Single-Channel Controller

Operating Manual
Incl. EC Declaration of Conformity
Single-Channel Controller
VGC401
para
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1
Product Identification
In all communications with INFICON, please specify the
information on the product nameplate. For convenient
reference copy that information into the space provided
below:
Model:
PN:
SN:
V
Validity
Hz
W
This document applies to products with part number
398-010.
The part number (PN) can be taken from the product
nameplate.
This document is based on firmware number 302-519-E.
If your unit does not work as described in this document,
please check that it is equipped with the above firmware
version (→ 49).
We reserve the right to make technical changes without
prior notice.
All dimensions are indicated in mm.
2
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Intended Use
The VGC401 is used together with INFICON Transmitters (in this document referred to as gauges) for total
pressure measurement. All products must be operated in
accordance with their respective Operating Manuals.
Scope of Delivery
1×
1×
1×
2×
4×
4×
1×
1×
1×
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Single-Channel Controller
Power cord
Rubber bar
Rubber feet
Collar screws
Plastic sleeves
CD-ROM (Operating Manuals)
EC Declaration of Conformity
Installation Manual
3
Contents
4
Product Identification
Validity
Intended Use
Scope of Delivery
2
2
3
3
1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty
6
6
6
7
8
2 Technical Data
9
3 Installation
3.1 Personnel
3.2 Installation, Setup
3.2.1 Rack Installation
3.2.2 Installation in a Control Panel
3.2.3 Use as Desk-Top Unit
3.3 Mains Power Connector
3.4 SENSOR Connector
3.5 CONTROL Connector
3.6 RS232 Interface Connector
13
13
13
13
18
19
20
22
23
25
4 Operation
4.1 Front Panel
4.2 Turning the VGC401 On and Off
4.3 Operating Modes
4.4 Measurement Mode
4.5 Parameter Mode
4.5.1 Parameters
4.6 Test Mode
4.6.1 Parameters
4.6.2 Test Programs
26
26
27
27
28
31
34
47
49
50
5 Communication (Serial Interface)
5.1 RS232C Interface
5.1.1 Data Transmission
5.1.2 Communication Protocol
5.2 Mnemonics Mnemonics
5.2.1 Measurement Mode
5.2.2 Parameter Mode
5.2.3 Test Mode
5.2.4 Example
55
55
55
57
59
60
64
71
75
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6 Maintenance
76
7 Troubleshooting
77
8 Repair
79
9 Accessories
79
10
Storage
80
11
Disposal
80
Appendix
A: Conversion Tables
B: Default Parameters
C: Firmware Update
D: Literature
E: Index
81
81
82
83
86
89
ETL Certification
91
EC Declaration of Conformity
92
For cross-references within this document, the symbol
(→ XY) is used, for cross-references to further documents listed under "Literature", the symbol (→ [Z]).
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5
1 Safety
1.1 Symbols Used
Symbols for residual
risks
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and
environmental damage.
Caution
Information on correct handling or use. Disregard can
lead to malfunctions or minor equipment damage.
Further symbols
The lamp/display is lit.
The lamp/display flashes.
The lamp/display is dark.
para
Press the key (example: 'para' key).
Do not press any key
1.2 Personnel
Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
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1.3 General Safety
Instructions
Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and
consider the safety instructions in this document.
DANGER
DANGER: mains voltage
Contact with live parts is extremely hazardous
when any objects are introduced or any
liquids penetrate into the unit.
Make sure no objects enter through the louvers and no liquids penetrate into the equipment.
Disconnecting device
The disconnecting device must be readily identifiable
and easily reached by the user.
To disconnect the controller from mains, you must unplug the mains cable.
Disconnecting device
acc. to EN 61010-1
Communicate the safety instructions to all other users.
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7
1.4 Liability and
Warranty
8
INFICON assumes no liability and the warranty becomes
null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.) on the product
• use the product with accessories not listed in the corresponding documentation.
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2 Technical Data
Mains specifications
Voltage
Frequency
Power consumption
Overvoltage category
Protection class
Connection
Ambiance
Temperature
storage
operation
Relative humidity
Use
Pollution degree
Protection type
Compatible gauges
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Number
Compatible types
Pirani
90 … 250 VAC
50 … 60 Hz
≤30 VA
II
1
European appliance connector IEC 320 C14
–20 … +60 °C
+ 5 … +50 °C
≤80% up to +31 °C,
decreasing to 50% at +40 °C
indoors only
max. altitude 2000 m NN
II
IP30
1
PSG
(PSG400, PSG400-S,
PSG100-S, PSG101-S,
PSG500, PSG500-S,
PSG502-S, PSG510-S,
PSG512-S, PSG550,
PSG552, PSG554)
Pirani/Capacitive
PCG
(PCG400, PCG400-S,
PCG550, PCG552,
PCG554)
Cold cathode
Cold cathode/Pirani
Hot cathode
Hot cathode/Pirani
(PEG100)
Capacitive
PEG
MPG
BAG
BPG
HPG
CDG
TripleGauge™
Hot cathode/Pirani/
Capacitive
BCG
(BCG450)
(MPG400, MPG401)
(BAG100-S, BAG101-S)
(BPG400, BPG402)
(HPG400)
(CDG025, CDG025D,
CDG045, CDG045-H,
CDG045D, CDG100,
CDG100D, CDG160D)
9
Gauge connection
Number
2 (parallel)
Caution
SENSOR connector
Do not connect more than one
gauge at the same time.
15-pin D-Sub, female
RJ45 (FCC68), female
(pin assignment → 23)
Operation
Front panel
HOST (remote control)
via 3 keys
via RS232C interface
Measurement values
Measurement ranges
depending on gauge
(→ [1] … [21])
Measurement error
gain error
offset error
Measurement rate
analog
digital
Display rate
Filter time constant
slow
normal (nor)
fast
Pressure units
Zero adjust
Correction factor
A/D converters
1)
10
≤0.02% FSr
≤0.05% FSr
100 / s
50 / s
10 / s
10 / s
(BPG, HPG, BCG,
CDGxxxD1))
(BAG)
750 ms (fg = 0.2 Hz)
150 ms (fg = 1 Hz)
20 ms (fg = 8 Hz)
mbar, Pa, Torr, Micron
for linear gauges
for logarithmic gauges
0.10 … 10.00
resolution >0.001% FSr
(The measurement values of
BPG, HPG, BCG, BAG and
CDGxxxD are transmitted
digitally.)
CDG025D, CDG045D, CDG100D, CDG160D
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Gauge supply
Voltage
Current
Power consumption
Fuse protection
+24 VDC ±5%
750 mA
18 W
900 mA with PTC element,
self-resetting after turning the
VGC401 off or disconnecting
the gauge
Switching function
Number
Reaction delay
1
≤10 ms if switching threshold
close to measurement value
(for larger differences consider filter time constant).
depending on gauge
(→ [1] … [21])
≥1% FSr for linear gauges
≥10% of measurement value
for logarithmic gauges
Adjustment range
Hysteresis
Switching function relay
Contact type
Load max.
Service life
mechanic
electric
Contact positions
CONTROL connector
floating changeover contact
60 VDC, 1 A (ohmic)
30 VAC, 2 A (ohmic)
108 cycles
105 cycles (at maximum load)
→ 24
9-pin D-Sub, male
(pin assignment → 24)
Error signal
Number
Reaction time
1
≤20 ms
Error signal relay
Contact type
Load max.
floating normally open contact
60 VDC, 1 A (ohmic)
30 VAC, 2 A (ohmic)
Service life
mechanic
electric
Contact positions
CONTROL connector
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108 cycles
105 cycles (at maximum load)
→ 24
9-pin D-Sub, male
(pin assignment → 24)
11
Analog output
Number
Voltage range
Internal resistance
Measurement signal
vs. pressure
CONTROL connector
1
0 … +10 V
660 Ω
depending on gauge
(→ [1] … [21])
9-pin D-Sub, male
(pin assignment → 24)
Interface
Standard
Protocol
RS232C
ACK/NAK, ASCII with
3-character mnemonics,
bi-directional data flow,
8 data bits, no parity bit,
1 stop bit
only TXD and RXD used
9600, 19200, 38400 baud
9-pin D-Sub, female
(pin assignment → 25)
RS232C
Transmission rate
RS232 connector
Dimensions [mm]
106.2
285
204.5
2.5
103.6
84
67.3
ø3.5
78
91.2
para
12
Use
For incorporation into a rack or control panel or as desktop unit
Weight
0.85 kg
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3 Installation
3.1 Personnel
Skilled personnel
The unit may only be installed by persons
who have suitable technical training and the
necessary experience.
3.2 Installation, Setup
The VGC401 is suited for incorporation into a 19" rack or
a control panel or for use as desk-top unit.
