Mass Flow Meters and Controllers

Mass Flow Meters and Controllers
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Mass Flow Meters and Controllers
■What is a Mass Flow Instrument (Mass Flow Controller/Mass Flow Meter)?
■Guide to Selection of Mass Flow Instruments
■Mass Flow Controller/Meter with Indicator
MODEL D8300 Series
■Digital Mass Flow Controller
MODEL D3660 Series
■Mass Flow Controller/Mass Flow Meter with Indicator
MODEL 8300 Series
■Standard Mass Flow Controller
MODEL 3660 Series
■High-grade Mass Flow Controller
MODEL 3200 Series
■Low-cost Metal Sealed Mass Flow Controller/Meter
MODEL 5400 Series
■High-grade Metal Seal Flow Controllers
MODEL 5100 Series
■Auto Pressure Controllers
MODEL 9100 Series
■Large Capacity Mass Flow Controller
HFC-303 Series
■Low-cost Mass Flow Meter with Indicator
MODEL 3810DS Series
■High-grade Mass Flow Meter
MODEL 3100 Series
■Standard Mass Flow Meter
MODEL 3760 Series
■Large Capacity Mass Flow Meter
HFM-301 Series
■Small Pressure Loss Large Capacity Mass Flow Meter
MODEL HFM-200W/LS Series
■Low-cost Mass Flow Sensor
MODEL 3810S Series
■Low-cost Digital Mass Flow Meter
MODEL D3810 Series
■Small Karman Vortex Flow Meter for Liquids
FM0101/0102/0103/0105 Series
■Small Karman Vortex Flow Meter for Liquids
MODEL 31 (Teflon®/PFA) Series
■Compact Flow Sensor for Liquids
VISION 2000 Series
■Flow Indicators
MODELS ALM-4/ACM-10/DPM-3/DPM-240
■Functional Flow Input/Display Unit with Alarm
MODEL DPM-100
■Flow Setting Device
MODEL CK Series
■Multifunctional Readout Unit with Integrator & Alarm
MODEL CR-700A
■Multifunctional Readout Unit with Integrator & Alarm
MODEL CR-500
■Compact Readout Unit
MODEL CR-300
■Compact Readout Unit
Model CR-200
■Mass Flow Meter Power Unit
MODEL PSK-2TFX
■Mass Flow Controller/Meter Power Units (for Integration into Customer’s Equipment Panel)
MODEL PSK-FB Series
■Model 8300 Series Power Cable
PSK-83/CP-83CF Series
■Table of Compatibility Cables and Accessories for KOFLOC Mass Flow Meters/Controllers
■Examples of Applications of Mass Flow Meters/Controllers
■Compact Handy Mass Flow Control/Measurement Unit
FLOW COMPO®
A
Mass Flow Meters and Controllers
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WHAT IS A MASS FLOW INSTRUMENT (MASS
FLOW CONTROLLER/MASS FLOW METER)? (1)
A
KOFLOC is a general manufacturer of precision flow controllers and produces mechanical float
type flow meters and valves, as well as electronic flow meters (mass flow controllers and mass flow
meters). Our mass flow measuring/control technology based on mass flow meters and mass flow
controllers has been used widely for the manufacture of semiconductors, liquid crystals, optical fibers, and other electronic devices; gas supply for fuel cells; combustion gas control for burners and
the like; and for test, production, and inspection equipment in the food industry, biotechnology, and
many other industries. In comparison with conventional mechanical products, mass flow measuring
instruments offer more sophisticated flow measurement because they are not susceptible to temperature and pressure and they can pick up electric signals from the flow.
KOFLOC manufactures a variety of products related to electronic flow meters (mass flow controllers
and mass flow meters), and quickly releases new products. Our products are highly valued by our
customers.
1. Volume flow and mass flow
Gas flow meters can be roughly divided into volume flow meters
and mass flow meters. Volume flow meters include area flow meters,
positive displacement fl ow meters, and differential pressure fl ow
meters, while mass flow meters include coriolis flow meters, vortex
flow meters, and thermal flow meters. The float type flow meters produced by KOFLOC are classified as area flow meters in the category
of volume flow meters, while the mass flow instruments produced
by KOFLOC are classified as thermal flow meters in the category of
mass flow meters. In terms of classification, the terms, "thermal mass
flow controllers and thermal mass flow meters," are used according
to the basic principle. In this catalog, however, the commonly used
mass flow instruments mean mass flow controllers and mass flow
meters in general.
The difference between volume flow meters and mass flow meters
is explained below using some simple examples. Most of the volume
flow meters are used when each section of a flow meter is exposed
to the atmosphere as shown in Figure 1, namely, when no pressure is
applied to the inside of the flow meter. When pressure is applied, the
reading of the volume flow meter calibrated in the atmosphere will not
be correct, and a calculation for correcting the reading is necessary.
Soap film flow meters and dry/wet gas meters are especially susceptible to even a small resistance, and they are used in the atmosphere
in principle. The same applies to float type flow meters; their reading
cannot be correct when the gas density changes because of a substantial change in pressure or gas temperature. Therefore, the pressure and temperature conditions must be determined in advance, or
calculation for correcting respective factors is necessary for the reading.
Meanwhile, as the name suggests, mass flow meters detect flow
by means of weight, permitting the flow to be defined in the same
state even if the density changes due to compression of fluid. When
gas is detected by means of mass, the reading of the flow mentioned
above will be the same even in a pressurized state as shown in Figure 2. Therefore, flow meters can be placed at any location on the
flow chart, permitting a system to be configured without significant
flow reading errors.
Fig. 1
Into air
Volume flow meter
Flow control valve
Fig. 2
Pressure gauge
P1
Pressure P1
MF
Mass flow meter
Flow control valve
2. Principle of mass flow instruments
12
Fig. 3 Structure of sensor section
Rus
Rds
Gas 1
Sensor temperature
The flow sensor used in mass flow is called a thermal flow sensor
in general. The principle of detection is as follows.
A resistive element with a large temperature coefficient of resistance is wound on the upstream side (Rus) and the downstream
side (Rds), respectively, around the capillary tube that is a sensor as
shown in Figure 3. When electric current flows through these sections, the two resistive elements generate heat. When no fluid flows in
the capillary tube at that time, the temperature of the upstream side
is the same as that of the downstream side, matching each other.
(The solid line in Figure 3: Zero flow = Position of the zero point used
for mass flow instruments.) When the fluid begins to flow in this state,
the temperature distribution changes as shown by the broken line in
Figure 3. The heat of the upstream side is drawn at that time, and the
heat is transferred by the flow to the downstream side conversely. In
other words, a temperature difference (∆T) arises between the upstream and downstream sides.
Zero point
Temperature distribution
T
A
As the temperature difference (∆T) has a functional relation to the
mass flow of fluid, mass flow instruments pick up electric signals that
represent the change in respective resistance values and amplify and
correct the signal to permit the mass flow to be measured under a
certain condition. This is the function of the mass flow meter shown
in Figure 4.
In the mass flow controller shown in Figure 5, the opening of the
fl ow control valve is controlled by a high-velocity, high-resolution
piezo or solenoid actuator based on the comparison between the external flow setting signal and the flow signal output from the sensor.
This system permits stable mass flow control, which will hardly be
affected by changes of various conditions such as temperature and
pressure.
Fig. 4 Structural chart of mass flow meter
Fig. 5 Structural chart of mass flow controller
Power supply
Indicator
±15V
Setter
Flow signal
0-5V
Setting signal
0-5V
Comparative
control circuit
Power supply
Amplifier
±15V
Solenoid or
piezo actuator
Bridge circuit
Bridge circuit
Amplifier
Indicator
Sensor
Flow signal
0-5V
Sensor
Gas OUT
Gas IN
Gas OUT
Gas IN
Bypass
Valve
Bypass
3. Unit of flow
A mass flow meter measures the mass flow irrespective of pressure and temperature. When representing mass by the fl ow, it is
necessary to use units such as g/min and kg/min which are different
from the familiar units used for general fluid measurement. Therefore,
it is common to use volume flow under predetermined standard con3
ditions of pressure and temperature. At present, Pa·m /s is used in
conformance with the SI units, but SCCM and SLM which have long
been used for mass flow instruments are still used as principal units.
With respect to the definition of the standard unit, KOFLOC adopted the definition based on the SEMI standard in October 1998.
SCCM is an abbreviation of Standard Cubic Centimeter per Minute,
indicating cc/min at 0°C at 1 atmospheric pressure, while SLM is an
abbreviation of Standard Liter per Minute, indicating L/min under the
same conditions. Other units of flow, if they are recognized as units
of measurement at present, can be used for calibration and manufacture of our products. In some industries other than the semiconductor industry, SCCM and SLM are defined as the units at 20°C at
1 atmospheric pressure and NCCM and NLM as the units at 0°C at
1 atmospheric pressure. Concerning the flow indication of our mass
flow instruments, the standard temperature and pressure in units of
SCCM (0°C, 1 atm) and NLM (0°C, 1 atm) are shown on our products and in test reports.
4. Calibration with actual gas and conversion factor method
KOFLOC mass fl ow instruments are calibrated with N 2 gas in
principle before shipment. The accuracy of thermal sensors cannot
be guaranteed unless they are calibrated with actual gas. The actual
gases used for calibration at our company are N2, O2, H2, He, CO2,
and Ar. Concerning other gases, certain conversion factors (CF) are
used for correction after calibration with N2 gas.
For example, when Ar is flowed through a mass flow instrument
that was calibrated with N2 gas, a 1.4 times larger quantity of Ar than
the reading of the mass flow instrument will flow, because the CF of
Ar is 1.4. In other words, the flow of Ar = 1.4 x Reading of N2mass
fl ow instrument. The CF is calculated for various gases based on
calculation and the accumulation of data obtained through measurement with actual gases. However, the CF of one gas may not
be exactly the same depending on the condition of the actual gas
(temperature and pressure), the type of sensor of the mass flow instrument, and combination of the bypass (laminar flow element). The
public standard CF should be used just as a standard value.
If you desire calibration with actual gas without using a CF, please
provide us with the actual gas, and we will use it for calibration (this
will incur a separate fee for gas calibration). However, we cannot accept some dangerous gases in view of the safety of products and
facilities. Please contact us in advance for details.
13
WHAT IS A MASS FLOW INSTRUMENT (MASS
FLOW CONTROLLER/MASS FLOW METER)? (2)
A
5. Harness layout - KFC standard
To reduce the wiring length, KOFLOC has been standardizing the
harness layout. The Dsub 9-pin per KFC standard has been adopted
for small capacity mass flow instruments of 20 SLM or less (excluding
special and compact models). (See Figure 6.) This type will likely be
adopted uniformly as the standard electric harness layout for mass
flow instruments in the industry in the near future. To avoid confusion
among users, “KFC standard” is written in the specification column of
the catalog of products conforming to the above standard. Harness
layouts are introduced on the page of each mass fl ow instrument
with connectors made according to other standards. For details, refer
to the operation manual of each product.
Fig. 6 KFC standard
Body connector ... Dsub 9-pin male connector
Compatible connector ... Dsub 9-pin female connector
Pin No.
Signal name
Pin No.
Signal name
1
Valve open/close signal
6
Flow setting signal: Hi
2
Flow output signal
7
Flow output signal COM
3
Power +15 V
8
Flow setting signal: Lo
4
Power COM
9
Valve voltage monitor
5
Power –15 V
Note: Pin Nos.1, 6, 8, and 9 are NC for mass flow meters.
6. Indication of specifications
The indication of mass flow instrument specifications in this catalog
basically conforms to the SEMI standard. The definitions of representative specifications are explained below.
(1) Accuracy
The accuracy is indicated in the form of “Full scale ±%.”
This is the % value with respect to the full-scale value of the error
when the calibration standard gas (N2, for example) is used for our
standard flow meters. Therefore, when the accuracy is ±1% in the
range of Full-scale 50 SCCM, the flow rate will be guaranteed with
the “uncertainty” of 50 x (1/100) = ±0.5 SCCM with respect to our
standard flow rate.
(2) Repeatability
The form of “Full scale ±%” is the same as the accuracy. This
value indicates the deviation of the value obtained by measuring
the flow, which is set under the same environmental conditions,
with our standard flow meters. This definition is different from the
reproducibility that shows the deviation of the value after the environmental condition is changed.
(3) Response
The response is indicated by the time taken for the output of
mass fl ow instruments to stabilize at 98% of the full scale after
starting control from zero flow. Such indication is adopted usually
because it is difficult to analyze 100% in the case of an asymptotic
line.
Note: The value used to indicate the fl ow range is the full-scale
(100%) value only when N2 (or air) is made to flow. Therefore,
when the type of gas and pressure conditions are different,
even if the flow is the same, we may not be able to manufacture products according to the desired specifications; please
contact us in advance.
7. Product grade
(1) High-grade products
Mass flow instruments that are classified as high-grade products
have a structure suitable for high-vacuum applications for semiconductor manufacturing equipment. They are manufactured in a clean
room conforming to the ultra clean specifications required for semiconductor manufacturing. Particle counters and He leak detectors
are used to check all products before shipment.
Depending on the difference in the sealing material, products are
classified into mass flow controllers 5100 and 5400, as well as mass
flow meters 5410, equipped with a metal seal and mass flow controllers 3200, as well as mass flow meters 3100, equipped with a rubber
seal. Models that permit installation of an SR option for measurement
and control of very small flow at full-scale 1 SCCM, as well as models
that permit multi-point quick response defined finely throughout the
entire flow range at the rate of not only 0–98% but also 0–50% and 0
–10%, are high-function products.
(2) Standard low-cost products
Mass flow instruments classified as standard and low-cost products have a structure suitable for exposure to the atmosphere or
medium pressure (high pressure partly). Equipped with a rubber seal,
products are classified into mass flow controllers 3660 SERIES, mass
flow meters 3760 SERIES, and low-cost mass flow meters 3810 SERIES. The HFC/HFM series is used for large flows exceeding the fullscale 100 SLM.
(3) Special usage
Mass flow instruments need to be made specially according to the
usage when the temperature exceeds 100°C, the pressure exceeds
1 MPa, or liquid is to be measured and controlled. In order to meet
diverse needs of customers, KOFLOC offers originally developed
products, as well as products supplied from cooperative companies,
for use in various fi elds. Do not hesitate to contact us for special
products not covered by this catalog and products that include other
piping or piping equipment.
8. Installation and piping
Refer to the dimensional drawing for installation on a panel or the
like. Contact our factory if you are unsure about any aspect of installation.
9. Repair
In the event that our product you are using fails due to aging or
some other trouble, we will receive it for repair, because mass flow instruments are precision equipment composed of very delicate parts.
To assist quick repairs, our products are packed with an operation
14
manual and check sheet. When a trouble or failure occurs, check the
operation manual first, and then send the check sheet by fax to your
nearest KOFLOC or phone us.
GUIDE TO SELECTION OF
MASS FLOW INSTRUMENTS
Mass flow controller
A
Table of grades
5100
High-grade
(Metal seal)
(P22)
5400
(P21)
High-grade
(Elastomer seal)
3200
(P20)
Standard
(Elastomer seal)
Standard with
setting indicator
(Elastomer seal)
Full-scale flow
3665
3660, D3660
(P19)
(P17)
1
10
50
(P16)
(P18)
1
5
20
50
100
(Unit: SCCM)
Mass flow meter
(P24)
8350MC
8300, D8300 (CE Compatible)
(P18)
HFC303
(P19)
500
1000
5000
(Unit: SLM)
Table of grades
High-grade
(Metal seal)
5410
(P21)
High-grade
(Elastomer seal)
3100
3105
(P26)
(P26)
3760
Standard
(Elastomer seal)
3765
(P27)
HFM301
(P27)
15000
(P28)
HFM200W
(P29)
Standard with
setting indicator
(Elastomer seal)
8300, D8300MM (CE Compatible)
(P18)
8350MM
(P16)
Low-cost
(Elastomer seal)
(P18)
3810DS, 3810S, D3810
(P25, P30, P31)
Full-scale flow
1
10
50
1
5
20
50
100
(Unit: SCCM)
Liquid flow sensor
500
1000
5000
500
1000
5000
(Unit: SLM)
Table of grades
(P32)
FM0101
FM0102
Karman’s vortex
(CE, CSA compatible)
(PPS)
FM0103
FM0105
(P33)
FM3101
Karman’s vortex
(CE, CSA compatible)
(Teflon)
FM3102
FM3103
FM3104
(P34)
2F66
4F44
Turbine type
(grilamido)
4F22
F16.5
Full-scale flow
1
10
(Unit: cc/min)
50
1
5
20
50
100
(Unit: L/min)
15
Mass Flow Controller/Meter with Indicator
A
MODEL D8300
SERIES
The digital technology has drastically improved the accuracy and response as compared with conventional models.
As the model has been digitized, the operation system
has been simplified for easy handling.
Features
• The built-in microprocessor ensures highly-functional operation.
• Electric interchangeability with conventional models (analog)
• The general-purpose communication function is provided as
standard. (RS232C/RS485-compatible)
• Device No. can be set.
• High-precision operation with high-resolution (14 bits or more)
AD and DA
• A variety of applications
• A variety of functions by command operation
(Pattern setting, time axis pattern setting, etc.)
• Auto-zero function
• Application of various types of gas using CF values
Standard Specifications
10SCCM-20SLM
Thermal mass flow sensor
Valve actuator
Normally closed solenoid valve actuator
Valve type
Poppet valve
Within ±0.2% F.S.
Proof pressure
1MPa
Operating differential pressure
50kPa-300kPa
Low differential pressure
(Option)
Less than 50 kPa (Contact us for the
possible pressure.)
Temperature
Operating temp.
0°C-50°C
Accuracy guaranteed temp.
15°C-35°C
Humidity
Allowable operating humidity
10%-90% (No condensation)
Alarm
event
Output No.
Alarm output: 1 Event output: 1
(Open collector output Max 35 V: 50 mA)
16
76
127.4±1
37
Resolution
Max. resolution: 1 mV (1 digit)
Communication
Communication type
RS232C (Multi)/RS485:
Communication speed 9600 bps
Power
supply
Required power
DC24V (DC18V-36V)
19
Materials of parts in contact with gasses
SUS316L, SUS316, PTPE, fluororubber,
chloroprene rubber (Optional)
Joint
9/16-18UNF, 1/4Rc, 1/4SWL , 1/4VCR
Mounting position
No specification
Weight
Approx. 1,000 g
®
* Select the input/output signal when placing an order for (1) 0-5V and (2) 4-20 mA.
* Select the communication type RS232C or RS485 when placing an order.
* The described contents are subject to change.
2-M4, depth 4
38
Ordering
®
MODEL D8300
Joint
MODEL D8300
9/16-18UNF
Rc1/4
1
Input
Output
0-5V
0-5V
1/4SWL
2 4-20mA 4-20mA
1/4VCR
3
0-5V
4 4-20mA
*
*
16
Pressure
Within ±1.0% F.S.
Repeatability
Communication
Accuracy
Signal
Setting ±2%F.S within 1 sec. (typical)
Flow rate
Pressure
1%–100% F.S.
Response
Fluid
Control
system
Control range
12.5
Sensor
12.7
Flow rate (at N2 calibration condition)
Dimensions
Type of
communication
1 RS232C
2
RS485
4-20mA
0-5V
Please contact us for the outline drawing.
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Digital Mass Flow Controller
MODEL D3660
A
SERIES
Based on the analog Model 3660, the sensor has been
made into a high-accuracy digital type. The accuracy and
response have been improved exponentially as compared
with conventional models, and this model has diverse
functions.
Features
• The built-in microprocessor ensures highly-functional operation.
• Electric interchangeability with conventional models (analog)
• The general-purpose communication function is provided as
standard. (RS232C/RS485-compatible)
• Device No. can be set.
• High-precision operation with high-resolution (14 bits or more)
AD and DA
• Excellent stability
• A variety of functions by command operation
(Pattern setting, time axis pattern setting, etc.)
• Auto-zero function
Dimensions
Flow rate (at N2 calibration condition)
10SCCM-20SLM
Sensor
Thermal mass flow sensor
Valve actuator
Normally closed solenoid valve actuator
Valve type
Poppet valve
Within 1 sec. for setting ±2% F.S. (typical)
Within ±1.0% F.S.
Repeatability
Within ±0.2% F.S.
Proof pressure
1MPa
Operating differential pressure
50kPa-300kPa
Low differential pressure
(Option)
Less than 50 kPa (Contact us for the
details of possible pressure.)
95
Accuracy
Operating temp.
0°C-50°C
Accuracy guaranteed temp.
15°C-35°C
Humidity
Allowable operating humidity
10%–90% (No condensation)
Alarm
event
Output No.
Alarm output: 1; event output: 1
(Open collector output Max. 35 V: 50 mA)
RS232C (Multi)/RS485:
Communication speed 9600 bps
Power
supply
Required power
DC+15V (±5%) 100mA,
DC-15V (±5%) 200mA
Materials of parts in contact with gases
19
SUS316L, SUS316, PTFE, fluoro-rubber,
or chloroprene rubber (option)
®
2-M4, depth 4
9/16-18UNF, 1/4Rc, 1/4SWL , 1/4VCR
Mounting position
No specification
Weight
Approx. 800 g
®
Joint
* Select the input/output signal when placing an order for (1) 0-5V and (2) 4-20 mA.
* Select the communication type RS232C or RS485 when placing an order.
* The described contents are subject to change.
38
Ordering
MODEL D3660
Joint
MODEL D3660
9/16-18UNF
Rc1/4
1
Input
Output
0-5V
0-5V
1/4SWL
2 4-20mA 4-20mA
1/4VCR
3
0-5V
4 4-20mA
*
*
Pressure
Communication type
Communication
Max. resolution: 1 mV (1 digit)
76
122.8±1
32
Signal
Resolution
Communication
12.7
Temperature
Flow rate
Pressure
1%–100% F.S.
Response
Fluid
Control
system
Control range
100
Standard Specifications
Type of
communication
1 RS232C
2
RS485
4-20mA
0-5V
Please contact us for the outline drawing.
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
17
Mass Flow Controller/Mass Flow Meter with Indicator
A
MODEL 8300
SERIES
The Model 8300 Mass Flow Controller/Meter powered by
a 24 V power supply is the successor to the Model 8100.
The display offers features such as View Point change and
pattern setting functions not available on existing models.
A model with a separate display and setter is also available as a sister model.
Features
• The high-lift actuator allows the compact body to handle large
flows.
• The display panel and setter permit operation with a 24 VDC
power supply.
• The RS232C/RS485 communication function and integration
function are provided as standard.
• The 14-bit converter permits display and operation in 4-1/2 digits.
• The heat generation section of the sensor isolated from gas
permits flow control of inflammable gases.
• No specific mounting position
• In addition to SV setting, five kinds of pattern setting are possible.
• Auto-zero function
Dimensions
The display and setter can be turned by 180°.
Standard Specifications
10SCCM-20SLM (8300)
30SLM-100SLM (8350)
Sensor
Thermal mass flow sensor
Valve actuator
Normally closed solenoid valve actuator
Valve type
Poppet valve
2%–100% F.S.
Response
2 sec. or less for 0 to 98% (for 100% F.S.
at setting and setting at setting
FLOW
Accuracy
Within ±1.5% F.S. (±2% F.S. for 8350)
Repeatability
Within ±1.0% F.S. (±1.5% F.S. for 8350)
Proof pressure
980kPa
Operating differential pressure
49kPa-294kPa
Joint
– Display setter
separation type –
Low differential pressure (Option)
2-149 kPa (not applicable to 8350)
Temperature
Operating temp.
0°C-50°C
Accuracy guaranteed temp.
15°C-35°C
Humidity
Allowable operating humidity
10%–90% (No condensation)
Mode
(1) Input with standard key (2) Input from an external device (3) Input with pattern key (5 patterns)
Input range
(1) 0V-5V
(2) 4mA-20mA (Arbitrary specification)
Output range
(1) 0V-5V
(2) 4mA-20mA (Arbitrary specification)
Method
7-segment LED in 4 digits;
Integral display: 0000–9999
Accuracy
±0.1%
Output No.
Alarm output: 2
(Open collector output Max. 35 V: 50 mA)
Resolution
Max. resolution: 1 mV (1 digit)
Communication type
RS232C (Multi)/RS485:
Communication speed 9600 bps
Rating
24 VDC current consumption: 300 mA max.
Allowable supply voltage range
DC22.8V-25.2V
Flow
indication
Alarm
Communication
Power
supply
FLOW
2-M4, Depth 4
®
Materials of parts in contact with gases
Setter and display
SUS316L, Viton , PTFE, SUS316,
or neoprene rubber (option)
®
Ordering
MODEL 8300MC
O
8300MM
S
Joint
Pressure
Flow rate
output
Main unit
Communication
Flow rate
setting
Depth 4
Depth 5)
* Values indicated in ( ) denote the dimensions of Model 8350.
Signal
Pressure
L dimension (mm)
Flow rate
Control
system
Control range
Fluid
Flow rate
(at N2 calibration condition)
®
Joint
9/16-18UNF, 1/4Rc, 1/4SWL , 1/4VCR
Mounting position
No specification
MC:Controller
0: Integral type
Integral type: Approx. 1,000 g
Separate type: Main unit Approx. 900 g
Display Approx. 100 g
MM:Meter
S1: Separate: 1 m
Rc1/4
1
Input Output
0-5V 0-5V
1 RS232C
S3: Separate: 3 m
1/4SWL
2 4-20mA 4-20mA
2 RS485
S5: Separate: 5 m
1/4VCR
3
Weight
9/16-18UNF
Type of
communication
0-5V 4-20mA
4 4-20mA 0-5V
*
*
18
Please contact us for the outline drawing.
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Standard Mass Flow Controller
MODEL 3660
A
SERIES
Model 3660 Series Mass Flow Controller has been developed centering the focus on compactness and low cost
and is being acclaimed by a wide range of users for diverse applications, including from laboratory research and
development activities to the use as a standard mass flow
control model for various types of analyzers and vacuum
devices in the production line. Varieties of derived models
and options are available.
Features
• Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response
• Use of a normally closed valve to ensure safety
• High reliability ensured using a solenoid actuator
• Low differential pressure type control available for combustible
gases (LP option)
Standard Specifications
Dimensions
Valve types*
Normally closed solenoid poppet valve
Control range
2%-100%F.S. (5%-100%F.S.)
Response
2 sec. or less to within ±2% of full scale of
final value typical for 0-100% response
Accuracy
Within ±1.5% F.S. (Within ±2.0% F.S.)
Repeatability*
Within ±0.5% F.S.
Operating differential pressure
F.S.≤5SLM 49kPa-294kPa
* Low differential pressure specification depends
on types of gas and flow rates to be used.
Proof pressure*
980kPa
Leak rate*
1x10 Pa·m /s or less (excluding transmission of He)
Working temperature range
5-45°C (Accuracy guaranteed within 15-35°C)
3660
MASS FLOW CONTROLLER
FLOW
12.
7
(15)
5<F.S.≤20SLM 98kPa-294kPa (147kPa-294kPa)
-8
95
(120)
100
(125)
Flow range (at N2 calibration conditions) 10SCCM-20SLM (30SLM-100SLM)
76
(108)
L
3
32
(34)
Joint
Valve seat: Viton (Optional: Neoprene or NBR)
®
®
Seals: Viton (Optional: Neoprene or NBR)
®
Standard: 1/4SWL (3/8SWL)
®
®
Optional: 1/8SWL , 1/4VCR , Rc 1/4, etc.
Dsub 9-pin male connector per KFC/SEMI standards
Electrical connections*
Flow rate input signals
0-5VDC
Flow rate output signals*
0-5VDC
Required power supply*
+15VDC (±5%) 100mA –15VDC (±5%) 200mA
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC Standard
*
MODEL
Signal
1
Input valve open/close operation
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power source
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
-15 VDC Power source
6
1/4 VCR®
123.
8
(155.8)
Rc 1/4
3/8 Swagelok®
Flow input Hi
Because a differential input system is used for the product, pin 4 (Power source COM)
and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8
(Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.
Illustrative
example
MODEL
*
Option
Standard
{ 3660:
3665: Large flow type
Joint
Pin No.
127.
4
(159.4)
102
(134)
130.4
(162.4)
Ordering
Items marked with an asterisk (*) indicate common specifications.
Values indicated in ( ) denote the specifications for Model 3665.
Signal
122.
8
(−)
1/4 Swagelok®
* Values indicated in ( ) denote the dimensions for Model 3665.
Model
Pin No.
Dimension L (mm)
1/8 Swagelok®
2-M4, Depth: 4(5)
19
38
(20) (68)
{
No option
{ 0:Option
name
NR–Neoprene seal
MP–294kPa-784kPa
LP–Low differential
pressure
specification
1/4SWL:1/4Swagelok®
1/8SWL:1/8Swagelok®
1/4VCR:1/4VCR®
1/4:1/4RC
Optional
e
r
Flow rate
Joint*
18.
5
T®
Fluid
Materials of parts in contact with gases
®
(24.5)
Body: SUS 316
q
w
3660
3665
1/4SWL
1/8SWL
1/4VCR
1/4
3/8SWL
Optional
t
q
w
e
r
t
3660
1/4SWL
N2
100SCCM
0
0
Option name
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
19
High-grade Mass Flow Controller
A
MODEL 3200
SERIES
Model 3200 Series Mass Flow Controller is an advanced
model designed as a successor of the 3910 Series that
enjoys a wide use for diverse applications such as manufacture of semiconductors, LCDs, combustion equipment,
analytical devices, and biotechnology fields. Its high performance is equal to a new standard of KOFLOC.
Features
• Equipped with a temperature follow-up type current difference
detection flow sensor (patent applied for) to ensure high accuracy and high-speed response
• Use of a normally closed valve to ensure safety
• Can be used for control of various types of gases thanks to the
incorporated CF switching feature.
• Reduced dead volume thanks to the diaphragm seat valve
• Control of small quantities of flows available up to 1 SCCM full
scale (SR option)
• Low differential pressure type control available for combustible
gases (LP option)
Standard Specifications
Flow range (at N2 calibration conditions)
Dimensions
10SCCM-20SLM
Normally closed, Solenoid, Diaphragm seat valve
Control range
2%-100%F.S.
Response
1 sec. or less to within ±2% of full scale of
final value typical for 0-100% response
Accuracy
Within ±1.0% F.S.
126
130.
5
Valve type
Linearity
Within ±0.5% F.S.
Repeatability
Within ±0.2% F.S.
Operating differential pressure
F.S.≤5SLM 49kPa-294kPa
* Low differential pressure specification depends
on types of gas and flow rates to be used.
3200
MASS FLOW CONTROLLER
13
FLOW
16
5<F.S.≤20SLM 98kPa-294kPa
980kPa
Leak rate
1x10 Pa·m /s or less
-8
Working temperature range
3
0-50°C (Accuracy guarantee: 15-35°C)
Body: SUS 316L
Diaphragm: SUS 316
Materials of parts in contact with gases
Joint
Dimension L (mm)
1/4 Swagelok®
127.
4
1/8 Swagelok®
122.
8
VCR®
1/4 123.
8
18.
5
Proof pressure
7
6
L
38
102
Rc 1/4
19
Valve seat: PTFE
®
2-M4, Depth: 5
3
8
®
Seals: Viton (Optional: Neoprene or NBR)
®
Standard: 1/4SWL
Joint
®
Ordering
®
Optional: 1/8SWL , 1/4VCR , Rc 1/4, etc.
Electrical connections*
Dsub 9-pin male connector per KFC standard
(SEMI standard)
Flow rate input signals
0-5VDC
Flow rate output signals*
0-5VDC
Required power supply *
+15VDC (±5%) 100mA, –15VDC (±5%) 200mA
Option
MODEL
q
w
e
r
3200
1/4SWL
1/8SWL
1/4VCR
1/4
Flow rate
Harness Layout
{
q
w
e
r
t
3200
1/4SWL
N2
1SLM
0
Pin Assignment of Dsub 9-pin Connector per KFC Standard
*
20
Pin No.
Signal
Pin No.
1
Input valve open/close operation
6
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power source
8
Flow input Lo
4
Power source COM
9
NC
5
-15 VDC Power source
NR–Neoprene seal
SR–1SCCM/5SCCM
LP–Low differential
pressure
specification
1/4SWL:1/4Swagelok®
1/8SWL:1/8Swagelok®
1/4VCR:1/4VCR®
1/4:1/4RC
Fluid
Joint
No option
{ 0:Option
name
Signal
t
0
Option name
Flow input Hi
Because a differential input system is used for the product, pin 4 (Power source COM)
and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8
(Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.
Illustrative
example
MODEL
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Low-cost Metal Sealed Mass Flow Controller/Meter
MODEL 5400
A
SERIES
Model 5400 Series Mass Flow Controller/Meter features
weldless structure, metal seals, accuracy of ≤±1%, response of ≤±1 second and other basic performance conditions required for semiconductor process control, and
additionally, has achieved a significant price reduction.
Model 5410 Series of the same body design are also lined
up.
Features
• Equipped with a temperature follow-up type current difference
detection flow sensor (patent applied for) to ensure high accuracy and high-speed response
• Use of a normally closed solenoid valve
• Weldless construction and metal seals provides low leakage.
• Reduced dead volume thanks to the diaphragm seat valve
• Spacing, body dimensions and harness layout are designed so
that the product is compatible with other manufacturers' controllers.
Standard Specifications
10SCCM-20SLM
Valve type*
Normally closed, Solenoid, Diaphragm seat valve
Control range*
2%-100%F.S.
112
(5SLM(N ),
131
(1020
. SLM(N ) (4)
2)
2)
Flow range (at N2 calibration conditions)
Dimensions
1 sec. or less to within ±2% of the set point
typical for 0-100% response
Response*
Within ±1.0% F.S.
Within ±0.5% F.S.
Repeatability
Within ±0.2% F.S.
Operating differential pressure*
F.S.≤5SLM 49kPa-294kPa
* Low differential pressure specification depends
on types of gas and flow rates to be used.
Proof pressure
980kPa
Leak rate
1x10
Working temperature range
0-50°C (Accuracy guarantee: 15-35°C)
FLOW
12.
7
Linearity
5<F.S.≤20SLM 147kPa-294kPa
76
124
3
6
3
Pa·m /s or less
1
8.
5
-11
5400
Accuracy
MASS FLOW CONTROLLER
QS option provides 1 sec. or less for 0-100%
to 0-20% responses.
Body: SUS 316L
2-M4, Depth: 5
3
8.
1
Diaphragm: Ni-Co
Materials of parts in contact wirh gases
Valve seat: PTFE
Seals: Ni, SUS 316L
Ordering
®
Joint
Equivalent to 1/4VCR
Electrical connections*
Dsub 9-pin male connector per KFC standard
(SEMI standard)
Flow rate input signals*
0-5VDC
Option
Model
Flow rate output signals
0-5VDC
No option
{ 0:Option
name
QS–Quick start
SL–Slow start
LP–Low differential
pressure
specification
Mass Flow Controller
{ 5400:
5410: Mass Flow Meter
5400: +15VDC (±5%) 100mA, –15VDC (±5%) 200mA
Joint 1/4VCR:1/4VCR ®
Power supply requirement
Items marked with an asterisk (*) are those applicable to Model 5400 only.
MODEL
q
w
5400
1/4VCR
Harness Layout
e
r
Flow rate
*
Fluid
5410: +15VDC (±5%) 100mA, –15VDC (±5%) 100mA
Pin Assignment of Dsub 9-pin Connector per KFC Standard
*
*
Pin No.
Signal
Pin No.
1
Input valve open/close operation
6
Flow input Hi
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power sourc
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
-15 VDC Power source
t
0
Option name
Signal
Because a differential input system is used for the product, pin 4 (Power source COM)
and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8
(Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.
Pins 2, 3, 4, 5, 7 only for Mass Flow Meter
Illustrative
example
MODEL
*
q
w
e
r
t
5400
1/4VCR
N2
100SCCM
0
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
21
High Grade Metal Seal Flow Controllers
A
MODEL 5100
SERIES
Being the successor of the Model 3440 that has been favorably received by many customers, the Model 5100 Series Mass Flow Controller is a multi-range type model provided with improved basic performance features. While,
in appearance, it is a conventional mass flow controller,
it provides many sophisticated features; particularly, its
advanced sensor drive system minimizes zero drift, one
of the characteristic features of the predecessor model so
acclaimed by customers, so that improved response can
be obtained in low ranges.
Features
• Improved control and response performance in every flow range
• Improved performance to follow up set voltage (compatible with
voltage ramping specification)
• Range shift function to meet the multi-range requirement
• Optimized valve to maximize the control resolution in each range
5100B
5100
Standard Specifications
Dimensions
Flow range
10SCCM-20SLM
Valve type
Diaphragm valve (Normally closed solenoid)
Control range
2%-100%F.S.
Response
1 sec. or less to within ±2% of full scale
of final value typical for 0-100% response
Accuracy
Within ±1.0% F.S.
Within ±0.5% F.S.
Repeatability
Within ±0.2% F.S.
Working temperature range
0-50°C (Accuracy guarantee: 15-35°C)
Operating differential pressure
F.S.≤5SLM 49kPa-294kPa
5<F.S.≤20SLM 98kPa-294kPa
126
130.5
Linearity
Mode setting SW
Conversion factor
setting SW
Proof pressure
980kPa
5100
Materials of parts in contact w/gases
SUS 316L, Au or PTFE
FLOW
Joint
Standard: Equivalent to 1/4VCR
®
Optional: 1/4SWL
13
MASS FLOW CONTROLLER
®
-11
External leak integrity
1x10
Input signals
0-5VDC
Output signals
0-5VDC
76
3
Pa·m /s (He) or less
Power supply
+15VDC (±5%) 100mA, –15VDC (±5%) 200mA
Mounting position
Available in any position
Pin No.
Signal
1
Input valve open/close operation
6
Flow input Hi
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power sourc
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
{ 5100
5100B: Model meeting baking temp. up to 80℃
0: No option
Option {
Option name
1/4VCR
Joint { Optional
MODEL
-15 VDC Power source
KP–Internal Polishing
SR–1SCCM, 5SCCM
LP–Low differential
pressure
specification
MP–294kPa-784kPa
e
r
t
Fluid
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Fluid
Model
Signal
38
Ordering
Harness Layout
Pin No.
16
124
q
w
5100
5100B
1/4VCR
Optional
Option name
q
w
e
r
t
5100
1/4VCR
N2
100SCCM
0
0
** Because a differential input system is used for the product, pin 4 (Power source COM)
is connected inside the mass flow controller while pin 8 (Flow input Lo) is isolated. In
case of a single-ended connection, connect pin 8 to pin 4.
* For baking applications on Model 5100B, working temperature is specified up to 80°C.
Illustrative
example
MODEL
*
22
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Auto Pressure Controllers
MODEL 9100
A
SERIES
An Auto Pressure Controller (APC) model incorporates a
pressure sensor for control of pressure. Model 9100 Series
features a KOFLOC solenoid valve whose performance is
highly appreciated by customers. By changing the sensor
set point, this valve readily permits pressure control both
at inlet and at outlet so that it can provide high process
performance when used as a single control device or in
combination with other mass flow controller.
Features
• Improved control and response performance in every flow range
• Switching between two response speeds
• Use of a normally closed solenoid valve
• Reduced dead volume thanks to the diaphragm seat valve
• Spacing and body dimensions are designed so that the product
is compatible with other manufacturers' controllers.
9100B
9100B
9100
Standard Specifications
Dimensions
Measurement system
Vacuum evaporation type semiconductor strain gauge
Valve type
Diaphragm valve (Normally closed solenoid)
Control range
Gauge pressure type: 10-500 kPa;
Absolute pressure type: 10-100 kPa(A)
Response time 1
1 sec. or less for 0-100% response
Response time 2
6 sec. or less for 0-100% response
Pressure regulating valve flow rate
0.5 slm/1 slm/2 slm (Pressure conditions:
at primary pressure of 50 kPa, at secondary
pressure open to atmospheric air, and at N2)
126
130.5
Mode setting SW
Pressure constant
setting SW
Pressure control accuracy
Within ±1.0% F.S.
Accuracy guarantee temperature range
15°C-35°C
9100
Linearity
Within ±0.5% F.S.
AUTO PRESSER CONTROLLER
Repeatability
Within ±0.2% F.S.
Working temperature range
0°C-50°C
Proof pressure
Gauge pressure type: 1MPa;
Absolute pressure type: 450 kPa
Materials of parts in contact w/gases
SUS 316L, Co-Ni, PTFE, Au (Metal) Viton
Joint
Standard: Equivalent to 1/4VCR ; Optional: 1/4SWL
External leak rate
6x10 Pa·m /s (Metal) 1x10 Pa·m /s (Rubber)
(Excluding transmission of He)
Pressure input signals
0.1-5VDC
Pressure output signals
0-5VDC
26
34
3
-8
Joint
1/4 SWL
1/8 SWL
1/4 VCR
RC 1/4
®
3
Power supply
+15VDC (±5%) 100mA, –15VDC (±5%) 200mA
Mounting position
Available in any position
{
(Rubber seal)
{ 9100R
9100M (Metal seal)
F - Inlet pressure control
Type { B - Outlet pressure control
*
Input valve open/close operation
6
Flow input Hi
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power sourc
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
-15 VDC Power source
Illustrative
example
Because a differential input system is used for the product, pin 4 (Power source COM)
is connected inside the mass flow controller while pin 8 (Flow input Lo) is isolated. In
case of a single-ended connection, connect pin 8 to pin 4.
For baking applications on Model 9100B, working temperature is specified up to 80°C.
MODEL
*
9100R
9100M
F
1/4VCR
Optional
Flow rate
1
2
w
Pressure
*
MODEL
Signal
{
q
Fluid
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No.
0.5SLM
1.0SLM
2.0SLM
Optional (Tailored type available)
A:0-98.1kpa(A)
1:0-98kpa
Joint
2:0-343kpa
9100M (Joint 1/4VCR) 3:0-498kpa
9100R (Joint 1/4VCR,
1/4SWL, Others)
Harness Layout
Signal
A
127.4
122.8
124.8
102.0
Ordering
Model
Pin No.
42
76
124
®
-11
13
FLOW
e
r
t
y
q
w
e
r
t
y
9100
F
1/4VCR
N2
A
0.5SLM
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
23
Large Capacity Mass Flow Controller
A
HFC-303
SERIES
The HFC-303, which combines a solenoid type pilot valve
and air-driven flow control valve developed for controlling
large flows, permits precision control of large gas flows
not possible with conventional models. This new model
ensures higher accuracy and quicker response as a successor to the HFC-203 Series that has a solid track record
in a wide range of industries.
Features
• The 2-stage control valve can control large flows of up to 1,000
SLM.
• Accuracy of ±1.0%
• Quicker response than conventional models
• Contact us for details for flows exceeding 1,000 SLM.
Standard Specifications
Harness Layout (Dsub 15PIN)
Flow range (at air calibration condition)
F.S.100-1000SLM
PIN
Signal
Normally closed solenoid + Pneumatic 2-stage valve
1
NC
2-100%F.S.
2
NC
Response
3 sec or less for 0–100% response (within ±2% typical)
3
NC
Accuracy
Within ±1% F.S.
4
NC
Within ±0.25% F.S.
5
Signal COM
147-343kPa
6
0–5 V output signal
3.4 MPa (6.8 MPa for HP option)
7
NC
8
Forced valve closing
15-35°C
9
–15VDC
Body: SUS316, Ni, SUS302
10
NC
11
+15VDC
12
Power source COM
Valve type
Control range
Repeatability
Operating differential pressure
Proof pressure
-8
Leak rate
3
1x10 Pa·m /s or less (excluding transmission of He)
Operating temperature
®
Materials of parts in contact with gases
Valve seal: Viton
®
Sealing material: Viton
®
®
Standard: 1/2 SWL (3/4"SWL when F.S.>300 SLM)
13
NC
Option: 3/4 SWL
14
Set signal
15
NC
Joint
Electric connection
Dsub 15-pin male connector Note: Refer to the harness layout.
Flow setting input signal
0-5VDC
Flow output signal
0-5VDC
Required power
±15VDC (±5%) 150mA
Note: Provide straight pipe sections of the same diameter as the piping before and after mass flow instruments for correct flow measurement.
The diameter of the straight pipe on the primary side should exceed 300 mm.
Dimensions
Note:
The harness layout of the Dsub 15-pin for the
3150/3250/3350/3450 Series is different from
that of the Dsub 15-pin for the HFC/HFM Series.
Incorrect connection will cause failure.
Ordering
15 PIN "D" CONNECTOR
Option
(STANDARD)
ZERO
SPAN
1/2SWL:1/2Swagelok ®
3/4SWL:3/4Swagelok ®
Outlet pressure
Option
N2
100
SLM
0.3
MPa
0.1
MPa
0
"C"
24
63.5
6.35
38.1
1/2SWL
3/4SWL
Inlet pressure
MODEL HFC-303
Flow rate
25.4
"B"
"A"
Fluid
25.4
50.8
Illustrative
example
8−32 UNC depth 6
<300SLM 1/2"Swagelok
>300SLM 3/4"Swagelok
HFC-303 1/2"FITTING
HFC-303 3/4"FITTING
FITTING TYPE
HP-High-pressure spec.
(1MPa)
NR–Neoprene seal
19.8
25.4
119.4
Joint
0: No option
Option name
DIM"A"
FITTING TYPE
MODEL HFC-303
DIM"A"
SWAG. 1/2"W NUT
7.56(197.6)
SWAG. 3/4"W NUT
8.44(214.4)
DIM"B"
5.36(136.1)
DIM"B"
5.76(146.3)
DIM"C"
1.36(34.5)
DIM"C"
1.56(39.6)
*
1/2SWL
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Low-cost Mass Flow Meter with Indicator
MODEL 3810DS
A
SERIES
The Model 3810DS is a newly developed mass flow meter
integral with an indicator based on the time-tested the
Model 3810 mass flow meter. (Low-cost mass flow meter)
The driving power has been changed from the conventional ±15 VDC power supply to a 24 VDC power supply
to improve the convenience, and the indicator now has an
alarm contact for better functionality.
A model with an integral flow sensor and precision needle
valve is also available for flow control at a lower price and
smaller installation space.
Features
• Precision needle valve for control and monitoring of very small
flows
• Two-point alarm output for flow monitoring
• Compact and lightweight mass flow meter!
• The indicator permits instant use simply after connecting a 24
VDC power supply.
• Mass flow instruments eliminate troublesome flow correction
calculations based on the temperature and pressure; the flow
can be read directly on the indicator.
Standard Specifications
Dimensions
F.S.10SCCM-20SLM
F.S.30-100SLM
Accuracy
Within ±2% F.S.
Within ±3% F.S.
Proof pressure
980kPa
-7
3
Leak rate
1x10 Pa·m /s or less
Operating temperature
5°C–45°C (Accuracy guaranteed at: 15°C–35°C)
Materials of parts in
contact with gases
Body: SUS303, Teflon
®
®
Sealing material: Viton (option), Neoprene
70
(40)
Flow range
(at N2 calibration condition)
3810DS
Standard: Rc 1/4 (Contact us for other types.)
Required power
24VDC±5%
Alarm output No.
NPN open collector 2-stage output
Max. rating: 30VDC 50mA
* Cable connection
Connector 3810DS side:
Cable side:
12.5
38
Joint
56
®
108
27
7
56
10
AMP171826-5
AMP171822-5
2-M3, depth 3
3810DS with needle valve
Rc1/4
56.5
V: With needle valve
0: Without needle valve
3810DS
V
1/4
O2
5SLM
30kPa
0kPa
12.5
7
27
70
7
56
10
Illustrative
example
MODEL
Outlet pressure
Joint
Inlet pressure
V
O
Fluid
MODEL 3810DS
Flow rate
Ordering
2-M3, depth 3
3810DS
25
High-grade Mass Flow Meter
A
MODEL 3100
SERIES
The Model 3100 Series Mass Flow Meter is a new, advanced high-precision flowmeter developed based on the
Model 3200 Series. The incorporated innovative capillary
type flow sensor reduces pressure loss and ensures high
response as well as ensuring stability.
Features
• Equipped with a temperature follow-up type current difference
detection flow sensor to ensure high accuracy and quick response
• Compatible with various types of gases thanks to the incorporated CF switching feature.
• Measurements of minute fl ows available up to 1 SCCM full
scale (SR option)
Dimensions
Flow range (at N2 calibration conditions)
10SCCM-20SLM/3100
30SLM-100SLM/3105
Response
1 sec. or less to within ±2% of full scale of
final value typical for 0-100% response
Accuracy
Within ±1.0% F.S./3100
Within ±1.5% F.S./3105
Linearity
Within ±0.5% F.S.
Repeatability
Within ±0.2% F.S.
Proof pressure
980kPa
Leak rate
1x10 Pa·m /s or less (excluding transmission of He)
Working temperature range
0-50°C (Accuracy guarantee: 15-35°)
Materials of parts exposed to gases
Body: SUS 316L, SUS 316, PTFE
®
®
Seals: Viton (Optional: Neoprene )
126(140)
Standard Specifications
3100
MASS FLOW METER
3
16(18)
®
Electrical connections*
*
®
Joint
MODEL 3100 3105
Optional: 1/8SWL , 1/4VCR , Rc 1/4
1/4Swagelok®
Dsub 9-pin male connector per KFC standard
(SEMI standard)
1/8Swagelok® 122.8 154.8
1/4VCRTM
RC1/4
Flow rate output signals*
0-5VDC
Required power supply*
+15VDC (±5%) 100mA, –15VDC (±5%) 100mA
L
Dimension L (mm)
®
Standard: 1/4SWL (3/8SWL)
Joint
76(108)
38(36)
18.5(25.4)
-8
FLOW
127.4 159.4
102
2-4M,Depth:5
38(68)
123.8 155.8
134
Values indicated in ( ) are for Model 3105.
Ordering
Select option
Model
Harness Layout
Standard
{ 3100:
3105: Large capacity
Joint
{
{
0: No option
Option name: NR–Neoprene
SR–1SCCM, 5SCCM
1/4SWL:1/4Swagelok®
1/8SWL:1/8Swagelok®
1/4VCR:1/4VCR®
1/4:1/4RC
Pin No.
6
Signal
1
NC
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power source
8
NC
4
Power source COM
9
NC
5
-15 VDC Power source
MODEL
NC
Illustrative
example
MODEL
*
26
q
w
e
r
3100
1/8SWL
1/4SWL
1/4VCR
1/4
Flow rate
Signal
Fluid
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No.
t
q
w
e
r
t
3100
1/4SWL
N2
100SCCM
0
0
Option name
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Standard Mass Flow Meter
MODEL 3760
A
SERIES
The Model 3760 Series is a compact, low-cost mass flow
meter developed based on the Model 3660 Series. It has
been developed as a standard model of various analyzers
and vacuum equipment for research and development at
universities and research institutes.
Features
• Improved constant-current temperature difference detection
type flow sensor for quick response
• The compact body permits installation at any location.
• Alarm output in combination with DPM-100 (Flow monitoring)
• Flow integration in combination with CR-500 (Consumption
management)
Standard Specifications
Dimensions
Flow range (at N2 calibration condition)
10SCCM-20SLM/3760
30SLM-150SLM/3765
Response
2 sec. or less (typical)
Accuracy
Within ±1.5% F.S. (Within ±2% F.S.)
Proof pressure
980kPa
Leak rate
1x10 Pa·m /s or less
(excluding transmission of He)
Operating temperature
5°C–45°C (Accuracy guaranteed at: 15°C–35°C)
Materials of parts in contact
with gases
Body: SUS316L
®
®
Sealing material: Viton (option), Neoprene
Joint
Standard: 1/4 SWL (3/8 SWL)
®
®
Option: 1/8SLM , 1/4VCR , Rc1/4, others
Electric connection
Dsub 9-pin male connector per KFC standard
Flow output signal
0-5VDC
Required power
+15VDC±5% 100mA, –15VDC±5% 100mA
3
3760
MASS FLOW METER
FLOW
12.
7
(15)
®
761
(0
8)
L
32
(34)
Joint
1
8.
5
*
95(1
20)
10
0(12
5)
-8
Values indicated in ( ) are for the 3765.
19
38
− depth 5
2-M4
(20)
(68)
Dimensions indicated in ( ) are for the 3765.
Option
Pin Assignment of Dsub 9-pin Connector per KFC standard
Signal
1
22.
8(―)
1/4 Swagelok®
12
7.
4(15
9.4)
1/4 VCR®
1
23.
8(1
55.8)
Rc 1/4
3/8 Swagelok®
1
02(1
34)
1
30.
4(1
62.4)
Ordering
Harness Layout
Pin No.
Dimension L (mm)
1/8 Swagelok®
Pin No.
Signal
1
NC
6
NC
2
Flow output 0–5 V
7
Flow output COM
3
+15 VDC Power source
8
NC
4
Power source COM
9
NC
5
–15 VDC Power source
Model
0: No option
Option name: NR-Neoprene seal
1/4SWL :1/4Swagelok®
1/8SWL :1/8Swagelok®
3760: Standard
Joint 1/4VCR :1/4VCR®
3765: Large capacity
1/4 :1/4RC
3/8SWL :3/8Swagelok®
Others: Option
MODEL
3760
1/4SWL
1/8SWL
1/4VCR
1/4
3/8SWL
Optional
Fluid
Flow rate
0
Option name
3760
1/4SWL
N2
100SCCM
0
Illustrative
example
MODEL
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
27
Large Capacity Mass Flow Meter
A
HFM-301
SERIES
The HFM301 Series can correctly measure gas flow up to
1,000 SLM. The design for high-pressure use (Standard:
3.4 MPa; Option: 6.8 MPa) ensures high reliability for use
in a wide range of industries.
Features
• 0–5 V linear flow output signal
• High-accuracy measurement of large flow
• Quicker response than conventional models
• Compact size with smaller footprint
Standard Specifications
Harness Layout (Dsub 15PIN)
Flow range (at air calibration condition)
F.S.100-1000SLM
PIN
Signal
Response
3 sec. or less (typical)
1
NC
Accuracy
±1% F.S.
2
NC
3.4 MPa (6.8 MPa for HP option)
3
NC
Proof pressure
-8
Leak rate
3
1x10 Pa·m /s or less (excluding transmission of He)
4
NC
15-35°C
5
Signal COM
6
0–5 V output signal
7
NC
Operating temperature
Body: SUS316, SUS302, Ni
Materials of parts in contact with gases
®
Sealing material: Viton
®
®
8
NC
Option: 3/4 SWL
9
–15VDC
Electric connection
Dsub 15-pin male connector Note: Refer to the harness layout.
10
NC
Flow output signal
0-5VDC
11
+15VDC
±15VDC (±5%) 60mA
12
Power source COM
13
NC
14
NC
15
NC
Standard: 1/2 SWL (3/4 SWL when F.S.>300 SLM)
Joint
®
Required power
Provide straight pipe sections of the same diameter as the piping before and after mass flow instruments for correct flow measurement. The
diameter of the straight pipe on the primary side should exceed 300 mm.
Note:
The harness layout of the Dsub 15-pin for the
3150/3250/3350/3450 Series is different from
that of the Dsub 15-pin for the HFC/HFM Series.
Incorrect connection will cause failure.
Dimensions
15 PIN "D" CONNECTOR
(STANDARD)
ZERO
SPAN
119.4
Ordering
25.4
25.4
Option
>300SLM 3/4"Swagelok
HFM-301 1/2FITTING
HFM-301 3/4FITTING
DIM"A"
FITTING TYPE
MODEL HFM-301
1/2SWL
AIR
100
SLM
4.5
MPa
HP
Illustrative
example
DIM"A"
SWAG. 1/2"W NUT
6.31(165.9)
SWAG. 3/4"W NUT
6.99(177.5)
DIM"B"
4.11(104.4)
DIM"B"
4.31(109.5)
DIM"C"
1.36(34.5)
DIM"C"
1.56(39.6)
*
28
1/2SWL
3/4SWL
8-32
UNC depth 6
−
<300SLM 1/2"Swagelok
FITTING TYPE
MODEL HFM-301
Option name
38.1
6.35
63.5
Pressure
50.8
"A"
"C"
1/2SWL:1/2Swagelok®
3/4SWL:3/4Swagelok®
Flow rate
50.8
Joint
25.4
"B"
Fluid
25.4
0: No option
Option name: HP High pressure spec.
NR Neoprene seal
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Small Pressure Loss Large Capacity Mass Flow Meter
MODEL HFM-200W/LS
A
SERIES
The Model HFM-200 W/LS Series is a mass flow meter
developed to measure large gas flows. It is equipped with
a laminar flow element for measuring large flows up to
15,000 SLM with little pressure loss, which is difficult for
usual mass flow meters.
Features
• The double bypass structure with a laminar flow element enables large flow measurement.
• Measurement with small pressure loss is possible in lines where
pressure is not supplied.
• ±1–5% high-precision measurement of large flow
• 0–5 VDC analog flow output permits application to measurement recording, control, alarm, and other uses.
• Mass flow instruments eliminate troublesome flow correction
calculations based on the temperature and pressure.
Standard Specifications
Common Specifications
Flow range
(at air calibration condition)
Table of Correspondence for Each Type of Laminar Flow Element
Table of Correspondence for Each Type of
Laminar Flow Element
Type of laminar
Connection
Corresponding F.S. flow (AIR)
LS-3 (S)
3”NPT
1500SLM
6 sec. or less for 0–100% response
(within ±2%, typical)
LS-4F/S
4”flange
3000SLM
LS-6F/S
6”flange
6000SLM
LS-8F/S
8”flange
15000SLM
Response
Accuracy
Within ±1–5% F.S.
Proof pressure
3.4MPa
-7
Leak rate
3
1x10 Pa·m /s (excluding transmission of He)
Operating temperature
15-35°C
*
*
Check the outline drawing for each model.
A smooth end (straight) is also available for connection. Add the suffix "S" to the type
of laminar when placing an order.
Body: SUS316, Ni
Materials of parts in contact
with gases
®
Sealing material: Viton
Standard: Table of Correspondence for Each
Type of Laminar Flow Element
Connection
Option: Smooth end (Delivery of straight pipe
without processing for connection)
Dsub 15-pin male connector
Note: Refer to the harness layout.
Electric connection
Flow output signal
0-5VDC
Required powe
±15VDC (±5%) 50mA
Note:
Provide straight pipe sections of diameter five times larger than the laminar diameter before and after the laminar flow element for correct flow measurement.
Harness Layout (Dsub 15PIN)
PIN
Signal
1
NC
2
NC
3
NC
4
NC
5
Signal COM
6
0–5 V output signal
7
GND
8
NC
9
–15VDC
10
NC
11
+15VDC
12
Power source COM
13
NC
14
NC
15
NC
Note:
The harness layout of the Dsub 15-pin for the
3150/3250/3350/3450 Series is different from
that of the Dsub 15-pin for the HFC/HFM Series.
Incorrect connection will cause failure.
Ordering
Connection
Laminar: Type of laminar
S: Smooth end
Option
0: No option
Option name: Neoprene seal
MODEL HFM-200W/LS
Laminar
S
Fluid
Flow rate
Pressure
Option
MODEL HFM-200W/LS
S
AIR
1500SLM
5MPa
HP
Illustrative
example
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a quotation. Fill in the blanks in
the “Order/Quotation Request Card” at the end of the catalog, and send the card by fax.
29
Low-cost Mass Flow Sensor
A
MODEL 3810S
SERIES
Designed on the heritage base construction of the superior class bypass capillary type mass flow sensor, the
Model 3810S Mass Flow Sensor centers the focus on
economy through a thorough effort towards streamlining
with the view to built-in applications. The series is one of the
KOFLOC best sellers and is used by many assembly manufacturers as a substitute for the existing float type (tapered
pipe type) flow meter.
Features
• A low-cost, still, full-fledged sensor based on a combination of
the constant-current temperature difference detection type with
the bypass capillary type
• A large cost reduction makes Model 3810S almost rival any existing float type flow meter in price.
• 0 to 5VDC analog flow outputs provide various applications
such as measurements recording, control and alarm issuance.
• The sensor is mass flow type. The user needs no troublesome
calculations for flow correction due to the effects of temperature and pressure.
Standard Specifications
Cable Connections
Flow range (at N2 calibration conditions)
Accuracy
F.S.3-50SLM
No.1
Within ±2.0% F.S.
Within ±5.0% F.S.
No.2
Power source COM
Within ±0.5% F.S.
No.3
Power source –15VDC
980kPa
No.4
Flow output 0-5VDC
5-45°C (Accuracy guarantee: 15-35°C)
No.5
Flow output COM
Repeatability
Proof pressure
Working temperature range
Body: SUS 303, PTFE
Materials of parts in contact w/gases
®
Sealing material: Viton
Joint
Standard: Rc 1/4
Flow output signals
Note: The Series 3810 pin assignment has been modified from March 2000, and is not
compatible with the old model. Please check the following:
AMP171826-5 on the Connector 3810 side
AMP171822-5 on the cable side
0-5VDC
Required power supply
+15VDC (±5%) 40mA, –15VDC (±5%) 10mA
Weight
250g
350g
Dimensions
27
Power source +15VDC
F.S.10SCCM-2SLM
Ordering
Approx. 5.4
Model
86
Joint
q
48
w
e
r
1/4
Fluid
Flow rate
q
w
e
r
3810S
1/4
N2
100SCCM
MODEL 3810S
3810
MASS FLOW CONTROLLER
FLOW
Illustrative
example
15
(15)
56
MODEL
10
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Clamping machine screw
2-M3, Depth: 5
Example of Wiring
DPM-3
PSK-2TFX
MODEL DPM-3
CH1(5P) CH1(6P) CH2(5P) CH2(6P)
MODEL PSK-2TFX-15
POWER SUPPLY
CC-TFX-xxM
SLM
KOFLOC
3810
CP-TFX-xxM
FLOW
MFM
3810S
30
MASS FLOW SENSOR
MODEL
Low-cost Digital Mass Flow Meter
MODEL D3810
A
SERIES
The Model D3810 is a completely renovated digital mass
fl ow meter designed on the basic structure of existing
KOFLOC Model 3810. Incorporating a CPU inside and is
equipped with an innovative sensor, a single unit of this
new model covers a broad range of flows from very small
to large.
Features
• An economical but high-precision sensor that uses the bypass
capillary method
• Digital control allows the user to handle a broad range of flows
(100 cc to 50 L).
• Compact design (overall size is one size smaller than the Model
3810)
Standard Specifications
Dimensions
Flow range (at N2 calibration conditions) 50SLM
Approx. 5.4
25-50SLM: ±3% RD
0-25SLM: ±3% FS
Repeatability
±0.5% (FS)
5
Proof pressure
980kPa
1
Working temperature range
0-50°C (Accuracy guarantee: 15-50°C)
48
Accuracy
MASS FLOW SENSOR
FLOW
25
Body: SUS 303, PTFE
Materials of parts in contact w/gases
D3810
®
Sealing material: Viton
70
Joint
Standard: Rc 1/4
Flow output signals
0-5VDC
Required power supply
+12VDC (±5%) 60mA, –12VDC (±5%) 60mA
Weight
500g
Cable Connections
28
Ordering
Model
Power source +15VDC
No.1
No.2
Power source COM
No.3
Power source –15VDC
No.4
Flow output 0-5VDC
No.5
Flow output COM
q
w
e
1/4
Fluid
q
w
e
D3810
1/4
N2
MODEL D3810
Illustrative
example
AMP171826-5 on the Connector 3810 side
AMP171822-5 on the cable side
Joint
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Example of Wiring
DPM-3
PSK-2TFX
MODEL DPM-3
CH1(5P) CH1(6P) CH2(5P) CH2(6P)
MODEL PSK-2TFX-15
POWER SUPPLY
CC-TFX-xxM
SLM
CP-TFX-xxM
MFM側
5
1
D3810
MASS FLOW SENSOR
FLOW
D3810
31
Small Karman Vortex Flow Meter for Liquids
A
FM0101/0102/0103/0105 SERIES
KOFLOC's Karman Vortex Flow Meter FM Series provides
an ideal tool for measuring and monitoring liquid flows, including cooling water and cleaning water. Since PPS resin
is used for body material, all models of the series offer superior reliability and durability.
Features
• Simple design that minimizes a dead space
• Measurements of very small flows available (up to 0.5 L/min)
• Use of PPS resin has achieved a small, lightweight and rigid.
• The sensor can be used for pure water or deionyzed water and
chemicals (the sensor is acid-/alkali-resistant).
• These models are in the process of application for CE Marking.
Standard Specifications
FM0101
FM0102
FM0103
Dimension (a)
17.8
17.5
17.5
32.5
Dimension (L)
80.6
80.0
80.0
110.0
R3/8
R1/2
R1/2
25A
0.5-4 L/min
2-16 L/min
4-40 L/min
10-150 L/min
Fluids for measurement
Cooling water, cleaning water, etc.
Measuring accuracy
Within ±3.0% F.S
Repeatability
Within ±0.5% F.S
Dimensions
FM0101-S-S-P
Without indicator
S Type: 4-20mA
Outputs
12.
5
P Type: Pulse (Open collector) (For w/o indicator only)
D Type: With indicator
Without indicator
12-24VDC
5
3
Supply voltage
FM0105-S-S-P
X (Connection)
Liquid temperature range
0-70°C
Proof pressure
1MPa
Amb. temperature range
0-50°C
Amb. humidity range
5-90%RH
Applicable cleanliness/
waterproofing standards
IP64 (Splashproof construction per JIS C 0920)
Material for wetted part
PPS with 30% glass mixture
a
45
About 2000
Flow range
Cable length
About 2000
Connection (X)
FM0105
1
2
Model
a
0
3
L
4
0
49
2-Tr56.1x2.5
Cable length
With indicator: 3 meters long; terminated/pretinned (presoldered)
W/o indicator: 85 g (Sensor unit)
165 g (Sensor unit)
Weight
With indicator: 100 g (Sensor unit)
205 g (Sensor unit)
When a columnar object (object that generates vortices) is placed
in the flow path of a fluid, regular channels of vortices, called
Karman vortex channels, are generated at the back of the object.
Since the frequency of a vortex generated is linearly proportional
to the flow velocity within a given range, the flow amount can be
measured by counting the number of vortices.
These series models make use of this principle. When the frequency of each vortex generated is detected by the incorporated
vortex detector (piezoelectric device), the signal processing circuit outputs a signal which is linearly proportional to volume flow.
Columnar object
(that generates vortices)
Vortex detector
Karman vortices
32
10
a
45
φ56.1
a
L
Note:
Tolerances for unspecified outside dimensions: ±0.8
Tolerances for other unspecified dimensions: ±0.4
Principle of Measurement
Piezoelectric device
CAUTION:
DO NOT load ex ces sive clamp ing torque
on the sensor unit and
setscrews as they are
made of plastics.
28.05
PPS w/o glass mixture
W/o indicator: 2 meters long; terminated/pretinned (presoldered)
Ordering
MODEL01 Flow range
(PPS)
01
02
03
05
*
S
Output
P
N
/K
S=4−20mADC
P = Pulse
D = 4-20 mADC + Indicator
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Small Karman Vortex Flow Meter for Liquids
®
MODEL31 (TEFLON /PFA)
A
SERIES
The Model31 Karman Vortex Flow Meter employs the following principle for measurement of flows:
When a columnar object (object that generates vortices) is
placed in the flow path of a fluid, regular channels of vortices,
called Karman vortex channels, are generated at the back of
the object.
Since the frequency of a vortex generated is linearly proportional to the flow velocity within a given range, the flow amount
can be measured by counting the number of vortices.
When the frequency of each vortex generated is detected by
the incorporated vortex detector (piezoelectric device), the
signal processing circuit outputs a signal which is linearly proportional to volume flow.
Features
• Because of no moving part, the meter has superior reliability and durability and no error in mounting position is produced.
• Simple construction (its flow path of fluid contains a columnar object
and a vortex detector only) ensures low pressure loss and low liquid
leak. In addition, the detector does not get into contact with the fluid
running through the path, therefore, it is ideal for process monitoring of
various liquids.
• Two types of particle-free body materials (PPS and PFA) are available
for choice according to your needs.
• Global specifications (Certification for CE Marking already acquired)
• Since Teflon is the material for the entire wetted part and no O-ring is in
use, the Model31 Series Karman Vortex Flow Meter is optimum for monitoring liquid flows in the manufacturing process of semiconductors.
Dimensions
Item
3101
3102
3103
3104
Flow range (L/min)
0.4-4
2-20
5-50
10-100
3/8”
Pipe end
1/2”
Pipe end
3/4”
Pipe end
1”
Pipe end
Connection
Ultrapure water, chemicals, and other liquids
Measuring accuracy
±3.0%+ 1 digit
Repeatability
Within ±0.5% F.S.
58.2
Fluids for measurement
Cable length: About 3000
Standard Specifications
Liquid temperature range 0-90°C (No bedewing, no boiling)
0-50°C
13
Amb. temperature range
LED display in 3 digits
With indicator Current output: 4-20 mA (linear)
Outputs
Alarm output: Open collector (2 LEDs; 80 mA, 30 VDC max.)
45
26
205±2
40
45
26
205±2
40
Current output: 4-20 mA (linear)
W/o indicator
Pulse output: Open collector (10 mA, 30 VDC max.)
®
Body
All Teflon (PFA), without O-rings
Cover
Polybutylene terephthalate (PBT) resin
Cable
2 meters long; Conductor: Tinned bare annealed copper wire;
Sheath: Heat-/cold-resistant polyvinyl chloride (POC)
52
Materials
12-24VDC
Cable length:
About 2000
Supply voltage
13
Principle of Measurement
When a columnar object (object that generates vortices) is placed
in the flow path of a fluid, regular channels of vortices, called
Karman vortex channels, are generated at the back of the object.
Since the frequency of a vortex generated is linearly proportional
to the flow velocity within a given range, the flow amount can be
measured by counting the number of vortices. The Model31 Series
Karman Vortex Flow Meter makes use of this principle. When the
frequency of each vortex generated is detected by the incorporated
vortex detector (piezoelectric device), the signal processing circuit
outputs a signal which is linearly proportional to volume flow.
Ordering
The Model31 Flow range
(PFA)
01
02
03
04
Columnar object
(that generates vortices)
Vortex detector
Karman vortices
*
P
Output
S=4−20mADC
P = Pulse
D = 4-20 mADC + Indicator
X
P
/K
Z
P6;6φ pipe end
P8;8φ pipe end
P12;12φ pipe end
Blank: Standard
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a quotation.
Fill in the blanks in the “Order/Quotation Request Card” at the end of the catalog, and send the
card by fax.
Piezoelectric device
33
Compact Flow Sensor for Liquids
A
VISION 2000
SERIES
In the VISION2000 Series, a small turbine contained in its
casing rotates in proportion to the flow, which actuates
the magnet pickup coil embedded in the upper part of the
casing to output pulses.
The VISION2000 Series is made of such materials that are
not affected by most of liquids, it is used in many fields of
industry.
Features
• Very small in size and very light in weight (15g), the VISION2000
Series can be mounted anywhere.
• Can be used for a large variety of liquids from low to high viscosity.
• Use of a high-quality material (grilamid TR55)
• Maintenance-free
• High performance, low price
Standard Specifications
Item
2F66
Fluid
4F44
4F22
Flow range
0.5-5 L/min
1-10 L/min
Accuracy
2.5-25 L/min
3.5-35 L/min
1000 pulses/L
750 pulses/L
Within ±1.5% F.S
Repeatability
Within ±0.2% F.S
P/L
6900 pulses/L
3300 pulses/L
Operating temperature range
–20-100°C
Maximum operating pressure
2.45MPa
Machine connection
R3/8 inches
Driving power
5-24 VDC
Power consumption
8 mA (20 mA max.)
Analog output
Voltage pulses (Open collector)
Casing
Materials
Grilamid TR55
Turbine
Grilamid TR55
Bearings
*
F16.5
Water, sea water, pure water, alcohol, gasoline, gas oil, kerosene, various types of solvents, and other liquids
PTFE with 15% graphite
Liquid viscosity must not exceed 16CP. If you need to use the sensor for control of a liquid whose viscosity exceeds this value (16CP), contact us for consultation.
Dimensions
Connection Diagram
5.0
R3/8"
22.5
31.0
5.0
2.8
6.3
10.0
17.0
+
8.0
55.0
SW17
17.0
Ordering
Pressure Loss Table
Model
△P
(bar)
F
F16.5
1.2
q
w
VISION2000
2F66
4F44
4F22
F16.5
q
w
VISION
2000
4F44
1.0
0.8
F
4F22
0.6
Illustrative
example
4F44
0.4
2F66
F
0.2
0
0
34
3
6
9
12
15
16
21
24
27
30
33 36 39
Flow (l/min)
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Flow Indicators
A
MODELS ALM-4/ACM-10/DPM-3/DPM-240
Momentary/Integrated Flow Indicator ACM-10
Digital Comparator ALM-4
This digital meter relay carrying
a mi cro com put er sends out
Hi, GO or LO logical contact
signals to the two set points for
bridging the gap between when
it receives flow signals from a
mass flow meter/controller. The
comparator plays a role of photocoupler and relay contact to
fetch these signals.
This DIN96x48 front face indicator displays momentary flow
values as well as those in te grated. Compactly designed
with DIN standard size panel
cut, the ACM-10 is a 'must' for
monitoring gas consumption
on site. Specify the flow range
your need as the unit is shipped
after properly scaled at factory
to meet your requirement.
Signal input
0-5 VDC flow signals
Momentary flow display
3·1/2-digit 7-segment LED
Signal output
Photocoupler make contact, relay no-voltage a-contact,
and 3 Hi/GO/LO contacts
Integrated flow display
6-digit count 7-segment LED
Integrated flow carry
Carry from 0.1 cc of momentary flow display
Contact capacity
Photocoupler collector current: 5 mA; Relay: 250 VAC, 1 A max.
Power supply
+5 VDC
Power supply
+5 VDC
Signal input
0-5 VDC
*
The minimum flow that can be displayead depends upon the full-scale flow value.
Please consult us.
Dimensions
Dimensions
100
72
9.5
45
+0.5
−0
+0.7
−0
72
68
+0.7
−0
48
68
12
96
Panel cut size
92.5
92
+0.5
−0
Panel cut size
Digital Flow Indicator DPM-3
Momentary/Integrated Flow Indicators DPM-240/245
A dedicated flow indicator for mass flow controller/meter. Either 3·1/2-digit direct reading (standard spec.) or 1000 F.S.
display is possible.
Display
3·1/2-digit 7-segment LED, direct reading
Power supply
+5 VDC
Mount type
Panel mount
Dimensions
4
8
45
+0.5
-0
MODEL DPM−3
These two models provide display of momentary and cumulative flow values. Model DPM-240 can be used together with a
pulse output type flow meter such as the VISION2000 for input
of open collector voltage pulses, and Model DPM-245 can be
combined with the Model31 Series Small Karman Vortex Flow
Meter for input of analog current and voltage values.
Display
4·1/2-digit 7-segment LED, direct reading
Power supply
+24 VDC
Mount type
Panel mount
Dimensions
48
7.5
72.5
10
4
5+−00.8
SLM
36.
5
DIN48x24 type indicator is also available on customer request.
+0.5
-0
Panel cut size
22.5+−00.3
*
6
1
24
92.5
9
6
2
T
M
R
Adapter
Panel cut size
35
Functional Flow Input/Display Unit with Alarm
A
MODEL DPM-100
Model DPM-100 is a digital flow input/display unit that allows setting and display of flows on a mass flow controller/
meter when used in combination with a PSK-FB Series
power unit. Its 48x48 mm compact size can make for saving the space otherwise required for installing a gas line
control panel. The DPM-100 incorporates a flow alarm and
provides high cost performance.
Features
Dimensions
• Compact size (48 mm wide x 48 mm high) ideal for panel layout
when a number of gas lines are to be controlled simultaneously
• Individual alarm output for the upper and lower limits
• Easy entry of values using touch switches
• No troublesome wiring is required. Just plug the cable connector in. (Supply voltage for the DPM-100 is taken from the
connected PSK-FB Series power unit.)
Flat cable connector
4
8
KOFLOC
120
4
5+−00.6
DPM−1
0
0
45−+00.6
P1
48
P2
SV
M
Note: The DPM-100 is a dedicated unit for the PSK-FB Series power units. A separate
power supply line or wiring may be necessary for a PSK-FB Series power unit shipped
before October 2001, other PSK Series unit and any commercial power source available on the market. Please consult us.
RES
Panel cut size
107
Flow Setting Device
MODEL CK
SERIES
These dial type devices generate 0 to
5-volt flow signals for mass flow controllers. Each dial scale has graduations
from 000 to 999 to allow the user to set
flow values in relation to the full scale.
The series include three types, CK-1A,
CK-2A and CK-3A, according to the
dial shape.
CK-1A
CK-2A
CK-3A
Dimensions
Input
MODEL CK-1A
0
Flow setting signal
3
COM
(
20
0
)
2
6
07
.
+0
0
CW
3
2
1
251
.
φ3
1
19.
05±0.127
0
3
0
1
4
Reference 5V
φ2
2
50 MAX
4
4
3
2
2
5.
4
1
1
9
2
1
1
Reference 5V
2
Flow setting signal
3
COM
1
1
9
21
φ2
Panel cut hole dimensions
36
Flow setting
voltage
MFC
Power
source
CK-1A
CK-2A
CK-3A
19
Cut dimensions
φ27
Reference 5V
1
.
+0
Setscrew
31.5
All mass flow controllers
3 0
0.
φ1
(4−4
0 UNC)
MODEL CK-3A
0.1% full scale
Applicable controller types
COM
9.
4
2
5.
4
2
Setting accuracy
CK-1A,CK-2A,CK-3A
Panel thickness: 1.5 to 5 mm
(
20
0
)
CW
3
10kΩ (Standard)
.
+0
φ2
2
R14
φ2
2
1 0 9
5-volt full scale is divided
Resistance
3 0
0.
φ1
Panel cut hole dimensions
MODEL CK-2A
5V
Output
31
φ2.2
10.2
10.4
PSK Series
Power Unit
DPM
Multifunctional Readout Unit with Integrator & Alarm
A
MODEL CR-700A
The Model CR-700A is a multifunctional readout unit developed exclusively for mass flow controllers and mass
flow meters. In addition to flow measuring and controlling
functions, the flow integration and alarm output functions
are provided for application to mass flow instruments.
Furthermore, the RS232C communication function permits communication control from your personal computer.
Features
• Highly-readable 4-digit large LED + Bar graph for indication of
flow
• Independent display of set value (SV value) for easy flow setting
• Easy communication with your personal computer through
RS232C
• One-key layout for simple operation
• Conversion factor setting function for use with multiple gases
• Zero offset function for correction of change of zero point with
time
• MFC supply voltage: ±15 VDC (200 mA max. each)
• 100 VAC driving power
Dimensions
Standard Specifications
Mass flow control
Flow indication/setting, zero offset, and conversion factor
setting functions
Mass flow input/output
0–5 VDC
Mass flow power
+15VDC (200mA)
Number of display digits
Momentary flow display: 3-1/2 digits;
integrated flow display: 4 digits
Bar graph: 0–100% 20 divisions
Display accuracy
±0.3% F.S. ±1 digit in relation to the entered value
Display switching
Momentary/integrated value display can be switched
over; alarm display
Alarm outputs
Panel cut size
139.5
140+0.5
144
10
Rear terminal connector: RS232C
Power consumption
Approx. 25 VA
AC power supply
100VAC
Weight & size
Approx. 900 g: 72 W x 144 H x 178 D (mm)
67.5
160
178
Momentary/integrated: Two-stage upper/lower limit alarm
output; Photo MOS relay
External control
68+0.5
Ordering
Specify the mass flow instrument to which the readout unit is to be connected if you order
the CR-700A Readout Unit individually, and not in a set with the mass flow instrument.
0: Without cable
Mass flow instrument model to be connected
Layout Example
MODEL CR-700A
0
Mass flow
instrument model
CR-700
Illustrative
example
MODEL CR-700A
RS- 232C
*
MFC
Computer
3200
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Note:
If the CR-700A Readout Unit is connected to some old mass flow models, it may malfunction or some of its functions may not work. Please consult with us before placing an order
if your KOFLOC mass flow controller/meter is not listed in this catalog or if you want to
connect the CR-700A Readout Unit to a competitor’s product.
* Cable length: Within 3 m (5400, 5100, 3200, 3100 series)
37
Multifunctional Readout Unit with Integrator & Alarm
A
MODEL CR-500
When connected to your mass flow controller or meter,
the Model CR-500 Readout Unit provides multiple functions, including flow measurements and control, cumulative flow calculations, alarm outputs, and so on. This
readout unit incorporates RS485 data communication kit.
A number of the CR-500 units can be controlled from a
host computer.
Features
• Compact size (96 mm wide x 48 mm high) ideal for panel layout
• Multiple functions, such as 6-digit display of total flow, individual
alarm outputs for the upper/lower limits, etc.
• Mass flow meters can be controlled from a computer via RS485
interface.
• Remote control of both analog and digital signals is possible
from an external device.
• Mass flow controller supply voltage: ±15 VDC (300 mA max. each)
• Can be used anywhere in the world as it can be driven at a voltage within the range of 85 to 264 VAC.
Standard Specifications
Dimensions
Mass flow control
Flow setting, forced valve open/close operation, and zero cut
Mass flow input/output
0-5VDC
Mass flow power
±15VDC (300mA)
Number of display digits
Momentary flows: 4·1/2; Integrated flows: 6
Display accuracy
±0.3%F.S.±1 digit in relation to the entered value
Display switching
Momentary/Integrated value displays can be switched over.
Alarm outputs
Alarm outputs for the upper/lower limits of momentary/
integrated flows (Dual alarm set point photoMOS relay)
Calculating function
Selectable among: Immediate stop/blinking of display when
6-digit counter overflows, Endless display of counts, and x10 display
Uninterruptive power guarantee
3 weeks or more (when properly charged for at least 3 hours)
External control
Back terminal connector: RS-485 (Four-wire dual outputs
or two-wire analog signal outputs)
(147)
6
96
KOFLOC
Approx. 25 VA
AC power supply
85-264VAC
Weight & Size
Approx. 500g; 96W x 48H x 147D (mm)
48
CONT.
SV
RES
RA
T/H
TO
MODE
+0.3
-0
92
+0.8
−0
Panel cut size
45
Ordering
Layout Example with Readout Unit CR-500
15 (17)
CLOSE OPEN
CR
OUT OUT RS KEY SV
MODE ENT
Power consumption
109
(Specify the mass flow instrument to which the readout unit is to be connected if you order
the CR-500 Readout Unit individually, and not in a set with the mass flow instrument.)
0: Without cable
Mass flow instrument model to be connected
q
MODEL CR-500
MFC
CR-500
w
0
Mass flow
instrument model
RS-485
Computer
Illustrative
example
q
MODEL CR-500
*
w
3660
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
CAUTION:
The CR-500 Readout Unit may malfunction or some of its functions may not work if it
is connected to some old mass flow models. Please contact us for consultation before
you place a purchase order if your KOFLOC mass flow controller/meter is not on this
catalog or if you want to connect the CR-500 Readout Unit to our competitor's product.
38
Compact Readout Unit
A
MODEL CR-300
When connected to your mass flow controller or meter using a single cable, the Model CR-300 Readout Unit allows
you to use basic functions of the controller/meter, such as
flow measurements and control.
Features
• Space-saving compact size (72 mm wide x 72 mm high)
• The unit controls valve operation of your mass flow controller.
• Remote control available via external control terminal provided
on the back panel
• A lock key to prevent misoperation
• Mass flow controller supply voltage: ±15 VDC (250 mA max. each)
Standard Specifications
Dimensions
Mass flow control
Flow setting, forced valve open/close operation, and zero cut
Mass flow input/output
0-5VDC
Mass flow supply power
±15VDC (250mA)
Number of display digits
Momentary flows: 4-digit display every 100 counts (100-2000)
Display accuracy
Within ±0.1% (within ±2 digits)
External control
Input terminal on the back panel for analog signals
Power consumption
Approx.25 VA
AC power supply
85-240VAC 47-440Hz
Weight & Size
350g W: 73 x H: 73 x D: 119.5mm
PV
SV
HOST
TERM
CCM
CN 2
L M
OPEN
CLOSE
FLOW
SET
LOCK
ENT
HOST
TERM
AC IN
6
6
F.S
SET
7
3
m3/h
1
CN CR−3
00
5.
5
Layout Example with Readout Unit CR-300
6
6.
5±0.3
73
66.
5±0.3
CR- 300
Panel cut size
Ordering
MFC
10
7
1
1
9.
5
7
6
6
Panel thickness:
1.2 mm when the enclosed fitting is used
1.4-1.5 mm when one enclosed washer is placed between
the panel and fitting
1.6-2.0 mm when two enclosed washers are placed between
the panel and fitting
(Specify the mass flow instrument to which the readout unit is to be connected if you order
the CR-300 Readout Unit individually, and not in a set with the mass flow instrument.)
0: Without cable
Mass flow instrument model to be connected
100VAC
q
MODEL CR-300
w
0
Mass flow
instrument model
Illustrative
example
q
MODEL CR-300
*
w
3660
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
CAUTION:
The CR-300 Readout Unit may malfunction or some of its functions may not work if it
is connected to some old mass flow models. Please contact us for consultation before
you place a purchase order if your KOFLOC mass flow controller/meter is not on this
catalog or if you want to connect the CR-300 Readout Unit to our competitor's product.
39
Compact Readout Unit
A
MODEL CR-200
The Model CR-200 Readout Unit is a simple, convenient
unit, providing basic mass flow instrument functions such
as measurement and control of flow by connecting it to
mass fl ow controllers and mass fl ow meters through a
single cable.
Ordering
Specify the mass flow instrument to which the readout unit is to be connected if you order
the CR-200 Readout Unit individually, and not in a set with the mass flow instrument.
0: Without cable
Mass flow instrument model to be connected
MODEL
0
CR-200
Mass flow
instrument model
Illustrative
example
MODEL
CR-200
MODEL 3660
Specification (2) means the cable used for connection to a mass flow instrument.
*
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Note:
If the CR-200 Readout Unit is connected to some old mass flow models, it may malfunction or some of its functions may not work. Please consult with us before placing an order
if your KOFLOC mass flow controller/meter is not listed in this catalog or if you want to
connect the CR-200 Readout Unit to a competitor’s product.
Dimensions
21
131
96
6
109
0–5 VDC
Mass flow input/output
± 15 V is 150 mA max. for ±15 VDC (250 mA) and –15 VDC 250 mA.
Number of display digits
Momentary flow display: 3-1/2 digits
Display accuracy
Within ±0.2% F.S. (Within ±1 digit)
External control
Rear terminal connector: Analog signal
Power consumption
Approx. 20 VA
AC power supply
85–264 VAC (50/60 Hz)
Weight & size
Approx. 400 g: 96 W x 48 H x 131 D (mm)
+0.8
92 −0
+0.6
Flow setting, forced valve open/close operation, and zero cut
Mass flow power
45 −0
Mass flow control
48
Standard Specifications
Panel cut size
Mass Flow Meter Power Unit
MODEL PSK-2TFX
This is a DC power supply for mass flow meters. It can
also drive such peripheral equipment as DPM-3 simultaneously. One unit permits operation of two systems –
mass flow meters in two systems and the DPM-3 indicator or the like. One-touch connection with a connector
permits easy wiring and signal transmission/reception.
Specifications
100 ±10 VAC
Power output for mass flow instrument
±15 VDC, –15 V x 2 systems
(±12 VDC, –12 V x 2 systems)
Input/output signal
0–5 VDC x 2 systems
Object model
Mass flow meters in general
DPM-3, ALM-4, ACM-10
External flow output
0–5 VDC x 2 systems
Dimensions
86
2-M3
75
Power supply
The indication in ( ) is for PSK-2TFX-12V.
PSK-2TFX-15
検
KOFLOG
31
MODEL
POWER SUPPLY
42
117
*
34.5
40
19
4
26
CH1 ( 5P ) CH1 ( 6P ) CH2 ( 5P ) CH2 ( 6P )
37
16
Mass Flow Controller/Meter Power Units (for Integration into Customer's Equipment Panel)
MODEL PSK-FB
PSK-1FB
SERIES
PSK-3FB
These DC power units can be commonly
used for mass flow controller and meters.
The 1FB, 3FB and 6FB types can supply
power to 1, 3 and 6 lines (units) of mass
flow controllers/meters, DPM-100 or other
input/display units, DPM-3 or other flow
indicators, and CK-1A or oth er setting
devices, respectively. A Dsub connector
allows quick connection to the unit to
which power is to be supplied without
time-consuming wiring job, also making
signal exchange easier.
A
PSK-6FB
Type
Application (Power supply for)
PSK-1FB
PSK-3FB
SK-6FB
1 unit
3 units
6 units
Input voltage (frequency)
85-132VAC (47-66Hz)
Power consumption
22 W max.
70 W max.
140 W max.
Fuse
125V-0.8A
125V-3.15A
125V-6.3A
Power source
Power Output
±15VDC (±5%)
For setting flow values
+5VDC (±1%)
For external indicators
+5VDC (±5%), +15VDC (±5%)
Flow I/O signals
0-+5 VDC (15 VDC max.)
Set point output signals
0-+5VDC
Working temperature range
0-40°C
Working environment (humidity range)
0-90%RH (No condensation)
Weight
Approx. 0.8 kg
Approx. 1.3 kg
Approx. 1.7 kg
Dimensions
125
MODEL PSK-1FB
PIN CONNECTION
××××××××××
××××××××××
××××××××××
××××××××××
××××××××××××
××××××××××
××
×××××××
×××××××
××
1. ××××
2. ××××××××××
3. ×××××
4. ××××××××
5. ××××××
6. ×××××
7. ×××××
8. ××××××××××
MODEL PSK-3FB
MF
DPM/CK
11.
12.
13.
14.
15.
16.
17.
18.
19.
20.
9. ×××××××××××
10. ×××××××××××××××
11. ×××××××××××××××
12. ××
13. ××××××××××××××
14. ××
15. ××
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
90
90
MF
×××××××××××
××××××××
×××××××××
××××××××××
××
×××××××××××
××××××××××
××××××××××××
×××××××××××
×××××××××××
PIN CONNECTION
11.
12.
13.
14.
15.
16.
17.
18.
19.
20.
××××××××××
××××××××××
××××××××××
××××××××××
××××××××××××
××××××××××
××
×××××××
×××××××
××
1. ××××
2. ××××××××××
3. ×××××
4. ××××××××
5. ××××××
6. ×××××
7. ×××××
8. ××××××××××
MODEL PSK-6FB
MF
DPM/CK
×××××××××××
××××××××
×××××××××
××××××××××
××
×××××××××××
××××××××××
××××××××××××
×××××××××××
×××××××××××
9. ×××××××××××
10. ×××××××××××××××
11. ×××××××××××××××
12. ××
13. ××××××××××××××
14. ××
15. ××
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
AC INPUT : 85∼132V 50/60Hz 70VA MAX
DC OUTPUT : +15V1.2A,-15V1.2A,+5V0.45Aor+15V0.9A
×××××××××××
××××××××
×××××××××
××××××××××
××
×××××××××××
××××××××××
××××××××××××
×××××××××××
×××××××××××
DPM/CK
11.
12.
13.
14.
15.
16.
17.
18.
19.
20.
××××××××××
××××××××××
××××××××××
××××××××××
××××××××××××
××××××××××
××
×××××××
×××××××
××
1. ××××
2. ××××××××××
3. ×××××
4. ××××××××
5. ××××××
6. ×××××
7. ×××××
8. ××××××××××
9. ×××××××××××
10. ×××××××××××××××
11. ×××××××××××××××
12. ××
13. ××××××××××××××
14. ××
15. ××
AC INPUT : 85∼132V 50/60Hz 140VA MAX
DC OUTPUT : +15V2.4A,-15V2.4A,+5V0.9Aor+15V1.8A
15.5
AC INPUT : 85∼132V 50/60Hz 22VA MAX
DC OUTPUT : +15V0.4A,-15V0.4A,+5V0.15Aor+15V0.3A
120
90
PIN CONNECTION
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
120
12
MF
7
MF
3
DPM/CK
MF
2
DPM/CK
2
MF
1
DPM/CK
1
3
DPM/CK
AC85∼132V
3
4
5
DPM/CK
2
6
DPM/CK
1
DPM/CK
4
DPM/CK
6
3
DPM/CK
MF
MF
2
DPM/CK
MF
1
5
MF
MF
MF
43(40)
3
120
110
POWER SUPPLY
AC85∼132V
AC85∼132V
POWER SUPPLY
POWER SUPPLY
Model 8300 Series Power Cable
PSK-83/CP-83CF
The PSK-83 is an AC adapter type power
supply that can operate one Model 8300
Series system. The CP-83CF cable is
used to drive the Model 8300 Series, acting as an interface for various event outputs for power flow signal (analog) digital
communication [RS485/232C (Multi)].
(The cable end is loose.)
SERIES
Ordering
●Power supply:
●Cable: CP-83CF
PSK-83 (Cable length: 1.5 m only)
1M
Cable length: 1.5 m
3M
Cable length: 3 m
5M
Cable length: 5 m
X
Cable length: Contact us for details.
Loose end (* For details of the signal
interface, refer to the instruction manual.)
8300 main unit connector
(DS20P half-pitch connector)
41
TABLE OF COMPATIBILITY – CABLES AND ACCESSORIES
FOR KOFLOC MASS FLOW METERS/CONTROLLERS
A
Example of use of accessories
(1) When standard power supply is used
DPM-3
Dsub 9-pin
ALM-4
3660/3100
5400/5100
9100/3100
3760
Main unit
ACM-10
PSK-3FB
DPM-100
PSK-6FB
Dsub 9-pin
Dsub 15-pin
PSK-1FB
CR-200
Cable between main
unit and power supply
CK-2A
CK-3A
* Unnecessary for CR-200,
300, and 500
CR-300
HFC
HFM
CK-1A
Cable between
power supply and
display/setter
CR-500
DPM-100
* DPM-100 cable
Main unit
Power
supply
Dsub 15-pin
Cable between main
unit and power supply
Ordering (Power supply-Indicator/Setter)
Ordering (Power supply-display/setter)
1-m cable
3-m cable
5-m cable
Length specification
(Special order)
1-m cable
3-m cable
5-m cable
Length specification
(Special order)
Example: When placing an order for the 5-m cable for connection between 5400 and PSK-1FB
CP-STD1-5M
Example: When placing an order for the 1-m cable for connection between HFC and CR-200
CP-STD4-1M
Example: When placing an order for the 3-m cable for connection between PSK-1FB and DPM3/CK-1A
CC-STD1-3M
Example: When placing an order for the 5-m cable for connection between PSK-1FB and DPM100
CC-FBDPM100-5M
(2) When CR-700A is used
MFC
MFM
Main unit
CR-700A
MFC modeL-CR-700A-XM
Cable between main unit
and power supply
Example: When placing an order for the 5-m cable for connection between HFC and CR-700A
CP-HFC303-CR700A-5M
Ordering
Example: When placing an order for the 1-m cable for connection between 3660 and CR-700A
MFC model
1-m cable
3-m cable
5-m cable
Length specification
(Special order)
(3) Other MFC/MFM power connection cables (Old model specifications)
Indicator
Setter
MFC
MFM
Main unit
Power
supply
CP-Main unitPower supply-XM
CP-Power supplyIndicator/Setter-XM
(
CK-1A
CK-2A
CK-3A
)
Ordering
MFC/MFM model
42
Type of power supply
1-m cable
3-m cable
5-m cable
Length specification
(Special order)
Type of power supply
Type of indicator
1-m cable
3-m cable
5-m cable
EXAMPLES OF APPLICATIONS OF
MASS FLOW METERS/CONTROLLERS
For air leak tester
A
For bioreactor
MODEL 3100 (Catalog p.26)
MODEL 9100 (Catalog p.23)
Work
Mass flow meter
Master
work
MODEL D8300 (Catalog p.16)
For liquid crystal glass transportation
Chamber pressure control
Glass
Mass flow controller
Chamber
Flow
Pressure controller
MODEL 9100 (Catalog p.23)
MODEL 9100 (Catalog p.23)
MODEL 3810DS (Catalog p.25)
Mass flow controller
MODEL D3660 (Catalog p.17)
For fuel cell evaluation equipment
For CCFL combustion
For burner gas flow control
MODEL D3660 (Catalog p.17)
Backlight
MODEL 9100 (Catalog p.23)
Gas burner
Anode
Nozzle
(Baking System)
(Burner, etc.)
Injection
Cathode
(Injector)
Used when LNG pressure
is too low
MODEL D8300 (Catalog p.16)
43
Compact Handy Mass Flow Control/Measurement Unit
A
FLOW COMPO®
This is a compact handy fl ow control/measuring unit
made by combining a compact DIN72 x72 power indicator
[CR-300] and MFC/MFM.
Features
• Compact, lightweight integral unit
• The touch panel type permits easy FS scaling, flow setting, and
valve opening/closing.
• Free selection of joints ranging from one-touch type to
Swageloc
• The MFC-equipped type (FCC Series) can be used as MFM by
pressing the OPEN switch.
• Please contact us for the metal seal specifications for corrosive
gas.
Standard Specifications
MODEL
Mounting MFC/MFM
Standard flow range
(at N2 calibration condition)
Sealing material
FCC-3000-G1
FCC-3000-G2
FCM-3000-G1
FCM-3000-G2
3660 (MFC)
3200 (MFC)
3760 (MFM)
3100 (MFM)
10SCCM-20SLM
1SCCM-20SLM
10SCCM-20SLM
1SCCM-20SLM
Viton
Response
Operating ambient temperature
®
Viton
®
Viton
Viton
®
Within 2 sec. (F.S. ±2%)
Within 1 sec. (F.S. ±2%)
Within 1 sec.
Within 1 sec.
5–45°C
(Accuracy guaranteed at: 15–35°C)
0–50°C
5–45°C
(Accuracy guaranteed at: 15–35°C)
0–50°C
Joint
Various joints are applicable.
For details of the specifications, refer to the mounting MFC/MFM and CR-300.
Ordering
Dimensions
(20)
C: Controller
M: Meter
FC
C
M
3000
G1
G2
FC
C
3000
G1
1
4
0
MODEL
Grade
CR−3
0
0
Flow rate
Joint
500SCCM
1/4SWL
Fluid
*
®
FLOW COMPO
3
5
FLOW
2
4(3660,3200,3100)
2
6(3760)
8
4
L
5
1
7
5
* For L, refer to the face-to-face distance of the joint of respective mounting MFC/MFM.
®
Note: “FLOW COMPO ” is a trademark of our company.
44
Illustrative
example
MODEL
*
N2
Refer to “Ordering” and “Illustrative Example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
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