대전 유성구 용산동 533번지 미건테크노월드 307호 Tel. 042

대전 유성구 용산동 533번지 미건테크노월드 307호 Tel. 042
대전 유성구 용산동 533번지 미건테크노월드 307호 Tel. 042-673-4400 Fax. 042-673-4466
#307, Migun Technoworld, 533 Yongsan-dong, Yuseong-gu, Daejeon, 305-500, Republic of Korea
Tel. 82-42-673-4400 Fax. 82-42-673-4466
Table of Contents
Introduction
As you know, Optics is essential & very important to machine vision
and metrology (2D & 3D measurement). We have involved in optical
engineering business for many years and have lots of experience to
support our customers who work for measurement and inspection
system for LCD & semiconductor.
We, SPO Inc, have concentrated our effort on research and
development of optical system on the base of long experience and
professional technology.
We always do our best to support our customers who try to search
the best & fast solution for the problem related to optical engineering
field (like Machine Vision Lens, Illumination, laser optics, etc...)
On the other hand, we also try to give the satisfaction to our
customers and we always think what the correct solution for
customer’s inquiry is.
We do the Win-Win strategy to succeed with our customers
together by means of the reasonable price, high quality, short
delivery, perfect A/S and continuous technical support.
It is our pleasure for you to read out first version catalog which will
be upgraded.
If you have any questions related to our products, please let us know.
1. Telecentric Lens Series
2. Line CCD Camera Lens Series
3. The Compact Optical Module for Objectives
4. Conventional Lens Series
5. Optical System for 3D Measurement
6. LED Illumination
Our best Regards.
7. LED Controller
8. Laser Optics
9. Optical Components
10. Glossary
Telecentric Lens
Telecentric lens is good for the measurement without magnification change through over
the D.O.F. and also good for even illumination (telecentric lighting)
via coaxial illumination.
We have several types of telecentric lenses like different working distance,
magnification, CCD size & high resolution or standard resolution as follows.
TCL-40 Series(W.D.: 40mm)
� Specification
Model
TCL2x-40/D
TCL3x-40/D
Magnification
2.0X
3.0X
4.0X
5.0X
6.0X
W.D.(mm)
40
40
40
40
40
Resolution
(um)
4.8
4.8
4.8
4.2
4.2
N.A.
0.07
0.07
0.07
0.08
0.08
F/#
14.28
21.5
28.6
31.25
37.4
D.O.F(㎛)
286
191
143
100
83
[email protected]/2”
[email protected]/2”
[email protected]/2”
F.O.V(mm)
Telecentricity
(<degree)
Optical
Distortion(<%)
Remark
4
[email protected]/2” [email protected]/2”
TCL2.0X-40
TCL3.0X-40D
TCL3.0X-40
TCL4.0X-40D
TCL4.0X-40
TCL5.0X-40D
TCL5.0X-40
TCL6.0X-40D
TCL6.0X-40
TCL4x-40/D TCL5.0x-40/D TCL6.0x-40/D
0.02
0.02
0.02
0.02
0.02
0.03
0.26
0.3
0.2
0.14
TCL-40 Series(W.D.: 40mm)
TCL-40 Series(W.D.: 40mm)
�Fixed magnification lens
�Low optical distortion & telecentricity
�High resolution and high contrast design
�Various W.D. & magnification
�Even coaxial illumination types
TCL2.0X-40D
�Wafer OCR, Wafer pattern, Wafer Marking
�LCD COG, LCD Marked Alignment
�PDP align, PDP OCR, TFT LCD Mark alignment
5
Telecentric Lens
TCL-65 Series(W.D.: 65mm)
Features
�High resolution over the whole field of view
�Support up to 2/3”CCD camera.
�Coaxial types for even illumination
Model
TCL0.5x-65/D TCL0.8x-65/D
Magnification
0.5X
0.8X
W.D.(mm)
65
65
Resolution
(um)
8.4
5.25
N.A.
0.04
0.064
F/#
6.25
6.25
D.O.F(㎛)
1.5mm
586
F.O.V(mm)
[email protected]/3”
[email protected]/3”
0.02
0.02
0.17
0.13
Telecentricity
(<degree)
Optical
Distortion(<%)
TCL0.5X-65D
Model
TCL1.0x-65/D
TCL1.5x-65/D
TCL2.0x-65/D
TCL3.0x-65/D
Magnification
1.0X
1.5X
2.0X
3.0X
W.D.(mm)
65
65
65
65
Resolution(um)
4.8
4.8
5.2
5.6
N.A.
