Semiconductor Test

Semiconductor Test
SEMICONDUCTOR TEST
Semiconductor Test
키슬리 공식 채널파트너
Semiconductor Test
4200-SCS
Semiconductor Characterization System . . . . . . 56
4200-BTI-A
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS . . . . . . . . . . . . . . . . . . . . 63
Series S530
Parametric Test Systems . . . . . . . . . . . . . . . . . . . . 70
S500
Integrated Test Systems . . . . . . . . . . . . . . . . . . . . . 76
ACS
Automated Characterization Suite Software
. . . . . . 78
ACS Basic Edition
Semiconductor Parametric Test Software for
Component and Discrete Devices . . . . . . . . . . . . 81
ACS-2600-RTM
Wafer Level Reliability Option for ACS . . . . . . 83
Related Products
Series 2600A System SourceMeter В®
Multi-Channel I-V Test Solutions . . . . . . . . . . . . 10
Series 2400 SourceMeter Line . . . . . . . . . . . . . . . 33
SEMICONDUCTOR
Semiconductor Switch Matrix Mainframes . . . .194
070-7872-0703
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55
4200-SCS
Semiconductor Characterization System
The easy-to-use Model 4200-SCS Semiconductor Characterization System performs lab grade DC I-V,
C-V, and pulse device characterization, real-time plotting, and analysis with high precision and subfemtoamp resolution. The 4200-SCS offers the most advanced capabilities available in a fully integrated
characterization system, including a complete, embedded PC with Windows operating system and
mass storage. Its self-documenting, point-and-click interface speeds and simplifies the process of taking
data, so users can begin analyzing their results sooner. Additional features enable stress-measure capabilities suitable for a variety of reliability tests.
The powerful test library management tools included allow standardizing test methods and extractions to ensure consistent test results. The Model 4200-SCS offers tremendous flexibility with hardware options that include four different switch matrix configurations and a variety of LCR meters
and pulse generators. Customer support packages are also available, including applications support,
calibration, repair, and training.
• Intuitive, point-and-click
WindowsВ®-based environment
• Unique Remote PreAmps extend
the resolution of SMUs to 0.1fA
• C-V instrument makes C-V
measurements as easy as DC I-V
• Ultra low frequency C-V
measurement capability
• Ultra-fast I-V module for
transient and Pulse I-V
capabilities
• Self-contained PC provides
fast test setup, powerful data
analysis, graphing and printing,
and on-board mass storage of
test results
SEMICONDUCTOR
• Unique browser-style Project
Navigator organizes tests by
device type, allows access to
multiple tests, and provides test
sequencing and looping control
• Built-in stress/measure,
looping, and data analysis
for point-and-click reliability
testing, including five JEDECcompliant sample tests
• Integrated support for a variety
of LCR meters, Keithley switch
matrix configurations, and
both Keithley Series 3400 and
Agilent 81110 pulse generators
• Includes software drivers for
leading analytical probers
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A Total System Solution
The Model 4200-SCS provides a total system solution for DC I-V, C-V, and pulse characterization and
reliability testing of semiconductor devices, test structures, and materials. This advanced parameter
analyzer provides intuitive and sophisticated capabilities for a wide variety of semiconductor tests.
The Model 4200-SCS combines unprecedented measurement speed and accuracy with an embedded
Windows-based PC and the Keithley Interactive Test Environment (KITE) to provide a powerful singlebox solution. KITE allows users to gain familiarity quickly with tasks such as managing tests and results
and generating reports. Sophisticated and simple test sequencing and external instrument drivers simplify performing automated device and wafer testing with combined I-V, C-V, and pulse measurements.
The exceptional low current performance of the Model 4200-SCS makes it the perfect solution for
research studies of single electron transistors (SETs), molecular electronic devices, and other nanoelectronic devices that require I-V characterization. The Model 4200-SCS can be used to make four-probe
van der Pauw resistivity and Hall voltage measurements, eliminating the need for a switch matrix and
user-written code. With remote preamps added, resistances well above 1012W can be measured.
The Model 4200-SCS is modular and configurable. The system supports up to nine source measurement
units (SMUs) in any combination of medium and high power SMUs. A high-power SMU provides 1A/20W
capability. Also available are the C-V option and the ultra-fast I-V modules. The C-V option includes the
C-V Power package, which supports high power C-V measurements up to 400V and 300mA, up to 60V of
differential DC bias, and quasistatic C-V measurements.
Extended Measurement Resolution
An optional Remote PreAmp, the Model 4200-PA, extends the system’s measurement resolution from
100fA to 0.1fA by effectively adding five current ranges to either SMU model. The PreAmp module
is fully integrated with the system; to the user, the SMU simply appears to have additional measurement resolution available. The Remote PreAmp is shipped installed on the back panel of the Model
4200-SCS for local operation. This installation allows for standard cabling to a prober, test fixture, or
switch matrix. Users can remove the PreAmp from the back panel and place it in a remote location
(such as in a light-tight enclosure or on the prober platen) to eliminate measurement problems due
to long cables. Platen mounts and triax panel mount accessories are available.
KTE Interactive Software Tools
KTE Interactive includes four software tools for operating and maintaining the Model 4200-SCS in
addition to the Windows operating system:
• The Keithley Interactive Test Environment (KITE) is the Model 4200-SCS Windows device characterization application. It provides advanced test definition, parameter analysis and graphing, and
automation capabilities required for modern semiconductor characterization. Built-in looping,
stress-measure capabilities, and data management enable many types of reliability testing.
• Keithley User Library Tool (KULT)—Allows test engineers to integrate custom algorithms into KITE
using Model 4200-SCS or external instruments. (Note: Requires optional Model 4200-Compiler.)
• Keithley Configuration Utility (KCON)—Allows test engineers to define the configuration of GPIB
instruments, switch matrices, and analytical probers connected to the Model 4200-SCS. It also
В­provides В­system diagnostics functions.
• Keithley External Control Interface (KXCI)—The Model 4200-SCS application for controlling the
Model 4200-SCS from an external computer via the GPIB bus.
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Lab grade DC device characterization
Lab grade DC device characterization
DC I-V, C-V, and Pulse in One Test Environment
4200-SCS
Semiconductor Characterization System
The Keithley
Interactive Test
Environment (KITE) is
designed to let users
understand device
behavior quickly.
When running a test
sequence, users can
view results and plots
for completed tests
while the sequence
is still running. As
shown here, multiple
plots can be viewed at
the same time to get
a complete picture of
device performance.
Ordering Information
Accessories Supplied
Reference and User Manual
on CD-ROM
236-ILC-3 Interlock Cable, 3m
Note: All 4200-SCS systems and
instrument options are supplied
with required cables of 2m length.
Additional Instrumentation
4210-CVU Integrated C-V Instrument
4225-PMU Ultra-Fast I-V Module
4225-RPM Remote Amplifier/Switch
4220-PGU High Voltage Pulse
Generator
4200-SMU Medium Power
Source-Measure Unit
4210-SMU High Power
Source-Measure Unit
4200-PA Remote PreAmp Option for
4200-SMU and 4210-SMU
4210-MMPC/X
Multi-measurement
Performance Cables
Related Products
707B
Semiconductor Switching
Matrix Mainframe
708B
Single Slot Switching
Matrix Mainframe
7072
8Г—12 Semiconductor
Matrix Card
7072-HV 8Г—12 High Voltage
Semiconductor Matrix Card
7174A 8Г—12 High Speed, Low
Current Matrix
KITE Projects
A project is a collection of related tests, organized in a hierarchy that parallels the physical layout
of the devices on a wafer. KITE operates on projects using an interface called the project navigator.
The project navigator simplifies organizing test files, test execution, and test sequencing. The project
navigator organizes tests into a logical hierarchy presented in a browser style format. This structure
allows users to define projects around wafer testing:
• The project level organizes subsites and controls wafer looping ­execution.
• The subsite level organizes devices and controls subsite test sequencing.
• The device level organizes test modules, manages test module libraries, and controls device
test sequencing.
• The test module level performs tests, analyzes data, and plots results.
Prober Control
Keithley provides integrated prober control for supported analytical probers when test sequencing is
executed on a user-programmable number of probe sites on a wafer. Contact the factory for a list of
supported analytical probers. A manual prober mode prompts the operator to perform prober operations during the test sequence.
Test Sequencing
KITE provides “point and click” test sequencing on a device, a group of devices (subsite, module, or
test element group), or a user-programmable number of probe sites on a wafer. One sequence can
include DC I-V, C-V, and pulse tests.
Keithley User Library Tool (KULT)
The Keithley User Library Tool is an open environment that provides you with the flexibility to create your own custom routines as well as use existing Keithley and third-party C-В­language subroutine
libraries. User library В­modules are accessed in KITE through User Test Modules. Factory supplied
libraries provide up and running capability for supported instruments. Users can edit and compile
subroutines, then integrate libraries of subВ­routines with KITE, allowing the Model 4200-SCS to
control an entire test rack from a single user interface. KULT is derived from the Keithley S600 and
Series S400 Parametric Test Systems. This simplifies migration of test libraries between the Model
4200-SCS and Keithley parametric test В­systems.
(Note: KULT requires the optional Model 4200-Compiler.)
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SEMICONDUCTOR
Lab grade DC device characterization
4200-SCS/F
Flat Panel Display
4200-SCS/C
Composite Front Bezel; requires
an external SVGA display
Lab grade DC device characterization
DC I-V, C-V, and Pulse in One Test Environment
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4200-SCS
Semiconductor Characterization System
Model 4200-SMU Medium Power
and 4210-SMU High Power SMUs
Precision DC I-V measurements are the cornerstone of device and materials electrical characterization. The SMUs in the 4200-SCS can source
either voltage or current, and can simultaneously
measure both the voltage and current. Typically,
the DC I-V measurements performed by these
SMUs are used for very precise (0.01%) or very
sensitive (1fA, 1ВµV) measurements in the time
frame of milliseconds to seconds. The SMUs can
also provide continuous power output, allowing
tests to run for hours, or even weeks, without
interruption.
electrically characterize their devices and materials. This has resulted in the largest library of
standard tests available. More than 400 different
libraries are supplied, demonstrating precision
DC I-V tests on:
• CMOS MOSFETS and devices
• Bipolar devices
• Diodes and pn junctions
• Solar cells
• Nanotech devices
• And nearly every other material and device
imaginable
The SMUs in the 4200-SCS are fully integrated in
the 4200-SCS chassis and incorporate the latest
measurement technologies including:
• 24-bit A/D converters on every SMU
• Full remote sense (Kelvin) capability
• Broadest dynamic range of current, from
<1fA to 1A
• Broadest dynamic range of voltage from <1µV
to 200V
• Up to 9 medium or high power SMUs can
source/measure В­simultaneously
Additional capabilities include:
• Data for most types of tests can be acquired
and plotted in real time with a resolution of
milliВ­seconds to seconds
• Wide variety of standard sweep types are
available, including linear and log sweeps,
voltage and current sweeps, and even arbitrary custom sweeps
• Up to nine SMUs can be installed in a single
chassis, and all nine can be used simultaneously or independently.
The 4200-SCS has been used by thousands of
engineers and researchers around the world to
Model 4210-CVU C-V Instrument
C-V measurements are as easy to perform as I-V
measurements with the integrated C-V instrument. This optional capacitance-voltage instrument performs capacitance measurements from
femtoFarads (fF) to microFarads (ВµF) at frequencies from 1kHz to 10MHz. Also available is the
4200-CVU-PWR option that supports:
• High power C-V measurements up to 400V
(200V per device terminal)—for testing
high power devices, such as MEMs, LDMOS
В­devices, displays, etc.
• DC currents up to 300mA—for measuring
capacitance when a transistor is on.
The innovative design of the 4210-CVU has eight
patents pending and is complemented by the
broadest C-V test and analysis library available
in any commercial C-V measurement solution.
It also supplies diagnostic tools that ensure the
validity of your C-V test results.
With this system, you can configure linear or
custom C-V and C-f sweeps with up to 4096 data
points. In addition, through the open environment of the 4200-SCS, you can modify any of the
included tests, such as:
• C-V, C-t, and C-f measurements and
analysis of:
–– New! Complete solar cell libraries,
including DLCP
–– High and low k structures
–– MOSFETs
–– BJTs
–– Diodes
–– III-V compound devices
–– Carbon nanotube (CNT) devices
• Doping profiles, TOX, and carrier lifetime tests
SEMICONDUCTOR
• Junction, pin-to-pin, and interconnect capacitance measurements
The C-V instrument integrates directly into the
Model 4200-SCS chassis. It can be purchased as
an upgrade to existing systems or as an option
for new systems.
C-V curve from a MOSFET transistor measured with the 4210-CVU.
