IONIVAC
Vacuum Solutions
Application
Support
Service
LEYBOLD VAKUUM
GA 09.420/3.02
IONIVAC
ITR 90
ITR 90 P
Catalog numbers
120 90
120 91
120 92
120 94
230030
230031
Operating Manual
Product Identification
In all communications with Leybold Vakuum, please specify the information on the
product nameplate. For convenient reference copy that information into the space
provided below.
Typ:
No:
F-No:
20...30V
Validity
;16W
This document applies to products with the following catalog numbers:
ITR 90 (without display)
120 90
(vacuum connection DN 25 ISO-KF)
120 92
(vacuum connection DN 40 CF-R)
ITR 90 (with display)
120 91
120 94
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 40 CF-R)
ITR 90 P (with Profibus interface and switching functions)
230030
230031
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 40 CF-R)
The catalog number (No.) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to the KF vacuum connection. They apply to other
vacuum connections by analogy.
All ITR 90 versions are shipped with an instruction sheet (® & [1]). ITR 90 P
comes with a supplementary instruction sheet describing the fieldbus interfaces
and the switching functions (® & [2]).
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
Intended Use
2
The ITR 90 transmitters have been designed for vacuum measurement of nonflammable gases and gas mixtures in a pressure range of 5×10-10 … 1000 mbar.
Possible reactions between the exposed materials and the process media have to
be considered. Incompatibilities can shorten the transmitters lifetime.
The transmitters can be operated in connection with a Leybold Vakuum controller
or with other control devices.
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Functional Principle
Over the whole measuring range, the transmitters has a continuous characteristic
curve and its measuring signal is output as logarithm of the pressure.
The transmitters functions with a Bayard-Alpert hot cathode ionization measurement system (p < 2.0×10-2 mbar) and a Pirani measurement system
(p > 5.5×10-3 mbar). In the overlapping pressure range of
2.0×10-2 … 5.5×10-3 mbar, a mixed signal of the two measurement systems is
output. The hot cathode is switched on by the Pirani measurement system only
below the switching threshold of 2.4×10-2 mbar (to prevent filament burn-out). It is
switched off when the pressure exceeds 3.2×10-2 mbar.
Contents
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Product Identification
Validity
Intended Use
Functional Principle
2
2
2
3
1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty
5
5
5
6
6
2 Technical Data
7
3 Installation
3.1 Vacuum Connection
3.1.1 Making the Flange Connection
3.1.2 Removing and Installing the Electronics Unit
3.1.3 Using the Optional Baffle
3.2 Electrical Connection
3.2.1 Use With Leybold Vakuum Transmitter Controllers
3.2.2 Use With Other Controllers
3.2.2.1 Making an Individual Sensor Cable
3.2.2.2 Making a Profibus Interface Cable (ITR 90 P)
3.2.3 Using the Optional Power Supply (With RS232C Line)
11
11
12
12
13
16
16
16
16
20
21
4 Operation
4.1 Measuring Principle, Measuring Behavior
4.2 Operational Principle of the Transmitter
4.3 Putting the Transmitter Into Operation
4.4 Degas
4.5 Display
4.6 RS232C Interface
4.6.1 Description of the Functions
4.6.1.1 Output String (Transmit)
4.6.1.2 Input String (Receive)
4.7 Profibus Interface (ITR 90 P)
4.7.1 Description of the Functions
4.7.2 Operating Parameters
4.7.2.1 Operating Software
4.7.2.2 Node Address Setting
4.8 Switching Functions (ITR 90 P)
4.8.1 Setting the Switching Functions
23
23
24
25
25
26
27
27
27
29
30
30
30
30
30
31
32
5 Deinstallation
33
3
6 Maintenance, Repair
6.1 Maintenance
6.1.1 Cleaning the Transmitter
6.2 Adjusting the Transmitter
6.2.1 Adjustment at Atmospheric Pressure
6.2.2 Zero Point Adjustment
6.3 What to Do in Case of Problems
6.4 Replacing the Sensor
34
34
34
34
34
35
36
38
7 Options
39
8 Spare Parts
39
9 Storage
39
10 Returning the Product
39
11 Disposal
40
Appendix
A: Relationship Output Signal – Pressure
B: Gas Type Dependence
C: Literature
41
41
42
44
Declaration of Contamination
45
For cross-references within this document, the symbol (® 2 XY) is used, for crossreferences to further documents and data sources, the symbol (® & [Z]).
4
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Notice
Hint, recommendation
The result is O.K.
The result is not as expected
Optical inspection
Waiting time, reaction time
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
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5
1.3 General Safety
Instructions
·
Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (® 2 9) and the process
media.
Consider possible reactions (e.g. explosion) of the process media due to the
heat generated by the product.
·
Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
·
Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Leybold Vakuum assumes no liability and the warranty becomes null and void if the
end-user or third parties
·
disregard the information in this document
·
use the product in a non-conforming manner
·
make any kind of interventions (modifications, alterations etc.) on the product
·
use the product with accessories not listed in the corresponding product documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Transmitter failures due to contamination are not covered by the
warranty.
6
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2 Technical Data
Measurement
Measuring range (air, O2, CO, N2,)
Accuracy
Repeatability
Gas type dependence
Emission
Degas
Switching on threshold
Switching off threshold
Emission current
p £7.2×10-6 mbar
7.2×10-6 mbar <p <3.2×10-2 mbar
Emission current switching
25 µA Þ 5 mA
5 mA Þ 25 µA
Degas emission current
(p <7.2×10-6 mbar)
Control input signal
Duration
5×10-10 … 1000 mbar, continuous
15% of reading in the range of
10-8 … 10-2 mbar
(after 5 min stabilization)
5% of reading in the range of
10-8 … 10-2 mbar
(after 5 min stabilization)
® Appendix B
2.4×10-2 mbar
3.2×10-2 mbar
5 mA
25 µA
7.2×10-6 mbar
3.2×10-5 mbar
»16 mA (Pdegas »4 W)
0 V/+24 VDC, active high
(control via RS232 ® 2 27)
