SFC1480FX SFC2480FX series - Hitachi Metals America, Ltd.

SFC1480FX SFC2480FX series - Hitachi Metals America, Ltd.
Pamphlet
SFC1480FX
SFC2480FX
series
Hitachi Metals, Ltd.
Passing along the tradition from F to FX, a
SFC1480FX
SFC2480FX series
From F to FX: Passing along the tradition
Since the first of our SFC480 series, SAM brand highperformance mass flow controllers have been carrying forward a
tradition. We use a waveform diaphragm made of a Ni-Co alloy
(YET 101), developed by Hitachi Metals, which also proves that
we are a manufacturer of high class metal materials. By employing this excellent diaphragm in the flow rate control valve, the
key component in a mass flow controller, we incorporate a
simple valve design that
does not use any sliding
sections and reduces the
occurrence of particulate
contamination. With a high
corrosion resistance and
stable control performance,
we leave the competition
behind and our customers
Diaphragm valve
satisfied.
Circuit
・Less overshoot
・High speed response: 0 to 100%; 1.0 sec. max.
0 to 20%; 1.5 sec. max.
・Guaranteed precision when actually measuring gas
Sensor
・Larger diameter that doesn't clog easily
・Ni-free sensor (standard)
・Ni sensor for CIF3, HF
Housing material
・SUS316L (standard)
Our flow rate sensor, another key component in mass flow
controllers, employs a coil type thermal sensor based on
technology we have been accumulating for half a century, and it
is extremely reliable. In the SFC1480F series, thanks to the
latest digital control technology, we have developed a dual-range
mass flow controller,
and a hybrid mass flow
Coil 1
Coil 2
controller in which digital
Sensor tube
qs
control technology
reaches its peak. Our
Gas
Gas
inlet
outlet
reputation is solid
Q
qs
because our customers
feel we offer an
Bypass
incomparable product.
Basic design of the sensor
By inheriting the full tradition of the SAM brand, the
SFC1480FX/SFC2480FX series are our most advanced models.
Valve actuator
・Uses a layered-piezoelectric element
Metal diaphragm
・Waveform Ni-Co alloy diaphragm (A proprietary
development of Hitachi Metal)
・Extremely corrosion-proof with stable control
・No sliding surfaces and less creation of particles
Valve orifice
・Simple flow route
Surface finish
・Our unique, special electro-polishing
2
bold advancement to the next generation.
A bold advancement into the next generation, from G to FX
Conceptual diagram of the MG/MR (multi-gas/multi-range) mass flow controller
N2
MFC
MFC
MFC
MFC
MFC
MFC
Ar
O2
H2
C 2H 4
SF6
SiH4
MFC
MFC
MFC
MFC
MFC
MFC
CF4
PH3
C2F6
NF3
SiF4
CO
While inheriting the tradition of our earlier mass flow controllers, the
SFC1480FX/SFC2480FX series is a bold advance into the next
generation. The major element of innovation in this new series is the
combination of many new technologies derived from the development of the G series all-in-one mass flow controller, in a new, next
generation mass flow controller.
One core technology that has been fed back from this development
is the MG/MR (multi-gas/multi-range) function. In conventional mass
flow controllers, one controller could only handle one type of gas and
one full scale flow rate range. This means that customers needed to
have another mass flow controller for each different system, and for
each different process recipe.
Since the FX series flow rate controller is equipped with the MG/MR
function, and by preparing up to 14 recipes (full scale ranges of 2
SCCM to 50 SLM) to match the intended flow range, you can
change the gas type and flow rate to match the actual gas you want
to handle. When connected to a personal computer, the metering
conditions can be changed instantly (See page 6).
Hitachi Metals actual gas flow rate accuracy guarantee system backs
up this MG/MR function. A conventional mass flow controller only
guarantees the flow rate precision with N2 gas. To get the flow rate
conditions for your actual gas using a conventional MFC, a conversion factor must be used as a coefficient to convert the flow rate.
