product guide - Serv`Instrumentation

product guide - Serv`Instrumentation
PRODUCT GUIDE
Table of Contents
Table of Contents
Thermal Mass Flow Controllers and Meters .......................................................................... 4
– Multi-Purpose Mass Flow Controllers and Meters .........................................................................5-6
– Ultra-High Purity Mass Flow Controllers and Meters ....................................................................... 7
Variable Area Flow Meters................................................................................................ 8
– Low-Flow Glass Tube Variable Area Meters .................................................................................. 9
– Armored Metal Tube Variable Area Meters ................................................................................. 10
– High-Flow Glass Tube Variable Area Meters ................................................................................ 11
– Plastic Tube Variable Area Meters ............................................................................................ 12
– Precision Valves, Controllers, Switches and Indicators ................................................................... 13
Pressure and Vacuum Products ........................................................................................ 14
– Pressure/Vacuum Controllers................................................................................................. 15
– Pressure Transducers and Transmitters ..................................................................................... 16
– Pressure Gauges, Regulators and Displays .................................................................................. 17
– Vacuum Measurement.......................................................................................................... 18
Direct Liquid Injection Vaporizers ......................................................................................... 19
Coriolis Mass Flow Controllers and Meters .......................................................................... 21
Secondary Electronics and Software Tools .................................................................................. 22
Customized Systems and Solutions ........................................................................................ 23
Level Measurement ....................................................................................................... 24
Point Level Measurement ............................................................................................... 25
Liquid Mass Flow Controllers and Oval Gear Meters .............................................................. 26
Technical Services ......................................................................................................... 27
2
Brooks Instrument Product Guide
Application Experience Beyond Measure
Every day, customers turn to Brooks Instrument for
solutions to their flow, pressure, vacuum, vaporization
and level challenges. Brooks’ award-winning meters and
controllers consistently rank at the top of their category
for accuracy, reliability and user preference, as judged
by the audience that matters – users of instrumentation.
Brooks provides the broadest array of flow, pressure
and level products in the market for a diverse range
of industries:
When quality matters: A leading anesthesiology
equipment supplier uses thousands of Brooks needle
valves annually because of their precise, repeatable
flow control and smooth ‘feel.’
When precision matters: A Big 5 chemical company
uses Brooks thermal mass and Quantim® Coriolis
products exclusively for their critical catalyst and
process research.
When repeatability matters: Many leading
biotechnology companies use only Brooks thermal mass
flow controllers as the standard for bench-top reactors
and full production units to ensure smooth scale-up.
t Semiconductors
t Chemical/petrochemical
t Biopharmaceuticals
t Solar cell
t Fuel cell
t Fiber optic
t LED
t Oil and gas
t Analytical instrumentation
t Power
t Medical devices
When consistent performance over a wide
range of flows matters: Leading fuel cell companies
worldwide specify Brooks thermal mass flow
controllers for their exceptional accuracy, wide turndown and response time.
But Brooks’ products are only half the story. Our
customers are backed by unsurpassed technical
expertise around the planet. Local Brooks product and
application specialists bring to each customer priceless
application experience. They have been extensively
trained to help you select the optimal solutions for your
measurement and control needs, and offer years of
experience solving application problems just like yours.
When technology matters: Brooks’ revolutionary
MultiFlo™ technology offers users of thermal mass flow
products tremendous flexibility to satisfy a broad range
of applications with one device.
When global reach matters: Leading engineering
contractors select Brooks variable area meters
for multi-national projects that require compliance
with worldwide standards because of Brooks’ local
experience and global support.
When certifications matter: Many Brooks products
are available with national laboratory calibration
traceability and certification, recognized hazardous area
approvals, pressure boundary certifications, material
certifications, RoHS compliance and more.
So if you’re serious about improving your process yield,
throughput and product quality, choose Brooks.
www.BrooksInstrument.com
3
Thermal Mass Flow Controllers and Meters
The most popular thermal mass flow product line on the planet!
Brooks offers a broad range of thermal mass flow controllers (MFCs) and
meters, ensuring that we will have exactly the right device for your application.
Our mass flow controllers are the acknowledged industry leader in quality and
reliability, with many devices in operation for more than 20 years.
Brooks thermal mass flow devices provide significant advantages in long term
stability, response time, accuracy, repeatability, turndown, self-diagnostics and
application flexibility. The Brooks portfolio covers the widest range of options
to meet your application needs, including:
Awards
Communications Options
Reader’s Choice Award
for best products in the
“Flowmeter, Thermal
Mass” category.
t Pressure transient insensitive MFCs (an industry first)
t MultiFlo™ (i.e., multi-gas and multi-range) capability to satisfy a broad
Golden gas Award winner in
range of applications with one device without removing device from
“Mass Flow Measurement &
Control” for the GF Series.
system (an industry first)
t FOUNDATION™ Fieldbus communications option
t NEMA 4X/IP66 MFCs for hose down/wash down applications (an industry first)
t Ultra-high purity devices for the vacuum, thin film, solar and semiconductor industry
t Class1 Div 2/Zone 2 approved devices for use in hazardous areas
t Downport MFCs for ease of maintenance and reduced gas panel footprint
Plus, we have the best trained and most responsive flow experts with application experience in virtually
every industry, all over the world. They make sure your thermal mass flow controller is selected correctly
and maintained properly.
Applications include:
Semiconductors
4
Brooks Instrument Product Guide
Solar
Multi-Purpose Mass Flow Controllers and Meters
SLA5800 Series
SLAMf™ Series
SLA Series mass flow measurement and control
The Smart Link Advantage (SLA) Series is Brooks’ premier smart digital thermal mass flow series. SLA mass flow
controllers and mass flow meters link to advanced service tools and offer the advantage of digital protocols. The SLA
Series provides many advanced features such as enhanced long term stability, improved turndown, and more.
