Linear Scale SR87

Linear Scale SR87
Safety
No compromise for high-accuracy products
PD
LD
The total quality control system that operates throughout the entire design and
production process ensures products with enhanced safety, high quality, and high
reliability that match our customers’ requirements. The company is certified for length
calibration in compliance with the traceability system required by the “Weights and
Measures Act,” and has been granted ISO 9001 certification, which is the international
standard for quality assurance.
Magnescale Corporation
Laserscale
®
Our products comply with CE Marking requirements, have acquired UL certifications
and meet other regulations, ensuring safe use the world over.
We have met:
•EMC Directives(CE)
•FCC regulation
EMI: EN 55011 Group 1 Class A / 91
FCC Part 15 Subpart B Class A
EMS: EN 61000-6-2
for Products with built-in AC power supply:
•UL 61010-1
for Products with Laser:
•DHHS Class 1 (21CFR1040.10)
* When using our devices with machines to which the European Machinery Drirective applies, please make sure that the devices when installed on the machines fulfil the applicable requirements of the Directive.
* Standards or regulations to be complied with may vary by product.
Contents
Traceability
Traceability Flow Chart (Length)
International Committee for Weights
National Institute of Advanced
Industrial Science and
Optical comb
Traceability
2
Contents
3
Introduction
4
Principle
6
Application
7
Lineup
8
BS78
10
BS65-R
14
Weights and Measures (BIPM)
2
and Measures (CIPM)
International Bureau of
Technology (AIST)
Safety
BH25-RE /BH25-NE 16
Iodine saturation absorption stabilized
He-Ne laser at 633nm
BH20-RE /BH20-NE 18
BH200-RE /BH200-NE 20
BL57-RE /BL57-NE 22
Stabilized He-Ne Laser
(633nm)
BL55-RU
28
BD96
30
BD95
32
Connection Cable
34
Technology
35
* The product name "Laserscale" is trademark of Magnescale Corporation.
2
3
What's Lasers cale?
# Laserscale easily achieves measurement and control by ultra high resolution less than 1nm.
Sinusoidal wave of approx. 138nm signal period is generated by a hologram scale with high diffraction efficiency and
a high resolution detecting head based on grating interference method,strong against disturbance
by air pressure or current, plus easy to install (BS series). Signal distortion in principle remains minimal
at high S/N ratio. The highest resolution reaches 17pm in combination with a
interpolator featuring automatic compensation.
138nm
! " &! '
$ *
Volume holography technology of Laserscale®
PD
achieves high diffraction efficiency to
LD
PD
LD
Easy installation, remarkable for ultra-high resolution,
accuracy and non-contact detection
generate high S/N signal and big output signal.
+
$% One count movement by holographic grating
Unaffected by the change of
clearance between head & scale
Easy installation
High stability against external
disturbances (air pressure disturbances/
fluctuations)
of 550nm wave length diffracts interfering signal
Holographic grating is protected with cover glasses, which guards the grating
against external pressure. The glass can be wiped out to clean dust and dirt.
Clearance change
*
Air pressure effect
Grating interference principle linear encoder generates signal of approx.
Laser
interferometer
Also using our interpolator, 17pm resolution and high response as max.
response speed 400mm/s are available.
Track direction
Clearance direction
Output
4
Number of divisions
Resolutions
Maximum response speed
8000
17
pm
400mm/s
32
4.31
nm
60mm/s
Optical axis shift
by change of Clearance
Position (40nm/div)
0.14μm period, that is 1/140 of conventional linear encoder with 20μm signal period.
Model
Even with high tolerance for installation, no electric adjustment
required after installation.
) to 4 periods, resulting 1/4 of original signal (approx. 0.14μm). And signals go
through electrical Interpolator, it will be maxmum 17pm resolution.
BS series
Binary
Signal wavelength:
AB quadrature
138nm
( % Yoing direction:
±6min
Pitching direction:
±6min
,$ -
Holographic grating
Rolling direction:
±10min
Cover glass
LASERSCALE
0
Time(min)
800
Track direction:
±0.2mm
Holographic scale
5
Principle
Application
The semiconductor laser beam is split by a polarized light beam splitter into S and P polarized light beams,
then diffracted through a volume hologram lattice with very high diffraction efficiency. The two diffracted
beams pass through separate 1/4-wavelength plates to a mirror, which reflects the beams back through the plates.
This process converts the S polarized beam to P polarized light and the P polarized beam to S polarized light.
The two beams are diffracted again through the volume hologram lattice, then super-positioned
by the polarized light beam splitter to create interference.
All interference travels to the photo-detector side due
Polarizing plate
ei ( +2Kx)
to conversion of the polarization direction.
Since double diffraction adds +2 Kx and -2 Kx phases
Semiconductor laser
Wavelength: 790nm
Photo detector
ei( -2Kx)
to each beam, the interference is subject to four
light-dark inversion cycles for each lattice scale
produces a signal wavelength of 0.55/4 = 0.1379 μm.
Non-contact measuring machines
Micro grinders
DUV-based automatic wafer
defect classification systems
-K
+K
This detecting optics is free from fluctuations and
left and right changes identiacally even with
Surface roughness/
contour measuring machines
Polarization beam
splitter
K=
of movement. Thus a lattice pitch of 0.55 μm.
change in air pressure, since the light path of both
Ultra high precision air stages
(vacuum resistant)
p
X
Holographic grating
Laserscale
the change in wavelength of the optical source.
Repeatability and returning errors do not
Pitch 0.55 μm
+K
-K
occur in principle.
<BS Series>
/4 phase plate
Aspherical surface machining
Mirror
: Direction where light vibrates···Right and left
Laser beam is radiated from LD (semiconductor laser).
: Direction where light vibrates···Back and forth
Laser is divided into P wave and S wave.
EB
EUV
Laser beam passage
(Transmission)
DUV
Aspherical
surface
processing
machine
Aligner
Dicers
Micro
grinder
Bonders
Semiconductor
applications
Laser is diffracted by holographic grating.
Precision machining
applications
Market
for ultraprecise
positioning
Prober
Film
inspection
equipment
Precision
measurement
inspection
applications
Precision
lathe
Media
Head tester
Defect
inspection
equipment
Optical disk
Electron
microscopes
P wave and S wave are piled on and enters
into the photo detector.
6
Similarly, the laser is diffracted by the
holographic grating.
STW
P wave is converted to S wave.
S wave is converted to P wave.
7
Lineup
Series
Feature
Max.resolution
Accuracy
Measuring length
Interpolator
Output
Response speed
Page
400mm/s
P. 10
400mm/s
P. 12
700mm/s
P, 14
40bit Binary
BS78
Low expansion glass
17pm
±0.04μm
(Measuring length 40mm)
10mm~420mm
BD96
(BD95)
BS
Serial
=138nm
Transmission
BS65-R
BH25-RE/NE
BH
Low expansion glass
Blue plate glass
17pm
0.03125nm
±0.5μm
(30mm-170mm)
±1μm
(220mm-420mm)
Low expansion glass:
30mm~420mm
Blue plate glass:
30mm~420mm
-
Radius 12.03mm
Radius 27.07mm
Radius 36.1mm
Radius 41.72mm
BD96
Nothing
Clock pulse
(LVDS)
13,000min-1
P, 18
Built-in I/F Box
AB quadrature
1,500, 650, 300,
120mm/s
P, 20
BH200-RE/NE
907,200 Pulse/rotation
6.93nrad
r36.1 Scale only
Radius 36.1mm
BL57-RE
Low expansion glass
Blue plate glass
0.1/0.05/0.02/
0.01μm
±0.5μm (30mm-170mm)
±1μm (220mm-370mm)
±1.5μm (420mm-1,060mm)
Low expansion glass:
30mm~410mm
Blue plate glass:
60mm~1,060mm
BL57-NE
Low expansion glass
Blue plate glass
0.4μm (1Vp-p)
0.1/0.05/0.02/
0.01μm
0.4μm (1Vp-p)
0.1μm~0.01nm
BL55-RU
Blue plate glass
400nm (1Vp-p)
Please ask for more than 1,060mm
±0.5μm (30-170mm)
±1μm (220-370mm)
±1.5μm (420-1,060mm)
Please ask for more than 1,060mm
±2.5μm
(70mm-370mm)
±4.5μm
(370mm or more)
BD96
(BD95)
Serial
1.5nrad
BH20-RE/NE
=400nm
Transmission
8
160mm~960mm
302,400Pulse/rotation
680,400Pulse/rotation
907,200Pulse/rotation
1,048,576Pulse/rotation
=250nm
Reflection
BL
Long-length type
Blue plate glass
40bit Binary
L<460:
(0.1+0.4L/100)μm
>460:3μmp-p
L=
L:Measuring length(mm)
Low expansion glass:
30mm~420mm
Blue plate glass:
60mm~1,060mm
40bit Binary
BD96
Serial
40bit Binary
555min-1
(
1,190min-1, 529min-1
396min-1, 343min-1
)
P, 16
Serial
Nothing
Analog
3,000mm/s
Built-in I/F Box
AB quadrature
1,500, 650, 300,
120mm/s
Nothing
Analog
3,000mm/s
Built-in I/F Box
AB quadrature
1,500, 650, 300,
120 mm/s
P, 28
Nothing
Analog
3,000mm/s
P, 28
P, 20
Blue plate glass:
70mm~1,020mm
9
BS78-xxxN(NS)(measuring length:40/120/170/220/370/420)
L1 1
L3 1
L2 1
(with/without reference mark)
L3 1
13.1
9.8 0.2*
N-M4 scale clamp mounting screw
60
2-M4 reference plate mounting screw
50 3*
Scale movement
25 0.2* Reference point
25 0.2*
detection direction
*
0.01 M
0.01
A
L2 1
25 0.2*
25 0.2*
25 0.2*
6
14
BS78
5
4.6
Reference signal
detection position
43.5
32.7 0.3
BS
External Dimensions
Scale signal detection position
30.5
Detector head mounting screw
2-M3x30
29.5
38 0.2*
46 0.3
3
45.9
ø7
Cable length
3000
High-speed and high-resolution, while maintaining stable, ultraprecision measuring.
15
6.8
40.5
Ideal for precision stages, semiconductor inspection/manufacturing systems,
ø4 +0.05
0
3-ø5
9
0.4
1.4
10
ø4 +0.05
0
Reference
hole
Note 1:The items marked by an asterisk indicate the machining dimensions on the mounting surface.
Note 2:The surface roughness of the scale mounting surface is Rmax = 6.3S.
Note 3:The surface roughness of the detector head mounting surface is Rmax = 12.5S.
Note 4:"M" refers to the machine guide.
Note 5:Reference point detection direction : Standard (Scale movement direction with the head stationary)
2-ø5
25
5
4 +0.05
0
50
25
14
13.3
and ultraprecision processing machines.
*
0.03 A
42
25
38
12
60
38
Reference plate t=2
Model
BS78-40R (RS)
BS78-120R (RS)
BS78-170R (RS)
BS78-220R (RS)
BS78-370R (RS)
BS78-420R (RS)
Spacer t=2
Scale clamp
L1
66
146
196
246
396
446
L2
—
50
75
100
75
100
L3
—
—
—
—
75
100
N
2
6
6
6
10
10
Unit: mm
BS78-xxxN(NS)(measuring length:70/270/320)
L1 1
*
0.01 M
0.01
A
L2 1
L2 1
98
88 0.3*
40 0.2*
Actual size
(measuring length : 10 to 420 mm)
Reference plate t=2
Type example:BS78-220R
Scale signal detection position
40.5
42
60
R: with reference point;
5
2-ø5
16
0.4
12
38
Scale clamp
1.4
10
25
13.8
5-ø5
21
ø4 +0.05
0
25
14
15
9
25
4+0.05
0
88
ø4 +0.05
0
Reference
hole
*
0.03 A
Note 1:The items marked by an asterisk indicate the machining dimensions on the mounting surface.
Note 2:The surface roughness of the scale mounting surface is Rmax = 6.3S.
Note 3:The surface roughness of the detector head mounting surface is Rmax = 12.5S.
Note 4:"M" refers to the machine guide.
Note 5:Reference point detection direction : Standard (Scale movement direction with the head stationary)
98
outperforming light wave interferometer systems
High stability, unaffected by humidity, air pressure and air disturbances
Reference signal
detection position
15
45.9
6.8
• High-resolution scale with signal wavelength of approx. 138nm,
-6
6
4.6
Detector head mounting screw
2-M3x30
29.5
38 0.2*
46 0.3
ø7
Cable length
3000
•
• Reference point accuracy : ±0.1μm
• Scale accuracy : ±0.04μm or better (measuring length : 40 mm)
• Non-contact design eliminates return error.
• Special non-magnetic and vacuum-compatible models available
• Using low expansion glass : -0.7 x 10 / ˚C
25 0.2*
30.5
3
13.3
2-M4 reference plate mounting screw
25 0.2*
14
23
39.2 0.2* 5
25 0.2*
N-M4 scale clamp mounting screw
32.7 0.3
43.5
25 0.2*
Scale movement
Reference point
detection direction
13.1
9.8 0.2*
25
38
Spacer t=2
Model
BS78-70R (RS)
BS78-270R (RS)
BS78-320R (RS)
L1
96
296
346
L2
—
120
120
N
4
8
8
Unit: mm
RS: high accuracy with reference point
N: without reference point;
NS: high accuracy without reference point
Effective length
10
11
External Dimensions
Main specifications
BS78
Model
BS78-xxx(NS)(measuring length:40/120/170/220/370/420)
Measuring length
Overall length
Max. travel length
L1 1
L3 1
L2 1
L2 1
25 0.2*
25 0.2*
25 0.2*
6
4.6
(24.5)
14
23
39.2 0.2*
5
19
25 0.2*
Accuracy(at20˚C)
2-M4 reference plate mounting screw
50 0.3*
25 0.2*
13.1
9.8 0.2*
N-M4 scale clamp mounting screw
60
*
0.01 M
0.01
L3 1
*
0.03 A
30.5
Detector head mounting screw
2-M3x30
29.5
38 0.2*
46 0.3*
3
± 0.1μm (Only R/RS type)
15
This is virtually eliminated. It should be considered to be less than two resolution limits of the detector that is used.
Repeatability
This is virtually eliminated. It should be considered to be less than one resolution limit of the detector that is used.
Detection type
Operating temperature
40.5
Storage temperature
Note 1:The items marked by an asterisk indicate the machining dimensions on the mounting surface.
Note 2:The surface roughness of the scale mounting surface is Rmax = 6.3S.
Note 3:The surface roughness of the detector head mounting surface is Rmax = 12.5S.
Note 4:"M" refers to the machine guide.
6.8
42
60
2-ø5
1.4
25
38
12
38
Reference plate t=2
Model
BS78-40N (NS)
BS78-120N (NS)
BS78-170N (NS)
BS78-220N (NS)
BS78-370N (NS)
BS78-420N (NS)
10
0.4
13.8
5
16
9
4+0.05
0
25
3-ø5
21
ø4 +0.05
0
50
25
ø4 +0.05
0
Reference
hole
14
13.3
L1
66
146
196
246
396
446
L2
—
50
75
100
75
100
Single direction
Return error
Light source
45.9
N type, R type :
± 0.06μm ± 0.08μm ± 0.20μm
± 0.35μm ± 0.50μm ± 0.65μm
At the center, and every 50mm from the center to the left and to the right (BS78 models with measuring lengths of 320, 370, 420mm: 20mm offset from the center at 50mm intervals)
Temperature coefficient
Cable length
3000
NS type, RS type :
± 0.03μm (NS type) ± 0.04μm
± 0.10μm ± 0.18μm ± 0.25μm
± 0.34μm ± 0.39μm
± 0.44μm
Reference point position
Radiation power
ø7
58mm (Measuring length 10mm) Measuring length + 26mm (Measuring length 40mm to 420mm)
Measuring length + 2mm (Measuring length 10mm) Measuring length +10mm (Measuring length 40mm to 420mm)
Reference point accuracy
Reference point
detection direction
Scale signal detection
position
10(only N/NS)/40/70/120/170/220/270/320/370/420
Weight
-6
-0.7 x 10 /˚C
Semiconductor laser Wavelength, 780nm, Maximum output 10nW
DHHS class 1
Diffraction grating scan type
10˚C to 30˚C (No condensation)
-10˚C to 50˚C (Humidity 60% or less)
0.4/0.41/0.42/0.43/0.44/0.45/0.46/0.47/0.48kg (including head)
N
2
6
6
6
10
10
L3
—
—
—
—
75
100
Spacer t=2
Scale clamp
Unit: mm
BS78-xxx(NS)(measuring length:70/270/320)
L1 1
L2 1
L2 1
98
88 0.3*
40 0.2*
25 0.2*
2-M4 reference plate mounting screw
25 0.2*
25 0.2*
6
4.6
(24.5)
14
23
39.2 0.2* 5
27.8 0.3
43.5
*
0.01 M
0.01
N-M4 scale clamp mounting screw
19
25 0.2*
13.1
9.8 0.2*
*
0.03 A
Scale signal detection
position
30.5
3
ø7
Detector head mounting screw
2-M3x30
29.5
38 0.2*
46 0.3
45.9
15
6.8
13.3
40.5
Cable length
3000
Note 1:The items marked by an asterisk indicate the machining dimensions on the mounting surface.
Note 2:The surface roughness of the scale mounting surface is Rmax = 6.3S.
Note 3:The surface roughness of the detector head mounting surface is Rmax = 12.5S.
Note 4:"M" refers to the machine guide.
9
Reference
hole
42
60
Reference plate t=2
12
5-ø5
25
5
2-ø5
0.4
12
38
Scale clamp
1.4
10
25
13.8
15
14
25
16
21
ø4 +0.05
0
88
ø4 +0.05
0
4 +0.05
0
98
25
38
Model
BS78-70N (NS)
BS78-270N (NS)
BS78-320N (NS)
L1
96
296
346
L2
—
120
120
N
4
8
8
Unit: mm
Spacer t=2
13
BS65-xxxN(NS)(measuring length:160/260/360/460/560/660/760/860/960)
L1
BS65-R
L3 x N
L2
L2
L3 x N
11.5
L3
50
5
6
25
25
25
25
25
25
25
55
30.5
12
7
20
19
(39)
23
44.5
7
20
9
7.8
2-M4 Reference plate mounting screw
5
11.5±0.2
N-M4 Scale clamp mounting screw
60
14
L3
(with reference mark)
(3.5)
BS
External Dimensions
2-M5 Detector head mounting screw
40
70
L2
+0.05
0
25
Reference
hole
High accuracy LASERSCALE™ with built-in optical zero point
15
20
Cable length 3000 (9.8ft)
25
5-ø5
25
9
42
L2
N-M4 Scale clamp mounting screw
20
2-M4 Reference plate mounting screw
25
14
ø4
98
88
60
ø4 2-ø5 hole
0.4
1.4
11
5
When there is an even number of scale clamps
(BS65-260R/-460R/-660R/-860R)
(Slotted hole)
38
Scale Clamp
25
38
13.8
16
21
12
10
25
ø4 +0.05
0
Reference
hole
ø4 +0.05
0
Reference plate t=5 (0.197")
ø4 +0.05
0
50
25
3-ø5 hole
Spacer t=5 (0.197")
9
42
14
2
Reference
hole
60
Model
BS65-160R
BS65-260R
BS65-360R
BS65-460R
BS65-560R
BS65-660R
BS65-760R
BS65-860R
BS65-960R
L1
196
296
396
496
596
696
796
896
996
L2
75
120
75
120
75
120
75
120
75
L3
—
—
75
75
75
75
75
75
75
N
—
—
1
1
2
2
3
3
4
A
6
8
10
12
14
16
18
20
22
Unit: mm
Reference plate t=5 (0.197")
Main specifications
Model
Measuring length
Overall length
Actual size
BS65-R
160/260/360/460/560/660/760/860/960
Measuring length + 36mm
Max. travel length
Measuring length + 10mm (5mm on each side)
Accuracy (at20˚C)
L < 460 : (0.1 + 0.4L/100) μm p-p
L ≥ 460 : 3μm p-p
L : Measuring length (mm)
Reference point accuracy
±0.1μm
Reference point position
At the center, and every 50mm from the center to the left and to the right (BS78 models with measuring lengths of 320, 370, 420mm: 20mm offset from the center at 50mm intervals)
Reference point
detection direction
Single direction
Return error
This is virtually eliminated. It should be considered to be less than two resolution limits of the detector that is used.
Repeatability
This is virtually eliminated. It should be considered to be less than one resolution limit of the detector that is used.
Temperature coefficient
Light source
Radiation power
Detection type
Operating temperature
Storage temperature
Weight (kg /lbs)
-6
8 x 10 / ˚C
Semiconductor laser Wavelength, 780nm, Maximum output 10nm
DHHS class 1
Diffraction grating scan type
10˚C to 30˚C (No condensation)
-10˚C to 50˚C (Humidity less than 60%)
0.5kg to 1.0kg (including head)
•
• High accuracy, high resolution laser scale :
Signal wavelength of 138nm,
Accuracy : L < 460 : (0.1+0.4L / 100) μm p-p
(L=measuring length in mm)
• Resolution : 0.07nm
• High accuracy optical reference point : ± 0.1 μm
• Measuring length : 160 mm to 960 mm / 6.29" to 37.79"
• Easy installation
• Minimal effect from disrupted air current and atmospheric changes.
Type example:BS65-360R
R: with reference point
Effective length
14
15
BH25-RED BH25-***REDB
L1±1
L3
L2
L2
L3
98
M
40±0.2*
25±0.2*
25±0.2*
25±0.2*
25±0.2*
2.5
25±0.2*
25±0.2*
9
43.5
20
15*
11.5
5
6±0.5
(with/without reference markreference mark)
Abutting surface
for mounting
SC-Scale clamp
SP-Spacer
26
0.01/200
88±0.3*
Scale abutting surface
(Note 5)
21*
BH25-RE / BH25-NE
0.02
(26)
(21)*
BH
External Dimensions
Reference plate(BE-C)
P-4x8
Scale clamp
mounting screw
2-M4x8
Reference plate(BE-C)
mounting screw
11.7
L2
60
Scale signal detection position
20*
2.5
(1.8)
Reference plate(BE-A)
50±0.3*
Penetrating 2-M3
For mounting detection head
25
6
L2
Reference signal detection position
12.5
Scale signal detection position
25±0.2*
2-M4x8
Reference plate(BE-A)
mounting screw
19.5±0.02*
0.01
Abutting surface
for mounting
Reference plane
for mounting
M
4-ø2.8
(Mounting hole for M2.6)
0.01
101
96±0.1*
30
Cable length 1000
2-ø5 hole
ø4 +0.05
0
Reference
hole
25
3-ø5 hole
88
ø4 +0.05
0
25
Reference
hole
Reference plate (BE-A) (t=5)
Scale clamp
5-ø5 hole
15
25
42
60
42
60
11.3
38
18.5
13.5
12
Model name
BH25-003REDB
BH25-007REDB
BH25-012REDB
BH25-017REDB
BH25-022REDB
BH25-027REDB
BH25-032REDB
BH25-037REDB
BH25-042REDB
98
50
1.4
1.5
and precision microscopes
0.3
2
Ideal for low-profile stages, semiconductor back-end processing equipment
5
11.5
25
ø4 +0.05
0
Reference hole
6.5
4 +0.05
0
Slotted hole
Spacer (t=5)
Reference plate (BE-B) (t=5)
For BH25-007REDB, bH25-027REDB and BH25-032REDB
6.5
11.5
40
10
38
High-accuracy, reflective Laserscale with signal wavelength of 250nm
33±0.1*
For BH25-003REDB,BH25-012REDB,BH25-017REDB, BH25-022REDB,BH25-037REDB,and BH25-042REDB
25
L1
56
96
146
196
246
296
346
396
446
Measuring length
30
70
120
170
220
270
320
370
420
L2
—
—
50
75
100
120
120
75
100
L3
—
—
—
—
—
—
—
75
100
SC
1
2
3
3
3
4
4
5
5
SP
—
—
2
2
2
2
2
4
4
P
2
4
6
6
6
8
8
10
10
L3
—
—
—
—
—
—
—
75
100
SC
1
2
3
3
3
4
4
5
5
SP
—
—
2
2
2
2
2
4
4
P
2
4
6
6
6
8
8
10
10
Notes: 1. The items marked by an asterisk indicate the machining dimensions on the mounting surface. 2. The surface roughness of the scale mounting surface is Rmax = 6.3S(250μinch).
3. The surface roughness of the detector head mounting surface is Rmax = 6.3S(250μinch). 4. "M"refers to the machine guide.
5. Mount and sdjust the paired reference plates so that their reference surfaces have a parallelism of 0.01 or less with respect to the machine guide.
BH25-RED BH25-***REDC
L1±1
L3
L2
L2
L3
98
M
25±0.2*
6±0.5
SC-Scale clamp
SP-Spacer
25±0.2*
25±0.2*
25±0.2*
25±0.2*
25±0.2*
Reference plate(W)
P-4x8
11.7
Scale signal detection position
Reference signal detection position
12.5
Scale clamp
mounting screw
L2
2-M4x8
20*
2.5
Reference plate(W)
mounting screw
(1.8)
3.4
25
16.9±0.02*
0.01
26
21*
9
43.5
(26)
(21)*
20
15*
2.5
11.5
5
Scale abutting surface
(Note 5)
88±0.3*
40±0.2*
Abutting surface
for mounting
0.02
0.01/200
Reference plane
for mounting
M
0.01
L2
Scale signal detection position
60
Penetrating 2-M3
For mounting detection head
50±0.3*
Reference plate
25±0.2*
2-M4X8
Reference plate
mounting screw
Abutting surface
for mounting
4-ø2.8
(Mounting hole for M2.6)
101
Actual size
96±0.1*
30
Cable length 1000
2-ø5 hole
40
33±0.1*
For BH25-003REDC, BH25-012REDC, BH25-017REDC, BH25-022REDC, BH25-037REDC, and BH25-042REDC
10
25
38
50
98
3-ø5 hole
ø4 +0.05
0
88
Reference
hole
25
15
42
1.5
42
6.5
60
Reference plate (t = 2.2)
5-ø5 hole
25
6.5
25
11.5
ø4 +0.05
0
Reference
hole
60
Reference plate (W) (t = 2.2)
For BH25-007REDC, BH25-027REDC and BH25-032REDC
11.5
1.4
2
12
38
Scale clamp
0.3
11.3
5
13.5
18.5
25
Reference hole
4 +0.05
0
Slotted
hole
Spacer (t = 2.2)
ø4 +0.05
0
Model name
BH25-003REDC
BH25-007REDC
BH25-012REDC
BH25-017REDC
BH25-022REDC
BH25-027REDC
BH25-032REDC
BH25-037REDC
BH25-042REDC
L1
56
96
146
196
246
296
346
396
446
Measuring length
30
70
120
170
220
270
320
370
420
L2
—
—
50
75
100
120
120
75
100
Notes: 1. The items marked by an asterisk indicate the machining dimensions on the mounting surface. 2. The surface rounghness of the scale mounting surface is Rmax = 6.3S (250μinch).
3. The surface rounghness of the detector head mounting surface is Rmax = 6.3S (250μinch). 4. "M"refers to the machine guide.
5. Mount and sdjust the paired reference plates so that their reference surfaces have a parallelism of 0.01 or less with respect to the machine guide.
Unit: mm
Main specifications
Model
• Signal wavelength : 250nm
• High accuracy : ±1μm/420nm
• High response speed : 700mm/s
• Maximum resolution : 0.03125nm
• Available : with/without reference point
• Completely non-contact design Return error is
theoretically eliminated.
•
• Thin head with thickness of 12mm
• Supporting various resolutions and output modes
Scale : Blue plate glass/Low expansion glass
(Depending on the interpolator connected.)
• Special non-magnetic and vacuum-compatible models available
16
BH25-RED
BH25-NED
30/70/120/170/220/270/320/370/420 (Low expansion glass/Blue plate glass)
Measuring length (mm)
Overall scale length
Measuring length +26mm
Maximum travel length
Measuring length +10mm
Accuracy (at 20˚C)
±0.5μm (30 to 170mm) ±1.0μm (220 to 420mm)
Grating pitch
1.0μm
Signal pitch
250nm
Reference point
Direction of starting point detection
With reference point
None
For one
None
Output signal
Type example:BH25-170REDB
B: Blue plate glass;
C: Low-expansion glass
Output resolution
AB phase and Intarporator BD96
AB phase and BD96 connection(Depend on the number of partitions. )
-6
-6
Temperature coefficient
-0.7 x 10 /˚C (Low expansion glass) 8 x 10 /˚C (Blue plate glass)
BD96 connection
Light source
Semiconductor laser Wavelength, 780nm, Maximum output 6mW
E: Open type scale
Detection system
R: with reference point;
Operating temperature range
N: without reference point
Effective length
Diffraction grating scanning system
+10˚C to +30˚C (No condensation)
Storage temperature range
-10˚C to +50˚C (Humidity less than 60%)
Maximum response speed
700mm/s (When connected with BD96)
17
Amplifier BOX
BH20-NED
50.5
2-M3
BH20-RE / BH20-NE
21
30.5
(With / Without reference mark)
10214-52A2JL (Manufactured by 3M)
2.5
BH
External Dimensions
20
2.5
25
ø5.5
11.7
12.5
1000
2.5
Compact, reflective rotary Laserscale featuring high accuracy,
high resolution and high response speed.
12.5
4
2-M2 (Mounting hole)
20
26
precision measuring instruments, and aspheric surface processing machines.
8.85
Ideal for high-resolution angle measuring in HDD manufacturing equipment,
Incremental signal detector
Unit: mm
Main specifications
Detection head
BH20-RED
Model
BH20-NED
Detection system
Diffraction grating scanning system
Light source
Semiconductor laser with power of 6mW or less and wavelength of 790nm
Reference point
Single reference point; single -direction detection
None
Grating pitch
1.0μm
Signal pitch
250μm
Reference point
Direction of starting point detection
With reference point
None
For one
None
Linear scale : 7 to 18mm (scale : Ni-Co or Si )
Rotary scale : Radius 6.016, 9.454, 12.032, 27.073, 36.097mm (rotary scale Ni-Co)
Scale
1,500mm/s ( When using analog output),700mm/s ( When using interpolator BD96)
Maximum response speed
Operating temperature range
+10˚C to +30˚C no condensation. Avoid operating under high humidity.
Storage temperature range
±0˚C to +50˚C no condensation. Avoid operating under high humidity.
Actual size
Film scale (BE10)
Detection radius
*Putting out of length of cable
Detection track
External form
12.032mm
27.073mm
36.097mm
41.723mm
Max.radius
13.532mm
28.573mm
37.597mm
43.523mm
Min.radius
10.532mm
25.573mm
34.597mm
40.597mm
7.7mm
19.77mm
29.00mm
34mm
13.45mm
28.57mm
37.60mm
43.523mm
20ømm
59ømm
77ømm
87ømm
Internal diameter
External diameter
Scale diameter
• Signal wavelength : 250nm
• High–speed response : 1,500mm/s (When using analog output),
Number of output pulse
of one rotation
680400
302400
907200
700mm/s(When using interpolator BD96)
Maximum response speed *
160 min-1 (when using r=41mm scale)
* When using cable length 1m and Analog output. However, the Max.response speed is limited depending on the cable length.
1190 min
-1
529 min
-1
396 min
1048576
-1
343min-1
External diameter
-1
555 min (when using r=12mm scale)
• High resolution : 4,294,967,296 pulses/rotation
Detection track, Max.radius
(when using r=41mm scale, divisions=4096)
Detection radius
3.017 x 10-4 sec (when using r=41mm scale)
1.46nrad (when using r=41mm scale)
• Available with/without reference point
• Thin head with thickness of 12mm
• Interpolators with various resolutions and output modes available
• Special nonmagnetic and vacuum-compatible models available
Detection track, Min.radius
Type example:BH20-RED
Internal diameter
D:BD Connected type
E:Open type scale
R:with reference point; N: without reference point
18
*Contact us directly for detail specifications
19
BH200-RE / BH200-NE
106
BH200-RE / BH200-NE
4.5
(with reference mark) / (without reference mark)
98
4
87.2
5.4
R2.25
42
52
48.5
27.2
20.6
5
29
20.5
ø4.5
24.5
BH
External Dimensions
BH200-RE
(2.5)
13.5
Compact, reflective rotary Laserscale featuring high accuracy,
11.5
Cable Length 1000
5
1.6
Reference mark measuring point
0.5
Ideal for high-resolution angle measuring in HDD manufacturing equipment
1.6
29
high resolution, and high-speed response,
4.1
Incremental Measuring point
7.1
0.5
(2.5)
BH200-NE
11.5
13.5
and precision measuring instruments
4.1
7.1
Incremental Measuring point
Unit: mm
Main specifications
BH200-RE
Model
Reference point*1
Detection method
None
Grating interferometer
Light source
Semiconductor laser Wavelength: 790nm Output: 6mW or less
Pulse number/scale radius
907,200 pulses, scale detection radius: 36.1mm
10MHz to 200MHz(660rpm to 13,000min-1)
Response speed
Category temperature range
10 ˚C~30 ˚C (head) 0 ˚C~50 ˚C (detector part)
Storage temperature range
Thing to avoid high humidity there is no 10˚C~50˚C be dewy
The maximum response speed
Roll
Head angular
tolerance
13,000min-1
±10min(output ±40%)
Azimuth
±10min(output ±40%)
Roll
±10min(output ±40%)
X
±70μm(output ±40%)
Y
±70μm(output ±40%)
Head position
tolerance
Z
Actual size
BH200-NE
Asynchronous, unidirectional detection
Output signal
Input signal
Power supply
Maximum power consumption
Operating temperature
Storage temperature
Jitter (target)*3
Optical fiber minimum bend radius
±50μm(output ±40%)
CLK signal(LVDS), 1/2 or 1/4 CLK signal(LVDS)*2
Switch over 1/2 or 1/4(TTL)
DC ±5V(±5%)
DC +5V: 400mA, DC -5V: 200mA
+10 to +30 ˚C (head), 0 to +50 ˚C (detector)
-10 to +50 ˚C No condensation Avoid operating under high humidity
0.5 nsec (@5000rpm)
50mm
*1 Zero point signal is asynchronous to CLK, 1/2CLK and 1/4CLK signals. Detection is unidirectional.
*2 1/2 or 1/4 signals to CLK signal frequency. No output with input frequency of 50MHz or less. 1/2 CLK and 1/4 CLK signals cannot be used simultaneously with CLK signal.
*3 Jitter of CLK signal: Pulse duration variation at 1000 pulses(3 p-p). Measured by inspection equipment at Magnescale Corporation.
• High resolution and high response speed
(signal wavelength : 250nm)
•
• 907,200 pulses/Rotation (r=36mm)
• Completely non-contact remote head
• Available with reference point (BH200-RE)
Clock generator from 10 to 200 MHz
and without reference point (BH200-NE)
20
Type example:BH200-RE
E:Open type scale
R: with Reference point;
N: without Reference point
Contact us directly for
*detail
specifications
21
BL57-xxxRE*B(Effective length:006/016/026/036/046)
L1±1
L3
BL57-RE / BL57-NE
L2
SC-scale clamp
SP-spacer
(with reference mark) / (without reference mark)
L3
L2
98
88±0.3*
40±0.2*
25±0.2*
25±0.2*
25±0.2*
L2
25±0.2*
25±0.2*
25
5
ø4
0.4
L2
60
50±0.3*
25±0.2*
1.4
18
27
For BL57-016RE*B or BL57-036RE*B
Scale clamp
Cable length 1000
9
Scale abutting surface
See note 6
36
101
*96±0.1
4-ø2.8
0.01 M
0.01
1
3-ø5
42
60
2-ø5 hole
2.8
10
6
6.3
14
2
9
2
42
60
25
38
ø2.8 +0.1
0 hole
Stopper (ABS)
Effective length
L1
L2
L3
SC
SP
P
BL57-006RE*B
60
96
—
—
2
—
4
BL57-016RE*B
160
196
75
—
3
2
6
BL57-026RE*B
260
296
120
—
4
2
8
BL57-036RE*B
360
396
75
75
5
4
10
BL57-046RE*B
460
496
120
75
6
4
Model
Spacer (t=5)
Reference plate W (t=5)
Reference plate (t=5)
For BL57-006RE*B, BL57-026RE*
B, or BL57-046RE*B
8.3
31
0.02 A
hole
50
25
1.5
5-ø5
25
9
ø4+0.05
Reference
0
14
precision processing machines, and liquid crystal manufacturing equipment.
ø4 +0.05
Reference hole
0
98
88
25
15
4.5
Scale signal
detection position
Ideal for precision stages, semiconductor inspection systems,
(4.5)
6
21
14
5
1
16.4±0.2
44.2±0.2
29
40
*33±0.1
(Mounting hole
for M2.6)
5
27±0.2
53.7
17.8
Supports a wide range of applications and offers the highest performance in its class.
11.4
Reference plate W
2-M4x8
Reference plate W mounting screw
Detection head mounting screw
4.5
2-M4x15
(Mounting hole ø4.5)
30
13.8
22
12
38
P-M4x8
Scale clamp
mounting screw
Reference plate
2-M4X8
Reference plate
mounting screw
16
21
14
4
25±0.2*
1.5
BL
External Dimensions
For BL57-016RE*
B or BL57-036RE*B
12
Unit: mm
BL57-xxxRE*B(Effective length:056/066/076/086/096/106)
L1±1
NAxL4
L4
L2
L2
NAxL4
L4
L4
L3
50±0.3*
25±0.2*
25±0.2*
25±0.2*
50±0.2*
25±0.2*
25±0.2*
50±0.3*
25±0.2*
25±0.2*
ø4
25±0.2*
L2
25
5
0.4
12
38
101
*96±0.1
For BL57-066RE*B, BL57-096RE*
B, or BL57-106RE*B
Scale clamp
4-ø2.8
(Mounting
hole for M2.6)
0.1 M
0.02/200
note : 5
BL57-NE
• Compact size makes machine integration much easier
• Theoretically unaffected by changes in temperature,
humidity, air pressure and air movement. Unparalled
measuring stability achieved by use of low expansion glass
• With a head signal pitch of 400nm, interpolation error is virtually non-existent.