Abbreviation
MG/MR
FR-01
FR-02
FR-03
FR-04
FR-05
FR-06
FR-07
FR-08
FR-09
FR-10
FR-11
FR-12
FR-13
FR-14
Standard full-scale flow rate range
(N2 equivalent)
Flow range
2∼5 SCCM
6∼14 SCCM
15∼27 SCCM
28∼38 SCCM
39∼71 SCCM
72∼103 SCCM
104∼192 SCCM
193∼279 SCCM
280∼754 SCCM
755∼2037 SCCM
2038∼5500 SCCM
5501∼11000 SCCM
11001∼30000 SCCM
30001∼50000 SCCM
The reference values for these coefficients have been based of a
variety of values, including calculated values, actually measured
values, and empirical values. And, these were merely guidelines or
reference values with some gas types. Although the MG/MR function is
included, if the gas data deviates from the characteristics of the actual
gas, the mass flow controller cannot perform as its designed level
With the FX series mass flow controller, in addition to the flow rate
reference for N2 gas (that ensures conformance with the national
standard using the conventional gravimetric method), we installed
full scale actual gas metering and exhaust gas processing facilities
at our factory. Using these facilities, measurement is made for each
type of gas at each full-scale range, and record the data. This is then
used as actual gas data.
The advancements in the FX series are not limited to the features
above.
The PI (Pressure Insensitive) function improves the controller's
ability to tolerate variations in the primary pressure. This function
improves durability and is currently highly desired in mass flow
controllers. The G1 series was developed from the G series as a
mass flow controller containing a PI pressure sensor. The FX series
inherited the PI technology of the G1 series. Although the FX series
models do not have a pressure sensor, they employ a sensor
method and housing that can be used with the new PI technology.
So, even though the FX series is not as advanced as the G1 series
with its full scale PI function, they have greater PI performance by
design, when compared with the existing F series.
N2 gas reference flow rate
Actual gas flow rate measurement facility
3
SFC1480FX / SFC2480FX series
For both the 1.5" and 1.125"IGS MG/MR Mass Flow Controllers
Zero calibration
Alarm LED
FLOW
93
70.8
Digital interface connector
RJ-12 x2
D-subminiature 9-pin
16.9
100.6
84
Item
Model name
Standard full scale flow rate
(N2 equivalent)
Function
Valve operation
Flow rate control range
Operation pressure
*2
Temperature
Inlet pressure
Outlet pressure
Proof pressure
Operation
Accuracy guaranteed
Heating temperature when not powered
Humidity
Installation position
Accuracy
N2 gas
Actual gas
10∼100%
2∼10%
10∼100%
2∼10%
N2 gas
Actual gas
10∼100%
Repeatability
2∼10%
Flow rate sensor guaranteed zero point deviation range
Zero point
Temperature dependence
Span
0% → (20∼100%)
Response Time
0% → (2∼20%)
External leakage standard
Flow rate setting signal
Flow rate output signal
Linearity
Required power
Housing, flange, valve seat
Diaphragm
Flow sensor
Seal *3
Surface finish of components that contact the gas
Fitting *4
Material of gas
wetted surface
42.5
20
2xM4, 3mm deep
1480FX-4UG-L
SFC1480FX
SFC2480FX
5SCCM
∼5,500SCCM
W-seal
Model name H
2480
127
2470
2481
147
2471
2482
2472
167
2483
2473
50.6
20
2xM4, 3mm deep
2480FX-4SUG-L
Specifications *1
SFC1481FX
SFC1482FX
SFC2481FX
SFC2482FX
∼11SLM
4-φ4.4
92
21.8
28.6
30
39
15
4-φ5.6
20
79.8
W-seal
Model name H
1480
127
1470
1481
147
1471
1482
1472
167
1483
1473
25.4
25.4
H
12.1
H
12.1
50.8
27.7
27.2
D-subminiature 9-pin
(5.6)
Digital interface connector
RJ-12 x2
Alarm LED
Zero calibration
FLOW
(5.6)
Dimensions
∼30SLM
SFC1483FX
SFC2483FX
∼ 50SLM
Multi-gas/multi-range
Normally closed / normally open
2∼100% F.S.
0.05∼0.3 MPa (G)
0.2∼0.3 MPa (G)
0.1∼0.3 MPa (G)
7.3∼43.5 PSI (G)
29.0∼43.5 PSI (G)
14.5∼43.5 PSI (G)
Vacuum to ambient pressure
1.0 MPa (G) 145 PSI (G)
5∼50 ℃
15∼35 ℃
65℃ maximum
35∼80%RH (non condensing)
Horizontal, Vertical
Horizontal, Vertical (option)
± (0.5% S.P. + 0.15% F.S.)
±0.2% F.S.
± (1.5% S.P. + 0.35% F.S.)
±0.5% F.S.
±0.3% F.S.
±1.0% F.S.
± (0.1% S.P. + 0.05% F.S.)
±0.06% F.S.
±0.5% F.S. / year, max.
±0.01% F.S. / ℃ (15∼35 ℃)
±0.01% S.P. / ℃ (15∼35 ℃)
Max. 1.0 sec. to reach ±2% S.P of the set value.
