MIC (Mikroelektronik Centret) 2002 Annual Report

MIC (Mikroelektronik Centret) 2002 Annual Report
MIC
Annual
2002
Report
Contents
Annual Report 2002
MIC (Mikroelektronik Centret)
September 2003
Editor
Pieter Telleman
Text
MIC
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Design & Layout by
Hanne Christensen
Introduction
4- 5
Process Lab
18-21
Education
6- 7
Innovation
22-23
Nano
8-11
Theses
26
Mems
12-15
Publications
27-33
Bio
16-17
Management
34
Photographs by
Karsten Damstedt
Printed in Denmark by
TrykBureauet, Grafisk Produktion A/S
Management
New winds blowing
After celebrating the Mikroelektronik Centret’s (MIC) tenth
anniversary in 2001, 2002 presented itself as a year of change.
Jon Wulff Petersen, director of MIC for over 6 years, announced
his departure from MIC in the summer of 2002. He accepted
new challenges in the role of vice-director at Risø National
Laboratory. Jon leaves a strong organisation with a reputation
for research and innovation in micro- and nanotechnologies.
Under his guidance, microtechnology firmly established itself in
Denmark in the form of a string of commercial activities. In the
fall of 2002, following the birth of his daugther, vice-director
Francois Grey opted for reunification with his family in Switzerland.
He has since accepted a position at CERN. Francois has been
with MIC for 8 years and fulfilled the role of vice-director since
1996.
We wish both Jon and Francois the best of luck in their new positions.
At the time that this year report goes to print I have accepted the
position of director. The excellent infrastructure and unique
atmosphere at MIC which were important factors for me in acquiring
a position at MIC in 1997, prompted me to accept the position of
director of the centre. To warrant continuity from the previous
management to the new management, I asked Ejner Mose Hansen
to become vice-director at MIC. Ejner has been with MIC ever since
the establishment of MIC in 1991 and managed MIC’s most
important asset, the clean room, since its inauguration in 1993.
The changes in management in 2002 leave us with two open
positions in the management group which we aim to fill in the
course of 2003.
Introduction
5
Message from the Director
The entire staff at MIC is dedicated to pursuing education, research, and innovation in micro- and nanotechnology as set forth in the Result Contract with
the Technical University of Denmark (DTU).
MIC´s goals
In 2002 important results were obtained towards reaching our
goals. In our aim to double the number of M.Sc. and Ph.D.
candidates we have expanded and modernized our teaching. These
As one of the first equipment purchases, DTU acquired a stateof-the-art e-beam lithography set-up. This e-beam facility opens
up the possibility to fabricate and explore components and
efforts have resulted in a further increase of the number of students
that attended courses at MIC in 2002 compared to the previous
systems at a scale well below our current capabilities. The system will come on-line soon after DANCHIP is inaugurated in
year. This increased exposure to MIC’s exciting research projects
entices more and more students to stay at MIC and engage in a
the begining of 2004.
The bridge across the sound between Sweden and Denmark
M.Sc. or Ph.D. project at MIC. In research we witnessed a doubling
of the number of peer-reviewed conference proceedings as well
which was completed in 2000 not only improved the
infrastructure of the region but also increased regional
as an increase in peer-reviewed papers. Never satisfied with scientific
publications as the only outcome of research, 2002 has been a
collaborations in the form of joined teaching and research programs. To further stimulate collaboration between MIC and
succeful year for MIC’s collaboration with industry. The highly
succesful SUM ‘center kontrakt’ which contributed significantly in
LTH, Prof. Lars Samuelson from the Nanometer Consortium at
LTH accepted a part-time position as vice-director at MIC. MIC
bringing microtechnology closer to commercialization in Denmark
came to an end and efforts are underway to find means to continue
and the Nanometer Consortium will constitute a strong axis in
an international context not the least when applying for funds
this fruitful collaboration between Danish institutes and industry.
