Series 2600B Quick Start Guide - ITU VLSI Measurement Laboratory

Series 2600B Quick Start Guide - ITU VLSI Measurement Laboratory
Models 2634B, 2635B, and 2636B
System SourceMeter® Instruments
Quick Start Guide
Safety precautions
Observe the following safety precautions before using this product and any associated
instrumentation. Although some instruments and accessories would normally be used
with nonhazardous voltages, there are situations where hazardous conditions may be
This product is intended for use by qualified personnel who recognize shock hazards
and are familiar with the safety precautions required to avoid possible injury. Read and
follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product
warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for use and maintenance of
equipment, for ensuring that the equipment is operated within its specifications and
operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical
safety procedures and proper use of the instrument. They must be protected from
electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it
operating properly, for example, setting the line voltage or replacing consumable
materials. Maintenance procedures are described in the user documentation. The
procedures explicitly state if the operator may perform them. Otherwise, they should be
performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and
repair products. Only properly trained service personnel may perform installation and
service procedures.
Keithley Instruments products are designed for use with electrical signals that are rated
Measurement Category I and Measurement Category II, as described in the
International Electrotechnical Commission (IEC) Standard IEC 60664. Most
measurement, control, and data I/O signals are Measurement Category I and must not
be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II connections require protection for high
transient overvoltages often associated with local AC mains connections. Assume all
measurement, control, and data I/O connections are for connection to Category I
sources unless otherwise marked or described in the user documentation. Main supply
voltage fluctuations not to exceed ±10 % of the nominal voltage.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present
on cable connector jacks or test fixtures. The American National Standards Institute
(ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS,
42.4 V peak, or 60 V DC are present. A good safety practice is to expect that hazardous
voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The
responsible body must ensure that operators are prevented access and/or insulated from
every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect
themselves from the risk of electric shock. If the circuit is capable of operating at or
above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended
to be used with impedance-limited sources. NEVER connect switching cards directly to
AC mains. When connecting sources to switching cards, install protective devices to
limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a
properly-grounded power receptacle. Inspect the connecting cables, test leads, and
jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as
rack mounting, a separate main input power disconnect device must be provided in
close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments
while power is applied to the circuit under test. ALWAYS remove power from the
entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes,
such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the
circuit under test or power line (earth) ground. Always make measurements with dry
hands while standing on a dry, insulated surface capable of withstanding the voltage
being measured.
The instrument and accessories must be used in accordance with its specifications and
operating instructions, or the safety of the equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined
in the specifications and operating information, and as shown on the instrument or test
fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued
protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits,
NOT as protective earth (safety ground) connections.
If you are using a test fixture, keep the lid closed while power is applied to the device
under test. Safe operation requires the use of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire
recommended in the user documentation.
This symbol on an instrument means caution, risk of danger. The user should refer
to the operating instructions located in the user documentation in all cases where
the symbol is marked on the instrument.
This symbol on an instrument means caution, risk of electric shock. Use standard
safety precautions to avoid personal contact with these voltages.
This symbol on an instrument shows that the surface may be hot. Avoid personal
contact to prevent burns.
This symbol indicates a connection terminal to the equipment frame.
If the mercury symbol is on a product, it indicates that mercury is present in the
display lamp. Please note that the lamp must be properly disposed of according to
federal, state, and local laws.
WARNING This heading in the user documentation explains dangers that might result
in personal injury or death. Always read the associated information very
carefully before performing the indicated procedure.
This heading in the user documentation explains hazards that could
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains
circuits - including the power transformer, test leads, and input jacks - must be
purchased from Keithley Instruments. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. Other components that are
not safety-related may be purchased from other suppliers as long as they are equivalent
to the original component (note that selected parts should be purchased only through
Keithley Instruments to maintain accuracy and functionality of the product). If you are
unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.
To clean an instrument, remove power from the instrument. Use a damp cloth or mild,
water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products
that consist of a circuit board with no case or chassis (e.g., a data acquisition board for
installation into a computer) should never require cleaning if handled according to
instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning and servicing.
Power and environmental specifications
For indoor use only.
Supply voltage
100 V to 240 V AC, 50 Hz to 60 Hz (autosensing),
240 VA maximum
Maximum 2000 m above sea level
0 °C to 50 °C, 70% relative humidity up to 35 °C. Derate 3%
relative humidity / °C, 35 °C to 50 °C
Pollution degree
DC source
Pulse region 4 *
25 °C to 65 °C
1 or 2
30.3 W maximum
± 200 V DC maximum
± 1.515 A at ± 20 V DC
± 101 mA at ± 200 V DC
Region maximums
Max pulse width
Max duty cycle
10 A at 5 V
2.2 %
1 ms
Measurement category I
Voltage: 200 V DC maximum HI to LO, 250 V DC LO to ground
Current: 101 mA at 200 V; 1.515 A at 20 V
Impedance: Variable
* See full specifications for other pulse regions.
