Brooks GF101 / GF121 / GF126 Mass Flow Controllers

Brooks GF101 / GF121 / GF126 Mass Flow Controllers
DS-TMF-GF101-Series-MFC-eng
May, 2017
Data Sheet
GF Series
GF101/GF121/GF126
Thermal Mass Flow
GF High Flow Series
High Purity/Ultra-High Purity
High Flow
Digital Mass Flow Devices
Overview
Designed for semiconductor, MOCVD, and other gas flow control applications that require
a high purity all-metal flow path, the Brooks GF Series mass flow controllers deliver
outstanding performance, reliability, and flexibility. The GF101/121/126 extends the GF
family to support flow rates up to 300 slpm N2 equivalent. The high flow design utilizes
the proven GF sensor design and electronics. This high flow product provides excellent
flow stability for purge lines in CVD, LPCVD, Diffusion, Epi processes, semiconductor
chamber clean processes and MOCVD purge flows.
Pr
oduct Description
Product
Designed for high-flow applications like purge, the GF101/121/126 has all of the
features/benefits of the GF100/120/125, but with extended performance for flow rates up
to 300 slpm. Compared with competitive products offering a similar flow rate, the
compact footprint of the GF101/121/126 allows users to design smaller, more efficient
systems. It also provides better actual process gas accuracy over devices that use
traditional single point conversion factors when switching to a new gas. The GF101/121/
126 Series features an all metal seal flow path for durability and high leak integrity,
precise, stable flow control with fast Sub-1 second settling times and 1% of reading
accuracy to ensure reliable flow measurement or control in demanding gas flow
applications. The GF101/121/126 achieves excellent internal to external leak integrity. A
wide range of digital and analog I/O options offers the broadest range of communication
protocols making the GF101/121/126 an ideal upgrade for existing MFCs.
Built on a common platform and interface, this series now enables an entire system to
use one product platform:
• GF101/121/126 based on the same technology and design as the low flow GFs
- Same sensor
- Same electronics
- Same low power support
• Smaller footprint than competitive MFCs
• Handles flow rates up to 300 slpm
• Metal seal for durability and high leak integrity
• Proprietary sensor technology
• Precise flow control with fast sub-1 second settling time
• 1% of reading accuracy
• Corrosion-resistant Hastelloy C-22 sensor tube
1
Pr
oduct Description (con
tinued)
Product
(continued)
GFHighFlowResponsetime(100L)
100%
90%
80%
70%
PerCentFlow
Ultra Fast Response
By combining Brooks' patented flow sensor technology with a
high speed ARM processor and fast acting diaphragm free
valve assembly, the GF101/GF121/GF126 Series delivers up to
2 times faster response and settling time compared to other
mass flow controllers, enabling:
• Reduced diverted gas consumption and associated
abatement costs
• For processes requiring a slow ramped gas turn-on or time
critical transitions between flow rates. A user programmable
ramp function is provided
• Improved gas blending and dilution in MOCVD
60%
Setpoint
50%
SignalFlow
40%
30%
20%
10%
0%
Pressure Tolerant Flow Control
The GF High-Flow’s hydraulically balanced valve is inherently
less sensitive to line pressure disturbances caused by regulator
droop and popping that can drive the traditional (valve) MFC’s
to over compensate and ring, resulting in flow disturbance
that can impact the process, trip excess flow alarms or stir up
particles.
