Mass Flow Meters and Controllers

Mass Flow Meters and Controllers
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Mass Flow Meters and Controllers
■What is a Mass Flow Instrument (Mass Flow Controller/Mass Flow Meter)?
■Guide to Selection of Mass Flow Instruments
■Mass Flow Controller/Mass Flow Meter with Indicator
MODEL D8500
■Model D8500 Series Power Cable
PSK-85/CP-85CF Series
■Standard Mass Flow Controller
MODEL 3660 Series
■High-grade Mass Flow Controller
MODEL 3200 Series
■Low-cost Metal Sealed Mass Flow Controller/Meter
MODEL 5400 Series
■High-grade Metal Seal Flow Controllers
MODEL 5100 Series
■Low-cost Mass Flow Meter with Display
MODEL 3810DS II Series
■High-grade Mass Flow Meter
MODEL 3100 Series
■Standard Mass Flow Meter
MODEL 3760 Series
■Low-cost Mass Flow Sensor
MODEL 3810S Series
■Low-cost Digital Mass Flow Meter
MODEL D3810 Series
■Small Karman Vortex Flow Meter for Liquids
FM0101/0102/0103/0105 Series
■Small Karman Vortex Flow Meter for Liquids
MODEL 31 (Teflon®/PFA) Series
■Mass Flow Meter Power Unit
MODEL DPM-3
■Flow Setting Device
MODEL CK Series
■Compact Readout Unit
MODEL CR-400
■Mass Flow Controller/Meter Power Units (for Integration into Customer’s Equipment Panel)
MODEL PSK-FB Series
■Table of Compatibility Cables and Accessories for KOFLOC Mass Flow Meters/Controllers
■Compact Handy Mass Flow Control/Measurement Unit
FLOW COMPO®
A
B S
est
election
Mass Flow Meters and Controllers
Mass Flow Controller/Mass Flow Meter with Indicator
MODEL D8500
SERIES
Standard Mass Flow Controller
MODEL 3660
High-grade Mass Flow Controller
MODEL 3200
SERIES
SERIES
Mass Flow Meters and Controllers
Best Selection
Low-cost Metal Sealed
Mass Flow Controller/Meter
MODEL 5400
SERIES
High-grade Metal Seal
Flow Controllers
MODEL 5100
SERIES
Small Karman Vortex Flow Meter for Liquids
FM0101/0102/0103/0105
Small Karman Vortex Flow Meter for Liquids
MODEL 31 (Teflon/PFA)
Low-cost Mass Flow Meter with Display
MODEL 3810DS II
SERIES
Compact Readout Unit
MODEL CR-400
Compact Handy Mass Flow Control/Measurement Unit
FLOW COMPO
®
SERIES
SERIES
What is a Mass Flow Instrument (Mass
Flow Controller/Mass Flow Meter)? (1)
A
KOFLOC is a general manufacturer of precision flow controllers and produces mechanical float
type flow meters and valves, as well as electronic flow meters (mass flow controllers and mass flow
meters). Our mass flow measuring/control technology based on mass flow meters and mass flow
controllers has been used widely for the manufacture of semiconductors, liquid crystals, optical fibers, and other electronic devices; gas supply for fuel cells; combustion gas control for burners and
the like; and for test, production, and inspection equipment in the food industry, biotechnology, and
many other industries. In comparison with conventional mechanical products, mass flow measuring
instruments offer more sophisticated flow measurement because they are not susceptible to temperature and pressure and they can pick up electric signals from the flow.
KOFLOC manufactures a variety of products related to electronic flow meters (mass flow controllers
and mass flow meters), and quickly releases new products. Our products are highly valued by our
customers.
1. Volume flow and mass flow
Gas flow meters can be roughly divided into volume flow meters
and mass flow meters. Volume flow meters include area flow meters,
positive displacement flow meters, and differential pressure flow
meters, while mass flow meters include coriolis flow meters, vortex
flow meters, and thermal flow meters. The float type flow meters produced by KOFLOC are classified as area flow meters in the category
of volume flow meters, while the mass flow instruments produced
by KOFLOC are classified as thermal flow meters in the category of
mass flow meters. In terms of classification, the terms, "thermal mass
flow controllers and thermal mass flow meters," are used according
to the basic principle. In this catalog, however, the commonly used
mass flow instruments mean mass flow controllers and mass flow
meters in general.
The difference between volume flow meters and mass flow meters
is explained below using some simple examples. Most of the volume
flow meters are used when each section of a flow meter is exposed
to the atmosphere as shown in Figure 1, namely, when no pressure is
applied to the inside of the flow meter. When pressure is applied, the
reading of the volume flow meter calibrated in the atmosphere will not
be correct, and a calculation for correcting the reading is necessary.
Soap film flow meters and dry/wet gas meters are especially susceptible to even a small resistance, and they are used in the atmosphere
in principle. The same applies to float type flow meters; their reading
cannot be correct when the gas density changes because of a substantial change in pressure or gas temperature. Therefore, the pressure and temperature conditions must be determined in advance, or
calculation for correcting respective factors is necessary for the reading.
Meanwhile, as the name suggests, mass flow meters detect flow
by means of weight, permitting the flow to be defined in the same
state even if the density changes due to compression of fluid. When
gas is detected by means of mass, the reading of the flow mentioned
above will be the same even in a pressurized state as shown in Figure 2. Therefore, flow meters can be placed at any location on the
flow chart, permitting a system to be configured without significant
flow reading errors.
Fig. 1
Into air
Volume flow meter
Flow control valve
Fig. 2
Pressure gauge
P1
Pressure P1
MF
Mass flow meter
Flow control valve
2. Principle of mass flow instruments
12
Fig. 3 Structure of sensor section
Rus
Rds
Gas 1
Sensor temperature
The flow sensor used in mass flow is called a thermal flow sensor
in general. The principle of detection is as follows.
A resistive element with a large temperature coefficient of resistance is wound on the upstream side (Rus) and the downstream
side (Rds), respectively, around the capillary tube that is a sensor as
shown in Figure 3. When electric current flows through these sections, the two resistive elements generate heat. When no fluid flows in
the capillary tube at that time, the temperature of the upstream side
is the same as that of the downstream side, matching each other.
(The solid line in Figure 3: Zero flow = Position of the zero point used
for mass flow instruments.) When the fluid begins to flow in this state,
the temperature distribution changes as shown by the broken line in
Figure 3. The heat of the upstream side is drawn at that time, and the
heat is transferred by the flow to the downstream side conversely. In
other words, a temperature difference (∆T) arises between the upstream and downstream sides.
Zero point
Temperature distribution
T
A
As the temperature difference (∆T) has a functional relation to the
mass flow of fluid, mass flow instruments pick up electric signals that
represent the change in respective resistance values and amplify and
correct the signal to permit the mass flow to be measured under a
certain condition. This is the function of the mass flow meter shown
in Figure 4.
In the mass flow controller shown in Figure 5, the opening of the
flow control valve is controlled by a high-velocity, high-resolution
piezo or solenoid actuator based on the comparison between the external flow setting signal and the flow signal output from the sensor.
This system permits stable mass flow control, which will hardly be
affected by changes of various conditions such as temperature and
pressure.
Fig. 4 Structural chart of mass flow meter
Fig. 5 Structural chart of mass flow controller
Power supply
Indicator
Setter
Flow signal
0-5V
±15V
Setting signal
0-5V
Comparative
control circuit
Power supply
Amplifier
±15V
Solenoid or
piezo actuator
Bridge circuit
Bridge circuit
Amplifier
Indicator
Sensor
Flow signal
0-5V
Sensor
Gas OUT
Gas IN
Gas OUT
Gas IN
Bypass
Valve
Bypass
3. Unit of flow
A mass flow meter measures the mass flow irrespective of pressure and temperature. When representing mass by the flow, it is
necessary to use units such as g/min and kg/min which are different
from the familiar units used for general fluid measurement. Therefore,
it is common to use volume flow under predetermined standard con3
ditions of pressure and temperature. At present, Pa·m /s is used in
conformance with the SI units, but SCCM and SLM which have long
been used for mass flow instruments are still used as principal units.
With respect to the definition of the standard unit, KOFLOC adopted the definition based on the SEMI standard in October 1998.
SCCM is an abbreviation of Standard Cubic Centimeter per Minute,
indicating cc/min at 0°C at 1 atmospheric pressure, while SLM is an
abbreviation of Standard Liter per Minute, indicating L/min under the
same conditions. Other units of flow, if they are recognized as units
of measurement at present, can be used for calibration and manufacture of our products. In some industries other than the semiconductor industry, SCCM and SLM are defined as the units at 20°C at
1 atmospheric pressure and NCCM and NLM as the units at 0°C at
1 atmospheric pressure. Concerning the flow indication of our mass
flow instruments, the standard temperature and pressure in units of
SCCM (0°C, 1 atm) and NLM (0°C, 1 atm) are shown on our products and in test reports.