max. 3 min, followed by automatic stop
In degas mode, ITR 90 transmitters keep supplying measurement values, however
their tolerances may be higher than during normal operation.
Output signal
Output signal (measuring signal)
Measuring range
Relationship voltage-pressure
Display
(120 91 and 120 94)
0.774 V Z 5×10-10 mbar
… +10 V Z 1000 mbar
logarithmic, 0.75 V/decade
(® Appendix A)
Error signal
<0.3 V/0.5 V (® 2 36)
Minimum load impedance
10 kW
Display panel
LCD matrix, 32×16 pixels,
with background illumination
16.0 mm × 11.2 mm
mbar (default), Torr, Pa
(selecting the pressure unit ® 2 27)
Dimensions
Pressure units (pressure p)
Power supply
0 … +10 V
DANGER
The transmitter must only be connected to power supplies, instruments
or control devices that conform to the requirements of a grounded
extra-low voltage (SELV-E according to EN 61010). The connection to
the transmitter has to be fused (Leybold Vakuum-controllers fulfill
these requirements).
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7
Operating voltage at the
IONIVAC ITR 90
Power consumption
Standard
Degas
Emission start (<200 ms)
Power consumption
ITR 90
ITR 90 P
Fuse necessary
Sensor cable
£0.5 A
£0.8 A
£1.4 A
£16 W
£18 W
1.25 AT
For reasons of compatibility, the expression "sensor cable" is used for all
ITR 90 versions in this document, although the pressure reading of the
transmitters with fieldbus interface (ITR 90 P) is normally transmitted via
the corresponding bus.
Electrical connector
ITR 90
ITR 90 P
Cable for ITR 90
Analog values only
Without degas function
Analog values
With degas function
Analog values
With degas function
And RS232C interface
Cable for ITR 90 P
Max. cable length (supply voltage 24 V1))
Analog operation
RS232C operation
Transmitter identification
Switching functions
ITR 90
ITR 90 P
Adjustment range
Relay contact rating
Voltage
Current
1)
8
+24 VDC (20 … 28 VDC) 1)
ripple max. 2 Vpp
D-Sub,15 pins, male (® 2 17)
D-Sub,15 pins, male (® 2 18)
4 conductors plus shielding
5 conductors plus shielding
7 conductors plus shielding
depending on the functions used,
max. 15 conductors plus shielding
£35 m, conductor cross-section 0.25 mm²
£50 m, conductor cross-section 0.34 mm²
£100 m, conductor cross-section 1.0 mm²
£30 m
42 kW resistor between Pin 10 (sensor
cable) and GND
none
2 (setpoints A and B)
1×10-9 mbar … 100 mbar
Setpoints adjustable via potentiometers
(setpoints A and B), one floating, normally open relay contact per setpoint
(® 2 18, 31)
Adjusting the setpoints via field bus is
described in the corresponding bus sections.
£60 V
£0.5 ADC
Measured at sensor cable connector (consider the voltage drop as function of
the sensor cable length).
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RS232C interface
Data rate
Data format
Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
Pin 13
Pin 14
Pin 5
Function and interface protocol of the RS232C interface ® 2 27
Profibus interface
(ITR 90 P)
Fieldbus name
Standard applied
Profibus
Interface protocol data format
Interface, physical
® & [3], [5]
RS485
Data rate
£12 MBaud (® & [3])
Node address
Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"
switches)
Via Profibus
(hexadecimal "ADDRESS" switches
set to >7dhex (>125dec))
00 … 7Dhex (0 … 125dec)
Profibus connection
Cable
Cable length, system wiring
Vacuum
Weight
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Materials exposed to vacuum
Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
Internal volume
DN 25 ISO-KF
DN 40 CF-R
® & [5]
00 … 7Dhex (0 … 125dec)
D-Sub, 9 pins, female
Shielded, special Profibus cable
(® 2 20 and & [4])
According to Profibus specifications
(® & [4], [5])
stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y2O3)
molybdenum
tungsten, copper
Max. Pressure
£24 cm3
£34 cm3
2 bar (absolute)
Catalog numbers
120 90, 120 91
120 92, 120 94
230030
230031
»290
»550
»430
»695
g
g
g
g
9
Ambiance
Admissible temperatures
Storage
Operation
Bakeout
Relative humidity
(year's mean / during 60 days)
Use
Type of protection
Dimensions [mm]
Catalog numbers
120 90
120 91
230030
4-40UNC 2B
DN 25 ISO-KF
10
-20 … 70 °C
0 … 50 °C
+150 °C (without electronics unit)
£65 / 85% (no condensation)
indoors only
altitude up to 2000 m NN
IP 30
Catalog numbers
120 92
120 94
230031
4-40UNC 2B
DN 40 CF-R
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3 Installation
3.1 Vacuum Connection
DANGER
Caution: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
The transmitter must be electrically connected to the grounded
vacuum chamber. This connection must conform to the requirements
of a protective connection according to EN 61010:
·
CF connections fulfill this requirement
·
For transmitters with a KF vacuum connection, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
The transmitter may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (® 2 10).
When installing the transmitter, make sure that the area around the
connector is accessible for the tools required for adjustment while the
transmitter is mounted (® 2 34).
When installing the transmitter, allow for installing/deinstalling the
connectors and accommodation of cable loops.
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·
The transmitter is supplied with a built-in grid. For potentially contaminating
applications and to protect the electrodes against light and fast charged
particles, installation (® 2 13) of the optional baffle is recommended (® 2 39).
·
The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed (® 2 12) or an extension (Option
® 2 39) has to be installed.
11
3.1.1 Making the
Flange Connection
Procedure
It is recommended not to apply any vacuum grease.
The protective lid will be needed for maintenance.
3.1.2 Removing and Installing
the Electronics Unit
Required tool
·
Removing the electronics unit
Œ
Allen key, size 2.5 mm
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
1
12
2
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
Remove the electronics unit without twisting it .
Removal of the electronics unit is completed.
Installing the electronics unit
Œ
Place the electronics unit on the sensor (3) (be careful to correctly align the
pins and notch (4)).
4
3