In 2002 MIC started collaboration with a number of Danish
from EU’s 6th framework programme. Closer cooperation
between the two institutions will strengthen MIC’s national
institutes and companies in a new ‘center kontrakt’: Micro Chemical
Analysis in Polymers (µKAP). The aim here is to fabricate
position within nanotechnology, and help MIC in attracting
well-qualified senior researchers as well as gifted students from
microstructures for chemical and biochemical analysis in polymers.
In 2002, DTU finalized its plans to expand the clean room facilities
all over the world. The cooperation will likewise contribute to
a broader contact with the Swedish academic environment
to further enhance micro- and nanotechnology related activities
at DTU. The existing clean room combined with the newly build
and the Swedish industry and thereby lead to a greater
Scandinavian engagement in the new extended processing
facilities will be known under the name Danish Advanced
Nanotechnology Center for Highly Integrated Production (DAN-
facility DANCHIP.
MIC has witnessed many changes over the years and will
CHIP).
DANCHIP will allow small scale commercial production thereby
continue to do so in the coming years. We view these changes
as precursors to new acitivities and improvements that will
bridging the wide gap between research and foundry.
allow MIC to stay at the forefront of education, research, and
innovation in micro- and nanotechnology.
Education
6
Record breaking year for
education
Year 2002 was a record breaking year for education at MIC with 330 students following
the courses given by teachers at MIC. This is the highest number in the history of MIC
as evidenced by the evolution in student numbers shown in the figure. In short, 150
students followed the lecture courses, 110 students participated in experimental
3-week courses and around 60 students carried out other types of experimental courses
based on project work.
Year 2002 was also in another manner an epoch-making year.
In autumn 2001 DTU launched a new course schedule where
lessons are given in blocks of four hours, and at the same time
many courses were rescheduled from five to ten ECTS points in
accordance with the new guidelines provided by DTU. At MIC
this meant a major change in curriculum and a considerable
didactic challenge for the three introductory courses in nano-,
micro- and bio-technology. For example, in the course Solid State
Electronics and Micro Technology several new teaching methods
were introduced to activate the students during the lessons with the
goal of increasing learning. Conventional lectures are supplemented
with interactive sessions where the students are challenged with
questions and exercises. There are also two poster sessions, an exercise
where a multi-layered cake is used to illustrate the planar process
used for silicon wafer processing, and a final project work. This course
was so well received by the students that they recommended one of
the teachers, Erik V. Thomsen, for DTU “Teacher of the Year 2002”
award which he received later that year.
350
300
number of students
250
200
Fagpakke
150
Special
100
Midterm
Lecture
50
3-weeks
0
1995 1996 1997 1998 1999 2000 2001 2002
Teacher of the year
During 2002 MIC restructured its course program under the heading nanosystems
engineering and as a result of this several new courses will be introduced in the next
two years.
The course program consists of three blocks of courses
arranged within the fields of nano-technology,
micro-technology and bio-chemical microsystems.
There are three introductory courses aimed at the
fourth semester (Nano-1, Bio-1, Micro-1) each having
a related experimental 3-week course.
A new course in nano-and micro fabrication will be
launched in autumn 2003. This course, aimed at the
sixth semester, provides a good background for doing
a midterm project within the research fields at MIC.
The graduate level core of the education consists of
three advanced courses (Nano-2, Bio-2, Micro-2), each
having a related experimental project course (Nano-
Master Project
Nano-P
Bio-P
Micro-P
Nano-2
Bio-2
Micro-2
Midterm Project
3-week
Nano & Micro fabrication
Nano-1
Bio-1
TF Fagpakke project
Supplementary
Micro-1
Bio-3W
Nano-3W
Micro-3W
P, Bio-P, Micro-P), and a package of supplementary
courses at an advanced level. The advanced microtechnology course, the Micro-2 course, was launched
already in 2001, the advanced nano technology
The final part of the education is a master project within the fields of
research at MIC. With this education in place MIC is well prepared to
course (Nano-2) will start in autumn 2003 followed
by the advanced course in bio-chemical microsystems
continue to educate a growing number of engineers and researchers within
the fields of nano-technology, micro-technology and bio-chemical micro-
(Bio-2) which will begin in autumn 2004.
systems.