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Lab grade DC device characterization
Lab grade DC device characterization
DC I-V, C-V, and Pulse in One Test Environment
4200-SCS
Semiconductor Characterization System
DC I-V, C-V, and Pulse in One Test Environment
Each Model 4200-SCS chassis can accommodate up to six Model 4225-PMU modules
to provide up to twelve ultra-fast source and
measure channels.
• The optional Model 4220-PGU Pulse Generator Unit offers a voltage-sourcing-only alternative to
the 4225-PMU.
• The optional Model 4225-RPM Remote Amplifier/Switch expands current ranges (10mA, 1mA,
100ВµA, 10ВµA, 1ВµA, 100nA), switches sВ­ ourcing/measurement between the Model 4225-PMU, Model
4210-CVU, Model 4200-SMU, and 4210-SMU.
Lab grade DC device characterization
Three types of measurements are necessary to characterize a device, material, or process thoroughly.
The first two are precision DC I-V measurements (usually made with the Model 4200-SCS’s SMUs)
and AC impedance measurements (which can be made with the Model 4210-CVU C-V Instrument).
The Model 4225-PMU represents the last segment of this characterization triangle—ultra-fast I-V or
transient I-V measurements.
Some of the functionality provided by the Model 4225-PMU includes:
• Voltage outputs with programmable timing from 60ns to DC in 10ns steps
• Measuring I and V simultaneously, at acquisition rates of up to 200 megasamples/second (MS/s)
• Choosing from two voltage source ranges (±10V or ± 40V) and four current measurement ranges
(800mA, 200mA, 10mA, 100ВµA)
• Also, each module provides two channels of integrated simultaneous I-V sourcing and measurement; plug in up to six modules in a single chassis for twelve synchronized ­channels.
Two optional instruments offer addional fВ­unctionality:
Each plug-in 4225-PMU module provides two channels of integrated sourcing and measurement but
occupies only a single slot in the Model 4200-SCS’s nine-slot chassis. Unlike competitive solutions,
each channel of the 4225-PMU combines high speed voltage outputs (with
pulse widths ranging from 60 nanoseconds to DC) with simultaneous
В­current and voltage.
Model 4225-PMU Applications
• Ultra-fast general-purpose I-V measurements
• Pulsed I-V and transient I-V measurements
• Flash, PCRAM, and other non-volatile memory tests
• Isothermal testing of medium-sized power devices
• Materials testing for scaled CMOS, such as high-k dielectrics
• NBTI/PBTI reliability tests
Cascade probe station with a Model 4225-RPM Remote
Amplifier/Switch
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SEMICONDUCTOR
Lab grade DC device characterization
Model 4225-PMU Ultra-Fast I-V Module
The Model 4225-PMU Ultra Fast I-V Module is the latest addition to the growing range of instrumentation options for the Model 4200-SCS Semiconductor Characterization System. It integrates ultra-fast
voltage waveform generation and signal observation capabilities into the Model 4200-SCS’s already
powerful test environment to deliver unprecedented I-V testing performance, expanding the system’s
materials, device, and process characterization potential dramatically. Just as important, it makes
ultra-fast I-V sourcing and measurement as easy as making DC measurements with a traditional highresolution source measurement unit (SMU).
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4200-SCS
Semiconductor Characterization System
Multi-Measurement Cables
Keithley offers the only prober cable kits that support I-V, C-V, and UltraFast I-V signals. These high performance cable kits simplify switching
between DC I-V, C-V, and Ultra-Fast I-V testing configurations by eliminating the need for re-cabling when you change from one type of measurement to another. Their patent-pending design also eliminates the need
to lift the probe needles for each cable change. The results of using these
triaxial cables are that you:
How to Use
When changing between I-V and C-V measurements:
• Save time by avoiding the laborious process of re-cabling the connections from the test instruments to the prober every time a new measurement type is required.
When performing Ultra-Fast I-V, one or more of the probes may need to be
attached to the shield/ground of the pulse source. The cables facilitate this
easily with supplied shorting caps.
• Prevent the cabling errors that often occur during difficult cable
changes, which in turn prevents the measurement errors produced from
faulty cabling.
Occasionally, two or more probes need to be connected in parallel. The
patented design of the 4210-MMPC cable sets support this functionality.
• DO NOT lift the probe needles
• DO NOT replace any cables
Simply reposition the cable at the bulkhead to access the appropriate
instrument.
For Even More Simplicity
You can eliminate the need to reposition cables at the bulkhead when
switching between I-V, C-V and Ultra-Fast I-V measurements with Keithley’s
Model 4225-RPM Remote Amplifier/Switch. All instrument connections at
the bulkhead are fed into the switch, which automatically connects the
desired instrument to the positioner.
• Reduce wafer pad damage by making setup changes while the probe
needles remain in contact with the wafer. This also allows you to maintain the same contact impedance for each type of measurement.
Two versions of the cable kits are available: the Model 4210-MMPC-C
for Cascade Microtech probers and the Model 4210-MMPC-S for SUSS
Microtec probers. Contact factory for other supported probers.
4200-SCS Chassis
4200-SMU1
4200-SMU2
4225-RPM 1
Force
Sense
SMU 1
Force
CVU HI
Sense
PMU 1
HI Pot
HI Curr
LO Curr
LO Pot
4210-CVU
4225-PMU
Force
4225-RPM 2
SMU 2
CVU LO
Ch. 1
Ch. 2
Force
PMU 2
This closeup of two Model 4225-RPMs highlights the DC SMU, C-V, and
ultra-fast I-V cable connections.
SEMICONDUCTOR
The 4210-MMPC cable kits include a provision for connecting the
shields/grounds of all the probes together near the probe tips,
providing the best high frequency performance.
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C O N F I D E N C E
Lab grade DC device characterization
Lab grade DC device characterization
DC I-V, C-V, and Pulse in One Test Environment
4200-SCS
Semiconductor Characterization System
DC I-V, C-V, and Pulse in One Test Environment
PIV, Pulse, Scope, C-V, and Flash options
4200-FLASH-3Y-CAL 3 cals within 3 years of purchase of
the 4200-FLASH. Requires purchase of
4200-3Y-CAL
4200-FLASH-3Y-EW 1-year factory warranty on the 4200-FLASH
extended to 3 years from date of shipment.
Includes calibration and return shipping.
Requires purchase of 4200-3Y-EW.
4200-PIV-A-3Y-CAL 3 cals within 3 years of purchase of the
4200-PIV-A Package. Requires purchase of
4200-3Y-CAL.
4200-PIV-A-3Y-EW 1-year factory warranty on the 4200-PIV-A
Package extended to 3 years from date of
shipment. Includes calibration and return
shipping. Requires purchase
of 4200-3Y-EW.
4200-PIV-Q-3Y-CAL 3 cals within 3 years of purchase of
the 4200-PIV-Q. Requires purchase of
4200-3Y-CAL
4200-PIV-Q-3Y-EW 1-year factory warranty on the 4200-PIV-Q
extended to 3 years from date of shipment.
Includes calibration and return shipping.
Requires purchase of 4200-3Y-EW.
4200-SCP2-3Y-CAL 3 cals within 3 years of purchase of the
4200-SCS Scope Card (Standard or HR version). Requires purchase of 4200-3Y-CAL.
4200-SCP2-3Y-EW 1-year factory warranty on the 4200-SCS
Scope Card (Standard or HR version)
extended to 3 years from date of shipment.
Includes calibration and return shipping.
Requires purchase of 4200-3Y-EW.
4205-PG2-3Y-EW
1-year factory warranty on the 4205-PG2
Pulse Generator Card extended to 3 years
from date of shipment. Includes calibration
and return shipping. Requires purchase of
4200-3Y-EW.
4205-PG2-3Y-CAL 3 cals within 3 years of purchase of the
4205-PG2 Pulse Generator Card. Requires
purchase of 4200-3Y-CAL
4210-CVU-3Y-EW 1-year factory warranty on the 4210-CVU
C-V Measurement Unit extended to 3 years
from date of shipment. Includes calibration
and return shipping. Requires purchase of
4200-3Y-EW.
4210-CVU-3Y-CAL 3 cals within 3 years of purchase of the
4210-CVU C-V Measurement Unit. Requires
purchase of 4200-3Y-CAL.
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4200-SCS Condensed Specifications
Ramp Rate QUAsistatic C-V
Note: see the 4200 Technical Data Sheet for complete
specifications.
4200-SCS Chassis core capabilities
Integrate Intel Core2Duo processor, 2Gb Ram, 500Gb HDD,
1024X768 LCD, 9 slots, USB, Ethernet, GPIB, external monitor,
over 200W of measurement power.
4200-SMU Medium Power SourceMeasure Unit (2.1 watts max.)
Maximum Number of units per chassis: 9.
Voltage Range: В±200V, 4 ranges from 200mV to 200V
full scale.
Basic Voltage Accuracy: 0.01% measure, 0.02% source.
Voltage resolution: 0.1ВµV to 100ВµV.
Current Range: В±100mA, 7 ranges from 100nA to 100mA
full scale.
Basic Current Accuracy: 0.03% measure, 0.04% source.
Current Resolution: 0.1pA to 100pA.
With optional 4200-PA: Adds 5 low current ranges with
resolution down to 0.1fA.
4210-SMU High Power SourceMeasure Unit (21 watts max.)
Maximum number of units per chassis: Requires two
SMUs per channel.
Measurement Parameters: Cp, DCV, timestamp.
Ranging: 1pF to 1nF.
Ramp Rates: 0.1V/s to 1V/s.
DCV: В±200V.
Typical Accuracy: 5% at 1V/s ramp rate.
Very Low Frequency C-V (VLF-CV)
Maximum Units per Chassis: Requires two SMUs (either
Model 4200-SMU or 4210-SMU) and two Model 4200-PA
Remote Preamplifiers. Any two SMUs/PAs can be used for a
VLF C-VВ measurement.
Measurement Parameters: CP-GP, Cp-D, Cs-Rs, Cs-D,
R-jX, Z-Theta, DCV, Timestamp.
Frequency Range: 10mHz to 10Hz.
Measurement Range: 1pF to 10nF.
Typical Resolution: 3.5 digits, minimum typical 10fF.
AC Signal: 10mV to 3V rms.
DC Bias: В±20V on the High terminal, 1ВµAВ maximum.
4225-PMU Ultra-Fast I-V Unit
Maximum Number of units per chassis: 9.
Voltage Range: В±200V, 4 ranges from 200mV to 200V
full scale.
Basic Voltage Accuracy: 0.01% measure, 0.02% source.
Voltage resolution: 0.1ВµV to 100ВµV.
Current Range: В±1A, 8 ranges from 100nA to 1A full scale.
Basic Current Accuracy: 0.03% measure, 0.04% source.
Current Resolution: 0.1pA to 100pA.
With optional 4200-PA: adds 5 low current ranges with
resolution down to 0.1fA.
4210-CVU Multi-Frequency
Capacitance-Voltage Unit
Maximum number of units per chassis: 1 (consult
factory for more).
Measurement Parameters: Cp, Cs, G, R, D, Z, theta.
Frequency Range: 1kHz to 10MHz variable.
Measurement Ranges: 100fF to 100ВµF typical full scale.
Typical Resolution: 1aF, 1nanoSiemens, 0.001 degree.
AC Signal: 10mV to 100mV programmable.
DC bias: В±30V on either High or Low outputs (В±60V
differential), 10mA max current.
Optional 4200-CVU-PWR-PKG: Utilizes SMUs for В±200V
(400V differential) up to 300mA.
Model 4200-SCS specifications
Model 4200-SCS specifications
4200-3Y-CAL
1-year factory warranty on the base 4200-SCS
(including all SMUs and PAs) extended to 3 years
from date of shipment. Includes calibration
(reports compliant to ANSI Z540-1) and return
shipping.
3 cals within 3 years of purchase of the base
4200-SCS (including all SMUs and PAs). Before
and after data reports compliant with ANSI/NCSL
Z540-1. Does not cover Scope Cards or Pulse Gen
Cards.
Maximum Number of units per Chassis: 6.
Channels per unit: 2 independent or synchronized.
Voltage Range: В±40V, 2 ranges of 10V and 40V.
Basic Voltage Accuracy: 0.25%.
Voltage Resolution: 250ВµV, 750ВµV.
Current Range: В±800mA, 4 ranges from 100ВµA to 800mA.
Basic Current Accuracy: 0.25%.
Current Resolution: 14 bits, 10nA to 10mA.
With optional 4225-RPM Remote Amplifier/Switch:
Adds 3 low current ranges 100nA, 1ВµA, 10ВµA.
Core A/D converter: Two per channel, 4 per unit, 5ns,
200MHz, 14 bits, 1GB memory.
Core Voltage Slew rate: 1V/ns.
Best Voltage Pulse Width: 20ns to 10V.
Typical Current Measure Pulse Width: 60ns.