1.5
6.3
8
60
(4.5)
0.02 A
2-ø5 hole
ø2.8
+0.1
0
hole
10
2.8
6
9
14
2
Type example:BL57-160REFB
4-ø5 hole
44.2±0.2
14
*
50
25
8.3
31
4.5
offers the highest-level response speed and accuracy in its class.
Applications: Precision measuring equipment, precision stages.
17.8
53.7
Scale signal
detection
position
5
1 6 1
• With a head signal pitch of 400nm, interpolation error is virtually non-existent.
• Built-in Reference point.
16.4±0.2
5
Reference plate D
Scale abutting surface
See note 6
Cable length 1000
21
9
29
1.5
13.8
2-Reference plate D
4-M4x8
18
Reference
27
plate D
mounting 4.5 27±0.2
screw
36
40
*33±0.1
Reference plate D Scale abutting surface
See note 6
Detection head mounting screw 2-M4x15
(Mounting hole ø4.5)
30
• Achieves a measuring length of up to 1,360mm upon request, and
L2
25±0.2*
16
21
14
22
11.4
SC-scale clamp
SP-spacer
P-M4x8
Scale clamp mounting screw
BL57-RE
1.4
4
Actual size
L4
L3
Model
Effective length
L1
L2
L3
L4
NA
SC
SP
P
25
38
BL57-056RE*B
560
596
100
175
75
2
8
6
16
Spacer (t=5)
BL57-066RE*B
660
696
75
225
75
3
9
7
18
C: Low-expansion glass
BL57-076RE*B
760
796
100
250
75
3
10
8
20
A: 4-split A/B phase output
BL57-086RE*B
860
896
100
250
75
4
12
10
24
A: 4-split 8-split A/B phase output
BL57-096RE*B
960
996
75
300
75
5
13
11
26
BL57-106RE*B
1060
1096
75
300
75
6
15
13
B: Blue plate glass;
G: 20-split 40-split A/B phase output
H: Analog 1Vp-p output
Reference plate D (t=5)
Stopper (ABS)
R: with Reference point; N: without Reference point
Effective length
30
Unit: mm
E: Open type scale
Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface roughness of the scale mounting surface is Rmax = 6.3 S (250 μinch).
Note 3: The surface roughness of the detector head mounting surface is Rmax = 12.5 S (500μinch). Note 4: "M" refers to the machine guide.
Note 5: When mounting the reference plate (reference plate W), adjust the plate so that the parallelism between the corresponding scale abutting surface and the machine guide is 0.01mm or less.
Applications: High-accuracy microscopes, stages, measurement equipment.
22
23
External Dimensions
External Dimensions
BL57-xxxRE*C(Effective length:003/006/011/016/021/026/031/036/041)
BL57-xxxNE*B(Effective length:006/016/026/036/046)
L±1
L2
25±0.2*
25±0.2*
0.4
14
16.4±0.2
*
21
0.01 M
0.01
(4.5)
1 6 1
Scale signal
detection position
0.02 A
—
—
2
—
4
50
—
3
2
6
—
BL57-006RE*C
60
96
Reference plate W (t=2.2)
Reference plate W (t=2.2)
For BL57-006RE*C, BL57-026RE*C, or
BL57-031RE*C
For BL57-003RE*C, BL57-011RE*C,
BL57-016RE*C, BL57-021RE*C,
BL57-036RE*C, or BL57-041RE*C
Stopper (ABS)
BL57-011RE*C
110
146
Spacer (t=2.2)
BL57-016RE*C
160
196
75
—
3
2
6
BL57-021RE*C
210
246
100
—
3
2
6
BL57-026RE*C
260
296
120
—
4
2
8
BL57-031RE*C
310
346
120
—
4
2
8
BL57-036RE*C
360
396
75
75
5
4
10
BL57-041RE*C
410
446
100
100
5
4
10
Reference plate W (t=5)
42
60
2-ø5 hole
2.8
Effective length
L1
L2
L3
SC
SP
P
25
38
BL57-006NE*B
60
96
—
—
2
—
4
Spacer (t=5)
BL57-016NE*B
160
196
75
—
3
2
6
BL57-026NE*B
260
296
120
—
4
2
8
BL57-036NE*B
360
396
75
75
5
4
10
BL57-046NE*B
460
496
120
75
6
4
hole
ø2.8 +0.05
0
Stopper (ABS)
Reference plate W (t=5)
For BL57-006NE*B, BL57-026NE*B,
or BL57-046NE*B
40.5±0.2
3-ø5
50
25
6
42
60
31
0.01 A
Reference hole
ø4 +0.05
0
5-ø5
25
10
2
66
1.5
—
30
Reference hole
98
88
25
15
6.3
1
BL57-003RE*C
ø4 +0.05
0
14
hole
—
L3
9
25
38
P
L2
2
ø2.8
+0.1
0
SP
L1
2
10
1.5
6.3
42
60
SC
Effective length
Model
2-ø5
2.8
14
6
9
3-ø5
6.5
11.5
2
42
60
hole
50
25
5-ø5
25
6.5
11.5
98
88
15
3.2
5
8.3
31
4.5
4-ø2.8
(Mounting
hole for M2.6)
48.7
18.25 14
42.7±0.2
52.2
18.8
1.5
Cable length 300
101
*96±0.1
30
For BL57-016NE*B or BL57-036NE*B
Scale clamp
Reference
plate Scale
abutting surface
See note 5
13
18
2-M2 x 12
Mounting hole
18.4±0.2
11.5
40
*33±0.1
0.01 M
0.01
Detection head
mounting screw
2-M4 x 8
Reference
plate W mounting
screw
12
38
*
ø4 +0.05
Reference
0
2-M4x8
Reference plate
mounting screw
1.4
13.8
22
Reference plate W
40
*33±0.1
*
Scale signal
detection
position
ø4 +0.05
Reference hole
0
Reference plate
50±0.3*
25±0.2*
25
5
ø4
4
4
4-ø2.8
(Mounting
hole for M2.6)
*
1.5
P-M4 x 8
Scale clamp
mounting screw
20.5
101
*96±0.1
25±0.2*
L2
60
18.5
For BL57-003RE*C, BL57-011RE*C, BL57-016RE*C,
BL57-021RE*C, BL57-036RE*C, or BL57-041RE*C
Cable length 1000
1.7
4.6
25
25±0.2*
L2
L3
4.6
*27±0.2
2.3
1.7
2-M4X8
Reference plate
mounting screw
Scale abutting
surface
See note 6
9
36
30
1.4
L2
98
88±0.3*
40±0.2*
25±0.2*
25±0.2*
SC-scale clamp
SP-spacer
Reference plate
1.5
18
27
60
50±0.3*
25±0.2*
18.5
5
4.5
(Mounting
hole ø”4.5)
29
P-M4x8
Scale clamp
mounting screw
0.3
12
38
Scale clamp
11.4
Reference plate W
2-M4x8
Reference plate
W mounting
screw Detection
head mounting
screw
25
5
ø4
L2
L3
16
21
25±0.2*
L2
11.4
25±0.2*
23
25±0.2*
L1±1
L3
11.3
L2
98
88±0.3*
40±0.2*
25±0.2*
25±0.2*
11.5
SC-scale clamp
SP-spacer
25±0.2*
L2
13.5
L3
Model
For BL57-016NE*B or
BL57-036NE*B
12
Unit: mm
Unit: mm
Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface roughness of the scale mounting surface is Rmax = 6.3 S (250 μinch).
Note 3: The surface roughness of the detector head mounting surface is Rmax = 12.5 S (500μinch). Note 4: "M" refers to the machine guide.
Note 5: When mounting the reference plate (reference plate W), adjust the plate so that the parallelism between the corresponding scale abutting surface and the machine guide is 0.01mm or less.
BL57-xxxNE*B(Effective length:056/066/076/086/096/106)
L1±1
L2
L2
NAxL4
L4
L4
L3
25±0.2*
L4
L3
50
25±0.2*
25±0.2*
25±0.2*
25±0.2*
25
5
ø4
50±0.3*
25±0.2*
0.4
Signal pitch
0.4μm
Accuracy (at 20˚C)
Thermal expansion coefficient
Maximum response speed
Differential (compliant with EIA-422)
0.1/0.05μm
(switchable)
0.02/0.01μm
(switchable)
Cable length
Output cable length
Differential (only zero point
output models are
compliant with EIA-422)
Minimum phase
difference:38ns
Minimum phase
difference:38ns
Power supply (Note 3)
1 6 1
Scale signal
detection position
+5V (±5%)
450mA (no load) 600mA (with 120 ohm termination)
Vibration resistance
100m/s2 (50 to 2000Hz)
Operating temperature range
Storage temperature range
Light source
Radiation power
0 to +40˚C(No condensation)
Max 7.5MHz
3
4-ø5 hole
-10 to + 50˚C
8
60
Semiconductor laser with power of 4mW and wavelength of 790nm
Reference plate W (t=5)
6
13.8
21
5
2-ø5 hole
2.8
ø2.8 +0.05
hole
0
Stopper (ABS)
25
38
Spacer (t=5)
L1
L2
L3
L4
NA
SC
SP
P
BL57-056NE*B
560
596
100
175
75
2
8
6
16
BL57-066NE*B
660
696
75
225
75
3
9
7
18
BL57-076NE*B
760
796
100
250
75
3
10
8
20
BL57-086NE*B
860
896
100
250
75
4
12
10
24
BL57-096NE*B
960
996
75
300
75
5
13
11
26
BL57-106NE*B
1060
1096
75
300
75
6
15
13
Model
Effective length
JIS Class 1 equivalent, DHHS Class 1 equnivalent
3000mm/s
Cable length (m)
8.3
31
0.01 A
50
25
200m/s2
Maximum response speed (mm/s)
30
3000
9
2330
15
1660
Note 1: There is a correlation between the maximum response speed and output cable length (the part beyond the interface box).
Note 2: A power supply line longer than 10m is incompatible with EN61000-6-2. Take surge protection measures upon use.
Note 3: Satisfy the required specifications at the connector input section.
Note 4: Special models can support up to 3m. However, the maximum response speed is limited depending on the cable length.(In a 3m cable, the maximum response speed is two-thirds that of a 1m cable.)
Note 5: Special models can support a measuring length of 1,070mm to 1,360mm.
24
11.4
5
15m Max (Note 2)(to the electronic control section) 15m Max(Note1) (Note 2)
Power consumption
Impact resistance
Low expansion glass:-0.7x10-6/ ˚C • Blue plate glass:8x10-6/˚C
300mm/s(0.02μm)
120mm/s(0.01μm)
1m (Note 4)
When stationary : 10mm
0.4μm (1Vp-p)
±0.5μm(30 to 170mm) / ±1.0μm(220 to 370mm) /
±1.5μm(420mm or more)
1,500mm/s(0.1μm)
650mm/s(0.05μm)
Unidirectional synchronous reference point
(specify the position and detection direction)
Head cable
Bending radius
16.4±0.2
0.1 M
0.01
NOTE 5
40.5±0.2
1.6μm
Cable length
300
(3.2)
Measuring length + 36mm
±0.4μm (depending on machine movement accuracy)
4-ø2.8
Mounting
hole
48.7
18.25 14
Reference point output signal
Measuring length +10mm (5mm on each side)
User definable (within the range of effective length)
Reference plate D
Scale abutting surface
See note 6
4.6
60. 160. 260. 360. 460. 560. 660. 760. 860. 960. 1060
Entire scale length
Resolution
Reference point accuracy (at 20˚C)
P-M4x8
Reference plate
D mounting screw
Scale clamp
mounting screw
101
*96±0.1
30
None
For BL57-066NE*B, BL57-096NE*B,
or BL57-106NE*B
Scale clamp
10
Measuring length + 36mm
Reference point position
38
Detection head
mounting screw
2-M2x12
Mounting hole
13
18
1.5
Measuring length + 10mm (5mm on each side)
Grating pitch
Output signal
Alarm
30. 60. 110. 160. 210. 260. 310. 360. 410
12
2-Reference
plate D
4-M4x8
SC-scale clamp
SP-spacer
6.3
Maximum movable length
Diffraction grating scanning system
High impedance, alarm by output signal
when maximum response speed is
exceeded or signal level error detected
H
40
*33±0.1
Measuring length(mm)
Analogue output
G
9
14
Scale length
(Low expansion Maximum movable length
glass)
Entire scale length
A/B quadrature output
F
Model
20.5
Measuring length(mm)
H
2
Detection system
G
1.5
F
Output signal form
Scale length
(Blue plate
glass)
22
Main specifications [BL57-RE]
Model
L2
L2
25±0.2*
1.4
16
21
14
25±0.2*
50±0.3*
25±0.2*
4
NAxL4
L4
Unit: mm
Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface roughness of the scale mounting surface is Rmax = 6.3 S (250μ inch).
Note 3: The surface roughness of the detector head mounting surface is Rmax = 12.5 S (500μ inch). Note 4: "M" refers to the machine guide.
Note 5: When mounting the reference plate (reference plate W), adjust the plate so that the parallelism between the corresponding scale abutting surface and the machine guide is 0.01mm or less.
25
External Dimensions
BL57-RE supporting vacuum environment (Special models)
BL57-xxxNE*C(Effective length:003/007/012/017/022/027/032/037/042)
Scale clamp
L1±1
L3
Output cable *3
*
1.5
2.8
31
ø2.8
Effective length
L1
L2
L3
SC
SP
P
BL57-003NE*C
30
56
—
—
1
—
2
10
+0.05
hole
0
25
38
Spacer (t=2.2)
BL57-007NE*C
70
96
—
—
2
—
4
BL57-012NE*C
120
BL57-017NE*C
170
146
50
—
3
2
6
196
75
—
3
2
BL57-022NE*C
6
220
246
100
—
3
2
6
BL57-027NE*C
270
296
120
—
4
2
8
BL57-032NE*C
320
346
120
—
4
2
8
BL57-037NE*C
370
396
75
75
5
4
10
BL57-042NE*C
420
446
100
100
5
4
• Ultimate vacuum of 10 Pa class.
• Emitted gas flow rate of 10 Pa m
• Signal pitch 0.4μm
• Built-in reference point.
-5
-6
10-6
10-7
A/B quadrature output
Scale length
(Low expansion Maximum movable length
glass)
Entire scale length
Measuring length(mm)
Measuring length + 26mm
60. 160. 260. 360. 460. 560. 660. 760. 860. 960. 1060
1.6μm
Signal pitch
0.4μm
Temperature expansion coefficient
Differential (compliant with EIA-422)
0.1μm
0.1/0.05μm
0.02/0.01μm
(can be changed) (can be changed)
Differential
High-impedance output when
maximum response
speed exceeded
or signal level error detected.
300mm/s(0.02μm)
120mm/s(0.01μm)
Minimum phase Minimum phase Minimum phase
difference:80ns difference:38ns difference:38ns
10-9
10-10
10-11
When stationary: 10mm
15mMax (Note 2) (to the electronic control section)
Power source (Note 3)
+5V (+10%-5%)
Power consumption
200 mA (no load)
250 mA (9120
ohm termination)
Impact resistance
Low expansion glass: -0.7 x 10-6/˚C • Blue plate glass:8 x 10-6/ ˚C
1,500mm/s (0.1μm)
650mm/s(0.05μm)
None
300min
Bending radius
Vibration resistance
H
10-8
15mMax
(Note 1) (Note 2)
10-12
10
20
30
40
50
60
70
80
90
100
Quantity ( M/e )
+5V (±5%)
290mA (no load)
350mA (120 ohm termination)
250 mA
(no load,120
ohm termination)
100m/s2(50 to 2000Hz)
0.4μm (1Vp-p)
±0.5μm (30 to 170mm)/ ±1.0μm (220 to 370mm)/
±1.5μm (420mm or more)
1000mm/s
Maximum response speed
Cable length
Output cable length
Measuring length + 36mm
Grating pitch
Accuracy (at 20˚C)
Head
cable
G
Measuring length +10mm (5mm on each side)
Entire scale length
Resolution
Alarm
High-impedance
A/B quadrature
output signals when
signal level error
detected.
Measuring length +10mm (5mm on each side)
Maximum movable length
Output signal
A
Analogue output
30. 70. 120. 170. 220. 270. 320. 370. 420
Measuring length(mm)
F
Model
Diffraction grating scanning system
Detection system
Scale length
(Blue plate
glass)
H
Ion strength (A)
Output signal form
G
class.
10
Main specifications[BL57-NE]
F
3
*1: For dimensions of head, scale, and I/F box, see the page on BL57-RE. *2: Cable length in vacuum and in atmosphere (L1 + L2) is up to 3m.
*3: These components are not included in the product.
Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface roughness of the scale mounting surface is Rmax = 6.3 S (250μ inch).
Note 3: The surface roughness of the detector head mounting surface is Rmax = 12.5 S (500μ inch). Note 4: "M" refers to the machine guide.
Note 5: When mounting the reference plate (reference plate W), adjust the plate so that the parallelism between the corresponding scale abutting surface and the machine guide is 0.01mm or less.
A
•
Applications: Semiconductor inspection systems, length measuring SEM.
Unit: mm
Model
Sealed-side D-Sub male connector
0.01 A
Model
2-ø5
Reference plate W (t=2.2)
Stopper (ABS)
For BL57-003NE*C, BL57-012NE*C, BL57-017NE*C,
BL57-022NE*C, BL57-037NE*C, or BL57-042NE*C
Reference plate W (t=2.2)
For BL57-007NE*C, BL57-027NE*C,
or BL57-032NE*C
15-pin, female
3.2
40.7
12.8
42
60
Atmosphere-side D-Sub connector 15-pin, female
Vacuum-compatible, open type with reference point. Allowing ultra-precise positioning in a vacuum environment.
6
1.5
42
60
Vacuum-side D-Sub connector
3-ø5
50
25
ø4 +0.05
0
6.3
5-ø5 Reference hole
25
6.5
11.5
98
88
15
*
2
25
18.4±0.2
4.6
Scale signal
detection position
6.5
11.5
ø4 +0.05
0
Cable length in atmosphere: L2
0.01 M
0.01
20.5
1.5
Reference hole
I/F box
For BL57-003NE*C, BL57-012NE*C, BL57-017NE*C,
BL57-022NE*C, BL57-037NE*C, or BL57-042NE*C
Cable length 1000
2.3
1.7
4.6
1.7
Cable length in vacuum: L1
11.5
40
*33±0.1
101
*96±0.1
Output connector (with protection cap)
Head cable
Detection head
32.5±0.2
Reference plate W
2-M4x8
Reference plate W mounting
screw
30
Reference
plate D Scale
abutting surface
See note 5
4-ø2.8
(Mounting
hole for
M2.6)
13
18
2-M4x8
Reference plate
mounting screw
18.5
2-M2x12
Mounting hole
1.4
0.3
12
38
Scale clamp
8
P-M4x8
Scale clamp mounting screw
25
5
ø4
Reference plate
11.3
25±0.2*
Scale
60
50±0.3*
25±0.2*
4
25±0.2*
L2
18.5
25±0.2*
L2
16.5
25±0.2*
L2
98
88±0.3*
40±0.2*
25±0.2*
25±0.2*
13.5
L2
11.5
L3
SC-scale clamp
SP-spacer
Operating temperature range
Storage temperature range
Light source
200m/s2
0 to +40˚C(no condensation)
-10 to + 50˚C
Semiconductor laser with power of 4mW and wavelength of 790nm
Radiation power
JIS Class 1 equivalent, DHHS Class 1 equivalent
Cable length (m)
Maximum response speed (mm/s)
3000mm/s (Note 1)
Max 7.5MHz
3
3000
9
2330
15
1660
Note 1: There is a correlation between the maximum response speed and output cable length (the part beyond the interface box).
Note 2: A power supply line longer than 10m is incompatible with EN61000-6-2.Take surge protection measures upon use.
Note 3: Satisfy the required specifications at the connector input section.
26
27
4.5
BL55-RU
2-ø8.5 (2-Mounting hole for M8)
F1
0.1 M
0.1
9.5
ø4.2 (2-Mounting hole for M4)
F2
0.05 M
0.05
0.1 M
0.05
20
41.7
(Note 2)
18.8
1
0.75
70.5
32.3
(with reference mark)
9
9
61.5
23.9
BL55-RU
(Note 1)
Measuring length (L) + 137
Measuring length (L) + 118
9.5
9.8
BL
External Dimensions
4
4
12
28.5
1
23
(35)
56
For air supply (L)
88
For air supply
(9.5)
30
Sealed type linear encoder with non-contact design offers minimal reversal error.
20
18
2-4.6 x 8.6
(Slotted hole
Mounting hole
for M4)
0.05 M
0.03
1±0.1
0.03 M
0.02
(12)
110
70
2-ø4.2
(Mounting hole for M4)
42
32
ø18
5
The enclosed design protection against contaminates (IP53)
Cable length 1000
Measuring length (L)mm
70
120
170
220
270
320
370
420
470
520
570
620
720
770
820
870
920
1020
F1 mm
—
—
—
—
—
—
—
—
—
329
354
379
429
454
479
504
529
386
F2 mm
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
—
385
Unit: mm
Note 1: Parallelism is 0.05mm or less when Measuring length is 120mm or less. Note 2: Parallelism is 0.1mm or less when Measuring length is 170mm or less. Note 3: M indicates the machine guide (machine movement).
Main specifications
F
Model
Output signal form
Scale length Measuring length (mm)
(Blue plate
Maximum movable length
glass)
Overall scale length
70 • 120 • 170 • 220 • 270 • 320 • 370 • 420 • 470 •520 • 570 • 620 • 720 • 770 • 820 • 870 • 920 • 1020
Measuring length + 2mm
Measuring length + 137mm
Accuracy (20˚C)
±2.5 (70 to 320mm ) ±4.5μm (370mm or more)
Linearity (Note 2)
±2.5μm (370mm or more)
Grating pitch
1.6μm
Signal pitch
400nm
Output signal
Differential (compliant with EIA-422)
Resolution
0.1/0.05μm(switchable using a switch) (Note 1)
0.1μm or less
±0.4μm (depending on machine movement accuracy)
Reference point accuracy (at 20˚C)
User definable
Reference point position
Direction of reference point detection
For one
Temperature expansion coefficient
8x10-6/˚C
Two semiconductor lasers with power of 6mW and wavelength of 790nm
Light source
JIS Class 1 equivalent, DHHS Class 1 equivalent
Radiation power
0 to +40˚C (no condensation)
Operating temperature range
-10 to + 50˚C
Storage temperature range
F: 1,500mm/s (0.1μm) 650mm/s (0.05μm) Minimum phase difference : 38ns
G: 300mm/s (0.02μm) 120mm/s (0.01μm) Minimum phase difference : 38ns
Maximum response speed
High impedance, alarm by output signal when maximum
response speed is exceeded or signal level error detected
Alarm
Head cable
•
15m Max (Note 3)
+5V (±5%)
Power supply
450mA (no load) 600mA (maximum when cable is connected)
Protective design
IP53 or equivalent (when air is supplied : IP64 or equivalent)
100m/s2 (50 to 2000Hz)
Vibration resistance
200m/s2
Pointing
accuracy
Impact resistance
Note 1: Special modes can support AB quadrature output with 0.01μm resolution.
Note 2: The linearity is the range of scattering when scale accuracy slope is set to zero .
Note 3: Please inquire for details regarding the correlation between the maximum response speed and the output cable length .
Note 4: Special models can support up to 3m .
Length
Given the head signal pitch of 400nm, the interpolation error is
practically non-existent.
15m Max
Power source
Error
and achieves a repeat accuracy of 0.1μm or less.
None
When stationary : 30mm When in motion : 100mm
Output cable length
Linearity
3000mm/s (Note 3) Max 7.5MHz
1000m (Note 4)
Cable length
Bending radius
• Highest response speed and accuracy in its class.
• Non-contact design of the detector head eliminates inherent mechanical error,
0.4μm(1Vp-p)
0.1μm or less
Return error
environmentally protective design.
Differential (only reference point output models are compliant with EIA-422)
0.02/0.01μm(switchable using a switch)
Repeatability
• All the advanced features of Magnescale’s Laserscale technology have been incorporated into the
Analogue output
Diffraction grating scanning system
Detection system
Actual size
H
G
A/B quadrature output
Alarm
• Built-in reference point.
Applications: Precision measuring equipment precision stages.
28
29
●BD96-B1
●BD96-B2
6-M3 Tap (for mounting)
(both sides)
25 11.5
24
48
●BD96-Y2/M2
28
24
10
10
180
236
(15.2)
(28)
180
180
200
(10)
25 11.5
48
10
24
48
180
180
200
10
28
(15.2)
180
236
Base (opposite side)
4-M3 Tap (for mounting)
(10)
25 11.5
(10)
Base (opposite side)
4-M3 Tap (for mounting)
(10)
6-M3 Tap (for mounting)
(both sides)
6-M3 Tap (for mounting)
(both sides)
180
(10)
28
10
180
200
10
180
236
(15.2)
(28)
●BD96-Y1/M1
(28)
11.5
24
48
Supporting various serial and binary outputs.
28
10
180
180
200
10
180
236
(15.2)
(28)
Maximum resolution of 17pm when combined with the BS series.
25
Base (opposite side)
4-M3 Tap (for mounting)
(10)
Base (opposite side)
4-M3 Tap (for mounting)
6-M3 Tap (for mounting)
(both sides)
BD96
Interpolator for Laserscale TM
BD
External Dimensions
Unit: mm
*2 External dimensions of the 1- and 2-axis are identical.
Main specifications
Model
BD 96
MAX. resolution
0.4nm (When connected with BL series),0.03125nm (When connected with BH series),0.017nm (When connected with BS series)
Response speed
400mm/s (When connected with BS series),700mm/s (When connected with BH series),1,100mm/s (When connected with BL series)
MAX. division
025 : 256, 051 : 512, 040 : 400, 050 : 500, 100 : 1000, 200 : 2000, 400 : 4000, 800 : 8000
Alarm
When exceeding the maximum response speed or when the laser signal level is too low (disconnection ); LED lights up
Input signal compensation
DC offset, amplitude, phase
Power supply
• Maximum resolution :
0.4nm (When connected with BL series)
31pm (When connected with BH series)
(standard : 4 divisions) (binary output axis 1 or 2 type)
17pm (When connected with BS series)
BS series : 34.5nm, BH series : 62.5nm, BL series : 100nm
• High response speed :
1,100mm/s (When connected with BL series)
700mm/s (When connected with BH series)
400mm/s (When connected with BS series)
• Various serial or binary outputs
30
• Includes automatic signal compensation
• AB quadrature output
DC +5V±5% DC +12V±5% DC -12V±5%
Current Consumption
( When scale is connected )
DC +5V : 0.4A DC +12V : 0.7A DC -12V : 0.5A ( 2 axes type )
Operating temperature range
Storage temperature range
Dimensions
0 to +40˚C
-10 to +50˚C
236 (W) x 215.2 (D) x 48 (H)mm
Weight
Approx. 1.6kg
• Maximum no. of divisions : 8000 (When connected with BS and BH series)
* Please inquire about various specifications, such as the number of divisions.
Shape C: Case type
Scale type S: BS series H: BH series L: BL series
Division 025: 256 divisions 051: 512 divisions 040: 400 divisions 050: 500 divisions 100: 1000 divisions 200: 2000 divisions 400: 4000 divisions 800: 8000 divisions
Axis type 1: 1 axis 2: 2 axes J: Supports long scales of the BLseries (Max. 512 divisions)
Output mode B: Binary (Axis type 1 or J : 40 bits, 2 : 20bits) Y: Yaskawa Electric serial M: Mitsubishi Electric serial F: FANUC*2 serial
*2 Special model
31
BD95-T10,T13,T14,T15,T16,T17commonness
BD95
Interpolator for Laserscale TM
172
144
BD
External Dimensions
2-R2.2
200
190
16
32
Interpolator with A/B quadrature output that achieves resolution to 4.3nm.
Unit: mm
Main specifications
Model
BD95-T13
BD95-T14
BD95-T15
BD95-T16
BD95-T10
BD95-T17
Resolution
(selectable)
34.5 nm (4divisions) or 17.2nm (8 divisions) 100 nm or
50 nm during pitchcompensation
17.2 nm (8divisions) or 8.6 nm(16 divisions) 100 nm, 50
50nm, or 10 nm during pitch compensation
8.6 nm (16divisions) or 4.3 nm(32 divisions) 100 nm,
50nm, or 5 nm during pitch compensation
Max. response speed
400 mm/s (with 4 divisions) 275 mm/s (with 8 divisions)
275 mm/s (with 8 divisions) 120 mm/s (with 16 divisions)
120 mm/s (with 16 divisions) 60 mm/s (with 32 divisions)
Output signal
Alarm
AB quadrature 1 with / without pitch compensation (compliant with EIA-422) AB quadrature 2 without pitch
compensation (compliant with EIA-422) Alarm (compliant with EIA-422) (Switching between automatic reset and
holding is possible) LASERSCALE signal (SIN/COS) 32-bit binary data (-T14, -T16 only)
Max. response speed exceeded Low laser signal level(cable broken or disconnected) LEDs (Turn on independently for speed alarm and level alarm)
Output signal: Output when either a speed or level alarm occurs. Switching between automatic reset and holding is possible
Pitch compensation function
AB quadrature 1 only A round-off error of 1 resolution occurs.
Input signal compensation
(On/Off switching is possible)
DC offset, Amplitude level, Phase. Frequencies allowing compensation update: Input signals of 180 kHz or less
Power supply
Consumption current
(when scale is connected)
Operating temperature
Storage temperature
Dimensions
Weight
DC + 24V ± 1V
400mA (maximum)
0˚C to 50˚C / 32˚ F to 122˚F
-10˚C to 60˚C / 14˚ F to 140˚F
172 (W)x144(D)x32(H) mm/6.77”(W)x5.66”(D)x1.25”(H)
Approx. 0.8 kg/Approx.1.76Ibs
• High resolution: 4.3 to 34.5nm (depends on the number of splits)
• High response speed: 400mm/s
• DC offset, gain, phase automatic conditioning
• 32 bit binary output by data request input (T14, T16, T17)
32
33
Technology
Connection Cable
Before use
Scales
Extension Cable*2
Model
Interpolator
Head cable length*1
Robot cable:CK-T61 (1.0m)
CK-T24 (3.0m)
CK-T54 (6.0m)
BS78
BS65-R
Please see the diagram blow about an instrallation method of Laserscale.
BD95
Upside
3m (Standard)
or
Robot cable:CK-T133 (0.1m)
CK-T137 (3.0m)
CK-T112 (5.0m)
Downside
BH20-NE
1m (Standard)
BH25-RED
BH20-RED
BL57-RED
1m (Standard)
Robot cable:CK-T148 (3.0m)
BD96
Robot cable:CE20-03T10 (3.0m)
CE20-06T01 (6.0m)
CK-T144 (9.0m)
Check that the scale is installed in the positional relationship
shown in Fig. 3-1.
Except when installed on a vertical axis, only the orientation in Fig.
3-1 should be used.
If installing on a machine tool or other equipment where powder and dust occur, install using the A orientation
since this allows usage of cutting fluid and prevents the intrusion of cutting dust.
Install using the B orientation only in other situations when virtually no foreign objects can enter the scale.
Interpolator
Head cable length*1
3
BL57-NE
(A/B phase)
0.3m (Standard)
BL57-RE
(A/B phase)
1m (Standard)
BL57-NE
(Analog)
0.3m (Standard)
OK
Foot plate
5
1m (Standard)
Conditional
Scales
BL55-RU
B
Downside
Extension Cable
A
[Note]
*1 Please ask for other length. *2 can lengthen to max. 9m. Please ask for more than 9m.
Model
Upside
Model name and Serial No.
Robot cable:CE20-03 (3.0m)
CE20-05 (5.0m)
CE20-07 (7.0m)
BL55RU
Robot cable:CE20-03T07 (3.0m)
CE20-05T05 (5.0m)
xxxxxxx
Built-in I/F
Box
4
Air inlet
2
Scale unit
1
Slider
6
Connector
Robot cable:CE20-07T03 (7.0m)
BL57-RE
(Analog)
1m (Standard)
1
Slider
The slider has a built-in detector head. The slider is secured in place by the slider holders at shipping.
*1 Please ask for other length.
The robot cable minimum bend radius: R80mm is fixed repeatedly R10mm.
2
Scale unit
The scale unit incorporates a high-accuracy LASERSCALE. It is protected by an aluminum cover.
3
Foot plate
This is used to secure the scale in place.
The number of attached foot plates varies depending on the scale measuring length.
Measuring length of 470 mm or less ........................ none
Measuring length of 520 mm to 920 mm ................... 1
Measuring length of 1020 mm .................................. 2
4
Air inlet
This is used when air is injected. To inject air, remove the hex.socket-head set screws covering the inlets, and then attach the hex. sockethead half-union.
*Please refer to page 39 for an electric supply.
34
35
As shown in Fig. 3-3, when the head cable is drawn out to the right side,
the point where the distance from the slider left end and scale unit left end is 28.5 mm is considered
the left end movable limit.
Total length = Measuring length (L) + 137 (5.394")
Although the slider or scale unit can move
Scale unit
an amount equal to the measuring length
from this left end movable limit,
there is almost no margin at both ends.
Head cable
drawing out
Be particularly careful that
the machine movable length falls
Machine movable length
23 (0.906")
Slider
within the scale measuring length.
28.5
* The detector head will be damaged if the slider or scale unit is
moved past the measuring length.A mechanical limiting mechanism
(such as a stopper) is needed for machines that exceed
the measuringlength (movable range) of the scale.
Be sure to install this type of device before installing the scale.
(1.122")
Measuring length (L)
88 (3.465")
35(1.378")
Unit: mm (inch)
Left end movable limit
Chips, cutting oil, and other substances generated by cutting
can frequently be scattered in the area around
the scale unit, especially when it is installed on a machine tool.
Even when not using a machine tool,
air should be injected to the scale when installed on machines
generating dust or when dust is prevalent in the
operating environment.
There are a total of three air inlets, one each on both sides
of the scale unit and on the slider.
Supply air to all of the air inlets.
Union (ø4)
4mm
Outside of suitable tube
! "
#$% &
The hologram grating pitch of the scale is approximately 0.55 μm/22 μ inch, while the detector signal
pitch is theoretically 1/4 of this, that is 138nm/5.5 μ inch. This value differs slightly from scale to scale.
Therefore, it is necessary to additionally make the pitch compensation for each scale, in order to detect
precise displacements.
The lowest four digits of the detector signal pitch for each scale PS = 0.1379
μm at 20 ˚C/
68 ˚F show the compensation value.
Before operation, be sure to always set the compensation value of the scale for the Intarporator when
using a Intarporator that allows input of compensation values.
Linear compensation must be performed using the customer's machine if the compensation value
cannot be set.
'( ( )( ( *+ ,"-&$ ,.
To operate the unit in an environment where the temperature is not 20 ˚C/68 ˚F, adjust the compensation
value as shown below to make a temperature adjustment. The following example shows the adjustment
method for an operating temperature of 23 ˚C/73 ˚F.
/0 : The compensation value shown on the compensation value label is
0.1379
1 2 3 4
-6
x {1 + (23-20) x (-0.7 x 10 )} = 0.1379
1 2 3 4
.
1 2 0 5
Whenever air is supplied to the scale from an air
pressure source, the air should always pass
IN
through a filter (5 μm), mist separator (0.3 μm),
and regulator to remove any dust, mist, and other
foreign substances.
Sufficient care should be taken since foreign substances
entering inside the scale can cause a breakdown of the scale.
Air should be supplied to the scale at a pressure
of 19.6 kPa per scale. Note that the pressure of the supply
section may be reduced due to the pipe length or layout even
if the setting at the regulator is 19.6 kPa.
OUT
Regulator
Filter
5 μm
Mist separator
0.3 μm
The optical built-in reference point (reference mark) of the laserscale can be detected by single direction.
Forward detection is set as standard, but it can detect signal from reverse
direction depending on the equipment in use. The direction should be specified before order.
Please contact us for further information.
* Do not detect the reference point from the wrong direction inorder
to keep the reliability of the reference point and to
avoid deterioration.
Scale
<Forward position>
Temperature difference from 20 ˚C/68 ˚F
Coefficient of thermal expansion of the scale
The compensation value after temperature adjustment will be
1 2 0 5
. Set the detector to this value.
Detector head
Scale
<Backward position>
Detector head
36
37
Reference point output specifications
Scale Signal Output
The output specifications are compliant with EIA-422.
AB Signal and Alarm Output Specifications (For output formats F and G) BL55, BL57
Reference point signal and SIN
and COS signal phases
(Over the entire length and the entire operating temperature range)
Specifications
Item
Specifications
Item
• The output specifications are compliant with EIA-422.
• AB signal minimum phase difference t : 38 ns
A signal
Typ.
Max.
0.32 μm
0.4 μm
0.48 μm
Units
Symbol
Min.
Typ.
Reference point signal width (Lz)
Max.
"H" level output
VOZH
2.5
3.4
5
V
"L" level output
VOZL
0
0.3
0.5
V
[Note]
+REF
• An error of about 38 ns is generated due to the synchronization of the AB signal by the
26.3 MHz internal clock.
• The minimum phase error can vary depending on the length of the output cable,
cable capacity, receiver load, and other factors.
Min.
Position of reference point signal edge
a with respect to SIN signal
0˚
VOZH
B signal
t
-REF
Connection Specifications
VOZH
OV
AB Signal Output Type
The line driver used by Magnescale Corporation is compliant with EIA-422.
Also, based on the EIA-422 standards, the common mode voltage between the line driver and line receiver
is stipulated as ± 12 V.
(Using the scale when the common mode voltage of ± 12 V is exceeded can damage the scale.)
To prevent problems between the control devices connected to this Magnescale product, it is recommended that
you connect (shared connection) the signal ground (power supply ground) and set the load resistance to 120 Ω.
Twisted pair cables (1 turn/1 inch min.) with a core thickness of at least AWG28 are recommended for the
differential signal cables.
(It is even better if the characteristic differential impedance is the same as the load resistance value.)
