Confocal Fiber Displacement Sensor

Confocal Fiber Displacement Sensor
Confocal Fiber Displacement Sensor
ZW-7000/5000 Series
For minute measurement and positioning
Small laser spot model
Minimum spot
diameter 10 μm or less
Reliable measurements for
any material and surface types
· Measuring shiny objects with an
inclination of ±25°
· ±0.5 μm or less linearity for
various materials
· Sampling rate as fast as 20 μs
· Small spot diameter of 10 μm or less
2 | Confocal Fiber Displacement Sensor
Beyond laser displacement sensors
Just like a non-contact optical probe
New
White light
confocal principle
Measures while moving
Measures using white LED
wavelengths (colors)
* Conceptual illustration
White light
confocal
displacement
sensor
Traditional
laser
displacement
sensor
Errors when measuring between different materials
Error when measuring a slope
Impossible to measure
narrow areas
Error when measuring
Error when measuring
a coarse surface
a coarse surface
Impossible to measure
a curved surface
Profile obtained by moving measurement of various materials and shapes
* This graph
represents a result of
measurement under
specific conditions.
Before final
installation, test the
sensor required for
the application to
validate the desired
measurements are
obtained.
| 3
Measures from any mounting position
(vertical or horizontal, facing up/down or side ways)
Three new advantages meet the
needs of manufacturing innovation
Measure accurately
P. 4
· Stable measurements of inclined or curved surfaces
· Stable measurements of different materials types
· Stable measurements of smooth or coarse surfaces
Measure more objects quickly
P. 6
· Small size allows for multiple sensors to be mounted side by side
· Sensor light weight greatly reduces settling time when in motion
· No need to change the sensor head direction even if
the part being tested changes direction
Set up quickly
· No need to change the sensor when different material type is run
· No laser safety measures required
· No need to work on EMC or Thermal countermeasures,
there are no electronic components in sensor head
· DLL files provide quick integration into machine HMI
Expansion of lineup
ZW-5000
Satisfying the demand of the SEMI/FPD industry
Small laser spot model
minimum spot diameter of 10 μm or less
ess
This model fulfills the demand of the SEMI/FPD
industry increasing year by year for more precise
profile reproduction in detecting the position of
minute wafer street width, the alignment of
laminating thin liquid crystal films etc.
ZW-7000 ZW-5000
Satisfying the demand for installation into a large machine
Extension fiber cable
10 m/20 m/30 m
10 m, 20 m and 30 m cables join the lineup besides
2 m and 5 m.
A long distance wiring from sensor to controller
can be flexibly done and supports installation into a
large machine.
Up to
30 m
P. 8
4 | Confocal Fiber Displacement Sensor
Measure accurately
For all quality inspections,
from parts to finished products
Strict quality control, demands for appearance inspection and
production speed are constantly increasing. To meet these demands,
stable measurements during movement for quality inspection without
compromising manufacturing speed is required. Harnessing the benefits
of the white light confocal principle, the ZW-7000/5000 Series can
provide stable measurements for different material types (glass, metal,
plastic, etc.) and shapes (round, flat, uneven, etc).
Profile measurement
Small laser spot for faithful measurement
When measuring a level difference or opening with a traditional laser displacement sensor, reflection from multiple surfaces could blunt a profile and then
the edge detection position could be shifted, thus resulting in a drop in precision of position detection, whereas the ZW-5000 with minimal spot diameter
of 10 μm can avoid the reflection from multiple surfaces and thus acquire a sharp profile, which leads to improved precision of position detection.
Traditional laser displacement sensor
White light confocal displacement sensor
Laser beam Large spot diameter
ZW-5000
ZW-5000
Small spot diameter
Measurement
value
Measurement
value
Minimum
spot diameter
10 μm or less
| 5
Actual value
Measurement value
-15
-5
5
Angle (°)
15
25
100
80
60
40
20
0
-20
-40
-60
-80
-100
-25
Angle characteristic
Traditional laser displacement sensor
Angle
characteristic
±25°
-15
-5
5
15
Angle (°)
for shiny surfaces
*1
25
White light confocal displacement sensor
Error (μm)
5
4
3
2
1
0
-1
-2
-3
-4
-5
-0.5
-0.3
-0.1
0.1
Height (mm)
0.3
ZW-7000 ZW-5000
Mirror
SUS
White ceramic
0.5
5
4
3
2
1
0
-1
-2
-3
-4
-5
-0.5
μm or less
±0.5
linearity for
different materials
*1
-0.3
-0.1
0.1
Height (mm)
0.3
0.5
(ZW-S7010)
Traditional laser displacement sensor
Our white light confocal displacement sensors
can provide accurate flatness measurement by tracing
an object without being affected by its excessive
reflection, the sensor head direction, nor the material
hairline direction, which are difficult to track with a
traditional laser displacement sensor.
90°
0°
Mechanism
Displacement (μm)
Error (μm)
Mirror, installation for regular reflection
SUS, installation for regular reflection
White ceramic, installation for diffuse reflection
Flatness of coarse surfaces *2
P.12
Actual value
Measurement value
(ZW-S7010)
Different materials
With a traditional laser displacement
sensor, it is required to re-tune after the sensor
head direction is changed for a different material
type.
Our white light confocal displacement sensor can
measure different material types while moving,
without needing to re-tune the sensor nor
changing the sensor head or installation direction.
ZW-7000 ZW-5000
White light confocal displacement sensor
Installation direction 90°
Installation direction 0°
Actual value
30
20
10
0
ZW-7000
-10
-20
-30
0
1000
2000
3000
Travel distance (μm)
Deviation from
actual value
4000
Micron
accuracy
White light confocal displacement sensor
Stable measurements of
coarse surfaces
0°
90°
Displacement (μm)
P.13
Mechanism
100
80
60
40
20
0
-20
-40
-60
-80
-100
-25
Displacement (μm)
Omron's, unique, white light confocal
displacement sensor provides higher resolution
measurements of angled or curved and shiny
surfaces than traditional laser displacement
sensors.
Displacement (μm)
Traditional laser displacement sensor
Inclined or curved surfaces
30
Installation direction 90°
Installation direction 0°
Actual value
20
10
0
-10
-20
-30
0
1000
2000
3000
Travel distance (μm)
4000
(ZW-S7020)*Please ask Omron sales representative for product data except ZW-S7020.
High-speed sampling for faithful measurement
Using traditional laser sensors, the measurement accuracy for a moving target can be achieved by increasing the averaging times, but downside is that this
lowers the profile reproduction accuracy.The ZW-7000 acquires a sharp profile by a single sampling as fast as 20 μs without averaging, solving this issue.
White light confocal displacement sensor
(Not averaged)
Traditional laser displacement sensor
(Averaged)
Minimum
sampling period
Height
Height
Object profile (Black line)
ZW-7000
20 μs
Measurement value (Red line)
Travel distance
Travel distance
*1. Typical value of the ZW-S7010/ZW-S5010 Sensor Heads.
