High Power System SourceMeter® SMU Instrument

High Power System SourceMeter® SMU Instrument
Test Equipment Depot - 800.517.8431 - 99 Washington Street Melrose, MA 02176 - TestEquipmentDepot.com
High power SourceMeter SMU instrument
2657A
• Source or sink up to 180W of DC
or pulsed power (±[email protected],
±[email protected])
• 1fA low current resolution
• Dual 22-bit precision ADCs
and dual 18-bit 1µs per point
digitizers for high accuracy and
high speed transient capture
• Fully TSP® compliant for
easy system integration
with Series 2600B System
SourceMeter models
• Combines a precision power
supply, current source, DMM,
arbitrary waveform generator,
V or I pulse generator, electronic
18-bit load, and trigger controller
– all in one instrument
• Includes TSP® Express
characterization software,
LabVIEW® driver, and Keithley’s
Test Script Builder software
development environment
High Power System SourceMeter
SMU Instrument
®
The Model 2657A is a high voltage, high power, low current source measure unit (SMU) instrument
that delivers unprecedented power, precision, speed, flexibility, and ease of use to improve productivity in R&D, production test, and reliability environments. The Model 2657A is designed specifically
for characterizing and testing high voltage electronics and power semiconductors, such as diodes,
FETs, and IGBTs, as well as other components and materials in which high voltage, fast response, and
precise measurements of voltage and current are required. The Model 2657A offers the highest power
and best low current performance in the industry. It is supported by the industry’s most powerful
parametric characterization software platforms to grow with you as your applications evolve.
The Model 2657A offers highly flexible, four-quadrant voltage and current source/load coupled with
precision voltage and current meters. It can be used as a:
• Semiconductor characterization instrument
• Digital multimeter (DCV, DCI, ohms, and
• V or I waveform generator
power with 6½-digit resolution)
• V or I pulse generator
• Precision power supply with V and I readback • Precision electronic load
• True current source
+120 mA
+60 mA
Typical Applications
SMU INSTRUMENTS
•
•
Power semiconductor device
characterization and testing
Characterization of GaN, SiC,
and other compound materials
and devices
•
Breakdown and leakage
testing to 3kV
•
Characterization of
sub-millisecond transients
+20 mA
0 mA
–20 mA
–60 mA
–120 mA
–3 kV
–1.5 kV
0 kV
+1.5 kV
+3 kV
The Model 2657A can source or sink up to 3000V @ 20mA or 1500V @ 120mA.
A Greater Measure of Confidence
A Tektronix Company
2657A
High Power System SourceMeter
SMU Instrument
8010 High Power Device
Test Fixture
Accessories Supplied
The digitizing measurement mode provides speeds up to 1µs per sample. The dual 18-bit digitizers
allow you to capture voltage and current transients simultaneously. In the integrating measurement
mode, the dual 22-bit integrating analog to digital converters allow more precise measurement of voltage and current. Two A/D converters are used with each measurement mode, one for current and
the other for voltage, that run simultaneously for accurate source readback that does not sacrifice
test throughput.
7709-308A Digital I/O and
Interlock Connector
CA-180-3A TSP-Link/Ethernet Cable
Documentation CD
Software tools and drivers CD
2657A-LIM-3
2657A-PM-200
4299-6
SHV-CA-553-x*
HV-CA-554-x*
HV-CA-571-3*
HV-CS-1613
Low Interconnect Module
200V Protection Module
Fixed Rack Mount Kit
High Voltage Triax to SHV Cable (1, 2, 3m)
High Voltage Triax to Triax Cable (0.5, 1, 2, 3m)
High Voltage Triax to Unterminated Cable
High Voltage Triax Feedthrough Connector
* Cables must be purchased separately. Please contact
your local sales office for configuration assistance.
Accessories
CA-558-2
CA-560-x
CA-562-x
CA-563
CA-568-120
8010-DTB
SUPPLIED WITH the 8010
25-pin D-sub Interlock Cable for 26xxA
4mm Black and Red Banana Cables, 8 in.
6mm Black and Red Banana Cables, 10 in.
BNC to Banana Cable, 9.5 in.
Safety Earth Ground Cable
Device Test Board with TO-247 Socket
Accessories available for the 8010
8010-CTB
Customizable Test Board
8010-DTB-220 Device Test Board with TO-220 Socket (1.5kV)
2657A-PM-200
2657A
26xxB
2657A-LIM-3
The Model 2657A can be combined with Series
2600B and Model 4200-SCS SMU instruments to
support multi-terminal test capability. The Models
2657A-PM-200 Protection Module and 2657A-LIM3 Low Interconnect Module make it easier to connect multiple instruments to a probe station safely
(not required for connecting to the Model 8010
High Power Device Test Fixture).
600
0.0006
Current
Voltage
0.0004
Current (A)
ACCESSORIES AVAILABLE
700
0.0010
0.0008
0.0002
500
400
0.0000
300
–0.0002
200
–0.0004
–0.0006
100
–0.0008
0
–0.0010
–0.0012
0.000
0.005
0.010
0.015
0.020
0.025
High power SourceMeter SMU instrument
Cables must be purchased
separately. Please contact
your local sales office for
configuration assistance.
Two Measurement Modes: Digitizing or Integrating
Precisely characterize transient and steady-state behavior, including rapidly changing thermal effects,
with the two measurement modes in the Model 2657A. Each mode is defined by its independent analog-to-digital (A/D) converters.
–100
0.030
Time (seconds)
The dual high speed A/D converters sample as fast as 1µs per point, enabling full simultaneous
characterization of both voltage and current.
Expansion Capabilities
Through TSP-Link Technology technology, the Model 2657A can be linked with Series 2600B SMU
instruments to form a larger integrated system with up to 32 nodes. Precision timing and tight channel synchronization are guaranteed with built-in 500ns trigger controllers. The fully isolated, independent channels of the SourceMeter SMU instruments make true SMU-per-pin testing possible.
High Power Device Test Fixture
The Model 8010 High Power Device Test Fixture provides safe and easy connections for testing
­packaged high power devices at up to 3000V or 100A. The Model 8010 provides connections for a
high voltage SourceMeter SMU instrument (Model 2657A), one or two high current SourceMeter SMU
instruments (Model 2651A), and three low power SourceMeter SMU instruments (Series 2600B or
Model 4200-SCS SMU instruments). This allows devices with two terminals (diodes) or three terminals (transistors) or even four or five terminals to be characterized safely and accurately. The Model
8010 has full interlock capability for up to six SourceMeter SMU instruments. The Model 8010 has
integrated protection circuits that protect the low voltage SourceMeter SMU instruments from high
voltages the Model 2657A can output should a device fault occur. The Model 8010 includes both a
high current (100A) and a high voltage (3000V) test socket. Various replacement test socket modules
are available, including TO-247, TO-220, axial lead, and a blank socket module that allows building
a custom socket. In addition to standard banana jumpers, the Model 8010 has rear-panel scope and
thermal probe ports to simplify system integration.
A Greater Measure of Confidence
A Tektronix Company
SMU INSTRUMENTS
2657A High Power System
SourceMeter SMU Instrument
Voltage (V)
Ordering Information
Model 2657A specifications
2657A
High Power System SourceMeter
SMU Instrument
Standard Capabilities of Series
2600B SMU instruments
Each Model 2657A includes all the features
and capabilities provided in Series 2600B
SourceMeter SMU instruments:
• Flexibility for use as either a bench-top
I-V characterization tool or as a building
block component of multiple channel I-V
test systems.
• TSP Express software to perform common I-V
tests quickly and easily without programming
or installing software.
• ACS Basic Edition software for semiconductor
component characterization (optional). ACS
Basic Edition now features a “Trace” mode for
generating a suite of characteristic curves.
• Keithley’s Test Script Processor (TSP)
technology supports creating and running
custom user test scripts for high speed test
automation, as well as creating programming
sequences that allow the instrument to
operate asynchronously without direct
PC control.
• Parallel test execution and precision timing
when multiple Series 2600B SMU instruments
are connected together in a system.
• LXI Class C compliance.
• 14 digital I/O lines for direct connection to a
probe station, component handler, or other
automation tools.
• USB port for extra data and test program
­storage via USB memory device.
Model 2657A Condensed Specifications
VOLTAGE ACCURACY SPECIFICATIONS 1
Source
Range
200 V
500 V
1500 V
3000 V
Programming
Resolution
  5 mV
10 mV
40 mV
80 mV
Accuracy
±(% rdg + volts)
0.03% +   50 mV
0.03% + 125 mV
0.03% + 375 mV
0.03% + 750 mV
Display
Resolution
100 µV
100 µV
  1 mV
  1 mV
Measure
Integrating ADC
Accuracy 2
±(% rdg + volts)
0.025% +   50 mV
0.025% + 100 mV
0.025% + 300 mV
0.025% + 600 mV
High Speed
ADC Accuracy 3
±(% rdg + volts)
0.05% + 100 mV
0.05% + 200 mV
0.05% + 600 mV
0.05% +   1.2 V
Display
Resolution
  1 fA
  10 fA
100 fA
  1 pA
  10 pA
100 pA
  1 nA
  1 nA
  10 nA
100 nA
Measure
Integrating ADC
Accuracy 2
±(% rdg + amps)
0.1% + 6E –13 + VoE –15
0.1% + 5E –12 + VoE –15
0.1% + 6E –11 + VoE –13
0.025% + 400 pA
0.025% +   1.5 nA
0.02  % +   25 nA
0.02  % + 200 nA
0.02  % + 500 nA
0.02  % +     5 µA
0.02  % +   24 µA
High Speed
ADC Accuracy 3
±(% rdg + amps)
0.2% + 6E –13 + VoE –15
0.2% + 5E –12 + VoE –15
0.2% + 6E –11 + VoE –13
0.08% + 800 nA
0.08% +    3 nA
0.05% +   50 nA
0.05% + 400 nA
0.05% +    1 µA
0.05% +   10 µA
0.05% +   50 µA
CURRENT ACCURACY SPECIFICATIONS 4
Source
Range
1 nA
10 nA
100 nA
1 µA
10 µA
100 µA
1 mA
2 mA
20 mA
120 mA
Programming
Resolution
30 fA
300 fA
  3 pA
  30 pA
300 pA
  3 nA
  30 nA
  60 nA
600 nA
  3 µA
Accuracy
±(% rdg + amps)
0.1% + 2E –12 + VoE –15
0.1% + 5E –12 + VoE –15
0.1% + 6E –11 + VoE –13
0.03% + 700 pA
0.03% +     5 nA
0.03% +   60 nA
0.03% + 300 nA
0.03% +   1.2 µA
0.03% +   12 µA
0.03% +   36 µA
1. For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0.15 × accuracy specification)/°C.
2. Derate accuracy specification for NPLC setting <1 by increasing error term. Add appropriate typical percent of range term for resistive loads using the
table below.
NPLC
Setting
0.1
0.01
0.001
200 V and 500 V
Ranges
0.01%
0.08%
0.8 %
1500 V and 3000 V
Ranges
0.01%
0.07%
0.6 %
100 nA Range
0.01%
0.1 %
1   %
1 µA to 120 mA
Ranges
0.01%
0.05%
0.5 %
3. 18-bit ADC. Average of 1000 samples taken at 1µs intervals.
4. For temperatures 0° to 18°C and 28° to 50°C, accuracy is degraded by ±(0.35 × accuracy specification)/°C.
Supplemental Characteristics
Typical Voltage Source Noise: 0.005% of range.
Typical Current Source Noise: 0.08% of range.
Typical Voltage Source Settling: <1ms to 200V, <7ms to 3000V.
Typical Current Source Settling: <5ms to 120mA, <200ms to 1µA.
SMU INSTRUMENTS
Specifications are subject to change without notice.
Model 8010 High Power Device Test Fixture
Model 2657A rear panel
A Greater Measure of Confidence
A Tektronix Company
High Power System SourceMeter
SMU Instrument
Triggering: Trigger In to Trigger Out: 0.5μs, typical.
Synchronization: Single- or multi-node synchronized source change: <0.5μs, typical.
Programming
Test Script Builder: Integrated development environment for building, running, and
managing TSP scripts.
TSP Express (Embedded): Tool that allows users to perform common I-V tests quickly and easily
without programming or installing software.
Software Interface: TSP Express (Embedded), Direct GPIB/VISA, Read/Write with VB,
VC/C++, VC#, LabVIEW™, TestPoint™, LabWindows™/CVI, etc.
System Expansion
The TSP-Link expansion interface allows TSP-enabled instruments to trigger and communicate
with each other. See figure below:
To Host Computer
Node 1
Node 2
General
USB: USB 2.1 Host Controller, supports external data storage.
Contact Check: ±50W.
PC Interface: IEEE-488.1 and .2; LXI Ethernet; RS-232.
Digital I/O Interface: Input/Output Pins: 14 open drain I/O bits. 5.25V max.
Power Supply: 100V to 250VAC, 50Hz–60Hz (auto sensing), 550VA max.
Cooling: Forced air. Side and top intake and rear exhaust.
EMC: Conforms to European Union EMC Directive.
Safety: ETL listed (PENDING). Conforms to European Union Low Voltage Directive.
Warranty: 1 year.
Dimensions: 89mm high × 435mm wide × 549mm deep (3.5 in × 17.1 in × 21.6 in). Bench
Configuration (with handle and feet): 104mm high × 483mm wide × 620mm deep (4.1 in
× 19 in × 24.4 in).
Weight: 9.98kg (22 lbs).
Environment: For indoor use only.
Calibration Period: One year.
Model 2657A specifications
TRIGGERING AND SYNCHRONIZATION SPECIFICATIONS
To Nodes 3–32
SMU INSTRUMENTS
2657A
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