SMC ZQ Series Vacuum Pump System Operation Manual

Doc. no. ZQ-0M00801
PRODUCT NAME
Space Saving Vacuum Ejector
Vacuum Pump System
MODEL / Series / Product Number
ZQ Series
Doc. no. ZQ-0M00801
Contents
Safety Instructions
2
Model Indication and How-to-Order
10
Mounting and Installation
15
Air Supply
16
Supply Pressure
16
Piping
16
Connections V port (when the vacuum pressure switch is installed)
17
Solenoid Valve
19
Construction
23
Maintenance and Inspection
24
How to replace the Silencer
25
How to replace the Suction Filter
26
How to order replacement
27
Manifold Products
28
Exhaust from Ejector
30
Specifications
30
Circuit diagram
32
Mass
35
Exhaust Characteristics and Flow Characteristics of Ejector
36
Flow Characteristics Curve
37
Pressure Sensor Assembly
37
Troubleshooting
39
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Doc. no. ZQ-0M00801
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or
“Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC) 1) , and other safety regulations.
1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.
ISO 4413: Hydraulic fluid power -- General rules relating to systems.
IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots -Safety.
etc.
Caution
Warning
Danger
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the equipment or
decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.
1) The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2) When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3) Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is to be
used in any of the following conditions.
1) Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2) Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3) An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4) Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.
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Doc. no. ZQ-0M00801
Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications
or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1.The warranty period of the product is 1 year in service or 1.5 years after the product is delivered.
Also, the product may have specified durability, running distance or replacement parts. Please
consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility,
a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage
incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers
noted in the specified catalog for the particular products.
Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of weapons of mass
destruction (WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are governed by the
relevant security laws and regulation of the countries involved in the transaction. Prior to the
shipment of a SMC product to another country, assure that all local rules governing that export
are known and followed.
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Doc. no. ZQ-0M00801

Explanation of Symbols
Symbol
Definition
Things you must not do.
Actual instructions are provided as a drawing or sentence close to this symbol.
Things you must do.
Actual instructions are provided as a drawing or sentence close to this symbol.

Operator
1. This Operation Manual is intended for those who have knowledge of machinery using pneumatic
equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment.
Only those persons are allowed to perform assembly, operation and maintenance.
2. Read and understand this Operation Manual carefully before assembling, operating or providing
maintenance to the product.
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Doc. no. ZQ-0M00801
■Safety
Instructions
Warning
Do not disassemble, modify (including the replacement of board) or repair other than
instructed in this manual.
Disassembly
prohibited
Do not
An injury or failure can result.
Do not operate the product outside of the specifications.
Do not use for flammable or harmful fluids.
Fire, malfunction, or damage to the product can result.
Verify the specifications before use.
Do not use in an atmosphere containing flammable or explosive gases.
Fire or an explosion can result.
The product is not designed to be explosion proof.
Do not
Do not use the product in a place where static electricity is a problem.
Otherwise failure or malfunction of the system can result.
Do not
Do not cut off the power and compressed air supplied to this product while it is
operating.
Do not
Otherwise it can cause injury due to dropping of workpieces or damage to the
system.
If using the product in an interlocking circuit:
- Provide a double interlocking system, for example a mechanical system.
Instruction
- Check the product for proper operation.
Otherwise malfunction can result, causing an accident.
The following instructions must be followed during maintenance :
Instruction
Turn off the power supply
Stop the air supply, exhaust the residual pressure in piping and verify that the air is
released before performing maintenance work.
An injury can result.
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Doc. no. ZQ-0M00801
Caution
Do not touch the terminals and connectors while the power is on.
Otherwise electric shock, malfunction or damage to the switch can occur.
Do not touch
Perform sufficient trial run.
Otherwise, injury or damage to the system can occur due to suction failure depending on the
Instruction
conditions of the suction of the workpiece or the pressure switch settings.
Perform sufficient verification before using this product.
After maintenance is complete, perform appropriate functional inspections and leak
test.
Stop operation if the equipment does not function properly or there is leakage of fluid.
If there is leakage from parts other than the piping, the product might be broken.
Instruction
Cut off power supply and stop supplying fluid.
Do not supply fluid if there is leakage.
Safety cannot be assured in the case of unexpected malfunction.

