operating instructions duo 3 / duo 3 m

operating instructions duo 3 / duo 3 m
OPERATING INSTRUCTIONS
EN
Translation of the original instructions
DUO 3 / DUO 3 M
PD 0060 BEN/H (1607)
Rotary Vane Pump
Table of contents
Table of contents
1
About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1
1.2
2
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1
2.2
2.3
2.4
3
Before switching on the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Switching on . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pumping condensable vapours. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Topping up the operating fluid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Switching off the pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
16
16
16
19
20
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Changing the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Changing the kind of operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
8.1
8.2
8.3
9
Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Connecting the vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Connecting the exhaust side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Connecting to the mains power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Filling up the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.1
7.2
7.3
8
Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
6.1
6.2
6.3
6.4
6.5
7
Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5.1
5.2
5.3
5.4
5.5
6
5
5
6
6
Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.1
4.2
5
Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1
3.2
4
Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
9.1
Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
10
Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
11
Spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
11.1 Spare parts packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
12
Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
13
Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
13.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
13.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Declaration of conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
2
About this manual
1
About this manual
1.1
Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
Applicable documents
Duo 3 / Duo 3 M
Operating instructions
Declaration of Conformity
Operating instructions for accessories (order-specifically)
*also available via www.pfeiffer-vacuum.com
Part of this document
see section "accessories"*
For information about other certifications, if applicable, please see the signet on the product or:
● www.tuvdotcom.com
● TUVdotCOM-ID 0000021320
1.2
Conventions
Safety instructions
The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
3
About this manual
Pictographs
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents
Important information about the product or this document
Instructions in the
text
 Work instruction: here you have to do something.
Abbreviations
C version: Corrosive gas version
Symbols used
The following symbols are used consistently throughout in all illustrations:
V Vacuum flange
Exhaust flange
G
Gas ballast valve
Power connection
4
Safety
2
Safety
2.1
Safety precautions
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump
must read and observe the safety-related parts of these operating instructions.
 The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
 For information on order numbers of components, see "Accessories".
 Use original accessory parts only.
●
●
●
●
●
Do not expose any body parts to the vacuum.
Observe the safety and accident prevention regulations.
Check regularly that all safety precautions are being complied with.
Do not carry out any unauthorised modifications or conversions to the pumps.
Depending on the operating and ambient conditions, the surface temperature of the
pumps may rise above 70 °C. Use suitable finger guards if necessary.
● When returning the pumps to us please note the instructions in the Service section.
The following safety instructions are only valid for the disassembly of the drive
system for a vacuum pump with a magnetic coupling:
● When disassembling the drive system from the pump housing, the strong magnetic
field may influence the function and operational reliability of electrical and electronic
devices.
● Persons with cardiac pacemakers must keep away from the magnetic coupling.
Danger to life!
– Minimum distance: 2 m!
● Disassembled magnetic couplings must be kept away from computers, data storage
media and other electronic components.
● Keep the disassembled components of the magnetic coupling separate at all times.
Danger of crushing!
● Do not allow any magnetised parts into the vicinity of the magnetic coupling. Danger
of injury!
2.2
Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing of personal protective equipment. The owner, respectively the employer are obligated to provide an adequate equipment to any operating persons.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be contaminated by toxic, reactive or radioactive substances.
 Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
5
Safety
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
 Allow the pump to cool before maintenance and repairs.
 If necessary wear protective gloves according to EN 420.
WARNING
Increased noise emission!
Increased noise emission can occur within a limited area surrounding the vacuum
pump.
 Provide noise protection or
 wear hearing protection.
2.3
Proper use
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
 Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accordingly.
●
●
●
●
2.4
The vacuum pump may only be used to generate a vacuum.
Only use the vacuum pump for applications with oxygen concentration ≤ 21%.
Installation, operating and maintenance regulations must be complied with.
Other accessories, than those described in this manual, must not be used without the
agreement of Pfeiffer Vacuum.
Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●
●
●
●
●
●
●
●
●
●
6
pumping of corrosive gases
pumping of explosive media
operation in potentially explosive areas
pumping of gases containing impurities such as particles, dusts and condensate; note
the vapour compatibility levels of the pump
pumping of substances that tend to sublime
use of the vacuum pump to generate pressure
pumping of liquids
the use of operating fluids not specified by Pfeiffer Vacuum
connection to pumps or units which are not suitable for this purpose according to their
operating instructions
connection to units which have exposed voltage-carrying parts
Transport and storage
3
Transport and storage
3.1
Transport
Transport instructions
 Remove the locking cap from the vacuum and exhaust flange immediately before connecting!
– Check the cone strainer, paying attention to the O-ring.
 Use only the handle on the top side of the pump to lift the pump.
Fig. 1:
3.2
Transporting the pump
Storage
 Check that all the openings on the pump are securely closed.
 Fill up the pump with new operating fluid to the top edge of the sight glass.
 Store the pump only dry and dust-free indoors within the specified environmental conditions.
– In rooms with moist or aggressive atmospheres, the pump must be airproof shrinkwrapped in a plastic bag together with a bag of desiccant.
– After storage periods longer than two years, it is recommended to carry out maintenance and change the operating fluid before using the pump.
7
Product description
4
Product description
4.1
Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
● Pump model and model number
● Type and amount of operating fluid
● Date of manufacture
Please find the voltage range and motor-related data on the separately attached motor
rating plate.