4. Calibration with actual gas and conversion factor method
KOFLOC mass flow instruments are calibrated with N 2 gas in
principle before shipment. The accuracy of thermal sensors cannot
be guaranteed unless they are calibrated with actual gas. The actual
gases used for calibration at our company are N2, O2, H2, He, CO2,
and Ar. Concerning other gases, certain conversion factors (CF) are
used for correction after calibration with N2 gas.
For example, when Ar is flowed through a mass flow instrument
that was calibrated with N2 gas, a 1.4 times larger quantity of Ar than
the reading of the mass flow instrument will flow, because the CF of
Ar is 1.4. In other words, the flow of Ar = 1.4 x Reading of N2mass
flow instrument. The CF is calculated for various gases based on
calculation and the accumulation of data obtained through measurement with actual gases. However, the CF of one gas may not
be exactly the same depending on the condition of the actual gas
(temperature and pressure), the type of sensor of the mass flow instrument, and combination of the bypass (laminar flow element). The
public standard CF should be used just as a standard value.
If you desire calibration with actual gas without using a CF, please
provide us with the actual gas, and we will use it for calibration (this
will incur a separate fee for gas calibration). However, we cannot accept some dangerous gases in view of the safety of products and
facilities. Please contact us in advance for details.
13
What is a Mass Flow Instrument (Mass
Flow Controller/Mass Flow Meter)? (2)
A
5. Harness layout - KFC standard
To reduce the wiring length, KOFLOC has been standardizing the
harness layout. The Dsub 9-pin per KFC standard has been adopted
for small capacity mass flow instruments of 20 SLM or less (excluding
special and compact models). (See Figure 6.) This type will likely be
adopted uniformly as the standard electric harness layout for mass
flow instruments in the industry in the near future. To avoid confusion
among users, “KFC standard” is written in the specification column of
the catalog of products conforming to the above standard. Harness
layouts are introduced on the page of each mass flow instrument
with connectors made according to other standards. For details, refer
to the operation manual of each product.
Fig. 6 KFC standard
Body connector ... Dsub 9-pin male connector
Compatible connector ... Dsub 9-pin female connector
Pin No.
1
Signal name
Valve open/close signal
Pin No.
6
Signal name
Flow setting signal: Hi
2
Flow output signal
7
Flow output signal COM
3
Power +15 V
8
Flow setting signal: Lo
4
Power COM
9
Valve voltage monitor
5
Power –15 V
Note: Pin Nos.1, 6, 8, and 9 are NC for mass flow meters.
6. Indication of specifications
The indication of mass flow instrument specifications in this catalog
basically conforms to the SEMI standard. The definitions of representative specifications are explained below.
(1) Accuracy
The accuracy is indicated in the form of “Full scale ±%.”
This is the % value with respect to the full-scale value of the error
when the calibration standard gas (N2, for example) is used for our
standard flow meters. Therefore, when the accuracy is ±1% in the
range of Full-scale 50 SCCM, the flow rate will be guaranteed with
the “uncertainty” of 50 x (1/100) = ±0.5 SCCM with respect to our
standard flow rate.
(2) Repeatability
The form of “Full scale ±%” is the same as the accuracy. This
value indicates the deviation of the value obtained by measuring
the flow, which is set under the same environmental conditions,
with our standard flow meters. This definition is different from the
reproducibility that shows the deviation of the value after the environmental condition is changed.
(3) Response
The response is indicated by the time taken for the output of
mass flow instruments to stabilize at 98% of the full scale after
starting control from zero flow. Such indication is adopted usually
because it is difficult to analyze 100% in the case of an asymptotic
line.
Note: The value used to indicate the flow range is the full-scale
(100%) value only when N2 (or air) is made to flow. Therefore,
when the type of gas and pressure conditions are different,
even if the flow is the same, we may not be able to manufacture products according to the desired specifications; please
contact us in advance.
7. Product grade
(1) High-grade products
Mass flow instruments that are classified as high-grade products
have a structure suitable for high-vacuum applications for semiconductor manufacturing equipment. They are manufactured in a clean
room conforming to the ultra clean specifications required for semiconductor manufacturing. Particle counters and He leak detectors
are used to check all products before shipment.
Depending on the difference in the sealing material, products are
classified into mass flow controllers 5100 and 5400, as well as mass
flow meters 5410, equipped with a metal seal and mass flow controllers 3200, as well as mass flow meters 3100, equipped with a rubber
seal. Models that permit installation of an SR option for measurement
and control of very small flow at full-scale 1 SCCM, as well as models
that permit multi-point quick response defined finely throughout the
entire flow range at the rate of not only 0–98% but also 0–50% and 0
–10%, are high-function products.
(2) Standard low-cost products
Mass flow instruments classified as standard and low-cost products have a structure suitable for exposure to the atmosphere or
medium pressure (high pressure partly). Equipped with a rubber seal,
products are classified into mass flow controllers 3660 SERIES, mass
flow meters 3760 SERIES, and low-cost mass flow meters 3810 SERIES. The HFC/HFM series is used for large flows exceeding the fullscale 100 SLM.
(3) Special usage
Mass flow instruments need to be made specially according to the
usage when the temperature exceeds 100°C, the pressure exceeds
1 MPa, or liquid is to be measured and controlled. In order to meet
diverse needs of customers, KOFLOC offers originally developed
products, as well as products supplied from cooperative companies,
for use in various fields. Do not hesitate to contact us for special
products not covered by this catalog and products that include other
piping or piping equipment.
8. Installation and piping
Refer to the dimensional drawing for installation on a panel or the
like. Contact our factory if you are unsure about any aspect of installation.
9. Repair
In the event that our product you are using fails due to aging or
some other trouble, we will receive it for repair, because mass flow instruments are precision equipment composed of very delicate parts.
To assist quick repairs, our products are packed with an operation
14
manual and check sheet. When a trouble or failure occurs, check the
operation manual first, and then send the check sheet by fax to your
nearest KOFLOC or phone us.
Guide to selection of
mass flow instruments
Mass flow controller
A
Table of grades
5100
High-grade
(Metal seal)
5400
High-grade
(Elastomer seal)
3200
Standard
(Elastomer seal)
3660
Standard with
setting indicator
(Elastomer seal)
Full-scale flow
3665
D8500
1
10
(Unit: SCCM)
Mass flow meter
50
1
5
20
50
100
(Unit: SLM)
500
1000
5000
Table of grades
High-grade
(Metal seal)
5410
High-grade
(Elastomer seal)
3100
3760
Standard
(Elastomer seal)
3765
HFM301
15000
HFM200W
Standard with
setting indicator
(Elastomer seal)
D8500
83810DS II
Low-cost
(Elastomer seal)
Full-scale flow
3810S, D3810 (50SLM)
1
10
50
1
5
20
50
100
(Unit: SCCM)
Liquid flow sensor
500
1000
5000
500
1000
5000
(Unit: SLM)
Table of grades
FM0101
Karman’s vortex
(CE, CSA compatible)
(PPS)
FM0102
FM0103
FM0105
FM3101
Karman’s vortex
(CE, CSA compatible)
(Teflon)
FM3102
FM3103
FM3104
Full-scale flow
1
10
(Unit: cc/min)
50
1
5
20
50
100
(Unit: L/min)
15
Mass Flow Controller/Mass Flow Meter with Indicator
A
MODEL D8500
SERIES
This mass flow controller/meter driven by a 24 VDC power
supply has been developed as a successor to the MODEL
8300.
The view point change function of the display unit and
the pattern setting function are unique to this model, and
noise resistance has been improved dramatically. A sister
model with a detachable display and setting unit is also
available.
Features
MODEL D8500 SERIES
•The high-lift actuator allows this compact model to control a
large flow rate.
•Equipped with a display and setting unit, this model can be operated by a 24 VDC power supply.
•The RS232C/RS485 communication function and integration
function are provided as standard equipment.
•The 14-bit converter permits display and operation in 4-1/2 digits.
•Control of the flow rate of inflammable gas is possible, because
the heat generating part of the sensor is not exposed to gas.
•There are no limitations on the mounting position that may be
employed.
•In addition to SV setting, five other patterns can be set.
•Auto zero and auto close functions are also standard.
Standard Specifications
Flow range (F.S.) (at N2 calibration conditions)
50 SCCM–5 SLM
Display format
7-segment 4-digit LED
Applicable gases (dry gas)
N2, air, O2, CO2, Ar, H2, He, etc.