Slide the electronics unit in to the mechanical stop and lock it with the hexagon socket set screw (1).
The electronics unit is now installed.
3.1.3 Using the Optional Baffle
Installing/deinstalling
the baffle
In severely contaminating processes and to protect measurement electrodes optically against light and fast charged particles, replacement of the built-in grid by the
optional baffle (® 2 39) is recommended.
The optional baffle will be installed at the sensor opening of the deinstalled transmitter (Deinstallation ® 2 33).
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Required tools / material
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·
Baffle (® 2 39)
·
Pointed tweezers
·
Pin (e.g. pencil)
·
Screwdriver No 1
13
Procedure
Œ
Carefully remove the grid with tweezers.

Carefully place the baffle onto the sensor opening.
Ž
Using a pin, press the baffle down in the center until it catches.
The baffle is now installed (Installation of the transmitter ® 2 11).
14
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Deinstallation
Carefully remove the baffle with the screwdriver.
The baffle is now deinstalled (Installation of the transmitter ® 2 11).
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15
3.2 Electrical Connection
3.2.1 Use With
Leybold Vakuum
Transmitter Controllers
See Leybold Vakuum sales literature and data sources for controllers and our
range of sensor cables on our internet home page (® & [6]).
Caution
Caution: data transmission errors
If the transmitter is operated with the RS232C interface and a fieldbus
interface at the same time, data transmission errors may occur.
The transmitter must not be operated with the RS232C interface and
Profibus at the same time.
Procedure
Œ

Plug the sensor connector into the transmitter and secure it with the locking
screws.
Connect the other end of the sensor cable to the Leybold Vakuum controller
and secure it.
The transmitter can now be operated with the Leybold Vakuum controller.
3.2.2 Use With Other
Controllers
3.2.2.1 Making an Individual
Sensor Cable
Cable type
16
The transmitter can also be operated with other controllers.
Especially the fieldbus version ITR 90 P (Profibus) is usually operated as part of a
network, controlled by a master or bus controller. In such cases, the control system
has to be operated with the appropriate software and interface protocol (® & [3]).
For reasons of compatibility, the expression "sensor cable" is used for all
ITR 90 versions in this document, although the pressure reading of the
ITR 90 P transmitter with fieldbus interface is normally transmitted via
Profibus.
The sensor cable is required for supplying all ITR 90 types with power. In
connection with the ITR 90 P transmitter with fieldbus interface it also
permits access to the relay contacts of the switching functions (® 2 18).
The application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (® 2 8).
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Procedure
Sensor cable connection
ITR 90
Œ

Open the cable connector (D-Sub, 15 pins, female).
Prepare the cable and solder/crimp it to the connector as indicated in the
diagram of the transmitter used:
ITR 90
TxD
13
RxD
14
Measuring signal
2
RS232C
+
–
12
Degas
7
+Ub
8
42kW
10
1.25AT
+
24 V
–
5
Identification
15
Electrical connection
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 5 Supply common, GND
Pin 7 Degas on, active high
+24 VDC
Pin 8 Supply
+24 VDC
Pin 10 Transmitter identification
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
Pins 1, 3, 4, 6, 9 and 11 are not connected internally.
9
1
15
8
D-Sub, 15 pins
female,
soldering side
WARNING
The supply common (Pin 5) and the shielding (Pin 15) must be
connected at the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply
voltages can damage the transmitter.
For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the
output signal can be measured directly between the positive signal output (Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output
(Pin 2) and signal common (Pin 12) is recommended.
Ž

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Reassemble the cable connector.
On the other cable end, terminate the cable according to the requirements
of the transmitter controller you are using.
17

‘
Plug the sensor connector into
the transmitter and secure it with
the locking screws.
Connect the other end of the sensor cable to the connector of the instrument or transmitter controller you are using.
The transmitter can now be operated via analog and RS232C interface.
Sensor cable connection
ITR 90 P
ITR 90 P
SP A
SP B
SP A
3
6
1
4
9
11
SP B
TxD
RxD
Degas
+Ub
Measuring signal
42kW
13
14
7
8
2
12
10
5
15
RS232
Degas
1.25 AT
Identification
0V
Electrical connection
Pin 1 Relay switching function A, COM contact
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 3 Threshold (Setpoint) A
0 … +10 V
Pin 4 Relay switching function A, N.O. contact
Pin 5 Supply common, GND
Pin 6 Threshold (Setpoint) B
0 … +10 V
Pin 7 Degas on, active high
+24 VDC
Pin 8 Supply
+24 VDC
Pin 9 Relay switching function B, common
Pin 10 Transmitter identification
Pin 11 Relay switching function B, N.O. contact
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
. Pin 15 Shielding, housing, GND
18
+
24V
–
9
1
15
8
D-Sub, 15 pins
female,
soldering side
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WARNING
The supply common (Pin 5) and the shielding (Pin 15) must be
connected at the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply
voltages can damage the transmitter.
For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the output signal can be measured directly between the positive signal output
(Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output
(Pin 2) and signal common (Pin 12) is recommended.
Ž


‘
Reassemble the cable connector.
On the other cable end, terminate the cable according to the requirements
of the transmitter controller you are using.
Plug the sensor connector into
the transmitter and secure it with
the locking screws.
Connect the other end of the sensor cable to the connector of the instrument or transmitter controller you are using.
The transmitter can now be operated via analog and RS232C interface.
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19
3.2.2.2 Making a Profibus
Interface Cable
(ITR 90 P)
For operating ITR 90 P via Profibus, an interface cable conforming to the Profibus
standard is required.
If no such cable is available, make one according to the following indications.
Cable type
Only a cable that is suited to Profibus operation may be used (® & [4], [5]).
Procedure
Œ
Make the Profibus interface cable according to the following indications:
1
5
D-Sub, 9 pins
male, soldering side
6
Pin
1
2
3
4
5
6
7
8
9

9
Function (BPG400-SP)
Do not connect
Do not connect
RxD/TxD-P
CNTR-P
DGND
VP
Do not connect
RxD/TxD-N
Do not connect
1)
2)
2)
1)
Only to be connected if an optical link module is used.
2)
Only required as line termination for devices at both ends of bus cable
(® & [4]).
Plug the Profibus (and sensor) cable connector into the transmitter.
Sensor cable
Profibus cable
Ž
Lock the Profibus (and sensor) cable connector.
The transmitter can now be operated via Profibus interface (® 2 30).
20
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3.2.3 Using the Optional
Power Supply
(With RS232C Line)
Technical data
The optional 24 V power supply (® 2 39) allows RS232C operation of the ITR 90
transmitter with any suitable instrument or control device.
The instrument or control device needs to be equipped with a software that supports the RS232C protocol of the transmitter (® 2 27).
Mains connection
Mains voltage
Mains cable
90 … 250 VAC 50 … 60 Hz
1.8 meter (Schuko DIN and U.S. connectors)
Output (operating voltage of transmitter)
Voltage
Current
21 … 27 VDC, set to 24 VDC
Max. 1.5 A
Transmitter connection
Connector
24 VDC cable
D-Sub, 15 pins, female
5 m, black
Connection of the instrument or control
device
RS232C connection
Cable
D-Sub, 9 pins, female
5 m, black, 3 conductors, shielded
Wiring diagram
8
7
6
4
5
5
13
2
ITR 90
D-Sub, 14
15 pins 8
RS232C
D-Sub, 9 pins
3
15
+24 V
L
DC
GND
N
AC
PE
Mains
90 ... 250 VAC
50 ... 60 Hz
PE
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21
Connecting the power supply
Œ