0.07
0.07
0.065
0.06
F/#
7.14
10.7
15.4
25
D.O.F(㎛)
428
380
308
222
F.O.V(mm)
[email protected]/2”
[email protected]/2”
[email protected]/3”
[email protected]/3”
Telecentricity(<degree)
0.022
0.022
0.02
0.02
Optical Distortion(<%)
0.16
0.07
0.02
0.25
Remark
TCL1.0X-65D
TCL1.0X-65
TCL1.5X-65D
TCL1.5X-65
TCL2.0X-65D
TCL2.0X-65
TCL3.0X-65D
TCL3.0X-65
TCL0.5X-65
Remark
TCL0.8X-65D
TCL0.8X-65
TCL-65 Series(W.D.: 65mm)
TCL-65 Series(W.D.: 65mm)
6
� Specification
� Specification
7
Telecentric Lens
� Specification
TCL-110Series(W.D.: 110mm)
TCL4.0x-65/D
TCL5.0x-65/D
TCL6.0x-65/D
Magnification
4.0X
5.0X
6.0X
W.D.(mm)
65
65
65
Resolution(um)
4.8
4.8
4.8
N.A.
0.07
0.07
0.07
F/#
28.7
35.8
43
D.O.F(㎛)
144
114
95
F.O.V(mm)
[email protected]/3”
[email protected]/3”
[email protected]/3”
Telecentricity(<degree)
0.02
0.02
0.02
Model
TCL0.5x-110/D
TCL0.8x-110/D
TCL1.0x-110/D
Optical Distortion(<%)
0.25
0.23
0.2
Magnification
0.5X
0.8X
1.0X
W.D.(mm)
110
110
110
Resolution(um)
14.9
11.2
6.7
N.A.
0.0225
0.03
0.05
F/#
11.1
13.2
10
D.O.F(㎛)
3.55mm
1.65mm
800
F.O.V(mm)
[email protected]/3”
[email protected]/3”
[email protected]/3”
Telecentricity(<degree)
0.02
0.017
0.03
Optical Distortion(<%)
0.2
0.15
0.15
Remark
TCL4.0X-65D
TCL4.0X-65
Features
�High resolution over the whole field of view
�Support up to 2/3”CCD camera(some to 1/2”CCD).
�Coaxial types for even illumination
�Magnification: 0.5 ~ 8.0X
�Compact size(17mm diameter) & light weight
� Specification
Remark
TCL5.0X-65D
TCL6.0X-65D
TCL0.5X-110D
TCL0.5X-110
TCL0.8X-110D
TCL0.8X-110
TCL1.0X-110D
TCL1.0X-110
TCL5.0X-65
TCL6.0X-65
TCL-110 Series(W.D.: 110mm)
TCL-65 Series(W.D.: 65mm)
Model
�Recognition for character, wafer
�Dimension measurement
�Inspections of BGA ball, PCB, IC lead, etc…
�Automated visual inspection
�Wire bonding alignment, pick &place chip mounting
8
9
Telecentric Lens
� Specification
� Specification
TCL1.5x-110/D
TCL2.0x-110/D
TCL3.0x-110/D
TCL4.0x-110/D
Model
Magnification
1.5X
2.0X
3.0X
4.0X
Magnification
5.0X
6.0X
8.0X
1.0X
W.D.(mm)
110
110
110
110
W.D.(mm)
110
110
110
113
Resolution(um)
5.6
7.4
6.1
5.6
Resolution(um)
5.6
5.6
5.6
14
N.A.
0.06
0.045
0.055
0.06
N.A.