0
5
10
Time (sec)
Advanced Thermal Flow Measurement Sensor
Brooks' proprietary sensor technology combines:
• Improved signal to noise performance for improved
accuracy at low setpoints
• Improved reproducibility at elevated temperatures through
new isothermal packaging, onboard conditioning
electronics with ambient temperature sensing and
compensation
• Improved long-term stability through enhanced sensor
manufacturing and burn in process
• Highly corrosion resistant Hastelloy C-22 sensor tube
• Optimized temperature profile for gases prone to thermal
decomposition
• Unique orthogonal sensor mounting orientation
-Eliminates sensor drift caused by valve heating effects
-Eliminates thermal siphoning effects for the most common
mounting orientations
High Purity Flow Path
All metal, corrosion resistant flow path with reduced surface
area and un-swept volumes for faster dry-down during purge
steps:
• SEMI F-20 compliant wetted flow path
• 5 μ inch Ra max surface finish standard (10 μ inch Ra on GF101)
High Purity Flow Path
2
Pr
oduct Description (con
tinued)
Product
(continued)
Extensive Mec
hanical Con
figur
ation Support
Mechanical
Configur
figuration
GF101/GF121/GF126 Series supports all metal seal / UHP
industry gas connection interface standards for full OEM and
process coverage
• 92 mm, C Seal on 1.5" body
• 114 mm, C Seal on 1.5" body
• 134.2 mm, 1/2” VCR male on 1.5" body
• 150.4 mm, 1/2” VCR on 1.5 body
• 166 mm, 1/2” VCR on 1.5" body
• 168.6 mm, 1/2” VCR on 1.5" body
Accessories
318Z137BNA: 1/2” VCR adapter to extend 134.2 mm lay length
to 177 mm lay length
318Z138BNA: 1/2” VCR adapter to extend 134.2 mm lay length
to 192.4 mm lay length
MFC on Gas Box
Enhanced Diagnostics
The mass flow controller remains the most complex and critical
component in gas delivery systems. When dealing with UHP gas
distribution or highly toxic or corrosive gases, removing the
mass flow controller to determine if it is faulty should be the
last resort. In response to this, Brooks pioneered smarter mass
flow controllers with embedded self test routines and introduced
an independent diagnostic/service port to provide the user with
a simple interface, for troubleshooting without disturbing flow
controller operation.
User Interface
The user interface has a high visibility LCD display that
provides a local indication of Flow (%), Temperature (°C),
Pressure (PSIA/KPa) and Network Address, selectable through
the Display button. A Zero button provides a simple means to
re-zero the mass flow controller as part of scheduled
maintenance. The display is rotatable with a push button to
enable improved readability based on how the MFC is
mounted.
Communication Interface
The GF101/GF121/GF126 Series supports analog 0-5 Vdc,
RS485, and DeviceNet™ communication protocols. A range of
low profile adapter cables facilitate replacing older mass flow
Communication Interface
controllers with the GF101/GF121/GF126 Series eliminating the
need to carry mass flow controllers of same gas/range but different
electrical connectors.
Featur
es and Benefits
Features
Featur
es
Features
Benefits
Metal Seal
High leak integrity. No periodic replacement of aging seals necessary
Adaptable Mechanical Configurations
Compact footprint enables easy retrofit to existing systems
Metrology
Measurement accuracy is traceable to international standards
User Accessible Service Port with Advanced
Diagnostics with User-Friendly Interface
Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user
specified limits for high yield and maximum uptime
Corrosion Resistant Hastelloy T-Rise Sensor
Provides unmatched long-term sensor stability ensuring maximum yield and throughput
Pressure Transient Insensitivity (PTI)
Tighter process control
3
Pr
oduct Specifications
Product
Performance
GF101
GF121
Full Scale Flow Range (N 2 Eq.)
GF126
55 to 300 slm
Flow Accuracy
+1% S.P. > 35-100%, +0.35% F.S. 2-35%
Repeatability & Reproducibility
< + 0.15% S.P.