SEMICONDUCTOR
Services Available
4200-3Y-EW
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4200-SCS
Semiconductor Characterization System
DC I-V, C-V, and Pulse in One Test Environment
Accessories Supplied with each Model 4200-SMU
or 4210-SMU:
4200-MTRX-2 Two Ultra Low Noise SMU Triax Cables, 2m (6.6
ft). Not included with SMUs configured with a
4200-PA Remote PreAmp.
4200-TRX-2 Ultra Low Noise PreAmp Triax Cable, 2m (6.6 ft).
Two supplied for Ground Unit. Two supplied in
replacement of 4200-MTRX-2 cables for each SMU
configured with a 4200-PA.
4200-RPC-2 Remote PreAmp Cable, 2m (6.6 ft). One supplied
for each PreAmp.
236-ILC-3 Interlock Cable, 3m (10 ft)
Line Cord
NEMA 5-15P for 100-115VAC or CEE 7/7
(Continental European) for 240VAC
Accessories Supplied with EACH MODEL 4225-PMU
or 4220-PGU:
SMA to SMA 50W cables, 2m (4 ea.)
SMA to SSMC Y-Cable Assembly, 6 in (2 ea.)
Accessories Supplied with EACH MODEL 4225-RPM:
SMA to SMA 50W cable, 20 cm (1 ea.)
Triax to BNC Adapter (1 ea.)
BNC to SMA Adapter (1 ea.)
RPM Cable, 2.1 m (1 ea.)
OPTIONAL INSTRUMENTATION
4200-BTI-A Hardware and software ultra-fast package for
complete NBTI/PBTI reliability testing
4210-CVU Integrated C-V Instrument
4200-SMU Medium Power Source-Measure Unit for 4200-SCS.
100mA to 100fA, 200V to 1ОјV, 2 Watt
4210-SMU High Power Source-Measure Unit for 4200-SCS. 1A
to 100fA, 200V to 1ОјV, 20 Watt
4200-PA Remote PreAmp Option for 4200-SMU and 4210SMU, extends SMU to 0.1fA resolution
4220-PGU
High Voltage Pulse Generator
4225-PMU
Ultra-Fast I-V Module
4225-RPM
Remote Amplifier/Switch
SEMICONDUCTOR
OPTIONAL SWITCHING SYSTEMS AND CARDS
Systems
707B
6-slot Switching Matrix Mainframe
708B
Single-slot Switching Matrix Mainframe
Cards
7072
7072-HV
7173-50
7174A
8Г—12, Semiconductor Matrix Card
8Г—12, High Voltage, Semiconductor Matrix Card
4Г—12, Two-Pole, High Frequency, Matrix Card
8Г—12, High Speed, Low Leakage Current, Matrix Card
Cables and Cable Sets
NOTE: All 4200-SCS systems and instrument options are
supplied with required cables, 2m (6.5 ft.) length.
CA-19-2 BNC to BNC Cable, 1.5m
CA-404B SMA to SMA Coaxial Cable, 2m
CA-405B SMA to SMA Coaxial Cable, 15cm
CA-406B SMA to SMA Coaxial Cable, 33cm
CA-446A SMA to SMA Coaxial Cable, 3m
CA-447A SMA to SMA Coaxial Cable, 1.5m
CA-451A SMA to SMA Coaxial Cable, 10.8cm
CA-452A SMA to SMA Coaxial Cable, 20.4cm
236-ILC-3 Safety Interlock Cable, 3m
237-ALG-2 Low Noise Triax Input Cable terminated with 3
alligator clips, 2m
4210-MMPC-C Multi-Measurement (I-V, C-V, Pulse) Prober Cable
Kit for Cascade Microtech 12000 prober series
4210-MMPC-S Multi-Measurement (I-V, C-V, Pulse) Prober Cable
Kit for SUSS MicroTec PA200/300 prober series
4200-MTRX-* Ultra Low Noise SMU Triax Cable: 1m, 2m, and 3m
options
4200-PRB-C SMA to SSMC Y Cable with local ground
4200-RPC-* Remote PreAmp Cable: 0.3m, 2m, 3m, 6m options
4200-TRX-* Ultra Low Noise PreAmp Triax Cable: 0.3m, 2m,
3m options
7007-1
Double-Shielded Premium GPIB Cable, 1m
7007-2
Double-Shielded Premium GPIB Cable, 2m
OPTIONAL ACCESSORIES (continued)
Remote PreAmp Mounting Accessories
4200-MAG-BASE Magnetic Base for mounting 4200-PA on a
probe platen
4200-TMB
Triaxial Mounting Bracket for mounting
4200-PA on a triaxial mounting panel
4200-VAC-BASE Vacuum Base for mounting 4200-PA on a
prober platen
Computer Accessories
4200-MOUSE
Microsoft Ambidextrous 2 Button Mouse
(Note: A pointing device is integrated with the
4200-SCS keyboard.)
Software
ACS-BASIC
Component Characterization Software
Drivers
4200ICCAP-6.0 IC-CAP Driver and Source Code for 4200-SCS:
UNIX/Windows (shareware only)
Other Accessories
EM-50A
Modified Power Splitter
TL-24 SMA Torque Wrench
4200-CART
Roll-Around Cart for 4200-SCS
4200-CASE
Transport Case for 4200-SCS
4200-MAN
Printed Manual Set
Adapter, Cable, and Stabilizer Kits
4200-CVU-PWR CVU Power Package for В±200V C-V
4200-CVU-PROBER-KIT
Accessory Kit for connection to popular
analytical probers
4200-PMU-PROBER-KIT
General Purpose Cable/Connector Kit. For
connecting the 4225-PMU to most triax and
coax probe stations. One kit required per 4225PMU module.
4200-Q-STBL-KITAddresses oscillation when performing pulse
I-V tests on RF transistors
Fixtures
8101-4TRX 4-pin Transistor Fixture
8101-PIV Pulse I-V Demo Fixture
LR8028 Component Test Fixture
Cabinet Mounting Accessories
4200-RM Fixed Cabinet Mount Kit
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OPTIONAL ACCESSORIES
Connectors and Adapters
CS-565 Female BNC to Female BNC Adapter
CS-701 BNC Tee Adapter (female, male, female)
CS-719 3-lug Triax Jack Receptacle
CS-1247 SMA Female to BNC Male Adapter
CS-1249 SMA Female to SMB Plug Adapter
CS-1251 BNC Female to SMB Plug Adapter
CS-1252 SMA Male to BNC Female Adapter
CS-1281 SMA Female to SMA Female Adapter
CS-1382 Female MMBX Jack to Male SMA Plug Adapter
CS-1390 Male LEMO Triax to Female SMA Adapter
CS-1391 SMA Tee Adapter (female, male, female)
CS-1479 SMA Male to BNC Male Adapter
237-BAN-3A
Triax Cable Center Conductor terminated in a
safety banana plug
237-BNC-TRX Male BNC to 3-lug Female Triax Adapter
237-TRX-BAR 3-lug Triax Barrel Adapter (female to female)
237-TRX-T
3-slot Male to Dual 3-lug Female Triax Tee
Adapter
7078-TRX-BNC 3-Slot Male Triax to BNC Adapter
7078-TRX-GND 3-Slot Male Triax to Female BNC Connector
(guards removed)
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Model 4200-SCS specifications
Model 4200-SCS optional instrumentation and accessories
Optional Instrumentation and Accessories
SUPPLIED ACCESSORIES
Accessories Supplied with each Model 4210-CVU:
CA-447A SMA Cables, male to male, 100W, 1.5m (5 ft.) (4)
CS-1247 Female SMA to Male BNC Adapters (4)
CS-701 BNC Tee Adapters (2)
TL-24 SMA Torque Wrench
• Best-in-class test speed allows
faster, more complete device
characterization
–– Begin measuring BTI
degradation as soon as 30ns
after stress is removed
–– Measure transistor V T in less
than 1µs using ID–VG sweep
method
• Model 4225-RPM Remote
Amplifier/Switch
–– Switches automatically
between low-level precision
DC I-V (via standard
SMUs) and ultra-fast I-V
measurements with no need
for re-cabling
–– Improves single-pulse
source and measurement
performance by minimizing
cable parasitic effects and
increasing low current
sensitivity
• Best high-speed, low-current
measurement sensitivity
available in a single-box
integrated solution
–– Supports sub-microsecond
pulse characterization of
drain current at reduced drain
voltage, minimizing drainto-source fields that could
otherwise skew test results
–– Ensures the source/measure
instrumentation won’t be the
limiting factor when making
low-level measurements
–– Detects degradation trends
sooner during the test,
reduces the time needed to
perform process reliability
monitoring
• Simple, predictable
interconnect scheme prevents
measurement problems due to
incorrect DUT connections
The Model 4200-BTI-A Ultra-Fast BTI Package
combines Keithley’s advanced DC I-V and ultrafast I-V measurement capabilities with automatic
test executive software to provide the most
advanced NBTI/PBTI test platform available in
the semiconductor test industry. The 4200-BTI-A
package, which builds on the Model 4200-SCS
semiconductor parameter analyzer’s powerful
test environment, includes all the instruments,
interconnects, and software needed to make
the most sophisticated NBTI and PBTI measurements on leading-edge silicon CMOS technology:
• One Model 4225-PMU Ultra-Fast I-V Module
• Two Model 4225-RPM Remote
Amplifier/Switches
Applications
• Single-Pulse Charge Trapping/
high-k dielectric characterization
• Silicon-On-Insulator testing
• LDMOS/GaAs isothermal
characterization
• Flash RTS ID
• Phase-change random access
memory (PCRAM) testing
• Ultra-fast NBTI characterization
• Charge pumping measurements
• Thermal impedance
characterization
• Automated Characterization Suite
(ACS)В Software
• MEMs capacitor testing
• Ultra-Fast BTI Test Project Module
• Random telegraph signal (RTS)
CMOS
• Cabling
• Charge-based capacitance
measurement (CBCM)Materials
testing for scaled CMOS, such as
high-k dielectrics
• NBTI/PBTI reliability tests
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Hardware and software package optimized for NBTI/PBTI characterization
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
M E A S U R E
O F
SEMICONDUCTOR
Hardware and software package optimized for NBTI/PBTI characterization
4200-BTI-A
C O N F I D E N C E
63
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
• Optional Multi-Measurement
Performance Cables (MMPC)
optimize measurement
performance of configurations
that combine DC I-V, C-V, and
ultra-fast I-V capabilities
Model 4225-PMU Ultra-Fast I-V Module
This module is the hardware core of the ultra-fast I-V measurement capability essential for characterizing NBTI and PBTI degradation in microseconds, allowing for more accurate lifetime measurements
for Designed-In Reliability (DIR) that support modeling for device and circuit design. It integrates a
sophisticated two-channel waveform generator with high-speed voltage and current measurement
capabilities, a deep measurement buffer, and a real-time test execution engine.
• ACS software supports building
complex test sequences
including up to 20 measurement
sequences and full prober
integration
Unlike traditional pulse generation solutions, the Model 4225-PMU can be programmed to output
the complex waveforms required in ultra-fast BTI testing. And, unlike traditional Arbitrary Waveform
Generators (AWGs), the waveforms’ duration and complexity aren’t limited by bitmap or memory
depth. Instead, the 4225-PMU employs a high-level waveform description language that uses the
concept of segments, segment libraries, and looping. In addition, the waveform description specifies exactly when measurements must be made during the waveform and the type of measurement
to be made.
–– DC I-V and ultra-fast I-V
measurements can be easily
integrated into a stressmeasure sequence
–– Degradation and recovery
behaviors can be
characterized using either AC
or DC stress
–– Combine spot measurements
with precision SMU sweeps in
pretesting and posttesting
Spot, step sweep, smooth sweep, and sample measurement types are supported and multiple measurement types can be linked to form a test sequence. The programmable sample period can be
set as fast as 5ns, so most measurements will include multiple samples. The system’s real-time test
execution engine automatically calculates the mathematical mean of the samples, which reduces
the volume of data that must be transferred and parsed during the course of the test. The resulting
measurements are streamed back to the high-level test module for near-real-time analysis and test
termination.
For additional information on this module’s capabilities and specifications, consult the Model
4225-PMU data sheet.
–– Incorporate single pulse
charge trapping (SPCT)
measurements into longer
stress-measure sequences
• Support for handling large
data sets required in device
reliability modeling and process
monitoring applications
SEMICONDUCTOR
• Support for hot chucks and fully
and semi automatic probers,
including wafer maps, waferand cassette-level sample plans
The Model 4225-PMU/4225-RPM’s combination of superior speed and sensitivity allow
characterizing voltage threshold (V T) directly with high-speed ID–VG sweeps. Measuring V T
directly makes it unnecessary to correlate the single-point ID measurement to actual V T levels.
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C O N F I D E N C E
Hardware and software package optimized for NBTI/PBTI characterization
Hardware and software package optimized for NBTI/PBTI characterization
4200-BTI-A
4200-BTI-A
Ultra-Fast BTI Package for the
Model 4200-SCS (includes
one Model 4225-PMU
Ultra-Fast I-V Module, two
Model 4225-RPM Remote
Amplifier/Switches, UltraFast BTI Test Project
Module, and one copy of the
Automated Characterization
Suite (ACS) software
Accessories Supplied
For the 4225-PMU:
SMA to SMA 50W cables, 2m (4 ea.)
