a-Baratron® manual - John Morris Group
Part 1048990--001
Rev.1, Jan. 2014
MKS Type a-Baratron™ Absolute
Pressure Transducer
Copyright © 2014 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.
Some Baratrons may not be exported to many end user countries without both US and local
government export licenses under ECCN 2B230.
Printed in the United States of America.
Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA, USA. a-Baratron
is a trademark of MKS Instruments, Inc., Andover, MA, USA.
Swagelok, VCO, and VCR are registered trademarks of Swagelok Co., Solon, OH, USA.
Inconel® and Incoloy® are registered trademarks of Inco Alloys International, Inc., Huntington,
WV, USA.
Table of Contents
Table of Contents
Pressure Transducer Safety Information ...................................................................................... 1
Symbols Used in This Instruction Manual...................................................................... 1
Symbols Found on the Unit ............................................................................................ 2
Safety Procedures and Precautions ................................................................................. 3
Sicherheitshinweise für den Druckmeßumformer ....................................................................... 5
In dieser Betriebsanleitung vorkommende Symbole ......................................................5
Erklärung der am Gerät angebrachten Symbole .............................................................6
Sicherheitsvorschriften und Vorsichtsmaßnahmen ......................................................... 7
Informations relatives à la sécurité pour le transducteur de pression .......................................... 9
Symboles utilisés dans ce manuel d'utilisation ............................................................... 9
Symboles apparaissant sur l'unité ................................................................................... 10
Mesures de sécurité et précautions ................................................................................. 11
Medidas de seguridad del transductor de presión ........................................................................ 13
Símbolos usados en este manual de instrucciones ..........................................................13
Símbolos hallados en la unidad....................................................................................... 14
Procedimientos y precauciones de seguridad.................................................................. 15
Chapter One: General Information ............................................................................................. 17
Introduction..................................................................................................................... 17
How This Manual is Organized ...................................................................................... 18
Customer Support ........................................................................................................... 18
Chapter Two: Installation ........................................................................................................... 19
How To Unpack the Type a-Baratron Heated Unit ........................................................ 19
Unpacking Checklist .......................................................................................... 19
Interface Cables .............................................................................................................. 20
Generic Shielded Cable Guidelines ................................................................... 21
Product Location and Requirements ...............................................................................22
Ambient Operating Temperature ....................................................................... 22
Power Requirements ..........................................................................................22
Setup ............................................................................................................................... 23
iii
Table of Contents
Dimensions ........................................................................................................23
Fittings ...............................................................................................................24
Mounting Instructions ........................................................................................24
Electrical Information .....................................................................................................25
Grounding ..........................................................................................................25
Interface Connector............................................................................................26
Start Up ...........................................................................................................................28
Warm Up Time ..................................................................................................28
Chapter Three: Overview ............................................................................................................29
General Information ........................................................................................................29
Sensor..............................................................................................................................29
Signal Conditioner/Electronics .......................................................................................29
Instrument Components ..................................................................................................30
Coarse Zero Switch ............................................................................................30
Interface Connector............................................................................................30
Labels .................................................................................................................31
Top Panel Labels ...............................................................................................31
Band Label .........................................................................................................31
Serial Number Label ..........................................................................................31
Chapter Four: Operation .............................................................................................................33
How To Adjust the Zero .................................................................................................33
How To Adjust the Zero Potentiometer .............................................................34
Suggested Pressures for Reading and Control ...................................................35
Chapter Five: Maintenance and Troubleshooting .......................................................................37
General Information ........................................................................................................37
Maintenance ....................................................................................................................37
Zero Adjustment ................................................................................................37
Troubleshooting ..............................................................................................................38
Appendix A: Product Specifications ...........................................................................................39
Electrical Specifications..................................................................................................39
Environmental Specifications .........................................................................................39
Performance Specifications ............................................................................................39
iv
Table of Contents
Physical Specifications ................................................................................................... 40
Optional Semiconductor Switch Specifications..............................................................Error! Bookmark n
Appendix B: Model Code Explanation ....................................................................................... 41
Model Code..................................................................................................................... 41
Index ............................................................................................................................................ 46
v
List of Figures and Tables
List of Figures and Tables
Figures
Figure 1: Top View Dimensions .................................................................................................23
Figure 2: Side View Dimensions ................................................................................................23
Figure 3: Example Power, Signal, and Chassis Grounding Scheme...........................................25
Figure 4: Top View of the a-Baratron Heated Transducer .........................................................30
Figure 5: Top Panel Label ..........................................................................................................31
Figure 6: Serial Number Label....................................................................................................31
Tables
Table 1: Definition of Symbols Found on the Unit......................................................................... 2
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ........................................................... 6
Tableau 3: Définition des symboles apparaissant sur l'unité ........................................................ 10
Tabla 4: Definición de los símbolos hallados en la unidad ........................................................... 14
Table 5: Interface Cables .............................................................................................................. 20
Table 6: Interface Connector Pinout ............................................................................................. 27
Table 7: Highest Pressures Suggested for Proper Zero Adjustment ............................................. 34
Table 8: Lowest Suggested Pressures for Reading and Control ................................................... 35
Table 9: Troubleshooting Chart .................................................................................................... 38
vi
Pressure Transducer Safety Information
Symbols Used in This Instruction Manual
Pressure Transducer Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
Caution
Note
The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like, which,
if not correctly performed or adhered to, could result in injury
to personnel.
The CAUTION sign denotes a hazard to equipment. It calls attention
to an operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
1
Symbols Found on the Unit
Pressure Transducer Safety Information
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007
Off (Supply)
IEC 417, No.5008
Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Alternating current
IEC 417, No.5032
Frame or chassis
IEC 417, No.5020
Equipotentiality
IEC 417, No.5021
Direct current
IEC 417, No.5031
Both direct and
alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
2
Pressure Transducer Safety Information
Safety Procedures and Precautions
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used is
compatible with the materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s
directions.
3
Safety Procedures and Precautions
Pressure Transducer Safety Information
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled units will only meet specifications when sufficient time is allowed for the
unit to meet, and stabilize at, the designed operating temperature. Do not zero or calibrate the
unit until the warm up is complete.