Nano
8
Nanosystems engineering
One of the unique aspects of the research at MIC is the systems level emphasis on the
applications, which has enabled the results to be translated into commercial products.
Hence at MIC the research and education of nanoscience and
fabrication facilities will again be utilized to achieve expediated
technology is addressed in a systems context as well. Nanosystems engineering focuses the device level applications of
commercialisation of nanotechnology. With the recent establishment of the DANCHIP facility at DTU we are uniquely positioned
nanotechnology and its interface to micro and bio systems.
The proven MIC model of close industry collaboration toget-
to accomplish this goal. We will also continue our close
collaborations with national and international partners in this
her with world-class research utilizing the state of the art
endeavour.
„ nanotechnology research areas at MIC“
DEVICE
PROTOTYPING
Packaging
Laser Rapid Prototyping
Testing
DESIGN
NANO
CAD
MODELLING
CHARACTERISATION
Optical/Magnetic
Mechanical/Electrical
SPM (AFM, STM, 4P)
Fluidics (PIV)
SIMS, SEM
MICRO
BIO
INTEGRATION
Nano-assembly
Dielectrophoresis
Catalytic Selfassembly
Nanosoldering
NEMS
Micro/Nano Fluidics
Molecular Electronics
MATERIALS
FABRICATION
UV-lithography
AFM/Laser Lithography
Laser Micromachining
Hot Embossing
Nanoimprint/E-Beam
Deposition/Etch
Silicon, Glass
Polymer (SU8)
Nanostructured Materials
Nanotubes, Wires
Nano
9
An electron microscope image of a gold core inside a carbon
coating. The diameter of the gold core relative to the coating
can be adjusted by controlling the growth conditions.
Scientific highlight:
soldering on the nanoscale
As nanotechnology steadily progresses in discovering and
a tiny metallic “solder bump”. The soldering material is a
developing new small objects that have outstanding properties,
one can only dream of how these could be used as compact, fast
gas of organic molecules containing gold, and the solder
iron is a beam of electrons that frees the gold at exactly the
transistors and ultra-sensitive sensors in microscale circuitry. For
instance, carbon nanotubes have been investigated with an
right spot; where the connection is to be made. Tiny 50 nm
diameter carbon nanotubes were soldered to tiny micro-
amazing intensity throughout the past decades; these small rolls
of carbon atoms are expected to revolutionize electronics and
fingers.
materials science. All that is needed are methods to connect these
- just like a soldering iron does it with macroscale components.
The combination of low contact resistance and a high
mechanical strength of the connections - of the “solder
At MIC a considerable effort is devoted to finding solutions to the
bumps”, holds great promise for the future of this method.
The researchers are now learning to control the gold content
problem of integrating nanoscale components.
In 2000 a microfabricated nanotweezer was developed providing
and the composition of the solder material, and to automatise the soldering process.
smaller hands to hold and move nanoscale components.
MIC has developed a novel method that aims to solve the pro-
In combination with nanotweezers for grasping and moving
nanocomponents, a powerful method for integration of
blem by “soldering” the carbon nanotube to the electrode using
nanocomponents in nanosystems is at hand.
Students in nanolab
Nano
11
Visions for nanoscience & nanotechnology for MIC and Øresund
By Lars Samuleson, Vice-director at MIC and Head of the Nanometer Consortium in
Lund (Sweden).
