More Precision
Measurement Product Guide // 2016
IR Temperature
More precision.
Sensors, measurement devices and systems
As a technological leader in its industry, Micro-Epsilon is constantly meeting the challenges
of developing high precision sensors, measurement equipment and systems for its
customers. This challenge represents the continued drive for high performance in the field of
measurement technology.
Behind Micro-Epsilon is a powerful group of companies that provide strategies that focus on
different sensor technologies, facilitating the group‘s leadership in this field. Along with a concentration of expertise in sensors for geometrical and dimensional measurement, our latest
technology focuses on colour sensors and non-contact temperature measurement instruments.
In combination, the different members of the Micro-Epsilon group interact with one another to
meet every challenge and meet every customer requirement.
As well as physical resources, the accumulated knowledge within the company is regarded
as the core capability that provides a technological lead and consolidates this for the future. It is
only through consistent knowledge management that such sustainable high performance can
be achieved and incorporated into all product groups.
From large global corporations through medium-sized companies to engineering service providers, sensors and solutions from Micro-Epsilon are regarded throughout the world as symbolic
with reliable measurement results of the highest precision.
Table of Contents
Sensors for displacement, distance, length and position
Laser triangulation sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 - 7
Confocal chromatic sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 - 9
Gauging and distance sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 - 11
Capacitive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 - 13
Eddy current sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 - 15
Inductive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 - 17
Magneto-inductive sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 - 19
Draw-wire sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20 - 21
2D/3D sensor systems for dimensional measurement
Laser line profile sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 - 23
Optical micrometers and fibre optic sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24 - 25
Colour sensors for self-luminous objects and surfaces
Colour sensors, colour measuring system and LED Analyzers . . . . . . . . . . . . . . . . . . 26 - 27
IR temperature measurement
Inline IR sensors & handheld IR instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 - 29
Thermal imagers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 - 31
Specific sensor solutions
Application specific and OEM sensor designs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 - 33
Turnkey inspection systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 - 35
Application fields
The fields of application and demand for precision sensors and measuring equipment are
ever increasing. Whether it is for quality assurance, for applications in maintenance and
service, for process and machine monitoring, in automation or in research and development,
sensors make a vital contribution to the improvement of products and processes.
From machine building, automated production lines in the food and beverage industry, to integrated OEM solutions for automotive and aerospace customers, almost all these fields benefit from the use of Micro-Epsilon sensors. A long list of satisfied customers, including BMW,
Schenk, Jaguar Cars, NASA, 3L, Exxon, Siemens, Borg Warner, NIST, MIT, Frito Lay, MRSI,
Braun, Newport, Boeing, Amat, GSK, LLNL, L3, Ford and many more, proves the success of
these high performance quality products.
Quality control
Finished products
Process monitoring
Process control
Machines, tools
Sensors and systems for displacement,
position, colour and temperature
Research and development
Machines and plants
Product and process optimisation
Machine control
Experimentation and testrigs
Process control
Fundamental research in industry
Predictive maintenance
Laser triangulation:
Non-contact displacement and position sensors
The non-contact displacement optoNCDT product group utilises optical triangulation as a
measuring principle. A laser diode projects a visible spot of light onto the target surface (laser
ƒƒSmall targets through a tiny spot size
class 2). The light reflected from this spot is directed through an optical receiving system onto
ƒƒLong measuring ranges
a position-sensitive element. Optical displacement sensors measure with a large reference dis-
ƒƒLarge stand off
tance and a very small measuring spot diameter. Nearly all models work with a high-resolution
ƒƒExtreme resolution
CCD or CMOS line and a DSP.
ƒƒExcellent linearity
ƒƒHigh measuring rates
ƒƒSynchronisation of two sensors
ƒƒMeasurement of shiny metallic and
rough surfaces
Largest range in the world
Starting with a low cost entry model through to high
precision top end sensors – optoNCDT sensors
are mostly used in process automation and quality
assurance applications.
Universal controller
Processing up to six sensor signals. A versatile
controller for a wide range of applications that has
extensive clearing functions and high speed bus
Sensor with small laser-line compensates
for varying reflections
The LL series is ideal for metallic shiny or rough sur­
faces. With a small laser line, this sensor compensa­
tes for varying reflections.
optoNCDT 1302
Compact low cost CMOS sensors
with analogue & digital output
optoNCDT 1402
Compact industrial sensors
with analogue & digital output
optoNCDT 1320/1420
Compact sensors for fast
and precise measurements
Measuring ranges (mm) 20 l 50 l 100 l 200
Measuring ranges (mm)
l 10 l 20 l 50 l 100 l
200 l 250 l 400 l 600
Measuring ranges (mm) 10 l 25 l 50
±0.2 % FSO
±0.18% FSO
0.12% FSO
0.02 % FSO
0.01% FSO
0.005% FSO
Measuring rate
Measuring rate
Measuring rate
IP69K option with stainless steel housing
(food grade standard)
optoNCDT 1610/1630
High speed PSD sensors
optoNCDT 1700
Intelligent sensor with integrated controller
for industrial applications
optoNCDT 1700BL/2300BL
Blue laser for improved performance
on shiny or red-hot metals
Measuring ranges (mm) 4 l 10 l 20 l 50 l 100
Measuring ranges (mm)
l 10 l 20 l 40 l 50 l 100 l
200 l 250 l 500 l 750
Measuring ranges (mm)
2 l 5 l 20 l 50 l 200 l
500 l 750 l 1000
±0.2% FSO
±0.08% FSO
±0.03% FSO
0.005% FSO
0.005% FSO
0.0015% FSO
Frequency response
up to 100kHz (-3 dB)
Measuring rate
Measuring rate
optoNCDT 2300
49kHz laser displacement sensors
for extreme dynamic measurements
optoNCDT 1700LL / 2300LL
Highly dynamic laser sensors
for shiny metal surfaces
optoNCDT 1710 / 2310
Short measuring ranges at long
standoff distances
Measuring ranges (mm)
2 l 5 l 10 l 20 l 50 l
100 l 200
Measuring ranges (mm) 2 l 10 l 20 l 50
Measuring ranges (mm) 10 l 20 l 40 l 50 l 1000
±0.02% FSO
±0.02% FSO
±0.03% FSO
0.0015% FSO
0.0015% FSO
0.005% FSO
Measuring rate
Measuring rate
Measuring rate
No external controller required
No external controller required
No external controller required
Confocal-chromatic principle:
Non-contact displacement sensors
The confocal chromatic confocalDT measurement system consists of a controller with an LED
light source and a sensor. Both the sensor and the controller are connected via optical fibre up
ƒƒExtreme high resolution
to a distance of 50m. The distance of the focal point varies due to the chromatic aber- ration of
ƒƒTarget independent measurement
the sensor optics. A certain distance is assigned to each wavelength in the controller. The re-
ƒƒTiny, constant measuring spot
flected light from the target surface is passed to the receiver optics, where the spectral intensity
ƒƒCompact course of beam
dispersion is evaluated. This unique measuring principle enables displacements and distances
ƒƒOne-sided thickness measurement
to be measured with the highest precision. Both diffuse and specular surfaces can be measu-
of transparent materials
red. With transparent materials, a one-sided thickness measurement, or gaps between multiple
transparent layers, can be calculated along with the distance measurement using just
one sensor.