SMA to SSMC Y-Cable Assembly,
6 in (2 ea.)
Accessories Available
4210-MMPC-C
Multi Measurement Performance Cables for
Cascade probe stations using SSMC probe
pin connections. One kit required per
manipulator.
4210-MMPC-S Multi Measurement Performance Cables
for Suss probe stations using SSMC probe
pin connections. One kit required per
manipulator.
4225-PMU
Extra Ultra-Fast I-V Module
4225-RPM
Extra Remote Amplifier/Switch. Up to two
of these units can be used with a single
4225-PMU module.
4200-PMU-PROBER-KIT
General Purpose Cable/Connector Kit. For
connecting the 4225-PMU to most triax and
coax probe stations. One kit required per
4225-PMU module.
Model 4225-RPM Remote Amplifier/Switch
This module is designed to maximize the Model 4225-PMU’s current measurement sensitivity. The
4225-RPM’s independent force and sense connections to the DUT maximize its pulse, DC, and C-V
performance. Its built-in switching capabilities allow the Model 4200-SCS to switch automatically
between making ultra-fast I-V measurements with the 4225-PMU and DC I-V measurements with the
system’s 4200-SMU and 4210 source-measure units (SMUs).
Model 4225-RPM modules are required for ultra-fast BTI testing; if the 4225-PMU module is used
without them, it employs a recursive technique to compensate for cable influences such as load
line effects and is typically used for isothermal I-V testing. This recursive technique is inappropriate
for use in BTI reliability applications in which measurements must be both as short as possible and
highly temporally deterministic in order to minimize the relaxation effects.
By making it possible to locate the pulse source close to the device under test (DUT), the 4225-RPM
helps minimize the cable length and corresponding cable parasitic effects. The shorter cables result in
reduced cable capacitance, reduced load-line effects, and reduced source overshoot. Placing the pulse
source and high speed measurement circuits near the DUT allows the cable length to be reduced so
that the round-trip propagation delay is shorter than the rise or fall time of the desired pulse.
For additional details and specifications on the Model 4225-RPM, consult the Model 4225-PMU
data sheet.
Speed and Sensitivity
Bias temperature instability is a highly dynamic phenomenon that requires sensitive, high-speed
measurements for accurate characterization. Assuming all other factors are constant, measurement
physics largely defines the relationship between measurement speed and sensitivity. When making
sub-millisecond measurements, all sources of noise must be taken into account; for sub-microsecond
applications, quantum effects can’t be ignored. The 4200-BTI-A package provides the optimal combination of measurement speed and sensitivity for ultra-fast BTI testing because it’s engineered to
approach the limits of measurement physics while ensuring high ease of use. The package is optimized to provide accurate ultra-fast results without the use of RF structures and interconnects.
Reduce Unwanted Source-Drain Fields
To eliminate hot carrier injection effects or unwanted charge displacement during BTI testing,
minimizing drain-to-source fields is critical. All BTI characterization techniques involve measuring
drain current with a voltage applied to the drain. Given that the drain current is proportional to the
Define stress timing and stress conditions easily using familiar parameters like timing –
log, linear, custom list; measurements per decade; AC or DC stress; optional recovery test
sequence; and test sample rate (speed).
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Hardware and software package optimized for NBTI/PBTI characterization
Ordering Information
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
SEMICONDUCTOR
Hardware and software package optimized for NBTI/PBTI characterization
4200-BTI-A
C O N F I D E N C E
65
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
Disadvantages of BTI systems developed in house
Until now, some researchers have been forced to configure their own ultra-fast BTI test systems.
These in-house-developed systems typically combine a pulse generator or arbitrary waveform generator with an oscilloscope equipped with current probes or some type of transimpedance amplifier to help measure low current. Although it is possible to build a BTI system that is suitable for a
very specific set of electrical conditions if the instruments and interconnect are carefully selected,
several major technical challenges remain:
• Waveform generation. Standard pulse generators and arbitrary waveform generators are
designed to generate a waveform on a fixed recurring interval, rather than the Log(time) scale
required for most reliability tests, including NBTI and PBTI testing.
• Measurement timing and data storage. Although oscilloscopes can be configured to trigger based on a waveform feature (such as a falling edge, for example), they are not designed
to store samples selectively for specific portions of the waveform. This makes it necessary
to store very large data sets for postprocessing. Only the most expensive oscilloscopes or
those with costly memory expansion options can store enough data to compensate for these
В­shortcomings.
• Precision, accuracy, and sensitivity. Oscilloscopes, current probes, and transimpedance
amplifiers all have independently defined performance specifications and they are not necessarily optimized to work together. It is often very difficult to combine these components in a
way that provides optimal performance across a wide dynamic range in order to achieve precise and accurate current measurements at high speeds.
• Interconnect. Systems built in house typically use splitters and bias tees, which limit the performance of the test setup. For example, a bias tee might limit bandwidth from 100ns to 10µs.
Although this is suitable for high speed measurements, it prevents making any meaningful
prestress and poststress DC measurements as part of the stress–measure sequence. It also prevents making measurements in the intermediate range of 10µs to DC.
• Test control and data management. Traditional oscilloscopes don’t support data streaming,
so results transfer must wait until the test ends. Once the test is complete, massive amounts of
data must be transferred to the control computer for postprocessing, which requires parsing
complex waveforms into individual test results, followed by further reduction of the data into
actual measurements.
SEMICONDUCTOR
• Test termination. Given that the test results can’t be analyzed until the data is transferred
from the oscilloscope, the test duration must be determined prior to test initiation. This makes
it impossible to terminate the test based in parametric shifts or to detect catastrophic failures
in real time.
• Automation. Wafer- or cassette-level automation requires control of both the test instruments
and the wafer probe station, which systems built in house typically wouldn’t provide. Also,
incorporating sophisticated features like conditional test termination would add considerable
complexity to the custom software necessary to run a system of this type.
• Higher channel count. Even for an in-house-built system that works well, pressures to
increase the channel or test system count may arise. Typical test system maintenance issues
such as calibration, operation, and correlation related to these custom setups can easily consume a disproportionate amount of the available resources.
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G R E A T E R
dВ­ rain-to-source field, the more sensitive the
drain current measurement is, the lower the
required drain voltage must be. The 4200-BTI-A
package’s superior low current measurement
capability allows the use of lower drain voltages
to produce more accurate results.
Reduced Relaxation Time
The 4225-BTI-A package’s superior speed and
sensitivity allow making degradation measurements faster than any other commercial test
system available. Single-point ID spot measurements can be completed in less than 1Вµs and
ten-point ID-VG step sweeps can be made in less
than 10Вµs. A sub-microsecond smooth sweep
can be performed in less than 1Вµs.
Software
The Ultra-Fast BTI test software module brings
together the measurement capabilities of the
Model 4225-PMU and 4225-RPM through an
intuitive interface that doesn’t compromise
test flexibility. It makes it easy to define stress
timing, stress conditions, and a wide range
measurement sequences from spot ID, On-TheFly (OTF), or ID-VG sweeps. The test module
allows measuring recovery effects as well
as degradation. It also offers prestress and
poststress measurement options that incorporate
the Model 4200-SCS’s DC SMUs for highprecision low-level measurements.
Stress Settings
The Ultra-Fast BTI Test Module employs familiar
parameter setting for building stress–measure
timing sequences. The stress set-up screen
makes defining log or linear timing or building
a custom list of time intervals to trigger intrastress measurements both easy and quick.
Intuitive Test Sequence Development
The Ultra-Fast BTI Test Module makes creating
a powerful test sequence as uncomplicated as
selecting one or more measurement types, then
entering the appropriate values for voltage levels
and measurement parameters in the intuitive
interface. No coding or script writing is required.
Select from four measurement types and chain
up to 20 measurements together to form a readyto-run measurement sequence:
• Spot. The spot measurement is a single measurement made while the gate and drain are
pulsed. The measurement result is the mean
value of the samples taken after the drain
settles and before the pulse ends.
• Step Sweep. The step sweep is very similar
to a conventional DC SMU sweep, in which
M E A S U R E
O F
C O N F I D E N C E
Hardware and software package optimized for NBTI/PBTI characterization
Hardware and software package optimized for NBTI/PBTI characterization
4200-BTI-A
each step in the sweep includes a settling period and an integration (or
averaging) period.
• Smooth Sweep. The smooth sweep does not include settling times, and
the signal is sampled continuously throughout the sweep.
• Sample. A sample measurement is much like the smooth sweep measurement, except that it is performed at a constant set of voltage conditions on the gate and drain.
Vgate
Vdrain
Vdrain
1Вµs
Vstress
Test Automation Speeds Data Sample Acquisition
The ability to acquire large, statistically significant samples of data quickly
is key to reliability modeling. Advances in ultra thin film transistors have
further increased the required sample size due to the increasingly random
nature of the defects in these devices. As a result, it’s critical to use a test
environment that supports wafer- and cassette-level automation. This environment must also be capable of handling the extremely large data sets
associated with reliability testing. The test environment provided with the
Automated Characterization Suite software supports full automation capabilities compatible with both semi and fully automatic probe stations.
V
I
Idrain
Measurement Types
Interconnect
The 4200-BTI-A package provides all the cabling and connectors required
to connect to standard coaxial probe manipulators. For enhanced measurement accuracy, many users add an optional multi-measurement performance cable kit that connects the Model 4200-SCS to a prober manipulator, simplifying switching between DC I-V, C-V, and ultra-fast I-V testing
configurations. This kit eliminates the need for re-cabling, as well as maximizing signal fidelity by eliminating the measurement errors that often
result from cabling errors. Versions engineered
for Cascade Microtech and SUSS MicroTec probers are available. There’s also a general-purpose
kit for connecting the 4225-PMU to other triaxial
and coaxial probe stations.
Spot
Smooth Sweep
Triangle
Step Sweep
The Ultra-Fast BTI test software module supports spot, step sweep,
smooth sweep, and sample measurement types. Each type’s timing
is defined by the test sample rate and the individual measurement
settings. The software module also provides control over the voltage
conditions between each element in the test sequence, for maximum flexibility and ease of use, even when defining complex test
В­sequences.
Hardware and software package optimized for NBTI/PBTI characterization
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
Additional Applications
The Model 4225-PMU’s ultra-fast I-V capabilities
are not limited to low-В­voltage pMOS and nMOS
reliability testing. It can drive up to 800mA or
40V with pulse widths from 30ns to several
seconds in length. This remarkable dynamic
range is suitable for a wide variety of other
В­applications.
Keithley’s Model 4200-SCS replaces a variety of
electrical test tools with a single, tightly integrated characterization solution that’s ideal for a
wide variety of applications. To assure customers
of the ongoing viability of their systems, Keithley
has continually enhanced the system’s hardware
and software. This ongoing commitment ensures
a cost-effective system upgrade path to address
new testing needs as they arise. That means
Model 4200-SCS users will never have to buy a
new parametric analyzer because the old one
is obsolete. The Model 4200-SCS is engineered
to adapt readily to the industry’s changing test
needs—making our customers’ capital investments stretch further and improving ROI.
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ACS software provides wafer- and cassette-level automation capabilities compatible with semi
and fully automatic probe stations.
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Hardware and software package optimized for NBTI/PBTI characterization
4200-BTI-A
C O N F I D E N C E
67
4200-BTI-A
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
Specifications
The 4225-RPM provides lower current measurement ranges to
the 4225-PMU.
• Low current measure ranges supports wide range of measurements, from nanotechnology to BTI (Bias Temperature
Instability) on leading-edge CMOS devices
• This is a single-channel accessory; order two Model 4225RPMs to support the two channels of the Model 4225-PMU.
• Supports switching to the Model 4200-SCS’s SMUs or 4210CVU, allowing for a wide range of tests without re-cabling.
• Built-in bypass mode allows access to the Model 4225-PMU’s
higher current measurement ranges.