<Commonness>
<BL55, 57>
Receive side
Send side
Reference point waveform diagram
a
COS
Analog Output Type
Example of input circuit
SIN
Scale side
Reference example of receive side
R2
Center
voltage
A
RI
+SIN
-SIN
RI
Controller
B
Reference point signal width (Lz)
Line receiver side (example)
DS34C86
MC26C32
MC34C86
Line driver side
DS34C87
+5V (power supply)
RI
0 V (power supply)
Power supply ground
+5V
GND
+5VS
GND
Output signal amplitude
(+VA) - (-VA),
(+VB) - (-VB)
Output signal phase difference
Typ.
Max.
Units
0.6
1
1.2
Vp-p
80
90
100
deg
Center voltage
+VOA, +VOB,
-VOA, -VOB
2.3
2.5
2.7
V
Offset voltage
(+VOA) - (-VOA),
(+VOB) - (-VOB)
-50
0
50
mV
0
6
%
Gain unbalance
-6
Load resistance
120
Remarks
Note 1
Note 1: When terminator Z0 = 120Ω supply voltage= 5V ± 5%
(voltage of load resistance at both ends)
OVS
FG
Sensor circuit
Connect to +5 V
and GND if there is
no remote sensing function.
FG
A signal output voltage p-p value - AB signal output average
System 1:
x100
AB signal output average
U0=U1=2.5V ± 0.2V Z0=120Ω
where
A signal output voltage p-p value B signal output voltage p-p value
AB signal output average =
2
System 1
Ω
+VA
Output waveform diagram
Za
-REF
+5V
(Over the entire length and the entire operating temperature range)
Specifications
UI
FG
SIN/COS output specifications
Min.
R2
ZO
Z
Power supply (5V)
Analog Output Specifications (For output format H) BL55, BL57
Symbol
Ba
ZO
+REF
FG
Item
UI
RI
+COS
U0
Receive side
Power supply ground
(Signal ground)
Load 120Ω
R2
R2
REF
Receiving power supplied from the controller
Scale
Aa
ZO
U0
-COS
Send side
Power supply ground
(Signal ground)
90˚
Recommended elements
SIN and COS : Differential receiver LMH6654
R1 = R2 =10 kΩ
REF : DS34C86
+VB
(when each output is viewed based on 0 V)
The A signal corresponds to SIN,
and the B signal corresponds to COS.
Amplitude
Center voltage
+VOA +VOB
-VOA -VOB
-VA
-VB
0V
38
39
Interface unit side :
Cable side :
R04-R12M (manufactured by TAJIMI ELECTRONICS CO., LTD.)
R04-P12F (manufactured by TAJIMI ELECTRONICS CO., LTD.) ....... Waterproof type
R03-PB12F (manufactured by TAJIMI ELECTRONICS CO., LTD.) ..... Non-waterproof type
Input/output specifications
Pin arrangement
A/B signal output
Analog output
A
A
+COS
B
*A
-COS
C
B
+SIN
D
*B
-SIN
E
Z
+REF
-REF
F
*Z
G
+5 V (power supply)
H
0 V (power supply)
J
0 V (signal)
K
0 V (signal)
L
+5 VS
M
0 VS
[Note]
• 0 V is the circuit ground, and it is not connected to the frame ground.
• Make sure that the power supply voltage is 5 V DC ± 5 % at the input connector to the interface unit.
• +5 V S and 0 V S are for checking the voltage (remote sensing function) applied to the input connector of the interface unit.
These voltages can be used to check and control for drops in the supply voltage due to the cables.
When using a power supply that cannot control power supply fluctuations,
a power supply input terminal can be used to reduce the supply voltage drops occurring due to the cable length.
In this case, connect the cable to the respective +5 V or 0 V power supply.
• The appropriate cable thickness is AWG28 to AWG24.
• Connect all of the 0 V terminals to prevent mis-wiring.
• Use shielded cables for all cabling.
• Use twisted-pair cables for the output signals.
Use cables so that the following signals are paired: A and *A, B and *B, Z and *Z, +SIN and -SiN, +COS and -COS, +REF and -REF.
Interface unit side:
Input/output specifications
Pin arrangement
A/B signal output
(Output format F, G)
1
A
+COS
2
*A
-COS
3
B
+SIN
4
*B
-SIN
5
REF
(Not connectable)
6
*REF
0 V (power supply)
7
+5 V (power supply)
0VS
8
ALM
(Not connectable)
+5 V (power supply)
9
+5 V (power supply)
10
*ALM
+5VS
11
+5VS
+REF
12
(Not connectable)
-REF
13
+5 V (power supply)
(Not connectable)
14
SIN (M)
(Not connectable)
15
0 V (power supply)
(Not connectable)
16
COS (M)
17
0 V (power supply)
18
(Not connectable)
19
0VS
20
(Not connectable)
21
0V (M)
22
(Not connectable)
23
0 V (power supply)
24
(Not connectable)
25
0 V (signal)
26
(Not connectable)
A/B signal output
40
Analog output
(Output format H)
A/B signal output : 10226-52A2JL
(manufactured by SUMITOMO 3M Limited)
Analog output : D02-M15SAG-26L9
(manufactured by Japan Aviation Electronics Industry, Limited)
Cable side:
A/B signal output : Plug 10126-3000VE
(manufactured by SUMITOMO 3M Limited)
: Shell 10326-52F0-00S
(manufactured by SUMITOMO 3M Limited)
Analog output : Plug D02-M15PG-N-F0
(manufactured by Japan Aviation Electronics Industry, Limited)
: Contact When AWG24 wire is used
D02-22-22P-PKG100
(manufactured by Japan Aviation Electronics Industry, Limited)
: Contact When AWG26-28 wire is used
D02-22-26P-PKG100
(manufactured by Japan Aviation Electronics Industry, Limited)
: Shell DE-C8-J9-F2-1
(manufactured by Japan Aviation Electronics Industry, Limited)
Analog output
41
http://www.mgscale.com
42
43
C o n t e n t s
Contents .................................... 02
PL20C/PL25 .......................... 40
What is Magnescale? .................. 04
PL81/PL82 ............................. 41
Selection Guide .......................... 06
SL700 Series ......................... 42
Measurement Principle ............... 08
PL101..................................... 43
Measurement Accuracy .............. 12
Digital Scales (Rotary scale) ........ 45
Installation Method...................... 14
RU77 ...................................... 46
Mechanical Specifications ........... 21
RS310 .................................... 48
Digital Scales (Linear scale) ......... 22
Interpolators ............................... 49
SR87 ...................................... 22
MJ100/110 ............................. 50
SR84/85 ................................. 26
MJ620 .................................... 51
SR77 ...................................... 30
MJ820/821 ............................. 52
SR74/75 ................................. 34
MJ830/831 ............................. 53
SL331/PL60 ........................... 38
List of Adapter Cables ................ 54
SL110/SL130 ......................... 39
Safety ......................................... 57
Magnescale technology essential for high-performance machine tools
Magnescale, which was developed based on Magnescale's advanced magnetic technology,
adapts magnetism to the measurement principle. This technology is far less affected by
condensation or oil problems commonly found in machine tools and provides stable and
precise position measurement.
Magnescale encoders with high precision and high environmental resistance supports
the front line of your manufacturing.
The product name “Magnescale” is trademark of Magnescale Corporation.
2
3
What is Magnescale?
The advantage of scales
A scale is mainly used for machine tools and detects the
position of a component such as the stage to which it is installed.
Feeding back position information from the scale eliminates errors caused
by the following and enables more precise machining to be accomplished.
Thermal
expansion of a
ball screw
Pitch
error of a
ball screw
Backlash
In order to maximize the performance of the scale mounted on a
machine tool, it is vitally important to keep a scale signal constant.
Magnescale® possesses environmental resistance against contamination
by condensation or oil, which makes the signal unstable causing signal errors.
Thus, Magnescale® is suitable for high-precision position detection.
4
Mounting allowance
Magnescale is constructed so
that the sensor for signal
detection slides along the guide
in the scale with bearings to
detect the position. Therefore, it
can perform stable,
high-precision detection even in
the presence of a positional
deviation of the scale or head
caused by installation or
disagreement in parallelism with
the machine guides.
Vibration and impact
resistance
Magnescale primarily uses
ferrous members as the housing
material to protect the detector
section, thereby realizing the
high vibration resistance and
impact resistance characteristics.
In the SR80 series, furthermore,
it employs multi-point fixation
construction in addition to the
housing with high rigidity,
achieving the industry’s top
class vibration resistance and
impact resistance.
Thermal characteristics
Magnescale encoders have the
same linear expansion
coefficient as that of cast iron
used for the structure of
general machine tools.
Therefore, it exhibits the same
behavior as the equipment in
which it is installed, even in
environments where
temperature changes, making
very stable control possible. In
particular, the SR80 series
scales can be installed in close
contact with the equipment;
heat exchange with the
equipment is effectively
achieved, enabling them to
attain consistent accuracy even
in an environment in which
temperature changes occur.
Resistant to condensation
and oil
Magnescale employs a
magnetic detection principle
which is far less affected by
condensation or oil problems
inherent in machine tools. This
stability allows for high
precision operation in severe
environments.
Scale construction
The magnetic signal detection
sensor is supported by a series
of bearings which do not
directly contact the scale
material. These bearings travel
on an internal guide
incorporated in the scale and
detects the equipment’s
traveling distance. Therefore,
the sensor has very small
sliding resistance, enabling the
scale to be used even for
equipment with small driving
force. Moreover, the use of a
specially constructed sealing
structure helps to prevent dust
and dirt from entering inside the
scale. In addition, air purging
the scale provides further
protection.
5
Selection Guide
Measurement length
(ML: mm)
70mm-2,040mm
Accuracy
3+3ML/1,000μmp-p
5+5ML/1,000μmp-p
Resolution
0.01μm, 0.05μm,
0.1μm, 0.5μm, 1μm
Linear scale
140mm-3,040mm
Rotary
6
360°
3+3ML/1,000μmp-p
5+5ML/1,000μmp-p
±2.5second
0.01μm, 0.05μm,
0.1μm, 0.5μm, 1μm
Maximum output
pulse counts
225=33,554,432p.p.r
Output signal
Type
Absolute serial
bidirectional signal
SR77
Incremental serial
bidirectional signal
SR75
A quad B signal Ref.
point.
Line driver signal
SR74
Absolute serial
bidirectional signal
SR87
Incremental serial
bidirectional signal
SR85
A quad B signal Ref.
point.
Line driver signal
SR84
Absolute serial
bidirectional signal
RU77
Page
Cross section
30
17.6
34
57.9
34
22
29
26
78
26
42
38
ø110
7
Measurement Principle
approximately 120 kA/m. The
magnetic media form a strong
coated surface resistant to
cutting fluids and strong
alkaline solutions through a
hardening process after
coating.
Magnetic powder
Magnetic metal powder used for
data storage systems because
of its high density and reliability
Br: 0.2 to 0.25T, Hc: Approx.
120 kA/m
Coating
Resistant to cutting fluids and
strong alkaline solutions
Scale material
The magnetic recording media,
or the raw material for scales,
was developed as the scale
material that realizes
high-density recording at high
precision, based on
Magnescale’s magnetic
technology that has been
cultivated for magnetic tapes
and magnetic discs.
The scales adopt magnetic
metal powder that is used for
data storage systems because
of its high density and reliability.
Its magnetic characteristics are
that Br: 0.2 to 0.25T and Hc:
Scale manufacturing
equipment
Die head
* Magnetic material is coated from the
tip of the die head onto a scale.
Magnetic media’s B - H curve
0.3
Signal detection sensor
(MR sensor)
The MR sensor is a thin-film
sensor patterned on a PWB. It
obtains the signal output
through the change in the
resistance value according to
the size of magnetic field
leakage from the scale when it
moves keeping a certain
distance from the magnetic
media (scale) to which
magnetic signals have been
recorded as shown in Figure 1.
In this case, however, the signal
obtained from the resistance
change characteristics of the
sensor and the status of
magnetic field leakage from the
scale also contains distortion
components (such as harmonic
components) in addition to the
sine wave components of the
signal pitch. Therefore, the
sensor is positioned by shifting
it in the operating direction by
the distance of 1/6 of another
signal pitch λ (Figure 2). In this
case, when third-order
harmonic components are
observed, the following
Equation “A” is established for
three-fold periodic signal
components because 1/6 of the
signal pitch λ is π/3 in the
periodic phase, and the phase
is shifted by 180° with respect
to the three-fold periodic signal
components of the first sensor,
resulting in a reverse signal.
The addition of this signal
enables the third-order
harmonic components to be
cancelled out. That is, the
combination of these sensors
enables harmonic components
of the 3n-th orders to be
canceled out. In the same way,
the combination of multiple
units of the sensors also
enables the harmonic
components of other orders
such as 5th and 7th orders to
be cancelled out simultaneously.
In detection sensors, the circuit
is generally formed in a bridge
structure for stability of the
temperature characteristics, etc.
as well. In that case, distortion
of odd numbered orders are
cancelled out by the
arrangement of sensors
configuring a bridge. Therefore,
the use of the bridge structure
and the arrangement of the
sensor configuration that
cancels out harmonic
components of the extent of
the 3rd, 5th, and 7th orders
enable a signal close to sine
waves to be obtained. In this
way, the scale achieves high
precision and high resolution by
digitization of electrical
interpolation based on a
distortion-less signal,
coinciding with various
electrical signal compensation.
A
e3=E3sin(3(2πx / λ+π / 3))
=E3sin(6πx / λ+π)
=-E3sin(6πx / λ)
B(T)
0.2
0.1
Figure 1 Arrangement of MR element and magnetic media
0
I
-0.1
1ch
(X)
Metal base
X
2
MR element
3
-2000
0
2000
4000
6000
6
78
H(x80A/m)
N
S
P
V Ch+ G
1 2 3 4
P
λ
Magnetic media
8
(n+1/2)P
P/6
4
5
-4000
MR element pattern
(m+1/2)P
1
H
-0.2
-0.3
-6000
MR element
Figure 2 Structure of high-precision Magnescale
Ch5 6 7 8
MR element
Magnetic media
Base
Scale
9
Incremental signal
Absolute signal
An incremental signal is taken
as the source of scale
performance and does not have
absolute positional information
of length longer than the
wavelength.
In magnetic scales, the S and N
poles are regularly arranged at
wavelength intervals.
An M code is a code string
consisting of two values (0 and 1)
known as M sequence and is a
cyclic code whose period is N =
2n-1. Where “n” is the order of a
primitive polynomial that
generates an M code. In the
scales, it is the number of digits
of M-code bits (value written as
“18 bits” above). There is a
primitive polynomial for each
order, and a code string is serially
created from any initial value. As
the creation and features of
codes, the following shows an
example of the order “8” in the
condition that the number of
digits of a bit = the order of a
primitive polynomial.
Assuming that a creating
polynomial is F(x) = x0 + x2 + x3
+ x4 and the 8-bit initial value is
00000001, x0 + x2 + x3 + x4 = 0
+ 0 + 0 + 0 = 1 (“+” is exclusive
OR and the order and bit are in
reverse, so that a higher-level
order corresponds to a
lower-order bit) is established,
making the initial value 8-bit’s
next data “1.” The following
performs the same logical
calculation for data 00000011 in
Automatic consecutive
compensation
Because signals are detected
at a maxmum resolution of 0.01
μm, consistent signal detection
is achieved at high precision
even in case of unmatched
parallelism or in an environment
in which the temperature varies.
y
Output signal
- Wavelength: 40, 80 μm, etc.
- Phase angle accuracy:
Approx. 0.1 to 0.2 μm
y
X
X
A sinusoidal signal of approx.
1/400 (52 dB) is required.
Factors that deteriorate
the phase angle
- DC, gain, or phase variations
- Noise
- Harmonics
Example of the measurement of Lissajous figure
Tek
stop
1
Improved signal by the
arrangement of
MR-element patterns
Improved signal stability, etc.
by harmonics and DC
cancellation or averaging
effects
ch1 200mv
ch2 200mv
M 100ms A ch2 ∫ 976mv
Figure 1
Figure 2
M-code sensor (MR)
Incremental
signal
Compensation
Reading
compensation
0
0
0
1
0
0
1
1
0
Addition
M-Code
to
Binary
Detector circuit
λ
M code
created by a generating
polynomial of n bits and that
there is no identical code among
2n-1 data. Because codes of 2n
are required for a rotary encoder,
it adopts the 2-track M-code
system that adds 0 (all 0).
- Lamda: 40, 80 microns
- Number of M-code bits: Up to
18 bits
Figure 1 below: Example of 4-bit
codes
Incremental/absolute signal
record reproduction to signal
composition
- Phase angle in λ is calculated
from an incremental signal and
taken as positional information
in λ.
- An address in λ is calculated
from each absolute signal and
an M code is recognized by
M-code sensors (multiple).
The M code is decoded into an
address in λ.
- Both data are added.
- Data format conversion to
communication protocol
- Communication (Figure 2
below)
which the initial value is moved
by one, to obtain code
00000001100111110101… In
this case, when the code string
created by the order “8” is
observed as 8-bit data (a set of 8
pieces) one by one, the code
strings of 8-bit data can be
obtained as follows:
00000001,
00000011,
00000110,
00001100,
00011001, …
In this case, for M code = cyclic
code, when the sequence is
cyclically replaced in a period (N
= 2n-1), the code word of that
sequence always becomes
different. That is, the same value
of 8-bit data is never presented.
Moreover, the code string is
composed of apparently random
code strings, which are not
arranged in an ascending or
descending order or in other
rules as seen from the example
above.
Configuration of absolute
encoder detection
M codes are non-repetitive
codes in which n-bit M codes are
Serial
IF
Serial
communication
1
0001
Automatic consecutive
compensation
0010
Incremental sensor (MR)
Sin
Cos
Compensation circuit
Incremental signal detection
Interpolation
circuit
*
*
Absolute signal detection
bit1 2
10
3 4...
11
Accuracy
The grating of an incremental
signal and the bit information
of an absolute signal of the
scale are written to a magnetic
track using the recording head.
For the recording head position
during this write, the writing
position of each signal is
determined based on the
Traceability
position information of a
light-wave interferometer using
the He-Ne stabilized laser.
Therefore, the position of each
signal on the recording head (=
accuracy) can be determined
very accurately. The accuracy
of the completed magnetic
scale into which a detecting
head is incorporated is also
measured by comparing it with
the positional information of
the light-wave interferometer
using the He-Ne stabilized
laser, which becomes
accuracy data.
The He-Ne stabilized laser, the
standard for accuracy
measurement, is frequency
calibrated in-house using the
“633-nm iodine molecular
absorption line wavelength
stabilization Helium neon laser
device for length,” which is the
specified secondary standard
of Magnescale. This specified
secondary standard is
calibrated by the specified
standard of the National
Institute of Advanced
Industrial Science and
Technology (AIST), a national
standard. In this way,
Magnescale has been qualified
as the calibration approval
operator of “length” and
magnetic scales manufactured
by Magnescale are provided
with traceability to the national
standard.
Traceability Flow Chart (Length)
International Committee for Weights
National Primary
Standards
National Institute of Advanced
Industrial Science and
Technology (AIST)
National
standards
and Measures (CIPM)
International Bureau of
Optical comb
Weights and Measures (BIPM)
Magnescale Corporation
National
Secondary
Standards
Practical
Standards
Iodine saturation absorption stabilized
He-Ne laser at 633nm
Stabilized He-Ne Laser
(633nm)
Products
12
13
Installation method
Linear Scale SR87
Scale and slider installation notes
· Do not turn on the power before installing the scale.
· Install the scale with the opening on the scale unit facing downward. If the opening cannot be turned
downward, it should face horizontally. Never install it facing upward. (Fig. 1)
· Remove off the coating around the tap hole to ground the scale unit using the installation surface
contact with the scale.
· Be aware that the scale will be damaged if slider moved outside the measuring length (ML).
· In environments where coolant can splash directly on the scale, be sure to mount a cover on the
scale to protect the scale from splashing. (Fig. 2)
Fig. 1
Fig. 2
Coolant
Installation example
Example 1 (recommended):Installation when a
stop surface of the scale and slider is made
with the bracket
Scale installation accuracy is improved when a
stop surface is made. This also simplifies
reinstallation of the scale.
1. Check and adjust the scale bracket’s parallelism
with respect to the machine guide, and then secure
in place. Even when using divided brackets, adjust
the parallelism over the entire bracket length as
shown in the figure.
Example 2: Installation when a stop surface of the
scale and slider is not made with the bracket
1. Adjust the parallelism of the scale bracket and slider
bracket with respect to the machine guide, and
then secure in place. Adjust the height and
parallelism of the slider bracket with respect to the
scale bracket, and then secure in place.
Fig. 9
78±0.3
5±0.2
0.05 MG
Fig. 6
Slider bracket
Scale bracket
78±0.3
Opening facing
downward
(○)
Opening facing
0.05 MG
50
Opening
0.05MG
(△)
(×)
Or
· The slider holders are used to secure the slider in place during transport.
They are not guides for installation.
· Do not take off the slider holders, if possible, until immediately before securing the slider.
· Even if the slider holders are removed, the plastic hook provided on the slider allows the slider to
maintain an approximate positional relationship with the scale unit.
· The plastic hook can come off if the slider is forcibly twisted or other excessive force is applied. If the
plastic hook comes off, return the plastic hook back to its original position before performing the
installation. (See Fig. 4.)
· After removing the slider holder, be sure to take off the clamp nuts remaining on the scale.
Fig. 3
0.05 MG
Fig. 4
.o
r le
ss
Unit: mm
2. Check and adjust the height and parallelism
of the slider bracket, and then secure in place.
Fig. 7
Unit: mm
0.05
or less
0.0
5
Scale
bracket
0.05
or less
Slider bracket
78±0.3
2. Adjust the parallelism with respect to the machine
guide of the scale rear while measuring the scale
rear with a dial gauge. Tighten the set screws.
<Measurement method>
Measure near the installation hole positions at the
scale unit rear.
5±0.2
Slider bracket
Fig. 10
0.1 MG
Scale bracket
Plastic hook
0.05 MG
Slider bracket
78±0.3
78±0.3
0.05
or less
Unit: mm
Unit: mm
Slider holder L
3. Bring the scale into contact with the stop
surfaces and install.
Slider holder R
· Before installing the scale, check that the alignment of the installation surface (or installation
brackets) is within the standards.
· Use a scale installation bracket, where applicable, having a length covering the entire scale length.
The parallelism of the scale may be harmed if only using a bracket divided for the installation section.
· The foot plates on both ends and intermediate foot plate installed on the scale unit are used as the
installation guides.
· Loosely turn the mounting screws first. Determine the alignment and then tighten the screws to
fasten the scale. (See Fig. 5.)
Fig. 5
Scale : M6 x 35 (9 N.m)
Fig. 8
3. Insert the supplied spacer (t = 1.0 mm) in the
space between the scale and slider, and then adjust
the slider position while bringing the slider into
contact with the scale.
Fig. 11
spacer (t = 1.0 mm)
Please measure attachment bore position neighborhood
of the main body of measurement method scale back.
Slider : M4 x 20 (2.7 N.m)
■Air injection and oil lubrication
Bring into contact
14
In the standard configuration, the end cap section is provided with an M5 tap hole for air injection and oil
lubrication. For more detailed information, please refer to the Instruction Manual (sold separately).
15
Linear Scale SR77
Scale and slider installation notes
· Do not turn on the power before installing the scale.
· Install the scale with the opening on the scale unit facing downward. If the opening cannot be turned
downward, it should face horizontally. Never install it facing upward. (Fig. 1)
· Remove off the coating around the tap hole to ground the scale unit using the installation surface
contact with the scale.
· Be aware that the scale will be damaged if slider moved outside the measuring length (ML).
· In environments where coolant can splash directly on the scale, be sure to mount a cover on the
scale to protect the scale from splashing. (Fig. 2)
Fig. 1
Fig. 2
Opening facing
downward
(○)
Opening facing
Opening
(△)
(×)
Coolant
Installation example
Example 1 (recommended):Installation when a
stop surface of the scale and slider is made
with the bracket
Scale installation accuracy is improved when a
stop surface is made. This also simplifies
reinstallation of the scale.
1. Check and adjust the scale bracket’s parallelism
with respect to the machine guide, and then secure
in place. As shown in the figure, adjust the
parallelism over the entire bracket length even when
making a difference in levels on the scale installation
surface.
1. Adjust the parallelism of the scale bracket and slider
bracket with respect to the machine guide, and
then secure in place. Adjust the height and
parallelism of the slider bracket with respect to the
scale bracket, and then secure in place.
Fig. 9
0±0.2
0.1 MG
Slider bracket
Scale bracket
0.05
or less
0.05 MG
Fig. 6
Slider bracket
7.5 ± 0.05
· The slider holders are used to secure the slider in place during transport.
They are not guides for installation.
· Do not take off the slider holders, if possible, until immediately before securing the slider.
· Even if the slider holders are removed, the plastic hook provided on the slider allows the slider to
maintain an approximate positional relationship with the scale unit.
· The plastic hook can come off if the slider is forcibly twisted or other excessive force is applied. If the
plastic hook comes off, return the plastic hook back to its original position before performing the
installation. (See Fig. 4.)
· After removing the slider holder, be sure to take off the clamp nuts remaining on the scale.
Fig. 3
Fig. 4
Scale
bracket
Unit: mm
2. Check and adjust the height and parallelism
of the slider bracket, and then secure in place.
Fig. 7
57.9±0.3
0±0.2
0.05 MG
Slider bracket
0.05
or less
Same distance
from scale ends
Fig. 10
0.1 MG
Unit: mm
Unit: mm
Clamp nut
3. Bring the scale into contact with the stop
surfaces and install.
Slider holder L
Slider holder R
· Before installing the scale, check that the alignment of the installation surface (or installation
brackets) is within the standards.
· Use a scale installation bracket, where applicable, having a length covering the entire scale length.
The parallelism of the scale may be harmed if only using a bracket divided for the installation section.
· The foot plates on both ends and intermediate foot plate installed on the scale unit are used as the
installation guides.
· Loosely turn the mounting screws first. Determine the alignment and then tighten the screws to
fasten the scale. (See Fig. 5.)
Both ends : M8 x 16 (20 N.m)x.
2. Adjust the parallelism with respect to the machine
guide of the scale rear while measuring the scale
rear with a dial gauge. Tighten the set screws.
<Measurement method>
Measure at two points where the measurement
distance is as wide as possible and at the same
distance from the right and left scale ends. If using
a scale with intermediate foot plate, be sure to also
measure the intermediate foot plate.
Slider bracket
Scale bracket
Plastic hook
57.9 ± 0.3
Clamp nut
Unit: mm
0.1 MG
Or
end cap
Fig. 5
Example 2: Installation when a stop surface of the
scale and slider is not made with the bracket
Intermediate foot plate : M4 x 10 (2.7 N.m)
Fig. 8
3. Insert the supplied spacer (t = 1.0 mm) in the
space between the scale and slider, and then adjust
the slider position while bringing the slider into
contact with the scale.
Fig. 11
spacer (t = 1.0 mm)
* Please measure it with two points that took the measurement interval widely as much as possible at a place of the same distance from the measurement
method right and left scale both ends. In the case of the intermediate foot scale with, please measure the intermediate foot part.
Slider : M4 x 20 (2.7 N.m)
■Air injection and oil lubrication
Bring into contact
16
Bring into contact
In the standard configuration, the end cap section is provided with an M5 tap hole for air injection and oil
lubrication. For more detailed information, please refer to the Instruction Manual (sold separately).
17
Rotary Magnescale Installation
Installation Dimensions and Tolerance
Make preparations so that the rotary magnescale installation surface dimensions and tolerance have
the values shown in the figure below.
Installation Preparation
Transport plate is used to secure the scale unit and scale shaft so that excess vibrations are not
applied to the scale shaft during transportation. Before installing the rotary magnescale, be sure to
remove the transport plate.
Installation nut
(Obtained by the customer.)
(M20 x 1)
ø100
+0.035
)
0
ø0.1 A
(12)
ø85H7 (
ø20g6
3±0.1
32 –1
0
4 x M4
0.01 A
–0.007
–0.020
0.1 A
0.02 A
+xTransport plate
5
+B 3 x 5
+B 6 x 35
A
+4
ø29 –1
A: Bearing rotation center
Unit: mm
Installation Precaution
·If the surface of the rotary side or stationary side where the rotary magnescale will be installed has paint
or other coating, remove the paint or coating in order to obtain conductivity between the rotary
magnescale
and the machine.
·Before installing the rotary magnescale, be sure to check that the dimensional tolerance of the
installation surface and machine shaft are within the standards. If the installation dimensional tolerance
is not within the standards, the required accuracy will not be obtained, and the rotary magnescale can
even be damaged.
·In environments where coolant can splash directly on the rotary magnescale, be sure to mount a cover
on the rotary magnescale to protect the rotary magnescale from splashing.
·The installation nut and other installation tools must be obtained by the customer.
·The absolute position becomes 0 at the reference point mark ±2 degrees. Be sure to check its location
when securing the scale shaft. (See section 6, “Outside Dimensions.”)
·In its standard configuration, the rotary magnescale has an M5 tap hole for air injection.
18
Note
The transport plate does not set the installation standard for the rotary magnescale.
Perform the installation by following section 5-1, “Installation Dimensions and
Tolerance.”
19
Mechanical Specifications
Installation Procedure
1. Check that there is no dust or scratches on the rotary magnescale installation surface.
Check that there are no indentations, rust, or scratches on the machine shaft where the rotary
magnescale will be installed. Completely wipe off any dust and dirt on the machine shaft.
2. Insert the rotary magnescale gently into the machine shaft.
The machine shaft and scale shaft are designed for a precise fit, and so do not try to force insertion
of the rotary magnescale into the machine shaft.
3. Secure the rotary magnescale.
Use M4 screws to install from the rotary magnescale top, and use M6 screws to install from the
rotary magnescale bottom. (M4 tightening torque: 2.5 N.m)
4. Use the installation nut to secure the scale shaft to the machine shaft.
(M20 x 1 tightening torque: 20 N.m)
The securing operation can be performed more smoothly by using a tightening wrench and
fastening wrench as shown in the “7. Appendix.”
Air purging
If Magnescale is used in a dusty or misty environment, it is recommended that air is introduced into
the scale to alleviate any unwanted effects. Attach air nipples to M5 holes for air introduction that are
provided at both ends of the scale to supply air into the scale.
When introducing air into the scale, supply air via an air filter (nominal filtration rating: 5 μm), mist
separator (nominal filtration rating: 0.3 μm), and a regulator to remove dust, dirt, and mist. As a guide,
the amount of air supplied to the scale is 30 NL/min.
M5 × 6 hex. socket head screw
+B M5 x 6
Installation nut
(obtain separately)
Tube bending radius of
R15 mm or more
M4 x 16 (included)
Flat washers (included)
Polyurethane tube of
φ6 O.D. and φ4 I.D.
Air nipple
Nylon tube of φ8 O.D.
Rotary magnescale unit
Air supply source
Distributor section
Scale
Reducing valve
Air filter
(nominal filtration rating: 5 µm)
Mist separator
(nominal filtration rating: 0.3 µm)
Machine shaft
M4 tap for installation
(4 locations)
20
21
SR87
Specifications
Model
This robust type magnetic absolute scale system
that outputs position signals for machine tools
and other equipment that require
high-precision positioning.
SR87
140~3040mm
140, 240, 340, 440, 540, 640, 740, 840, 940, 1040, 1140, 1240, 1340, 1440, 1540, 1640, 1740, 1840,
2040, 2240, 2440, 2640, 2840, 3040
Measuring length (ML)
12 ± 1 x 10-6/ ˚C
Thermal expansion coefficient (/ ˚C)
Output signal
Absolute serial bidirectional signal, compliant with EIA-485
Accuracy (at 20 ˚C) ML:mm
3+3ML/1,000 μm p-p or 5+5ML/1,000 μm p-p
Resolution
Selectable from 0.01,0.05,0.1,0.5 and 1.0 μm( Set at factory shipping)
Zero count position
Center mark
Power supply voltage
DC4.75 - 5.25V(At cable connection end)
Consumption current
200 mA (at 120 Ω terminal) max.
Imrush current
2A max. (When the power supply rise time is 10 ms)
Maximum response speed
200m/min (User-selected resolution setting)
250m/s2 (50Hz~2kHz)
Vibration resistance
450m/s2 (11ms)
Impact resistance
IP54 (Air purge not included), IP65 (Air purge included)
Protective design grade
Oil lubricant can also be used under severe environmental conditions.
Other protections
In the case of errors such as a reverse-connected power supply or over-voltage,
the internal fuse is cut to protect the power being supplied and wiring.
Power supply protection
FCC Part15 Subpart B Class A. ICES-003 Class A Digital Device.
EN55011 Gp1 Class A, EN61000-6-2. Safety standards not applicable (60 V DC or less).
Safety standards
0 ~ +50 ˚C
Operating temperature range( ˚C)
-20 ~ +55 ˚C
Storage temperature range( ˚C)
Approx.1.24kg + 4kg/m
Mass
1N or less
Slider sliding resistance
• Measuring Length(ML) : 140-3,040mm
Model
• Accuracy : 3+3ML/1,000 μm p-p,
Description
5+5ML/1,000 μm p-p
• Maximum resolution : 0.01 μm
• Maximum response speed : 200m/min.
• Protocol : FANUC, Mitsubishi,
Panasonic, YASKAWA
CH33-**CP
CH33-**CE
Cable with open end
Cable with open end
Cable length
3,5,10,15m
Material
PVC
PU
Armor
YES
YES
*Please consult with our sales for the cable length other than above.
Details of model designation
SR87-
Absolute zero point shown by mm from left end of ML e.g.
850mm = 850, in case of center then X For 1000mm or longer, 2
left digits shown by alphabet
1,000~1,099mm A
1,400~1,499mm E
1,800~1,899mm J
1,100~1,199mm B
1,500~1,599mm F
1,900~1,999mm K
1,200~1,299mm C
1,600~1,699mm G
2,000~2,040mm L
1,300~1,399mm D
1,700~1,799mm H
Ex:1,050mm
NC Maker
FANUC
A50
Mitsubishi
Communication protocol
ABS
Robust
type
Maximum
resolution
0.01 μm
Resolution & Direction*
Accuracy grade A:5+5ML/1000 S:3+3ML/1000μm
ML:Measuring length by mm
Cable out direction: R= Right, L= Left
Measuring length by cm
* When the slider is moved in the direction of the arrow, the signal is addition when
the direction is “positive,”and it is subtraction when the direction is “negative.” The
direction is selected when ordering.
FANUC, Mitsubishi,
Panasonic
YASKAWA
Panasonic
Wire
4
2
4
2
2
A
B
D
F
H
Resolution Direction
(μm)
0.01
A F
0.05
B G
0.1
C H
0.5
D J
1.0
E K
YASKAWA
Number Direction
of
Divisions
1/8192
1/1024
L
M
-
Note:Mitsubishi is only A, B, C
Panasonic is only B, C, D, E
22
23
24
L1
278
378
478
578
678
778
878
978
1078
1178
1278
1378
L2
200
300
400
500
600
700
800
900
1000
1100
1200
1300
n
3
4
5
6
7
8
9
10
11
12
13
14
ML
1340
1440
1540
1640
1740
1840
2040
2240
2440
2640
2840
3040
L1
1478
1578
1678
1778
1878
1978
2178
2378
2578
2778
2978
3178
0.05
0.1
MG
MG
n
3
4
5
6
7
8
9
10
11
12
13
14
ML
1340
1440
1540
1640
1740
1840
2040
2240
2440
2640
2840
3040
L1
1478
1578
1678
1778
1878
1978
2178
2378
2578
2778
2978
3178
0.05
78
0.05
0.1
MG
3.5
(9)
0.1
19±0.1
48.5
5±0.2
13.5
34
12.5
Unit : mm
0.1
9.2
14.5
39
29
1±0.3
Unit : mm
n
15
16
17
18
19
20
22
24
26
28
30
32
100±0.2
56
sinkhole depth 5
Hexagonal
139.5
15
56.5
39
140
sinkhole depth 5
56
Hexagonal
100±0.2
L1 = ML + 138
(Mounting screw M4×20)
2 – ø4.5 × 8.5
(Mounting screw M6×35)
n – ø7, ø11 sinkhole depth 6.5
(ML)
(Mounting screw M4×20)
2 – ø4.5 × 8.5
(Mounting screw M6×35)
n – ø7, ø11 sinkhole depth 6.5
(ML)
L2 =(100 ± 0.2) x (n-1)
ML
ML
L1 = ML + 138
L2 = (100 ± 0.2) x (n-1)
(81.5)
( 81.5)
(32.5)
(39)
( 15.5)
( 39)
Cable Direction Left
Hole for air purge
(M5 : Both end)
L2
1400
1500
1600
1700
1800
1900
2100
2300
2500
2700
2900
3100
7.5
21
56.5
39
Dimensions SR87
Cable Direction Right
ML : Measuring length CL : Cable length MG: Machine guide
L2
200
300
400
500
600
700
800
900
1000
1100
1200
1300
(9)
L1
278
378
478
578
678
778
878
978
1078
1178
1278
1378
28.5
ML
140
240
340
440
540
640
740
840
940
1040
1140
1240
3.5
0.1
19±0.1
48.5
5±0.2
Unit : mm
n
15
16
17
18
19
20
22
24
26
28
30
32
12.5
Unit : mm
0.1
9.2
14.5
29
L2
1400
1500
1600
1700
1800
1900
2100
2300
2500
2700
2900
3100
Hole for air purge
(M5 : Both end)
ML : Measuring length CL : Cable length MG: Machine guide
ML
140
240
340
440
540
640
740
840
940
1040
1140
1240
Dimensions SR87
19.5
19.5
78
1±0.3
39
28.5
MG
0.05
25
9.5
SR84/85
Specifications
Model
This robust medium type magnetic scale system
that outputs position signals for machine tools
and other equipment that require
high-precision positioning.
