is still stuck at its highest point, you can assume that a gross leak exists associated with
the object under test.
UNDER range
If the UNDER LED is steadily ON and the vertical bar graph is at
minimum, rotate the RANGE switch counterclockwise until the vertical display falls within its operating range. If the Range switch
arrives at its lowest setting of 1 bar and the display is still stuck at its
lowest point, you can assume that the system background is actually below any previously set zero value. Refer to Section 2.6.1
“Measuring the Background” on page 2-18 to re-zero the leak
detector.
2.4.3 Testing 1 Torr Range
The leak detector detects very small leaks at very low pressures, but, the system can also
detect leaks at relatively high pressures (gross leaks) by placing the optional throttle valve,
P/N R1947301, between the test object and the test port. The throttle valve maintains a tolerable foreline pressure of less than 1 Torr. The leak detector does not go into test until it is
below 1 Torr.
To measure a leak at a test port pressure near or below 1 Torr, install the throttle valve and
then proceed with the measurement.
To perform this procedure:
1. Press VENT to vent the test port to atmosphere.
2. Loosen the NW-25 test port quick clamp and remove the test object.
3. Place the throttle valve on the test port and tighten the NW-25 quick clamp to establish
a vacuum-tight seal.
4. Connect the object on the throttle valve at the test port.
5. Open the throttle valve several full turns.
6. Press START and slowly close the throttle valve until the leak detector transfers into
TEST.
2-11
DRAFT 9/22/10
OVER range
959 and 959D Leak Detectors
2.5 Calibration and Tuning
It is good practice to calibrate the system daily. Calibration checks requiring gross adjustments indicate that the spectrometer tube requires tuning or replacement. This situation is
indicated when one or more of the following controls come close to their maximum setting:
❑ FOCUS
❑ ION
❑ EMIS (filament emission)
❑ CAL
You must retune the system when:
❑ The ion source has been replaced
❑ Calibration adjustments go out-of-range
DRAFT 9/22/10
❑ The background cannot be zeroed
Use one of the following procedures to calibrate or tune the leak detector:
❑ Section 2.5.1 “Calibrating with a Calibrated Leak” on page 2-13
❑ Section 2.5.2 “Tuning to He Using a Capillary Calibrated Leak” on page 2-14
❑ Section 2.5.3 “Tuning the Spectrometer Tube Using a Calibrated Leak for Tuning to
He” on page 2-15
❑ Section 2.5.4 “Tuning the Spectrometer Tube Using a Tuning Leak” on page 2-16
2-12
959 and 959D Leak Detectors
2.5.1 Calibrating with a Calibrated Leak
Verify that startup has taken place, that the pumps are up to speed, and that the leak detector is ready to test (Section 2.2 “Startup Procedure” on page 2-8). Both primary and secondary controls are used in this procedure. Refer to Figure 2-2 on page 2-2 and Figure 2-4 on
page 2-4.
CAUTION
If the leak detector has been off for over 3 hours, wait the full
1/2 hour warm-up period before recalibrating or tuning.
The optional calibrated leak level is printed on a label on the side of the leak. The first step
is to attached the calibrated leak to the test port.
To perform this procedure:
1. Press VENT.
3. Loosen the NW-25 test port quick clamp and remove the test port blank-off flange cap.
4. Install the calibrated leak with its valve open into the test port and retighten the NW-25
quick clamp.
5. Press START and wait until TEST lights up.
6. Check the leak rate indication on the vertical bar graph.
It may be different from the calibrated leak value.
7. Set RANGE to the value that corresponds to the exponent on the calibrated leak.
8. Close the valve on the calibrated leak.
The leak rate shown on the bar graph should drop to zero (one bar lit).
❑ If the leak rate drops to zero, go to step 9.
❑ If the leak rate does not drop to zero, the leak detector is not detecting helium.
Go to Section 2.5.3 “Tuning the Spectrometer Tube Using a Calibrated Leak for
Tuning to He”.
9. Rotate RANGE to the far left, its most sensitive position.
2-13
DRAFT 9/22/10
2. Place RESIDUAL BACKGROUND in RUN.
959 and 959D Leak Detectors
10. Slowly ZERO the leak detector using the control on the primary panel.
If a larger adjustment is necessary, first adjust COARSE ZERO on the secondary panel
and then ZERO on the primary panel.
11. Set RANGE to the value that corresponds to the exponent on the calibrated leak.
12. Open the calibrated leak valve and wait about 10 seconds for the leak rate bar graph to
settle.
13. Use CAL to set the bar graph to the value that corresponds to the mantissa on the
calibrated leak.
❑ If calibration is successful, you can set the bar graph indicator equal to the calibrated
leak value.
❑ If calibration is not successful, the leak detector requires tuning.
DRAFT 9/22/10
Refer to the procedure in Section 2.5.3 “Tuning the Spectrometer Tube Using a
Calibrated Leak for Tuning to He” on page 2-15.
CAUTION
To prevent a build-up of helium and minimize deterioration of
the calibrated leak, always store the calibrated leak with its
valve open.
14. Press VENT, remove the calibrated leak, and proceed with testing.
2.5.2 Tuning to He Using a Capillary Calibrated Leak
To calibrate using a capillary type of calibrated leak:
Follow the procedure for checking calibration using a calibrated leak in Section 2.5.3 “Tuning the Spectrometer Tube Using a Calibrated Leak for Tuning to He”, except:
❑ Instead of step 3, apply helium (from a source) as a substitute for opening the valve
on the calibrated leak
❑ Instead of step 5, remove helium as a substitute for closing the valve on the
calibrated leak.
2-14
959 and 959D Leak Detectors
2.5.3 Tuning the Spectrometer Tube Using a Calibrated Leak for Tuning to He
When tuning is done carefully, the day-to-day changes are very small and subsequent calibration may require only slight adjustment of the CAL control. The leak detector should be
warmed up before you attempt to tune the spectrometer tube. The controls mentioned in the
following procedure are shown in Figure 2-2 on page 2-2 and Figure 2-4 on page 2-4.
NOTE
Increasing the audible tone can aid in leak detector tuning.
To tune the spectrometer tube using a calibrated leak:
1. Perform steps 1 through 7 of the calibration procedure on page 2-13.
2. Turn RANGE to the value of the exponent indicated on the calibrated leak.
3. Slowly adjust FOCUS for a maximum on the leak rate display.
It is now necessary to be sure that the spectrometer tube is tuning to a helium peak and
not another element such as carbon or hydrogen.
a. Close the valve on the calibrated leak.
b. The leak rate should drop to zero (one bar lit).
If the leak rate does not drop to zero, repeat the FOCUS adjustment and verification.
4. Slowly adjust ION on the secondary panel for a maximum on the leak rate display.
The ION control is a 10-turn potentiometer and normally needs to be adjusted only
slightly for a maximum peak on the display. When tuned to helium, the outer dial on the
ION control at the 12 o'clock position should indicate between 2 and 8.
NOTE
To achieve optimum Ion-Focus and Emission adjustment,
adjust in one direction until the leak rate bar graph reaches its
maximum value and then begins decreasing. Readjust back to
the max value. This is now the peak of the signal. The audible
signal can also be used in finding the peak signal.
5. Close the valve on the calibrated leak.
The leak rate should drop to zero with just one bar lit on the display.
6. Adjust the filament emission pot (Figure 2-4 on page 2-4, item 5) for the maximum
helium leak rate signal.
2-15
DRAFT 9/22/10
If the bar graph display is <1 or >9, move RANGE until the bar graph displays between
1 and 9.
959 and 959D Leak Detectors
A change in one adjustment may affect the others. Therefore, it may be necessary to
repeat step 2 through step 5 until no significant change occurs in the leak rate reading.
The leak detector is now tuned to helium.