D-35641 Asslar
Mod.:
DUO 3
Mod.-Nr.: PK D57 XXX
Ser.- Nr.: 0014440
S(N2) :
Oil :
Mass :
max. 2.5/2.9 m 3 /h
P3
0.4 l
11,2 kg
n max. : XXXX 1/min
Made in Germany
Fig. 2:
Scope of delivery
8
●
●
●
●
●
2005/01
Product identification on the rating plate
Pump with drive unit
Operating fluid (except F4 and F5)
Cone strainer and centering ring/centering ring with nozzle with O-rings
Locking cap for vacuum and exhaust flange
Operating instructions
Installation
4.2
Function
Vacuum pumps of the Duo series are oil-sealed, two-stage rotary vane vacuum pumps.
The vacuum pumps are equipped with a safety valve which, when the pump is at a standstill, closes the vacuum chamber vacuum tight and at the same time vents the pump.
2
6
1
23
V
304/306
15
G
318
Fig. 3:
1
2
6
23
5
Installation
5.1
Set-up
Installation location
308/310
302
60
406
Duo 3 / Duo 3 M
Vacuum flange
Exhaust flange
Connector IEC/C14
Inlet port operating fluid
return line
60
302
318
406
308
Gas ballast valve
Casing
Sight glass
Motor
Operating fluid drain screw
304 Operating fluid filler
screw
306 O-ring
310 O-ring
Observe the following requirements when setting up the pump:
●
●
●
●
Consider the load-bearing capacity of the installation site.
Maximum installation altitude 2000 m (above mean sea level)
Permissible ambient temperature: +12 ... 40 °C
Maximum relative humidity 85%
9
Installation
> 35 mm
max. 10°
Fig. 4:
Setting up the pump
 Fill up with operating fluid before operating the first time (see p. 15, chap. 5.5).
– Amount and type according to rating plate
 Always place the pump on a firm, even surface.
 Where stationary installation is involved, anchor the pump on site.
 When installing the pump in a closed housing, ensure there is sufficient air circulation.
– Sight glass and gas ballast valve must be visible and readily accessible.
– Voltage and frequency information given on the motor rating plate must be visible.
5.2
Connecting the vacuum side
 Remove locking cap from the vacuum flange;
– pay attention to the cone strainer and the respective O-ring in the intake port.
 The connection between the pump and the vacuum chamber should be kept as short
as possible.
– Depending on the pump type, use metallic hoses or PVC hoses with flange connections.
– Separators, filters etc. may be installed upstream to protect the pump (see accessories). However, please observe the loss of pumping capacity due to the conductivity of the accessories.
5.3
Connecting the exhaust side
CAUTION
High pressure in the exhaust line!
Danger of damage to the seals and danger of the pump bursting.
 Observe the maximum permissible pressure of 1500 hPa (absolute), activate shutoff valves in such a way that they open before or at the same time as the pump is
started.
NOTICE
Reduced pressure in the exhaust line!
Reduced pressure in the exhaust line can cause malfunctions and damage the pump.
It is only allowed in pumps with magnetic coupling.
 Ensure that when discharging gases the exhaust pressure is at least 250 hPa higher
than the suction pressure.
10
Installation
86
Cone strainer
87
Centering ring with nozzle
92
O-ring
310 O-ring
92
86
87
310
 Before attaching the piping at the exhaust flange remove locking cap and insert centering ring/centering ring with nozzle with the respective O-rings.
 Choose the cross-section of the exhaust line to be at least the size of the nominal
connection diameter of the vacuum pump's exhaust connection.
 Piping to the pump must be suspended or supported.
– Physical forces from the piping system must not be allowed to act on vacuum
pumps.
 Lay piping from the pump sloping downward so that no condensate can flow back into
the pump; otherwise fit a condensate separator.
– If an air trap is created in the system, then a device for draining condensation water
must be provided at the lowest point.
WARNING
Emission of toxic substances from the exhaust!
Danger of poisoning from emitted gases or vapours, which can be detrimental to health
and/or can pollute the environment, depending on the particular application.
 Comply with the applicable regulations when working with toxic substances.
 Only officially approved filter systems may be used to separate and remove these
substances.
Fitting the OME and
the oil return line (option)
 Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.
 Remove the protective cap from the connection flange.
 Zentrierring mit Düse 87 durch einen Standard-Zentrierring (DN 16 ISO-KF) ersetzen.
 Place OME on the exhaust side of the pump with flange pointing downwards and fit
with clamping ring (accessories), pay attention to centering ring.
11
Installation
ONF/OME
S
9
X
8
10/11
Z
29
28
Fig. 5:
8
9
10
Duo 3 with operating fluid return line
Locking screw
Fitting
Operating fluid return hose
11
28
29
Spring (inside the hose)
Fitting
Locking cap
S
Z
Clamping ring
Centering ring
Note: As the hexagon socket of the locking screw is not metric, a special spanner (3/
16") (provided as part of the scope of supply) is required.
 Unscrew locking screw 8.
 Drain off operating fluid if so and fill in the pump.
 Screw in fitting 9 in place of the locking screw 8; take care with seal ring.
 Loosen fitting 28 and take off locking cap 29.
 Insert spring 11 into hose 10 (anti-kink device).
 Fit operating fluid return hose 10 at both sides,
– keep the hose as short as possible and protect it from bending.
 Tighten the union nuts of both screw fittings.