Handling Precautions
Follow the instructions given below for selecting and handling of the vacuum unit.
●The instructions on selection (installation, wiring, environment, adjustment, operation, maintenance,
etc.) described below must also be followed.
Product specifications
- For the compressed air quality, refer to JIS B 8392-1 2.4.3 to 2.6.3.
Insufficient air quality can cause operating failure.
If compressed air containing condensate is used, install an air dryer or drain catch before the filter and perform
drainage regularly.
If draining is not performed regularly and condensate enters the secondary side, it can cause operating failure of
pneumatic equipment.
When it is difficult to control drainage, the use of a filter with an auto drain is recommended.
- The applicable fluids are air, non-corrosive gas and inert gas.
Do not use a fluid containing chemicals, synthetic oils including organic solvent, salt and corrosive gases.
Otherwise, damage to the vacuum unit and malfunction can occur.
Check the details of the specifications before use.
- Use the specified operating pressure.
Otherwise it can cause damage to the vacuum unit or inability to hold work piece correctly.
- Reserve suitable space for maintenance.
Allow sufficient space around the product for maintenance when designing the system.
- Use the specified voltage.
Otherwise failure or malfunction can occur.
- Do not exceed the specified maximum allowable load.
Otherwise it can cause damage or shorten the life of the product.
- Design the product to prevent reverse current when the circuit is opened or the product is forced to
operate for operational check.
Reverse current can cause malfunction or damage the product.
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Doc. no. ZQ-0M00801
●Handling
Mounting
- Tighten to the specified tightening torque.
If the tightening torque is exceeded, the mounting screws, brackets and the product can be damaged. Insufficient
torque can cause displacement of the product from its proper position and loosening of the mounting screws.
- Ensure that the FG terminal is connected to ground when using a commercially available switch-mode
power supply.
- Do not drop, hit or apply excessive shock to the product.
Otherwise damage to the internal parts of the product, solenoid valve and internal parts of the pressure switch
can occur, causing malfunction.
- Do not pull the lead wire forcefully, or lift the product by pulling the lead wire. (Tensile strength 35N or
less)
Hold the body when handling to avoid damaging the product.
The solenoid valve and the pressure switch will be damaged, leading to failure and malfunction.
- Eliminate any dust left in the piping by using a blast of air before connecting the piping to the product.
If dust is left in the piping, failure and malfunction can result.
- Do not insert metal wires or other foreign objects into the pressure port of the pressure sensor.
The pressure sensor will be damaged, leading to failure and malfunction.
- If the fluid may contain foreign matter, install and connect a filter or mist separator to the inlet.
Failure and malfunction can result.
Wiring (Including connecting/disconnecting of the connectors)
Do not pull hard on the lead wire, or lift the product by holding the lead wires (Tensile strength 35 N or
less).
In particular, never lift the product by the lead wire of the solenoid valve or the pressure switch when fittings and
piping are built in.
Otherwise damage to the solenoid valve or the internal parts of the pressure switch can result, causing
malfunction or causing the connector to come off.
- Avoid repeatedly bending, stretching or applying a heavy object or force to the lead wire.
Repetitive bending stress or tensile stress to the lead wire can cause the sheath of the wire to peel off.
If the lead wire can move, fix it near the body of the product.
The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the
outside diameter of the insulation material, whichever is larger.
Replace the damaged lead wire with a new one.
- Wire correctly.
Incorrect wiring can cause malfunction or breakage of the solenoid valve or the pressure switch/sensor.
- Do not perform wiring while the power is on.
Otherwise damage to the solenoid valve or the internal parts of the pressure switch/sensor can result, causing
malfunction.
- Do not route wires and cables together with power or high voltage cables.
Route the wires (piping) of the solenoid valve or the pressure switch separately from power or high voltage
cables in order to avoid noise or surge entering the signal line from the power or high voltage line.
- Confirm proper insulation of wiring.
Poor insulation (interference with other circuits, poor insulation between terminals etc.) can apply excessive
voltage or current to the solenoid valve or the pressure sensor, causing damage.
- Design the system to prevent reverse current when the product is forced to operate for operational
check.
Depending on the circuit used, insulation may not be maintained when operation is forced, allowing reverse
current to flow, which can cause malfunction and damage to the solenoid valve or the pressure switch.
- Keep wiring as short as possible to prevent interference from electromagnetic noise and surge
voltage.
Do not use a cable longer than 10 m.
Wire the DC (-) line (solenoid valve: black, pressure switch: blue) as close as possible to the power supply.
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Doc. no. ZQ-0M00801
Operating environment
- Do not use in an environment where corrosive gases, chemicals, sea water, water or steam are
present.
These can cause failure or malfunction.
- Do not use the product in a place where the product could be splashed by oil or chemicals.
If the product is to be used in an environment containing oils or chemicals such as coolant or cleaning solvent,
even for a short time, it may be adversely affected (damage, malfunction, or hardening of the lead wires).
- Do not use the product in an area where surge is generated.
When there are machines or equipment that generate large surge near the pressure switch (magnetic type lifter,
high frequency inductive furnace, motor, etc.), this can result in deterioration and damage of the internal elements.
Take measures against the surge sources, and prevent the lines from coming into close contact.
- Do not use a load which generates surge voltage.
When a surge-generating load such as a relay or solenoid is directly driven, use the product with a surge
absorbing element built-in.
- Take measures against surge voltages due to lightning strikes in the system.
The product is CE marked but not immune to lightning strikes, so take measures against lightning strikes.
- Be aware of excessive surrounding noise
The product is CE marked and has passed the EMC test, but excessive noises in the surrounding area may
affect the functioning of the product.
- Mount the product in a location that is not affected by vibration or impact.
Failure and malfunction can occur.
- Do not let foreign matter, such as wire debris, get inside the product.
In order to avoid failure and malfunction, do not let foreign matter, such as wire debris, get inside the product.
- Do not use this product in places where there are cyclic temperature changes.
Heat cycles other than ordinary changes in temperature can adversely affect the inside of the product.
- Do not use where the product is exposed to direct sunlight.
Shade the sunlight in locations where the product is exposed to direct sunlight.
Failure and malfunction can result.
- Keep within the specified operating fluid and ambient temperature range.
The operating fluid and ambient temperature range is 5 to 50oC. Operation under low temperature may lead to
damage or operation failure due to frozen moisture in the fluid or air.
Protection against freezing is necessary. Mounting of an air dryer is recommended for elimination of drainage and
water.
Avoid abrupt temperature changes even within the specified temperature range.
- Do not use in a location where the product is exposed to radiant heat from surrounding heat sources.
This can cause operating failure.
Adjustment/Operation
- Connect a load before turning the power supply on.
If the power supply is turned on with no load, over current may flow, causing the pressure switch to break instantly.
- Do not short circuit the load.
An error is displayed when the load of the pressure switch is short circuited, but over current may flow, causing
damage to the pressure switch.
- Do not press the setting buttons with a sharp pointed object.
This may damage the setting buttons.
- If using the product to detect very small pressures, warm up the product for 10 to 15 minutes first.
There will be a drift on the display of approx. 1% for 10 minutes after the power supply is turned on.
- Perform settings suitable for the operating conditions.
Incorrect setting can cause operation failure.
For details of each setting, refer to the Operation Manual of the pressure switch.
- Do not touch the LED during operation.
The display can vary due to static electricity.
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Doc. no. ZQ-0M00801
Maintenance
- Turn off the power supply, stop the supplied air, exhaust the residual compressed air in the piping and
verify the release of air before performing maintenance.
There is a risk of unexpected malfunction of components.
- Perform regular maintenance and inspections.
There is a risk of unexpected malfunction of components due to the malfunction of equipment and machinery.
- Perform drainage regularly.
If condensate enters the secondary side, it can cause operating failure of pneumatic equipment.
- Do not use solvents such as benzene, thinner etc. to clean the product.
They could damage the surface of the product and erase the indication on the product.
Use a soft cloth to remove stains. For heavy stains, use a cloth soaked with diluted neutral detergent, then wipe
again with a dry cloth.
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Doc. no. ZQ-0M00801
How to Order
■ Ejector Unit
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Doc. no. ZQ-0M00801
■ Manifold
■ Vacuum Pump Unit
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■ Manifold
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Doc. no. ZQ-0M00801
Mounting and Installation
Note the following points when mounting and installing the product.