Connect the transmitter to the power supply and lock the connector with the
screws.
Connect the RS232C line to the instrument or control device and lock the
connector with the screws.
RS232C
PC
Power supply
Mains
ITR 90
Ž

Connect the power supply to the mains.
Turn the power supply on.
The transmitter can now be operated via RS232C interface (® 2 27).
22
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4 Operation
4.1 Measuring Principle,
Measuring Behavior
Bayard-Alpert
The ITR 90 vacuum transmitters consist of two separate measuring systems (hot
cathode Bayard-Alpert (BA) and Pirani).
The BA measuring system uses an electrode system according to Bayard-Alpert
which is designed for a low x-ray limit.
The measuring principle of this measuring system is based on gas ionization.
Electrons emitted by the hot cathode (F) ionize a number of molecules proportional
to the pressure in the measuring chamber. The ion collector (IC) collects the thus
generated ion current I+ and feeds it to the electrometer amplifier of the
measurement instrument. The ion current is dependent upon the emission current
Ie, the gas type, and the gas pressure p according to the following relationship:
I+ = I e × p × C
Factor C represents the sensitivity of the transmitter head. It is generally specified
for N2.
The lower measurement limit is 5×10-10 mbar (transmitter metal sealed).
To usefully cover the whole range of 5×10-10 mbar … 10-2 mbar, a low emission
current is used in the high pressure range (fine vacuum) and a high emission current is used in the low pressure range (high vacuum). The switching of the emission current takes place at decreasing pressure at approx. 7.2×10-6 mbar, at increasing pressure at approx. 3.2×10-5 mbar. At the switching threshold, the ITR 90
can temporarily (<2 s) deviate from the specified accuracy.
IC
F
+
EC
40V
–
–
200V
+
(Degas 250V)
Diagram of the BA measuring system
F
hot cathode (filament)
IC ion collector
EC anode (electron collector)
Pirani
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EC
F
IC
Within certain limits, the thermal conductibility of gases is pressure dependent. This
physical phenomenon is used for pressure measurement in the thermal conductance vacuum meter according to Pirani. A self-adjusting bridge is used as measuring circuit (® schematic). A thin tungsten wire forms the sensor element. Wire
resistance and thus temperature are kept constant through a suitable control circuit. The electric power supplied to the wire is a measure for the thermal conductance and thus the gas pressure. The basic principle of the self-adjusting bridge
circuit is shown in the following schematic.
23
Schematic
UB
Pirani sensor
The bridge voltage UB is a measure for the gas pressure and is further processed
electronically (linearization, conversion).
Measuring range
The ITR 90 transmitters continuously cover the measuring range
5×10-10 mbar … 1000 mbar.
·
The Pirani constantly monitors the pressure.
·
The hot cathode (controlled by the Pirani) is activated only at pressures
<2.4×10-2 mbar.
If the measured pressure is higher than the switching threshold, the hot cathode is
switched off and the Pirani measurement value is output.
If the Pirani measurement drops below the switching threshold (p = 2.4×10-2 mbar),
the hot cathode is switched on. After heating up, the measured value of the hot
cathode is fed to the output. In the overlapping range of 5.5×10-3 … 2.0×10-2 mbar,
the output signal is generated from both measurements.
Pressure rising over the switching threshold (p = 3.2×10-2 mbar) causes the hot
cathode to be switched off. The Pirani measurement value is output.
Gas type dependence
4.2 Operational Principle of
the Transmitter
24
The output signal is gas type dependent. The characteristic curves are accurate for
dry air, N2 and O2. They can be mathematically converted for other gases
(® Appendix B).
The measuring currents of the Bayard-Alpert and Pirani sensor are converted into a
frequency. A micro-controller converts this frequency into a digital value representing the measured total pressure. After further processing this value is available
as analog measurement signal (0 … +10 V) at the output (sensor cable connector
Pin 2 and Pin 12). The maximum output signal is internally limited to +10 V
(Z atmosphere). The measured value can be read as digital value through the
RS232C interface (Pins 13, 14, 15) (® 2 27). transmitters with a display show the
value as pressure. The default setting of the displayed pressure unit is mbar. It can
be modified via the RS232C interface (® 2 27).
In addition to converting the output signal, the micro controller's functions include
monitoring of the emission, calculation of the total pressure based on the measurements of the two sensors, and communication via RS232C interface.
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4.3 Putting the Transmitter
Into Operation
When the operating voltage is supplied (® Technical Data), the output signal is
available between Pin 2 (+) and Pin 12 (–) of the sensor cable connector
(Relationship output signal – pressure ® Appendix A).
Allow for a stabilizing time of approx. 10 min. Once the transmitter has been
switched on, permanently leave it on irrespective of the pressure.
Communication via the digital interface is described in a separate section.
4.4 Degas
Contamination
Transmitter failures due to contamination are not covered by the
warranty.
Deposits on the electrode system of the BA transmitter can lead to unstable
measurement readings.
The degas process allows in-situ cleaning of the electrode system by heating the
electron collector grid to approx. 700 °C by electron bombardment.
Depending on the application, this function can be activated by the system control
via a digital interface. The ITR 90 automatically terminates the degas process after
3 minutes, if it has not been stopped before.
The degas process should be run at pressures below 7.2×10-6 mbar
(emission current 5 mA).
For a repeated degas process, the control signal first has to change from ON
(+24 V) to OFF (0 V), to then start degas again with a new ON (+24 V) command. It
is recommended that the degas signal be set to OFF again by the system control
after 3 minutes of degassing, to achieve an unambiguous operating status.
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25
4.5 Display
The transmitters with catalog numbers
120 91 and
120 94
have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line
shows the pressure, the second line the pressure unit, the function and possible
errors. The background illumination is usually green, in the event of an error, it
changes to red. The pressure is displayed in mbar (default), Torr or Pa. The pressure unit can be changed via RS232C interface (® 2 27).
Pressure display
Pressure reading, pressure unit
Function display
(none) Pirani operation
Emission 25 mA
Emission 5 mA
Degas
1000 mbar adjustment (Pirani)
Error display
no error
(green background illumination)
Pirani sensor warning
(red background illumination)
Pirani sensor error
(red background illumination)
BA sensor error
(red background illumination)
Internal data connection failure
(red background illumination)
What to do in case of problems ® 2 36.
26
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4.6 RS232C Interface
The built-in RS232C interface allows transmission of digital measurement data and
instrument conditions as well as the setting of instrument parameters.
Caution
Caution: data transmission errors
If the transmitter is operated with the RS232C interface and a fieldbus
interface at the same time, data transmission errors may occur.
The transmitter must not be operated with the RS232C interface and
Profibus at the same time.
4.6.1 Description of the
Functions
Operational parameters
Electrical connections
4.6.1.1 Output String (Transmit)
Format of the output string