4
Sicherheitshinweise für den Druckmeßumformer
In dieser Betriebsanleitung vorkommende Symbole
Sicherheitshinweise für den Druckmeßumformer
In dieser Betriebsanleitung vorkommende Symbole
Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in
dieser Betriebsanleitung.
Warnung!
Das Symbol WARNUNG! weist auf eine Gefahr für das
Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine
Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit
aufmerksam, deren unsachgemäße Ausführung bzw.
ungenügende Berücksichtigung zu Verletzungen führen kann.
Vorsicht!
Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es
macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung
bzw. ungenügende Berücksichtigung zu einer Beschädigung oder
Zerstörung des Gerätes oder von Teilen des Gerätes führen kann.
Hinweis
Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige
Gegebenheit aufmerksam.
5
Erklärung der am Gerät angebrachten Symbole
Sicherheitshinweise für den Druckmeßumformer
Erklärung der am Gerät angebrachten Symbole
Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät
angebracht sein können.
Bedeutung der am Gerät angebrachten Symbole
|
Ein (Energie)
IEC 417, No.5007
Aus (Energie)
IEC 417, No.5008
Erdanschluß
IEC 417, No.5017
Schutzleiteranschluß
IEC 417, No.5019
Masseanschluß
IEC 417, No.5020
Aquipotentialanschluß
IEC 417, No.5021
Gleichstrom
IEC 417, No.5031
Wechselstrom
IEC 417, No.5032
Gleich- oder
Wechselstrom
IEC 417, No.5033-a
Durchgängige
doppelte oder
verstärkte Isolierung
IEC 417, No.5172-a
IEC 617-2, No.020206
Warnung vor einer
Gefahrenstelle
(Achtung, Dokumentation beachten)
ISO 3864, No.B.3.1
Warnung vor
gefährlicher
elektrischer Spannung
ISO 3864, No.B.3.6
Höhere Temperatur
an leicht
zugänglichen Teilen
IEC 417, No.5041
DreileiterWechselstrom
(Drehstrom)
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole
6
Sicherheitshinweise für den Druckmeßumformer
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes
zu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser
Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden
Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen.
MKS Instruments, Inc. haftet nicht für Mißachtung dieser Sicherheitsvorschriften seitens des
Kunden.
Niemals Teile austauschen oder Änderungen am Gerät vornehmen!
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine
eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und
Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle
Schutzvorrichtungen voll funktionsfähig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur
von qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal.
Vorsicht beim Arbeiten mit gefährlichen Stoffen!
Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechenden
Sicherheitsvorschriften genauestens einhalten, das Gerät, falls erforderlich, vollständig spülen,
sowie sicherstellen, daß der Gefahrstoff die am Gerät verwendeten Materialien, insbesondere
Dichtungen, nicht angreift.
Spülen des Gerätes mit Gas!
Nach dem Installieren oder vor dem Ausbau aus einem System muß das Gerät unter Einsatz eines
reinen Trockengases vollständig gespült werden, um alle Rückstände des Vorgängermediums zu
entfernen.
Anweisungen zum Spülen des Gerätes
Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.
Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in
der Nähe von) explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für
diesen Zweck zugelassen ist.
7
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Sicherheitshinweise für den Druckmeßumformer
Anweisungen zum Installieren der Armaturen!
Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen,
und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das
Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden.
Verbindungen auf Undichtigkeiten prüfen!
Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
Gerät nur unter zulässigen Anschlußdrücken betreiben!
Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe
Produktspezifikationen) übersteigen.
Geeignete Berstscheibe installieren!
Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete
Berstscheibe in das Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von
steigendem Systemdruck zu vermeiden.
Verunreinigungen im Gerät vermeiden!
Stellen Sie sicher, daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des
Betriebs in das Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter
oder Metallspäne können das Gerät dauerhaft beschädigen oder Prozeß und Meßwerte
verfälschen.
Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten!
Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit
zum Erreichen und Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und
Nulleinstellungen sollten daher nur nach Abschluß des Anwärmvorgangs durchgeführt werden.
8
Informations relatives à la sécurité pour le
transducteur de pression
Symboles utilisés dans ce manuel d'utilisation
Informations relatives à la sécurité pour le transducteur
de pression
Symboles utilisés dans ce manuel d'utilisation
Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce
manuel.
Avertissement
Attention
Remarque
L'indication AVERTISSEMENT signale un danger pour le
personnel. Elle attire l'attention sur une procédure, une
pratique, une condition, ou toute autre situation
présentant un risque d'accident pour le personnel, en
cas d'exécution incorrecte ou de non respect des
consignes.
L'indication ATTENTION signale un danger pour l'appareil.
Elle attire l'attention sur une procédure d'exploitation, une
pratique, ou toute autre situation, présentant un risque
d'endommagement ou de destruction d'une partie ou de la
totalité de l'appareil, en cas d'exécution incorrecte ou de non
respect des consignes.
L'indication REMARQUE signale une information importante. Elle
attire l'attention sur une procédure, une pratique, une condition, ou
toute autre situation, présentant un intérêt particulier.
9
Symboles apparaissant sur l'unité
Informations relatives à la sécurité pour le
transducteur de pression
Symboles apparaissant sur l'unité
Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.
Définition des symboles apparaissant sur l'unité
|
Marche
(sous tension)
IEC 417, No.5007
Arrêt (hors tension)
IEC 417, No.5008
Terre (masse)
IEC 417, No.5017
Terre de protection
(masse)
IEC 417, No.5019
Masse
IEC 417, No.5020
Equipotentialité
IEC 417, No.5021
Courant continu
IEC 417, No.5031
Courant alternatif
IEC 417, No.5032
Courant continu et
alternatif
IEC 417, No.5033-a
Matériel de classe II
IEC 417, No.5172-a
Courant alternatif
triphasé
IEC 617-2, No.020206
Attention : se reporter
à la documentation
ISO 3864, No.B.3.1
Attention : risque de
choc électrique
ISO 3864, No.B.3.6
Attention : surface
brûlante
IEC 417, No.5041
Tableau 3: Définition des symboles apparaissant sur l'unité
10
Informations relatives à la sécurité pour le
transducteur de pression
Mesures de sécurité et précautions
Mesures de sécurité et précautions
Prendre les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation
de cet appareil. Le non respect des ces précautions ou des avertissements contenus dans ce
manuel constitue une violation des normes de sécurité relatives à l'utilisation de l'appareil et
peut diminuer la protection fournie par l'appareil. MKS Instruments, Inc. n'assume aucune
responsabilité concernant le non respect des consignes par les clients.