Max. 1.5 sec. to reach ±0.4% S.P of the set value.
Max. 1x10-11 Pa・m3/s (He)
0.1 to 5 VDC (absolute rating: Max. ±15 VDC)
0 to 5 VDC (maximum output: ±15 VDC)
+15 VDC ±4%, 140 mA max
-15 VDC ±4%, 140 mA max
SUS316L
YET101 (Ni-Co alloy)
Ni
SUS316L
Specially electro-polished (standard)
W seal, C seal, H1G seal, 1/4” HMJ (UJR) male
SUS316L
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*4: An H1G seal is only available on the SFC14**FX series
4
SFC1480FX-D / SFC2480FX-D series
DeviceNetTM communication type For both the 1.5" and 1.125"IGS MG/MR Mass Flow Controllers
Zero calibration
FLOW
Dimensions
Zero calibration
FLOW
DeviceNetTM Connector
Male Micro Connector
Service connector (RJ-12)
(RS-232C)
DeviceNetTM Connector
Male Micro Connector
(16)
17.2
84
25.4
25.4
H
H
36
27
13.5
93
62
(16)
Service connector (RJ-12)
(RS-232C)
16.7
Item
Model name
Standard full scale flow rate
(N2 equivalent)
Function
Valve operation
Flow rate control range
Operation pressure
*2
Temperature
Inlet pressure
Outlet pressure
Proof pressure
Operation
Accuracy guaranteed
Heating temperature when not powered
Humidity
Installation position
Accuracy
N2 gas
Actual gas
10∼100%
2∼10%
10∼100%
2∼10%
N2 gas
Actual gas
10∼100%
Repeatability
2∼10%
Flow rate sensor guaranteed zero point deviation range
Zero point
Temperature dependence
Span
0% → (20∼100%)
Response Time
0% → (2∼20%)
External leakage standard
Flow rate setting signal
Flow rate output signal
Required power
Housing, flange, valve seat
Material of gas
Diaphragm
wetted surface
Flow sensor
Seal *4
Surface finish of components that contact the gas
Fitting *5
Linearity
42.5
20
2xM4, 3mm deep
1480FX-4UG-D
SFC1480FX-D
SFC2480FX-D
5SCCM
∼5,500SCCM
Model name H
2480
127
2470
2481
147
2471
2482
2472
167
2483
2473
50.6
20
2xM4, 3mm deep
2480FX-4SUG-D
Specifications *1
SFC1481FX-D
SFC1482FX-D
SFC2481FX-D
SFC2482FX-D
∼11SLM
4-φ4.4
92
21.8
28.6
30
39
15
Model name H
1480
127
1470
1481
147
1471
1482
1472
167
1483
1473
100.6
W-seal
4-φ5.6
79.8
20
W-seal
∼30SLM
SFC1483FX-D
SFC2483FX-D
∼50SLM
Multi-gas/multi-range
Normally closed / normally open
2∼100% F.S.
0.05∼0.3 MPa (G)
0.2∼0.3 MPa (G)
0.1∼0.3 MPa (G)
7.3∼43.5 PSI (G)
29.0∼43.5 PSI (G)
14.5∼43.5 PSI (G)
Vacuum to ambient pressure
1.0 MPa (G) 145 PSI (G)
5∼50 ℃
15∼35 ℃
65℃ maximum
35∼80%RH (non condensing)
Horizontal, Vertical
Horizontal, Vertical (option)
± (0.5% S.P. + 0.15% F.S.)
±0.2% F.S.
± (1.5% S.P. + 0.35% F.S.)
±0.5% F.S.
±0.3% F.S.
±1.0% F.S.
± (0.1% S.P. + 0.05% F.S.)
±0.06% F.S.
±0.5% F.S. / year, max.
±0.01% F.S. / ℃ (15∼35 ℃)
±0.01% S.P. / ℃ (15∼35 ℃)
Max. 1.0 sec. to reach ±2% S.P of the set value.
Max. 1.5 sec. to reach ±0.4% S.P of the set value.
Max. 1x10-11 Pa・m3/s (He)
DeviceNetTM communication *3
+24 VDC, 0.3 A max
SUS316L
YET101 (Ni-Co alloy)
Ni
SUS316L
Specially electro-polished (standard)
W seal, C seal, H1G seal, 1/4” HMJ (UJR) male
SUS316L
*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
*3: For information about DeviceNetTM communication, see page 6.