Total flow
12 digits *
Sensor
Thermal mass flow sensor
Mounting direction
Changeable
Valve actuator
Normally-closed solenoid valve actuator *
Built-in/Separate
Built-in, separate 1 m, separate 3 m, separate 5 m
Status display LED
OK (within allowable range), ALM (alarm output interlock)
OUT1 (event output 1 interlock), OUT2 (event output 2 interlock)
SV (set flow), PV (instantaneous flow), TF (total flow)
IF (mode setting)
Event input
3 × contact input
Alarm output
1 × open collector output, Max. 35 V, 50 mA
7
Accuracy
Pressure
Display
7
Valve type
Control
system
Over 5 SLM–20 SLM
4
Poppet valve *
Control/measurement range
2–100% F.S.
Response
0–100% F.S. or more within 2 sec. *
1
0–below 10% F.S. within 4 sec. *
Flow accuracy
±1.0%F.S. *
Repeatability
±0.75%F.S.
Proof pressure
1000 kPa (G)
Allowable operating pressure
500 kPa (G) or less
1
2
Operating differential pressure *
7
2
±1.5%F.S. *
Other I/O
functions
50–300 kPa (G)
100–300 kPa (G)
Event output
2 × open collector output Max. 35 V, 50 mA
Communications
RS-485, half-duplex, 9600 bps
Temperature
Allowable operating temperature 5–45°C
24 VDC, current consumption: 300 mA max.
Power sup- Rating
ply
Allowable supply voltage range 21.6–26.4 VDC (Ripple: 5% or less)
Temperature characteristics
0.2% F.S./°C
Mounting position
Not specified
Humidity
Allowable operating humidity
10–90% (No condensation allowed)
Applicable standards
RoHS and EN62326-1: 2006
Leak
He leak rate
1 × 10 Pa·m /sec. or less *
Materials of parts in contact with
gases
SUS316, SUS316L, SUS430, FKM, PTFE, chloroprene
rubber (option)
-8
3
3
(1) Setting & display unit
(2) Communications
(3) Event input selection
Flow setting Digital
method
7
Analog *
(1) 0–5 V (2) 4–20 mA (freely selectable)
Flow rate output Analog
(1) 0–5 V (2) 4–20 mA (interlocked with the above)
Joint
1/4 SWL, RC1/4, 1/4 VCR
Weight
Built-in: Approx. 1000 g
Separate (excluding the cable): Approx. 1200 g (*6)
(*1) Time required to reach the control flow ±2% F.S. from the fully closed state
(*2) With the standard pressure of 200 kPa (G) and the standard temperature of 20°C
-6
3
(*3) Permeation is not included. The leakage by prolonged permeation shall not exceed 1 × 10 Pa·m /sec.
(*4) The units of measurement vary with the full scale flow. E.g.: With 1 SLM, the flows can be added up to 9999 9999 9.999 L.
(*5) For other joints, please contact us. (*6) The weight may slightly vary depending on the joint. (*7) These apply to the D8500MC mass flow controller.
Ordering
0: Built-in
MM: Meter
1: Separate 1 m
3: Separate 3 m
5: Separate 5 m
Illustrative
example
❶
MODEL D8500MC
16
V: Voltage
input/output
(0–5 V)
I: Current
input/output
(4–20 mA)
Joint
❻
❼
❽
❾
Option
MC: Controller
V
Ⅰ
❺
Calibration temperature
0
❹
Pressure
D8500MM
❸
Flow rate
MODEL D8500MC
❷
Fluid
❶
RC1/4
1/4SWL
Normal
operating
pressure
1/4VCR
❷
❸
❹
❺
❻
❼
0
V
Rc1/4
N2
5SLM
0.1MPA
Omitted: No
option
❽
❾
20℃
CR
* Refer to “Ordering” and “Illustrative
example” when placing an order or requesting a quotation. Fill in the blanks
in the “Order/Quotation Request Card”
at the end of the catalog, and send the
card by fax.
* Various joints other than our standard
joints are also available (option).
A
MODEL D8500
Built-in type
MODEL D8500
Separate type - Display -
MODEL D8500
Separate type - Main unit -
Panel cut dimensions
2-M4 or 2-04
Max. 100 m
Communications controller
2-M4, 4 mm deep
Joint
2-M4, 4 mm deep
L-length [mm]
Example of RS-485 Communications line configuration
Example of communications system configuration with Model D8500
On a single logging PC, logging and operation of up to 31 units are possible.
(A communications terminal resistor is provided, which can be turned on and off.)
MODELD8500
I D=1
MODELD8500
I D=2
Max. 100 m
Max. 31 units
Communications controller
TRx19P IN
MODELD8500
I D=1
MODELD8500
I D=2
MODELD8500
I D=n
TRx+
18P IN
TRx_COM
20PIN
Detail view
of portion A
Max. 31 units
MODELD8500
I D=n
PSK-85/CP-D85CF SERIES
A
/
MODEL D8500 SERIES
A
Model D8500 Series Power Cable
PSK-85/CP-D85CF
TRx19P IN
Detail view
of portion A
TRx+
18P IN
TRx_COM
20PIN
The PSK-85 is an AC adapter type power supply
that can operate the Model D8500 Series system.
The CP-D85CF cable is used to drive the Model
D8500 Series, acting as an interface for various
event out puts for power flow signal (analog), digital
communications (RS-485). (The cable end is loose).
SERIES
Ordering
●Power supply adapter: PSK-85 (cable length: 1.5 m only)
●Cable: CP-D85CF
1M
1m
3M
3m
5M
5m
XM
Specified length (custom)
Loose end (* For details of the signal interface, refer to the instruction manual.)
D8500 main unit connector (DS20P half pitch connector)
17
Standard Mass Flow Controller
A
MODEL 3660
Series
Model 3660 Series Mass Flow Controller has been developed centering the focus on compactness and low cost
and is being acclaimed by a wide range of users for diverse applications, including from laboratory research and
development activities to the use as a standard mass flow
control model for various types of analyzers and vacuum
devices in the production line. Varieties of derived models
and options are available.
Features
•Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response
•Use of a normally closed valve to ensure safety
•High reliability ensured using a solenoid actuator
•Low differential pressure type control available for combustible
gases (LP option)
Standard Specifications
Model
3660
3665
Flow range (N2 equiva- 10 SCCM–20 SLM (freely
lent, 20°C/1 atm)
selectable)
Sensor
30 SLM–100 SLM (freely
selectable)
Thermal mass flow sensor
Valve type
Proportional solenoid valve (closed when not energized)
Control range
2–100% (F.S.)
Response
2 sec. or less (0–100% within 3 sec. or less (0–100% within
±2% typical)
±2% typical)
Accuracy
±1.0% F.S. (25°C)
5–100% (F.S.)
Dimensions
±1.5% F.S. (25°C)
Temperature coefficient ±0.1 F.S./°C (15–35°C)
±0.2 F.S./°C (15–35°C)
Repeatability
±0.5%F.S.
Operating differential
pressure
F.S. > 100 SLM: 50–300 kPa (G) F.S. > 50 SLM: 200–300 kPa (G)
F.S. ≤ 5 SLM: 50–300 kPa (G)
F.S. ≤ 50 SLM: 150–300 kPa (G)
Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available.
Proof pressure
980 kPa (G)
Leak rate
1 × 10 Pa·m /s or less (excluding permeation of He)
3660
3
MASS FLOW CONTROLLER
FLOW
12.
7
(15)
Allowable ambient tempera5–45°C
ture
Allowable ambient humidity 10–90% (No condensation allowed)
Body: SUS316
Sealing: FKM (option: CR or NBR)
0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals 0–5 VDC (External load resistance: 250 kΩ or more)
1
9
38
(20) (68)
Required power supply +15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA
Standard: 1/4SWL
Standard: 3/8SWL
Option: 1/8SWL 1/4VCR RC1/4, etc. Option: 1/2SWL 3/8VCR RC3/8, etc.
Weight
Approx. 1000 g
Approx. 1500 g
Note
Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us.
Model
Standard
{ 3660:
3665: Large flow type
Joint
Signal
Pin No.
6
Flow output 0-5 V
7
Flow output COM
+15 VDC Power source
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
-15 VDC Power source
* Because a differential input system is used for the product, pin 4 (Power source COM)
and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8
(Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.
18
102
(134)
130.4
(162.4)
Illustrative
example
MODEL
{
Option
No option
{ 0:Option
name NR–Neoprene seal
MP–294kPa-784kPa
LP–Low differential
pressure
specification
1/4SWL:1/4Swagelok®
1/8SWL:1/8Swagelok®
1/4VCR:1/4VCR®
1/4:1/4RC
Optional
e
r
t
y
w
1/4SWL
1/8SWL
1/4VCR
1/4
3/8SWL
Optional
q
w
e
r
t
y
3660
1/4SWL
N2
100SCCM
20℃
0
Signal
2
3/8 Swagelok®
q
Flow input Hi
3
123.