NOTE
If tuning cannot be achieved, system service may be necessary.
Contact Varian Customer Service at 1-800-8VARIAN for further
instructions.
7. Calibrate the leak detector.
See Section 2.5.1 “Calibrating with a Calibrated Leak” on page 2-13.
8. Press VENT and remove the calibrated leak.
DRAFT 9/22/10
CAUTION
To prevent a build-up of helium and to minimize deterioration
of the calibrated leak, always store the calibrated leak with its
valve open.
2.5.4 Tuning the Spectrometer Tube Using a Tuning Leak
The tuning leak is an adjustable needle valve in an adapter to fit the test port. When the needle valve is opened such that test port pressure is 100 mTorr, helium naturally present in the
atmosphere (5 parts per million) enters the leak detector giving a leak rate reading
of approximately 10−6 atm cc/sec. Since this reading is about 10 times as large as with the
reservoir type of calibrated leak, tuning the spectrometer tube is easier. The controls for this
procedure are shown in Figure 2-2 on page 2-2 and Figure 2-4 on page 2-4.
To perform this procedure:
1. Verify that start up has taken place, that the pumps are up to speed, and that the leak
detector is ready to test (see Section 2.2 “Startup Procedure” on page 2-8).
2. Press VENT.
3. Set RESIDUAL BACKGROUND to RUN.
4. Loosen the NW-25 test port quick clamp and unplug the test port.
5. Place the tuning leak onto the test port and tighten the NW-25 test port quick clamp.
6. Close the valve in the tuning leak.
7. Press START.
2-16
959 and 959D Leak Detectors
8. Once the leak rate displayed on the bar graph has settled, set RANGE in the two-arcs
(10−6) position.
Figure 2-11
Range at Two Arcs
9. Slowly adjust ZERO on the primary panel.
10. Very slowly open the tuning leak valve until the test port pressure rises to 100 mTorr,
and note a corresponding rise in the leak rate.
11. If the bar graph does not display between 1 and 9, move RANGE until it does.
See Section 2.5.4 “Tuning the Spectrometer Tube Using a Tuning Leak” on page 2-16.
12. Slowly adjust FOCUS and then ION for a maximum on the leak rate display.
The ION control is a 10-turn potentiometer and normally needs to be adjusted only
slightly for a maximum peak on the display. When tuned to helium, the outer dial on the
ION control at the 12 o'clock position should indicate between 2 and 8.
A change in one adjustment may affect the others. Therefore, it may be necessary to
repeat step 9 through step 12 until no significant change occurs in the leak rate reading.
The leak detector is now tuned to helium. When performed correctly, day-to-day
changes are very small, and daily adjustment may not be required.
13. Close the tuning leak valve and verify that the leak rate drops to zero.
If the leak rate does not drop to zero, repeat this procedure to retune the spectrometer
tube beginning with step 9.
14. Press VENT and remove the tuning leak.
Proceed with testing.
2-17
DRAFT 9/22/10
If zeroing cannot be achieved, adjust COARSE ZERO on the secondary panel, and then
ZERO.
959 and 959D Leak Detectors
2.6 Residual Background Check
2.6.1 Measuring the Background
When testing is complete and helium is no longer entering the leak detector through a leak,
the vacuum system rapidly removes most of the remaining helium. The residual amount,
called background, is steady and can be cancelled by zeroing the leak rate display.
Measure the background to:
❑ Check for a dirty system that needs cleaning or overhaul
❑ Determine whether the system is detecting helium
❑ Determine whether the reading is a result of electrical noise associated with
the preamplifier.
DRAFT 9/22/10
To measure the residual background, refer to Figure 2-2 on page 2-2 and Figure 2-4 on
page 2-4.
To perform this procedure:
1. Verify that the system is warmed up, tuned and calibrated.
2. Place the NW-25 test port blank-off flange cap on to the test port and tighten the NW-25
clamp.
3. Set RESIDUAL BACKGROUND to CHECK.
When this switch is in the CHECK position, the leak detector is almost completely
insensitive to all gases, including helium.
4. Move RANGE fully counterclockwise to its most sensitive position.
5. Press START and wait until minimum test port pressure is reached.
6. Adjust the ZERO and COARSE ZERO until the leak rate bar graph indicates zero, with
only one bar lit.
7. Move the RESIDUAL BACKGROUND switch to RUN.
The value indicated on the bar graph is the background. Record this value.
CAUTION
2-18
If the background reading is unstable or cannot be zeroed, or
the UNDER light is on after the leak detector was zeroed in the
check position, leak-check the system. Contact Varian
Customer Service at 1-800-8VARIAN for assistance.
959 and 959D Leak Detectors
2.6.2 Zero the Background
To zero the background:
1. Perform a residual check as described in Section 2.6 “Residual Background Check” on
page 2-18.
2. Leaving the RESIDUAL BACKGROUND switch in the RUN position, zero the leak
detector using the COARSE ZERO and ZERO switches to set the leak rate bar graph
display to zero (one bar lit).
2.7 Shutdown and Restart Procedures
❑ If the leak detector is going to be idle for a few hours, put it into standby, as
explained in Section 2.7.1 “Standby”.
❑ If the leak detector is not going to be used for an extended period, such as eight
DRAFT 9/22/10
hours or more, perform the shutdown procedure in Section 2.7.2 “Shutdown” to
prolong bearing life.
❑ If the leak detector is to be moved to a remote location, perform a complete
shutdown procedure.
2.7.1 Standby
To shut down the leak detector for a period of up to 8 hours:
1. Place the blank-off flange cap on the test port.
2. Press the VENT button.
3. Leave the switch in the ON/AUTO position.
2.7.2 Shutdown
To perform this procedure:
1. Place the blank-off flange cap on the test port.
2. Press the VENT button.
3. Turn off the MAIN POWER switch on the front panel.
4. Switch off the AC power strip located on the cart.
2.7.3 Restarting After Short-Term Shutdown (Standby)
No special steps are required for preparing the leak detector for operation when the green
FIL. indicator is illuminated and the system pressure is in the green band in the vertical display. If necessary, tune and calibrate the leak detector (Section 2.5 “Calibration and Tuning”
on page 2-12) before running a test.
2-19
959 and 959D Leak Detectors
2.7.4 Temporary Power Loss
The occurrence of a temporary power loss followed by power restoration can be recognized
by the following symptoms:
❑ The green FIL indicator is not lit
❑ The mechanical pump is running
❑ The HI VAC OK pressure indication is lit
To perform this procedure:
1. Set the FIL. switch to the ON/AUTO position and release it.
This may have to be repeated several times. The green FIL. indicator should remain lit.
2. If the filament does not light, move the filament selector switch to the other filament and
try to light it again.
DRAFT 9/22/10
3. If the filament still does not light, perform a complete shutdown, wait a few minutes,
and then start the leak detector following the start-up procedure.
4. If the filament still does not light, replace the ion source.
See Section 3.4.1 “Removing the Ion Source” on page 3-8 for the replacement
procedure.
5. Allow 1/2 hour for the pumps to warm up and the leak rate to stabilize; then tune and
calibrate the leak detector (see Section 2.5 “Calibration and Tuning” on page 2-12).
Proceed with testing.
2-20
959 and 959D Leak Detectors
Section 3. Maintenance and Parts Replacements
The 959 and 959D leak detectors require periodic maintenance to assure continued reliable
operation and accurate measurements. After prolonged use, the leak detector accumulates
contaminants from even the cleanest of products tested. These contaminants eventually
impair operation.
Cleaning of the spectrometer tube assembly, consisting of the ion source and the preamplifier, can be done by user maintenance personnel. Advice on cleaning and replacing components of the spectrometer tube can be obtained by contacting Customer Service at Varian.