Thickness measurement of sleeves
Two synchronised sensors acquire the bottom
thickness of sleeves in a double-sided layout.
Liquid level
The confocal measuring principle facilitates measure­
ments against reflecting surfaces (glass, mirror), as
well as liquids.
Surface scanning
The extreme spatial resolution in the x-axis and the
submicron accuracy in the z-axis make it a perfect
sensor for surface scanning.
confocalDT 2451/2471
Controller with integrated light source for
confocal chromatic displacement sensors
confocalDT 2461
Controller with integrated light source for
measuring rates up to 25kHz
IFS 2402
Miniature sensors (gradient index lens) for
the inspection in tightest spaces
±0.025% FSO
±0.025% FSO
Measuring ranges (mm) 0.4 | 1.5 | 2.5 | 3.5 | 6.5
10kHz /optional 70kHz
with external light source
Measuring rate
Sensors with axial and radial (90° deflection)
optical path available
Measuring rate
IFS 2403
Confocal hybrid sensors with narrow gradient
index lens and relay optics
IFS 2405
Standard sensors for high precision distance
and thickness measurements
IFS 2406
Compact confocal sensors for precise
displacement and thickness measurement
Measuring ranges (mm) 0.4 | 1.5 | 4 | 10
Measuring ranges (mm) 0.3 | 1 | 3 | 10 | 30
Measuring ranges (mm) 2.5 | 10
Enlarged base distances
Large base distance and tilt angle
Version with axial and radial optical path
Non-contact and wear-free bore hole
One-sided thickness measurement
transparent materials
The unique measuring principle enables a single-side
thickness measurement on transparent materials even
multi-layer materials. Here, just one sensor measures
the thickness with nanometer accuracy
ƒƒHigh speed sampling rate up to 25kHz
ƒƒUse in small bore holes from 4mm
ƒƒPrecise diameter detection
ƒƒOptical temperature compensation
ƒƒMeasured diameters: 4mm - 10mm,
8mm - 12.8mm and 10mm - 16mm
Time-of-flight principle:
Non-contact gauging and distance sensors
Optoelectronic sensors in the optoNCDT ILR series operate according to the time-of-flight prin-
ciple and are designed for non-contact distance and displacement measurements. The 118x
ƒƒExtreme long measuring ranges
series functions according to the phase comparison principle. In doing so, modulated laser light
ƒƒOutstanding repeatability
is permanently transmitted to the object. The receiver compares the phase offset of the transmit-
ƒƒFast response time
ted signal with the received signal, enabling the distance to be precisely calculated.
ƒƒExcellent price/performance ratio
All remaining models in the optoNCDT ILR series operate according to the time-of-flight prin-
ƒƒVarious interfaces
ciple. Here, a laser pulse is transmitted and the time it takes for the reflected pulse to arrive back
at the sensor is precisely measured. The distance can be measured based on the speed of light
and the measured time period. Depending on the application and the required measuring range,
the sensors operate on diffuse reflecting surfaces or on a special reflector plate.
Position acquisition storage and retrieval units
Fast response time in combination with high
measurement accuracy facilitate the exact
positioning of storage and retrieval units.
Distance measurement on monorail conveyors
To control the flow of production and to prevent
damage to the parts, the spacing between the
conveyors is monitored.
Acquisition of coil diameters
The quantities of steel, paper and fabric wound on
and off are monitored via the acquisition of coil
diameters using laser probes.
optoNCDT ILR 1030/1031
Distance sensors
optoNCDT ILR 102x/110x/115x
Gauging sensors / Distance sensors
Measuring ranges
no reflector 0.2 - 15m
optoNCDT ILR 1181/1182/1183
Distance sensors
no reflector 0.2 - 10m
with reflector 0.2 - 50m
Measuring ranges
with reflector 0.2 - 250m
Measuring ranges
0.1 - 150m
Response time
Response time
Response time
Measurements against
target (without reflector)
Measurements against a reflector, which is
installed on the target
up to 300m
up to 3000m
Measuring range
in gauging mode
(without reflector)
optoNCDT ILR 1191
Distance sensors
Measuring ranges
0.5 - 3000m
Response time
Measuring range
in reflector mode
1020 1030 1100 1150 1021 1031 1101 1151 1181 1182 1183 1191
useful in filling level measurement, for
safety applications, height measurement of
lifting systems, overhead conveyors, crane systems and for positioning lifts. The
optoNCDT ILR 1191 is specially designed for
outdoor use and in port systems.