8
(155.8)
Rc 1/4
3660
3665
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Input valve open/close operation
VCR®
1/4 2-M4, Depth: 4(5)
Ordering
Harness Layout
1
127.
4
(159.4)
* Values indicated in ( ) denote the dimensions for Model 3665.
MODEL
Pin No.
122.
8
(−)
1/4 Swagelok®
Calibration
temperature
Joint (Main unit bore)
Dimension L (mm)
1/8 Swagelok®
Flow rate
Flow rate input signals
Joint
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
18.
5
Electric connection
76
(108)
L
32
(34)
Valve seat: FKM (option: CR or NBR)
(24.5)
Materials of parts in
contact with gases
Fluid
-8
95
(120)
100
(125)
Allowable operating pressure 500 kPa (G) or less
0
Option name
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
High-grade Mass Flow Controller
MODEL 3200
A
Series
Model 3200 Series Mass Flow Controller is an advanced
model designed as a successor of the 3910 Series that
enjoys a wide use for diverse applications such as manufacture of semiconductors, LCDs, combustion equipment,
analytical devices, and biotechnology fields. Its high performance is equal to a new standard of KOFLOC.
Features
•Equipped with a temperature follow-up type current difference
detection flow sensor (patent applied for) to ensure high accuracy and high-speed response
•Use of a normally closed valve to ensure safety
•Reduced dead volume thanks to the diaphragm seat valve
•Control of small quantities of flows available up to 1 sccm full
scale (SR option)
•Low differential pressure type control available for combustible
gases (LP option)
Standard Specifications
Flow range (N2 equivalent, 20°C/1 atm)
1 SCCM–20 SLM (The conditions are freely selectable)
Sensor
Thermal mass flow sensor
Valve type
Proportional solenoid valve (closed when not energized)
Control range
2–100% (F.S.)
Response
1 sec. or less (0–100% within ±2% typical)
Accuracy
±1% F.S. (Accuracy guaranteed at 15–35°C)
Repeatability
±0.2%F.S.
Dimensions
F.S. ≤ 5 SLM: 50–300 kPa (G)
Operating differential
pressure
F.S.> 5 SLM: 100–300 kPa (G)
300 kPa (G) or less
Proof pressure
980 kPa (G)
Leak rate
1 × 10 Pa·m /s or less (excluding permeation of He)
Allowable ambient
temperature
0–50°C
Allowable ambient humidity
10–90% (No condensation allowed)
3
3200
MASS FLOW CONTROLLER
FLOW
1
3
-8
1
2
6
1
3
0.
5
Option: Low differential pressure (LP) specification is available depending on conditions.
Allowable operating pressure
Body: SUS316L
1
6
Diaphragm: SUS316
Valve seat: FKM (option: CR, NBR or perfluor)
Electric connection
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals
0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals
0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore)
Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.
Weight
1000 g
Joint
Dimension L (mm)
1/4 Swagelok®
127.
4
1/8 Swagelok®
122.
8
1/4 VCR®
123.
8
Option
Joint
MODEL
{
1
Input valve open/close operation
6
Flow input Hi
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power source
8
Flow input Lo
4
Power source COM
9
NC
5
-15 VDC Power source
* Because a differential input system is used for the product, pin 4 (Power source COM)
and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8
(Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.
Illustrative
example
MODEL
SR–1SCCM/5SCCM
LP–Low differential
pressure
specification
1/4SWL:1/4Swagelok®
1/8SWL:1/8Swagelok®
1/4VCR:1/4VCR®
1/4:1/4RC
y
q
w
e
r
t
3200
1/4SWL
1/8SWL
1/4VCR
1/4
q
w
e
r
t
y
3200
1/4SWL
N2
1SLM
20℃
0
Signal
2
No option
{ 0:Option
name NR–Neoprene seal
Calibration
temperature
Pin No.
2-M4, Depth: 5
3
8
Flow rate
Pin Assignment of Dsub 9-pin Connector per KFC Standard
19
Ordering
Harness Layout
Signal
102
Rc 1/4
Note
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to
the atmosphere. For details on the pressure requirements, please contact
us.
1
8.
5
Sealing: FKM (option: CR, NBR or perfluor)
Pin No.
7
6
L
3
8
Fluid
Materials of parts in
contact with gases
0
Option name
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
19
Low-cost Metal Sealed Mass Flow Controller/Meter
A
MODEL 5400
Series
The Model 5400 Series is a successor to the Model 3440,
with enhanced basic capabilities. The appearance is
similar to the conventional MFC. The sensor drive system
is improved: the zero-drift is further reduced and the response in the lower range is improved. The Model 5410
Series is a mass flow meter with the same body design as
that of the 5400 Series.
Features
•Control and response in each setting range are improved.
•The following capability to the set voltage is improved (supporting ramping specifications).
•As the valve is improved, the control resolution in each range is
improved.
Standard Specifications
Model
5400
Flow range (N2 equiva-
10 SCCM–20 SLM (freely 10 SCCM–20 SLM (freely se-
5410
lent, 20°C/1 atm)
selectable)
Sensor
Thermal mass flow sensor
Valve type
Proportional solenoid valve (closed when not energized)
−
Control range
2–100% (F.S.)
−
Response
1 sec. or less (0–100% within ±2% typical) −
Accuracy
±1% F.S. (20°C)
Repeatability
Within ±0.2% F.S. (20°C)
Operating differential
F.S. ≤ 5 SLM: 50–300 kPa
−
pressure
F.S.> 5 SLM: 100–300 kPa
−
Allowable operating pressure
300 kPa (G) or less
-11
3
Pa·m /s or less
Allowable ambient temperature 0–50°C (Accuracy guaranteed at 15–35°C, ±0.1% F.S./°C)
FLOW
12.
7
Allowable ambient humidity
10–90% (No condensation allowed)
Body: SUS316L
Diaphragm: Ni-Co
contact with gases
Valve seat: PTFE
76
124
36
18.
5
Materials of parts in
112
(5SLM(N ),
131
(1020
. SLM(N ) (4)
2)
2)
1 × 10
5400
980 kPa (G)
Leak rate
MASS FLOW CONTROLLER
Proof pressure
Dimensions
lectable)
Sealing: SUS316L, Ni
Electric connection
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals
0–5 VDC (Input impedance: 1 MΩ or more) −
Flow rate output signals
0–5 VDC (Minimum load resistance: 250 kΩ or more)
−15VDC (±5%) 100mA
Joint (Main unit bore)
Standard: 1/4 VCR equivalent Option: 1/4 SWL
Weight
Approx. 1000 g
Ordering
Option
Approx. 800 g
Note
Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us.
Model
SL–Slow start
LP–Low differential
pressure
specification
Mass Flow Controller
{ 5400:
5410: Mass Flow Meter
Joint 1/4VCR:1/4VCR ®
MODEL
q
w
5400
1/4VCR
Harness Layout
e
r
t
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No.
Signal
Pin No.
1
Input valve open/close operation
6
Flow input Hi
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power sourc
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
-15 VDC Power source
y
0
Option name
Signal
* Because a differential input system is used for the product, pin 4 (Power source COM)
and pin 7 (Flow output COM) are connected inside the mass flow controller while pin 8
(Flow input Lo) is isolated. In case of a single-ended connection, connect pin 8 to pin 4.
* Pins 2, 3, 4, 5, 7 only for Mass Flow Meter
20
No option
{ 0:Option
name QS–Quick start
Calibration
temperature
+15 VDC (±5%) 100 mA,
−15VDC (±5%) 200mA
Flow rate
+15 VDC (±5%) 100 mA,
Fluid
Required power supply
2-M4, Depth: 5
38.
1
Illustrative
example
MODEL
q
w
e
r
t
y
5400
1/4VCR
N2
100SCCM
20℃
0
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
High Grade Metal Seal Flow Controllers
MODEL 5100
A
Series
Model 5100 Series Mass Flow Controller/Meter features
weldless structure, metal seals, accurac y of ≤±1%, response of ≤±1 second and other basic performance conditions required for semiconductor process control, and
additionally, has achieved a significant price reduction.
Features
•High accuracy and high response are achieved by the flow sensor with temperature-following current difference detection.
•A normally-closed solenoid valve is employed.
•A low leak rate is achieved by the weldless structure and metal
seal.
•The dead volume is reduced thanks to the diaphragm seat valve.
•The face-to-face and body dimensions and the wiring tie-in
points are designed to facilitate replacement of devices made
by other companies.
Standard Specifications
Flow range (N2 equivalent, 20°C/1 atm)
1 SCCM–20 SLM (The conditions are freely selectable)
Sensor
Thermal mass flow sensor
Valve type
Proportional solenoid valve (closed when not energized)
Control range
2–100% (F.S.)
Response
1 sec. or less (0–100% within ±2% typical)
Accuracy
±1% F.S. (Accuracy guaranteed at 15–35°C)
Repeatability
±0.2%F.S.