Common Precautions for Mounting and Installation
1．It is necessary to perform maintenance and replacement of the suction filter regularly to maintain the
proper operation of the ejector and vacuum pump system. Ensure sufficient space for maintenance
work when installing the product.
2．If the product is operated in a dusty environment or if there is dust on the surface of the work pieces, it
can cause clogging of the silencing material as well as the suction filter. Secure space necessary for
the maintenance checks and replacement of the silencer when the ejector performance decreases.
3．Keep the ambient temperature of the product between 5 and 50oC. In environments such as inside a
panel where heat radiation efficiency is poor, the ambient temperature will rise due to the heat
generation of the coil of the solenoid valve, causing malfunction.
4．When handling the product, do not hold the lead wires or cables of the solenoid valve or pressure
switch for vacuum. Otherwise, this may cause damage to cable connections and damage to the
product.

Mounting and installation of Single Unit Ejectors
1. When the body is mounted on the wall, tighten the screw to the tightening torque of 0.54 to 0.66Nm.
Using excessive torque may cause damage to the body
2. Do not block the exhaust port of the ejector.
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Doc. no. ZQ-0M00801
Air Supply

Use clean air.
1. Using compressed air which contains chemicals, synthetic oils containing organic solvents, salts or
corrosive gases, etc. can cause damage or malfunction. Do not use compressed air containing toxic
impurities.
2. If the compressed air contains excessive moisture or carbon powder, it can stick to the vacuum parts
(the nozzle diffuser),inside of the solenoid valve or the pressure switch and cause a decrease in
performance or operation failure. An air dryer, mist separator, and filter should be installed upstream
from filters.
If condensation in the drain bowl and air filter is not emptied on a regular basis, the bowl will overflow
and allow the condensation to enter the compressed air lines. This causes malfunction of pneumatic
equipment. If the drain bowl is difficult to check and remove, installation of a drain bowl with an auto
drain option is recommended.
3. For the compressed air quality, refer to 2.4.3, 2.5.3 and 2.6.3 of ISO8573-1:2001 (JIS B8392-1:2003).
It is recommended that an air filter and a mist separator are connected to the upstream side of the
ejector and the pump system.
(Refer to Air Preparation Equipment Selection Guide in Best
Pneumatics 5 for detail.)
Supply Pressure

Use the product within the specified supply pressure range.
Operation over the specified supply pressure range can cause damage to the product.
Especially for the vacuum pump system with the nozzle type pad, the pressure inside the product can
increase due to the release pressure. Use an appropriate pressure and make sure that the vacuum
pad is not clogged.
Piping

Piping for Air and Vacuum Supply
1. Before piping
Before piping, perform air blow (flushing) or cleaning to remove any cutting chips, cutting oil, dust, etc.
from the piping.
2. When connecting tubing, consider factors such as changes in the tubing length due to pressure,
and allow a sufficient margin.
Otherwise, it can damage the fitting and cause the tube to come off. Refer to Fittings & Tubing
Precautions from 1 to 4 shown in Best Pneumatics 6 on SMC’s website
(URL http://www.smcworld.com) for the recommended piping conditions.
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Doc. no. ZQ-0M00801