SR84
SR85
140~3040mm
140, 240, 340, 440, 540, 640, 740, 840, 940, 1040, 1140, 1240, 1340, 1440, 1540, 1640, 1740, 1840,
2040, 2240, 2440, 2640, 2840, 3040
Measuring length (ML)
12 ± 1 x 10-6/ ˚C
Thermal expansion coefficient (/ ˚C)
A/B, Reference point line driver signal
(compliant with EIA-422)
Output signal
3+3ML/1,000 μm p-p or 5+5ML/1,000 μm p-p
Accuracy (at 20 ˚C) ML:mm
Resolution
Reference point
Selectable from 0.05,0.1,0.5 and 1.0 μm
( Set at factory shipping)
Selectable from 0.01,0.05,0.1,0.5 and 1.0 μm
( Set at factory shipping)
None, Center point, Multi-point (40 mm pitch),
Reference mark (standard pitch: 20 mm),
User-selected point (1 mm pitch)
None, Center point,
User-selected point (1 mm pitch)
Power supply voltage
DC4.75 - 5.25V(At cable connection end)
Consumption current
200 mA (at 120 Ω terminal) max.
2A max. (When the power supply rise time is 10 ms)
Imrush current
50m/min(Resolution: 0.1 um,
Minimum phase difference: at 50 ns)
Maximum response speed
450m/s2 (11ms)
Impact resistance
IP54 (Air purge not included), IP65 (Air purge included)
Protective design grade
Oil lubricant can also be used under severe environmental conditions.
Other protections
In the case of errors such as a reverse-connected power supply or over-voltage,
the internal fuse is cut to protect the power being supplied and wiring.
Power supply protection
FCC Part15 Subpart B Class A. ICES-003 Class A Digital Device.
EN55011 Gp1 Class A, EN61000-6-2. Safety standards not applicable (60 V DC or less).
Safety standards
• Measuring Length(ML) : 140-3,040mm
Operating temperature range( ˚C)
• Accuracy : 3+3ML/1,000 μm p-p,
Storage temperature range( ˚C)
• Maximum resolution : 0.01 μm
• Maximum response speed : 200m/min.
• Protocol (SR85) : Mitsubishi
200m/min
(User-selected resolution setting)
250m/s2 (50Hz~2kHz)
Vibration resistance
5+5ML/1,000 μm p-p
Incremental serial bidirectional signal,
compliant with EIA-485
0 ~ +50 ˚C
-20 ~ +55 ˚C
Approx.1.24kg + 4kg/m
Mass
1N or less
Slider sliding resistance
Model
Description
CH33-**CP
CH33-**CE
Cable with open end
Cable with open end
Cable length
3,5,10,15m
Material
PVC
PU
Armor
YES
YES
*Please consult with our sales for the cable length other than above.
Details of model designation
Phase
difference
(ns)
Minimum phase difference
Robust
type
Maximum
resolution
0.01 µm
(SR85 only)
SR84SR85-
Single reference mark shown by mm from left end of ML e.g.
850mm = 850, in case of center then X For 1000mm or longer, 2
left digits shown by alphabet
1,000~1,099mm A
1,400~1,499mm E
1,800~1,899mm J
1,100~1,199mm B
1,500~1,599mm F
1,900~1,999mm K
1,200~1,299mm C
1,600~1,699mm G
2,000~2,040mm L
1,300~1,399mm D
1,700~1,799mm H
Ex :1,050mm
50
100
150
200
250
300
400
A50
Specific mark : X=center, SR85 is only single reference mark.
NC Maker
Communication protocol
Resolution SR84
(μm)
Resolution & Direction*
Accuracy grade A : 5+5ML/1000 S : 3+3ML/1000μm
ML:Measuring length by mm
Cable out direction: R= Right, L= Left
Measuring length by cm
0.01
0.05
0.1
0.5
1.0
B
C
D
E
G
H
J
K
A
B
C
D
E
F
G
SR85
A
B
C
D
E
Mitsubishi
500
650
1000
1250
2500
3000
H
J
K
L
M
N
Wire
2
4
B
D
F
G
H
J
K
When the slider* is moved in the direction of the arrow, the A signal is ahead when
the direction is “positive,”and B signal is ahead when the direction is “negative.”
26
27
28
L1
278
378
478
578
678
778
878
978
1078
1178
1278
1378
L2
200
300
400
500
600
700
800
900
1000
1100
1200
1300
n
3
4
5
6
7
8
9
10
11
12
13
14
ML
1340
1440
1540
1640
1740
1840
2040
2240
2440
2640
2840
3040
L1
1478
1578
1678
1778
1878
1978
2178
2378
2578
2778
2978
3178
0.05
0.1
MG
MG
n
3
4
5
6
7
8
9
10
11
12
13
14
ML
1340
1440
1540
1640
1740
1840
2040
2240
2440
2640
2840
3040
L1
1478
1578
1678
1778
1878
1978
2178
2378
2578
2778
2978
3178
0.05
78
0.05
0.1
MG
3.5
(9)
0.1
19±0.1
48.5
5±0.2
13.5
34
12.5
Unit : mm
0.1
9.2
14.5
39
29
1±0.3
Unit : mm
n
15
16
17
18
19
20
22
24
26
28
30
32
100±0.2
56
sinkhole depth 5
Hexagonal
139.5
15
56.5
39
140
sinkhole depth 5
56
Hexagonal
100±0.2
L1 = ML + 138
(Mounting screw M4×20)
2 – ø4.5 × 8.5
(Mounting screw M6×35)
n – ø7, ø11 sinkhole depth 6.5
(ML)
(Mounting screw M4×20)
2 – ø4.5 × 8.5
(Mounting screw M6×35)
n – ø7, ø11 sinkhole depth 6.5
(ML)
L2 =(100 ± 0.2) x (n-1)
ML
ML
L1 = ML + 138
L2 = (100 ± 0.2) x (n-1)
(81.5)
( 81.5)
(32.5)
(39)
( 15.5)
( 39)
Cable Direction Left
Hole for air purge
(M5 : Both end)
L2
1400
1500
1600
1700
1800
1900
2100
2300
2500
2700
2900
3100
7.5
21
56.5
39
Dimensions SR84/85
Cable Direction Right
ML : Measuring length CL : Cable length MG: Machine guide
L2
200
300
400
500
600
700
800
900
1000
1100
1200
1300
(9)
L1
278
378
478
578
678
778
878
978
1078
1178
1278
1378
28.5
ML
140
240
340
440
540
640
740
840
940
1040
1140
1240
3.5
0.1
19±0.1
48.5
5±0.2
Unit : mm
n
15
16
17
18
19
20
22
24
26
28
30
32
12.5
Unit : mm
0.1
9.2
14.5
29
L2
1400
1500
1600
1700
1800
1900
2100
2300
2500
2700
2900
3100
Hole for air purge
(M5 : Both end)
ML : Measuring length CL : Cable length MG: Machine guide
ML
140
240
340
440
540
640
740
840
940
1040
1140
1240
Dimensions SR84/85
19.5
78
19.5
1±0.3
39
28.5
MG
0.05
29
9.5
SR77
Specifications
Model
This slim type magnetic scale system
that outputs position signals for machine tools
and other equipment that require
high-precision positioning.
SR77
70~2040mm
70, 120, 170, 220, 270, 320, 370, 420, 470, 520, 570, 620, 720, 770, 820, 920, 1020, 1140,
1240, 1340, 1440, 1540, 1640, 1740, 1840, 2040
Measuring length (ML)
12 ± 1 x 10-6/ ˚C
Thermal expansion coefficient (/ ˚C)
Output signal
Absolute serial bidirectional signal, compliant with EIA-485
Accuracy (at 20 ˚C) ML:mm
3+3ML/1,000 μm p-p or 5+5ML/1,000 μm p-p
Resolution
Selectable from 0.01,0.05,0.1,0.5 and 1.0 μm( Set at factory shipping)
Zero count position
Center mark
Power supply voltage
DC4.75 - 5.25V(At cable connection end)
Consumption current
200 mA (at 120 W terminal) max.
Imrush current
2A max. (When the power supply rise time is 10 ms)
Maximum response speed
200m/min (User-selected resolution setting)
150m/s2 (50Hz~3kHz)
Vibration resistance
350m/s2 (11ms)
Impact resistance
IP54 (Air purge not included), IP65 (Air purge included)
Protective design grade
Oil lubricant can also be used under severe environmental conditions.
Other protections
In the case of errors such as a reverse-connected power supply or over-voltage,
the internal fuse is cut to protect the power being supplied and wiring.
Power supply protection
FCC Part15 Subpart B Class A. ICES-003 Class A Digital Device.
EN55011 Gp1 Class A, EN61000-6-2. Safety standards not applicable (60 V DC or less).
Safety standards
0 ~ +50 ˚C
Operating temperature range( ˚C)
-20 ~ +55 ˚C
Storage temperature range( ˚C)
Approx.0.27kg + 1.36kg/m
Mass
1N or less
Slider sliding resistance
• Measuring Length(ML) : 70-2,040mm
Model
• Accuracy : 3+3ML/1,000 μm p-p,
Description
5+5ML/1,000 μm p-p
• Maximum resolution : 0.01 μm
• Maximum response speed : 200m/min.
• Protocol : FANUC, Mitsubishi,
Panasonic, YASKAWA
CH33-**CP
CH33-**CE
Cable with open end
Cable with open end
Cable length
3,5,10,15m
Material
PVC
PU
Armor
YES
YES
*Please consult with our sales for the cable length other than above.
Details of model designation
SR77-
Absolute zero point shown by mm from left end of ML e.g.
850mm = 850, in case of center then X For 1000mm or longer, 2
left digits shown by alphabet
1,000~1,099mm A
1,400~1,499mm E
1,800~1,899mm J
1,100~1,199mm B
1,500~1,599mm F
1,900~1,999mm K
1,200~1,299mm C
1,600~1,699mm G
2,000~2,040mm L
1,300~1,399mm D
1,700~1,799mm H
Ex:1,050mm
NC Maker
FANUC
A50
Mitsubishi
Communication protocol
ABS
Slim
type
Maximum
resolution
0.01 μm
Resolution & Direction*
Accuracy grade A:5+5ML/1000 S:3+3ML/1000μm
ML:Measuring length by mm
Cable out direction: R= Right, L= Left
Measuring length by cm
* When the slider is moved in the direction of the arrow, the signal is addition when
the direction is “positive,”and it is subtraction when the direction is “negative.” The
direction is selected when ordering.
FANUC, Mitsubishi,
Panasonic
YASKAWA
Panasonic
Wire
4
2
4
2
2
A
B
D
F
H
Resolution Direction
(μm)
0.01
A F
0.05
B G
0.1
C H
0.5
D J
1.0
E K
YASKAWA
Number Direction
of
Divisions
1/8192
1/1024
L
M
-
Note:Mitsubishi is only A, B, C
Panasonic is only B, C, D, E
30
31
32
L1
208
258
308
358
408
458
508
558
608
658
708
758
858
L2
185
235
285
335
385
435
485
535
585
635
685
735
835
L3
−
−
−
−
−
−
−
−
−
−
−
−
417.5
L4
−
−
−
−
−
−
−
−
−
−
−
−
−
L5
−
−
−
−
−
−
−
−
−
−
−
−
417.5
n
0
0
0
0
0
0
0
0
0
0
0
0
1
ML
770
820
920
1020
1140
1240
1340
1440
1540
1640
1740
1840
2040
L1
908
958
1058
1158
1278
1378
1478
1578
1678
1778
1878
1978
2178
L2
885
935
1035
1135
1255
1355
1455
1555
1655
1755
1855
1955
2155
L3
442.5
467.5
517.5
567.5
627.5
677.5
727.5
520
550
585
620
650
720
L4
−
−
−
−
−
−
−
520
550
585
620
650
720
0.1
MG
57.9
L2
185
235
285
335
385
435
485
535
585
635
685
735
835
31.8
25.1
L3
−
−
−
−
−
−
−
−
−
−
−
−
417.5
L4
−
−
−
−
−
−
−
−
−
−
−
−
−
L5
−
−
−
−
−
−
−
−
−
−
−
−
417.5
n
0
0
0
0
0
0
0
0
0
0
0
0
1
L1
908
958
1058
1158
1278
1378
1478
1578
1678
1778
1878
1978
2178
L2
885
935
1035
1135
1255
1355
1455
1555
1655
1755
1855
1955
2155
L3
442.5
467.5
517.5
567.5
627.5
677.5
727.5
520
550
585
620
650
720
L4
−
−
−
−
−
−
−
520
550
585
620
650
720
23.5
28.7
0.1
MG
MG
1±0.3
31.8
17.6
0±0.2
1.6
Hole for air purge
(M5 : Both end)
13.5
0.05
C
C 0.5
0.
5
3.5
Unit : mm
0.1
9
17.6
18
11.5
30
15
73
131
MAGNESCALE
SR7#
Hexagonal
sinkhole depth 5
56
2 – ø10 ø15 Sinkhole depth 9
(Mounting screws M8×16)
L5
442.5
467.5
517.5
567.5
627.5
677.5
727.5
515
555
585
615
655
715
L3
131
ML
L4
L4
n × ø4.5
(Mounting screw M4 × 10)
(ML)
L2=ML+115
L1=ML+138
n × ø4.5
(Mounting screw M4×10)
2 - ø4.5 × 8.5
(Mounting screws M4 × 20)
n × Intermediate
foot plate
Unit : mm
n
1
1
1
1
1
1
1
2
2
2
2
2
2
ML
2 – ø4.5×8.5
(Mounting screws M4×20)
(ML)
L2=ML+115
L1=ML+138
L5
L5
(65)
(81.5)
(25)
Cable Direction Left
* Intermediate foot plate: Installed in one location when ML > 720 mm and two locations when ML > 1440 mm
ML
770
820
920
1020
1140
1240
1340
1440
1540
1640
1740
1840
2040
16.5
12
Hexagonal
sinkhole depth 5
56
MAGNESCALE
SR7#
n × Intermediate
foot plate
Unit : mm
n
1
1
1
1
1
1
1
2
2
2
2
2
2
Dimensions SR77
Cable Direction Right
ML : Measuring length CL : Cable length MG: Machine guide
L1
208
258
308
358
408
458
508
558
608
658
708
758
858
1±0.3
ML
70
120
170
220
270
320
370
420
470
520
570
620
720
MG
13.5
17.6
Hole for air purge
(M5 : Both end)
0±0.2
1.6
3.5
0.05
C
C 0.5
0.
5
56.5
L3
L5
442.5
467.5
517.5
567.5
627.5
677.5
727.5
515
555
585
615
655
715
7.5
Unit : mm
0.1
9
17.6
11.5
2 – ø10 ø15 Sinkhole depth 9
(Mounting screws M8×16)
* Intermediate foot plate: Installed in one location when ML > 720 mm and two locations when ML > 1440 mm
ML : Measuring length CL : Cable length MG: Machine guide
ML
70
120
170
220
270
320
370
420
470
520
570
620
720
Dimensions SR77
7.5
28.7
23.5
25.1
57.9
33
9.5
SR74/75
Specifications
Model
This slim type magnetic scale system
that outputs position signals for machine tools
and other equipment that require
high-precision positioning.
SR74
SR75
70~2040mm
70, 120, 170, 220, 270, 320, 370, 420, 470, 520, 570, 620, 720, 770, 820, 920,
1020, 1140, 1240, 1340, 1440, 1540, 1640, 1740, 1840, 2040
Measuring length (ML)
12 ± 1 x 10-6/ ˚C
Thermal expansion coefficient (/ ˚C)
A/B, Reference point line driver signal
(compliant with EIA-422)
Output signal
3+3ML/1,000 μm p-p or 5+5ML/1,000 μm p-p
Accuracy (at 20 ˚C) ML:mm
Resolution
Reference point
Selectable from 0.05,0.1,0.5 and 1.0 μm
( Set at factory shipping)
Selectable from 0.01,0.05,0.1,0.5 and 1.0 μm
( Set at factory shipping)
None, Center point, Multi-point (40 mm pitch),
Reference mark (standard pitch: 20 mm),
User-selected point (1 mm pitch)
None, Center point,
User-selected point (1 mm pitch)
Power supply voltage
DC4.75 - 5.25V(At cable connection end)
Consumption current
200 mA (at 120 Ω terminal) max.
2A max. (When the power supply rise time is 10 ms)
Imrush current
50m/min(Resolution: 0.1 um,
Minimum phase difference: at 100 ns)
Maximum response speed
350m/s2 (11ms)
Impact resistance
IP54 (Air purge not included), IP65 (Air purge included)
Protective design grade
Oil lubricant can also be used under severe environmental conditions.
Other protections
In the case of errors such as a reverse-connected power supply or over-voltage,
the internal fuse is cut to protect the power being supplied and wiring.
Power supply protection
FCC Part15 Subpart B Class A. ICES-003 Class A Digital Device.
EN55011 Gp1 Class A, EN61000-6-2. Safety standards not applicable (60 V DC or less).
Safety standards
• Measuring Length(ML) : 70-2,040mm
Operating temperature range( ˚C)
• Accuracy : 3+3ML/1,000 μm p-p,
Storage temperature range( ˚C)
• Maximum resolution : 0.01 μm
• Maximum response speed : 200m/min.
• Protocol (SR75) : Mitsubishi
200m/min
(User-selected resolution setting)
150m/s2 (50Hz~3kHz)
Vibration resistance
5+5ML/1,000 μm p-p
Incremental serial bidirectional signal,
compliant with EIA-485
0 ~ +50 ˚C
-20 ~ +55 ˚C
Approx.0.27kg + 1.36kg/m
Mass
1N or less
Slider sliding resistance
Model
Description
CH33-**CP
CH33-**CE
Cable with open end
Cable with open end
Cable length
3,5,10,15m
Material
PVC
PU
Armor
YES
YES
*Please consult with our sales for the cable length other than above.
Details of model designation
Phase
difference
(ns)
Minimum phase difference
SR74SR75-
Slim
type
Single reference mark shown by mm from left end of ML e.g.
850mm = 850, in case of center then X For 1000mm or longer, 2
left digits shown by alphabet
Maximum
resolution
0.01 µm
1,000~1,099mm A
1,400~1,499mm E
1,800~1,899mm J
1,100~1,199mm B
1,500~1,599mm F
1,900~1,999mm K
1,200~1,299mm C
1,600~1,699mm G
2,000~2,040mm L
(SR75 only)
1,300~1,399mm D
1,700~1,799mm H
Ex :1,050mm
50
100
150
200
250
300
400
A50
Specific mark : X=center, SR75 is only single reference mark.
NC Maker
Communication protocol
Resolution SR74
(μm)
Resolution & Direction*
Accuracy grade A : 5+5ML/1000 S : 3+3ML/1000μm
ML : Measuring length by mm
Cable out direction: R= Right, L= Left
Measuring length by cm
0.01
0.05
0.1
0.5
1.0
B
C
D
E
A
B
C
D
E
F
G
G
H
J
K
SR75
A
B
C
D
E
Mitsubishi
500
650
1000
1250
2500
3000
H
J
K
L
M
N
Wire
2
4
B
D
F
G
H
J
K
* When the slider is moved in the direction of the arrow, the A signal is ahead when
the direction is “positive,”and B signal is ahead when the direction is “negative.”
34
35
36
L1
208
258
308
358
408
458
508
558
608
658
708
758
858
L2
185
235
285
335
385
435
485
535
585
635
685
735
835
L3
−
−
−
−
−
−
−
−
−
−
−
−
417.5
L4
−
−
−
−
−
−
−
−
−
−
−
−
−
L5
−
−
−
−
−
−
−
−
−
−
−
−
417.5
n
0
0
0
0
0
0
0
0
0
0
0
0
1
ML
770
820
920
1020
1140
1240
1340
1440
1540
1640
1740
1840
2040
L1
908
958
1058
1158
1278
1378
1478
1578
1678
1778
1878
1978
2178
L2
885
935
1035
1135
1255
1355
1455
1555
1655
1755
1855
1955
2155
L3
442.5
467.5
517.5
567.5
627.5
677.5
727.5
520
550
585
620
650
720
L4
−
−
−
−
−
−
−
520
550
585
620
650
720
0.1
MG
57.9
L2
185
235
285
335
385
435
485
535
585
635
685
735
835
31.8
25.1
L3
−
−
−
−
−
−
−
−
−
−
−
−
417.5
L4
−
−
−
−
−
−
−
−
−
−
−
−
−
L5
−
−
−
−
−
−
−
−
−
−
−
−
417.5
n
0
0
0
0
0
0
0
0
0
0
0
0
1
L1
908
958
1058
1158
1278
1378
1478
1578
1678
1778
1878
1978
2178
L2
885
935
1035
1135
1255
1355
1455
1555
1655
1755
1855
1955
2155
L3
442.5
467.5
517.5
567.5
627.5
677.5
727.5
520
550
585
620
650
720
L4
−
−
−
−
−
−
−
520
550
585
620
650
720
23.5
28.7
0.1
MG
MG
1±0.3
31.8
17.6
0±0.2
1.6
Hole for air purge
(M5 : Both end)
13.5
0.05
C
C 0.5
0.
5
3.5
Unit : mm
0.1
9
17.6
18
11.5
30
15
73
131
MAGNESCALE
SR7#
Hexagonal
sinkhole depth 5
56
2 – ø10 ø15 Sinkhole depth 9
(Mounting screws M8×16)
L5
442.5
467.5
517.5
567.5
627.5
677.5
727.5
515
555
585
615
655
715
L3
131
ML
L4
L4
n × ø4.5
(Mounting screw M4 × 10)
(ML)
L2=ML+115
L1=ML+138
n × ø4.5
(Mounting screw M4×10)
2 - ø4.5 × 8.5
(Mounting screws M4 × 20)
n × Intermediate
foot plate
Unit : mm
n
1
1
1
1
1
1
1
2
2
2
2
2
2
ML
2 – ø4.5×8.5
(Mounting screws M4×20)
(ML)
L2=ML+115
L1=ML+138
L5
L5
(65)
(81.5)
(25)
Cable Direction Left
* Intermediate foot plate: Installed in one location when ML > 720 mm and two locations when ML > 1440 mm
ML
770
820
920
1020
1140
1240
1340
1440
1540
1640
1740
1840
2040
16.5
12
Hexagonal
sinkhole depth 5
56
MAGNESCALE
SR7#
n × Intermediate
foot plate
Unit : mm
n
1
1
1
1
1
1
1
2
2
2
2
2
2
Dimensions SR74/75
Cable Direction Right
ML : Measuring length CL : Cable length MG: Machine guide
L1
208
258
308
358
408
458
508
558
608
658
708
758
858
1±0.3
ML
70
120
170
220
270
320
370
420
470
520
570
620
720
MG
13.5
17.6
Hole for air purge
(M5 : Both end)
0±0.2
1.6
3.5
0.05
C
C 0.5
0.
5
56.5
L3
L5
442.5
467.5
517.5
567.5
627.5
677.5
727.5
515
555
585
615
655
715
7.5
Unit : mm
0.1
9
17.6
11.5
2 – ø10 ø15 Sinkhole depth 9
(Mounting screws M8×16)
* Intermediate foot plate: Installed in one location when ML > 720 mm and two locations when ML > 1440 mm
ML : Measuring length CL : Cable length MG: Machine guide
ML
70
120
170
220
270
320
370
420
470
520
570
620
720
Dimensions SR74/75
7.5
28.7
23.5
25.1
57.9
37
9.5
SL331 PL60
• Magnetic principle
• Excellent resistance to workshop conditions (IP65).
Resistant to oil, dirt, vibrations and shocks. Read head resistant to external magnetic field.
• Accuracy: (15 + 5L/ 1000) μm (L=measuring length in mm)
• Resolution: SL331 with PL60 5 μm,10 μm
• High response speed: 250 m/min with a resolution of 5 μm
• Measuring lengths of up to 8 m / 314.9" • Easy installation
• Automatic position control for layout machines and other dedicated machines
SL331
SL331
PL60
Scale
Headcable
Cable
Interpolator
SL110/130
PL25
CE08 CK-T12/13/14/15/16
MJ100/110
Interpolator
CE08 CK-T12/13/14/15/16
MJ100/110
Headcable
Counter
PL20C
LH71A/72 LY71/72
Dimensions
Dimensions
PL60
2-5/0.197 x 7.5/0.295 mounting hole
29.5/1.16
SL110
4.1/0.161 x 6/0.236 oval
N x 300/ 11.81
P1
Measuring length (L)
13/0.51
51.5/ 2.03
(4/0.16)
59/2.32
SL130
10.5/0.41
35.5/1.4
13/0.51
8.2/0.32
(ø4.5/0.17)
15/0.59
35/1.38
49.5/1.95
Clamp
(included)
51.5/2.03
Measuring length (L)
50/ 1.97
50/ 1.97
(4/0.16)
9/ 0.35
Model name
Overall length : L + 103/ 4.06
3000/118˝
12/0.47
0.9/0.04
(4/0.16)
(4/0.16)
63/2.45
26.4/1.04
10/0.39
(1.3/0.05)
6.9/0.27
50/1.97
9/0.35
Measuring length (L)
45/ 1.77
35/ 1.38
24.4/ 0.96
L + 100/3.94
50/1.97
SL110
10.5/ 0.41
SL331
SL130
Example for connection
Unit : mm/inch
Model name
(4/0.16)
Effective length
Movable length
Overall length
SL130-20
200
230
300
SL130-30
300
330
400
SL130-40
400
430
500
SL130-50
500
530
600
SL130-60
600
630
700
SL130-70
700
730
800
Effective length
N
P1
Number of Clamps
SL130-80
800
830
900
SL110-20
200
0
200
4
SL130-100
1000
1030
1100
SL110-30
300
1
0
4
SL130-120
1200
1230
1300
SL110-40
400
1
100
6
SL130-150
1500
1530
1600
SL110-50
500
1
200
6
SL130-160
1600
1630
1700
SL110-60
600
2
0
6
SL130-170
1700
1730
1800
(15 + 5L/1000) μm
SL110-70
700
2
100
8
SL130-180
1800
1830
1900
5 μm
SL110-80
800
2
200
8
SL130-200
2000
2030
2100
Max. response speed
Varies with the resolution
SL110-100
1000
3
100
10
SL130-250
2500
2530
2600
Expansion coefficient
(10.4 ± 1) + 10-6/ ˚C
SL110-120
1200
4
0
10
SL130-300
3000
3030
3100
Operating temperature
-5 ˚C to 45 ˚C / 23 ˚F to 113 ˚F
SL110-150
1500
5
0
12
SL130-400
4000
4030
4100
Storage temperature
-10 ˚C to 50 ˚C / 14 ˚F to 122 ˚F
SL110-160
1600
5
100
14
SL130-500
5000
5030
5100
SL110-170
1700
5
200
14
SL130-600
6000
6030
6100
SL110-180
1800
6
0
14
SL130-700
7000
7030
7100
SL110-200
2000
6
200
16
SL130-800
8000
8030
8100
SL331 Specifications
SL331-20 to SL331-800
Model
200/300/400/500/600/700/800/1000/1200/1500/1600/1700/1800/2000/2500/3000/4000/5000/6000/7000/8000
(7.8/11.8/15.7/19.6/23.6/27.5/31.4/39.3/47.2/59.0/62.9/66.9/70.8/78.7/98.4/118.1/157.4/196.8/236.2/275.5/314.9)
Effective length L mm (inch)
Overall length
L +100 mm/ 3.9"
Accuracy (20 ˚C /68 ˚F)
Resolution
PL60
Compatible read head
Response speed of PL60
PL60-3
Model
Head clearance
Max.0.8 mm/ 0.031" (no contact)
Protective design grade
Equivalent to IP65
Operating temperature
-5 ˚C to 45 ˚C / 23 ˚F to 113 ˚F
Storage temperature
-10 ˚C to 50 ˚C / 14 ˚F to 122 ˚F
Read head cable length
3 m/ 9.8'
Compatible scale
SL331
Compatible interpolator
MJ100/ 110
Extension cable (option)
CE08-01…1m,CE08-03…3m,CE08-05…5m, CE08-10…10m,CE08-15…15m
*Cable length of more than 15m,Please consalt our sales.
1000
Unit : mm/inch
SL110/130 Specifications
SL110
SL130
Model
Response speed (m/min)
PL60 Specifications
(1.3)/(0.05)
10/ 0.39
Cable
of machines from wood working to metal cutting.
PL60
Head
• Magnetic principle
• Excellent resistance to workshop conditions (PL20C equivalent to IP65).
Resistant to oil, dirt, vibration, and shock.
Resolution:
10 μm
•
• Max. response speed: 300 m/ min (varies with the read head and settings).
• Available in lengths up to 30 m (SL130)
• High cost efficiency. Easy installation on all types
Example for connection
Scale
SL110/SL130
SL
9/ 0.35
SL
10μm
Resolution
50μm
Effective length
L mm (inch)
100
Overall length
-20 to -200
-20 to -700
-800 to -3000
200/300/400/500/600/700/800/1000/1200/
1500/1600/1700/1800/2000
(7.8/11.8/15.7/19.6/23.6/27.5/31.4/39.3/47.2/
59.0/62.9/66.9/70.8/78.7)
200/300/400/500/600/700/800/1000/1200/
1500/1600/1700/1800/2000/2500/3000/
4000/5000/6000/7000
(7.8/11.8/15.7/19.6/23.6/27.5/31.4/39.3/
47.2/59.0/62.9/66.9/70.8/78.7/98.4/118.1/
157.4/196.8/236.2/275.5)
8000/9000/10000/20000/30000
(314.9/354.3/393.7/787.4/1181.1)
L+103 mm/ 4.1"
Accuracy
(20 ˚C /68 ˚F)
5μm
Resolution
10
Max. response speed
Expansion coefficient
1
0.1
1
10
Phase difference (μs)
100
L+100 mm/ 3.9"
(50 + 10L/ 1000 + 20N) μm L : Measuring length(mm)
N=1when L=8000/9000/10000 ,
N=2 when L=20000 , N=3 when L=30000
(50 + 10L/ 1000) μm
10 μm
300 m/ min
(10.4 ± 1) x 10-6/ ˚C
Operating temperature
-5 ˚C to 45 ˚C / 23 ˚F to 113 ˚F
Storage temperature
-10 ˚C to 50 ˚C / 14 ˚F to 122 ˚F
Compatible read head
PL20B/ 25
Compatible read
head and Interpolator
PL81/ 82 Series
*Accuracy shows the value when used with PL20B/25 read head and PL81/82.
38
39
PL20C/PL25
PL
• Output signal: AB quadrature signal, compilant with EIA-422
• Resolution: 10 μm
• Max. response speed: 300 m/min (varies with the read head and settings).
• Excellent resistance to workshop conditions (IP65).
• Resistant to oil, dirt, vibration, and shock.
PL81/PL82
PL
• Compact design
• Interpolator unit for automated position control
• High response speed: 300 m/mim
• Resolution: 10 μm, 20 μm, 25 μm, 50 μm, 100 μm
PL20C
Example for connection
Scale
Headcable
Cable
Interpolator
SL110/130
PL25
CE08 CK-T12/13/14/15/16
MJ100/110
Headcable
Counter
PL20C
LH71A/72 LY71/72
Example for connection
PL25
Scale
Headcable
SL110/130
PL81/82
Dimensions
Dimensions
PL20C-**C(Metal armar added)
PL25
2-M5 Tap (Mounting holes)
2−φ5x7.5 Mouting hole
30 +10
0
30±2
30±2
35.5
40±5
63
2-φ5×7.5 mounting hole
28
(31)
80/3.15
135/5.31
3.4/0.13
(2/0.08)
20
φ6.9
7
20/0.79
2/0.08
2-M3 (Mounting holes)
(7)
(33/1.30)
3.5/0.14
Unit : mm/inch
12/0.47
26/1.02
28/1.10
PL20C-**
2−φ5x7.5 Mouting hole
35
8.2
59
Cable length
(4)
(17)
(91)
(17.7)
(26/1.02)
22/0.87
(86.5)
18.5/0.73
(38)
(36)
φ4
6.9
15
26.4
1
63
29.5
45/1.77
13
Cable length 3000
12
2−M3 Depth3
13
(4)
59
28
(91)
11/0.43
6.9
0.9
29.5
(17.7)
8.2
10/0.39 25/0.98
(86.5)
35
(ø5/ø0.2)
Cable length
(17)
(φ4.5)
(38)
(4)
7.5
(36)
59
6.9
8.2
φ4
15
φ9
26.4
1
35
29.5
12
26.4
15
63
Cable length
49.5
27/1.06
2−M3 Depth3
20
7
12
28
(31)
(7)
Unit : mm/inch
Specifications
Model
Read head cable length
Specifications
PL20C
-3
-5
-A
-B
3 m/9.8'
5 m/16.4'
10 m/32.8'
15 m/49.2'
20 m/65.6'
Max. 1.5 mm/ 0.059" (no contact)
Scale-Read head clearance
Protective design grade
-C
Equivalent to IP67
-D
PL25
-3
30 m/98.4'
3 m/9.8'
Model
Cable length (inch)
Mass (g)
Equivalent to IP65
Operating temperature
-5 ˚C to 45 ˚C / 23 ˚F to 113 ˚F
Accuracy
(20 ˚C / 68 ˚F)
Storage temperature
-10 ˚C to 50 ˚C / 14 ˚F to 122 ˚F
Resolution
SL110 and SL130
Compatible scale
Compatible Interpolator
Compatible displays
Extension cable (option)
—
MJ100/110
—
0.7 to 1.1N • m
*For cable lengths greater than 15 meters, please contact our sales office.
—
Output circuit
PL81
-7
-A
-B
-3
-5
PL82
-7
-A
-B
3m (118.1)
5m (196.9)
7m (275.6)
10m (393.7)
15m (590.6)
3m (118.1)
5m (196.9)
7m (275.6)
10m (393.7)
15m (590.6)
640
720
800
910
1050
640
720
800
910
1050
(50 + 10L/ 1000) μm
10, 20, 25, 50, 100 μm
Open Collector Max.rated voltage:40 V
Max.rated current:100 mA
Power consumption
Protective design grade
Storage temperature
AB phase signal by line driver
(compliance EIA-422)
300 m/ min
Max. 1.5 mm (0.059)
Clearance (inch)
Power supply
(L: measuring length in mm)
(Varies with scale SL 110/130)
LED turns orange. (green for normal operation)
Max. response speed
CE08-01…1m,CE08-03…3m,
CE08-05…5m,CE08-10…10m,
CE08-15…15m
Operating temperature
40
-5
Alarm display
LH and LY
Head mtg. screw tightening torque
-3
DC 10 ~ 30 V
DC 5 V ± 5 %
Max. 70 mA (2.1 W)
Max. 300 mA (1.5 W)
Equivalent to IP67 (exclude head cable)
0 ˚C to 45 ˚C / 32 ˚F to 113 ˚F
-20 ˚C to 50 ˚C / -4 ˚F to 122 ˚F
41
SL700 Series
SL
• Compact ribbon type scale for easy mounting in cramped spaces
• Non-contact detection
• Magnetic detection system with excellent resistance to dust, oil, vibrations and shocks.
• Effective length from 50 mm to 100,000 mm
• Detects linear displacement and produces analog or AB quadrature
signal output when connected to PL101 head and MJ500/600/620 Series
interpolator (both sold separately).
Three types are available with different reference point specifications.
•
when connected to the SL700 Series. Produces AB quadrature signal
when connected to MJ500/600 Series interpolator
A wide range of models is available so you can select the best model for
your specific application.
Example for connection
Scale
Head
Cable
Interpolator
Scale
Head
Cable
Interpolator
SL700
PL101
CE08
MJ500/600/620/700 MJ820/821 MJ830/831
SL700
PL101
CE08
MJ500/600/620/700 MJ820/821 MJ830/831
Dimensions
PL101-RH (IP67 Type)
PL101-N/PL101-R (IP50 Type)
[Interpolator]
One reference point
2,000<ML≦12,000
320 mm
12,000<ML≦56,000
480 mm
56,000<ML≦100,000
Unit : mm/inch
1Vp-p
!!
Multi reference point
10,5,1μm
Reference mark
Roll*
N
L:m
N
L:m
N
L:m
N
3<ML≦5.5
1
28<ML≦30.5
11
53<ML≦55.5
21
78<ML≦80.5
31
5.5<ML≦8
2
30.5<ML≦33
12
55.5<ML≦58
22
80.5<ML≦83
32
2 x 2-M3 Depth 5/0.197
Effective length (L)*
Overall length
Accuracy (20 ˚C)
8<ML≦10.5
3
33<ML≦35.5
13
58<ML≦60.5
23
83<ML≦85.5
33
Specifications
10.5<ML≦13
4
35.5<ML≦38
14
60.5<ML≦63
24
85.5<ML≦88
34
13<ML≦15.5
5
38<ML≦40.5
15
63<ML≦65.5
25
88<ML≦90.5
35
Model
Protective grade
15.5<ML≦18
6
40.5<ML≦43
16
65.5<ML≦68
26
90.5<ML≦93
36
Reference point detection function
18<ML≦20.5
7
43<ML≦45.5
17
68<ML≦70.5
27
93<ML≦95.5
37
Resolution
(Connected to MJ500 and MJ600/620)
20.5<ML≦23
8
45.5<ML≦48
18
70.5<ML≦73
28
95.5<ML≦98
38
23<ML≦25.5
9
48<ML≦50.5
19
73<ML≦75.5
29
98<ML≦100
39
25.5<ML≦28
10
50.5<ML≦53
20
75.5<ML≦78
30
PL101-N
PL101-R
Equivalent to IP67 (exclude Connecter)
Not Included
Included
1, 2, 5 or 10 μm (MJ620), 1 μm (MJ600), 2 or 10 μm (MJ500)
Accuracy (20 ˚C)
± 10 μm (when combined with the SL700)
Clearance*
0.35 ± 0.1 mm
Offset
SL700
SL710
SL720
SL730
No reference point
One point
(Specify the position when
ordering) (1 mm unit)
Multi point
60mm pitch from
left effective length end
Reference mark
(Refer to figure below)
-
± 1 mm
± 1 mm
Pitch accuracy ± 7 μm
± 1 mm
Pitch accuracy ± 7 μm
100 to 100,000 mm
200 to 100,000 mm
50 to 100,000 mm
± 0.2 mm
Pitch*
± 0.1˚
Yaw*
± 0.2˚
± 0.2˚
1 Vp-p Analog output
Differential output
Wi
Sin, Cos
Vi
Vo
0V
Output signal
– Sin,– Cos
0V
Vo
Vi
Vr
Wi
Wr
Vo
Wr
L+40mm
Vr
Z,– Z
Vo
± 10L μm (L≦3m) ± (10L+2.5N) μm (L >3m) *In combination with PL101 series
*L Measuring length *Refer separate table
800μm
Power supply voltage
DC 5V ± 5%
Power consumption
Max. 150 mA (0.8W)
0 to 45 ˚C / 32˚F to 113˚F
Storage temperature
-20 to 50 ˚C / -4˚F to 122˚F
Standard compliance
EMI:EN55011 Group 1 Class A
EMS:EN50082-2
FCC Part 15 Subpart B Class A
ICES-003 CLASS A DIGITAL DEVICE
*L≦1,000mm:50mm pitch 1,100≦L≦3,000mm:100mm pitch 3,500≦L≦10,000mm:500mm pitch 11,000≦L:1,000mm pitch
Vp-p
Vp-p
μm
μm
V
Min.