*2. Objects with machining marks or hairline pattern
Note. All measurement graphs represent typical examples. Measurement may be affected by the shape or material of an object to measure.
Before final installation, preliminary testing must be done to validate expected performance.
6 | Confocal Fiber Displacement Sensor
Measure more objects quickly
Efficient installation and motion solutions
increase manufacturing speed
Robots and stages are used for assembly and inspection to increase productivity.
Manufacturers require measuring devices that are easy to integrate into small-sized
machines and easy to move.
The compact and lightweight ZW-7000/5000 Series sensor head eliminates issues of installation
space and installation on moving parts.
Laser displacement
sensor
30
mm
square
76.25 mm
Approx.
180 g
30 mm 30 mm
Increase throughput: Simultaneous measurements
can be achieved using multiple sensor heads
Space restrictions prevent side-by-side installation of
many traditional laser displacement sensors. The
compact ZW-7000 sensor heads can be installed side by
side to obtain multiple measurements at once, instead
of measuring one at a time, thus reducing
measurement time.
Traditional laser displacement sensor
White light confocal displacement sensor
Restrictions on installation limit
improvement in cycle time
Side-by-side installation reduces
measurement time
Measurement
cycle time reduced
by
60 % or more*
* Performance comparison with
previous Omron products
Increase speed: Reduce settling time
White light confocal displacement sensor
Degree of oscillation
The light weight of the sensor head
greatly reduces the waiting time for the
oscillation to stop when power
cylinders are used to move the sensor
head('s) to the measurement position,
resulting in faster measurements.
Move
Stop
Traditional laser displacement sensor
Time
| 7
Save Time and Money:
No need to rotate the sensor
A traditional laser displacement sensor measures
the height of an object based on the position of the
spot on the receiver. The machine requires an extra
step to rotate the sensor according to the object
shape or moving direction. Our white light confocal
displacement sensor can measure from the same
installation position while moving in any direction,
with no restriction on installation direction.
Traditional laser displacement sensor
Flexible fiber cable for easy installation
The controller connects to the sensor head through
a 3 mm diameter flexible fiber cable. The cable has
cleared a bending test consisting of 3,000,000
repetitions* for reliable application on moving parts.
White light confocal displacement sensor
* Omron's bending test condition v3,000,000 bends to a 20 mm bending radius
Measurement
cycle time reduced
by up to
R
25 %*
* Calculated when an object with an irregular surface was measured in
both vertical and horizontal directions
P.13
Mechanism
Direction free
Expansion of extension fiber cable lineup
Up to 30 m long cable is available. An extension fiber cable can be used to extend
the distance to up to 32 m, supporting a flexible wiring in a large machine.
Standard fiber cable
0.3/2 m
Sensor head
P.19
Extension fiber cable lineup
"Type/standard price cable"
Extension fiber cable
Up to 30 m
Connecting adapter
Controller
8 | Confocal Fiber Displacement Sensor
Set up quickly
Easy to design and tune
Quick installation of sensors is required to set up manufacturing equipment in a short time to meet the market needs.
The ZW-7000/5000 Series, using the white light confocal principle, reduces significantly the time required to implement
measures that are necessary when using laser displacement sensors.
Easy device selection
There is no need to select different sensor heads for different objects, which saves the time required when
purchasing and designing. This leads to reductions in set-up work and inventory costs.
Traditional laser displacement sensor
White light confocal displacement sensor
te
Sensor head for
fine surfaces
Sensor head for
mirror surfaces
Same sensor head for
different objects
Sensor head for
coarse surfaces
tra
bs
Su
s
as
Gl
or
irr
ite
ce
ic
m
ra
M
h
W
* Common to NPN/PNP type controller
S
SU
Reduced work - EMC measures and thermal design are not required
The sensor head design maintains stable operation in installations with electronic or magnetic noise.
Devices in close proximity and measurement values will not be affected by noise or heat from the sensor head.
Traditional laser displacement sensor
White light confocal displacement sensor
Fiber
cable
Electronic
parts
No
electronic
parts
Measurement values are affected by
ambient noise
Measurement remains stable without
being affected by ambient noise
Time
Measures must be taken against
noise generated by electronic parts
White light confocal displacement sensor
Change in temperature
after 1.5 hours
of operation
Change in temperature
after 1.5 hours
of operation
+2℃
Ambient Measurement
noise
value
No noise is emitted
Ambient Measurement
noise
value
Electromagnetic noise is emitted from
the sensor and cable
Traditional laser displacement sensor
Time
No measures against noise are required
Reduced work for installation and tuning of sensor heads
The white light confocal principle allows stable measurements without fine tuning.
Traditional laser displacement sensor
Fine angle
adjustment
required
White light confocal displacement sensor
Easy
installation
without fine
tuning
+0℃
| 9
Efficient setting for multiple ZW-7000's
You can make settings for all of devices that are connected
via EtherCAT with the Automation Software Sysmac Studio.
Even when you combine many sensors, you can copy the
program data to effectively integrate several sensors or you
can easily program the processing between the sensors.
Sysmac Studio
Sensor 1
Increased efficiency in
copying settings
Sensor 2
Efficient setting of measurement
conditions for many sensors
DLL Quick integration into machine HMI
DLL files are provided to easily
display ZW-7000/5000 Series
setting screens and
measurement results on a
Windows/Mac OS PC used as a
machine HMI.
Provided
DLL
· Settings and measurement conditions reference
· Acquiring measurement values
· Acquiring light received waveforms
· Logging control
No laser safety measures required
A white LED*, used as the light source instead of a laser,
eliminates time to implement safety measures around the
machine and the need for safe use training for workers.
Previously safety measures
for laser were required
When a laser displacement
sensor was used, a shield
around the machine for safety
was required and workers had
to be trained for safe use.
The use of
eye protection
tectionn
is required
quired
* Do not look directly into the LED light.
* If you register as a member after purchasing the product, you can
download DLL for free. Refer to the member registration sheet that is
enclosed with the product for details.
Further Benefits of White light confocal
Traditional laser displacement sensor
White light confocal displacement sensor
Measurement position varies with the height
No discrepancy in the measurement position
Failure to measure due to
obstruction of the reflected light by the wall.
The reflected light is not obstructed by the wall.
No Discrepancy in the Measurement Point
With traditional laser displacement sensor, the measurement position and
spot size vary with the height. This means there are times when the position
cannot be measured with high resolution due to warping and inclination.
With the white light confocal displacement sensor used in the ZW-7000/5000
Series, the measurement point remains the same at any position in the
measuring range so that precise measurements can always be made.
Measurement in narrow area and by the wall
When the traditional laser displacement sensor measures the inside of a
narrow tube or the height of a small depression, the wall often obstructs the
reflected light, and the orientation of the sensor and workpiece must be
adjusted many times. The ZW-7000/5000 Series using the white light
confocal displacement sensor can measure the points in narrow spaces or
small objects, without changing its installation orientation, because the
emitted light and reflected light are positioned along the same axis.