The recent inauguration of the Øresund bridge between
Copenhagen and Malmö has made it possible to commute between
the Technical University of Denmark (DTU) and the Lund Institute
of Technology (LTH) at opposite ends of the region in less than one
hour. Sharing of laboratory facilities and exchange of staff are
therefore realistic. Substantial regional investments in nanoscience
and technology research and education present an opportunity right
now to optimize these investments and gain a sharper profiling of
our research centres. In this way we can allow each of the
universities to reach international excellence in their respective
primary areas of strengths. These specializations will become
accessible to researchers and students in the whole region. In
principle, all research sites need access and activities in the areas
of silicon microfabrication, compound semiconductor materials
technology, quantum transport physics, quantum devices and
systems, photonic devices and systems, macro-molecular systems
and bioanalytical systems, to a varying degree. There is little
doubt however that an optimization and coordination would
be beneficial to all research sites and have important
consequences for attracting top-level scientists and students to
the region as well as attract and generate more high-tech
companies.
In the traditional mode of operation, each university would make sure to have
all resources in-house with the consequence that the effort at each site and in
the region as a whole gets under-critical.
In the new vision, each of the sites focuses on its primary strength areas and
guarantees full access to researchers and students from the other sites.
MEMS
12
300µm
Brick by brick - building the
optical lab on a chip
2002 has been an year of new initiatives for the MEMS research at MIC, building on
our strengths in silicon based microsystems as well as bridging MEMS and µTAS to
provide additional functionalities in a lab on a chip. Some of these new initiatives
are highlighted in the following.
Optical techniques - like spectroscopy, fluorescence detection and
evanescent wave sensing - are widely used for chemical and
biological analysis. This motivates for integrating optical and
micro-fluidic components on lab-on-a-chip microsystems.
MIC has a series of research activities on integration of optical
transducers - lasers and photodetectors – on polymer based labon-a-chip microsystems. During 2002 the building blocks for a
fully integrated optical analysis system – lasers, waveguides and
photodectors - were demonstrated at MIC.
The picture shows a scanning electron microscope picture of a
solid polymer dye micro-cavity laser, fabricated at MIC by Søren
Kragh during his master thesis project. The active material is a
commercial laser dye cast into a matrix of solid polymer.
In the present device, the laser dye Rhodamine 6G was dissolved into SU-8 photo-resist. The dye doped photo-resist is
spun onto a Pyrex glass substrate, and the laser micro-cavities
are formed by standard photo-lithography. The solid polymer dye lasers are pumped optically by an external laser. The
1.6 µm high solid polymer cavity has a lateral shape of a
trapez. In the present form, the optically pumped solid-state
polymer micro-cavity lasers rely on total internal reflections
at the polymer-air interfaces, as illustrated in the figure above.
The lasing wavelength is controlled by the lateral dimensions
of the polymer cavity. The present device is optically pumped
by a laser at a wavelength of 532 nm, and emits at a
wavelength of 598 nm.
MEMS
13
Optical MEMS for controlling
light
In this project, a new technology for fabrication of an
integrated optical MEMS system for controlling light is
By focusing light on the surface of a microchip consisting of
a large amount of individually addressable microshutters, it
developed in collaboration with the Danish company
Dicon A/S.
is possible to control the spatial transmission of light. Such
a system is called a Spatial Light Modulator (SLM). One
By combining MEMS and optical components such as
possible application for such an SLM is in advanced fibre
optical light distribution systems, where the SLM is used for
mirrors, switches and microlenses on the micro-scale, very
cost attractive, compact and advanced systems can be
switching on and off or modulate light in a number of optical
fibres.
made. Such systems have an increasing number of
applications within areas like telecommunication, displays,
The goal for this project at MIC is to develop cost optimized
fabrication processes for very compact SLM’s with on-chip
scanning, data storage, signal processing and sensing.
packaging.
A micro-optical stack containing a 4x4 array of a
microlens chip on top of a micro-shutter chip.
Control signals for the shutters are fed through
the electrical connections seen at the front of the
SEM picture of a microshutter with control electrodes.
image.