0.06
0.06
0.06
0.024
F/#
12.5
22.2
27.3
33.45
F/#
41.77
50
66.7
20.8
D.O.F(㎛)
444
444
243
167
D.O.F(㎛)
134
111
85
1.66mm
F.O.V(mm)
[email protected]/2”
[email protected]/3”
[email protected]/3”
[email protected]/3”
F.O.V(mm)
[email protected]/3”
[email protected]/3”
[email protected]/2”
[email protected]/2”
Telecentricity(<degree)
0.02
0.015
0.015
0.015
Telecentricity(<degree)
0.015
0.015
0.015
0.02
Optical Distortion(<%)
0.06
0.02
0.25
0.25
Optical Distortion(<%)
0.23
0.19
0.25
0.023
Remark
TCL5.0x-110/D TCL6.0x-110/D TCL8.0x-110/D
Remark
TCL1.5X-110D
TCL1.5X-110
TCL5.0X-110D
TCL5.0X-110
TCL2.0X-110D
TCL2.0X-110
TCL6.0X-110D
TCL6.0X-110
TCL3.0X-110D
TCL3.0X-110
TCL8.0X-110D
TCL8.0X-110
TCL4.0X-110D
TCL4.0X-110
TCL1.0X-113D-ST
TCL1.0X-113-ST
TCL1.0x-113/D-ST
TCL-110 Series(W.D.: 110mm)
TCL-110 Series(W.D.: 110mm)
10
Model
11
Telecentric Lens
High Resolution Lens Series
TCL0.1X-150-HR
TCL0.165X-130-HR
Features
TCL0.23X-130-HR
TCL0.5X-65D-HR
TCL0.8X-65D-HR
TCL1.0X-65D-HR
TCL1.5X-65D-HR
TCL1.0X-110D-HR
� Specification
Model
W.D. Resolution N.A.
Magnification (mm)
(um)
F/#
Optical
D.O.F F.O.V(mm) Telecentricity
(<degree) Distortion(<%)
(㎛)
TCL0.1x-150-HR
0.1X
150
40.4
0.0083
6
36.0mm [email protected]/2”
0.04
0.05
TCL0.165x-130-HR
0.165X
129
28.2
0.012
7.1
20.8mm [email protected]/2”
0.017
0.15
TCL0.23x-130-HR
0.23X
129
20
0.016
7.1
10.7mm [email protected]/2”
0.01
0.13
TCL0.5x-65D-HR
0.5X
65
8.4
0.04 6.25 1.5mm [email protected]/3”
0.02
0.17
TCL0.8x-65D-HR
0.8X
65
5.25
0.064 6.25
586
[email protected]/3”
0.02
0.13
TCL1.0x-65D-HR
1.0X
65
4.8
0.07
7.14
428
[email protected]/3”
0.022
0.16
TCL1.5x-65D-HR
1.5X
65
4.8
0.07
10.7
380
[email protected]/2”
0.022
0.07
TCL1.0x-110D-HR
1.0X
110
6.7
0.05
10
800
[email protected]/3”
0.03
0.15
TCL1.5x-110D-HR
1.5X
110
5.6
0.06
12.5
444
[email protected]/2”
0.02
0.06
TCL1.5X-110D-HR
High Resolution Lens Series
High Resolution Lens Series
12
�Designed for mega-pixel
CCD camera(4.65um/pixel)
�High resolution and contrast
with high N.A.
�Uniform coaxial illumination
over the whole F.O.V
�Wide range of magnification
( 0.1X ~ 1.5X)
13
Telecentric Lens
4M Pixel CCD Camera’s Telecentric Lens
Features
�High telecentricity: no perspective error
�Telecentric lenses for large detectors 4M(15,2 x 15.2mm) and 1”
�Iris diaphragm for adjusting D.O.F
�Wide magnification range from 0.315X to 2.0X
�Good for semiconductor & SMT & PCB components measurement
TCL0.6X-130-4M
� Specification
Model
W.D. Resolution N.A.
Magnification (mm)
(um)
F/#
D.O.F F.O.V(mm) Telecentricity Optical
(<degree) Distortion(<%)
(㎛)
TCL0.315x130-4M-HR
0.315X
130
13.3
0.0252 6.25 5.0mm [email protected]
0.03
0.03
TCL0.348x130-4M-HR
0.348X
130
12.1
0.0278 6.25 3.1mm [email protected]
0.03
0.04
TCL0.42x130-4M-HR
0.42X
132
5.4
0.0627 3.35 1.15mm [email protected]
0.03
0.03
TCL0.7x130-4M-HR
0.7X
130
5.1
0.066
5.3
865
[email protected]
0.03
0.05
TCL2.0x50-4M-HR
2.0X
50
3
0.112 8.93
135
[email protected]
0.03
0.04
TCL0.42x130-4M
0.42X
130
16
0.021
4.5MM [email protected]
0.023
0.1
TCL0.6x130-4M
0.6X
130
11.6
0.029 10.4 2.3MM [email protected]
0.023
0.1
10
TCL0.315X-130-4M-HR
TCL0.348X-130-4M-HR
TCL0.42X-130-4M-HR
TCL0.7X-130-4M-HR
TCL0.42X-130-4M
4M Pixel CCD Camera’s Telecentric Lens
4M Pixel CCD Camera’s Telecentric Lens
14
TCL2.0X-50D-4M-HR
15
Line CCD Camera Lens Series
# 8K Line CCD’s Telecentric Lens
(TCL0.467X-278D-8K)
� Specification
�High resolution & High contrast optical design
�Can be applied from 8K to 12K line CCD
�Almost perfect telecentric design
(telecentricity: < 0.04 degree)
�Low distortion over the whole field of view
�Support upto 5um/pixel(12K Line CCD)
�Uniform coaxial illumination with LED coaxial guide
- give the easy alignment with CCD camera and illumination
- Inner coaxial illumination, not external coaxial illumination
� Specification
Model
TCL0.467X-278D-8K
Magnification
0.467X
W.D.(mm)
278
Resolution
(um)
12
N.A.