The Brooks SLAMf™ Series mass flow line is designed specifically for use in harsh environments. Their unique NEMA
4X/IP66 enclosure provides protection from dust and water making them ideal for indoor or outdoor use and perfect for
hose down/wash down applications. The integrated sensor, valve and PID make these devices a cost-effective solution
for hazardous area installations.
t Faster response, better accuracy and improved control over analog devices
t Industry-leading repeatability ensures a stable process even under changing conditions
t Self diagnostics and alarms eliminate downtime
t Multiple communication protocols allow easy integration into many control systems
t Analog I/O devices allow for quick and easy system integration
t Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
t Globally approved for a variety of service areas
Type
Model
Full-Scale Capacity Max. Pressure
N2 Eq.
psig (barg)
Accuracy
Input/Output
Power Supply
Elastomer Seal
Controller/Meter
SLA5800
Series
3 sccm – 2500
slpm
4500 (310)
0.9% rate
0(1) – 5 Vdc / 0-10 Vdc / 0(4) –
20 mA RS485 / DeviceNetÌ
/ Profibus / FOUNDATION™
Fieldbus
11 – 27 Vdc
(see data sheet)
NEMA 4X/IP66
Elastomer Seal
Controller/Meter
SLAMf
Series
3 sccm – 2500
slpm
4500 (310)
0.9% rate
0(1) – 5 Vdc / 0-10 Vdc / 0(4) –
20 mA RS485 / DeviceNetÌ
/ Profibus / FOUNDATION™
Fieldbus
11 – 27 Vdc
(see data sheet)
NEMA 4X/IP66
Elastomer Seal
Controller/Meter
MF64S
3 sccm – 36000
slpm
1500 (100)
1% FS
Profibus
15-24 vdc
www.BrooksInstrument.com
5
Multi-Purpose Mass Flow Controllers and Meters
GF40/80 Series
4800 Series
5850E Series
GF40/80 Series mass flow measurement and control
Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control
applications that require cost-efficient solutions.
t NEW high flow rate option (up to 300 slpm)
designed with a compact footprint
t Fast sub 1 second settling time
t MultiFloTM gas and range configurability
t Corrosion-resistant Hastelloy sensor tube
4800 Series mass flow measurement and control
Featuring a broad flow range, compact size and MEMS-based sensor that provides lightning-fast response times.
E and I Series mass flow measurement and control
For those that do not require the super high performance and accuracy of a digital mass flow meter, Brooks offers
reliable analog mass flow controllers and meter. These devices continue to add to their expansive installed base due
to their good response, accuracy, and simple integration.
Type
Elastomer Seal
Controller/Meter
6
Model
Full-Scale Capacity Max. Pressure
N2 Eq.
psig (barg)
GF40
3 sccm – 50 slpm
150 (10)
GF80
3 sccm – 50 slpm
150 (10)
Accuracy
Input/Output
Power Supply
±1% rate
0-5 Vdc / 0-10 Vdc / 0-20mA,
4-20 mA / Profibus / RS485 /
DeviceNet™ / EtherCAT®
11 – 27 Vdc
(see data sheet)
±1% rate
0-5 Vdc / 0-10 Vdc / 0-20mA,
4-20 mA / Profibus / RS485 /
DeviceNet™ / EtherCAT®
11 – 27 Vdc
(see data sheet)
Metal Seal
Controller/Meter
GF81
51 slpm – 300 slpm
Meter: 75 (5)
Controller:
150 (10)
Elastomer Seal
Controller/Meter
4800
Series
50 sccm – 40 slpm
150 (10)
±1% FS
or ±3% FS
0 – 5 Vdc / 4 – 20 mA RS232
15 – 24 Vdc
Elastomer Seal
Controller/Meter
5800S
Series
3 sccm – 2500
slpm
4500 (310)
0.9% rate
& ±0.2% FS
Profibus
15 – 24 Vdc
Elastomer Seal
Controller/Meter
5800E
Series
3 sccm – 1000
slpm
1500 (100)
1% FS
0 – 5 Vdc
+/-15 Vdc
Elastomer Seal
Controller/Meter
5800i
Series
3 sccm – 1000
slpm
1500 (100)
1% FS
0 – 5 Vdc / 4 – 20 mA
15 – 24 Vdc
Metal Seal
Controller/Meter
5800EM
Series
3 sccm – 100 slpm
(200 slpm H 2)
1500 (100)
1% FS
0 – 5 Vdc / 4 – 20 mA
+/-15 Vdc or
15 – 24 Vdc
Brooks Instrument Product Guide
Ultra-High Purity Mass Flow Controllers and Meters
GF100 Series
GF100 Series High Flow
GF135
GF100 Series mass flow measurement and control
Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow
path, the GF Series delivers outstanding performance, reliability and flexibility. The GF Series has been marathontested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift
performance over time.
t Ultra-fast 300-millisecond settling time
t MultiFlo™ gas and range configurability
t Optional pressure transient insensitive (PTI), high
t Corrosion-resistant Hastelloy® sensor tube
accuracy and safe delivery system models available
and valve orifice (jet)
t New high flow rate options (up to 300 slpm) designed for
high-flow purge, EPI and blanket gas control applications
GF135 Advanced Diagnostics mass flow controller
Designed for the next step in semiconductor etch, thin film and other advanced process gas control applications,
the GF135 combines all of the benefits provided by the most advanced pressure transient insensitive mass flow
controller (MFC) and adds real-time flow error detection with advanced diagnostics.
Type
Model
Full-Scale Capacity Max. Pressure
Accuracy
Input/Output
Power Supply
±1% rate (35-100% FS)
0 – 5 Vdc / RS485 /
DeviceNet
±15 Vdc, ±24
Vdc, 11-25
Vdc
±1% rate (35-100% FS)
0 – 5 Vdc / RS485 /
DeviceNet
±15 Vdc, ±24
Vdc, 11-25
Vdc
±1% rate (35-100% FS)
0 – 5 Vdc / RS485 /
DeviceNet
±15 Vdc, ±24
Vdc, 11-25
Vdc
±1% rate (35-100% FS)
0 – 5 Vdc / RS485 /
DeviceNet
±15 Vdc, ±24
Vdc, 11-25
Vdc
psig (bar)
HP Metal Seal
Controller/Meter
UHP Metal Seal
Controller/Meter
UHP Safe Delivery
Metal Seal
Controller
UHP PTI Metal Seal
Controller
UHP High-Accuracy
Metal Seal
Controller/Meter
PTI Metal Seal
Controller
GF100
GF101
GF120
3 sccm – 300 slpm
N 2 equivalent
485 (33)
100 (5)
485 (33)
GF121
3 sccm – 300 slpm
N 2 equivalent
GF120 (SDS)
4 sccm – 1 slpm
485 (33)
GF125
3 sccm – 300 slpm
N 2 equivalent
85 (6)
GF 126
100 (5)
75 (5)
TM
TM
TM
TM
GF125 (HA)
5 sccm – 10 slpm
N 2 equivalent
85 (6)
±1% rate (10-100% FS)
0 – 5 Vdc / RS485 /
DeviceNet
±15 Vdc, ±24
Vdc, 11-25
Vdc
GF 135
3 sccm – 5 slpm
N 2 equivalent
85 (6)
±1% S.P. (10-100%F.S.),
±1% S.P. plus ±0.04%
F.S. (2-10%F.S.)
0 – 5 Vdc / RS485 /
DeviceNet
±15 Vdc, ±24
Vdc, 11-25
Vdc
www.BrooksInstrument.com
TM
TM
7
Variable Area Flow Meters
Over sixty years of variable area meter expertise
Brooks started designing and manufacturing variable area (VA) meters, also referred to as
rotameters, in 1946. Now, with more than six decades of application experience, we help
customers with VA solutions in just about every industry. Our solutions have come from
our standard portfolio as well as custom-designed products incorporating special materials
of construction, connections and pressure ratings.
