ProbeStation
ProbeStation
Accessory Catalog
Cascade Microtech
otech offers a complete set
of accessories
s to enhance the productivity
and capabilityy of your probe station.
Precision measurement capability does
not end with the probe and probe station.
We offer a complete set of accessories to
allow you to position, navigate, determine
signal fidelity, and contact the wafer or
device under test.
Contents
Board Test Systems ............................................................................................................ 1
Positioners, Mounts and Accessories ................................................................................................1
134-422, 134-423 — Multi-Orientation Positioners.............................................................................1
106-564 — Variable Pitch Mount..........................................................................................................1
EZ-PROBE — EZ-Probe Positioner......................................................................................................1
FPD-100 — Fine Pitch Dual-Armed Positioners .................................................................................1
141-050 — Portable Vacuum System...................................................................................................2
SQ-132-667-01 — Vacuum Mount Gantry Top Plate ...........................................................................2
131-906 — Vacuum Mount Spacer Block.............................................................................................2
134-420 — Vacuum Base Board Clamp ...............................................................................................2
134-421 — Vacuum Base PCB Bottom Support ..................................................................................2
129-691 — Vacuum Based Auxiliary Chuck .........................................................................................3
SQ-115-330-03 — Removable 6-inch Pedestal Wafer Chuck .............................................................3
M150-ACC-16 — Magnetic Cable Clamp Kit........................................................................................3
005-018 — Contact Substrate ..............................................................................................................3
142-171 — WinCal XE Software ...........................................................................................................3
125-058 — Video Monitor .....................................................................................................................4
SQ-129-032-01 — Bottom Side Viewing Camera Kit ...........................................................................4
142-032 — Vibration Isolation Table for BTS Packages ......................................................................4
142-033 — Deluxe Vibration Isolation Table for BTS Packages..........................................................4
Consult factory for PN — Dark Box/Vibration Isolation Table for BTS 1000/2000 .............................4
Cryogenic and Vacuum ........................................................................................................ 5
Cryogenic Accessories ......................................................................................................................5
49827 — LN2 Transport Dewar, 120l ...................................................................................................5
51113 — LHe Transport Dewar 120l ....................................................................................................5
PMC200 Wafer Carriers .....................................................................................................................6
136397 — Universal Carrier, PMC200..................................................................................................6
128027 — Wafer Carrier, 200 mm, PMC200 ........................................................................................6
130474 — Wafer Carrier, 150 mm, PMC200 ........................................................................................6
130476 — Wafer Carrier, 100 mm, PMC200 ........................................................................................6
133758 — Substrate Holder, 4K, PMC200............................................................................................7
PMV200 Wafer Carriers .....................................................................................................................8
144072 — Universal Carrier, PMV200 ..................................................................................................8
142361 — Wafer Carrier, 200 mm, HF-Ready, PMV200 ......................................................................8
142365 — Wafer Carrier, 150 mm, HF-Ready, PMV200 ......................................................................8
144078 — Wafer Carrier, 100 mm, HF-Ready, PMV200 ......................................................................8
PLV50 Wafer Carriers ........................................................................................................................9
140971 — Universal Carrier, PLV50.....................................................................................................9
141246 — Universal Carrier, PLV50, 300° ...........................................................................................9
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Contents • i
141246 — Universal Carrier, HF-Ready, PLV50 ..................................................................................9
147917 — Wafer Carrier, 100 mm, PLV50 ...........................................................................................9
Test Interface Feedthroughs ........................................................................................................... 10
141257— Vacuum Rotary Feedthrough for VCP110 ..........................................................................10
137196— Triax High-Vacuum Feedthrough, DN100 ISO-K ...............................................................10
137495 — High-Vacuum 4x-HF Feedthrough, DN50KF 40GHz 2.92 .................................................10
141182— SMA 50 Ohm Feedthrough, DN50 KF .................................................................................10
137998 — Two SUB-D (50 PIN) Electrical Feedthrough on DN100 HV Flange .................................10
Miscellaneous Cryogenic and Vacuum System Accessories ............................................................ 11
49906 — HF Precision Cable, PC-2.4 50GHz/0.8m with Right Angle Plug Male/Male .....................11
DC Cables, Adapters and Replaceable Probe Tips ............................................................. 12
Replaceable Probe Tips ................................................................................................................... 12
DCP Replacement Tips.......................................................................................................................12
109-946— DCP-HTR ...........................................................................................................................12
DCP-HTR (HTS) & AttoGuard .............................................................................................................12
138-020 — Edge Sense Single Blade Ceramic Needle......................................................................12
PTT Probe Tips ...................................................................................................................................13
PTS 24-25 — Specialty Probe Tip, Osmium .......................................................................................13
PTS 24/4-25 — Specialty Probe Tip, Osmium, 45 degree..................................................................13
PTC-12-25 — Specialty Probe Tip, Tungsten Carbide .......................................................................13
DC/CV Triax/BNC Cables .................................................................................................................. 14
146-214 — Coax Cable, SMA to BNC, 61 cm......................................................................................14
138-019 — Cable, Edge Sense, SSMC to DCP-HTR, 2 m...................................................................14
103-775 — Cable, Edge Sense, SSMC to DCP-HTR, 2 m...................................................................14
104-330-LC — Triax Cable, Large to Small Triax Connector, Low Noise, 60 cm .............................14
104-334 — Triax Extension Cable, 53 cm ..........................................................................................14
104-365 — Coaxial Cable with BNC Connector .................................................................................14
105-001 — Bias Cable, 1.2 m, BNC to SMB Female ..........................................................................14
105-148— Interlock Cable for Agilent 4155-4156..............................................................................15
105-540 — BNC to SSMC Cable, 1 m .................................................................................................15
108-138— Triax Cable Large to Small Triax Connector, Low Noise, 1.8 m ......................................15
124-082 — Cable, Eye Pass, 1.2 m, Molex to BNC.............................................................................15
124-562 — BNC to SSMC Cable, 2 m .................................................................................................15
127-911— 42941 Holder and Cable, DPP2xx .....................................................................................15
132-909 — Triax Cable, large to Small Connector, PureLine, 60 cm ...............................................16
100751 — 50 Ohm Coax Cable for DPP105-x-AI 1.5m.......................................................................16
100805 — 50 Ohm Coax Cable for DPP105-x-AI 0.5m.......................................................................16
100697 — Probe Arm Extension, 70mm ............................................................................................16
100652 — Adapter DC RPP305-S .......................................................................................................16
DC/CV Adapters ............................................................................................................................... 17
104-341— Triax to BNC Adapter, Guard Shorted ..............................................................................17
104-342 — Triax Feed-Thru for Summit Triax Panel ........................................................................17
104-357— BNC Feed-Thru for Summit Triax Panel..........................................................................17
104-372— Ground Unit Adapter Kit ...................................................................................................17
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Contents • ii
104-740— Triax Shorting Plug ...........................................................................................................17
104-743— Triax EMI Cap ...................................................................................................................17
104-803— Triax to BNC Adapter, Guard Floated...............................................................................17
104-806— Triax Tee, Single Male to Dual Female.............................................................................17
104-810— DCP Mounting Block Kit ...................................................................................................18
105-931— EMI Cover for Triax Adapter Block ...................................................................................18
106-510 — BNC Shorting Plug...........................................................................................................18
106-560— Triax Adapter, Female to Female.....................................................................................18
106-837— Triax to BNC Adapter, Guard Thru, No Shield..................................................................18
108-714—Adapter BNC Female to Triax Male, Guard Short.............................................................18
108-715— Adapter, BNC to BNC Coupler..........................................................................................18
108-716— Adapter, BNC Male to Triax Female, Guard Short ...........................................................19
108-718— Adapter, BNC Tee, Female-Male-Female........................................................................19
126-985 — Kit, DCP to DCP Connection Strap...................................................................................19
123-625— DCP to DCP Guard Connection Strap ...............................................................................19
Cable/Pin Jack Wires for MMP and MPC Probe Holders/Mounts ..................................................... 20
Cable/Pin Jack Wires for MMP and MPC Probe Holders/Mounts ....................................................20
Elite 300 ............................................................................................................................ 21
Station Accessories ......................................................................................................................... 21
Connection Panels ........................................................................................................................... 21
141-790 —Connection Panel ..............................................................................................................21
Monitors ........................................................................................................................................... 21
144-350 — Dual LCD Monitor .............................................................................................................21
Accessory Shelves ........................................................................................................................... 22
144-340 — Side Accessory Shelf Kit...................................................................................................22
143-420 — Rear Instrument Shelf System ........................................................................................22
Seismic Restraints ........................................................................................................................... 23
141-418 — Seismic Restraints ...........................................................................................................23
Mounting Kits and Plates ................................................................................................................. 23
143-428 — Agilent 42941 Mounting Kit ..............................................................................................23
143-429 — Mounting Plate for B1500A SCUU ...................................................................................23
144-422 — Mounting Plate for B1500A ASU, E5288A Atto Sense Unit..............................................24
Lab Accessories and Miscellaneous .................................................................................. 25
Tables .............................................................................................................................................. 25
117931 — SE1200 EMC Adapter for VIT951/PA300............................................................................25
115405 — Vibration Isolation Table, VIT801 .......................................................................................25
135100 — Vibration Isolation Table, VIT701 .......................................................................................25
138815 — Probe Station Table 700 ....................................................................................................25
49210 — Vibration Isolation Platform VIP600 ....................................................................................26
142-032 — Vibration Isolation Table, STANDARD for 200 mm Stations, 40-inch x 40-inch .............26
142-033 — Vibration Isolation Table, DELUX Package for 200 mm Stations....................................26
143-567 — Side Instrument Shelf for Table ......................................................................................26
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Contents • iii
Shield Enclosures/Dark Boxes ........................................................................................................ 27
138121 — ShieldEnclosure, SE1000 EMC with Interlock and Illumination.......................................27
111650 — ShieldEnclosure, SE1200 EMC ..........................................................................................27
130359 — ShieldEnclosure SE750/EMC ............................................................................................27
100689 — EMC Light-Tight Feedthrough...........................................................................................27
141-588 — Dark Box, Elite 300...........................................................................................................28
Mounting Accessories ..................................................................................................................... 29
138846 — Control Console .................................................................................................................29
142-026 — LCD, Keyboard, Joystick and Mouse Mounting Kit for Vibration Isolation Table ...........29
Test Equipment ............................................................................................................................... 30
112391 — EMC Test Equipment Interface, Kelvin .............................................................................30
112392 — EMC Test Equipment Interface, Standard ........................................................................30
Miscellaneous Accessories ............................................................................................................. 31
140348 — Air Drying Unit ...................................................................................................................31
100422 — Textool Socket Adapter .....................................................................................................31
100539 — Vacuum Switches for HF Chuck ........................................................................................31
100605 — Inker, DPP2xx/DPP3xx ......................................................................................................31
145530 — Inker Cartridge, Markem 6990 ..........................................................................................31
M150-ACC-13 — Vacuum Manifold, Magnetic Base..........................................................................31
M150-ACC-16 — Magnetic Cable Clamp Kit......................................................................................32
M150-ACC-18 — Pin to Banana Interface Kit ....................................................................................32
M150-ACC-19 — Triax Panel, Magnetic Base ...................................................................................32
M150-ACC-28 — Coax Panel, Magnetic Base....................................................................................32
Manual Stations ................................................................................................................ 33
PM300, PM8, EP6, PM5 Power ......................................................................................................... 33
PM300 .............................................................................................................................................. 33
133270 — Additional Chuck for 2 Substrates, PM300........................................................................33
PM8 .................................................................................................................................................. 33
100507 — Supply Kit for Vacuum Adapter..........................................................................................33
EP6 ................................................................................................................................................... 33
142298 — Triaxial Option for EP6 DC .................................................................................................33
PM5 Power System .......................................................................................................................... 33
146083 — Sigma for B1505A/SE.........................................................................................................33
146151 — Mounting B1505A/Module Selector/SE.............................................................................34
MEMS ................................................................................................................................ 35
Pressure Probe Modules and Probes .............................................................................................. 35
133390 — Pressure Probe Module ....................................................................................................35
126496 — Pressure Probe Module (PPM) Classic.............................................................................35
126480 — Pressure Probe Module (PPM) Temperature-Control .....................................................35
131731 — Pressure Probe Module (PPM) Probe...............................................................................35
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Contents • iv
PPM Differential Kits ....................................................................................................................... 36
125471 — PPM Differential Kit, 100 mm............................................................................................36
126483 — PPM Differential Kit, TC, 100 mm .....................................................................................36
126501 — PPM Differential Kit, 150 mm............................................................................................36
Microscopes ...................................................................................................................... 37
Elite 300 Microscopes ...................................................................................................................... 37
143-416 — Seiwa Microscope with Accessory Kit .............................................................................37
143-417 — Seiwa Microscope for IR Lasers with Accessory Kit .......................................................37
144-287 — Seiwa Microscope, Tilt Head, with Accessory Kit............................................................38
143-414 — A-Zoom2 10X Video Out, Manual Zoom and Eyepieces ...................................................38
143-415 — A-Zoom2 40X Video Out, Digital Zoom, Eyepieces, Remote Focus, Laser Ready...........39
151-521 — eVue-III Digital Imaging System, 10X, Remote Focus .....................................................39
151-531 — eVue-III Digital Imaging System, 10X Remote Focus, Pro Pkg .......................................40
151-541 — eVue-III Digital Imaging System, 40X Remote Focus ......................................................40
151-551 — eVue-III Digital Imaging System, 40X Remote Focus, Pro Pkg .......................................41
Standard Microscopes with Focus Blocks ....................................................................................... 42
144-286 — Seiwa Microscope, Tilt Head, with Accessory Kit............................................................42
120-987 — A-Zoom2 (10X) Microscope, Video Out, Manual Zoom and Eyepieces ............................42
122-009 — A-Zoom2 40X Video Out, Dig Zm, PC Ctrl/SW, Eyepcs, Remote Focus, Laser Ready ....43
131-964 — eVue-III Digital Image System, Pro Package Upgrade....................................................43
151-522 — eVue-III Digital Imaging System, 10X Remote Focus ......................................................43
151-532 — eVue-III Digital Imaging System, 10X Remote Focus, Pro Package ...............................44
151-523 — eVue-III Digital Imaging System, 10X Remote Focus for Manual Stations .....................44
151-533 — eVue-III Digital Imaging System, 10X Remote Focus Pro Pkg for Manual Stations.......45
151-542 — eVue-III Digital Imaging System, 40X Remote Focus ......................................................45
151-552 — eVue-III Digital Imaging System, 40X Remote Focus Pro Package ................................46
151-543 — eVue-III Digital Imaging System, 40X Remote Focus for Manual Stations .....................46
151-553 — eVue-III Dig Imaging System, 40X Remote Focus Pro Package for Manual Stations ....47
131-954 — eVue Digital Imaging System, Intelligent Objective Lens Mount ....................................47
131-785 — Leica S6 Stereo Zoom Microscope Kit, 0.63 - 4.0 X Zoom...............................................47
132-770 — Leica S8 APO StereoZm Microscope Kit, Wide FOV, MTS Stations, Video Ready ...........48
131-780 — Leica S8 Stereo Zoom Microscope Kit, 1.0 - 8.0 X Zoom, Video-Ready ..........................48
VMS-70L — Mitutoyo Finescope FS-70 for IR Lasers, Obj., 10X Eyepcs, Fiber Optic Illuminator ....49
VMS-70Z — Mitutoyo Finescope FS-70, Objectives, 10X Eyepcs, Fiber Optic Illuminator................49
VMS-70LP — Mitutoyo Finescope FS-70 for IR Lasers, Obj, 10X Eyepcs, Fiber Optic Illuminator...50
VMS-70ZP — Mitutoyo Finescope FS-70, Objectives, 10X Eyepieces, Fiber Optic Illuminator.........50
VMS-888L — Seiwa Microscope for IR Lasers with Manual Focus and Accessory Kit.....................51
VMS-888LP — Seiwa Microscope for IR Lasers with Programmable Focus and Accessory Kit......51
VMS-888 — Seiwa Microscope with Manual Focus and Accessory Kit .............................................52
VMS-888P — Seiwa Microscope with Programmable Focus and Accessory Kit ..............................52
Microscopes and Microscope Adapters ........................................................................................... 53
66529 — Motic Stereozoom Microscope, SMZ-168 ...........................................................................53
142811 — Stereo Zoom Microscope, SMZ168....................................................................................53
132712 — Microscope Adapter, Optem..............................................................................................53
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Contents • v
111486 — Microscope Adapter, A-Zoom and Motic PSM-1000/229..................................................53
142730 — Microscope Adapter, Motic SMZ-168/229 ........................................................................53
120586 — Microscope Adapter, Mitutoyo FS70x-S/229.....................................................................53
120103 — Microscope Adapter, Optem/229 ......................................................................................53
133915 — Microscope Adapter, Olympus SZ2-STP/229 ....................................................................53
Microscope Objectives/Eye Pieces .................................................................................................. 54
120-873 — A-Zoom2 Objective, 10X, 19 mm Working Distance (.45 N.A.), Tophat Compatible .......54
120-875 — A-Zoom2 Objective, 5X,33 mm working distance (.225 N.A.), Tophat Compatible .........54
132-509 — A-Zoom2 Objective, 20X, 13 mm, Working Distance (0.6N.A.), Tophat Compatible .......54
132-109 — Leica 0.63 Auxiliary Lens for S8 Leica Microscope .........................................................54
131-788 — Leica 25 X Eye Pieces, High Performance, Extended Relief for Leica Microscopes ......54
131-789 — 30x Eyepieces for Leica S6/S8 Microscopes ...................................................................54
VMA-60-96 — Mitutoyo Objective, 100X, 1 mm Working Distance (0.9 N.A.) ....................................54
VMA-60-99 — Mitutoyo Objective, 100X, 6 mm Working Distance (0.7 N.A.) ....................................55
102-517 — Mitutoyo Objective, 10X, 33.5 mm Working Distance (0.28 N.A.) ....................................55
115-246 — Mitutoyo Objective, 200X, 13 mm Working Distance (0.62 N.A.) .....................................55
102-518 — Mitutoyo Objective, 20X, 20 mm Working Distance (0.42 N.A.) .......................................55
102-516 — Mitutoyo Objective, 2X, 34 mm Working Distance (0.055 N.A.) .......................................55
VMA-60-50 — Mitutoyo Objective, 50X,13 mm Working Distance (0.55 N.A.) ...................................56
102-293 — Mitutoyo Objective, 50X, 20.5 mm Working Distance (0.42 N.A.) ....................................56
106-762 — Mitutoyo Objective, 5X, 34 mm Working Distance (0.14 N.A.) .........................................56
VMA-60-97 — Mitutoyo Objective, NIR100X, 12 mm Working Distance, I.R. Passive (0.5 N.A.) .......56
VMA-60-52 — Mitutoyo Objective, NIR50X, 17 mm Working Distance, I.R. Passive (0.42 N.A.) .......57
VMA-60-95 — Mitutoyo Objective, NUV100X, 11 mm Working Distance, U.V. Passive .....................57
VMA-60-54 — Mitutoyo Objective, NUV50X, 15 mm Working Distance, U.V. Passive.......................57
VMA-60-98 — Mitutoyo Objective, SL100X, 13 mm Working Distance (0.55 N.A.) ............................57
VMA-60-80 — Mitutoyo Objective, SL80X, 15 mm Working Distance (0.5 N.A.)................................58
17967 — Objective 2x, WD 34.0 mm, Mitutoyo ...................................................................................58
17968 — Objective 5x, WD 34.0 mm, Mitutoyo ...................................................................................58
17969 — Objective 10x, WD 33.5 mm, Mitutoyo .................................................................................58
17980 — Objective SL20x / WD 30.5 mm, Mitutoyo............................................................................59
126-255 — Seiwa Objective, 2.5X, 32 mm Working Distance (0.06 N.A.) IR/Green...........................59
126-256 — Seiwa Objective, 5X, 35.1 mm Working Distance (0.15 N.A.) IR/Green...........................59
126-257 — Seiwa Objective, 10X, 36.9 mm Working Distance (0.25 N.A.) IR/Green .........................59
126-258 — Seiwa Objective, 20X, 22 mm Working Distance (0.40 N.A.) IR/Green (..........................59
Microscope Accessories .................................................................................................................. 60
67120 — Moticam 2300 CMOS Camera .............................................................................................60
122-526 — A-Zoom Microscopes, Programmable 2-inch Heavy-Duty Focus Block ........................60
106-763 — A-Zoom Mitutoyo Objective Mount...................................................................................60
102-363 — Mitutoyo Video Adapter, 1.0X Magnification ....................................................................60
101-454 — Spare Bulb for Mitutoyo, A-Zoom, Video-Ready Olympus and Optem Illuminators ......60
Optical ............................................................................................................................... 61
Integrating Sphere and Mounts ....................................................................................................... 61
53541 — Integrating Sphere, Zenith ..................................................................................................61
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Contents • vi
139085 — Optical Fiber Mount, RPP305 ............................................................................................61
139086 — Integrating Sphere Mount, RPP305 ..................................................................................61
134826 — Integrating Sphere Mount, Mitutoyo FS70 ........................................................................61
PA200 ............................................................................................................................... 62
PA200 BlueRay ................................................................................................................................ 62
Chucks and Thermal Chuck Adapters ............................................................................................. 62
143820 — Chuck, 200 mm, HF, PA200A .............................................................................................62
143821 — Chuck, 200 mm, HF, AP200 ...............................................................................................62
139873 — Double Side Chuck Plate ...................................................................................................62
53551 — ATT Chuck System, A200HS, +15°C to +150°C ...................................................................62
138722 — Thermal Chuck Adapter ....................................................................................................62
138723 — Thermal Chuck Adapter for Chuck with Lift Pins .............................................................63
Accessories ...................................................................................................................................... 63
138390 — SE1000 to VIT700/701 Adapter...........................................................................................63
138651 — Pneumatic Switch Terminal ..............................................................................................63
133667 — Mount Arm for Monitor, Keyboard, Mouse, and Joystick .................................................63
136687 — Measuring Instrument Shelf for BlueRay .........................................................................64
133371 — Operation Lamp 3 Colors ..................................................................................................64
135080 — Adaptation Integrating Sphere 4-inch Manual..................................................................64
139985 — Adaptation Integrating Sphere 4-inch Motorized .............................................................64
PA300 Accessories ............................................................................................................ 65
PA300PS-MA ................................................................................................................................... 65
Sigma Kits ........................................................................................................................................ 65
127312—Sigma for Agilent 42941A, HF..............................................................................................65
131467—Sigma for Agilent E5288A ASU............................................................................................65
138183—Sigma for PreAmp Keithley 4200/6430 (up to 4).................................................................65
145265—Sigma for IV/CV....................................................................................................................65
Test Equipment Interfaces .............................................................................................................. 66
144987—Test Equipment Interface, Pico Probe (up to 2) ..................................................................66
145043—Test Equipment Interface, DPP450 for MicroAlign.............................................................66
145044—Test Equipment Interface, PH510 (up to 3) .........................................................................66
Accessories ...................................................................................................................................... 66
143123 — Vacuum Manifolds..............................................................................................................66
Positioners and Positioner Accessories ............................................................................ 67
DC Positioners ................................................................................................................................. 67
Entry Level ....................................................................................................................................... 67
DPP105-M/V-AI-S ...............................................................................................................................67
DPP105-M/V-PTH...............................................................................................................................67
Standard .......................................................................................................................................... 68
DPP205-M/V-L/R; DPP205-M/V-L/R-S ..............................................................................................68
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Contents • vii
DPP210-M/V-L/R; DPP210-M/V-L/R-S..............................................................................................68
DPP220-M/V-L/R; DPP220-M/V-L/R-S..............................................................................................69
High-End Failure Analysis (FA) Positioners .................................................................................... 70
DPP305-M/V-S; DPP305-M/V-PTH ....................................................................................................70
DPP310-M/V-S; DPP310-M/V-PTH ....................................................................................................70
DPP450-M/V-S; DPP450-M/V-PTH ....................................................................................................71
RF Positioners ................................................................................................................................. 72
Standard .......................................................................................................................................... 72
RPP210-M/V/B-L/R-S.........................................................................................................................72
RPP210-M/V/B-L/R-AI .......................................................................................................................72
RPP210-M/B-L-T-EW/NS-AI..............................................................................................................73
Advanced .......................................................................................................................................... 73
RPP305-M/V/B-S ................................................................................................................................73
RPP305-EW/NS-EL/SU-AI .................................................................................................................74
mmW and Motorized Positioners .................................................................................................... 75
Open Platform RF and Microwave Positioners ................................................................................ 75
129227 — PH350HF (2) .......................................................................................................................75
138230 — PH510 Motorized Positioner..............................................................................................75
Elite 300 RF and Microwave Positioners ......................................................................................... 75
141-779 — mmW Large Area Positioner (W) .....................................................................................75
141-778 — mmW Large Area Positioner (E)......................................................................................76
MS1-8-40 — RF Motorized Microwave Positioner (E/W) ...................................................................76
Summit RF and Microwave Positioners ........................................................................................... 77
MS1-8E — East Positioner, Programmable.......................................................................................77
MS1-8W — West Positioner, Programmable ....................................................................................77
133-528 — mmW Positioner, Manual, East Position .........................................................................78
133-525 — mmW Positioner, Manual, West Positioner ....................................................................78
Positioner Accessories .................................................................................................................... 79
DCM Positioner Accessories ............................................................................................................ 79
138-023 — Bracket for Keithley 4200-PA-1 for DPP2xx Positioner ..................................................79
RF Positioner Accessories ............................................................................................................... 79
107-088 — Bracket Mount for Bias Tee/Agilent E4991A Module, for RF Positioners.......................79
141-858 — FPC Mount for RF Positioners .........................................................................................79
Positioner Accessories for Open Platforms .................................................................................... 80
145034 — Easy Positioning System for DPP3xx-M-S ........................................................................80
115604 — Quarter Ring on HF Platen for DC Probes ........................................................................80
18129 — Plug, Female, HF-3 mm, Subminiature..............................................................................80
143098 — PH510 Positioner Adapter for HF Platen and RPP305-S Probe Arm...............................80
Cryogenic & Vacuum Positioners ..................................................................................................... 81
137197 — VCP110, DC Triax, Cryo, PMC200/PAC200 ........................................................................81
148722 — VCP110, DC Triax, Cryo, PMC200/PAC200 ........................................................................81
147160 — VCP110, HF East-West, Cryo, PMC200/PAC200 ...............................................................81
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Contents • viii
147061 — VCP110, HF North-South, Cryo, PMC200/PAC200............................................................81
137198 — VCP110, HF East-West, Cryo, PMC200/PAC200 ...............................................................81
137199 — VCP110, North-South, Cryo, PMC200/PAC200 .................................................................81
140967— VCP110, High Vacuum, DC Triax, PLV50 ............................................................................82
140968 — VCP110, High Vacuum, HF East-West, PLV50 ..................................................................82
140969 — VCP110, High Vacuum, HF Arm, North-South, PLV50......................................................82
Probe Card Holders/Adapters ........................................................................................... 83
Probe Card Adapters and Accessories ............................................................................................ 83
PA, PM, DSP ..................................................................................................................................... 83
100529 — Probe Card Adapter, 6x7-Inch ...........................................................................................83
129912 — Probe Card Adapter, 4x7-inch to 4x11-inch......................................................................83
PA300PS-MA .................................................................................................................................... 83
140436 — Probe Card Adapter, MicroAlign, 4.5-inch ........................................................................83
141449 — Celadon Adapter, MicroAlign ............................................................................................83
149400 — Probe Card Adapter, MicroAlign, 4.5-inch/4x 90° ............................................................84
140869 — Probe Card Adapter, ProbeShield, 6-inch ........................................................................84
Probe Card Adapter Accessories ..................................................................................................... 84
100651 — Insert for Probe Card Adapter ...........................................................................................84
51127 — Celadon Cable Harness.......................................................................................................84
Probe Card Holders and Accessories .............................................................................................. 85
Elite 300 ........................................................................................................................................... 85
151-293 — MicroChamber Probe Card Holder, HTS, 40 mm, Universal...........................................85
142-338 — MicroChamber Probe Card Holder..................................................................................86
141-861 — Probe Card Holder ...........................................................................................................87
Summit/S300 ................................................................................................................................... 87
110-367 — Probe Card Holder for 6-inch Round Cards ....................................................................87
114-338 — High Force Probe Card Holder ........................................................................................88
115-418 — High Force Probe Card Holder for MicroChamber .........................................................88
122-437 — Edge Connector Kit Probe Card Holders.........................................................................89
124-118 — Low-Profile Probe Card Holder for Summit Stations with MicroChamber....................89
138-022 — Clamp Kit for LLPC, in Low Profile Card Holder.............................................................90
Probe Mounts/Holders and Probes ................................................................................... 91
Probe Arms and Probes (S-Positioner Compatible) ........................................................................ 91
DC Probe Arms, DPP2xx/DPP3xx .................................................................................................... 91
100524 — Probe Arm, DPP2xx/DPP3xx, Edge Sensor .......................................................................91
100525 — Probe Arm, DPP2xx/DPP3xx, Triax ...................................................................................91
100560 — Probe Arm, DPP3xx, Coax, BNC........................................................................................91
100561 — Probe Arm, DPP2xx/DPP3xx, Coax, BNC..........................................................................91
100696 — Probe Arm, DPP2xx/DPP3xx, Kelvin, 1 Tip .......................................................................91
100715 — Probe Arm, DPP2xx/DPP3xx, Adjustable, Coax, BNC ......................................................91
144139 — Probe Arm, DPP2xx/DPP3xx, Flex, DCP Probes ..............................................................92
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Contents • ix
131844 — Probe Arm, DPP2xx/DPP3xx, Coax, High Temperature ...................................................92
RF Probe Arms, RPP210-S .............................................................................................................. 92
146041 — Probe Arm, RPP210-S, North-South, for Vacuum/Magnetic Platen ................................92
146042 — Probe Arm, RPP210-S, East-West, for Vacuum/Magnetic Plate......................................92
RF Probe Arms, RPP305 .................................................................................................................. 93
100624 — Probe Arm, RPP305, East-West, Mirrored........................................................................93
100647 — Probe Arm, RPP305, East..................................................................................................93
100648 — Probe Arm, RPP305, East-West........................................................................................93
100649 — Probe Arm, RPP305, North-South ....................................................................................93
118160 — Probe Arm, RPP305, West.................................................................................................93
DC Probe Arms, MicroAlign ............................................................................................................. 94
138687 — Probe Arm, DPP2xx/DPP3xx, Triax, MicroAlign................................................................94
138690 — Probe Arm, DPP2xx/DPP3xx, Triax, Kelvin 1Tip, MicroAlign ...........................................94
138697 — Adapter for Probe Arms DPP2xx/DPP3xx to Positioner DPP3xx .....................................94
138700 — Probe Arm, DPP2xx/DPP3xx, Pico Probe, MicroAlign......................................................94
144866 — Probe Arm, DPP2xx/DPP3xx for DCP Probe, MicroAlign .................................................94
RF Probe Arms, MicroAlign ............................................................................................................. 95
133302 — Probe Arm, RPP305, North-South, MicroAlign .................................................................95
133303 — Probe Arm, RPP305, East-West, MicroAlign ....................................................................95
134006 — Probe Arm, RPP305, East-West, MicroAlign ....................................................................95
144777 — Probe Arm, RPP210-S, East-West ....................................................................................95
144778 — Probe Arm, RPP210-S, North-South, MicroAlign.............................................................95
RF Probe Arms, PA200 BlueRay ...................................................................................................... 96
142139 — Probe Arm, RPP305-S East, Right, 2 Positioners, BlueRay..............................................96
142140 — Probe Arm, RPP305-S West, Left, 2 Positioners, BlueRay ...............................................96
142143 — Probe Arm, RPP305-S East-West, 4 Positioners, BlueRay...............................................96
142148— Probe Arm, RPP305-S North-South, 4 Positioners, BlueRay............................................96
Probe Arm, Optical Fiber ................................................................................................................. 96
145533 — Probe Arm, Optical Fiber 125 μm, DPP2xx........................................................................96
Probe Arms, PM5 Power Systems ................................................................................................... 97
145303 — Probe Holder Short ............................................................................................................97
144777 — Probe Arm, RPP210-S, East-West ....................................................................................97
Probes, PM5 Power Systems ........................................................................................................... 97
142693 — Probe 10 kV ........................................................................................................................97
145297 — Probe HV Triax / 3 kV.........................................................................................................97
145298 — Probe HV Coax / 3 kV .........................................................................................................98
145300 — Probe HV Triax / Kelvin / 3 kV............................................................................................98
145301 — Probe HV Coax / Kelvin / 3 kV............................................................................................98
145302 — Probe Coax / Kelvin ...........................................................................................................98
Probe Tips (Compatible with Positioner Probe Arms) ..................................................................... 99
AP&T Probe Tips .............................................................................................................................. 99
67045 — Probe Tip, AP&T, Kelvin, 5 μm.............................................................................................99
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Cascade Microtech, Inc
Contents • x
67055 — Replacement Tip, AP&T Probe, 5 μm..................................................................................99
70197 — Replacement Tip, AP&T Probe, 1.5 μm...............................................................................99
Elite 300 and Summit DC Probe Mounts and Holders .................................................................... 100
151-286 — DCP Probe Mount, 40 mm, HTS, Triax, MS1 Series ......................................................100
151-287 — DCP Probe Mount, 40 mm, HTS, Triax, DPP2xx ............................................................100
151-288 — DCP Probe Mount, 40 mm, HTS, DPP2xx ......................................................................100
151-289 — Needle Probe Mount and Enhanced Jack Lock Holder for DPP2xx Positioners..........101
151-290 — PTT Needle Probe Mount, 40 mm, HTS, Enhanced Jack Lock Holder, MS1 Series.....101
144-388 — Universal Probe Holder with Dovetail Adapter Kit........................................................101
144-389 — Universal Probe Holder with MS1 Adapter ...................................................................102
144-887 — Mount, Pico Probe, Stud Grip ........................................................................................102
Elite 300 and Summit DC Probes ................................................................................................... 103
144-392 — Unshielded Probe Kit .....................................................................................................103
139-331 — Coaxial Probe (Straight).................................................................................................103
139-870 — Coaxial Probe (Bent) ......................................................................................................103
144-390 — Triaxial Probe (Straight) ................................................................................................103
144-391 — Triaxial Probe (Bent) ......................................................................................................104
PHQ — Quick Lock Probe Holder.....................................................................................................104
PHW — Wrench Lock Probe Holder.................................................................................................104
Summit DC Probe Arms and Mounts .............................................................................................. 105
138-014 — Enhanced Jack Lock Needle Probe Holder for DPP2xx................................................105
104-030K — DCP Probe Mount, Dual Triax Adapter (Kelvin) for RPP305-EW-SU positioner ........105
104-856K — DCP Probe Mount, Dual Triax Adapter (Kelvin) for RPP305-NS-SU Positioner ........105
114-818 — DCP Probe Mount, Dual Triax Adapter (Kelvin) for DPP2xx .........................................105
114-843 — Needle Probe Mount and Jack Lock Holder for MS1 Series Positioners .....................106
114-847 — Needle Probe Mount and Jack Lock Holder for MH2 Positioners ................................106
115-596 — DCP Probe Mount, Dual Triax Adapter (Kelvin) for MS1 Series Positioners ................106
116-031 — DCP Probe Mount for DPP2xx, Direct Probe/Cable Conn (SSMC)................................106
129-116 — PTT Probe Mount (MMP-01/J) and Adapter Kit for DPP2xx..........................................107
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders ...................................................... 108
DCP-HTR — High Performance DC Probe Holder ..........................................................................108
DCP-105R — DC Coaxial Probe, Single Line, 0.5 μm Radius, Replaceable Tip ..............................108
DCP-115R — DC Coaxial Probe, Single Line, 1.5 μm Radius, Replaceable Tip ..............................109
DCP-150R — DC Coaxial Probe, Single Line, 5.0 μm, Replaceable Tip ..........................................109
DCP-150GPR-50 — DC Coaxial Probe with Ground Needle, 50 μm Pitch ......................................110
DCP-150K-25 — DC Coaxial Probe, Kelvin, 25 μm Pitch, 5.0 μm Tip Radius..................................110
DCP-150K-50 — DC Coaxial Probe, Kelvin, 50 μm Pitch, 5.0 μm Tip..............................................111
Summit ........................................................................................................................... 112
Optical Bridge Mounts and Transports .......................................................................................... 112
158-073 — Large Area Optics Bridge Mount ...................................................................................112
158-070 — High Stability Optics Bridge Mount (Manual 2x2)..........................................................112
115-416 — Low Power Optics Boom Stand .....................................................................................112
158-075 — High Stability Optics Bridge Mount (Motorized 2x2)......................................................112
131-923 — Motorized Theta Upgrade Kit (with 80 Pin Interconnect) ..............................................113
141-400 Probe Station Accessory Catalog
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Cascade Microtech, Inc
Contents • xi
131-924 — Motorized Theta Upgrade Kit for Summit 12K Stations (with 68 Pin Interconnect) .....113
Connection Panels (Coax, Triax, Pin jack, Banana Vacuum) ........................................................... 114
105-626 — Triax Connection Panel, Side Mount..............................................................................114
106-171 — Triax Connection Panel, Large Area Optical Bridge/Boom Stand Config.....................114
114-737 — Vacuum Manifold Kit, High Stability Optics Bridge .......................................................114
118-640 — Triax Connection Panel, High Stability Bridge Config, S300 .........................................114
134-710 — Triax Connection Panel, High Stability Bridge Config, Summit ....................................115
RAC-92 — Pin Jack to Banana Interface Panel, High Stability Optical Bridge ...............................115
RAC-96 — Pin Jack to Coax Interface Panel, High Stability Optical ...............................................115
Mounting Kits and Miscellaneous Accessories .............................................................................. 116
105-588 — Thermal Flow Meter Kit.................................................................................................116
106-889 — Dust Cover for Summit Systems ...................................................................................116
114-849 — Xandex Inker, 12V, with Ink Cartridges and DPP105-PTH Positioner Mount ...............116
116-441 — Enhanced RF Shielded MicroChamber TopHat Kit .......................................................116
116-511 — MicroChamber Large TopHat Upgrade Kit....................................................................116
116-512 — MicroChamber Large TopHat Objective Ring/Cover .....................................................116
133-492 —High Stability Bridge Mounting Bracket for Agilent E5288A Atto Sense Unit ...............117
135-038 — Mounting plate for B1500A SCUU (SMU-CMU Unit), High Stability Bridge Config.......117
Microscope Mounting Plates ......................................................................................................... 118
122-248 — Microscope Mounting Kit, eVue/A-Zoom2, Manual Transport, Large Area .................118
158-066 — Microscope Mounting Kit, eVue, A-Zoom2, Seiwa and Mitutoyo, Manual Transport, High
Stability .............................................................................................................................................118
158-064 — Microscope Mounting Kit, Leica, Manual Transport .....................................................118
122-246 — Microscope Mounting Kit, Manual Transport, Large Area............................................118
Tesla ............................................................................................................................... 119
Agilent Configuration .................................................................................................................... 119
Agilent Probes ............................................................................................................................... 119
HVP-3C — HV, Coaxial Probe with SHV Connection ........................................................................119
HVP-3C-E — HV, Coaxial Probe with SHV Connection ....................................................................119
HVP-3T — HV, Triax Probe with Agilent HV Triax Connection.........................................................120
HVP-3T-E — HV, Triax Probe with Agilent HV Triax Connection.....................................................120
HCP-BNC — HC Probe Holder with BNC Connection .....................................................................121
HCP-BNC-3-350 — HC Probe Holder with BNC Connection, 3-Finger, 350 μm Tip ......................121
Agilent Accessories ....................................................................................................................... 122
153-180 Chuck Cable, HV Chuck to Agilent HV Connector (m) for 40A High Current Test, 1.5m...122
153-190 BNC to Agilent HV Triax Adapter .......................................................................................122
148-651 — HV Adapter Box, 2 SHV (f) to 2 BNC (f)...........................................................................122
148-657 — BNC Tee, 1 BNC (m) to 2 BNC (f) ...................................................................................122
151-196 — SHV (f) to SHV (f) Adapter...............................................................................................122
148-658 — Agilent HV Triax Cable, (m - m) .....................................................................................123
148-659 — BNC Cable, 61 cm (m - m) .............................................................................................123
148-665 — HC BNC Cable, 61 cm (m - m) .......................................................................................123
148-668 — Mini Triax (m) to BNC (m) Cable, 60 cm ........................................................................123
148-669 — Agilent HV Triax (m) – SHV (m), 60 cm ..........................................................................123
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc
Contents • xii
148-670 — HC BNC Cable,1.5 m (m - m) .........................................................................................123
148-724 — SHV to 4-BNC Adapter Box 1 SHV (f), 1 BNC (m), 3 BNC (f)..........................................124
149-396 — Resistor Box, HV, 100 KΩ – HV Triax (f), SHV (f) ...........................................................124
149-397 — Resistor Box, HV, 1 KΩ – Triax (f - f).............................................................................124
149-398 — Resistor Box, HV, 1 KΩ – HV Triax (f), SHV (f)...............................................................124
149-445 — Test Head Plate Assembly .............................................................................................124
151-280 — HV Bulkhead Interconnect Panel...................................................................................124
151-466 — Tesla Bridge Mounting Kit for Agilent B1505A..............................................................125
151-467 — Tesla Interconnect Kit for Agilent B1505A (Excluding Probes and Positioners) ..........125
151-465 — Tesla Probes and Interconnect Accessory Kit for Agilent B1505A ...............................126
149-947 — SHV (m) to BNC (m) Cable, 60 cm..................................................................................126
149-958 — Agilent HV Triax (m) to Std Triax Cable (m),1.5 m.........................................................126
151-207 — SHV (m) to SHV (m) Cable, 60 cm ..................................................................................126
149-976 — High Voltage Chuck Floating Plug ................................................................................127
149-977 — High Voltage Chuck Shorting Plug ...............................................................................127
149-978 — Chuck Cable, High Voltage Chuck to Agilent High Voltage Connector (m), 1.5 m........127
149-981 — Chuck Cable, High Voltage Chuck to SHV Connector (f), 1.5 m ...................................127
151-256 — Chuck Cable, High Voltage Chuck Connector to BNC Connector (m), 1.5 m ...............127
Keithley Configuration ................................................................................................................... 128
Keithley Probes ............................................................................................................................. 128
HVP-13 — HV Triax Probe with CMI HV Triax Connection ...............................................................128
HVP-13-E — HV Triax Probe with CMI HV Triax Connection ...........................................................128
HCP-1-B — HC Probe Holder with Banana Jack Connections (no HCP tip)...................................129
HCP-3-350 — HC Probe Holder with Banana Plug Connections and HCP Tip ...............................129
Keithley Accessories ..................................................................................................................... 130
151-470 — HV Triax Interface Panel ................................................................................................130
151-471 — HC Banana & STD Triax Interface Panel .......................................................................130
144-526 — HV Triax Connector Cable, Interface Panel to HV Coax ................................................130
144-527 — HV Triax Connector Cable, Interface Panel to Keithley 237/238...................................131
151-468 — Tesla Probes and Interconnect Kit for Keithley instruments .......................................131
151-469 — Tesla Interconnect Kit for Keithley Instruments (Excluding Probes and Positioners) 132
151-472 — Safety interlock Cable, 3 m............................................................................................132
Iwatsu Configuration ..................................................................................................................... 133
Iwatsu Accessories ........................................................................................................................ 133
149-967 — Iwatsu Curve Tracer Interface Insert Unit, Agilent HV Triax Connector .......................133
149-971 — Iwatsu Curve Tracer Interface Insert Unit, BNC Connector .........................................133
149-973 — Iwatsu Curve Tracer Interface Insert Unit, Std Triax Connector ..................................133
151-258 — Iwatsu Curve Tracer Interface Insert Unit, CMI HV Triax Connector............................133
151-260 — Iwatsu CT-3000 Series Interface Assembly, Base Package .........................................134
151-473 — Tesla Probes and Interconnect Kit for Iwatsu Curve Tracer ........................................134
151-474 — Tesla Interconnect Kit for Iwatsu Curve Tracer (Excluding Probes and Positioners)..134
Common Probes ............................................................................................................................ 135
HCP-TIP-3-350 — HC Replaceable Probe Tips, 5-pack ..................................................................135
149-976 — High Voltage Chuck Floating Plug ................................................................................135
149-977 — High Voltage Chuck Shorting Plug ...............................................................................135
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc
Contents • xiii
149-978 — Chuck Cable, High Voltage Chuck to Agilent High Voltage Connector (m), 1.5 m........135
High Power Chuck Connection Cables ........................................................................................... 136
149-979 — HV Tesla Chuck Cable, HV Chuck Connector- Std Triax (m) Connector, 1.5m.............136
149-980 — Tesla Chuck Cable, HV Chuck to Banana Plug Connector, 1.5 m.................................136
149-981 — Chuck Cable, High Voltage Chuck to SHV Connector (f), 1.5 m ...................................136
151-256 — Chuck Cable, High Voltage Chuck Connector to BNC Connector (m), 1.5 m ...............136
151-257 — HV Tesla Chuck Cable, HV Chuck Connector-CMI HV (m) Connector End, 1.5m .........136
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc
Contents • xiv
Board Test Systems
Positioners, Mounts and Accessories
134-422, 134-423 — Multi-Orientation Positioners
EZ-PROBE — EZ-Probe Positioner
Features
Features
• Vacuum based RPP210 positioner with a
dovetail arm attachment allowing vertical
circuit board probing with a vertical range
of 4-inches.