Operating differential
pressure
Dimensions
Mode setting SW
Conversion factor
setting SW
F.S. ≤ 5 SLM: 50–300 kPa
F.S. > 5 SLM: 100–300 kPa
Option: Low differential pressure (LP) specification is available depending on conditions.
300 kPa (G) or less
Proof pressure
980 kPa (G)
Leak rate
1 × 10
Allowable ambient temperature
0–50°C
Allowable ambient humidity
10–90% (No condensation allowed)
3
Pa·m /s or less
126
130.5
5100
Body: SUS316L
MASS FLOW CONTROLLER
Diaphragm:
FLOW
Valve seat: PTFE
Sealing: SUS316L, Ni, Au
76
Option: SUS seal (SU), inner surface polish (KP)
124
Electric connection
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate input signals
0–5 VDC (Input impedance: 1 MΩ or more)
Flow rate output signals
0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA
Joint (Main unit bore)
Standard: 1/4 VCR equivalent Option: 1/4 SWL
Weight
Approx. 1000 g
16
38
Ordering
Harness Layout
SU-SVS Seal(for Cogas)
QS-Quick start , SL-Slow start
Joint
MODEL
Signal
Pin No.
1
Input valve open/close operation
6
Flow input Hi
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power sourc
8
Flow input Lo
4
Power source COM
9
Output valve voltage
5
-15 VDC Power source
No option
{ 0:Option
name
{ 1/4VCR
Optional
q
w
5100
1/4VCR
Optional
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Pin No.
Option
e
r
t
Calibration
temperature
Note
Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us.
Fluid
Materials of parts in
contact with gases
13
-11
Fluid
Allowable operating pressure
Signal
** Because a differential input system is used for the product, pin 4 (Power source COM)
is connected inside the mass flow controller while pin 8 (Flow input Lo) is isolated. In
case of a single-ended connection, connect pin 8 to pin 4.
* For baking applications on Model 5100B, working temperature is specified up to 80°C.
Illustrative
example
MODEL
KP–Internal Polishing
SR–1SCzCM, 5SCCM
LP–Low differential
pressure
specification
MP–294kPa-784kPa
y
0
Option name
q
w
e
r
t
y
5100
1/4VCR
N2
100SCCM
20℃
0
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
21
Low-cost Mass Flow Meter with Display
A
MODEL 3810DS II
Series
The Model 3810DS II is a mass flow meter with a builtin display using a time-tested flow sensor. The 3810DS II
displays total flow in addition to instantaneous flow, which
is an improvement on the previous model 3810DS. Just
like the 3810DS, the 3810DS II is also available with flow
sensor and precision needle valve built into one piece.
Features
•Precision needle valve for controlling and monitoring very low
flow rates
• Two alarm outputs for flow monitoring
• Analog output for instantaneous flow and pulse output for total
flow
• Compact and lightweight
• The display is built in and the meter only requires connection to
a 24-VDC power supply.
• The meter measures mass flow and directly reads the flow.
There is no need for flow correction calculations based on temperature and pressure.
Standard Specifications
Dimensions
3810
MASS FLOW SENSOR
10 SCCM–20 SLM
21–100 SLM
Accuracy
Within ±2% F.S. at 25°C
Within ±3% F.S. at 25°C
MASS FLOW SENSOR
M
FLOW
0.0–0.5 MPa (G)
DSⅡ
IF
AL1 AL2
TF
M
Thermal sensor
Flow range (N2 equivalent)
Operating pressure
3810
DSⅡ
IF
AL1 AL2
Sensor
TF
Proof pressure
OPEN
1.0 MPa (G)
FLOW
Allowable ambient temperature
70
70
Temperature coefficient
0–50°C
±0.2% F.S./°C (15–35°C)
Rc 1/4
27
27
70
7
10
56
10
7
2 - M3,深サ3
MASS FLOW SENSOR
3810
DSⅡ
MASS FLOW SENSOR
IF
AL1 AL2
3810
IF
AL1 AL2
TF
M
FLOW
70
70
1–5 V, 4–20 mA (Select when ordering.)
Event 56
output
2 × NPN open collector output Maximum rating: 30
VDC, 50 mA
* Cable connection
Connector: 3810DS II end: HR10A-7R-6P (Hirose Electric)
Cable end: HR10A-7P-6S (Hirose Electric)
M3,深サ3
* A2 -conversion
cable for the previous model 3810DS is available.
DSⅡ
OPEN
Ordering
56.5
35
12.5
70
56
7
56
2 - M3,深サ3
7
8
9
V: Voltage output: 1–5 V
I : Current output: 4–20 mA
108
Illustrative
example
MODEL 3810DSⅡ
10
7
27
Calibration
temperature
Rc1/4
1/4F9
※
Outlet
pressure
V: With needle valve
O: Without needle valve
※
Inlet
pressure
Joint
Flow
V
O
Fluid
V
I
MODEL 3810DSⅡ
Rc 1/4
35
24 VDC ±5%, 100 mA (option: AC adapter)
Flow output108
signal
( 40)
FLOW
Standard: Rc 1/4 (Ask us for other sizes.)
Power supply
Note
Specifications relating to the flow range (e.g., flow range, accuracy and repeatability) are expressed in N2 or air equivalent. The product will be built with the
primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, ask us.
TF
M
Sealing: FKM
Option: Neoprene
Connection end
12.5
12.5
Rc 1/4
56.5
56.5
Materials of parts in
contact with gases
( 40)
Body: SUS303, PTFE
V
V
RC1/4
O2
5SLM 30kPa 0kPa 20℃
2 - M3,深サ3
* Various joints other than our standard joints are also available (option).
* (7) and (8) are needed only when a model with needle valve is selected.
Power adapter: PSK-38DS II
External cable: CP-38DS II CF
XM (Lengths: 1 m, 3 m and 5 m)
* The power adapter and the external cable cannot be used together.
22
High-grade Mass Flow Meter
MODEL 3100
A
Series
The Model 3100 Series Mass Flow Meter is a new, advanced high-precision flowmeter developed based on the
Model 3200 Series. The incorporated innovative capillary
type flow sensor reduces pressure loss and ensures high
response as well as ensuring stability.
Features
•Equipped with a temperature follow-up type current difference
detection flow sensor to ensure high accuracy and quick response
•Measurements of minute flows available up to 1 sccm full
scale (SR option)
Dimensions
(4.5)
Standard Specifications
1 sec. or less to within ±2% of full scale of
final value typical for 0-100% response
Accuracy
Within ±1.0% F.S./3100
Linearity
Within ±0.5% F.S.
Repeatability
Within ±0.2% F.S.
Proof pressure
980kPa
Leak rate
1x10 Pa·m /s or less (excluding transmission of He)
Working temperature range
0-50°C (Accuracy guarantee: 15-35°)
Materials of parts exposed to gases
Body: SUS 316L, SUS 316, PTFE
®
®
Seals: Viton (Optional: Neoprene )
3100
3
MASS FLOW METER
16(18)
®
®
®
Optional: 1/8SWL 1/4VCR RC1/4 , etc.
Electrical connections
Dsub 9-pin male connector per KFC standard
(SEMI standard)
Flow rate output signals
0-5VDC
Required power supply*
76(108)
38(36)
®
Standard: 1/4SWL
Joint
FLOW
13(17)
-8
L
Dimension L (mm)
Joint
MODEL 3100 3105
1/4Swagelok® 127.4 159.4
1/8Swagelok® 122.8 154.8
1/4VCRTM
+15VDC (±5%) 100mA, –15VDC (±5%) 100mA
RC1/4
102
2-4M,Depth:5
38(68)
123.8 155.8
134
Ordering
{
0: No option
Option name: NR–Neoprene
SR–1SCCM, 5SCCM
1/4SWL:1/4Swagelok®
1/8SWL:1/8Swagelok®
Joint
1/4VCR:1/4VCR®
1/4:1/4RC
Select option
{
{
Model 3100: Standard
Harness Layout
18.5(25.4)
Response
126(140)
Flow range (at N2 calibration conditions) 10SCCM-20SLM
Pin Assignment of Dsub 9-pin Connector per KFC Standard
Signal
1
NC
6
NC
2
Flow output 0-5 V
7
Flow output COM
3
+15 VDC Power source
8
NC
4
Power source COM
9
NC
5
-15 VDC Power source
MODEL
Illustrative
example
MODEL
y
q
w
e
r
t
3100
1/8SWL
1/4SWL
1/4VCR
1/4
Calibration
temperature
Pin No.
Flow rate
Signal
Fluid
Pin No.
q
w
e
r
t
y
3100
1/4SWL
N2
100SCCM
20℃
0
0
Option name
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
23
Standard Mass Flow Meter
A
MODEL 3760
Series
The Model 3760 Series is a compact, low-cost mass flow
meter developed based on the Model 3660 Series. It has
been developed as a standard model of various analyzers
and vacuum equipment for research and development at
universities and research institutes.