Non-contact capacitive
displacement and position sensors
Due to the unique active tri-electrode guard-ring-capacitor principle, capacitive displacement
sensors are linear for all metals. The sensor acts as an electrode; the opposite electrode is the
ƒƒSuperior precision and resolution
ƒƒExcellent temperature stability
The measurement technique enables measurements against all conducting and semiconduc-
ƒƒOutstanding long-term stability
ting objects. Micro-Epsilon has extended the capacitive measuring principle with some inno-
ƒƒMaterial-independent for metallic targets
vative functions, which enable highly linear output characteristics, nanometer precise resolution
ƒƒFor any conductive / semiconductive target
and very stable measurements to be obtained. The linear characteristic of the measurement
signal is obtained for measurements with respect to target objects of electrically-conducting
materials without any additional electronic linearisation.
The sensors, which measure without making contact with the target, are ideal for industrial applications in production systems and in-process quality assurance, but are also used for
test rig applications.
Capacitive displacement sensors are used for wafer
thickness measurement with two capacitive sensors.
Even under extreme conditions on a test rig, capa­
citive sensors supply the highest precision here, the
wear on a brake disc is being measured.
Capacitive displacement sensors measure with the
highest precision the alignment of the lens system
used for semiconductor wafer lithography.
capaNCDT 6110
Compact single-channel system
capaNCDT 6200
Modular multi-channel system
capaNCDT 6500
Modular multi-channel system
Measuring ranges
0.05 | 0.2 | 0.5 | 0.8 |
1 | 2 | 3 | 5 | 10
Measuring ranges
0.05 | 0.2 | 0.5 | 0.8 |
1 | 2 | 3 | 5 | 10
Measuring ranges
0.05 | 0.2 | 0.5 | 0.8 |
1 | 2 | 3 | 5 | 10
±0.05% FSO
±0.025% FSO
±0.025% FSO
0.01% FSO
0.0005% FSO
0.000075% FSO
1kHz (-3dB)
5kHz (-3dB)
8.5kHz (-3dB)
Web interface
Configuration of capaNCDT 6200 and 6500
is carried out using a web browser interface
Large selection of capacitive sensors
Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylind- rical design (with
integrated cable or socket) or as flat sensors (with integrated cable). The displacement sensors
can be exchanged without recalibration; the sensor replacement can be completed rapidly. The
majority of sensors can be used in clean rooms; use in ultra-high vacuums is also possible.
Specific sensors for OEM applications
Micro Epsilon tailors sensors to your individual needs:
ƒƒAdjusting the body shape and size for mounting
ƒƒModify the sensor material
ƒƒCable arrangements
ƒƒCryogenic or high temperature environment
ƒƒIntegrated electronic and sensor for OEM design
Eddy current principle:
Non-contact displacement and position sensors
Eddy current displacement sensors measure distances, displacements or positions of any elec-
trically conductive target. The principle enables non-contact and wear free measurements. The
ƒƒNon-contact and wear free
measurement objects can have either ferromagnetic or non-ferromagnetic properties. Due to its
ƒƒHighest resolution and linearity
immunity to oil, dirt, dust, moisture, interference fields, etc. the eddy current principle is ideally
ƒƒVery stable measurements
suited to applications in harsh industrial environments.
ƒƒHigh measuring rates
Micro-Epsilon's eddy current sensors are the only ones with active temperature compensation
ƒƒExcellent temperature range and
and field calibration capabilities.
temperature stability
ƒƒFor industrial applications
Temperature error by comparison
Temperature error (% FSO)
Temperature error (% FSO)
Temperature error (% FSO)
Common inductive sensor
with ferrite core
Common eddy current sensor
without temperature compensation
OEM integration in textile machines
Eddy current sensors measure the thickness variation
of thread in textile machines.
Best practice: eddyNCDT 3100
with temperature compensation
Application in test rigs
In the automotive industry these systems measure
internal dimensional changes inside a running engine.
Inline quality control
Eddy current sensors measure the flatness in rolling
eddyNCDT 3001
Compact eddy current sensor
with integrated electronics
eddyNCDT 3005
Compact eddy current sensor system
Ideal for integration into plant and machinery
eddyNCDT 3010
Low cost single channel system
for industrial applications
Measuring ranges (mm) 2 | 4
Measuring ranges (mm) 1 | 2 | 3 | 6
Measuring ranges (mm) 0,5 | 1 | 2 | 3 | 6 | 15
±0.7% FSO
± 0.25% FSO
±0.25% FSO
0.1% FSO
0.05% FSO
0.005 % FSO
Frequency response
Frequency response
5kHz (-3dB)
Frequency response
25kHz (-3dB)
eddyNCDT 3100
Smart eddy current displacement sensor
system for industrial applications
eddyNCDT 3300
Intelligent eddy current system (single-channel)
for very precise measurements
0.5 | 0.8 | 1 | 2 | 3 |
Measuring ranges (mm)
6 | 15
0.4 | 0.8 | 1 | 2 | 3 | 4 |
Measuring ranges (mm)
6 | 8 | 15 | 22 | 40 | 80
±0.25% FSO
±0.2% FSO
0.005% FSO
0.005% FSO
Frequency response
25kHz (-3dB)
Frequency response
100kHz (-3 dB)
Configuration via web browser (Ethernet)
Standard and miniature sensors available
Worldwide the largest selection
of sensors
The technological leadership in eddy
current sensors, which spans many
years, is reflected in the sensor range
- more than 400 sensors are available
in different versions for the most varied
Revolutionary eddy current sensors
Our eddyNCDT ECT sensors feature innovative Embedded Coil Technology (ECT). This
innovative sensor design helps to achieve outstanding precision, signal stability and robustness. This means that ECT sensors are ideally suited to even the harshest application conditions,
such as high vibration environments, high temperatures, electromagnetic fields or vacuums.
Suitable for extreme temperatures
The sensors can be used from -50°C to +350°C. The wide temperature range and the insensitivity to soiling or dust gives an enormous range of applications in industrial environments.Whereas currently available eddy current sensors exhibit extreme drift with variations in the ambient temperature, an active temperature compensation with the eddyNCDT sensors ensures the highest signal stability. Consequently,
measurements can be carried out over large temperature ranges with extreme signal stability.