• Vacuum mount joystick
positioner for assisted PCB
probe positioning. Provides
easy, precise manual probe
positioning control in 3 axes.
Specifications
• 2.5-inches of range in dovetail
Specifications
• Potential 11+ inches in 180º orientation
• Positioning range: 0.65 x 0.65
x 0.5-inch (17 x 17 x 13 mm)
• Arm can be positioned at 0º, 90º, 180º,
and 270º in reference to the platen base
• Compatible with FPC probes
• Reconfiguration converts positioner for horizontal probing
• 134-422 (left-orientation)
• 134-423 (right-orientation)
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• Placement: 50 µm (2 mil)
• Operates with vacuum (requires -15.75-inch Hg) or weighted
gravity base
• Three dimensional joystick with 3:1 motion reduction
• Weight: 2.65 lbs. (1.2 kg)
• Adjustable arm reach: 3.9 - 8.7-inch (100-220 mm)
• Arm sweep angle: +90°
Package Compatibility
• BTS-VERT — YES
• BTS 1000 — YES
106-564 — Variable Pitch Mount
• BTS-VERT — YES
Features
FPD-100 — Fine Pitch Dual-Armed Positioners
• Adds second FP-mount for
variable pitch SGS probing.
Specifications
• Up to 18 GHz bandwidth when
used with brush contact ground
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — YES
• BTS 2000 — YES
Features
• Fine pitch dual
positioner, optimized for
variable pitch probing on
PCB with FPx probes.
Specifications
• Vacuum-based
• 100 TPI pitch
• Mounts (2) 104-134 articulating arm probe mount
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — YES
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Positioners, Mounts and Accessories
Board Test Systems • 1
141-050 — Portable Vacuum System
134-420 — Vacuum Base Board Clamp
Features
Features
• Portable vacuum system for facilities without a house vacuum
system.
• Circuit board hold down clamp with
vacuum base used for mounting PCB
in a horizontal probing orientation.
Specifications
• Recommended for use with no more that 8 vacuum mounted
positioners and/or accessory mounts
• 2.12 cfm, 110V, continuous duty cycle
Specifications
• Approximately 0.5-inch clamping area
to hold PCBs
• Accommodates PCBs with 0.125-inch
keep out on edges, and thickness
from 0.0- to 0.125-inches
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
SQ-132-667-01 — Vacuum Mount Gantry Top Plate
• Easily adjust height in 0.25-inch
increments from approximately 3.3inches (minimum) to 7.5-inches (height can be increased with
additional spacers, not included)
Features
• Four clamps are typically required hold the 4 corners of the PCB
• BTS-VERT — YES
• Vacuum mounted gantry
for mounting vacuumbased positioners for PCB
probing.
Package Compatibility
• BTS 1000 — included in package
• BTS 2000 — included in package
• BTS-VERT — YES
Specifications
• Overall board width 18 inches
134-421 — Vacuum Base PCB Bottom Support
• Requires (2) vertical probe station spacer blocks (131-906) for
each nominal height increase of 2.5-inches
Features
• BTS 1000 — YES
• Circuit board bottom support with
vacuum base. Use with vacuum
base board clamp (134-420) setup.
• BTS 2000 — YES
Specifications
• BTS-VERT — YES
• PCB bottom support can be
configured using the bullet tip
(insulating material) touching
bottom of the PCB, or by removing
the bullet tip (6-32 screw) and
attaching the PCB to support shaft
with 6-32 hardware
Package Compatibility
131-906 — Vacuum Mount Spacer Block
Features
• Vacuum based spacer block for BTS
packages to provide additional
positioner height for probing with
vertical PCBA and other boards.
• Adjustable height from nominal.
Nominal is with bullet tip removed, top of adjust shaft in same as
bottom PCB plane of 134-420 hold down clamps
• Can be used to create adjustable
height and position gantry.
Specifications
• Easily adjust height in 1/4-inch increments from approximately 3.3inches (minimum) to 9.5-inches
• Height is a nominal 2.5-inches and is stackable
• Package Compatibility
• Compatible with MPH style positioners 134-422 and 134-423
• BTS 1000 — included in package
Package Compatibility
• BTS 2000 — included in package
• BTS 1000 — YES
• BTS-VERT — YES
• BTS 2000 — YES
• BTS-VERT — included in package
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Positioners, Mounts and Accessories
Board Test Systems • 2
129-691 — Vacuum Based Auxiliary Chuck
M150-ACC-16 — Magnetic Cable Clamp
Kit
Features
Features
• Adjustable height auxiliary
chuck mounted on a vacuum
base.
• Magnetic base cable clamp
• Enables easy cable routing
• Helps to minimize cable vibration that can affect measurements
Specifications
• Easily adjust height in 1/4-inch
increments from approximately
3.3-inches (minimum) to 7.5inches (height can be increased with additional spacers, not
included)
• Base requires a vacuum manifold (sold separately)
• Maximum cable diameter = 1/8-inch
• Must be used with steel base
Package Compatibility
• BTS 2000 — YES
• BTS 1000 — YES
• BTS-VERT — YES
• BTS 2000 — YES
SQ-115-330-03 — Removable 6-inch Pedestal Wafer
Chuck
Specifications
• Each kit includes the necessary hardware for one cable
Elite 300, Summit, Tesla, M150, Alessi, BTS*
• BTS 1000 — YES
• Planarizable 150 mm wafer
chuck for PCB probing.
Kit Contents
Compatibility
Package Compatibility
Features
• Groove in base holds cable securely
• BTS-VERT — YES
005-018 — Contact Substrate
Features
• Impedance Standard Substrates
used in probe calibration.
• Fixed x/y/z/theta
Package Compatibility
• Bolt-down base mount
• BTS 1000 — YES
• 6-inch round chuck
• BTS 2000 — YES
• Includes vacuum manifold
for chuck vacuum zones
• BTS-VERT — included in package
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — NO
142-171 — WinCal XE Software
Features
• WinCal XE enhances RF
measurement accuracy and
productivity through guided system
setup, automatic calibration and
validation, and other advanced RF
measurement related tools.
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — YES
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Positioners, Mounts and Accessories
Board Test Systems • 3
125-058 — Video Monitor
142-033 — Deluxe Vibration Isolation Table for BTS
Packages
Features
Features
19-inch LCD, multi-function video
monitor.
• (CSA,CE,UL)
• Heavy duty frame and steel
tabletop. Includes computer
accessory mounting kit for
keyboard, mouse, joystick and
multi-directional LCD monitor
support arm.
Package Compatibility
Specifications
• BTS 1000 — YES
• BTS 2000 — YES
• Dimensions: 40-inches (W) x 40inches (D) X 32-inches (H)
• BTS-VERT — included in package
Package Compatibility
Specifications
• 100/240 VAC
• 50/60 Hz
SQ-129-032-01 — Bottom Side Viewing Camera Kit
• BTS 1000 — YES
• BTS 2000 — YES
Features
• BTS-VERT — YES
• Vacuum-mounted camera
for double-sided probing
on printed circuit boards.
Monitor is sold separately.
Consult factory for PN — Dark Box/Vibration Isolation
Table for BTS 1000/2000
Features
Specifications
• Combination anti-vibration table and dark box for applications with
probing features smaller than 50 µm, and with light sensitive tests
or I/R laser probing.
• 70x video scope on a
vacuum base with fine x/ymovement control and coarse z-control
Package Compatibility
• Video scope includes color camera
• Includes (2) aux chucks mounted on a variable height vacuum
base.
• Includes (4) extension arms for bottom side probing (all arms are
compatible with RPP210 positioners)
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — YES
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — YES
142-032 — Vibration Isolation Table for BTS Packages
Features
• Heavy duty frame and steel
tabletop.
Specifications
• Dimensions: 40-inches (W) x
40-inches (D) X 32-inches (H)
Package Compatibility
• BTS 1000 — YES
• BTS 2000 — YES
• BTS-VERT — YES
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Positioners, Mounts and Accessories
Board Test Systems • 4
Cryogenic and Vacuum
Cryogenic Accessories
49827 — LN2 Transport Dewar, 120l
Features
• Tank head with safety valve, fill level
gauge, central ball valve with 12 mm
quick lock fitting
• Fill level gauge
• Internal pressure build-up system
Specifications
• Transfer tube DN10/1.5m
• Maximum positive operating pressure:
1.5 bar
Compatibility
• Cryogenic systems only
51113 — LHe Transport Dewar
120l
Features
• Specified for transportation of liquid
helium (LHe) on public roads
• Made of stainless steel
• Connection flange DN 50 KF
• With casters, safety valve, vibration
damper and pressure gauge
• Head with safety neck tube, central ball
cock and 12 mm quick lock fitting
• Two side-gated ball valves for pressure
relief and bypass valve
Specifications
• Maximum overpressure 1.2 bar gauge
pressure
Compatibility
• Cryogenic systems only
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Cryogenic Accessories
Cryogenic and Vacuum • 5
PMC200 Wafer Carriers
136397 — Universal Carrier, PMC200
130474 — Wafer Carrier, 150 mm, PMC200
Features
Features
• For mounting, fixing and handling of
substrates of different shapes or
wafers up to 75 mm with Cascade
Microtech cryogenic probe stations
• For mounting, fixing and handling of
SEMI standard 150 mm wafers with
Cascade Microtech cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Mounting outside vacuum chamber
recommended
• Patented mechanical substrate/wafer clamping: mechanical
clamping from top by a universal clamping mask (top-side
substrate/wafer contact only at the edge)
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spring (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
Specifications
• Includes holder for 2 RF calibration substrates
• Maximum substrate dimensions:
Compatibility
– 76.2 mm /3-inch (full wafer)
– 150 mm (quartered wafer)
– 76.2 mm x 76.2 mm (3 x 3-inch) or 50 mm x 110 mm
• PMC200
130476 — Wafer Carrier, 100 mm, PMC200
Compatibility
Features
• PMC200
• For mounting, fixing and handling of
SEMI standard 100 mm wafers with
Cascade Microtech cryogenic probe
stations
128027 — Wafer Carrier, 200 mm, PMC200
Features
• Mounting outside vacuum chamber
recommended
• For mounting, fixing and handling of
SEMI standard 200 mm wafers with
Cascade Microtech cryogenic probe
stations
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spring (top-side wafer contact only at the
edge)
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spring (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PMC200 Wafer Carriers
Cryogenic and Vacuum • 6
133758 — Substrate Holder, 4K, PMC200
Features
• For mounting, fixing and handling of
small substrates, maximum size
1 x 1-inch, with Cascade Microtech
cryogenic probe stations. Size and
shape of the substrate needs to be
specified with the order.
• Includes additional cold shield for achieving lowest sample
temperature
• Mounting outside vacuum chamber recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a clamping mask (top-side substrate contact only at the edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
Compatibility
• PMC200
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PMC200 Wafer Carriers
Cryogenic and Vacuum • 7
PMV200 Wafer Carriers
144072 — Universal Carrier, PMV200
142365 — Wafer Carrier, 150 mm, HF-Ready, PMV200
Features
Features
• For fixing and handling of wafer, wafer
fragments, and single chips
• For mounting, fixing and handling of
SEMI standard 150 mm wafers
• Mounting outside vacuum chamber
recommended
• Mounting outside vacuum chamber
recommended
• Patented mechanical clamping system:
mechanical clamping from top by leaf springs (top-side substrate/
wafer contact only at the edge)
• Patented mechanical clamping
system: mechanical clamping from top by a ring shaped leaf spring
(top-side wafer contact only at the edge)
• Contact plate made of nickel/gold coated OFHC copper for good
thermal contact between wafer and chuck
• Contact plate made of nickel/gold coated OFHC copper for good
thermal contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
• Includes holder for 2 HF calibration substrates
Specifications
Specifications
• Maximum substrate dimensions:
• Temperature range: -60°C to +200°C
– 76.2 mm/3-inch (full wafer)
– 150 mm (quartered wafer)
– 76.2 mm x 76.2 mm (3 x 3-inch) or 50 mm x 110 mm
• Temperature range: -60°C to +200°C
Compatibility
• PMV200
144078 — Wafer Carrier, 100 mm, HF-Ready, PMV200
Compatibility
Features
• PMV200
142361 — Wafer Carrier, 200 mm, HF-Ready, PMV200
Features
• For fixing and handling of wafer, wafer
fragments and single chips
• For mounting, fixing and handling of
SEMI standard 100 mm wafers
• Mounting outside vacuum chamber
recommended
• Patented mechanical clamping system:
mechanical clamping from top by a ring shaped leaf spring (topside wafer contact only at the edge)
• Mounting outside vacuum chamber
recommended
• Patented mechanical clamping
system: mechanical clamping from top by leaf springs (top-side
substrate/wafer contact only at the edge)
• Contact plate made of nickel/gold coated OFHC copper for good
thermal contact between wafer and chuck
• Contact plate made of nickel/gold coated OFHC copper for good
thermal contact between wafer and chuck
• Includes holder for 2 HF calibration substrates
Specifications
• Temperature range: -60°C to +200°C
• Includes holder for 2 RF calibration substrates
Compatibility
Specifications
• PMV200
• Maximum substrate dimensions:
– 76.2 mm/3-inch (full wafer)
– 150 mm (quartered wafer)
– 76.2 mm x 76.2 mm (3 x 3-inch) or 50 mm x 110 mm
• Temperature range: -60°C to +200°C
Compatibility
• PMV200
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PMV200 Wafer Carriers
Cryogenic and Vacuum • 8
PLV50 Wafer Carriers
140971 — Universal Carrier, PLV50
141246 — Universal Carrier, HF-Ready, PLV50
Features
Features
• For fixing and handling of wafer, wafer
fragments, and single chips
• For fixing and handling of wafer,
wafer fragments, single chips, and
up to four (4) HF calibration
substrates
• Mounting outside vacuum chamber
recommended
• Patented mechanical clamping
system: mechanical clamping from top by leaf springs (top-side
substrate/wafer contact only at the edge)
• Mounting outside vacuum
chamber recommended
• Clamping on three substrate sides with simple adjustment to the
device size by slidable third side piece
• Patented mechanical clamping system: mechanical clamping from
top by leaf springs (top-side substrate/wafer contact only at the
edge)
• Contact plate made of gold-coated copper for good thermal contact
between wafer and chuck
• Clamping on three substrate sides with simple adjustment to the
device size by slidable third side piece
Specifications
• Contact plate made of gold-coated copper for good thermal contact
between wafer and chuck
• Maximum substrate dimensions:
Specifications
– 50.8 mm/2-inch (full wafer)
– 100 mm (quartered wafer)
– 50.8 mm x 50.8 mm (2 x 2-inch)
• Temperature range: -60°C to +200°C
• Maximum substrate dimensions:
– 50.8 mm/2-inch (full wafer)
– 100 mm (quartered wafer)
– 50.8 mm x 50.8 mm (2 x 2-inch)
• Temperature range: -60°C to +200°C
Compatibility
• PLV50
Compatibility
• PLV50
141246 — Universal Carrier, PLV50, 300°
Features
147917 — Wafer Carrier, 100 mm, PLV50
• For fixing and handling of wafer, wafer
fragments, and single chips
Features
• Mounting outside vacuum chamber
recommended
• Patented mechanical clamping
system: mechanical clamping from top by leaf springs (top-side
substrate/wafer contact only at the edge)
• For mounting, fixing and handling of
SEMI standard 100 mm wafers with
Vacuum probe stations
• For use with temperature controlled
chuck systems up to 200°C
• Clamping on three substrate sides with simple adjustment to the
device size by slidable third side piece
• Mounting outside vacuum chamber
recommended
• Contact plate made of gold-coated copper for good thermal contact
between wafer and chuck
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spring (top-side wafer contact only at the
edge)
Specifications
• Maximum substrate dimensions:
– 50.8 mm/2-inch (full wafer)
– 100 mm (quartered wafer)
– 50.8 mm x 50.8 mm (2 x 2-inch)
• Temperature range: -60°C to +300°C
Compatibility
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
Specifications
• Temperature range: -60°C to +200°C
Compatibility
• PLV50
• PLV50
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PLV50 Wafer Carriers
Cryogenic and Vacuum • 9
Test Interface Feedthroughs
141257— Vacuum Rotary Feedthrough for VCP110
Features
137998 — Two SUB-D (50 PIN) Electrical Feedthrough on
DN100 HV Flange
Features
• Manipulation of one
VCP110 from outside
vacuum chamber
• High vacuum electrical feedthrough
of 100 pins, grouped to two 50-pin
Sub-D female - female connectors
integrated into DN100 flange
• Consists of mechanical
feedthrough drive and adaptation to VCP110
• Includes wire harnesses of 2x 40 high
vacuum proof cables for connection
to probe card
Compatibility
• PMC200, PMV200, PLV50
137196— Triax High-Vacuum Feedthrough, DN100 ISO-K
Features
Compatibility
• PMC200, PMV200, PLV50
• 4 pcs. hermetically sealed bulk
feedthrough type W.W. Fischer WDE103
on 100 mm flange
• 4 pcs. low-noise triax cable 2m
Compatibility
• PMC200, PMV200, PLV50
137495 — High-Vacuum 4x-HF Feedthrough, DN50KF
40GHz 2.92
Features
• Four pcs. hermetically sealed
electrical bulkhead feedthroughs
on a DN50-KF flange for DC to
40 GHZ 2.92 connector
Compatibility
• PMC200, PMV200, PLV50
141182— SMA 50 Ohm Feedthrough, DN50 KF
Features
• Flange plate made from plastics
for individually electrically
isolated feedthroughs
• Female - female
Compatibility
• PMC200, PMV200, PLV50
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Test Interface Feedthroughs
Cryogenic and Vacuum • 10
Miscellaneous Cryogenic and Vacuum System Accessories
49906 — HF Precision Cable, PC-2.4 50GHz/0.8m with
Right Angle Plug Male/Male
Features
• Flexible
• Male-right angle male
• Cable length: 0.8m
Compatibility
• PMC200, PMV200, PLV50
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Miscellaneous Cryogenic and Vacuum System Accessories
Cryogenic and Vacuum • 11
DC Cables, Adapters and Replaceable Probe Tips
Replaceable Probe Tips
DCP Replacement Tips
DCP-HTR (HTS) & AttoGuard
Features
Features
• High performance probe tips
for modeling and
characterization work
• Standard ceramic probe blade
• 7 degree angle
• For use with AttoGuard
• Easily replaceable
Specifications
• Durable
• 18 µ tip radius
Specifications
• 12 µ tip radius
• Tip material: Tungsten
• 7 µ tip radius
• Tip diameters shown below
Kit Contents
Kit Contents
• Box of 10
• 10 tips per set
Compatibility
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, M150, S300, Alessi
• PA/PM, MicroAlign, Elite 300,
Summit, M150, S300, Alessi
Ordering Information
Part Number Tip Radius
Ordering Information
Part Number Size
Compatibility
107-157
1.5 µ
DCP-115R
107-158
5.0 µ
DCP-150R
107-159
0.5 µ
DCP-105R
151-291
18 µ
151-292
12 µ
151-341
7µ
138-020 — Edge Sense Single Blade Ceramic Needle
Features
109-946— DCP-HTR
• Edge Sense
Features
• Single blade ceramic needle
• Standard ceramic probe blade
Specifications
• 7 degree angle
• For DCP-HTR probe body
• Not for use with AttoGuard
Kit Contents
Specifications
• Box of 5
• 19 µ tip radius
Compatibility
Kit Contents
• Elite 300, Summit, M150, S300, Alessi
• Box of 10
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, M150, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Replaceable Probe Tips
DC Cables, Adapters and Replaceable Probe Tips • 12
PTT Probe Tips
PTS 24/4-25 — Specialty Probe Tip, Osmium, 45 degree
Features
Features
• Low cost
• Osmium tip
• Easily replaceable
Specifications
• Durable
• 2.4 µ
Specifications
• 45 degree bend
• Tip material: Tungsten
Kit Contents
• Tip diameters shown below
• 25 tips per set
Kit Contents
Compatibility
• 25 tips per set
• PA/PM, MicroAlign, Elite 300, Summit, M150, S300, Alessi
Compatibility
PTC-12-25 — Specialty Probe Tip, Tungsten Carbide
• PA/PM, MicroAlign, Elite 300,
Summit, M150, S300, Alessi
Features
• Tungsten carbide tip
Ordering Information
Part Number
Type
Size
Specifications
PTT-06-25
Straight
0.6 µ
• 1.2 µ
PTT-12-25
Straight
1.2 µ
• Straight
PTT-24-25
Straight
2.4 µs
Kit Contents
PTT-120-25
Straight
12 µs
• 25 tips per set
PTT-250-25
Straight
25 µs
PTT 1200-25
Straight
120 µ
PTT 1500-25
Straight
150 µs
PTT-06/4-25
45° Bend
0.6 µ
PTT-12/4-25
45° Bend
1.2 µ
PTT-24/4-25
45° Bend
2.4 µs
PTT-120/4-25
45° Bend
12 µs
PTT-250/4-25
45° Bend
25 µs
PTT-70-25
Catwhisker
0.07 µs
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, M150, S300, Alessi
PTS 24-25 — Specialty Probe Tip, Osmium
Features
• Osmium tip
Specifications
• 2.4 µ
Kit Contents
• 25 tips per set
• Straight
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, M150, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Replaceable Probe Tips
DC Cables, Adapters and Replaceable Probe Tips • 13
DC/CV Triax/BNC Cables
146-214 — Coax Cable, SMA to BNC, 61 cm
104-330-LC — Triax Cable, Large to Small Triax
Connector, Low Noise, 60 cm
Features
• Connects the SMA and BNC connector.
Features
Specifications
• Provides a low noise connection between large and small triax
connectors.
• Cable length: 61 cm (24-inch)
Specifications
• SMA to BNC (male-to-male)
• Cable length: 60 cm (23.5-inch)
Compatibility
• Large to small triax (male-to-male)
• Elite 300, Summit, M150, S300, Alessi
Compatibility
138-019 — Cable, Edge Sense, SSMC to DCP-HTR, 2 m
Features
• Elite 300, Summit, M150, S300, Alessi
104-334 — Triax Extension Cable, 53 cm
• Connects the SSMC and DCP-HTR
probe.
Features
• Extends existing triax cables.
Specifications
• Cable length: 2 m (6.5-feet)
Specifications
• SSMC to DCP-HTR probe (male-tomale)
• Cable length: 53 cm (21-inch)
Compatibility
Compatibility
• Elite 300, Summit, M150, S300,
Alessi
• Elite 300, Summit, M150, S300, Alessi
• Triax-to-triax
104-365 — Coaxial Cable with BNC Connector
103-775 — Cable, Edge Sense, SSMC to DCP-HTR, 2 m
Features
• Connects BNC connectors.
Specifications
• Low noise cable kit for current or
capacitance parametric test
• Cable length: 1.4 m (4.6-feet)
• Coaxial
Specifications
• BNC to BNC (male-to-male)
• Cable length: 2 m (6.5-feet)
Compatibility
Kit Contents
• Four 104-330-LC triax cables with large-to-small connector, 60 cm
(24-inch) length
• Four 104-365 coaxial cable with BNC connector, 140 cm (55-inch)
length
• Four 104-341 triax-to-BNC adapter (guard shorted)
Features
• Elite 300, Summit, M150,
S300, Alessi
105-001 — Bias Cable, 1.2 m, BNC to SMB Female
Features
Compatibility
• Connects BNC and SMB
connectors.
• Elite 300, Summit, M150, S300, Alessi
Specifications
• Cable length: 1.2 m (4-feet)
• BNC to SMB (male-to-female)
Compatibility
• Elite 300, Summit, M150, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC/CV Triax/BNC Cables
DC Cables, Adapters and Replaceable Probe Tips • 14
105-148— Interlock Cable for Agilent 4155-4156
124-082 — Cable, Eye Pass, 1.2 m, Molex to BNC
Features
Features
• Safety interlock cable for Agilent
4155-4156
• Provides single channel connections
between the EyePass probe and
BNC connector.
• Connects the probe station and
the Agilent 4155-4156.
Specifications
Specifications
• Cable length: 1.2 m (4-feet)
• Cable length: 3 m (10-feet)
• BNC male to 2-pin Molex connector
cable
Compatibility
Compatibility
• Elite 300, Summit, M150, S300,
Alessi
• Elite 300, Summit, M150, S300,
Alessi
105-540 — BNC to SSMC Cable, 1 m
124-562 — BNC to SSMC Cable, 2 m
Features
Features
• Connects the BNC and SSMC
connectors.
• Connects BNC and SSMC
connectors.
Specifications
• Cable length: 1 m (3.3-feet)
Specifications
• BNC to SSMC (male-to-male)
• Cable length: 2 m (6.5-feet)
• BNC to SSMC (male-to-male)
Compatibility
Compatibility
• Elite 300, Summit, M150,
S300, Alessi
• Elite 300, Summit, M150,
S300, Alessi
108-138— Triax Cable Large to Small Triax Connector,
Low Noise, 1.8 m
Features
127-911— 42941 Holder and Cable, DPP2xx
• Provides a low noise connection
between large and small triax
connectors.
Features
Specifications
Specifications
• Cable length: 1.8 m (6-feet)
• Includes two SMA male-tomale cables, 7.6 cm (3-inch)
• Large to small triax (male-to-male)
Compatibility
• Elite 300, Summit, M150, S300,
Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
• Holds the 42941 capacitance
meter impedance probe head.
• Probe head holder for DPP2xx
positioner
Compatibility
• Summit
Cascade Microtech, Inc.
DC/CV Triax/BNC Cables
DC Cables, Adapters and Replaceable Probe Tips • 15
132-909 — Triax Cable, large to Small Connector,
PureLine, 60 cm
100697 — Probe Arm Extension, 70mm
Features
• 70mm extension for all standard
DPP2xx-S / DPP3xx-S arms.
Features
• Connects large and small
triax connectors.
Specifications
• Recommended for backside probing
setups.
• Cable length: 60 cm (23.5inch)
• Can be connect in series
(recommended maximum of 2)
• Large to small triax (maleto-male)
Compatibility
• DPP2xx-S, DPP3xx-S
Compatibility
100652 — Adapter DC RPP305-S
• Elite 300, Summit, M150,
S300, Alessi
Features
• Adapter plate to use standard DPP2xx-S /
DPP3xx-S DC arms with RPP305-S.
100751 — 50 Ohm Coax Cable for DPP105-x-AI 1.5m
Features
Compatibility
• RPP305-S
• 50 Ohm coax cable, length 1500mm.
• One miniature female HF plug (to
positioner).
• One standard male BNC plug.
• Also compatible with DC-tip holder
(157-451).
Compatibility
• DPP105-x-AI, 157-451
100805 — 50 Ohm Coax Cable for DPP105-x-AI 0.5m
Features
• 50 Ohm coax cable, length 500mm.
• One miniature female HF plug (to
positioner).
• One standard male BNC plug.
• Also compatible with DC-tip holder
(157-451).
Compatibility
• DPP105-x-AI, 157-451
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC/CV Triax/BNC Cables
DC Cables, Adapters and Replaceable Probe Tips • 16
DC/CV Adapters
104-341— Triax to BNC Adapter, Guard Shorted
104-740— Triax Shorting Plug
Features
Features
• Adapts triax to BNC connection.