Features
•Improved constant-current temperature difference detection
type flow sensor for quick response
•The compact body permits installation at any location.
Standard Specifications
Model
3760
3765
Flow range (N2
equivalent, 20°C/1
atm)
10 SCCM–20 SLM (freely
selectable)
30 SLM–100 SLM (freely
selectable)
Sensor
Thermal mass flow sensor
Response
2 sec. or less
Accuracy
±1.0%F.S. (25℃)
3 sec. or less
±1.5%F.S. (25℃)
Temperature coefficient ±0.1 F.S./°C (15–35°C)
±0.2 F.S./°C (15–35°C)
Repeatability
±0.5%F.S. (20℃)
Proof pressure
980kPa (G)
Leak rate
1 × 10 Pa·m /s or less (excluding permeation of He)
-8
3
Dimensions
Allowable ambient temperature 5–45°C
Allowable ambient humidity
10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS316
Electric connection
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
Flow rate output signals
0–5 VDC (External load resistance: 250 kΩ or more)
Required power supply
+15VDC (±5%) 100mA, −15VDC (±5%)100mA
Joint (Main unit bore)
Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc.
Standard: 3/8SWL
Option: 1/2SWL 3/8VCR RC3/8, etc.
95(120)
100(125)
Sealing: FKM (option: CR or NBR)
3760
MASS FLOW METER
FLOW
Approx. 1000 g
7
6(10
8)
L
32
(3
4)
18.
5
Joint
Harness Layout
Pin Assignment of Dsub 9-pin Connector per KFC standard
Pin No.
Signal
Pin No.
Signal
1
NC
6
NC
2
Flow output 0–5 V
7
Flow output COM
3
+15 VDC Power source
8
NC
4
Power source COM
9
NC
5
–15 VDC Power source
38
− depth 5
19
2-M4
(2
0)
(6
8)
Dimensions indicated in ( ) are for the 3765.
Dimension L (mm)
1/8 Swagelok®
122.
8(̶)
1/4 Swagelok®
127.
4(159.4)
1/4 VCR®
1
23.
8(155.8)
Rc 1/4
3/8 Swagelok®
102(134)
130.
4(162.4)
Ordering
Option
Model
MODEL
0: No option
Option name: NR-Neoprene seal
1/4SWL :1/4Swagelok®
1/8SWL :1/8Swagelok®
3760: Standard
Joint 1/4VCR :1/4VCR®
3765: Large capacity
1/4 :1/4RC
3/8SWL :3/8Swagelok®
Others: Option
3760
1/4SWL
1/8SWL
1/4VCR
1/4
3/8SWL
Optional
Fluid
1/4SWL
N2
Flow rate
Calibration
temperature
Approx. 800 g
Note Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us.
12.
7
(15)
Weight
0
Option name
Illustrative
example
MODEL
3760
100SCCM
20℃
0
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
24
Low-cost Mass Flow Sensor
MODEL 3810S
A
Series
Designed on the heritage base construction of the superior
class bypass capillary type mass flow sensor, the Model 3810S
Mass Flow Sensor centers the focus on economy through a
thorough effort towards streamlining with the view to built-in
applications. The series is one of the KOFLOC best sellers and
is used by many assembly manufacturers as a substitute for
the existing float type (tapered pipe type) flow meter.
Features
•A low-cost, still, full-fledged sensor based on a combination of
the constant-current temperature difference detection type with
the bypass capillary type
•A large cost reduction makes Model 3810S almost rival any existing float type flow meter in price.
•0 to 5VDC analog flow outputs provide various applications
such as measurements recording, control and alarm issuance.
•The sensor is mass flow type. The user needs no troublesome
calculations for flow correction due to the effects of temperature and pressure.
Standard Specifications
Flow range (N2
equivalent, 20°C/1 atm)
10 SCCM–2 SLM (freely
selectable)
3 SLM–50 SLM (freely
selectable)
Sensor
Thermal mass flow sensor
Accuracy
±2%F.S. (25℃)
±5%F.S. (25℃)
Temperature coefficient
±0.15 F.S./°C (15–35°C)
±0.2 F.S./°C (15–35°C)
Repeatability
±0.5%F.S.
Proof pressure
980 kPa (G)
Allowable ambient
temperature
5–45°C
Allowable ambient
humidity
10–90% (No condensation allowed)
Materials of parts in
contact with gases
Body: SUS303, PTFE
Electric connection
171826-5 (made by AMP)
Cable Connections
Power source +15VDC
No.1
No.2
Power source COM
No.3
Power source –15VDC
No.4
Flow output 0-5VDC
No.5
Flow output COM
Note: The Series 3810 pin assignment has been modified from March 2000, and is not
compatible with the old model. Please check the following:
Sealing: FKM (option: CR or NBR)
Flow output signal
0–5 VDC (External load resistance: 250 kΩ or more)
Power supply
±15 VDC ±5%, 60 mA
Joint (Main unit bore)
Rc1/4
Weight
Approx. 250 g
AMP171826-5 on the Connector 3810 side
AMP171822-5 on the cable side
Approx. 350 g
Dimensions
(27)
22
Approx. 5.4
Ordering
Model
86
q
(48)
45
w
e
r
1/4
Fluid
Flow rate
q
w
e
r
t
3810S
1/4
N2
100SCCM
20℃
MODEL 3810S
3810
t
Joint
Calibration
temperature
Note
Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us.
MASS FLOW CONTROLLER
FLOW
Illustrative
example
56
MODEL
10
15
(15)
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Clamping machine screw
2-M3, Depth: 4
Example of Wiring
DPM-3
PSK-2TFX
MODEL DPM-3
CH1(5P) CH1(6P) CH2(5P) CH2(6P)
POWER SUPPLY
MODEL PSK-2TFX-15
CC-TFX-xxM
SLM
KOFLOC
MASS FLOW SENSOR
MODEL
3810
CP-TFX-xxM
FLOW
MFM
3810S
25
Low-cost Digital Mass Flow Meter
A
MODEL D3810
Series
The Model D3810 is a completely renovated digital mass
flow meter designed on the basic structure of existing
KOFLOC Model 3810. Incorporating a CPU inside and is
equipped with an innovative sensor, a single unit of this
new model covers a broad range of flows from very small
to large.
Features
•An economical but high-precision sensor that uses the bypass
capillary method
•Digital control allows the user to handle a broad range of flows
(100 cc to 50 L).
•Compact design (overall size is one size smaller than the Model
3810)
Standard Specifications
Flow range (N2 equivalent, 20°C/1 atm)
50 SLM
Sensor
Thermal mass flow sensor
Response
7 sec. or less
Accuracy
≥25 SLM ±2% RD < 25 SLM ±3% F.S. (20°C)
Repeatability
±0.5% F.S.
Proof pressure
980 kPa (G)
Allowable ambient temperature
5–45°C
Allowable ambient humidity
10–90% (No condensation allowed)
Materials of parts in contact with gases
Body: SUS303, PTFE
Sealing: FKM (option: CR or NBR)
Electric connection
171826-5 (made by AMP)
Flow rate output signals
0–5 VDC (Allowable external load resistance:
250 kΩ or more)
Required power supply
±15 VDC ±5%, 60 mA
Joint (Main unit bore)
Rc 1/4
Weight
Approx. 500 g
Dimensions
Approx. 5.4
5
48
1
D3810
MASS FLOW SENSOR
25
FLOW
70
Ordering
Model
Cable Connections
q
Power source +15VDC
No.1
No.2
Power source COM
No.3
Power source –15VDC
No.4
Flow output 0-5VDC
No.5
Flow output COM
AMP171826-5 on the Connector 3810 side
AMP171822-5 on the cable side
w
e
1/4
Fluid
q
w
e
r
D3810
1/4
N2
20℃
MODEL D3810
Illustrative
example
r
Joint
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
Example of Wiring
DPM-3
PSK-2TFX
MODEL DPM-3
CH1(5P) CH1(6P) CH2(5P) CH2(6P)
POWER SUPPLY
MODEL PSK-2TFX-15
CC-TFX-xxM
SLM
CP-TFX-xxM
MFM側
D3810
26
Calibration
temperature
Note
Specifications relating to the flow range (e.g., flow range, accuracy and
response) are expressed in N2 or air equivalent. The product will be built with
the primary pressure of 300 kPa or less and the secondary side open to the
atmosphere. For details on the pressure requirements, please contact us.
28
Small Karman Vortex Flow Meter for Liquids
A
FM0101/0102/0103/0105 Series
KOFLOC's Karman Vortex Flow Meter FM Series provides
an ideal tool for measuring and monitoring liquid flows, including cooling water and cleaning water. Since PPS resin
is used for body material, all models of the series offer superior reliability and durability.