The Brooks line of glass tube and metal tube VA meters ensures measurement repeatability, which provides
dependable flow monitoring and consistency. External power is not required for operation; therefore, they provide
a fail-safe flow indication under any circumstance. Brooks VA meters can be provided with a variety of wetted
materials for high-pressure, high-temperature conditions and hazardous locations.
Armored VA Meters: The Brooks line of rugged metal tube VA flow meters is ideal for high-pressure, hightemperature, and other demanding flow applications where safety is a concern. HART, FOUNDATION™ Fieldbus and
4 – 20 mA outputs and limit switches provide for remote flow monitoring.
Glass Tube VA Meters: The Brooks line of reliable glass tube VA meters is ideal for gas and liquid flow measuring
applications where viewing the process is desirable.
Purgemeters: The Brooks Sho-Rate™ brand of VA meters delivers industry-leading performance for gas or liquid
flows. Robust engineering ensures reliable indication and unsurpassed service life.
Applications include:
Offshore
8
Rotating Equipment
Brooks Instrument Product Guide
Low-Flow Glass Tube Variable Area Meters
1350 Sho-Rate™
1358 Sho-Rate™
1250 Sho-Rate™
The name Sho-Rate™ has meant reliability and performance for decades now, and the 1350 and 1355 Sho-Rate
variable area meters continue to deliver industry-leading performance for gas or liquid flows today. Their robust and
proven engineering ensures reliable indication and unsurpassed service life. Sho-Rate flow meters pioneered the
concept of field-replaceable tube and float kits; the tube and float can be replaced in-line, if necessary, in a matter of
minutes. Our1250/1255 Sho-Rate models offer an easy-to-read rotating magnifying glass, making it the ideal choice
for display on panels and cabinets.
1350/1355 Sho-Rate
Rugged and durable
1250/1255 Sho-Rate
Ideal for panel display
t Integral needle valves on inlet or outlet
t Integral flow controller that compensates for varying
inlet or outlet pressures
t 316 stainless, brass, or Kynar™ construction
t Custom scales for any application
Model
1350/1355 Sho-Rate
1358 Sho-Rate
1250/1255 Sho-Rate
Capacity – Water
(lph)
(gph)
t Integral needle valves on inlet or outlet
t Direct-read scales for common units and fluids
t Easy-change design allows quick interchangeability
of tube assemblies
t Rotating lens allows 180° view with magnification
Capacity – Air
(m 3n/hr)
(scfm)
Accuracy
Max. Pressure
Construction
psig (bar)
0.041-130
0.010 – 34
0.003-3.9
0.002 – 2.33
5% (1350) FS;
3% (1355) FS
200 (14)
Glass tube w/ brass,
316SS, or Kynar
180 – 1000
49 – 280
5.7 – 22
3.4 – 15
10% FS
200 (14)
Glass tube w/ brass
or 316 SS
1.3 – 120
0.34 – 32
0.003 – 3.9
0.001 – 2.33
10% (1250) FS
5% (1255) FS
200 (14)
Glass tube w/
aluminum or
316 SS
www.BrooksInstrument.com
9
Armored Metal Tube Variable Area Meters
MT3809 XP Flameproof
MT3809 Indicator Only
3750 Ar-Mite
The Brooks line of rugged metal tube variable area meters (rotameters) is ideal for high-pressure, high-temperature
and other demanding flow applications where safety is a concern.
t Accuracy across an ultra-wide range of flow rates and temperatures
t Globally approved for use in hazardous environments
t Needle valves available for flow control
t Multiple connection options to match your existing system and provide easy installation
t Many corrosion-resistant material options for the metering of aggressive fluids
t Alarm and 4 – 20 mA with HART and '06/%"5*0/™ Fieldbus options provide for remote flow monitoring
t Excellent meter repeatability provides consistent batch and/or process production
t No power required, which reduces installation cost and provides flow measurement in hazardous areas
t Low-pressure drop
Model
Capacity – Water
(lph)
(gpm)
Capacity – Air
(m3n/hr)
(scfm)
Accuracy
Max.
Pressure
Temperature
Output
psig
C
F
103
1500
-29 –
204
-20 –
400
Alarm
(IS or X-Proof)
5%
275
4000
-29 –
204
-20 –
400
Alarm and/or
4-20 mA (IS or X-Proof)
rate
3600
Series
18 – 11355
0.08 – 50
0.65 – 43
0.38 – 28
10%
3750
0.8 – 100
0.03 – 44
0.04 – 3.1
0.02 – 2
bar
MT3809
25 – 100,000
0.11 – 440 0.78 – 1404 0.49 – 888
2%
413
6000
-198 –
420
-325 –
788
Alarm and/or 4-20 mA,
HART (IS or X-Proof)
MT3810
25 – 20,000
0.11 – 88
0.78 – 620
0.49-392
5%
103
1500
-29 –
215
-20 –
420
Alarm and/or 4-20 mA,
HART (IS or X-Proof)
MT3819
110 – 15,000
0.48 – 66
3.2 – 432
2 – 275
2%
19
275
-29 –
150
-20 –
300
Alarm and/or 4-20 mA,
HART (IS or X-Proof)
10
1
Special designs for flow rates as low as 5 l/h of air and 0.08 l/h of water are available. Consult your local
representative for more information.
2
Special designs for up to 15,000 psi (1000 bar) are available. Consult your local representative for more information.
Brooks Instrument Product Guide
High-Flow Glass Tube Variable Area Meters
GT1000
GT1305
The Brooks line of reliable glass tube variable area meters (rotameters) is ideal for many gas and liquid flow
measuring applications where viewing the process is important.
t Tube and float can be re-ranged in-line, minimizing process downtime
t Rotatable connections for easy installation at any angle
t O-ring sealing to meet piping requirements or customer preference
t Globally approved for use in hazardous environments
t Reliable – only one moving part
t No power required, which reduces installation cost and provides flow measurement in hazardous areas
t Low-pressure drop allows for economical pump selection
t Flow alarms available on some models
t Rugged, vented polycarbonate enclosure available on most models
Model
Capacity – Water
(lph)
(gpm)
Capacity – Air
(m3n/hr)
(scfm)
Accuracy
Max. Pressure
Output
psig (bar)
GT1000
0.032 – 22,000
0.0001 – 98
0.002 – 280
0.001 – 170
2% FS
500 (34)
Alarm (IS)
GT1307
39 – 20900
0.17 – 92
1.5 – 342
0.9 – 217
2% FS
350 (24)
Local Indication
Only
GT1305
185 – 11355
0.8 – 50
4.7 – 79
3 – 50
10% FS
200 (14)
Alarm
www.BrooksInstrument.com
11
Plastic Tube Variable Area Meters
2510
2520
2540
Brooks Instrument’s versatile, economic acrylic flow meters are ideal for a variety of air, water and gas flow
instrumentation applications. The new Series 2500 is a standard precision-machined acrylic flow meter for liquids
and gases. It has direct-read air or water scales and is available in either English or metric scales. Series 2500 devices
can be configured with various control valve, fitting and O-ring options.