DANGER
DANGER: damaged product
Putting a damaged product into operation can
be extremely hazardous.
In case of visible damages, make sure the
product is not put into operation.
3.2.1 Rack Installation
The VGC401 is designed for installation into a 19" rack
chassis adapter according to DIN 41 494. For this purpose, four collar screws and plastic sleeves are supplied
with it.
DANGER
DANGER: protection class of the rack
If the product is installed in a rack, it is likely
to lower the protection class of the rack
(protection against foreign bodies and water)
e.g. the EN 60204-1 regulations for switching
cabinets.
Take appropriate measures for the rack to
meet the specifications of the protection
class.
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13
14
Guide rail
In order to reduce the mechanical strain on the front
panel of the VGC401, preferably equip the rack chassis
adapter with a guide rail.
Slide rails
For safe and easy installation of heavy rack chassis
adapters, preferably equip the rack frame with slide rails.
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Mounting height
Rack installation
Height 2 U
Height 2 U rack
chassis adapter
n
Height 3 U
Secure the rack chassis adapter in the rack frame.
The admissible maximum ambient temperature (→ 9) must not be exceeded
neither the air circulation obstructed.
Rack chassis adapter
Height 2 U
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15
o
Slide the VGC401 into the adapter …
Height 2 U
… and fasten the VGC401 to the rack chassis
adapter using the screws supplied with it.
Height 3 U rack
chassis adapter
For incorporation into a 19" rack chassis adapter,
height 3, an adapter panel (incl. two collar screws and
plastic sleeves) is available (→ 79).
n
Secure the rack adapter in the rack frame.
The admissible maximum ambient temperature (→ 9) must not be exceeded
neither the air circulation obstructed.
Rack chassis adapter
Height 3 U
16
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o
Mount the adapter panel as upper extension to the
front panel of the VGC401 using the screws supplied with the adapter panel.
Adapter panel
(Height 2 U
to height 3 U)
p
Slide the VGC401 into the rack chassis adapter …
Height 3 U
…and fasten the adapter panel to the rack chassis
adapter using the screws supplied with the
VGC401.
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17
3.2.2 Installation in a
Control Panel
DANGER
DANGER: protection class of the control
panel
If the product is installed in a rack, it is likely
to lower the protection class of the rack
(protection against foreign bodies and water)
e.g. according to the EN 60204-1 regulations
for switching cabinets.
Take appropriate measures for the control
panel to meet the specifications of the protection class.
For mounting the VGC401 into a control panel, the following cut-out is required:
105
91.2
78
69
The admissible
maximum ambient
temperature (→ 9)
must not be
exceeded neither
the air circulation
obstructed.
M3 or ø 3.5
For reducing the mechanical strain on the front panel,
preferably support the unit.
n
Slide the VGC401 into the cut-out of the control
panel …
… and secure it with four M3 or equivalent screws.
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3.2.3 Use as Desk-Top
Unit
The VGC401 is also suited for use as desk-top unit. For
this purpose, two self-adhesive rubber feet as well as a
slip-on rubber bar are supplied with it.
n
Stick the two supplied rubber feet to the rear part
of the bottom plate …
… and slip the supplied rubber bar onto the bottom
edge of the front panel.
Select a location where the admissible maximum ambient temperature (→ 9) is not exceeded (e.g. due to sun irradiation).
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19
3.3 Mains Power
Connector
DANGER
DANGER: line voltage
Incorrectly grounded products can be extremely hazardous in the event of a fault.
Use only a 3-conductor power cable
(3×1.5 mm2) with protective ground. The
power connector may only be plugged into a
socket with a protective ground. The protecttion must not be nullified by an extension
cable without protective ground.
The unit is supplied with a 2.5 m power cord. If the mains
cable is not compatible with your system, use your own,
suitable cable with protective ground.
The socket must be fuseprotected with 10 Amax
Disconnecting device
acc. to EN 61010-1
If the unit is installed in a switch cabinet, the mains voltage should be supplied and turned on via a central
power distributor.
20
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Grounding
On the rear of the unit, there is a screw which can be
used to connect the unit to ground, e.g. using the
grounding of the pumping station.
Ground screw
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Do not unfasten this
screw (internal
ground protection)
21
3.4 SENSOR
Connector
The VGC401 is equipped with two different gauge connectors.
Caution
Caution: one channel measurement unit
Connecting more than one gauge at the
same time may lead to gauge destruction.
1 only at once
Make sure that there is never more than one
gauge connected to the VGC401 at the same
time.
Connect the gauge to one of the two SENSOR connectors on the rear of the unit. Use a screened 1:1 cable
(electromagnetic compatibility). Make sure the gauge is
compatible (→ 9).
DANGER
DANGER: protective low voltage
According to EN 61010, voltages exceeding
30 VAC or 60 VDC are hazardous.
Only connect a protective low voltage (SELV).
22
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Pin assignment
SENSOR
Pin assignment of
the 8-pin RJ45
appliance connector:
Pin
4
1
2
3
5
6
7
8
Signal
Identification
Supply
Supply common
Signal input
Signal common
Status
HV_L
HV_H
Pin assignment of
the female 15-pin
D-Sub appliance
connector:
3.5 CONTROL
Connector
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8
1
+24 VDC
GND
(Measurement signal+)
(Measurement signal–)
15
8
9
1
Pin
Signal
10
8
11
5
2
12
3
1
7
4
13
14
15
6, 9
Identification
Supply for BPG, HPG, BCG and BAG
Supply for CDG
Supply common GND
Signal input
(Measurement signal+)
Signal common (Measurement signal–)
Status
Emission status
Degas
HV_H
RXD
TXD
Screening = chassis
not connected
This connector allows to read the measurement signal,
to evaluate state of the floating switching function and
error contacts, and to activate/deactivate the high vacuum measurement circuit (only for PEG cold cathode
gauge and BAG ionization vacuum gauge).
23
Connect the peripheral components to the
CONTROL connector on the rear of the unit.
Use a screened cable (electromagnetic compatibility).
DANGER
DANGER: protective low voltage
According to EN 61010, voltages exceeding 30 VAC or 60 VDC are hazardous.
Only connect a protective low voltage
(SELV).
Pin assignment
Contact positions
CONTROL
Pin assignment of
the male 9-pin D-Sub
appliance connector:
Pin
1
7
5
4
3
2
5
9
1
6
Signal
Analog output
0 … +10 VDC
Chassis = GND
HV_H on
+24 V
off
0V
The control over this signal is placed superior to the key
operation.
Pressure above
Pressure below
threshold or power
threshold
supply turned off
Error signal
9
8
6
7
No error
Error or power
supply turned off
Supply for relays with higher switching power
Fuse-protected at 300 mA with PTC
element, self-resetting after power
+24 VDC, 200 mA off or pulling the CONTROL conChassis = GND
nector. Meets the requirements of a
grounded protective extra low
voltage (SELV).
The analog output (pin 1) differ from the
displayed value by no more than ±50 mV.
24
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3.6 RS232 Interface
Connector
The RS232C interface allows for operating the VGC401
via a HOST or terminal. It can also be used for updating
the firmware (→ 83).
Connect the serial interface to the RS232 connector on the rear of the unit using your own,
screened (electromagnetic compatibility) cable.
DANGER
DANGER: protective low voltage
According to EN 61010, voltages exceeding 30 VAC or 60 VDC are hazardous.
Only connect a protective low voltage
(SELV).
e.g. PC
VGC401
Screening
Screening
RXD
2 TXD
TXD
3 RXD
GND
5 GND
(Minimum configuration)
Pin assignment
RS232
Screening
Pin assignment
of the female
9-pin D-Sub
appliance connector:
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1
6
5
9
Pin
Signal
Pin
2
3
5
TXD
RXD
GND
1
4
7
6
8
9
DSR
CTS
GND
Signal
not connected
not connected
not connected
Chassis = screening
25
4 Operation
4.1 Front Panel
Measurement value in floating point or exponential
format or status messages
Warning/error
(flashing)
Pressure
unit
Switching function
status
para
Upper threshold
Lower threshold
para
Operator keys
Offset value ≠ 0
Correction factor ≠ 1
High vacuum measurement circuit activated
(PEG, MPG, BAG, BPG402 and BCG only)
Degas activated ( BPG, BCG and BAG only)
Parameter mode activated
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4.2 Turning the
VGC401 On and Off
Turning the VGC401 on
Make sure the VGC401 is correctly installed and the
specifications in the Technical Data are met.
The power switch is on the
rear of the unit.
Turn the VGC401 on with
the power switch (or centrally, via a switched power
distributor, if the unit is incorporated in a rack).