Features
•Simple design that minimizes a dead space
•Measurements of very small flows available (up to 0.5 L/min)
•Use of PPS resin has achieved a small, lightweight and rigid.
•The sensor can be used for pure water or deionyzed water and
chemicals (the sensor is acid-/alkali-resistant).
•These models are in the process of application for CE Marking.
Standard Specifications
FM0101
FM0102
FM0103
Dimension (a)
17.8
17.5
17.5
32.5
Dimension (L)
80.6
80.0
80.0
110.0
R3/8
R1/2
R1/2
25A
0.5-4 L/min
2-16 L/min
4-40 L/min
10-150 L/min
Fluids for measurement
Cooling water, cleaning water, etc.
Measuring accuracy
Within ±3.0% F.S
Repeatability
Within ±0.5% F.S
Dimensions
FM0101-S-S-P
Without indicator
S Type: 4-20mA
12.
5
P Type: Pulse (Open collector) (For w/o indicator only)
D Type: With indicator
X (Connection)
12-24VDC
Liquid temperature range
0-70°C
Proof pressure
1MPa
Amb. temperature range
0-50°C
Amb. humidity range
5-90%RH
Applicable cleanliness/
waterproofing standards
IP64 (Splashproof construction per JIS C 0920)
Material for wetted part
PPS with 30% glass mixture
Cable length
Weight
Without indicator
5
3
Supply voltage
FM0105-S-S-P
a
45
About 2000
Outputs
a
3
0
L
4
0
49
2-Tr56.1x2.5
PPS w/o glass mixture
W/o indicator: 2 meters long; terminated/pretinned (presoldered)
With indicator: 3 meters long; terminated/pretinned (presoldered)
W/o indicator: 85 g (Sensor unit)
165 g (Sensor unit)
With indicator: 100 g (Sensor unit)
205 g (Sensor unit)
CAUTION:
DO NOT load excessive clamping torque
on the sensor unit and
setscrews as they are
made of plastics.
28.05
Flow range
Cable length
About 2000
Connection (X)
FM0105
1
2
Model
10
a
45
φ56.1
a
L
Note:
Tolerances for unspecified outside dimensions: ±0.8
Tolerances for other unspecified dimensions: ±0.4
Principle of Measurement
When a columnar object (object that generates vortices) is placed
in the flow path of a fluid, regular channels of vortices, called
Karman vortex channels, are generated at the back of the object.
Since the frequency of a vortex generated is linearly proportional
to the flow velocity within a given range, the flow amount can be
measured by counting the number of vortices.
These series models make use of this principle. When the frequency of each vortex generated is detected by the incorporated
vortex detector (piezoelectric device), the signal processing circuit outputs a signal which is linearly proportional to volume flow.
Columnar object
(that generates vortices)
Vortex detector
Karman vortices
Ordering
MODEL 01 Flow range
(PPS)
01
02
03
MODEL 01
(PPS)
05
S
Output
P
N
/K
A
C
/K
S=4−20mADC
P = Pulse
D = 4-20 mADC + Indicator
C
Output
S=4−20mADC
D=4−20mADC+ Indicator
* Refer to “Ordering” when placing an order or requesting a quotation. Fill in the blanks
in the “Order/Quotation Request Card” at the end of the catalog, and send the card by
fax.
Piezoelectric device
27
Small Karman Vortex Flow Meter for Liquids
A
MODEL31 (Teflon®/PFA)
Series
The Model31 Karman Vortex Flow Meter employs the following principle for measurement of flows:
When a columnar object (object that generates vortices) is
placed in the flow path of a fluid, regular channels of vortices,
called Karman vortex channels, are generated at the back of
the object.
Since the frequency of a vortex generated is linearly proportional to the flow velocity within a given range, the flow amount
can be measured by counting the number of vortices.
When the frequency of each vortex generated is detected by
the incorporated vortex detector (piezoelectric device), the
signal processing circuit outputs a signal which is linearly proportional to volume flow.
Features
•Because of no moving part, the meter has superior reliability and durability and no error in mounting position is produced.
•Simple construction (its flow path of fluid contains a columnar object
and a vortex detector only) ensures low pressure loss and low liquid
leak. In addition, the detector does not get into contact with the fluid
running through the path, therefore, it is ideal for process monitoring of
various liquids.
•Two types of particle-free body materials (PPS and PFA) are available
for choice according to your needs.
•Global specifications (Certification for CE Marking already acquired)
•Since Teflon is the material for the entire wetted part and no O-ring is in
use, the Model31 Series Karman Vortex Flow Meter is optimum for monitoring liquid flows in the manufacturing process of semiconductors.
Item
Flow range (L/min)
Connection
Dimensions
FM3101
FM3102
FM3103
FM3104
0.4-4
2-20
5-50
10-100
3/8”
Pipe end
1/2”
Pipe end
3/4”
Pipe end
1”
Pipe end
Fluids for measurement
Ultrapure water, chemicals, and other liquids
Measuring accuracy
±3.0%+ 1 digit
Repeatability
Within ±0.5% F.S.
Cable length: About 3000
Standard Specifications
0-50°C
13
Amb. temperature range
58.2
Liquid temperature range 0-90°C (No bedewing, no boiling)
LED display in 3 digits
With indicator Current output: 4-20 mA (linear)
Outputs
Alarm output: Open collector (2 LEDs; 80 mA, 30 VDC max.)
Supply voltage
40
45
26
205±2
40
Current output: 4-20 mA (linear)
Pulse output: Open collector (10 mA, 30 VDC max.)
12-24VDC
®
Body
All Teflon (PFA), without O-rings
Cover
Polybutylene terephthalate (PBT) resin
Cable
2 meters long; Conductor: Tinned bare annealed copper wire;
Sheath: Heat-/cold-resistant polyvinyl chloride (POC)
52
Materials
26
Cable length:
About 2000
W/o indicator
45
205±2
13
Principle of Measurement
When a columnar object (object that generates vortices) is placed
in the flow path of a fluid, regular channels of vortices, called
Karman vortex channels, are generated at the back of the object.
Since the frequency of a vortex generated is linearly proportional
to the flow velocity within a given range, the flow amount can be
measured by counting the number of vortices. The Model31 Series
Karman Vortex Flow Meter makes use of this principle. When the
frequency of each vortex generated is detected by the incorporated
vortex detector (piezoelectric device), the signal processing circuit
outputs a signal which is linearly proportional to volume flow.
Columnar object
(that generates vortices)
Vortex detector
Karman vortices
Piezoelectric device
28
Ordering
The ModelFM31 Flow range
(PFA)
01
02
03
04
P
Output
X
P
/K
S=4−20mADC
P = Pulse
D = 4-20 mADC + Indicator
* Refer to “Ordering” when placing an order or requesting a quotation. Fill in the blanks in the
“Order/Quotation Request Card” at the end of the catalog, and send the card by fax.
Flow Indicators
A
MODEL DPM-3
Dimensions
A dedicated flow indicator for mass flow controller/meter.
Either 3·1/2-digit direct reading (standard spec.) or 1000
F.S. display is possible.
4
8
45
+0.5
-0
MODEL DPM−3
SLM
92.5
96
6
36.
5
+0.5
-0
Panel cut size
* DIN48x24 type indicator is also available on customer request.
Specifications
Display
3·1/2-digit 7-segment LED, direct reading
Power supply
+5 VDC
Mount type
Panel mount
Flow Setting Device
MODEL CK
Series
These dial type devices generate 0 to
5-volt flow signals for mass flow controllers. Each dial scale has graduations
from 000 to 999 to allow the user to set
flow values in relation to the full scale.
The series include two types, CK-1A
and CK-2A according to the dial shape.
CK-1A
CK-2A
Dimensions
MODEL CK-1A
0
Flow setting signal
3
COM
(
20
0
)
2
6
07
.
+0
0
CW
3
2
1
1
9
1
25
.
φ3 +0.1
3 0
0.
φ1
19.
05±0.127
0
3
0
1
4
Reference 5V
φ22
50 MAX
44
32
2
5.
4
1
Panel thickness: 1.5 to 5 mm
2
1
Panel cut hole dimensions
Input
5V
Output
5-volt full scale is divided
Resistance
10kΩ (Standard)
Setting accuracy
0.1% full scale
Applicable controller types
All mass flow controllers
CK-1A,CK-2A
Reference 5V
Flow setting
voltage
COM
Setscrew
(4−4
0 UNC)
2
5.
4
2
1
1
9
Reference 5V
2
Flow setting signal
3
COM
MFC
3
0.
φ1
2
1
Power
source
CK-1A
CK-2A
9.
4
CW
3
1
1
.