5.4
Connecting to the mains power supply
Depending on the pump type, different motor versions or mains voltages are possible:
● Single phase motor for fixed voltage with
– built-in thermal protection switch,
– mains switch and
– mains connection socket (C14)
● Single phase motor with switchable voltage range,
– thermal protection switch,
– mains switch and
– mains connection socket (C14)
12
Installation
DANGER
Voltage-bearing elements
Danger to life from electric shock.
 The electrical connection can be carried out only by trained and authorised electricians.
 Disconnect the power supply and secure it against being switched back on.
 Ensure the system is adequately earthed.
NOTICE
Excess voltage!
Danger of destroying the motor.
 Power connections must comply with local regulations. Voltage and frequency information given on the motor rating plate must correspond to the mains voltage and frequency values.
 To protect the motor and supply cable in case of malfunction, mains fuse protection
must be implemented.
WARNING
Danger of injury from moving parts!
After power failure or motor shutdown due to overheating, the motor may restart automatically.
 Secure the motor so that it cannot be switched on while any work is being performed
on the pump.
 If necessary, dismantle the pump from the installation for inspection.
Single phase motors
The vacuum pumps are equipped with single-phase motors with built-in thermal protection switch. This interrupts the motor current in case of overheating, but provides no permanent shutdown of the motor. Depending on the type of pump, different motor versions
with a mains connector are possible.
Fig. 6:
Motor circuit diagram with switch
13
Installation
Fuse protection
The transmission power of the pump’s magnetic coupling is so great that the coupling is no overload protection for the motor.
 To protect the motor in case of malfunction, additionally provide a fuse protection in
accordance with the regional regulations.
– Select a fuse with slow characteristics according to the table below.
Motor voltage
[V], ± 10 %
Frequency
[Hz]
Nominal
current [A]
Recommended
fuse, slow [A]
100
95 ... 105
50
60
5.0
5.0
10
10
105
115 ... 125
50
60
3.2
3.6
6
6
200
208
50
60
1.6
2
4
4
230 ... 240
230 ... 240
50
60
1.4
1.8
4
4
115/230
115/230
50
60
2.9/1.45
3.9/1.95
6/4
6/4
Changing the voltage range
Only valid for pumps with reversible motor:
0
1
115
230
 The mains voltage must be determined on-site each time before the pump is installed
or moved to a different location.
 Disconnect the pump from the power supply.
 Set the desired voltage range on the voltage selector switch using a suitable screwdriver.
115
230
Switch position:
Voltage range
Motor 115/230 V
Voltage range
Motor 100/200 V
"115"
115 V 10%, 50/60 Hz
"230"
230 V 10%, 50/60 Hz
100 V 10%, 50/60 Hz
200 V 10%, 50/60 Hz
NOTICE
Overvoltage!
An incorrect voltage range setting can damage the motor.
 Always check the set voltage range before switching on the pump.
 Only change the voltage range when the pump is disconnected from the power
mains.
14
Installation
5.5
Filling up the operating fluid
The type and amount of operating fluid should be visible on the pump's rating plate for
every rotary vane pump.
Permissible operating fluid
● P3 (standard operating fluid)
● Operating fluid for special applications on request
NOTICE
Use approved operating fluids only!
The use of operating fluids that have not been approved by Pfeiffer Vacuum shall result
in a limited warranty. In such cases, it is not possible to guarantee that product-specific
performance data will be achieved.
 Prior consultation is required before using other application-specific operating fluids.
Filling up the operating fluid
 Unscrew operating fluid filler screw 304.
 Fill up the operating fluid.
– First fill when the pump is cold: Maximum 3/4 of the min./max. range.
304
max.
min.
Fig. 7:
Filling up the operating fluid
 Screw in operating fluid filler screw 304.
WARNING
Toxic vapours!
Danger of poisoning when igniting and heating synthetic operating fluids (e.g. F4/F5)
above 300 °C.
 Observe the application instructions.
 Do not allow operating fluid to make contact with tobacco products; observe safety
precautions when handling chemicals.
15
Operation
6
Operation
6.1
Before switching on the pump
 Check the operating fluid level in the sight glass.
 Compare the voltage and frequency information on the rating plate with the mains voltage and frequency values.
 Check that the exhaust connection allows free flow (max. permissible pressure 1500
hPa absolute).
– Activate the shut-off valves in such a way that they open before or at the same time
as the pump is started.
 Protect the pump sufficiently from taking in contaminants by means of suitable precautions (e.g. dust filters); if necessary, check operating fluid regularly or replace at shorter intervals.
6.2
Switching on
The pump can be switched on in any pressure range between atmospheric and
ultimate pressure.
The ideal operating condition of the pump is achieved during continuous operation. Cyclic operation is possible, but 10 cycles per hour should not be exceeded and the operating phase should always be longer than the downtime (non-operation time).
No special precautions are necessary when pumping dry gases. In order to attain the
lowest possible ultimate pressures, the gas ballast valve should be closed.
CAUTION
Hot surface!
Danger of burns if hot parts are touched. Depending on the operating and ambient conditions, the surface temperature of the pump may rise above 70 °C.
 In this case, use suitable finger guards.
 Switch on pump at main switch 15.
 Switch on the pump with the vacuum flange closed and allow to warm up for 30 minutes.
 Check operating fluid level only when the pump is warm and running; therefore
– close vacuum flange and gas ballast valve,
– correct filling level during operations: within the markings at the sight glass frame,
– check operating fluid daily in non-stop operation, otherwise whenever the pump is
switched on. Refilling is possible when the pump is in final vacuum operation.