Subminiature sensors for confined installation space
Apart from standard sensors in popular styles, miniature sensors can also be supplied which achieve
high precision measurement results with the smallest possible dimensions. Pressure-resistant versions,
screened housings, ceramic types and other special features characterize these sensors, which achieve
highly accurate measurement results despite the small dimensions. The miniature sensors are employed
in high pressure applications, e.g. in internal combustion engines.
Smallest sensors worldwide
Linear inductive
displacement and position sensors
Electromagnetic displacement sensors are used extensively in applications for automated
processes, quality assurance, test rigs, hydraulics, pneumatic cylinders, and automotive engi-
ƒƒMore than 250 different models with
neering. The advantages of these displacement sensors are well known and highly valued, and
measuring ranges from 1 to 630mm
include ruggedness, reliability under harsh conditions, high signal quality and good temperature
ƒƒController integrated or separate
stability. The electromagnetic sensors of the induSENSOR series are based on the well-proven
ƒƒHigh accuracy classes
inductive and eddy current principle. They are used successfully both in single and high volume
ƒƒExtreme stability and robustness
OEM applications.
ƒƒDifferent constructions with plunger, tube
or measuring ring
ƒƒHigh temperature stability
In automated production plants, inductive sensors
monitor the production tolerance of the products while
the process is running.
To monitor the clamping position of tools, a VIP
series sensor is integrated into the chuck and directly
measures the clamping stroke of the drawbar.
Inductive gauging sensors measure the geometry
of workpieces in quality assurance and production.
induSENSOR Serie VIP
Displacement sensors with integral electronics
induSENSOR Serie LVP - DC
Displacement sensors with integral electronics
induSENSOR Serie EDS
Displacement sensors with integral electronics
Measuring ranges (mm) 50 | 100 | 150
Measuring ranges (mm) 50 | 100 | 200
75 | 100 | 160 | 200 |
Measuring ranges (mm) 250 | 300 | 370 | 400 |
500 | 630
±0.25% FSO
±0.25% FSO
±0.3% FSO
0.03 % FSO
0.03% FSO
0.05% FSO
Frequency response
300Hz (-3dB)
Frequency response
300Hz (-3dB)
Frequency response
150Hz (-3dB)
measuring ring
Pressure resistance
Gauging sensor with external electronics
Gauging sensor with external electronics
induSENSOR Serie LDR
Linear displacement sensors with external
electronics of high temperature (up to 160°C)
Measuring ranges (mm) ± 1 | 3 | 5 | 10
Measuring ranges (mm) ± 1 | 3 | 5 | 10 | 15 | 25
Measuring ranges (mm) 10 | 25 | 50
±0.3% FSO
±0.15% FSO
±0.30% FSO
Frequency response
300Hz (-3dB)
Frequency response
300Hz (-3dB)
Frequency response
300Hz (-3dB)
plunger with
return spring
Plunger principle
Measuring ring principle
Extended functionality
Tube principle
Compactness due to parallel mounting
The induSENSOR product group offers extended functionality and properties as a
substantial advantage compared to conventional inductive probes and sensors. The
versions in the series differ from one another in construction, accuracy class and
Target movement
therefore also in their fields of application. The sensors are designed with integral or external
electronics and use a plunger, measuring sleeve and measuring tube as the target. As
a result, new fields of application are opening up due to the versatile methods of installati-
on. This is particularly noticeable with the VIP Series: the difference from conventional LVDT
sensors is that with the VIP Series, the measurement object is mounted parallel to the
sensor. Parallel mounting is primarily suitable for confined installation spaces.
Sleeve movement
Through the short measuring sleeve concept, the sensors can be integrated to form a
mechanical unit with dampers, valves, automatic screw driving units, clutches or pedals.
displacement Sensors
Magneto-inductive sensors measure distances, positions or displacements of a defined
­magnetic target. The measuring range is 45mm as standard, but can be adjusted from 20mm
ƒƒLarge measuring range
to 55mm by changing the magnet. This physical measuring principle means the output signal is
ƒƒAnalogue, digital, PWM outputs
linear (2 - 10V and 4 - 20mA) and is independent of the measuring range.
ƒƒHigh measuring rate
Due to this physical effect, measurements can be taken without any interference from non-
ƒƒHigh resolution
ferrous materials between the sensor and the target such as aluminium, plastic or ceramics.
ƒƒCompact sensor design
This is very useful when measuring in a closed system. A flush mounting option in non-ferrous
ƒƒHigh volume OEM custom solutions
material is also possible.
The flexible design offers many options in terms offers of sensor design. The sensor is available
as a simple PCB, in a plastic housing or in housings made from stainless steel, which is resistant
to most chemicals, oil or dirt.
Uhlmann Pac-Systeme GmbH & Co. KG
OEM integration in damper of washing machines
Magnet integrated in the damper and sensor mounted
Foreign body detection in medical technology
MDS sensor recognises foreign bodies in blister
machines during the tablet packaging process.
SIG Combibloc Group AG
Valve lift measurement in the food industry
The sealed stainless steel housings of the MDS-45-Mxx
series are ideal for the food industry.