0.028
F/#
8
Depth of field
1.0mm
F.O.V
[email protected] 8K Line CCD(7um/pixel)
Telecentricity
<0.04 degree
Optical
Distortion
<0.03% @ whole field of view
Model
TCL1.0x-122D-12K
TCL2.0x-80D-12K
Magnification
1.0X
2.0X
W.D.(mm)
122
80
Resolution(um)
6.7
3.4
N.A.
0.05
0.1
F/#
10
10
D.O.F(㎛)
280
50
F.O.V(mm)
[email protected]
[email protected]
Telecentricity(<degree)
0.04
0.04
Optical Distortion(<%)
0.02
0.05
Remark
TCL1.0X-122D-12K
TCL2.0X-80D-12K
# 12K Line CCD’s Telecentric Lenses
# 8K Line CCD’s Telecentric Lens
16
�High accuracy lens for 8K line CCD camera
�Very good telecentricity and high contrast image
�Low distortion over the whole field of view
�Uniform coaxial illumination with LED coaxial guide
- give the easy alignment with CCD camera and illumination
- good for 8K TDI & general line CCD
- Inner coaxial illumination, not external coaxial illumination
# 12K Line CCD’s Telecentric Lenses
17
Line CCD Camera Lens Series
# General Line CCD Camera Lens
� Specification
Model
N-LCL0.7X-257-12K
N-LCL1.0X-203-12K
N-LCL1.4X-170-12K
N-LCL2.0X-70-12K
Magnification
0.7X
1.0X
1.4X
2.0X
W.D.(mm)
257
203
170
70
Resolution
(um)
9.6
6.7
5.4
3.1
N.A.
0.035
0.05
0.063
0.11
F/#
10
10
11.1
9.1
Depth of field
(㎛)
571
100
158
45
F.O.V(mm)
[email protected]
[email protected]
[email protected]
[email protected]
Optical
Distoriton(<%)
0.1
0.08
0.02
0.03
Remark
(TCL1.75X-50D-8K) - 8K TDI Line CCD Camera.
�New design concept like
tube lens with objective lens
�Other objective(different magnification)
exchangeable in the future
�High resolution and low distortion
�Easy setup compared to general
external coaxial illumination
�Koehler illumination
(telecentric illumination)
Koehler illumination Lens
�Low distortion over the
whole field of view
�Object - side telecentric lens
N-LCL1.0X-203-12K & N-LCL2.0X-70-12K is just for 12K line CCD. (5um/pixel)
N-LCL0.7X-257-12K
N-LCL1.4X-170-12K
TCL1.75X-50D-8K
N-LCL1.0X-203-12K
N-LCL2.0X-70-12K
� Specification
Model
TCL1.75X-50D-8K
Magnification
1.75X
W.D.(mm)
50
Resolution
(um)
4
N.A.
0.084
F/#
10.4
Depth of field
95um
F.O.V
[email protected]
8K Line CCD(7um/pixel)
Telecentricity
<0.098 degree
Optical
Distortion
<0.3% @
whole field of view
# 8K Line CCD’s Telecentric Lens
# General Line CCD Camera Lens
18
�High resolution & high contrast optical design
�Can be applied from 8K to 12K line CCD
�Low distortion for excellent image
�Large Image circle up to 90mm(12K @ 7um)
�Optimized for 0.7X & 1.4X magnification
# 8K Line CCD’s Telecentric Lens
19
Line CCD Camera Lens Series
#4K Line CCD’s Telecentric Lens
(TCL0.7X-130-4K)
CMM Series
This module is good for production fields to give on - line monitoring
observations without any loss of quality.