PAS DE SUBSTITUTION DE PIÈCES OU DE MODIFICATION DE L'APPAREIL
Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur
l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou
réparation afin de garantir le l'intégrité des dispositifs de sécurité.
DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ
Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire des
réglages internes. Tout dépannage doit être uniquement effectué par du personnel qualifié.
PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX
Si des produits dangereux sont utilisés, l'utilisateur est responsable de la prise des mesures de
précaution appropriées, de la purge complète de l'appareil quand cela est nécessaire, et de la
garantie que les produits utilisés sont compatibles avec les composants de cet appareil, y compris
les matériaux d'étanchéité.
PURGE DE L'APPAREIL
Après l'installation de l'unité, ou avant son enlèvement d'un système, purger l'unité complètement
avec un gaz propre et sec afin d'éliminer toute trace du produit de flux utilisé précédemment.
UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE
Cet appareil doit être purgé sous une hotte de ventilation, et il faut porter des gants de protection.
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF
Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en
cas d'homologation spécifique pour une telle exploitation.
UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE
Tous les équipements de l'appareil doivent être cohérents avec ses spécifications, et compatibles
avec l'utilisation prévue de l'appareil. Assembler et serrer les équipements conformément aux
directives du fabricant.
11
Mesures de sécurité et précautions
Informations relatives à la sécurité pour le
transducteur de pression
VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS
Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir
l'étanchéité de l'installation.
EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES
Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux
spécifications de l'unité pour la pression maximum admissible).
INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ
En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté
dans le système à vide, afin d'éviter une explosion du système en cas d'augmentation de la
pression.
MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS
Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des
produits contaminants tels que des poussières et des fragments de tissu, de glace et de métal
peuvent endommager l'unité d'une manière permanente ou contaminer le processus.
RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á
TEMPÉRATURE CONTRÔLÉE
Les unités à température contrôlée atteignent leurs spécifications uniquement quand on leur laisse
un temps suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas
remettre à zéro ou calibrer l'unité tant que l'échauffement n'est pas terminé.
12
Medidas de seguridad del transductor de presión
Símbolos usados en este manual de instrucciones
Medidas de seguridad del transductor de presión
Símbolos usados en este manual de instrucciones
Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.
Advertencia
El símbolo de advertencia indica la posibilidad de que se
produzcan daños personales. Pone de relieve un
procedimiento, práctica, estado, etc. que en caso de no
realizarse u observarse correctamente puede causar daños
personales.
Precaución
El símbolo de precaución indica la posibilidad de producir daños al
equipo. Pone de relieve un procedimiento operativo, práctica,
estado, etc. que en caso de no realizarse u observarse
correctamente puede causar daños o la destrucción total o parcial
del equipo.
Nota
El símbolo de notas indica información de importancia. Este símbolo
pone de relieve un procedimiento, práctica o condición cuyo
conocimiento es esencial destacar.
13
Símbolos hallados en la unidad
Medidas de seguridad del transductor de presión
Símbolos hallados en la unidad
La tabla siguiente contiene los símbolos que puede hallar en la unidad.
Definición de los símbolos hallados en la unidad
|
Encendido
(alimentación eléctrica)
IEC 417, N° 5007
Apagado
(alimentación eléctrica)
IEC 417, N° 5008
Puesta a tierra
IEC 417, N° 5017
Protección a tierra
IEC 417, N° 5019
Caja o chasis
IEC 417, N° 5020
Equipotencialidad
IEC 417, N° 5021
Corriente continua
IEC 417, N° 5031
Corriente alterna
IEC 417, N° 5032
Corriente continua y
alterna
IEC 417, N° 5033-a
Equipo de clase II
IEC 417, N° 5172-a
Corriente alterna
trifásica
IEC 617-2, N° 020206
Precaución. Consulte
los documentos
adjuntos
ISO 3864, N° B.3.1
Precaución. Riesgo
de descarga eléctrica
ISO 3864, N° B.3.6
Precaución.
Superficie
caliente
IEC 417, N° 5041
Tabla 4: Definición de los símbolos hallados en la unidad
14
Medidas de seguridad del transductor de presión
Procedimientos y precauciones de seguridad
Procedimientos y precauciones de seguridad
Las precauciones generales de seguridad descritas a continuación deben observarse durante
todas las etapas de funcionamiento del instrumento. La falta de cumplimiento de dichas
precauciones o de las advertencias específicas a las que se hace referencia en el manual,
constituye una violación de las normas de seguridad establecidas para el uso previsto del
instrumento y podría anular la protección proporcionada por el equipo. Si el cliente no cumple
dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal
alguna.
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para
asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento
al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas
de mantenimiento.
LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS
AUTORIZADOS
Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el
interior del instrumento. Las tareas de mantenimiento o reparación deben ser realizadas
únicamente por personal autorizado.
TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS
Cuando se utilicen materiales tóxicos, es responsabilidad de los operarios tomar las medidas de
seguridad correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar
que el material utilizado sea compatible con los materiales del instrumento e inclusive, con todos
los materiales de sellado.
PURGUE EL INSTRUMENTO
Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con
gas limpio y seco para eliminar todo resto de la sustancia líquida empleada anteriormente.
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA
El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes
protectores.
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE
EXPLOSIÓN
Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con
riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal
uso.
15
Procedimientos y precauciones de seguridad
Medidas de seguridad del transductor de presión
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS
PROCEDIMIENTOS DE AJUSTE
Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser
compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo
con las instrucciones del fabricante.
COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS
Inspeccione cuidadosamente las conexiones de los componentes de vacío para comprobar que
hayan sido instalados a prueba de fugas.
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS
No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal
(en las especificaciones del instrumento hallará la presión máxima permitida).
INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA
Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de
seguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando suba
la presión del sistema.
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES
No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos
contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden
dañar irreparablemente la unidad o contaminar el proceso.
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE
TEMPERATURA
Las unidades controladas por medio de temperatura funcionarán de acuerdo con las
especificaciones sólo cuando se las caliente durante el tiempo suficiente para permitir que lleguen
y se estabilicen a la temperatura de operación indicada. No calibre la unidad y no la ponga en
cero hasta que finalice el procedimiento de calentamiento.
16
Chapter One: General Information
Introduction
Chapter One: General Information
Introduction
The MKS Baratron® Type a-Baratron Heated Absolute Pressure Transducer is part of a new
family of MKS pressure transducers designed to provide accurate, reliable, and repeatable
pressure measurements in the range from 1000 Torr to as low as 0.1 Torr full scale (FS). The
instrument operates with ±15 VDC (±5%) input at ≤ 600 mA (depending on its operating
temperature), provides 0 to 10 VDC output linear with pressure, and complies with current RoHS
(Restriction of Hazardous Substances) directives. The a-Baratron heated transducer exposes only
Inconel® and Incoloy® nickel alloys to the process, permitting use with corrosive or dirty gases
and eliminating contamination of the process with transducer materials. Measurements are
independent of gas composition and the unit has a minimum measuring range of four decades.
Using the latest single-sided, dual-electrode Inconel sensor design coupled with a precision
Capacitance to Digital Converter IC, these instruments are capable of withstanding high
overpressure conditions (45 psia) with minimal or no shifts in output over their range. The
advanced bridge signal conditioning technology provides high accuracy and operation which is
extremely temperature-stable at operating pressure.
Protection from RF interference and noisy electrical environments is increased by the use of a
internal design elements, surge and ESD suppression networks and RFI filtering on all inputs and
outputs. The a-Baratron unit meets the testing standards required for the European CE Mark
when used with an overall metal braided shielded cable, properly grounded at both ends.
The a-Baratron transducer is designed specifically to meet the needs of vacuum process systems
where environmental and process conditions are particularly demanding. The a-Baratron heated
unit controls its temperature at optional elevated temperatures as given in
Table 6: Ambient Operating Temperature Range and Power Requirements, thereby
minimizing the effects of ambient or process temperature variations typically encountered in
process line environments, and reducing or eliminating condensation and deposition of process
by-products on the sensor surfaces.
The a-Baratron heated transducer is available with two interface connector lock options, and a
variety of fittings.
17
How This Manual is Organized
Chapter One: General Information
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate a Type aBaratron capacitance manometer.
Before installing your Type a-Baratron unit in a system and/or operating it, carefully read
and familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three, Overview, gives a brief description of the instrument and its functionality.
Chapter Four, Operation, describes how to use the instrument and explains all the functions and
features.
Chapter Five, Maintenance and Troubleshooting, lists any maintenance required to keep the
instrument in good working condition, and provides a checklist for reference should the
instrument malfunction.
Appendix A, Product Specifications, lists the specifications of the instrument.
Appendix B, Model Code Explanation, describes the model code used to order the instrument.
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration and
Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
a-Baratron instrument, or to obtain information about companion products MKS offers, contact
any authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an RMA (Return Material Authorization) Number from the MKS Calibration
and Service Center before shipping. The RMA Number expedites handling and ensures proper
servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
18
Chapter Two: Installation
How To Unpack the Type a-Baratron Unit
Chapter Two: Installation
How To Unpack the Type a-Baratron Unit
MKS has carefully packed the Type a-Baratron unit so that it will reach you in perfect operating
order. Upon receiving the unit, however, you should check for defects, cracks, broken
connectors, etc., to be certain that damage has not occurred during shipment.
Note
Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an RMA (Return Material Authorization) Number from the MKS Service
Center before shipping. Please refer to the inside of the back cover of this manual for a list of
MKS Calibration and Service Centers.
Unpacking Checklist
Standard Equipment:
•
Type a-Baratron Unit
•
Type a-BaratronInstruction Manual (this book)
Optional Equipment:
•
Electrical Connector Accessories Kit: 627B-K1 (includes a mate for the I/O connector)
•
Most MKS Power Supply/Readouts
•
Most MKS Pressure, Flow, Flow Ratio, and Throttling Valve Controllers
•
RM-6 Rack Mount Kit, 19” rack accommodates 1 or 2 readouts and/or controllers
•
Interface Cables (refer to Table 5, page 20)
19
Interface Cables
Chapter Two: Installation
Interface Cables
As of July 20, 2009, most products shipped to the European Community must comply with the
EMC Directive 2004/108/EC, which covers radio frequency emissions and immunity tests. In
addition, as of January 1, 1997, some products shipped to the European Community must also
comply with the Product Safety Directive 92/59/EC and Low Voltage Directive 73/23/EC, which
cover general safety practices for design and workmanship. MKS products that meet these
requirements are identified by application of the CE Mark.
To ensure compliance with EMC Directive 2004/108/EC, an overall metal braided shielded cable,
properly grounded at both ends, is required during use. No additional installation requirements
are necessary to ensure compliance with Directives 92/59/EC and 73/23/EC.
Note
1. An overall metal braided, shielded cable, properly grounded at both
ends, is required during use to meet CE specifications.
2. To order an overall metal braided shielded cable, add an “S” after the
cable type designation. For example, to order a cable to connect a aBaratron unit to a Type 651 controller, use part number CB259S-5-10.
You can purchase interface cables to all MKS companion products from MKS (refer to Table 5),
or optionally you can make cables that meet the appropriate specifications. For cables connecting
to non-MKS products, MKS can provide normal shielding or braided shielded cable assemblies in
a nominal 10’ (3 m) length, terminating in flying leads (pigtail) fashion at both ends.