Measuring ranges (mm) 20 - 55mm
Measuring ranges (mm) 20 - 55mm
Measuring ranges (mm) 20 - 55mm
2 - 10V
2 - 10V
2 - 10V / 4 - 20mA
±3% FSO
±3% FSO
±3% FSO
0.05% FSO
0.05% FSO
0.05% FSO
Pressure resistance
up to 400bar (front)
Axial cable exit
Pressure resistance
50bar (front)
Frequency response
1kHz (-3dB)
Frequency response
Frequency response
1kHz (-3dB)
1kHz (-3dB)
Measuring ranges (mm) 20 - 55mm
Measuring ranges (mm)
approx.40, depending
on the magnet
Measuring ranges (mm)
approx.40, depending
on the magnet
2 - 10V / 4 - 20mA
different kinds
±3% FSO
±3% - 5% FSO
±6% FSO
0.05% FSO
0.05% FSO
0.05% FSO
Frequency response
1kHz (-3dB)
preferred types 1 / 10pcs
Freely configurable from
> 2000 / 5000
pcs / year
Measuring ranges of magnets: 20mm, 27mm, 35mm, 45mm, 55mm
Standard cables with M8x1 connector in different types
Flexible sensor design for OEM applications
Due to the flexible sensor design and the significant advantages of this physical measuring
principle, various possibilities are available for adjusting the sensor to specific high volume
applications. In OEM projects, the requirements of certain applications can be met at a very
competitive price level.
ƒƒHigher dynamics
ƒƒDifferent housing shapes and materials
ƒƒVarious output signals
ƒƒSpecial features such as pressure resistance, integrated cables, etc.
Draw-wire sensors
for displacement, position and length
Draw-wire displacement and position sensors are essentially electronic tape measures and
measure the linear movement of a component using a wire made of highly flexible stainless
ƒƒVery accurate
steel strands, which is wound onto a drum by means of a long-life spring motor. The measuring
ƒƒLong measuring ranges
drum is axially coupled with a multi-turn potentiometer, an incremental encoder, or an absolute
ƒƒRobust and compact
encoder. With the draw-wire principle, a linear movement is transformed into a rotary movement
ƒƒEasy installation and handling
and then converted into a resistance change or into countable increments.
ƒƒCompact design
ƒƒExcellent price/performance ratio
Draw-wire displacement sensors measure the lifting
height on forklift trucks. With its compact construction,
users can acquire lifting heights of up to 30m.
Miniature draw-wire sensors monitor the satellite
release process from the Ariane booster rocket.
Draw-wire sensors monitor the height of lifting
platforms on automobile production lines.
MK30 / MK46 / MK77 / MK88 / MK120
OEM miniature sensors
Subminiature sensors
Miniature sensors
Measuring ranges
50 | 150 | 250 | 500 | 750 |
1000 | 1250 | 2100 | 2300 |
3000 | 3500 | 5000 | 7500
Measuring ranges
50 | 150 | 250
Measuring ranges
100 | 300 | 500 | 1000
Analogue output
voltage, current
Analogue output
Analogue output
Digital output
Option with wire acceleration up to 100g
wireSENSOR P60/P96
Industrial sensors
wireSENSOR P115
Industrial sensors
Option with protection class IP67
wireSENSOR P200
ong-range sensors
Measuring ranges
100 | 150 | 300 | 500 |
750 | 1000 | 1500 | 2000 |
2500 | 3000
Measuring ranges
3000 | 4000 | 5000 |
7500 | 10,000 | 15,000
Measuring ranges
30,000 | 40,000 | 50,000
Analogue output
voltage, current
Analogue output
voltage, current
Digital outputs
Digital outputs
Digital outputs
wireSENSOR mechanics
The mechanical options P96, P115 and P200 series are designed for easy
mounting of a customer-specific encoder.
Compact, dependable and economical
Application with pulley wheel
The different sensor model ranges cover the complete application spectrum of draw-wire sensors. The miniature sensors are very favourably priced and are suitable for integration in tight installation spaces due to the miniaturised design. The industrial sensors are of extremely rugged
construction and are employed in applications with large measuring ranges. A clear advantage
of this draw-wire measuring principle is that the measuring cable can be diverted over deflection
pulleys. This property differentiates draw-wire sensors from other measuring principles which
normally only measure on one axis.
The sensor housings are kept extremely compact. The well-conceived sensor design enables
large measuring ranges to be realised in a space-saving manner. Since only high quality components are used, the rugged sensors have an extremely long life - even in continuous use
under industrial conditions.
Laser line triangulation:
Non-contact 2D/3D profile sensor
The scanCONTROL laser line profile sensor makes use of the triangulation principle for the two-
dimensional acquisition of profiles on the most varied of target surfaces. In contrast to familiar
ƒƒHigh accuracy and profile frequency
point laser sensors, a line optical system projects a laser line onto the surface of the object to
ƒƒHigh performance signal processor
be measured. The back-scattered light from the laser line is registered on a sensor matrix. Along
ƒƒTrigger and synchronisation options
with distance information (z-axis), the controller also calculates the true position along the laser
ƒƒDifferent types for customised integration
line (x-axis) from the camera image and outputs both values in the sensor two-dimensional
coordinate system. A moving object or sensor will generate a three-dimensional representation
ƒƒComplete solution from Micro-Epsilon
of the object.
Inspection of adhesive beads on windscreens
Measuring gaps / flushness for vehicle body parts
Rivet verification in aircraft construction
scanCONTROL 26xx
Laser profile sensor ideal for automation
Measuring z-axis
up to 265mm
Resolution x-axis
Profile frequency
scanCONTROL 27xx
For long offset distances
scanCONTROL 29xx
High performance laser profile sensor
up to 300mm
up to 143.5mm
Measuring z-axis
up to 265mm
up to 148mm
Measuring z-axis
640 points/profile
Resolution x-axis
640 points/profile
Resolution x-axis
1280 points/profile
up to 4000Hz
Profile frequency
up to 4000Hz
Profile frequency
up to 2000Hz
up to 143.5mm
scanCONTROL Configuration Tools
Configuring various measuring programs through
simple mouse interactions
Dynamic tracking of evaluations in the profile
Configuring outputs and displaying measured values
Output of measured values across a large number of interfaces
gapCONTROL Setup Software
Sophisticated software for automated gap/flush
Evaluation of different gap types
Simple configuration of measuring tasks
Configuring outputs and displaying measured values
scanCONTROL 3D-View
scanCONTROL Softwareintegration
Can be used with all scanCONTROL
Ethernet GigE Vision
Viewing online and offline sensor data
in 3D
2D export of profile sequences (png)
SDK for integration in C/C++ (Linux and
Windows) or C# (Windows) applications
Example VIs for NI LabVIEW for integration
using LLT.DLL or NI IMAQdx
3D export (asc, stl) for CAD programs
Intensity of each point can be displayed
and exported
Optical micrometers and
fibre optic sensors
Optical micrometers in the optoCONTROL series are based on various measuring principles.