PULSE/LEVEL 1
VOUT
Accuracy 2 into open load
Resolution
Output Connectors
Baseline Noise
Overshoot/Pre-shoot/Ringing 3
4225-PMU with
4225-RPM
–10 V to +10 V
В±(0.5% В±10 mV)
< 0.5 mV
Triaxes, source and sense
В±(0.39% + 1 mV) RMS typical
В±2% of amplitude В±20 mV
4225-RPM REMOTE AMPLIFIER/SWITCH (must be used in conjunction with 4225-PMU)
Typical Minimum Timing Parameter for current measurement
Range
100 nA
Recommended Minimum
134 Вµs
Pulse Width 4, 5
Recommended Minimum
10 Вµs
Measure Window 5
В±(0.5% + 1nA)
Accuracy (DC)
Recommended Minimum
1 Вµs
Transition Time 5, 6
200 pA
Noise 5, 7
100 Вµs
Settling Time 5, 8
1 ВµA
10 ВµA
100 ВµA
1 mA
10 mA
20.4 Вµs
8.36 Вµs
1.04 Вµs
370 ns
160 ns
1.64 Вµs
1 Вµs
130 ns
40 ns
20 ns
В±(0.5% + 1nA) В±(0.5% + 30nA) В±(0.5% + 100nA) В±(0.5% + 1ВµA) В±(0.5% + 10ВµA)
360 ns
360 ns
40 ns
30 ns
20 ns
2 nA
15 Вµs
5 nA
6 Вµs
50 nA
750 ns
300 nA
250 ns
1.5 ВµA
100 ns
Voltage Measure
В±10V
Recommended Minimum Pulse Width 4, 5: 160ns.
Recommended Minimum Measure Window 5: 20ns.
Accuracy (DC): 0.25% + 10mV.
Recommended Minimum Transition Time 5, 6: 20ns.
Noise 5, 7: 1mV.
Settling Time 5, 8: 100ns.
Notes
1. Performance at the triax output connectors of the 4225-RPM when using a 2m RPM interconnect cable between the 4225-PMU and 4225-RPM Remote
Pulse Measure unit.
2. 100mV to 10V.
3. Typical, with transistion time of 100ns (0-100%).
4. Recommended minimum pulse width = (Setting Time)/0.75
5. Typical values, into an open.
6. Recommended rise/fall time to minimize overshoot.
7. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
8. Time necessary for the signal to settle to the DC accuracy level. (Example: the 10mA measurement range’s settling time refers to the period required for
the signal to settle to within 0.35% of the final value. Calculated as Accuracy = 0.25% + 10ВµA = 0.25% + (10ВµA/10mA) = 0.25% + 0.1% = 0.35%).
SEMICONDUCTOR
All specifications apply at 23В° В±5В°C, within one year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
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A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Model 4200-BTI-A specifications
Model 4200-BTI-A specifications
4225-RPM Remote Amplifier/Switch
Optional Accessory for the 4225-PMU
Hardware and software package optimized for NBTI/PBTI characterization
Ultra-Fast NBTI/PBTI Package
for the Model 4200-SCS
This top-down view of a Cascade Microtech analytical probe station illustrates best practices
for interconnecting the Model 4225-RPM Remote Amplifier/Switch to the prober using the blue
Multi-Measurement Performance cables.
SEMICONDUCTOR
Hardware and software package optimized for NBTI/PBTI characterization
4200-BTI-A
This closeup of two Model 4225-RPMs highlights the DC SMU, C-V, and ultra-fast I-V cable
connections.
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G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
69
S530
Parametric Test Systems
• Semiconductor industry’s most
cost-effective fully automatic
parametric testers
• Optimized for use in
environments with a broad
mix of products, where high
flexibility and system speed are
critical
–– Low current configuration
supports measurement of low
current characteristics such as
sub-threshold leakage, gate
leakage, etc.
–– High voltage configuration
is optimized for monitoring
processes used for GaN, SiC,
and Si LDMOS power devices
• Compatible with popular fully
automatic probe stations
• All systems configured with
high power 20W SMUs:
[email protected], [email protected],
[email protected] (1000V range
available only on high voltage
S530 systems)
• Cabled-out tester configuration
maximizes prober interface
flexibility and expands voltage
range
–– Compatible with Keithley’s
Model 9139A Probe Card
Adapter
–– Supports reuse of existing
five-inch probe card libraries
SEMICONDUCTOR
• Proven instrumentation
technology ensures high
measurement accuracy and
repeatability in both the lab
and the fab
Keithley’s S530 Parametric Test Systems can address all the DC and C-V measurements required in
process control monitoring, process reliability monitoring, and device characterization because they
are built on proven sourcing and measurement technology.
Optimized for High-Mix Test Environments
S530 Parametric Test Systems are designed for production and lab environments that must handle a
broad range of devices and technologies, offering industry-leading test plan flexibility, automation,
probe station integration, and test data management capabilities. Keithley has brought more than 30
years of expertise in delivering a wide range of standard and custom parametric testers to customers
around the world to the design of these test solutions.
Simple Software Migration and High Hardware Reuse
S530 systems are designed with capabilities that speed and simplify system startups and maximize
reuse of your existing test resources. For example, the software that controls these systems is compatible with many new and legacy automatic probe stations, so you may be able to eliminate the cost of a
new one. In addition, the S530’s cabled-out configuration typically allows continued use of your existing probe card library. Several optional applications services can help you keep getting the full value
of your existing prober and probe card investments. Keithley can also provide assistance to speed the
development, conversion, or repurposing of your existing test recipes for use with S530 systems.
Semiconductor Industry’s Most Powerful Standard Parametric Test System
Two different system configurations are available to address different parametric test application
environments. The S530 Low Current System, which is configurable from two to eight source measurement unit (SMU) channels, provides sub-picoamp measurement resolution and low current guarding all the way to the probe card, which makes it ideal for characterizing sub-micron silicon MOS
technologies. The S530 High Voltage System, configurable from three to seven SMU channels, can
source up to 1000V for use in the difficult breakdown and leakage tests that automotive electronics
and power management devices demand.
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Parametric test systems
Parametric test systems
• Choice of low current or high
voltage system configurations
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
S530
Table 1. S530 System Selector Guide
20V
200V
Key Range and Offset Performance
1A
1E+0
100mA
1E-3
1E-6
1E-9
1E-12
1E-3
1E-2
1E-1
1E0
1E+1
1E+2
1E+3
1000V
Optimized for
• Source up to 1000V
power electronics
or 1A
and display
• Measure current with
technologies that
atto-amp resolution
require testing at
with pico-amp offset1
high voltages
• Measure voltage with
microvolt resolution
and millivolt offset
20V
S530
High
Voltage
System
200V
Voltage Source (V)
1A
1E+0
100mA
20mA
1E-3
1E-9
1E-12
1E-3
1E-2
1E-1
1E0
1E+1
1E+2
1E+3
Voltage Source (V)
1. Using 200V SMU. The 1000V SMU provides 10pA resolution with nanoamp-level offset.
All Series S530 systems are equipped with Keithley’s proven high power SMUs, which provide up to
20W source or sink capability on both the 200V and 20V ranges. This level of power is essential for
complete characterization of the high power devices and circuits prevalent in today’s mobile devices.
Whether the application is testing LDMOS Si or GaN BJTs, this higher power capability provides greater visibility into device performance. That means S530 systems can handle high power device testing
without compromising the low current sub-picoamp sensitivity needed to monitor mainstream device
processes. In contrast, competitive parametric test systems are limited to medium power 2W SMUs,
so they cannot match the S530 systems’ range of applications.
Full Kelvin Standard Configurations
All too often, currents higher than a few milliamps lead to measurement errors as a result of voltage
drops across the interface cables and pathways. To prevent this drop in measurement integrity, both
the low current and high voltage S530 systems provide full Kelvin measurements (also known as
remote voltage sense) at the probe card. Full Kelvin measurements are particularly critical to ensuring measurement accuracy given the 20W capability of the high power SMUs used in S530 systems.
For test environments in which minimizing system cost is of higher importance than absolute accuracy, S530 testers can be configured as non-Kelvin systems.
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System Architecture
Each S530 system configuration is made up of
five layers:
• Instruments layer – This layer includes the
SMUs, the capacitance-voltage instrumentation (CVU), and any auxiliary instruments
configured into the system.
High Voltage SMU
1E-6
Industry’s Most Powerful High
Voltage Parametric Test System
The S530 High Voltage Semiconductor
Parametric Test System is the only parametric
tester available that’s capable of full Kelvin high
voltage performance on up to 24 pins, a capability that’s invaluable for characterizing today’s
higher power devices. The system incorporates
a high voltage SMU that sources up to 1000V at
20mA (20W max.). Two high voltage pathways
allow making either direct high-side current
measurements (in which a single SMU is used
to both source and measure the high side of the
DUT) or higher sensitivity low-side low current
measurements (in which one SMU is used to
source high voltage to the high side of the DUT
and a different SMU is used to force 0V and
measure the current of the low side).
G R E A T E R
• Pathways layer – S530 systems provide high
fidelity signal pathways that can be dynamically reconfigured to allow any instrument
to be connected to any pin or set of pins
В­duringВ test.
• Cable interface layer – All system interconnects are constructed of fully shielded and
guarded triaxial low leakage, high voltage cables to ensure higher measurement
В­integrity.
• Probe card adapter (PCA) layer – This layer
extends the shield and guard to the probe
card to ensure measurement integrity.
Also, the PCA provides auxiliary inputs for
instruments that require direct access to the
probe card and must bypass the signal path
switchВ matrix.
• Probe card layer – This layer includes
the custom cards supplied by your probe
cardВ В­В­vendors.
M E A S U R E
O F
SEMICONDUCTOR
Current Measure (A)
Description
Ideal for both
mature and
emerging
technologies
that demand
pico-amp current
measurement
capability
Current Measure (A)
Parametric test systems
S530
Low
Current
System
Typical Use
Cases/Settings
• Source up to 200V
or 1A
• Measure current with
atto-amp resolution
with pico-amp offset
• Measure voltage with
microvolt resolution
and millivolt offset
Parametric test systems
Parametric Test Systems
C O N F I D E N C E
71
S530
Parametric Test Systems
Parametric test systems
Table 2. S530 Pathway Performance
Key
Maximum Maximum
Characteristics Voltage
Current Comments
Limited to 200V max. Provides best low-level signal
Ultra low
200V
1A
Low Current I‑V 1
performance and excellent C-V performance.
leakage
Supports low-level measurements but not quite as low as
2
1300V
1300V
1A
High Voltage I‑V
the LowВ Current pathway.
Suitable for the majority of parametric tests, except for
2
200V
1A
General-Purpose I‑V
very low current and/or high voltage tests.
Excellent C-V performance but not suitable for DC
200V
1A
C‑V 2
I‑V measurements.
1. Available only on low current system.
2. Available only on high voltage system.
Pathway Type
down. Each SMU also measures both voltage
and current while sourcing, which ensures that
parameter calculations reflect actual conditions
rather than simply the programmed conditions.
Capacitance-Voltage (C-V) Unit
All S530 systems can be equipped with an
optional high speed capacitance-voltage measurement unit for C-V measurements up to 1MHz
to any pin. This C-V unit can measure a 10pF
capacitor at 1MHz with 1% accuracy.
Ground Unit (GNDU)
All source measurement units are referenced
to the ground unit or GNDU. During a test, the
GNDU provides both a common reference and
a return path for current sourced by the SMUs.
The GNDU signal is formed by combining all the
Source LO and Sense LO signals and referencing
them to system ground. The system can easily
be configured for a range of ground system
configurations to accommodate various probe
station ground schemas.
Table 3. System Capabilities Comparison
Pin Count
SMU Channels
Vmax
Imax
Vmin Resolution
S530
LowВ Current
Up to 60*
2 to 8
200V
1A
1ВµV
Imin Resolution
1fA
CVU
GNDU
SMU 6
SMU 4
SMU 5
SMU 1
SMU 2
Instruments
SMU 3
System Cabinet
Sense Card
(Kelvin configs.)
Force Card
Pin Card
Pin Card
...
...
...
...
...
...
...
...
Switch
Matrix
“Paths”
CVU
1kHz to 1MHz
*Maximum of 24 pins with full-Kelvin option.
Instrument Card
Cable
Probe Card
Adapter
PIN 46
PIN 47
PIN 48
PIN 44
PIN 45
PIN 41
PIN 42
PIN 43
PIN 40
PIN 37
PIN 39
PIN 38
PIN 11
PIN 12
PIN 9
PIN 8
PIN 10
PIN 6
PIN 7
PIN 4
PIN 3
PIN 5
PIN 1
Probe Card
PIN 2
System Spec
“Plane”
SEMICONDUCTOR
Probe Station
Standard 9139A Probe Card Adapter
The standard probe card adapter (PCA) for
the S530 parametric test systems is the proven
Model 9139A. Several key features and performance advantages have made it the industry’s
leading choice of PCA for more than 20 years:
• Low offset currents that maximize low
current performance.
Every S530 system is made up of five layers: instruments, pathways, cable interface, probe
card adapter, and probe card.
• Low noise performance that helps ensure the
integrity of low-level voltage measurements.
Proven SMU Technology
All source measurement units (SMUs) built into S530 Parametric Test Systems are based on Keithley’s
production-qualified instrument technology to ensure high measurement accuracy and repeatability
and extended hardware life. The SMUs are four-quadrant sources, so they can source or sink current
or voltage. In addition to precision sourcing circuits, they include programmable limits (compliance)
across all ranges, which helps protect both devices and probe tips from damage due to device break-
• Minimally invasive, low profile design that
allows easy camera integration.