Carefully consider and configure the appropriate output-off state,
and source and compliance levels before connecting the
instrument to a device that can deliver energy. Failure to consider
the output-off state, and source and compliance levels may result
in damage to the instrument or to the device under test.
Introduction to the Series 2600B System SourceMeter® Instrument
The Keithley Instruments Series 2600B System SourceMeter®
Instruments are medium-power source-measure units (SMUs) that
simplify test processes by combining source and measure capabilities
in a single instrument. A Series 2600B SourceMeter Instrument is a
scalable, high-throughput, cost-effective solution for precision DC,
pulse, and low-frequency AC source-measure testing.
The Series 2600B documentation includes:
Quick Start Guide: Shows you how to unpack and set up the
instrument to determine that the instrument is functional.
 Reference Manual: Provides comprehensive information about
the instrument’s features, operation, optimization, maintenance,
troubleshooting, and programming commands.
The documentation is in PDF format on the CD-ROM that is
included with the instrument. If you do not have Adobe Reader® to
view the files, you can download a free copy of it at
CD-ROM contents
The CD-ROMs that are included with your instrument contain:
The Test Script Builder (TSB) Software and Series 2600B TSB
add-in, which is a software tool you can use to create, modify,
debug, and store Test Script Processor (TSP®) test scripts
 Product documentation in PDF format, including the Quick Start
Guide, Reference Manual, product specifications, and
rack-mount kit instructions
 IVI™ instrument driver and related release notes
 National Instruments LabVIEW™ driver and related release
 Java™ SE Runtime Environment
 Keithley I/O layer and release notes
For the latest drivers and additional support information, see
Unpack and inspect the instrument
To unpack and inspect the instrument:
1. Inspect the box for damage.
2. Open the top of the box.
3. Remove the bag that contains the documentation, accessories,
and CD-ROMs.
4. Carefully lift the instrument out of the box.
5. Remove the packaging inserts.
6. Inspect the instrument for any obvious signs of physical damage.
Report any damage to the shipping agent immediately.
In addition to the Series 2600B System SourceMeter® Instrument,
you should have received:
Series 2600B Product Information and Test Script Builder
UL safety supplement
Keithley USB flash drive containing the Model 2400 software
Interlock DB-25 male connector kit hardware
One RJ-45 LAN crossover cable for the Model 2634B. Two
RJ-45 LAN crossover cables for the Models 2635B and 2636B
Power line cord
One triaxial to alligator clip cable for the Model 3635B. Two
triaxal to alligator clip cables for the Models 2634B and 2636B
16 AWG black grounding wire
3-pin screw terminal connector
10 Safety Standards Conformance Information
11 Models 2634B, 2635B, and 2636B System SourceMeter®
Instruments Quick Start Guide
Refer to the packing list for additional items that might have shipped
with your instrument.
Connect the instrument
Important test system safety information
This product is sold as a stand-alone instrument that may become
part of a system that could contain hazardous voltages and energy
sources. It is the responsibility of the test system designer, integrator,
installer, maintenance personnel, and service personnel to make sure
the system is safe during use and is operating properly.
You must also realize that in many test systems a single fault, such as
a software error, may output hazardous signal levels even when the
system indicates that there is no hazard present.
It is important that you consider the following factors in your system
design and use:
The international safety standard UL 61010-1 defines voltages as
hazardous if they exceed 30 V RMS and 42.4 V peak, or 60 V DC
for equipment rated for dry locations. Keithley Instruments, Inc.
products are only rated for dry locations.
Read and comply with the specifications of all instruments in the
system. The overall allowed signal levels may be constrained by
the lowest rated instrument in the system. For example, if you are
using a 500 V DC power supply with a 300 V DC rated switch,
the maximum allowed voltage in the system is 300 V DC.
Make sure any test fixture connected to the system protects the
operator from contact with hazardous voltages, hot surfaces, and
sharp objects. Use shields, barriers, insulation, safety interlocks,
and so on to accomplish this.
Cover the device under test (DUT) to protect the operator from
flying debris in the event of a system or DUT failure.
Double-insulate all electrical connections that an operator can
touch. Double insulation ensures that the operator is still
protected even if one insulation layer fails. Refer to IEC 61010-1
for specific requirements.
Make sure all connections are behind a locked cabinet door or
other barrier. This protects the system operator from accidentally
removing a connection by hand and exposing hazardous voltages.
Use high-reliability fail-safe interlock switches to disconnect
power sources when a test fixture cover is opened.
Where possible, use automatic handlers so that operators are not
required to access the DUT or other potentially hazardous areas.
Provide training to all users of the system so that they understand
all potential hazards and know how to protect themselves from
In many systems, during power up, the outputs may be in an
unknown state until they are properly initialized. Make sure the
design can tolerate this situation without causing operator injury
or hardware damage.
To keep users safe, always read and follow all safety warnings
provided with each of the instruments in your system.
Install the instrument
The Series 2600B can be used on a bench or in a rack. See the
instructions that came with your rack-mount kit if you are installing
the Series 2600B in a rack.