+0
0
φ22
R1
4
φ22
1 0 9
(
20
0
)
MODEL CK-2A
φ2
Panel cut hole dimensions
PSK Series
Power Unit
DPM
29
Compact Readout Unit
A
MODEL CR-400
The CR-400 readout unit, when connected to your mass flow controller or meter with a cable, provides the key mass flow functions, such
as flow measurement and control as well as cumulative flow calculations and flow event outputs. This readout unit offers RS-485 communications capability, so multiple readout units can be controlled online
by a host computer. * The CR-400 is fully compatible in size with the
CR-300.
Features
•Total flow is displayed in 8 digits: The upper 4 digits and the lower 4 digits are
shown alternately.
•Various event outputs are available.
•With a width of 73 mm and height of 73 mm, it takes up little space.
•Equipped with forced open/close operation of mass flow controller valve.
•External control terminals are provided on the rear for remote control.
•Mass flow control by RS-485 communications
•A lock key prevents accidental operation.
•Mass flow power: ±15 VDC (300 mA)
•Driving power supply is 85–264 VAC and 48–440 Hz.
Standard Specifications
Mass flow control
Mass flow input/output
Mass flow power
Dimensions
Number of display digits
Display accuracy
External control
Event output
Power consumption
AC power supply
Weight and dimensions
Flow setting, forced valve open/close operation and zero cut
0–5 VDC
±15 VDC (300 mA)
Instantaneous flow: 4 digits, total flow: 8 digits (upper and lower 4 digits
shown alternately)
Instantaneous flow: Within ±0.1% F.S. ±1 digit
Rear input terminal: Analog signal and RS-485 (half-duplex)
2 outputs (selected from instantaneous upper limit, instantaneous lower limit,
instantaneous upper/lower limits, and set total)
Open collector output (max. rating: 50 V, 50 mA)
Approx. 25 W
85–264 VAC, 48–440 Hz
Approx. 400 g, 73 W × 73 H × 119.5 D mm
66
73
Example of Use with Readout Unit CR-400
CR- 400
5.5
7
66
66.5 ±0.3
73
107
119.5
66.5
±0.3
Panel cut dimensions
MFC
Panel thickness with the supplied bracket:
1.2mm
With 1 washer inserted between the main unit and the bracket: 1.4–1.5 mm
With 2 washers inserted between the main unit and the bracket: 1.6–2.0 mm
AC100V
Ordering
Specify the model No. below when ordering the readout unit only.
0: Without cable
Model of mass flow instrument to be connected
MODEL CR-400
0
Model of mass flow
Illustrative
example
MODEL CR-400
30
3660
* Refer to “Ordering” and “Illustrative example” when placing an order or
requesting a quotation. Fill in the blanks in the “Order/Quotation Request
Card” at the end of the catalog, and send the card by fax.
Note
If the readout unit is connected to a previous model of mass flow
instrument, the unit may not work properly or not provide particular
functions. When using the readout unit with our mass flow instruments
not shown in this catalog or those made by other companies, please
contact us.
Mass Flow Controller/Meter Power Units (for Integration into Customer's Equipment Panel)
MODEL PSK-FB
PSK-1FB
Series
PSK-3FB
These DC power units can be commonly
used for mass flow controller and meters.
The 1FB, 3FB and 6FB types can supply
power to 1, 3 and 6 lines (units) of mass
flow controllers/meters, respectively. A
Dsub connector allows quick connection
to the unit to which power is to be
supplied without time-consuming wiring
job, also making signal exchange easier.
A
PSK-6FB
Type
Application (Power supply for)
PSK-1FB
PSK-3FB
SK-6FB
1 unit
3 units
6 units
Input voltage (frequency)
85-132VAC (47-66Hz)
Power consumption
22 W max.
70 W max.
140 W max.
Fuse
125V-0.8A
125V-3.15A
125V-6.3A
Power source
Power Output
±15VDC (±5%)
For setting flow values
+5VDC (±1%)
For external indicators
+5VDC (±5%), +15VDC (±5%)
Flow I/O signals
0-+5 VDC (15 VDC max.)
Set point output signals
0-+5VDC
Working temperature range
0-40°C
Working environment (humidity range)
0-90%RH (No condensation)
AC Power supply
85-132VAC (47-66Hz)
Weight
Approx. 0.8 kg
Approx. 1.3 kg
Approx. 1.7 kg
Dimensions
125
MODEL PSK-1FB
PIN CONNECTION
PIN CONNECTION
DPM/CK
15.5
12
MF
DPM/CK
AC INPUT : 85∼132V 50/60Hz 140VA MAX
DC OUTPUT : +15V2.4A,-15V2.4A,+5V0.9Aor+15V1.8A
15.5
3
MODEL PSK-6FB
MF
AC INPUT : 85∼132V 50/60Hz 70VA MAX
DC OUTPUT : +15V1.2A,-15V1.2A,+5V0.45Aor+15V0.9A
15.5
AC INPUT : 85∼132V 50/60Hz 22VA MAX
DC OUTPUT : +15V0.4A,-15V0.4A,+5V0.15Aor+15V0.3A
7
MF
3
DPM/CK
3
MF
2
DPM/CK
2
MF
1
DPM/CK
1
DPM/CK
AC85∼132V
3
4
5
DPM/CK
2
6
DPM/CK
1
DPM/CK
4
DPM/CK
6
3
DPM/CK
MF
MF
2
DPM/CK
MF
1
5
MF
MF
MF
POWER SUPPLY
120
110
43(40)
MODEL PSK-3FB
MF
90
DPM/CK
90
MF
120
90
PIN CONNECTION
120
AC85∼132V
AC85∼132V
POWER SUPPLY
POWER SUPPLY
31
Table of Compatibility – Cables and Accessories
for KOFLOC Mass Flow Meters/Controllers
A
Example of use of accessories
(1) When standard power supply is used
Dsub 9-pin
DPM-3
3660/3100
5400/5100
3100/3760
PSK-1FB
CK-1A
PSK-3FB
Main unit
PSK-6FB
Dsub 9-pin
Cable between main
unit and power supply
CK-2A
Cable between
power supply and
display/setter
Power
supply
Ordering (Power supply-display/setter)
Ordering (Power supply-Indicator/Setter)
1-m cable
3-m cable
5-m cable
Length specification
(Special order)
Example: When placing an order for the 5-m cable for connection between 5400 and PSK-1FB
CP-STD1-5M
1-m cable
3-m cable
5-m cable
Length specification
(Special order)
Example: When placing an order for the 3-m cable for connection between PSK-1FB and DPM3/CK-1A
CC-STD1-3M
(2) When CR-400 is used
MFC
MFM
Main unit
CR-400
MFC modeL-CR-400-XM
Cable between main unit
and power supply
Ordering
MFC model
32
㻠㻜㻜
1-m cable
3-m cable
5-m cable
Compact Handy Mass Flow Control/Measurement Unit
A
FLOW COMPO
®
This is a compact handy flow control/measuring unit
made by combining a compact DIN72 x72 power indicator
[CR-300] and MFC/MFM.
Features
•Compact, lightweight integral unit
•The touch panel type permits easy FS scaling, flow setting, and
valve opening/closing.
•Free selection of joints ranging from one-touch type to Swageloc
•The MFC-equipped type (FCC Series) can be used as MFM by
pressing the OPEN switch.
•Please contact us for the metal seal specifications for corrosive
gas.
Standard Specifications
MODEL
Mounting MFC/MFM
Standard flow range
(at N2 calibration condition)
FCC-3000-G1
FCC-3000-G2
FCM-3000-G1
FCM-3000-G2
3660 (MFC)
3200 (MFC)
3760 (MFM)
3100 (MFM)
10SCCM-20SLM
1SCCM-20SLM
10SCCM-20SLM
1SCCM-20SLM
Sealing material
FKM (option CR or NBR)
Response
Within 2 sec. (F.S. ±2%)
Within 1 sec. (F.S. ±2%)
Joint
Within 2 sec.
Within 1 sec.
Various joints are applicable.
* For details of the specifications, refer to the mounting MFC/MFM and CR-400.
Dimensions
Ordering
FC
C
M
3000
G1
G2
FC
C
3000
G1
1
4
0
MODEL
CR 3
0
0
Grade
Flow rate
Joint
500SCCM
1/4SWL
Fluid
(20)
C: Controller
M: Meter
FLOW COMPO
3
5
FLOW
(36
60,
3200,
3100)
2
4
(3
760)
2
6
8
4
L
5
1
7
5
* For L, refer to the face-to-face distance of the joint of respective mounting MFC/MFM.
®
Note: “FLOW COMPO ” is a trademark of our company.
Illustrative
example
MODEL
N2
* Refer to “Ordering” and “Illustrative example” when placing an order or requesting a
quotation. Fill in the blanks in the “Order/Quotation Request Card” at the end of the
catalog, and send the card by fax.
33
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