After power on, the VGC401 …
• automatically performs a self-test
• identifies the connected gauge
• activates the parameters that were in effect before the
last power off
• switches to the Measurement mode
• adapts the parameters if required (if another gauge
was previously connected).
Turning the VGC401 off
Turn the VGC401 off with the power switch (or centrally,
via a switched power distributor, if the unit is incorporated in a rack).
Wait at least 10 s before turning the VGC401 on
again in order for it to correctly initialize itself.
4.3 Operating Modes
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The VGC401 works in the following operating modes:
• Measurement mode
for displaying measurement values or status messages (→ 28)
• Parameter mode
for entering or displaying parameters (→ 31)
• Test mode
for running internal test programs (→ 47)
• Program transfer mode
for updating the firmware (→ 83)
27
4.4 Measurement Mode
The Measurement mode is the standard operating mode
of the VGC401. Measurement values and status messages as well as the gauge identification are displayed in
this mode.
Measurement mode
Parameter
mode
>10 s
Measurement value
Gauge identification
Power on
Test
mode
>5 s
>5 s
28
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Turning the gauge on
and off
Available for:
† Pirani
† Pirani/Capacitive
; Cold cathode
† Cold cathode/Pirani
; Hot cathode
† Hot cathode/Pirani
† Capacitive
† Hot cathode/Pirani/Capacitive
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG, HPG)
(CDG)
(BCG)
Ö Press key >1 s:
para
The gauge is
turned off.
is displayed instead of
the measurement
value.
Ö Press key >1 s:
The gauge is
turned on. A status
message may be
displayed instead
of the measurement value:
Measurement
range
Pressure p
para
The high vacuum measurement circuit of these gauges
can be activated in both, the Measurement and the
Parameter mode (→ 43).
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29
Displaying the gauge
identification
para
Ö Press keys >0.5 s:
The type of the connected
gauge is automatically identified and displayed for 5 s:
Pirani gauge
(PSG400, PSG400-S, PSG100-S,
PSG101-S, PSG500, PSG500-S,
PSG502-S, PSG510-S, PSG512-S,
PSG550, PSG552, PSG554)
Pirani/Capacitive gauge
(PCG400, PCG400-S, PCG550,
PCG552, PCG554)
Cold cathode gauge
(PEG100)
Cold cathode/Pirani gauge
(MPG400, MPG401)
Hot cathode gauge
(BAG100-S, BAG101-S)
Hot cathode/Pirani gauge
(BPG400)
Hot cathode/Pirani gauge
(BPG402)
Hot cathode/Pirani gauge
(HPG400)
Hot cathode/Pirani/Capacitive
gauge (BCG450)
Linear gauge (capacitive. analog)
(CDG025, CDG045, CDG045-H,
CDG100)
Linear gauge (capacitive. digital)
(CDG025D, CDG045D, CDG100D,
CDG160D)
No gauge connected
(no Sensor)
Connected gauge cannot be
identified (no Identifier)
30
Getting to the
Parameter mode
→ 31
Getting to the Test
mode
Press keys >5 s
(→ 47)
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4.5 Parameter Mode
The Parameter mode is used for displaying, editing and
entering parameter values.
Measurement
mode
Parameter mode
Degas
lower threshold
>10 s
Pirani range extension
Power on
Test mode
>5 s
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31
Selecting a parameter
Ö The name of the parameter
e.g.:
Degas
is displayed as long as the
key is pressed or at least for
2 s.
Afterwards, the currently
valid parameter value is displayed.
Some parameters are not available for all gauge types.
They are only displayed if available.
→
34
34
38
38
41
41
42
43
44
44
45
45
46
Available
for
32
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Editing the parameter
value
para
para
Ö Press key <1 s:
The value is increased/
decreased by 1 increment.
Press key >1 s:
The value is increased/
decreased continuously.
Modifications of parameters come into effect immediately
and are stored automatically. Exceptions are mentioned
under the corresponding parameters.
Loading the default
parameters
para
Ö Press keys >5 s:
All user-defined parameters
are restored to their default
values (→ 82).
Loading of the default parameter settings is
irreversible.
Getting to the Test
mode
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Press keys >5 s
(→ 47)
33
4.5.1 Parameters
Degas
Contamination deposits on the electrode system of Hot
cathode gauges may cause instabilities of the measurement values. The Degas function allows to clean the
electrode system.
BAG10X and BPG402 gauges: The Degas function acts only upon the active filament.
Available for:
† Pirani
† Pirani/Capacitive
† Cold cathode
† Cold cathode/Pirani
; Hot cathode
; Hot cathode/Pirani
† Hot cathode/Pirani
† Capacitive
; Hot cathode/Pirani/Capacitive
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG)
(HPG)
(CDG)
(BCG)
Value
Ö Normal operation.
Ö Degas: The electron
collection grid is
heated to ≈700 °C by
electron bombardment and the electrode system is thus
cleaned.
Duration of the Degas function:
3 min (can be aborted).
Lower/upper switching threshold
34
The VGC401 has a switching function with two adjustable
thresholds. The status of the switching function is
displayed on the front panel (→ 26) and can be evaluated via the floating contact at the CONTROL connector
(→ 23).
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Pressure p
M
u
e as
nt value
r em e
Switching
function
Display
Time t
4
3
2
4
3
2
Off
4
3
2
On
Off
Value
The lower switching threshold
(Setpoint low) defines the pressure at which the switching function is activated when the pressure is dropping.
e.g.:
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VGC401.om
Ö gauge dependent
(→ table).
If another gauge type is connected, the VGC401 automatically adjusts the switching
threshold if required.
35
upper
threshold
limit
lower
threshold
limit
2×10-3 *)
5×102
2×10-3 *)
1.5×103
1×10-9
1×10-2
5×10-9
1×103
1×10-8
1×103
1×10-8
1×103
1×10-6
1×103
1×10-10
1×10-1
FSr / 1000
FSr
FSr / 1000
FSr
1×10-8
1.5×103
all values in mbar, Cor = 1
*)
2×10-4 mbar, if PrE is activated (→ 46)
The minimum hysteresis between the upper and
lower switching threshold is at least 10% of the
lower threshold or 1% of the set full scale value.
If the value of the minimum hysteresis drops below these values, the upper threshold is automatically adjusted. This prevents unstable
states.
Value
The upper switching threshold
(Setpoint high) defines the pressure at which the switching function is deactivated when the pressure is rising.
e.g.:
36
Ö gauge dependent
(→ table).
If another gauge type is connected, the VGC401 automatically adjusts the threshold
if required.
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upper
threshold
limit
lower
threshold
limit
lower threshold
+10% lower threshold
5×102
+10% lower threshold
1.5×103
+10% lower threshold
1×10-2
+10% lower threshold
1×103
+10% lower threshold
1×103
+10% lower threshold
1×103
+10% lower threshold
1×103
+10% lower threshold
1×10-1
+1% measurement
range (FSr)
+1% measurement
range (FSr)
FSr
+10% lower threshold
1.5×103
FSr
all values in mbar, Cor = 1
The minimum hysteresis between the upper and
lower switching threshold is at least 10% of the
lower threshold or 1% of the set full scale value.
This prevents unstable states.
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37
Measurement range
of capacitive gauges
The full scale value of the measurement range (Full
Scale range) of the linear gauges has to be defined by
the user; the full scale value of logarithmic gauges is
automatically recognized.
Available for:
Pirani
Pirani/Capacitive
Cold cathode
Cold cathode/Pirani
Hot cathode
Hot cathode/Pirani
Capacitive
Hot cathode/Pirani/Capacitive
†
†
†
†
†
†
;
†
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG, HPG)
(CDG)
(BCG)
Value
Ö 0.01 mbar
e.g.:
0.01 Torr, 0.02 Torr, 0.05 Torr
0.10 mbar, 0.25 mbar, 0.50 mbar
0.10 Torr, 0.25 Torr, 0.50 Torr
1 mbar, 2 mbar, 5 mbar
1 Torr, 2 Torr, 5 Torr
10 mbar, 20 mbar, 50 mbar
10 Torr, 20 Torr, 50 Torr
100 mbar, 200 mbar, 500 mbar
100 Torr, 200 Torr, 500 Torr
1000 mbar, 1100 mbar
1000 Torr
2 bar, 5 bar, 10 bar, 50 bar
Conversion table → Appendix, 81
Offset correction of
the controller
38
For displaying the offset correction and zero adjustment
of the gauge and adjustment to the currently measured
value (in the range -5 ... +110% of the full scale setting).
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Available for:
† Pirani
† Pirani/Capacitive
† Cold cathode
† Cold cathode/Pirani
† Hot cathode
† Hot cathode/Pirani
; Capacitive
† Hot cathode/Pirani/Capacitive
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG, HPG)
(CDG)
(BCG)
When the offset correction is activated, the stored offset
value is subtracted from the actual measurement value.