�Compact microscope unit for monitoring system
�Same image quality as real microscope system
�The Koehler illumination optics
(Even illumination intensity over the whole Image)
�Used for CF Plan EPI objectives
(Brightfield type)
�Over 7 magnification’
s tube lens
� Specification
Model
TCL0.7X-130D-4K
Magnification
0.7X
W.D.(mm)
130
Resolution(um)
5.1um
N.A.
0.066
F/#
5.3
Depth of field
303um
F.O.V
� Specification
E.F.L of Tube lens
100mm
200mm
0.5X
1X
[email protected] 4K Line CCD(7um/pixel)
Magnification of
Tube lens
Magnification on
CCD
Objective Magnification X 0.5
(except Olympus: 180mm)
Objective Magnification X 1.0
(except Olympus: 180mm)
Telecentricity
<0.04 degree
Illumination Method
Koehler illumination
Koehler illumination
Optical Distortion
<0.05% @ whole field of view
Camera Mount
C-mount
C-mount
CMM 0.5X
CMM Series
#4K Line CCD’s Telecentric Lens
20
�High resolution and low distortion
�Very Brightness with small N.A(5.3)
�Up to 2K(14um/pixel) & 4K(7um/pixel) Line CCD camera
�Object - side telecentric lens
�Iris diaphragm for adjusting D.O.F
�F-mount
TheCompact Optical Module for Objectives
CMM 1.0X
TCL0.7X-130-4K
21
The Compact Optical Module for Objectives
UV Tube Lens
CMM-1.0X-IRIS
CMM-1.0X-IRIS-TURRET
1. CMM0.7X-UV
(wavelength: 266 ~ 550nm)
CMM-1.0X
2. CMM0.8X-NUV
(wavelength: 350 ~ 600nm)
�High resolution application
compared to visible wavelength
(with NUV objective lens)
�Visible Koehler illumination
�Good for UV back light
illumination
CMM0.7X-UV
CMM-1.5X
22
E.F.L of Tube lens
140mm
Magnification of
Tube lens
0.7
Illumination Method
UV Koehler illumination
Camera Mount
C-mount, 1/2”CCD
� Specification
E.F.L of Tube lens
160mm
Magnification of
Tube lens
0.8
Illumination Method Visible Koehler illumination
Camera Mount
CMM0.8X-NUV
C-mount, 1/2”CCD
UV Tube Lens
CMM Series
CMM 0.75X
�Critical dimension measurement
application with UV objectives
�UV Koehler illumination with
UV illumination lens
� Specification
CMM-2.0X
23
The Compact Optical Module for Objectives
# Parfocal Tube Lens Series
Features
# Parfocal Tube Lens Series
24
(21mm Diagonal Length of CCD)
�Can use the whole performance & field of objectives(F.N.: 24mm)
�Proper Koehler illumination needed
�Can use high N.A. of objectives
�It is good for High resolution application with wide F.O.V.
compared to 1/2”CCD’
s F.O.V.
4M CCD 1.7X
Parfocal Tube Lens 0.25X
Parfocal Tube Lens 0.33X
Parfocal Tube Lens 0.4X
Parfocal Tube Lens 0.5X
LOW MAGNIFICATION
Parfocal Tube Lens 0.75X
Parfocal Tube Lens 1.0X
Parfocal Tube Lens 1.5X
Parfocal Tube Lens 2.0X
# 4M CCD Camera’s Tube Lens
�Wide range of tube lens(0.25X ~ 2.0X)
�Needed for Koehler illumination
�Up to 1/2”CCD camera
(some to 1/3”CCD)
# 4M CCD Camera’s Tube Lens
25
Conventional Lens Series
It is non - telecentric lens for machine vision application like
factory automation. It is compact and light weight design.
Macro Lens for 1/2” CCD Camera
26
2. High Resolution Macro Lens for
Mega Pixel Cameras
2.1 1M CCD camera’
s macro lens
�Low price and compact size
�Fixed magnification with high resolution & low distortion
�Compatible with 1/2”& 1/3”& c-mount
�Support for mega pixel CCD camera (up to 2/3”CCD)
�Long working distance
�Low optical distortion
� Specification
Model
NTL0.75X-65
NTL1.6X-65
NTL0.6X-65
NTL0.8X-113
NTL0.8X-140
Magnification
0.75X
1.6X
0.6X
0.8X
0.8X
W.D.(mm)
64
64
65
113
140
Resolution
(um)
16
9.6
18.6
10.5
10.5
N.A.