3.1 Safety and Maintenance
WARNING
Disconnect power from the power strip on the cart before
performing any maintenance procedure that requires physically
disconnecting any part of the system.
3.1.2 Static Charge
CAUTION
Wear a grounding device when performing any maintenance
on the leak detector and especially when performing
maintenance of static-sensitive parts.
WARNING
When handling the ion source, wear powder-free butyl or
polycarbonate gloves.
3.1.3 Ion Source
If you handle the ion source with bare hands, wash them
thoroughly, especially before smoking or eating.
3-1
DRAFT 9/22/10
3.1.1 AC Power
959 and 959D Leak Detectors
3.1.4 O-rings
Whenever installing an O-ring, follow these guidelines to prevent scratching of the sealing
surfaces:
❑ Wipe all O-rings clean with a lint-free cloth before installation to assure that
no foreign matter is present to impair the seal.
❑ Do not use grease or any other substances on O-rings that comes in contact
with the spectrometer tube.
❑ Do not use alcohol, methanol, or other solvents on O-rings, which cause
deterioration and reduce the O-ring’s ability to hold a vacuum.
❑ In allowable situations, apply a small amount of Apiezon L grease and wipe the
O-rings “shiny” dry.
3.1.5 Cleaning Kit
DRAFT 9/22/10
Use the Varian Component and Spectrometer Tube Cleaning Kit, P/N 670029096, to
clean the spectrometer tube components and for the other parts of the leak detector’s vacuum system such as valves and fittings. Rinsing and high-temperature drying are not
required following cleaning with the VacuSolv contained in this kit. Although appropriate
precautions are advised, VacuSolv is compatible with most materials and does not contain
toxic chemicals or CFCs.
3-2
959 and 959D Leak Detectors
3.1.6 Maintenance Schedules
Refer to Table 3-1 and Table 3-2 for maintenance schedules.
Table 3-1
Description
Calibration check
Scheduled Maintenance
Daily
12 Months
Section 2.5 “Calibration and
Tuning” on page 2-12
X
Spectrometer tube overhaul
TriScroll 310 and DS-302
roughing pumps
12 months or less
depending on application
Watch for degrading performance
of the leak detector.
Function
Section 3.4 “Cleaning or
Replacing the Spectrometer
Tube” on page 3-8
The respective user manual
supplied with the system
As-Required Maintenance
Most Common Symptom
Cleaning the test port
Refer to
Section 3.2 “Cleaning the
Test Port” on page 3-4
Spectrometer tube cleaning
Loss of sensitivity, increase in background
Section 3.2 “Cleaning the
Test Port” on page 3-4 and
Section 3.4 “Cleaning or
Replacing the Spectrometer
Tube” on page 3-8
Ion source replacement
Filament failure
Section 3.4.1 “Removing
the Ion Source” on page 3-8
(as soon as convenient
after the second filament
is in use)
3-3
DRAFT 9/22/10
Table 3-2
Refer to
959 and 959D Leak Detectors
3.2 Cleaning the Test Port
The test port is located on the outside of the 959 and 959D model leak detectors. Therefore,
it is not necessary to turn the leak detector off or disconnect it from mains power if this is the
only procedure being performed. If you are cleaning the test port in conjunction with other
procedures that require opening the leak detector, be sure to turn the leak detector off and
disconnect it from mains power.
The NW-25 uses the blank-off flange cap on top of the centering ring when the system is not
in use or when in use but not connected to a device.
To clean the test port:
1. Turn the test port wing nut counterclockwise to loosen it (Figure 3-1), remove the quick
clamp (Varian P/N KQ25AWP) from the test port, and remove any connected devices.
DRAFT 9/22/10
CAUTION
Be careful not to drop the test port blank-off flange cap when
you remove the test port tightening nut. It is deceptively heavy
for its size.
Test Port
Blank-off Flange Cap
Test Port
Tightening Nut
Figure 3-1
Test Port with Blank-Off Flange Cap
2. Remove the test port blank-off flange cap and/or centering ring from the top of the test
port (Figure 3-2).
Figure 3-2
3-4
Centering Ring with O-ring
959 and 959D Leak Detectors
3. Remove the O-ring from the centering ring.
4. Examine the O-ring for wear.
Clean the O-ring, or if necessary, replace it with a new O-ring.
NOTE
Varian recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
CAUTION
Remove O-rings carefully with your fingers. To prevent
scratching of any sealing surfaces, do not use metal tools for
this task.
Do not use alcohol, methanol or other solvents on O-rings. To
do so causes deterioration and reduces their ability to hold a
vacuum.
If applicable, apply a small amount of Apiezon L grease and
wipe the O-rings “shiny” dry.
5. Examine all parts of the test port, including inside the test port.
If necessary, use a VacuSolv wipe to remove any dirt or foreign matter and allow parts to
air dry.
6. Place the O-ring into the groove of the centering ring.
7. Place the centering ring onto the top of the test port (Figure 3-3).
Figure 3-3
O-ring and Centering Ring on Test Port
8. Replace the blank-off flange cap or connected device.
3-5
DRAFT 9/22/10
Wipe all O-rings clean with a lint-free cloth before installation
to ensure that no foreign matter is present to impair the seal.
959 and 959D Leak Detectors
9. Replace the quick clamp onto the test port and tighten the wing nut clockwise until it is
just tight enough to stay in place.
DRAFT 9/22/10
Figure 3-4 shows the system with a connected device.
Figure 3-4
3-6
Test Port with Connected Device
959 and 959D Leak Detectors
3.3 Removing the Cover
To perform this procedure:
1. Turn the test port wing nut counterclockwise to loosen it (Figure 3-1), remove the quick
clamp (Varian P/N KQ25AWP) from the test port, and remove any connected devices.
CAUTION
Be careful not to drop the test port blank-off flange cap when
you remove the test port tightening nut. It is deceptively heavy
for its size.
Test Port
Blank-off Flange Cap
Figure 3-5
Test Port with Blank-Off Flange Cap
2. Remove the test port blank-off flange cap and/or centering ring from the top of the test
port (Figure 3-2).
Figure 3-6
Centering Ring with O-ring
3. Loosen and remove the two screws located at the top of the left front panel.
There is no need to remove the bottom screws on the front panel.
4. Loosen and remove two screws located at the bottom of each side.
5. Lift the cover up and off the leak detector.
3-7
DRAFT 9/22/10
Test Port
Tightening Nut
959 and 959D Leak Detectors
3.4 Cleaning or Replacing the Spectrometer Tube
The ion source and the preamplifier require periodic inspection and cleaning and eventually, replacement. The following set of procedures covers both cleaning of the existing items
and replacement with new components.
NOTE
Varian recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
Tools and supplies required:
❑ Phillips screwdriver
❑ Allen wrench, 5/32-inch
DRAFT 9/22/10
❑ Thin slotted screwdriver
❑ Locking screwdriver
❑ Ion source, P/N 82850302
❑ Spectrometer Tube Cleaning Kit, P/N 670029096
❑ Protective gloves
3.4.1 Removing the Ion Source
Replace the ion source when cleaning the spectrometer tube or as soon as possible after a
filament burns out. Tuning is required after replacement.
WARNING
When handling the ion source, wear powder-free butyl or
polycarbonate gloves. If you handle the ion source with bare
hands, wash them thoroughly especially before smoking
or eating.
To perform this procedure:
1. Shut down the leak detector.
❑ Press the VENT button.
❑ Turn off the MAIN POWER switch on the front panel.
❑ Turn off the power switch on the AC power strip located at the bottom of the cart.
WARNING
Disconnect the power strip from its source before performing
any maintenance procedure that requires physically
disconnecting any part of the system.