The interface works in duplex mode. A nine byte string is sent continuously without
a request approx. every 20 ms.
Commands are transmitted to the transmitter in a five byte input (receive) string.
·
Data rate
9600 Baud
·
Byte
8 data bits
1 stop bit
·
TxD
Pin 13
·
RxD
Pin 14
·
Pin 5
GND
(Sensor cable connector)
The complete output string (frame) is nine bytes (byte 0 … 8). The data string is
seven bytes (byte 1 … 7).
Byte No Function
0
1
2
3
4
5
6
7
8
Synchronization
set value, no handshake
Length of data string
Page number
Status
Error
Measurement high byte
Measurement low byte
Software version
Sensor type
Check sum
Value
7
5
0 … 255
0 … 255
0 … 255
10
0 … 255
1)
(0406)
ITR_90.om
(Set value)
(For ITR 90)
® Status byte
® Error byte
® Calculation of pressure value
® Calculation of pressure value
® Software version
(For ITR 90)
® Synchronization
Synchronization of the master is achieved by testing three bytes:
Byte No Function
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Comment
0
Length of data string
1
Page number
8
Check sum of bytes No 1 … 7
Value
Comment
7
Set value
5
(For ITR 90)
0 … 255
Low byte of check
sum 1)
High order bytes are ignored in the check sum.
27
Status byte
Bit 1
Bit 0
0
0
0
1
1
1
0
1
Bit 2
Emission 25 mA
Emission 5 mA
Degas
1000 mbar adjustment off
1000 mbar adjustment on
Bit 3
Definition
Toggle bit, changes with every
string received correctly
0Û1
Software version
Emission off
Definition
0
1
Error byte
Definition
Bit 5
Bit 4
Definition
0
0
1
0
1
0
Bit 7
Bit 6
Definition
x
x
Not used
Bit 3
Bit 2
Bit 1
Bit 0
Definition
x
x
x
x
Not used
Bit 7
Bit 6
Bit 5
Bit 4
Definition
0
1
1
1
0
0
0
0
0
1
0
1
Current pressure unit mbar
Current pressure unit Torr
Current pressure unit Pa
Pirani adjusted poorly
BA error
Pirani error
The software version of the transmitter can be calculated from the value of byte 6
of the transmitted string according to the following rule:
Version No = ValueByte 6 / 20
(Example: According to the above formula, ValueByte 6 of 32 means software version 1.6)
Calculation of the
pressure value
28
The pressure can be calculated from bytes 4 and 5 of the transmitted string. Depending on the currently selected pressure unit (® byte 2, bits 4 and 5), the appropriate rule must be applied.
As result, the pressure value results in the usual decimal format.
pmbar
= 10((high byte × 256 + low byte) / 4000 - 12.5)
pTorr
= 10((high byte × 256 + low byte) / 4000 - 12.625)
pPa
= 10((high byte × 256 + low byte) / 4000 - 10.5)
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Example
The example is based on the following output string:
Byte No
0
1
2
3
4
5
6
7
8
Value
7
5
0
0
242
48
20
10
69
The instrument or controller (receiver) interprets this string as follows:
Byte No Function
0
1
2
3
4
5
6
7
8
4.6.1.2 Input String (Receive)
Format of the input string
Length of data
string
Page number
Status
Error
Measurement
High byte
Low byte
Software version
Sensor type
Check sum
Byte no
1)
(0406)
ITR_90.om
(Set value)
5
0
ITR 90
Emission = off
Pressure unit = mbar
No error
0
242
48
20
10
69
Calculation of the pressure:
p = 10((242 × 256 + 48) / 4000 - 12.5) = 1000 mbar
Software version = 20 / 20 = 1.0
ITR 90
5 + 0 + 0 + 242 + 48 + 20 + 10 =
325dec Z 01 45hex
High order byte is ignored Þ
Check sum = 45hex Z 69dec
Function
Length of data string
Data
Data
Data
Check sum
(from bytes No 1 … 3)
Value
3
0 … 255
Comment
(Set value)
® admissible input strings
® admissible input strings
® admissible input strings
(low byte of sum) 1)
High order bytes are ignored in the check sum.
For commands to the transmitter, six defined strings are used:
Command
0
Byte No
1
2
3
Set the unit mbar in the display
Set the unit Torr in the display
Set the unit Pa in the display
Power-failure-safe storage of current unit
Switch degas on
(switches itself off after 3 minutes)
Switch degas off before 3 minutes
3
3
3
3
3
16
16
16
32
16
62
62
62
62
93
0
1
2
62
148
78
79
80
156
1
3
16
93
105
214
2)
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For transmission of the commands to the transmitter, a string (frame) of five bytes
is sent (without <CR>). Byte 1 to byte 3 form the data string.
0
1
2
3
4
Admissible input strings
Value Comment
4 2)
Only low order byte of sum (high order byte is ignored).
29
4.7 Profibus Interface
(ITR 90 P)
This interface allows operation of ITR 90 P with catalog number
230030 and
230031
in connection with other devices that are suited for Profibus operation. The physical
interface and interface firmware of ITR 90 P comply with the Profibus standard
(® & [4], [5]).
Two adjustable switching functions are integrated in the ITR 90 P. The corresponding relay contacts are available at the sensor cable connector (® 2 7, 18,
31).
The basic sensor and sensor electronics of all ITR 90 transmitters are identical.
Caution
Caution: data transmission errors
If the transmitter is operated via RS232C interface and Profibus
interface at the same time, data transmission errors may occur.
The transmitter must not be operated via RS232C interface and
Profibus interface at the same time.
4.7.1 Description of the
Functions
Via this interface, the following and further data are exchanged in the standardized
Profibus protocol (® & [3]):
·
Pressure reading
·
Pressure unit (Torr, mbar, Pa)
·
Degas function
·
Transmitter adjustment
·
Status and error messages
·
Status of the switching functions
4.7.2 Operating Parameters
As the Profibus protocol is highly complex, the parameters and programming of
ITR 90 P are described in detail in the separate Interface Manual (® & [3]).
4.7.2.1 Operating Software
For operating the transmitter via Profibus, prior installation of the ITR 90 specific
GSD file is required on the bus master side. This file can be downloaded from the
CD ROM, which is enclosed in scope of delivery of the transmitter.
4.7.2.2 Node Address Setting
For unambiguous identification of the transmitter in a Profibus environment, a node
address is required. The node address setting is made on the transmitter.
The node address (0 … 125dec) is set in hexadecimal form
(00 … 7Dhex) via the "ADDRESS", "MSD", and "LSD" switches.
The node address is polled by the firmware when the transmitter is switched on. If the setting deviates from the stored
value, the new value is taken over into the NVRAM. If a value
>7Dhex (>125dec) is entered, the node address setting currently
stored in the device remains valid but it can now be defined via
Profibus ("Set slave Address", ® & [3]).
Electrical connections
30
The transmitter is connected to Profibus via the 9-pin Profibus connector (® 2 20).
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4.8
Switching Functions
(ITR 90 P)
Calculating the threshold
voltage
The transmitter ITR 90 P has two independent, manually settable switching
functions. Each switching function has a floating normally open relay contact. The
relay contacts are accessible at the sensor cable connector (® 2 18).
The threshold values of switching functions A and B can be set within the pressure
range 1×10-9 mbar … 100 mbar via potentiometers "SETPOINT A" and
"SETPOINT B".
UThreshold = 0.75 × (log pSetpoint – c) + 7.75
Constant c is pressure unit dependent (® Appendix A).
Measuring signal
(Pressure p)
value
sured
Mea
(Setpoint A, B)
Hysteresis
10% U Threshold
U Threshold
Time t
Switching funktion
Off
On
Off
The hysteresis of the switching functions is 10% of the threshold setting.
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31
4.8.1
Setting the Switching
Functions
The threshold values of the two switching functions "SETPOINT A" and
"SETPOINT B" are set locally on the potentiometers of the transmitter that are
accessible via the openings on one side of the transmitter housing.
Required tools
·
Voltmeter
·
Ohmmeter or continuity checker
·
Screwdriver, max. ø2.5 mm
Procedure
The procedure for setting thresholds is identical for both switching functions.
Œ