6.3
Pumping condensable vapours
Should the process gases contain condensable gases, the rotary vane pump must be
operated with gas ballast (i.e. with an open gas ballast valve).
NOTICE
Bad final vacuum and damage to the pump!
Danger of condensation and corrosion due to exceeding the water vapour compatibility
during operation without gas ballast or in case of insufficient supply of flushing gas.
 Only pump vapours when the pump is warm and the gas ballast valve is open.
 When the process has been completed, allow the pump to continue running for
about 30 minutes with the vacuum flange closed and the gas ballast open for operating fluid regeneration purposes.
16
Operation
Gas ballast valve,
standard version
To avoid condensation in the pump when pumping condensable vapours, air is periodically fed into the working chamber at the beginning of the compression phase via the gas
ballast valve 60.
The gas ballast valve is closed when turning to the right to position 0 and open when turning to the left to position 1. Intermediate settings are not possible.
The gas ballast valve 60 will only be contaminated when airborne dust is in the intake air.
1
0
1
geöffnet/
open
0
1
1
0
0
geschlossen/
closed
Fig. 8:
Operation with accessories
Standard version 60 of gas ballast valve
Gas ballast valve, corrosive gas version
If the pumping process requires the connection of flushing gas, the C version of the gas
ballast valve with the flushing gas connection must be used.
7.4
7.3 7.1
Fig. 9:
7.1
7.2
7.2
Corrosive gas version of gas ballast valve
O-ring
O-ring
7.3
7.4
Proportioning screw
Flushing gas connection (for DN 6 mm hose)
 Connect flushing gas at the flushing gas connection 7.4.
 Set flushing gas pressure; maximum pressure 1500 hPa (absolute).
17
Operation
– Select the type and amount of flushing gas depending on the process; consult Pfeiffer Vacuum if necessary.
 Use the proportioning screw 7.3 to set the desired amount of gas.
– Closed when fully turned to the right; open when fully turned to the left.
Gas ballast valve with solenoid valve
To control the flow of the flushing gas externally, an electromagnetic valve can also be
used as an alternative to the versions described above. The valve makes it easier to operate the gas ballast and allows clean air or other gas to be let in in a process-controlled
manner.
NOTICE
Flushing gas pressure higher than allowed endangers the operational reliability
of the pump.
The power input of the pump, the temperature and the ejection of operating fluid will increase.
 Observe the maximum permissible flushing gas pressure of 1500 hPa (absolute).
 Set the amount of flushing gas on site; dosing is not possible when using a solenoid
valve!
Fig. 10: Assembling the solenoid valve at the gas ballast inlet
Performance data of the solenoid valve
2/2 way valve
Supply voltage
Power input
Socket
Threaded connection of flushing gas
Flushing gas pressure
Amount of flushing gas
18
closed when disconnected
24 V DC, +/- 10 %
4W
Type 2506
1/8" inside
max. 1500 hPa (absolute)
max. 180 l/h
Operation
6.4
Topping up the operating fluid
If the operating fluid has reached its minimum filling level, the operating fluid must be
topped up. The fluid can be topped up during operation in the final vacuum.
Filling up the operating fluid
 Unscrew operating fluid filler screw 304.
 When the pump is at operation temperature, top up the operating fluid up to the "max."
marking.
304
max.
min.
Fig. 11: Filling up the operating fluid
 Screw in operating fluid filler screw 304.
19
Operation
6.5
Switching off the pump
The pump can be switched off in any pressure range.
Rotary vane pumps have an integrated safety valve on the intake side. If the differential
pressure between the exhaust side and the intake side is  250 hPa, then the valve closes automatically and vents the pump when the pump is switched off.
 Switch the pump off at the mains switch or disconnect from the mains in a secure manner.
Venting the vacuum
chamber
NOTICE
Danger of backflow of operating fluid into the intake line!
Contamination of the connected vacuum system!
 Vent the vacuum chamber within 30 s, regardless of the chamber size.
 For a longer venting process, use an additional shut-off valve and shut off the intake
line after switching off the pump.
Maintaining the vacuum in the chamber
NOTICE
Danger of backflow of operating fluid into the intake line!
Contamination of the connected vacuum system!
 Because the safety valve of the pump is not suitable for longer-term sealing, install
an additional shut-off valve in the intake line.
 Shut off the intake line immediately after switching off the pump.
20
Maintenance
7
Maintenance
7.1
Precautions
WARNING
Danger of injury from moving parts!
After power failure or motor shutdown due to overheating, the motor may restart automatically.
 Secure the motor so that it cannot be switched on while any work is being performed
on the pump.
 If necessary, dismantle the pump from the installation for inspection.
WARNING
Pump parts may be contaminated from pumped media!
Danger of poisoning due to contact with harmful substances.
 Decontaminate the pump before carrying out any maintenance work.
 In the event of contamination, take suitable safety precautions to prevent your health
from being harmed by any dangerous substances.
 Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.
 Disconnect the drive motor from the mains and secure it so that it cannot be switched
on.
 Only dismantle the pump as far as necessary to carry out maintenance.
 Dispose of used operating fluid in compliance with local regulations.
 When using synthetic operating fluids or working with toxic substances or substances
contaminated with corrosive gases, the relevant instructions governing their use must
be observed.
 Use only alcohol or similar agents for cleaning pump parts.