*4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*5: An H1G seal is only available on the SFC14**FX series
5
How to use the MG/MR conversion program
Gas type and flow rate can be converting using
an MG/MR conversion program. Connect the
mass flow controller to a personal computer
using a digital communication cable, and use our
proprietary program. One can convert the data
easily with a simple GUI interface program.
Following the program instructions, first select
the gas type, and then flow rate units. A flow rate
range will appear, and it can be changed. Enter
a flow rate value and the setting is complete.
Users can change the gas type and flow rate.
<MG/MR conversion program> Select the correction amount data
according to the gas type and flow rate you want to control
RS232C
RS485
Before
conversion
HOST PC
N2 500SCCM
Simple operation to set the gas type and flow rate.
After
conversion
Select a gas type
The flow rate range
is displayed
(user settable).
Enter a flow rate
SF6 100SCCM
O2 300SCCM
HBr 400SCCM
* For details about the operation, see the instruction manual
A screen that shows
the program is converting.
Models compatible with the DeviceNetTM communication system
About DeviceNetTM
This is a field network recognized world wide, and it is approved
as a standard sensor bus by the SEMI.
Field devices can be connected using serial communication in
place of an I/O connection, allowing transfer of a large volume
of data effectively.
The DeviceNetTM specifications are administrated by the ODVA
(Open DeviceNet Vendor Association, Inc.) a non-profit body
established to promote the spread of this system world-wide.
What are the advantages of employing DeviceNetTM
1) By using serial communication from an I/O connection, one does not
need an AD / DA / O board which can decrease configuration and
set up costs.
2) Only network cables are needed and this reduces cabling costs,
which decreses required man-hours, shortening engineering periods,
and avoids problems from incorrect wiring.
3) DeviceNetTM employs a CAN (Controller Area Network) as a
communication controller, and you can use a variety of CAN error
detection functions.
4) The DeviceNetTM specifications are administrated by the ODVA, and
have been normalized as international standards by IEC and SEMI.
With this normalization, they are completely open, and lots of control
devices are available from multiple venders. You can choose the
optimum device for your application.
5) The power for DeviceNetTM is only +24 VDC. You do not need to
supply ±15 VDC for the mass flow controller.
6
PLC
Master
+24VDC
POWER
PLC bus line
DeviceNetTM cable
Distribution
box
Communication connector pin assignment
Analog interface connector (D-Sub 9-pin)
Connector used : D-Subminiature, 9-pin connector (M3 screw)
Compatible plug : 17JE-13090-02 (D8B) (made by DDK) or equivalent
1) Connector model : L type
Pin number
1
2
3
4
5
6
7
8
9
2) Connector model: Q type
Function
Valve open/close input (+15 VDC = Fully open; -15 VDC = Fully closed)
Output (0 to 5 VDC)
+15 VDC
COM (±15 VDC)
-15 VDC
Input (0.1 to 5 VDC)
COM (output)
COM (Input)
Valve valtage (0 to 5VDC)
Pin number
1
2
3
4
5
6
7
8
9
Function
Valve Full open (operate by connecting to COM)
Out put (0 to 5 VDC)
+15 VDC
COM (±15 VDC)
-15 VDC
Input (0.1 to 5 VDC)
COM (output)
COM (Input)
Valve Full-close (operate by connecting to COM)
Digital interface connector
Connector used : 43814-6621 (made by Molex) (RJ-12 x 2 connectors)
Pin number
RS232C
1
2
3
4
5
6
Rxd
Txd
Signal name
COM (Siginal)
No Connection
RS485
N.C.
N.C.
1 2 3 4 5 6
RSRS+
Note 1 : Rxd, Txd: RS232C Input and output
Note 2 : RS-, RS+: RS480 Input and output
DeviceNetTM connector
Connector used : DeviceNetTM Male Micro Connector (CM02-8DR5P(D5) made by DDK, or equivalent)
Signal name
Drain
V+
VCAN_H
CAN_L
Pin number
1
2
3
4
5
4 CAN_H
3 V-
5 CAN_L
1 Drain
2 V+
Additional functions
Function name
Alarm function
Flow sensor zero reset function
Lamp response function
Flow control valve voltage monitor output function
Flow control valve fully open / close function
Description
Setting and reading methods
See the item for the alarm function
By command
Reset the flow sensor zero
By command or when the switch on the top is pressed
Reset the flow rate using a specified time for the step flow rate setting. By command
Set the flow control valve opening (0 to 5 VDC)
By command or analog voltage output (only L type)
Open and close the flow control valve completely
By command, ±15 VDC, or contact point connection
Alarm function
Alarm cause
Alarm LED display
Alarm output condition
Normal operation
Green LED blinks at 1 Hz
No alarm
Flow rate setting does not the match
Red LED lights
The mis-match between the flow rate setting and the flow rate output is 10% or more of the full
flow rate output
scale and has continued for 10 seconds or longer
Abnormal ±15 VDC power supply
Turns off
The ±15 VDC power supply is outside the range of ±12 VDC to ±17 VDC, and has been for 0.5 seconds or longer.