10 | Confocal Fiber Displacement Sensor
Technical explanation
New technologies to achieve stable
measurements during movement
Key components for sensing are improved to achieve high speed, high precision
measurements and high compatibility with machines
High photoconductivity
Patent Pending
Precise Core Array Fiber
High speed
High precision
Compatibility
The fiber specially designed for the ZW-7000 Series transmits
LED light to the sensor head even more efficiently and enables
more precise measurement.
Note: Precise Core Array Fiber is incorporated into the ZW-7000 only.
Compact size
Compact Form Design
High speed
High precision
Compatibility
The compact sensor head was
designed to solve installation issues
caused by the large laser
displacement sensor head, fitting
into a limited footprint.
Low aberration
aberr
Advanced OCFL Module
Adva
High speed
High precision
Compatibility
The OCFL*1 module
m
that controls the
for each wavelength of
focal point fo
white
hi lilight
h was further developed. Its
multi-lens structure reduces
aberration to 1/4*2 to provide stable,
high-resolution measurements,
without compromising its compact
design.
*1. OCFL : Omron Chromatic Focus Lens
*2. Compared to the ZW-S07/-S20/-S30/-S40.
25 times faster data processing speed
High Speed Processor
High speed
High precision
Compatibility
The new processor was designed to
increase processing speed for high
precision measurements, from LED
emission through sensing and
processing to data logging.
Note: High Speed Processor is incorporated
into the ZW-7000 only.
* Conceptual illustration
| 11
High contrast display
White 11 Segment Display
High speed
High precision
The white 11 segment display was adopted. High contrast
white LED display greatly improves visibility and usability.
Compatibility
High brightness
Ultra High Power White LED
High speed
High precision
Compatibility
The new long-term stable, high power
LED was adopted to provide fast
responses and stable measurements
of low-reflective objects. There is no
laser hazard. A white LED light source
has a longer life than a lamp light
source, reducing downtime.
* Conceptual illustration
High resolution
Advanced Spectrograph
High speed
High precision
Compatibility
MEGA
LOG
High speed
High precision
Compatibility
The new spectroscope Advanced Spectrograph, which converts
the color wavelength into the distance, offers increased
waveform resolution, enabling high-precision measurements.
Large logging capacity
Mega Logging Memory
The memory capacity was greatly increased to log, process and
store up to 2,000,000 values* obtained by high-speed sampling.
* Measurement values, emitted light amounts,
or received light amounts can be logged.
High sensitivity
High speed
High precision
Compatibility
High Sensitivity
High Speed CMOS
The CMOS for the ZW-7000/5000
Series were optimized to measure
any object more precisely, sensitively,
and stably.
* Conceptual illustration
12 | Confocal Fiber Displacement Sensor
Technical explanation
White light confocal principle to achieve
stable measurements during movement
White light confocal principle is a breakthrough mechanism to enable a stable measurement even in high-speed
transfer process using robots and stages. This new principle allows a continuous measurement of object in any mixed
conditions such as coarse, curved, inclined or narrow areas while moving. Its characteristic mechanism is detailed below,
compared to the traditional triangulation principle.
New white light confocal principle
Pinhole
White LED
The emitted white light is focused at different
points for each color (wavelength). This principle
measures height based on the color of the
returned light that is focused on the object. As
the emitted light and received light are
positioned along the same axis, the measurement
point remains the same at any position in the
measuring range so that precise measurements
can always be achieved.
Received reflected light
Spectroscope
Receiver
Pinhole
Received light waveform
White
light
Stable measurements of coarse surfaces
Only the light reflected from the measurement point enters the
pinhole even if excessive light reflected from the object changes
during movement. This enables stable and precise measurements.
Received light waveform
Pinhole
White
light
Laser triangulation principle
The reflected light is received on a receiver and the height is
measured from the received light waveform. The waveform
is distorted due to the effect of excessive reflection, resulting
in a measurement error. In addition, movement generates
excessive reflection, which causes unstable measurements.
Laser diode
OCFL module
Multiple
reflections on
coarse surface
The waveform is not distorted,
which means that only
the color of the measurement
point is received.
P.5
Solutions
Flatness of coarse surfaces
Far
Receiver
Lens
Near
Lens
Excessively
reflected
light
Light received
from
measurement
point
Height detected by sensor
| 13
Angle characteristic
Because light is emitted directly from above, the reflected light is not widely diffused.
The wavelength (position) can be obtained by receiving part of the light even if the
reflected light amount is reduced. This enables stable height measurements.
Curved surface
ce
Laser triangulation principle
Curved surface
Measures by
receiving
part of the light
Received light waveform
No light received
Emitted light
ht
Reflected light
Stably receives light
P.5
Solutions
Inclined or curved surfaces
Inclined surface
cee
Measures by
receiving
part of the light
Emitted lig
light
ht
ht
A laser spot beam is emitted obliquely from above. When the position of a
glossy, regular-reflective object, where the beams are reflected in one direction,
is shifted, the light reflected from the curved surface cannot be received.
Inclined surface
Received light waveform
Reflected light
l
Unstable
Stably receives light
Even if the light can be received, the received light waveform is distorted
due to lens aberration as a result the measurement becomes unstable.
Direction free
Stable measurement is not affected by moving directions of objects nor the sensor.
This is achieved by emitting and receiving a cone-shaped beam of white light.
This slim beam is also suitable for measurements in narrow areas.
P.7
Solutions
No need to rotate the sensor
Laser triangulation principle
The reflected light is detected obliquely from above. Depending
asure the
on the installation direction, the sensor cannot measure
object because the reflected light is blocked.
14 | Confocal Fiber Displacement Sensor
Applications
High-precision measurements of
target positions during movement
To eliminate measurement errors due to a position offset during moving measurement, the ZW-7000/5000 Sereis
provides the functionality to link moving parts with measurement timing.
Timing chart
Moving measurement linked to a stage *
Linking encoder positions to measurement values of the
sensor allows accurate shape measurement without being
affected by acceleration/deceleration of the conveyor.
Previous EtherCAT communications
EtherCAT cycle
Differences between XY
coordinates (position) and Z
coordinate (height) occur due
to fluctuations of EtherCAT
cycles of 125 ns to several μs.
Acquires the immediately
preceding values
Encoder
input (XY)
Sensor
measurement (Z)
Different timing between XY and Z
Linking between
glass height and
XY coordinates
New EtherCAT communications
Refreshed every cycle
EtherCAT cycle
The XY coordinates (position)
and Z coordinate (height) can
be acquired at the same time
by refreshing every cycle.
Encoder
input (XY)
Sensor
measurement (Z)
Synchronous measurements with
many sensors *
For synchronous measurement of thickness or
flatness using multiple sensors, sensors precisely
measures heights at the same time.