0.021
0.035
0.018
0.032
0.032
F/#
17.9
22.9
16.7
12.5
12.5
D.O.F(㎛)
2.5mm
715
3.6mm
1.1mm
1.1mm
F.O.V(mm)
[email protected]/3”
[email protected]/2”
[email protected]/3”
[email protected]/3”
[email protected]/3”
Optical
Distortion(<%)
0.02
0.012
0.03
0.06
0.03
� Specification
Model
Magnification W.D. Resolution N.A.
NTL1.6X-65
NTL0.6X-65
NTL0.8X-113
F.O.V
Distortion
(<%)
0.57X
200
11.57
0.029
10
2.46
[email protected]/3̋
0.04
NTL 0.3X-240
0.3X
240
17.66
0.019
7.8
7
[email protected]/3̋
0.035
NTL 0.19X-240
0.19X
240
28
0.012
7.77
18
[email protected]/3̋
0.13
Resolution unit: ㎛ , W.D, D.O.F & F.O.V unit: mm
NTL0.57X-200
NTL0.19X-240
NTL0.8X-140
D.O.F
NTL 0.57X-200
Remark
NTL0.75X-65
F/#
NTL0.3X-240
High Resolution Macro Lens for Mega Pixel Cameras
1. Macro Lens for 1/2” CCD Camera
27
Conventional Lens series
2.3 Special design optics
�Support for mega pixel’
s camera(2M & 4M)
�Iris diaphragm for adjusting D.O.F
�F-mount(4M CCD) & c-mount(2M CCD)
�High resolution and Low distortion design
�Long working distance
�Good for highly accurate Image processing
�Wide angle camera lens for machine vision application
(11mega CCD camera)
�Very low dostortion Lens
�F-mount
� Specification
Model
NTL 30.1-700
Magnification W.D. Resolution N.A.
F/#
D.O.F
F.O.V
Distortion
� Specification
Magnification
0.042X
NTL 0.25X194-4M
0.25X
194
16
0.023
5.5
7
[email protected]
0.01
W.D.(mm)
700mm
NTL 0.25X194-2M
0.25X
194
8.5
0.0395
2.8
3.6
[email protected]
0.01
F/#
5
NTL 0.215X226-4M
0.215X
226
20
0.017
6.25
10.8
[email protected]
0.01
F.O.V
[email protected]
Distortion
+/- 0.6%
Resolution unit: ㎛ , W.D, D.O.F & F.O.V unit: mm
NTL0.25X-194-4M
Special design optic 1
NTL0.25X-194-2M
NTL0.215X-226-4M
Special design optic 2
High Resolution Macro Lens for Mega Pixel Cameras
High Resolution Macro Lens for Mega Pixel Cameras
28
2.2 2M & 4M pixel’
s CCD camera macro lens
29
Optical System for 3D Measurement
�Non contact & high accuracy optical module
�LCD, BLU, PDP, OLED’
s roughness measurement
�Bump and wafer surface measurement
�Precision machined surface profile
�Up to nano resolution
� Specification
Magnification of Tube lenses
Illumination
0.4X ~ 2.0X(Fixed Magnification)
Target
Koehler Illumination for even intensity over the
entire image
High Power Led Illumination & Controller
We are specialized to design the optical module like tube lens, illumination lens, LED
illuminators for WSI system.
We can also do customized design requested by customer who wants to make WSI system.
Sometimes, we can make the Michelson objective lens to achieve the special
magnification and application.
3D image
Hisogram
X.Y Height
White Light Scanning Interferometer Optical Module
White Light Scanning Interferometer Optical Module
30
1. White Light Scanning Interferometer
Optical Module
31
Optical System for 3D Measurement
Optical Module for Moire Interferometer
Optical Module for Moire Interferometer
2. Optical Module for Moire
Interferometer
This module is optical system to do the moire interferometer measurement which is
used to inspection of components in Lab.
It projects the pattern on object and measures the height by means of getting the
phase information.
The application is like BGA Ball, wafer Bump, PCB surface inspection, etc…
� Specification
1.Measuring Lens
- Telecentric lens to avoid any possible error
- Magnification is up to object size
- Sometimes, Non- Telecentric lens
2.Projection Lens
- Very Low F/# to get high brightness
- Magnification depends on measurement height
- Projection area 25 ~ 60mm
2.Projection Lens
- Fiber with Halogen or Ultra power LED source
Reference projected image
32
Projected image on objective
33
Optical System for 3D Measurement
#. Optical Module for Spectrometry
Features
�To measure thin layer thickness
�High resolution optical lens used for monitoring & measuring
spectrum
�Changeable objectives
�Support up to 1/2”CCD camera
�Wavelength: 400 ~ 100nm
4.1. Two cameras & two telecentric lenses module
Features
�Space - saved design
�Coaxial & ring illumination applied for sample condition
�Special optical system for bonding machine (FPC, ACF bonding…)
�Magnification and W.D. cab be changed by customer request.