MEMS
14
100µm
100µm
Microreactors for studies of
catalytic reactions
Last year’s acquisition of a high performance silicon plasma
etcher (STS-ASE) has allowed us to move into new fields of
microchemical systems. We are now able to fabricate
channel networks with high aspect ratios in silicon, making
higher temperature reactions like for instance catalysis
reactions possible in the channels. To investigate this
application space, a collaboration between ICAT
(Interdisciplinary Research Center for Catalysis) and MIC
has been established concerning fabrication and application
of silicon microreactors.
Microreactors are catalytic chemical reactors with at least
one linear dimension in the micrometer range. Compared
to ordinary macroscopic chemical reactors, they exhibit
enhanced heat dissipation and laminar flow characteristics,
and due to these physical differences a whole new parameter space for chemical reactions can be investigated.
For example, chemical reactions that are difficult or
impossible to control in macroscopic reactors have been
demonstrated in microreactors, and even explosive reactions
can be carried out safely.
With the variety of microfabrication methods available, it is possible
to integrate different sensors and actuators into the microreactor,
giving the technology very interesting scientific and technological
perspectives.
At ICAT, the use of microreactors serves two purposes. One is to
use microreactors to demonstrate fast catalyst characterization and
optimization as compared to slow conventional testing. The other
is to use the unique physical properties of microreactors to study
catalytic reactions far away from steady state. Examples include
extreme temperature gradients or fast oscillating temperatures and
flows.
The primary tool in the development of silicon microreactors is the
new plasma etcher capable of etching trenches with aspect ratios
exceeding 20 at etch rates ten times higher than traditional systems. Combining this tool with MIC’s wide range of other
microfabrication methods, we are able to make backside
feedthroughs for in- and outlet channels and also high aspect
ratio through-holes in the outlet channel for real-time studies of
the catalytic reaction using gas chromathography and mass
spectroscopy.
MEMS
15
RF MEMS for mobile
communicationsystems
Applications of tunable capacitors in integrated circuits
spread in a wide segment, several of which can be named
At MIC, we have fabricated different versions of in-plane,
high-aspect ratio novel tunable capacitors on silicon-on-
as voltage controlled oscillators, tunable filters and
resonators. In the implementation of channel selecting fil-
insulator (SOI) substrates, which can offer a wide tunability
range with state of the art electronics compatible low
ters with center frequencies ranging from 455 kHz to
254 MHz in radio-frequency (RF) communication systems,
actuation voltages. The device was fabricated using deep
reactive ion etching (DRIE) with parameter tuning, allowing
band pass filters with high quality factors in heterodyne
receivers are used. Conventionally, RF blocks have used
a gap aspect ratio of 1:20 and a feature aspect ratio of 1:60.
With a static capacitance of 1 pF, the tuning ratio was found
electronic varactors implemented through diodes or
transistors. Recently, micro electromechanical varactors have
to be 2:1 with 3 V of excitation which is an order of magnitude better than the current semiconductor varactors.
been a common interest of the RF community as an alternative technology to be used in the aforementioned
Characterizations at microwave frequencies showed a selfresonance frequency exceeding 3.4 GHz permitting RF re-
applications.
gime operation without frequency range restrictions.
30µm
2.2
Capacitance (pF)
2
Measurements
Calculations
1.8
1.6
1.4
1.2
1
0.8
0.6
0
0.5
1
1.5
2
2.5
Control Voltage (V)
3
3.5
BIO
16
Cells collected on castellated
type electrodes
Bugs on a chip
An integrated microsystem for detecting and analysing microorganisms.