Thickness
measurements of
sheets for lithium
batteries
Same timing
Previous synchronous measurements
Refreshed once
Sync signal via
EtherCAT
As the differences are
accumulated during
continuous measurements,
synchronization signals must
be input periodically.
Sensor 1
measurement
Sensor 2
measurement
Different timing
New synchronous measurements
Sensor 1
Refreshed every cycle
EtherCAT cycle
No differences occur because
timing is refreshed every
cycle.
Sensor 1
measurement
Sensor 2
Sensor 2
measurement
Previous trigger measurements
Precise trigger measurements
If the trigger input timing is
always the same, the
height can be measured
accurately at the same
position.
Trigger
Height
measurements of
small electronic parts
Same timing
ON
OFF
Sensor
measurement
Different
measurement
positions
As the immediately preceding values are
acquired, different positions are measured.
New trigger measurements
Trigger
ON
OFF
Always same
Sensor
measurement
The same position can always be measured
at regular intervals after trigger inputs.
| 15
System configurations
Synchronous measurements using EtherCAT
Function Blocks are packed with Omron’s rich
technical know-how on control programs
Encoder
Encoder
NJ/NX
Machine Automation Controller
Synchronous measurements using triggers instead of EtherCAT are possible.
Omron offers Function Blocks to make
programming for system link applications easier.
For details, please refer to the SYSMAC-XR014
Dimension Measurement Library on the
following URL.
http://www.ia.omron.com/sysmac_xr014
Encoder
Encoder
Counter
NJ/NX
Machine Automation Controller
Multipoint Measurement
2D Shape Measurement
Thickness
Surface Search/
Tracer Control
Level difference
Height
Maximum/
Minimum value
Edge position
Curve
Inflection point
Flatness
Angle
Mean value
Sectional area
Torsion
Shape comparison
The Sysmac Library is a collection of software
functional components that can be used in
programs for the NJ/NX Machine Automation
Controllers. The Sysmac Library is available to
download from Omron website. Install the
Sysmac Library to use it in the Sysmac Studio.
http://www.ia.omron.com/sysmac_library
Trigger input sensor
* This functionality is available on the firmware ver.2.10
or later.
If you register as a member after purchasing the
product, the latest firmware for the controller is
available for free. Refer to the member registration
sheet that is enclosed with the product for details.
16 | Confocal Fiber Displacement Sensor
Applications
High-speed measurements in
applications requiring high accuracy
SEMI/FPD
Smart phone
(component process)
Abrasion profile measurement of
target material
Curvature measurement of
rolled glass
height measurement of
wafer
Gap measurement of
electronic chips
Z axis adjustment of
chip mounter
Profile measurement of
solder on substrate
ZW-5000
Profile measurement of
silicon
ZW-5000
ZW-5000
ZW-5000
Position inspection of
film lamination
ZW-5000
Level measurement of
casing
Flatness measurement of
cases
Flatness measurement of
cover glass
Groove measurement of
camera modules
Thickness measurement of
battery sheets
Flatness measurement of
batteries
LED potting shape
measurement
Coplanarity measurement of
connector pins
| 17
Smart phone
Automotive parts
Pharmaceuticals
(assembly process)
Height measurement of
assembled parts
Depth measurement of
hole on metal component
Profile inspection of
friction materials for clutch
Thickness measurement of
lens
Case width measurement
Thickness measurement of
motor cores
Eccentricity measurement of
motor
Liquid level measurement in
small-diameter vessels
Level difference measurement
between buttons and case
Surface deflection measurement
of rotary parts
Flatness measurement of
transmission parts
Curvature measurement of
glass surface
Level difference
measurement of logos
Profile inspection of
sealing materials for assembled parts
Assembly measurement of
ECU boards
Operation inspection of
connecting point of relay
Confocal Fiber Displacement Sensor
ZW-7000/5000 Series
Reliable measurements for
any material and surface types
• Measuring shiny objects with an inclination of ±25°
• ±0.5 µm or less linearity for various materials
• Sampling rate as fast as 20 µs
• Small spot diameter of 10µm or less
Note: Angle characteristic, linearity, sampling period and
spot diameter given in the cover differ among models.
Please ask OMRON sales representative for details.
System Configuration
EtherCAT connections
Basic Configuration
Controller
ZW-7000T/
5000T Series
Other
EtherCAT
Slaves
Sensor Head
ZW-S70□0
S50□0
EtherCAT Cable
(RJ45/RJ45)
Calibration ROM
(included with Sensor Head)
EtherCAT Cable
(RJ45/RJ45)
EtherCAT Cable
(Select the cable that matches
the Slave's connector.)
EtherCAT Cable
(RJ45/RJ45)
EtherCAT Master
Setting Software
Ethernet *2
/USB
Machine Automation Controller
NJ/NX/NY series
Sysmac Studio
Standard Edition
SYSMAC-SE20□□
Analog, EtherNet/IP, Ethernet, RS-232C and Parallel connections
Basic Configuration
Controller
ZW-7000T/
5000T Series
Sensor Head
ZW-S70□0
S50□0
Calibration ROM
(included with Sensor Head)
Switching
Hubs
Control PLC
EtherNet/IPTM, Ethernet
Setting Software
Sysmac Studio
Measurement Sensor Edition
SYSMAC-ME00□L
18
Analog, RS-232C and Parallel
* Obtain a commercially available Ethernet cable satisfying
the following requirements:
• Category 5e or more, 30 m or less
• RJ45 connector (8-pin modular jack)
• For direct connection: Select cross cable.
• For connection through an industrial switching hub:
Select straight cable.
ZW-7000/5000 Series
Order Information
ZW-7000
●Sensor Head
Appearance
Measuring range
0 mm
9.5 mm
10 mm
10.5 mm
Spot diameter
Static resolution *
50 µm dia.
0.25 µm
19 mm
20 mm
21 mm
28 mm
30 mm
32 mm
2m
ZW-S7010 2M
2m
70 µm dia.
0.3 m
2m
100 µm dia.
ZW-S7010 0.3M
ZW-S7020 2M
0.25 µm
Measuring range 20±1mm
0 mm
Model
0.3 m
Measuring range 10±0.5 mm
0 mm
Cable length
ZW-S7020 0.3M
ZW-S7030 2M
0.25 µm
0.3 m
Measuring range 30±2mm
ZW-S7030 0.3M
* Values when the controller ZW-7000T is used.
●Controller with EtherCAT
Appearance
Power supply
Output type
Model
24VDC
NPN/PNP
ZW-7000T
●Cable
Appearance
Item
Extension Fiber Cable (from Sensor Head to
Controller), (Fiber Adapter ZW-XFCM is included)
Fiber Adapter (used between Sensor Head prewired cable and Extension Fiber Cable)
Cable length
2m
5m
10 m
20 m
30 m
⎯
Model
ZW-XF7002R
ZW-XF7005R
ZW-XF7010R
ZW-XF7020R
ZW-XF7030R
ZW-XFCM
ZW-5000
●Sensor Head
Appearance
Measuring range
0mm
9.5mm
10mm
10.5mm
Spot diameter
Static resolution *
9 µm dia.