Handling of V port (when the pressure switch for vacuum is installed)
1. Allow a sufficient margin of tube length when piping, in order to prevent twisting, tensile, moment
loads, vibration or impact being applied to the tubes and fittings.
This can cause damage to the tube fittings and crushing, bursting or disconnection of tubing.
2. Piping to the product is assumed to be static piping.
If the tube moves, it may become worn, elongated or torn due to tensile forces, or disconnected
from the fitting. Ensure the tube is in a static condition at all times before using.
3. Prevent the connected tube from being rotated.
If the fittings are used in this way, the fitting may fail.
4. Do not lift the product by holding the piping after the tube is connected to the vacuum (V) port.
Connections to V port (when the vacuum pressure switch is installed)

Precautions
1. Make sure the O-rings of the One-touch fittings are free from scratches and dust.
Scratches or dust may result in air and vacuum leakage.
2. When removing or inserting the tube from/into the One-touch fitting, hold the body of the One-touch
fitting in your hand.
If it is removed or inserted without holding the body of the One-touch fitting, excessive force will be
applied to the V port assembly or the One-touch fitting assembly, and it may cause damage
and/or air leakage. Also, if a non-axial force is applied to the filter case, the case may break.

One-touch Fittings Precautions
1. Insertion of the tube
(1) Cut the tube perpendicularly, being careful not to damage the external surface. Use SMC’s tube
cutter TK-1, 2 or 3 for cutting. Do not cut the tube with pliers, nippers, scissors, etc. If the tube is cut by
any tools other than a tube cutter, the cut surface of the tube will be slanted or flat, making it
impossible to be connected securely, or causing the tube to come off or air leakage after the tube is
connected.
Also, allow a sufficient margin of tube length.
(2) Hold the tube and push it in slowly, inserting it securely all the way into the fitting.
(3) After inserting the tubing, pull on it gently to confirm that it will not come out.
If it is not installed
securely all the way into the fitting, problems such as leakage or disconnection of the tube can occur.
2. Removal of the tube
(1) KQ series is used for the vacuum (V) port. For this series, the tube can be removed by pushing one
part of the release button.
(2) Hold down the release button while pulling out the tube.
If the release button is not held down
fully, there will be more bite so it will be more difficult to pull out the tube.
(3) If the removed tubing is to be used again, cut off the section of the tubing which has been gripped.
Using the gripped portion of the tube as it is can cause problems such as air leakage or difficulty in
removing the tube.
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Doc. no. ZQ-0M00801

Precautions for Use of Other Manufacturers' Tubes If tubes of brands other than SMC are used,
confirm that the materials and tolerance of the tubing outside diameter will satisfy the following
specifications.
1) Nylon tube
within +/-0.1mm
2) Soft nylon tube
within +/-0.1mm
3) Polyurethane tube
within +/-0.15mm and -0.2mm
Do not use tubing which does not meet these outside diameter tolerances. Connection to the fitting
may fail, causing disconnection of the tube and air leakage.
■ Replacement of V Port Fittings (With vacuum pressure switch)
V port fittings are cassette style for easy replacement.
The fittings are blocked by a clip. Remove the clip with a flat blade screw driver, etc. to replace the
fittings.
When mounting the fittings, after inserting the fitting assembly until it stops, then put the clip into the
prescribed position completely.
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Doc. no. ZQ-0M00801
Solenoid Valve

Manual Override
Vacuum for the ejector or the vacuum
pump system is generated or released
by manual operation.
Use the manual override after confirming
That there is no danger.
Non-locking push type (Tool required)
It is turned ON by pressing the manual
override all the way in the direction
When operating the locking type
with a screwdriver, turn it gently
using a watchmaker’s screwdriver.
Tightening torque: 1.7 +/-0.2Nm}
indicated by the arrow (( ),)
and it
is turned OFF by releasing it.
Locking type (Tool required) <Semi-standard>
- Turn the manual override to the right
and line up the arrow (
)with1
to lock
- Turn the manual override to the left
and line up the arrow(
) with
0 to unlock and recover the
manual override.
Note) For the locking type manual override, be sure to release
the lock before starting the normal operation.
Locking push type (Tool required) <Latching type>
SET
RESET
- Turn the manual override to the right
and line up the arrow
with 1 to
(
)
lock in the SET state (flow from P to A).
- Turn the manual override to the left and line
up the arrow (
) with 0 to return it to
the RESET state (flow from A to P).(It is set
to RESET state when shipped.)
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Doc. no. ZQ-0M00801

Pin
How to Use Plug Connector
Connection and removal of the connector
- To attach a connector, hold the lever and
RESET
SET
Connector adaptor
- Turn the manual override to the right
and line up the arrow
with 1 to
(
)
Cover
Connector
lock in the SET state (flow from P to A).
Model No: AXT661-12
Pin
- Turn the manual override to the left and line
Lead
wire
up the arrow (
0 to
return it to
) with
0.2 to 0.33mm2
the RESET state (flow from
A
to
P).(It
is set
(Max. outer sheath
O.D.:

1.7mm)
to RESET state when shipped.)
connector unit between your fingers and
insert straight onto the pins of the connector
adaptor so that the lever’s pawl is pushed
into the groove and locks.
- To detach a connector, remove the pawl
from the groove by pushing the lever
downward with your thumb,and pull the
connector straight out.
Connector adaptor
HOOK
Pawl of the lever
Note
Socket
(Model No: DXT170-71-1)
Do not pull the lead wire forcefully. Otherwise,
connection failure and broken wire can result.
Crimping lead wires and sockets
Peel 3.2 to 3.7mm of the tip of the lead wire, insert the core wires neatly into the socket and crimp it
with a special crimping tool. Make sure the cover of the lead wire does not enter into the core wire
crimping part.
(Crimping tool: Model No. DXT170-75-1)
Core wire crimping area
Crimping
Core wire
Socket
Lead wire 0.2 to 0.33mm2
(Max. outer sheath O.D.: 1.7mm)
Covered wire
Hook
Attaching and detaching sockets with lead wire
- Attaching
Insert the socket into the square hole (Indicated as A, C and B) of the connector, push the lead wire in
and lock it by engaging the hook of the socket with the seat of the connector.
- Detaching
To remove the socket from the connector, pull out the lead wire by pushing the hook on the socket with
a stick with a fine point (approx. 1mm). If the socket is to be re-used, open up the hook to the outside.
Socket
Connector
Hook
Lead wire
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Doc. no. ZQ-0M00801
Wiring Specifications
- The lead wire of the solenoid valve is connected as shown below. Connect each wire to the
corresponding power supply.
Simultaneous energization protection circuit
Lead wire color
Lead wire color
Black
Set
Red
Black
COM
Red
Reset
White
Latching type
- Plug Connector Lead Wire Length
Lead wire length of the solenoid valve with lead wire is 300mm. When placing an order for the
solenoid valve with the lead wire whose length is 600mm or longer, include the connector assembly
part number together with the part number for the solenoid valve without connector.

Light and Surge Voltage Suppressor
In the latching type, the set side and the reset side energization are indicated by two colors - orange
and green.
The dotted lines indicate the latching and large flow type.
M plug connector
L plug connector
Indicator light
Indicator light
(Set: Orange)
(Reset: Green) Note 1)
(Set: Orange)
(Reset: Green) Note 1)
Single type (N.C.)
Set
COM
Reset
Simultaneous energization protection circuit
Note 1
Latching type only
Note 2
NC type has polarity.
Note 3
ON: The orange light turns ON.
Set side energization: orange light turns ON, Reset side energization: green light turns ON, with miswiring
prevention (stop diode) mechanism.
With surge and voltage suppressor (ZNR/surge absorption diode)
Note 4
Energization on A (set) side generates vacuum and energization on B (reset) side stops generation of vacuum.
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Doc. no. ZQ-0M00801

How to Operate the Supply Valve of the Latching Type
Latching type refers to a solenoid with self holding mechanism. It has a construction whereby the
moving armature in the solenoid holds the set position and the reset position during momentary
energizing (10ms or longer). Therefore, continuous energizing is not necessary.
<<Cautions for latching type>>
1. Use in a circuit in which set and reset signals are not energized simultaneously.
2. Minimum necessary energizing time for self holding is 10 ms.
3. There is no problem as long as the product is used normally in an ordinary operating location. If the
product is used in an environment where vibration larger than 30m/s2 or strong magnetic field is
present, consult with SMC.
4. Although this supply valve holds reset position (vacuum stopped) when shipped, it may move to set
position due to impact during transportation or valve mounting.
Confirm the original position before
use, by supplying power or by manual operation.
Latching
Operation
Indicator light
A-C ON (Set)
Generates vacuum
Orange
B-C ON (Reset)
Stops generation of vacuum
Green
N.C.
Operation
Indicator light
A-C ON (Set)
Generates vacuum
Orange
OFF
Stops generation of vacuum
―
If the supply valve is latching type, continuous energization is not necessary because it maintains the
switching position with momentary energization for at least 10 msec. Depending on the conditions,
continuous energizing may cause operation failure such as ON operation failure due to operation voltage
increase due to coil temperature rise.
When continuous energizing is necessary, the energizing time shall be 10 minutes or shorter. Before the
next operation, the solenoid shall be de-energized (both A side and B side OFF) for longer than the
energized time. (Duty ratio shall be 50% or less.)

Do NOT energize the solenoid valve for a long time.
If a solenoid valve is continuously energized for an extended period of time, heat generated by the coil
may result in reduced performance or have adverse effects on peripheral equipment.
If the total
energizing time per day is expected to be longer than the total de-energizing time per day, a latching type
solenoid valve can be used so that the energization time can be reduced. However, do not energize to
the coils on both the A and B sides at the same time when using the latching type.
The solenoid valve should not be energized continuously for longer than 10 minutes, and the energizing
time in one day should be shorter than the non-energizing time. (The duty ratio should be 50% at
maximum.) When the valve is mounted onto a control panel, take measures against radiation in order to
keep the valve temperature within the specified range.
In particular, if three or more adjacent stations
on the manifold are energized together for extended periods of time, special care should be given to a
larger temperature rise.
- 22 -
Doc. no. ZQ-0M00801
Construction
■ Ejector system
■ Pump system
- 23 -
Doc. no. ZQ-0M00801
Maintenance and Inspection