Put the transmitter into operation.
Connect the + lead of a voltmeter to the threshold measurement point of the
selected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and
its – lead to Pin 5.
Setpoint A Pin 3
Setpoint B Pin 6
Pin 5
max. ø2.5
Ž
Using a screwdriver (max. ø2.5 mm), set the voltage of the selected
switching function (Setpoint A, B) to the desired value UThreshold.
Setting of the switching functions is now concluded.
There is no local visual indication of the statuses of the switching functions. However, a functional check of the switching functions (On/Off)
can be made with one of the following methods:
32
·
Reading the status via fieldbus interface ® & [3].
·
Measurement of the relay contacts at the sensor cable connector
with a ohmmeter/continuity checker (® 2 18).
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5 Deinstallation
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Procedure
Œ
Vent the vacuum system.
Before taking the transmitter out of operation, make sure that this
has no adverse effect on the vacuum system.
Depending on the programming of the superset controller, faults
may occur or error messages may be triggered.
Follow the appropriate shut-down and starting procedures.

Ž

Take transmitter out of operation.
Disconnect all cables from the transmitter.
Remove transmitter from the vacuum system and replace the protective lid.
The transmitter is now deinstalled.
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33
6 Maintenance, Repair
6.1 Maintenance
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
The product is maintenance-free, If clean operating conditions are met.
6.1.1 Cleaning the Transmitter
Small deposits on the electrode system can be removed by baking the anode
(Degas ® 2 25). In the case of severe contamination, the baffle can be exchanged
easily (® 2 13). The sensor itself cannot be cleaned and needs to be replaced in
case of severe contamination (® 2 38).
A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not
use any aggressive or scouring cleaning agents.
Make sure that no liquid can penetrate the product. Allow the product to
dry thoroughly before putting it into operation again.
Transmitter failures due to contamination are not covered by the
warranty.
6.2 Adjusting the
Transmitter
The transmitter is factory-calibrated. Through the use in different climatic conditions, fitting positions, aging or contamination (® 2 25) and after exchanging the
sensor (® 2 38) a shifting of the characteristic curve can occur and readjustment
can become necessary. Only the Pirani part can be adjusted.
6.2.1 Adjustment at
Atmospheric Pressure
At the push of a button the digital value and thus the analog output are adjusted
electronically to 10 V at atmospheric pressure.
Adjustment is necessary if
Required tools
34
·
at atmospheric pressure, the output signal is <10 V
·
the display reads < atmospheric pressure (if the transmitter has a display)
·
at atmosphere, the digital value of the RS232C interface is < atmospheric pressure
·
at atmosphere, the digital value received by the bus controller of the fieldbus
transmitter (Profibus) is < atmospheric pressure
·
when the vacuum system is vented, the output voltage reaches 10 V (limited to
10 V by the software) before the measured pressure has reached atmosphere
(transmitters with display will show the error "5" at atmospheric pressure (Pirani
sensor warning ® 2 26))
·
when the vacuum system is vented, the digital value of the RS232C interface
reaches its maximum before the measured pressure has reached atmosphere.
·
when the vacuum system is vented, the digital value received by the bus controller of the fieldbus (Profibus) reaches its maximum before the measured
pressure has reached atmosphere.
·
Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)
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Procedure
The transmitter ITR 90 P is mechanically slightly different from the BPG400. The
adjustment opening of ITR 90 P is on one side of the transmitter housing. However,
the adjustment procedure is the same for all transmitter versions.
Œ
Operate transmitter for approx. 10 minutes at atmospheric pressure.
If the transmitter was operated before in the BA range, a coolingdown time of approx. 30 minutes is to be expected (transmitter
temperature = ambient temperature).