0.25 µm
2m
0.3 m
Measuring range 10±0.5 mm
0mm
19mm
20mm
21mm
2m
13 µm dia.
28mm
30mm
32mm
0.3 m
2m
18 µm dia.
Model
ZW-S5010 2M
ZW-S5010 0.3M
ZW-S5020 2M
0.25 µm
Measuring range 20±1mm
0mm
Cable length
ZW-S5020 0.3M
ZW-S5030 2M
0.25 µm
0.3 m
Measuring range 30±2mm
ZW-S5030 0.3M
* Values when the controller ZW-5000T is used.
●Controller with EtherCAT
Appearance
Power supply
Output type
24VDC
NPN/PNP
Model
ZW-5000T
●Cable
Appearance
Item
Extension Fiber Cable (from Sensor Head to Controller), (Fiber
Adapter ZW-XFC2 is included)
Fiber Adapter (used between Sensor Head pre-wired cable and
Extension Fiber Cable)
Cable length
Model
2m
ZW-XF5002R
5m
ZW-XF5005R
10 m
ZW-XF5010R
20 m
ZW-XF5020R
30 m
ZW-XF5030R
-
ZW-XFC2
19
ZW-7000/5000 Series
●Common cables
Appearance
Item
Cable length
Model
Parallel caable for ZW-7000T/5000T
32-pole (included with Controller ZW-7000T/5000T)
2m
ZW-XCP2E
RS-232C Cable for personal computer
2m
ZW-XRS2
RS-232C Cable for PLC/programmable terminal
2m
ZW-XPT2
●Recommended EtherCAT Communications Cables
Use Straight STP (shielded twisted-pair) cable of category 5 or higher with double shielding (braiding and aluminum foil
tape) for EtherCAT.
●Cable with Connectors
Item
Appearance
Recommended manufacturer
Standard type
Cable with Connectors on Both Ends
(RJ45/RJ45)
Wire Gauge and Number of Pairs:
AWG26, 4-pair Cable
Cable Sheath material: LSZH *2
Cable color: Yellow *3
Cable length(m) *1
XS6W-6LSZH8SS30CM-Y
0.5
XS6W-6LSZH8SS50CM-Y
1
XS6W-6LSZH8SS100CM-Y
2
XS6W-6LSZH8SS200CM-Y
3
XS6W-6LSZH8SS300CM-Y
5
XS6W-6LSZH8SS500CM-Y
OMRON
Rugged type
Cable with Connectors on Both Ends
(RJ45/RJ45)
Wire Gauge and Number of Pairs:
AWG22, 2-pair Cable
0.3
XS5W-T421-AMD-K
0.5
XS5W-T421-BMD-K
1
XS5W-T421-CMD-K
2
XS5W-T421-DMD-K
5
XS5W-T421-GMD-K
10
XS5W-T421-JMD-K
0.3
XS5W-T421-AMC-K
0.5
XS5W-T421-BMC-K
1
XS5W-T421-CMC-K
2
XS5W-T421-DMC-K
5
XS5W-T421-GMC-K
10
XS5W-T421-JMC-K
0.3
XS5W-T422-AMC-K
0.5
XS5W-T422-BMC-K
1
XS5W-T422-CMC-K
2
XS5W-T422-DMC-K
5
XS5W-T422-GMC-K
10
XS5W-T422-JMC-K
OMRON
Rugged type
Cable with Connectors on Both Ends
(M12 Straight/RJ45)
Wire Gauge and Number of Pairs:
AWG22, 2-pair Cable
OMRON
Rugged type
Cable with Connectors on Both Ends
(M12 Right-angle/RJ45)
Wire Gauge and Number of Pairs:
AWG22, 2-pair Cable
Model
0.3
OMRON
Note: For details, refer to Cat.No.G019.
*1. Standard type cables length 0.2, 0.3, 0.5, 1, 1.5, 2, 3, 5, 7.5, 10, 15 and 20m are available.
Rugged type cables length 0.3, 0.5, 1, 2, 3, 5, 10 and 15m are available.
*2. The lineup features Low Smoke Zero Halogen cables for in-cabinet use and PUR cables for out-of-cabinet use.
*3. Cables colors are available in blue, yellow, or Green
●Cables / Connectors
Wire Gauge and Number of Pairs: AWG24, 4-pair Cable
Item
Appearance
⎯
Cables
Recommended manufacturer
Hitachi Metals, Ltd.
Model
NETSTAR-C5E SAB 0.5 × 4P *
⎯
Kuramo Electric Co.
KETH-SB *
⎯
SWCC Showa Cable Systems Co.
FAE-5004 *
Panduit Corporation
MPS588-C *
RJ45 Connectors
⎯
* We recommend to use above cable and connector together.
Wire Gauge and Number of Pairs: AWG22, 2-pair Cable
Item
Cables
Appearance
Model
Kuramo Electric Co.
KETH-PSB-OMR *
⎯
JMACS Japan Co.,Ltd.
PNET/B *
OMRON
XS6G-T421-1 *
RJ45 Assembly Connector
Note: Connect both ends of cable shielded wires to the connector hoods.
* We recommend to use above cable and connector together.
20
Recommended manufacturer
⎯
ZW-7000/5000 Series
●Industrial switching hubs for Ethernet
Appearance
Number of ports
Failure detection
Current consumption
3
None
0.22A
Model
W4S1-03B
None
W4S1-05B
5
0.22A
Supported
W4S1-05C
Note: Industrial switching hubs are cannot be used for EtherCAT.
●EtherCAT junction slaves
Appearance
Number of ports
Power supply voltage
Current consumption
3
Model
0.08A
GX-JC03
0.17A
GX-JC06
20.4 to 28.8 VDC
(24 VDC -15 to 20%)
6
Note: 1. Please do not connect EtherCAT junction slave with OMRON position control unit, Model CJ1W-NC□81/□82.
2. EtherCAT junction slaves cannot be used for EtherNet/IPTM and Ethernet.
●Automation Software Sysmac Studio
Please purchase a DVD and required number of licenses the first time you purchase the Sysmac Studio. DVDs and
licenses are available individually.
Each model of licenses does not include DVD.
Item
Specifications
The Sysmac Studio is the software that provides an integrated environment for setting,
programming, debugging and maintenance of machine automation controllers including the
NJ/NX-series CPU Units, NY-series Industrial PC, EtherCat Slave, and the HMI.
Sysmac Studio
Sysmac Studio runs on the following OS.
Standard Edition
Windows 7 (32-bit/64-bit version)/Windows 8 (32-bit/64-bit version)/Windows 8.1 (32-bit/64Ver.1□□ *2
bit version)/Windows 10(32-bit/64-bit version)
This software provides functions of the Measurement Sensor Edition. Refer to Sysmac
Catalog (P072) for details such as supported models and functions.