The polymerase chain reaction (PCR) is an enzymatic,
synthetic method used to amplify specific DNA
In the Cell Particle Handling Project we have developed an
integrated Microsystem that combines structures for PCR reaction
sequences from organisms. PCR is widely used for
detecting microorganisems in clinical, biological,
and for sample pre-treatment (picture left). The cells are captured
on the sample pre-treatment structure and inhibitors in the sample
agricultural, and environmental samples as well as in
food and food products. However, when doing PCR on
are washed away (picture right). Then the cells are released and
led into the PCR chamber where the DNA of the cells is amplified.
complex biological samples such as blood, milk, soil,
meat, cheese, faeces etc., inhibitory substances in the
Such a system can e.g. be used in medical diagnostics or for
sample may reduce the efficiency of the PCR process
severely. It is therefore often necessary to “clean” the
detecting microorganisms in food and food products. As an
example we are currently developing this as a system for rapid
sample for inhibitors prior to the PCR reaction. Such
sample pre-treatment is labour-intensive, time
detecting of the pathogen bacteria Campylobacter in chicken in
close collaboration with Dr. Bang from the Danish Veterinary
consuming and cannot easily be automated.
Institute, Århus.
Polymer microfludic systems
Silicon micromachining has traditionally been the prominent technology platform at MIC. Taking advantage
research program at MIC where we are transferring our extensive
micro- and nanomachining knowledge from silicon to polymers.
of the unique material properties of silicon an array of
interesting components and systems can be realized as
Polymers represent a large group of materials with a wide variety
highlighted in this and previous MIC year reports.
However, more recently, micro- and nanotechnology
of properties, which make them ideally suited for micro- and
nanosystems with applications in chemical and biochemical
has attracted a strong interest from the chemistry,
biotechnology, medicine, and pharmacology com-
analysis. Furthermore, the ability to mass-produce polymer
structures inexpensively by microinjection moulding enables the
munities as well. The unfavorable material properties
of silicon with respect to exposure to chemical and
realization of single use devices as required in medical
applications.
biological samples and reagents have triggered a
Berthie Liquid Handling chip
(see picture, right)
One example of a polymer chip, which was recently designed and
fabricated at MIC, is the ‘Berthie’ microliquid handling chip for the online analysis of ammonia in waste water. This project is the continuation
of a succesful collaboration with Danfoss A/S and other European partners in a former European project on waste water analysers: MicroChem.
For this polymer chip a channel network was fabricated by means of
laser ablation on 6 individual sheets of the polymer PMMA. These 6
sheets were thermally bonded to form a cube where sample and reagents
were transported, mixed and reacted in three dimensions. During the
bonding process other functional elements, such as optical fibers and
membranes, can be incorporated into the microfluidic system, thus
allowing for optimized optical detection on the one hand and the
possibilities of filtering liquids or the connection of actuators for pumping
or valving on the other hand. Exploring these possibilities is now just in
its beginning phase and leaves room for exciting new discoveries.
Signalling the strong interest from industry for microliquid handling
structures in polymers, an extensive collaborative effort was started under the title “Centre for Microsystems for Chemical and Biochemical
Analyses Based on Polymers (µKAP)”. This centre contract has been
established in the summer of 2002 as a research collaboration between
the following partners: Radiometer A/S, Danfoss A/S, Nunc A/S,
Scandinavian Micro Biodevices (SMB A/S), Vir A/S, Delta, Sensor
Technology Centre (STC), Teknologisk Institut, Institut for Produktion og
Ledelse (IPL) and MIC. Within the centre methods for the fabrication of
micro- and nano-structures in different polymers by micro-milling, laser
ablation, hot embossing, and microinjection moulding will be developed.
The partners will also investigate bonding methods and surface treatment
of polymers. Manufacturers of polymer parts, research institutes, service
institutes and end users work closely together in this consortium on several
demonstrator projects such as an on-line wastewater sensor, a
miniaturized blood analyser and a surface plasmon resonance biochip.
Total funding for this project is almost 41 million DKK where industry
contributes almost 24 million DKK and the Ministry for Science and
Technology provides 16.7 million DKK funding.
For more information please visit the website: mikrokap.teknologisk.dk
Two SEM pictures of laser ablated microfluidic
structures
Cleanroom
DANCHIP
Establishing DANCHIP
(Danish Advanced
Nanotechnology Center for Highly Integrated Production) is a
national investment in
a new cleanroom
facility for micro- and
nanotechnology,
based at the existing
process facility shared
by MIC and COM.