This allows measuring relative to a reference pressure.
The offset correction affects:
; the displayed measurement value
† the displayed threshold value of the switching
functions
† the analog output at the CONTROL connector
(→ 23)
Value
Ö Offset correction
deactivated
e.g.:
para
para
para
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Ö Offset correction
activated
Ö Press briefly:
Activate offset correction.
Ö Press key >2 s:
The offset value is readjusted. The actual measurement value is accepted as
new offset value.
Ö Press briefly:
Deactivate offset correction.
39
Zero adjustment of
the gauge
Available for:
† Pirani
† Pirani/Capacitive
† Cold cathode
† Cold cathode/Pirani
† Hot cathode
† Hot cathode/Pirani
; Capacitive
† Hot cathode/Pirani/Capacitive
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG, HPG)
(CDG)
(BCG)
First adjust the gauge and then the controller.
When the zero of the gauge is readjusted, the
offset correction must be deactivated.
Value
e.g.:
Ö Zero adjustment
activated
Lit solid after >2 s and
as long as key remains pressed
para
Ö Press >2 s
Zero adjustment of the
gauge (CDGxxxD only).
After adjusting the zero point, a zero value is
displayed. Due to the measuring resolution of
the CDG (noise, drift), a zero with plus/minus
several digits are displayed.
40
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Pressure unit
Unit of measured values, thresholds etc. See Appendix
(→ 81) for conversion.
Value
Ö mbar/bar
Ö Torr (only available if
Torr lock is not activated
i.e. Torr is not suppressed → 50)
Ö Pascal
Ö Micron (=mTorr)
A change of the pressure unit influences also the settings
of the BPG, HPG and BCG gauges.
When selecting Micron, above 99000 Micron the readout
automatically changes over to Torr. When the pressure
drops below 90 Torr the instrument automatically
switches back to Micron.
Correction factor
The correction factor allows the measured value to be
calibrated for other gases than N2 (→ respective manual,
"Literature" 86).
Available for:
;
;
;
;
;
;
;
†
;
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Pirani
Pirani/Capacitive
Cold cathode
Cold cathode/Pirani
Hot cathode
Hot cathode/Pirani
Hot cathode/Pirani
Capacitive
Hot cathode/Pirani/Capacitive
Only for pressures
(PSG)
(PCG)
<10 mbar
(PEG)
(MPG) <1×10-2 mbar
(BAG)
(BPG) <1×10-2 mbar
(HPG)
(CDG)
(BCG)
<1 mbar
41
Value
Ö No correction
e.g.:
e.g.:
Measurement value
filter
Ö Measurement value
corrected by a factor
of 0.10 … 10.00
The measurement value filter permits a better evaluation
of unstable or disturbed measuring signals.
The filter affects:
; the displayed measurement value
† the analog output
† the digitally transmitted measurement value of the
Hot cathode gauges BPG, HPG, BCG and BAG
Value
Ö Fast:
The VGC401 responds quickly
to fluctuations in measured
values. As a result, it will be
more sensitive to disturbed
measurement signals.
Pressure p
Time t
42
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Ö Normal:
Good relationship between response and sensitivity of the
display and the switching functions to changes in the measured values.
Pressure p
Time t
Ö Slow:
The VGC401 does not respond to small changes in
measured values. As a result,
it will respond more slowly to
changes in the measured values.
Pressure p
Time t
Turning the gauge
on/off
Activating/deactivating the high vacuum measurement
circuit (→ also 29).
Available for:
† Pirani
† Pirani/Capacitive
; Cold cathode
† Cold cathode/Pirani
; Hot cathode
† Hot cathode/Pirani
† Capacitive
† Hot cathode/Pirani/Capacitive
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(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG, HPG)
(CDG)
(BCG)
43
Value
Ö High vacuum measurement circuit activated
Ö High vacuum measurement circuit deactivated
Display resolution
(digits)
Display resolution of measured values.
Value
Ö Display
• rounded to one
decimal digit
• or two integrals
Ö Display
• rounded to two
decimal digits
• or three integrals
When the PrE (→ 46) is ON and the pressure is in the
range p<1.0E-4 mbar the display resolution of the PSG
and PCG Gauges is reduced by one decimal digit.
Transmission rate
Transmission rate of the RS232C interface.
Value
e.g.:
44
Ö 9600 baud
19200 baud
38400 baud
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Emission
Switching the emission on and off.
Available for:
† Pirani
† Pirani/Capacitive
† Cold cathode
† Cold cathode/Pirani
† Hot cathode
; Hot cathode/Pirani
† Capacitive
; Hot cathode/Pirani/Capacitive
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG402 only)
(CDG)
(BCG)
Value
Ö the emission is switched on
and off automatically by the
gauge
Ö the emission is switched on
and off by the user
Filament
Means of selection.
Available for:
† Pirani
† Pirani/Capacitive
† Cold cathode
† Cold cathode/Pirani
† Hot cathode
; Hot cathode/Pirani
† Capacitive
† Hot cathode/Pirani/Capacitive
(PSG)
(PCG)
(PEG)
(MPG)
(BAG)
(BPG402 only)
(CDG)
(BCG)
Value
Ö the gauge automatically alternates between the filaments
Ö filament 1 aktive
Ö filament 2 aktive
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45
Pirani range
extension
The display and setpoint adjustment range can be
extended.
Available for:
Measurement range
; Pirani Gauge
; Pirani Capacitance Gauge
† Cold Cathode Gauge
† Cold cathode/Pirani
† Hot cathode
† Hot cathode/Pirani
† Capacitive
† Hot cathode/Pirani/Capacitive
(PSG) 5×10-5…1000 mbar
(PCG) 5×10-5…1500 mbar
(PEG)
(MPG)
(BAG)
(BPG, HPG)
(CDG)
(BCG)
Value
Ö Default.
Ö Display extended to
5×10-5 mbar, setpoint adjustment range extended to
2×10-4 mbar.
para
Ö Activate/deactivate the
Pirani range extension.
para
46
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4.6 Test Mode
The Test mode is used for displaying, editing and
entering special parameter values for testing the
VGC401.
Parameter mode
Measurement
mode
Power on
>5 s
Test mode
Firmware version
+ Press any key.
>5 s
Watchdog control
RS232C test program
>5 s
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47
Selecting a parameter
Ö The name of the parameter
e.g.:
Firmware version
is displayed.
→ 49
49
50
The name of the parameter is displayed as long as the key is pressed
or at least for 2 s.
The firmware version is continuously displayed.
→ 50
51
51
52
52
53
53
54
54
The name of the test program is displayed until
it is started.
Modifying a
parameter
para
Ö Increase/decrease the value
by the defined increments.
para
48
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Starting the test
program
Ö Start test program.
para
Changing to the
Measurement mode
Press keys >5 s
(→ 28)
or
turn the unit off, wait for 10 s
and then turn it on again.
4.6.1 Parameters
Firmware version
The firmware version (program version) is displayed.
Version
Ö The two parts of the firmware
number are displayed alternately.
│
The last character indicates the modification index (-, A … Z). Please mention
this index when contacting INFICON in
the event of a fault.
Watchdog control
Behavior of the system control (watchdog) in the event of
an error.
Setting
Ö The system automatically acknowledges error messages of
the watchdog after 2 s.
Ö Error messages of the watchdog have to be acknowledged
by the operator.
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49
Torr lock
The pressure unit
can be suppressed in the corre(→ 41).
sponding parameter setting
Setting
Parameter setup lock
Ö Pressure unit
available.
Ö Pressure unit
able.
not avail-
This parameter affects the parameter mode. When the
lock is activated, the user can inspect but not modify
parameter values.
Setting
Ö Parameters can be inspected
and modified
Ö Parameters can be inspected
only.
4.6.2 Test Programs
RAM test
Test of the main memory.
Test sequence
The test runs automatically one
time:
Ö Test in process (very briefly).
Ö Test finished, no error found.
Ö Test finished, error(s) found.
The
lamp flashes.
50
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EPROM test
Test of the program memory.
Test sequence
The test runs automatically one
time:
Ö Test in process
Ö Test finished, no error found.
After the test, a four-digit
checksum (hexadecimal format) is displayed.
Ö Test finished, error(s) found.
After the test, a four-digit
checksum (hexadecimal format) is displayed. The
lamp flashes.
EEPROM test
Test of the parameter memory.
Test sequence
The test runs automatically one
time:
Ö Test in process (very briefly).
Ö Test finished, no error found.
Ö Test finished, error(s) found.
The
lamp flashes.
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51
Display test
Test of the display.
Test sequence
The test runs automatically one time 1):
Ö First, all display elements are lit at the
same time, ...
Ö ... and then, each element is lit individually.