Magnetic coupling
The following safety instructions are only valid for the disassembly of the drive system
for vacuum pumps with magnetic coupling!
DANGER
Strong magnetic field in the vicinity of the drive system!
Danger to life for persons with cardiac pacemakers when the drive system is disassembled.
 Persons with cardiac pacemakers must not enter the area (≤ 2m) of the magnetic
field.
 Rooms in which open couplings are accessible must be identified: ’’ No trespassing
for persons with heart pacemaker’’!
 Disassembled magnetic couplings must be kept away from computers, data storage
media and other electronic components.
21
Maintenance
Checklist for inspection, maintenance
and overhaul
Certain maintenance and overhaul work should only be performed by Pfeiffer Vacuum
Service (PV). Pfeiffer Vacuum will be released from all warranty and liability claims if the
required, below listed, intervals are exceeded or maintenance or overhaul procedures
are not performed properly. This also applies if replacement parts other than Pfeiffer Vacuum OEM replacement parts are used.
Activity
K/I/ daily as required; as required; as required;
at least every at least every
W/R1
at least
4 years
2 years
annually
Check operating fluid level
K
X
Visual inspection (leak-tightness/oil leaks) K
X
Check filter insert of external oil mist filter (if K
X
existent)
Change operating fluid
I
X
X
Disassemble casing, sight glass and pump- I
ing system and clean casing outside (without cleaning agent)
Clean gas ballast valve and silencer
I
X
Clean the motor fan cap
I
X
X (PV)
Disassemble the pump, clean and exchange W
seals and wearing parts:
 Radial shaft seal ring
 Coupling half at motor side
 Hydraulic valve
 Exhaust valve tongue
 Valve flap of the gas ballast valve
 Vane springs
Carry out work in accordance the mainteR
X (PV)
nance and additionally:
 Change vanes
 Change valves, springs and sight glass
 Change silencer nozzle
 Check coupling and exchange if necessary
Depending on the process, the required replacement intervals for the operating fluid and the intervals for
inspection, maintenance and overhaul may be shorter than the guide values specified in the table. Consult
Pfeiffer Vacuum Service, if necessary.
1. K: Checking, I: Inspection, W: Maintenance, R: Overhaul
22
Maintenance
7.2
Changing the operating fluid
The service life of the operating fluid is dependent on the application area for the pump.
It must be changed if:
● The specified ultimate pressure is no longer reached
● The operating fluid in the sight glass is visibly contaminated, milky, or cloudy
● The operating fluid is thermally aged, identifiable by its color ID value (applies to mineral oils only).
Depending on the applications, Pfeiffer Vacuum recommends determining the exact service life of the operating fluid during the first year of operation.
The replacement interval may vary from the guide value specified by Pfeiffer Vacuum
depending on the thermal and chemical loads, and the accumulation of suspended particles and condensation in the operating fluid.
WARNING
Hot operating fluid!
Danger of burns when draining due to contact with skin.
 Wear suitable protective clothing.
 Use a suitable collecting vessel.
WARNING
Operating fluid may contain toxic substances from the pumped media!
Danger of poisoning from the emission of harmful substances from the operating fluid.
 Wear suitable protective clothing and respirators.
 Dispose of operating fluid according to the local regulations
Request safety data sheets for operating fluids and lubricants
from Pfeiffer Vacuum or download at www.pfeiffer-vacuum.com.
 Dispose of operating fluid according to the local regulations.
Draining the operating fluid
 Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.
 Unscrew operating fluid filler screw 304.
 Unscrew operating fluid drain screw 308.
 Drain the operating fluid while still quite hot;
– to empty the pump fully, tip it forward slightly.
23
Maintenance
304/306
308/
310
Fig. 12: Draining the operating fluid
 Screw in operating fluid drain screw 308; pay attention to O-ring.
 Screw in operating fluid filler screw 304.
 Allow pump to run for a maximum of 5 seconds with the vacuum flange open.
 Drain off remaining operating fluid.
– In case of serious contamination, the operating fluid will have to be changed several times (flushing):
 Fill up with operating fluid and check the filling level (see p. 15, chap. 5.5).
Determining the level
of deterioration
 The level of deterioration of operating fluid P3 can be determined for clean processes
with the colour scale (in accordance with DIN 51578); supplementary sheet PK 0219
BN on request or at www.pfeiffer-vacuum.com.
 Suck off operating fluid from the pump through the operating fluid filler opening.
 Fill the specimen in a test tube or some similar vessel and test by holding against the
light.
 Where discolouration is red brown (equivalent to 5 on the scale) change operating fluid at the latest.
Flushing and cleaning
If the interior of the pump is heavily contaminated with process residues, we recommend
performing several changes of operating fluid to flush away the contamination:
 Operate the pump with the gas ballast open until the pump has warmed up.
 Drain the operating fluid again and check for contamination, flush again if necessary.
 Take off the cap and clean the sight glass and pump system externally (without cleaning agent).
 Replace the filter elements in the accessories.
 Screw the operating fluid drain screw back in.
 Fill up with operating fluid and check the filling level (see p. 15, chap. 5.5).
 Screw in operating fluid filler screw 304.
24
Maintenance
7.3
Changing the kind of operating fluid
When filling up, topping up or changing the operating fluid, always use the type of operating fluid indicated on the pump type plate. If, for example, amended process conditions
require the use of a different operating fluid, the fluid can be changed as follows:
NOTICE
Changing the type of operating fluid.