Overall metal braided shielded cable assemblies, properly grounded at both ends, are
recommended if the environment contains high EMI/RFI noise.
Interface Cables
To Connect the a-Baratron Unit To...
Use the MKS Cable...
PDR2000 Power Supply/Display
651, 652, 660, PR4000B Controllers
Standard
Shielded
N/A
CB2000S-1-M1
CB259-5-10
CB259S-5-10
Table 5: MKS Interface Cables
20
Chapter Two: Installation
Interface Cables
Generic Shielded Cable Guidelines
Should you choose to manufacture your own cables, follow the guidelines listed below:
1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum
foil nor spiral shielding will be as effective; using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cable’s shield on the
whole circumference of the cable. The inductance of a flying lead or wire from the shield to
the connector will seriously degrade the shield’s effectiveness. The shield should be grounded
to the connector before its internal wires exit.
3. With very few exceptions, the connector(s) must make good contact to the device’s case
(ground). “Good contact” is about 0.01 ohms; and the ground should surround all wires.
Contact to ground at just one point may not suffice.
4. For shielded cables with flying leads at one or both ends; it is important at each such end, to
ground the shield before the wires exit. Make this ground with absolute minimum length. (A
¼ inch piece of #22 wire may be undesirably long since it has approximately 5 nH of
inductance, equivalent to 31 ohms at 1000 MHz). After picking up the braid’s ground, keep
wires and braid flat against the case. With very few exceptions, grounded metal covers are
not required over terminal strips. If one is required, it will be stated in the Declaration of
Conformity or in the instruction manual.
5. In selecting the appropriate type and wire size for cables, consider:
A. The voltage ratings.
B. The cumulative I2R heating of all the conductors (keep them safely cool).
C. The IR drop of the conductors, so that adequate power or signal voltage gets to the
device.
D. The capacitance and inductance of cables which are handling fast signals, (such as data
lines or stepper motor drive cables).
E. That some cables may need internal shielding from specific wires to others; please see the
instruction manual for details regarding this matter.
21
Product Location and Requirements
Chapter Two: Installation
Product Location and Requirements
Ambient Operating Temperature
The acceptable ambient operating temperature range for the a-Baratron transducer based on the
sensor temperature is shown in Table 6 below. Refer to Appendix B: Model Code Explanation
for the device sensor temperature.
Power Requirements
The a-Baratron transducer power requirements are given below in Table 6. Noise and ripple
should be less than 20 mV peak-to-peak. You may use any readout device which has input
capabilities of less than 0 to greater than 10 VDC, and impedance greater than 10K ohms. The
power is introduced to the unit through the Interface connector on the top panel of the transducer
(refer to Figure 4, page 30).
Device Sensor Temperature
Ambient Operating
Temperature Range
Power Requirements
°C
°F
°C
°F
45
113
15 to 40
59 to 104
±15 VDC (±5%)
at < 300 mA.
80
176
15 to 50
59 to 122
±15 VDC (±5%)
at < 600 mA.
100
212
15 to 50
59 to 122
±15 VDC (±5%)
at < 600 mA.
Table 6: Ambient Operating Temperature Range and Power Requirements
22
Chapter Two: Installation
Setup
Setup
Dimensions
Note
All dimensions are listed in inches with millimeters referenced in
parentheses. The tolerances for the dimensions are ±0.1 inches (X.X) and
±0.01 inches (X.XX).
Figure 1: Top View Dimensions
Figure 2: Side View Dimensions
23
Setup
Chapter Two: Installation
Fittings
The a-Baratron heated transducer is available with the following fittings:
•
½” diameter (12.7 mm) tubulation (standard)
•
Swagelok® 8-VCR® (female)
•
Swagelok 4-VCR (female)
•
Mini-CF (rotatable)
•
NW16-KF
•
NW25-KF
•
Swagelok 8-VCO® (female)
•
2¾” CF (rotatable)
Mounting Instructions
Mount the transducer with the inlet port pointing (vertically) downward. The transducer port will
easily carry the weight of the transducer.
Although the unit can be mounted in any orientation, mounting it as suggested allows any foreign
matter entering the pressure port to fall away from the diaphragm.
Isolate the unit from vibration as much as possible. When not subject to gas damping at low
pressure, the diaphragm may become susceptible to resonance. The low range transducers
(≤ 1 Torr) are very sensitive and you should isolate them from any vibration that exists.
Remember to isolate the vibration through the cable as well as through the port.
24
Chapter Two: Installation
Electrical Information
Electrical Information
Grounding
The ground of any external power supply and readout should be the same
as the transducer ground (chassis ground) to minimize any possible
ground loops which can affect the performance and stability of the
system.
Note
Multiple Ground
Tie-Point
0 - 10 V Pressure Output
Signal Common
+
-
Readout
+ 15 V
- 15 V
+ 15V
10K
1 F
Power
Supply
Power Common
NOTE: For best results, use a readout with fully
differential inputs.
Chassis
Ground
Sensor
Port
The absolute value of the potential difference between
the chassis ground and signal common/power ground
should not exceed 14 Volts.
Figure 3: Example Power, Signal, and Chassis Grounding Scheme
25
Electrical Information
Chapter Two: Installation
Interface Connector
The 15-pin male D-subminiature interface connector on the top of the unit (refer to Figure 4, page
30) provides access to the power input and heater status pins. The pin assignments of this
connector are listed in Table 7, page 27. The connector is available with either thread locks or
slide locks.
Thread Locks
The 9 and 15-pin connectors with thread locks utilize threaded posts onto which the mating
connector is mechanically fastened using screws. This is the standard MKS type of Dsubminiature connector.
Slide Locks
The 9 and 15-pin connectors with slide locks utilize slotted posts onto which the mating
connector is mechanically fastened using a slide mechanism which engages the slots in the posts.
Note
Standard MKS interface cables are not available for use with units
configured with a slide lock connector.