DANCHIP is a professionally run organization based on knowledge-
The users of DANCHIP will be companies, start-ups,
and cost sharing which form a reliable bridge between education,
research and industrial production supporting clusters of new
MIC and COM, other departments at DTU, and
universities in Denmark and abroad. The users of DAN-
modern industry in Denmark. A staff of service- and maintenance
technicians and process engineers maintains the facility and the
CHIP will get access to advanced equipment for
research and development within micro- and
process equipment.
The goal in establishing the new facility is to support world-class
nanotechnology. The excellent facilities provided
combined with knowledge sharing will enable a fast
research and development within the broad range of micro- and
nanotechnologies with state-of-the-art process equipment. The
development of new areas and thus provide a
technological lead.
doubling of the cleanroom space will make DANCHIP able to
develop process steps, process sequences, as well as components
DANCHIP will be the ideal platform for cooperation
between companies, MIC, COM and other universities
and to have the capability to commercially manufacture these in
small quantities. One of the new technological focus areas is
within micro- and nanotechnology.
During 2002 MIC, COM and the industrial partners
nanotechnology where lithography is very crucial. The highlight is
the new electron beam lithography system (EBLS) model JBX 9300FS
have conducted the detailed planning of the new
facilities. The construction of the new building started
from Jeol with a spot diameter of 4 nm and a minimum feature
size of around 10 nm.
in the spring 2002 and will be finished primo 2004.
Process Lab
19
Equipment in MIC´s
cleanroom
E-beamer, JBX-9300FS
Photolithography:
•
•
Süss RC 8 single wafer spinner
SSI 150 dual track spinner with thick
•
(25 µm) photoresist facility.•
Electronic Visions AL6-2 doublesided mask aligner.
•
•
SÜSS MA/BA6 doublesided mask aligner.
STAR 2000 photoresist adhesion primer.
Furnaces:
•
•
Wet and dry oxidation
LPCVD of doped SiO2,Si3N4, as well as doped polysilicon
•
Annealing
Deposition:
•
Three STS PECVD cluster systems for depositing SiO2,
PSG, BSG, BPSG, Si3N4, and SiOxNy with rare earth doping
facility.
•
Deep anisotropic dry etch of Si by „Advanced Silicon
•
Etch“ (ASE™)
KOH based anisotropic etching
•
•
Deep glass etch
Isotropic etching
•
Plasma Processor 300 barrel asher from Technics Plasma
Ion implantation:
•
Varian extrion 200keV cassette-to-cassette ion implanter
Characterisation equipment:
•
Leo 1550 Field Emission SEM with EDX (X-ray analysis)
•
•
Atomika Secondary Ion Mass Spectrometer (SIMS)
Scanning Probe Microscopes (STM, AFM from DME)
•
•
Wolllam Vase Scanning Ellipsometer
Tencor Profiler
Evaporation and sputtering:
Packaging:
•
•
Dicing
•
•
Wire Bonding
Solder bump bonding
•
•
Anodic glass bonding (bulk)
Thin film glass anodic bonding
•
•
Silicon direct bonding
Polishing
Alcatel SCM600 e-gun evaporation and sputter
deposition
•
•
Leybold LAB500 e-gun evaporation
Varian 3180 cassette-to-cassette sputterer
•
DCA UHV dual sputterer
Etching:
•
Dry etch of Si, SiO2, and Si3N4, by RIE in the STS clusters
using F-based plasmas
Satellite facts
Sun-sensor:
E-emitter:
Weight
~3.5 gr. including electronics
Weight:
~2.5 gr ex. elec.
Dimensions
7.7 x 8.8 mm (sensor alone)
Dimensions
10 x 20 mm
Number of tips
~1.67 millions
Field of View.