2. Remove the top cover as described in Section 3.3 “Removing the Cover” on page 3-7.
3-8
959 and 959D Leak Detectors
3. Locate and remove the connectors from the preamplifier and the ion source (Figure 3-7)
by grasping each plug and gently pulling straight off the contact pins.
If the connector cables are not labeled ION SOURCE and PRE-AMP, label them now.
Ion Source
Preamplifier
Figure 3-7
Ion Source and Preamplifier Connectors
NW-25 Clamp
Position the wingnut
upward when
reassembling.
Figure 3-8
Wing Nut and Clamp
3-9
DRAFT 9/22/10
4. Loosen the wing nut and remove the NW-25 clamp that holds the spectrometer tube
onto the turbo pump (Figure 3-8).
959 and 959D Leak Detectors
5. Lift the entire spectrometer tube assembly off the turbo pump and out of the leak
detector, as shown in Figure 3-9.
Figure 3-9
Extracting the Spectrometer Tube
DRAFT 9/22/10
You may have to rock the spectrometer tube gently to break the vacuum.
3-10
959 and 959D Leak Detectors
6. Remove the O-ring and centering ring (Figure 3-10) and place them on a clean
non-magnetic surface.
Figure 3-10
Spectrometer Tube O-ring and Centering Ring
DRAFT 9/22/10
7. Remove the 4 screws that hold the ion source flange cap (Figure 3-11).
Flange Caps
Center Posts
Figure 3-11
Removing Flange Cap Screws
3-11
959 and 959D Leak Detectors
8. Remove the ion source flange cap by pressing down on the ion source center post
and lifting the flange cap up and off the ion source as shown in the images of
Figure 3-12.
Press here on Center Post
Pressing Center Post
Figure 3-12
Lifting Flange Cap
Disengaging Flange Cap
DRAFT 9/22/10
9. If the flange cap and ion source come up together, hold one hand under the ion source
to catch it, then push down on the center post.
10. Remove the ion source from the spectrometer tube body as shown in Figure 3-13.
Figure 3-13
3-12
Removing the Ion Source
959 and 959D Leak Detectors
3.4.2 Cleaning or Replacing the Ion Source
To perform this procedure:
1. Examine the ion source (Figure 3-14) and cavity (Figure 3-15) for deposits and
discoloration.
If either is discolored or dirty, clean with VacuSolv, and, if necessary replace the part.
NOTE
CAUTION
VacuSolv is included in the Varian Component and
Spectrometer Tube Cleaning Kit, P/N 670029096. This
compound is recommended for cleaning the spectrometer tube
components.
Do not clean the filaments. They are extremely fragile.
DRAFT 9/22/10
Filament 1
Filament 2
Figure 3-14
NOTE
Ion Source
Dark carbon-like deposits around the ion source filament
and/or a rainbow-like discoloration on the inside walls of the
ion source cavity indicate that the spectrometer tube has been
operated at too high a pressure. This can occur from a system
pressure leak or the transfer of into test at too high a pressure.
3-13
959 and 959D Leak Detectors
2. Look into the ion source cavity (Figure 3-15) and find the ground slit plate.
Alignment Hole
Figure 3-15
Slit
Ion Source Cavity
3. Carefully note the position of the ground slit plate inside the ion source cavity, as it must
be replaced in exactly the same relative position.
❑ If the ground slit plate or ion source cavity walls are lightly discolored, remove the
DRAFT 9/22/10
item and either clean or replace it. See Section 3.4.3 “Cleaning the Ground Slit
Plate” and Section 3.4.4 “Installing the Ion Source” on page 3-17.
❑ If the ground slit plate is highly discolored, contact Varian Customer Service at
1-800-8VARIAN.
3-14
959 and 959D Leak Detectors
3.4.3 Cleaning the Ground Slit Plate
WARNING
When handling the ion source, wear powder-free butyl or
polycarbonate gloves. If you handle the ion source with bare
hands, wash them thoroughly, especially before smoking or
eating.
To perform this procedure:
1. Remove the ground slit plate (Figure 3-16) by placing a thin, slotted screwdriver snug
into the slot and carefully twisting and prying with the screwdriver.
2. Place the ground slit plate on a clean surface.
Figure 3-16
NOTE
Ground Slit Plate
This procedure requires a locking screwdriver for grabbing the
screw slot.
3. Use a Scotch-Brite™ pad to polish away any discolored areas of the ground slit plate
(Figure 3-17).
Figure 3-17
CAUTION
Cleaning the Ground Slit Plate
The ground slit plate is very thin. Take care not to bend or
scratch it during cleaning.
3-15
DRAFT 9/22/10
Ground Slit Plate
959 and 959D Leak Detectors
4. Use a VacuSolv wipe to:
❑ Clean the ground slit plate and flange cap
❑ Wipe the cavity and the outside of the spectrometer tube
Let all the parts air dry. Take great care not to scratch any parts when wiping or when
setting onto a surface to dry.
5. Inspect all O-rings, then wipe with a lint-free cloth to be sure they are free of debris.
CAUTION
Remove O-rings carefully with your fingers. Do not use metal
tools for this task.
Follow these guidelines to prevent scratching of any sealing surfaces:
❑ Wipe all O-rings clean with a lint-free cloth before installation to assure that no
DRAFT 9/22/10
foreign matter is present to impair the seal.
❑ Do not use grease or use other substances on O-rings that come in contact with the
spectrometer tube.
❑ Do not use alcohol, methanol, or other solvents on O-rings, which cause
deterioration and reduce the O-ring’s ability to hold a vacuum.
❑ In allowable situations, apply a small amount of Apiezon L grease and wipe the
O-rings “shiny” dry.
6. Inspect the preamplifier as part of a spectrometer tube cleaning procedure.
Refer to Section 3.4.5 “Cleaning the Preamplifier Cavity” on page 3-20.
7. If you do not remove the preamplifier, allow all the parts associated with the ion source
to air dry thoroughly.
3-16
959 and 959D Leak Detectors
3.4.4 Installing the Ion Source
If you did not remove the ground slit plate, begin at step 4.
To perform this procedure:
1. Place the ground slit plate onto the locking screwdriver as you did to remove it
(Figure 3-16) with the prongs facing up.
CAUTION
Be sure to seat the ground slit plate firmly and in its proper
orientation.
2. Carefully place the ground slit plate into the cavity, being sure to align the slit so that it
is perpendicular to the back and front of the spectrometer tube (Figure 3-18).
Slit
Figure 3-18
CAUTION
Alignment Hole
Ground Slit Plate Properly Inserted
If it is necessary to bend the ground slit plate prongs out, be
sure to bend them only slightly so that the prongs do not scratch
the ion source cavity while the plate is being inserted. If the
plate is damaged, replace it with P/N 3088001.
3-17
DRAFT 9/22/10
The hole in the ground slit plate lines up with the alignment hole on the bottom of the
ion source cavity.
959 and 959D Leak Detectors
3. Check that the ground slit plate is firmly seated in the ion source cavity.
If it is not, remove it and, using a screwdriver, bend the prongs out slightly and place the
ground slit plate into the cavity again.
WARNING
When handling the ion source, wear powder-free butyl or
polycarbonate gloves. If you handle the ion source with bare
hands, wash them thoroughly, especially before smoking or
eating.
DRAFT 9/22/10
4. Place the O-ring on the ion source as shown in Figure 3-19.
Figure 3-19
NOTE
3-18
Replacing the Ion Source O-ring
When replacing the preamplifier and ion source, line up the
key of the center post perpendicular to the spectrometer tube
body. This alignment happens by default for some pieces.
Replace the flange cap with the groove aligned with the two
legs on either side of the key.
959 and 959D Leak Detectors
5. Holding the ion source by the connector pins, and the O-ring if necessary, insert the ion
source into the cavity so that its alignment pin falls in the center of the hole in the cavity
(Figure 3-20).