26
Chapter Two: Installation
Electrical Information
Interface Connector Pin Assignments
Pin Number
15-pin D-Subminiature Connectors
9-pin D-Subminiature Connectors
1
Reserved
Pressure Signal Output
2
Pressure Signal Output
Reserved
3
Reserved
Reserved
4
Reserved
+15 VDC
5
Power Return (Power Common)
-15 VDC
6
-15 VDC
Reserved
7
+15 VDC
Reserved
8
Reserved
Pressure Signal Output Return
(Signal Common)
9
Reserved
Power Return (Power Common)
10
Reserved
Not Used
11
Reserved
Not Used
12
Pressure Signal Output Return
(Signal Common)
Not Used
13
Reserved
Not Used
14
Reserved
Not Used
15
Chassis Ground
Not Used
Table 7: Interface Connector Pin Assignments
Note
The “Reserved” pin assignment refers to a pin with an internal connection
that may be assigned a function in the future.
27
Start Up
Chapter Two: Installation
Start Up
After installation, allow your transducer to warm up until it is stabilized, then check the
transducer zero to verify the proper output. Refer to How To Adjust the Zero , page 33, for
complete instructions on adjusting the zero controls on the a-Baratron unit.
Warm Up Time
Allow sufficient time for your transducer to warm up. The warm up times for 23° C ambient
temperature conditions are:
•
2 hours for ≥ 1 Torr units
•
3 hours for < 1 Torr units
If the ambient temperature is lower than 23°C, the warm up time may be longer than that shown
above.
Note
The transducer must be fully stabilized before you make any zero
adjustments.
28
Chapter Three: Overview
General Information
Chapter Three: Overview
General Information
A complete pressure transducer system requires three components to convert pressure to a linear
DC voltage output: a sensor, signal conditioner, and power supply. The a-Baratron transducer
contains two of the required components: the sensor and signal conditioner.
An MKS or MKS-compatible power supply is required to complete the pressure to DC voltage
conversion. For a direct readout of the pressure measurement, a meter (analog or digital) is
required.
Sensor
The a-Baratron transducer uses a variable capacitance sensor consisting of a pressure inlet tube
(port) connected to a small chamber in the transducer body. One wall of this chamber is an
elastic metal diaphragm. The front side of the diaphragm is exposed to the gas whose pressure is
to be measured. The back, or reference, side of the diaphragm faces a rigidly mounted ceramic
disc containing two electrodes. The reference side is permanently evacuated (10-7 Torr or lower),
and its vacuum is maintained with a chemical getter system.
The diaphragm deflects with changing absolute pressure (force per unit area) independently of the
gas type or composition of the measured gas. This deflection causes an imbalance of the sensor
electrode capacitances since the distance to the diaphragm is now different for each electrode.
The imbalance of capacitances is converted to a DC signal using a capacitance-to-digital
converter that is a contained inside a microprocessor. The resultant digital signal is then
linearized, zeroed, and temperature-compensated in the processor. This digital signal is then
converted to a 0 to 10V analog output signal.
In the a-Baratron transducer, zero and span stability is further increased because the sensor and
the electronics are temperature controlled. This thermal enclosure reduces the effects of ambient
temperature changes typically encountered in process line environments, and reduces or
eliminates condensation and deposition of process by-products on the sensor surfaces.
Signal Conditioner/Electronics
The signal conditioner contains state-of-the-art, capacitance to digital converter integrated circuit.
The output is a DC voltage which is linear with pressure. The transducer is then calibrated
against a reference pressure standard to provide a 0 to 10 Volt DC output over the range of the
transducer.
29
Instrument Components
Chapter Three: Overview
Instrument Components
Figure 4: Top View of the a-Baratron Heated Transducer
Push Button Zero Switch
This push-button zero switch adjusts the transducer zero. Refer to How To Adjust the Zero for
more details.
Interface Connector
The 9-pin or 15-pin male D-subminiature interface connector provides access to the power input
and other pins. Refer to Table 7, page 27, for the connector pinout.
30
Chapter Three: Overview
Labels
Labels
Note
The figures showing the instrument labels (Figures 5 and Figure 6, page
31) are not drawn to scale.
Top Panel Labels
The label on the top panel of the a-Baratron unit identifies the ZERO PUSH BUTTON.
Figure 5: Top Panel Label
Serial Number Label
Each a-Baratron unit has one serial number label mounted on the back surface. The label shows
the range, serial number, and the part number. The label also displays the CE mark signifying
compliance with current CE Directives.
Figure 6: Serial Number Label
The options for your transducer are identified in the model code when you order the unit. Refer
to Appendix B: Model Code Explanation, page 41, for more information.
31
Chapter Four: Operation
How To Adjust the Zero
Chapter Four: Operation
How To Adjust the Zero
All pressure transducers require initial and periodic zero adjustments. Prior to initial operation
and during periodic maintenance you must check the transducer zero to verify the proper output.
The output can be zeroed by pressing the Push Button Zero Switch.
To achieve the full dynamic range specified for the transducer, the zero adjustment must be made
at a pressure less than the transducer’s resolution (0.001% of FS). Low range transducers should
be pumped for at least one hour after exposure to air to remove any moisture and to allow the
pressure to stabilize. Zeroing a transducer above its stated minimum resolution creates a zero
offset relative to true absolute pressure. All subsequent readings are then linear and accurate
relative to the offset value.
Note
If available pressures are not sufficiently low to set the transducer zero,
you may use a vacuum leak detector with sufficient vacuum pumping (to
achieve proper zeroing pressures). In this case, mount the transducer on
the leak detector in the same plane of orientation as it will be during
actual use.
33
How To Adjust the Zero
Chapter Four: Operation
How To Adjust Using the Push-button Zero Switch
To use the push-button zero switch:
1. Install the transducer in a system and connect a power supply/readout.
2. Power the transducer and allow it to warm up and stabilize.
Note
Allow one (1) hours for ≥ 1 Torr units, and two (2) hours for < 1 Torr
units to warm up. Ensure that the transducer is fully stabilized before you
adjust the zero.
3. Pump the unit down to a pressure below its resolution (0.001% of FS).
For best results, pump the transducer while it is warming up. Refer to Table 8 for the
highest recommended pressure levels for proper zero adjustment.