Sysmac Studio
Measurement
Sensor Edition
Ver.1.□□
Model
Number of licenses Media
Sysmac Studio Measurement Sensor Edition is a limited license that provides selected
functions required for ZW-series
Displacement Sensor settings.
Because this product is a license only, you need the Sysmac Standard Edition DVD media
to install it.
⎯
(Media only)
Standards
DVD SYSMAC-SE200D
⎯
1 license*1
⎯
SYSMAC-SE201L
⎯
1 license
⎯
SYSMAC-ME001L
⎯
3 license
⎯
SYSMAC-ME003L
⎯
*1. Multiple licenses are available for the Sysmac Studio (3, 10, 30, or 50 licenses).
*2. ZW-series is supported by Sysmac Studio version 1.18 or higher.
●Fiber Cleaner
Item
Recommended manufacturer
Applicable Model
Model
ZW-7000
Fiber Connector Cleaner *1
OMRON
ZW-XCL
Yes
Yes
NEOCLEAN-M
NTT Advanced
Technology Corporation
ATC-NE-M1
Yes
No
ATC-RE-01
No
Yes (Sensor Head only)
OPTIPOP R1
Contacts
ZW-5000
OMRON
*2
*1. Place orders in units of boxes (contacting 10 units).
*2. Contacts
Japan: NTT Advanced Technology Corporation TEL: 0422-47-7888
China: GUANGZHOU LI CHENG OPTOELECTRONIC CO.,LTD. TEL: 020-8165 0508
Hong Kong: ComStar Communications Ltd. TEL: +852 2536 9737
Taiwan: Global Science Instruments Co., Ltd. TEL: +886-2-8913-2737 Ext. 33
India: Aishwarya Telecom Ltd. TEL: +91 40 2753 1324
Singapore: Masstron Pte Ltd TEL: (65) 6763 0309
Malaysia: Masstron Communication Solutions Sdn Bhd TEL: (603) 8061 0309
Thailand: Masstron (Thailand) Co.,Ltd TEL: (66-2) 319-9375/6
Vietnam: Masstron Pte Ltd (Singapore) TEL: (65) 6763 0309
Germany: AMS Technologies AG TEL: +49 (0)89 895 77 0
France: AMS Technologies S.A.R.L. TEL: +33 (0)1 64 86 46 00
Italy: AMS Technologies S.r.l. TEL: +39 0331 596 693
Spain: AMS Technologies S.L. TEL: +34 93 380 84 20
Netherlands: AMS Technologies AG (Germany) TEL: +49 (0)89 895 77 0
USA: AFL Telecommunications TEL: +1 (800) 235-3423
21
ZW-7000/5000 Series
Specifications
●Sensor Head
Item
Specifications
ZW-S7010
ZW-S7020
ZW-S7030
ZW-S5010
ZW-S5020
ZW-S5030
Sensor controller
ZW-7000T
ZW-5000T
Measurement center
distance
10 mm
20 mm
30 mm
10 mm
20 mm
30 mm
Measuring range
±0.5 mm *1
±1 mm*1
±2 mm*1
±0.5 mm
±1 mm
±2 mm
Static resolution *2
0.25 µm
Linearity *3
±0.45 µm
±0.9 µm
±2.0 µm
±0.45 µm
±0.9 µm
±2.0 µm
Spot diameter (Total
measurent range) *4
50 µm dia.
70 µm dia.
100 µm dia.
9 µm dia.
13 µm dia.
18 µm dia.
Measurement cycle *5
20 µs to 400 µs
Operating ambient
illumination
Illumination on object surface max.30000 Lx: (incandescent light)
Ambient temperature range
Operation: 0 to 50°C, Storage: -15 to +60°C
(No freezing and condensation)
Ambient humidity range
Operation/storage: 35 or 85%RH (No condensation)
Degree of protection
IP40 (IEC60529)
Vibration resistance
(destructive)
10 to 150 Hz (half amplitude 0.35 mm), 80 mins in each of X/Y/Z directions
Shock resistance
(destructive)
150 m/s2, 6 direction, 3 times each (up/down, left/right, forward/backward)
Temperature characteristic
*6
0.6 µm/°C
1.1 µm/°C
1.8 µm/°C
LED Safety
Risk Group 3 (IEC62471)
Material
Chassis: aluminum die cast
Fiber cable sheath: PVC
Calibration ROM: PC
Fiber cable length
0.3 m, 2 m (flex-resistant cable)
Fiber cable minimum bend
radius
20 mm
Insulation resistance
(Calibration ROM)
Between case and all terminals: 20 MΩ (by 250 VDC)
Dielectric strength
(Calibration ROM)
Between case and all terminals: 1000 VAC, 50/60 Hz, 1 min
Weight
Fiber cable length 0.3m Approx. 170g
Fiber cable length 2m Approx. 180g
Accessories
Calibration ROM fixing screws (M2)
Fiber protection cap
Strap × 2
Instruction Manual
Precautions
80 µs to 1600 µs
1.1 µm/°C
1.8 µm/°C
0.6 µm/°C
Calibration ROM fixing screws (M2)
Fiber protection cap
Strap × 1
Instruction Manual
Precautions
*1. The measurement range is higher 28 µs than measurement cycle.
*2. Capacity value when OMRON standard mirror surface target is measured at the measurement center distance as the average of 16,384 times
The value when the controller ZW-7000T/5000T is connected
*3. Material setting for the OMRON standard mirror surface target: Error from an ideal straight line when measuring on mirror surface.
*4. Capacity value defined by 1/e2 (13.5%) of the peak optical intensity of the measurement wavelength.
*5. When an extension fiber cable of 5 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes.
*6. Capacity value of temperature characteristic at the measurement center distance when fastened with an aluminum jig between the Sensor Head and the target
and the Sensor Head and the Sensor Controller are set in the same temperature environment.