Alignment Pin
Figure 3-20
A short circuit could take place at power up if the alignment pin
touches the sides of the alignment hole.
6. Hold the O-ring so that it seats properly when inserting the ion source.
7. Replace the ion source flange cap so that the grooves in the depression of the flange cap
line up with the legs on either side of the center post key.
8. Insert and tighten the four screws.
3-19
DRAFT 9/22/10
CAUTION
Ion Source Alignment Pin
959 and 959D Leak Detectors
3.4.5 Cleaning the Preamplifier Cavity
CAUTION
Wear a ground strap while handling the preamplifier. The
preamplifier is a static-sensitive device.
To perform this procedure:
1. Remove the four screws that hold the preamplifier flange cap.
2. Remove the preamplifier flange cap by pressing down on the preamplifier center post
and lifting the flange cap up and off of the preamplifier.
DRAFT 9/22/10
3. If the flange cap and preamplifier come up together, hold one hand under the
preamplifier to catch it, and push down on the center post to remove the flange cap
from the preamplifier.
4. Carefully remove the preamplifier from the spectrometer tube body and place it on a
clean, non-magnetic surface.
5. Remove and discard the O-ring from the preamplifier.
6. Clean the preamplifier cavity if discoloration is present.
3.4.6 Replacing the Preamplifier
To perform this procedure:
1. Wipe the new O-ring and mating surfaces.
2. Place the preamplifier in its cavity with the new O-ring in place.
3. Orient the preamplifier so that the vertical slot in the preamplifier engages the pin in the
spectrometer tube body.
Alignment Pin
Preamplifier Slot
Figure 3-21
Replacing the Preamplifier
4. Tighten the flange cap evenly and firmly using the four screws.
3-20
959 and 959D Leak Detectors
3.4.7 Installing the Spectrometer Tube
To perform this procedure:
1. Wipe the centering ring using a VacuSolv wipe (Figure 3-22).
Spectrometer Tube O-ring and Centering Ring
2. Wipe the O-ring with a clean, lint-free cloth and place it onto the centering ring.
3. Wipe the turbo flange and the spectrometer tube flange using a VacuSolv wipe and let
them air dry.
4. Place the centering ring and O-ring against the turbo pump flange.
5. Place the spectrometer tube against the centering ring, then attach and fully tighten
the NW-25 clamp, making sure the wingnut is facing upward.
6. Attach the connector plugs for the preamplifier and the ion source.
7. Replace the mylar sheeting.
8. Replace the cover as described in Section 3.3 “Removing the Cover” on page 3-7.
9. Turn the leak detector ON and wait 1/2 hour for the pumps to warm up and for the leak
detector to stabilize.
10. Tune and calibrate the leak detector following the procedures in Section 2.5
“Calibration and Tuning” on page 2-12.
3-21
DRAFT 9/22/10
Figure 3-22
959 and 959D Leak Detectors
3.5 Replacement Parts
Table 3-3 lists replacement parts.
Table 3-3
Replacement Parts
DRAFT 9/22/10
Assembly
P/N
Ion Source
82850302
Preamplifier
L9030301
Spectrometer Tube Assembly Exchange Program
GGL9713301
Spectrometer Tube Cleaning Kit
670029096
Ground Slit Plate
K3088001
DS-302 Oil-based Mechanical Pump Exchange Program
Call Varian
DS-302 Maintenance Parts Kit
949-9370
DS-302 Gasket Kit
949-9370
TriScroll 310 Dry Mechanical Pump Exchange Program
Call Varian
TriScroll 310 Maintenance Parts Kit
PTSS0300MK
TriScroll 310 Replacement Tip Seal Kit
PTSS0300TS
24 VDC Power Supply
643100649
V81 Turbo Pump Exchange
EX9698902
V81 Turbo Pump 24VDC PCB (special)
EX9699538M006
3.6 Accessories
Refer to Table 3-4 for 959 and 959D model accessories.
Table 3-4
959 and 959D Model Accessories
Part
P/N
Calibrated Leak-Helium reservoir Refillable Leak 10−7 atm cc/sec range F8473321
3-22
Refillable calibrated leak for evacuation sniffing use, 10−5/10−6 range
F8473325
Power Probe Sniff Accessory, 10’ length (NW-25 flange)
K9565306
Power Probe Sniff Accessory, 25’ length (NW-25 flange)
K9565307
Throttle valve for manual gross leak testing
R1947301
LDNW25 Inlet Adapter Kit
LDNW25INADKIT
959 and 959D Leak Detectors
Appendix A. Introduction to Leak Detection
A.1 Why Leak Testing is Necessary
Even with today's complex technology it is, for all practical purposes, impossible to manufacture a sealed enclosure or system that can be guaranteed leak proof without first being
tested.
Using the modern mass spectrometer leak testing techniques implemented by the
Varian 959D Helium Leak Detector, leak rates in the 10−10 atm cc/sec range can be reliably
detected. The discussion that follows is a summary of information pertinent to the subject of
leak detection.
There are four general classes of leak detection:
Hermetic Enclosures
(or parts thereof)
These are tested to prevent entrance of contaminants or loss of fluid
that would affect performance of the enclosed unit. Examples
include electronic devices, integrated circuits, sealed relays,
motors, ring pull tab can ends, and multipin feedthroughs.
Hermetic Systems
These are tested to prevent loss of fluid or gas within. Examples
include: hydraulic systems and refrigeration systems.
Evacuated Enclosures
(or parts thereof)
These are tested to prevent excessively rapid deterioration of a
vacuum over time. Examples include TV picture tubes, bellows
sensing elements, and full-panel opening can ends.
Vacuum Systems
These are tested to minimize in-leakage and to allow attainment of
better vacuum or higher gas removal ability at any given vacuum
(absolute pressure).
A-1
DRAFT 9/22/10
A.2 Classes of Leak Detection
959 and 959D Leak Detectors
A.3 Terminology
The following terminology has application throughout this manual:
DRAFT 9/22/10
Flow
atm cc/sec
One cubic centimeter of gas per second at a pressure differential of
one standard atmosphere (760 torr at 0 °C).
atm cc/sec
One cubic centimeter of gas per second at ambient atmospheric
pressure and temperature (used interchangeably with atm cc/sec
because the difference is insignificant for leak testing purposes).
Rate-of-Rise
In vacuum systems this is defined as the rate of increase of absolute
pressure per unit time, with the vacuum pump isolated from the
system, and is the sum of actual inleakage and internal outgassing.
Rate of rise is usually expressed in torr or microns (milliTorr) per
hour. The flow rate should be expressed in torr-liters/second.
Conversions
1 std cc/sec*
0.76 torr-liter/sec
1 torr-liter sec*
1.3 std cc/sec
1 std cc/sec
9.7 x 104 micron cubic feet per hour or
practically 105 micron CFH (μCFH)
1 μCFH
practically 10−5 std cc/sec
*for practical purposes, equal
Numerical
Notation-Exponential
System
Most leak rates of commercial significance are very small fractions
of atm cc/sec. Therefore negative powers of ten are used as a
convenient system of numerical shorthand.
Table A-1 shows the relationship of exponents and multipliers (to the base 10) to the
arithmetic form, and the equivalent result.
Table A-1
Multiplier x 10n
A-2
Decimal Notation
Arithmetic Form
Result
1 x 102
=
1 x 10 x 10
=
100
1 x 10
1
=
1 x 10
=
10
1 x 10
0
=
1
=
1
1 x 10
−1
=
1 x 1/10
=
.1
1 x 10
−2
=
1 x 1/10 x 1/10
=
.01
5 x 10
−3
=
5 x 1/10 x 1/10 x 1/10
=
.005
5 x 10
−7
=
5 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10
=
.0000005
5 x 10
−9
=
5 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10 x 1/10
=
.000000005
959 and 959D Leak Detectors
A.4 Leak Detection Methods
There are many methods of testing for leaks in enclosures, systems or containers. The more
commonly used methods and their accuracy ranges are listed below:
A special dye, applied to one side of a surface suspected to
contain a leak, seeps through the leak and appears on the other
side. This method can take an hour or more for a 10−4 atm cc/sec
leak to show up. This test is inexpensive but destructive in some
applications, as well as slow and messy.