4.2 One camera & one telecentric lens module
Features
�Two images(align mark) are overlapped in one image
�White coaxial illumination for simultaneous acquisition of image
�Ring illumination(Red & Blue color) for sample condition
�High resolution & several magnification
�Real space-saving design
4. Dual Viewing Optical Module
#. Optical Module for Spectrometry
34
It can inspect the sample by image which can be acquired with tube lens.
The other port is for spectrometer fiber to measure the spectrum to get
thickness information.
4. Dual Viewing Optical Module
35
LED Illumination
LED illumination is more popular in machine vision application instead of
Halogen source by means of the life time and compact size.
The brightness of LED is increasing so fast. Therefore most of
application in machine vision illumination can be covered by LED illumination.
3 CELL (9W)
Features
�Ultra high bright spot illumination
�Enough for coaxial illumination of most of the telecentric lens
�High contrast compared to halogen source
�Long lifetime and low power consumption
�Several illumination colors(R, G, B, White)
�4 type’
s coaxial LED guide(5mm dia, 1W, 3W, 21W)
Φ5 LED Illumination
2. LED Ring Guides
Features
� Specification
Model
LED-5mm dia.
LED-1W
LED-3W
LED-21W
COLOR
W,R,G,B
W,R,G,B
W,R,G,B
W,R,G,B
1W
3W
21W
�Ring size, W.D., color of LED ring guide is versatile
�Custom design available to get perfect illumination
condition at each application
�High bright LED is adapted for brightness
application
�Illumination angle selected at the condition of
application
�Diffusion plate can be used at some applications
7 CELL (21W)
LED Ring Guides
Coaxial Illumination LED Guide
1. Coaxial Illumination LED Guide
Power
consumption
36
1W 3W POWER LED
Applications
�IC impress inspection
�PCB & IC components inspections
�BGA, solder ball position, shape and area inspection
�Wafer inspection, edge, scratch inspection
�Character recognition, etc…
37
LED Illumination
LED Controller
I. Analog Led Controller
3. LED Line Guide
It can control the LED guide
which is commonly used in
machine vision.
It is constant current control type
instead of voltage control.
Features
�Line Illumination for line CCD camera’
s application
�Focusing cylinder lens to concentrate the beam
�High power LED type and general LED type
�Very uniform line illumination
�Any line guide length is available (100 ~ 1000mm)
�LED color (W, R, B, G,…)
Features
Applications
LED Line Guide
�LCD panel inspection
�Mold & connector inspection
�LCD, PDP glass defect and particles inspection
�Wafer and metal surface inspection
�External coaxial illumination for line CCD camera
� Specification
Model
SPO-LED-2CA
SPO-LED-4CA
Channel
2
4
output
[email protected] or12V
Same as left
Volume control
Volume control by front knob
Same
Input voltage
AC 100 ~240V/50/60Hz
Same
Remote control Connector
D-Sub. 15-pin(male)
Same
SPO-LED-2CA
Line Illumination 30mm
Line Illumination 60mm
SPO-LED-4CA
Line Illumination 200mm
38
Analog Led Controller
�Basic channel: 2 up to 4channel
�Constant current control type optimized for LED lamp
�External 0 ~ 5V voltage to control the volume
�On/Off control by DC voltage(Ex, [email protected] 5V)
Line Illumination 500mm
39
Laser Optics
LED Controller
1) Optical Mirror
II. Digital LED Controller
This controller is digital control type instead of analog one via Rs-232
communication to give customers convenient.
Plate AL mirror
Right angle prism mirror
Plate silver mirror
Features
� Specification
Model
SPO-LED-2CD
SPO-LED-4CD
Channel
2
4
output
[email protected] or12V
Same as left
Volume control
0`~255 level
Same
Input voltage
RS-232
Same
Remote control Connector
AC 100 ~ 240V/50/60Hz
Same
2) Beam Splitter
T/R(%) = 50:50/ 70:30/ 80:20
Plate beam splitter
Cube beam splitter
Various sizes available
SPO-LED-2CD
Laser Optics
Digital LED Controller
�Basic channel: 2 up to 4channel
�Constant current control type optimized for LED lamp
�Rs-232 communication control for volume
�I/O control for On/Off function
�Volume display on the front panel of controller
3) Cylinder Lens for Focusing
SPO-LED-4CD
It is used for focusing the LED, fiber line guide to increase the intensity.