Linearity
+ 0.5% F.S. (included in accuracy)
Response Time (Settling Time)
Normally Closed Valve
< 1 sec
Pressure Transducer
Ability to measure inlet pressure
Control Range
5-100% (Normally Closed Valve)
MultiFlo
Standard (All typical high flow rate process gases & mixtures supported)
# of Bins
4 Bins
Control Range
5-100% (Normally Closed Valve)
Valve Shut Down (N.C. Valve)
< 2% of F.S. @ 30 N2 psig/atm out
Zero Stability
< + 0.5% F.S. per year
Temperature Coefficient
Span: 0.05% S.P. per oC, Zero: 0.005% F.S. per oC
Ratings
Operating Temperature Range
10-50oC
Differential Pressure Range
30-90 psid
Maximum Operating Pressure
Controller: 75 psig / Meter: 150 psig
Leak Integrity (external)
1x10 -10 atm. cc/sec He
Mechanical
Valve Type
Normally Closed
Meter (no valve)
Wetted Materials
GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish
10μ inch Ra
5μ inch Ra (0.1 μm Ra)
Diagnostics & Display
Status Lights
MFC Health, Network Status
Alarms
Control Valve Output, Network Interruption
Display Type
Viewing Angle / Viewing Distance
Units Displayed / Resolution
Top Mount Integrated LCD
Fixed / 10 feet
Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit)
Electrical
Electrical Connection
RS485/Analog via 9-Pin “D” connector, DeviceNetTM via 5-Pin “M12” connector
Digital Communication
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
Diagnostic /Service Port
RS485 via 2.5mm jack
Power Supply/Consumption
DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)
RS485/Analog: 6 Watts max @ +15 Vdc. (+10%) (Under typical operating conditions)
Compliance
EMC
Environmental Compliance
4
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
Electrical
Pr
oduct Specifications
In
terface Options
Product
Interface
Base I/O Options
PDC Or
dering Code G1
Ordering
Description: Industry standard
Analog / RS485 interface
PDC Or
dering Code SX
Ordering
Description: Industry standard
Analog 9-Pin Sub D connector
and dual RJ11 RS485 ports
123
PDC Or
dering Code D
Ordering
DXX
Description: Industry standard
ODVA compliant DeviceNet
interface
All Base I/O options include: Diagnostic port communication RS485 via 2.5mm jac
jackk
I/O Options Using Base Model and Adapter Cable
A range of low profile adapter cables have been developed to support replacing older
generation MFC's with different pinout configurations. The base MFC will be either a
G1 or SX configuration, depending on the product being replaced.
PDC Or
dering Code UX
Ordering
Description: SX base I/O with
7003550 adapter for
compatability with Unit
UDU15
PDC Or
dering Code: FX / JX
Ordering
Description: SX base I/O with
7003069 (FX)/7001814 (JX)
adapter for compatability with
Unit UDF9/UDJ9
PDC Or
dering Code: EX
Ordering
Description: G1 base I/O with
7003083 adapter for
compatability with Unit “E”, IN
“L”, “R”
PDC Or
dering Code: KX
Ordering
Description: G1 base I/O with
7003298 adapter for
compatability with Unit UDK15
PDC Or
dering Code: B
Ordering
BXX
Description: G1 base I/O with
7003590 adapter for
compatability with Brooks 15Pin D
Other adapter options are available for the GF Series. Please contact Brooks Customer Service for more information.
5
Pr
oduct Dimensions
Product
6
Model Code
Code Description
I.
Base Model Code
II.
Package / Finish Specifications
III.
Configurability
IV.
V.
Special Application
VI.
Gas or SH MultiFlo Bin
Valve Configuration
VIII. Downstream Condition
IX.
Sensor
Connector
Option Description
High Purity/Ultra High Purity Digital Mass Flow Controllers
101
121
126
C
X
XX
C
M
XXXX XXXX
SH51 055L
Flow range 55 - 300 slm N2 Eq.; 10 Ra HP wetted flow path
Flow range 55 - 300 slm N2 Eq.; 5 Ra UHP wetted flow path
Flow range 55 - 300 slm N2 Eq.; 5 Ra UHP wetted flow path & integrated pressure measurement
SH52 100L
SH53 200L
SH54 300L
V1
V2
V3
V4
Order V1 +
318Z137BNA
Order V1 +
318Z138BNA
C1
C2
A
V
O
VII. Fitting
X.