Halogen
(sensitive to
halogen elements
or compounds,
especially
refrigerant gases)
This method is good to approximately 10−5 atm cc/sec in most
current applications, but extendable to 10−9 std cc/sec under some
limited situations. It is critically dependent on operator judgement
if leaks are below 10−5 atm cc/sec and requires constant flow of
fresh air in the test area because of the tendency of trace gas to
hang in the area. The detector used in this method is sensitive to a
variety of gases from external sources such as cigarette smoke and
solvent fumes.
Helium
This method is good to 10−11 atm cc/sec. It is useful for testing
hermetic seals, vacuum enclosures, and vacuum systems, and is
the most versatile of industrial and laboratory leak detection testing
methods.
Radioisotope
This method is useful only for testing hermetically sealed cavities.
It has approximately the same range as the helium method but it
involves an expensive installation (from four to ten times the cost
of a helium installation) depending on the degree of isolation of
radiation required). It also requires a radiation safety officer.
Ultrasonic
This method is good to approximately 10−3 atm cc/sec. It tests for
ultrasonic sounds coming from a gas leak and for testing high
pressure lines.
Water Immersion
(Air Bubble
Observation)
This method is good to approximately 10−3 atm cc/sec, and can be
more sensitive if internal pressure is increased or if vacuum is created above water pressure. This method is limited because of difficulty in differentiating between leakage bubbles and surface
desorption bubbles. It is used to test industrial items such as valves,
hydraulic components, castings, automotive and air conditioning
components.
A-3
DRAFT 9/22/10
Dye Penetrant
959 and 959D Leak Detectors
A.5 Helium Mass Spectrometer Leak Detection
Helium is an excellent trace gas because it is the lightest of the inert gases and as a consequence readily penetrates small leaks. In addition, its presence in the atmosphere is minute
(5 PPM or 4 milliTorr absolute). Helium is easily detected by a simple mass spectrometer
(helium has a mass of 4 so that adjacent peaks of 3 and 6 are easily separated by this
technique). Also, helium is readily available at reasonable cost, and is completely non-toxic
and non-reactive. The basic principles of the helium MSLD technique are discussed below.
DRAFT 9/22/10
A.5.1 Principles of Mass Spectrometry
A mass spectrometer sorts gases by their molecular weights (mass number) to determine the
quantity of each gas present. With the helium MSLD, the point of interest is primarily in
helium and the mass spectrometer tube is relatively simple. The principle is to ionize the
gases in vacuum, accelerate the various ions through a fixed voltage, and then separate the
ions by passing them through a magnetic field. A slit, properly placed, allows only helium
ions to pass through and be collected. The resulting current is amplified and a leak rate bar
graph indicates the presence and amount of helium.
A.5.2 Application as a Leak Detector
A mass spectrometer leak detector consists of a spectrometer tube, the electronics to operate
and interpret it, and a high vacuum system to maintain proper vacuum. The means for connecting a test object and a rough vacuum pump with a system of roughing and test valves is
provided to evacuate the test object for connection to the spectrometer tube, or in the case
of a sealed object containing helium, to evacuate a chamber containing the test object.
A.5.3 The Nature of Flow in a Vacuum
It should be noted that the purpose of the vacuum system is to support operation of the
analyzing spectrometer tube. Helium molecules entering through a leak individually
reach the spectrometer tube in a few milliseconds. Helium molecules as well as molecules
of other gases are continuously removed by the vacuum system turbo pump. If helium is
continuously applied to a leak, the concentration in the spectrometer tube rises sharply at
first, then reaches equilibrium when it is being pumped out at the same rate as it is entering.
When helium is completely removed from the leak, the input drops to zero while the residual helium is pumped out of the system. Thus, a leak is indicated by a rise in output signal
of the spectrometer tube.
A-4
959 and 959D Leak Detectors
A.5.4 Facts About Leak Rates
Visualizing Leaks in
Everyday Terms
10−5 atm cc/sec: approximately 1 cc/day
10−7 atm cc/sec: approximately 3 cc/year
Audible or Visual Detection by Observer
Bubbles rising in water:
Audible Leaks:
Sizes of Leaks in
Man-Made Joints
10−4 atm cc/sec or larger
10−1 atm cc/sec or larger
Studies indicate that almost all leaks at joints are about
5 x 10−7 std cc/sec (about 1 cc/month) or larger. This is true of
ceramic-to-metal, plastic-to-metal seals, welded, soldered and
brazed joints. Some long-path leaks are slightly smaller. Diffusion
of helium through glass can be as high as 10−8 std cc/sec per
square centimeter of surface area.
A-5
DRAFT 9/22/10
Variation in Leak Sizes Leaks unintentionally built-in at joints during manufacture can vary
from hour to hour and day to day. Breathing on a 10−6 std cc/sec
leak provides enough moisture to close it temporarily; perhaps for
several days. Atmospheric particles can close a leak of this size.
Never depend on an accidentally made leak to remain constant.
Manufactured standard leaks for calibration purposes require
special techniques.
959 and 959D Leak Detectors
A.6 Using Helium for Leak Detection
Most leak detection methods depend on the use of a tracer gas passing through the leak and
being detected on the other side (for example, visual detection of air bubbles in water).
The mass spectrometer leak detector operates with helium as a tracer and is widely used
because it combines high sensitivity with production testing capability. There are three
basic methods in common use.
A.6.1 Test Piece Evacuated
DRAFT 9/22/10
The object to be tested is evacuated by the leak detector roughing pump, then valved into
the spectrometer vacuum system (Figure A-1 and Figure A-2). The surface of the test object
is then probed with a small jet of helium to locate individual leaks, or surrounded by helium
(hooded) for an overall leak check.
Figure A-1
Test Piece Evacuated: Tracer Probe Used to Locate Leak
Figure A-2
A-6
Test Piece Evacuated and Hooded with Helium
959 and 959D Leak Detectors
A.6.2 Test Piece Pressurized
Figure A-3 is an illustration of a Detector Probe used to locate a leak in a pressurized test
piece.
Figure A-3
Test Piece Pressurized: Detector Probe Used to Locate Leak
Sensitivity of this type of testing is limited to about 10−7 atm cc/sec, since most of the
escaping helium diffuses into the surrounding atmosphere. Sensitivity is also limited
by operator technique and variation in ambient helium concentration in the testing vicinity.
An alternative to probing is to enclose the object and probe the enclosure for a change in
helium content.
A.6.3 Test Piece Already Sealed
Figure A-4 is an illustration of a bell jar used to determine overall leak rate of a sealed test
piece.
Figure A-4
Test Piece Sealed with Helium and/or Other Gases
A-7
DRAFT 9/22/10
A sampling probe is connected to the leak detector. The object to be tested is filled with
helium at the desired test pressure and the probe is moved over its surface. Some of the
helium escaping from a leak is captured through the probe and enters the leak detector, thus
locating the leak.
959 and 959D Leak Detectors
Sometimes it is necessary to leak check a completely sealed object. This can be done
by placing helium inside the object before sealing (either 100% or mixed with other gas
used for backfilling). The object is then placed in a vacuum chamber connected to the
leak detector. Helium escaping from the object into the vacuum chamber is detected by
the spectrometer tube. Sensitivity depends on the partial pressure of helium in the object.