22
ZW-7000/5000 Series
●Controller
Item
Input/output type
Number of connected sensor heads
Sensor head compatibility
Light source for measurement
LED Safety
Main display
Segment
Display
Sub-display
Status indicators
LED display
EtherCAT indicator
External I/F
Ethernet
EtherCAT
RS-232C
Analog output Analog voltage output (OUT V)
terminal block Analog current output (OUT A)
Judgment output
(HIGH/PASS/LOW)
Busy output (BUSY)
Alarm output (ALARM)
Enable output (ENABLE)
Sync flag output (SYNFLG)
Trigger busy output (TRIGBUSY)
Logging state output (LOGSTAT)
Logging error output (LOGERR)
Stability output (STABILITY)
Task state output (TASKSTAT)
LIGHT OFF input (LIGHT OFF)
Zero reset input (ZERO)
32-pole
expansion
Timing input (TIMING)
connector
Reset input (RESET)
Sync input (SYNC)
Trigger input (TRIG)
Logging input (LOGGING)
Specifications
ZW-7000T
ZW-5000T
NPN/PNP dual type
1
ZW-S70□□
ZW-S50□□
White LED
Risk Group 3 (IEC62471)
11-segment white display, 6 digits
11-segment green display, 6 digits
HIGH (orange), PASS (green), LOW (orange), STABILITY (green), ZERO (green),
ENABLE (green), THRESHOLD-H (orange), THRESHOLD-L (orange), RUN (green)
ECAT RUN (green), L/A IN (Link/Activity IN) (green), L/A OUT (Link/Activity OUT) (green),
ECAT ERR (red)
100BASE-TX/10BASE-T, Non-procedure (TCP/UDP), EtherNet/IP
EtherCAT exclusive protocol 100BASE-TX
Max. 115,200 bps
-10 V to +10 V, output impedance: 100 Ω
4 mA to 20 mA, max. load resistance: 300 Ω
Transistor output system
Output voltage: 21.6 to 30 VDC
Load current: 50 mA or less
Residual voltage when turning ON: 2 V or less
Leakage voltage when turning OFF: 0.1 mA or less
DC input system
Input voltage: 24 VDC ± 10% (21.6 to 26.4 VDC)
Input current: 7 mA Type. (24 VDC)
ON voltage/ON current: 19 V/3 mA or less
ON voltage/ON current: 5 V/1 mA or less
Transistor output system
Output voltage: 21.6 to 30 VDC
Load current: 50 mA or less
Residual voltage when turning ON: 2 V or less
Leakage voltage when turning OFF: 0.1 mA or less
Bank
DC input system
Input voltage: 24 VDC ± 10% (21.6 to 26.4 VDC)
Bank Selection input
Input current: 7 mA Type. (24 VDC)
(BANK_SEL 1 to 3)
ON voltage/ON current: 19 V/3 mA or more
OFF voltage/OFF current: 5 V/1 mA or less
Exposure time
Automatic/Fixed
Measuring cycle *1
20 µs to 400 µs
80 µs to 1600 µs
Material setting
Standard/Mirror/Rough surfaces
Measurement item
Height/Thickness of transparent object/Calculation
Filtering
Median/Average/Differentiation/High pass/Low pass/Band pass
Output
Scaling/Different holds/Zero reset/Logging for a measured value
Main
Measured value/Threshold value/Analog output voltage or current value/
functions
Display
Judgment result/Resolution/Light power/Internal logging condition
/Peak amount of received light
Number of configurable banks
Max. 8 banks
Task process
Multi-task (up to 4 tasks per bank)
Save/Initialization/Display measured information/Communication settings/
System
Sensor head calibration/Key-lock/Zero reset memory/Timing input
Power supply voltage
21.6 to 26.4 VDC (including ripple)
Current consumption
800 mA max.
Rating
Insulation resistance
Across all lead wires and FG terminal: 20 MΩ (by 250 VDC)
Dielectric strength
Between all lead wires and FG terminal: 500 VAC, 50/60 Hz, 1 minute
Degree of protection
IP20 (IEC60529)
Vibration resistance (destructive)
10 to 55 Hz (half amplitude 0.35 mm), 50 mins in each of X/Y/Z directions
Environmental
Shock resistance (destructive)
150 m/s2, 6 direction, 3 times each (up/down, left/right, forward/backward)
resistance
Ambient temperature range
Operation: 0 to 40°C, Storage: -15 to +60°C (No freezing and condensation)
Ambient humidity range
Operation/storage: 35 to 85%RH (No condensation)
D-type grounding (grounding resistance of 100 Ω or less)
Grounding
Note: For conventional Class D grounding
Material
Chassis: PC
Weight
Approx. 900g (main unit only), Approx. 150 g (Parallel cable)
Parallel cable (ZW-XCP2E)
Parallel cable (ZW-XCP2E)
10 Fiber cleaners (ZW-XCL)
10 Fiber cleaners (ZW-XCL)
Accessories
Instruction Manual
Fiber adapter cap, Strap × 1
Member registration sheet
Instruction Manual, Member registration sheet
Note: The Export Trade Control Order compatible Controller (ZW-7000T/5000T) is available.
When using this Controller, the minimum resolution is 0.25 µm regardless of the connected Sensor Head and setting conditions.
*1. When an extension fiber cable of 5 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes.
Currently selected
bank output
(BANK_OUT 1 to 3)
23
ZW-7000/5000 Series
●EtherCAT Communications Specifications
Item
Specification
Communications standard
IEC61158 Type12
Physical layer
100BASE-TX(IEEE802.3)
Connectors
RJ45 × 2
ECAT IN: EtherCAT input
ECAT OUT: EtherCAT output
Communications media
Category 5 or higher (cable with double, aluminum tape and braided shielding) is recommended.
Communications distance
Distance between nodes: 100 m max.
Process data
Variable PDO mapping
Mailbox (CoE)
Emergency messages, SDO requests, SDO responses, and SDO information
Distributed clock
Synchronization in DC mode.
LED display
L/A IN (Link/Activity IN) × 1, AL/A OUT (Link/Activity OUT) × 1, AECAT RUN × 1, AECAT ERR × 1
●Automation Software Sysmac Studio
Item
Operating environment *3
Operating system (OS) *1
Windows 7 (32-bit/64-bit version)/Windows 8 (32-bit/64-bit version)/Windows 8.1 (32-bit/64-bit version)/
Windows 10(32-bit/64-bit version)
CPU
Windows computers with Intel® Celeron® processor 540 (1.8 GHz) or faster CPU.
Intel® Core™ i5 M520 processor (2.4 GHz) or equivalent or faster recommended.
Main memory
2 GB min.
4 GB min. recommended
Hard disk
Minimum 4.6 GB of Hard disk space is required to install. *2
Display
XGA 1024 × 768, 16 million colors.
WXGA 1280 × 800 min. recommended
Disk drive
DVD-ROM drive
Communications ports
USB port corresponded to USB 2.0, or Ethernet port *4
Supported languages
Japanese, English, German, French, Italian, Spanish, simplified Chinese, traditional Chinese, Korean
*1. Note about Sysmac Studio compatible operating systems: The required system and hard disk capacity differs according to the system environment.
*2. Separate logging memory is required to use the file logging function.
*3. Describes System Requirements and notes of Sysmac Studio Measurement Sensor Edition.
For detail of System Requirements and notes of Sysmac Studio Measurement Sensor Edition, refer to Sysmac Studio Version 1 Operation Manual.
*4. For information on how to connect a personal computer with the controller or other hardware and information on required cables, refer to manuals for each
hardware.
●Version Information
ZW-7000/5000 Series and Sysmac Studio
Use the latest version of Sysmac Studio Standard Edition/Measurement Sensor Edition.
ZW Series
ZW-7000□
ZW-5000□
24
Version of Controller
Ver.2.03
Ver.2.10
Corresponding version of Sysmac Studio Standard Edition/Measurement Sensor Edition
Supported by version 1.15 or higher.