HV COR
:
HV COR
1)
para
A/D converter test 0
Ö Stop the test sequence
and activate one element
after another by pressing
the key once per element.
Test of channel 0 of the analog/digital converter (with a
reference voltage at the signal input of the SENSOR
connector (→ 23)).
The measurement value filter affects the applied
voltage. If the signal input is open, the VGC401
displays a default value that may easily fluctuate
because of the high sensitivity of the open
measurement circuit.
Test sequence
e.g.:
52
Ö Positive portion of the measurement signal in Volt
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A/D converter test 1
Test of channel 1 of the analog/digital converter (with a
reference voltage at the signal input of the SENSOR
connector (→ 23)).
The measurement value filter affects the applied
voltage. If the signal input is open, the VGC401
displays a default value that may easily fluctuate
because of the high sensitivity of the open
measurement circuit.
Test sequence
e.g.:
A/D converter test 2
Ö Negative portion of the measurement signal in Volt.
Test of channel 2 of the analog/digital converter (with a
reference voltage at the signal input of the SENSOR
connector (→ 23)).
The measurement value filter affects the applied
voltage. If the signal input is open, the VGC401
displays a default value that may easily fluctuate
because of the high sensitivity of the open
measurement circuit.
Test sequence
Ö Gauge identification voltage
e.g.:
Ö No gauge connected
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53
I/O test
Test of the two relays of the VGC401. The program tests
their switching function.
Caution
Caution: The relays switch irrespective of the
pressure
Starting a test program may cause unwanted
effects in connected control systems.
Disconnect all sensor cables and control
system lines to ensure that no control commands or messages are triggered by mistake.
The relays switch on and off cyclically. The switching
operations are indicated optically and can be heard.
The contacts are connected to the CONTROL connector
on the rear of the housing (→ 23). Check the switching
function with an ohmmeter.
Test sequence
The test runs automatically one
time:
Ö both relays deactivated
Ö switching function relay
Ö switching function relay
Ö error relay
Ö error relay
RS232C test
Test of the RS232C interface. The VGC401 repeats each
sign transmitted by the communicating HOST.
The data transferred from/to the VGC401 can
be displayed by the computer only
(→ Section 5).
Test sequence
The test runs automatically.
54
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5 Communication (Serial Interface)
5.1 RS232C Interface
The serial interface is used for communication between
the VGC401 and a computer. A terminal can be connected for test purposes.
When the VGC401 is put into operation, it starts transmitting measured values in intervals of 1 s. As soon as
the first character is transferred to the VGC401, the
automatic transmission of measured values stops. After
the necessary inquiries or parameter modifications have
been made, the transmission of measured values can be
started again with the COM command (→ 61).
Connection diagram,
connection cable
5.1.1 Data Transmission
Data format
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Pin assignment of the 9-pin D-Sub connector and RS232
cable → 25.
The data transmission is bi-directional, i.e. data and
control commands can be transmitted in either direction.
1 start bit
8 data bits
No parity bit
1 stop bit
No hardware handshake
55
Definitions
The following abbreviations and symbols are used:
Symbol
HOST
[...]
ASCII
Meaning
Computer or terminal
Optional elements
American Standard Code for Information
Interchange
<ETX>
END OF TEXT (CTRL C)
Reset the interface
<CR>
CARRIAGE RETURN
Go to beginning of the line
<LF>
LINE FEED
Advance by one line
<ENQ> ENQUIRY
Request for data transmission
<ACK> ACKNOWLEDGE
Positive report signal
<NAK> NEGATIVE ACKNOWLEDGE
Negative report signal
"Transmit":
"Receive":
Format of
pressure values
Dec Hex
3
03
13
0D
10
0A
5
05
6
06
21
15
Data transfer from HOST to VGC401
Data transfer from VGC401 to HOST
For pressure values, the following format is used:
sx.xxxxEsxx
││
│└───
││
└────
│ └───────-──
└────-────-──
Flow Control
56
Exponent
Sign exponent
Mantissa
Sign mantissa
After each ASCII string, the HOST must wait for a report
signal (<ACK><CR><LF> or <NAK> <CR><LF>).
The input buffer of the HOST must have a capacity of at
least 25 bytes.
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5.1.2 Communication
Protocol
Transmission format
Messages are transmitted to the VGC401 as ASCII
strings in the form of mnemonics and parameters. All
mnemonics comprise three ASCII characters.
Spaces are ignored. <ETX> (CTRL C) clears the input
buffer in the VGC401.
The input is terminated by <CR> or <LF> or <CR><LF>
("end of message"), and evaluation in the VGC401 is
subsequently started.
The tables starting on 59 are applicable to the
mnemonics and parameters. The maximum number of
digits, the data formats and admissible value ranges are
also specified there.
Transmission
protocol
HOST
VGC401 Explanation
Mnemonics
[and parameters] ––-–––> Receives message with
<CR>[<LF>] –––––––-––> "end of message"
<–-––– <ACK><CR><LF>
Reception format
Positive acknowledgment
of a received message
When requested with a mnemonic instruction, the
VGC401 transmits the measurement data or parameters
as ASCII strings to the HOST.
<ENQ> must be transmitted to request the transmission
of an ASCII string. Additional strings, according to the
last selected mnemonic, are read out by repetitive
transmission of <ENQ>.
If <ENQ> is received without a valid request, the ERROR
word is transmitted.
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57
Reception protocol
HOST
VGC401 Explanation
Mnemonics
[and parameters] ––––––> Receives message with
<CR>[<LF>] –––––––––-> "end of message"
<––––- <ACK><CR><LF>
Positive acknowledgment
of a received message
<ENQ> -–––––––––––––> Requests to transmit
<––––––--– Measurement
values or
parameters
Transmits data with
<–––––––––– <CR><LF> "end of message"
:
<ENQ> –––––––––––––>
:
Requests to transmit
<––––––--– Measurement
values or
parameters
Transmits data with
<–––––––––– <CR><LF> "end of message"
Error processing
Error recognition
protocol
All strings received are verified in the VGC401. If an error
is detected, a negative acknowledgment <NAK> is
output. The appropriate flag is set in the ERROR word.
Errors can be decoded when the ERROR word is read.
HOST
VGC401 Explanation
Mnemonics
[and parameters] ––––-–> Receives message with
<CR>[<LF>] -–––––––––> "end of message"
***** Transmission or programming error *****
<–––– <NAK><CR><LF>
Negative acknowledgment
of a received message
Mnemonics
[and parameters] –––––-> Receives message with
<CR>[<LF>] –––––-––––> "end of message"
<––––- <ACK><CR><LF>
58
Positive acknowledgment
of a received message
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5.2 Mnemonics
Mnemonics
BAU
COM
COR
DCD
DGS
ERR
EUM
FIL
FSR
FUM
HVC
ITR
LOC
OFS
PNR
PRE
PR1
RES
SAV
SP1
SPS
TAD
TDI
TEE
TEP
TID
TIO
TKB
TLC
TRA
TRS
UNI
WDT
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Baud rate
Continuous mode
Correction factor
Display control digits
BAG, BPG, BCG degas on/off
Error status
Emission user mode
Filter time constant
CDG full scale range
Filament user mode
HV, EMI on/off
BAG, BPG, HPG, BCG, CDGxxxD
data output
Parameter setup lock
Offset correction
Program number
Pirani range extension
Pressure measurement
Reset
Save parameters to EEPROM
Setpoint
Setpoint status
A/D converter test
Display test
EEPROM test
EPROM test
Sensor identification
I/O test
Keyboard test
Torr lock
RAM test
RS232 test
Pressure unit
Watchdog control
→
69
61
68
68
64
63
69
68
66
69
61
62
72
67
71
70
60
63
69
64
65
73
73
72
72
62
74
74
71
72
74
67
71
59
5.2.1 Measurement
Mode
Measurement data
Transmit:
PR1 <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x,sx.xxxxEsxx <CR><LF>
│
│
1)
│
└─ Measurement value
│
[in current pressure unit]
│
└─ Status, x =
0 –> Measurement data okay
1 –> Underrange
2 –> Overrange
3 –> Sensor error
4 –> Sensor off (BAG, PEG)
5 –> No sensor
6 –> Identification error
7 –> Error BAG, BPG, HPG, BCG
1)
rd
th
The 3 and 4 decimal are always 0, except for
the CDG gauge.
60
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Continuous output of
measured values
(RS232)
Transmit:
COM [,x] <CR>[<LF>]
│
└─ Mode x = 0 –> 100 ms
1 –> 1 s (default)
2 –> 1 min.
Receive:
<ACK><CR><LF>
<ACK> is immediately followed by the continuous output of the measured value in the
desired interval.