If the presence of helium in the finished object is undesirable, units already sealed can first
be placed in a container that is then pressurized with helium for a specific time at a known
pressure. Helium enters the object through leaks that are later detected, as described in the
previous paragraph. Gross leaks are sometimes not detected, since all the helium entering
through a large leak can be lost prior to testing. Also, spurious signals can be given by
helium not entering the object, but entering surface fissures and remaining long enough
to be detected.
A.7 Mass Spectrometer Leak Detector
DRAFT 9/22/10
The 959D consists of an analytical sensing tube called a spectrometer tube, electronics to
operate the tube, and a vacuum system to maintain a very high vacuum within this tube
(usually less than 0.1 milliTorr or about one ten-millionth of ordinary atmospheric pressure).
In the spectrometer tube, gas molecules are ionized (given a positive electrical charge) by
bombarding them with electrons from a hot thoriated iridium filament. The ions, thus
formed, are accelerated into a magnetic field where the mass 4 (helium) ions are deflected
90° (Figure A-5). Only helium ions reach the collector.
An extremely stable electrometer provides an electron current to the collector, which neutralizes the current produced by the collection of helium ions. The feedback current
is presented on the leak rate bar graph. Since this current is directly proportional to the
number of helium ions striking the collector per unit time, the panel leak rate bar graph
directly reflects the concentration of helium in the vacuum system at any time. Any helium
entering the system causes an increased concentration of helium within the spectrometer
tube, which is reflected as an increase on the leak rate bar graph. In addition to the electrometer, the electronics provide suitable voltages for operating the spectrometer tube and
the vacuum system controls and instrumentation.
A-8
959 and 959D Leak Detectors
Test pieces are generally rough pumped (or, if pressurized, the chamber in which they are to
be tested is rough pumped) by a mechanical vacuum pump before they are connected to
the spectrometer tube (Figure A-5). This prevents overloading the vacuum pumping system.
DRAFT 9/22/10
Figure A-5
Magnetic Separation Principle
A-9
DRAFT 9/22/10
959 and 959D Leak Detectors
This page intentionally left blank.
IMPORTANT
Instructions for returning products
Dear Customer,
Please follow these instructions whenever one of our products needs to be returned:
1. Complete the Request for Return form on our website (www.varianinc.com) and send it to
Varian (see below), taking particular care to identify all products that have pumped or been
exposed to any toxic or hazardous materials.
2. After evaluating the information, Varian will provide you with a Return Authorization (RA)
number via email or fax, as requested.
Note: Depending on the type of return, a Purchase Order may be required at the time the
Request for Return is submitted. We will quote any necessary services (evaluation, repair,
special cleaning, e.g.).
3. Important steps for the shipment of returning product:
❑ Remove all accessories from the core product (e.g. inlet screens, vent valves).
❑ Prior to shipment, drain any oils or other liquids, purge or flush all gasses, and wipe off
any excess residue.
❑ If ordering an Advance Exchange product, use the packaging from the Advance
Exchange to return the defective product.
❑ Seal the product in a plastic bag, and package the product carefully to avoid damage in
transit. You are responsible for loss or damage in transit.
❑ Varian, Inc. is not responsible for returning customer provided packaging or containers.
❑ Clearly label package with the RA number. Using the shipping label provided ensures
the proper address and RA number are on the package. Packages shipped to Varian
without an RA clearly written on the outside cannot be accepted and will be returned.
4. Return only products for which the RA was issued.
5. Product being returned under an RA must be received within 15 business days.
6. Ship to the location specified on the printable label, which will be sent, along with the RA
number, as soon as we have received all of the required information. Customer is
responsible for freight charges on returning product.
7. Return shipments must comply with all applicable Shipping Regulations (IATA, DOT, etc.)
and carrier requirements.
Return the completed request for return form to your nearest location:
North America:
Europe:
FAX: 1-781-860-9252
FAX: 00 39-011-9979125
Toll Free: 800-8VARIAN
Fax Free: 00 800 345 345 00
(800-882-7426
Toll Free: 00 800 234 234 00
vtl.ra@varianinc.com
vtt.ra@varianinc.com
Pacific Rim:
Please visit our website for
individual office information.
http://www.varianinc.com/
vacuum
DRAFT 9/22/10
Block Valves: Instruction Manual for All Sizes
This page intentionally left blank.
Request for Return Health and Safety Certification
ISO
Request for Return
Health and Safety Certification
9001
R E G I S T E R E D
1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a
Varian, Inc. Customer Service Representative.
2. Pack goods appropriately and drain all oil from rotary vane and diffusion pumps (for exchanges please use the packing
material from the replacement unit), making sure shipment documentation and package label clearly shows assigned
Return Authorization Number (RA#) VVT cannot accept any return without such reference.
3. Return product(s) to the nearest location:
North and South America
Europe and Middle East
Asia and ROW
Varian, Inc.
Varian S.p.A.
Varian Vacuum Technologies
121 Hartwell Ave.
Via F.lli Varian, 54
Local Office
Lexington, MA 02421
10040 Leini (TO) – ITALY
Fax: (781) 860-9252
Fax: (39) 011 997 9350
For a complete list of phone/fax numbers see www.varianinc.com/vacuum
4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to
ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of
exposure to toxic or hazardous materials present in the product.
CUSTOMER INFORMATION
Company name:
......................................................................................................................................................................
Contact person:
Name: ......................................................................................
Tel:............................................................
Fax: ..........................................................................................
E-mail: .....................................................
Ship method:
Europe only:
Shipping Collect #: .................................. P.O.#: .......................................................
VAT Reg Number: ...........
USA only:
Customer ship to: ....................................................................
Customer bill to:
❒Taxable
❒Non-taxable
.................................................................
....................................................................
.................................................................
....................................................................
.................................................................
PRODUCT IDENTIFICATION
Product Description
Varian, Inc. Part Number
Varian, Inc. Serial Number
TYPE OF RETURN (check appropriate box)
❒ Paid Exchange
❒ Credit
❒ Paid Repair
❒ Shipping Error
❒ Warranty Exchange
❒ Evaluation Return
❒ Warranty Repair
❒ Calibration
❒ Loaner Return
❒ Other
HEALTH and SAFETY CERTIFICATION
VARIAN, INC. CANNOT ACCEPT ANY BIOLOGICAL HAZARDS, RADIOACTIVE MATERIAL, ORGANIC METALS, OR MERCURY AT ITS
FACILITY. CHECK ONE OF THE FOLLOWING:
❒ I confirm that the above product(s) has (have) NOT pumped or been exposed to any toxic or dangerous materials in a
quantity harmful for human contact.
❒ I declare that the above product(s) has (have) pumped or been exposed to the following toxic or dangerous materials in a
quantity harmful for human contact (Must be filled in):
Print Name................................................
Signature ...................................................
Date ...............................
PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE
Do not write below this line
Notification (RA) #: ................................... Customer ID #: ........................................ Equipment #: ............................................
August 2003
—
Page 1 of 2
Request for Return
Health and Safety Certification
ISO
9001
R E G I S T E R E D
FAILURE REPORT
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
TURBO PUMPS AND TURBOCONTROLLERS
Claimed Defect
❒ Does not start
❒ Does not spin freely
❒ Does not reach full speed
❒ Mechanical Contact
❒ Cooling defective
Describe Failure:
❒ Noise
❒ Vibrations
❒ Leak
❒ Overtemperature
❒ Clogging
Position
❒ Vertical
❒ Horizontal
❒ Upside-down
❒ Other
................................
Parameters
Power:
Current:
Temp 1:
Temp 2:
Operation Time:
Rotational Speed:
Inlet Pressure:
Foreline Pressure:
Purge flow:
Turbocontroller Error Message:
ION PUMPS/CONTROLLERS
❒ Bad feedthrough
❒ Vacuum leak
❒ Error code on display
Describe failure:
VALVES/COMPONENTS
❒ Poor vacuum
❒ High voltage problem
❒ Other ..............................