0.30
0.20
–
200
–
Typ.
0.52
0.68
800
800
2.5
Max.
0.70
1.00
–
1400
–
0V
15 g/m
(14 ± 1) x 10-6 / ˚C (Scale unit)
PL101-RH
Equivalent to IP50
Single mass
Operating temperature
Center mark
Unit : mm/inch
Reproduced wave length
Linear expansion coefficient
w*
43.5/1.71
Specifications
Reference point
position accuracy
Roll*
2 x 2-M3 Depth 5/0.197
Center mark
Roll*
Reference point
Pitch*
43.5/1.71
L:m
Attitude
change
Model
Ya
w*
Ya
Pitch*
6/0.24
160 mm
1.5/0.05
Cable length:
300 mm/11.8''
48/
1.89
800μm
No reference point
[Output]
11.5/ Cable length:
0.45 3000 mm/118''
48/
1.89
200<ML≦2,000
(20)/
(0.79)
Effective length (ML)
Overall length = Effective length + 40/1.57
Effective length (mm)
80 mm
The relation of Effective length (L) and factor N
[Reader head]
20/0.79
12/0.47
Reference mark pitch(p)
*Scale thickness 0.3 mm max. (Include double stick tape)
*Mount the scale on the non-magnetic material. When mounting on a magnetic material,
insert a non-magnetic layer with a thickness of at least 3mm.
[Scale]
(20)/
(0.79)
Effective length (ML)
Overall length = Effective length + 40/1.57
Overall length = Effective length + 40/1.57
Configurations
12 ± 0.2/
0.47 ± 0.008
20/0.79
(20)/
0.79
0.15/0.006
Effective length (ML)
P+0.8
P
6/0.24
ML-P x (n-1) <
= 200/7.87
P+0.8
P
Clearance*
P x (n-1)
P+0.8
P
0.15/0.006
20/0.79
P/2+0.8
25/
0.98
12 ± 0.2/
0.47 ± 0.008
SL700
< 200/7.87
P=
9/
0.35
25/
0.98
Effctive length
25/
0.98
9/
0.35
Overall length
20
12/0.47
9/0.35
n-ø D reamer hole
(For ø D parallel pin)
Offset*
Reference point
Offset*
Reference mark
12 ± 0.2/
0.47 ± 0.008
Dimensions
D/2
• Non-contact detection
• Magnetic detection system for excellent resistance to dust, oil, vibrations
and shocks.
• Detects linear position and displacement and produces analog signal output
Example for connection
42
Clearance*
•
PL101 Series
PL
Max. response speed
Cable length
Mass
6.4 m/s
300 mm
3000 mm
60 g /2.12oz
150 g / 5.29oz
Operating temperature
0 to 45 ˚C / 32F˚ to 113˚ F
Storage temperature
Standard compliance
Extension cable (Option)
-20 to 50 ˚C / -4˚F to 122˚ F
EMI: EN55011 Group 1 Class A EMS: EN50082-2 FCC Part 15 Subpart B Class A ICES-003 CLASS A DIGITAL DEVICE
CK-T12 … 1 m CK-T13 … 3 m CK-T14 … 5 m CK-T15 … 10 m CK-T16 … 15 m (By extension cable, it can be extended up to Max 10 m)
*Refer to Dimensions drawings below. *Cable length of more than 15m,Please consalt our sales.
43
Digital Scales
Rotary scale
RU77
RS310
44
45
RU77
Specifications
Model
High precision absolute
rotary type with excellent
resistance to environments.
RU77-4096AXX
Output signal
Absolute serial (2/4 duplex: Compliant with EIA-422)
Detection system
Magnetic system (MR sensor)
System accuracy (at 20 ˚C)
±2.5"
Resolution
Approx.2.5°/1,000 - Approx.1°/10,000 (131,072pulse/rotation - 33,554,432pulse/rotation)
Output wavelength
40 mm (λ)
Output wave number
4,096 waves/rotation
Number of divisions
4,096
Electrical allowable revolution
2,000min-1
Mechanical allowable revolution
3,000min-1
Operating temperature range
0 ~ +60 ˚C
-10 ~ +60 ˚C
Storage temperature range
150m/s2(50Hz ~ 2,000Hz)
Vibration resistance
1,000m/s2(11ms)
Shock resistance
IP65
Protective design grade
DC 4.75 - 5.25 V (At cable connection end)
Power supply voltage
200mA (at 120 Ω terminal) or less
Current consumption
2 A max. (When the power supply rising time is 10 ms)
Inrush current
In the case of errors such as a reverse-connected power supply or over-voltage,
Power supply protection
the internal fuse is cut to protect the power being supplied and wiring.
FCC Part15 Subpart B Class A, ICES-003 Class A Digital Device and EN55011 Gp1 Class A, EN61000-6-2.
Safety standards
Safety standards not applicable (60 V DC or less)
ø110 x 42mm
Dimensions
Standard 1 m (maximum length of 15 m with extension cables)
Cable length
Male, round waterproof connector NJB1DB 10PL2 by Japan Aviation Electronics Industry
Output connector
Female, round waterproof connector NJB1HB 10SL2 by Japan Aviation Electronics Industry
Compliant connector
• System accuracy : ± 2.5sec
• Output wave number :
Moment of inertia
9.4 x 10-5 kgm2
Starting torque (at 20 ˚C)
0.1 N.m or less
Approx.1.3kg
Mass
ø30H6
Dimensions RU77
2 = 4,096
12
4 x M3, depth:5
• Low-profile shape : 42mm
30
40
42
10
4 x mounting hole for M4
(when installing from top)
ø35
ø20H6
ø85f7
3±0.05
225 = 33,554,432 p.p.r.
4-M6
(when installing
Air injection hole (M5) from bottom)
33±0.1
ø110
?9
2
• Output pulse number :
ø100
4 x ø3.3 ±0.1, depth:7
• Protocol : FANUC,Mitsubishi, YASKAWA
+100
0
Cable length 1000
17
44
Rotary
type
Maximum
resolution
25 bit
10˚
ø18
ABS
ø5.6
Reference mark
Unit : mm
Details of model designation
RU77-4096A
NC Manufacturer
FANUC
Protocol
Resolution
Resolution and Polarity
46
2.5˚/1,000
1˚/1,000
7˚/10,000
3.5˚/10,000
2˚/10,000
1˚/10,000
4.5˚/100,000
2˚/100,000
1˚/100,000
Pulse number/ Number of
Revolution
partitions
131,072
1/32
262,144
1/64
524,288
1/128
1,048,576
1/256
2,097,152
1/512
4,194,304
1/1024
8,388,608
1/2048
16,777,216
1/4096
33,554,432
1/8192
Type
Mitsubishi
A
B
C
D
E
F
G
H
J
YASKAWA
Wire
4
2
4
2
A
B
D
F
Note:YASKAWA controler is only D
*Polarity is CCW
47
RS310
RS
• Magnetic principle
• Excellent resistance to workshop conditions.
Resistant to oil, dirt and vibrations.
• Thin design
• Directly mountable onto a machine's rotary shaft. Large-diameter
scale drum that can be used for large-sized machines such as turning centers.
• Easy installation
• Noncontact. Clearance: 0.1 mm/ 0.004''
Example for connection
Scale
Cable
Interpolator
RS310
AK2-C
MD20B
Dimensions
System configuration
6-6 Holes (by 6mm drill) EQ SP
Rotation drive mechanism
6-M5 Holes EQ SP
NC controller
MAGNESWITCH external zero point (option)
±0.2
ø202
Detecting head
ø1
45˚
35
ø2
32
Guide plate
(Renove after mounting head assy)
RS310
MD20B Interpolator (optional)
25
4-M4 Depth8
4-M4 HSB
26
13
Interpolators
Head cable length
300
20
4-M3 HSB
40
ø183.2
Magnet coated surface
Head assy
3
13
19
ø144
ø121
Unit : mm
Specifications
Model
No. of reader heads
No. of recorded waves
Recorded wave length
RS310-1800A
1800
1
/ revolution
0.32 mm
Resolution
0.001˚
Clearance
100 to110 μm (recommended)
Cumulative pitch accuracy *1
Interpolation accuracy
Allowable scale drum runout
Allowable head mounting face flatness
Allowable residual machine magnetism
Max. mechanical revolutions
Dimensions
Scale drum
Mounting pitch dia
Mass
Moment of inertia
Diameter excl. cable guide
Operating temperature
Storage temperature
Reader heads
Mass
Cable length
7.2''
3.6''*2
Keep to min. at installation*1
5 μm or less (No burs or unevennesses)
0.25 mT
7000 min-1
ø 183.4 x ø 121 x 16 mm (ø 7.23'' x ø 4.77'' x 0.63'') (Outer dia . x inner dia. x thickness)
ø 132 mm/ 5.20"
Approx. 1.6 kg/ 3.53 lbs
1.12 x 10-2 kg m2
Max. approx. ø 235 mm/ 9.26"
0 ˚C to 40 ˚C/ 32 ˚F to 104 ˚F
-10 ˚C to 50 ˚C/ 14 ˚F to 122 ˚F
Approx. 0.12 kg/ 0.26 lbs
300 mm/ 11.8"
*1 RS310-1800A Cumulative pitch error will be less than 7.2" with circumference eccentricity of 3 μm More eccentricity, Add 2.3"/1μm
RS310-1800B Cumulative pitch error will be less than 7.2" with circumference eccentricity of 30 μm. Total accuracy is sum of cumulative pitch error and interpolation error
*2 3.6" interpolation error for 1.5% of PM signal ripple
MJ100/110
MJ620
MJ820/821
MJ830/831
48
49
MJ100/110
MJ
MJ
High response speed interpolator unit
for position control
• Capable of 40 to 1000 divisions
• Produces AB quadrature signals with a resolution from 2 μm to 125 μm, when used in combination
Compact one-axis module with analog input port
• Divides analog input signal into 32 to 800 divisions.
• Produces AB quadrature signal output from the differential line
with the optionally available Digiruler® PL25 head unit and the SL110/130 scale unit (scale signal
wavelength: 5 mm), or with the PL60 and the SL331 scale unit (scale signal wavelength: 2 mm).
MJ100: Supply voltage 5 V input, Line driver (EIA-422 compliance) output
MJ110: Supply voltage 12 to 30 V input, Open collector (lOL=50 mA) output
MJ100 also generates U/ V/ W phase output with a period of
reproduced Digiruler® signal (5 mm with PL25; 2 mm with PL60)
driver when combined with SL700 series scale and PL101 series head
cable (both sold separately).
Example for connection
Example for connection
Scale
Head
Cable
Interpolator
Scale
Head
Cable
Interpolator
SL331
PL60
CE08 CK-T12/13/14/15/16
MJ100/110
SL700
PL101
CE08 CK-T12/13/14/15/16
MJ620
HONDA:PCR-E20LMD
1 2 3 4 5 6 7 8 9 10
SL110/130
OFF
PL25
MJ100
Z
U
ABS
OFF OFF
V
ON OFF
W
ON ON
ALM
15/0.59
OFF ON
LEVEL
SPEED
MJ100
Z
13.5/0.53
(3.5/0.13)
A
B
4.5/0.18
2/0.07
(4/0.15)
8/0.31
11.1/0.43
Area appropriated for board
and mount parts
5/0.19
13.2/
0.519
100/3.93
(104/4.09)
120/4.72
U
4-ø3.5/ø0.13 Mounting holes
SL331
PL60
MJ110
When MODE switch 4 and 5 are off
Sensor input connector
Unit : mm/inch
4.5/0.17
124/4.88
138/5.43
110/4.33
(115/4.53)
10
9
8
7
6
5
4
3
2
1
33.4/1.31
SIN
MODE
ON
21/0.82
8/0.31
9.6/0.37
1.6/0.06
93.5/3.68
90/3.54
65/2.55
1/0.03
17/0.66
62.5/2.46
4/0.15
110/4.33
11/0.43
HOSHIDEN:TC6180-1010
Specifications
Model
Power supply
Power consumption
Output interface
Outputs
Number of divisions
Maximum
response
frequency
Unit : mm/inch
MJ100
MJ110
5 V (4.5 V to 6 V)
12 V to 30 V (11 V to 31 V)
4W
3W
Line driver (EIA-422 compliance)
Open collector (IOL = 50 mA max.)
AB quadrature, Z phase, U/V/W phases, alarms
AB quadrature, Z phase, alarms
Model
Power supply voltage
1000,960,800,512,500,480,400,256,240,200,128,120,100,80,64,40
and 1/2 of each of these (which does not satisfy the synchronized reference point specifications.)
6 KHz (1800 m/min when connected to PL25; 720 m/min when connected to PL60)
600 KHz (180 m/min when connected to PL25; 72 m/min when connected to PL60) *1
500 divisions
15 KHz (4500 m/min when connected to PL25; 1800 m/min when connected to PL60)
1.5 KHz (450 m/min when connected to PL25; 180 m/min when connected to PL60) *1
200 divisions
42 KHz (12600 m/min when connected to PL25; 5000 m/min when connected to PL60)
4.0 KHz (1200 m/min when connected to PL25; 480 m/min when connected to PL60) *1
70 KHz (21000 m/min when connected to PL25; 8400 m/min when connected to PL60)
PL60)*1
120 divisions
Alarms *2
7.4 KHz (2220 m/min when connected to PL25; 888 m/min when connected to
1μs
100 ns
Within 0.5 seconds after the power comes on line
External dimensions
138 x 93 x 26 (mm) / 5.43" x 3.66" x 1.02" including protrusions
Compatible head unit
PL25 or PL60
Operating temperature
0 ˚C to +45 ˚C / 32 ˚F to 113 ˚F
Storage temperature
-20 ˚C to +60 ˚C / -4 ˚F to 140 ˚F
Mass
Supplied accessories
Power consumption
Output interface
Output
Number of division
Speed alarm (minimum phase difference time or maximum response frequency);
Level alarm (0.4 Vp-p or less); Minimum alarm time: approximately 400 ms
System startup time
Options
Specifications
1000 divisions
Minimum phase difference
ø4.5/ø0.17
(5.4/0.21)
(1.5/0.05)
COS
23/0.90
Head cable unit
MZ5(Option)
Output connector
22.5/0.88
3/0.12
MJ620
4.5/0.17
The following diagrams show
the MJ100’s scale input signal phases with
respect to the output signal phases
26/1.02
ø4.5/ø0.17
Interpolator
7.5/0.29 7.5/0.29
48/1.88
55/2.16
59/2.32
1/0.03
ø13/ø0.51
Scale unit
(13/0.51) 13/0.51
2/0.07
26/1.02
93/3.66
Dimensions
(3.5/0.13)
Phase Relation between
MJ100 Input Signals, U/V/W
Phases and AB Phases
System Configuration
3.5/0.13
2/0.07
Dimensions
11/0.43
37/1.45
•
•
•
MJ620
SET-P16-1 (for external reference point) Scale extension cable, external reference point extension cable
Output connector with cable
*1: These valuse for a minimum phase difference of 1 μs may vary depending on the output cable length.
*2: The alarm function may not operate when an abnormal offset is generated due to a broken wire, etc.
*Contact us directly if you have special requirements for the specifications.
2.2 W (with PL101)
Line driver (EIA-422 compliance)
AB quadrature, Z, Alarm
800,400,160,80,40,32
(Correspond to resolution 1,2,5,10,20,25 μm)
And 1/2 of this (But concurrent reference point not satisfied)
6.4 m/s (with phase difference of 100 ns and resolution of 1 μm)
Max. response speed
16 m/s (with phase difference of 100 ns and resolution of 2 μm)
36.8 m/s(with phase difference of 100 ns and resolution of 5 μm)
56 m/s (with phase difference of 100 ns and resolution of 10 μm)
Min. phase difference
Input level
350g/ 0.77Ibs
Manual, output connector, connector cap, mounting screws
MJ620
5 V (4.5 to 6 V)
Alarm
100 ns
SIN. COS signal 0.6 Vp-p to 1.2 Vp-p at 120 Ω load
Reference signal 0.2 V to 1.5 V at 120 Ω load
Speed alarm (min. phase difference time or max. response frequency), Level alarm (0.6 Vp-p or less), Min. alarm time about 400 ms
NOTE: Alarm may not work due to abnomal offset occurred by breakage etc.
System starting up time
0.5s or less after powering up
Operating temperature
0 ˚C to +45 ˚C / 32 ˚F to 114 ˚F
Storage temperature
Mass
-20 ˚C to +60 ˚C / -4 ˚F to 140 ˚F
60 g/ 2.12 oz
Options
MZ2: Output connector
MZ5: Metal case for MJ620
*The MJ620 Interpolator meets the "applied standards" stated in the specifications table when fitted with the optional MZ5 metal case (see below).
Make sure that the MJ620 is used with the MZ5 or like case with the same specifications as MZ5.
50
51
MJ820/821
MJ
MJ
! !! MJ830/831
• Connectable to any general analog-output encoder.
Input impedance: 120 Ω 1 Vp-p voltage differential input
• Max. response frequency 140 kHz for any number of divisions selected
• Switch-selectable number of divisions:40,80,100,120,160,200,240,400,
480,500,800,1000,1600,2000,3200,4000
• Compensation: DC offset, gain and phase
• Power supply: DC 5V (4.5 to 5.5 V) for MJ820; DC 12V to 24V (11V to 32V) for MJ821
• Compatible with Sony’s Digital scales SL700 series with PL101
• Connectable to any general analog-output encoder.
Input impedance: 120 Ω 1 Vp-p voltage differential input
• Max. response frequency 140 kHz for any number of divisions selected
• Switch-selectable number of divisions: 40,80,100,120,160,200,240,400,
480,500,800,1000,1600,2000,3200,4000
• Compensation: DC offset, gain and phase
• Power supply: DC 5V (4.5 to 5.5V) for MJ830; DC 12V to 24V (11V to 32V) for MJ831
• Compatible with Sony’s Digital scales SL700 series with PL101
Example for connection
Example for connection
Scale
Head
Cable
Interpolator
Scale
Head
Cable
Interpolator
SL700
PL101
CE08 CK-T12/13/14/15/16
MJ820/821
SL700
PL101
CE08 CK-T12/13/14/15/16
MJ830/831
Dimensions
26/1.02
93/3.66
1/0.04
ø4.5/ø0.18
Mounting hole
SL700
93/3.66
ø4.5/ø0.18
Mounting hole
1/0.04
3
/0.12
7/0.28
3
/0.12
7/0.28
ø4.5/ø0.18
Mounting hole
(13) 13
/(0.51) /0.51
(13)
13
/(0.51) /0.51
26/1.02
PL101
(13) 13
/0.51 /0.51
SL700
3/0.12
7/0.28
26/1.02
93/3.66
System configuration
PL101
MJ821
MJ820
1/0.04
Dimensions
System configuration
MODE
MODE
MODE
6
6
5
7
5
4
6
4
3
3
2
5
2
1
4
OFF
OFF ON
1
ON
OFF
OFF ON
ON
ON
MJ830/831
2
OFF OFF
ON
ON
LEVEL
ALM
LEVEL
ALM
SPEED
SPEED
MJ821
No******
MJ820
No******
MADE IN JAPAN
MADE IN JAPAN
FANUC control unit
Serial
interface
124/4.88
ON
3
ABS
138/5.43
OFF OFF
8
OFF
110/4.33
ABS
ON
9
(115)/(4.53)
OFF
124/4.88
7
7
138/5.43
8
8
110/4.33
(115)/(4.53)
124/4.88
ON
10
MJ820/821
9
9
1
138/5.43
110/4.33
(115)/(4.53)
10
10
ON
OFF
ABS
OFF OFF
ON
OFF
OFF ON
ON
ON
LEVEL
ALM
SPEED
MJ830
No******
Mitsubishi control unit
4.5/0.18
4.5/0.18
Serial
interface
MADE IN JAPAN
4.5/0.18
Unit : mm/inch
Unit : mm/inch
Specifications
Model
Power
Power supply voltage
MJ820
MJ821
DC5 V (DC4.5 to 5.5 V)
Power consumption
Input power supply rise time
Surge current (10ms)
Power supply reverse connection prevention
DC12 to 24V (DC11 to 32 V)
Communication protocol
3W
Power supply voltage
Power consumption
4A or less (with 5 V)
3A or less (with 12 V)
Fuse
Voltage-differential line driver/ receiver complying with EIA-422 (SN75C1167 or equivalent)
Dedicated Fanuc serial interface protocol
Selectable division settings
Maximum response frequency for encoder input
Alarms
Surge current (10ms)
4000,3200,2000,1600,1000,800,500,480,400,240,200,160,120,100,80,40
140 kHz*1
"1" is sent to a designated flag at time of speed alarm and level warning*2 All LEDs flash at the time of compensated data backup error*3
DC5 V (DC4.5 to 5.5 V)
DC12 to 24V (DC11 to 32 V)
3W
100 ms
4A or less (with 5 V)
3A or less (with 12 V)
Fuse
I/F input/ output circuit
Voltage-differential line driver/ receiver complying with EIA-422 (SN75C1167 or equivalent)
Dedicated Mitsubishi Electric Corp. serial interface protocol
Interpolator
Encoder input signal
Selectable division settings
Maximum response frequency for encoder input
1Vp-p (Max.1.2Vp-p) impedance 120 Ω TYP
4000,3200,2000,1600,1000,800,500,480,400,240,200,160,120,100,64,40
140 kHz*1
"1" is sent to a designated flag at time of speed alarm and level warning*2 All LEDs flash at the time of compensated data backup error*3
Operating temperature and humidity range
0 to 55 ˚C (no condensation)
Alarms
Storage temperature and humidity range
-20 to 65 ˚C (20 to 90%RH)
Operating temperature and humidity range
0 to +55 ˚C (no condensation)
380 g / 0.84 lbs
Storage temperature and humidity range
-20 to +65 ˚C (20 to 90%RH)
Mass
Accessories
Power supply plug...1 (MJ821 only) Connector cap...1 Supplement...1 Binding band...1 (MJ821 only)
Ferrite core...1 Mounting screws (4 x 10)...2
Mass
Accessories
*1: 140 kHz applies when sine and cosine signals within a designated range are applied to MJ820/821. Max. response frequency may be lower than 140kHz with change in input signal level or off-set value.
*2: Speed alarm is triggered when max. response speed is exceeded or at the time of erroneous counting due to noise. Level warning is triggered when the sine and cosine signal input level is lower than 0.6 to 0.5Vp-p.
*3: All LEDs light at the next power-on in case, at the time of data compensation, the compensated data was not correctly backed up.
52
MJ831
Communication
Communication protocol
1Vp-p (Max.1.2Vp-p) impedance 120 Ω TYP
MJ830
Input power supply rise time
Power supply reverse connection prevention
Interpolator
Encoder input signal
Model
Power
100 ms
Communication
I/F input/ output circuit
Specifications
380 g / 0.84 lbs
Power supply plug...1 Connector cap...1 Supplement...1 Binding band...1
Ferrite core...1 Mounting screws (4 x 10)...2
*1: 140 kHz applies when sine and cosine signals within a designated range are applied to MJ820/821. Max. response frequency may be lower than 140kHz with change in input signal level or off-set value.
*2: Speed alarm is triggered when max. response speed is exceeded or at the time of erroneous counting due to noise. Level warning is triggered when the sine and cosine signal input level is lower than 0.6 to 0.5Vp-p.
*3: All LEDs light at the next power-on in case, at the time of data compensation, the compensated data was not correctly backed up.
53
List of Adapter Cables
Protocol
Standard
Output
Spread-out end
A quad B signal
Mitsubishi
Connector type on
controller side
Spread-out end
3M 10P
Model: Receptacle:
36210-0100PL
Shell kit: 36310-3200-008
Straight line scale use
ABS and INC serial
(SR80,SR70,RU77 Series)
Provision of grounding wire
Not provided
Provided
Not
provided
_
L
M
A quad B signal
E
_
_
F
Standard
CH33-**○▽
For relaying (JN2DS10SL2-R)
CH33-**○▽ZA
Standard
CH33-**○▽L
Scale-side connector
A: Circular connector
For relaying (JN2DS10SL2-R)
CH33-**○▽LA
Controller-side connector
Standard
CH33-**○▽M
Cable sheath
P: PVC(Polyvinyl chloride)
E: PU(Polyurethane)
For relaying (JN2DS10SL2-R)
CH33-**○▽MA
Standard
CH33-**○▽E/P
For relaying (JN2DS10SL2-R)
CH33-**○▽EA/PA
Standard
CH33-**○▽F/Q
For relaying (JN2DS10SL2-R)
CH33-**○▽FA/QA
Standard
CH33-**○▽H/R
For relaying (JN2DS10SL2-R)
CH33-**○▽HA/RA
Standard
CH33-**○▽J/S
For relaying (JN2DS10SL2-R)
CH33-**○▽JA/SA
Standard
CH33-**○▽G
For relaying (JN2DS10SL2-R)
CH33-**○▽GA
CH33-**○▽※#
Conduit
C: With conduit
(standard)
N: Without conduit
Cable length
Written by flush right
Indication in “m”
Up to 30 m
1m pitch
Note: CH33 for
Yaskawa Electric is
up to a cable length
of 20 m.
Q
H
R
Hirose Electric 20P
Horizontal drawing case
Model: FI40B-20C-CVS5(50)
ABS and INC serial
Rotary scale use
Model
Fanuc
A quad B signal
J
Panasonic,
Yaskawa
ABS and INC serial
Connection cable
for relaying
_
Japan Aviation Electronics 10P
Model: JNIHS10PLS
Cable with its
end spread out
Spread-out end
Spread-out end
Extension
cable
Compatible with
all RU77 models
JAE JB1 (male)
JB1DB 10PL2
Mitsubishi
Electric
ABS serial
Fanuc
ABS serial
YASKAWA
54
Connection connector
on scale side*
P
Honda Tsushin Kogyo 20P
Straight case
Model: PCR-S20-FS+
ABS and INC serial
Contour
ABS serial
Molex 6P
Model: 55100-0670
3M
Receptacle: 36210-0100PL
Shell kit: 36310-3200-008
Honda Tsushin Kogyo
Plug: PCR-S20FS+
Plug case: PCR-LS20LA
Molex 6P
Model: 55100-0670
G
CE28-*** ○#
S
_
K
_
Standard
CH33-**○▽K
_
_
JAE JB1 (female)
JB1HB 10SL2
JAE JB1 (female)
_
_
JAE JB1 (female)
JB1HB 10SL2
CE28-***○J
_
_
JAE JB1 (female)
JB1HB 10SL2
CE28-***○M
_
_
JAE JB1 (female)
JB1HB 10SL2
CE28-***○F
_
_
JAE JB1 (female)
JB1HB 10SL2
CE28-***○G
Scale-side connector
Conduit
C: With conduit
N: Without conduit
Cable length
Written by flush right
Indication in “10 cm”
Up to 14 m
1m pitch
* If the scale-side connection connector for relaying
uses a relaying connector, please use this cable.
* The standard cable is not A quad B signal.
Please consult our local sale office for detail.
55
Connection Cable
for Feedback scale
Safety
[ linear Scale ]
Scale
Head
Interpolator
PL25
CE08-1/3/5/10/15
CK-T12/13/14/15/16
MJ100/110
PL80
-
-
SL331
PL60
CE08-1/3/5/10/15
CK-T12/13/14/15/16
MJ100/110
SL700
PL101
CE08-1/3/5/10/15
CK-T12/13/14/15/16
MJ500/600/620/700
MJ820/821
MJ830/831
SL110/130
DIGIRULER®
Cable
No compromise for high-accuracy products
The total quality control system that operates throughout the
entire design and production process ensures products with
enhanced safety, high quality, and high reliability that match our
customers’ requirements. The company is certified for length
calibration in compliance with the traceability system required by
the “Weights and Measures Act,” and has been granted ISO
9001 certification, which is the international standard for quality
assurance.
[ Rotary Scale ]
Scale
Incremental
Scale
Cable
RS310
KA2-**C
KA2-**C
EK2-**C
**=01:1m,03:3m,05:5m,10:10m,
**=01:1m,03:3m,05:5m,10:10m,
Extension Cable
EK2-**C
Interpolator
MD20B
Our products comply with CE Marking requirements, have acquired UL certifications
and meet other regulations, ensuring safe use the world over.
We have met:
• EMC Directives(CE)
EMI: EN 55011 Group 1 Class A / 91
• FCC regulation
FCC Part 15 Subpart B Class A
EMS: EN 61000-6-2
for Products with built-in AC power supply:
• UL 61010-1
for Products with Laser:
• DHHS Class 1 (21CFR1040.10)
* When using our devices with machines to which the European Machinery Drirective applies, please make sure that the devices when installed on the machines
fulfil the applicable requirements of the Directive.
* Standards or regulations to be complied with may vary by product.
56
57
http://www.mgscale.com
58
59
Safety
No compromise for high-accuracy products
The total quality control system that operates throughout the entire design and
production process ensures products with enhanced safety, high quality, and high
reliability that match our customers’ requirements. The company is certified for length
calibration in compliance with the traceability system required by the “Weights and
Measures Act,” and has been granted ISO 9001 certification, which is the international
standard for quality assurance.
Magnescale Corporation
Our products comply with CE Marking requirements, have acquired UL certifications
and meet other regulations, ensuring safe use the world over.
We have met:
•EMC Directives(CE)
•FCC regulation
EMI: EN 55011 Group 1 Class A / 91
FCC Part 15 Subpart B Class A
EMS: EN 61000-6-2
for Products with built-in AC power supply:
•UL 61010-1
DIGITAL GAUGE
for Products with Laser:
•DHHS Class 1 (21CFR1040.10)
* When using our devices with machines to which the European Machinery Drirective applies, please make sure that the devices when installed on the machines fulfil the applicable requirements of the Directive.
* Standards or regulations to be complied with may vary by product.
Contents
Safety
2
DT512 series
30
Traceability
2
DT12 / 32 series
31
Contents
3
MT12 /13 /14
33
Applications
4
DL-B series
34
Lineup
6
U series
36
International Committee for Weights
System
8
Interface unit
39
and Measures (CIPM)
Gauge
9
Traceability
Traceability Flow Chart (Length)
National Primary
Standards
National Institute of Advanced
Industrial Science and
National
standards
Technology (AIST)
Optical comb
Practical
Standards
40
MG10/20/30 series 42
International Bureau of
DK802 A/Bseries
10
Weights and Measures (BIPM)
DK805 A/Bseries
11
DK812 A/Bseries
12
LT30 series
46
DK10/25 series
13
LT20A series
47
DK50/100 series
14
LT11A series
48
DK155/205
15
LT10A series
49
DK110
16
LY71
50
DE-BR series
20
LY72
51
DG805/DG810 series
22
Technical information 52
DG10/25 series
23
Accessories
53
DG50 /100 /155 / 205 series
24
Connection Cables
54
DG110 series
26
Compatible
55
Magnescale Corporation
National
Secondary
Standards
MG40 series
Iodine saturation absorption stabilized
He-Ne laser at 633nm
Stabilized He-Ne Laser
(633nm)
Counter unit
45
Products
2
3
Applications
Multipoint measurement of turbine blades
Camshaft displacement measurement
Measurement of inner diameter
Measurement of crimp height
Measures the blade shape of aircraft turbine blades.
Measuring the height of camshaft lobes and journals.
Measuring the inner diameter of work.
Measures the calking height of crimp terminal.
Measurement of material strength
Measurement of fastener height
Measurement can be conducted easily in a small space by using a slim-shape
Measurement of hard disc flatness
Applicable for strength tests of various materials such as metal, resin materials
Measures the height of screws in order to
measuring unit with fixture.
Measuring the flatness of mass-produced discs.
and wood. Measuring unit is resistant to vibration.
control the amount of torque.
Multipoint measurement of liquid crystal panels
Sequencer
Motor
Motor
Measurement of the height of chassis height
Measurement of motor shaft deviation
Positioning control
Measurement can be conducted easily in a small space by using a slim-shape
Measurement of a high speed spinning object is possible by utilizing a vibration-
Measuring the thickness and flatness of objects moving at high-speed, such as metal
Measurement of the height of high-density mounting wiring boards
measuring unit Measuring muitiple points or a chassis.
resistant gauge.
plates, resin boards and film, as well as to control the position of feeding rollers.
High-density measurement is possible with a slim-shaped measuring unit.
NO GO
4
GO
Automatic measurement and screening
Combination with machine tools
Measurement/QA decisions can be performed on the production line.
Measuring the position of the grinding stone of surface grinding machines.
5
Lineup
Resolution
(μm)
Measuring
range (mm)
0.1
DK
0.5
DE
2
DK802AR5, DK802BR5
(Straight)
DK802ALR5, DK802BLR5
(Right angle)
5.2
DK805AR, DK805BR (Straight)
DK805ALR, DK805BLR (Right angle)
DK805AFR, DK805BFR (Straight • Flange)
DK805AFLR, DK805BFLR (Right angle • Flange)
DK805AR5, DK805BR5 (Straight)
DK805ALR5, DK805BLR5 (Right angle)
DK805AFR5, DK805BFR5 (Straight • Flange)
DK805AFLR5, DK805BFLR5 (Right angle • Flange)
DG805BL (Right angle •
Low measuring force)
DG805FL (Right angle • Flange •
Low measuring force)
DK10PR5
(Straight • Protect sealing)
DK10NR5 (Straight)
DK10PLR5
(Right angle • Protect sealing)
DG810B (Straight)
DG810BL (Right angle)
DG810F (Straigh • Flange)
DG810FL (Right angle • Flange)
DG10B (Straight)
Digital Gauge
12
DK812AR, DK812BR
(Straight)
DK812ALR, DK812BLR
(Right angle)
DE12BR (Straight)
DK812AR5, DK812BR5
(Straight)
DK812ALR5, DK812BLR5
(Right angle)
DK25PR5
(Straight • Protect sealing)
DK25NR5 (Straight)
DK25PLR5
(Right angle • Protect sealing)
DK25NLR5(Right angle)
25
30
|
32
5
DT
DT
10
DL
DL310B
(Straight • Protect sealing)
DT512N (BOX type)
DT512P (BOX type • Protect sealing)
DT12N (Straight)
DT12P
(Straight • Protect sealing)
DG25BN (Straight)
DG25BP (Straight • Protect sealing)
DG25BL (Right angle)
DG25BS (Right angle)
DG25B (Straight • Protect sealing)
DE30BR (Straight)
50
|
60
DK50PR5
(Straight • Protect sealing)
DK50NR5 (Straight)
DG50BN (Straight)
DG25BP (Straight • Protect sealing)
100
|
110
DK100PR5
(Straight • Protect sealing)
DK100NR5 (Straight)
DK110NLR5
(Right angle • Protect sealing)
DG100B (Straight)
DG110B (Right angle)
155
DK155PR5
(Straight • Protect sealing)
DG155B (Straight)
205
DK205PR5
(Straight • Protect sealing)
DG205B (Straight)
DT32N (Box type)
DT32NV
(Box type • Preumatic push)
DT32P
(Box type • Protect sealing)
DT32PV
(Box type • Protect sealing • Preumatic push)
DL330B (Straight)
DIN
size
LT30
LT30
+ SZ70-2 (Adapter)
LT30
LT20A
LT11A
LT10A
LT20A
Full
type
・LY71
・LY72
(Connection cable CE29)
・LY71, LY72
(+SZ70-1 (Adapter) )
・LY71
・LY72
(Connection cable CE29)
・LY71, LY72
(+DZ51 +SZ70-1)
・LY71, LY72
(+MT13 +CE29)
・LY71, LY72
(+MT13 +CE29)
・LY71
・LY72
(+DZ51 +SZ70-1)
MG40 series
MG30
MG20-DK
MG10
MG30
MG20-DG
MG10
MG30
MG20-DT
MG10
MG30
MG20-DT
MG10
MG30
MG20-DG
MG10
Interface
Counter
DG
DK802AR, DK802BR
(Straight)
DK802ALR, DK802BLR
(Right angle)
10
6
DK
1
MG40 series
MG30
MG20-DK
MG10
MG30
MG20-DK
MG10
(+ SZ70-2 (Adapter) )
7
System
Interface unit
MG10
MG20
DT32
5μm/32mm
DT12
5μm/12mm
DT512
1μm/12mm
MG30
DG-B/F
0.5μm/
5.2-205mm
DL-BR
5μm/
10,30,60mm
MG40
DL-B
10μm/
10,30mm
DK800
0.1μm/
2,5,12mm
DK
0.5μm/
10-205mm
Counter
LT10A
LT11A
LT20A
Gauge
LT30
Adaptor* 1
DT12
5μm/12mm
DT32
5μm/32mm
DT512
1μm/12mm
DG-B/F
0.5μm/
5.2-205mm
DL-BR
5μm/
10,30,60mm
Adaptor or cable*
LY71
LY72
DL-B
10μm/
10,30mm
DE-BR
0.1μm/
12,30mm
DK
0.1μm/
2,5,12mm
DK
0.5μm/
2-205mm
2
LH70/71
DK802A/B Series
10
DK805A/B Series
11
DK812A/B Series
12
DK10/25 Series
13
DK50/100 Series
14
DK155/205 Series
15
DK110 Series
16
DE-BR Series
20
DG805/DG810 Series
22
DG10B/DG25B Series
23
DG50, DG100, DG155, DG205B Series
24
DG110B
26
DT512N/P Series
30
DT12, 32 Series
31
MT12/13/14
33
DL-B Series
34
U Series
36
LH72
*1:Please see P6-7 "Lineup" about the type name.