t Easy-to-read English or metric scales
t Water ranges from 4 ccm to 20 gpm
t Air ranges from 40 ccm to 4000 slpm
t Threaded brass inserts for quick installation
t Easy disassembly and assembly for maintenance
t Durable one-piece clear acrylic construction
t Stable, easy-to-read float
Model
Capacity – Water
(lph)
(gph)
Capacity – Air
(m3n/hr)
(scfm)
Accuracy
Max. Pressure
Temperature
psig (bar)
°C (°F)
Construction
2510
8 – 150
.2 – 40
.002 – 5.5
.002 – 3.3
5% FS
100 (6.8)
65 (150)
Plastic tube w/
brass or 316 SS
2520
4 – 220
1 – 60
.002 – 5.5
.002 – 3.3
3% FS
100 (6.8)
65 (150)
Plastic tube w/
brass or 316 SS
2530
45 – 1130
12 – 300
.76 – 30
.5 – 20
3% FS
100 (6.8)
65 (150)
Plastic tube w/
brass or 316 SS
2540-S/2540-V
/2540-I
90 – 4500
24 – 1200
5.5 – 165
3 – 100
2% FS
100 (6.8)
65 (150)
Plastic tube w/
PVC or 316 SS
12
Brooks Instrument Product Guide
Precision Valves, Controllers, Switches and Indicators
FC8800 Series
8500 Series NRS™
1198
with 1355 Sho-Rate™
Manual Flow Controller
Brooks Model FC8800/8900 Series flow controllers are designed to maintain a constant differential pressure across
an integral manual flow regulating valve.
t Series 8800 controllers are designed for all liquid and gas flows with variable upstream pressures.
t Series 8900 controllers are for all liquid and gas flows with variable downstream pressures.
Control Valve, Fine Control
Brooks Model 8500 Series NRS™ (non-rising stem) control valves are designed specifically for extremely low-flow
gas and liquid applications. Straight and 90° angle models in brass and stainless steel are available. They feature
a means of adjusting a sliding tapered needle, which prevents sticking. These valves are particularly suitable for
precise control and possess a high turns-to-lift ratio. The flow is constant for any given stem position.
Flow Switch
The CCB311 flow switch is designed to detect low flows in horizontal or vertical pipes with an upward flow direction.
Suitable for liquids or gases, the CCB311 flow switch is very robust with high repeatability and a very basic design.
It is certified explosion proof/intrinsically safe.
Flow Indicator
Brooks Instrument Model 1198 flow indicators provide a quick, reliable and economical way to verify fluid flows
through industrial process lines. Model 1198 is available with three styles of indicators including paddle wheel,
flap style or drip tube/whistle shape. Many specials are also available upon request to meet various conditions of
pressure, temperature, fluid types and mechanical dimensions.
www.BrooksInstrument.com
13
Pressure and Vacuum Products
Measuring pressure and vacuum with superior design and performance
Brooks now offers a very diverse line of pressure and vacuum products including pressure/vacuum controllers,
pressure gauges, pressure transducers, pressure transmitters, pressure regulators, capacitance manometers, and more.
t Pressure/vacuum controllers that are flexible enough to manage the pressure of gas or liquid upstream
or downstream of the device
t Pressure gauges that meet rigid cleanliness and safety guidelines
t Remote transducers that provide stability and reliability using proven sensing technologies
t All-PFA seal-free pressure transducers for measurement of ultra-high purity fluids including corrosives
t Compact and economical high-precision mechanical pressure regulators
t Heated and unheated capacitance manometers that meet the diverse requirements of vacuum-based processes
Cylinder Scales
The GCS400 Series cylinder scales are used to accurately measure the remaining mass of liquid or gas in supply vessels.
They employ a sealed load cell and heavy gauge stainless steel housing for exceptional durability and reliability in all
applications. The GCS400 Series are additionally certified intrinsically safe for use in NEC Class I, Division 1 hazardous
areas.
Model
GCS400 Series
14
Capacity
60, 100, 300 lbs
Output
4-20 mA
Brooks Instrument Product Guide
0.05-5.05 Vdc
Compliance
CE
Pressure/Vacuum Controllers
SLA7810/20 Series
SLA5810/20 Elastomer Series
Model 5866RT
Electronic pressure controllers manage the pressure of gas upstream or downstream of the device. Brooks electronic
pressure controllers utilize the core control technology present in our industry-leading thermal mass flow controllers.
Brooks replaces the thermal mass flow sensor with a pressure sensor, provides industry-leading control valve
technology and software, then controls the pressure of a fluid based on a set-point signal to the device. Using a
closed-loop control, Brooks pressure controllers do not have the droop or hysterisis associated with traditional
mechanical spring diaphragm pressure regulators. Brooks pressure controllers are available with internal pressure
sensors to control pressure in a range from vacuum to 4500 psia.
Brooks pressure controllers can be configured to use external pressure sensors for added flexibility. When using
an external pressure sensor, the flow of the gas required to maintain pressure can be controlled and measured.