• Used to terminate the triax chuck.
Specifications
Specifications
• Guard shorted
• Triax connector (male) with shorted end
Compatibility
Compatibility
• Elite 300, Summit, M150, S300, Alessi
• PA/PM, MicroAlign, Elite 300, Summit, M150, S300,
Alessi
104-342 — Triax Feed-Thru for Summit Triax Panel
104-743— Triax EMI Cap
Features
Features
• Bulkhead adapter for triax connector.
• For use with Summit triax panel.
• Used to cap the end of the triax connector to
reduce EMI.
Specifications
Compatibility
• Triax-to-triax (female-to-female)
• Elite 300, Summit, M150, S300, Alessi
Compatibility
• Elite 300, Summit, M150, S300, Alessi
104-803— Triax to BNC Adapter, Guard Floated
104-357— BNC Feed-Thru for Summit Triax Panel
Features
• Bulkhead adapter for BNC connector.
Features
• Adapts triax to BNC connection.
Specifications
• For use with Summit triax panel.
• Guard floated
Specifications
Compatibility
• BNC (f) to BNC (f)
• Elite 300, Summit, M150, S300, Alessi
Compatibility
• Elite 300, Summit, M150, S300, Alessi
104-806— Triax Tee, Single Male to Dual Female
104-372— Ground Unit Adapter Kit
Features
• For use with the SMU
ground unit.
Features
• Splits a single triax input to a dual triax
output.
Specifications
Kit Contents
• Triax (male) to dual triax (female)
• Two triax-to-triax cables,
25 cm (9.8-inch)
Compatibility
• Ground unit bulkhead
adapter
• Elite 300, Summit, M150, S300, Alessi
Compatibility
• Elite 300, Summit, M150,
S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC/CV Adapters
DC Cables, Adapters and Replaceable Probe Tips • 17
104-810— DCP Mounting Block Kit
106-837— Triax to BNC Adapter, Guard Thru, No Shield
Features
Features
• Drop down part.
• Adapts triax to BNC connector.
• Mounts onto RPP305 positioner.
Specifications
• For use with DCP/SSCM cable.
• Guard thru, no shield
Kit Contents
• Triax (male) to BNC (female)
• Four DCP mounting blocks
Compatibility
Compatibility
• Elite 300, Summit, M150, S300, Alessi
• Elite 300, Summit, M150, S300, Alessi
105-931— EMI Cover for Triax Adapter Block
Features
• Used to cap the end of the triax adapter block to
reduce EMI.
Compatibility
• Elite 300, Summit, M150, S300, Alessi
108-714—Adapter BNC Female to Triax Male, Guard Short
Features
Adapts triax to BNC connector.
Specifications
• Guard short
106-510 — BNC Shorting Plug
• Triax (male) to BNC (female)
Features
Compatibility
• Used to terminate the coax chuck.
• Elite 300, Summit, M150, S300, Alessi
Specifications
• Coax connector (male) with shorted end
Compatibility
• Elite 300, Summit, M150, S300, Alessi
106-560— Triax Adapter, Female to Female
Features
• Used to adapt cable end gender or connect triax
cables.
Specifications
• Triax-to-triax (female-to-female)
Compatibility
108-715— Adapter, BNC to BNC Coupler
Features
• Adapts BNC to BNC connectors.
Specifications
• BNC to BNC (female-to-female)
Compatibility
• Elite 300, Summit, M150, S300, Alessi
• Elite 300, Summit, M150, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC/CV Adapters
DC Cables, Adapters and Replaceable Probe Tips • 18
108-716— Adapter, BNC Male to Triax Female, Guard
Short
Features
• Adapts triax to BNC
connector.
Specifications
• Guard short
• Triax (female) to BNC (male)
Compatibility
• Elite 300, Summit, M150, S300, Alessi
108-718— Adapter, BNC Tee, Female-Male-Female
Features
• Adapts BNC to BNC connectors.
Specifications
• BNC tee
• BNC (female-male-female)
Compatibility
• Elite 300, Summit, M150, S300, Alessi
126-985 — Kit, DCP to DCP Connection Strap
Features
• DCP to DCP connection
wire kit for LCR meter.
Kit Contents
• 4 straps (PN 123-625)
• DCP strap tech note
Compatibility
• Elite 300, Summit, M150,
S300, Alessi
123-625— DCP to DCP Guard Connection Strap
Features
• DCP-to-DCP connection
wire for LCR meter.
Specifications
• Cable length: 7.6 cm (3inch), with DCP/DCP clip
Compatibility
• Elite 300, Summit, M150, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC/CV Adapters
DC Cables, Adapters and Replaceable Probe Tips • 19
Cable/Pin Jack Wires for MMP and MPC Probe Holders/Mounts
Cable/Pin Jack Wires for MMP and MPC Probe Holders/
Mounts
Features
• Electrical jumper wire for MMP
and MPC Probe Holders/Mounts.
• Pin jack style connection.
Specifications
Compatibility
• Elite 300, Summit, M150, S300, Alessi
Ordering Information
• Part Number: See Specifications table for cable length selection.
PN
Cable length
MAE-44/6
6-inch
MAE-44/12
12-inch
MAE-44/18
18-inch
MAE-44/24
24-inch
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Cable/Pin Jack Wires for MMP and MPC Probe Holders/Mounts
DC Cables, Adapters and Replaceable Probe Tips • 20
Elite 300
Station Accessories
CONNECTION PANELS
MONITORS
141-790 —Connection Panel
144-350 — Dual LCD Monitor
Features
Features
• Complete kit of cable connection panels and accessories.
• Optimized for Elite 300 universal accessory mounting rail system.
• Adds second LCD screen (20-inch) for
dual monitor configuration with Elite 300.
• All accessories can be mounted on the platen simultaneously, in
any location (left, right and back sides of the probe station platen).
• Includes ergonomic dual LCD VESA
monitor mounting kit.
Kit Contents
• Articulated arm for free floating
placement of second LCD monitor.
• 2 triaxial connection panels
– Each panel features 8 triaxial (3-lug) feed through connectors (f),
and 2 BNC coax (2-lug) connectors (f).
– Panel connections support single triax cables and Agilent dual
triax SMU cable assemblies.
– (For Agilent Quadrax SMU connections, please contact the
factory).
• Universal design can mount in multiple
different configurations.
Specifications
• Supports LCD monitor with VESA
mount (weight range 12-29 lbs)
• Monitor arm has 16-inch height range
and tilt/swivel adjustment
• VESA mounting plates (70/100 mm)
• Second LCD monitor can be mounted in two locations:
Triaxial connection panel
(front view)
Triaxial connection panel
(top view)
• 1 coaxial connection panel – each panel features 10 BNC coax (2lug) connectors (f).
– To the existing Elite 300 LCD monitor mount (both on one side)
– Alone on the Elite 300 system frame (opposite side to existing
LCD monitor)
Compatibility
• Elite 300
• 2 vacuum manifolds – each manifold features 5 vacuum inlets with
integrated on/off pull switches.
• 2 positioner mounts – used for holding DPP2xx/DPP3xx
positioners above the platen while changing probe tips.
Coaxial connection
panel
Vacuum manifold
Positioner
mount
Compatibility
• Elite 300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Station Accessories
Elite 300 • 21
ACCESSORY SHELVES
143-420 — Rear Instrument Shelf System
Features
• Shelf system
easily attaches to
the Elite 300
system frame
144-340 — Side Accessory Shelf Kit
Features
• Side accessory shelf kit easily
attaches to the Elite 300 system frame
• Instruments and
accessories can
be conveniently
placed at the rear
of the Elite 300
• Instruments and accessories can be
conveniently placed at the side of the
Elite 300
• Keyboard/mouse accessory tray
allows easy front panel control of test
instruments
• Seismic restraint straps and attachment points on shelving
• Height adjustable upper shelf
• Height adjustable
• Adjustable instrument tray can be positioned over the Elite 300
platen surface, allowing test instruments to be located close to
probes for short cable interconnects
• Seismic restraint straps and attachment points on swiveling
platform
Specifications
• Maximum load supported by platform: 68 kg (150 lbs)
• Dimensions
– Platform: width 43 cm (17-inch) x depth 53 cm (21-inch),
Adjustment height: 30.5 cm (12-inch)
– Keyboard/mouse tray: width 50.8 cm (20-inch) x depth 44.45 cm
(17.5-inch)
– Adjustment height: None
• Weight
– Platform and mounting arm: 13.166 kg (29 lbs)
– Keyboard/mouse tray: 9.988 kg (22 lbs)
Complete rear
instrument shelf
system
• Adjustable instrument tray can be positioned forward over the Elite
300 platen surface, allowing test instruments to be located close to
probes for short cable interconnects
Specifications
• Maximum supported instrument load
– Lower shelf and tray: 90.8 kg (200 lbs)
– Upper shelf: 45.4 kg (100 lbs)
• Dimensions
– Lower shelf: width 120 cm (47.24-inch) x depth 46 cm (18.11inch) x height 76.8 cm (30.23-inch)
– Lower tray: width 75 cm (29.52-inch) x depth 75 cm (29.52-inch),
Adjustment forward: 29 cm (11.41-inch)
– Upper shelf: width 120.6 cm (47.48-inch) x depth 47.9 cm
(18.86-inch), Adjustment height: 24.4 cm (9.60-inch)
• Weight
– Lower shelf and tray: 14.98 kg (33 lbs)
– Upper shelf: 12.26 kg (27 lbs)
Kit Contents
• Swiveling instrument/accessory platform
• Mounting hardware
• Keyboard/mouse tray
• Removable/adjustable lower shelf instrument tray
• Removable/adjustable upper shelf
• Seismic restraint straps
Bottom shelf and adjustable
instrument tray (forward position)
Compatibility
• Elite 300
Bottom shelf
Kit Contents
• Lower shelf and mounting hardware
• Removable/adjustable lower shelf instrument tray
• Removable/adjustable upper shelf
• Seismic restraint straps
Compatibility
• Elite 300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Station Accessories
Elite 300 • 22
SEISMIC RESTRAINTS
MOUNTING KITS AND PLATES
141-418 — Seismic Restraints
143-428 — Agilent 42941 Mounting Kit
Features
Features
• Provides seismic restraint
for Elite 300 station platform
• Mounting bracket to hold Agilent
42941 probe
• Installation at time of station
facilities setup
• Compatible with Elite 300 RPP305
positioners
• Compatible with Elite
standard and low profile
height kits
Kit Contents
• 2 cables:
– SMA (m) to SMA (m)
– 120 mm (4.7-inch)
• Mounting bracket for
RPP305-EL positioner
Kit Contents
• 4 restraint brackets
• Installation guide and bolt mounting
recommendations
Compatibility
• Elite 300
Compatibility
• Elite 300
Mounting bracket shown on
RPP305 positioner with Agilent
high impedance probe
Floor restraint
bracket
143-429 — Mounting Plate for B1500A SCUU
Mounted plate
Agilent SCUU
mounted to plate
Plate mounts on universal
accessory mounting rails
Compatibility
• Elite 300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Station Accessories
Elite 300 • 23
144-422 — Mounting Plate for B1500A ASU, E5288A Atto
Sense Unit
Mounted plate
Agilent ASU
mounted to plate
Plate mounts on universal
accessory mounting rails
Compatibility
• Elite 300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Station Accessories
Elite 300 • 24
Lab Accessories and Miscellaneous
Tables
117931 — SE1200 EMC Adapter for VIT951/PA300
135100 — Vibration Isolation Table, VIT701
Features
Features
• Connects the SE1200EMC to the
PA300 vibration isolating table.
• For BlueRay use.
• Impacts to the ShieldEnclosure
are isolated from the probe
station.
• Electromagnetically shielding.
Compatibility
• PA300
115405 — Vibration Isolation Table, VIT801
Features
• 1 pressure input regulator with gauge.
• Prepared for 19-inch devices
(ProberBench Electronic + 6 HU
additional).
• Equipped with docking points for
upgrade with BlueRay Loader Module to
fully automatic probe station.
• Requires compressed air (min. 6 bar,
8 mm hose).
• Measurement shelf and monitor/keyboard arm optionally available.
Specifications
• W=700 mm, D=700 mm, H=750 mm
• Storage shelf 550x320 mm at rear
bottom.
• Adjustable two-chamber air damping system with resonance
frequency of 2.5Hz
• Support arm systems optionally
available.
Compatibility
Specifications
• PA200 BlueRay, PA200 DS BlueRay
• W=800 mm, D=800 mm, H=750 mm
138815 — Probe Station Table 700
• Adjustable two-chamber air damping
system with resonance frequency of 2.5Hz
Features
• Automatic load leveling
• Prepared for 19-inch devices
(ProberBench Electronic + 6 HU
additional).
• Max. load capacity: 360 kg
Compatibility
• PA200, PM8, PM5, EP6
• For BlueRay use.
• Equipped with docking points for
upgrade with BlueRay Loader Module
to fully automatic probe station.
• Measurement shelf and monitor/
keyboard arm optionally available.
Specifications
• W=700 mm, D=700 mm, H=750 mm
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Tables
Lab Accessories and Miscellaneous • 25
49210 — Vibration Isolation Platform VIP600
142-033 — Vibration Isolation Table, DELUX Package for
200 mm Stations
Features
• Compact, vibration dampening
platform.
Features
• Suitable for EP6 and PM5 probe
stations.
• Integrated rolling casters.
Specifications
• Storage shelf below tabletop.
• Dimensions: 610 mm x 508 mm x 51 mm (WxDxH)
• Ergonomic front support bar.
• Max. load: 80 kg
• Optional side instrument shelves and
accessories available.
• Heavy duty frame and steel tabletop.
• Seismic restraint kit.
• Internal frequency: 3.2Hz (vertical), 3.6Hz (horizontal)
• Requires max. 4 bar compressed air
• Computer accessory mounting kit for
keyboard, mouse, joystick.
Compatibility
• Multi-directional LCD monitor support arm (VESA).
• PM5, EP6
• Enclosed system (side walls and front access door).
142-032 — Vibration Isolation Table, STANDARD for
200 mm Stations, 40-inch x 40-inch
Specifications
Features
– Steel tabletop is 40-inch wide x 40-inch deep
– Table operating height is 32-inch
• Weights:
• Heavy duty frame and steel tabletop.
• Integrated rolling casters.
– Steel tabletop is 230 lbs.
– Complete system (including tabletop) is approximately 480 lbs
• Operation:
• Seismic restraint kit.
• Storage shelf below tabletop.
• Ergonomic front support bar.
• Optional side instrument shelves and accessories available.
Specifications
• Dimensions:
– Steel tabletop is 40-inch wide x 40-inch deep
– Table operating height is 32-inch
• Weights:
– Steel tabletop is 230 lbs.
– Complete system (including tabletop) is approximately 480 lbs
• Operation:
– Optimum air pressure: 25 - 60 psi
– Input air pressure: min 20 psi (approx.) - max 80 psi
– Max weight capacity 1,150 lbs. (@ 80 psi)
– Optimum load on the tabletop is 200 to 800 lbs. (Since the
pressure is directly related to the mass sitting on the tabletop,
the operating pressure determines this range)
– Vibration isolation: typical performance better than 0db at 6 Hz,
with –6 dB per octave roll-off to 48 Hz and >–18 dB attenuation
above 48 Hz (with a Summit 12K series probe station or
equivalent load)
Compatibility
• Summit, M150, BTS
• Dimensions:
– Optimum air pressure: 25 - 60 psi
– Input air pressure: min 20 psi (approx.) - max 80 psi
– Max weight capacity 1,150 lbs. (@ 80 psi)
– Optimum load on the tabletop is 200 to 800 lbs. (Since the
pressure is directly related to the mass sitting on the tabletop,
the operating pressure determines this range)
– Vibration isolation: typical performance better than 0 db at 6 Hz,
with –6 dB per octave roll-off to 48 Hz and >–18 dB attenuation
above 48 Hz (with a Summit 12K series probe station or
equivalent load)
Compatibility
• Summit
143-567 — Side Instrument Shelf for Table
Features
• Universal design can mount on left or right
side of table.
• Heavy duty design can hold multiple
instruments.
• Easy mounting enables quick reconfiguration.
Specifications
• Dimensions:
– Side shelf is 21-inch (W) x 40-inch (D), and is positioned with a
1-inch space between the side shelf and main steel tabletop.
– With 2 side shelves installed (left and right), the overall width of
the table is 86-inch
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Tables
Lab Accessories and Miscellaneous • 26
Shield Enclosures/Dark Boxes
138121 — ShieldEnclosure, SE1000 EMC with Interlock
and Illumination
130359 — ShieldEnclosure SE750/EMC
Features
• Suitable for EP6 and PM5 (without laser
cutter).
• For standard probe systems PM5
(with laser cutter), PM8 and PA200
(others on request).
Features
• Light tight and electromagnetically
shielding.
• Light-tight, electrically grounded and
optimized design for EMC shielding.
• Stable table required as base.
• Vibration isolation VIP600 optionally
available.
• With lamps inside and interlock switch
at front door.
Specifications
• Requires additional feed-throughs
and table adaptation.
• Requires EMO option in combination with (semiautomatic) PA200.
Specifications
• Dimensions WxDxH: 750 mm x 750 mm x 820 mm, height (door
opened): 1620 mm
• Requires max. 2 light-tight feedthroughs
Compatibility
Required floor space:
• Width = 1.3m
• PM5, EP6
• Depth (with front lid opened) = 2m
100689 — EMC Light-Tight Feedthrough
• Height (with table and front lid opened): 2.5m
Features
Compatibility
• For SE750EMC, SE1000EMC and SE1200EMC.
• PA200, PM8, PM5, EP6
• Electromagnetically shielded.
• For probe station, thermal chuck and video wiring.
111650 — ShieldEnclosure, SE1200 EMC
Compatibility
Features
• Shield Enclosures
• For standard probe systems PM300 and
PA300 (others on request).
• Light-tight, electrically grounded and
optimized design for EMC shielding.
• Vizor opening.
• Requires additional feed-throughs and
table adaptation.
• Requires EMO option in combination with (semiautomatic) PA300.
• Inside light and interlock switch optionally.
Specifications
Required floor space:
• Width = 1.5 m
• Depth = 1.3 m
• Height (with table): 2.1 m
Compatibility
• PA300, PM300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Shield Enclosures/Dark Boxes
Lab Accessories and Miscellaneous • 27
Kit Contents
141-588 — Dark Box, Elite 300
• Dark box
Features
• Seismic restraint attachment to frame
• Provides dark, EMI shielded
environment probing
• Locking twist handle with keyed lock
(2 keys provided)
• Vertical lift front door, with multiple
height open detents
• 2 internal ceiling mounted low power
lights
• Large open access to Elite 300
station platen/test area with vertical
door open
• 2 adjustable rear shelves
• 2 side mounting locations for
ergonomic arm rest kit (not included)
• Locking front door handle with
keyed lock for security
• Extension bracket kit for mounting
Elite 300 LCD monitor and Computer
Accessory Kit (keyboard, joystick,
mouse) outside dark box
• Accommodates laser/video camera
microscopes
• Internal low voltage LED lighting
with automatic on/off switching
• Integrated adjustable shelving
• Lift handles for easy installation and
removal
Front view showing
lights and rear shelves
Door lifts vertically and folds
back out of the way for
maximum head clearance
• 2 rear mounting locations for
ergonomic LCD monitor arm (not
included)
• 2 BNC safety interlocks
Rear view showing
removable panels
• 2 large removable rear access covers
• Removable large covers for maximum
rear access to station accessories
• 4 access panels on rear, with 2 blank covers, and 2 panels with
large cable bundle hole and dark flexible sleeve
• Multiple rear and side cable connection
access panels, with dark sleeve for large
cable, probe card cable bundles
• 3 access panels (one on each side), with 2 blank covers, and 1
panels with large cable bundle hole and dark flexible sleeve
• Removable blank access panels that
allow custom triax/coax feedthroughs
Compatibility
• BNC safety interlock switch for use with
instrument or LASER
• 4 lift handles and mounting hardware
Side view with front
door in open position
• Elite 300
• 100-240V 50/60Hz compatible
Specifications
• Dark box dimensions: width 126 cm
(49.5-inch) x depth 110 cm (43.5-inch) x
height with door closed 91 cm (36-inch)/
height with door open 118 cm (46.5-inch)
• Rear shelves: width 50 cm (20-inch) x
depth 25 cm (10-inch), adjustment height:
43 cm (17-inch)
Side view with front
door in closed position
• Large rear access cover: 18 x 18-inch
• Access ports for cable connections: 7 x 7-inch
• Door lift force: Opening door 5.5 kgs (12 lbs), Closing door 6. 8 kgs
(15 lbs)
• Door open: 3 detent positions, in addition to full up and down
• Automatic light On/Off switching with door open/close, and manual
override
• 12VDC low power high intensity LED lights
• AC/DC powers supply (100-220V, 50/60Hz) CE mark
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Shield Enclosures/Dark Boxes
Lab Accessories and Miscellaneous • 28
Mounting Accessories
138846 — Control Console
Features
• For mouse, joystick control panel and compact
size keyboard
• Compatible with VIT801, PA300, and MicroAlign
systems
• Can be installed on front left or right side
Compatibility
• PA300, PA300PS-MA, VIT801
142-026 — LCD, Keyboard, Joystick and Mouse Mounting
Kit for Vibration Isolation Table
Features
• Ergonomic platform for computer
keyboard, mouse, joystick
• LCD monitor support (VESA) with
articulated arm for free floating
placement
• Universal design can mount on left or
right side of table
• Easy mounting allows for quick
reconfiguration
Specifications
• Supports LCD monitor with VESA mount (weight range 12-29 lbs)
• Monitor arm has 16-inch height range, and tilt/swivel adjustment.
• VESA mounting plates (70/100 mm)
• Accessory mounting posts (2) are height adjustable
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Mounting Accessories
Lab Accessories and Miscellaneous • 29
Test Equipment
112391 — EMC Test Equipment Interface, Kelvin
Features
• For test equipment adaptation (e.g. HP4142/4156B)
• 4 triax-triax-dual (Kelvin) and 8 coax-coax feedthroughs
Compatibility
• Shield Enclosures
112392 — EMC Test Equipment Interface, Standard
Features
• For test equipment adaptation
• Includes 8 triax-triax and 8 coax-coax
feedthroughs
Compatibility
• Shield Enclosures
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Test Equipment
Lab Accessories and Miscellaneous • 30
Miscellaneous Accessories
140348 — Air Drying Unit
100605 — Inker, DPP2xx/DPP3xx
Features
Features
• Air dryer and nano filter
• Fits positioners DPP2xx-S, DPP3xx-S.
• No electric power required
• Can be used in combination with probe
cards.
Specifications
• Minimum input pressure 7 bar (102 psi), oil-free,
condensate-free and particle-free (<1 µm)
pressurized air
• Maximum dew point temperature of pressurized air
at input: 0°C (32°F)
• Flow rate at input: 560 l/min (20 cfm)
• Can be used with ProberBench Inker output
or requires a driver unit when used with
manual systems.
• Includes cartridge holder.
Compatibility
• DPP2xx-S, DPP3xx-S
• Flow rate at output: 450 l/min (16 cfm)
Compatibility
• All MicroAlign stations
145530 — Inker Cartridge, Markem 6990
Features
• Markem ink type 6990, color: black
100422 — Textool Socket Adapter
Features
• For holding of PC boards with 50-130
mm width
• Alcohol soluble, relatively thin, flows very consistently, requires
heat curing
• After opening, the cartridge can be used for about 5 days
Specifications
• Adapter is vacuum clamped onto chuck
• Shelf life: 4 months
Compatibility
• Pack of 10
• Vacuum chucks
• Order requires one of the following configurations to be specified:
100539 — Vacuum Switches for HF Chuck
– DM-1
5,8,10,15,20,25,30 mil
– DM-1.25 10,15,20,25 mil
– DM-S
10,15 mil
Features
• Block with two vacuum switches for HF chucks
M150-ACC-13 — Vacuum Manifold, Magnetic Base
• Controls vacuum for calibration substrates and
burnishing pads
Features
Specifications
• Contained in HF Kit for PA200, PM8 III, PA300
and PM300
• 5 port vacuum manifold
• Magnet base mounts at the most
convenient location (e.g., on platen)
Compatibility
• For use with vacuum based positioners
or other vacuum based accessories
• PA300, PM300, PA200, PM8
• Easy push-pull on/off controls
Specifications
• Input connection: 1/8-inch ID push on connector
• Output connections: 1/16-inch ID
Compatibility
• Elite 300, Summit, Tesla, M150, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Miscellaneous Accessories
Lab Accessories and Miscellaneous • 31
M150-ACC-16 — Magnetic Cable Clamp
Kit
M150-ACC-19 — Triax Panel, Magnetic Base
Features
• Triaxial connection panel for
convenient cable management
Features
• Magnetic base cable clamp
• Enables easy cable routing
• Helps to minimize cable vibration that can affect measurements
• Groove in base holds cable securely
• Magnet base enables convenient
placement based on your positioner
location
• 10 triaxial (3-lug) feed through
connectors (female)
Kit Contents
• Each kit includes the necessary hardware for one cable
• Must be used with steel base
• Panel connections support single triax cables and Agilent dual triax
SMU cable assemblies. For Agilent Quadrax SMU connections,
please contact the factory.
Compatibility
Kit Contents
Elite 300, Summit, Tesla, M150, Alessi, BTS*
• Magnet base connection panel
Package Compatibility
• Ground strap
• BTS 1000 — YES
Compatibility
• BTS 2000 — YES
• Elite 300, Summit, Tesla, M150, Alessi
• Maximum cable diameter = 1/8-inch
• BTS-VERT — YES
M150-ACC-28 — Coax Panel, Magnetic Base
M150-ACC-18 — Pin to Banana Interface Kit
Features
Features
• Coxial connection panel for convenient
cable management
• Six port pin jack to banana jack interface
with magnetic base
• Magnet base allows for convenient
placement based on your positioner
location
• Used with unshielded probes (e.g. MMP01 or 139-332) to convert to a banana
style output
• Magnet base enables convenient placement based on your
positioner locations
• 10 Coaxial feed through connectors
(female)
Kit Contents
Kit Contents
• Magnet base connection panel
• One 6 port interface
• Ground strap
Compatibility
Compatibility
• Elite 300, Summit, Tesla, M150, Alessi
• Elite 300, Summit, Tesla, M150, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Miscellaneous Accessories
Lab Accessories and Miscellaneous • 32
Manual Stations
PM300, PM8, EP6, PM5 Power
PM300
PM5 POWER SYSTEM
133270 — Additional Chuck for 2 Substrates, PM300
146083 — Sigma for B1505A/SE
Features
Features
• Additional chuck for 2 calibration substrates and/or burnishing
pads.
SIGMA Integration of Agilent B1505A
Parameter System into the
ShieldEnclosure/POWER, including:
• On-wafer integration of Agilent B1505A
Parameter Analyzer System for high
voltage measurements up to 3 kV and
for high current measurements up to
20 A pulsed.
Compatibility
• PM300
PM8
• Optimal integration by EMI and light
shielded environment.
100507 — Supply Kit for Vacuum Adapter
Features
• For vacuum clamping of positioners on magnetic or HF platen.
Compatibility
– Lateral and vertical devices
– IV like device break down /I leak
– CV like Cds and Cgd
• All appropriate feedthroughs,
internal system wiring,
measurement adapter and supports
to accommodate Agilent protection
adapters and HV-bias-T according
to the Application Overview for
B1505A by Agilent.
• PM8
EP6
142298 — Triaxial Option for EP6 DC
Features
• ShieldEnclosure SE750/EMC with triaxial feedthrough.
• 4 triaxial probe arms (replaces the coaxial probe arms in EP6 DC
package).
Compatibility
• EP6 DC
• Dedicated probe arm set of 11
probe arms (triax, coax, Kelvin/triax,
Kelvin/coax) for measuring with
highest accuracy of:
• Agilent-verified configuration and
probe accessories.
• Also requires:
– Three (3) DPP2xx-M positioners
with MAG base
– Standard probe needles suitable
for desired voltage/ current range
Compatibility
• PM5 Power System
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PM300, PM8, EP6, PM5 Power
Manual Stations • 33
146151 — Mounting B1505A/Module Selector/SE
Features
• Feed-through for an Agilent N1258A
Module Selector into a ShieldEnclosure for
a Power probe system.
• Minimum additional space outside the SE
required.
• Mounting in the rear side of the SE.