Insert the pin through the opening marked <FULL SCALE> and push the
button inside for at least 5 s.
ITR 90
ITR 90 P
max. ø1.3
transmitters with display will show the reading "1000 mbar" and
the function "A" when the button has been pushed for 4 s. Upon
completion of the adjustment, the function indication "A" disappears.
The transmitter is automatically adjusted (»10 s).
The transmitter is now adjusted at atmospheric pressure.
6.2.2 Zero Point Adjustment
A zero point adjustment is recommended
·
after the sensor has been exchanged
·
as part of the usual maintenance work for quality assurance
·
if "FAIL 5" is shown on the display
Required tools
·
Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)
Procedure
The push button <FULL SCALE> is also used for the zero point adjustment
(® Illustration in "Adjustment at Atmospheric Pressure").
Œ
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Operate transmitter for approx. 10 minutes at a pressure of 1×10-4 mbar.
35

Insert the pin through the opening marked <FULL SCALE> and push the
button inside for 2 s.
The adjustment is done automatically and ends after 2 minutes.
The zero point of the transmitter is now adjusted.
6.3 What to Do in Case of
Problems
Required tools / material
Troubleshooting
In the event of a fault or a complete failure of the output signal, the transmitter can
easily be checked.
·
Voltmeter / ohmmeter
·
Allen key, size 2.5 mm
·
Spare sensor (if the sensor is faulty)
The output signal is available at the sensor cable connector (Pin 2 and Pin 12).
In case of an error, it may be helpful to just turn off the mains supply and
turn it on again after 5 s.
Troubleshooting (sensor)
Problem
Possible cause
Correction
Output signal
permanently »0V
Sensor cable defective or
not correctly connected
Check the sensor cable
No supply voltage
Turn on the power supply
transmitter in an undefined status
Turn the transmitter off
and on again (reset)
Output signal »0.3 V
Display: "FAIL 8"
Hot cathode error
(sensor faulty)
Replace the sensor
(® 2 38)
Output signal »0.5 V
Display: "FAIL 9"
Pirani error
(sensor defective)
Replace the sensor
(® 2 38)
Electronics unit not
mounted correctly on
sensor
Check the connection the
electronics unit - sensor
Display:
Internal data connection
not working
Turn the transmitter off
and on again after 5 s
Replace the electronics
unit
transmitter does not
switch over to BA at low
pressures
Pirani zero point out of
tolerance
Carry out a zero point
adjustment (® 2 35)
Output signal ok.
Display: "FAIL 5"
Pirani zero point out of
tolerance
Carry out a zero point
adjustment (® 2 35)
If the cause of a fault is suspected to be in the sensor, the following checks can be
made with an ohmmeter (the vacuum system need not be vented for this purpose).
Separate the sensor from the electronics unit (® 2 12). Using an ohmmeter, make
the following measurements.
36
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Ohmmeter measurement between pins
Possible cause
2+4
»37 W
4+5
»37 W
6+7
>>37 W Pirani element 1 broken
>>37 W Pirani element 2 broken
»0.15 W >>0.15 W Filament of hot cathode broken
Electrode - short circuit to ground
¥
<<¥
4+1
6+1
¥
<< ¥
Electrode - short circuit to ground
3+1
¥
<< ¥
Electrode - short circuit to ground
9+1
¥
<< ¥
Electrode - short circuit to ground
6+3
¥
<< ¥
Short circuit between electrodes
9+3
¥
<< ¥
Short circuit between electrodes
View on sensor pins
9
1
8
2
7
3
6
4
5
6
7
8
2
4
5
3
1
9
Hot cathode
approx. 0.15 Ohm
Not connected
Pirani sensor 1
Pirani sensor 2
approx. 37 Ohm
approx. 37 Ohm
Anode
GND (connected to sensor housing)
Ion collector
Correction
All of the above faults can only be remedied by replacing the sensor (® 2 38).
Troubleshooting on
Fieldbus Transmitters
(ITR 90 P)
Error diagnosis of fieldbus transmitters can only be performed as described above
for the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can
only be done via the superset bus controller (® & [3]).
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37
6.4 Replacing the Sensor
Required tools / material
Procedure
Replacement is necessary, when
·
the sensor is severely contaminated
·
the sensor is mechanically deformed
·
the sensor is faulty, e.g. filament of hot cathode broken (® 2 36)
·
the sensor is faulty, e.g. Pirani element broken (® 2 36)
·
Allen key, size 2.5 mm
·
Spare sensor (® 2 39)
Œ