Type
Model
Full-Scale
Capacity
Pressure
Accuracy
Max. Pressure
Input/Output
Power Supply
psia (bara)
Pressure Controllers
Metal Seal, 1.125”
SLA7810/20
0 – 290 psia
(0 – 20 bara)
0.5% FS
290 (20)
0 – 5 Vdc / DeviceNet™
11 – 25 Vdc
(see data sheet)
Elastomer Seal
SLA5810/20
Series
0-4500 psia
(0-310 bara)
±0.25% FS
(>300 psia)
±0.12% FS
(<300 psia)
4500 (310)
0(1) – 5 Vdc / 0-10 Vdc / 0(4)
– 20 mA RS485 / Profibus /
FOUNDATION Fieldbus
11-27 Vdc
(see data sheet)
Elastomer Seal
SLAMf 10/20
0-4500 psia
(0-310 bara)
±0.25% FS
(>300 psia)
±0.12% FS
(<300 psia)
4500 (310)
0(1) – 5 Vdc / 0-10 Vdc / 0(4) –
20 mA RS485 / Profibus
11-27 Vdc
(see data sheet)
Flow
Accuracy
Max. Pressure
Input/Output
Power Supply
Type
Model
Full-Scale Capacity
N2
psia (barg)
Remote Transducers/Pressure Controlling Flow Meters
Metal Seal, 1.125”
SLA7840
3 sccm – 30 slpm
1% Rate
1500 (100)
0 – 5 Vdc / DeviceNet
11 – 25 Vdc
(see data sheet)
Elastomer Seal
SLA5840
Series
3 sccm – 50 slpm
0.9% Rate
4500 (310)
0(1) – 5 Vdc / 0-10 Vdc / 0(4) –
20 mA RS485 / Profibus
11-27 Vdc
(see data sheet)
Elastomer Seal
5866RT
3 sccm – 30 slpm
1% FS
1500 (100)
0 – 5 Vdc
+/- 15 Vdc
www.BrooksInstrument.com
15
Pressure Transducers and Transmitters
SolidSense II™
Seal-Free Pressure (SFP) Transmitter
SolidSense II™ ATEX
Ultra-High Purity Pressure Transducers
The Brooks SolidSense II® ultra-high purity pressure transducers offer the lowest cost of ownership for high-purity
gas distribution systems through virtually zero-maintenance operations. The ultra-stable, micro-machined silicon
strain gauges are matched and glass-fused at high temperature to the metal diaphragm. This process reduces drift
commonly associated with competitive products. These transducers will not need to be reset immediately after
installation and will not temporarily indicate inaccurate pressure readings during purge cycle.
Model
SolidSense II
Full-Scale Range
Pressure Reference
Output
Electrical Connection
30 – 3000 psi
Absolute, gauge or compound
4 – 20 mA, 0 – 10 Vdc,
0.05 – 5.05 Vdc
Bendix, Pigtail,
15-pin D-sub
*More configurations available upon request. Contact your local Brooks representative.
Industrial Pressure Transmitters
The Brooks SolidSense II® ATEX industrial pressure transmitters offer superior corrosion resistance with a 316L VIMVAR stainless steel, chromium-enriched wetted flow path, making them suitable for virtually all process fluids. Active
temperature compensation enables improved process pressure measurement in plants exposed to wide temperature
variations. High accuracy, combined with FM and ATEX compliance, makes the SolidSense II ATEX pressure
transmitter the optimum choice for demanding applications.
Model
Solid Sense II ATEX
Full-Scale Range
Pressure Reference
Output
Electrical Connection
30 – 3000 psi
Absolute, gauge or compound
4 – 20 mA
(others available upon request)
Pigtail
*More configurations available upon request. Contact your local Brooks representative.
Polymer Pressure Transmitters
The Brooks SFP polymer pressure transmitters use a seal-free perfluoroalkoxy (PFA) sensor to eliminate the potential
for process fluid contamination. A temperature-compensated output ensures repeatable pressure measurement and
an integrated vapor leak indicator provides visual warning of potentially unsafe operation.
Model
SFP Single-Ended or
Flow-Thru Transmitter
16
Full-Scale Range
Pressure Reference
Output
Electrical Connection
15 to 150 psig
Gauge, compound
4 – 20 mA
(others available upon request)
Pigtail
Brooks Instrument Product Guide
Pressure Gauges, Regulators and Displays
LR056 Pressure Display
S122/C122/F122 Series
8601 Pressure Regulator
Pressure Gauges
Brooks Instrument pressure gauges feature all-stainless wetted materials and are welded in an oxygen-free
environment to meet rigid cleanliness and safety guidelines for all demanding requirements, including high-purity
gases. An optional transmitting alarm or continuous transmitter enhances the versatility of Brooks’ pressure gauges
in applications where automation is required.
Model
Range
Accuracy
Process Connections
S122/C122/F122 2” Pressure Gauges
Vacuum to 4,000 psig
1% FS
Face seal male/female, NPT
IPS122 2” Indicating Pressure Switches
Vacuum to 4,000 psig
1% FS
Face seal male/female, NPT
IPT122 2" Indicating Pressure Transmitters
Vacuum to 4,000 psig
1% FS
Face seal male/female, NPT
Pressure Regulators
Brooks 8601 high-precision supply pressure regulators are direct-acting, non-relieving units that provide bubble-tight
shut-off on helium at 100 psi. Compact and economical, these units are assembled in a cleanroom environment and
are tested under simulated operating conditions.
Type
Pressure Regulator
Model
Full-Scale Capacity
Max. Pressure
Temperature
8601
3 – 1000 ccm Air
250 psig,
17 bar
1 – 177 °C
33 – 350 °F
Construction
Aluminum,
316 SS
Pressure Displays
Brooks offers a new generation of displays for our SolidSense II pressure transducers or other pressure devices that
provide 4 – 20mA analog communication. Displayed pressure units and ranges are user-settable. The LR056 series
also provides two user-programmable alarms for high or low pressure condition.
www.BrooksInstrument.com
17
Vacuum Measurement
XacTorr™ CMX Series
CMC Series
Rugged, stable capacitance manometers
Brooks capacitance manometers incorporate industry-leading features that combine to improve measurement
reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. The result is an exceptionally
reliable capacitance manometer family for all vacuum measurement applications.
An important benefit of a Brooks XacTorr is its advanced Mark-IV sensor. The sensor chamber contains surface
areas that are not used in the pressure measurement; these surfaces provide locations for particles and condensable
vapors to accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and greatly
extending sensor life. The sensor diaphragm is made from corrosion-resistant Inconel ®.
XacTorr™ CMX Series
The XacTorr CMX series gauges are premium heated gauges that use patented, dual-zone heating to ensure 0.1
°C temperature uniformity. The sensor very quickly recovers from thermal events and is virtually immune to
ambient temperature changes. Three operating temperatures are offered, 45 °C, 100 °C and 160 °C, with full-scale
measurement ranges from 100 milliTorr to 1000 Torr. An unheated configuration is available for applications that
require high vacuum (<10 Torr Full Scale) or DeviceNet communication.
Model
Ranges FS
(Torr)
Measurement
Range
Operating
Temp (°C)
Sub 1/1-100/1000 Torr Ranges
Accuracy
Temp. Coefficient
Input/Output
CMX0
1, 2, 10, 20,
100, 1000
4 decades
(from FS)
Ambient
0.25% of reading
0.002% of FS/°C (zero)/
0.02% of FX/°C (span)
RS485, DeviceNet,
Analog
CMX45
0.1,0.5,1,2, 10,
20, 100, 1000
4 decades
(from FS)
45
0.25% or 0.50% of reading/
0.15% of reading
0.002% of FS/°C (zero)/
0.02% of FX/°C (span)
RS485, DeviceNet,
Analog
CMX100
0.1,0.5,1,2, 10,
20, 100, 1000
4 decades
(from FS)
100
0.25% of reading/
0.15% of reading
0.002% of FS/°C (zero)/
0.02% of FX/°C (span)
RS485, DeviceNet,
Analog
CMX160
1, 2, 10, 20,
100, 1000
4 decades
(from FS)
160
0.50% of reading /
0.25 to 0.35% of reading
0.002% of FS/°C (zero)/
0.02% of FX/°C (span)
RS485, DeviceNet,
Analog
CMC (Unheated Gauges)
CMC series gauges are compact, economical un-heated capacitance manometers that feature a robust all-welded
construction and Inconel ® sensing diaphragm. The device’s electronics are temperature compensated to minimize
drift due to ambient temperature changes.