• 64 inputs – Configurable to support both
standard cable connections from the tester
and auxiliary inputs for instruments that
bypass the pathway matrix.
• 500V pin-to-pin isolation (1000V when
connecting only to every other pin).
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S530
HighВ Voltage
Up to 60*
3 to 7
1000V
1A
1ВµV
1fA
(100pA at 1000V)
1kHz to 1MHz
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Parametric test systems
Signal Pathways
The core of each S530 test system is a set of high fidelity signal pathways that direct signals between
instruments and test pins. The performance of these pathways directly influences the performance
of the test system as a whole by setting upper current and voltage ranges, and limiting low-level
measurements due to current offsets. The S530 has eight high fidelity pathways that can be used to
route instruments to pins dynamically. For example, up to eight SMUs can be routed to any pin (or
number of pins) at one time. The S530 Low Current System delivers uniform performance across all
eight pathways; the S530 High Voltage System provides two high voltage/low leakage pathways, four
general-purpose pathways, and two C-V pathways. Both system options support C-V measurements
up to 1MHz.
S530
Parametric Test Systems
Parametric test systems
PIN 64
PIN 62
PIN 63
PIN 60
PIN 61
...
PIN 58
PIN 17
PIN 16
PIN 15
PIN 13
PIN 14
PIN 11
PIN 12
PIN 9
PIN 10
PIN 8
PIN 6
PIN 7
PIN 4
PIN 5
PIN 3
PIN 1
PIN 2
Probe Card
PIN 59
...
Probe Card
Adapter
Probe Station
The Model 9139A PCA can be configured for auxiliary I/O connections, allowing instruments
to be connected to it directly, bypassing the switch matrix signal paths. This provides for
maximum bandwidth to the test structure with a minimum number of variables.
High flexibility cabled-out configuration
S530 systems are “cabled-out” configurations to provide the broad interconnect flexibility that highmix fab and lab environments demand. These systems can be interfaced to a variety of probing solutions, including high performance circular probe cards, cost-effective rectangular edge-connector
probe cards, and even special high performance cards for applications that involve extreme temperatures or demand high durability.
Table 4. S530 System Cabling Options
Cabling Options
Probe Card Type
Standard Keithley
Circular ceramic
9139A PCA (S400-type)
Custom Cabled to
Existing PCA Type
Unterminated Cables
No Cables
Features
Extends driven guard to
probe pin
Benefits
Superior low current measurements.
Supports up to 64 pins; easily configured for
auxiliary inputs for additional instrument
options
Typically for five-inch rectangu- Compatible with existing Reduces migration cost by reusing existing
lar probe cards using edge card probe card library
probe cards
connectors
Cables connected to pathway
Ready to cable to existing Provides recommended cable to optimize
output with unterminated
interface or fixture
system performance
cable ends
Custom probe card
No need to purchase a
Use cable system provided by custom probe
cable solution
card vendor
Alternative Probe Card
Adapters (PCAs)
Optional probe card adapters are available
for all S530 configurations. In the simplest
form, the edge connector used to interface to
a rectangular probe card (typically referred to
as five-inch probe cards) is a PCA. This type of
PCA provides the most cost-effective solution for
applications involving mid-range signal levels. If
desired, the Model 9139A PCA can be configured
into any S530 system as an option. This PCA is
designed for interfacing the system to circular
probe cards (from Keithley-approved vendors)
The Model 9139A Probe Card Adapter has been trusted by the industry for more than 10 years.
Its combination of low current performance and high voltage capability makes it the ideal
companion to the S530 Parametric Test Systems.
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G R E A T E R
Probe Cards
Unlike testhead-based systems, S530 systems
are easily adaptable for use with a wide range
of probe card types, so you likely won’t need to
replace your existing (and expensive) probe card
library. Although Keithley recommends the use
of the Model 9193A PCA and approved probe
card vendors, we recognize you have made a
major investment in your current cards. If probe
card reuse is critical to your capital equipment
strategy, consult an applications team member to
learn about connection options that can protect
your probe card investment.
System Software
Keithley’s S530 system software maximizes the
efficiency and flexibility of our system hardware,
bringing together all the key elements for automated parametric testing in a single integrated
package. Measurement routines and test plans
can be easily written, converted, or re-used,
helping you get up and running faster. That
simplifies using your S530 system effectively
in conjunction with existing test systems. S530
software includes all the key system software
operations:
• Wafer description
• Test macro development
• Test plan development
• Limits setting
• Wafer or cassette level testing with automatic
prober control
• Test data management
Engineer and Operator User Modes
S530 system software gives engineers full
system capability and software flexibility for
creating test plans. The tools provided help
engineers develop, validate, and debug core
measurement routines, test macros, and
comprehensive test plans. System software
administration and log-in capabilities make
specified tools and capabilities accessible only
to the engineers you designate. A separate user
interface is supplied exclusively for system
operators for test execution, blocking access
to core system set-up files. Alternatively, the
S530 system software provides a command
line interface so you can customize your own
operator interface.
M E A S U R E
O F
SEMICONDUCTOR
Auxiliary Connections
Cable
Parametric test systems
via pogo pin connections. Probe-station-specific
adapter plates can be specified during ordering
to ensure the Model 9139A’s compatibility with a
variety of popular probe stations.
To S530 Cabinet
C O N F I D E N C E
73
Parametric Test Systems
SEMICONDUCTOR
Parametric test systems
System Diagnostics and Reliability Tools
Diagnostics can be performed routinely to ensure the system is performing
as expected and won’t generate false failures or false passes. The S530
systems’ diagnostics capability verifies system functionality quickly
and easily. Key steps in the diagnostics process include configuration
verification, communications pathway tests, signal pathway testing, and
SMU source-measure tests. Even the cable interface and PCA are included
in the diagnostics process to ensure complete system functionality. This
diagnostics process is designed to detect and localize a wide range of
system problems, speed troubleshooting, and maximize uptime.
1. While most components of the system are calibrated on site, certain components are calibrated
at one of Keithley’s worldwide network of service facilities.
2.A2LA accredited calibration services are available in the United States and Germany.
High Voltage Instrument Protection Modules
Some S530 instrumentation can produce high voltages that other system
instruments are not designed to withstand. If a test sequence or a failed
DUT presents too much voltage at the inputs to a low voltage instrument,
serious instrument damage is possible. To minimize the potential for these
problems, Keithley engineers have developed protection modules that
prevent damaging voltages from harming sensitive instruments without
compromising their low-level measurement capabilities. In addition to the
system’s SMUs, these modules protect the system’s optional capacitancevoltage instrumentation against high voltage damage.
Documentation
A comprehensive manual set is pre-installed on the system; it is also
provided on CD:
• S530 Administrative Guide – Information on site preparation,
installation, etc.
• Users Reference Manual – A detailed reference and instruction manual
on the operation of the ACS software.
• Programmers Guide – Provides a detailed reference to developing
test scripts, using standard libraries, building and maintaining custom
libraries, etc.
• Prober Manual – Assists in automatic probe station setup and
programming. It includes driver details and usage instructions.
Industrial PC with RAID Mirror Drive
Even the highest quality disk drives are subject to routine failures, so regular system backups are critical. S530 systems incorporate a high reliability
industrial controller including the RAID (Redundant Array of Independent
Disks) option, designed to maintain a mirror of the master drive at all
times. In the event of a drive failure, the mirror drive becomes the master
and the user is notified that a drive replacement should be scheduled
immediately. With a RAID mirror drive, a failed drive represents a scheduled repair rather than a downed system.
System Performance Specifications
All system specifications are to the system reference plane, which is located
between the pogo pins of the Model 9139A PCA and the probe card.
Customization in Layers
The S530 provides a number of hardware and software customization
layers for adapting the system to a wide range of test needs:
• Instrumentation – Standard Options
• Custom instrumentation
• Auxiliary instrument connections on PCA
• Customizable load board in PCA
• User Access Points (to customize test sequence framework)
Support Services and Contracts
Keithley’s worldwide network of service and applications professionals
provides expert support services ranging from initial installation and
calibration to repairs and test plan migration services. These services
maximize system utilization and uptime while reducing your overall cost
of ownership.
• Installation and Probe Station Integration Services – Includes the setup
and verification of the system, as well as probe station integration. This
includes setting up probe station communications and installing the
probe card adapter.
• Calibration Services – All S530 Parametric Test Systems are calibrated
onsite by a certified Keithley field service engineer.1 Keithley provides
a range of internationally recognized accredited calibration services,
including A2LA (American Association for Laboratory Accreditation)
accredited calibration.2
• Repair Services – Repair services ranging from on-site service contracts
to self-service module-swaps are available.
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• Test Plan Migration Services – Keithley’s experienced applications
engineers are skilled at converting your existing test plans to the S530
system software environment. This includes conversion of data objects
like user test libraries, wafer description files, cassette plans, etc.
• Correlation Studies – Keithley applications engineers can perform
correlation studies, comparing your existing parametric test system’s
capability to the S530’s and analyzing the underlying performance
differences.
User Access Points (UAPs) for Added Flexibility
User Access Points or UAPs can be used to modify the operational flow of
the test sequence at key events like “load wafer,” “start test,” “end cassette,”
etc. They are useful for adding system capabilities like reading wafer
cassette RFID tags or reading wafer IDs using an OCR system. During test
operation, an enabled UAP triggers the execution of one or more custom
operations defined in a script or executable program.
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Parametric test systems
S530
S530
Parametric Test Systems
Specification Conditions
General I/V Source Specifications
23В°C В±5В°C, 1 year.
RH between 5% and 60% after 1 hour warm-up.
All specs assume 4-wire (Kelvin) option.
V/A errors can be eliminated when used as a 4-wire system.
All specs are based on 1 year calibration cycle for individual instruments.
Measurement Specifications @ 1 PLC (Power Line Cycle) unless otherwise noted.
Capacitance Specifications are typical @ quiet mode.
Maximum Output Power per SMU: 20W (four quadrant source or sink operation).
Compliance: Compliance resolution and accuracy are determined by the corresponding range used.
Current
Range
1A
100mA
10mA
1mA
100ВµA
10ВµA
  1µA
100nA
10nA
1nA
100pA
Max.
Voltage
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
Resolution
10ВµA
1ВµA
100ВµA
10nA
1nA
100nA
10pA
1pA
100fA
10fA
1fA
Voltage
Range
200V
20V
2V
200mV
Max.
Current
100 mA
  1  A
  1  A
  1  A
Resolution
1mV
100ВµV
10ВµV
1ВµV
MEASURE
Current
Max.
Range
Voltage Resolution
1A 1
  200 V 10µA
  200 V 1µA
100mA 1
1100 V 100ВµA
20mA 1
  200 V 100µA
10mA 1
1100 V 10nA
1mA 1
1
1100 V 1nA
100ВµA
1
1100 V 100nA
10ВµA
1
1100 V 10pA
1ВµA
  200 V 1pA
100nA 2
  200 V 100fA
10nA 2
  200 V 10fA
1nA 2
  200 V 1fA
100pA 2
1 Using general purpose signal paths.
2 Using high performance signal paths.
Max.