Supported by version 1.18 or higher.
ZW-7000/5000 Series
External Dimensions
(Unit: mm)
Sensor Head
(STANDARD SURFACE)
2.75±0.1
ZW-S7010 □M/S7020 □M/S7030 □M
4-M3
46.7±0.1
26.8±0.1
24.5±0.1
(STANDARD SURFACE)
MOUNTING SCREW HOLES
Type
ZW-S7010
ZW-S7020
ZW-S7030
W.D.
10
20
30
M
0.5
1
2
STANDARD SURFACE
46.7
26.8
24.5
STANDARD SURFACE
*1.
(7.7)
2.75
4-3.5 dia. (MOUNTING HOLES)
*2.
M (*1)
M (*1)
FIBER CABLE
(3.0 dia.)
LIGHTENING & RECEIVING AXIS
CENTER
Measurement
end
Measurement
center
Measurement
end
15
15
FIBER CONNECTOR
(12.6)
L
(300)
(2000)
30
Length
0.3 m
2m
(40)
30
40
76.25
W.D. (*1)
25
L (*2)
STANDARD SURFACE
(STANDARD SURFACE)
2.75±0.1
ZW-S5010 □M/S5020 □M/S5030 □M
24.5±0.1
4-M3
(STANDARD SURFACE)
46.7±0.1
26.8±0.1
MOUNTING SCREW HOLES
2.75
4-3.5 dia. (MOUNTING HOLES)
STANDARD SURFACE
Type
ZW-S5010
ZW-S5020
ZW-S5030
W.D.
10
20
30
M
0.5
1
2
STANDARD SURFACE
46.7
26.8
24.5
*1.
*2.
LABEL CAUTION
M (*1)
LIGHTENING & RECEIVING AXIS
CENTER
30
Measurement
end
15
Measurement
center
Measurement
end
FIBER CABLE
(3.0 dia.)
(40)
76.25
30
FIBER CONNECTOR
(50)
(62)
W.D. (*1)
(10dia.)
M (*1)
L
(300)
(2000)
15
Length
0.3 m
2m
(40)
L (*2)
STANDARD SURFACE
25
ZW-7000/5000 Series
Controller
ZW-7000T
140
40.8
34.9
124
SCREW HOLE FOR CONNECTING
ROM M2 DEPTH 2.0 MAX.
SCREW FOR CONNECTING FRAME
GROUND TERMINAL M4 LENGTH6
6
SCREW HOLE FOR CONNECTING
FRAME GROUND TERMINAL M4
DEPTH 7.0 MAX.
85
139.5
SLIDER FOR MOUNTING DIN-RAIL
70
70±0.1
40
4-4.5 dia.
MOUNTING SCREW HOLES
4-M4 DEPTH6.0MAX.
15
55
55±0.1
MOUNTING SCREW HOLES
ZW-5000T
140
40.8
34.9
124
SCREW HOLE FOR CONNECTING ROM
M2x0.4 DEPTH 2.0MAX.
SCREW FOR CONNECTING FRAME
GROUND TERMINL M4x0.7 LENGTH6.0
6
SCREW HOLE FOR CONNECTING FRAME
GROUND TERMINL M4x0.7 DEPTH 7.0MAX.
85
139.5
40
SLIDER FOR MOUNTING DIN-RAIL
70
70±0.1
4-4.5 dia.
MOUNTING SCREW HOLES
4-M4x0.7 DEPTH6.0MAX.
15
55
55±0.1
MOUNTING SCREW HOLES
26
ZW-7000/5000 Series
Extension Fiber Cable
ZW-XF7002R/XF7005R/XF7010R/XF7020R/XF7030R
FIBER CABLE (3.0 dia.)
SERIAL NUMBER LABEL NAME PLATE
FIBER CONNECTOR
(CONTROLLER SIDE)
FIBER CONNECTOR
(SENSOR HEAD SIDE)
2-0.7 dia.
(25)
12-0.125 dia.
(40)
(30)
(25.4)
(40)
(25)
(60)
(12.6)
4.6
(12.6)
4.6
2-0.7 dia.
12-0.125 dia.
(7.7)
(7.7)
L*
(ACCESSORIES)
FIBER ADAPTER:ZW-XFCM
* The following table lists cable lengths
per models.
Type
Specification
L
ZW-XF7002R
2m
2000+40/0
18.9
14.9
9.8
4
20
ZW-XF7005R
5m
5000+100/0
ZW-XF7010R
10 m
10000+200/0
ZW-XF7020R
20 m
20000+400/0
ZW-XF7030R
30 m
30000+600/0
ZW-XF5002R/XF5005R/XF5010R/XF5020R/XF5030R
NAME PLATE
FIBER CABLE (3.0 dia.)
SERIAL NUMBER LABEL
(10 dia.)
(57)
(30)
(60)
(20)
(10 dia.)
FIBER CONNECTOR
FIBER CONNECTOR
(57)
L*
(ACCESSORIES)
FIBER ADAPTER:ZW-XFC2
* The following table lists cable lengths
per models.
1.35
11.9 dia.
15 +0.2
−0.5
Type
Specification
L
ZW-XF5002R
2m
2000+200/0
ZW-XF5005R
5m
5000+200/0
ZW-XF5010R
10 m
10000+200/0
ZW-XF5020R
20 m
20000+500/0
ZW-XF5030R
30 m
30000+500/0
Related Manuals
Man.No.
Z362
Model number
ZW-7000□/5000□
Manual
Displacement Sensor ZW-7000/5000 User’s Manual
Z363
ZW-7000□/5000□
Displacement Sensor ZW-7000/5000 User’s Manual for Communications Settings
W504
SYSMAC-SE2
Sysmac Studio Version 1 Operation Manual
27
· Angle characteristic, linearity, sampling period and spot diameter given in the cover differ among models. Please ask Omron sales representative for details.
· EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
· EtherNet/IP™ is a trademark of ODVA.
· Sysmac is a trademark or registered trademark of OMRON Corporation in Japan and other countries for OMRON factory automation products.
· Windows is a registered trademark of Microsoft Corporation in the USA and other countries.
· Other company names and product names mentioned in this document are the trademarks or registered trademarks of their respective companies.
· Microsoft product screen shot(s) are reprinted with permission from Microsoft Corporation.
Note: Do not use this document to operate the Unit.
OMRON Corporation
Kyoto, JAPAN
Industrial Automation Company
Authorized Distributor:
Contact: www.ia.omron.com
Regional Headquarters
OMRON EUROPE B.V.
Wegalaan 67-69, 2132 JD Hoofddorp
The Netherlands
Tel: (31)2356-81-300/Fax: (31)2356-81-388
OMRON ELECTRONICS LLC
2895 Greenspoint Parkway, Suite 200
Hoffman Estates, IL 60169 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
© OMRON Corporation 2016-2017 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
CSM_4_2_0517
Cat. No. Q250-E1-02
0317 (0316)
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