A change of operating fluid type can be only be made between mineral (P3) and synthetic operating fluid (D1). It is not possible to change from these two types to F4/F5 or
the other way round!
 For the two flushing processes and final fill, the pump needs to be filled up three times
with fresh operating fluid, and this is the amount of operating fluid required.
 Perform two flushing processes with the new operating fluid.
 Clean any accessories present such as the ONF/OME or ORF/ODK and replace their
filter elements; pay attention to whether more operating fluid is required.
 Fill the pump for the final time with the third filling.
 Note down the current type of operating fluid in an appropriate place on the pump
(preferably on the type plate).
25
Decommissioning
8
Decommissioning
8.1
Shutting down for longer periods
Before shutting down the pump, observe the following procedure and adequately protect
the pump system against corrosion:
 Switch off pump.
 Change operating fluid.
 Start the pump and allow the pump to warm up.
 Switch off the pump.
 Fill up the pump with new operating fluid to the top edge of the sight glass.
 Close vacuum flange and exhaust flange with locking caps.
 Store the pump only dry and dust-free indoors within the specified environmental conditions.
– In rooms with moist or aggressive atmospheres, the pump must be airproof shrinkwrapped in a plastic bag together with a bag of desiccant.
– After storage periods longer than two years, it is recommended to carry out maintenance and change the operating fluid before using the pump.
 Do not store pump in the vicinity of machines, lanes, etc., because strong vibrations
can damage the rotor bearings.
8.2
Re-starting
Emission of operating fluid!
Danger of the operating fluid being emitted at the exhaust flange if overfilled.
 Drain the operating fluid to the normal level before restarting the pump.
NOTICE
Re-starting
The serviceability of the operating fluid without operation is a maximum of 2 years. Before restarting after a shut-down of 2 years or longer, carry out the following work.
 Replace the operating fluid.
 Replace the radial shaft sealing rings and further elastomer parts.
 Replace bearings at pumps with anti-friction bearings.
 Follow the maintenance instructions and inform Pfeiffer Vacuum.
8.3
Disposal
Products or parts thereof (mechanical and electrical components, operating fluids, etc.)
may cause environmental burden.
 Safely dispose of the materials according to the locally applicable regulations.
26
Malfunctions
9
Malfunctions
Please note the following instructions should the pump malfunction:
CAUTION
Hot surface!
Danger of burns if hot parts are touched. The surface temperature of the pump may rise
above 105 °C in case of malfunction.
 Carry out work on the pump only after it has cooled to a safe temperature.
NOTICE
Motor overload!
Depending on the malfunction (e.g. blocking during cold start), the motor may not be
sufficiently protected by the built-in thermal protection switch from damage through
overheating.
 Implement an additional network safety device.
9.1
Rectifying malfunctions
Problem
Possible causes
Pump will not start up No mains voltage or voltage does
not correspond to the motor data
Pump temperature too low
Thermal protection switch has responded
Pump system dirty
Pump system damaged
Motor defective
Pump switches off af- Thermal protection switch of the
ter a while after being motor has responded
started
Mains fuse protection triggered
due to overload (e.g. cold start)
Exhaust pressure too high
Remedy
Check mains voltage and mains fuse protection; check motor switch
Warm up pump to > 12 °C
Detect and fix cause of overheating; allow
pump to cool off if necessary.
Clean pump; contact Pfeiffer Vacuum Service if necessary.
Clean and overhaul pump; contact Pfeiffer
Vacuum Service if necessary.
Replace motor
Detect and fix cause of overheating; allow
motor to cool off if necessary.
Warm up pump
Check opening of exhaust line and exhaust
accessories
Pump does not attain Measurement reading is false
Check gauge, check ultimate pressure withultimate pressure
out installation connected.
Pump or connected accessories
Clean pump and check components for conare dirty
tamination.
Operating fluid dirty
Operate pump for a longer period with gas
ballast valve open or change operating fluid
Leak in system
Repair leak
Operating fluid filling level too low Top off operating fluid
Pump damaged
Contact Pfeiffer Vacuum Service.
Pumping speed of
Intake line not well-dimensioned
Keep connections as short as possible and
pump too low
ensure that cross-sections are sufficiently
dimensioned
Exhaust pressure too high
Check opening of exhaust line and exhaust
accessories
Loss of operating fluid Swivel gasket leaky
Check tightness; replace gasket if necessary
Radial shaft seal ring leaky
Replace seal ring and check bushing
Operational loss of operating fluid, Install oil mist filter and oil return unit
without ONF/OME
Operational loss of operating fluid, Clean oil mist filter and oil return unit,
with ONF/OME
change filter respectively
27
Malfunctions
Problem
Possible causes
Remedy
Unusual operating
noises
Silencer dirty
Damage to the pump system
Clean or replace the silencer.
Clean and overhaul pump; contact Pfeiffer
Vacuum Service if necessary.
Replace motor; contact Pfeiffer Vacuum
Service if necessary
Motor bearing defective
NOTICE
Service work should be carried out by a qualified person only!
Pfeiffer Vacuum is not liable for any damage to the pump resulting from work carried out
improperly.
 Take advantage of our service training programs; additional information at www.pfeiffer-vacuum.com.
 Please state all the information on the pump rating plate when ordering spare parts.
28
Service
10 Service
Pfeiffer Vacuum offers first-class service!