Current
  20 mA
100 mA
  1  A
  1  A
  1  A
SOURCE
Resolution
20ВµA
2ВµA
200nA
20nA
2nA
200pA
20pA
2pA
200fA
20fA
Accuracy
0.05% + 1.8 mA + 1.3 pA/V
0.03% + 30.0  μA + 1.3 pA/V
0.03% + 6.0  μA + 1.3 pA/V
0.03% +300.0  nA + 1.3 pA/V
0.03% + 60.0  nA + 1.3 pA/V
0.03% + 5.0  nA + 1.3 pA/V
0.03% +800.6  pA + 1.3 pA/V
0.06% +100.6  pA + 1.3 pA/V
0.15% + 5.6  pA + 1.3 pA/V
0.15% + 2.6  pA + 1.3 pA/V
MEASURE
Accuracy
0.02%+ 50 mV
0.02%+ 5 mV
0.02%+ 480 ВµV
0.02%+ 355 ВµV
High Voltage System
Voltage
Range
1000 V
200V
20V
2V
200mV
0.03%
0.02%
0.02%
0.02%
0.02%
0.03%
0.03%
0.06%
0.15%
0.15%
0.15%
Accuracy
+  1.5mA+ 1.3pA/V
+ 20.0 ВµA+ 1.3pA/V
+ 2.5 ВµA+ 1.3pA/V
+200.0 nA+ 1.3pA/V
+ 25.0 nA+ 1.3pA/V
+ 1.5 nA+ 1.3pA/V
+500.6 pA+ 1.3pA/V
+100.6 pA+ 1.3pA/V
+ 3.6 pA+ 1.3pA/V
+880.0 fA+ 1.3pA/V
+760.0 fA+ 1.3pA/V
Accuracy
0.04%+126mV
0.04%+125mV
0.04%+ 13mV
0.05%+935 ВµV
0.04%+810 ВµV
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10kHz
0.50%
0.50%
0.50%
0.50%
1.00%
100kHz
0.50%
0.50%
0.50%
0.50%
1.00%
1MHz
1.00%
1.00%
4.00%
5.00%
5.00%
Capacitance
10pF
100pF
1nF
10nF
100nF
10kHz
0.50%
0.50%
0.50%
0.50%
1.00%
100kHz
0.50%
0.50%
0.50%
0.50%
1.00%
1MHz
3.00%
2.00%
7.00%
5.00%
5.00%
Accuracy
0.02%+ 50 mV
0.02%+ 5 mV
0.02%+ 730 ВµV
0.02%+ 505 ВµV
SOURCE
Resolution
20ВµA
2ВµA
500nA
200nA
50nA
5nA
500pA
50pA
2pA
200fA
20fA
Accuracy
0.13% + 4.5mA+ 2.4 pA/V
0.08% + 75.0ВµA+ 2.4pA/V
0.11% + 10.0ВµA+ 2.4pA/V
0.08% + 15.0ВµA+ 2.4pA/V
0.09% +750.1 nA+ 2.4 pA/V
0.08% +150.0 nA+ 2.4 pA/V
0.08% + 12.5 nA+ 2.4pA/V
0.09% + 2.0 nA+ 2.4pA/V
0.15% +260.4 pA+ 2.4 pA/V
0.38% + 22.9 pA+ 2.4pA/V
0.38% + 15.4 pA+ 2.4pA/V
MEASURE
Resolution
10mV
1mV
100ВµV
10ВµV
1ВµV
Capacitance
10pF
100pF
1nF
10nF
100nF
SOURCE
Resolution
5 mV
500ВµV
50ВµV
5ВµV
MEASURE
Accuracy
0.08% + 3.8mA+ 2.4 pA/V
0.05% + 50.0ВµA+ 2.4pA/V
0.09% + 3.0ВµA+ 2.4pA/V
0.05% + 6.3ВµA+ 2.4pA/V
0.07% +500.0 nA+ 2.4 pA/V
0.06% + 63.0 nA+ 2.4pA/V
0.07% + 3.8 nA+ 2.4pA/V
0.07% + 1.3 nA+ 2.4pA/V
0.15% +260.0 pA+ 2.4 pA/V
0.38% + 17.9 pA+ 2.4pA/V
0.38% + 11.0 pA+ 2.4pA/V
0.38% + 10.7 pA+ 2.4pA/V
S530 specifications
Low Current System
SOURCE
Resolution
50mV
5mV
500ВµV
50ВµV
5ВµV
A
SEMICONDUCTOR
S530 specifications
Condensed Specifications
Accuracy
0.05% + 251 mV
0.05% + 125 mV
0.05% +12.7 mV
0.05% + 1.7 mV
0.05% + 1.7 mV
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
75
• Highly configurable, instrumentbased system
Parametric test systems
• Ideal for SMU-per-pin Wafer
Level Reliability (WLR)
testing, high speed parallel
test, die sorting and binning,
NBTI, Process Control
MonitoringВ (PCM)
• Intuitive test setup, data
gathering and analysis with
ACSВ software
• Keithley’s TSP-Link® backplane
provides high speed
measurement throughput
• Flexible solution to meet
emerging and mature
testingВ needs
• Full control of automated and
semi-automated probers
• Develop and execute tests at
the device, site, wafer, and
cassetteВ level
Integrated Test System
Versatile Systems with the
Instrument Advantage
S500 Integrated Test Systems are highly configurable, instrument-based systems for semiconductor characterization at the device, wafer, or cassette level. Built on our proven instrumentation,
S500 Integrated Test Systems provide innovative
measurement features and system flexibility,
scalable to your needs. The unique measurement capability, combined with the powerful
and flexible Automated Characterization Suite
(ACS) software, provides a comprehensive range
of applications and features not offered on other
comparable systems on the market. Specific
capabilities and system configurations include:
Parametric test systems
S500
• Full-range source measurement unit (SMU)
instrument specifications, including subfemtoamp measurement, ensure a wide range
of measurements on almost anyВ device.
• Pulse generation and ultra-fast I-V for memory
characterization, charge pumping, singlepulse PIV (charge trap analysis), and PIV
sweeps (self-heating avoidance).
• Low or high channel-count sytems, including
parallel test, with Keithley’s system-enabling and scalable SMUs.
• High voltage, current, and power source-measure instrumentation for testing devices such as
power MOSFETs and display drivers.
• Switching, probe cards, and cabling take the system all the way to your DUT.
Flexibility Combined with Applications Experience
S500 Integrated Test Systems are designed around three standard Keithley principles: configuration,
integration, and customization. What this means to you is that you will receive a comprehensive test
system for semiconductor characterization with both industry-leading Keithley hardware and highly
configurable ACS software applications that include device characterization, reliability/WLR, parametric, and component functional test. With Keithley’s proven instrumentation and user-friendly ACS
software, the S500 is configured, integrated, and customized with the applications experience that
only Keithley canВ provide.
Value-Focused Systems and Service
• Assessment of individual application needs for customization
• Proposal of integrated system configuration
• Installation and system user support
SEMICONDUCTOR
• Management of system-out cabling and probe card adaptation
• Implement training, test code development, and applications services
• Assurance of turnkey solutions for future applications
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A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
Key System Components
• Series 2600A family of SMUs
offering a wide dynamic range
of 1fA to 10A and 1ВµV to 200V,
combines into a high channelcount system via the Keithley
TSP-Link interface
• Model 707B high speed switch
matrix integrates seamlessly
with Series 2600A SMUs via
the Keithley TSP-Link interface
for a complete multipoint
testВ solution
• Model 2410 High Voltage 20W
SourceMeter Unit sources up to
1100V, 1A
• Model 2651A High Power
SourceMeter Unit offers 2000W
pulsed power, 200W DC power,
and up to 50A @ 40V with pA
and ВµV resolution
• ACS software provides intuitive
test setup, data gathering
and analysis for parametric
characterization from single die
to full cassette
• Full control of automated and
semi-automated probers, as
well as other test instruments,
further simplifies device test
and characterization
Flexible and User-Friendly
Software Environment
Each comprehensive S500 test system includes
advanced components and productivity features
to make workflow smooth and easy. The ACS
application software is designed to perform
complexВ functions, such as:
• Wafer description
• Test setup
• Prober control
• Test execution
• Real-time and post-test analysis
The integrated test plan and wafer description
function allows the user to set up single or multiple test plans on one wafer and selectively execute them later, either manually or automatically.
Additionally, the user has maximum flexibility
for performing applications—easily switching
between lab use (manual) and production (fully
automated) using the same test plan.
High Throughput WLR
SMU-per-pin configuration is especially beneficial in scaled CMOS reliability testing.
• Ideal for DC “on-the-fly” NBTI testing
• High speed measurements produce lifetime
predictions from two to five times faster than
conventional WLR solutions
Parametric Die Sort
Uniquely suited for multi-site parallel testing for
die sort and other high throughput applications.
• Multi-group testing allows groups of SMUs to
execute in parallel on different devices, structures, or dies
• True parallel test is enabled through distributed processing with embedded Test Script
Processor (TSPВ®) technology in each SMU.
• High voltage and high current capabilities
provide capabilities across a wide range of
technologies
• Large library of ready-to-use tests and parameter extractions
• Embedded Test Script Processor (TSP®) technology and deep measurement buffers ensure
deterministic timing on all pins
• Up to 200V stress and picoamp measurements
provide a wide range of capabilities and
В­technologies
• Real-time plotting provides visibility into tests
as they occur
Automated Device Characterization
Exceptional balance of high precision testing and
automated dataВ gathering.
• Flexible configurations to meet current and
emerging test needs
SEMICONDUCTOR
Parametric test systems
• 4200-SCS lab-grade parameter
analyzer characterizes devices
using unique instrumentation
modules such as sub-femtoamp
SMUs, capacitance-voltage
units, pulse generators, and
ultra-fast I-V units
Integrated Test System
Parametric test systems
S500
• Powerful analysis, presentation, and reporting tools
• Control full and semi-automatic probers with
intuitive setup andВ operation
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O F
C O N F I D E N C E
77
Maximize the value of your Keithley hardware investment
• Supports a wide array of
instruments and probers
• Intuitive GUI simplifies I-V
tests, analysis and results from
bench-top to fully automated
parametric testers
• Develop and execute tests
at the device, site, wafer and
cassette level
• Intuitive GUI for test plan
development and interactive
operation
• Interactive and real-time data
plotting
• Highly portable test
projects with minimal or no
modifications
• Supports multiple SMUs for
parallel testing
• Flexible, modular software
accomodates evolving and
mature test requirements
APPLICATIONS
Compatible with emerging and
mature testing needs for:
Automated Characterization Suite Software
One Powerful Software Solution—A Wide Range of Hardware Configurations
Keithley’s Automated
Characterization Suite (ACS)
is a flexible, interactive
software test environment
designed for device characterization, parametric test, reliability test and even simple
functional tests. ACS supports
a wide array of Keithley
instrumentation and systems,
hardware configurations,
and test settings, from a few
bench-top instruments for
use in a QA lab to fully integrated and automated rackbased parametric testers.
ACS offers exceptional testing
and analysis flexibility, plus its intuitive GUI helps novice users be productive almost immediately,
regardless of their level of programming experience. The GUI simplifies configuring test instrumentation, making I‑V measurements, getting results, and analyzing them quickly because no coding is
required. Even if you’re an infrequent user, you can go from creating a new test setup to characterizing new devices in a fraction of the time older test development approaches require. Just as important, ACS provides all the tools you need to set up tests, analyze data, and export your results—without ever leaving the ACS environment.
ACS – From Lab to Fab
• Component test
• Component characterization
• Device characterization
• Parametric test
• Reliability test
• Die sort
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Series 2600A
Model
4200-SCS
SEMICONDUCTOR
Model 707B
Ordering Information
ACSComponent
Characterization
Suite Software
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Series 2600A
Series
2600A
Series 2600A
Series 2600A
Series 2600A
Multiple
Series 2600As
A
G R E A T E R
4200-SCS,
707B
M E A S U R E
O F
S500
C O N F I D E N C E
S530
Maximize the value of your Keithley hardware investment
ACS
Automated Characterization Suite Software
Choose ACS for What It Gives You that Others Don’t
There are many alternatives on the market for creating characterization
applications, but ACS offers major advantages that competitive solutions
can’t match, such as a choice of three powerful project development
options. With ACS, you can create the tests you need in the way that
best suits your application’s requirements and your own programming
preferences.
• Need more test development flexibility? Our interactive test development GUI lets you select bias and sweep conditions, acquire raw data,
then use the built-in Formulator tool to extract meaningful results—all
without В­writing code.
• You say you’re a researcher and you just need to make a quick test of
common parameters and properties on a single device? We’ve packaged
the same tests that our semiconductor customers use to verify their
• For the ultimate test development flexibility, modify one of the existing
test scripts in our applications libraries using the embedded script
editing and debugging tools.
Automate Your Data Gathering Processes
Need the throughput advantages of a semi-automatic or fully automatic
wafer probe station to get lots of data fast? The wafer prober automation
option for ACS makes it easy to interface a variety of popular probe stations into your test setup. This option includes a wafer description utility
(for creating a virtual wafer to use in creating wafer-level sampling plans),
real-time wafer maps with binning capabilities (for designating a device’s
disposition before it’s packaged, in die sorting, etc.), a cassette sample
plan utility (for designating which wafers are to be tested), and a post-test
cassette and wafer review utility (for exploring and comparing test results
from multiple wafers interactively).
Many of the tools and capabilities built into ACS enhance automated device
characterization:
• Wafer- and cassette-level automation
• Limits file generation tool
Maximize the value of your Keithley hardware investment
products into easy-to-use applications libraries. These libraries help
you get the data you need to validate your work quickly so you can get
back to your research sooner.
• Test results binning, including interactive binning plot
• Test map—map device and tests to sites and subsites
Interactive probe station control speeds and simplifies test
development and debugging by combining interactive testing with
manual probe station control.
• Interactive probe station control mode
• Real-time plotting
• Single or per-wafer Keithley data file
• SQLite™ database and binning file output options
• Lot summary report generator
• Integrated support for Keithley Series 2600A and 2400 SourceMeter
families
• Integrated scripting editor and GUI builder
• Integrated support for C (with 4200-SCS only), Python, and Lua (for
Series 2600A) programming languages
Share Test Projects and Results
ACS offers a common set of key elements that work across a wide range
of hardware configurations, which saves time and increases productivity. Systems perform consistently from one hardware implementation to
another, so, for example, it’s easy to transfer your knowledge of an ACSbased system used in single-device component characterization to another
designed for wafer level testing.
ACS lets you map devices and tests to sites and subsites, so there’s
no need to duplicate each test for each subsite, reducing your test
development time significantly.