Receive:
x,sx.xxxxEsxx y <CR><LF>
│
│
│
1)
│
└───┴─ Measured value
│
with pressure unit
│
└─ Status, x =
0 –> Measurement data okay
1 –> Underrange
2 –> Overrange
3 –> Sensor error
4 –> Sensor off (BAG, PEG)
5 –> No sensor
6 –> Identification error
7 –> Error BAG, BPG, HPG, BCG
1)
Activating/deactivating
the HV circuit and EMI
rd
th
The 3 and 4 decimal are always 0, except for
the CDG gauge.
Transmit:
HVC [,x] <CR>[<LF>]
│
└─ Mode x = 0 –> off (default)
1 –> on
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Mode
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61
Data output BAG, BPG,
HPG, BCG, CDGxxxD
Transmit:
ITR <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
xxx...xxx,y <CR><LF>
1)
│
│
│
└─ Gauge status ERS y
│
(→ BAG)
│
└─ Transmission string (17 character)
(→ BAG)
xx,xx,xx,xx,xx,xx,xx,xx <CR><LF>
2)
│
└─ Transmission string byte
0 … 7 in hex format
(→ BPG, HPG, BCG,
CDGxxxD)
Gauge identification
1)
Only for BAG
2)
For BPG, HPG, BCG, CDGxxxD
Transmit:
TID <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x <CR><LF>
│
└─ Identification, x =
PSG
(Pirani)
PCG
(Pirani/Capacitive)
PEG
(Cold cathode)
MPG
(Cold cathode/Pirani)
CDG
(Capacitive)
BAG
(Hot cathode)
BPG
(Hot cathode/Pirani)
BPG402 (Hot cathode/Pirani)
HPG
(Hot cathode/Pirani)
BCG
(Hot cathode/Pirani/
Capacitive)
noSEn (no Sensor)
noid
(no identification)
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Error status
Transmit:
ERR <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
xxxx <CR><LF>
│
└─ x =
0000 –> No error
1000 –> Controller error
(See display on front panel)
0100 –> NO, HWR No hardware
0010 –> PAR, Inadmissible parameter
0001 –> SYN, Syntax error
The ERROR word is cancelled when read out. If
the error persists, it is immediately set again.
Reset
Transmit:
RES [,x] <CR>[<LF>]
│
└─ x = 1 –> Reset
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
[x]x,[x]x,... <CR><LF>
│
└─ List of all present error messages
xx =
0 –> No error
1 –> Watchdog has responded
2 –> Task fail error
5 –> EPROM error
6 –> RAM error
7 –> EEPROM error
9 –> DISPLAY error
10 –> A/D converter error
11 –> Sensor error (e.g. filament
rupture, no supply)
12 –> Sensor identification error
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63
5.2.2 Parameter Mode
Degas
Transmit:
DGS [,x] <CR>[<LF>]
│
└─ x = 0 –> off (default)
1 –> on (3 min.)
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Degas status
Threshold value
setting, allocation
Transmit:
SP1 [,x.xxEsx,x.xxEsx] <CR>[<LF>]
│
│
1)
│
└─ Upper threshold
│
[in current pressure
│
unit]
│
(default = depending
│
on gauge)
│
1)
└─ Lower threshold
[in current pressure unit]
(default = depending on
gauge)
1)
Values can be entered in any format. They are internally
converted into the floating point format.
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x.xxxxEsxx,x.xxxxEsxx <CR><LF>
│
│
│
└─ Upper threshold
│
[in current pressure unit]
│
└─ Lower threshold
[in current pressure unit]
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Switching function
status
Transmit:
SPS <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x <CR><LF>
│
└─ Switching function
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x=
0 –> off
1 –> on
65
Measurement range
(F.S.) of capacitive
gauges
The full scale value of the measurement range
(Full Scale) of linear gauges has to be defined
by the user; the full scale value of logarithmic
gauges is automatically recognized.
Transmit:
FSR [,x] <CR>[<LF>]
│
└─ Measurement range, x =
0 –> 0.01 mbar
1 –> 0.01 Torr
2 –> 0.02 Torr
3 –> 0.05 Torr
4 –> 0.10 mbar
5 –> 0.10 Torr
6 –> 0.25 mbar
7 –> 0.25 Torr
8 –> 0.50 mbar
9 –> 0.50 Torr
10 –> 1 mbar
11 –> 1 Torr
12 –> 2 mbar
13 –> 2 Torr
14 –> 5 mbar
15 –> 5 Torr
16 –> 10 mbar
17 –> 10 Torr
18 –> 20 mbar
19 –> 20 Torr
20 –> 50 mbar
21 –> 50 Torr
22 –> 100 mbar
23 –> 100 Torr
24 –> 200 mbar
25 –> 200 Torr
26 –> 500 mbar
27 –> 500 Torr
28 –> 1000 mbar
29 –> 1100 mbar
30 –> 1000 Torr
31 –> 2 bar
32 –> 5 bar
33 –> 10 bar
34 –> 50 bar
Receive:
<ACK><CR><LF>
Transmit:
Receive:
<ENQ>
x <CR><LF>
│
└─ Measurement range (F.S.)
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Offset correction
Transmit:
OFS [,x,x.xxxEsx] <CR>[<LF>]
│
│
1)
│
└─ Offset
│
[in current pressure unit]
│
(default = 0.000E0)
│
└─ Mode, x =
0 –> Off (default)
No offset value
needs to be entered.
1 –> On
If no offset value has been
entered, the previously
defined offset value is
taken over.
2 –> Auto
(offset measurement)
No offset value needs to
be entered.
3 –> Zero adjustment CDGxxxD
No offset value needs to
be entered.
1)
Values can be entered in any format. They are
internally converted into the floating point format.
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x,sx.xxxxEsxx <CR><LF>
│
│
│
└─ Offset
│
[in current pressure unit]
│
└─ Mode
Measurement unit
Transmit:
UNI [,x] <CR>[<LF>]
│
└─ x = 0 –> mbar/bar (default)
1 –> Torr
2 –> Pascal
3 –> Micron
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Measurement unit
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67
Correction factor
Transmit:
COR [,[x]x.xxx] <CR>[<LF>]
│
└─ 0.100 … 10.000
(default = 1.000)
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
[x]x.xxx <CR><LF>
│
└─ Correction factor
Number of digits in
the display
Transmit:
DCD [,x] <CR>[<LF>]
│
└─ x = 2 –> 2 digits (default)
3 –> 3 digits
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Number of digits
When the PrE (→ 46) is ON and the pressure is in the
range p<1.0E-4 mbar the display resolution of the PSG
and PCG Gauges is reduced by one decimal digit.
Measurement value
filter
Transmit:
FIL [,x] <CR>[<LF>]
│
└─ x = 0 –> fast
1 –> medium (default)
2 –> slow
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Filter time constant
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Transmission rate
Transmit:
BAU [,x] <CR>[<LF>]
│
└─ x = 0 –> 9600 baud (default)
1 –> 19200 baud
2 –> 38400 baud
As soon as the new baud rate has been entered,
the report signal is transmitted at the new
transmission rate.
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Transmission rate
Emission
Transmit:
EUM [,x] <CR>[<LF>]
│
└─ x = 0 –> Manually
1 –> Automatically (default)
Filament
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x <CR><LF>
Transmit:
FUM [,x] <CR>[<LF>]
│
└─ x = 0 –> Automatically (default)
1 –> Filament 1
2 –> Filament 2
Save parameters to
EEPROM
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x <CR><LF>
Transmit:
SAV [,x] <CR>[<LF>]
│
└─ x = 0 –> Save default
parameters
1 –> Save user parameters
Receive:
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<ACK><CR><LF>
69
Pirani range
extension
Transmit:
PRE [,x] <CR>[<LF>]
│
└─ x = 0 –> off (default)
1 –> on
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
x <CR><LF>
PSG and PCG gauges only, measurement
range up to 5×10-5 mbar.
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5.2.3 Test Mode
Firmware version
(For service specialists)
Transmit:
PNR <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
xxx-xxx-x <CR><LF>
│
│
│
└─ -x = Modification index
│
(-- = original version)
│
└─ Firmware number
Watchdog control
Transmit:
WDT [,x] <CR>[<LF>]
│
└─ x = 0 –> Manual error
acknowledgement
1 –> Automatic error
acknowledgement
(default)
1)
1)
If the watchdog has responded, the error is automatically acknowledged and cancelled after 2 s.