Various radius & length of cylinder
AR coating available
40
41
Glossary
Optical Components
Laser beam expander is used in laser marking system to get good marking quality.
We have 4types of beam expander like below.
Performance & Distance
�Working Distance
- Distance from the end plane of optical lens to the surface of specimen when in focus.
�Focal Length [Back Focal Length/Front Focal Length]
- The distance between the principal point and the focal point is focal length.
- Back focal Length is the distance from the vertex of the last lens to the back focal point
Front Focal Length is the distance from the vertex of the first lens to the front focal point.
�Depth of Field
Optical Components
1) Zoom BET
�Depth of Focus
- Depth of focus is the range around the focal point of image side in which the image is still sharp and
focused.
Features
�Resolution
�Zoom beam expander for 1064nm & 355nm laser
�Zoom ratio: 1 ~ 2.5X
�Focusing ring adapted for adjusting
the divergence angle of laser
�Motorizing possible at user site
Zoom BET1064nm
- Resolution is the capacity to distinguish the minimum space between points and lines
Resolving is determined by N.A. and wavelength λ
.
Resolution = (0.61 ⅹ λ
)÷NA
Ex.) 1um resolution means that 1um space between two points or two lines is distinguished.
�Resolution Power
Zoom BET355nm
- Resolving power is the number of lines per millimeter(lp/mm) in which the black and white lines are
distinguisheds.
The resolving power is expressed by line/mm
Ex.) 70line/mm means to distinguish the line gap of the black and white of 1/70mm pitch.
� Flange Back
- Flange back is the length between the image plane and the front plane of camera mount.
� Telecentric System
- The optical system in which the principal ray is parallel to the optical axis of lens.
- There are three types of telecentric lens like Objective side, Image side and Both sides telecentric
optical syste
2) Manual Beam Expander for
1064nm Wavelength Laser
BET1.5X
BET2.0X
� Distortion
- Lens’
s aberration in which the straight line outside of the optical axis isn’
t displayed as straight line on
image plane
- The kind of distortion is positive one and negative one like pincushion distortion and barrel distortion as
follow
42
Performance & Distance
- Depth of field is the range around the focal point of object side in which the image is still sharp and
focused
Depth of Field = 2 x (permissible circle of confusion x effecctive F - no ÷ M 2)
43
Glossary
Brightness & Magnification
�F-Number
- The f-number indicates the brightness of Lens
- In the image side, It is calculated like below formula
f-No = effective focal length/entrance pupil = 1 / ( 2*NA’)
- Smaller F/# means more brightness. The brightness is inversely proportional to a square number of
F/#
Brightness & Magnification
�Effective F-Number
- The number indicates the lens’
s brightness value when the object is located in the finite position
Effective F-No = (1+M)*F-No
- If there is higher magnification, the brightness is darker.
�Numerical Aperture
- The number is related to the brightness and resolution of lens. Measurement value of the cone of
light accepted by a lens
- Objective N.A.: NA= nⅹsin θ
, Image N.A.: NA’
=n’
ⅹsin θ
’
n & n’: refractive index
θ
: The half angle of objective side entrance pupil; Θ’
: The half angle of image side exit pupil
�Field of View
- The size of captured objective by lens with camera.
- The side of F.O.V. is CCD format size/ optical magnificatio
�Optical Magnification (M)
- Magnification is a ratio between objective size and image siz
M = Y’
/Y = L’
/L = NA/NA’
�Electronic Magnification
- Electronic Magnification is a magnification of an image on CCD camera when displayed on a
monitor.
�Monitor Magnification
- Monitor magnification is the one of objective displayed on a monitor through a lens.
Monitor magnification = optical magnification (M) ⅹ electronic magnificatio
Ex.) optical magnification 0.2× , CCD Size ½ ”
(diagonal 8mm) , Monitor 14”
Electronic magnification = 14× 25.4 ÷ 8 = 44.45
Monitor magnification= 0.2× 44.45 = 8.89
CCD Camera Element Size
대전 유성구 용산동 533번지 미건테크노월드 307호 Tel 042-673-4400 Fax 042-673-4466
#307, MigunTechnoworld, 533Yongsan-dong,Yuseong-gu, Daejeon, 305-500,Republic of Korea
Tel 82-42-673-4400 Fax 82-42-673-4466 Homepage www.spoptics.com
44
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