Model
Range FS
(Torr)
CMC
18
10, 20, 50,
100, 200, 1000
Measurement
Range
3.5 decades
(from FS)
Operating Temp.
Accuracy
Temp. Coefficient
Output Signal
0.25% or 0.50%
of reading
0.005% of FS/°C (zero)
0.027% of FX/°C (span)
0-10 vdc
(°C)
Unheated
Brooks Instrument Product Guide
Direct Liquid Injection Vaporizers
FROM JIM
Direct Liquid Injection Vaporizer
Integrated System
Break free from conventional vaporizing technology
Direct liquid injection (DLI) vaporization solutions are high-performing liquid vaporizers designed for customers who
require reliable liquid vaporization. Direct liquid injection vaporizers overcome the many limitations of conventional
vaporizing systems, such as bubblers and vapor draw systems, for more efficiency, control and precision.
The Brooks DLI vaporizers employ hot gas, rather than a hot metal surface, to accomplish liquid vaporization. With
unique atomization and heat exchanger technology, the Brooks DLI vaporizers deliver chemically pure vapor and
provide enhanced thermal, optical and hardness characteristics for various applications:
t Water vaporization for fuel cell stack humidification and many other water addition applications
t Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition
(MOCVD), and atomic layer deposition (ALD)
t Depositing thin films for enhanced thermal, optical or hardness characteristics such as diamond-like carbon
coating and glass coating
t Vaporizing monomers for vacuum polymer film deposition
t Generating calibration vapor
t Vaporizing liquid hydrocarbons
Specifications:
t Allowable process pressure: vacuum to many atmospheres
t Vapor capacity: less than 5 g per hour to greater than 15 kg per hour. (In calibration vapor applications,
the target analyte concentrations may be achieved proportioning the liquid and carrier gas flows.)
t Number of liquid feeds: multiple
t Sample wetted materials: 316L stainless steel with elastomer seals, all welded 316L, electropolished 316L
with nickel seals
t Vaporizer chamber heating: electric band heater
t Heater power: less than 100 W to greater than 5000 W, application dependent; 100 Vac, 115 Vac or 230 Vac
t Temperature sensors: two K-type thermocouples, one for chamber temperature and one for
over-temperature alarm
t Process connections: 1/8” to 1” compression, face-seal or NPT typical
t Leak integrity: 1 x 10-9 cc/sec helium
t Dimensions: vary by application. A 400 W DLI vaporizer is approximately 7.5” H x 5” W x 5” D
(200 mm x 125 mm x 125 mm)
www.BrooksInstrument.com
19
Coriolis Mass Flow Controllers and Meters
The first Coriolis device with built-in control
Quantim® is the first miniaturized Coriolis mass flow controller that measures and controls flow directly without any
need to compensate for fluid properties or process conditions. Quantim’s Coriolis technology, internal control valve
and PID bring a new level of measurement accuracy and control all in one compact package.
The Coriolis principle is not new to process flow measurement. It is a proven technology that has been employed in
a wide variety of markets and applications for over 30 years. Although Coriolis has been widely used in high-flow
processes, Quantim brings precise flow measurement and control to lower-flow applications.
Quantim Coriolis controllers and meters provide unsurpassed performance, reliability, repeatability and control in
demanding low-flow applications. The Brooks Coriolis portfolio covers virtually every need you may have, including:
t Metal seal devices for the vacuum thin film and semiconductor industry
t NEMA 4X/IP66 MFCs for wash down applications
t Downport MFCs for installation and service ease
t High-pressure capability for demanding research applications
Our products also have an array of certifications and approvals for ingress protection and use in hazardous areas. Plus,
we have the best trained and most responsive flow experts with application experience in virtually every industry, all
over the world. They make sure your Coriolis mass flow device is selected correctly and maintained properly.
Applications include:
Precision Coatings
20
Brooks Instrument Product Guide
Fuel Cells
Coriolis Mass Flow Controllers and Meters
QMBC IP40
QMBC IP66
Brooks Quantim Coriolis mass flow controllers and meters offer unsurpassed accuracy and flexibility in critical lowflow liquid and gas applications.
The heart of the device is a patented Coriolis sensor design that measures low flows independent of the fluid type
or process variables. This provides you with unsurpassed performance, repeatable mass flow measurement and
control even under changing conditions.
Brooks Quantim products are some of the smallest, lowest-flow Coriolis meters and controllers available on the
market. With a footprint the size of a netbook, you can fit this instrument into any tight space.
Coriolis meters and controllers are available in NEMA 1/IP40, NEMA 4X/IP66, explosion proof and ANSI/ISA-76
downport configurations.
Type
Model
Tube Size
Nominal Flow*
Accuracy
liquid (kg/hr)/gas (lpm)
Precision Mass Flow
Controller Gas and Liquid
Precision Mass Flow
Meter Gas and Liquid
QMBC
QMBM
2
0.15/1.05
3
0.78/2.96
4
7.97/24.8
2
0.19/1.43
3
1.00/5.60
4
13.5/53.1
Max. Pressure
Input/Output
psig (bar)
+/-0.2%, 0.5%
or 1% rate
500 (35),
1500 (100)
or 4500 (300)
0 – 5 Vdc,
4 – 20 mA
or HART
+/-0.2%, 0.5%
or 1% rate
500 (35),
1500 (100)
or 4500 (300)
0 – 5 Vdc,
4 – 20 mA
or HART
* Higher flows may be possible depending on the fluid and process conditions.
www.BrooksInstrument.com
21
Secondary Electronics and Software Tools
Model 0254
Model 0260
Brooks Service Suite
Model 0254 four-channel power supply, readout and set-point controller
The Brooks 0254 is an innovative, reliable microcomputer-based controller that provides power for up to four Brooks
mass flow meters and controllers, and/or pressure devices, all in a new compact design. Additionally, the 0254 can
generate flow set-point commands, display flow rate, totalize flow, batch, blend multiple flow streams and more.
This fully RoHS-compliant device has a very user-friendly operation and is offered with multiple mounting options
such as rack mount, panel mount and table-top mount.