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Watchdog control
Torr lock
Transmit:
TLC [,x] <CR>[<LF>]
│
└─ x = 0 –> off (default)
1 –> on
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Torr lock status
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71
Parameter setup lock
Transmit:
LOC [,x] <CR>[<LF>]
│
└─ x = 0 –> off (default)
1 –> on
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Parameter setup lock status
RAM test
Transmit:
TRA <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ> Starts the test (duration <1 s)
Receive:
xxxx <CR><LF>
│
└─ ERROR word
EPROM test
Transmit:
TEP <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ> Starts the test (duration ≈10 s)
Receive:
xxxx,xxxx <CR><LF>
│
│
│
└─ Check sum (hex)
│
└─ ERROR word
EEPROM test
Transmit:
TEE <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ> Starts the test (duration <1 s)
Do not keep repeating the test (EEPROM life).
Receive:
xxxx <CR><LF>
│
└─ ERROR word
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Display test
Transmit:
TDI [,x] <CR>[<LF>]
│
└─ x = 0 –> Stops the test – display
according to current
operating mode
(default)
1 –> Starts the test – all
LEDs on
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ Display test status
ADC test
Transmit:
TAD <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
[x]x.xxxx, x.xxxx, x.xxxx <CR><LF>
│
│
│
│
│
└─ ADC channel 2
│
│
Gauge
│
│
identification
│
│
[0.0000 …
│
│
5.0000 V]
│
│
│
└─ ADC channel 1
│
Measurement signal
│
(negative portion)
│
[0.0000 … 5.0000 V]
│
└─ ADC channel 0
Measurement signal (positive
portion) [0.0000 … 11.0000 V]
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73
I/O test
Transmit:
TIO [,x] <CR>[<LF>]
│
└─ x =
0 –> Stops the test (default)
1 –> Setpoint relay off,
error relay off
2 –> Setpoint relay on,
error relay off
3 –> Setpoint relay off,
error relay on
4 –> Setpoint relay on,
error relay on
Receive:
Transmit:
Receive:
<ACK><CR><LF>
<ENQ>
x <CR><LF>
│
└─ I/O test status
Operator key test
Transmit:
TKB <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ>
Receive:
xxx <CR><LF>
│││
││└─ Key 3
││
││
│└── Key 2
│
└─── Key 1
RS232 test
x=
0 –> Not pushed
1 –> Pushed
para
Transmit:
TRS <CR>[<LF>]
Receive:
Transmit:
<ACK><CR><LF>
<ENQ> Starts the test (repeats each
character, test is interrupted
with <CTRL> C).
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5.2.4 Example
"Transmit (T)" and "Receive (R)" are related to the host.
T:
R:
T:
R:
TID <CR> [<LF>]
<ACK> <CR> <LF>
<ENQ>
PSG <CR> <LF>
T: SP1 <CR> [<LF>]
R: <ACK> <CR> <LF>
T: <ENQ>
R: 1.0000E-09,9.0000E-07 <CR> <LF>
T: SP1,6.80E-3,9.80E-3 <CR> [<LF>]
R: <ACK> <CR> <LF>
T: FOL,2 <CR> [<LF>]
Request for gauge identification
Positive acknowledgement
Request for data transmission
Gauge identification
Request for parameters of
switching function (setpoint)
Positive acknowledgement
Request for data transmission
Thresholds
Modification of threshold values of
switching function (setpoint)
Positive acknowledgement
R:
T:
R:
T:
R:
T:
R:
<NAK> <CR> <LF>
<ENQ>
0001 <CR> <LF>
FIL,2 <CR> [<LF>]
<ACK> <CR> <LF>
<ENQ>
2 <CR> <LF>
Modification of filter time constant
(syntax error)
Negative acknowledgement
Request for data transmission
ERROR word
Modification of filter time constant
Positive acknowledgement
Request for data transmission
Filter time constant
T:
R:
T:
R:
T:
R:
PR1 <CR> [<LF>]
<ACK> <CR> <LF>
<ENQ>
0,8.3400E-03 <CR> <LF>
<ENQ>
1,8.0000E-04 <CR> <LF>
Request for measurement data
Positive acknowledgement
Request for data transmission
Status and pressure
Request for data transmission
Status and pressure
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75
6 Maintenance
The product requires no maintenance.
Cleaning the VGC401
For cleaning the outside of the VGC401, a slightly moist
cloth will usually do. Do not use any aggressive or
scouring cleaning agents.
DANGER
DANGER: mains voltage
Contact with live parts is extremely hazardous
when liquids penetrate into the unit.
Make sure no liquids penetrate into the
equipment.
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7 Troubleshooting
Signalization of errors
and the error relay opens (→ 24).
Error messages
Possible cause and remedy/
acknowledgement
Parameter setup lock activated
(→ 50).
Possible cause and remedy/
acknowledgement
Interruption or instability in sensor line
or connector (Sensor error).
Ö Acknowledge with the
If the problem persists,
is displayed
para
key.
or
Possible cause and remedy/
acknowledgement
Error messages concerning BPG, BAG
and HPG.
Meaning → [6], [7], [8], [14].
0 = no communication to the gauge
1…9 = High-Byte of Error-Byte
(BPG400, HPG)
1…6 = Error status (BAG)
Possible cause and remedy/
acknowledgement
Error messages concerning BCG and
BPG402.
Meaning → [15], [21].
xx = Error byte (HEX)
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77
Possible cause and remedy/
acknowledgement
The VGC401 has been turned on too
fast after power off.
Ö Acknowledge with the
para
1)
key
.
The watchdog has tripped because of
a severe electric disturbance or an
operating system error.
Ö Acknowledge with the
1)
para
1)
key
.
If the watchdog is set to
, the VGC401
acknowledges the message automatically after 2 s
(→ 49).
Possible cause and remedy/
acknowledgement
Main memory (RAM) error.
Ö Acknowledge with the
para
key.
Possible cause and remedy/
acknowledgement
Program memory (EPROM) error.
Ö Acknowledge with the
para
key.
Possible cause and remedy/
acknowledgement
Parameter memory (EEPROM) error.
Ö Acknowledge with the
para
key.
Possible cause and remedy/
acknowledgement
Display driver error.
Ö Acknowledge with the
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(2011-07)
VGC401.om
Possible cause and remedy/
acknowledgement
A/D converter error.
Ö Acknowledge with the
para
key.
Possible cause and remedy/
acknowledgement
Operating system (Task Fail) error.
Ö Acknowledge with the
para
key.
Technical support
If the problem persists after the message has been
acknowledged for several times and/or the gauge
has been exchanged, please contact your local
INFICON service center.
8 Repair
Return defective products to your local INFICON service
center for repair.
INFICON assumes no liability and the warranty becomes
null and void if repair work is carried out by the end-user
or third parties.
9 Accessories
Ordering
number
Adapter panel for installation into a 19"
rack chassis adapter, height 3 U
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398-499
79
10 Storage
Caution
Caution: electronic component
Inappropriate storage (static electricity, humidity etc.) can damage electronic components.
Store the product in a bag or container. Observe the corresponding specifications in the
technical data (→ 9).
11 Disposal
WARNING
WARNING: substances detrimental to the
environment
Products or parts thereof (mechanical and
electric components, operating fluids etc.)
can be detrimental to the environment.
Dispose of such substances in accordance
with the relevant local regulations.
Separating the
components
80
After disassembling the product, separate its components according to the following criteria:
Non-electronic
components
Such components must be separated according to their
materials and recycled.
Electronic
components
Such components must be separated according to their
materials and recycled.
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Appendix
A:
Conversion Tables
Weights
kg
kg
1
lb
2.205
slug
68.522×10-3
lb
slug
oz
oz
35.274
0.454
1
31.081×10-3
16
14.594
32.174
1
514.785
28.349×10-3
62.5×10-3
1.943×10-3
1
bar
10×10-6
mbar
10×10-3
Torr
7.5×10-3
at
9.869×10-6
0.987
Pressures
N/m2, Pa
N/m2, Pa
1
bar
100×103
1
103
750.062
mbar
100
10-3
1
750.062×10-3
0.987×10-3
Torr
133.322
1.333×10-3
1.333
1
1.316×10-3
at
101.325×103
1.013
1.013×103
760
1
mmWs
10.2
psi
14.504×10-3
Pressure units used in
the vacuum technology
mbar
mbar
1
Pascal
100
Torr
750.062×10-3
Pascal
10×10-3
1
7.5×10
0.102
0.145×10
Torr
1.333
133.322
1
13.595
19.337×10-3
mmWs
9.81×10
psi
68.948
-2
-3
-3
9.81
7.356×10-2
1
1.422×10-3
6.895×103
51.715
703
1
mm
1
103
25.4
304.8
m
10-3
1
25.4×10-3
0.305
inch
39.37×10-3
39.37
1
12
ft
3.281×10-3
3.281
8.333×10-2
1
Kelvin
Kelvin
1
Celsius
°C+273.15
Fahrenheit
(°F+459.67)×5/9
Celsius
K-273.15
1
5/9×°F-17.778
Fahrenheit
9/5×K-459.67
9/5×(°C+17.778)
1
Linear measures
mm
m
inch
ft
Temperature
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81
B:
Default Parameters
The following values are activated when the default
parameters are loaded (→ 33):
Default
User
oFF
5×10-4 mbar
1×103 mbar
1000 Torr
oFF
mbar
1.00
nor
oFF
2 Digits
9600
oFF
Auto
oFF
oFF
Auto
Auto
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C:
Firmware Update
If your VGC401 firmware needs updating, e.g. for
implementing a new gauge type, please download
it from our website (www.inficon.com) or contact
your local INFICON service center.