Check and perform the following maintenance in order to use the ejector and the
vacuum system safely and in an appropriate way.
1. Maintenance should be performed according to the procedure indicated in the Operation Manual.
Improper maintenance can cause damage and malfunction of equipment and machinery.
2 . Maintenance work
Compressed air can be dangerous when handled incorrectly. Therefore, in addition to observing the
product specifications, replacement of elements and other maintenance activities should be
performed by personnel with sufficient knowledge and experience pertaining to pneumatic
equipment.
3 . Draining
Remove condensate from air filters and mist separators regularly. If the collected drainage is drained
to the downstream side, it can stick inside of the product, causing operation failure and failure to
reach the desired vacuum pressure.
4 . Replace the filter element built into the ejector and the silencer regularly.
(Refer to the replacement procedure below.)
It is recommended to replace the filter element and the silencer when the pressure drop reaches
5kPa as a guideline, although the replacement cycle varies depending on the operating conditions,
operating environment and supply air quality.
However, if there is a vacuum pressure drop and/or delay in the vacuum suction response time
which causes problem with the settings during operation, stop the operation of the product and replace
the element regardless of the above mentioned replacement guideline.
5. Operation in an environment where there is a lot of dust in the air
The processing capacity of the filter element built in to the product may be insufficient. It is
recommended to use SMC's air suction filter (ZFA, ZFB, ZFC series) in order to avoid problems.
6. Check before and after the maintenance work
When the product is to be removed, turn off the power supply, and be sure to cut off the
supplypressure and exhaust the compressed air. Confirm that the air is released to atmosphere.
When mounting the product after the maintenance work, supply product with compressed air and
power, checking for any leakages and that the product functions properly
7. Do not disassemble or modify the product, other than the replacement parts specified in this manual.
■Spare Part List
Description
Solenoid valve
Filter element
[For suction filter]
Sound absorbing material 1
(single unit)
Sound absorbing material 2
(manifold)
Vacuum pressure switch
Manifold base Assembly
Product number
VQ110-□□□
VQ110Y-□□□
VQ110(L,N)-□□□
ZQ1-VQ120□□□
Remarks
N.C.(1W)
NC low wattage type (0.5W)
Latching type
N.O.
XT534-5-001-AS
Filtration rating: 30μm Material: PVF
ZQ-SAE
Material: PVF
ZZQ-SAE
Material: PVF
ZQ1-ZS□□□□-□A
ZZQ1□-□□□
- 24 -
Doc. no. ZQ-0M00801
■ How to replace the Silencer
(Vacuum ejector system only)
Single unit type
1. Loosen the round head combination
screws (2 pcs) to remove the silencer plate.
Fig. 1
(Figure 1.)
Round head combination screw
Silencer sub-plate
2. Replace the sound absorbing
material (ZQ-SAE).
(Figure 2)
3. Tighten the silencer plate with round head
combination screws.
(Tightening torque: 0.12 +/- 0.01Nm)
Fig. 2
Silencer
ZQ-SAE
Manifold type
1.
Loosen the four hexagon socket head cap
マニホールドタイプの場合
screws to remove the two silencer blocks.
(Figure 3)
2. Replace the sound absorbing
material
(ZZQ-SAE) in the silencer block.
①
Fig. 3
(Figure 4)
②
Hexagon socket head cap screw
3. Tighten the silencer blocks with hexagon
socket head cap screws.
(Tightening torque: 0.28+/-0.03N･m)
Fig. 4
Silencer
- 25 -
ZZQ-SA
Doc. no. ZQ-0M00801
■
How to replace the suction filter
1. Loosen the tension bolt and remove
the filter case.
(Figure 5)
Fig. 5
Filter case
2. Replace the filter element (XT534-5-001-AS)
Tension bolt
and insert the element back into the guided
filter case.
(Figure 6)
3. To position the filter case insert protrusions
(2pcs.) into the
Fig. 6
body securely and fix it in place
Guides
by tightening tension bolt.
(Figure 7)
Filter element
XT534-5-001-AS
Note) Confirm O-ring and gasket are mounted
into mating grooves before tightening tension
O-ring
bolts.
Fig. 7
Gasket
- 26 -
Doc. no. ZQ-0M00801
■
How to order replacement
- 27 -
Doc. no. ZQ-0M00801
Manifold Products
Increasing and Decreasing the Number of Manifold Stations
■Ejector System
- 28 -
Doc. no. ZQ-0M00801
Increasing and Decreasing the Number of Manifold Stations
■Pump system
- 29 -
Doc. no. ZQ-0M00801
Exhaust from Ejector

Avoid back pressure being applied to the exhaust air of the ejector.
The exhaust resistance should be as small as possible to obtain the full ejector performance.
There should be no shield around the exhaust port for the silencer exhaust specification. For the port
exhaust specification, the back pressure increase should be 0.005MPa (5kPa) at maximum, as exhaust
resistance is generated with some piping bore sizes and piping lengths.
For the silencer exhaust specification, the silencer will gradually get clogged if dust in the operating
environment is sucked in or if the supply air is not clean enough. If the silencer is clogged, back pressure
is applied to the ejector exhaust which results in a reduction in the vacuum pressure and the suction flow
rate.
It is recommended to replace the silencer with a new one when the vacuum pressure of the ejector
decreases or a delay in response time is generated.
Specifications
- 30 -
Doc. no. ZQ-0M00801
- 31 -
Doc. no. ZQ-0M00801
Circuit Diagram
■
Specifications of a Single Unit
Ejector System
- 32 -
Doc. no. ZQ-0M00801
Pump system
- 33 -
Doc. no. ZQ-0M00801
■Manifold Specifications
Ejector System
ZZQ1※-BSB
ZZQ1※-BSC
Pump system
ZZQ1※-※OB
ZZQ1※-※OC
- 34 -
Doc. no. ZQ-0M00801
Mass
■Ejector System
■Pump system
- 35 -
Doc. no. ZQ-0M00801
Exhaust Characteristics and Flow Characteristics of Ejector
- 36 -
Doc. no. ZQ-0M00801
Flow Characteristics Curve

How to Read the Flow Characteristics Curves of Ejector/Vacuum Pump System
- The flow characteristics curve shows the relationship
the ejector/vacuum pump system. It shows that the
vacuum pressure changes when the suction flow
changes. Generally, the curve shows the relationship
at the standard supply pressure of the ejector.
In the graph on the right, Pmax means the maximum
Vacuum pressure
between the vacuum pressure and the suction flow of
vacuum pressure and Qmax means the maximum
Suction flow
suction flow.
The value shown in this graph is what is shown in this operation manual and the catalogs as the
specifications.
The change of vacuum pressure is explained in sequence as follows.
1 . When the vacuum port (V) is closed, the suction flow will be “0” and the vacuum pressure will reach
its maximum (Pmax).
2 . When the vacuum port (V) is opened gradually, air will flow. (If there is bleeding air, the suction flow
will increase, but the vacuum pressure will decrease.): [State of P1 – Q1]
3 . If the vacuum port (V) is opened fully, the suction flow will reach its maximum (Qmax), but the
vacuum
pressure will become almost “0” (atmospheric pressure).
As described above, the vacuum pressure changes when the suction flow changes.
Converting this to the adsorption state of the workpiece, the vacuum pressure reaches its maximum
when the pad and the piping on the vacuum port (V) have no leakage. Vacuum pressure decreases
when there is a lot of leakage when adsorbing
a workpiece. When the amount of leakage and the
maximum suction flow are equal, the vacuum pressure becomes almost “0”, and it fails to adsorb
the
workpiece.
Vacuum pressure will not increase if the product is used for adsorption of permeable workpieces or
when there is leakage. In such a case, sufficient verification and prior tests are required.
Pressure Sensor Assembly

Handling Precautions
1. Do not drop, hit or apply excessive shock (100m/s2) to the product. The inner parts can be damaged
leading to malfunction even if the sensor body is not damaged.
2. The tensile strength of the lead wire with connector is 35N. Exceeding this value can cause breakage.
Be sure to hold the body when handling.
3. Avoid repeatedly bending or stretching the lead wire with connector. The lead wire may break if it is
wired so that such force acts on it. If the lead wire can move, fix it near the body of the product.
The recommended bending radius is 40mm or more. Contact SMC for more details if required.
- 37 -
Doc. no. ZQ-0M00801

Connection
1. Incorrect wiring can damage the switch and cause malfunction. Connections should be done while the
power supply is turned off.
2. Do not attempt to insert or pull out the connector from the pressure switch while the power is on.
This may cause switch output malfunction.
3. Malfunctions stemming from noise may occur if the wire is installed in the same route as that of power
or high-voltage cable. Wire the pressure switch independently.
4. Be sure to connect the ground terminal F.G. to ground when using a commercially available
switch-mode power supply.

Operating Environment
The use of resin piping can cause static electricity to be generated, depending on the fluid. Therefore,
when connecting the vacuum pressure switch assembly, take appropriate measures against static
electricity at the customer’s equipment side, and separate the grounding for the product from the
grounding for any equipment which generates a strong electromagnetic noise or high frequency.
Otherwise, static electricity can break the vacuum pressure switch assembly.
Refer to SMC website (URL http://www.smcworld.com) for details of the 2-color display high precision
digital pressure switch, ZSE30A Series, other than those shown above.
- 38 -
Doc. no. ZQ-0M00801
Troubleshooting
■ Countermeasures for ejector/vacuum pump system problems and troubleshooting
Trouble
Cause
Countermeasures
Initial
adsorption
failure
(It fails to
adsorb
during the
trial run.)
The adsorption area is too small;
the adsorption force is not strong
enough compared with the weight
of the workpiece and the force
applied during transfer.
Vacuum pressure is too small, due
to leakage at the adsorption part or
generation of a space between the
pad and the workpiece due to
deformation of the workpiece.
Vacuum pressure is too small, due
to leakage of vacuum pressure due
to permeability of the workpiece.
Vacuum pressure is too small due
to leakage from the vacuum piping.
Suction flow is too small.
(Ejector performance is not high
enough.)
Suction flow is too small because
the piping diameter is too small and
the length is too long, causing
restriction of the sucking flow of the
ejector.
Vacuum pressure and/ or suction
flow are too small, making the
supply pressure to the ejector
insufficient.
Vacuum pressure and/or suction
flow are too small, due to clogging
of the nozzle and the diffuser.
Malfunction of supply valve
Increase the lifting force.
→ Increase the pad diameter
→ Increase the number of pads.
Reduce the vacuum leakage (by increasing the
vacuum pressure).
→ Change the pad configuration. Increase the
adsorption area.
→ Change the pad material (e.g. to a material that
fits the uneven surface).
→ If the workpiece is thin, change to a suitable pad.
Check the vacuum pressure and the suction flow.
→ Change to an ejector with larger suction flow.
→ Repair vacuum piping.
→ Change to an ejector with larger suction flow.
→ Increase the piping diameter and length on the
vacuum side.
→ Measure the supply pressure when the vacuum
is generated, and increase the supply pressure to
the standard supply pressure. Improve the line if the
flow is insufficient.
Especially when more than one product is operated
at the same time in a manifold, the supply air can be
insufficient, causing decrease of the supply
pressure.
→ Remove foreign matter and substances sticking
to it. (Needs to be repaired.)
Perform flushing and mount an air filter on the
supply side to prevent it happening again.
Measure the supply voltage to the solenoid valve.
→ Revise the electrical circuit, wiring and
connectors.
→ Use within the rated voltage range.
- 39 -
Doc. no. ZQ-0M00801
Trouble
Cause
Countermeasures
→ Reduce the internal capacity of the vacuum
Adsorption
Internal capacity of the circuit on
response
the vacuum side is too large for
is not
the ejector performance.
→ Change to an ejector with larger suction flow.
quick enough.
The set vacuum pressure for the
Optimize the lifting force and change the setting to
suction verification is too high,
have the suction verification with the vacuum
making the time before
pressure as low as possible.
circuit.
it reaches the set value longer.
Fluctuation of
Supply pressure fluctuates.
Install a tank in the compressed air line on the
vacuum
supply side, and reduce the air consumption of other
pressure
equipment.
The generated vacuum pressure
This is a phenomenon peculiar to ejectors which is
fluctuates, making the exhaust
caused when the supply pressure is a little lower
noise intermittent at a certain
than the standard supply pressure.
supply pressure range.
→ Increase or decrease the supply pressure a little.
Vacuum pressure is reduced,
 Replace the filter element with a new one.
due to clogging of the suction
 Increase the number of suction filters (such as
time (adsorbs
filter
ZFA, ZFB and ZFC)
properly
environment
initially.)
side, foreign matter on the
Vacuum
failure
over
(due
to
dust
in
the
on the vacuum
surface of workpiece, adsorption
of humidity, etc.)
Vacuum pressure is reduced,
Clean the supply air.
because of the clogging of the
 Control the drainage.
silencer (due to foreign matter
 Mount an air filter and a mist separator.
such as drainage and carbon
 Replace the silencer with a new one.
particles in the supply air).
Vacuum pressure and/or suction
→ Remove foreign matter and substances sticking
flow is reduced due to clogging
to it. (Needs to be repaired.)
of the nozzle and the diffuser.
Mount an air filter on the supply side to prevent it
happening again.
Vacuum pressure and/or suction
→ Remove foreign matter and substances sticking
flow is reduced due to clogging
to it. (Needs to be repaired.)
of the nozzle and the diffuser.
Mount an air filter on the supply side to prevent it
happening again.
- 40 -
Doc. no. ZQ-0M00801
Trouble
Cause
Countermeasures
Vacuum
Adsorbing part has some problem,
→ Replace the vacuum pad with a new one.
failure
such as deterioration of the vacuum
→Revise the adsorption conditions (such as
pad, or leakage due to frictional
compatibility of the vacuum pressure with the
(adsorbs
wear.
pad/workpiece)
properly
The filter case gasket has come off
Vacuum pressure leaks if the gasket has come off or
initially.)
when the filter element
out of the groove when maintenance of the filter was
was replaced.
performed.
over
time
→ Check if it is mounted properly.
Defective
operation
caused
by
→ Shorten the energization time of the solenoid
energization of solenoid valve for
valve.
an extended period of time.
→ Provide forced ventilation in the operating
(Energized for 10 minutes or more
environment in order to prevent temperature
or operated with the duty ratio of
increase around the solenoid valve.
50% or more.)
Workpiece
Vacuum break flow is not large
→ Open the vacuum break flow adjusting needle.
is
enough.
→ For the specification with individual port for
not
released
release pressure supply port and air supply port,
smoothly.
increase the release pressure at the releaser
pressure supply port.
The vacuum pad surface is worn
→ Replace the vacuum pad with a new one.
out, making it sticky.
→ Revise the material and configuration of the
vacuum pad.
→ Use a special pad which has a blasted adsorption
surface. (Made-to-order)
Vacuum pressure is too high.
→ Decrease the supply pressure to lower the
vacuum pressure.
→ Decrease the pressure in the piping on the
vacuum side with a vacuum regulator.
Workpiece sticks to the pad due to
→ Use a conductive pad.
static electricity.
Vacuum break signal
is inappropriate .
timing
If the pad is lifted before the workpiece is completely
released from the pad, the workpiece is lifted
together with the pad due to the viscosity of the pad.
→ Revise the timing of the vacuum break and the
lifting of the pad.
- 41 -
Doc. no. ZQ-0M00801
Revision history
4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN
Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362
URL http://www.smcworld.com
This manual is subject to change without prior notice.
© 2010 SMC Corporation All Rights Reserved
- 42 -
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