Brooks Smart Interface Model 0260 controls and monitors up to 30 devices
The Brooks Smart Interface Model 0260 is a Microsoft Windows®-based software application that provides expanded
control and monitoring capabilities in laboratory and research environments for Brooks thermal mass flow meters and
controllers with an RS485 Smart protocol digital interface. Together with the power supply and RS485 to USB hardware
module, this product is a great solution for monitoring and controlling up to 30 mass flow meters/controllers.
Model
Channels
Additional Functions
Control I/O
Power Input
Power Output
0254
4
Totalize and blend
RS-232 I/O for remote control
1 – 5 Vdc,
2 – 10 Vdc,
4 – 20 mA
100 – 240 Vac,
50/60 Hz
+/-15 Vdc,
24 Vdc
0260
Up to 30
devices
Display flow, adjust set point, display alarm status,
display and change valve override (VOR) status,
totalize, batch, blend, log data
RS485 Smart
Protocol
85 – 250 Vac,
47 – 63 Hz
24 Vdc, 3.5 A
Brooks Service Suite
Brooks Instrument provides a variety of software and accessory options to simplify installations and start-up.
Brooks software tools ensure mass flow controllers perform at their best. Calibration and control software, available
for some models, allow customers to perform calibration checks to verify accuracy and repeatability.
Brooks Service Suite, Standard: Provides access to I/O tuning, alarm indication/configuration, diagnostics,
selected response tuning, control and monitor.
Brooks Service Suite, Pro: Provides access to I/O tuning, alarm indication/configuration, diagnostics, selected
response tuning, control and monitor, plus calibration and accuracy reporting capabilities.
22
Brooks Instrument Product Guide
Customized Systems and Solutions
MT3809 Special
Manifold Solution
Custom engineering for special applications
Can’t find the exact instrument for your application? Let Brooks’ application experts devise a custom solution for
you. Our expertise in custom-engineered flow products for unique applications includes:
t Special ambient requirements
t High/low process temperature operation
t Exotic materials
t High process pressure capability
t Difficult process streams
If you have a unique application, contact Brooks or your local sales representative.
Comprehensive Solutions
Customers tight on resources and time often seek engineering partners to design the complete system for a new
process or to keep their existing process up-to-date and running smoothly. Brooks’ solutions-based approach to
solving customer applications is ideal.
Brooks’ Solutions Group can provide various plans including expert application advice and engineering, ready-toassemble “kits” and complete, integrated, turnkey systems. We have also developed unique direct liquid injection
vaporization systems, manifold systems, precise measurement solutions for dosing applications, and more.
Solutions for OEMs
Many Brooks Instrument products are ideal for OEM customers, providing high-performing, cost-effective solutions.
Current Brooks OEM customers include medical device equipment manufacturers, analyzer manufacturers, suppliers
of gas blending equipment, vacuum pump makers, and industrial processing equipment suppliers. Brooks can
customize any standard product to meet OEM requirements.
t Compact thermal mass flow meters and controllers
t Needle valves for precise flow control
t Compact pressure regulators
t Flow controllers for variable upstream or downstream pressures
t Custom variable area glass tube assemblies available for your unique flow application
t Customized variable area, thermal mass and Coriolis flow controllers and pressure products
t Private labeling available
www.BrooksInstrument.com
23
Level Measurement
Robust magnetic level gauges from Brooks provide reliable and continuous liquid level measurement through the use
of a proven magnetic float technology that does not require external power. As a result, plant engineers can continue
to monitor material levels despite planned or unplanned power loss. Optional alarms and transmitters are available to
permit remote monitoring as well.
Brooks magnetic level gauges feature sealed measurement chambers constructed from stainless steel, PVC, PPH,
PVDF or PTFE that enable reliable level measurement of a wide assortment of liquids including those that are
corrosive, toxic or otherwise hazardous. Because the only moving part in contact with the fluid is the float, these
instruments are exceptionally rugged and durable. Many process connection options are available, further enhancing
application flexibility.
Type 810 Mechanical Level Gauge
The type 810 magnetic level gauge allows you to measure liquid levels directly — even corrosive or dangerous
liquids — in vessels or pressurized tanks. The design of the type 810 ensures good accuracy, excellent reliability,
and safe use.
The type 810 mechanical level gauge measures liquid level (or liquid/liquid interface) over ranges from as short as 1
foot (0.3 m) to as long as 20 feet (6 m), and longer with multiple sections of instruments. Applications include product
tank monitoring, feed water heaters, condensate and separator systems, cryogenic gases, effluent tanks, and more.
MC1000 Continuous Level Transmitter
This economical level instrument features a ball float on a stainless steel rod that can be insertion-mounted or
mounted in a bypass chamber. The MC1000 comes with either flanged or threaded tank connections, providing
flexible mounting options. Its 4 – 20 mA transmitter can be provided in standard, explosion proof or intrinsically safe
configurations with or without HART. The maximum measurement range is 10 feet (3 m) and measurement
resolution is 0.6” (15 mm).
Type
Model
Temperature
Pressure
Connection
Output
Construction
psig (bar)
Continuous Level
– Side Mount
810
420 °C / 790 °F
5800 (400)
Flanged/threaded/
welded
Alarm &/or 4 – 20 mA,
HART (IS or XP)
304L SS, 316L SS,
PVC, PVDF, PPH, PTFE
Continuous Level
– Top Mount
811
200 °C / 390 °F
12 (180)
Flanged/threaded/
welded
Alarm &/or 4 – 20mA,
HART (IS or XP)
304L SS, 316L SS,
PVC, PVDF, PPH, PTFE
Continuous Level
– Top Mount
MR1000
To 100 °C / 21 2°F
N/A
4 – 20mA, HART
(IS or XP)
316 SS, PVC, PVDF
24
Flanged/threaded
Brooks Instrument Product Guide
Point Level Measurement
ANV/ANH Point Level Switch
ANV/ANH Point Level Switch
MR783 Multi-Point Level Switch
Point level switches are designed to detect level variations and activate alarms based on one or multiple level points.
They can be used for normal, corrosive or hazardous liquids and are certified explosion proof or intrinsically safe.
The ANV point level switches are certified and used in highly demanding nuclear power plant applications. Certified
material, NACE and radiography options are available to meet customer specifications.
ANV/ANH Point Level Switch
The vertical Series ANV and horizontal Series ANH level switches are designed to detect level variations and activate
alarms accordingly. They can be used for normal, corrosive or hazardous liquids and are certified explosion proof or
intrinsically safe. Certified material, NACE and radiography options are available to meet customer specifications.
MR783 Multi-Point Level Switch
This multi-point level switch is compact, making it easy to mount in multiple locations on a tank. With versatile
construction (316 SS, PVC or PVDF), the MR783 is certified explosion proof or intrinsically safe and is capable of
indicating more than one level per tank and triggering alarms accordingly.