*2:Please see P6-7 "Lineup" about the type name.
View in table
Type
Maxmum resolution/
effective length
*The standard, the specification, and externals
might change without a previous notice
for the improvement.
*Please see the end of a book of this catalog
for details of the connecting cable.
8
9
DK802A/B Series
DK
DK
High resolution and High accuracy compact digital gauges.
• Measuring range : 2 mm • Accuracy : 1 μm, 1.5 μm • Resolution : 0.1 μm, 0.5 μm
• Max.respose speed : 80m/min (Resolution : 0.1 μm)
• Magnetic principle • Excellent resistance to workshop conditions.
Resistant to oil, water, dust, vibration, and shock. • Accuracy : 1 μ m, 1.5 μ m
• Resolution : 0.1 μ m, 0.5 μ m • Measuring range: 5 mm
• Low measuring force
• Spindle can be moved vertically with an air pressure device
• Easy installation. Flange type gauges also available.
250m/min (Resolution : 0.5 μm)
Built-in reference point
Excellent resistance to workshop conditions.
Robust design for harsh environments.
•
DK802
CE29
High accuracy, compact, and slim gauges suitable
for installation on machines.
LY71,LY72
DK805
CE29
DK805ALR/DK805BLR
DK805ALR5/DK805BLR5
LY71,LY72
DK802AR/DK802AR5/
DK802BR/DK802BR5
LT30
LT30
MG series
DK802AR/DK802AR5/
DK802BR/DK802BR5
79.6/31.3
φ0.08 deep0.1
71.6/2.82
DK805AR/DK805BR
DK805AR5/DK805BR5
φ12/0.47
71.6/31.3
5.3/0.21
21.2/0.83
8.7/0.34
79.6/31.3
4/0.26
φ8/0.31
Unit : mm/inch
M9 x P0.5
21.2/0.83
4-φ2.1 deep2.5/
Specifications DK802 Series
Output
DK802BR, DK802BLR
High-resolution models
0.1 μ m
DK805AFR, DK805AFLR, DK805AR, DK805ALR
2 mm (0.08")
1 μm
"Accuracy (at 20˚C / 68˚F)"
Output
Signal pitch
Resolution
Measuring range
Accuracy (at 20˚C/68˚F)
1.5 μ m
Downward: 0.45 ± 0.25 N
Horizontal: 0.40 ± 0.25 N
Upward: 0.35 ± 0.25 N
Measuring force
(at 20˚C / 68˚F)
80 m/min
42 m/min
250 m/min
Vibration resistance (10 to 2000 Hz)
100m/s2
Impact resistance (11 ms)
1000m/s2
IP66 (not including interpolation box and connectors)
Protective structure
0˚C to 50˚C/32˚C F to 122˚F
Operating temperature
–20˚C to 60˚C/_4˚CF to 140˚F
Storage temperature
DC +5 V ±5%
Power supply voltage
1W
Power consumption
2.5 m/8.2'
Cable length
φ”8 / 0.31”dia.
Diameter of stem
Mass*1
Approx. 20 g/0.7 oz
Provided with a carbide ball tip (DZ-123) Mount screw M2.5
Accessories
"Output cable length(up to the electronic section)"
*1: The mass indicated is the total mass excluding the cable and interpolation box.
Provided with a steel ball tip Mount screw M2.5
+P M4x5 screw (2pcs.). Installation spacer, Instruction Manual, Supplement
22 m/72.2' max.
Downward: 0.45 ± 0.25 N
Horizontal: 0.40 ± 0.25 N
Upward: 0.35 ± 0.25 N
100 m/min
Vacuum suction (DK802ALR / DK802ALR5 / DK802BLR / DK802BLR5)
Air driving
Reference point
Maximum response speed
Air driving
Vibration resistance
(10 to 2000 Hz)
Shock resistance (11 ms)
Protective structure
Operating temperature
Storage temperature
Power supply voltage
Power consumption
Cable length*1
Diameter of stem
Mass*2
Feeler
Accessories
Output cable length
(up to the electronic section)
DK805BFR, DK805BFLR, DK805BR, DK805BLR DK805AFR5, DK805AFLR5, DK805AR5, DK805ALR5 DK805BFR5, DK805BFLR5, DK805BR5, DK805BLR5
A/B/Z phase voltage-differential line driver output (compliant with EIA-422) *Please see P17 Output Signal Phase Difference.
40 μm
0.1 μm
0.5 μm
5 mm (0.19")
1 μm
1.5 μm
Measuring force
(at 20˚C/68˚F)
One location (at 1 mm/0.04" position of spindle movement)
Reference point
General-purpose resolution model
Model
0.5 μ m
Measuring range
10
Specifications DK805 Series
40 μ m
Resolution
Feeler
DK802BR5, DK802BLR5
A/B/Z phase voltage-differential line driver output (compliant with EIA-422)
Signal pitch
Maximum response speed
DK802AR5, DK802ALR5
Unit : mm/inch
*Please refer to p54 for the details of the screw.
General-purpose resolution Flange models
High-resolution Flange models
DK802AR, DK802ALR
0.34/
8.6
φ0.08 deep0.1
Model
φ0.39
φ10/
φ035
0
−0.009/
0
−0.004
Option : Extension cable
(CK-T12:1m/3.3’, CK-T13:3m/9.8’, CK-T14:5m/16’, CK-T15:10m/32.8’)
0
−0.009/
0
−0.004
φ9/
φ0.35
DK805AFR/DK805BFR
DK805AFR5/DK805BFR5
0
φ0.37 −0.004
5.5/0.22
0.34/
8.6
71.6/2.82
0
30.5/1.2
41.5/1.63
56.2/2.21
φ95 −0.009/
13.6/0.54
21.2/0.83
φ9/
21/0.83
M9 x P0.5
4-φ2.1 deep2.5/
ø9/ø0.35
Cable length 1,3,5,10m
(39.37"/118.11"/196.85"/393.70")
13.6/0.54
ø11.8/ø0.46
ø10/ø0.39
46.2/1.82
61.6/2.43
4/0.16
21/0.83
8.6/0.34
21.2/0.83
8.7/0.34
φ10/
12.2/0.48
64.2/2.53
5.5/0.22
14/0.55
5.3/0.21
φ0.39
12.2/0.48 8.6/0.34
79.6/3.13
61.6/2.43
0
64.2/2.53
Z
–
Z
Option : Extension cable
(CE22-01:1m/3.3’, CE22-03:3m/9.8’, CE22-05:5m/16’, CE22-10:10m/32.8’)
24.3/0.96
35.5/1.4
49.5/1.95
φ9.5 −0.009/
0
φ0.37 −0.004
B
–
B
DK805ALR/DK805BLR
DK805ALR5/DK805BLR5
φ12/0.47
13.6/0.54
Cable length 1,3,5,10m
(39.37"/118.11"/196.85"/393.70")
Cable color
Red
White
Blue
Yellow
Orange
Gray
Green
Violet
ø10/ø0.39
Signal
+Vcc
0V
A
–
A
DK805AFLR/DK805BFLR
DK805AFLR5/DK805BFLR5
DK802ALR/DK802ALR5/
DK802BLR/DK802BLR5
21/0.83
50/1.97
41.5/1.63
13/0.51
Digital Gauge
Dimensions
55.5/2.19
4.8/0.16
6.2/0.24
MG series
Digital Gauge
Dimensions
13/0.51
DK805AFLR/DK805BFLR
DK805AFLR5/DK805BFLR5
DZ-801 air lifter (optional) or
tubing for compressed air
device can be attached.
φ8/0.31
•
•
DK805A/B Series
80 m/min
One location (at 1 mm/0.04" position of spindle movement)
42 m/min
250 m/min
Vacuum suction ( DK805AFLR / DK805AFLR5 / DK805BFLR / DK805BFLR5 / DK805ALR / DK805BLR / DK805ALR5 / DK805BLR5 )
100 m/min
100 m/s2
1000 m/s2
IP66 (not including interpolation box and connectors)
0˚C to 50˚C/32˚F to 122˚F
-20˚C to 60˚C/-4˚F to 140˚F
DC +5 V ±5%
1W
2.5 m/8.2'
0
0
ø 9.50 -0.009
/0.37"-0.0004
dia.
Approx. 30 g/1.06 oz
Provided with a carbide ball tip (DZ-123) Mount screw M2.5
Installation spacer, Instruction Manual, Supplement
Provided with a steel ball tip Mount screw M2.5
22 m/72.2' max.
*1 : Please refer to P10 DK 802 A/B about the extension cable (Option).
*2 : The mass indicated is the total mass excluding the cable and interpolation box.
11
DK812A/B Series
DK
DK
High accuracy, rugged gauges.
Suitable for installation on machines.
• Measuring range :12 mm • Accuracy : 1 μm, 1.5 μm • Resolution : 0.1 μm, 0.5 μm
• Max.respose speed : 80m/min (Resolution : 0.1 μm)
• Measuring range : 10 mm / 0.39" and 25 mm / 0.98" • Accuracy : 2 μm
• Resolution : 0.5 μm • Excellent resistance to workshop conditions.
• High measuring force (10PR5/10PLR5/25PR5/25PLR5)
• Low measuring force (10NR5/25NR5/25NLR)
• A variety of accessories available (See "Accessories for Gauges")
• Direct connected to A/B quadrature counter
250m/min (Resolution : 0.5 μm)
Built-in reference point
Excellent resistance to workshop conditions.
Robust design for harsh environments.
•
LY71,LY72
DK10/25
CE29
LY71,LY72
DK812AFLR/DK812AFLR5
DK812ABLR/DK812BFLR5
MG series
DK10NR5/DK10PR5
DK25NR5/DK25PR5
Digital Gauge
LT30
Dimensions
Digital Gauge
MG series
92.3/3.68
DK25NLR5/PLR5
DK10PLR5
170.67 18/0.71
102.5/4.04
105/4.13
29.7/1.17 8/0.31 5.8/0.23 4.2/0.17
29.7/1.17 8/0.31 5.8/0.23 4.2/0.17
9
37/1.46
ø22
/ø0.87
ø6/ø0.24
26.3/1.04
33.8/1.33
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
105/4.13
Thickness 15.2
21.3/0.84
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
DK812AFLR/DK812AFLR5
DK812ABLR/DK812BFLR5
DK812AFR/DK812AFR5
DK812BFR/DK812BFR5
ø10/ø0.39
21/0.83
ø4.8/ø0.19
(Stem)
/ø0.31 -0.0004
.2
ø4
2-
ø8.5
power/output cable
(28)
0
ø8 -0.009
0
29.7/1.17 18/0.71
160/6.3
121.5/4.78
95.2/3.75
12/0.47 (26.5/1.04)
69.5/2.74
Cable length 2000/78.74
79/3.11
52.7/2.07 26.3/1.03
12/0.47
ø6/ø0.24
105/4.13
(11.5/
0.45)
(94.4/3.72)
(107.1/4.22)
(20/0.79)
ø9/ø0.35
97/3.82
ø5.8
/ø0.23
DK812AR/DK812AR5/DK812BR/DK812BR5
ø22
/ø0.87
Lock nut
DK10NR5/PR5
DK25NR5/PR5
Cable length 2500/98.42
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
3)
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
t0.
ø6/ø0.24
φ14
φ14.5
3
ø5.8
/ø0.23
3)
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
(
t0.
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
ø12/ø0.47
12.3/0.48
ø6/ø0.34
(
3
Cable length
2500/98.42
ø9/ø0.35
97/3.82
φ14.5
(101/3.98)
φ14
Cable length
300/11.81
M9
ø12/ø0.47
49.5/1.95
0
ø9.5 -0.009
0
/ø0.37 -0.0004
(Stem)
35.5/1.4
ø9.5/ø0.37
(Stem)
12.3/0.48
M9
37/1.46
18/0.71
Dimensions
105/4.13
21/0.83
105/4.13
87/3.43
29.7/1.17
DK812AVR/DK812AVR5
DK812BVR5/DK812BVR5
ø10/ø0.39
DK812ALR/DK812ALR5/DK812BLR/
DK812BLR5
Cable length 2500/98.42
Lock nut
Wave washer
(11.5/0.45)
Wave washer
33.8/1.33
21.3/0.84
12/0.47
*Please refer to p54 for the details of the screw.
98.5/3.88
122/4.81
12/0.47 (26.5/1.04)
(20/0.79)
(20/0.79)
141/5.55
179.5/7.07
Specifications DK812 Series
High-resolution models
Model
DK812AR, DK812ALR, DK812AFR,
DK812AFLR, DK812AVR
Output
Output
0.5 μ m
Air pressure of 0.03Mpa : 1N or less in all directions
Air pressure of 0.04Mpa : 1.7N or less in all directions
One location (at 1 mm/0.04" position of spindle movement)
Air driving
42 m/min
250 m/min
12
250 m/min
IP64
IP50
Operating temperature
IP50
-20˚C to 60˚C
DC +5 V ±5%
Approx. 30 g/1.06 oz
Provided with a carbide ball tip (DZ-123) Mount screw M2.5
Provided with a steel ball tip Mount screw M2.5
+P M4x5 screw (2pcs.). Installation spacer, Instruction Manual, Supplement
22 m/72.2' max.
Power consumption
Output cable length
Guaranteed number of Strokes
Accessories
IP64
Approx. 2.5 m
0
ø 20 -0.013 mm
Diameter of stem
Feeler
IP50
1 W or less
Cable length*2
Mass*3
IP64
0˚C to 50˚C
Power supply voltage
φ”8 / 0.31”dia. (Pneumatic push type)
4.9 N or less
1 ± 0.4 N
One location (at 1 mm position of spindle movement)
Storage temperature
2.5 m/8.2'
"Output cable length(up to the electronic section)"
Reference point
Protective structure
0.4 ± 0.3 N
0.7 ± 0.35 N
4.9 N or less
1 ± 0.4 N
0˚C to 50˚C/32˚C F to 122˚F
0
0
φ9.5 -0.009
/ 0.37”-0.0004
dia.,
*1 : Please refer to P10 DK 802 A/B about the extension cable (Option).
*2 : The mass indicated is the total mass excluding the cable and interpolation box.
0.8 ± 0.35 N
0.7 ± 0.35 N
4.9 N or less
–20˚C to 60˚C/–4˚CF to 140˚F
Cable length*2
Mass*1
(at 20˚C)
0.4 ± 0.3 N
0.6 ± 0.3 N
150 m/s2
1W
Diameter of stem
0.3 ± 0.25 N
Downward
25 mm
1500 m/s2
Power consumption
DK25PLR5
2 μm
Accuracy (at 20˚C)
Upward
Measuring
force
Horizontal
Impact resistance (11 ms)
DC +5 V ±5%
Power supply voltage
DK25NLR5
0.5 μm
Vibration resistance
(10 to 2000 Hz)
1000m/s2
DK25PR5
10 mm
Pneumatic push type (DK812AVR / DK812AVR5 / DK812BVR / DK812BVR5)
IP66 (not including interpolation box and connectors)
Storage temperature
DK25NR5
Maximum response speed
Impact resistance (11 ms)
Accessories
100 m/min
100m/s2
Operating temperature
DK10PLR5
Vacuum suction (DK812AFLR / DK812AFLR5 / DK812BFLR / DK812BFLR5)
Vibration resistance (10 to 2000 Hz)
Protective structure
DK10PR5
A/B/Z phase voltage-differential line driver output (compliant with EIA-422) *Please see P17 Output Signal Phase Difference.
Resolution*1
1.5 μ m
Downward : 0.6 ± 0.3 N
Horizontal : 0.5 ± 0.3 N
Upward : 0.4 ± 0.3 N
DK10NR5
Measuring range
1 μm
80 m/min
Specifications
40 μ m
12 mm (0.47")
Reference point
Feeler
DK812BR5, DK812BLR5, DK812BFR5,
DK812BFLR5, DK812BVR5
Model
0.1 μ m
Measuring force
(at 20˚C / 68˚F)
Maximum response speed
DK812AR5, DK812ALR5, DK812AFR5,
DK812AFLR5, DK812AVR5
A/B/Z phase voltage-differential line driver output (compliant with EIA-422)
Measuring range
"Accuracy (at 20˚C / 68˚F)"
Unit : mm/inch
General-purpose resolution models
DK812BR, DK812BLR, DK812BFR,
DK812BFLR, DK812BVR
Signal pitch
Resolution
69.5/2.74
DK812AR/DK812AR5/
DK812BR/DK812BR5
LT30
(20/0.79)
CE29
DK25NLR5/DK25PLR5
DK10PLR5
ø5.8
/ø0.23
DK812
High accuracy, rugged gauges.
Suitable for installation on machines.
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
•
•
DK10/25 Series
Approx. 230 g
Approx. 300 g
Provided with a carbide ball tip DZ-122 (Mount screw M2.5)
22 m max.
Minimum 5 million cycles without shock
+P M4x5 screw (2 pcs.), Instruction Manual
*1 : The resolution setting needs to be made when connecting to the LT30 series, MG series, and LY70 series. For details, please refer to the respective instruction manual.
*2 : Please refer to P10 DK 802 A/B about the extension cable (Option).
*3 : The mass indicated is the total mass excluding the cable and interpolation box.
13
DK50/100 Series
DK
DK
High accuracy, rugged gauges.
Suitable for installation on machines.
• Measuring range : 50 mm / 1.97", 100 mm / 3.94",
• Accuracy : 2 μm (DK50PR5/50NR5),4 μm (DK100PR5/100NR5)
• Resolution : 0.5 μm • Excellent resistance to workshop conditions.
• High measuring force (DK50PR5/100PR5) • Low measuring force (DK50NR5/100NR5)
• Direct connected to A/B quadrature counter
DK155/205
High accuracy, rugged gauges.
Suitable for installation on machines.
• Measuring range : 155 mm / 6.1" and 205 mm / 8.07"
• Accuracy : 5 μm (DK155PR5), 6 μm (DK205PR5)
• Resolution : 0.5 μm • Excellent resistance to workshop conditions.
• Magnet feeler (DG155BP/205BP)
• Direct connected to A/B quadrature counter
DK50NR5/DK50PR5
DK155PR5/DK205PR5
*The photo shows DG155PR5
DK50/100
CE29
LY71,LY72
DK155/205
CE29
LY71,LY72
DK100NR5/DK100PR5
LT30
LT30
MG series
MG series
Digital Gauge
Dimensions
ø5.8
/ø0.23
ø5.8
/ø0.23
Output
DK50PR5
Resolution*1
DK100NR5
Accuracy (at 20˚C)
100 mm
2 μm
4 μm
—
Horizontal
0.9 ± 0.4 N
Downward
1.3 ± 0.5 N
Measuring range
Accuracy (at 20˚C)
4.9 N or less
2.7 ± 0.55 N
One location (at 1 mm position of spindle movement)
ø5.8
/ø0.23
Unit : mm/inch
DK155PR5
150 m/s2
0.5 μm
155 mm
Operating temperature
IP50
IP64
0˚C to 50˚C
250 m/min
Vibration resistance
(10 to 2000 Hz)
150 m/s2
Impact resistance (11 ms)
1500 m/s2
-20˚C to 60˚C
Power supply voltage
DC +5 V ±5%
Power consumption
Cable length*2
Power supply voltage
DC +5 V ±5%
Diameter of stem
1 W or less
Mass*
Approx. 2.5 m
ø 20 -0.013 mm
Approx. 360 g
Magnetically attachable feeler
Approx. 630 g
Provided with a carbide ball tip DZ-122 (Mount screw M2.5)
22 m max.
Minimum 5 million cycles without shock
+P M4x5 screw (2 pcs.), Instruction Manual
*1 : The resolution setting needs to be made when connecting to the LT30 series, MG series, and LY70 series. For details, please refer to the respective instruction manual.
*2 : Please refer to P10 DK 802 A/B about the extension cable (Option).
*3 : The mass indicated is the total mass excluding the cable and interpolation box.
3
Feeler mounting base
0
Diameter of stem
IP64
0˚C to 50˚C
Storage temperature
-20˚C to 60˚C
Cable length*2
Spindle*4
Provided with a carbide ball tip DZ-121 (Mount screw M2.5)
6 μm
One location (at 5 mm position of spindle movement)
Maximum response speed
Storage temperature
Power consumption
205 mm
5 μm
Operating temperature
1500 m/s2
IP64
IP50
DK205PR5
A/B/Z phase voltage-differential line driver output (compliant with EIA-422) *Please see P17 Output Signal Phase Difference.
Protective structure
Impact resistance (11 ms)
Accessories
0
ø32 -0.05
0
/ø1.26-0.002
250 m/min
Vibration resistance
(10 to 2000 Hz)
Guaranteed number of Strokes
0
ø32 -0.05
0
/ø1.26-0.002
(stem)
Reference point
1.8 ± 0.65 N
4.9 N or less
Model
Output
—
Maximum response speed
Output cable length
(20/0.79)
507/19.96
28/1.1
Resolution*1
50 mm
Reference point
14
DK100PR5
0.5 μm
Measuring range
Feeler
ø8
/ø0.31
329/12.95
443.5/17.46
A/B/Z phase voltage-differential line driver output (compliant with EIA-422) *Please see P17 Output Signal Phase Difference.
Mass*3
0
ø32 -0.05
0
/ø1.26-0.002
516/20.31 ~ 721/28.39
9/0.35
Specifications
DK50NR5
Protective structure
0
ø32 -0.05
0
/ø1.26-0.002
(stem)
DK205PR5
Specifications
Upward
28/1.1
ø8
/ø0.31
ø22
/ø0.87
(20/0.79)
Unit : mm/inch
Measuring
force
(at 20˚C)
(20/0.79)
407/16.02
(20/0.79)
38.5/1.52
416/16.38 ~ 571/22.48
9/0.35
ø22
/ø0.87
2.5
(102/4.02) /0.1
12/0.47
223/8.78
286/11.26
0
ø25 -0.1
0
ø0.98 -0.004
DK100NR5/PR5
0
ø20 -0.013
0
/ø0.79 -0.0005
(stem)
ø8
/ø0.31
12/0.47 51/2.01 44/1.73
DK155PR5
ø5.8
/ø0.23
-0.02
ø20 -0.07
0.0008
/ø0.78 -0.003
(stem)
ø6
/ø0.24
0
ø20 -0.013
0
/ø0.79 -0.0005
(stem)
Dimensions
DK50NR5/PR5
Model
Digital Gauge
Output cable length
Guaranteed number of Strokes
Accessories
1 W or less
Approx. 2.5 m
0
ø32
] -0.05 mm
Approx. 1100 g
Approx. 1300 g
Magnetic substance
Magnetic attraction: 10 N, resistance against horizontal slip: 2.7 N Provided with ø4 mm carbide ball tip
ø 8 mm, radial swing: 0.04 mm max.
22 m max.
Minimum 5 million cycles without shock
+P M4x5 screw (2 pcs.), Instruction Manual
*1 : The resolution setting needs to be made when connecting to the LT30 series, MG series, and LY70 series. For details, please refer to the respective instruction manual.
*2 : Please refer to P10 DK 802 A/B about the extension cable (Option).
*3 : The mass indicated is the total mass excluding the cable and interpolation box.
*4 : The spindle weighs about 400g.
15
DK110
DK
DK Series operating cautions
High accuracy gauge with controllable measuring force
In operating the feeler with a vacuum pump, use such an air-pass system as shown in Fig. 1 to enable air driving. The optimum vacuum rate is 0.04 to 0.067MPa. Further, put
such an orifice as shown in Fig. 2 on a tube from the air lifter connector to control the air suction and discharge speed. The feeler is lifted at the air discharge to the vacuum pump.
Fig.1 Air-pass System
•
•
VG
CE29
Valve
Orifice
EXH
VAC
To fitting tube
Cable
3/0.12"
To vacuum
system
1/0.04"
C0.5/0.02"
Unit: mm/inch
DK Series measuring unit output signals
•
DK110
Vacuum pump
system
Filter
3/0.12"
φ2.5/0.1" dia.
•
3/0.12"
Φ0.3/0.01" dia.
Fitting
Measuring range :110 mm / 4.33"
Accuracy: 4 μm
Resolution: 0.5 μm
Direct connected to A/B quadrature counter
Reduced measurement error
Precision dual spindle support allows for a smooth spindle motion and virtually error free measurements.
Reduced measuring force
The measuring force can be reduced to a minimum of 0.3 N in three selectable steps using the measuring
balancer (option). The force is maintained constant regardless of spindle movement direction.
Soft spindle return. A braking mechanism reduces spindle return speed,
therby eliminating the danger of damaging either the surface plate or the workpiece.
φ3/0.12" dia.
•
•
•
•
Fig.2 Dimensions of Orifice
The signals output from this measuring unit are A/B quadrature signal, Z signal in the
form of voltage-differential line driver output compliant with EIA-422.
When connecting with MG40 series measuring system,
output signal have to change to the serial output
from A/B output by a switch on interpolation box.
LY71,LY72
A
B
LT30
Z
*Digital gauge stand DZ-531 and Measuring force balancer
DZ-581 are option.
MG series
Digital Gauge
DK800A output signals at maximum
response speed (at approx. 80 m/min)
Dimensions
40/1.57
3/0.12
314/12.36
ø4/ø0.16
0
-0.1
0
-0.004
0
-0.03
0
-0.001
A
B
B
100 ns
50 ns
Before using, check that the minimum input phase difference of the control device
connected to this measuring unit or the counter is smaller than 50 ns for-DK
10~110 series (A signal cycle: 200 ns, 5 MHz).
*The minimum phase difference can be modified under special specifications.
*The minimum phase difference can be modified under special specifications.
Output Signal Phase Difference
Thickness 15.2
(28)
ø8.5
ø5.7/ø0.22
Cable length
.2
ø4
A
B
Before using, check that the minimum input phase difference of the control
device connected to this measuring unit or the counter is smaller than 50 ns for
the DK800A (A signal cycle: 200 ns, 5 MHz) or smaller than 100 ns for the
DK800B (A cycle: 400 ns, 2.5 MHz).
ø5.8/ø0.23
2-
200 ns (5 MHz)
A
(31/1.22)
ø29
/ø1.14
(stem)
ø20
/ø0.79
ø20/ø0.79
DK10/25/100/155/205/110
Output signals at maximum response speed
(at approx. 42 m/min)
400 ns (2.5 MHz)
50 ns
28/1.1 34.5/1.36
(112/4.41)
ø8/ø0.31
8.5/0.33
DK800B output signals at maximum
response speed (at approx. 42 m/min)
200 ns (5 MHz)
ø2.5/ø0.1 hole
489.5/19.27
12/0.47
The reference point is the synchronized reference point that is at Hi impeadance when the phase A and phase B are at the Hi level.
9
The travel amount of the measuring unit is detected every 50 ns for the DK800A
and every 100 ns for the DK800B, and the phase difference proportional to the
amount traveled is output. The phase difference changes in integer multiples of
50 ns or 100 ns. Also, the minimum phase difference for the A and B is 50 ns for
the DK800A and 100 ns for the DK800B.
The travel amount of the measuring unit is detected every 50 ns, and the phase
difference proportional to the amount traveled is output. The phase difference
changes in integer multiples of 50 ns. Also, the minimum phase difference for the
A and B is 50 ns.
DK802A/B-812A/B
DK10/25/100/155/205/110
,
Cable length 2000 /78.7
(101/3.98)
A
A
Unit : mm/inch
300/11.81
B
B
Integer multiple of 50 ns
Integer multiple of 50 ns or 100 ns
Specifications
Model
DK110NLR5
Output
A/B/Z phase voltage-differential line driver output (compliant with EIA-422) *Please see P17 Output Signal Phase Difference.
Resolution*1
0.5 μm
Measuring range
110 mm
Accuracy (at 20˚C)
Reference point
Maximum response speed
Vibration resistance
(10 to 2000 Hz)
Impact resistance (11 ms)
Protective structure
Operating temperature
16
Counter
allowable
frequency
Maximum response speed
Resolution 0.1 μ m Resolution 0.5 μ m
Remarks
A/B minimum
phase
difference
A signal
cycle
Counter
allowable
frequency
Maximum response speed
Resolution 0.5 μ m
Remarks
50 ns
200 ns
5 MHz
80 m/min
250 m/min
DK800A standard product
50 ns
200 ns
5 MHz
250 m/min
Standard product
100 ns
400 ns
2.5 MHz
42 m/min
100 m/min
DK800B standard product
100 ns
400 ns
2.5 MHz
100 m/min
Special specifications
250 m/min
300 ns
1.2 μs
833 kHz
14 m/min
33 m/min
Special specifications
300 ns
1.2 μs
833 kHz
33 m/min
Special specifications
150 m/s2
500 ns
2 μs
500 kHz
8.4 m/min
20 m/min
Special specifications
500 ns
2 μs
500 kHz
20 m/min
Special specifications
1500
m/s2
IP50
Output Signal Alarm
Receiver
0˚C to 50˚C
-20˚C to 60˚C
DC +5 V ±5%
Power consumption
1 W or less
Cable length*2
Approx. 2.5 m
Diameter of stem
0
ø20 -0.013
mm
Mass*3
Approx. 800 g
Feeler
DZ-121 (Mount screw M2.5)
Accessories
A signal
cycle
One location (at 5 mm position of spindle movement)
Power supply voltage
Guaranteed number of Strokes
A/B minimum
phase
difference
In the standard specifications, the minimum phase difference is fixed at 50 ns, but
the minimum phase differences in the table below are available as special
specifications.
4 μm
Storage temperature
Output cable length
In maximum standard specifications, the minimum phase difference is fixed at 50
ns for the DK800A and 100 ns for the DK800B, but the minimum phase
differences in the table below are available as special specifications.
22 m max.
Minimum 5 million cycles without shock
If the response speed is exceeded, the A/B output from this measuring unit
changes to Hi impeadance for about 400 ms to serve as an alarm.
DK10/25/100/155/205/110
20 m or less
Line driver
Line receiver
AM26C32 or equivalent
Line driver
SIG
SIG
*SIG
120
DS34C87
Output: phase A/B/Z
AM26C32
*+V
+V
0V
0V
Alarm section A/B is Hi impeadance
(*If extending the cable,
the supply voltage is +5 V±5%.)
*Use the CE22 series extension
cables for bare wires
(optional accessories).
+P M4x5 screw (2 pcs.), feeler DZ-121, lift lever DZ-161, Instruction Manual
*1 : The resolution setting needs to be made when connecting to the LT30 series, MG series, and LY70 series. For details, please refer to the respective instruction manual.
*2 : Please refer to P10 DK 802 A/B about the extension cable (Option).
*3 : The mass indicated is the total mass excluding the cable and interpolation box.
17
Accessories
DZ-122 Feeler (for DK Series, DG10B and DG50B)
(for DK and DG series)
DZ-123 Feeler (for DK Series, DG805BL/810B/810BL)
M2.5
ø7
Ineffective screw
portion Width 1 or less
11
16.8
5
5
M2.5
ø5
ø4.5
• Contact point: ø 2.5 mm/0.098" carbide ball
tip (mounting screw: M2.5 x 0.45)
Unit : mm
• Contact point: ø 3 mm/0.118" carbide ball
tip (mounting screw: M2.5 x 0.4)
Unit : mm
DZ-531 Digital gauging stand (for DK110, DG110B)
Column washer
420
500
160
ø20
25~355
ø50
•Surface plate material: gabbro
•Surface plate flatness: 3 μm
•Surface plate size: 350mm (13.78'') x 350mm (13.78'')
•Maximum workpiece height: approx. 330mm (12.99")
•Gauge mounting hole: ø 20mm (0.79")
•Mass: 38kg(83.8 lbs)
350
Spring washer
350
75
290
Unit : mm
DZ-581 Measuring force balancer (for DK110, DG110B)
DZ-121 Feeler (for DK100, DG100BP/BN)
ø9
Balance arm
M2.5
Grooved bearing
Cord
153
Hook
Weight
ø10
Balancer mounting
hook hole
5
64
520
633~698
17
A/C
330Max.
Mounting screws
2-M6
135
Digital gauge stand
DZ-531
• Contact point: ø 2.5 mm/0.098" carbide ball
tip (mounting screw: M2.5 x 0.45)
ø5
Unit : mm
Unit : mm
Other accessories
Weight
•No weight:1.55±0.15N(155±15gf)
•B:1.0±0.15N(100±15gf)
•B+A:0.7±0.15N(70±15gf)
•B+C:0.3±0.15N(30±15gf)
•CE08Extension cable:CE08-01(1m)、03(3m)、05(5m)、10(10m)、15(15m)
•CE22Extension cable(Ahead in pieces)
:CE22-01(1m)、03(3m)、05(5m)、10(10m)
•CK-TExtension cable(Winding-proof)
:CK-T12(1m)、
T13(3m)、
T14(5m)、
T15(10m)
A
B
C
*Please refer to p54 for the details of the screw.
DZ-191 Coupling
8.5
16.5
5
Fixing screw
(3-M 3 x 5)
ø18
15
Nut (M 5)
Spindle mounting
screw (M 2.5)
Mounting screw for
machine carriage (M 5)
Unit : mm
18
19
DE-BR Series
Accessories
DZ301 Bellows set (for DL330B, DE30BR)
• Magnetic principle
• High accuracy: 1 μ m
• High resolution: 0.1 μ m
• Measuring range: 12 mm / 0.47" and 30 mm / 1.18"
• Built-in zero point
• Protective design grade: equivalent to IP64 with optional bellows.
DZ302 Bellows set (for DE12BR)
Extension spindle
Bellows
Extension spindle
Bellows
M2.5
ø4
ø7.5
ø7.5
M2.5
6
•With the extension spindle attached,
the spindle is extended by 25 mm and
the measuring force increases by about 0.3 N.
•With the extension spindle attached,
the spindle is extended by 8 mm.
(5)
25
1
5.5
30
8
(5)
13
Unit : mm
DZ-501 Digital gauging stand (for U60B, DG10B to DG100B, DE-30BR)
SZ70-2
Digital Gauge
MG20-DK
•Surface plate material : alumina ceramic
•Surface plate flatness: 2 μm
•Surface plate size : 110 mm (4.33") x 110 mm (4.33")
•Maximum workpiece height: approx. 190 mm(7.48")
•Gauge mounting hole : ø 20mm (0.79")
•Mass : 13kg (28.67 lbs)
100
DZ521 Gauging stand (for DG805BL/810B/810BL, U Series, DE12BR)
•Surface plate material : alumina ceramic (dark brown)
•Surface plate flatness : 2 μm
•Surface plate size : 80 mm (3.15'') x 80 mm (3.15'')
•Maximum workpiece height : approx. 105 mm (4.13'')
•Gauge mounting hole : ø 8 mm (0.31")
•Mass: 3.8 kg (8.38 lbs)
ø40
80
LT30
200
Lever-type clamp
272
Dimensions
mounting hole o/ 8
75
132
DE30BR
Internal spring
prevents the arm
from dropping
59.5~135.5
ø20
Probe mounting hole
8.5
5
16.5
15
Fixing screw
(3-M 3 x 5)
ø4/ø0.16
63
ø18
46 ±0.15
10.7
2−M3 baring
16.3/0.64
17
4
2-φ3.7
22
13.2/0.52
Spindle mounting
screw (M 2.5)
Nut (M 5)
40
Mounting screw for
machine carriage (M 5)
(Φ6.5)
(45)
300
19
13.2/0.52
2.2
(33)
0
/ø0.31 -0.0006
(stem)
Unit : mm
(15)
1.2
28.6
0
-0.015
29.8
28.1 +0.2
-0
15.5
ø8
35/1.38
Air release monuting apeture
(33/1.3)
Pre-amp box 84/3.31
5/0.2
9
54
36 ±0.1 9
8.5
45 ±0.1
MADE IN JAPAN
180/7.09
ø5
/ø0.2
5.6
/0.22
Cable length 2000/78.74
DIGITAL GAUGE DE30BR
Serial No.
106/4.17
22/0.87
26.5/1.04
24/0.94
121.4/4.78
MADE IN JAPAN
DIGITAL GAUGE DE12BR
Serial No.
ø5.2/ø0.2
DZ-191 Coupling
84.4
22.8
Unit : mm
150
88.5
SZ70-1 is required for connecting the following scale units and counters :
Gauge unit : DE-BR Series, DG-B Series
Counter : LH71A, LH72-3, LY71 and LY72
* Adapter DZ51 is also required
0.7/0.03
6/0.24
5.6/0.22
Air release monuting apeture
6/0.24 (14.5/0.57)23/0.91
3/0.12
77.9/3.07
ø5/ø0.2
Cable length 300/11.81
108/4.25
16.3/0.64
SZ70-1 Adapter
21/0.83
21/0.83
38/1.5
0
54/2.13
35/1.38
Unit : mm
38/1.5
ø25
370
110
98
DE12BR
ø8 -0.015
0
/ø0.31-0.0006
(stem)
ø4/ø0.16
Unit : mm
LY71,LY72
SZ70-1
233
DE-BR
M2.5
M2.5
24.2
71
ø3
High precision digital gauge for submicron position
detection and measuring
ø4
DE
Unit : mm
DZ-5100 Feeler set
•Plastic
ball contact
point: ø 3mm nylon ball
•Flat
carbide contact point
•Off-center
contact point:
ø 1mm steel ball
ø7
•Pin contact point
M2.5
M2.5
Resolution
0.5 ± 0.2 N
0.75 ± 0.3 N
Downward
0.7 ± 0.2 N
5
5
17.5
SZ70-2 Adapter
Protective design grade
Equivalent to IP64 (with optional bellows)
0
SZ70-2 is required for connecting the following scale units and counters:
Gauge unit: DE-BR Counterunit: LT30 Interface unit: MG series
0
ø 8 -0.015 mm / ø 0.31" -0.0006"
-10 ˚C to 60 ˚C / 14 ˚F to 140 ˚F
Power consumption
±5V 100mA
29.8
28.1 +0.2
-0
15.5
Storage temperature
8.5
(Φ4.8)
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F
84.4
22.8
13
13
5 mm/0.2" from feeler end fully retracted
Operating temperature
Unit : mm
1 ± 0.3 N
Zero point
ø1.5
Cable length
Feeler
Mass (excl. cable unit)
2 m / 6.56'
Feeler tipped with 3 mm dia. carbide ball with M2.5p x 0.45 screw on fitting end (DZ123)
Approx.400 g / 14.11 oz
*Please refer to p54 for the details of the screw.