Apart from the CCD camera technique using laser or LED lighting, the principle of light quan-
ƒƒVarious models for different applications
tity measurement is used. The micrometers consist of a light source and a receiver or a CCD
ƒƒLaser or LED light source
camera. The light source produces a parallel, continuous light curtain, which is lined up with
ƒƒExtremely compact construction
the receiver. If an object interrupts the light curtain, this shadow or darkening is detected at the
ƒƒVery accurate measurements
receiver unit.
ƒƒHigh speed measurements
The optoCONTROL 1200 series acquires the incident quantity of light, whereas the 1202, 25x0
ƒƒPerfect detection of edges, gaps, positions
and 2600 Series measure the exact shadow via a CCD array. In this way, dimensional quantities
such as diameter, gap, position and segment can be acquired. These units use state-of-theart, high speed CCD cameras with solid state technology, which eliminate measurement errors
and diameters of round objects
ƒƒInspection and detection of position and
caused by traditional scanning laser micrometers.
The optoCONTROL CLS-K fibre optic sensors are used for applications in harsh environments.
Using sophisticated optical fibres near to the target object, the electronic unit can be mounted
at a safe distance away.
The optoCONTROL CLS-K test and measurement amplifiers are offered as infrared types,
enabling measurement frequencies of 4kHz.
During the stamping of threaded rods, micrometers
are used for quality assurance in order to determine
the exact thread guidance.
Optical micrometers are used for acquiring roller gaps
to ensure a constant gap height.
Synchronised micrometers acquire the vibration
of tensioned steel lift cables in order to control the
vibration behaviour.
optoCONTROL 1200
Miniature high-speed micrometer (laser)
optoCONTROL 1202
Compact high-speed micrometer
with large measuring range (laser)
optoCONTROL 1220
Optical online micrometer
Measuring ranges (mm) 2 | 5 | 10 | 16 | 20 | 30
Measuring ranges (mm) 75 | 98
Measuring range (mm)
±40µm (independent)
typ. 2µm
Frequency response
Measuring rate
Working distance
up to 2,000mm
Integrated controller
Integrated controller
optoCONTROL 2500
High-resolution micrometer (laser)
Integrated controller
optoCONTROL 2520
Compact laser micrometer (class 1M)
optoCONTROL 2600
High-resolution micrometer (LED)
Measuring range (mm)
Measuring range (mm)
Measuring range (mm)
Measuring rate
Measuring rate
Measuring rate
External controller
Integrated controller (web interface)
External controller
Fibre optic sensors
Edge detection
Counting tasks
Monitoring and control
of the mounting procedure
Gap detection
Scanning tasks in potentially
explosive atmospheres
Presence monitoring and position control
Recognition of brightness and reflection
Detecting fast-moving parts in processes
Apart from measurement tasks, the 1200 series can be employed for ascertaining
the presence of components. The versatile concept with enormously high frequency
response and compact design opens up numerous fields of application
Colour sensors, colour measuring system
and LED Analyzers
Colour recognition sensors of the colorSENSOR series are applied to colour detection
applications. The sensors compare the current colour of the measured object with the
ƒƒSimple quality checks
target colours that were set up via the sensor’s Teach-In function. colorSENSOR LT sen-
ƒƒSimple and fast set up
sors operate using optical fibres directly on the target object, which therefore minimises any
ƒƒMany sensors to suit any application
adverse environmental effects on measurements. The colour sensor can be placed at a safe
ƒƒOptical fibre close to the object to be
distance using highly developed fibre optics close to the target object.
The colorSENSOR OT series enables measurements at longer distances by means of fixed
optics. The new non-contact colour measurement system, colorCONTROL ACS7000, de-
ƒƒMeasurement at a safe distance from
the object if required
tects slightest colour differences (ΔE < 0.08) with measurement frequencies of up to
2000Hz. The sensors are applied in a wide range of applications, including automation
technology, surface labelling and printing technology. The LED Analyzer colorCONTROL MFA
provides function, colour and intensity measurement of LEDs, lamps or illuminants simultaneously during the production process on up to 20 different detection positions.
Detection of the colour identity of painted attachments
or body parts in automotive manufacturing.
Colour and intensity tests of vehicle lights.
Colour and homogeneity measurements of LED/lighting
Colour recognition using optical fibres
close to the target object
Colour recognition using fixed optics
at a distance from 10 - 800mm
Colour difference
≥ ΔE 0.8
Colour difference
Software teach
1 - 255 colours can be saved
Button teach
1 - 31 colours can be saved
Colour sensor for different surfaces such
as matt, shiny or structured surfaces
Optical fibres
High precision optical fibres can be adapted to
work with colorSENSOR LT colour sensors
≥ ΔE 0.5
8 - 200mm
Transmission sensor,
circular sensor,
30°/0° sensor
0.6 - 30mm
Colour difference
< ΔE 0.08
-40°C to 400°C
Detection ranges
5 to 20 measuring points
Test of function, intensity colour
Colour test in HSI and RGB
colorCONTROL ACS7000
Inline colour measurement system
for non-contact measurement
Ambient temperatures
Colour recognition of LEDs
and self-luminous objects
Webinterface - colorCONTROL ACS 7000
Spectral measuring range 390 - 780nm
Spectral resolution
Colour recognition from a taught reference list
Inline colour measurement of plastic injection-moulded
parts directly after demoulding.
Inline colour gradient measurement of transparent film
and acrylic glasses.