User parameters
Most of the settings you may have defined in the Parameter and Test mode will not be affected by a firmware update. To be sure, note your parameter settings
before upgrading the firmware (→ 82).
Preparing the VGC401
for a program transfer
n
o
p
Turn the VGC401 off
Connect the VGC401 with the serial COM1
(COM2) interface of your PC via a 9-pin D-Sub
extension cable (the firmware of the VGC401 cannot be loaded from a Mac).
PC
VGC401
Screening
Screening
RXD
2 TXD
TXD
3 RXD
GND
5 GND
With a pin (ø<2 mm) depress the switch behind
the rear panel and turn the VGC401 on.
After power on, the display remains dark.
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83
Program transfer
In the following instructions, the index
of the actual index.
n
o
is used instead
Unpack the self extracting file *.exe or the packed
file *.zip.
If you have not connected the VGC401 to the
COM1 interface:
Open the batch file *.bat …
… edit the interface …
… and save the new setting.
p
Start batch file *.bat.
Ö The new firmware is transmitted to the VGC401.
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Starting the VGC401
with the updated firmware
If the program transfer was successful, quit the Update
mode by turning the VGC401 off.
Wait at least 10 s before turning the VGC401
on again in order for it to correctly initialize
itself.
The VGC401 is now ready for operation. To be
sure, check that the current parameter settings are
identical with the previously defined settings
(→ 82).
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85
D:
86
Literature
[1]
www.inficon.com
Operating Manual
Pirani Standard Gauge PSG400, PSG400-S
tina04e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2]
www.inficon.com
Operating Manual
Compact Pirani Gauge
PSG500/-S, PSG502-S, PSG510-S,
PSG512-S
tina44e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3]
www.inficon.com
Operating Manual
Pirani Standard Gauge PSG100-S, PSG101-S
tina17e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4]
www.inficon.com
Operating Manual
Pirani Standard Gauge
PSG550, PSG552, PSG554
tina60e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[5]
www.inficon.com
Operating Manual
Penning Gauge PEG100
tina14e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[6]
www.inficon.com
Operating Manual
Bayard-Alpert Pirani Gauge BPG400
tina03e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[7]
www.inficon.com
Operating Manual
Bayard-Alpert Gauge BAG100-S
tina06e1
Inficon AG, LI–9496 Balzers, Liechtenstein
[8]
www.inficon.com
Operating Manual
Bayard-Alpert Gauge BAG101-S
tina11e1
INFICON AG, LI–9496 Balzers, Liechtenstein
tinb01e1-f
(2011-07)
VGC401.om
[9]
www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge CDG025
tina01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[10]
www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge
CDG045, CDG045-H
tina07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[11]
www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge CDG100
tina08e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[12]
www.inficon.com
Operating Manual
Pirani Capacitance Diaphragm Gauge
PCG400, PCG400-S
tina28e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[13] www.inficon.com
Operating Manual
Pirani Capacitance Diaphragm Gauge
PCG550, PCG552, PCG554
tina56e1
INFICON AG, LI–9496 Balzers, Liechtenstein
tinb01e1-f
(2011-07)
VGC401.om
[14]
www.inficon.com
Operating Manual
High Pressure / Pirani Gauge
HPG400
tina31e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[15]
www.inficon.com
Operating Manual
TripleGauge™ BCG450
tina40e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[16]
www.inficon.com
Operating Manual
Inverted Magnetron Pirani Gauge
MPG400, MPG401
tina48e1
INFICON AG, LI–9496 Balzers, Liechtenstein
87
[17]
www.inficon.com
Operating Manual
Bayard-Alpert Pirani Gauge BPG402
tina46e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[18] www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge CDG025D
tina49e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[19] www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge CDG045D
tina51e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[20] www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge CDG100D
tina52e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[21] www.inficon.com
Operating Manual
Capacitance Diaphragm Gauge
CDG160D, CDG200D
tina53e1
INFICON AG, LI–9496 Balzers, Liechtenstein
88
tinb01e1-f
(2011-07)
VGC401.om
A/D converter test
Accessories
Baud rate
E: Index
52
79
44
Calibration factor → Correction
factor
Cleaning
76
Communication
Example
75
Mnemonics
59
RS232C55
Connectors
CONTROL
23
mains power
20
RS232
25
SENSOR
22
Contact positions
24
Contents
4
CONTROL connector
23
Conversion
81
Correction factor
41
Default parameters
82
Loading
33
Default settings
82
Degas
34
Display
resolution
44
Display test
52
Disposal
80
EEPROM
51
Emission on/off
45
EPROM test
51
Error messages
77
Factory settings
82
Filament
45
Filter
42
Firmware
update
83
version
2, 49
Front panel
26
display
26
operator keys
26
Full Scale
→ Measurement
range
Gauge
activation/deactivation
43
identification
30
Gauge connector
22
Gauge parameters
measurement value filter 42
Pirani range extension
46
tinb01e1-f
(2011-07)
VGC401.om
Gauges
General parameters
display resolution
pressure units
I/O test
Identification of the gauge
Installation
9
44
41
54
30
13
Interface
→ RS232C
Literature
86
Mains power connector
20
Maintenance
76
Measurement mode
displaying the gauge
identification 3
0
status messages
29
turning the gauge on/off
29
Measurement range
38
Measurement units
→ Pressure units
Measurement value filter
42
Mnemonics
→ Communication
Mode
→ Operating modes
Offset
38, 40
Operating modes
Measurement mode
28
overview
27
Parameter mode
31
Program transfer mode
83
Test mode
47
Operation
power off
27
power on
27
Parameter
40
Parameter mode
31
correction factor
41
degas
34
display resolution
44
measurement range
38
measurement value filter 42
offset
38
pressure units
41
switching thresholds
34
transmission rate
44
turning the gauge on/off
43
Parameter Mode
Emission on/off
45
Filament
45
Parameter setup lock
50
Pin assignment
CONTROL
24
RS232
25
SENSOR
23
89
Pirani range extension
Power connector
Power off
Power on
Pressure units
46
20
27
27
41
Program
→ Firmware
RAM test
50
Repair
79
RS232C
interface connector
25
Serial interface
25
Technical data
12
Test
54
Safety
6
Scope of Delivery
3
SENSOR connector
22
Serial interface
Status messages
Storage
Switching function
Symbols
Technical data
Test
90
→ RS232C
29
80
34
6
9
51
Test mode
A/D converter test
Display test
EPROM test
Firmware version
I/O test
parameter setup lock
RAM test
RS232C test
Torr lock
Watchdog
Thresholds
Torr lock
Transmission rate
Troubleshooting
Turning the gauge on/off
Units
Update
Warranty
Watchdog
52
52
51
49
54
50
50
54
50
49
34
50
44
77
29
→ Pressure units
83
8
49
tinb01e1-f
(2011-07)
VGC401.om
ETL Certification
ETL LISTED
The product VGC401 complies with the requirements of
the following Standards:
UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22
CAN/CSA C22.2#61010-1, Issued: 2004/07/12
3103457
tinb01e1-f
(2011-07)
VGC401.om
91
EC Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use
within certain voltage limits 2006/95/EC and the
Directive relating to electromagnetic compatibility
2004/108/EC.
Product
Single-Channel Controller
VGC401
Part number
398-010
Standards
Harmonized and international/national standards and
specifications:
• EN 61010-1:2001 (Safety requirements for electrical
equipment for measurement, control and laboratory use)
• EN 61000-3-2:2006 (EMC: limits for harmonic current
emissions)
• EN 61000-3-3:1995 + A1:2001 + A2:2005
(EMC: limitation of voltage changes, voltage fluctuations and
flicker)
• EN 61000-6-2:2005 (EMC: generic immunity standard)
• EN 61000-6-3:2007 (EMC: generic emission standard)
Signatures
92
INFICON AG, Balzers
28 November 2008
28 November 2008
Dr. Urs Wälchli
Managing Director
Markus Truniger
Product Manager
tinb01e1-f
(2011-07)
VGC401.om
tinb01e1-f
(2011-07)
VGC401.om
93
Original: German tinb01d1-f (2011-07)
t i nb01e1- f
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
[email protected]
www.inficon.com