Ž
Deinstall the transmitter (® 2 33).
Deinstall the electronics unit from the faulty sensor and mount it to the new
sensor (® 2 12).
Adjust the transmitter (® 2 34).
The new sensor is now installed.
38
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7 Options
Catalog number
24 VDC power supply / RS232C line (® 2 21)
121 06
Bake-out extension 100 mm
127 06
Baffle DN 25 ISO-KF / DN 40 CF-R (® 2 13)
121 07
8 Spare Parts
When ordering spare parts, always indicate:
·
All information on the product nameplate
·
Description and catalog number
Catalog number
Replacement sensor IE 90, vacuum connection DN 25 ISO-KF
(including Allen key)
Replacement sensor IE 90, vacuum connection DN 40 CF-R
(including Allen key)
121 02
121 03
9 Storage
Caution
Caution: vacuum component
Inappropriate storage leads to an increase of the desorption rate
and/or may result in mechanical damage of the product.
Cover the vacuum ports of the product with protective lids or grease
free aluminum foil. Do not exceed the admissible storage temperature
range (® 2 10).
10 Returning the Product
WARNING
Caution: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic, caustic or biological
hazard) can be detrimental to health and environment.
Products returned to Leybold Vakuum should preferably be free of
harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination (® 2 45).
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.
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39
11 Disposal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
WARNING
N
Separating the components
40
Caution: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local
regulations.
After disassembling the product, separate its components according to the following criteria:
Contaminated components
Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,
separated according to their materials, and disposed of.
Other components
Such components must be separated according to their materials and recycled.
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Appendix
A:
Relationship Output
Signal – Pressure
p = 10(U - 7.75) / 0.75 + c
Conversion formulae
U = 0.75 × (log p - c) + 7.75
where
Conversion curve
U
p
c
[V]
[V]
[V]
[mbar]
[Pa]
[Torr]
0
2
-0.125
Pressure p [mbar]
1E+04
1E+03
1E+02
1E+01
1E+00
1E–03
1E–04
1E–05
Sensor error
Inadmissible range
1E–02
Inadmissible range
1E–01
1E–06
1E–07
1E–08
1E–09
1E–10
0.0
1.0
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
10.0
Measuring signal U[V]
GA 09.420/3.02
(0406)
ITR_90.om
41
Conversion table
Output signal U
[V]
Pressure p
[Torr]
[mbar]
0.3 / 0.5
0.51 … 0.774
0.774
1.00
1.75
2.5
3.25
4.00
4.75
5.50
6.25
7.00
7.75
8.50
9.25
10.00
>10.00
B:
Sensor error (® 2 36)
Inadmissible range
3.75×10-10
7.5×10-10
7.5×10-9
7.5×10-8
7.5×10-7
7.5×10-6
7.5×10-5
7.5×10-4
7.5×10-3
7.5×10-2
7.5×10-1
7.5×100
7.5×101
7.5×102
Inadmissible range
5×10-10
1×10-9
1×10-8
1×10-7
1×10-6
1×10-5
1×10-4
1×10-3
1×10-2
1×10-1
1×100
1×101
1×102
1×103
[Pa]
5×10-8
1×10-7
1×10-6
1×10-5
1×10-4
1×10-3
1×10-2
1×10-1
1×100
1×101
1×102
1×103
1×104
1×105
Gas Type Dependence
Indication range
above 10-2 mbar
Pressure indicated (transmitter adjusted for air, Pirani-only mode)
p (mbar)
102
H2 He Ne
8
6
4
2
101
Indication range
above 10-2 mbar)
8
6
4
Air
O2
CO
N2
CO2
Ar
Freon 12
Kr
2
Xe
100
8
6
4
2
10–1
8
6
4
2
10–2
H2O
vapor
8
6
4
2
10–3
10–3
2
4 6
10–2
2
4 6
10–1
2
4 6
100
2
4 6
101
2
4 6
102
peff (mbar)
42
GA 09.420/3.02
(0406)
ITR_90.om
Calibration in pressure range
10-2 … 1 mbar
The gas type dependence in the pressure range 10-2 … 1 mbar can be compensated by means of the following formula:
peff = C × indicated pressure
where
Gas type
Calibration factor C
Air, O2, CO
N2
CO2
Water vapor
Freon 12
H2
He
Ne
Ar
Kr
Xe
1.0
0.9
0.5
0.7
1.0
0.5
0.8
1.4
1.7
2.4
3.0
(The above calibration factors are mean values)
Calibration in pressure range
<10-3 mbar
The gas type dependence in the pressure range <10-3 mbar can be compensated
by means of the following formula (transmitter adjusted for air):
peff = C × indicated pressure
where
Gas type
Calibration factor C
Air, O2, CO, N2
N2
He
Ne
H2
Ar
Kr
Xe
1.0
1.0
5.9
4.1
2.4
0.8
0.5
0.4
(The above calibration factors are mean values)
A mixture of gases and vapors is often involved. In this case, accurate
determination is only possible with a partial-pressure measuring instrument.
GA 09.420/3.02
(0406)
ITR_90.om
43
C:
Literature
& [1] www.leyboldvac.de
Instruction Sheet
IONIVAC ITR 90
KA 09.420
Leybold Vakuum GmbH, D–50968 Köln, Deutschland
& [2] www.leyboldvac.de
Instruction Sheet
IONIVAC ITR 90 P
KA 09.421
Leybold Vakuum GmbH, D–50968 Köln, Deutschland
& [3] www. leyboldvac.de
Interface Manual
Profibus ITR 90 P
SB 09.421
Leybold Vakuum GmbH, D–50968 Köln, Deutschland
& [4] www.profibus.com
(Profibus user organization)
& [5] European Standard for Profibus EN 50170
& [6] www.leyboldvac.de
Leybold Vakuum GmbH, D–50968 Köln, Deutschland
44
GA 09.420/3.02
(0406)
ITR_90.om
Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Description of product
Reason for return
Type
Part number
Serial number
Operating fluid(s) used (Must be drained before shipping.)
Used in copper process
no q
Seal product in plastic bag and
mark it with a corresponding label.
yes q
Process related contamination of product:
The product is free of any substances which are damaging to
health.
yes q
toxic
caustic
biological hazard
explosive
radioactive
other harmful substances
no q 1)
no q 1)
no q
no q
no q
no q 1)
1) or not containing any amount
of hazardous residues that
exceed the permissible exposure limits
yes q
yes q
yes q 2)
yes q 2)
yes q 2)
yes q
2) Products thus contaminated will not be accepted without written
evidence of decontamination.
Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/product name
Precautions associated
with substance
Chemical name
(or symbol)
Action if human contact
Legally binding declaration:
We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address
Post code, place
Phone
Fax
Email
Name
Date and legally binding signature
This form can be downloaded
from our website.
GA 09.420/3.02
(0406)
ITR_90.om
Company stamp
Copies:
Original for addresee - 1 copy for accompanying documents - 1 copy for file of sender
45
Notes
46
GA 09.420/3.02
(0406)
ITR_90.om
Notes
GA 09.420/3.02
(0406)
ITR_90.om
47
Original: German GA 09.420/3.01 (0406)
ga09. 420/ 3. 02
Bonner Strasse 498 (Bayenthal)
D–50968 Köln
Deutschland
Tel. +49 (0) 221 347-0
Fax +49 (0) 221 347-1250
[email protected]
www.leyboldvac.de
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