EEPROM access error
Red LED lights
Abnormal value in the EEPROM data.
Digital communication error
Red LED goes on
Did not receive a normal digital command
Change in flow rate control status
Red LED blinks at 2 Hz
The change in the preset value was 10% or more of the full scale and continued for 10 seconds
(Change from the preset status)
・Flow rate setting changed
・Flow rate output changed
・Flow control valve open level changed
or longer.
Or, the cumulative value of the zero point correction amount for the flow sensor is more than
±20% of full scale
・Abnormal zero point
correction value for the flow sensor
7
Precautions to ensure safe use
In order to use our products safely, make sure to read the relevant instruction manuals before use.
SFC1480FX/SFC2480FX series ordering information
Controller
or meter
SFC
SFC
FMT
Fitting
4UG
4V *
4UG
4AG
4H1G **
4SUG ***
4SAG ***
Model name
Size
Temperature
1
4
Mass flow controller
Mass flow meter
1
1.5" size
2
1.125" size
4
5
6
Pressure
Flow range
Series
Seal
Operation
8
2
FX
M
C
Normal temperature type
High temperature type (80℃)
Ultra-high temperature type (150℃)
Normal pressure type
8
Low inlet pressure type
7
5∼5,500 SCCM (FR-01∼11)
0
11 SLM (FR-12)
1
30 SLM (FR-13)
2
50 SLM (FR-14)
3
Multi gas, multi range, digital
FX
Metal seal
M
Rubber seal
R
Mass flow meter
Blank
Normally closed
C
Optional code
Normally open
O
Communication
Flow
sensor
Gas-contact
Protocol
Connector
method
material
surface finish
L
B
L
N
1/4” HMJ (UJR) male
1.5” W
1.5” C
1.5" H1G seal (Hitachi IGS seal)
1.125" W seal
1.125" C seal
D-sub 9-pin (top mount), valve fully open / fully closed signal, ±15VDC type
D-sub9 (top mount), valve fully open / fully closed signal, COM connection type
D-sub 9-pin (upstream side), digital output type
DeviceNetTM
Blank
Special electro-polished
Machine processed finish
K
Blank
RS232C or DeviceNetTM
B
RS485
Blank
SAM protocol or DeviceNetTM
protocol
L
Blank
Ni free
Note: * Can measure a 124 mm gap between the faces of a 1/4” HMJ (UJR) male.
N
Ni sensor
L
Q
T ***
D
** Only the SFC1480FX series can be used with a 4H1G fitting
*** Only the SFC2480FX series can be used with 4SUG, 4SAG fittings and a T connector
Hitachi
Metals, Ltd.
http://www.hitachi-metals.co.jp
Fine flow Business Unit piping components Division : 2971-8 Ishikawa-cho,
Hachioji-shi, Tokyo 192-0032 Japan
TEL: +81-42-645-8753 FAX: +81-42-660-0320
Sales agent:
SAM・FANTAS・YET 101 is a registered trademark of Hitachi Metals, Ltd.
The contents of this pamphlet are correct as of August 2012.
The specification, appearance, etc. of products listed in this pamphlet may be changed without prior notice.
Due to printing reasons, the product colors in this pamphlet may be different from the actual product colors.
This pamphlet is copyright 2012 by Hitachi Metals Ltd., all rights reserved. Duplication of any part of the
contents without prior written approval is strictly prohibited.
If you have questions about anything described in this pamphlet, please contact the address shown on the left.
DeviceNetTM is a registered trademark of ODVA.
We are not liable for and do not accept responsibility for any loss, direct or indirect, caused by incorrect use,
careless handling, force majeure, war, terrorism, fire, pollution, use in unapproved environments, salt damage,
or any natural disasters (such as wind or flood damage, earthquakes or lightning), or for any consequential
damage.
The address and contact details in this pamphlet are correct as of August 2012.
Since these details may change in the future, and if you cannot contact us by telephone or fax, please contact
us as follows.
Hitachi Metals Ltd., Communication Bureau: Tel. 81-5765-4076, Fax. 81- 5765-8312
Email: [email protected]
Pamphlet number: HL-K244-B
Created August, 2012 (T-FT2)
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