Highest Pressures Suggested for Proper Zero Adjustment
Full Scale Range
(Torr)
Highest Pressure for Proper Zero
Adjustment (Torr)
0.1
1 x 10-6
0.25
2.5 x 10-6
0.5
5 x 10-6
1.0
1 x 10-5
2.0
2 x 10-5
10
1 x 10-4
20
2 x 10-4
100
1 x 10-3
200
2 x 10-3
500
5 x 10-3
1000
1 x 10-2
Table 8: Highest Pressures Suggested for Proper Zero Adjustment
4. Push the push-button zero switch.
Typically, the push-button zero switch provides a maximum adjustment capability of +/20% full-scale from the factory zero position.
34
Chapter Four: Operation
How To Adjust the Zero
Suggested Pressures for Reading and Control
The lowest suggested pressures for reading and control with the a-Baratron heated transducer are
listed in Table 9.
Lowest Suggested Pressures for Reading and Control
Full Scale Range
(Torr)
Lowest Suggested Pressure
for Reading (Torr)
Lowest Suggested Pressure
for Control (Torr)
0.1
5 x 10-5
5 x 10-4
0.25
1.25 x 10-4
1.25 x 10-3
0.5
2.5 x 10-4
2.5 x 10-3
1.0
5 x 10-4
5 x 10-3
2.0
1 x 10-3
1 x 10-2
10
5 x 10-3
5 x 10-2
20
1 x 10-2
1 x 10-1
100
5 x 10-2
5 x 10-1
200
0.1
1.0
500
0.25
2.5
1000
0.5
5.0
Table 9: Lowest Suggested Pressures for Reading and Control
Lowest Suggested Pressure Available for Reading
The pressures listed in the middle column of Table 9 reflect reliable and practical pressures for
different range transducers. Lower readings may be obtained in environments which have stable
temperature and air flow.
Lowest Suggested Pressure to Use for Control
The pressures listed in the last column of Table 9 are for reference, and represent the pressure
reading of the transducer at 50 mV signal output. A DC signal of at least 50 mV is the
recommended minimum signal level to use when integrating any transducer into complex
processing systems.
35
Chapter Five: Maintenance and Troubleshooting
General Information
Chapter Five: Maintenance and Troubleshooting
General Information
If the a-Baratron transducer fails to operate properly upon receipt, check for shipping damage,
and check the cables for correct continuity. Any damage should be reported to the carrier and
MKS Instruments immediately.
If there is no obvious damage and the continuity is correct, check your instrument using the
troubleshooting chart (refer to Table 10, page 38). If the transducer performance does not
improve and it is necessary to return the unit to MKS for service, obtain an RMA (Return
Material Authorization) Number from any MKS Calibration and Service center before shipping.
Please refer to the inside back cover of this manual for a list of MKS Calibration and Service
Centers.
Maintenance
In general, the a-Baratron heated transducer requires no maintenance other than proper
installation and operation, and an occasional zero adjustment. Periodically, check for wear on the
cables and inspect the enclosure for visible signs of damage.
Zero Adjustment
The transducer zero can be set (or reset) by pushing the push-button zero switch on the top panel
of the unit (refer to Figure 4, page 30), or at the front panel of any MKS or MKS-compatible
power supply being used. Refer to How To Adjust the Zero, page 33, for complete instructions on
how to adjust the transducer’s zero controls.
Note
1. In production operations such as semiconductor manufacturing, verify
the transducer zero (and adjust if necessary) each time the equipment
is shut down for routine maintenance.
2. The zero adjustments are the only adjustments that can be made in the
field. Return the transducer to MKS Instruments for other
adjustments, calibration, or servicing.
37
Troubleshooting
Chapter Five: Maintenance and Troubleshooting
Troubleshooting
Troubleshooting Chart
Symptom
Possible Cause
Solution
Overrange positive or
negative signal
A shorted transducer or a
damaged interconnect cable
(transducer to electronics
module).
Measure supply voltages at
the connector.
Inspect cable and transducer.
Replace if necessary.
Measurement slowly goes
positive over time
Overpressure and/or a buildup of contamination in the
measurement cavity.
Return to MKS for servicing
or transducer replacement.
Unstable zero output
The ambient temperature may
be too high.
or
The ambient temperature is
varying over a wide range.
Ensure the ambient
temperature is within product
requirements; refer to
Appendix A: Product
Specifications, page 39.
Table 10: Troubleshooting Chart
38
Appendix A: Product Specifications
Electrical Specifications
Appendix A: Product Specifications
Electrical Specifications
CE Compliance
Electromagnetic Compatibility 1
Product Safety Requirements
RoHS (Restriction of Hazardous
Substances) Compliance
Input Power Requirement
Voltage
Current
Signal Output
EMC Directive 2004/108/EC
Product Safety Directive 92/59/EC
Fully compliant with Directive 2002/95/EC
±15 VDC ±5%
250 mA for 45°C models, 550 mA for 80° and
100°C models
0 to 10 VDC, 110% overrange, active zero
Environmental Specifications
Ambient Operating Temperature Range
15° to 40°C (59° to 104°F) for 45°C models, 15° to
50°C (59° to 122°F) for 80° and 100°C models
Maximum External Case Temperature
65° C (149° F)
Storage Humidity Range
25 to 95% Relative Humidity, non-condensing
Storage Temperature Range
-20° to 80° C (-4° to 176° F)
Performance Specifications
Accuracy (non-linearity, hysteresis, and
non-repeatability)
≥ 1 Torr units
< 1 Torr units
45°C models: 0.10% of Reading. 80°C and 100°C
models: ±0.20% of Reading
45°C models: 0.12% of Reading. 80°C and 100°C
models: ±0.5% of Reading
Internal Volume
6.3 cc
Leak Integrity
Internal to external < 10-9 scc/sec He
Overpressure Limit Without Damage
45 psia (310 kPa)
Pressure Ranges (Torr FS)
0.1, 0.25, 0.5, 1.0, 2.0, 10, 20, 100, 200, 500, 1000
1An
overall metal braided shielded cable, properly grounded at both ends, is required during use.