Compatibility
• PM5 Power System
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PM300, PM8, EP6, PM5 Power
Manual Stations • 34
MEMS
Pressure Probe Modules and Probes
133390 — Pressure Probe Module
126480 — Pressure Probe Module (PPM) TemperatureControl
Features
Features
• For on-wafer-probing of pressure sensors
using patented impact pressure principle
• For on-wafer-probing of pressure sensors
using patented impact pressure principle
• Pressure range: 0.1-7.0 bar (relative)
• Pressure range: 0.1-7.0 bar (relative)
• Working distance: 40 µm (typical value,
controlled by motorized Z-axis)
• Temperature range: room temperature to
80°C
• Settling time: 0.5 seconds
• Working distance: 40 µm (typical value,
controlled by motorized Z-axis)
• Requires:
– Manual or semiautomatic probe station or
third-party probe station/test fixture
– CorePackage Control PC with network card
• Settling time: 0.5 seconds
• Requires:
Specifications
• Repeatability: ± 5mbar (for p ≤ 500mbar), < ±1% (for p >500mbar)
• Media: nitrogen or pressurized air, clean, oil/water free
– Manual or semiautomatic probe station or third-party probe
station/test fixture
– CorePackage Control PC with network card
Specifications
• Supply pressure: 8-10 bar
• Repeatability: ±5 mbar (for p ≤500 mbar), < ±1% (for p >500 mbar)
Kit Contents
• Control unit with embedded controller and pressure regulation
• 3-axis positioner (manual XY stage, travel range 25 mm, motorized
Z-axis, travel range 10 mm)
• Media: nitrogen or pressurized air, clean, oil/water free
• Supply pressure: 8-10 bar
Kit Contents
• Control software
• Control unit with embedded controller and pressure regulation
126496 — Pressure Probe Module (PPM) Classic
• 3-axis positioner (manual XY stage, travel range 25mm, motorized
Z-axis, travel range 10 mm)
• Control software
Features
• For on-wafer-probing of pressure sensors
using patented impact pressure principle
131731 — Pressure Probe Module
(PPM) Probe
• Pressure range: 0.1-7.0 bar (relative)
Features
• Working distance: 40 µm (typical value,
manually adjustable)
• Nozzle matching to one device type
• Specified according to the membrane size
• Settling time: 0.5 seconds
• Requires:
– Semiautomatic probe station
– CorePackage Control PC with network card
Specifications
• Repeatability: ± 5mbar (for p ≤ 500 mbar), < ±1% (for p >500 mbar)
• Media: nitrogen or pressurized air, clean, oil/water free
• Supply pressure: 8-10 bar
Kit Contents
• Control unit with pressure regulation
• Manual 3-axis positioner (travel range XY=25 mm, Z=10 mm)
• Control software
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Pressure Probe Modules and Probes
MEMS • 35
PPM Differential Kits
125471 — PPM Differential Kit, 100 mm
Features
• Chuck add-on for probing 100 mm
wafers with differential pressure
sensors
• Provides atmospheric pressure on the
wafer backside
• Wafer fixing by vacuum trench on wafer edge (6 mm ring)
126483 — PPM Differential Kit, TC, 100 mm
Features
• Part of PPM Pressure Probe
Module Temperature Controlled
• Needed for probing differential
pressure sensors
• For fixing 100 mm wafers
126501 — PPM Differential Kit, 150 mm
Features
• Needed for probing 150 mm wafers
with differential pressure sensors
• Provides atmospheric pressure on the
wafer backside
• Wafer fixing by vacuum trench on
wafer edge
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PPM Differential Kits
MEMS • 36
Microscopes
Elite 300 Microscopes
(With Motorized Scope Transport, No Focus Block)
143-416 — Seiwa Microscope with Accessory Kit
Features
143-417 — Seiwa Microscope for IR Lasers with
Accessory Kit
• Seiwa PS-888 Series Super Scope
Features
• Cost effective and robust optical design
• Seiwa PS-888L Series Super Scope for
355-1064nm laser cutters
• High resolution at high magnification
• Eyepiece viewing with camera port for
optional camera
• Cost effective and robust optical design
• High resolution at high magnification
• Coaxial illumination
• Eye piece viewing
• Kit is optimized for Elite 300 microscope
transport systems (no focus block needed)
• Selectable wavelength ranges through
tube lens turret
Specifications
• Zoom 1X wavelength range 486-656nm
• Zoom 2X wavelength range 486-656nm
• Brightfield Kohler illumination with field and aperture stop
• Color filter and polarizer/analyzer slots
• Approx. 6.8 kg (15 lb)
• Coaxial illumination
• Kit is optimized for Elite 300 microscope transport systems (no
focus block needed)
Specifications
• Zoom 1X wavelength range 355-532nm
• Zoom 1X wavelength range 532-1064nm
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
• Zoom 2X wavelength range 486-656nm (laser cannot be used in
this position)
Kit Contents
• Brightfield Kohler illumination with field and aperture stop
• Microscope body with 1X-2X zoom
• 4 objective manual turret
• Eyepieces: 10X wide field
• Objectives: 2.5X, 10X, 20X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• Fiber optic Illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• 'C-mount' video adapter
Compatibility
• Elite 300/AP, Elite 300/M
• Color filter and polarizer/analyzer slots
• Approx. 6.8 kg (15 lb)
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
Kit Contents
• Microscope body with 1X-2X zoom
• 4 objective manual turret
• Eyepieces: 10X wide field
• Objectives: 2.5X, 10X, 20X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
Compatibility
• Elite 300/AP, Elite 300/M
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 Microscopes
Microscopes • 37
144-287 — Seiwa Microscope, Tilt Head, with Accessory
Kit
143-414 — A-Zoom2 10X Video Out, Manual Zoom and
Eyepieces
Features
Features
• Seiwa PS-888 Series Super Scope
• A-Zoom2 10X series microscope
• Cost effective and robust optical design
• 10:1 continuous zoom
• High resolution at high magnification
• Eyepiece viewing
• Ergonomic eyepiece viewing with up/down
tilt
• Video output
• Camera port for optional camera
• Kit is optimized for Elite 300 (no focus block
needed)
• Coaxial illumination
• Coaxial illumination
• Kit is optimized for Elite 300 microscope
transport systems (no focus block needed)
Specifications
Specifications
• Approx. 6.4 kg (14 lb)
• Zoom 1X wavelength range 486-656nm
• Approx. 14.25-inch tall x 4-inch wide x 4.38-inch deep
• Zoom 2X wavelength range 486-656nm
• Brightfield Kohler illumination with field and aperture stop
• Color filter and polarizer/analyzer slots
• Approx. 6.8 kg (15 lb)
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
Kit Contents
• Microscope body with 1X-2X zoom
• 4 objective manual turret
• 1.4-14X manual zoom
Kit Contents
• Microscope body
• Eyepieces: 10X wide field
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
Compatibility
• Elite 300/AP, Elite 300/M
• Eyepieces: 10X wide field
• Objectives: 2.5X, 10X, 20X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• 'C-mount' video adapter
Compatibility
• Elite 300/AP, Elite 300/M
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 Microscopes
Microscopes • 38
143-415 — A-Zoom2 40X Video Out, Digital Zoom,
Eyepieces, Remote Focus, Laser Ready
151-521 — eVue-III Digital Imaging System, 10X, Remote
Focus
Features
Features
• A-Zoom2 40X series microscope
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• 40:1 digital zoom
• Revolutionary multi-optical path, multi-cam
design
• Laser compatible
• Eyepiece viewing
• Perfect balance of optical resolution, digital
zoom and live motion video
• Video output
• Coaxial illumination
• Integrated long life LED illuminator
• Kit is optimized for Elite 300 (no focus block
needed)
• Integrated, remote and auto focus mechanism
• Kit is optimized for Elite 300 (no focus block
needed)
Specifications
• 0.75-30X digital zoom
Specifications
• Compatible with 355-1064nm laser cutter systems
• 2 optical path/2 camera system with high resolution image sensors
• Approx. 6.4 kg (14 lb)
• 0.5-10X zoom range
• Approx. 14.25-inch tall x 4-inch wide x 4.38-inch deep
• 0.1X zoom resolution
Kit Contents
• 2 mm remote focus range
• Microscope body
• 0.2 µm remote focus resolution
• Wired remote control unit
• Eyepieces: 10X wide field
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• White LED illumination system (solid state, long life)
• Spare lamp bulb, 150W
• AGC illumination leveling, auto-exposure mode
Compatibility
Kit Contents
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Multi-CCD microscope/imager
• 10X standard zoom range (2 camera)
• Sub-micron programmable remote focus stage
• Integrated LED Illumination system
• USB remote control box
• Elite 300 microscope mount
• Intelligent objective lens mount (1)
• Digital video PC interface card
• Video processing software
• Nucleus probe station software integration module
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 Microscopes
Microscopes • 39
151-531 — eVue-III Digital Imaging System, 10X Remote
Focus, Pro Pkg
151-541 — eVue-III Digital Imaging System, 40X Remote
Focus
Features
Features
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Revolutionary multi-optical path, multi-cam
design
• Revolutionary multi-optical path, multi-cam
design
• Perfect balance of optical resolution, digital
zoom and live motion video
• Perfect balance of optical resolution, digital
zoom and live motion video
• Advanced Nucleus probe station software
radically eases wafer navigation, speeds test set
up and increases probe contact accuracy
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
• Kit is optimized for Elite 300 (no focus block
needed)
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
Specifications
• Kit is optimized for Elite 300 (no focus block needed)
• 3 optical path/3 camera system with high resolution image sensors
Specifications
• 0.5-20X zoom range
• 2 optical path/2 camera system with high resolution image sensors
• 0.1X zoom resolution
• 0.5-20X zoom range
• 2 mm remote focus range
• 0.1X zoom resolution
• 0.2 µm remote focus resolution
• 2 mm remote focus range
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 0.2µm remote focus resolution
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 13.1 frame per second high resolution live video frame rate (color
and monochrome)
• White LED illumination system (solid state, long life)
• White LED illumination system (solid state, long life)
• AGC illumination leveling, auto-exposure mode
Kit Contents
• Multi-CCD microscope/imager
• 20X standard zoom range (3 cameras)
• AGC illumination leveling, auto-exposure mode
• Sub-micron programmable remote focus stage
Kit Contents
• Integrated LED Illumination system
• Multi-CCD microscope/imager
• USB remote control box
• 10X standard zoom range (2 cameras)
• Elite 300 microscope mount
• Sub-micron programmable remote focus stage
• Intelligent objective lens mount (1)
• Integrated LED Illumination system
• Digital video PC interface card
• USB remote control box
• Video processing software
• Elite 300 microscope mount
• Nucleus probe station software integration module
• Intelligent objective lens mount (1)
Compatibility
• Digital video PC interface card
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Video processing software
• Nucleus probe station software integration module
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 Microscopes
Microscopes • 40
151-551 — eVue-III Digital Imaging System, 40X Remote
Focus, Pro Pkg
Features
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Revolutionary multi-optical path, multi-cam
design
• Perfect balance of optical resolution, digital
zoom and live motion video
• Advanced Nucleus probe station software
radically eases wafer navigation, speeds test set
up and increases probe contact accuracy
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
• Kit is optimized for Elite 300 (no focus block needed)
Specifications
• 3 optical path/3 camera system with high resolution image sensors
• 0.5-20X zoom range
• 0.1X zoom resolution
• 2 mm remote focus range
• 0.2 µm remote focus resolution
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 13.1 frame per second high resolution live video frame rate (color
and monochrome)
• White LED illumination system (solid state, long life)
• AGC illumination leveling, auto-exposure mode
Kit Contents
• Multi-CCD microscope/imager
• 20X standard zoom range (3 cameras)
• Sub-micron programmable remote focus stage
• Integrated LED Illumination system
• USB remote control box
• Elite 300 microscope mount
• Intelligent objective lens mount (1)
• Digital video PC interface card
• Video processing software
• Nucleus probe station software integration module
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 Microscopes
Microscopes • 41
Standard Microscopes with Focus Blocks
144-286 — Seiwa Microscope, Tilt Head, with Accessory
Kit
120-987 — A-Zoom2 (10X) Microscope, Video Out,
Manual Zoom and Eyepieces
Features
Features
• Seiwa PS-888 Series Super Scope
• A-Zoom2 10X series microscope
• Cost effective and robust optical design
• 10:1 continuous zoom
• High resolution at high magnification
• Eyepiece viewing
• Ergonomic eyepiece viewing with up/down
tilt
• Video output
• Coaxial illumination
• Camera port for optional camera
Specifications
• Coaxial illumination
• 1.4-14X manual zoom
Specifications
• 2-inch focus range
• Zoom 1X wavelength range 486-656nm
• Approx. 6.4 kg (14 lb)
• Zoom 2X wavelength range 486-656nm
• Approx. 14.25-inch tall x 4-inch wide x 4.38-inch deep
• Brightfield Kohler illumination with field and aperture stop
Kit Contents
• Color filter and polarizer/analyzer slots
• Microscope body
• Approx. 6.8 kg (15 lb)
• Eyepieces: 10X wide field
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
• 2-inch heavy duty manual focus block
Kit Contents
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Microscope body with 1X-2X zoom
• Spare lamp bulb, 150W
• 4 objective manual turret
Compatibility
• Eyepieces: 10X wide field
• Elite 300/S, Summit, S300, Alessi
• Objectives: 2.5X, 10X, 20X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• 2-inch heavy duty manual focus block
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• 'C-mount' video adapter
Compatibility
• Elite 300/S, Summit, Tesla*, M150, S300, Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 42
122-009 — A-Zoom2 40X Video Out, Dig Zm, PC Ctrl/SW,
Eyepcs, Remote Focus, Laser Ready
151-522 — eVue-III Digital Imaging System, 10X Remote
Focus
Features
Features
• A-Zoom2 40X series microscope
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• 40:1 digital zoom
• Revolutionary multi-optical path, multi-cam
design
• Laser compatible
• Eyepiece viewing
• Perfect balance of optical resolution, digital
zoom and live motion video
• Video output
• Coaxial illumination
• Integrated long life LED illuminator
• Kit is optimized for Elite 300 (no focus
block needed)
• Integrated, remote and auto focus mechanism
Specifications
Specifications
• 2 optical path/2 camera system with high resolution image sensors
• 0.75-30X digital zoom
• 0.5-10X zoom range
• Compatible with 355-1064nm laser cutter systems
• 0.1X zoom resolution
• Approx. 6.4 kg (14 lb)
• 2 mm remote focus range
• Approx. 14.25-inch tall x 4-inch wide x 4.38-inch deep
• 0.2 µm remote focus resolution
Kit Contents
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• Microscope body
• Wired remote control unit
• White LED illumination system (solid state, long life)
• Eyepieces: 10X wide field
• AGC illumination leveling, auto-exposure mode
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
Kit Contents
• Spare lamp bulb, 150W
• Multi-CCD microscope/imager
Compatibility
• 10X standard zoom range (2 cameras)
• Elite 300/S, Summit, S300, Alessi
• Sub-micron programmable remote focus stage
131-964 — eVue-III Digital Image System, Pro Package
Upgrade
• Integrated LED Illumination system
• USB remote control box
• 2-inch heavy duty manual focus block
Features
• Intelligent objective lens mount (1)
• High Performance Pro Package upgrade for
eVue digital Imaging Systems
• Digital video PC interface card
• Video processing software
• Valid for basic 10X and 40X systems
• Nucleus probe station software integration module
Specifications
Compatibility
• Multi-Z (optical Z-contact system, autofocus)
• Multi-Cam (wafer-probe navigation, picture-in picture)
• Multi-View (hi-res video, probe card alignment, multi-needle views)
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
Kit Contents
• Pricing includes on-site installation
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 43
151-532 — eVue-III Digital Imaging System, 10X Remote
Focus, Pro Package
151-523 — eVue-III Digital Imaging System, 10X Remote
Focus for Manual Stations
Features
Features
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Revolutionary multi-optical path, multi-cam
design
• Revolutionary multi-optical path, multi-cam
design
• Perfect balance of optical resolution, digital
zoom and live motion video
• Perfect balance of optical resolution, digital
zoom and live motion video
• Advanced Nucleus probe station software
radically eases wafer navigation, speeds test set
up and increases probe contact accuracy
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
• Kit includes a certified controller, software and
LCD display
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
Specifications
Specifications
• 2 optical path/2 camera system with high resolution image sensors
• 2 optical path/2 camera system with high resolution image sensors
• 0.5-10X zoom range
• 0.5-10X zoom range
• 0.1X zoom resolution
• 0.1X zoom resolution
• 2 mm remote focus range
• 2 mm remote focus range
• 0.2 µm remote focus resolution
• 0.2 µm remote focus resolution
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 13.1 frame per second high resolution live video frame rate (color
and monochrome)
• White LED illumination system (solid state, long life)
• AGC illumination leveling, auto-exposure mode
Kit Contents
• Multi-CCD microscope/imager
• AGC illumination leveling, auto-exposure mode
• 10X standard zoom range (2 camera)
Kit Contents
• Sub-micron programmable remote focus stage
• Multi-CCD microscope/imager
• Integrated LED Illumination system
• 10X standard zoom range (2 CCD)
• USB remote control box
• Sub-micron programmable remote focus stage
• 2-inch heavy duty manual focus block
• Integrated LED Illumination system
• Intelligent objective lens mount (1)
• USB remote control box
• Digital video PC interface card
• 2-inch heavy duty manual focus block
• Video processing software
• Intelligent objective lens mount (1)
• High performance computer
• Digital video PC interface card
• 20-inch LCD monitor
• Video processing software
Compatibility
• Nucleus probe station software integration module
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
• White LED illumination system (solid state, long life)
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 44
151-533 — eVue-III Digital Imaging System, 10X Remote
Focus Pro Pkg for Manual Stations
151-542 — eVue-III Digital Imaging System, 40X Remote
Focus
Features
Features
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Revolutionary multi-optical path, multi-cam
design
• Revolutionary multi-optical path, multi-cam
design
• Perfect balance of optical resolution, digital
zoom and live motion video
• Perfect balance of optical resolution, digital
zoom and live motion video
• Advanced Nucleus probe station software
radically eases wafer navigation, speeds test set
up and increases probe contact accuracy
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
Specifications
• Integrated long life LED illuminator
• 3 optical path/3 camera system with high resolution image sensors
• Integrated, remote and auto focus mechanism
• Kit includes a certified controller, software and LCD display
Specifications
• 2 optical path/2 camera system with high resolution image sensors
• 0.5-10X zoom range
• 0.5-20X zoom range
• 0.1X zoom resolution
• 2 mm remote focus range
• 0.2 µm remote focus resolution
• 0.1X zoom resolution
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 2 mm remote focus range
• White LED illumination system (solid state, long life)
• 0.2 µm remote focus resolution
• AGC illumination leveling, auto-exposure mode
• 45.5 frame per second live standard video frame rate (color and
monochrome)
Kit Contents
• 13.1 frame per second high resolution live video frame rate (color
and monochrome)
• 20X standard zoom range (3 camera)
• White LED illumination system (solid state, long life)
• Multi-CCD microscope/imager
• Sub-micron programmable remote focus stage
• Integrated LED Illumination system
• AGC illumination leveling, auto-exposure mode
• USB remote control box
Kit Contents
• 2-inch heavy duty microscope mount
• Multi-CCD microscope/imager
• Intelligent objective lens mount (1)
• 10X standard zoom range (2 cameras)
• Digital video PC interface card
• Sub-micron programmable remote focus stage
• Video processing software
• Integrated LED Illumination system
• Nucleus probe station software integration module
• USB remote control box
Compatibility
• 2-inch heavy duty manual focus block
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Intelligent objective lens mount (1)
• Digital video PC interface card
• Video processing software
• High performance computer
• 20-inch LCD monitor
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 45
151-552 — eVue-III Digital Imaging System, 40X Remote
Focus Pro Package
151-543 — eVue-III Digital Imaging System, 40X Remote
Focus for Manual Stations
Features
Features
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Revolutionary multi-optical path, multi-cam
design
• Revolutionary multi-optical path, multi-cam
design
• Perfect balance of optical resolution, digital
zoom and live motion video
• Perfect balance of optical resolution, digital
zoom and live motion video
• Advanced Nucleus probe station software
radically eases wafer navigation, speeds test set
up and increases probe contact accuracy
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
• Kit includes a certified controller, software and
LCD display
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
Specifications
Specifications
• 3 optical path/3 camera system with high resolution image sensors
• 3 optical path/3 camera system with high resolution image sensors
• 0.5-20X zoom range
• 0.5-20X zoom range
• 0.1X zoom resolution
• 0.1X zoom resolution
• 2 mm remote focus range
• 2 mm remote focus range
• 0.2 µm remote focus resolution
• 0.2 µm remote focus resolution
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 45.5 frame per second live standard video frame rate (color and
monochrome)
• 13.1 frame per second high resolution live video frame rate (color
and monochrome)
• White LED illumination system (solid state, long life)
• AGC illumination leveling, auto-exposure mode
Kit Contents
• Multi-CCD microscope/imager
• AGC illumination leveling, auto-exposure mode
• 20X standard zoom range (3 camera)
Kit Contents
• Sub-micron programmable remote focus stage
• Multi-CCD microscope/imager
• Integrated LED Illumination system
• 20X standard zoom range (3 cameras)
• USB remote control box
• Sub-micron programmable remote focus stage
• 2-inch heavy duty manual focus block
• Integrated LED Illumination system
• Intelligent objective lens mount (1)
• USB remote control box
• Digital video PC interface card
• 2-inch heavy duty manual focus block
• Video processing software
• Intelligent objective lens mount (1)
• High performance computer
• Digital video PC interface card
• 20-inch LCD monitor
• Video processing software
Compatibility
• Nucleus probe station software integration module
Compatibility
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
• White LED illumination system (solid state, long life)
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 46
151-553 — eVue-III Dig Imaging System, 40X Remote
Focus Pro Package for Manual Stations
131-954 — eVue Digital Imaging System, Intelligent
Objective Lens Mount
Features
Features
• Optimized for on-wafer test with Cascade
Microtech's probe stations
• Designed to mount M Plan objectives
• Standardized interface for eVue digital Imaging
System
• Revolutionary multi-optical path, multi-cam
design
• Programmability enables recording of objective
specific information
• Perfect balance of optical resolution, digital
zoom and live motion video
• Facilitates rapid changeover between objectives
with automatic configuration (once programmed)
• Advanced Nucleus probe station software
radically eases wafer navigation, speeds test set
up and increases probe contact accuracy
Specifications
• Records and configures the following:
• Integrated long life LED illuminator
• Integrated, remote and auto focus mechanism
• Kit includes a certified controller, software and LCD display
Specifications
• 3 optical path/3 camera system with high resolution image sensors
• 0.5-20X zoom range
– Magnification
– NA – numerical aperture
– Pixel geometry correction factors
– Brand
– Serial Number
Compatibility
• Elite 300, Summit, Tesla*, M150, Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• 0.1X zoom resolution
• 2 mm remote focus range
• 0.2 µm remote focus resolution
• 45.5 frame per second live standard video frame rate (color and
monochrome)
131-785 — Leica S6 Stereo Zoom Microscope Kit, 0.63 4.0 X Zoom
• 13.1 frame per second high resolution live video frame rate (color
and monochrome)
Features
• White LED illumination system (solid state, long life)
• AGC illumination leveling, auto-exposure mode
• Wide field of view for probing larger
features
Kit Contents
• Good resolution for low power
microscopy
• Multi-CCD microscope/imager
• Continuously variable zoom
• 20X standard zoom range (3 cameras)
• Long life LED ring light
• Sub-micron programmable remote focus stage
• Economical choice for many probing needs
• Integrated LED Illumination system
Specifications
• USB remote control box
• 0.63X to 4.0X zoom
• 2-inch heavy duty manual focus block
• 432 line pairs/mm resolution
• Intelligent objective lens mount (1)
• 110 mm working distance (without optional objective installed)
• Digital video PC interface card
• Variable illuminator output with auxiliary control
• Video processing software
Kit Contents
• High performance computer
• Leica S6 E StereoZoom microscope
• 20-inch LCD monitor
• 30X eyepieces (pair)
Compatibility
• Mounting arm
• Elite 300, Summit, Tesla*, Alessi R61
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Long working distance solid state LED ring illuminator
• Illumination control box and cables
• Universal power supply (100-240VAC, 50/60Hz)
Compatibility
• Summit, M150, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 47
132-770 — Leica S8 APO StereoZm Microscope Kit, Wide
FOV, MTS Stations, Video Ready
131-780 — Leica S8 Stereo Zoom Microscope Kit, 1.0 8.0 X Zoom, Video-Ready
Features
Features
• Wide field of view for probing larger features
• Wide field of view for probing larger features
• Excellent resolution for low power microscopy
• Excellent resolution for low power microscopy
• Continuously variable zoom
• Continuously variable zoom
• Video ready optical port
• Video ready optical port
• Long life LED ring light
• Long life LED ring light
• High value choice for many probing needs
• High value choice for many probing needs
Specifications
Specifications
• 8:1 zoom
• 8:1 zoom
• 600 line pairs/mm resolution
• 600 line pairs/mm resolution
• Apochromatic optical design
• Apochromatic optical design
• 100 mm working distance with 0.63X objective installed
• 75 mm working distance
• 75 mm working distance without 0.63X objective installed
• Variable illuminator output with auxiliary control
• Variable illuminator output with auxiliary control
Kit Contents
Kit Contents
• Leica S8 APO StereoZoom microscope, with 1.0 to 8.0 zoom
• Leica S8 APO StereoZoom microscope, with 1.0 to 8.0 zoom
• 20X eyepieces (pair)
• 10X eyepieces (pair)
• Mounting arm with focus control
• Wide FOV objective (0.63X)
• Video adapter 0.63X
• Mounting arm with focus control
• Long working distance solid state LED ring illuminator
• Video adapter 1.0X
• Illumination control box and cables
• Long working distance solid state LED ring illuminator
• Universal power supply (100-240VAC, 50/60Hz)
• Illumination control box and cables
Compatibility
• Universal power supply (100-240VAC, 50/60Hz)
• Summit, M150, Alessi
Compatibility
• MTS
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 48
VMS-70L — Mitutoyo Finescope FS-70 for IR Lasers,
Obj., 10X Eyepcs, Fiber Optic Illuminator
VMS-70Z — Mitutoyo Finescope FS-70, Objectives, 10X
Eyepcs, Fiber Optic Illuminator
Features
Features
• Mitutoyo Finescope FS70L series
• Mitutoyo Finescope FS70Z series
• 1X magnification
• 2:1 continuous zoom
• Selectable eye piece or laser port viewing
• Eyepiece viewing
• Coaxial illumination
• Camera port
Specifications
• Coaxial illumination
• 1X magnification
Specifications
• For 355-1064nm laser cutters
• 1X-2X magnification
• Brightfield Kohler illumination with field and aperture stop
• Brightfield Kohler illumination with field and aperture stop
• Approx. 6.4 kg (14.1 lb)
• Approx. 6.6 kg (14.5 lb)
• Approx. 360 mm tall x 229 mm wide x 324 mm deep
• Approx. 360 mm tall x 229 mm wide x 324 mm deep
Kit Contents
Kit Contents
• Microscope body
• Microscope body
• 4 objective manual turret
• 4 objective manual turret
• Eyepieces: 10X wide field
• Eyepieces: 10X wide field
• Objectives: 2X, 10X, 20X long working distance
• Objectives: 2X, 10X, 20X long working distance
• 2-inch heavy duty manual focus block
• 2-inch heavy duty manual focus block
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• Spare lamp bulb, 150W
• 'C-mount' video adapter
• 'C-mount' video adapter
Compatibility
Compatibility
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 49
VMS-70LP — Mitutoyo Finescope FS-70 for IR Lasers,
Obj, 10X Eyepcs, Fiber Optic Illuminator
VMS-70ZP — Mitutoyo Finescope FS-70, Objectives, 10X
Eyepieces, Fiber Optic Illuminator
Features
Features
• Mitutoyo Finescope FS70L series
• Mitutoyo Finescope FS70Z series
• 1X magnification
• 2:1 continuous zoom
• Selectable eye piece or laser port viewing
• Eyepiece viewing
• Coaxial illumination
• Camera port
Specifications
• Coaxial illumination
• 1X magnification
Specifications
• For 355-1064nm laser cutters
• 1X-2X magnification
• Brightfield Kohler illumination with field and aperture stop
• Brightfield Kohler illumination with field and aperture stop
• Approx. 6.4 kg (14.1 lb)
• Approx. 6.6 kg (14.5 lb)
• Approx. 360 mm tall x 229 mm wide x 324 mm deep
• Approx. 360 mm tall x 229 mm wide x 324 mm deep
Kit Contents
Kit Contents
• Microscope body
• Microscope body
• 4 objective manual turret
• 4 objective manual turret
• Eyepieces: 10X wide field
• Eyepieces: 10X wide field
• Objectives: 2X, 10X, 20X long working distance
• Objectives: 2X, 10X, 20X long working distance
• 2-inch Heavy duty programmable focus block
• 2-inch heavy duty manual focus block
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• Spare lamp bulb, 150W
• 'C-mount' video adapter
• 'C-mount' video adapter
Compatibility
Compatibility
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 50
VMS-888L — Seiwa Microscope for IR Lasers with
Manual Focus and Accessory Kit
VMS-888LP — Seiwa Microscope for IR Lasers with
Programmable Focus and Accessory Kit
Features
Features
• Seiwa PS-888L Series Super Scope for
355-1064nm laser cutters
• Seiwa PS-888L Series Super Scope for
355-1064nm laser cutters
• Cost effective and robust optical design
• Cost effective and robust optical design
• High resolution at high magnification
• High resolution at high magnification
• Eye piece viewing
• Eye piece viewing
• Selectable wavelength ranges through
tube lens turret
• Selectable wavelength ranges through
tube lens turret
• Coaxial illumination
• Coaxial illumination
Specifications
• Programmable focus (requires video camera to operate, sold
separately)
• Zoom 1X wavelength range 355-532nm
• Zoom 1X wavelength range 532-1064nm
Specifications
• Zoom 2X wavelength range 486-656nm (laser cannot be used on
in this position)
• Zoom 1X wavelength range 355-532nm
• Brightfield Kohler illumination with field and aperture stop
• Color filter and polarizer/analyzer slots
• Zoom 2X wavelength range 486-656nm (laser cannot be used on
in this position)
• Approx. 6.8 kg (15 lb)
• Brightfield Kohler illumination with field and aperture stop
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
• Color filter and polarizer/analyzer slots
• Zoom 1X wavelength range 532-1064nm
• Approx. 6.8 kg (15 lb)
Kit Contents
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
• Microscope body with 1X-2X zoom
• 4 objective manual turret
Kit Contents
• Eyepieces: 10X wide field
• Microscope body with 1X-2X zoom
• Objectives: 2.5X, 10X, 20X long working distance
• 4 objective manual turret
• IR/1064nm - Green/532nm compatible (M Plan APO)
• Eyepieces: 10X wide field
• 2-inch heavy duty manual focus block
• Objectives: 2.5X, 10X, 20X long working distance
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• IR/1064nm - Green/532nm compatible (M Plan APO)
• Spare lamp bulb, 150W
• 2-inch heavy duty programmable focus block
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
Compatibility
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
• Spare lamp bulb, 150W
Compatibility
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 51
VMS-888 — Seiwa Microscope with Manual Focus and
Accessory Kit
VMS-888P — Seiwa Microscope with Programmable
Focus and Accessory Kit
Features
Features
• Seiwa (Super Scope) microscope with
accessory kit
• Seiwa PS-888 Series Super Scope
Features
• High resolution at high magnification
• Seiwa PS-888 Series Super Scope
• Cost effective and robust optical design
• Eyepiece viewing with port for optional
camera
• High resolution at high magnification
• Coaxial illumination
• Eyepiece viewing with port for optional
camera
• Programmable focus (requires video
camera to operate, sold separately)
• Coaxial illumination
Specifications
Specifications
• Zoom 1X wavelength range 486-656nm
• Zoom 1X wavelength range 486-656nm
• Zoom 2X wavelength range 486-656nm
• Zoom 2X wavelength range 486-656nm
• Brightfield Kohler illumination with field and aperture stop
• Brightfield Kohler illumination with field and aperture stop
• Color filter and polarizer/analyzer slots
• Color filter and polarizer/analyzer slots
• Approx. 6.8 kg (15 lb)
• Approx. 6.8 kg (15 lb)
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
• Approx. 460 mm tall x 192 mm wide x 360 mm deep
Kit Contents
Kit Contents
• Microscope body with 1X-2X zoom
• Microscope body with 1X-2X zoom
• 4 objective manual turret
• 4 objective manual turret
• Eyepieces: 10X wide field
• Eyepieces: 10X wide field
• Objectives: 2.5X, 10X, 20X long working distance
• Objectives: 2.5X, 10X, 20X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• IR/1064nm - Green/532nm compatible (M Plan APO)
• 2-inch heavy duty programmable focus block
• 2-inch heavy duty manual focus block
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Fiber optic illuminator (90-250 VAC/47-63Hz CE)
• Spare lamp bulb, 150W
• Spare lamp bulb, 150W
• 'C-mount' video adapter
• 'C-mount' video adapter
Compatibility
Compatibility
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
• Cost effective and robust optical design
• Elite 300/S, Summit, M150, Tesla*, S300. Alessi
*Objectives with >10x magnification may not be compatible with
T200 High Voltage testing.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Standard Microscopes with Focus Blocks
Microscopes • 52
Microscopes and Microscope Adapters
66529 — Motic Stereozoom Microscope, SMZ-168
111486 — Microscope Adapter, A-Zoom and
Motic PSM-1000/229
Features
Features
• Light source for optical fiber with control
unit (100-240V/50-60Hz)
• For microscope movement ranges larger than XY
50x50 mm
• Must always be used with PA300, PM300 and
IceShield PS200
• Ring light with 1m optical fiber
• Microscope fixation ring with manual focus
drive
Compatibility
• 2x widefield eyepieces 20x/F.N23
• Trinocular - TV option possible
• PA300, PM300, PA200, PM8, PM5, DSP, BEP
Specifications
142730 — Microscope Adapter, Motic
SMZ-168/229
•
•
•
•
•
Zoom Range 6.7:1
Working distance 113 mm
Magnification 0.75x 5.0x
Eyepiece magnification 15x - 100x
FOV (diameter) 17.3 mm - 2.6 mm
Features
Compatibility
• For microscope movement of 50 x 50 mm and
100 x 100 mm usable
• For adaptation of a Motic SMZ168 to a
microscope movement
• PA300, PM300, PA200, PM8, PM5, DSP, BEP
Compatibility
• PA300, PM300, PA200, PM8, PM5, DSP, BEP
142811 — Stereo Zoom Microscope, SMZ168
Features
120586 — Microscope Adapter, Mitutoyo FS70x-S/229
• Mounts to BlueRay machine base with flexible
industrial arm and horizontal ball bearing
Features
• Manual focus drive, eyepieces 20x
• For microscope movement ranges XY 50x50 mm
and larger
• Only compatible with FS70 with original Mitutoyo
focus rack 378-062
• Always use with PA300 and PM300
• Trinocular - TV option separately available
Compatibility
• Light source for optical fiber with control unit
(100-240V/50-60Hz)
• Ring light with 1m optical fiber
• PA300, PM300, PA200, PM8, PM5, DSP, BEP
Specifications
•
•
•
•
•
Zoom Range: 6.7:1
Working distance: 113 mm
Magnification: 0.75x-5.0x
Eyepiece mag.: 15x-100x
FOV (diameter): 17.3 mm - 2.6 mm
120103 — Microscope Adapter,
Optem/229
Features
• For microscope movement ranges larger
than XY 50x50 mm
Compatibility
Compatibility
• PA200(A) BlueRay
• PA300, PM300, PA200, PM8, PM5, DSP, BEP
Ordering Information
• Part Number for TV port option: 66531
133915 — Microscope Adapter, Olympus
SZ2-STP/229
132712 — Microscope Adapter, Optem
Features
Features
• For adapter Olympus SZ2-STP
• Required when using an OPTEM Zoom 70 video microscope
Compatibility
Compatibility
• PA300, PM300, PA200, PM8, PM5, DSP, BEP
• PA200 BlueRay, PA200 DS BlueRay
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscopes and Microscope Adapters
Microscopes • 53
Microscope Objectives/Eye Pieces
120-873 — A-Zoom2 Objective, 10X, 19 mm Working
Distance (.45 N.A.), Tophat Compatible
132-109 — Leica 0.63 Auxiliary Lens for S8 Leica
Microscope
Features
Features
• Optem objective for A-Zoom2 microscopes
• M Plan apochromatic
• Objective for Leica S8 StereoZoom
microscope
• High resolution optical design
• Increases field of view
• Increases working distance
Specifications
• 10X magnification
Specifications
• NA = 0.45
• 0.63X magnification
• WD = 19.0 mm
• 100 mm working distance
• Resolving power = 0.74 µm
• Apochromatic optical design
• Focal depth = ±1.3 µm
120-875 — A-Zoom2 Objective, 5X,33 mm working
distance (.225 N.A.), Tophat Compatible
131-788 — Leica 25 X Eye Pieces, High
Performance, Extended Relief for Leica
Microscopes
Features
Features
• Wide-field eyepieces compatible with eyeglasses
• Optem objective for A-Zoom2 microscopes
• M Plan apochromatic
Specifications
• High resolution optical design
• 25X magnification
Specifications
131-789 — 30x Eyepieces for Leica S6/S8
Microscopes
• 5X magnification
• NA = 0.225
Features
• WD = 33.0 mm
• Wide field eye-pieces
• Resolving power = 1.5 µm
Specifications
• Focal depth = ±5.4 µm
• 30X magnification
132-509 — A-Zoom2 Objective, 20X, 13 mm, Working
Distance (0.6N.A.), Tophat Compatible
Features
• Optem objective for A-Zoom2 microscopes
• M Plan apochromatic
• High resolution optical design
Specifications
• 20X magnification
• NA = 0.60
• WD = 13.0 mm
• Resolving power = 0.56 µm
• Focal depth = ±0.7 µm
VMA-60-96 — Mitutoyo Objective, 100X, 1 mm Working
Distance (0.9 N.A.)
Features
• Premium Mitutoyo objective
• M Plan apochromatic
• High resolution design
Specifications
• NA = 0.90
• WD = 1.3 mm
• Resolving power = 0.3 µm
• Focal depth = ±0.34 µm
• Wavelength correction = 436-656nm
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Objectives/Eye Pieces
Microscopes • 54
VMA-60-99 — Mitutoyo Objective, 100X, 6 mm Working
Distance (0.7 N.A.)
102-518 — Mitutoyo Objective, 20X, 20 mm Working
Distance (0.42 N.A.)
Features
Features
• Premium Mitutoyo objective
• Premium Mitutoyo objective
• M Plan apochromatic
• M Plan apochromatic
Specifications
Specifications
• NA = 0.70
• 20X magnification
• WD = 6.0 mm
• NA = 0.42
• Resolving power = 0.4 µm
• WD = 20.0 mm
• Focal depth = ±0.6 µm
• Resolving power = 0.7 µm
• Wavelength correction = 436-656nm
• Focal depth = ±1.6 µm
Compatibility
• Wavelength correction = 436-656nm
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
Compatibility
102-517 — Mitutoyo Objective, 10X, 33.5 mm Working
Distance (0.28 N.A.)
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
Features
102-516 — Mitutoyo Objective, 2X, 34 mm Working
Distance (0.055 N.A.)
• Premium Mitutoyo objective
Features
• M Plan apochromatic
• Premium Mitutoyo objective
Specifications
• M Plan apochromatic
• NA = 0.28
Specifications
• WD = 33.5 mm
• 2X magnification
• Resolving power = 1.0 µm
• NA = 0.055
• Focal depth = ±3.5 µm
• WD = 34.0 mm
• Wavelength correction = 436-656nm
• Resolving power = 5.0 µm
Compatibility
• Focal depth = ±91 µm
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
• Wavelength correction = 436-656nm
115-246 — Mitutoyo Objective, 200X, 13 mm Working
Distance (0.62 N.A.)
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
Features
• Premium Mitutoyo objective
• M Plan apochromatic
• Super long working distance design
Specifications
• NA = 0.62
• WD = 13.0 mm
• Resolving power = 0.4 µm
• Focal depth = ±0.7 µm
• Wavelength correction = 436-656nm
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Objectives/Eye Pieces
Microscopes • 55
VMA-60-50 — Mitutoyo Objective, 50X,13 mm Working
Distance (0.55 N.A.)
106-762 — Mitutoyo Objective, 5X, 34 mm Working
Distance (0.14 N.A.)
Features
Features
• Premium Mitutoyo objective
• Premium Mitutoyo objective
• M Plan apochromatic
• M Plan apochromatic
Specifications
Specifications
• 50X magnification
• 5X magnification
• NA = 0.55
• NA = 0.14
• WD = 13.0 mm
• WD = 30.4 mm
• Resolving power = 0.5 µm
• Resolving power = 2.0 µm
• Focal depth = ±0.9 µm
• Focal depth = ±14.0 µm
• Wavelength correction = 436-656nm
• Wavelength correction = 436-656nm
Compatibility
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
102-293 — Mitutoyo Objective, 50X, 20.5 mm Working
Distance (0.42 N.A.)
VMA-60-97 — Mitutoyo Objective, NIR100X, 12 mm
Working Distance, I.R. Passive (0.5 N.A.)
Features
Features
• Premium Mitutoyo objective
• Premium Mitutoyo objective
• M Plan apochromatic
• M Plan apochromatic
• Super long working distance design
• NIR design for IR laser cutter
Specifications
Specifications
• 50X magnification
• 100X magnification
• NA = 0.42
• NA = 0.50
• WD = 20.5 mm
• WD = 12.0 mm
• Resolving power = 0.7 µm
• Resolving power = 0.6 µm
• Focal depth = ±1.6 µm
• Focal depth = ±1.1 µm
• Wavelength correction = 436-656nm
• Wavelength correction = 480-1800nm
Compatibility
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Objectives/Eye Pieces
Microscopes • 56
VMA-60-52 — Mitutoyo Objective, NIR50X, 17 mm
Working Distance, I.R. Passive (0.42 N.A.)
VMA-60-54 — Mitutoyo Objective, NUV50X, 15 mm
Working Distance, U.V. Passive
Features
Features
• Premium Mitutoyo objective
• Premium Mitutoyo objective
• M Plan apochromatic
• M Plan apochromatic
• NIR design for IR laser cutter
• NUV design for UV laser cutter
Specifications
Specifications
• 50X magnification
• 50X magnification
• NA = 0.42
• NA = 0.42
• WD = 17.0 mm
• WD = 15.0 mm
• Resolving power = 0.7 µm
• Resolving power = 0.7 µm
• Focal depth = ±1.6 µm
• Focal depth = ±1.6 µm
• Wavelength correction = 480-1800nm
• Wavelength correction = 355-620nm
Compatibility
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
VMA-60-95 — Mitutoyo Objective, NUV100X, 11 mm
Working Distance, U.V. Passive
VMA-60-98 — Mitutoyo Objective, SL100X, 13 mm
Working Distance (0.55 N.A.)
Features
Features
• Premium Mitutoyo objective
• Premium Mitutoyo objective
• M Plan apochromatic
• M Plan apochromatic
• NUV design for UV laser cutter
• Super long working distance design
Specifications
Specifications
• 100X magnification
• 100X magnification
• NA = 0.5
• NA = 0.55
• WD = 11.0 mm
• WD = 13.0 mm
• Resolving power = 0.6 µm
• Resolving power = 0.5 µm
• Focal depth = ±1.1 µm
• Focal depth = ±0.9 µm
• Wavelength correction = 355-620nm
• Wavelength correction = 436-656nm
Compatibility
Compatibility
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Objectives/Eye Pieces
Microscopes • 57
VMA-60-80 — Mitutoyo Objective, SL80X, 15 mm
Working Distance (0.5 N.A.)
17968 — Objective 5x, WD 34.0 mm, Mitutoyo
Features
• For use with Mitutoyo FS70 microscopes
• Premium Mitutoyo objective
• M Plan apochromatic
• Compatible with iVista, eVue, Motic PSM1000,
Seiwa PS-888, Zoom 70 for Mitutoyo
• Super long working distance design
Specifications
Specifications
• Magnification 5x
• 80X magnification
• Working distance 34.0 mm
• NA = 0.50
• N.A.=0.14
• WD = 15.0 mm
• F=40 mm
• Resolving power = 0.6 µm
• Resolution = 2.0 µm
• Focal depth = ±1.1 µm
• DOF = 14 µm
• Wavelength correction = 436-656nm
• FOV (24 mm eyepiece FS70) = 4.8 mm
Compatibility
• Weight 230g
• Mitutoyo objectives are compatible with the FS70, eVue, A-Zoom,
and Seiwa microscopes.
Compatibility
17967 — Objective 2x, WD 34.0 mm, Mitutoyo
17969 — Objective 10x, WD 33.5 mm, Mitutoyo
Features
Features
• For use with Mitutoyo FS70 microscopes
• For use with Mitutoyo FS70 microscopes
• Compatible with iVista, eVue, MOTIC PSM1000,
Seiwa PS-888, Zoom 70 for Mitutoyo
• Compatible with iVista, eVue, Motic PSM1000,
Seiwa PS-888, Zoom 70 for Mitutoyo
Specifications
Specifications
• Magnification 2x
• Magnification 10x
• Working distance 34.0 mm
• Working distance 33.5 mm
• N.A.=0.055
• N.A.=0.28
• F=100 mm
• F=20 mm
• Resolution = 5.0 µm
• Resolution = 1.0 µm
• DOF = 91 µm
• DOF = 3.5 µm
• FOV (24 mm eyepiece FS70) = 12 mm
• FOV (24 mm eyepiece FS70) = 2.4 mm
• Weight 220g
• Weight 230g
Compatibility
Compatibility
• FS70, PSM100
• FS70, PSM100
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Features
• FS70, PSM100
Cascade Microtech, Inc.
Microscope Objectives/Eye Pieces
Microscopes • 58
17980 — Objective SL20x / WD 30.5 mm, Mitutoyo
Features
126-256 — Seiwa Objective, 5X, 35.1 mm Working
Distance (0.15 N.A.) IR/Green
• For use with Mitutoyo FS70 microscopes
Features
• Compatible with iVista, eVue, Motic PSM1000,
Seiwa PS-888, Zoom 70 for Mitutoyo
• Seiwa objective
Specifications
Specifications
• Magnification 20x
• 5X magnification
• Working distance 30.5 mm
• NA = 0.16
• N.A.=0.28
• WD = 36.1 mm
• F=10 mm
• Resolving power = 2.1 µm
• Resolution = 1.0 µm
• Focal depth = ±10.7 µm
• DOF = 3.5 µm
• Wavelength correction = 400-1600nm
• M Plan apochromatic
• FOV (24 mm eyepiece FS70) = 1.2 mm
• Weight 240g
Compatibility
• FS70, PSM100
126-255 — Seiwa Objective, 2.5X, 32 mm Working
Distance (0.06 N.A.) IR/Green
126-257 — Seiwa Objective, 10X, 36.9 mm Working
Distance (0.25 N.A.) IR/Green
Features
• Seiwa objective
• M Plan apochromatic
Specifications
Features
• 10X magnification
• Seiwa objective
• NA = 0.23
• M Plan apochromatic
• WD = 38.9 mm
Specifications
• Resolving power = 1.5 µm
• 2.5X magnification
• NA = 0.06
• WD = 32.5 mm
• Resolving power = 5.6 µm
• Focal depth = ±76.4 µm
• Wavelength correction = 400-1600nm
• Focal depth = ±5.2 µm
• Wavelength correction = 400-1600nm
126-258 — Seiwa Objective, 20X, 22 mm Working
Distance (0.40 N.A.) IR/Green (
Features
• Seiwa objective
• M Plan apochromatic
Specifications
• 20X magnification
• NA = 0.35
• WD = 22.2 mm
• Resolving power = 1.0 µm
• Focal depth = ±2.2 µm
• Wavelength correction = 400-1600nm
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Objectives/Eye Pieces
Microscopes • 59
Microscope Accessories
67120 — Moticam 2300 CMOS
Camera
106-763 — A-Zoom Mitutoyo Objective Mount
Features
• Required for each objective used on A-Zoom
microscopes
Features
• Compatible with CS-mount camera ports
• Compatible with C-mount camera ports
(by using included CS mount adapter)
• Enables quick change over between objectives
Specifications
• Three (3) megapixel live resolution
• Design to mount M Plan objectives
• Software image enhancements include
noise-reduction, live filtering, and settings memory
• Standard interface to A-Zoom microscopes
• Software included:
– Motic Images Plus 2.0ML for Windows
– Motic Images Plus 2.0 for Macintosh OSX
• Accessories included:
102-363 — Mitutoyo Video Adapter, 1.0X Magnification
– 16mm focusable lens
– 28, 30, 34 & 35mm eyepiece couplers
– B&S adapter to fit into microscope's eyetube
– Macro tube
– Calibration slide for accurate measurements CS mount adapter
Specifications
Features
• Connect video camera to microscope for
remote viewing
Specifications
• 1X magnification
• Minimum specifications for Windows 2000 or XP
– 256MB RAM
– P4
– Built-in USB2.0
• Minimum specifications for Macintosh
101-454 — Spare Bulb for Mitutoyo, A-Zoom, VideoReady Olympus and Optem Illuminators
Features
– OS X or higher
– 256MB RAM
– G4
– Built-in USB2.0
• Chip Configuration: 1/2” Live 3.0 megapixels imaging chip in
portable casing
• Replacement bulb for halogen illuminators
Specifications
• 120V
• 150W
• EKE bulb
• Data Output: USB2.0
• Power Supply: through USB cable from computer
122-526 — A-Zoom Microscopes, Programmable 2-inch
Heavy-Duty Focus Block
Features
• Programmable focus block
• High stability focus mount for microscopes
without internal focus drive
• Custom mounting patterns for Mitutoyo, AZoom and Seiwa
Specifications
• 50 mm (2-inch) travel
• High load capacity suitable for microscopes configured with lasers
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Accessories
Microscopes • 60
Optical
Integrating Sphere and Mounts
53541 — Integrating Sphere, Zenith
134826 — Integrating Sphere Mount, Mitutoyo FS70
Features
Features
• Diffuse, high reflective coating,
recommended for UV-VIS-NIR
wavelength
• Mounting of 1-inch Integrating Sphere into manual
objective turret
Compatibility
• Maximum Temperature 150°C
• FS70
• Input port 1/4-inch (cutting edge-inch
design)
• One detector port 1/4-inch with baffles
and blind plug
• SMA connector fiber optic cable
Compatibility
• Required for 134826, 139086
139085 — Optical Fiber Mount, RPP305
Features
• Controllable by ProberBench Electronics
• Mounting for Instrument Systems EKT-fiber
Specifications
• Positioner arm with pneumatic cylinder, 40
mm stroke, for moving optical fiber out of
microscope field of view
Compatibility
• PA200, PA200 BlueRay, PM8, PM5 +
RPP305-S (and former PH250)
139086 — Integrating Sphere Mount, RPP305
Features
• Positioner arm with pneumatic cylinder, 40 mm stroke, for moving
sphere out of microscope field of view
• Controllable by ProberBench Electronics
• Mounting for Integrating Sphere 1-inch, OptoWhite/Zenith
Compatibility
• PA200, PA200 BlueRay, PM8, PM5 + RPP305-S (and former
PH250)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Integrating Sphere and Mounts
Optical • 61
PA200
PA200 BlueRay
CHUCKS AND THERMAL CHUCK ADAPTERS
139873 — Double Side Chuck Plate
Features
143820 — Chuck, 200 mm, HF, PA200A
• Top plate for double side chuck
Features
• To be used on PA200 DS
BlueRay
• Chuck insulated from
machine
• Vacuum fixture for two
calibration substrates or
probe cleaning pads
• Vacuum zones for differentsized wafers 50 mm, 100
mm, 150 mm, 200 mm
• Single die vacuum location
• For 3-inch wafer, held by
clamping mechanism
• 1 mm circumferential support
• Front cutout for vacuum wand
• Other chucks on request
Compatibility
• PA200 DS BlueRay
• Material: stainless steel (others available on request)
53551 — ATT Chuck System, A200HS, +15°C to +150°C
• Flat surface with vacuum holes (0.8 mm Ø)
Features
Compatibility
• RS232 Interface
• PA200A BlueRay
• Air used for cooling
143821 — Chuck, 200 mm, HF, AP200
• Operated via the interfaces on
the controller or through the
GUI in ProberBench
Features
• Chuck insulated from machine
• Vacuum fixture for two
calibration substrates or probe
cleaning pads
• Vacuum zones for differentsized wafers 50 mm, 100 mm,
150 mm, 200 mm
• Single die vacuum location
• Material: stainless steel (others available on request)
• Flat surface with vacuum holes (0.8 mm Ø)
• Complete system consists of
chuck 200 mm, controller, cooling unit
• Requires additional thermal chuck adapter for BlueRay, with or
without lift pins (138722 or 138723)
Specifications
• Temperature range: +15°C to +150°C
• Temperature resolution: 0.01°C
Compatibility
• PA200 BlueRay
Compatibility
138722 — Thermal Chuck Adapter
• AP200 BlueRay
Features
• Adapter for ATT chuck
system A200HS+15
• Thermal and electrical
insulation of chuck to
machine
Compatibility
• PA200 BlueRay
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PA200 BlueRay
PA200 • 62
138723 — Thermal Chuck Adapter for Chuck with Lift
Pins
Features
• Adapter for ATT chuck system A200HS+15
• Thermal and electrical insulation of chuck to machine
ACCESSORIES
138390 — SE1000 to VIT700/701 Adapter
Features
• With lift pins for loader application
• Connects the SE1000 to the
700 series probe station tables
Compatibility
• By using the VIT701, vibrations
of the ShieldEnclosure are
isolated from the probe station
• PA200 BlueRay
• Not compatible with BlueRay
loader module
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
138651 — Pneumatic Switch Terminal
Features
• Terminal to be mounted to BlueRay platen
• To be used for switching cal-site vacuum
supply
Compatibility
• PA200 BlueRay (not compatible with the
BlueRay DS)
133667 — Mount Arm for Monitor, Keyboard, Mouse, and
Joystick
Features
• Mount arm for flat panel monitor,
mouse and joystick or Expert
Control Panel
• Includes compact computer
keyboard (US English)
• With high quality pneumatic
springs and two revolving joints
• Swing, tilt and rotate for optimum
ergonomic positioning
• Dynamically adjustable to any
working height
• Requires a machine table 700 or VIT701/800/801 for mounting
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PA200 BlueRay
PA200 • 63
136687 — Measuring Instrument Shelf for BlueRay
Features
139985 — Adaptation Integrating Sphere 4-inch
Motorized
• 2 planes for measurement equipment
Features
• Cannot be combined with Shield
Enclosures
• Integrating sphere holder to be used in
PA200 BlueRay DS
Specifications
• Motorized/programmable sphere
adjustment
• 350 mm (W) x 380 mm (D) each
Compatibility
• Mount for integrating sphere 4-inch
LabSphere (sphere not part of this
item)
• PA200 BlueRay, PA200 DS BlueRay
• Adaptation of other spheres on request
• Max. load 30 kg
• Cannot be combined with automatic loader
133371 — Operation Lamp 3 Colors
Specifications
Features
• Movement Range X/Y: 25 mm
• Colors: red, yellow, green
• Movement Range Z: 25 mm
• Programmable through ProberBench
• Red light can be programmed static or blinking
• 800 mm pole (when combined with the Instrument
Measurement Shelf 136687, the mounting pole is
reduced to 400 mm.
Compatibility
• PA200 BlueRay
Compatibility
• PA200 BlueRay, PA200 DS BlueRay
135080 — Adaptation Integrating Sphere
4-inch Manual
Features
• Integrating sphere holder to be
used in PA200 BlueRay DS
• Manual sphere adjustment
• Mount for integrating sphere
4-inch LabSphere (sphere not
part of this item)
• Adaptation of other spheres on request
• Cannot be combined with automatic loader
Specifications
• Movement Range X/Y: 25 mm
• Movement Range Z: 10 mm
Compatibility
• PA200 BlueRay
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PA200 BlueRay
PA200 • 64
PA300 Accessories
PA300PS-MA
SIGMA KITS
138183—Sigma for PreAmp Keithley 4200/6430 (up to 4)
Features
127312—Sigma for Agilent 42941A, HF
Features
• SIGMA Integration of the impedance probe Agilent 42941A into
MicroAlign Advanced systems for capacitance measurements by
IV method, including:
• On-wafer integration of Agilent 42941A close to the DUT to
optimize measurement performance
• SIGMA Integration of up to 4 Keithley
PreAmps for 4200 and 6430 into
MicroAlign Advanced systems,
includes:
• Optimal integration of up to 4
PreAmps on a single Test Equipment
Interface placed close to the DUT
• Optimized cable length reduces systematic measurement error
• For use with any standard triax or triax/Kelvin probe arm and probe
arm for DCP probes
• Appropriate feed-through and ultra-short SMA cable for RF pad
design
• High power cabling outside the MicroAlign (provided by Keithley)
eliminates tribo-electric effects
• Requires RPP305-S positioner with arm East/West/4PH or arm
East/West/4PH/Mirrored plus |Z|Probe GS or SG and an
instrument shelf for optimum instrument connection
Compatibility
Compatibility
• All MicroAlign stations
145265—Sigma for IV/CV
• All MicroAlign stations
Features
• SIGMA Integration of Parameter
Test Instruments for I-V and C-V
measurements into the
MicroAlign Advanced systems,
includes:
131467—Sigma for Agilent E5288A ASU
Features
• SIGMA Integration of Agilent E5288A
ATTO Sense and Switch Units (ASU) to
MicroAlign Advanced systems, including:
• 2 panels with 4 triax-triax-dual connectors (Force & Sense), and 4
coax-triax connectors (type E1)
• On-wafer integration of one or two ASUs
close to the DUT to optimize measurement
performance
• Kelvin connectors (Force & Sense) fit to Agilent 4155/4156/4157,
and any other single triaxial cable with 3-lug plug
• For use with any standard triax or triax/Kelvin probe arm and probe
arm for DCP probes
• 4 coax cables with BNC plug for total cable length of 2 m for CV
measurements
• Providing automated I-V and C-V measurements
• Optimized cable length reduces cable capacitance
• CommonRing technology for shortest virtual ground close to the
DUT
• For use with DPP2xx/DPP3xx positioners with Triax probe arm and
probe arm for DCP probes
• For use with DPP2xx/DPP3xx positioners with Triax probe arm and
probe arm for DCP probes
Compatibility
Compatibility
• All MicroAlign stations
• All MicroAlign stations
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PA300PS-MA
PA300 Accessories • 65
TEST EQUIPMENT INTERFACES
ACCESSORIES
144987—Test Equipment Interface, Pico Probe (up to 2)
143123 — Vacuum Manifolds
Features
Features
• To connect up to 2 active pico
probes to the MicroAlign
Advanced
• Vacuum manifolds for six (6) positioners
each on left and right side of PA300
MicroAlign
• Includes 1 panel with 2
feedthroughs with integrated
cable strain relief
Compatibility
• PA300 MicroAlign
Compatibility
• All MicroAlign stations
145043—Test Equipment Interface, DPP450 for
MicroAlign
Features
• Feedthrough plate for the remote control lines of
a DPP450 for use within a MicroAlign Advanced
system
Compatibility
• All MicroAlign stations
145044—Test Equipment Interface, PH510 (up to 3)
Features
• Feedthrough plate for control
lines of up to 3 PH510 for use
in a MicroAlign system with Top
Chambers
• Not used control lines are
covered by a blank plate
Compatibility
• All MicroAlign stations
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
PA300PS-MA
PA300 Accessories • 66
Positioners and Positioner Accessories
DC Positioners
ENTRY LEVEL
DPP105-M/V-PTH
Features
DPP105-M/V-AI-S
Features
• Low cost probing
• Extremely small footprint
• Probe-tip pressure adjustment
• Single arm with gold-plated
clamping included
• Suitable for probing pads down
to 100 x 100 µm
Specifications
• Travel Range:
– X: 8 mm
– Y: 6 mm
– Z: 25 mm (z-axis control: cw=down, ccw=up)
• Resolution:
– Feature Resolution: 5 µm
– Screw Resolution X 350 µm/rev (70 tpi)
– Screw Resolution Y 500 µm/rev (50 tpi)
– Screw Resolution Z 70 µm/rev (350 tpi)
• Base: Magnetic or Vacuum
• Footprint Dimensions: 60 x 20 mm
Compatibility
Open Platform
Bundles
• Low cost probing
• Extremely small footprint
• Probe-tip pressure adjustment
• Compatible with PTT needle
holders
• Suitable for probing pads down to 100 x 100 µm
Specifications
• Travel Range:
– X: 8 mm
– Y: 6 mm
– Z: 25 mm (z-axis control: cw=down, ccw=up)
• Resolution:
– Feature Resolution: 5 µm
– Screw Resolution X 350 µm/rev (70 tpi)
– Screw Resolution Y 500 µm/rev (50 tpi)
– Screw Resolution Z 70 µm/rev (350 tpi)
• Base: Magnetic or Vacuum
Compatibility
Open Platform
+ PTH Arms
Summit
Ordering Information
• DPP105-M-PTH
• DPP105-V-PTH
PM5
PM8
PM300
PA200
PA300
Ordering Information
• DPP105-M-AI-S
• DPP105-V-AI-S
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC Positioners
Positioners and Positioner Accessories • 67
STANDARD
DPP210-M/V-L/R; DPP210-M/V-L/R-S
Features
DPP205-M/V-L/R; DPP205-M/V-L/R-S
• Accurate X and Y placement and precise
probe over travel with easily adjusted knobs
Features
• Adjustable probe arm mounting plate
• Accurate X and Y placement and precise
probe over travel with easily adjusted knobs
• Optimized for Cascade Microtech’s triaxial
probing accessories and MicroChamber
• Adjustable probe arm mounting plate
• Optimized for Cascade Microtech’s triaxial
probing accessories and MicroChamber
• With probe and triaxial accessories,
micropositioner configures to state-of-theart, guarded, low-noise triaxial probing in
minutes
DPP205-V-R
• With probe and triaxial accessories,
micropositioner configures to state-of-theart, guarded, low-noise triaxial probing in
minutes
DPP210, magnetic
base, right-hand xaxis control
• Captivated stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side of
platen
• Captivated stages with leadscrew design
• High precision cross-roller bearings
• Can be ordered with either:
• Can be ordered with either:
– Vacuum base
– Switch type magnetic base with residual
DPP205-M-L-S
holding force
• Configured for use on left or right hand side of platen
Specifications
– Vacuum base
– Switch type magnetic base with residual
holding force
Specifications
• Ideal for 2 µm or larger feature resolution
DPP210, vacuum
base, left-hand xaxis control
• Fine screw: 0.25mm pitch (100TPI)
• Ideal for 3 µm or larger feature resolution
• Fine screw: 0.5mm pitch (50TPI)
• 12.5mm (0.5 inch) travel in X, Y and Z stages (z-axis control:
cw=down, ccw=up)
• 12.5mm (0.5 inch) travel in X, Y and Z stages (z-axis control:
cw=down, ccw=up)
• 90mm x 60mm footprint in (WxD)
• 90mm x 60mm footprint in (WxD)
Platforms +
Open Platforms +
Dedicated Arms DC Arms
Compatibility
Platforms +
Open Platforms +
Dedicated Arms DC Arms
Elite 300
PA300MA
Summit
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
Ordering Information
• DPP205-M-L
• DPP205-M-R
• DPP205-V-L
• DPP205-V-R
Compatibility
• DPP205-M-L-S
• DPP205-M-R-S
• DPP205-V-L-S
• DPP205-V-R-S
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Elite 300
PA300MA
Summit
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
Ordering Information
• DPP210-M-L
• DPP210-M-R
• DPP210-V-L
• DPP210-V-R
Cascade Microtech, Inc.
• DPP210-M-L-S
• DPP210-M-R-S
• DPP210-V-L-S
• DPP210-V-R-S
DC Positioners
Positioners and Positioner Accessories • 68
DPP220-M/V-L/R; DPP220-M/V-L/R-S
Features
• Accurate X and Y placement and precise
probe over travel with easily adjusted
knobs
• Adjustable probe arm mounting plate
• Optimized for Cascade Microtech’s triaxial
probing accessories and MicroChamber
• With probe and triaxial accessories,
micropositioner configures to state-of-theart, guarded, low-noise triaxial probing in
minutes
DPP220, vacuum
base, right-hand
x-axis control
• Captivated stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side of
platen
• Can be ordered with either:
– Vacuum base
– Switch type magnetic base with residual
holding force
DPP220, magnetic
base, left-hand
x-axis control
Specifications
• Ideal for 1 µm or larger feature resolution
• Fine screw: 0.125mm pitch (200TPI)
• 12.5mm (0.5 inch) travel in X, Y and Z stages (z-axis control:
cw=down, ccw=up)
• 90mm x 60mm footprint in (WxD)
Compatibility
Platforms +
Open Platforms +
Dedicated Arms DC Arms
Elite 300
PA300MA
Summit
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
Ordering Information
• DPP220-M-L
• DPP220-M-R
• DPP220-V-L
• DPP220-V-R
• DPP220-M-L-S
• DPP220-M-R-S
• DPP220-V-L-S
• DPP220-V-R-S
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC Positioners
Positioners and Positioner Accessories • 69
High-End Failure Analysis (FA) Positioners
DPP305-M/V-S; DPP305-M/V-PTH
DPP310-M/V-S; DPP310-M/V-PTH
Features
Features
• With precision ball bearings
• With precision ball bearings
Specifications
• Movement range: XY: 10mm,
Z: 8 mm
• Z coarse adjustment range: 15
mm
• Micrometer screws: 0.5 mm pitch
DPP305 compatible with DC
arms, and dedicated arms
• Ideal for 0.5 μm or larger feature
resolution
DPP305 compatible
with PTH arms
• Movement range: X,Y: 10 mm, Z: 8 mm
• Ideal for 0.5 μm or larger feature resolution
• Z coarse adjustment range: 15 mm (z-axis control: cw=down,
ccw=up)
• Movement range: X,Y: 10 mm, Z: 8 mm
• Micrometer screws: 500 µm pitch (100TPI)
• Z coarse adjustment range: 15 mm (z-axis control: cw=down,
ccw=up)
Compatibility
Specifications
• Micrometer screws: 500 µm pitch (50TPI)
Compatibility
Platforms + PTH
Arms
Open Platforms +
DC Arms
Platforms +
Dedicated Arms
Elite 300
PA300MA
Summit
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
PA300MA
Ordering Information
Platforms +
PTH Arms
Open Platforms + Platforms +
DC Arms
Dedicated Arms
Elite 300
PA300MA
Summit
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
PA300MA
Ordering Information
• DPP310-M-S
• DPP310-V-S
• DPP310-M-PTH
• DPP310-V-PTH
• DPP305-M-S
• DPP305-V-S
• DPP305-M-PTH
• DPP305-V-PTH
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
High-End Failure Analysis (FA) Positioners
Positioners and Positioner Accessories • 70
DPP450-M/V-S; DPP450-M/V-PTH
Features
• With precision ball bearings
• Remote control block for fine movement
• For use with respective DPP3xx arms
Specifications
• Ideal for 0.2 μm or larger feature
resolution
• Movement range X:10, Y:10, Z:8 mm,
fine movement 300 µm in each axis
• Z coarse adjustment range: 15 mm (z-axis control: cw=down,
ccw=up)
• Micrometers with pitch of 500 µm (50TPI) and superimposed
hydraulic elements with 5µm/turn (5000TPI)
Compatibility
Platforms +
PTH Arms
Open Platforms +
DC Arms
Platforms +
Dedicated Arms
Elite 300
PA300MA
Summit
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
PA300MA
Ordering Information
• DPP450-M-S
• DPP450-V-S
• DPP450-M-PTH
• DPP450-V-PTH
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
High-End Failure Analysis (FA) Positioners
Positioners and Positioner Accessories • 71
RF Positioners
STANDARD
RPP210-M/V/B-L/R-AI
Features
RPP210-M/V/B-L/R-S
Features
• 3 linear axes with precision ball bearings
• For adaptation of HF probes or probe
wedges
• Magnetic fixation on HF platen or
alternative with vacuum
• Rigid probe platform yields repeatable
measurements at microwave
frequencies
• Economical conversion for probe
stations originally configured for
needle probing
Specifications
• Accurate X and Y placement and
precise probe over travel with easily
adjusted knobs
• Movement range: 12.5mm in X, Y and Z
(z-axis control: cw=down, ccw=up)
• Micrometer set planarity adjustment
• Captivated stages with leadscrew design
• Fine screws: 0.25 mm pitch (100TPI)
• High precision cross-roller bearings
Compatibility
• Vacuum base or switch-type magnetic base with residual holding
force
Platforms + RF Arms
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
PA300-MA
Ordering Information
• RPP210-M-L-S
• RPP210-M-R-S
• RPP210-V-L-S
• RPP210-V-R-S
• RPP210-B-L-S
• RPP210-B-R-S
• Configured for use on left/right hand side of platen
• Can be ordered with either:
– Switch type magnetic base with residual holding force
– Vacuum base
– Bolt-down base
Specifications
• 12.5mm (0.5 inch) travel in X, Y and Z stages (z-axis control:
cw=down, ccw=up)
• Fine screw: 0.25mm pitch (100TPI)
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Configurations
• Use on platen left location as WEST positioner
• Use on platen front location as SOUTH positioner
• Use on platen right location as EAST positioner
• Use on platen rear location as NORTH positioner
Compatibility
Platforms + AI Arms
Summit
Ordering Information
• RPP210-M-L-AI
• RPP210-M-R-AI
• RPP210-V-L-AI
• RPP210-V-R-AI
• RPP210-B-L-AI
• RPP210-B-R-AI
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
RF Positioners
Positioners and Positioner Accessories • 72
ADVANCED
RPP210-M/B-L-T-EW/NS-AI
Features
• Rigid probe platform yields
repeatable measurements at
microwave frequencies
RPP305-M/V/B-S
Features
• Economical conversion for probe
stations originally configured for
needle probing
• 3 linear axes with precision ball
bearings
• Use with mmWave positioners for 4port applications
• Bolt down, magnetic, or vacuum
fixation to HF platen
• Accurate X and Y placement and precise probe over travel with
easily adjusted knobs
Specifications
• For adaptation of HF probes
• Micrometer set planarity adjustment
• Travel range: X,Y: 25 mm, Z: 10 mm (z-axis control: cw=down,
ccw=up)
• Optimized for Cascade Microtech’s MicroChamber
• Micrometer screws: 0.5 mm pitch (50TPI)
• Captivated stages with leadscrew design
Compatibility
• High precision cross-roller bearings
Platforms + RF Arms
• Can be ordered with either:
– Switch type magnetic base with residual holding force
– Vacuum base
– Bolt-down base
Specifications
• 12.5mm (0.5 inch) travel in X, Y and Z stages (z-axis control:
cw=down, ccw=up)
• Fine screw: 0.25mm pitch (100TPI)
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
PA300-MA
Ordering Information
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
• RPP305-M-S
• RPP305-V-S
• RPP305-B-S
Configurations
• Use on platen front/rear location as NS positioner
• Use on platen left/right location as EW positioner
Compatibility
Platforms + AI Arms
Summit
Ordering Information
(Note that T = TopHat)
• RPP210-M-L-T-EW-AI
• RPP210-M-L-T-NS-AI
• RPP210-B-L-T-EW-AI
• RPP210-B-L-T-NS-AI
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
RF Positioners
Positioners and Positioner Accessories • 73
RPP305-EW/NS-EL/SU-AI
Features
• Precision 4 axis probe positioner
for RF/microwave probes
• Optimized for Elite 300/Summit
12K-B station platform
• Ultra rigid design for best probe
placement
• New one-click positioner quick release control allows fast setup
and effortless gross positioning of RF probes
• Smooth glide micrometer controls for accurate probe placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection
• Micrometer set planarity adjustment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Travel range: 25mm in X and Y; 10mm in Z (z-axis control:
cw=down, ccw=up)
• Micrometer screws: 500µm pitch (50 TPI)
• Micrometer set planarity adjust: ±5°
• Gross X travel: 26 mm (1-inch) with TopHat; 68 mm (2.7-inch) with
no TopHat/insert
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6-inch)
– Without MicroChamber TopHat: 93 mm (3.7-inch)
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom location as North/South positioners
(4-port)
Compatibility
Open Platforms +
EL Arms
Open Platforms +
SU Arms
Elite 300
Summit
Tesla
Ordering Information
Elite 300
• RPP305-NS-EL-AI
• RPP305-EW-EL-AI
Summit
• RPP305-NS-SU-AI
• RPP305-EW-SU-AI
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
RF Positioners
Positioners and Positioner Accessories • 74
mmW and Motorized Positioners
OPEN PLATFORM RF AND MICROWAVE
POSITIONERS
ELITE 300 RF AND MICROWAVE POSITIONERS
141-779 — mmW Large Area Positioner (W)
129227 — PH350HF (2)
Features
Features
• Precision 3 axis large area positioner
for mmWave probes
• Set of two PH350HF includes
probe arms for fixing standard
HF probes from all vendors
• Optimized for Elite 300 Station
Platform
• Micrometer set planarity adjustment
• For adaptation of the 1 mm
110GHz modules Agilent
N5250A or Anritsu 3742A-EW
fixed with screws on the PH350
• Industry standard RF probe mount
Specifications
• For adaptation of all Rohde & Schwarz converter with 1 mm cable,
requires additional adapter platen depending from type (on request)
• Special flat design to minimize the HF cable length for highest
measurement dynamic range
• Mounting of other tuners is possible with leveling feet and/or
adapter platen (on request)
• Fixed by screws onto the HF platen
Specifications
• Travel range: X,Y: 25 mm, Z: 10 mm (z-axis control: cw=down,
ccw=up)
• XY travel: 150 mm (6-inch)
• Z travel: 12.5 mm (0.5-inch) Micrometer set planarity adjust: ±5°
(z-axis control: cw=down, ccw=up)
• Weight: TDB
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6-inch)
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Configurations
• Use on platen left location as WEST positioner (2-port)
• With 75 mm fast X-coarse movement for coaxial measurements
• Micrometer pitch: 500µm pitch (50 TPI)
Compatibility
• All PA/PM stations with dedicated platen (except BlueRay and
MicroAlign)
138230 — PH510 Motorized Positioner
Features
• IV/CV, RF motorized probing
• Multi-contact/mixed signal probing
• Versatile wafer level reliability
probing
Specifications
• Feature resolution: 3 μm
• Travel range: (X / Y / Z) 25 mm / 25 mm / 25 mm
• Encoder resolution: (X / Y / Z) 0.02 μm / 0.02 μm / 0.02 μm
• Mounting: vacuum, magnetic, bolt down
• Footprint: 64 mm x 122 mm
Compatibility
• PM5, PM8, PM300, PA200, PA300, BlueRay, PA300 MicroAlign
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
mmW and Motorized Positioners
Positioners and Positioner Accessories • 75
141-778 — mmW Large Area Positioner (E)
MS1-8-40 — RF Motorized Microwave Positioner (E/W)
Features
Features
• Precision 3 axis large area
positioner for mmWave probes
• Fully programmable high resolution
positioner for RF/microwave probes
• Optimized for Elite 300 Station
Platform
• Provides 3 axes of linear motion with
1-inch of travel
• Video point-and-click movement with
Nucleus prober control software
• New one-click positioner quick
release control allows fast setup
and effortless gross positioning
of RF probes
• Ultra rigid design for best probe
placement
• Manual override of XYZ controls
without losing software position
Two MS1-8-40 positioners
• Multi position RF cable clamp
shown in East and West
and offset probe mounting arm
positions with two 139-311B
for optimized RF cable
positioners (in N/S positions)
connection
• Micrometer set planarity adjustment
• Optimized for Elite 300 Station
Platform
• Micrometer set planarity
adjustment
• Industry standard RF probe
mount
Specifications
• XY travel: 150 mm (6-inch)
• Z travel: 12.5 mm (0.5-inch) (z-axis
control: cw=down, ccw=up)
• Micrometer set planarity adjust:
±5°
• Weight: TDB
• 2-port probe tip separation
4-port configuration using
East mmWave positioner,
West mmWave positioner,
and 2 E/W RF positioners
placed in N/S positions.
• With MicroChamber TopHat: 40 mm (1.6-inch)
• Without MicroChamber TopHat: TBD mm (y-inch)
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Configurations
• Use on platen left location as EAST positioner (2-port)
• EMI grounding strap
• Industry standard RF probe mount
Specifications
•
•
•
•
•
•
•
•
•
•
•
•
•
XY travel: 25 mm (1-inch); Z travel: 15 mm (0.6-inch)
Accuracy: 1 µm
Repeatability: 1 µm
High resolution at 0.1 µm step size
Closed loop motor-encoder system
Speed: 1 mm/sec
Micrometer set planarity adjust: ±5°
Gross Y travel: 26.42 mm (1.04-inch) with TopHat; 61.98 mm
(2.44-inch) with no TopHat/insert
Weight: 4.99 kg (11 lbs)
Dimensions: height 140 mm (5.5-inch) x width 160 mm (6.28-inch)
x depth 148 mm (5.8-inch)
2-port probe tip separation
– With MicroChamber TopHat: 40.64 mm (1.6-inch)
– Without MicroChamber TopHat: 81.28 mm (3.2-inch)
Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Includes 1 ECA-53 motor controller card for ECX-56D high
resolution controller (not included)
Configurations
• Use on platen right location as EAST positioner
• Use on platen left location as WEST positioner
Compatibility
• Elite 300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
mmW and Motorized Positioners
Positioners and Positioner Accessories • 76
SUMMIT RF AND MICROWAVE POSITIONERS
MS1-8W — West Positioner, Programmable
Features
• Fully programmable high
resolution positioner for RF/
microwave probes
MS1-8E — East Positioner, Programmable
Features
• Fully programmable high
resolution positioner for RF/
microwave probes
• Provides 3 axes of linear motion
with 1-inch of travel
• Video point and click movement
with Nucleus prober control
software
• Provides 3 axes of linear motion
with 1-inch of travel
• Video point and click movement
with Nucleus prober control
software
• Ultra rigid design for best probe placement
• Manual override of XYZ controls without losing software position
• Multi position RF cable clamp for optimized RF cable connection
• Ultra rigid design for best probe placement
• Manual override of XYZ controls without losing software position
• Multi position RF cable clamp for optimized RF cable connection
• Micrometer set planarity adjustment
• Industry standard RF probe mount
• XY travel: 25 mm (1-inch)
• Industry standard RF probe mount
• Z travel: 15 mm (0.6-inch)
Specifications
• Accuracy: 1 µm
• XY travel: 25 mm (1-inch)
• Repeatability: 1 µm
• Z travel: 15 mm (0.6-inch)
• High resolution at 0.1 µm step size
• Accuracy: 1 µm
• Closed loop motor-encoder system
• Repeatability: 1 µm
• Speed: 1 mm/sec
• High resolution at 0.1 µm step size
• Micrometer set planarity adjust: ±5°
• Closed loop motor-encoder system
• Weight: 4.99 kg (11 lbs)
• Speed: 1 mm/sec
• Dimensions: height 140 mm (5.5-inch) x width 160 mm (6.28-inch)
x depth 148 mm (5.8-inch)
• Micrometer set planarity adjust: ±5°
• Weight: 4.99 kg (11 lbs)
• Dimensions: height 140 mm (5.5-inch) x width 160 mm (6.28-inch)
x depth 148 mm (5.8-inch)
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
• Includes 1 ECA-53 motor controller card for ECX-56D high
resolution controller (not included)
• Use on platen right location as EAST positioner
• EMI grounding strap
Specifications
• EMI grounding strap
Configurations
• Micrometer set planarity adjustment
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
• Includes 1 ECA-53 motor controller card for ECX-56D high
resolution controller (not included)
Configurations
• Use on platen left location as WEST positioner
Compatibility
• Summit 12K, S300
Compatibility
• Summit 12K, S300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
mmW and Motorized Positioners
Positioners and Positioner Accessories • 77
133-528 — mmW Positioner, Manual, East Position
133-525 — mmW Positioner, Manual, West Positioner
Features
Features
• Precision 3 axis large area
positioner for Waveguide and
1.0 mm coaxial probes
• Precision 3 axis large area
positioner for Waveguide and
1.0 mm coaxial probes
• True vertical Z-axis avoids
probe damage when probes
are in close proximity to each other (thru measurements) and easy
to view initial contact for accurate probe placement
• True vertical Z-axis avoids
probe damage when probes
are in close proximity to each other (thru measurements) and easy
to view initial contact for accurate probe placement
• Quick release mechanism on X and Y axes for rapid test set-up
•
•
•
•
• Micrometer set planarity adjustment
• Industry standard RF probe mount
• Includes brackets to secure common test heads
Specifications
Specifications
• XY travel: 150 mm (6-inch)
• XY travel: 150 mm (6-inch)
• Z travel: 12.5 mm (0.5-inch) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Configurations
• Use on platen left location as EAST positioner
Compatibility
• Summit, S300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Quick release mechanism on X and Y axes for rapid test set-up
Micrometer set planarity adjustment
Industry standard RF probe mount
Includes brackets to secure common test heads
• Z travel: 12.5 mm (0.5-inch) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole Cascade Microtech standard design,
with locating pin
Configurations
• Use on platen right location as West positioner
Compatibility
• Summit, S300
Cascade Microtech, Inc.
mmW and Motorized Positioners
Positioners and Positioner Accessories • 78
Positioner Accessories
DCM POSITIONER ACCESSORIES
RF POSITIONER ACCESSORIES
138-023 — Bracket for Keithley 4200-PA-1 for DPP2xx
Positioner
107-088 — Bracket Mount for Bias Tee/Agilent E4991A
Module, for RF Positioners
Features
Features
• Gets the Preamp close to the wafer/
device under test
• Accessory mounting kit for RF
positioners
• Isolated from the thermal environment of
the wafer and station platen for highly
stable measurements
• Used for bias tees
• Mounts to Z axis to minimize cable flexure
between the Amp and probe
• Used for test head modules
such as Agilent E4991 test
heads
Kit Contents
• Slotted mounting holes for
easy multiple use adaptation
• Mounting bracket
Kit Contents
• Mounting hardware
• Mounting plate
Compatibility
• Plate mounting hardware
• Elite 300, Summit, S300, M150, Alessi
Compatibility
• Elite 300, Summit, S300, M150, Alessi
141-858 — FPC Mount for RF Positioners
Features
• Adapts between standard Cascade
Microtech 3-hole mount to FPC style
mount
• Allows the FPC probe to swing to address
probing target
Specifications
• Compatible with standard 40 mm chuck below platen
configurations
• Compatible with POS-RF positioners
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Positioner Accessories
Positioners and Positioner Accessories • 79
POSITIONER ACCESSORIES FOR OPEN PLATFORMS
145034 — Easy Positioning System for DPP3xx-M-S
Features
143098 — PH510 Positioner Adapter for HF Platen and
RPP305-S Probe Arm
Features
• Mechanical adaptation of PH510 to layout
of RF platen
• For fast parallel mounting of 2, 3 or 4
positioners on each side of a
MicroAlign system
• Adaptation for use of RF probe arms
RPP305-S
• Suitable for DPP2xx-M-S and
DPP3xx-M-S positioners only
• PH510
Compatibility
Compatibility
• PA300MA Basis
115604 — Quarter Ring on HF Platen for DC Probes
Features
• One quarter ring which instead of a
[RPP305-M-S] can be bolted down to
each of the 4 corners of an HF platen
• All DC probes can be used with
standard arm length
• Fits all HF platens except MicroAlign
Compatibility
• PA300, PM300, PA200, PM8 + HF platen
18129 — Plug, Female, HF-3 mm, Subminiature
Features
• Fits 3 mm male HF plug (18130) used with DPP105
Compatibility
• DPP105
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Positioner Accessories
Positioners and Positioner Accessories • 80
Cryogenic & Vacuum Positioners
137197 — VCP110, DC Triax, Cryo, PMC200/PAC200
Features
147061 — VCP110, HF North-South, Cryo, PMC200/
PAC200
• VCP110 high vacuum probe positioner
Features
• Stainless steel main body
• VCP110 high vacuum probe positioner
• Magnetic foot adapter
• Stainless steel main body
• Three (3) linear axes with 12 mm
movement range
• Magnetic foot adapter
• Right-angled HF arm includes thermal
contacts for cooling Cryo |Z|Probe
• Probe arm DC triax with vacuum proof
triax cable with connector to electrical
feedthrough flange
Specifications
• Three (3) linear axes with 12 mm movement range
Compatibility
Compatibility
• PAC200, PMC200
• PAC200, PMC200
148722 — VCP110, DC Triax, Cryo, PMC200/PAC200
137198 — VCP110, HF East-West, Cryo, PMC200/PAC200
Features
Features
• VCP110 high vacuum probe positioner
• VCP110 high vacuum probe positioner
• Stainless steel main body
• Stainless steel main body
• Magnetic foot adapter
• Magnetic foot adapter
• Probe arm DC triax with vacuum proof
triax cable with connector to electrical
feedthrough flange
• Probe arm HF straight
• Three (3) linear axes with 12 mm
movement range
• Thermal contacts for probe cooling
Compatibility
• Three (3) linear axes with 12 mm movement range
• PAC200, PMC200
Compatibility
• PAC200, PMC200
147160 — VCP110, HF East-West, Cryo, PMC200/PAC200
Features
• VCP110 high vacuum probe positioner
• Stainless steel main body
• Magnetic foot adapter
• HF arm straight includes thermal contacts
for cooling Cryo |Z| probe
137199 — VCP110, North-South, Cryo, PMC200/PAC200
Features
• VCP110 high vacuum positioner
• Stainless steel main body
• Magnetic foot adapter
• Probe arm HF right-angled
Specifications
• Three (3) linear axes with 12 mm
movement range
• Three (3) linear axes with 12 mm
movement range
Compatibility
Compatibility
• PAC200, PMC200
141-400 Probe Station Accessory Catalog
April 2012, Rev L
• PAC200, PMC200
Cascade Microtech, Inc.
Cryogenic & Vacuum Positioners
Positioners and Positioner Accessories • 81
140967— VCP110, High Vacuum, DC Triax, PLV50
Features
• VCP110 high vacuum probe
positioner
• Stainless steel main body
• Magnetic foot adapter
• Probe arm DC triax with
vacuum proof triax cable with
connector to electrical
feedthrough flange
• Three (3) linear axes with 12 mm movement range
Compatibility
• PLV50
140968 — VCP110, High Vacuum, HF East-West, PLV50
Features
• VCP110 high vacuum probe
positioner
• Stainless steel main body
• Magnetic foot adapter
• Probe arm HF straight
• Three (3) linear axes with 12
mm movement range
Compatibility
• PLV50
140969 — VCP110, High Vacuum, HF Arm, North-South,
PLV50
Features
• VCP110 high vacuum probe
positioner
• Stainless steel main body
• Magnetic foot adapter
• Probe arm HF right-angled
Specifications
• Three (3) linear axes with 12 mm movement range
Compatibility
• PLV50
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Cryogenic & Vacuum Positioners
Positioners and Positioner Accessories • 82
Probe Card Holders/Adapters
Probe Card Adapters and Accessories
PA, PM, DSP
PA300PS-MA
100529 — Probe Card Adapter, 6x7-Inch
140436 — Probe Card Adapter, MicroAlign, 4.5-inch
Features
Features
• Accepts 6-inch wide probe card
• For use by probe
cards with 4.5-inch
width inside the EMI/
RFI shielded and
light-tight environment
of the PA300PS-MA
Advanced and Probe
Card
• Probe card located below platen
• Flexible probe arms
recommended if DPP3xx is used
• Low profile probe card holder with
bridge mounted 5° Theta and
planarity adjustment
Compatibility
• Integrated ProtecPlate for optimal low-level accuracy
• PA300, PM300, PA200, PM8, PM5, all DSP stations
• Frost-free probing
129912 — Probe Card Adapter, 4x7-inch to 4x11-inch
• Simultaneous usage with positioners
• Simple and fast installation of the adapter by the operator
Features
• Easy compensation of different tip drop
• Top loader/front loader
functionality
• Check probe card for mechanic compatibility (electric connectors,
tip drop, wire harness, etc.)
• Maximum thickness of
probe card: 23 mm, front
loading
Compatibility
• PA300PS-MA
• Very stiff design
141449 — Celadon Adapter, MicroAlign
• Requires Platen Insert Ring
PH/PC for use in PM300BEP (132521)
Features
• Extension of the 4.5-inch probe card
adapters for MicroAlign for use by 40 mm
and 72 mm tiles from Celadon only
Specifications
• For standard formats 4x7-inch to 4x11-inch
• Theta adjustment range: 5°
• Two cable feed throughs from rear side on
top of the platen
• Minimum tip drop: 2 mm (0.08-inch)
Compatibility
• PA300, PM300, PA200 and PA200 BlueRay, PM8, PM5, all DSP
stations
• Suitable for maximum two low-noise triaxial
cable harness with 25 signals (51127)
• Includes covers of the front and rear platen
opening
Compatibility
• PA300PS-MA
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Adapters and Accessories
Probe Card Holders/Adapters • 83
149400 — Probe Card Adapter, MicroAlign, 4.5-inch/4x
90°
Features
PROBE CARD ADAPTER ACCESSORIES
100651 — Insert for Probe Card Adapter
• For use by probe cards with
4.5-inch width inside the EMI/
RFI shielded and light-tight
environment of the PA300PSMA Advanced and Probe
Card
Features
• For use with probe
cards with probe card
adapter and HF platen
• Integrated ProtecPlate for
optimal low-level accuracy
• When DPP positioners
are used, RPP305-B
must be removed
• Mechanical and thermal stiff design for lowest drift
Compatibility
• Frost-free probing
• PM5, PM8, PM300, PA200, PA300 with RF platen
• Simultaneous usage with positioners
• Simple and fast installation of the adapter by the operator
51127 — Celadon Cable Harness
• Easy compensation of different tip drop
Features
• Probe card mountable in 90° steps
• Harness of 25 triaxial cables for Celadon probe cards (single site,
multi site), MiniTiles or VersaTiles, length 2 meter
Note: The double number of cables in the harness or even several
harnesses are required for Kelvin Connections (two cables to each
probe)
• Includes covers of the front and rear platen opening for probe
cards by STaR and Celadon (card length 152 mm, center 76 mm
from front)
• Check probe card for mechanic compatibility (electric connectors,
tip drop, wire harness, etc.)
Compatibility
• Cable end to the prober: 26 pole microcoax connector AMP (1
Ground)
• Cable end to test meter: 25 3-lug triax plugs (m)
• PA300PS-MA
140869 — Probe Card Adapter, ProbeShield, 6-inch
Features
• For use by probe
cards with 6-inch width
inside the EMI/RFI
shielded and light-tight
environment of the
PA300PS-MA
Advanced and Probe
Card
• Integrated ProtecPlate for optimal low-level accuracy
• Frost-free probing
• Simultaneous usage with positioners
• Simple and fast installation of the adapter by the operator
• Easy compensation of different tip drop
• Check probe card for mechanic compatibility (electric connectors,
tip drop, wire harness, etc.)
Compatibility
• PA200PS-MA
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Adapters and Accessories
Probe Card Holders/Adapters • 84
Probe Card Holders and Accessories
• Quick access covers (4)
ELITE 300
Shown with all quick
access covers, exit
panels and TopHat cover
removed
151-293 — MicroChamber Probe Card Holder, HTS,
40 mm, Universal
Features
• Universal probe card holder
for 4.5-inch rectangular
probe cards
• Maintains dark, dry, EMIRFI shielded environment
(Elite with MicroChamber)
• PCH can be oriented E/W/
S/N for short cables run to
test equipment
• Low profile design allows simultaneous probe card and internal
node needle probes
• Quick changeover from positioners to probe card
• Supports multiple probing configurations with removable access
covers
Shown with all quick access
covers in place
Shown with TopHat cover
removed
Compatibility
• Elite 300/AP, Elite 300/M, Summit 12K
• Supports multiple probe card needle drafts with height adjustment
• Easy 3-point probe card planarization
• Constructed with high thermal stability materials
Specifications
• Temperature range supported: -60°C to 300°C
• Probe card support:
– 4.5-inch wide rectangular cards
– Max. probe card length with edge connector: 11.375
– Needles for 8.5-inch long cards can be up to 2.5-inch off center
• Height adjustability:
– 2.16-2.92 mm (0.085-inch - 0.115-inch)
– 3.81-4.70 mm (0.150-inch - 0.185-inch)
– 5.59 mm (0.220-inch)
– 7.11 mm (0.280-inch)
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression at each
planarization point (3)
• Max probe card force: 20 kg (44 lbs)
Kit Contents
• Probe card holder
• MicroChamber cover (supports TopHat microscope objective seal)
• Edge connector kit with 48 and 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 height settings)
• Cable access/exit kit (2)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Holders and Accessories
Probe Card Holders/Adapters • 85
• Quick access covers (4)
142-338 — MicroChamber Probe Card Holder
Features
Shown with all quick
access covers, exit
panels and TopHat cover
removed
• Universal probe card holder
for 4.5-inch rectangular
probe cards
• Maintains dark, dry, EMI-RFI
shielded environment
(Elite 300 with
MicroChamber)
• PCH can be oriented E/W/S/
N for short cables run to test equipment
• Low profile design allows simultaneous probe card and internal
node needle probes
• Quick changeover from positioners to probe card
• Supports multiple probing configurations with removable access
covers
Shown with all quick access
covers in place
Shown with TopHat cover
removed
• Supports multiple probe card needle drafts with height adjustment
Compatibility
• Easy 3-point probe card planarization
• Elite 300/AP, Elite 300/M
Specifications
• Temperature range supported: -60°C to 300°C
Ordering Information
• Probe card support:
• For HTS compatible probe card holder, order 151-293 instead.
– 4.5-inch wide rectangular cards
– Max. probe card length with edge connector: 11.375
– Needles for 8.5-inch long cards can be up to 2.5-inch off center
• Height adjustability:
– 2.16-2.92 mm (0.085-inch - 0.115-inch)
– 3.81-4.70 mm (0.150-inch - 0.185-inch)
– 5.59 mm (0.220-inch)
– 7.11 mm (0.280-inch)
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression at each
planarization point (3)
• Max probe card force: 20 kg (44 lbs)
Kit Contents
• Probe card holder
• MicroChamber cover (supports TopHat microscope objective seal)
• Edge connector kit with 48 and 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 height settings)
• Cable access/exit kit (2)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Holders and Accessories
Probe Card Holders/Adapters • 86
SUMMIT/S300
141-861 — Probe Card Holder
Features
• Universal probe card holder for
4.5-inch rectangular probe cards
110-367 — Probe Card Holder for 6-inch Round Cards
Features
• PCH can be oriented E/W/S/N
for short cables run to test
equipment
• Probe card holder
for 6-inch round
cards
• Low profile design allows
simultaneous probe card and
internal node needle probes
• Mounts on Summit
12K and S300
• Quick changeover from positioners to probe card
Specifications
• Supports multiple probe card needle drafts with height adjustment
• 6-inch round probe card holder (for Pyramid probe cards)
• Easy 3-point probe card planarization
• Theta adjustment
Specifications
• No Z (height) adjustment (probe station Z is required)
• Temperature Range supported: -60°C to 300°C
Compatibility
• Probe card support:
• Summit 12K, S300
– 4.5-inch wide rectangular cards
– Max. probe card length with edge connector: 11.375
– Needles for 8.5-inch long cards can be up to 2.5-inch off center
• Height adjustability:
– 2.16-2.92 mm (0.085-inch - 0.115-inch)
– 3.81-4.70 mm (0.150-inch - 0.185-inch)
– 5.59 mm (0.220-inch)
– 7.11 mm (0.280-inch)
• Theta rotation: ± 7.5°
• Max planarization height range: up to 40 mils compression at each
planarization point (3)
• Max probe card force: 20 kg (44 lbs)
Kit Contents
• Probe card holder
• Edge connector kit with 48 and 70 pin connectors (f)
• Rear cable heat shield/support
• Probe card height adjustment kit (4 height settings)
Probe Card Holder (top
view) with edge
connector and cable
heat shield installed
Compatibility
• Elite 300/AP, Elite 300/M
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Holders and Accessories
Probe Card Holders/Adapters • 87
114-338 — High Force Probe Card Holder
115-418 — High Force Probe Card Holder for
MicroChamber
Features
Features
• Easy-to-use probe card
clamp
• Easy-to-use
probe card
clamp
• Screw removal is not
required to change
similar types of probe
cards
• No tools required to
clamp the probe card in place
• Back pivoting edge connector for easy mating of edge card
connector
• Support for 4.5-inch rectangular probe cards up to 11.375-inch
long
• Stable three-point planarization adjustment
• Easy probe card height setting (three incremental settings)
• Probe card height adjustment accommodates Cascade Microtech
low leakage probe cards and other probe cards
• Theta micrometer control located in front of the HF-PCH
• Includes 48 pin and 70 pin edge connectors
• Screw
removal is not
required to
change
similar types
of probe
cards
• No tools required to clamp the probe card in place
• Back pivoting edge connector for easy mating of edge card
connector
• Support for 4.5-inch rectangular probe cards up to 11.375-inch
long
• Maintains a dark and dry EMI-RFI shielded environment
(MicroChamber version only)
• Stable three-point planarization adjustment
Specifications
• Easy probe card height setting (three incremental settings)
• Maximum probe needle force: 20 kg (2,000 needles)
• Probe card height adjustment accommodates Cascade Microtech
low leakage probe cards and other probe cards
• Temperature range:
• Theta micrometer control located in front of the HF-PCH
– System with MicroChamber -55º to 300º C
– System without MicroChamber Ambient to 300º C
• Theta range: ±3º
• Includes 48 pin and 70 pin edge connectors
• Maximum planarization height compensation: 1.27 mm (0.050inch)
• Probe card maximums:
– W = 11.4 cm ±3 mm (4.5-inch ±.012-inch)
– L = 15.25 cm 28.9 cm (6-inch 11.375-inch)
– Thickness = 0.15 cm 0.32 cm (0.060-inch 0.125-inch)
Compatibility
• Summit 12K, S300
Specifications
• Maximum probe needle force: 20 kg (2,000 needles)
• Temperature range:
– System with MicroChamber -55º to 300º C
– System without MicroChamber Ambient to 300º C
• Theta range: ±3º
• Maximum planarization height compensation: 1.27 mm (0.050inch)
• Probe card maximums:
– W = 11.4 cm ±3 mm (4.5-inch ±.012-inch)
– L = 15.25 cm 28.9 cm (6-inch 11.375-inch)
– Thickness = 0.15 cm 0.32 cm (0.060-inch 0.125-inch)
Compatibility
• Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Holders and Accessories
Probe Card Holders/Adapters • 88
122-437 — Edge Connector Kit Probe Card Holders
Features
• Edge connector kit for Summit
4.5-inch probe card holders
• Support both 48 and 70 pin
standard edge connectors
• Pivots for easy loading of
probe card
Kit Contents
• Edge connector mount
• 48 pin edge connector
• 70 pin edge connector
Compatibility
• Summit, S300
124-118 — Low-Profile Probe Card Holder for Summit
Stations with MicroChamber
Features
With cover
• Support for 4.5inch rectangular
probe cards up to
11.375-inch long
• Simultaneous
use of a probe
card and multiple
positioners/DC
probe needles
Cover removed
• DC probe
needles can be
used with the LPPCH left in place
• Easy-to-use probe card clamp
• Screw removal is not required to change similar types of probe
cards
• No tools required to clamp the probe card in place
• Back pivoting edge connector for easy mating of edge card
connector
• Adjustable edge connector mounting brackets to support long
probe cards
• Allows use of DCP probes without probe card in place
• Quick switch-over between the TopHat cover and the LP-PCH
• Maintains a dark and dry EMI-RFI shielded environment
(MicroChamber version only)
• Accurate, front-located theta adjustment wheel
• Stable three-point planarization adjustment
• Probe card height adjustment accommodates Cascade Microtech
low leakage probe cards and other probe cards
• Includes 48 pin and 70 pin edge connectors
Specifications
• Maximum probe needle force: 1 kg (100 needles)
• Temperature range:
– System with MicroChamber -55 to 200 °C
– System without MicroChamber ambient to 200°C
• Theta range ±3°
• Maximum planarization height compensation: 0.762 mm (0.030inch)
• Probe card maximums:
– W = 11.4 cm ±3 mm (4.5-inch ±.012-inch)
– L = 15.25 cm 28.9 cm (6-inch 11.375-inch)
– Thickness = 0.15 cm 0.32 cm (0.060-inch 0.125-inch)
Compatibility
• Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Holders and Accessories
Probe Card Holders/Adapters • 89
138-022 — Clamp Kit for LLPC, in Low Profile Card
Holder
Features
• Option to allow use of
shallow draft probe cards
• For use on Low Profile
Probe Card Holder 120-935
and
124-118 Low-Profile Probe Card Holder for Summit Stations with
MicroChamber.
Specifications
• Increases the draft from 2.03 mm to 4.57 mm (0.08-inch to 0.18inch)
Compatibility
• Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Card Holders and Accessories
Probe Card Holders/Adapters • 90
Probe Mounts/Holders and Probes
Probe Arms and Probes (S-Positioner Compatible)
DC PROBE ARMS, DPP2XX/DPP3XX
100561 — Probe Arm, DPP2xx/DPP3xx, Coax, BNC
Features
100524 — Probe Arm, DPP2xx/DPP3xx, Edge Sensor
• 2 meter 50 Ohm coaxial cable with BNC
connector
Features
• Gold plated needle clamp
• Includes edge sensor tip
Compatibility
• With connector matching to all semiautomatic
standard probe stations (check compatibility to
all other probe stations)
• All PA/PM stations (except MicroAlign) +
DPP2xx-S, DPP3xx-S, DPP450-S (and
former PH110, PH120, PH150, PH400)
Compatibility
• All PA/PM stations (except MicroAlign) +
DPP2xx-S, DPP3xx-S, DPP450-S (and former PH110, PH120,
PH150, PH400)
100525 — Probe Arm, DPP2xx/DPP3xx, Triax
100696 — Probe Arm, DPP2xx/DPP3xx, Kelvin, 1 Tip
Features
• 2 coaxial cables 2 meters, 50 Ohm and
BNC connector
• Double arm design for improved stiffness,
with single tip clamping (gold plated)
Features
• 1.5 meter 50 Ohm low noise triax cable and
triax plug BNC
• Shield connection can be changed
• Connected for LCR measurements as
standard
• Highly isolated and gold plated needle
clamping
Compatibility
Specifications
• All PA/PM stations (except MicroAlign) + DPP2xx-S, DPP3xx-S,
DPP450-S (and former PH110, PH120, PH150, PH400)
• Max. operation temperature: 300°C
Compatibility
• All PA/PM stations (except MicroAlign) + DPP2xx-S, DPP3xx-S,
DPP450-S (and former PH110, PH120, PH150, PH400)
100715 — Probe Arm, DPP2xx/DPP3xx, Adjustable,
Coax, BNC
Features
100560 — Probe Arm, DPP3xx, Coax, BNC
• Four hinges for individual arm profiling
Features
• Gold plated needle clamping
• Short 50 Ohm coaxial cable and female BNC
connector mounted in DPP3xx positioner base
Specifications
• Requires additional coaxial cable (BNC male
connector)
Compatibility
• 2 meter 50 Ohm coaxial cable and BNC plug
• All PA/PM stations (except MicroAlign) + DPP2xx-S, DPP3xx-S,
DPP450-S (and former PH110, PH120, PH150, PH400)
• Isolated and gold plated needle clamping
Compatibility
• All PA/PM stations (except MicroAlign) + DPP3xx-S, DPP450-S
(and former PH150, PH400)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 91
144139 — Probe Arm, DPP2xx/DPP3xx, Flex, DCP
Probes
Features
RF PROBE ARMS, RPP210-S
146041 — Probe Arm, RPP210-S, North-South, for
Vacuum/Magnetic Platen
• High rigidity
• Stainless steel design for high rigidity and
minimum thermal drift
Features
• For use with HF probes (e.g. |Z| Probe)
• Requires adaptation unit 138697 for use with
DPP3xx/DPP450
• Positions the probe at the front or rear side of
DUT
• DCP probes, cables and connectors not
included base
• Horizontal probe mounting platen can be
leveled
Compatibility
• All PA/PM open systems (except MicroAlign) + DPP2xx-S,
DPP3xx-S, DPP450-S (and former PH110, PH150, PH400)
Note: DPP3xx-S and DPP450-S (and former PH150, PH400) require
138697 in order to mount this arm.
131844 — Probe Arm, DPP2xx/DPP3xx, Coax, High
Temperature
• For use with vacuum and magnetic platen
Compatibility
• All PA/PM stations (except MicroAlign) + RPP210-S (and former
PH110)
146042 — Probe Arm, RPP210-S, East-West, for
Vacuum/Magnetic Plate
Features
Features
• For use with HF probes (e.g. |Z| Probe)
• For long term tests at temperatures higher
than 100°C and always with temperature
chucks up to 300°C
• Positions the probe at the left or right side of
DUT
• Horizontal probe mounting platen can be
leveled
Specifications
• 1.5 meter 50 Ohm cable with coaxial plug
BNC
• For use with vacuum and magnetic platen
Compatibility
• All PA/PM stations (except MicroAlign) + RPP210-S (and former
PH110)
Compatibility
• All PA/PM stations (except MicroAlign) + DPP2xx-S, DPP3xx-S,
DPP450-S (and former PH110, PH120, PH150, PH400)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 92
RF PROBE ARMS, RPP305
100649 — Probe Arm, RPP305, North-South
Features
100624 — Probe Arm, RPP305, East-West, Mirrored
Features
• For use with HF probes (e.g. |Z| Probe)
• For use with HF probes (e.g. |Z| Probe)
• For positioning the probe at the front or rear
of DUT
• Probe mounting platen can be leveled (for 4port configuration)
• For positioning the probe on the left or right side
of DUT
Compatibility
• Probe mounting platen can be leveled
• All PA/PM stations (except MicroAlign) + RPP305-S (and former
PH250)
• Mirror image of 100648 (only for 2 port
configuration in combination with 100648)
Compatibility
118160 — Probe Arm, RPP305, West
• All PA/PM stations (except MicroAlign) + RPP305-S (and former
PH250)
Features
100647 — Probe Arm, RPP305, East
• For positioning the probe on the left side of
DUT
Features
• For use with HF probes (e.g. |Z| Probe)
• For use with HF probes (e.g. |Z| Probe)
• Probe mounting platen can be leveled (not
compatible with 4-port configuration)
• For positioning the probe on the right side of
DUT
Compatibility
• All PA/PM stations (except MicroAlign) + RPP305-S (and former
PH250)
• Probe mounting platen can be leveled (not
compatible with 4-port configuration)
Compatibility
• All PA/PM stations (except MicroAlign) + RPP305-S (and former
PH250)
100648 — Probe Arm, RPP305, East-West
Features
• For use with HF probes (e.g. |Z| Probe)
• For positioning the probe on the left or right side
of DUT
• Probe mounting platen can be leveled
• Mirror image of 100624 (for 4-port configuration,
for 2-port configuration with 100624)
Compatibility
• All PA/PM stations (except MicroAlign) + RPP305-S (and former
PH250)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 93
DC PROBE ARMS, MICROALIGN
138697 — Adapter for Probe Arms DPP2xx/DPP3xx to
Positioner DPP3xx
Features
138687 — Probe Arm, DPP2xx/DPP3xx, Triax,
MicroAlign
• Converts DPP3xx-S/DPP450-S front
plate for use with DPP2xx/DPP3xx
probe arms for DC and RF
applications on MicroAlign systems
Features
• For use with all MicroAlign systems
• Highly isolated needle clamp for standard
single tips like PTT needles
Compatibility
• All PM/PA stations + DPP3xx-S, DPP450-S (and former PH150)
• Stainless steel design for high rigidity and
minimum thermal drift
138700 — Probe Arm, DPP2xx/DPP3xx, Pico Probe,
MicroAlign
• Requires adaptation unit 138697 for use with
DPP3xx-S/DPP450-S
Features
Specifications
• 0.75 meter 50 Ohm low noise triax cable and 3 lug triax plug
• DC leakage <10 fA at ambient temperature
• For use with temperature chucks up to 300°C
Compatibility
• MicroAlign + DPP2xx, DPP3xx-S, DPP450-S (and former PH110,
PH150, PH400)
• For all MicroAlign systems
• Holding fixture for Active Pico probes from
GGB Pico probe 10…34 (Pico probe not
included)
• Stainless steel design for high rigidity and
minimum thermal drift
• Requires Test Equipment Interface 144987
for use at MicroAlign Advanced systems
138690 — Probe Arm, DPP2xx/DPP3xx, Triax, Kelvin
1Tip, MicroAlign
• Requires adaptation unit 138697 for use with DPP3xx-S/DPP450-S
Features
• MicroAlign + DPP2xx, DPP3xx-S, DPP450-S (and former PH110,
PH150, PH400)
• For use with all MicroAlign systems
• For triaxial I/V-, Kelvin- and C/V (with CX-TRX
adapter) tests
Compatibility
144866 — Probe Arm, DPP2xx/DPP3xx for DCP Probe,
MicroAlign
• Stainless steel design for high rigidity and
minimum thermal drift
Features
• Highly isolated needle clamp for single tips
like PTT needles. (Signal from force and sense already connected
inside chassis)
• For all MicroAlign systems
• Connector sockets for CommonRing cables (C/V-Test, 1 cable
included), guard potentials from force and sense are connected to
these sockets
• Holding fixture for advanced DC coaxial
probes like AP&T Probes, DCP and
DCP-HTR probes
• Requires adaptation unit 138697 for use with DPP3xx-S/DPP450-S
• Stainless steel design for high rigidity and minimum thermal drift
Specifications
• Requires adaptation unit 138697 for use with DPP3xx-S/DPP450-S
• 2 x 0.75 meter 50 Ohm low-noise triax cable and 3 lug triax plug
• For use with temperature chucks up to 300°C
• Includes two cables 0.7m long 3-lug Triax-SSMC for IV and Kelvin
measurements
Compatibility
Specifications
• MicroAlign + DPP2xx, DPP3xx-S, DPP450-S (and former PH110,
PH150, PH400)
• DC leakage <10 fA at ambient temperature
• For triaxial I/V-, Kelvin-, C/V (with CX-TRX
adapter) and 1/f applications
Compatibility
• MicroAlign + DPP2xx, DPP3xx-S, DPP450-S (and former PH110,
PH150, PH400)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 94
RF PROBE ARMS, MICROALIGN
144777 — Probe Arm, RPP210-S, East-West
Features
133302 — Probe Arm, RPP305, North-South, MicroAlign
Features
• For MicroAlign systems
• For use with HF probes or wedges
• Positions the probe at the left or right side
of DUT
• 4 probe setup
• Horizontal probe mounting plate can be
levelled
• For adaptation of HF probes or probe
wedges
• For use with HF platen and MicroAlign
• For use with RPP210-S (and former
PH110) positioners
• For positioning the probe at front or rear
side of DUT
• Probe mounting plate can be levelled,
adjustment drive screw located at positioner end of the arm for
easier operation
• Requires HF add-on platen or RPP305-M
Compatibility
• All PM/PA stations with RF platen, MicroAlign, RPP210-S (and
former PH110)
• For use with RPP305 positioners
144778 — Probe Arm, RPP210-S, North-South,
MicroAlign
Compatibility
Features
• MicroAlign + RPP305 (and former PH250)
• For MicroAlign systems
133303 — Probe Arm, RPP305, East-West, MicroAlign
Features
• For MicroAlign systems
• For use with HF probes or wedges
• Positions the probe at the front or rear side
of DUT
• Horizontal probe mounting plate can be
levelled
• 4 probe setup
• For use with HF platen and MicroAlign
• For adaptation of HF probes or probe
wedges
• For use with RPP210-S positioners
• For positioning the probe at left or right
side of DUT
Compatibility
• Probe mounting plate can be levelled, adjustment drive screw
located at positioner end of the arm for easier operation
• All PM/PA stations with RF platen, MicroAlign, RPP210-S (and
former PH110)
• Requires HF add-on platen or RPP305-M
• For use with RPP305 positioners
Compatibility
• MicroAlign + RPP305 (and former PH250)
134006 — Probe Arm, RPP305, East-West, MicroAlign
Features
• For MicroAlign systems
• To accompany 133303 to place two RPP305 (left and right)
together in front of the operator
• For adaptation of HF probes or probe wedges
• For positioning the probe at left or right side of DUT
• Probe mounting plate can be levelled, adjustment drive screw
located at end of the arm for easier operation
• Requires HF add-on platen on probe platen or RPP305-M
• For use with RPP305 positioners
Compatibility
• MicroAlign + RPP305 (and former PH250)
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 95
RF PROBE ARMS, PA200 BLUERAY
PROBE ARM, OPTICAL FIBER
142139 — Probe Arm, RPP305-S East, Right,
2 Positioners, BlueRay
145533 — Probe Arm, Optical Fiber 125 μm, DPP2xx
Features
• Allows placement of glass fiber over the wafer
• For positioning the probe on the right side of
DUT
• Mount to DPP2xx
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
Features
• Fiber tip visible in microscope image
• Front part of arm can be horizontally rotated
• Other fiber adaptations on request
Specifications
• Ferrule diameter 250 µm for 125 µm fiber cores and jacket
• Fiber angle vertical adjustable 80°-90°
142140 — Probe Arm, RPP305-S West, Left,
2 Positioners, BlueRay
Compatibility
• DPP2xx (and former PH110)
Features
• For positioning the probe on the left side of
DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
142143 — Probe Arm, RPP305-S East-West,
4 Positioners, BlueRay
Features
• For positioning the probe on the left or
right side of DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
142148— Probe Arm, RPP305-S North-South,
4 Positioners, BlueRay
Features
• For positioning the probe at the front or rear of
DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 96
PROBE ARMS, PM5 POWER SYSTEMS
PROBES, PM5 POWER SYSTEMS
145303 — Probe Holder Short
142693 — Probe 10 kV
Features
Features
• Stainless steel design for high rigidity
and minimum thermal drift
• Highly isolated needle clamp for
standard single tips
• To connect any individual probe to a
RPP210 positioner for use with PM5
Power system
• Stainless steel design for high rigidity
and minimum thermal drift
Compatibility
• For use with temperature chucks up to
300°C
• PM5 Power
• Requires arm holder for RPP210
Specifications
144777 — Probe Arm, RPP210-S, East-West
• 1.2m coax cable with 10 kV plug
Features
• Operating voltage up to 10 kV
• For use with HF probes or wedges
Compatibility
• Positions the probe at the left or right side
of DUT
• PM5 Power
• Horizontal probe mounting plate can be
levelled
145297 — Probe HV Triax / 3 kV
• For use with HF platen and MicroAlign
• Highly isolated needle clamp for
standard single tips like PTT needles
Features
• For use with RPP210-S (and former
PH110) positioners
Compatibility
• For use with temperature chucks up to
300°C
• All PM/PA stations with RF platen, MicroAlign, RPP210-S (and
former PH110)
• Stainless steel design for high rigidity
and minimum thermal drift
• Requires arm holder for RPP210
Specifications
• 1.2m coax cable with HV triax plug
• Operating voltage up to 3 kV with lowest leakage
Compatibility
• PM5 Power
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 97
145298 — Probe HV Coax / 3 kV
145301 — Probe HV Coax / Kelvin / 3 kV
Features
Features
• Highly isolated needle clamp for standard
single tips
• For coaxial I/V-, Kelvin- and C/V tests
• Stainless steel design for high rigidity and
minimum thermal drift
• For use with temperature chucks up to
300°C
• Highly isolated needle clamp for
standard single tips
• Stainless steel design for high rigidity
and minimum thermal drift
• Requires arm holder for RPP210
• For use with temperature chucks up to
300°C
Specifications
• Connector sockets for CommonRing cables
• 0.75m coax cable with SHV plug
• Requires arm holder for RPP210
• Operating voltage up to 3 kV
Specifications
Compatibility
• 2 x 1.2 meter 50 Ohm coaxial cable with SHV connector (male)
• PM5 Power
• Operating voltage up to 3 kV
Compatibility
145300 — Probe HV Triax / Kelvin / 3 kV
• PM5 Power
Features
• For triaxial I/V and Kelvin
measurements
145302 — Probe Coax / Kelvin
• Highly isolated needle clamp for
standard single tips
• For coaxial I/V-, Kelvin- and C/V tests
• Stainless steel design for high rigidity
and minimum thermal drift
• For use with temperature chucks up to 300°C
Features
• Highly isolated needle clamp for single
tips (inner conductor of both cables
already connected inside chassis)
• Connector sockets for CommonRing cables
• Stainless steel design for high rigidity
and minimum thermal drift
• Requires arm holder for RPP210
• For use with temperature chucks up to 300°C
Specifications
• Connector sockets for CommonRing cables
• 2 x 1.2 meter 50 Ohm triaxial cable with HV Triax plug
• Requires arm holder for RPP210
• Operating voltage up to 3 kV
Specifications
Compatibility
• 2 x 1.2 meter 50 Ohm coaxial cable with BNC connector
• PM5 Power
Compatibility
• PM5 Power
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Arms and Probes (S-Positioner Compatible)
Probe Mounts/Holders and Probes • 98
Probe Tips (Compatible with Positioner Probe Arms)
AP&T PROBE TIPS
67045 — Probe Tip, AP&T, Kelvin, 5 μm
Features
• Single tungsten probe tip
(replaceable) 5 µm radius
• Quasi-Kelvin-Point in probe housing
• Optimized shape for MicroAlign
systems
Compatibility
• All probe arms for advanced coax and DCP probes
67055 — Replacement Tip, AP&T Probe, 5 μm
Features
• Replacement tip for AP&T probes
Kelvin-1 Tip
• 5 µm radius, tungsten
• Optimized shape for MicroAlign
systems
• Package of 5 pieces
Compatibility
• For Probe Tip AP&T, Kelvin
70197 — Replacement Tip, AP&T Probe, 1.5 μm
Features
• Replacement tip for AP&T probes
Kelvin-1 Tip
• 1.5 µm radius, tungsten
• Optimized shape for MicroAlign
systems
• Package of 5 pieces
Compatibility
• For Probe Tip AP&T, Kelvin
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Probe Tips (Compatible with Positioner Probe Arms)
Probe Mounts/Holders and Probes • 99
Elite 300 and Summit DC Probe Mounts and Holders
151-286 — DCP Probe Mount, 40 mm, HTS, Dual Triax,
MS1 Series
151-287 — DCP Probe Mount, 40 mm, HTS, Dual Triax,
DPP2xx
Features
Features
• Probe mount for DCP probes (DCP1xx, DCP-HTR)
• Probe mount for DCP probes (DCP1xx, DCP-HTR)
• For use on Elite 300
• For use on Elite 300
• Compatible with MS1 programmable
positioners
• Compatible with DPP2xx positioners
• Compatible with MicroChamber
TopHat
• Constructed with high thermal stability materials
• Constructed with high thermal stability materials
Specifications
• Compatible with MicroChamber TopHat
Specifications
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation),
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation),
• Precision Industry Standard SSMC connectors
• Precision Industry Standard SSMC connectors
• Breakdown voltage: >500Volts
• 50 Ohm characteristic impedance
• Breakdown voltage: >500Volts
• Max Current = 1Amp
Kit Contents
• Probe to positioner mount
• Dual triaxial adapter (Kelvin), mini triax (f) to SSMC (m)
• EMI shielding cap
• EMI grounding strap
• 50 Ohm characteristic impedance
• Max Current = 1Amp
Kit Contents
• Probe to positioner mount
• Dual triaxial adapter (Kelvin), mini triax (f) to SSMC (m)
• EMI shielding cap
• EMI grounding strap
Compatibility
• Elite 300/AP, Elite 300/M
Compatibility
• Elite 300/AP, Elite 300/M
151-288 — DCP Probe Mount, 40 mm, HTS, DPP2xx
Features
• Probe mount for DCP probes (DCP-1xx,
DCP-HTR)
• For use on Elite 300
• Direct probe/cable connection (SSMC)
• Compatible with DPP2xx positioners
• Compatible with MicroChamber TopHat
• Constructed with high thermal stability materials
Kit Contents
• Probe to positioner mount
• EMI grounding strap
Compatibility
• Elite 300/AP, Elite 300/M
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 and Summit DC Probe Mounts and Holders
Probe Mounts/Holders and Probes • 100
151-289 — Needle Probe Mount and Enhanced Jack
Lock Holder for DPP2xx Positioners
144-388 — Universal Probe Holder with Dovetail Adapter
Kit
Features
Features
• Enhanced probe mount for PTT needle
probes (45°)
• Universal probe holder for DPP series
positioners (not TopHat compatible)
• Easy probe needle replacement without
tools
• Locking universal swivel-inch joint for
quick probe setup
• Constructed with high thermal stability
materials
• Gross Z height adjustment for easy
probe tip replacement
• For use on Elite 300
• Compatible with MicroChamber TopHat
• Standard probe interface supports multiple probes (coax, triax,
unshielded, picoprobe)
• Compatible with DPP2xx positioners
Kit Contents
• Compatible with all 45° PTT series probe needles
• Universal probe holder
Kit Contents
• Cable clamp
• Probe to positioner mount
• Mounting screws
• Jack lock holder with SSMC (f) and pin jack (f) connectors
• 1m coax (m) to SSMC (m)
• 18-inch cable with pin jack (m) to (m)
• EMI grounding strap
Compatibility
• Elite 300/AP, Elite 300/M
151-290 — PTT Needle Probe Mount, 40 mm, HTS,
Enhanced Jack Lock Holder, MS1 Series
Features
• Enhanced probe mount for PTT needle
probes (45°)
• For use on Elite 300
• Compatible with MicroChamber TopHat
• Easy probe needle replacement
without tools
Universal probe holder
shown mounted on a
DPP2xx positioner, with a
straight coaxial probe and
PTT needle combination
Universal probe holder
shown mounted on a
DPP3xx/DPP450 positioner,
with a straight coaxial probe
and PTT needle combination
Compatibility
• Elite 300/AP, Elite 300/M, Summit 12K
• For use with DPP2xx/RPP2xx/DPP3xx/DPP450 positioners
• Compatible with all 45o PTT series
probe needles
• Compatible with MS1 programmable positioners
Kit Contents
• Probe to positioner mount
• Jack lock holder with SSMC (f) and pin jack (f) connectors
• 1m coax (m) to SSMC (m)
• 18-inch cable with pin jack (m) to (m)
• EMI grounding strap
Compatibility
• Elite 300/AP, Elite 300/M
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 and Summit DC Probe Mounts and Holders
Probe Mounts/Holders and Probes • 101
144-389 — Universal Probe Holder with MS1 Adapter
Features
• Universal probe holder for MS1-44
programmable positioners (not compatible
with TopHat)
• Locking universal swivel-inch joint for quick
probe setup
• Gross Z height adjustment for easy probe
tip replacement
• Standard probe interface supports multiple
probes (coax, triax, unshielded, pico probe)
• Side cable clamp for minimizing cable vibration to the probe
Kit Contents
• Universal probe holder
• Cable clamp
• Mounting screws
Compatibility
• Elite 300, Summit
144-887 — Mount, Pico Probe, Stud Grip
Picoprobe high impedance
probe on DPP2xx-PTH
positioner
Picoprobe high impedance
probe on DPP3xx-PTH or
DPP450-PTH positioner
Features
• Adapts pico probe high impedance probes to the universal probe
holder
Compatibility
• Elite 300, Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 and Summit DC Probe Mounts and Holders
Probe Mounts/Holders and Probes • 102
Elite 300 and Summit DC Probes
144-392 — Unshielded Probe Kit
139-870 — Coaxial Probe (Bent)
Features
Features
• Interchangeable probe arms
(unshielded)
• Shielded DC measurements with
coaxial probe
• Easy probe needle
replacement without tools
• Pin jack for DC electrical connection
• Bent configuration for increased
microscope objective clearance with
high magnification/low working distance objective lenses
• Compatible with all PTT series probe needles
• Easy probe needle replacement without tools
• Compatible with all bent PTT series probe needles
Kit Contents
• Replaceable SMA cable
• Collet adapter with pin lock
connector (f)
• Easy connection to Elite 300 coax
connection panel on platen
• Straight unshielded probe arm
with jack lock
Kit Contents
• 35° bent unshielded probe arm
with jack lock
• Bent 35° shielded probe
• Integrated SMA (f) connector
• 18-inch cable with pin jack (m) to
(m)
Unshielded probe (straight)
and collet shown attached to
universal probe holder and
DPP2xx positioner
Compatibility
• Elite 300, Summit
• Shielded coaxial cable, 30-inch with
SMA (m) to BNC (m)
Compatibility
• Elite 300, Summit
139-331 — Coaxial Probe (Straight)
Coaxial probe (bent) with
45° PTT needle, shown
attached to universal
probe holder and DPP2xx
positioner.
Features
• Shielded DC measurements with
coaxial probe
144-390 — Triaxial Probe (Straight)
• Straight configuration for multiple
probing applications when using straight or 45° needles for steep
access
• Guarded DC measurements with
triaxial probe
Features
• Easy probe needle replacement
without tools
• Easy connection to Elite 300
triaxial connection panel on
platen
• Compatible with all PTT series
probe needles
• Replaceable SMA cable
• Easy connection to Elite 300
coax connection panel on
platen
Kit Contents
• Straight shielded probe
• Integrated SMA (f) connector
• Shielded coaxial cable, 30-inch
with SMA (m) to BNC (m)
• Integrated triaxial cable for lownoise measurements
• Straight configuration for multiple probing applications when using
straight or 45° needles for steep access
• Easy probe needle replacement without tools
Two (2) DPP2xx positioners and
universal probe mounts, one
using the straight coax probe
with straight needle, and the
other using a bent coax probe
with 45° bent PTT needle
Compatibility
• Compatible with all PTT series probe needles
Kit Contents
• Straight triax probe
• Integrated triaxial low-noise cable, 30-inch with triax (m) connector
Compatibility
• Elite 300, Summit
• Elite 300, Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 and Summit DC Probes
Probe Mounts/Holders and Probes • 103
144-391 — Triaxial Probe (Bent)
PHW — Wrench Lock Probe Holder
Features
Features
• Guarded DC measurements with
triaxial probe
• Replacement probe tip
holder for MMP probes
• Integrated triaxial cable for low-noise measurements
• Easy connection to Elite 300 triaxial connection panel on platen
• Wrench lock needle holding
mechanism (set screw hold)
• Bent configuration for increased microscope objective clearance
with high magnification/low working distance objective lenses
• Constructed of nickel plated
brass that can be user-formed as needed
• Easy probe needle replacement without tools
Specifications
• Compatible with all 45° PTT series probe needles
• 4.5-inch in length
Kit Contents
• Nickel plated brass
• Bent 35 ° triax probe
• Wrench lock mechanism
• Integrated triaxial low-noise cable, 30-inch with triax (m) connector
Kit Contents
Compatibility
• Probe tip holder
• Elite 300, Summit
• MAE-44/18 cable 18-inch
• Allen wrench
PHQ — Quick Lock Probe Holder
Compatibility
Features
• Summit
• Replacement probe tip
holder for MMP probes
• Quick lock needle holding
mechanism (spring-loaded
Collette style)
• Constructed of nickel plated brass that can be user-formed as
needed
Specifications
• 4.5-inch in length
• Nickel plated brass
• Quick lock mechanism
Kit Contents
• Probe tip holder
• MAE-44/18 cable 18-inch
Compatibility
• Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Elite 300 and Summit DC Probes
Probe Mounts/Holders and Probes • 104
Summit DC Probe Arms and Mounts
138-014 — Enhanced Jack Lock Needle Probe Holder for
DPP2xx
104-856K — DCP Probe Mount, Dual Triax Adapter
(Kelvin) for RPP305-NS-SU Positioner
Features
Features
• Needle probe holder (PTT style needles)
for DPP2xx positioners
• Enables Kelvin connection to DCP style probes on North/South RF
positioners
• Jack lock style holding mechanism
• Supports Summit 11/12K and S300 systems
• Top hat compatible
Specifications
• Will work on positioners equipped for
DCP probes
• Instrument connections are female mini-triax connectors
• Probe connections are cables with SSMC male for use with DCP
style probes
• Uses mini pin jack style cable connection
Specifications
• Includes additional probe mount holder that attaches to the probe
shaft
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation)
• 50 Ohm characteristic impedance
• Best if used with 45× PTT series tips
• Breakdown voltage: >500Volts
Kit Contents
• Max current = 1Amp
• Includes arm and mounting hardware
Kit Contents
• Recommended for use with PTT-XX/4-25 (45degree) style needles
(not included)
• Mounting hardware
Compatibility
• Summit, S300, Alessi
Compatibility
• Summit, S300, Alessi
104-030K — DCP Probe Mount, Dual Triax Adapter
(Kelvin) for RPP305-EW-SU positioner
Features
• Enables Kelvin connection to DCP style
probes on East/West RPP305
positioners
• Supports Summit 11/12K and S300
systems
114-818 — DCP Probe Mount, Dual Triax Adapter
(Kelvin) for DPP2xx
Features
• Enables Kelvin connection to DCP style
probes on DPP2xx positioners
• Supports Summit 11/12K and S300
systems
Specifications
Specifications
• Instrument connections are female minitriax connectors
• Instrument connections are female minitriax connectors
• Probe connections are cables with SSMC
male for use with DCP style probes
• Probe connections are cables with
SSMC male for use with DCP style probes
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation)
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation)
• 50 Ohm characteristic impedance
• 50 Ohm characteristic impedance
• Max current = 1Amp
• Breakdown voltage: >500Volts
• Max current = 1Amp
Kit Contents
• Mounting hardware
• Breakdown voltage: >500Volts
Kit Contents
• Mounting hardware
Compatibility
• Summit, S300, Alessi
Compatibility
• Summit, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Summit DC Probe Arms and Mounts
Probe Mounts/Holders and Probes • 105
114-843 — Needle Probe Mount and Jack Lock Holder
for MS1 Series Positioners
116-031 — DCP Probe Mount for DPP2xx, Direct Probe/
Cable Conn (SSMC)
Features
Features
• Needle probe holder (PTT style
needles) for MS1 series
programmable positioners
• Mounting bracket for DCP probes, for
use on DPP2xx positioners
• To be used with direct cable from
instrument to DCP probe (e.g., 105-540
or 124-562 BNC to SSMC cables
• Jack lock style holding mechanism
• Top hat compatible
• Will work on positioners equipped for
DCP probes
• Top Hat compatible
• Uses mini pin jack style cable
connection
• Mounting hardware
Kit Contents
• Summit, S300, Alessi
Kit Contents
Compatibility
• Includes arm and mounting hardware
• Recommended for use with PTT-XX/4-25 (45degree) style needles
(not included)
129-116 — Needle Probe Mount with Long Reach Jack
Lock for DPP2xx Positioner
Compatibility
Features
• Summit, S300, Alessi
• For use with DPP2xx positioners
115-596 — DCP Probe Mount, Dual Triax Adapter
(Kelvin) for MS1 Series Positioners
Features
• Brass needle holder can be userformed as needed
• Uses pin jack style connection
(e.g., MAE cables), one included
• Enables Kelvin connection to DCP style
probes on MS1 series programmable
positioners
• Has gross Z adjustment via
thumb screw on holder arm
Specifications
• Not recommended for Top Hat use
• Instrument connection are female mini-triax
connectors
Kit Contents
• Probe connections are cables with SSMC
male for use with DCP style probes
• Mounting bracket
• Usable from -60°C to 300°C (above 250°C: 8 hours max.
operation)
• Holder also pivots
• Mounting hardware
• Probe holder arm
• MAE-44/18 cable 18-inch
• 50 Ohm characteristic impedance
Compatibility
• Breakdown voltage: >500Volts
• Summit, S300 (non TopHat), Alessi
• Max current = 1Amp
Kit Contents
• Mounting hardware
Compatibility
• Summit, S300, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Summit DC Probe Arms and Mounts
Probe Mounts/Holders and Probes • 106
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders
DCP-HTR — High Performance DC Probe Holder
DCP-105R — DC Coaxial Probe, Single Line, 0.5 μm
Radius, Replaceable Tip
Features
Features
• High-quality construction with low-noise
electrical performance
• High-quality construction with lownoise electrical performance
• Fully guarded measurements to fA and
fF levels
• Ultra-low, fA and fF measurements
from -65ºC to 150ºC
• Great for modeling and characterization
work
• Configurable for triax usage
• Fully guarded measurements to fA
and fF levels
• Full temperature range coverage
• Great for modeling and characterization work
• Dual Precision SSMC 50 connection allow for Kelvin configuration
to the probe body
• Dual Precision SSMC 50 ohm connections allow for Kelvin
configuration to the probe body
• Individual connectors for force sense connections
• Individual connectors for force sense connections
• Replaceable microstrip probe tips (Not included)
• Integrally designed as part of Cascade Microtech’s complete
measurement solution
Specifications
• Configurable for triax usage
• Frequency range: dc - 100 MHz
• Replaceable coax probe tips (Not included)
• 500 V breakdown voltage, isolation resistance 1E13 ohms
Specifications
• Temperature range -65 to +300°C
• Breakdown voltage: >500 V
• Leakage noise:
• Isolation resistance: > 1 x 1013 ohms
• ± 10fA, -65 to +200°C± 20fA, 200 to 300°C
• Frequency response (3 dB): 150 MHz
• Does not include replaceable tip
• Temperature range: -65°C to 150°C
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
• Characteristic impedance: 50 ohms
• Tip material: Tungsten
• Body material: Gold plated
• Connector type: SSMC
• 0.5 µm radius probe tip
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
DCP-115R — DC Coaxial Probe, Single Line, 1.5 μm
Radius, Replaceable Tip
• Configurable for triax usage
• Replaceable coax probe tips (Not included)
Specifications
Features
• Breakdown voltage: >500 V
• High-quality construction with low-noise
electrical performance
• Isolation resistance: > 1 x 1013 ohms
• Ultra-low, fA and fF measurements
from -65ºC to 150ºC
• Frequency response (3 dB): 150 MHz
• Fully guarded measurement to fA and
fF levels
• Characteristic impedance: 50 ohms
• Great for modeling and characterization work
• Body material: Gold plated
• Dual Precision SSMC 50 ohm connections allow for Kelvin
configuration to the probe body
• Connector type: SSMC
• Temperature range: -65°C to 150°C
• Tip material: Tungsten
• Individual connectors for force sense connections
• Integrally designed as part of Cascade Microtech’s complete
measurement solution
141-400 Probe Station Accessory Catalog
April 2012, Rev L
• 1.5 µm radius probe tip
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
Cascade Microtech, Inc.
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders
Probe Mounts/Holders and Probes • 107
DCP-150R — DC Coaxial Probe, Single Line, 5.0 μm,
Replaceable Tip
DCP-150GPR-50 — DC Coaxial Probe with Ground
Needle, 50 μm Pitch
Features
Features
• High-quality construction with low-noise
electrical performance
• High-quality construction with low-noise electrical performance
• Ultra-low, fA and fF measurements
from -65ºC to 150ºC
• Ultra-low, fA and fF measurements from -65ºC to 150ºC
• Fully guarded measurements to fA and
fF levels
• Integrally designed as part of Cascade Microtech’s complete
measurement solution
• High Frequency performance due to Signal/ground configuration
• Precision SSMC 50 ohm connection
• Great for modeling and characterization work
• Dual Precision SSMC 50 ohm connections allow for Kelvin
configuration to the probe body
• Individual connectors for force sense connections
• Integrally designed as part of Cascade Microtech’s complete
measurement solution
• Configurable for triax usage
Specifications
• Breakdown voltage: >500 V
• Signal Ground pitch, 50 µm
• Isolation resistance: > 1 x 1013 ohms
• Configurable for triax usage
• Frequency response (3 dB): 500 MHz
• Replaceable coax probe tips (Not included)
• Temperature range: -65°C to 150°C
• Characteristic impedance: 50 ohms
Specifications
• Tip material: Tungsten
• Breakdown voltage: >500 V
• Body material: Gold plated
• Isolation resistance: > 1 x 1013 ohms
• Connector type: SSMC
• Frequency response (3 dB): 150 MHz
• 5 µm radius probe tip
• Temperature range: -65°C to 150°C
• Characteristic impedance: 50 ohms
Compatibility
• Tip material: Tungsten
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
• Body material: Gold plated
• Connector type: SSMC
• 5 µm radius probe tip
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders
Probe Mounts/Holders and Probes • 108
DCP-150K-25 — DC Coaxial Probe, Kelvin, 25 μm Pitch,
5.0 μm Tip Radius
DCP-150K-50 — DC Coaxial Probe, Kelvin, 50 μm Pitch,
5.0 μm Tip
Features
Features
• True Kelvin Probe, two 5 µm radius tips
separated by 25 µm
• True Kelvin Probe, two 5 µm radius tips
separated by 50 µm
• High-quality construction with low-noise
electrical performance
• High-quality construction with low-noise
electrical performance
• Ultra-low, fA and fF measurements from
-65ºC to 150ºC
• Ultra-low, fA and fF measurements from 65ºC to 150ºC
• Fully guarded measurements to fA and fF levels
• Fully guarded measurements to fA and fF levels
• Great for modeling and characterization work
• Great for Modeling and Characterization work
• Dual Precision SSMC 50 ohm connections, one for each tip
• Dual Precision SSMC 50 ohm connections, one for each tip
• Individual connectors for each tip
• Individual connectors for each tip
• Integrally designed as part of Cascade Microtech’s complete
measurement solution
• Integrally designed as part of Cascade Microtech’s complete
measurement solution
• Configurable for triax usage
• Configurable for triax usage
Specifications
Specifications
• Breakdown voltage: >500 V
• Breakdown voltage: >500 V
• Isolation resistance: > 1 x 1013 ohms
• Isolation resistance: > 1 x 1013 ohms
• Frequency response (3 dB): 150 MHz
• Frequency response (3 dB): 150 MHz
• Temperature range: -65°C to 150°C
• Temperature range: -65°C to 150°C
• Characteristic impedance: 50 ohms
• Characteristic impedance: 50 ohms
• Probe Tip separation: 25 Microns
• Probe Tip separation: 50 Microns
• Tip material: Tungsten
• Tip material: Tungsten
• Body material: Gold plated
• Body material: Gold plated
• Connector type: SSMC
• Connector type: SSMC
• 5 µm radius probe tip
• 5 µm radius probe tip
Compatibility
Compatibility
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
• PA/PM, MicroAlign, Elite 300, Summit, S300, M150, Alessi
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
DC Probes, Coax and Triax, DCP and PE5 Style Probe Holders
Probe Mounts/Holders and Probes • 109
Summit
Optical Bridge Mounts and Transports
158-073 — Large Area Optics Bridge Mount
115-416 — Low Power Optics Boom Stand
Features
Features
• Larger area 6-inch x 8-inch XY
movement range
• Microscope boom stand for low power
microscopes/optic
• Linear Z lift
• Includes illuminator mounting tray
• Manual lead screw driven XY
movement
• Provides for a wide range of
movement
• Compatible with most common
microscopes used on probing systems
• Enables movement of the
microscope fully out of the probing
area
• A microscope mounting plate matching the selected microscope
and microscope transport is required.
19.7 cm
(7.75 in.)
25.4 cm
(10.0 in.)
3.6 cm
(1.4 in.)
• Fits Summit 11/12K systems
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope models offer optional
programmability for this feature.
• Uses standard bonder arm mounts
Specifications
Compatibility
• 6-inch X axis movement range (± 3-inch from center of travel)
• Summit
• Not compatible with eVue, Mitutoyo, Seiwa, or A-Zoom
microscopes
• 8-inch Y axis movement range (± 4-inch from center of travel)
158-075 — High Stability Optics Bridge Mount (Motorized
2x2)
• 3-inch linear manual Z lift
Compatibility
• Summit
Features
158-070 — High Stability Optics Bridge Mount (Manual
2x2)
• Pneumatic tilt back Z lift
• Programmable high stability 2-inch x
2-inch XY microscope transport
• Motorized XY control with rotary
encoders for precision positioning
Features
• High stability 2-inch x 2-inch XY
microscope transport
• Knobs for manual control provided
• Easy coaxial manual XY drive
controls
• Supports laser and very small structure work
• Pneumatic tilt back Z lift
• An ECX-56 equipped system is required.
• Supports laser and very small
structure work
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope models offer optional
programmability for this feature.
• ECA-53 drive card included
• A microscope mounting plate matching the selected microscope
and microscope transport is required.
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope models offer optional
programmability for this feature.
Specifications
• 2-inch X axis movement range (± 1-inch from center of travel)
• 2-inch Y axis movement range (± 1-inch from center of travel)
Specifications
• 2-inch X axis movement range (± 1-inch from center of travel)
• 2-inch Y axis movement range (± 1-inch from center of travel)
• Encoder driven positioning provides resolution of 0.1 µm
Compatibility
• Summit 12K
Compatibility
• Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Optical Bridge Mounts and Transports
Summit • 112
131-923 — Motorized Theta Upgrade Kit (with 80 Pin
Interconnect)
131-924 — Motorized Theta Upgrade Kit for Summit 12K
Stations (with 68 Pin Interconnect)
Features
Features
• Kit supports new Automatic wafer
alignment and new productivity tools
in Nucleus and Nucleus VISION
software packages.
• Kit supports new Automatic wafer
alignment and new productivity
tools in Nucleus and Nucleus
VISION software packages.
• Requires Nucleus 3.0 (or higher)
prober control software
• Requires Nucleus 3.0 (or higher)
prober control software
• Automatic wafer alignment requires Nucleus VISION (p/n 123-572)
• Automatic wafer alignment requires Nucleus VISION (p/n 123-572)
• Installation must be ordered with kit (p/n SRV-STATION-UP)
• Installation must be ordered with kit (p/n SRV-STATION-UP)
• Must be used with PC48 OR PC38, not compatible with PCI motor
card
Specifications
Specifications
• Resolution 0.65 µm (0.03 mils)*
• Travel ± 5.5°
• Travel ± 5.5°
• Repeatability ± 2 μm (0.08 mils)*
• Resolution 0.65 μm (0.03 mils)*
• Repeatability ± 2 μm (0.08 mils)*
• Accuracy ± 2 μm (0.08 mils)* standard moves, ± 3 µm (0.12 mils)*
large moves
• Accuracy ± 2 µm (0.08 mils)* standard moves, ± 3 μm (0.12 mils)*
large moves
Kit Contents
* Measured at edge of 200 mm chuck
• New motorized Theta/Z-stage assembly
*Measured at edge of 200 mm chuck
• Interconnect board electronics for 68-pin motor controller
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 80-pin motor controller
• Motor driver and complete accessories
• Motor driver and complete accessories.
Compatibility
• Summit 12K
Compatibility
• Summit 12K
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Optical Bridge Mounts and Transports
Summit • 113
Connection Panels (Coax, Triax, Pin jack, Banana Vacuum)
105-626 — Triax Connection Panel, Side Mount
114-737 — Vacuum Manifold Kit, High Stability Optics
Bridge
Features
Features
• Optional triaxial connection panel for
convenient cable management
• Designed to mount to the side of the
Summit series platen
• 8 triaxial (3-lug) feed through connectors
(female)
• Panel connections support single triax cables and Agilent dual triax
SMU cable assemblies. For Agilent Quadrax SMU connections,
please contact the factory.
Kit Contents
• One set of 5 port
vacuum manifolds
(10 total output ports)
mounted on each
side of the high
stability microscope
bridge
Manifolds
• Easy push on hose connection
• Easy push/pull, on and off flow toggle
Specifications
• Panel with triax feed-throughs mounted
• 5 ports per manifold
• Mounting hardware
• 2 manifolds
• Cables are not included.
• Outputs supports 1/8-inch vacuum hose
Compatibility
Compatibility
• Summit
• Summit, S300
106-171 — Triax Connection Panel, Large Area Optical
Bridge/Boom Stand Config
Features
118-640 — Triax Connection Panel, High Stability Bridge
Config, S300
Features
• Connection/vacuum panel
• Set of triaxial connection panels
for convenient cable
management
• 6 vacuum ports with on/off
toggle switches
• Supports triax, BNC, pin-tobanana style connects
• Designed to mount to the high
stability optical bridge mount
• Triax connections support
single triax cables and
Agilent dual triax SMU cable
assemblies. Contact the
factory for Agilent quadrax SMU connections.
• Panel connections support
single triax cables and Agilent
dual triax SMU cable
assemblies. Contact the factory
for Agilent quadrax SMU connections.
Specifications
Specifications
• 12 triaxial (3-lug) feed through connectors (f)
• 16 total triaxial (3-lug) feed through connectors (female), 8 on each
side
• 2 BNC coax (2-lug) feed through connectors (f)
• 4 BNC to pin jack feed through connections
• Ground straps for each panel
• Shorting bar to set the plane float or grounding setting
• Six 1/8-inch barb output vacuum manifold for vacuum base
positioner support
Compatibility
• S300
Compatibility
• Summit
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Connection Panels (Coax, Triax, Pin jack, Banana Vacuum)
Summit • 114
134-710 — Triax Connection Panel, High Stability Bridge
Config, Summit
Features
• Set of triaxial connection panels
for convenient cable
management
• Designed to mount to the high
stability optical bridge mount
• Panel connections support
single triax cables and Agilent
dual triax SMU cable
assemblies. For Agilent quadrax
SMU connections, please contact the factory.
Specifications
• 10 triaxial (3-lug) feed through connectors (female)
• 4 BNC connectors
• 2 banana connectors
• Ground strap on each side
Compatibility
• Summit
RAC-92 — Pin Jack to Banana Interface Panel, High
Stability Optical Bridge
Features
• Includes two brackets,
with six each Pin Jack
to Banana connection
interfaces
• Mounts at rear of
station onto the high stability bridge mount
Compatibility
• Summit, S300
RAC-96 — Pin Jack to Coax Interface Panel, High
Stability Optical
Features
• Includes two brackets, with
six each pin jack to coax
interface connections
• Mounts at rear of station onto the high stability bridge mount
Compatibility
• Summit, S300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Connection Panels (Coax, Triax, Pin jack, Banana Vacuum)
Summit • 115
Mounting Kits and Miscellaneous Accessories
105-588 — Thermal Flow Meter Kit
116-441 — Enhanced RF Shielded MicroChamber TopHat
Kit
Features
Features
• Provide dry air/nitrogen flow control to Summit
MicroChamber
• Provides for an additional 20db of RF
shielding
• Allow for optimization of the air flow to achieve
stable measurement conditions at various set
temperatures
• Upgrades older Summit systems to
the current style and size of TopHat
• Enables compatibility with newer accessories and system options
Specifications
• Input/output ports are 1/2-inch OD quick connect
style
• Provides for compatibility with Current Wave Guide and Unity-MW
probes
• Scale resolution is 0.5 SCFM
Compatibility
Compatibility
• Summit, S300
• Summit
116-511 — MicroChamber Large TopHat Upgrade Kit
106-889 — Dust Cover for Summit Systems
Features
Features
• Upgrades older Summit systems to
the current style and size of TopHat
• Semi-transparent vinyl dust cover for Summit 11/12K system
• Provides protection for periods when the system is not in use
Compatibility
• Enables compatibility with newer
accessories and system options
• Provides for compatibility with Current Wave Guide and Unity-MW
probes
• Summit
114-849 — Xandex Inker, 12V, with Ink Cartridges and
DPP105-PTH Positioner Mount
Features
Compatibility
• Summit
• Inker kit for DPP105-PTH positioner
116-512 — MicroChamber Large TopHat Objective Ring/
Cover
• Enables marking/binning of selected dies
Features
• Controlled by Cascade Microtech’s Nucleus software or external
software
• Solenoid controlled inker
• Provides for objective light/
environmental seal when used with
Summit TopHat
Specifications
• Collapsible seal prevent damage to microscope or objective
• 12 volt Xandex inker system
Compatibility
Kit Contents
• Summit
• Cartridge, Xandex die mark ink, 1.25-inch needle
• Cartridge, Xandex die mark ink, S-bend needle
Compatibility
• Summit 12K, S300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Mounting Kits and Miscellaneous Accessories
Summit • 116
133-492 —High Stability Bridge Mounting Bracket for
Agilent E5288A Atto Sense Unit
Features
• Mounts Agilent B1500 Atto
sense unit in a thermally
isolated position close to the
probing environment
• Keeps cables lengths short for
optimal performance
• Triax feed through direct
connection paths support single triax cables and Agilent dual triax
SMU cable assemblies. For Agilent Quadrax SMU connections,
please contact the factory.
Specifications
• Mount for two Agilent B1500 Atto Sense units
• 4 triaxial (3-lug) feed through connectors (female)
Compatibility
• Summit, S300
135-038 — Mounting plate for B1500A SCUU (SMU-CMU
Unit), High Stability Bridge Config
Features
• Mounts Agilent B1500 SCUU
(SMU-CMU unify unit) in a
thermally isolated position
close to the probing
environment
• Keeps cables lengths short for
optimal performance
• For use on Summit 11/12k and S300 systems with high stability
optics bridge
Kit Contents
• Mounting bracket
• Mounting hardware
Compatibility
• Summit, S300
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Mounting Kits and Miscellaneous Accessories
Summit • 117
Microscope Mounting Plates
122-248 — Microscope Mounting Kit, eVue/A-Zoom2,
Manual Transport, Large Area
Features
• Dovetail mounting block for eVue and A-Zoom2
• Select when ordering a manual, large area
microscope transport system
Compatibility
• Summit, S300
158-066 — Microscope Mounting Kit, eVue, A-Zoom2,
Seiwa and Mitutoyo, Manual Transport, High Stability
Features
• Dovetail mounting block for eVue, A-Zoom2, Seiwa
and Mitutoyo
• Select when ordering a manual, high stability
microscope transport system
• Adjustable stop to adapt to legacy probe stations
Compatibility
• Summit, S300
158-064 — Microscope Mounting Kit, Leica, Manual
Transport
Features
• Dovetail mounting block for Leica S6 and S8
• Adapts standard dovetail to bonder pin common
to stereo zoom microscopes
• Universal design for Summit 11000B, 12000B,
S300 and legacy probe stations
Compatibility
• Summit, S300, Alessi, MTS
122-246 — Microscope Mounting Kit, Manual Transport,
Large Area
Features
• Dovetail mounting block for Seiwa VMS-888 family
and Mitutoyo VMS-70
• Select when ordering a manual large area
microscope transport system
Compatibility
• Summit, S300, Alessi, MTS
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Microscope Mounting Plates
Summit • 118
Tesla
Agilent Configuration
Note: Male and Female connector ends as discussed in this section.
SHV (f) connector
AGILENT PROBES
HVP-3C-E — HV, Coaxial Probe with SHV Connection
HVP-3C — HV, Coaxial Probe with SHV Connection
STOP
SHV (m) connector
STOP
DANGER
To use this probe safely, your station must be configured with a Tesla
specific light curtain or approved safety interlocks. Failure to employ
these safety measures can result in serious injury or death.
DANGER
To use this probe safely, your station must be configured with a Tesla
specific light curtain or approved safety interlocks. Failure to employ
these safety measures can result in serious injury or death.
Features
Features
• HVP high voltage parametric probe for use
with the Tesla on-wafer characterization
system.
• HVP high voltage parametric probe for
use with the Tesla on-wafer
characterization system.
• Uses replaceable tips available in a variety
of diameters to accommodate device
dimensions.
• Uses replaceable tips available in a
variety of diameters to accommodate
device dimensions.
Specifications
• Maximum voltage: 5000V DC@ambient
• Maximum current:
– 1A DC continuous
– 5A pulsed (PW≤1ms, Duty ratio ≤5%)
• Operating temperature range: -55° C to 300° C
• Insulation resistance: >1TΩ @3000V @ambient
• Typical residual capacitance (with PTT needle): >0.5pF
• Cable length: 91 cm (3-feet)
• Cable characteristics: Approximately 40Ω
• Connector type: SHV
• Replaceable tip type: Straight PTT style needles
• Positioner compatibility: DPP2xx/DPP3xx
Specifications
• Maximum voltage: 5000V DC@ambient
• Maximum current:
– 1A DC continuous
– 5A pulsed (PW≤1ms, Duty ratio ≤5%)
• Operating temperature range: -55° C to 300° C
• Insulation resistance: >1TΩ @3000V @ambient
• Typical residual capacitance (with PTT needle): >0.5pF
• Cable length: 91 cm (3-feet)
• Cable characteristics: Approximately 40Ω
• Connector type: SHV
• Replaceable tip type: Straight PTT style needles
• Positioner compatibility: DPP2xx/DPP3xx
Compatibility
• 300 mm Tesla
Compatibility
• 200 mm Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 119
HVP-3T — HV, Triax Probe with Agilent HV Triax
Connection
STOP
HVP-3T-E — HV, Triax Probe with Agilent HV Triax
Connection
DANGER
STOP
DANGER
To use this probe safely, your station must be configured with a Tesla
specific light curtain or approved safety interlocks. Failure to employ
these safety measures can result in serious injury or death.
To use this probe safely, your station must be configured with a Tesla
specific light curtain or approved safety interlocks. Failure to employ
these safety measures can result in serious injury or death.
Features
Features
• HVP high voltage parametric probe for
use with the Tesla on-wafer
characterization system.
• HVP high voltage parametric probe for
use with the Tesla on-wafer
characterization system.
• Uses replaceable tips available in a
variety of diameters to accommodate
device dimensions.
• Uses replaceable tips available in a
variety of diameters to accommodate
device dimensions.
Specifications
Specifications
• Maximum voltage (triax connection):
3000V DC
• Maximum voltage (triax connection):
3000V DC
• Maximum current:
• Maximum current:
– 1A DC continuous
– 3A pulsed (PW≤1ms, Duty ratio ≤5%)
• Operating temperature range: -55°C to 300°C
– 1A DC continuous
– 3A pulsed (PW≤1ms, Duty ratio ≤5%)
• Operating temperature range: -55°C to 300°C
• Insulation resistance:
• Insulation resistance:
– Force to Guard: 1TΩ @1000V
– Guard to Shield: 100GΩ @3000V
• Typical residual capacitance (with PTT needle): >0.5pF
– Force to Guard: 1TΩ @1000V
– Guard to Shield: 100GΩ @3000V
• Typical residual capacitance (with PTT needle): >0.5pF
• Cable length: 91 cm (3-feet)
• Cable length: 91 cm (3-feet)
• Cable characteristics: Approximately 71 Ω
• Cable characteristics: Approximately 71 Ω
• Connector type: Agilent HV connector
• Connector type: Agilent HV connector
• Replaceable tip type: Straight PTT style needles
• Replaceable tip type: Straight PTT style needles
• Positioner compatibility: DPP2xx/DPP3xx
• Positioner compatibility: DPP2xx/DPP3xx
Compatibility
Compatibility
• 200 mm Tesla
• 300 mm Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 120
HCP-BNC — HC Probe Holder with BNC Connection
Features
• HCP high current parametric probe holder
for use with the Tesla on-wafer
characterization system.
• Uses replaceable multi-finger tips.
Specifications
HCP-BNC-3-350 — HC Probe Holder with BNC
Connection, 3-Finger, 350 μm Tip
Features
• HCP high current parametric probe holder
for use with the Tesla on-wafer
characterization system.
• Uses replaceable multi-finger tips.
• Maximum voltage: 500V DC
Specifications
• Maximum current (DC): 10A
• Maximum voltage: 500V DC
• Maximum current (Pulse): 40A, (PW≤1ms,
Duty ratio ≤1%)
• Maximum current (DC): 10A
• Operating temperature range: -55°C to
300°C
• Maximum current (Pulse): 40A,
(PW≤1ms, Duty ratio ≤1%)
• Operating temperature range: -55°C to 300°C
• Total resistance with tip: 10mΩ (typical)
• Total resistance with tip: 10mΩ (typical)
• Isolation resistance: >100GΩ @ 500V
• Isolation resistance: >100GΩ @ 500V
• Connector type: BNC
• Connector type: BNC
• Cable length: 76 cm (2.5-feet)
• Cable length: 76 cm (2.5-feet)
• HC Replacement Probe Tips, 5 pack (page 135)
• Tip material: Tungsten
• Positioner capability: RPP210/RPP305
• Number of tips: 3
Compatibility
• Tip pitch: 350 μm
• Tesla
• Total footprint: 750 μm
• Typical contact resistance on Al: 20mW
• Recommended range of overtravel: 150 μm to 200 μm
• Contact force: 20 gms per tip (60 grams total) @ 100 μm overtravel
• Scrub: 60 μm to 80 μm
• Positioner capability: RPP210/RPP305
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 121
AGILENT ACCESSORIES
148-651 — HV Adapter Box, 2 SHV (f) to 2 BNC (f)
Features
153-180 Chuck Cable, HV Chuck to Agilent HV Connector
(m) for 40A High Current Test, 1.5m
Features
• Provides connection between
Agilent B1505A module
selector and HVP-3C probes.
• Adapts SHV to BNC
connection
• Provides dual triax
connection between the
HV Tesla chuck and
Agilent B1505A HVSMU
• Magnetic base mounts on
platen
• Low-leakage
Specifications
• Very low resistance, HV,
HC cable for dual HCSMU
40A configuration
• Maximum voltage: 500V DC
Specifications
• Connector type: 2 SHV (f), 2 BNC (f)
• Maximum voltage: 3000V
Compatibility
• Maximum current (DC):
3A
• Tesla
• Maximum current (Pulse): 40A, (PW ≤ 1ms, Duty ratio ≤ 1%)
148-657 — BNC Tee, 1 BNC (m) to 2 BNC (f)
• Connector type: Cascade Microtech HV chuck connector, Agilent
HV connector (m)
Features
• Maximum current (DC): 3A
• Maximum current (Pulse): 40A, (PW≤1ms, Duty ratio ≤1%)
Compatibility
• Provides the connection between Agilent
B1505A HCSMU adapter and HCP-BNC or
DCP-HTR probes
• Tesla
• Adapts single BNC connection to dual
• Cable length: 1.5 m (5-feet)
Specifications
153-190 BNC to Agilent HV Triax Adapter
• Maximum voltage: 500V DC
Features
• Maximum current (DC): 5A
• Provides connection between Agilent
B1505A dual HCSMU 40A solution
and HCP-BNC probe
• Maximum current (Pulse): 40A, (PW≤1ms,
Duty ratio ≤1%)
Specifications
Compatibility
• Maximum voltage: 500V DC
• Tesla
• Connector type: 1 BNC (m), 2 BNC (f)
• Maximum current (DC): 3A
• Maximum current (Pulse): 40A (PW£1ms, Duty ratio £1%)
151-196 — SHV (f) to SHV (f) Adapter
• Connector type: Agilent HV triax (m), BNC (f)
Features
Compatibility
• Adapts SHV to SHV connection
• Tesla
Specifications
• Maximum voltage: 5000V
• Connector type: SHV (f) to SHV (f)
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 122
148-658 — Agilent HV Triax Cable, (m - m)
148-668 — Mini Triax (m) to BNC (m) Cable, 60 cm
Features
Features
• Provides triax HV
connection
between Agilent
B1505A and Tesla probe station.
• Provides the connection between Agilent B1505A HCSMU adapter
and DCP-HTR probes.
Specifications
• Maximum current (DC): 1A
Specifications
• Maximum voltage: 500V DC
• Maximum voltage (triax connection): 3000V DC
• Connector type: Mini triax (m), BNC (m)
• Connector type: Agilent HV triax connectors (m -m)
• Cable length: 60 cm (23.5-inch)
• Cable length: 1.5 m (5-feet)
Compatibility
Compatibility
• Tesla
• Tesla
148-669 — Agilent HV Triax (m) – SHV (m), 60 cm
148-659 — BNC Cable, 61 cm (m - m)
Features
Features
• Provides the connection
between Agilent B1505A HCSMU accessories and HCP-BNC
probes.
Specifications
Specifications
• Maximum voltage: 3000V DC
• Connector type: Agilent HV triax (m), SHV (m)
• Maximum voltage: 500V DC
• Cable length: 60 cm (23.5-inch)
• Maximum current (DC): 5A
• Maximum current (Pulse): 40A, (PW≤1ms, Duty ratio ≤1%)
• Connector type: BNC connectors (m - m)
• Guard of Agilent HV triax connects to cable shield
Compatibility
• Tesla
• Cable length: 61 cm (24-inch)
Compatibility
148-670 — HC BNC Cable,1.5 m (m - m)
• Tesla
Features
• Provides the high current, low-resistance connection between
Agilent B1505A HCSMU module selector and HVP-3C probes
through the SHV to BNC adapter (148-651).
148-665 — HC BNC Cable, 61 cm (m - m)
Features
• Provides the high current, lowresistance connection between
Agilent B1505A HCSMU
accessories and HCP-BNC probes.
Specifications
• Maximum voltage: 500V DC
• Max current (DC): 5A
• Maximum current (Pulse): 40A, (PW≤1ms, Duty ratio ≤1%)
Specifications
• Connector type: BNC connectors (m - m)
• Maximum voltage: 500V DC
• Cable length: 1.5 m (5-feet)
• Maximum current (DC): 5A
• Maximum current (Pulse): 40A, (PW≤1ms, Duty ratio ≤1%)
• Connector type: BNC connectors (m - m)
• Provides the HV triax to coaxial adaptation between Agilent
B1505A and Tesla probe station.
Compatibility
• Tesla
• Cable length: 61 cm (24-inch)
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 123
148-724 — SHV to 4-BNC Adapter Box 1 SHV (f), 1 BNC
(m), 3 BNC (f)
149-398 — Resistor Box, HV, 1 KΩ – HV Triax (f), SHV (f)
Features
• 1KΩ Agilent resistor box.
• Provides the interconnections
between the Agilent B1505A
HCSMU adapter, GNDU
protection adapter and HVP3C probes.
• Provides connection between
Agilent B1505A HPSMU
protection adapter box and
HVP-3C probes.
Specifications
• Resistance: 1KΩ
Specifications
• Maximum voltage: 500V DC
• Maximum voltage: 3000V DC
• Maximum current (DC): 5A
• Connector type: Agilent HV triax (f), SHV (f)
• Connector type: SHV (f), BNC (m), 3 BNC (f)
Compatibility
Compatibility
• Tesla
• Tesla
149-396 — Resistor Box, HV, 100 KΩ – HV Triax (f), SHV
(f)
Features
• 100KΩ Agilent resistor box
• Provides connection between
Agilent B1505A HVSMU and
HVP-3C probes.
Specifications
• Resistance: 100KΩ
• Maximum voltage: 3000V DC
• Connector type: Agilent HV triax (f), SHV (f)
Features
149-445 — Test Head Plate Assembly
Features
• Adapter plate for
mounting instrument
accessories on the
Tesla station bridge
Specifications
• Dimensions: width 21.59 cm (8.5-inch) x depth 21.28 cm (8.38inch) x 2.54 cm (1.0-inch)
Compatibility
• Tesla
Compatibility
151-280 — HV Bulkhead Interconnect Panel
• Tesla
Features
149-397 — Resistor Box, HV, 1 KΩ – Triax (f - f)
Features
• 1KΩ Agilent resistor box.
• Provides connection between
Agilent B1505A HPSMU
protection adapter and DCPHTR probes.
Specifications
• Resistance: 1KΩ
• Maximum voltage: 500V DC
• Connector type: Standard triax (f - f)
Compatibility
• Tesla
• Two Agilent HV triax connectors
• Two BNC connectors
• Two SHV connectors
• Two standard triax connectors
• Includes grounding strap
Specifications
• Max Voltage:
– Agilent HV triax: 3000V
– BNC: 500V
– SHV: 5000V
– Standard triax: 500V
• Connector type:
– Agilent HV triax (f)
– BNC (f)
– SHV (f)
– Standard triax (f)
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 124
151-466 — Tesla Bridge Mounting Kit for Agilent B1505A
Features
151-467 — Tesla Interconnect Kit for Agilent B1505A
(Excluding Probes and Positioners)
• Tesla high-power bridge mounting kit for use with Agilent B1505A.
Features
• The kit includes necessary brackets, test head plates, interlock
cables and hardware to mount the B1505A accessories configured
with 1 HVSMU, 1 HCSMU, 2 HPSMUs and 1 MFCMU for typical
measurement setup.
• Tesla high-power probeless kit for use with Agilent B1505A.
Compatibility
Kit Contents
• Tesla
• The kit includes necessary brackets, cables and adapters to
connect B1505A configured with 1 HVSMU, 1 HCSMU, 2 HPSMUs
and 1 MFCMU for typical measurement setup.
Interlock cable
1
Test head mounting brackets, small
4
Test head mounting brackets, large
1
Test head mounting plates
2
Agilent HV triax bulkhead assembly
2
Triax to BNC adapter
1
148-651 — HV Adapter Box, 2 SHV (f) to 2 BNC (f)
1
148-657 — BNC Tee, 1 BNC (m) to 2 BNC (f)
4
148-724 — SHV to 4-BNC Adapter Box 1 SHV (f), 1 BNC (m), 3
BNC (f)
2
148-658 — Agilent HV Triax Cable, (m - m)
3
148-659 — BNC Cable, 61 cm (m - m)
2
148-665 — HC BNC Cable, 61 cm (m - m)
2
148-668 — Mini Triax (m) to BNC (m) Cable, 60 cm
2
148-669 — Agilent HV Triax (m) – SHV (m), 60 cm
1
148-670 — HC BNC Cable,1.5 m (m - m)
2
149-947 — SHV (m) to BNC (m) Cable, 60 cm
2
149-958 — Agilent HV Triax (m) to Std Triax Cable (m),1.5 m
2
151-207 — SHV (m) to SHV (m) Cable, 60 cm
2
149-976 — High Voltage Chuck Floating Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
149-981 — Chuck Cable, High Voltage Chuck to SHV Connector
(f), 1.5 m
1
151-256 — Chuck Cable, High Voltage Chuck Connector to BNC
Connector (m), 1.5 m
1
Compatibility
• Tesla
Ordering Information
• When ordering as standalone, a 149-401 cable kit is required.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 125
151-465 — Tesla Probes and Interconnect Accessory Kit
for Agilent B1505A
149-947 — SHV (m) to BNC (m) Cable, 60 cm
Features
• Provides SHV to BNC connection
• Tesla high-power probing kit for use with Agilent B1505A.
• The kit includes the HVP and HCP probes, positioners, necessary
brackets, cables and adapters to connect B1505A configured with
1 HVSMU, 1 HCSMU, 2 HPSMUs and 1 MFCMU for typical
measurement setup.
Kit Contents
Features
Specifications
• Maximum voltage: 500V DC
• Maximum current (DC): 5A
• Maximum current (Pulse): 40A,
(PW≤1ms, Duty ratio ≤1%)
HVP-3C-E — HV, Coaxial Probe with SHV Connection
3
• Connector type: BNC (m), SHV
(m)
HVP-3T — HV, Triax Probe with Agilent HV Triax Connection
2
• Cable length: 60 cm (23.5-inch)
HCP-BNC-3-350 — HC Probe Holder with BNC Connection, 3Finger, 350 µm Tip
2
DPP210-M positioner
5
RPP305 positioners
2
Interlock cable
1
Test head mounting brackets, small
4
Test head mounting brackets, large
1
Test head mounting plates
2
Agilent HV triax bulkhead assembly
2
Triax to BNC adapter
1
148-651 — HV Adapter Box, 2 SHV (f) to 2 BNC (f)
1
• Connector type: Agilent HV triax (m), Standard (m)
148-657 — BNC Tee, 1 BNC (m) to 2 BNC (f)
4
• Cable length: 1.5 m (5-feet)
148-724 — SHV to 4-BNC Adapter Box 1 SHV (f), 1 BNC (m), 3
BNC (f)
2
148-658 — Agilent HV Triax Cable, (m - m)
3
148-659 — BNC Cable, 61 cm (m - m)
2
148-665 — HC BNC Cable, 61 cm (m - m)
2
148-668 — Mini Triax (m) to BNC (m) Cable, 60 cm
2
Features
148-669 — Agilent HV Triax (m) – SHV (m), 60 cm
1
148-670 — HC BNC Cable,1.5 m (m - m)
2
• Provides the high voltage SHV to SHV coaxial connection for
Agilent B1505A and Tesla probe station.
149-947 — SHV (m) to BNC (m) Cable, 60 cm
2
149-958 — Agilent HV Triax (m) to Std Triax Cable (m),1.5 m
2
151-207 — SHV (m) to SHV (m) Cable, 60 cm
2
149-976 — High Voltage Chuck Floating Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
149-981 — Chuck Cable, High Voltage Chuck to SHV Connector
(f), 1.5 m
1
151-256 — Chuck Cable, High Voltage Chuck Connector to BNC
Connector (m), 1.5 m
1
Compatibility
• Tesla
149-958 — Agilent HV Triax (m) to Std Triax Cable
(m),1.5 m
Features
• Provides the HV triax to standard triax connection for Agilent
B1505A.
Specifications
• Maximum voltage: 500V DC
Compatibility
• Tesla
151-207 — SHV (m) to SHV (m) Cable, 60 cm
Specifications
• Maximum voltage: 5000V DC
• Connector type: SHV (m)
• Cable length: 60 cm (23.5-inch)
Compatibility
• Tesla
Compatibility
• Tesla
Ordering Information
• When ordering as standalone, a 149-401 cable kit is required.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 126
149-976 — High Voltage Chuck Floating Plug
149-981 — Chuck Cable, High Voltage Chuck to SHV
Connector (f), 1.5 m
Product Features
• Provides the floating chuck
Product Features
• Provides force and sense connection between the high voltage
Tesla chuck and Agilent B1505A
connection for the Tesla high-power
chuck
• Safety interlock connection
• Low resistance, high voltage, high-curent cable
Specifications
Specifications
• Dual triax connection
• Maximum voltage: 5000V DC
• Maximum voltage: 10,000V
• Connector type: Cascade Microtech high voltage chuck connector,
SHV connector (f)
Station Compatibility
• Cable length: 1.5 m (4.92-feet)
• Tesla
Station Compatibility
Ordering Information
• Tesla
• Chuck Guard terminal connects to Chuck Shield terminal.
151-256 — Chuck Cable, High Voltage Chuck Connector
to BNC Connector (m), 1.5 m
149-977 — High Voltage Chuck Shorting Plug
Product Features
Product Features
• Provides the shorting chuck
connection for the Tesla highpower chuck
• Provides force and sense connection between the high voltage
Tesla chuck and Agilent B1505A
• Low resistance, high voltage, high-curent cable
• Safety interlock connection
Specifications
Specifications
• Maximum voltage: 500V DC
• Dual triax connection
• Maximum current (DC): 5A
• Maximum current (DC): 10A
• Maximum current (Pulse): 100A, (PW<=1ms, Duty ratio <=1%)
• Maximum current (Pulse): 40A, (PW<=1ms, Duty ratio <=1%)
Station Compatibility
• Connector type: Cascade Microtech high voltage chuck connector,
BNC connector (m)
• Tesla
• Cable length: 1.5 m (4.92-feet)
149-978 — Chuck Cable, High Voltage Chuck to Agilent
High Voltage Connector (m), 1.5 m
Station Compatibility
• Tesla
Product Features
• Provides dual triax connection
between the high voltage Tesla
chuck and Agilent B1505A
HVSMU
• Low-leakage
• Low resistance, high voltage,
high-curent cable
Specifications
• Maximum voltage: 3000V DC
• Connector type: Cascade Microtech high voltage chuck connector,
Agilent high voltage connector (m)
• Cable length: 1.5 m (4.92-feet)
Station Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Agilent Configuration
Tesla • 127
Keithley Configuration
KEITHLEY PROBES
HVP-13-E — HV Triax Probe with CMI HV Triax
Connection
HVP-13 — HV Triax Probe with CMI HV Triax Connection
STOP
DANGER
To use this probe safely, your station must be configured with a Tesla
specific light curtain or approved safety interlocks. Failure to employ
these safety measures can result in serious injury or death.
Features
• HVP high voltage parametric probe
for use with the Tesla on-wafer
characterization system.
• Uses replaceable tips available in a
variety of diameters to accommodate
device dimensions.
STOP
DANGER
To use this probe safely, your station must be configured with a Tesla
specific light curtain or approved safety interlocks. Failure to employ
these safety measures can result in serious injury or death.
Features
• HVP high voltage parametric probe
for use with the Tesla on-wafer
characterization system.
• Uses replaceable tips available in a
variety of diameters to accommodate
device dimensions.
Specifications
Specifications
• Maximum voltage (triax connection):
1500V DC
• Maximum voltage (triax connection):
1500V DC
• Maximum voltage (coax connection):
3000V DC
• Maximum voltage (coax connection):
3000V DC
• Maximum current (DC): 5A
• Maximum current (DC): 5A
• Insulation resistance (Force to Guard): > 1TΩ @3000V
• Operating temperature range: -55°C to 300°C
• Insulation resistance (Force to Guard): > 1TΩ @3000V
• Typical residual capacitance (with PTT needle): >0.5pF
• Cable characteristics: Approximately 40Ω
• Connector type: Amphenal triax threaded 11/16-24
• Replaceable tip type: Straight PTT style needles
• Positioner compatibility: DPP2xx/DPP3xx
• Operating temperature range: -55°C to 300°C
• Typical residual capacitance (with PTT needle): >0.5pF
• Cable characteristics: Approximately 40Ω
• Connector type: Amphenal triax threaded 11/16-24
• Replaceable tip type: Straight PTT style needles
• Positioner compatibility: DPP2xx/DPP3xx
Compatibility
• 300 mm Tesla
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Keithley Configuration
Tesla • 128
HCP-1-B — HC Probe Holder with Banana Jack
Connections (no HCP tip)
HCP-3-350 — HC Probe Holder with Banana Plug
Connections and HCP Tip
Features
Features
HCP high current
parametric probe holder
for use with the Tesla onwafer characterization
system.
HCP high current
parametric probe holder
for use with the Tesla onwafer characterization
system.
Specifications
Specifications
• Maximum voltage:
500V DC
Tip installed
(reference only)
• Maximum voltage:
500V DC
• Maximum current (DC):
10A
• Maximum current (DC):
10A
• Maximum current
(Pulse): 100A,
(PW≤1ms, Duty ratio
≤1%)
• Maximum current
(Pulse): 100A,
(PW≤1ms, Duty ratio
≤1%)
• Operating temperature
range: -55°C to 300°C
• Operating temperature
range: -55°C to 300°C
• Total resistance with tip:
10mΩ (typical)
• Total resistance with tip:
10mΩ (typical)
• Isolation resistance: >100GΩ @ 500V
• Isolation resistance: >100GΩ @ 500V
• Connector type: Dual banana plug
• Connector type: Dual banana plug
• Cable length: 1m (3.3-feet)
• Cable length: 1m (3.3-feet)
• HC Replacement Probe Tips, 5 pack (page 135)
• Tip material: Tungsten
• Positioner capability: RPP210/RPP305
• Number of tips: 3
Compatibility
• Tip pitch: 350 μm
• Tesla
• Total footprint: 750 μm
Tip installed
(reference only)
• Typical contact resistance on Al: 20mW
• Recommended range of overtravel: 150 μm to 200 μm
• Contact force: 20 gms per tip (60 grams total) @ 100 μm overtravel
• Scrub: 60 μm to 80 μm
• Positioner capability: RPP210/RPP305
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Keithley Configuration
Tesla • 129
KEITHLEY ACCESSORIES
144-526 — HV Triax Connector Cable, Interface Panel to
HV Coax
Features
151-470 — HV Triax Interface Panel
• Provides connection
between HV triax
interface panel and
coaxial instruments
Features
• Eight HV triax connections:
– Four force
– Four sense
• Includes grounding strap
• Includes MHV (f)
bulkhead plug for
convenient adaptation to
other coax connectors
Specifications
• Max Voltage: 3000V (coax)/
1500V (triax)
Specifications
• Maximum voltage:
3,000V (coax guardshield connected),
1500V (triax)
• Connector type: Amphenol
triax threaded 11/16-24 (f)
Compatibility
• Tesla
• Maximum current (DC): 5A
151-471 — HC Banana & STD Triax Interface Panel
Features
• Four pairs standard red and black
banana jacks
– Four force
– Four ground
• Includes grounding strap
Specifications
• Maximum current (Pulse): 100A,
(PW≤1ms, Duty ratio ≤1%)
• Cable length: 1m (3.3-feet)
• Cable characteristics
– Impedance F-S: 40Ω
– Withstand voltage F-S: 3,000V
– Insulation resistance F-S: > 1T ohm @3000V
• Terminating connector types
– Amphenol triax threaded, 11/16-24 (m)
– MHV coaxial (m)
• Guard of HV triax connects cable shield
Compatibility
• Tesla
• Max Voltage: 500V
• Connector type: Banana jack
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Keithley Configuration
Tesla • 130
144-527 — HV Triax Connector Cable, Interface Panel to
Keithley 237/238
151-468 — Tesla Probes and Interconnect Kit for
Keithley instruments
Features
Features
• Provides connection
between HV triax interface
panel and:
• Tesla high-power probing kit for use with Keithley instruments.
• The kit includes the HVP and HCP probes, positioners, necessary
brackets, cables and adapters to connect the Keithley instruments
for typical measurement setup.
– High Voltage SMUs
(Agilent, Keithley)
– Standard triax
connectors
Kit Contents
RPP305 Positioners
2
Specifications
DPP210-M Positioners
3
• Maximum voltage: 1100V
(triax)
HCP-1-B — HC Probe Holder with Banana Jack Connections (no
HCP tip)
2
HCP-TIP-3-350 — HC Replaceable Probe Tips, 5-pack
1
• Maximum current (DC): 5A
HVP-13 — HV Triax Probe with CMI HV Triax Connection
• Cable length: 1m (3.3-feet)
PTT Needle,12u
• Cable characteristics:
– Withstand voltage: 1,100V (F-G), (G-S)
– Isolation resistance: 1TΩ @ 1,100V (F-G), 100GΩ @ 1,100V
(G-S)
• Terminating connector types:
– Amphenol triax threaded, 11/16-24 (m)
– Standard triax (HV version) (m)
Compatibility
• Tesla
3
1 box
151-472 — Safety interlock Cable, 3 m
1
144-526 — HV Triax Connector Cable, Interface Panel to HV Coax
1
144-527 — HV Triax Connector Cable, Interface Panel to Keithley
237/238
3
149-976 — High Voltage Chuck Floating Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
High Power Chuck Connection Cables
1
149-980 — Tesla Chuck Cable, HV Chuck to Banana Plug
Connector, 1.5 m
1
151-256 — Chuck Cable, High Voltage Chuck Connector to BNC
Connector (m), 1.5 m
1
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Keithley Configuration
Tesla • 131
151-469 — Tesla Interconnect Kit for Keithley
Instruments (Excluding Probes and Positioners)
Features
• Tesla high-power probeless kit for use with Keithley instruments.
• The kit includes brackets, cables and adapters to connect Keithley
instruments for typical measurement setup.
Kit Contents
151-472 — Safety interlock Cable, 3 m
1
144-526 — HV Triax Connector Cable, Interface Panel to HV
Coax
1
144-527 — HV Triax Connector Cable, Interface Panel to
Keithley 237/238
3
149-976 — High Voltage Chuck Floating Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
High Power Chuck Connection Cables
1
149-980 — Tesla Chuck Cable, HV Chuck to Banana Plug
Connector, 1.5 m
1
151-256 — Chuck Cable, High Voltage Chuck Connector to
BNC Connector (m), 1.5 m
1
Compatibility
• Tesla
151-472 — Safety interlock Cable, 3 m
Features
• Provides the interlock
connection between the test
instrument and the Tesla
station safety light curtain
Specifications
• Cable length: 3 m (9.8-feet)
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Keithley Configuration
Tesla • 132
Iwatsu Configuration
IWATSU ACCESSORIES
149-973 — Iwatsu Curve Tracer Interface Insert Unit, Std
Triax Connector
149-967 — Iwatsu Curve Tracer Interface Insert Unit,
Agilent HV Triax Connector
Features
Features
• Insert unit for Iwatsu curve
tracer interface assembly
• Provides easy connection to
the DCP-HTR probe
• Insert unit for Iwatsu curve
tracer interface assembly
Specifications
• Provides easy connection to
the HVP-3T probe
• Maximum voltage: 500V
• Maximum current (DC): 3A
Specifications
• Maximum current (Pulse): 10A, (PW≤1ms, Duty ratio ≤1%)
• Maximum voltage: 3000V
• Connector type: Standard triax (f)
• Maximum current (DC): 5A
• Maximum current (Pulse): 40A, (PW≤1ms, Duty ratio ≤1%)
Compatibility
• Connector type: Agilent HV triax (f)
• Tesla
Compatibility
151-258 — Iwatsu Curve Tracer Interface Insert Unit,
CMI HV Triax Connector
• Tesla
149-971 — Iwatsu Curve Tracer Interface Insert Unit,
BNC Connector
Features
• Insert unit for Iwatsu curve tracer interface assembly
• Provides easy connection to the HVP-13 probe
Specifications
• Insert unit for Iwatsu curve tracer interface assembly
• Maximum voltage: 3000V (coax), 1500V (triax)
• Provides easy connection to the HCP-BNC probe
• Maximum current (DC): 5A
Specifications
• Maximum current (Pulse): 30A, (PW≤1ms, Duty ratio ≤1%)
• Maximum voltage: 500V
• Connector type: CMI Amphenol HV triax (f)
• Maximum current (DC): 5A
• Maximum current (Pulse): 40A, (PW≤1ms, Duty ratio ≤1%)
• Connector type: BNC (f)
Features
Compatibility
• Tesla
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Iwatsu Configuration
Tesla • 133
151-260 — Iwatsu CT-3000 Series Interface Assembly,
Base Package
151-473 — Tesla Probes and Interconnect Kit for Iwatsu
Curve Tracer
Features
Features
• Provides curve tracer
interface assembly
cable for connection
between curve tracer
and Tesla probe station
• Tesla high-power kit for use with Iwatsu curve tracer.
• Includes chuck port
cable and adapter
• The kit includes necessary probes, positioners, HVP probes, HCP
probes, brackets, cables and adapters to connect Iwatsu CT-3100
and CT-3200 curve tracers for typical measurement setup.
Kit Contents
RPP305 positioners
2
DPP210-M positioners
3
• Support terminal for Iwatsu CT-3000 Series:
HCP-1-B — HC Probe Holder with Banana Jack Connections (no
HCP tip)
2
– HV: Collector terminal for HV mode
– HC: Collector terminal for HC mode
– Cs: Collector sense
– E: Emitter
– Es: Emitter sense
– B: Base
– Bs: Base sense
– AUX: Aux voltage output
• Maximum voltage: 3000V
HCP-TIP-3-350 — HC Replaceable Probe Tips, 5-pack
1
HVP-13-E — HV Triax Probe with CMI HV Triax Connection
3
Specifications
PTT needles, 12 µ
151-260 — Iwatsu CT-3000 Series Interface Assembly, Base
Package
1
box
1
149-976 — High Voltage Chuck Floating Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
• Maximum current: 200A (PW≤1ms, Duty ratio ≤1%)
149-980 — Tesla Chuck Cable, HV Chuck to Banana Plug
Connector, 1.5 m
1
Compatibility
149-981 — Chuck Cable, High Voltage Chuck to SHV Connector
(f), 1.5 m
1
• Tesla
Compatibility
• Tesla
151-474 — Tesla Interconnect Kit for Iwatsu Curve
Tracer (Excluding Probes and Positioners)
Features
• Tesla high-power probeless kit for use with Iwatsu curve tracer.
• The kit includes necessary brackets, cables and adapters to
connect Iwatsu CT-3100 and CT-3200 curve tracers for typical
measurement setup.
Kit Contents
151-260 — Iwatsu CT-3000 Series Interface Assembly, Base
Package
1
149-976 — High Voltage Chuck Floating Plug
1
149-977 — High Voltage Chuck Shorting Plug
1
149-980 — Tesla Chuck Cable, HV Chuck to Banana Plug
Connector, 1.5 m
1
149-981 — Chuck Cable, High Voltage Chuck to SHV Connector
(f), 1.5 m
1
Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Iwatsu Configuration
Tesla • 134
Common Probes
HCP-TIP-3-350 — HC Replaceable Probe Tips, 5-pack
149-977 — High Voltage Chuck Shorting Plug
Features
Product Features
• Includes five tips for use
with the HCP-1-B, high
current parametric coax
• Patented tip design
provides low contact
resistance and superior
current dissipation
• Provides the shorting chuck
connection for the Tesla highpower chuck
50 µ
• Safety interlock connection
350 µ
750 µ
Specifications
• Dual triax connection
• Maximum current (DC): 10A
Specifications
• Maximum current (Pulse): 100A, (PW<=1ms, Duty ratio <=1%)
• Maximum voltage: 500V
DC
Station Compatibility
• Tesla
• Maximum current: 100A
(PW≤1ms, Duty ratio
≤1%)
• Tip material: Tungsten
149-978 — Chuck Cable, High Voltage Chuck to Agilent
High Voltage Connector (m), 1.5 m
• Number of tips: 3
Product Features
• Tip pitch: 350 µm
• Provides dual triax connection
between the high voltage Tesla
chuck and Agilent B1505A
HVSMU
• Total footprint: 750 µm
• Typical contact resistance
on Al: 20mΩ
• Low-leakage
• Recommended range of overtravel: 150 µm to 200 µm
• Contact force: 20 gms per tip (60 grams total) @ 100 µm overtravel
• Scrub: 60 µm to 80 µm
Compatibility
• Tesla
149-976 — High Voltage Chuck Floating Plug
Product Features
• Provides the floating chuck
connection for the Tesla high-power
chuck
• Low resistance, high voltage,
high-curent cable
Specifications
• Maximum voltage: 3000V DC
• Connector type: Cascade Microtech high voltage chuck connector,
Agilent high voltage connector (m)
• Cable length: 1.5 m (4.92-feet)
Station Compatibility
• Tesla
• Safety interlock connection
Specifications
• Dual triax connection
• Maximum voltage: 10,000V
Station Compatibility
• Tesla
Ordering Information
• Chuck Guard terminal connects to Chuck Shield terminal.
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
Common Probes
Tesla • 135
High Power Chuck Connection Cables
149-979 — HV Tesla Chuck Cable, HV Chuck ConnectorStd Triax (m) Connector, 1.5m
151-256 — Chuck Cable, High Voltage Chuck Connector
to BNC Connector (m), 1.5 m
Features
Product Features
• Provides connection between
the HV Tesla chuck and test
instruments
• Provides force and sense connection between the high voltage
Tesla chuck and Agilent B1505A
• Low resistance, high voltage, high-curent cable
• Low resistance, HV, HC cable
Specifications
Specifications
• Maximum voltage: 500V DC
• Maximum voltage: 500V DC
• Maximum current (DC): 5A
• Maximum current: 5A (pulse)
• Maximum current (Pulse): 40A, (PW<=1ms, Duty ratio <=1%)
• Connector type: Cascade Microtech HV chuck connector, standard
triax (m)
• Connector type: Cascade Microtech high voltage chuck connector,
BNC connector (m)
• Cable length: 1.5 m (5-feet)
• Cable length: 1.5 m (4.92-feet)
Compatibility
Station Compatibility
• Tesla
• Tesla
149-980 — Tesla Chuck Cable, HV Chuck to Banana Plug
Connector, 1.5 m
151-257 — HV Tesla Chuck Cable, HV Chuck ConnectorCMI HV (m) Connector End, 1.5m
Features
Features
• Provides connection between
the HV Tesla chuck and test
instruments
• Provides connection between
the HV Tesla chuck and CMI HV
Amphenol feed-thru panel
• Low resistance, HV, HC cable
Specifications
• Low leakage, low-resistance,
HV, HC cable
• Maximum voltage: 10000V DC
Specifications
• Maximum current: 100A (pulse)
• Maximum voltage: 3000V (coax), 1500V (triax)
• Connector type: Cascade Microtech HV chuck connector, banana
jack
• Connector type: Cascade Microtech HV chuck connector, CMI HV
Amphenol (m)
• Cable length: 1.5 m (5-feet)
• Cable length: 1.5 m (5-feet)
Compatibility
Compatibility
• Tesla
• Tesla
149-981 — Chuck Cable, High Voltage Chuck to SHV
Connector (f), 1.5 m
Product Features
• Provides force and sense connection between the high voltage
Tesla chuck and Agilent B1505A
• Low resistance, high voltage, high-curent cable
Specifications
• Maximum voltage: 5000V DC
• Connector type: Cascade Microtech high voltage chuck connector,
SHV connector (f)
• Cable length: 1.5 m (4.92-feet)
Station Compatibility
• Tesla
141-400 Probe Station Accessory Catalog
April 2012, Rev L
Cascade Microtech, Inc.
High Power Chuck Connection Cables
Tesla • 136
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