●
●
●
●
Maintenance/repairs on site by Pfeiffer Vacuum field service
Maintenance/repairs in a nearby service center or service point
Fast replacement with exchange products in mint condition
Advice on the most cost-efficient and quickest solution
Detailed information and addresses at: www.pfeiffer-vacuum.com (Service).
Maintenance and repairs in Pfeiffer Vacuum ServiceCenter
The following steps are necessary to ensure a fast, smooth servicing process:
 Download the forms "Service Request" and "Declaration on Contamination".1)
 Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum
service address.
 Include the confirmation on the service request from Pfeiffer Vacuum with your shipment.
 Fill in the contamination declaration and enclose it in the shipment (required!).
 Dismantle all accessories.
 Drain operating fluid/lubricant.
 Drain cooling medium, if used.
 Send the pump or unit in its original packaging if possible.
Sending of contaminated pumps or devices
No units will be accepted if they are contaminated with micro-biological, explosive or radioactive substances. “Hazardous substances” are substances and compounds in accordance with the hazardous goods directive (current version). If pumps are contaminated or the declaration on contamination is missing, Pfeiffer Vacuum performs
decontamination at the shipper's expense.
 Neutralise the pump by flushing it with nitrogen or dry air.
 Close all openings airtight.
 Seal the pump or unit in suitable protective film.
 Return the pump/unit only in a suitable and sturdy transport container and send it in
while following applicable transport conditions.
Service orders
All service orders are carried out exclusively according to our repair conditions for vacuum units and components.
1)
Forms under www.pfeiffer-vacuum.com
29
Spare parts
11 Spare parts
11.1 Spare parts packages
The spare parts packages listed here are only applicable for standard models.
Please state all information on the rating plate when ordering spare parts. Other spare
parts than those described in this manual must not be used without the agreement of
Pfeiffer Vacuum.
Set of radial shaft seal ring (RSSR)
● RSSR and felt ring
● Coupling, motor side
Set of coupling for pump with magnetic coupling
● Can
● Coupling half, drive side
● Coupling half, pump side
Maintenance kit and set of seals
The kit contains all the critical wearing parts that should be replaced after disassembly
and cleaning the pump.
●
●
●
●
Set of seals with all seals (O-rings) of the assembly groups and the subassemblies
Radial shaft seal ring, coupling and felt ring
Wearing parts pumping system
Wearing parts vacuum safety valve
Set of vanes
● Vanes
● Vane springs
Overhaul kit and set of seals
The kit contains all the wearing parts that should be replaced after disassembly and
cleaning the pump:
●
●
●
●
30
Set of seals with all seals (O-rings) of the assembly groups and the subassemblies
Wearing parts of the pumping system (incl. vanes and springs)
Wearing parts of the valves
Coupling spider.
Spare parts package
No.
Radial shaft ring kit incl. motor coupling
Coupling kit, M version
Maintenance kit+ set of seals, standard
Maintenance kit+ set of seals, M version
Set of vanes
Overhaul kit+set of seals, standard
Overhaul kit+set of seals, M version
PK E06 100 -T
PK E06 009 -T
PK E01 040 CT
PK E01 041 CT
PK E08 030 -T
PK E02 040 CT
PK E02 041 CT
Accessories
12 Accessories
Designation
Duo 3
Duo 3 M
KAS 16, condensate separator for pumping speeds from 1.6 to 12 m3/h
ONF 16 S, oil mist filter for pumping speeds up to 12 m3/h
Oil return unit from OME 16 S to Duo 1.6 / Duo 3
OME 16 M, oil mist filter for pumping speeds of up to 12 m3/h
ZFO 16, zeolite trap
Operations monitoring unit 3 for Duo 1.6/3/6/11 and Duo 5/10/20 M
Operations monitoring unit 2 for Duo 1.6/3/6/11 and Duo 5/10/20 M
Operations monitoring unit 1 for Duo 1.6/3/6/11 and Duo 5/10/20 M
Mains cable 230 V with safety plug CEE 7, right angle IEC 320/C13
socket, 2 m
Mains cable 115 V with NEMA-plug, right angle IEC 320/C13 socket, 2 m
SAS 16, dust separator, DN 16 ISO-KF, polyester filter
Oil return unit from OME 16 M to Duo 1.6, 3, 6, 11
Mains cable 115 / 230 V without plug, right angle IEC 320/C13 socket, 3
m
Gas ballast valve - corrosive gas version
Gas ballast valve with magnet valve, 24 V DC
PK Z10 003
PK Z40 001
PK 005 986 -T
PK Z40 003
PK Z70 003
PK 196 141 -T
PK 196 142 -T
PK 196 157 -T
PK 050 109
PK Z10 003
PK Z40 001
PK 005 986 -T
PK Z40 003
PK Z70 003
PK 196 141 -T
PK 196 142 -T
PK 196 157 -T
PK 050 109
PK 050 110
PK Z60 506
PK 006 080 -T
PK 050 111
PK 050 110
PK Z60 506
PK 006 080 -T
PK 050 111
PK 194 144 -U PK 194 144 -U
PK 194 343 -U PK 194 343 -U
13 Technical data and dimensions
13.1 General
● Recommendations of PNEUROP committee PN5
● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuumpump performance - General description"
Conversion table: pressure units
mbar
bar
Pa
hPa
kPa
Torr
mm Hg
mbar
bar
Pa
hPa
kPa
Torr
mm Hg
1
1000
0.01
1
10
1.33
1 · 10-3
1
1 · 10-5
1 · 10-3
0.01
1.33 · 10-3
100
1 · 105
1
100
1000
133.32
1
1000
0.01
1
10
1.33
0.1
100
1 · 10-3
0.1
1
0.133
0.75
750
7.5 · 10-3
0.75
7.5
1
1 Pa = 1 N/m2
Conversion table: gas throughput units
mbar·l/s
Pa·m3/s
sccm
Torr·l/s
atm·cm3/s
mbar·l/s
Pa·m3/s
sccm
Torr·l/s
atm·cm3/s
1
10
1.69 · 10-2
1.33
1.01
0.1
1
1.69 · 10-3
0.133
0.101
59.2
592
1
78.9
59.8
0.75
7.5
1.27 · 10-2
1
0.76
0.987
9.87
1.67 · 10-2
1.32
1
31
Technical data and dimensions
13.2 Technical data
32
Parameter
Duo 3
Duo 3 M
Flange (in)
Flange (out)
Pumping speed at 50 Hz
Pumping speed at 60 Hz
Ultimate pressure with gas ballast
Ultimate pressure without gas ballast
Exhaust pressure, min.