39
Physical Specifications
Resolution
0.1 to 1000 Torr units
Appendix A: Product Specifications
0.001% (1 x 10-5) of FS
Performance Specifications (Continued)
Temperature Coefficients
Zero
≥ 1 Torr units
0.25 and 0.1 Torr units
Span (all ranges)
45°C models: 0.002% FS/°C. 80° and 100°C
models: 0.005% FS/°C
45°C models: 0.005% FS/°C. 80° and 100°C
models: 0.010% FS/°C
0.02% Reading/ ° C
Warm Up Time
(for 23° C ambient temperature conditions)
2 hours
≥ 1 Torr units
3 hours
< 1 Torr units
Zero Adjustment Range
Zero Push Button
±20%
Physical Specifications
Fittings
½” Diameter (12.7 mm) tubulation,
Swagelok® 8-VCR® (female), Mini-CF (rotatable),
Swagelok 8-VCO® (female), NW16-KF,
NW25-KF, 2¾” CF rotatable
Interface Connector
9-pin or 15-pin male D-subminiature
Weight
2.5 lbs (1.13 Kg)
Wetted Materials
Inconel® and Incoloy® nickel alloys. Some optional
fittings may be built from 300-series stainless steel.
Due to continuing research and development activities, these product specifications are subject to change without notice.
40
Appendix B: Model Code Explanation
Model Code
Appendix B: Model Code Explanation
Model Code
The options of your a-Baratron transducer are identified in the model code when you order the
unit. The model code is identified as follows:
AA02A RR U FF
MODEL TYPE
FULL SCALE RANGE
ENGINEERING UNITS
FITTING
SENSOR TYPE
INPUT VOLTAGE
SENSOR TEMPERATURE
ELECTRICAL CONNECTOR
RESERVED
CALIBRATION ORIENTATION
ACCURACY
RESERVED
41
S
V T
E 000 C
A
0
Model Code
Appendix B: Model Code Explanation
Model Type
This designates the model type of the instrument. All products in this family use AA02A in the
part number.
Full Scale Range (RR)
The full scale measurement range in Torr is indicated by a two-character alphanumeric code.
Full Scale Range
Ordering Code
0.1
.1
0.25
RE
0.50
.5
1.0
01
2.0
02
10
11
20
21
100
12
200
22
500
52
1000
13
Measurement Units (U)
The a-Baratron can be calibrated using any of three measurement units.
Measurement Units
Order Code
Torr
T
mbar
M
kPa
K
42
Appendix B: Model Code Explanation
Model Code
Fittings (FF)
Eleven (11) different connection fittings are available, designated by a two-letter code.
Fittings
Ordering
Code
0.50-inch OD tube
BA
4 VCR® female
CD
8 VCR female
CE
8 VCR male
CF
8 VCR female, short tube length
CR
NW16-KF, standard tube length
GA
NW25-KF
GC
NW16-KF, short tube length
GD
8 VCO® female
DA
Mini-CF (1.33” OD)
HA
2.75-inch OD CF
HC
Sensor Type (S)
Three (3) different types of sensors are available.
Sensor Type
Ordering Code
Standard
S
Etch
E (Range ≤ 100 Torr)
Fluorine-Resistant Etch
L (Range ≤ 100 Torr)
Input Voltage
Ordering Code
±15V (±5%)
2
Input Voltage (V)
43
Model Code
Appendix B: Model Code Explanation
Sensor Temperature (T)
Three (3) different sensor temperatures are available via the codes shown below.
Sensor Temperature
Ordering Code
100°C
1
80°C
8
45°C
4
Electrical Connector (E)
Four (4) different electrical connectors are available on the a-Baratron.
identified in the part number by one (1) character.
Electrical Connector
Ordering Code
15-pin male D-subminiature, thread locks
B
15-pin male D-subminiature, slide locks
P
9-pin male D-subminiature, thread locks
A
9-pin D-subminiature, slide locks
Z
They are
Reserved (000)
Reserved for future options.
Ordering Code
Reserved
000
Calibration Orientation (X)
All a-Baratrons with full-scale measurement ranges of 1 Torr and higher should use the “0”
code noted below. Models with measurement ranges below 1 Torr should use either the
“V” or “H” code for their desired calibration orientation.
Calibration Orientation
Ordering Code
Ranges ≥ 1 Torr
0
Ranges < 1 Torr only - Vertical
V
Ranges < 1 Torr only - Horizontal
H
44
Appendix B: Model Code Explanation
Model Code
Accuracy (X)
See Appendix A for accuracy specifications of the different a-Baratron configurations.
Accuracy
Ordering Code
Standard
0
Reserved (0)
Reserved for future options.
Reserved
0
45
Index
Index
Manual organization, 18
A
Model code, 43
Accuracy, 39, 45
Mounting instructions, 24
B
O
Band label, 31
Optional equipment, 19
Options
C
heater status LEDs, 30, 45
Cables, 20–21
Interface connector, 26, 45
CE mark, 17, 20, 32
Coarse zero switch, description of, 30
P
Customer support, 18
Power requirements, 22
Pressure
F
highest for zero adjustment, 34
Fittings, 24, 41, 45
lowest for control, 36
Full scale ranges, 39, 43
lowest for reading, 36
G
Grounding, 25
R
H
Heater status option, 30, 45
RoHS (Restriction of Hazardous
Substances), 17, 39
I
S
Interface connector, 26, 30
Safety information, 1–16
Returning the product, 18, 19, 37
Sensor, description of, 29
options, 45
Serial number label, 32
Setup
L
Labels
grounding, 25
band label, 31
mounting instructions, 24
serial number, 32
power requirements, 22
top panel, 31
Signal Conditioner/Electronics, 29
Specifications, 39–41
M
Standard equipment, 19
Maintenance, 37
Start up, 28
47
Index
T
Temperature
operating, 22, 39
storage, 39
Thread locks, 26
Top panel labels, 31
Troubleshooting, 38
W
Warm up time, 28, 41
Z
Zero adjustment, 37
coarse zero switch, 35
zero pot, 34
Zero pot, description of, 30
48
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