Note that the air intakes for the fan are located on the top cover and
side panels of the Series 2600B. The space around these areas should
be free from obstruction to ensure proper fan operation.
Connect line power
The Series 2600B operates from a line voltage of 100 V to 240 V at a
frequency of 50 Hz or 60 Hz. Line voltage is automatically sensed
(there are no switches to set). Make sure the operating voltage in your
area is compatible.
The power cord supplied with the Series 2600B contains a
separate ground wire for use with grounded outlets. When
proper connections are made, the instrument chassis is
connected to power line ground through the ground wire in the
power cord. Failure to use a grounded outlet may result in
personal injury or death due to electric shock.
3. Connect the plug of the power cord to a grounded AC outlet.
Operating the instrument on an incorrect line voltage may cause
damage to the instrument, possibly voiding the warranty.
To connect line power:
1. Make sure the front panel power switch is in the off (0) position.
2. Connect the socket of the supplied power cord to the power
connection on the rear panel.
Turn on the instrument
Turn on the instrument by pressing the front panel POWER switch
to the on (|) position.
Power-up sequence
When the instrument is turned on, you should see:
A series of dots.
All segments of the display light.
A brief display showing the instrument model. For example, if
the instrument is a Model 2635B, the display will show
“KEITHLEY Model 2635B.”
Line frequency detection and other startup checks.
The entire power-up process takes approximately 30 seconds to
complete. When initialization is complete, if the instrument is a
Model 2634B or a Model 2636B, you will see the default display
screen, shown below.
If the instrument is a Model 2635B, you will see the default display
screen, shown below.
Test the instrument
The following test verifies basic operation of the Model 2634B,
Model 2635B, and Model 2636B. In this test, you will use the
front-panel controls shown below to source voltage and measure the
voltage output.
Step 1: Set source function, range, and level
If the instrument has two channels (Models 2634B or 2636B) and is in
dual-channel display mode, press the DISPLAY button once to show
only the settings for SMU channel A.
You do not need to connect a device under test (DUT) for this test.
1. Press the SRC
key. You will see a blinking character in the
SrcA value field. Confirm that mV is displayed; if not, press the
key again.
2. While that character is still blinking, press the up or down
keys until 20 V is displayed.
The main display screen reappears:
Step 2: Set the source limit
1. Press the LIMIT
LimA value field.
3. Press the CURSOR
10s digit.
keys to move the cursor to the
4. Press the navigation wheel
to enter EDIT mode. The EDIT
indicator appears in the upper left corner of the display.
5. Turn the navigation wheel
to set the source value to
20.0000 V, and then press the navigation wheel
to enter the
selection and exit EDIT mode.
key. You will see a blinking character in the
2. While that character is still blinking, press the down
keys as needed to select the 10 mA limit range.
Verify that the source limit value in the LimA field is
10.0000 mA.
Step 3: Set measurement function and range
Step 4: Turn the output on
1. Press the MEAS
key as many times as needed to select the V
(voltage) measurement function. In the following figure, the
measurement function has been set to “V.”
Turn the output on by pressing the OUTPUT ON/OFF control
(for Model 2634B and 2636B) or
(Model 2635B). The
ON/OFF indicator LED lights and measurements begin.
Step 5: Observe measurements
Observe the measured voltage on the main area of front-panel
display. The readings should be very close to the 20 V source value.
Step 6: Turn the output off
2. Press the AUTO
key as many times as needed to select
the AUTO range function. When AUTO is selected, the Series
2600B automatically selects the best range for the measured
value. You will briefly see the display shown below, and then the
main display screen reappears.
When you finish making measurements, turn the output off by
pressing the OUTPUT ON/OFF
control. The
output indicator LED turns off.
These steps confirm basic functionality of your Model 2634B, Model
2635B, or Model 2636B instrument. Turn instrument power OFF now.
For a basic understanding of the of the Series 2600B functionality, we
strongly recommend that first-time users become familiar with the
Series 2600B Reference Manual.
What should I do if I see an error message when I turn the
instrument on?
If an error message is displayed, press the EXIT (LOCAL) key. The
Series 2600B will return to the default display screen. For detailed
information about error messages, see “Errors and status messages”
in the Series 2600B Reference Manual.
How do I use the included USB drive?
The USB drive included with the Series 2600B can be used to load
test scripts onto the instrument from the front panel. The included
USB drive contains a copy of the 2400 personality script, which
allows the Series 2600B instrument to accept Model 2400 SCPI
commands. For more information about loading and running the
2400 personality script, see “Model 2400 emulation” in the Series
2600B Reference Manual.
What do I do if I lost or formatted the included USB drive?
How can I get another copy of the Model 2400 personality
If you lose or format the USB drive or delete the 2400 personality
script, you can download the latest version of it from the Keithley
Instruments website at
Next steps
Series 2600B Reference Manual
Refer to the Series 2600B Reference Manual for detailed information
about all features of the instrument. This manual is on the Product
Information CD-ROM that came with your instrument.
Keithley Instruments website
See for support and additional information about
the instrument.
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