Exhaust pressure, max.
Rotation speed at 50 Hz
Rotation speed at 60 Hz
Leak rate safety valve
Emission sound pressure level without gas ballast at
50 Hz
Ambient temperature
Protection category
Rated power 50 Hz
Rated power 60 Hz
Switch
Mains cable
Shipping and storage temperature
Operating fluid filling
Weight
Cooling method, standard
Typical ultimate pressure according to PNEUROP
DN 16 ISO-KF
DN 16 ISO-KF
2.5 m3/h
2.9 m3/h
3 · 10-3 hPa
3 · 10-3 hPa
Atmospheric pressure
1500 hPa
3000 min-1
3600 min-1
 1 · 10-5 Pa m3/s
 53 dB (A)
DN 16 ISO-KF
DN 16 ISO-KF
2.5 m3/h
2.9 m3/h
3 · 10-3 hPa
3 · 10-3 hPa
250 hPa
1500 hPa
3000 min-1
3600 min-1
 1 · 10-5 Pa m3/s
 53 dB (A)
12-40 °C
IP 40
0.15 kW
0.18 kW
Yes
No
-25-+55 °C
0.4 l
11.3 kg
Air
12-40 °C
IP 40
0.15 kW
0.18 kW
Yes
No
-25-+55 °C
0.4 l
12 kg
Air
Technical data and dimensions
13.3 Dimensions
B+2
C
31,5
DN 16 ISO-KF
61
D+1
172±1
(7,2)
4
70
E+2
95
123±1
190
A+2
130±1
Fig. 13: Duo 3
B+2
C
31,5
DN 16 ISO-KF
61
D+1
172±1
(7,2)
3
88
33,5
E+2
95
70
123±1
190
130±1
A+2
Fig. 14: Duo 3 M
Duo 3
Dimensions
A
B
C
D
E
Duo 3, 1-phase motor,
115 V, 50/60 Hz; 230 V,
50/60 Hz
309 mm
319 mm
123 mm
176 mm
85.5 mm
Duo 3
Duo 3 M
Duo 3, 1-phase motor, Duo 3 M, 1-phase motor,
230-240 V, 50/60 Hz 115 V, 50/60 Hz; 230 V,
50/60 Hz
309 mm
351 mm
309 mm
361 mm
123 mm
123 mm
176 mm
176 mm
85.5 mm
85.5 mm
Duo 3 M
Duo 3 M, 1-phase
motor, 230-240 V,
50/60 Hz
351 mm
351 mm
123 mm
176 mm
85.5 mm
33
Declaration of conformity
We hereby declare that the product cited below satisfies all relevant provisions according to the following EC directives:
● Machinery 2006/42/EC (Annex II, no. 1 A)
● Electromagnetic Compatibility 2014/30/EU
● Restriction of the use of certain Hazardous Substances 2011/65/EU
The agent responsible for compiling the technical documentation is Mr. Sebastian Oberbeck, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.
DuoLine
Duo 3 / Duo 3 M
Harmonised standards and national standards and specifications which have been applied:
DIN EN ISO 12100 : 2010
DIN EN 61010-1 : 2010
DIN EN 1012-2 : 2011-12
DIN EN 61000-6-1 : 2007
DIN EN 61000-6-3 : 2007 + A1: 2011
DIN EN 61000-6-4 : 2007 + A1: 2011
DIN EN ISO 13857 : 2008
DIN EN 61000-6-2 : 2006
DIN EN ISO 2151 : 2: 2008
ISO 21360-1, 2 : 2012
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Dr. Ulrich von Hülsen)
Managing Director
2016-07-28
VACUUM SOLUTIONS FROM A SINGLE SOURCE
Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide,
technological perfection, competent advice and reliable service.
COMPLETE RANGE OF PRODUCTS
From a single component to complex systems:
We are the only supplier of vacuum technology that provides a complete product portfolio.
COMPETENCE IN THEORY AND PRACTICE
Benefit from our know-how and our portfolio of training opportunities!
We support you with your plant layout and provide first-class on-site service worldwide.
Are you looking for a
perfect vacuum solution?
Please contact us:
www.pfeiffer-vacuum.com
Pfeiffer Vacuum GmbH
Headquarters • Germany
T +49 6441 802-0
[email protected]
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertisement