Thermo Scientific MK.4 ESD and Latch

Thermo Scientific MK.4 ESD and Latch
Produ c t Spe ci f i cat i ons
Thermo Scientific
MK.4 ESD and Latch-up
Test System
The Thermo Scientific MK.4 ESD and
Latch-Up Test System is a complete,
robust and feature-filled turn-key
instrumentation test package, which
performs automatic and manual HBM,
MM, and Latch-Up tests on devices
with pin counts up to 2304. It features
the highest speed of test execution,
lowest zap interval, and extensive
parallelism that enables concurrent
zapping with interleaved trace test
capability to global and company driven
quality standards.
• Rapid-relay-based operations—up to
2304 channels
• Solid state matrix topology for rapid,
easy-to-use testing operations
• Latch-Up stimulus and device biasing
• High voltage power source chassis
with patented HV isolation enables
excellent pulse source performance
• Advanced device preconditioning
with six separate vector drive levels
• Massive parallelism drives
remarkable test and throughput
• Addresses global testing demands
for devices that are smaller, faster
and smarter
Industry standard, ESD and LatchUp test system for producers of
multifunction high pin-count devices
Thirty years in the making! IC structure
designers and QA program managers in
manufacturing and test house facilities
worldwide have embraced the Thermo
Scientific™ MK.4, a versatile, powerful,
and flexible, high yield test system. Easily
upgradeable, the MK.4 ESD and LatchUp Test System is fully capable of taking
your test operations through ever-evolving
regulatory and quality standards.
Solid-State Matrix Topology
The advanced rapid relay-based (modular
matrix) hardware of the MK.4 system is at
least ten times faster than mechanically
driven ESD testers. The switching matrix,
while providing consistent ESD paths, also
allows any pin to be grounded, floated,
vectored or connected to any of the installed
V/I supplies. Furthermore, advanced
algorithms ensure accurate switching of HV,
in support of pulse source technology, per
recent JEDEC/ESDA trailing pulse standards.
Advanced Controller and
A powerful, extraordinarily fast embedded
VME controller drives the highest Speedof-Test execution available. Data transfer
between the embedded controller and the
tester’s PC server, is handled through TCP/
IP communication protocols, minimizing
data transfer time. The tester’s PC server
can be accessed through internal networks,
as well as through the internet allowing
remote access to the system to determine
the systems status or to gather result
Latch-Up Stimulus and Device Biasing
The MK.4 can be equipped with up to eight
100 V four-quadrant Voltage and Current
(V/I) power supplies. Each V/I supply has a
wide dynamic range enabling it to force and
measure very low voltage at high current levels
from 100 mV/10 A to 100 V/1 A. The system’s
power supply matrix can deliver up to a total of
18A of current, which is distributed between
the installed supplies. These supplies are able
to provide a fast and versatile means of making
DC parametric and leakage measurements
as well as providing latch-up pulses, while
offering total control and protection of the DUT.
Advanced Device Preconditioning
The MK.4 system provides the most advanced
device preconditioning capability available.
The DUT can be vectored with complex vector
patterns, providing excellent control over the
device. Each pin can be driven using one of
the 6 different vector supplies. The patterns
can be up to 256k deep, running at clock
speeds of up to 10 MHz. Device conditioning
is easily verified, using the read back compare
capability available on every pin.
Thermo Scientific MK.4 Scimitar™
Software Makes Programming Easy, while
Providing Unsurpassed Programming
The MK.4 Windows®-based Scimitar
operating software empowers users with
the flexibility to easily set-up tests based
on industry standards or company driven
Device test plans can be created by importing
existing text based device files, on the
testers PC server or off-line from a satellite
PC containing the application. The software
also provides the capabilities to import test
plans and device files from previous Thermo
Scientific test systems.
Test vectors from your functional testers can
also be imported into the application. And of
course, the vector application allows manual
creation and debug of vector files.
Device test plans and results are stored in an
XML data base, providing unsurpassed results
handling, sorting and data mining capabilities.
Parallelism Drives Remarkable Test
Throughput Speeds
The MK.4 software enables ESD testing of
up to twelve devices at one time using the
multisite pulse source design.
The real key to our customers’ success is in
anticipating what’s next. And to ensure that our
customers possess the ability to evolve quickly
to meet all change factors with efficiency and
cost effectiveness.
As such, the strategically-designed, field
upgradeable architecture of the MK.4 system
ensures a substantial return on investment
over a very considerable test system lifecycle,
as well as better short- and long-term quality
and ESD and Latch-Up test economies.
Embedded VME power supplies eliminate any
communication delays that would be seen by
using stand alone supplies. The embedded
parametric (curve tracing) supply also provides
fast, accurate curve tracing data to help you
analyze your devices performance.
The systems curve tracer can also be used
as a failure analysis tool by allowing the
comparison of stored, known good results,
versus results from a new test sample or
Ready for Today’s Component Reliability
Demands and Anticipating Those to Come
ESD and Latch-Up testing of electronic
and electrical goods can be very expensive
aspects of the design and manufacturing
process. This is especially true as market
demands for products that are smaller, faster
and smarter become the standard rather
than the exception. The Thermo Scientific
MK.4 leverages the technology and knowhow gained over three decades of test
system experience, as well as our in-depth
participation and contributions to global
regulatory bodies governing these changes,
enabling today’s products to meet both global
and industry-driven quality standards.
100W V/I Performance Thermo Scientific
MK.4: eight-V/I configuration. Powerful V/
Is can deliver a total of 800 W to the DUT,
enabling complex testing of all advanced
high power processors on your product
Solid state matrix topology for rapid, easyto-use testing operations. Design ensures
waveform integrity and reproducibility.
Custom fixtures include universal package adaptors to enable the
industry’s lowest cost-in-service high pin count device fixturing yet
devised. (2304-pin, Universal 1-mm pitch BGA package adaptor shown.)
General Specifications
Human Body Model (HBM) per ESDA/JEDEC JS-0012014, MIL-STD 883E, and AEC Q100-002 25 V to 8 kV in
steps of 1 V
Test to multiple industry standards in one integrated system; no changing or
alignment of pulse sources.
Wizard-like prompts on multi-step user actions Machine
Integrated pulse sources allow fast multi-site test execution.
Model (MM) per ESDA STM5.2, JEDEC/JESD22-A115, and
AEC Q100-003, 25 V to 1.5 kV in steps of 1 V
Latch-up testing per JEDEC/JESD 78 test pin and AEC
Includes preconditioning, state read-back and full control of each.
Rapid Relay-based operations at least 10 times faster than
robotic-driven testers
Super fast test speeds.
Test devices up to 2304 pins
Systems available configured as 1152, 1728 or 2304 pins.
Waveform network: Two, 12 site HBM (100 pF/1500Ω)
and MM (200 pF/0Ω) pulse sources address up to 12
devices simultaneously
Patented design ensures waveform compliance for generations to come.
Multiple device selection
When multiple devices are present; graphical display indicates the devices selected
for test; progress indicator displays the current device under test (DUT), along with
test status information.
Unsurpassed software architecture
Flexible programming, easy to use automated test setups, TCP/IP communication.
Enables use of device set-up information
Increased efficiency and accuracy from other test equipment, as well as device
information import.
Event trigger output
Manages setup analysis with customized scope trigger capabilities.
High voltage power supply chassis
Modular chassis with patented HV isolation enables excellent pulse source
Power supply sequencing
Provides additional flexibility to meet more demanding test needs of integrated
system-on-chip (SOC) flexibility.
Manages ancillary test equipment through
Plug-n feature allows the user to control external devices, such as scopes or heat
streams or other devices the Scimitar Plug-ins feature as required for automated
Pin drivers for use during Latch-Up testing
Vector input/export capability from standard tester platforms and parametric
256k vectors per pin with read-back
Full real-time bandwidth behind each of the matrix pins.
Six independent vector voltage levels
Test complex I/O and Multi-Core products with ease.
Up to 10MHz vector rate (programmable)
Quickly and accurately set the device into the desired state for testing from an internal
Comprehensive engineering vector debug.
Debug difficult part vectoring setups with flexibility.
Up to eight separate V/I supplies (1 stimulus and 7 bias
supplies) capability through the V/I matrix
High accuracy DUT power, curve tracing, and Latch-up stimulus available; design also
provides high current.
Low resolution/high accuracy parametric measurements,
using an embedded Keithley PSU
With the optional Keithley PSU feature (replaces one V/I, nA measurements are
achievable, allowing supply bus resistance measurement analysis to be performed.
Multiple self-test diagnostic routines
Ensures system integrity throughout the entire relay matrix, right up to the test socket
Test reports: pre-stress, pre-fail (ESD) and post-fail data,
as well as full curve trace and specific data point
Data can be exported for statistical evaluation & presentation.
Individual pin parametrics
Allows the user to define V/I levels, compliance ranges, and curve trace parameters
for each pin individually.
Enhanced data set features
Report all data gathered for off-line reduction and analysis; core test data is readily
available; all data is stored in an easy-to-manipulate standard XML file structure.
Interlocked safety cover
Ensures no user access during test. All potentially lethal voltages are automatically
terminated when cover is opened. Safety cover window can be easily modified to
accept 3rd party thermal heads.
60 cm (23.5 in) W x 99 cm (39 in) D x 127 cm (50 in) H
Summary Panel with easy navigation among device components
Wizard-like prompts on multi-step user actions
Control of external devices through the use of Scimitar’s user programmable Plug-in capabilities, in addition to the Event Trigger Outputs,
which provide TTL control signals for external devices, such as power supplies or for triggering oscilloscopes
Flexible parametric tests that are defined and placed at an arbitrary position within the executable test plan.
Comprehensive results viewer that provides:
ESD and Static Latch-up data viewing capabilities
Curves viewer with zooming capabilities and the ability to add user comments
Data filtering on the following criteria – failed pins, failed results, final stress levels
A complete set or subset of results using user defined parameters
Sorting in ascending or descending order by various column criteria
Tree-like logical view of the tests and test plans.
Flexible data storage that provides the ability for the end-user to query the data
Seamless support of existing ZapMaster, MK.2, MK.4, and Paragon test plans
Curve tracing with curve-to-curve and relative spot-to-spot comparison
Off-line curve analyzing, including third-party generated waveforms
Canned JESD78A test (static latch-up only) that can be defined automatically
Pause/Resume test capabilities
Intermediate results viewing
Automated waveform capture capability and analysis using the embedded EvaluWave software feature
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Produ c t Spe ci f i cat i ons
Scimitar Software Features
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