❒ Main seal leak
❒ Solenoid failure
❒ Damaged sealing area
Describe failure:
Customer application:
Customer application:
LEAK DETECTORS
INSTRUMENTS
❒ Cannot calibrate
❒ Vacuum system unstable
❒ Failed to start
Describe failure:
❒ No zero/high background
❒ Cannot reach test mode
❒ Other ...............................
❒ Gauge tube not working
❒ Communication failure
❒ Error code on display
Describe failure:
Customer application:
Customer application:
ALL OTHER VARIAN, INC.
DIFFUSION PUMPS
❒ Pump doesn’t start
❒ Doesn’t reach vacuum
❒ Pump seized
Describe failure:
❒ Noisy pump (describe)
❒ Overtemperature
❒ Other ...............................
❒ Heater failure
❒ Doesn’t reach vacuum
❒ Vacuum leak
Describe failure:
Customer application:
Customer application:
August 2003
—
Page 2 of 2
❒ Bellows leak
❒ Damaged flange
❒ Other ...............................
❒ Display problem
❒ Degas not working
❒ Other ...............................
❒ Electrical problem
❒ Cooling coil damage
❒ Other ...............................
959 and 959D Leak Detectors
Index
L
Leak detection methods A-6
Already sealed A-7
Evacuated A-6
Pressurized A-7
Leak rate A-5, A-6
Leak test methods
Dye penetrant A-3
Halogen A-3
Helium A-3
Radioisotope A-3
Ultrasonic A-3
Water immersion A-3
Leak testing A-1
Leak types A-1
Locate leak by probe A-7
Locate leak with tracer probe A-6
Accessories 3-19
Audio settings 2-8
B
Background check 2-18
C
Calculating leak rate A-6
Calibrated leak 2-12, 2-14
Calibrating using a calibrated leak 2-12
Calibration
2-11
Cleaning
ground slit plate 3-12
Test port 3-4
Controls 2-2, 2-3
Conversions, definition of A-2
Cover 3-5
M
Magnetic separation principle A-9
Maintenance 3-1
As-required 3-3
Scheduled 3-3
Maintenance schedules 3-3
Mass spectrometer leak detector A-8
Mass spectrometry principles A-4
MSLD technique A-4
Leak rate A-5
Mass spectrometry principles A-4
Simplified description A-8
Vacuum flow A-4
D
Decimal notation table A-2
E
Electrical connections 1-6
Evacuated enclosures A-1
F
Flow, definition of A-2
G
Ground slit plate 3-12
H
Helium for sealing A-7
Helium mass spectrometer leak detection A-4
Hermetic
Enclosures A-1
Systems A-1
I
Draft 6/6/03
A
N
Numerical notation-exponential system,
definition of A-2
O
Operation 2-1
Operator interface 2-1
Indicators 2-2, 2-3
Installation 1-6
Ion source 3-14
Spectrometer tube 3-18
Ion source 3-14
Index-1
959 and 959D Leak Detectors
T
P
Test piece
Already sealed A-7
Evacuated A-6
Pressurized A-7
Test port 3-4
Testing 2-8, 2-10
testing 2-8
Testing at higher pressures 2-10
Testing for leaks A-1
Tracer probe to locate leak A-6
Tuning 2-11
Tuning leak 2-15
Tuning the Spectrometer Tube using a
calibrated leak 2-14
Tuning the Spectrometer Tube using a tuning
leak 2-15
Parts 3-19
Power loss 2-20
Preamplifier 3-17
Preparation for operation 1-6
Primary controls 2-2
Primary indicators 2-2
Principles of mass spectrometry A-4
Probe to locate leak A-7
R
Rate-of-rise, definition of A-2
Rear panel components 2-5
Reinstallation
Spectrometer tube 3-18
Removal
ground slit plate 3-12
Removal of cover 3-5
Removing the 959D from the skid 1-5
Reorder parts 3-19
Replace
Preamplifier 3-17
Residual background check 2-18
Restart procedures 2-19
Running a test 2-8
S
Scheduled maintenance 3-3
Sealing with helium A-7
Secondary controls 2-3
Secondary indicators 2-3
Services required for operation 1-6
Additional services 1-8
Helium 1-7
Power 1-6
Setting the Audio 2-8
Shutdown 2-19
Spare parts 3-19
Spectrometer tube 3-18
Startup procedure 2-7
Index-2
U
Unpacking 1-4
Unpacking instructions 1-4
Unpacking the 959D 1-4
V
Vacuum flow A-4
Vacuum systems A-1
Sales and Service Offices
Varian, Inc
Vacuum Technologies
Sales and Service
United States and Canada
Varian, Inc.
121 Hartwell Avenue
Lexington, MA 02421, USA
Tel.: +1 781 861 7200
Toll-Free: +1 800 882 7426
Fax: +1 781 860 5437
India
Varian India Pvt. Ltd.
205-A, “A” wing of Galleria,
2nd floor, Hiranandani Gardens,
Powai, Mumbai-400 076, India
Tel.: +91 22-2570 8595 / 8597
Fax: +91 22- 2570 8599
Benelux
Varian Vacuum Technologies
Herculesweg 8
4338 PL Middelburg, The Netherlands
Tel.: +31 118 671570
Fax: +31 118 671569
Italy
Varian, Inc. - via F.lli Varian 54
10040 Leini, (Torino), Italy
Tel.: +39 011 997 9111
Toll-Free: 00 800 234 234 00
Fax: +39 011 997 9350
China
Varian Technologies China, Ltd.
Room 1648, Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052, P. R. China
Tel.: +86 (10) 6310 8550
Toll-Free: 800 820 6556
Fax: +86 (10) 6310 0141
Japan
Varian Technologies Japan, Ltd.
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura Minato-ku
Tokyo 108, Japan
Tel.: +81 3 5232 1253
Toll-Free: 0120 655 040
Fax: +81 3 5232 1710
France
Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
91941 Les Ulis cedex, France
Tel.: +33 (0) 1 69 86 38 84
Fax: +33 (0) 1 69 86 29 88
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6, Postfach 11 14 35
64289 Darmstadt, Germany
Tel.: +49 (0) 6151 703 353
Fax: +49 (0) 6151 703 302
Korea
Varian Technologies Korea, Ltd.
Shinsa 2nd Bldg. 2F - 966-5 Daechi-dong
Kangnam-gu, Seoul, Korea 135-280
Tel.: +82 2 3452 2452
Toll-Free: 080 222 2452
Fax: +82 2 3452 2451
South East Asia
Varian Vacuum Technologies South East
Asia (SEA) - Alex Ho
H/P.: +601 2213 1253
Fax: +603 6733 8121
Singapore
Varian Vacuum Technologies Singapore
Unit 10-04 Helios
Biopolis @ one-north
11 Biopolis Way, 138667 Singapore
H/P.: +65 92364988
Fax: +65 64789603
Taiwan
Varian Technologies Asia, Ltd.
2F-3, No. 38, Taiyuan Street
Hsin chu, Zhubei City Taiwan, R.O.C.
Tel.: +886 3 5526770
Toll Free: 0800 051 342
UK and Ireland
Varian Ltd
6 Mead Road, Oxford Industrial Park
Yarnton, Oxford OX5 1QU, UK
Tel.: +44 (0) 1865 291570
Fax: +44 (0) 1865 291571
Mexico
Varian, S. de R.L. de C.V.
Concepcion Beistegui No 109
Col Del Valle, C.P. 03100, Mexico, D.F.
Tel.: +52 5 523 9465
Fax: +52 5 523 9472
List updated 07’10
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
W W W.VA R I A N I N C . C O M / VA C U U M
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