Type
Model
Temperature
Pressure
Connection
Output
Construction
psig (bar)
Point Level
– Vertical Mount
ANV
To 350 °C / 660 °F
1450 (100)
Flanged/threaded
Alarm (IS or XP),
up to 2 switches
Carbon steel, 316 SS
Point Level
– Horizontal Mount
ANH
To 350 °C / 660 °F
1450 (100)
Flanged/threaded
Alarm (IS or XP),
up to 2 switches
Carbon steel, 316 SS
MR783
To 100 °C / 212 °F
N/A
Flanged/threaded
Alarm (IS or XP),
up to 2 switches
316 SS, PVC, PVDF
Point Level
– Top Mount
www.BrooksInstrument.com
25
Liquid Mass Flow Controllers and Oval Gear Meters
Flomega™
Oval Gear Meter
Flomega™ measures and controls very low flows
Flomega™ liquid flow meters and flow controllers use thermal mass flow technology to accurately measure and
control liquids, especially very low flows of liquid from 2 to 1000 grams per hour. They are weatherproof and
certified for use in hazardous areas.
Type
Model
Full-Scale Capacity
Accuracy
Max. Pressure
Input/Output
Power Supply
psig (bar)
Liquid Mass Flow
Controller/Meter
5881/91
30 – 100 g/hr
0.5% FS
5800 (400)
0 – 5 Vdc,
4 – 20 mA
15 – 24 Vdc
Liquid Mass Flow
Controller/Meter
5882/92
200 – 1000 g/hr
0.5% FS
5800 (400)
0 – 5 Vdc,
4 – 20 mA
15 – 24 Vdc
Oval gear positive displacement meter for high-viscosity liquids
Brooks’ oval gear positive displacement meters are ideal for highly viscous liquids in applications where accuracy
and repeatability are critical.
Type
Model
Capacity – Water
Accuracy Rate
Max. Pressure
Temperature
Construction
psig (bar)
Oval Gear Meter
BM01/02
2 – 500 lph/
0.53 – 132 gph
1%
150 (10)
-29 – 66 °C
-20 – 150 °F
316 SS, PPS
Oval Gear Meter
BM04/50
60 – 21,000 lph/
15 – 5500 gph
0.5%
800 (55)
-29 – 120 °C
-20 – 248 °F
Aluminum,
316 SS, PPS
26
Brooks Instrument Product Guide
Technical Services
Application experts at your service
Backed by outstanding support, Brooks is committed to assuring that our customers receive the ideal solution for
their application. We make it easy to locate a sales representative and get technical assistance, training services and
more. Our instruments are top in the industry, but it’s our application experience and support services that set us
apart from the competition:
t Brooks factory-trained support
t 24/7 telephone support
t Worldwide coverage
t Primary standard calibration equipment at every Service Center
t NIST and NMI traceability to ensure accuracy and reliability
Start-Up Service: Need help getting your new flow products installed properly? Brooks’ on-site start-up service will
set up your flow products, then test them to make sure they are operating perfectly in your application.
Extended Warranties: For uninterrupted support and peace of mind, extended warranties may be purchased at
any time within the original warranty period or after major repair in a Brooks Service Facility.
Preventive Maintenance Programs: For ongoing process accuracy and reliability, we offer a number
of preventive maintenance programs. Brooks also offers annual calibration service for all devices and full
rebuild/refurbishment.
Advanced Replacement Options: To minimize operational downtime, Brooks can provide advanced replacement
devices for certain models in exchange for your existing device.
Training Services: Brooks encourages customers to take advantage of our excellent training programs such as
“The Basics of Flow Measurement,” “Calibration” and “Maintenance.” We also offer customized, hands-on programs
to fit your specific needs. Both factory and on-site training are available.
BrooksInstrument.com
Find your local Brooks application specialist
by visiting BrooksInstrument.com/RepLocate
www.BrooksInstrument.com
27
Brooks Instrument Singapore
18 Boon Lay Way
#04-136 Tradehub 21
Singapore 609966
T: +65 6595 5168
F: +65 6595 5169
[email protected]
Global Headquarters
Brooks Instrument
407 West Vine Street
Hatfield, PA 19440-0903 USA
Toll-free (USA): 888-554-FLOW
T: 215-362-3700
F: 215-362-3745
[email protected]
China
Brooks Instrument China
Room 203, Building 6
No. 1888 Xin Jin Qiao Road
Jin Qiao E.P.Z. Pu Dong
Shanghai 201206 China
T: +86 (21) 3872 0770
F: +86 (21) 3872 0771
Europe, Middle East & Africa
Brooks Instrument
Neonstraat 3
6718 WX Ede
Netherlands
T: +31 (0) 318 549300
F: +31 (0) 318 549309
[email protected]
India
Brooks Instrument India Pvt Ltd
301, 3rd Floor
A to Z Industrial Estate
Ganpatrao Kadam Marg
Lower Parel, Mumbai 400 013
Maharashtra, India
T: +91 (22) 6627 0780
F: +91 (22) 6627 0780 Extn: 8
Germany
Brooks Instrument
Zur Wetterwarte 50
Gebaude 337/B
01109 Dresden
Germany
T: +49 (0) 351 2152 040
F: +49 (0) 351 2152 0425
Korea
Brooks Instrument Korea
D-406, Bundang Techno Park
#151 Yatap-dong, Bundang ku
Sungnam-Shi
Kyungki-do, Korea 463-050
T: +82 (31) 708 2521
F: +82 (31) 708 2595
Japan
Brooks Instrument Japan
1-4-4 Kitasuna Koto-Ku
Tokyo, 136-0073 Japan
T: +81 (3) 5633 7100
F: +81 (3) 5633 7101
[email protected]
Singapore
Scan the QR code to
get Brooks’ contact
info directly on your
mobile device.
Download the app
at getscanlife.com
Votre contact Brooks Instrument :
Serv’Instrumentation
Z.I Broteau Nord
69540 Irigny
France
Tél : +33 (0)4 78 51 47 50
Fax : +33 (0)4 78 51 59 96
Email : [email protected]
Web : www.servinstrumentation.fr
s publication are presented for information purposes only, and while effort has been made to ensure their accuracy, they are not to be construed as warranties or
guarantees, expressed or implied, regarding the products or services described herein or their use or applicability. All sales are governed by our terms and conditions,
which are available on request. We reserve the right to modify or improve the designs or specifications of our products at any time without notice. For the latest Brooks
product specifications, view the “Products” section of our website.
Ar-Mite, Brooks, Flomega, Mf, MultiFlo, NRS, Quantim, Sho-Rate, Solid Sense II and XacTorr are marks of Brooks Instrument.
All other marks are property of their respective ownerblication SP-410-ENG 6/14
© 2014, Brooks Instrument, LLC
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