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Similarly, test projects and sequences you create for one Keithley ACS
hardware configuration will run on compatible setups in other test settings
A
G R E A T E R
M E A S U R E
O F
SEMICONDUCTOR
Maximize the value of your Keithley hardware investment
ACS
C O N F I D E N C E
79
Automated Characterization Suite Software
with little or no modification. This portability
across a range of configurations reduces the
effort involved in transferring a new device from
one lab or department to another and simplifies
comparing results obtained in various test settings. This is possible because ACS employs common open-standard file interfaces for projects,
wafer maps, output files, etc. as well as common
test libraries and instrument drivers, which also
means you can be confident of high results correlation whether your tests are run on a system
with a single Series 2600A instrument or a fully
automated custom die sort tool with dozens of
these instruments.
Add More Hardware to Adapt
to Changing Needs
High scalability and a flexible architecture simplify configuring an ACS system to match your
specific testing requirements or to upgrade an
existing system to handle new test needs as they
evolve. Our wide range of source-measure and
switching capabilities provides a solid foundation
for configuring customized applications because
ACS software can control virtually any instrument or peripheral with a standard hardware
interface. For example, third-party LCR meters
can be easily integrated into any ACS system and
drivers are available for popular instruments.
Also, ACS’s integrated scripting environment can
control any GPIB instrument the application may
require, such as a hot chuck controller.
Maximize the Productivity of
Your Keithley Hardware
The tools in ACS simplify test development and
maximize the speed of each Keithley instrument linked into the system. For example, ACS
builds on the throughput advantages inherent
in Keithley’s newest family of high performance
source measurement units, the Series 2600A
System SourceMeter instruments. These advantages include:
• The on-board Test Script Processor (TSP®) in
each instrument that allows each 2600A to
operate independently of the ACS system’s
controller
• The TSP-Link® high speed communications
bus used to network multiple 2600A
instruments together
• True parallel test execution
• Precision timing
Together, ACS and Keithley TSP-based hardware
offer the highest throughput in the industry to
lower the cost of test without requiring you to
spend time learning new programming concepts
or languages before getting the data needed to
accomplish your goals.
Many ACS systems are configured using one
or more of Keithley’s innovative Series 2600A
System SourceMeter instruments, which are optimized for precision sourcing and measurement
synchronization to capture high speed events.
These systems offer unmatched testing speed
and accuracy because they provide an SMU-perpin architecture. ACS system configurations can
support any number from two to more than 40
SMUs in a single rack for true parallel characterization applications.
Broad Range of Applications
ACS-based Integrated Test Systems are complete
solutions for applications such as parametric
die sort and wafer level reliability testing. When
paired with appropriate semi-automatic and
fully automatic probe stations, their hardware
configurations and test project development can
be easily optimized for specific tasks. ACS leverages the on-board test script processors in Series
2600A System SourceMeter instruments into a
multi-processor environment that’s ideal for true
parallel test in both single- and multi-site configurations. This multi-processor environment
provides high parallel throughput while speeding and simplifying test project development.
Multi-site testing capabilities are embedded
throughout ACS from the wafer description utility to the test results output file or binning file,
for example:
• Multi-site parallel testing brings the highest
possible throughput for both parametric die
sort and WLR applications
• Configurable for special applications like
MEMS testing
• Easily customize test flows with User Access
Points (UAPs) that execute scripts or call
custom utilities
ACS also makes it easy to integrate other types
of Keithley hardware into your system, such as
instruments to meet specialized test requirements, such as:
• High channel count switching—Model 707B
Six-slot Switch Mainframe
• Combination of switching and measurement—
Series 3700A Switch/Multimeters
• High voltage sourcing—Model 237 High
Voltage Source-Measure Unit
• Higher resolution, lower current, or other
capabilities such as C-V or pulse testing—
Model 4200-SCS
SEMICONDUCTOR
• Wider dynamic range—Series 2400
SourceMeter instruments
Wafer and binning map tools allow you to
browse through the test results on either a
wafer-by-wafer or site-by-site basis. You can
also overlay traces from multiple sites to
make quick comparisons.
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Maximize the value of your Keithley hardware investment
Maximize the value of your Keithley hardware investment
ACS
Optimized for parametric testing of component
and discrete (packaged) semiconductor devices,
ACS Basic Edition maximizes the productivity
of technicians and engineers in research and
development. The versatile architecture of this
software allows it to meet the wide ranging and
ever changing requirements of semiconductor
device testing. It supports all of Keithley’s source
and measure instrument products, including
Series 2600A, Series 2400, and ModelВ 2651A
SourceMeter instruments and the Model
237В SMU.
This powerful, yet cost effective solution
includes Keithley’s rich set of proven parametric
libraries. Simply choose the desired test and
begin running it to immediately start gathering
data and analyzing it. Users also have the option
of customizing any test with the embedded
script editor.
• Designed for packaged devices
(MOSFETs, BJTs, IGBTs, diodes,
resistors, etc.)
The built-in data analysis tools allow users to quickly analyze the parametric data. For example, place
device curves developed from newly collected data over “golden” curves for fast comparisons. To perform specialized calculations on raw data, use the mathematical formulator tool to create customized
parameter calculations. Data can be easily saved in graphical and/or tabular formats.
• Rich set of test libraries for
fast and easy test setup and
execution without programming
ACS Basic offers three modes of operation:
• Built-in data analysis tools for
quick analysis of parametric
data
• Multi Test Mode—for multiple test operations on a single device
• Supports Keithley’s Series
2600A, Series 2400, and
Model 2651A SourceMeterВ®
instruments and Model
237 Source-Measure Unit (SMU)
• FREE optional off-line version
for developing test setups on a
different PC
• Single Test Mode—for single device, single test operations
• Trace Mode—for mapping out the operating range and characteristics of a semiconductor device
while minimizing the risk of damage to it. This mode offers an interactive method of controlling
the voltage level of a sweep with a slide bar or the arrow keys on the PC В­keyboard.
ACS systems optimized for component characterization applications
Semiconductor Parametric Test Software
for Component and Discrete Devices
Related ProductsВ For applications requiring wafer level testing,В use ACS Integrated Test Systems or ACS Wafer Level
Reliability Systems. These systems supply a wafer map, prober automation capabilities, and analysis
options for yield monitoring as well as related statistical calculations for maximizing productivity in
wafer level test environments.
• Windows® 7 and XP compatible
ACCESSORIES AVAILABLE
Ordering Information
ACS-BASIC Component
Characterization Software
ACS-BASIC-UPGRADE (available
for existing ACS Basic customers)
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2600-FIX-TRX
8101-4TRX
ACS-COMP
KUSB-488A
LR:8028
Grounded Phoenix-to-Triax Cable Adapter
Leaded Component Test Fixture
PC for Installed and Bench-top ACS Systems
IEEE-488.2 USB-to-GPIB Interface Adapter for
USB Port
DIP Component Test Fixture
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G R E A T E R
M E A S U R E
Key Applications • Materials and device
development
• Quality assurance
• Device inspection
O F
SEMICONDUCTOR
ACS systems optimized for component characterization applications
ACS Basic
Edition
C O N F I D E N C E
81
ACS Basic
Edition
Semiconductor Parametric Test Software
for Component and Discrete Devices
Summary of Typical Tests
Bipolar
Junction
Transistor
Multi Test Mode allows multiple tests to be performed on a device.
Leakage
IEBO,
IECO,
IEVEB,
ICVCB
Breakdown
Gain On-State
BVCBO, BVCEI,
BVCEO, BVCEV,
BVEBO, BVECO
MOSFET
IDL,
BVDSS, BVDSV,
IDS_ISD, BVGDO, BVGDS,
IGL, ISL
BVGSO
GM
IDVD_BiasVG,
IDVD_StepVG,
IDVG_BiasVD,
IDVG_StepVD,
IDVG_StepVSUB,
IGVG, VTCI, VTEXT,
VTEXT_IISQ
Diode
IRDVRD
VBRIRD
NA
DYNAMICZ, IFDVFD,
VFDIFD, VRDIRD
Resistor
NA
NA
NA
IV
Capacitor
IV
NA
Formulator Function Summary
Type
Math
ABS, AVG, DELTA, DIFF, EXP, LN, LOG, LOG10, SQRT
Parametric
Extractions
GMMAX, RES, RES_4WIRE, RES_AVG, SS, SSVTCI, TTF_
DID_LGT,TTF_LGDID_T, TTF_DID_T, TTF_LGDID_LGT,
VTCI, VTLINGM, VTSATGM
Fitting
EXPFIT, EXPFITA, EXPFITB, LINFIT, LINFITSLP,
LINFITXINT, LINFITYINT, REGFIT, REGFITSLP,
REGFITXINT, REGFITYINT, REGFIT_LGX_LGY, REGFIT_
LGX_Y, REGFIT_X_LGY, TANFIT, TANFITSLP,TANFITXINT,
TANFITYINT
Manipulation
AT, FINDD, FINDLIN, FINDU, FIRSTPOS, JOIN, LASTPOS,
MAX, MAXPOS, MIN, MINPOX, POW, SMOOTH
SEMICONDUCTOR
Trace Mode supports interactive testing of a device.
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HFE
IBCO, IBEO, IBICVBE,
IBVBE, ICBO, ICEV,
ICVCE_BiasIB,
ICVCE_BiasVB,
ICVCE_StepIB,
ICVCE_StepVB,
VBCO, VCE
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ACS systems optimized for component characterization applications
ACS systems optimized for component characterization applications
Device
Keithley has taken the power of its Automated
Characterization Suite (ACS) software and
focused it on wafer level reliability (WLR) testing. ACS-2600-RTM is an option to ACS that
leverages the measurement speed and system
integration capabilities of Keithley’s Series
2600A System SourceMeter instruments. The
result—you can produce lifetime predictions
from two to five times faster than you can with
conventional WLR test solutions, allowing you to
accelerate your technology development, process
integration, and process monitoring for faster
time to market.
Wafer level reliability option to ACS
• System configurations from 2 to
44 channels
• Comprehensive JEDEC-compliant
test suite
• Optimized for both emerging
and mature technologies
• Supports both sequential and
parallel testing
• Fully automatic single-site and
multi-site capability
• Compatible with all popular
wafer probe stations
• Real-time plotting and wafer
mapping
APPLICATIONS
• Device reliability
–– HCI, NBTI, PBTI
• Gate oxide integrity
–– TDDB, V RAMP, JRAMP
• Metal interconnect
–– Isothermal electromigration
–– Poly heater
–– Constant current
–– ILD TDDB
Ordering Information
ACS-2600-RTM
Wafer Level Reliability
OPtion to ACS
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With the ACS-2600-RTM option, ACS offers
comprehensive single- and parallel-device WLR
testing capability. Integrated with our innovative 2600A SourceMeter instruments, your WLR
system will provide unmatched testing speed
and accuracy via an SMU-per-pin architecture. A
single 2600A dual-channel source measurement
unit (SMU) is suitable for single-device reliability
testing. Or take advantage of the TSP-LinkВ® bus
on the 2600A instruments for systems with as
many as 44 SMU channels (2 for each 2600A) for
testing large numbers of devices in parallel and
increasing overall system productivity. In addition to precise low-level measurements, the 2600A instruments can supply high voltage (200V) and
high current (1.5A) sourcing and measurement to every test structure pad. This maximizes system
flexibility, so you don’t need one solution for gate oxide integrity and a different system for metal
interconnect reliability. Looking for a complete system solution? Keithley offers ACS with its highly
configurable S500 Integrated Test Systems and application development services.
Extensive Software Capabilities
No coding is required to take
full advantage of the sourcemeasure capability of the
2600As or the tools included in
the ACS software environment.
The ACS-2600-RTM option provides a powerful stress/measure
sequencing tool with an interactive interface for testing device
reliability, gate oxide integrity,
and metal interconnects (EM).
Its flexible test sequencing capabilities support pre- and posttesting, as well as intra-stress
testing and stress monitoring.
During testing, you can log raw
reliability data into the database
and/or plot it in real time. This
real-time plotting provides a “sneak peek” at a test’s outcome to let you know whether time-consuming tests are on track to deliver meaningful results. After testing, use the easy point-and-click analysis
offered by the integrated Formulator, which is populated with standard parametric extraction calculations. In addition, a variety of modeling, line fitting, and standard math functions allow custom data
manipulation without programming.
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G R E A T E R
M E A S U R E
O F
SEMICONDUCTOR
• Leverages unique strengths
of Keithley Series 2600A
SourceMeter® instruments –
including system scalability and
measurement speed
Wafer level reliability option to ACS
ACS-2600-RTM Wafer Level Reliability Option to ACS
C O N F I D E N C E
83
SEMICONDUCTOR
1.888.KEITHLEY (U.S. only)
w w w.keithley.com
84
A
G R E A T E R
M E A S U R E
O F
C O N F I D E N C E
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