Colour measurement of continuous strip coating such
as aluminium, zinc and paper during production.
infrared temperature sensors
Infrared thermometers determine the temperature of objects by non-contact measurement of
the infrared radiation emitted by the object‘s surface. A detector converts the incoming infrared
ƒƒEase of use
radiation into an electrical signal. This results in an aligned temperature value, which can be
ƒƒNon-contact measurement without
used for further processing. The use of either portable or inline infrared thermometry sensors
opens up various opportunities to measure and display temperature processes in the fields of
quality control, automation systems and maintenance of machines and large plants.
contaminating the object
ƒƒEnables inspections of hot, fast moving
or hard to reach objects in hazardous
Trend setting infrared sensor technology for process automation
Miniaturized IR sensors thermoMETER combine high accuracy of the sensor parameters,
ruggedness up to 250°C ambient temperature, a state of the art stainless steel mechanical
design and an affordable price.
New developed IR detectors with high sensitivity and small dimensions make outstanding
measuring parameters such as response times of 1ms possible. Sophisticated infrared thermometers support a high quality level in the production process.
Crosshair precision module
Optomechanical device of the LS and mapping of the
laser line generators.
Industrial automation
Control and monitoring of process temperatures and
product quality.
Electrical and mechanical maintenance, R&D
Inspections of electrical systems, switch cabinets,
bearings and motors.
thermoMETER CX
thermoMETER CS / CSmicro / CSLaser
thermoMETER CTratioM1
Two wire IR sensor for industrial applications
Compact or micro sized IR sensors,
low-cost, fully integrated
Glass fibre ratio thermometer
Temperature range: -30°C to 900°C
22:1 optical resolution
Power range 5-30 V DC
Optional USB programming interface
and software
Temperature range: -40°C to 1600°C
Rugged coated silicon optics
Integrated electronics
Scalable analogue output: 0 - 10V or 0 - 5V
Smallest integration, ideal for OEM
Temperature range: 700°C to 1800°C
Ambient temperatures up to 250°C
continuous without cooling
Insensitive to changes in emissivity
of the target
5ms response time for fast readings
High-resolution models available
thermoMETER CTlaser
thermoMETER CTlaser M1/M2/M3
Most precise sensor with laser aiming
For metal processing with
reduced wavelength: 50°C to 2200°C
Portable IR thermometers
Infrared sensors with 75:1 optical resolution
thermoMETER CTlaser M5 (525nm)
Fast 0.3 second scanning of cold and hot spots
Smallest spot size 0.9mm
For liquid metals: 1000°C - 2000°C
Double laser aiming marks real spot location
and spot size at any distance
thermoMETER CTlaserGLASS
Laser sighting with narrow beam aiming for
accurate readings
For glass measurement: 100°C to 1650°C
Crosshairs mark real spot size at any distance (LS)
Measuring times from 9 ms
Temperature range: -50°C to 975°C
Temperature range: -35°C - 900°C
For measurement of flames: 200°C to 1450°C
thermoMETER CT
thermoMETER CTM1/M2/M3
thermoMETER CT Video/CS Video
Most economic and accurate
For metal processing,
Temperature range: 50°C to 2200°C
Infrared temperature sensors with crosshair
laser sighting and video output
thermoMETER CThot
Temperature range: 50°C up to 2200°C
Up to 180°C ambient temperature without cooling
For extreme environmental conditions up to 250°C
ambient temperature without cooling
Measurements on hot metals, ceramics and
composite materials
thermoMETER CTP7
Use video output and crosshair laser sighting in
Temperature range: -50°C to 975°C
One of the smallest infrared sensors
worldwide with 22:1 optical resolution
For thin plastic film materials from 0°C to 500°C
Non-contact temperature measurement from
100°C to 1800°C in laser processing applications
USB thermal imagers
Plug&Play thermal imager
Powered from a single USB cable, the system is truly plug-and-play. Data is streamed in real
ƒƒEase of use
time from the camera to the software via USB 2.0. This process and analysis tool, provided with
ƒƒNon-contact measurement without
every camera, enables the user to capture, record and monitor real time thermal process images at 128Hz. The software will store the data to a file, which enables playback at user-defined
speeds, e.g. in slow motion, or frame-by-frame if required. The images can be viewed and
monitored either online with the camera connected, or off line at a later time without the camera
influencing the target object
ƒƒEnables inspection of hot, fast moving
or hard to access objects in hazardous
being connected. A perfect tool for R&D applications, failure diagnostics or process monitoring.
ƒƒRapid detection of weak points in power
In addition, the software can be used as a runtime application where the user is able to pro-
distribution systems, machines and pro-
gramme and configure a custom environment (multiple monitoring windows, alarms, hot spot
duction processes
localisation, line profiling etc.) A programmable process interface, hard wired input and output,
(PIF in) enables external control and communication for the emissivity of the target material,
ƒƒSoftware Developer Kit incl. examples
such as C, C++, C#
trigger functions, shutter control or alarm outputs and other useful features.