Code Option
GF
Normally Closed valve
Meter (No Valve)
Specific Gas Code & Range, i.e. “0004” = Argon and “100L” = 100 slpm
Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)
Special Bin for low density gases, e.g. 73,002-120,000 He, 100,002-170,000 H2
Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)
Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)
Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)
1-1/2” body width, 134mm 1/2” VCR male
1-1/2” body width, 150.4mm 1/2” VCR male
1-1/2” body width, 166mm 1/2” VCR male
1-1/2” body width, 168.6mm 1/2” VCR male
1-1/2” body width, 177mm 1/2” VCR male
1-1/2” body width, 192.4mm 1/2” VCR male
1-1/2” body width, 92mm 3/8” C Seal
1-1/2” body width, 114mm 3/8” C Seal
Atmosphere
Vacuum
Default Sensor Orientation
BX
EX
FX
G1
JX
KX
SX
UX
Cable adapter to 15 pin D Brooks (Unit “B”,”N”); adapts G1 base
Cable adapter to card edge (w/out VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”); adapts G1 base
Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”F”,”O”); adapts SX base
9-Pin D with RS485 (Unit”G”)
Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”J”,”W”); adapts SX base
Cable adapter to MKS 15-Pin D (Unit “K”); adapts G1 base
9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)
Cable adapter to 15 pin D (w/VTP) (Unit & TN “U”); adapts SX base
DeviceNet Standard Configuration Parameters
Poll IO
Poll IO
Poll IO External
Power On Full Scale Full Scale Full Scale Instance Instance
State
Baud
I/O
Connector
State
Setting
Setting
Setting Producer Consumer Transition
Rate
D0
D1
D2
D3
D4
D5
D6
D7
D8
D9
DA
DB
DC
DD
DE
DX
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
DeviceNet
XXXX
XI. Customer Special Request
XII. Auto Shut-Off
A
X
A
X
XIII. Auto Zero
XIV. Reference Temperature
Sample Standard Model Code
I
II
III
GF
101
C
MultiFlo capable
Not configurable
Standard
V
C
6000h
6000h
7FFFh
6000h
6000h
6000h
7FFFh
7FFFh
6000h
6000h
7FFFh
6000h
7FFFh
7FFFh
6000h
2
21
13
22
22
6
3
6
3
2
22
22
3
22
15
7
7
19
7
8
8
7
8
7
7
7
8
7
8
19
Executing
Executing
Executing
Executing
Executing
Executing
Executing
Executing
Executing
Executing
Executing
Executing
Idle
Executing
Executing
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
500KB
Auto Shut-Off (Included)
Auto Shut-Off (Not Included) (Must be selected for meter)
Auto Zero (Included)
Auto Zero (Not Included)
000
IV
XX
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
SCCM
Float
5 Pin Micro
Idle
Count
Integer
5 Pin Micro Executing Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro Executing Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro
Idle
Count
Integer
5 Pin Micro Executing Count
Integer
5 Pin Micro Executing SCCM
Float
5 Pin Micro To be defined by CSR
Customer Special Request Number
0o C Reference Calibration (Standard) - Default Setting
VI
VII
- SH52 100L - V1
VIII
A
IX
0
X
G1
-
XI
XXXX
XII
A
XIII
X
XIV
- 000
7
Br
ooks Service and Support
Brooks
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding
service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and
support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
TION
STAR
ARTT-UP SERVICE AND IN-SITU CALIBRA
CALIBRATION
ST
AR
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001
Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service
can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.
CUST
OMER SEMINARS AND TRAINING
CUSTOMER
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.
Please contact your nearest sales representative for more details.
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.
TRADEMARKS
Brooks, MultiFlo ....................................... Brooks Instrument, LLC
All other trademarks are the property of their respective owners.
8
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