22
1.2
28.6
300
19
63
Lateral
ø5
46 ±0.15
0.5 ± 0.3 N
54
0.35 ± 0.2 N
10
36 ±0.1 9
Upward
ø7
ø6.5
Note : The four contactors shown at right are included.
9
20 m/min zero point detection mode : 0.15/min
45 ±0.1
1 μm
Maximam response speed
Mounting stem diameter
20
ø6
0.1 μ m
Accuracy (at 20 ˚C /68 ˚F)
Measuring
force
19.3
DE30BR
30 mm / 1.18"
5
5
DE12BR
12 mm / 0.47"
13
Measuring range
17
Model
5
M2.5
M2.5
Specifications
25
Unit : mm/inch
10.7
2−M3 baring
2.2
17
4
40
2-φ3.7
Unit : mm
Approx.450 g / 15.87 oz
21
DG805 Series,DG810 Series
DG
High accuracy, compact, and slim gauges suitable
for installation on machines.
DG10B,DG25B
DG
High accuracy, rugged gauges.
Suitable for installation on machines.
• Excellent resistance to workshop conditions (BP/BS : IP64).
• Magnetic principle • Excellent resistance to workshop conditions.
Resistant to oil, water, dust, vibration, and shock. • Accuracy : 2 μ m
• Resolution : 0.5 μ m • Measuring range: 5.2 mm / 0.20" and 10 mm / 0.39"
• Compact and slim: ø8 mm / ø0.31" (outer diameter)
74.5 mm / 2.93" (overall length) (DG805)
• Low measuring force
• Spindle can be moved vertically with an air pressure device (DG805BL/FL, DG810BL/FL).
• Dustproof bellows (standard).
• Easy installation. Flange type gauges also available.
Resistant to oil, water, dust, vibrations, and shocks.
DG805BL
• Accuracy : 2 μ m • Resolution : 0.5 μ m
• Measuring range : 10 mm / 0.39" and 25 mm / 0.98"
• High measuring force (BP/BS)
• Low measuring force (BN/BL) • Easy installation
• A variety of accessories available (See "Accessories for Gauges")
DG805FL
DZ-801 air lifter (optional) or
tubing for compressed air
device can be attached.
DG810FL
DG810BL
DG25BS/DG25BL
DG10BS
DG10BP/DG10BN
DG805/810
LY71,LY72
DZ51+SZ70-1
DZ51+SZ70-1
DG25BP/DG25BN
LY71,LY72
DG810F
DG810B
LT20A
DG10/25
LT20A
Digital Gauge
MG20-DG
MG20-DG
Digital Gauge
Dimensions
Dimensions
ø6/ø0.24
DG10BS
BSM / BSE
Lateral
0.35 ± 0.25 N
0.4 ± 0.3 N
0.4 ± 0.25 N
0.5 ± 0.3 N
Accuracy (at 20˚C / 68˚F)
Downward
0.45 ± 0.25 N
0.6 ± 0.3 N
Maximum Response speed
Operating temperature
1m/s
Storage temperature
-20 ˚C to 60 ˚C / -4 ˚F to 140 ˚F
Storage temperature
5 m/ 16.4'
Cable length
0
Feeler
Feeler tipped with ø 3 mm/ 0.12" dia. Carbide ball with M2.5 x 0.45 screw on fitting end (DZ-123)
Mass*1
Approx.20 g / 0.71 oz
Air lifter
Air lifter DZ-801 mountable*2
*1 excl. cable unit and Interpolator unit.
*2 Tubing for compressed air device can be attached.
Approx.40 g / 1.41 oz
—
All direction: 4.9 N or less
Air lifter DZ-801 mountable*2
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
37/1.46
69.5/2.74
ø5.8
/ø0.23
DG25BL
BLM/BLE
25 mm/ 0.98"
0.4 ± 0.3 N
All direction: 4.9 N or less
0.6 ± 0.3 N
2 μm
1m/s
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F (gauge)
-20 ˚C to 60 ˚C / -4 ˚F to 140 ˚F
Cable length
0
-0.013
Mounting stem diameter
ø 20 mm/ ø 0.79"
5 m/ 16.4'
0
-0.005"
Feeler ø 2.5 mm carbide ball with M2.5p x 0.45 screw on fitting end (DZ-122)
Protective design grade
Equivalent to IP64
—
Equivalent to IP64
Sealing (oil, water, dust)
Oil sealing, O-rings, Y-gaskets
—
Oil sealing, O-rings, Y-gaskets
Lift lever
Approx.230 g/ 0.507 lbs
—
Air lifter
DZ174-010 (option)*2
Mass*1
0.7 ± 0.35 N
1 ± 0.4 N
0.8 ± 0.35 N
Downward
Feeler
0
ø 8-0.009 mm/ ø 0.31" -0.0004"
0
0
F type: ø 9.5 -0.009 mm/ ø 0.37" -0.0004"
Mounting stem diameter
DG25BN
BNM/BNE
0.3 ± 0.25 N
Upward
2 μm
DG25BS
BSM/BSE
0.5 μ m
Resolution
Measuring
range force
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F (gauge)
DG25BP
BPM / BPE
For Counter, A/B quadrature signal output type (See Page 26)
Lateral
Operating temperature
DG10BN
BNM / BNE
10 mm / 0.39"
Upward
Maximum Response speed
ø6/ø0.24
ø5.8
/ø0.23
DG10BP
BPM / BPE
Measuring range
10 mm/ 0.39"
0.5 μ m
Accuracy (at 20˚C / 68˚F)
(20/0.79)
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
37/1.46
69.5/2.74
(20/0.79)
ø5.8
/ø0.23
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
Specifications
Type
5.2 mm/ 0.20"
(20/0.79)
141/5.55
179.5/7.07
Unit : mm/inch
DG810B / F / BM / BE / FM / FE
DG810BL / FL / BLM / BLE / FLM / FLE
For Counter, A/B quadrature signal output type (See Page 26)
Resolution
22
12/0.47 (26.5/1.04)
(20/0.79)
98.5/3.88
122/4.81
Unit : mm/inch
4- ø 2.1 deep 2.5/
ø 0.08 deep 0.1
Specifications
Measuring range
Cable length 5000/196.85
33.8/1.33
21.3/0.84
Model
Measuring
range force
Cable length 5000/196.85
(11.5/0.45)
12/0.47
Lock nut
DG805BL / FL / BLM / BLE / FLM/FLE
Cable length 5000
/196.85
DG25BN/BP
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
27/1.06
ø6/ø0.34
4/0.16
*Please refer to p54 for the details of the screw.
Model
Type
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
ø6/ø0.24
0
ø20 -0.013
0
/ø0.79-0.0005
(stem)
ø20 -0.02
-0.07
0.0008
/ø0.79-0.003
27/1.06
22/0.87
ø4.8/
ø0.19
22/0.87
6.8/0.27
6/0.24 (24/0.94) 7/0.28
M9 x P0.5
Wave washer
ø4.8/
ø0.19
114/4.49
ø4.8/
ø0.19
.3)
DG10BN/BP
ø7.8/
ø0.31
ø14/
ø0.55
(t0
ø14.5/
ø0.57
ø4.8/
ø0.19
3/0.12
ø7.8/
ø0.307
0
ø8 -0.009
0
/ø0.31 -0.0003
(stem)
ø10/
ø0.39
deep 2.5/
ø 0.08 deep 0.1
ø12/
0
ø0.47 ø9.5 -0.009
0
/ø0.37 -0.0004
114/4.49
(24/0.94) 18/0.71
12.3/0.48
12.3/0.48
M9 x P0.5
DG810F
ø22
/ø0.87
4/0.16
4- ø 2.1
DG810B
ø22
/ø0.87
26.3/1.04
33.8/1.33
Air lifter
Lock nut
Wave washer
160/6.3
121.5/4.78
95.2/3.75
12/0.47 (26.5/1.04)
21.3/0.84
19/0.75
6.8/0.27
6/0.24 (24/0.94) 7/0.28
ø10/
ø0.39
27/1.06
22/0.87
ø10/
ø0.39
ø4.8/
ø0.19
ø7.8/
ø0.31
ø10/
ø0.39
0
ø8 -0.009
0
/ø0.31 -0.0004
(stem)
Air lifter
.3)
ø14.5/
ø0.57
ø14/
ø0.55
3/0.12
(t0
ø10/
ø0.39
79/3.11
52.7/2.07 26.3/1.03
112/4.41
ø12/
0
ø0.47 ø9.5 -0.009
0
/ø0.37 -0.0004
19/0.75
102.5/4.04
(11.5/
0.45)
12/0.47
Air lifter
ø7.8/
ø0.31
ø4.8/
ø0.19
Wave washer
DG25BS/BL
DG10BS
19/0.75
4/0.15
4- ø 2.1 deep 2.5/
ø 0.08 deep 0.1
DG810FL
(24/0.94) 18/0.71
5.3/ 8.7/
0.21 0.34
6/0.24 (15.2/0.6)
M9 x P0.5
112/4.41
6/0.24
.3)
Lock nut
DG810BL
6/0.24
(t0
ø7.8/
ø0.31
ø10/
ø0.39
ø14/
ø0.55
27/1.06
22/0.87
ø10/
ø0.39
ø7.8/
ø0.31
(15.2/0.6) 8.6/0.34 ø10/
ø0.39
0
/ø0.37 -0.0004
3/0.12
0
ø9.5 -0.009
19/0.75
ø12/
ø0.47
0
ø8 -0.009
0
/ø0.31 -0.0004
(stem)
74.5/2.93
Air lifter
6/0.24
74.5/2.93
DG805FL
ø14.5/
ø0.57
DG805BL
—
—
Approx.300 g / 0.661 lbs
DZ-161 (option)
DZ-161 (option)
—
DZ174-025 (option)*2
*1 excl. cable unit and Interpolator unit.
*2 Tubing for compressed air device can be attached.
23
DG50B,DG100B,DG155B,DG205BSeries
DG
High accuracy, rugged gauges.
Suitable for installation on machines.
• Excellent resistance to workshop conditions (BP : IP64).
Resistant to oil, water, dust, vibrations. and shocks.
• Accuracy: 2 μ m (DG50BP/50BN), 4 μ m (DG100BP/100BN),
5 μ m (DG155BP), 6 μ m (DG205BP) • Resolution : 0.5 μ m
• Measuring range: 50 mm / 1.97", 100 mm / 3.94",
155 mm / 6.1" and 205 mm / 8.07"
• High measuring force (DG50BP/100BP) • Low measuring force (DG50BN/100BN)
• Magnet feeler (DG155BP/205BP) • Easy installation
• A variety of accessories available (See "Accessories for Gauges")
DZ51+SZ70-1
DG110B Series
MG
DG
High accuracy gauge with controllable measuring force
• High accuracy: 4 μ m
• Resolution: 0.5 μ m • Measuring range: 110 mm / 4.33" • Reduced measurement error
• Precision dual spindle support allows for a smooth spindle motion and virtually error free measurements.
• Reduced measuring force
DG50BP/DG50BN
•
DG100BP/DG100BN
The measuring force can be reduced to a minimum of 0.3 N in three selectable steps using the measuring
balancer (option). The force is maintained constant regardless of spindle movement direction.
Soft spindle return. A braking mechanism reduces spindle return speed, therby eliminating
the danger of damaging either the surface plate or the workpiece.
DZ51+SZ70-1
LY71,LY72
LY71,LY72
DG155BP/DG205BP
DG50/100/155/205
LT20A
DG110B
*The photo shows DG155BP
LT20A
Digital Gauge
MG20-DG
*Digital gauge stand DZ-531 and Measuring force balancer
DZ-581 are option.
MG20-DG
Digital Gauge
Dimensions
(31/1.22)
ø29
28/1.1 34.5/1.36
ø2.5/ø0.1 hole
ø4/ø0.16
0
-0.1
0
-0.004
0
-0.03
0
-0.001
ø5.7/ø0.22
516/20.31 ~ 721/28.39
(20/0.79)
ø5.8
/ø0.23
507/19.96
9/0.35
Thickness 21/0.83
(27/1.06)
0
ø32 -0.05
0
/ø1.26-0.002
(stem)
0
ø32 -0.05
0
/ø1.26-0.002
ø5.8/ø0.23
ø8
/ø0.31
ø22
/ø0.87
ø20/ø0.79
ø5.8
/ø0.23
28/1.1
DG205BP
28/1.1
Cable length
ø8
/ø0.31
314/12.36
/ø1.14
(20/0.79)
407/16.02
ø22
/ø0.87
3/0.12
ø8/ø0.31
329/12.95
443.5/17.46
416/16.38 ~ 571/22.48
9/0.35
40/1.57
(20/0.79)
38.5/1.52
DG155BP
(112/4.41)
(stem)
2.5
(102/4.02) /0.1
12/0.47
8.5/0.33
ø20
/ø0.79
12/0.47
(20/0.79)
ø5.8
/ø0.23
ø8
/ø0.31
DG100BN/BP
489.5/19.27
223/8.78
286/11.26
0
ø25 -0.1
0
ø0.98 -0.004
0
ø20 -0.013
0
/ø0.79 -0.0005
(stem)
12/0.47 51/2.01 44/1.73
ø5.8
/ø0.23
-0.02
ø20 -0.07
0.0008
/ø0.78 -0.003
(stem)
ø6
/ø0.24
DG50BN/BP
0
ø20 -0.013
0
/ø0.79 -0.0005
(stem)
Dimensions
0
ø32 -0.05
0
/ø1.26-0.002
(stem)
,
Cable length 2000 /78.7
(101/3.98)
Unit : mm/inch
300/11.81
0
ø32 -0.05
0
/ø1.26-0.002
Unit : mm/inch
Specifications
DG50BN
BNM/BNE
DG50BP
BPM/BPE
Model
Type
Measuring range
DG100BP
BPM/BPE
DG100BN
BNM/BNE
For Counter, A/B quadrature signal output type (See Page 26)
100 mm/ 3.94"
50 mm/ 1.97"
Resolution
Measuring
range force
Upward
Lateral
0.9 ± 0.4 N
6.2 N or less
1.3 ± 0.5 N
All direction :
9.3 N or less
—
Specifications
2.7 ± 0.55 N
4 μm
2 μm
5 μm
6 μm
1m/s
Operating temperature
Resolution
-20 ˚C to 60 ˚C / -4 ˚F to 140 ˚F
Cable length
Measuring range force
5 m/ 16.4'
0
Mounting stem diameter
carbide ball tipped feeler (DZ-122)
Equivalent to IP64
Sealing (oil, water, dust)
Oil sealing, O-rings,
Y-gaskets
Mass*1
ø 32 (0/ -0.05) mm/ ø 1.26" (0/ -0.002")
—
—
Equivalent to IP64
—
—
Oil sealing, O-rings,
Y-gaskets
—
DZ-161 (option)
Equivalent to IP 64
Oil sealing, O-rings, Y-gaskets
Approx.630 g/ 1.388 lbs
—
DZ174-010 (option)
DG155BP/205BP does not included the spring. *1 excl. cable unit and Interpolator unit *2 Tubing for compressed air can be attached.
Approx.1100 g/ 2.425 lbs
DZ-161 (option)
Approx.1300 g/ 2.866 lbs
DZ-161 (option)
—
Accuracy
Operating temperature
Attraction force: 10 N(DZ181)
Lateral slippage force: 2.7 N
—
Approx.360 g/ 0.793 lbs
—
0
ø 20-0.013 mm/ ø 0.79" -0.0005"
carbide ball tipped feeler (DZ-121)
—
Magnetic feeler
Protective design grade
Model
Type
Measuring range
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F (gauge)
Storage temperature
24
205 mm/ 8.07"
1.8 ± 0.65 N
Maximum Response speed
Air lifter
155 mm/ 6.1"
—
—
All direction:
Accuracy (at 20˚C / 68˚F)
Lift lever
DG205BP
BPM/BPE
0.5 μ m
Downward
Feeler
DG155BP
BPM/BPE
Storage temperature
Cable length
Mounting stem diameter
DG110B/BM/BE
For Counter, A/B quadrature signal output type (See Page 26)
110 mm/ 4.33"
0.5 μ m
Downward 1.55 ± 0.15 N*2
4 μm
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F
-10 ˚C to 60 ˚C / 14 ˚F to 140 ˚F
2 m/ 6.56'
0
0"
ø 20 -0.03
mm/ø0.78" -0.0012"
Feeler
Feeler tipped with ø 2.5 mm/ 0.098" dia. Carbide ball with M2.5p x 0.45 screw on fitting end (DZ-121)
Mass*1
Approx.1150 g/ 2.54 lbs
Lift lever
DZ-161 (supplied)
*1 excl. cable unit and Interpolator unit. *2 The measurement force values given apply when DZ-581 measuring force balancer is not used.
By using a measuring force balancer (option), it is possible to reduce the measuring force to minimum of 0.3 N.The measuring force will be constant regardless of spindle position.
25
DG-M/E Type
Accessories
Outputs
A/B quadrature output type
Power supply 11 to 28V
BLM
FL
FLM
DG810
B
DG10
BP
BN
BS
DG25
BP
BN
BS
DG50
BP
BN
DG100
BP
BN
DG155
BP
BPM
BPE
DG205
BP
BPM
BPE
DG110
B
BM
BE
BL
F
FL
BLM
BM
BL
BPM
BNM
BSM
BPM
BNM
BSM
BPM
BNM
BPM
BNM
FM
DZ51 (Relay adapter) For connections of DG-B, DL-BR, DL-B and DT12/32N/P* to LG, LH and LY displays
BLE
FLM
BE
BLM
FLE
BLE
BPE
BNE
BSE
BPE
BNE
BSE
BPE
BNE
BPE
BNE
FE
FLE
(24.5)
22
BL
BLE
*To connect the DT12/32N/P,
use the DZ51 in combination with
the MT10 detector.
35
Power supply output 5V
For counter
54
Display connection type
DG805
(for DGB series)
(10.4)
60.6
(61.3)
B : Straight BP : Straight/Sealing BN : Straight/Low measuring force BS : L shape/Sealing BL : L shape/Low measuring force F : Straight/Low measuring force/Flange F : L shape/Low measuring force/Flange
Unit : mm
(64)
Dimensions
DZ-501 Digital gauging stand (for DG10B to DG100B, DE-30BR)
ø40
Serial No.
MADE IN JAPAN
Thickness 21/0.83
100
272
200
370
110
98
38/1.5
(101/3.98)
(27/1.06)
ø5.7/ø0.22
Cable length 300/11.81
•Surface plate material: alumina ceramic
•Surface plate flatness: 2 μm
•Surface plate size: 110 mm (4.33") x 110 mm (4.33")
•Maximum workpiece height: approx. 190 mm(7.48")
•Gauge mounting hole: ø 20mm (0.79")
•Mass: 13kg (28.67 lbs)
A/B quadrature output type
132
Display connection type
ø20
Probe mounting hole
16/0.63
117.5/4.63
125/4.92
Unit : mm
28/1.1
DZ174-010/025/050 Air lifter (for DG10B to DG50B)
A
26
22
B
Measuring unit
53
34.5
36
46
11
B
Measuring unit
32.5 75.5
DG10BS
15
9
26/1.02
A
DG10BP/BN
32.5
DG25BP/BN
56
47.5 118
A
B
DG25BS
47.5 98.5
DG25BL
47.5 98.5
DG50BP/BN
72
200
2-ø5.5
Unit : mm
100/3.94
2 - M4 deep 4/0.16
9/0.35
DZ-122 Feeler (for DG10B to DG50B)
DZ-100 Roller feeler (for DT Series,DG-B Series: except for DG155BP/205BP)
*Build to order for A/B quadrature output type.
ø10
ø7
7
M2.5
5
M2.5
A/B quadrature output type For automatic inspection/measurement in production lines.
• DG-M series for direct AB quadrature output with 5V power supply
• DG-E series for direct AB quadrature output with power supply from 11 to 28V
• Contact point: ø 2.5 mm/0.098" carbide ball
tip (mounting screw: M2.5 x 0.45)
ø4.5
22
16.8
Unit : mm/inch
Roller thickness:4mm
ø12
Unit : mm
Unit : mm
Specifications
DG□□□M
DG□□□E
Power supply voltage
DC 5 V ± 5 %
(Corresspond to remote sensing function)
DC 11 V to 28 V
(Corresspond to remote sensing function)
Power consumption
300 mA (Maximum)
150 mA (Maximum)
Output signal
Resolution
9
8.5
16.5
15
M5
Based on EIA-422 (Line driver:AM 26C31 or equivalent)
A/B quadrature signal
0.5,1,2,5,10 μm (0.000025",0.0005",0.0001",0.00025",0.0005") selectable
Maximum response speed
1 m/s
Minimum phase difference
200 ns
The output phase difference varies with the measuring speed.
A/B quadrature output of this probe turns to high impedance
Alarm
DZ-191 Coupling
for 10 to 20 ms when excessive speed or cable disconnection alarm occurs.
Nut (M 5)
Gasket
5
Fixing screw
(3-M 3 x 5)
ø18
Output interface
DZ-181 Magnetic contact point feeler (for DG155BP/205BP)
ø22
Model
16
Spindle mounting
screw (M 2.5)
Mounting screw for machine carriage (M 5)
Unit : mm
Unit : mm
If the cause is removed, the alarm signal is automatically reset.
Output connector
Dimensions
Operating temperature
Storage temperature
Mass (excl. cable and gauge part)
MDR10214-52A2JL (3M) *
125 x 28 x 28 (mm) (not including projecting parts)
0˚C to 40˚C / 32 ˚F to 104 ˚F
-20˚C to 60˚C / -4 ˚F to 140 ˚F
Approx.150 g
*Cable MDR-10114-3000VE (3M)
26
27
DZ-801 Air lifter (for DG805BL/810BL)
DZ-161 Lift lever (for DG-B except DG155BP/205BP; standard accessory for the DG110B)
ø10
M2.5
ø30
Connecting tube
8.5
When released
75.5
Cylinder stroke
unit : mm
unit : mm
DZ-531 Digital gauging stand (for DK110, DG110B)
DZ-581 Measuring force balancer (for DK110, DG110B)
•Surface plate material: gabbro
•Surface plate flatness: 3 μm
•Surface plate size: 350mm (13.78'') x 350mm (13.78'')
•Maximum workpiece height: approx. 330mm (12.99")
•Gauge mounting hole: ø 20mm (0.79")
ø50
•Mass: 38kg(83.8 lbs)
Balance arm
Grooved bearing
Hook
Weight
520
633~698
A/C
330Max.
Mounting screws
2-M6
500
25~355
Balancer mounting
hook hole
135
Digital gauge stand
DZ-531
75
290
Spring washer
350
153
ø10
Column washer
350
Cord
64
420
160
ø20
26
M2.5
Feeler
mounting hole
23.5
Unit : mm
Unit : mm
Weight
•No weight:1.55±0.15N(155±15gf)
•B:1.0±0.15N(100±15gf)
•B+A:0.7±0.15N(70±15gf)
•B+C:0.3±0.15N(30±15gf)
A
B
C
DZ-5100 Feeler set
•Plastic ball contact
point: ø 3mm nylon ball
•Flat carbide contact point
•Off-center contact point:
ø 1mm steel ball
ø7
•Pin contact point
M2.5
M2.5
5
M2.5
5
ø7
ø6.5
Note: The four contactors shown at right are included.
ø6
25
17.5
19.3
17
13
5
5
5
M2.5
10
ø5
ø1.5
Unit : mm
SZ70-1 Adapter
22
1.2
28.6
(45)
(15)
63
46 ±0.15
54
36 ±0.1 9
(Φ6.5)
45 ±0.1
8.5
9
300
19
84.4
22.8
(33)
29.8
28.1 +0.2
-0
15.5
SZ70-1 is required for connecting the following scale units and counters:
Gauge unit : DE-BR Series, DG-B Series
Counter : LH71A/72, LY71 and LY72
* Adapter DZ51 is also required
10.7
2−M3 baring
2.2
17
2-φ3.7
4
40
Unit : mm
*Please refer to p54 for the details of the screw.
28
29
DT512N/P
DT
DT
Compact and slim gauges with 1μ m resolution
Compact and slim gauges
• Excellent resistance to workshop conditions
(DT12P, DT32P/PV : IP64)
• Resistant to oil, water, dust, vibration, and shock. • Accuracy : 10μ m
• Resolution : 5μ m • Measuring range : 12mm/ 0.47", 32mm/1.26"
• Compact size ideal for designing into machines
• Excellent resistance to workshop conditions (DT512P: IP64)
• Resistant to oil, water, dust, vibration, and shock.
• Accuracy: 6 μ m
• Resolution: 1 μ m
• Measuring range: 12 mm / 0.47"
• Compact size ideal for designing into machines
DT512P
12 x 35 x 116 mm / 0.47'' x 1.38'' x 4.57'' (D x W x L)
•
•
DT512N
DT512
DT12N/P,32N / NV/ P/ PV
DT12N
DT12P
DT12 : 12(D) x 35(W) x 116(H)mm/ 0.47" x 1.38" x 4.57"
DT32 : 12(D) x 35(W) x 218(H)mm/ 0.47" x 1.38" x 8.58"
Pneumatic push type are also available
Guaranteed number of strokes : 5million
Main applications : Automatic sorting of parts
•
DT32PV
DT32NV
LY71,LY72
MT13+CE-29
DT512
LY71,LY72
MT13+CE-29
LT11A
Digital Gauge
Digital Gauge
MG20-DT
LT11A
MG20-DT
Dimensions
Dimensions
DT512P
0
ø8 -0.015
0
/ø0.31-0.00059
15/0.59
ø4/
ø0.16
2-ø4.2 hole/0.17
4/0.16
(81/3.19)
12/0.47
DT12N
Ser.No.
95/3.74
10/0.39
Cable length 2000/78.74
DT32PV
Cable length 2000/78.74
251
Dimensions and dimensional tolerance
for the mounting holder
4
475
75
Mounting holder
5
95
9/0.35 8.5/0.33
15
M3
14/0.55
1/0.04
8/0.31
Torque : 0.18 to 0.23N.m
Material : ISO 683-C45
ø8G6 +0.014
+0.005
2-M4 Tap
12
Toque : 0.18~0.23N m
Material : ISO 683-C45
2-M4 screws+
washer
45
8/0.31
ø8G6 +0.014
+0.005
9/0.35 8.5/0.33
14/0.55
1
(35)
33
Dimensions and dimensional tolerance
for the mounting holder
0
ø8 -0.015
2-ø4.2
M3
42/1.65
218/8.58
ø4.5/
ø0.18
MADE IN JAPAN
MADE IN JAPAN
Cable length 2000/78.74
(35/1.38)
33/1.3
15/0.59
ø4/ø0.16
0
ø8 -0.015
0
/ø0.31-0.0006
(stem)
14.5/0.57
5/0.2
33/1.3
25/0.98
12/0.47
(35/1.38)
32.6/1.28
10.5/0.41
0
ø8 -0.015
0
/ø0.31-0.0006
(stem)
5/0.2
DT512P
ø4.5/
ø0.18
MADE IN JAPAN
15/0.59
(35/1.38)
33/1.3
25/0.98
14.5/0.57
12/0.47
11.6/
0.46
32.6/1.28
10.5/0.41
15/0.59
2-ø4.2/ø0.17hole
Ser.No.
ø4.5/
ø0.18
ø4/ø0.16
0
ø8 -0.015
0
/ø0.31-0.0006
(stem)
DT512N
Ser.No.
DT32N
(27/1.06) 10/0.39 4/0.16
2-ø4.2/ø0.17hole
2-ø4.2/ø0.17hole
12/0.47
5/0.2
6/0.24
(27/1.06) 10/0.39 4/0.16
32.6/1.28
6/0.24
10.5/0.41
(27/1.06) 10/0.39 4/0.16
(35/1.38)
33/1.3
25/0.98
14.5/0.57
115.7/4.56
95.7/3.77
11.6/
0.46
6/0.24
DT12N
95.7/3.77
5/0.2
115.7/4.56
115.7/4.56
95.7/3.77
11.6/
0.46
DT512N
10
217.5
Unit : mm/inch
Specifications
Model
Specifications
DT512N
Measuring range
DT512P
Model
12 mm/0.47"
Spindle actuation
Resolution
1 μm
Measuring range
Accuracy (at 20 ˚C /68 ˚F)
6 μm
Resolution
Measuring
force
Upward
0.7 ± 0.5 N
Lateral
0.8 ± 0.5 N
Downward
Protective design grade
Operating temperature
Storage temperature
Cable length
Mounting stem diameter
Feeler
Mass (excl. cable unit)
Guaranteed number of strokes
Unit : mm/inch
All directions: 1.7 N or less
Measuring
range force
0.9 ± 0.5 N
—
Equivalent to IP64
0 ˚C to 50 ˚C /32 ˚F to 122 ˚F
-10 ˚C to 60 ˚C /14 ˚F to 140 ˚F
2 m/6.56'
0
0
ø 8 -0.015
mm/ ø 0.31" -0.00059"
Feeler tipped with 3 mm dia. steel ball with M2.5p x 0.45 screw on fitting end
75 g / 2.65 oz
80 g/ 2.82 oz
5 milion
DT12N
DT12P
—
DT32NV
DT32P
DT32PV
Pneumatic push type
—
Pneumatic push type
DT32N
12 mm/ 0.47"
32 mm/ 1.26"
5 μm
Upward
0.7 ± 0.5 N
Lateral
0.8 ± 0.5 N
Downward
0.9 ± 0.5 N
All direction:
1.7 N or less
All direction:
2.9 N or less
All direction:
*2 9 N or less
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F (gauge)
Operating temperature
-10 ˚C to 60 ˚C / 14 ˚F to 140 ˚F
Storage temperature
2 m/ 6.56"
0
0
ø 8 -0.015
mm/ ø 0.31" -0.00059"
Cable length
Mounting stem diameter
Feeler tipped with ø 3 mm/ ø 0.12" dia. Carbide ball with M2.5p x 0.45 screw on fitting end (DZ-123)
Feeler
Protective design grade
1.5 ± 0.8 N
10 μ m
Accuracy (at 20˚C / 68˚F)
Mass*1
1.1 ± 0.8 N
1.3 ± 0.8 N
Approx.75 g/ 2.65 oz
Approx.80 g/ 2.82 oz
—
Equivalent to IP64
Guaranteed number of strokes
Approx.120 g/ 4.23 oz
Approx.140 g/ 4.94 oz
—
Approx.120 g/ 4.23 oz Approx.140 g/ 4.94 oz
Equivalent to IP64
5 million
*1 excl. cable unit and Interpolator unit.
*2 Measuring force with air pressure of 1.96 x 10 5 Pa and speed control is open.
*3 Measuring force with air pressure of 2.35 x 10 5 Pa and speed control is open.
30
31
Accessories
MT12/13/14
MT
(for DT series)
Detectors for DT12 / 32 Series
DZ176 Air lifter (for DT)
• MT12/13: For connection to counter
• MT14: Unterminated cable
A/B-quadrature output by line driver [EIA-422 compliance]
• Power supply + 5 V DC
102.7 (Max)
•Measuring range: 0 to 12 mm •Can be used for DT12/512P/N
•Air pressure: 250 to 700 kPa (25,48 to 69,58 N/ cm2)
•Operating temperature: 0 to 50°C •Storage temperature: -10 to 60°C
•Mass: 41g (incl. speed controller) •Service life:5 million times
•Supplied accessories: Mounting jig, speed controller (SMC: AS1211F-M5-04)
ø10
77.7
unit : mm
DZ-191 Coupling
8.5
DZ-100 Roller feeler (for DT Series,DG-B Series: except for DG155BP/205BP)
16.5
DT12/32, DT512
ø10
5
LT30
The control
unit of
respective
company
Roller thickness:4mm
MT12 / MT13
ø12
Unit : mm
Counter unit
connector
Cable
Measuring unit connector
Spindle mounting
screw (M 2.5)
Mounting screw for
machine carriage (M 5)
Interpolator
32/1.26"
Nut (M 5)
MT13
Dimensions
22
ø18
7
Fixing screw
(3-M 3 x 5)
LT20A
MT14
M2.5
15
MT12
Unit : mm
98/3.86"
25/0.98"
MT14
Cable length : 300/11.81"
Measuring unit connector
Cable
32/1.26"
Other accessories
•CE-08 Extension cable:CE08-01(1m)、03(3m)、05(5m)、10(10m)、15(15m)
•CK-T Extension cable(Ahead-proof)
:CK-T12(1m)、T13(3m)、T14(5m)、T15(10m)
•CK-T101/T105(Winding-proof)
:T101(3m)、T105(5m)S
25/0.98"
98/3.86"
Phase difference for A/B phase output
Cable length : 300/11.81"
Unit : mm/inch
Changes as follows according to the traveling velocity of the measuring unit.
Model
MT□□-01
MT□□-05
MT□□-10
Output phase difference (μs)
Velocity
(m/min)
0 to 2.5
0 to 12.5
0 to 25
20
to 6.25
8
to 31.25
to 62.5
to 12
to 60
to (100)*
5
to 24
to (100)*
–
2.5
to 60
–
–
1
to (100) *
–
–
0.5
MT12
MT13
A, B, ALARM
A, B
_ _
A, B
MT14
A, B, ALARM
_ _ _
A, B, ALARM
* An alarm is output at a traveling velocity of 100 to 115 m/min. The sampling frequency of the output signal is 120 μs.
Cable color MT12
Output signal : A/B phase, Alarm Output format : NPN open collector output
(maximum rated voltage: 31 V, maximum rated current: 50 mA)
Pin no.
Description
Cable color
1
+5 V
Red
2
–
–
3
0V
4
5
6
Cable color MT13
Pin no.
Output signal : A/B phase (The output becomes high impedance during an alarm.)
Output format : Voltage differential line driver output (compliant with EIA-422)
Cable color MT14
Output signal : A/B phase, Alarm (The output does not become high impedance during an alarm.)
Output format : Voltage differential line driver output (compliant with EIA-422)
Description
Cable color
Description
1
+4.5 V
Purple
+5 V
2
0V
Black
0V
White
Black
3
A
0V
Brown
A
Yellow
4
_
A
Blue
Yellow
0V
Black
B
Blue
5
B
Orange
A
Yellow
–
–
6
B
Gray
A
Blue
7
–
–
7
–
–
B
Gray
8
ALARM
Gray
9
0V
Purple
10
0V
Orange
Case
FG
Shield
Connector used: Hosiden TCP8938 or equivalent product
0V and the shield (FG) are connected with a capacitor.
Nothing should be connected to cables with colors not found in this table.
_
Cable color
Red
_
_
8
–
–
B
Orange
Case
FG
Shield
ALARM
Purple
_
Connector used: Hosiden TCP8938 or equivalent product
0V and the shield (FG) are connected with a capacitor.
Nothing should be connected to cables with colors not found in this table.
ALARM
Green
FG
Shield
0V and the shield (FG) are connected with a capacitor.
Specifications
Model
MT12-05/10
Compatible measuring units
100 m/min
Output format
Operating temperature and humidity range
*Please refer to p54 for the details of the screw.
32
1μm(-01), 5μm(-05), 10μm(-10)
5μm(-05), 10μm(-10)
Power voltage
Power consumption
MT14-01/05/10
DT12/32, DT512
Maximum response speed
Resolution
MT13-01/05/10
0.9 W
DC5 V ±4 %
1.2 W (when output load of 120Ω is connected)
Voltage differential line driver
NPN open collector
0 to +50 ˚C (no condensation)
Storage temperature and humidity range
-10 to +60 ˚C (20 to 90 %RH)
Dimensions
See the Dimensional Diagram.
Mass
About 90 g
33
DL-B
Accessories
Slim, compact gauges
(24.5)
54
22
DZ51 (Relay adapter) For connections of DG-B, DL-BR, DL-B and DT12/32N/P* to LG, LH and LY displays
• Magnetic principle
• Excellent resistance to workshop conditions (DL310B: IP64).
Resistant to dust and vibrations.
• Compact size ideal for designing into machines.
• A/B phase output by open collector
• Measuring range: 10 mm / 0.39" and 30 mm / 1.18"
35
DL
*To connect the DT12/32N/P, use the DZ51 in
combination with the MT10 detector.
(10.4)
60.6
(61.3)
DZ51+SZ70-1
DL-B
LY71,LY72
(64)
Unit : mm
DZ-811 Bushing (for mounting a U60A or a DE30BR to a DZ-501 stand)
Digital Gauge
LT20A
26
+ 0.05
ø8 + 0.01
ø22
DL310B
ø20 - 00.05
Dimensions
DL330B
Cable length 2000/78.74
25
ø4.8
/ø0.19
ø4.8
/ø0.19
Cable length 2000/78.74
Unit : mm
DZ173 Air release (for DE12BR/30BR, U Series)
DZ175-010 Air Lifter (for DL10BR) -030 (for DL30BR) -060 (for DL60BR)
26
106/4.17
4
/0.16
2-M4 screw(mounting hole)
6
/0.24
Measuring unit
A
B
C
DL10BR
28.5
102
1
DL30BR
48.5
102
1
DL60BR
83
161
5.5
C
9
Bellows
DZ-191 Coupling
71
Extension spindle
8.5
15
DL310B
DL330B
10 mm/ 0.39"
30 mm/ 1.18"
Resolution
Mounting screw for
machine carriage (M 5)
Unit : mm
Unit : mm
SZ70-1 Adapter
A/B phase by NPN open collector (12 VDC, 10 mA or less)
5 VDC ± 5%
Power consumption
2−M3 baring
2 m / 6.56'* 2
Cable length
63
10.7
0.2 W
Feeler tipped with 3 mm dia. carbide ball with M2.5 x 0.45 screw on fitting end (DZ123)
60 g / 2.12 oz
90 g / 3.17 oz
6.0 x 10 4 to 7.5 x 10 4 Pa
—
(33)
-10 ˚C to 60 ˚C / 14 ˚F to 140 ˚F
Power supply
2.2
17
4
40
300
19
22
(45)
(15)
1.2
28.6
Storage temperature
(Φ6.5)
29.8
28.1 +0.2
-0
15.5
0 ˚C to 50 ˚C / 32 ˚F to 122 ˚F
8.5
46 ±0.15
Operating temperature
84.4
22.8
54
0
0
ø 8 -0.01
mm / ø 0.31" -0.0004"
Mounting stem diameter
SZ70-1 is required for connecting the following scale
units and counters:
Gauge unit: DE-BR Series, DG-B Series
Counter: LY71 and LY72
* Adapter DZ51 is also required
36 ±0.1 9
—
9
120 m/ min
Equivalent to IP 64
45 ±0.1
Maximum response speed* 1
34
Spindle mounting
screw (M 2.5)
Nut (M 5)
1.5 N or less
Output signal
Vacuum pressure for Air lifter
30
10 μm
Measuring force
*1: Max. response speed of the electrical circuit.
*2: Please consult our sales for more than 2m.
*Consult us when using DL310B/ 330B with the probe facing upward.
(5)
25
10 μm
Accuracy (at 20 ˚C /68 ˚F)
Mass (excl. cable unit)
Fixing screw
(3-M 3 x 5)
ø18
6
•With the extension spindle attached,
the spindle is extended by 25 mm and
the measuring force increases by about 0.3 N.
Specifications
5
16.5
M2.5
ø4
ø7.5
M2.5
Feeler
unit : mm
11
Unit : mm/inch
Protective design grade
2-ø5.5
B
166/6.54
DZ301 Bellows set (for DL330B, DE30BR)
Model
Measuring range
9
53
15/0.59
36
46
22
A
9.6/0.38
10/0.39
25/0.98
34/1.34
0
3/0.12
(37/1.46)
34.5
ø8 -0.01 0
/ø0.31-0.0004
(stem)
ø4
/ø0.16
11.5/0.45
2-M4 screw(mounting hole)
6
/0.24
9.6/0.38
10/0.39
6/0.24
34/1.34
15/0.59
0
3/0.12
(26/1.02) 15/0.59
98/3.86
4
/0.16
11.5/0.45
6/0.24
ø8 -0.01 0
/ø0.31-0.0004
(stem)
59/2.32
2-φ3.7
Unit : mm
*Please refer to p54 for the details of the screw.
35
U Series
Accessories
(for U series)
DZ521 Gauging stand (for DG805BL/810B/810BL, U Series, DE12BR)
• High accuracy: 2 μ m (U12B/ 30B)
3 μ m (U60B)
• High resolution: 1 μ m • Measuring range: 0 to 60 mm / 0 to 2.36"
• Connectable to a personal computer through RS-232C interface.
• Peak hold for measuring max./ min./ peak-to-peak values
• The spindle contains a damper mechanism to protect measured objects
from damage (U30B/ U60B).
• Inch/ metric display
DZ173 Air release (for DE12BR/30BR, U Series)
80
•Surface plate material: alumina ceramic (dark brown)
•Surface plate flatness: 2 μm
•Surface plate size: 80 mm (3.15'') x 80 mm (3.15'')
•Maximum workpiece height: approx. 105 mm (4.13'')
•Gauge mounting hole: ø 8 mm (0.31")
•Mass: 3.8 kg (8.38 lbs)
Lever-type clamp
mounting hole o/ 8
75
ø25
Internal spring
prevents the arm
from dropping
59.5~135.5
*The air release and the gauging stand are optional accessories.
*Set bushing DZ-811 is required to use U60B with
gauging stand DZ-501.
233
U
Easy to operate, high-accuracy digital indicator
available in a wide measuring range.
Digital Indicators
150
88.5
Unit : mm
Dimensions
DZ-5100 Feeler set
•Plastic ball contact
point: ø 3mm nylon ball
MODE RECALL RESET
DATA OUT
DC IN 6 V
DIGITAL INDICATOR
MODE RECALL RESET
DATA OUT
M12 x 1
0
0
ø8 – 0.015
/ø0.31– 0.0006
124/4.88
43/1.69
31/1.22
94/3.7
ø5/ø0.19
5
19.3
17.5
5
13
17
ON
OFF
Note: The four contactors shown at right are included.
DIGITAL INDICATOR
MODE RECALL RESET
ø6.5
ø6
ø7
10
ø5
ø1.5
Unit : mm
M12 x 1
0
0
ø8 – 0.015
/ø0.31 – 0.0006
Other accessories
ø5/ø0.19
•Cable connectors for computer connection (for U Series/ LT Series/ LY Series) DZ252 (round 8 pin D sub 9 pin) (2 m) DZ253A (round 8 pin
DZ254 (round 8 pin unterminated end)
•Extension cable (for DZ252N/P, DZ253N/P, DZ254N/P) : CE08-1(1m), CE08-3(3m), CE08-5(5m), CE08-10(10m), CE08-15(15m)
(When a battery is attached)
6/0.23
6/0.23
6/0.23
ø5/ø0.19
45/1.77
M12 x 1
5
5
M2.5
MEM . CL
MEM . CL
MEM . CL
0
0
ø8 – 0.015
/ø0.31 – 0.0006
POWER
43/1.69 30/1.18
31/1.22
98/3.85
DC IN 6 V
DIGITAL INDICATOR
174/6.85
DATA OUT
43/1.69
27/1.06 31/1.22
DC IN 6 V
245/9.64
98/3.85
ON
OFF
ON
OFF
365/14.3
175/6.88
98/3.85
POWER
POWER
75/2.95
(46/1.81)
M2.5
M2.5
(46/1.81)
(46/1.81)
•Pin contact point
M2.5
58/2.28
52/2.04
47/1.85
53/2.08
60/2.36
•Off-center contact point:
ø 1mm steel ball
ø7
5
60/2.36
•Flat carbide contact point
25
U60B
U30B
66/2.59
U12B
D sub 25 pin) (2 m)
Unit : mm/inch
Specifications
Model
U12B
U30B
30 mm / 1.18"
12 mm / 0.47"
Measuring range
60 mm / 2.36"
1 μm
Resolution
Accuracy (at 20 ˚C /68 ˚F)
2 μm
3 μm
By key operation
Reset
Selectable
Direction
Max./ min./ peak-to-peak values
Peak hold function
Measuring force
Travel length of the release*1
1.3 N or less
1.5 N or less
2.2 N or less
Full stroke
Full stroke
32mm
24 m / min
Maximum response speed
RS-232C (2400 bps)
Output signal
0
0
ø 8 -0.015
mm / ø 0.31" -0.0006"
Mounting stem diameter
Operating temperature/humidity
0 ˚C to 40 ˚C / 32 ˚F to 104 ˚F (non condensing)
Storage temperature/humidity
-10 ˚C to 50 ˚C / 14 ˚F to 122 ˚F (non condensing)
AC adaptor: AC 100V 50/60Hz
Power supply
Feeler tipped with 3 mm dia. carbide ball with M2.5p x 0.45 screw on fitting end (DZ123)
Feeler
lift lever wrench
Supplied accessories
Mass
U60B
6-digit LCD display, mode indication (leading zero suppress, floating minus sign)
Display
Approx.190 g / 6.7 oz
Approx.230 g / 8.11 oz
*Please refer to p54 for the details of the screw.
Approx.300 g / 10.58 oz
*1 When air release DZ-173 (optional accessory) is activated
36
37
Interface unit
38
MG40 Series
40
MG10/20/30 Series
42
39
MG40 SERIES
MG
Intelligent Network system
• Up to 100 connectable gauges
• High speed data communication 100Mbit/sec
• Compatible with Ethernet, cc-Link
• Operating voltage : 12-24VDC
• DIN rail mounting (35mm)
Interface unit
System structure
Up to 100 connectable gauges
MZ41 Link Cable
MZ41-R5 0.5m
MZ41-01 1m
MZ41-02 2m
MZ41-05 5m
MZ41-10 10m
MG41-NC
MG41-NE
MG43
MG42-4
Ethernet
MG42-4
Gauge (DK series) up tp 4 axes
Power: DC+12 - 24V
Power supply by link cable
will be max. 6 units available
PC
(CC-Link,
Ethernet)
Gauge (DK series) up tp 4 axes
MG series System structures
Ethernet
CC-Link
MG41-NC
MG43
DK
MG42
DK
CC-LINK
MG41-NE
DK
MG42
DK
PLC
Ethernet
Power
Spec.
Model DK802A/B
Min.resolution
Accuracy
Measuing Range
2mm
DK805A/B
0.1μm
1μm
5mm
Power
MG43
FA computer
DK812A/B
12mm
DK10
DK25
10mm
2μm
25mm
DK50
DK100
0.5μm
DK110
DK155
DK205
110mm
5μm
155mm
6μm
205mm
4μm
50mm
100mm
MG40
DK10PR5
DK802AR
DK805AFLR
DK10PLR5
DK25PR5
DK50PR5
DK812AR
DK812AFLR
DK25PLR5
DK100PR5
DK155PR5/DK205PR5
40
DK800
0.1μm/
2,5,12mm
DK
0.5μm/
10-205mm
41
MG10/20/30 SERIES
MG
Main module
MG10-P1
Model name
Flexible digital gauge system for multi-point measuring .
Power source
Communication
• Up to 64 connectable gauges
• Input resolutions : 0.1μ m, 0.5μ m, 1μ m, 5μ m, and 10μ m.
• Compatible with RS-232C, BCD
• Operating voltage : 12-24VDC
• DIN rail mounting (35mm)
Linkage function
Supply voltage
Power consumption
Inrush current (10ms)
Power supply protection
Communication I/F
Baud rate setting
Data length
Stop bit
Parity
Delimiter
Maximum number of linkages
Maximum length of linking cable
Input format
Interface unit
I/O
Output format
Connectable
modules
Input signal
Output signal
Counter modules
Interface modules
MG10-P2
DC12-24V(11-26.4V)Min. startup time: 100ms or less
2.0W + total power consumption for connected modules*1
10A or less (when maximum number of modules are connected)
Fuse (5A fuse is built in.)
RS-232C (EIA-232C or equivalent)
2400 / 9600 / 19200 / 38400 bps (set with DIP switch)
7 / 8 bit (set with DIP switch)
1 / 2 bit (set with DIP switch)
none / ODD / EVEN (set with DIP switch)
CR / CR+LF (set with DIP switch)
16 (total of counter modules: 64)
10m
source input (+COM)
sink input (–COM)
Photo coupler insulation, external power: DC5 – 24V
sink type (–COM)
source type (+COM)
Photo coupler insulation, external power: DC5 – 24V
reset, pause, start, latching, and data out trigger to whole channels
integrated alarm
MG20-DK, MG20-DG and MG-20DT (available for mixed use, up to 16 modules) *1
MG30-B1,MG30-B2
*1: Total power of modules connected to MG10 should not be over 54W (12VDC Input) or 108 W (24VDC Input).
System structure
Counter module
MG10-P1/P2
MG20-DT/DG/DK
MG30-B1/B2
“MG”Multi Interface unit operates
with a variety of modules.
Counter module (MG20)
• Digital gauge input
• Resolution setting
33.1/1.3
20.5/0.81
64/2.52
64/2.52
20.5/0.81
Model name
Power consumption
Corresponding gauge
Measuring
unit input
Others
64/2.52
Allowable resolution setting *2
Maximum response speed
Reference point *3
Alarm
MG20-DK
1W + power consumption for connected gauge
DK series (A/B quadrature input)
10 / 5 / 1 / 0.5 / 0.1μ m
MG20-DG
1.4W (connected to DG-B) / 0.5W (connected to DL-B)
DG**B series, DL**B/DL**BR series
10 / 5 / 0.5μ m
set with DIP switch
Subject to the specification of the connected gauge
MG20-DT
0.8W
DT series
5μ m (DT12/32) 1μ m (DT512)
100m / min
–
REF-LED (reference point loaded) shows on the display after the reference point is detected. Set “0” or preset value on the counter when the reference point is detected.
S-ALM LED activates by excess speed/acceleration of measuring unit. C-ALM LED activates by excess speed of the internal circuit of counter.
Alarm display is cancelled by reset command from MG10 or with the reset button of main unit.
*2: Set the resolution value of the connected gauge. *3: MG20-DG work only connect to DL**BR series
I/F module (MG30)
• BCD / GO / NO GO output
• Expansion module
(Sequential lineup)
99/3.9
105.5/4.15
MG20-DK
108.5/4.27
RESET
ADDRESS
RES
99/3.9
105/4.13
108.5/4.27
99/3.9
232C-SET
RS-232C
105/4.13
Unit No.
MG10-P1 : sink type output (–com)
MG10-P2 : source type output (+com)
DIR
LINK-IN
Main module (MG10)
• Power supply
• RS-232C Connection
• Connection
with Counter module,
I/F module
Interface module
SIG
MG20-DK : DK series gauges
MG20-DG : DG**B and DL**B/BR series gauges
MG20-DT : DT series gauges
BCD I/O
FG
35.65/1.40
4.35/0.17
4.35/0.17
64.5/2.54
23/0.91
64.5/2.54
64.5/2.54
24.5/0.96
I/O
MG30-B1 : BCD sink type output (–com)
MG30-B2 : BCD source type output (+com)
Unit : mm/inch
Output format
Input signal
Output signal
Output setting
All models
MG30-B2
1w
Input format
I/O
DC-IN
LINK-OUT
MG30-B1
Model name
Power consumption
Operating temperature
Storage temperature
source input (+com)
sink input (–com)
Photo coupler insulation, external power: DC5 – 24V
sink type (–com)
source type (+com)
Photo coupler insulation, external power: DC5 – 24V
DRQ / channel address / measuring mode shifting / comparator shifting / reset / start / posing / reference point loaded
BCD data (6 digits) / READY / code / GO/NO GO output / alarm / reference point loaded
timer (1~128ms) / OUT / OR / polarity (set with internal DIP switch)
0~+50˚C (No condensation)
–10~+60˚C (20~90%RH)
MG series System structures
The "MG" series is a modular gauging system that allows flexible,
multi-point measuring, with built-in software for today's most popular
output protocols.
The "MG" system can be easily mounted to a standard DIN rail
(35mm), requires minimal wiring, and can be easily expanded for
future upgrades.
sequencer
Conventional system structure
BCD
RS-232C
sequencer
MG30
MG10
counter
counter
counter
counter
DK series
resolution : 0.1/0.5μ m
Conventional systems require one
BCD cable per gauge axis.
The MG series, however, only
requires one BCD cable. In addition,
the MG series is connectable to our
DK, DG, DT, and DL series gauges.
DG- B/DL series
resolution : 0.5μ m /5μ m /10μ m
Max16ch
42
DT12,DT32
resolution : 5μ m
DT512
resolution : 1μ m
43
Counter unit
44
LT30 SERIES
46
LT20A SERIES
47
LT11A SERIES
48
LT10A SERIES
49
LY71
50
LY72
51
45
LT11A SERIES (for DT512)
LT
LT10A SERIES (for DT12/32)
LT
Compact, lightweight,
and easy-to-mount counter.
Compact, lightweight,
and easy-to-mount counter.
• Compact size : DIN standard (72 mm x 72mm / 2.83" x 2.83" W x H)
• Resolution: 1, 5, 10 μ m Selectable
• Suitable for panel mounting
• Direct interfacing from display unit to PLC or computer
• Current values, maximum, minimum, peak-to-peak values and
• Compact size : DIN standard (72 mm x 72 mm / 2.83" x 2.83" W x H)
• Resolution : 5,10 μ m Selectable
• Suitable for panel mounting
• Direct interfacing from display unit to PLC or computer
• Current values, maximum, minimum, peak-to-peak values and
• ADD/SUB function (2-channel model)
• Full lineup for various applications
• ADD/SUB function (2-channel model)
• Full lineup for various applications
GO/NO GO evaluation included as standard functions.
GO/NO GO evaluation included as standard functions.
Counter unit
Dimensions
Counter unit
Dimensions
<Panel cut dimensions>
<Counter stopper>
68 +1.0
+0.4
/2.67 +0.03
+0.015
16/0.62
2
2
68
SET
8
COMP
2-R2
72
BCD OUT.B
68
2
68
RESET
A
MODE
RESET
B
SET
68.1/2.68
73/2.87
15/0.59
MAX MIN P-P CPL 12 3 4
BA
60/2.36
4-R1 or less
72
68
BCD OUT.A
68 +1.0
+0.4
/2.67 +0.03
+0.015
MODE
RESET
B
68.1/2.68
73/2.87
RESET
A
15/0.59
MAX MIN P-P CPL 12 3 4
BA
60/2.36
68 +1.0
+0.4
/2.67 +0.03
+0.015
72
68
68
74/2.91
68/2.67
1/0.03
LT10A
MAX MIN P-P CPH 12 3 4
A+B
4-R1 or less
BCD OUT.B
2
16/0.62
(71.8)
LT11A
MAX MIN P-P CPH 12 3 4
A+B
BCD OUT.A
88/3.46
78/3.07
<Counter stopper>
68 +1.0
+0.4
/2.67 +0.03
+0.015
74/2.91
68/2.67
1/0.03
(71.8)
<Panel cut dimensions>
88/3.46
78/3.07
COMP
2-R2
8
72
33/1.29
33/1.29
Unit : mm/inch
Unit : mm/inch
Common Specifications
Common Specifications
LT11A-101
101B
101C
Display
201
Model
─
○
105B
105C
1 channel
─
○
BCD *2
205C
2 channel
I/O connectors *1
─
205B
○
─
─
○
─
─
○
RS-232C *3
─
○
─
○
RS-232C *3
─
○
─
○
RS-TRG *4
─
○
─
○
RS-TRG *4
─
○
─
○
Reset key or external input (I/O connectors)
Reset function
─
BCD terminal
─
RS-232C command
Reset key or external input (I/O connectors)
Reset function
BCD terminal
─
RS-232C command
BCD terminal
Preset function
─
Set or recalled with
RS-232C command
Recalled with BCD
reset terminal
─
Up to 4 values can be set for
comparator (key input).
Switched with BCD terminal.
Recalled with BCD
reset terminal
─
Set with RS-232C
command
Up to 4 values can be set for
comparator (key input).
Switched with BCD terminal.
─
Set or recalled with
RS-232C command
Preset function
─
─
RS-232C can set
or start.
Can be started with
the BCD terminal.
Can be started with
the BCD terminal.
─
Set with RS-232C
command
RS-232C can set
or start.
Peak hold function
─
Maximum response speed
Addition and subtraction function
Up to 4 values can be set for
comparator (key input).
Switched with BCD terminal.
─
─
80 m/min
─
A+B, A−B, B−A can be set with the direction setting.
─
─
Addition and subtraction function
Can be started with
the BCD terminal.
─
RS-232C can set
or start.
100 m/min
80 m/min
─
A+B, A−B, B−A can be set with the direction setting.
Displayed on LCD or the I/O connector’
s comparator outputs are all“H”(OFF).
Alarm
BCD alarm
terminal“H”(OFF)
─
─
BCD alarm
terminal“H”(OFF)
─
─
BCD alarm
terminal“H”(OFF)
─
Resolution, direction, comparator value, preset value, modes, etc.
Data storage
Data storage
─
BCD sign
─
Data signalling rate, etc.
BCD sign
1.8 W
2.9 W
2.0 W
2.3 W
4.0 W
2.5 W
Approx. 230 g
Approx. 220 g
Approx. 210 g
Approx. 270 g
Approx. 230 g
Compatible measuring unit
Note 1 : I/O connector
Input : Reset, peak-hold start, peak-hold pause, RS trigger (RS-232C models only)
Output : Result evaluation (photocoupler)
Note 3 : RS-232C (8 pin mini-DIN connector)
Reset, preset value setting/recall, peak-hold start, peak-hold pause,current value hold, software version read,
comparator value setting, current value/maximum value/minimum value/peak-to-peak measuringmode selection
and output, key lock and release.
BCD sign
Power input connector (3 pins) : DC9.0 to 26.4 V.
DT512 series
Note 2 : BCD (36 pin half-pitch connector)
Input : Reset, peak-hold start, comparator value selection (4 settings)
Output : five digits (open collector)One of current value/maximum value/minimum
value/peak-to-peakvalue selected and output.
Alarm output
Note 4 : RS-TRG pin
Trigger input for RS-232C data output
Note 5 : With measuring unit connected.
Power consumption *5
Mass
─
Data signalling rate, etc.
BCD sign
Data signalling rate, etc.
Operating temperature: 0 to 40°
C Storage temperature: −10 to 50°
C
Temperature
Approx. 200 g
Power voltage
─
Data signalling rate, etc.
Operating temperature: 0 to 40°
C Storage temperature: −10 to 50°
C
Temperature
Mass
Set with RS-232C
command
Can be switched
Maximum response speed
Resolution, direction, comparator value, preset value, modes, etc.
Power consumption *5
Set or recalled with
RS-232C command
0.005 mm, 0.01 mm selectable
Direction
100 m/min
BCD alarm
terminal“H”(OFF)
Recalled with BCD
reset terminal
Up to 4 values can be set for
comparator (key input).
Switched with BCD terminal.
─
RS-232C can set
or start.
Can be started with
the BCD terminal.
Displayed on LCD or the I/O connector’
s comparator outputs are all“H”(OFF).
Alarm
─
Set with RS-232C
command
Resolution
Can be switched
Direction
Set or recalled with
RS-232C command
Recalled with BCD
reset terminal
Maximum, minimum, and peak-to-peak values. Measuring started by the start input of the I/O connector; update stop by pause input.
0.001 mm, 0.005 mm, 0.01 mm selectable
Resolution
RS-232C command
Three-level comparator Comparator value set with keys on the front panel. Result evaluation: LED and I/O connector output (photocoupler)
Conparetor function
Maximum, minimum, and peak-to-peak values. Measuring started by the start input of the I/O connector; update stop by pause input.
Peak hold function
BCD terminal
Preset value set with preset key, recalled with reset key.
Three-level comparator Comparator value set with keys on the front panel. Result evaluation: LED and I/O connector output (photocoupler)
Conparetor function
─
RS-232C command
Preset value set with preset key, recalled with reset key.
48
205
5 digit backlit LCD, mode display
Measuring unit input
2 channel
○
─
LT10A-105
Display
1 channel
I/O connectors *1
I/O
201C
5 digit backlit LCD, mode display
Measuring unit input
BCD *2
201B
I/O
Model
1.8 W
2.9 W
2.0 W
2.3 W
4.0 W
2.5 W
Approx. 200 g
Approx. 230 g
Approx. 220 g
Approx. 210 g
Approx. 270 g
Approx. 230 g
Power voltage
Compatible measuring unit
Note 1 : I/O connector
Input : Reset, peak-hold start, peak-hold pause, RS trigger (RS-232C models only)
Output : Result evaluation (photocoupler)
Note 3 : RS-232C (8 pin mini-DIN connector)
Reset, preset value setting/recall, peak-hold start, peak-hold pause,current value hold, software version read,
comparator value setting, current value/maximum value/minimum value/peak-to-peak measuringmode selection
and output, key lock and release.
Power input connector (3 pins) : DC9.0 to 26.4 V.
DT12/32 series
Note 2 : BCD (36 pin half-pitch connector)
Input : Reset, peak-hold start, comparator value selection (4 settings)
Output : five digits (open collector)One of current value/maximum value/minimum
value/peak-to-peakvalue selected and output.
Alarm output
Note 4 : RS-TRG pin
Trigger input for RS-232C data output
Note 5 : With measuring unit connected.
49
LY71
LY
LY
For measurements and control in diverse field uses.
The required output board can be extended.
• Various outputs are enabled by mounting extension boards
-BCD Output (Option)
-Comparator Function: Relay / Open-collector (Option)
Peak Hold Function Convenient for Statistical Measurement
Convenient External Input Functions for Automatic Measurement
Display Resolution Switching Data Storage.
Reset/Preset/Restart Detecting Reference Point of Measurement Unit
Scaling Flicker Control
•
•
For measurements and control in diverse field uses.
Multifunction counter with RS-232C interface
• RS-232C standard function
• Peak Hold Function Convenient for Statistical Measurement
• Convenient External Input Functions for Automatic Measurement
• Display Resolution Switching
• Data Storage.
• Reset/Preset/Restart
• Detecting Reference Point of Measurement Unit
• Scaling • Flicker Control
•
Counter unit
Counter unit
Dimensions
2-M5
Max depth7
44
80
2-M4
Max depth18
123
315
(1237)
60
30
135
175
1765
1885
1985
2315
07
07
175
289
185
135
(315)
(105)
1614
80
(123)
(1237)
60
123
315
285 30
(905)
185
16 14
80
30
(315)
(105)
1765
1885
1985
2315
4-M5
Max depth7
262
245
285 30
262
245
123
Dimensions
(905)
•
•
•
•
•
LY72
289
44
80
2-M4
Max depth18
*Please refer to LY71 panel cut-out diagram.
Unit : mm/inch
*Please refer to p54 for the details of the screw.
262±0.2
4–ø5.5
Specifications
Model
Specifications by application
LY72
Applications as gauge (set axis labels A, B, and C)
Display
(30)
4–R3 or less
23.3
60
113.3+10
246.6+0
Applications as scale (set axis labels X, Y, and Z)
7 digits and minus display, Color amber
Number of input shafts
Mounting the counter unit from the panel front.
AC adaptor (option)
Unit : mm/inch
Display data
1 to 3 axis
Current (1st axis, 2nd axis, addition axis), maximum,
minimum and peak-to-peak values
Current (1st axis, 3rd axis, addition axis)
*Please refer to p54 for the details of the screw.
Measuring unit input
resolution
Specifications
Model
Display
Number of input shafts
Display data
Measuring unit input
resolution
Input signal
Display resolution
Minimum input phase difference
Alarm display
Reset
7 digits and minus display, Color amber
1 or 2 axes (2-axis add function available; addition only is displayed when adding)
Current (1st axis, 2nd axis, addition axis), maximum, minimum and peak-to-peak values
Standard : 0.1 μm, 0.5 μm, 1 μm, 5 μm, 10 μm, 1 s, 10 s, 1 min, 10 min
Expanded : 100 μm, 50 μm, 25 μm, 20 μm, 2 μm, 0.05 μm, and 1 degree can be added.
A/B quadrature signal, Z signal (Conforms to EIA-422)
Measuring unit input resolution or higher and supported inch units
Inch: Basic : 0.000005", 0.00001", 0.00005", 0.0002", 0.0005"
Inch: Expanded: 0.000002", 0.0001", 0.001", 0.002", 0.005"
100 ns
Measuring unit disconnected, Excess speed, Maximum display amount exceeded, Power failure, Error in stored data
Restart of peak value calculation for each axis/all axes
Preset
It is possible to store/edit up to three values for each axis.
The master calibration value is relocated when going past the reference point after the power is turned on.
Datum point operations
It is possible to store/edit one value for each axis (when not using the master calibration function).
Reference point operations
It is possible to store/edit one value for each axis (when not using the master calibration function).
Hold function
Linear compensation
Scaling
Power supply
Power consumption
Operating temperature
Storage temperature
Mass
Display resolution
Selectable from latch and pause
Latch : Display held while latched (Display hold)
Pause : Peak calculation stopped while paused (Peak calculation hold)
Alarm display
Current value reset, Alarm cancel
Restart
Preset
Master calibration function
Datum point operations
Reference point operations
Hold function
Linear compensation
RS-232C
Timer
Output data selection
0 to 40 ˚C (no condensation)
-20 to 60 ˚C (no condensation)
Approx. 1.5 kg
Power supply
Power consumption
Operating temperature
Storage temperature
Mass
—
Restart of peak value calculation for each axis/all axes
It is possible to store/edit up to three values for each axis.
The master calibration value is relocated when going past the reference
point after the power is turned on.
—
It is possible to store/edit one value for each axis (when not using the master calibration function).
It is possible to store/edit one value for each axis (when not using the master calibration function).
Selectable from latch and pause
Latch : Display held while latched (Display hold)
Pause : Peak calculation stopped while paused (Peak calculation hold)
Display hold
A fixed compensation amount is applied to the measuring unit's count value. Compensation amount Standard: ±600 μm/m (Expanded: ±1000 μm/m)
Scaling
Scaling factor: 0.100000 to 9.999999
MAX. 32 VA connected at the AC adaptor.
100 ns
Measuring unit disconnected, Excess speed, Maximum display amount exceeded, Power failure, Error in stored data
Reset
A fixed compensation amount is applied to the measuring unit's count value. Compensation amount Standard: ±600 μm/m (Expanded: ±1000 μm/m)
DC 12 V Rating 0.75 A Max. 1 A AC 100 V to 240 V ±10 % When using the AC adaptor PSC-22 (For U.S. only) or PSC-23 (For Europe and other countries) *Option
A/B quadrature signal, Z signal (Conforms to EIA-422)
Measuring unit input resolution or higher and supported inch units
Inch: Basic : 0.000005", 0.00001", 0.00005", 0.0002", 0.0005"
Inch: Expanded: 0.000002", 0.0001", 0.001", 0.002", 0.005"
Minimum input phase difference
Current value reset, Alarm cancel
Restart
Master calibration function
50
Input signal
LY71
Standard : 0.1 μm, 0.5 μm, 1 μm, 5 μm, 10 μm, 1 s, 10 s, 1 min, 10 min
Expanded : 100 μm, 50 μm, 25 μm, 20 μm, 2 μm, 0.05 μm, and 1 degree can be added.
Scaling factor: 0.100000 to 9.999999
Data format : All axes on same line/New line for each axis Peak-to-peak value
Transfer rate : 38400/19200/9600/4800/2400/1200 bps
Parity : None / Odd / Even
Stop bit : 1 or 2
Data length : 8 bits or 7 bits
OFF/0.2/0.5/1/5/10/30/60/300 seconds
—
Current value/Maximum value/Minimum value Peak-to-Peak value
Current value
DC 12 V Rating 0.75 A Max. 1 A AC 100 V to 240 V ±10 % When using the AC adaptor PSC-22 (For U.S. only) or PSC-23 (For Europe and other countries) *Option
MAX. 32 VA connected at the AC adaptor.
0 to 40 ˚C (no condensation)
-20 to 60 ˚C (no condensation)
Approx. 1.5 kg
51
Accessories
Technical information
LT Series Usage Note
LZ71 series Expansion boards (for LY71)
The functions of your LY71 counter unit can be expanded simply by inserting the expansion unit into the LY71.
I/O connector
The I/O connector on the rear panel of the counter unit has functions for Go/No Go output based on the comparator
function, start input, pause input, RS-232C trigger input and reset input.
<Connector pin assignment (LT30,20A,11A,10A)>
7
6
5
4
3
2
1
7
6
5
4
3
2
1
I/O connector A
I/O connector B
A
FG
Power input
connector
B
V 0V
DC IN
1
2
3
4
5
6
7
Common
I/O connector
Rear of display unit
Use a shielded cable for connection to the FG pin on the rear of the display unit.
(Prepare a shield cable by yourself.)
Outer cover
Cross section of the cable
Knitted shield
Connector used: MC1.5/7-ST-3.5 (provided) made by Phoenix Contact
Signal
(See “4-3. Function description”.)
I/O connector A
Pin No.
Signal name
IN/OUT
1
GND
-
Signal
2
NC
-
Connection prohibited
3
RESET (A)
IN
Reset input (A CH)AB
4
LO (A)
OUT
Go/No Go output Low (A CH)
5
GO (A)
OUT
Go/No Go output Go (A CH)
6
HI (A)
OUT
Go/No Go output High (A CH)
7
GND
-
LZ71-B
BCD output of various data
Various output modes
Open collector output
LZ71-KR
Comparator function for various data
Switching between 16 sets of data
Open collector output/relay output
•
•
•
•
•
•
LZ71-B
7 digit parallel data (4 bits x 7 digits), sign (1 bit), READY signal (1 bit)
Output logic positive and negative logic can be selected individually for the data and sign by the settings.
BCD output
Photocoupler output
VCE : Recommended DC +12 to 24 V
IC : Max. 15 mA/terminal, TOTAL: 300 mA
Output connector: 36-pin micro ribbon connector
I/O connector B (not provided for 1-channel models)
Signal name
IN/OUT
1
GND
-
2
NC
-
3
RESET (B)
IN
Reset input (A CH)AB
4
LO (B)
OUT
Go/No Go output Low (B CH)
5
GO (B)
OUT
Go/No Go output Go (B CH)
6
HI (B)
OUT
Go/No Go output High (B CH)
7
GND
-
Signal
Selectable from "BCD only latch" and "BCD & display latch" by the initial settings.
Input signal : DRQ1 to 3 (Photocoupler: 12 to 24 V)
Latch
Connection prohibited
Operating temperature
0 to 40˚C (32 to 104˚F) (No condensation)
Storage temperature
-20 to 60˚C (-4 to 140˚F) (20 to 90 % RH, no condensation)
Model
LZ71-KR
Comparator function
Sets 1 to 4 comparator values for judging the data size.
Comparable data Current, maximum, minimum and peak-to-peak values. (Based on the settings)
(1st axis, 2nd axis and addition axis)
Comparable data
Upper limit and lower limit combinations
Selectable from 16 data sets consisting of 1 to 4 comparator setting values.
Installing the display unit
Fig.2 Cut-out dimensions
Fig.1
5-point output signal
Photocoupler (voltage resistance: 24 V), Ic = 15 mA
5-point output signal
Relay : Panasonic Electric Works, Co., Ltd. ATQ209
24 V DC, 120 V AC, 0.3 A
Judgment outputs
Fig.3
Panel box
Panel thickness: Max. 4
External input
/ 2.68
+0.033
+0.016
Front of
display
unit
Photo coupler: supports 12 to 24 V
Positioning function (1 point) modes
30mm
+1.0
+0.4
Sets the positioning data and turns the output signal on for 0.5 s when the set value and the current value match.
Applicable data
Current value only (1st axis or addition axis)
Operating temperature
0 to 40˚C (32 to 104˚F) (No condensation)
4-R1 or less
Storage temperature
-20 to 60˚C (-4 to 140˚F)
+1.0
Installation
brackets
(supplied)
+0.033
68
68 +0.4 / 2.68 +0.016
When mounting in a panel
1. Cut out an opening to match the dimensions
shown (Fig.2)
2. Insert the display unit into the cut-out opening
in the panel from the front.
3. Attach the supplied installation brackets
(upper / lower) from the rear.
4. Use fingers to tighten and secure.
LZ71-KR
Specifications
Model
Electrical specifications
Pin No.
LZ71-B
(7.5)
114
48.7
10
19
15
102
26.5
10.9
14.85
122
13.25
102
129
19
6.3
14.85
122
13.25
6.3
129
14.8
(59.3)
48.7
Unit : mm/inch
7.5
14.8
10
Note: When attaching the installation brackets to the display unit, leave enough space (min. 30mm) between it and the panel.
(42)
87
(7.5)
114
(59.3)
Front of display unit
Installation
brackets
(supplied)
LZ71-KR
(42)
87
7.5
2−R1.8
26.5
LZ71-B
2−R1.8
Unit : mm
Other accessories
•Cable connectors for computer connection (for U Series/ LT Series/ LY Series) DZ252 (round 8 pin
DZ254 (round 8 pin unterminated end)
52
D sub 9 pin) (2 m) DZ253A (round 8 pin
D sub 25 pin) (2 m)
53
Connection Cables
Measuring unit
Adapter for
LT series
LT series
Interface unit Adapter for Connection Counter unit Interpolators
Counter
cable
DK50/100
−
LT30
MG
(MG10-P1/P2)
(MG20-DK)
(MG30-B1/B2)
−
(MG41-NC/NE)
(MG42-4)
Link Cable MZ41-**
DK155PR5/205PR5
CE-29-***
***=-003(0.3m)
-01(1m)
-05(5m)
-10(10m)
LY71, 72
−
DT32N/NV/P/PV
CE-08**
**=-01(1m),
-03(3m),
-05(5m),
-10(10m),
-15(15m)
−
LT10A
−
MG
(MG10-P1/P2)
(MG20-DT)
(MG30-B1/B2)
−
MT13
+
CE-29
LY71, 72
MT12(for LT20A),
MT13(for LT30)
MT14(Cable with
unterminated)
−
LT11A
DT512N/P
CE-22**
(Open-end)
**=-01(1m),
-03(3m),
-05(5m),
-10(10m)
CK-T**
(Realize for
flection)
CK-T12(1m),
T13(3m),
T14(5m),
T15(10m)
DK110NLR5
DT12N/P
Extension
cables
CE-08**
**=-01(1m),
-03(3m),
-05(5m),
-10(10m),
-15(15m)
DK805A/B, DK805A/B, DK810A/B
DK10/25
Compatible
CK-T12(1m),
T13(3m),
T14(5m),
T15(10m),
CK-T101(1m)
CK-T105(5m)
(Realize for flection)
−
DG805B/810B
Measuring unit
Adapter for
LT series
LT series
Interpolator
MT12
LZ60-P1/P2 is
required to
connect to LT100.
LT20
LT100
Adapter for
Counter
Connection
cable
Counter unit
Interpolators
Extension
cables
DT32N/NV/P/PV
DT512N/P
DT12N/P
CE-08**
**=-01(1m),
-03(3m),
-05(5m),
-10(10m),
-15(15m)
MT12
+
DZ51
−
LY51, LY52
−
CK-T12(1m),
T13(3m),
T14(5m),
T15(10m)
T101(3m)
T105(5m)
(Realize for
flection)
DT32N/NV/P/PV
−
LT10
−
LT11
−
LT20
LT100
DZ51
−
LY51, LY52
−
−
−
LT20
LT100
DZ51
−
LY51, LY52
−
−
DT512N/P
DG805B/810B
DG10B/25B
DG50B/100B/155B/205B
DG110B
DG10B/25B
−
LT20A
MG
(MG10-P1/P2)
(MG20-DG)
(MG30-B1/B2)
−
LT20A
MG
(MG10-P1/P2)
(MG20-DG)
(MG30-B1/B2)
LT30
SZ70-2+
MG
(MG10-P1/P2)
(MG20-DG)
(MG30-B1/B2)
DG50B/100B/155B/205B
−
−
LY71, LY72
MD10A/20B
※D-sub15pin
Female
DZ51
+
SZ70-1
−
LY71, LY72
−
−
DL-B
DG-110B
DL-B
DE-BR
54
SZ70-2
−
A description of external form chart of the screw
SZ70-1
−
LY71, LY72
−
−
・When a screw thread is not mentioned in the Dimensions,
It is mean numerical value base on standard pitch (National Coarse).
・The screw which conformed to ISO and JIS is enclosed.
55
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