Surface measurements in industrial applications
Monitoring a coal conveyor belt
Thermal image shots of preforms in PET bottle
Sharp infrared pictures and videos for process
optimisation e.g. in the automotive industry
Exact temperature measurement on moving
glass surfaces due to line scan feature
Temperature monitoring for building
thermoIMAGER TIM 160
thermoIMAGER TIM 200/230
thermoIMAGER TIM 400/450
Temperature ranges:
-20°C to 900°C (special edition 1500°C)
BI-SPECTRAL technology
Detector with 382 x 288 pixels
Temperature ranges:
-20°C to 900°C (special edition 1500°C)
Temperature ranges:
-20°C to 900°C (special edition 1500°C)
Excellent thermal sensitivity of 0.08K (NEDT)
Excellent thermal sensitivity
of 0.08K resp. 0.04K (NETD)
Excellent thermal sensitivity of 0.08K (NEDT)
Exchangeable lenses with
6°FOV, 23°FOV, 48°FOV or 72° FOV
Real time video recording at 120Hz frame rate with
slow motion playback capability
Extremely lightweight (195g) and rugged (IP67)
Very compact 45x45x62mm
Exchangeable lenses with
6°FOV, 23°FOV, 48°FOV or 72° FOV
Real time video recording at 128Hz frame
rate with slow motion playback capability
Exchangeable lenses 13°, 38° or 62° FOV
and industrial accessories
Fast real-time thermal imager with up to 80Hz
Time synchronic visual image recording
with 32 Hz (640 x 480 pixel)
Analogue input and output, trigger interface
thermoIMAGER TIM 640
Thermography in VGA resolution
Thermal imaging camera for hot metal surfaces
640 x 480 pixels
Thermal imaging camera with line scan feature
for the glass industry
Temperature ranges: -20°C to 900°C
Image frequency of 80Hz
Measuring ranges: 450 to 1800°C /
500 to 1800°C / 600 to 1800°C
Excellent thermal sensitivity of 0.075K (NEDT)
Excellent thermal sensitivity of 0.13K (NEDT)
Excellent thermal sensitivity of <1K (NETD)
Radiometric video recording with 32Hz
Robust against ambient temperatures up to 70°C
without requiring additional cooling, up to 240°C
with cooling jacket
Analogue input and output, trigger interface
Analogue input and output, trigger interface
Optical resolution: 764 x 480 pixels
Spectral range: 0.92 – 1.1µm
Free software
Complex image analysis and process monitoring
software with custom configuration
thermoIMAGER NetPC
Embedded, industrial PC solution with passive
cooling for thermoIMAGER applications
Special edition:
TIM LightWeight
Supports all thermoIMAGER TIM models
Miniature lightweight PC for flight applications
with thermoIMAGER series
Integrated watchdog feature
Total weight 350g incl. camera
Recording button on camera housing
Innovative sensor solutions
for specific applications
Apart from standard sensors utilising the various measuring principles, Micro-Epsilon has developed numerous sensor solutions for special applications, which go beyond pure displacement
and position measurement.
These application-specific sensors have been developed and optimised for special measurement tasks at the request of customers. These developments incorporate the company‘s expertise gained from more than thirty years designing, developing and applying sensor systems.
Here, the developments always focus on high performance and reliability - at favourable price/
performance ratios for OEMs.
Thickness measurement of yarn
Load detection in washing machines
Non-contact inline film thickness measurement
ILU-50 series sensor
Sensors for measuring the rotational speed of
turbochargers - for vehicle and test cell use.
Integrated load and imbalance sensor
for washing machines
Non-contact displacement and thickness
measurement with just one sensor
Optimised for modern, thin compressor blades
made from aluminium or titanium.
Measuring ranges 50mm
Every combiSENSOR combines two
measuring principles in one housing.
For OEM applications
Speed range from 200 to 400,000rpm
Non-contact thickness measurement
of plastic films
Wide operating temperature range
Non-contact layer thickness measurement
of insulator materials
High measuring distance of sensor to blade
No rotor modification necessary
Lateral profile by using a traversing axis
SGS Spindle Growth System
NLS Needle Lift System
Measurement system developed for measuring
the extension of high speed milling spindles
Miniature sensor system for measuring
the needle lift in fuel injectors
Non-contact inspection of extruder bores
Measuring ranges 500µm
Innovative measurement concept
Resolution 0.5µm
Wide temperature range
High temperature range
Extreme pressure environment
Turbocharger speed measurement
Measurement of thermal extension in spindles
Non-contact and wear-free measurement
Suitable for all metals without additional calibration
Exact, non-destructive inspection
Inspection of extruder bores
Measurement and inspection systems
System solutions from Micro-Epsilon are measurement systems that go beyond pure sensor
systems. In this respect, sensors, software and the mechanical system are blended together to
form one integrated overall system, which is used for process monitoring and quality assurance
on production lines. The sensor and software modules used originate from the Micro-Epsilon
group, enabling optimum and efficient component matching.
These turnkey automated measurement systems are integrated into existing or newly designed
process lines to execute fully automated applications, such as thickness measurement, surface
inspection and parts classification.
For each measurement task there is a suitable measu­
rement concept. As well as laser sensors, micro­
meters, eddy current and capacitive sensors, image
processing solutions, special combined sensors are
also used.
The signal representation can be arranged to suit the
application requirements. The measurement systems
communicate with existing environments over various
interfaces and can therefore also be integrated retros­
pectively into existing production lines.
C-frame for metal thickness measurement
Powerful C-frames for harsh environments
O-frame systems for the metals industry
For fast measurements
Different measuring ranges
Modern thickness profile measurement
Laser point or innovative laser line
Proven protection and cleaning concepts
Without isotopes or X-rays
All alloys without calibration
Several C-frames with only one IPC
Reliable measurement independent from strip
movement, tilt, surface type and alloys
Systems for the preparation area in the
rubber and tire production
Final finishing systems
in the rubber and tire production
Systems for
plastics inspection
Tire geometry
C-frames for thickness measurement of flat film
Colour code
Tire marking
O-frame systems for profile thickness measurement
Length measurement
Tire identity
Reverse frame system for profile thickness
measurement of blown film
reflectCONTROL Robotic
reflectCONTROL Compact
3D inspection of matt surfaces
Fully automatic surface inspection of painted
car bodies
Inspection of shiny surfaces
Detection and evaluation of 3D surface data
within a few seconds
Defect detection & 3D reconstruction
Recognition of defects, bumps, scratches etc.
Modifications reserved / Y9761185-H011026GKE
MICRO-EPSILON Headquarters
Koenigbacher Str. 15 ∙ 94496 Ortenburg / Germany
Tel. +49 (0) 8542 / 168-0 ∙ Fax +49 (0) 8542 / 168-90
[email protected] ∙
Micro-Epsilon UK Ltd.
No.1 Shorelines Building · Shore Road · Birkenhead · CH41 1AU
Phone +44 (0) 151 355 6070 · Fax +44 (0) 151 355 6075
[email protected] ·
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