+/- 70 º
Predicted res. 0.07 º (to be verified)
Expected current ~1 mA
Process Lab
21
MEMS in
space
In April 2001 a number of students at DTU decided to build a small satellite. They
contacted one of the designers of the Danish Ørsted satellite, Prof. Mogens Blanke.
By adapting the CubeSat concept originally proposed by Prof. Robert Twiggs of
Stanford University, a number of parameters are predetermined i.e. size, mass,
and maximum energy consumption. The payload of the satellite consists of a new
mechanism to wilfully remove a satellite from orbit by letting an electro dynamic
thether interact with the earth’s magnetic field. By slowing down the satellite it
looses altitude and eventually burns up in the atmosphere.
Small and light
The electron emitter
With a size of only 10 cm by 10 cm by 10 cm, ca. 1 Watt power
and a total mass of 1 kg the students needed to be very creative
The electron emitter is a crucial part of the payload. The electrodynamic thether (an aluminium wire) collects electrons in the
in order to make a fully functional satellite. Micro Electro
Mechanical Systems (MEMS) solutions present an excellent choice
plasma surrounding the satellite in orbit. In order to keep a
current running in the tether electrons need to be emitted from
when size, weight and power consumption must be limited.
Therefore two of the sub-systems of the satellite the sun sensor
the satellite. To meet the requirements of low power
consumption a MEMS based device consisting of millions of
and the electron emitter, were MEMS-based.
gated tips for electron emission was chosen. The device was
fabricated with the Atomic Force Microscopy (AFM) tip process
The sun-sensor
(see picture above, left)
(see picture above, right)
developed at MIC. By changing the number of emitting tips the
current in the tether can be regulated thereby controlling the
A Micro Opto Electro Mechanical System (MOEMS) was chosen
to realize a sextant for space applications. The device was
electro-dynamic force on the satellite. The students Anders Torp
and Philip Ralhan Bidstrup from the Physics Department of the
developed by two students, Jan Hales and Martin Pedersen,
during their midterm project. After this course finished two
University of Copenhagen designed and fabricated the electron
emitter during a special course at MIC.
succesive special courses at MIC provided the possibility to realize
the device in MIC’s clean room. The sun sensor consists of an
This project not only demonstrates the excellent advantages of
optical slit constricting the light and a set of photo-diodes
measuring the light intensity. As the angle of the sun varies the
MEMS and MOEMS in applications where size, weight and power
consumption are limited, e.g. space applications, but also shows
current generated by the photodiodes changes as well.By
designing the photo diodes with triangular shapes the angle
how far initiative, ambition and ingenuity can go. This project
has been made possible by financial support from the Danish
sensitivity can be enhanced. The fully finished sensor was tested
and shown to perform according to specifications and accurately
Space research committee and private industry. The satellite is
to be launched into space by the Russian company Eurockot in
measure the sun’s angle.
June 2003.
Industry and Innovation
22
From the lab to the fab
Three recent examples:
1) Establishment of a MEMS production line
Starting with a Ph.D.project in 1993, SonionMEMS developed
its process and design competenc within MEMS technology
costs, as well as the utilization
of the general technology
through national and international research collaborations at
MIC.
trends.
One of the major hurdles was to transfer this know-how to a
Today, SonionMEMS is
constructing a cleanroom
production environment. Production facilities and business
concepts were still under development and most end users
facility for an in-house
assembly line in Roskilde,
were not aware of this new technology.
which will be used for all
backend processing such as
SonionMEMS started dedicated collaboration projects with
MEMS manufacturing houses in order to establish this expertise,
dicing, flip-chip assembly,
and underfill application –
realizing very soon that there was not any one single MEMS
manufacturing house or foundry capable of and/or interested
processes, which have been developed and tested within MIC (SUM
and PackLab), and which SonionMEMS regards as a new core
in implementing all desired processes.
competence. All front-end processes have been developed at MIC/
DTU and were outsourced to foundries.
In a major redesign and concept change, the component was
divided into modules, which could be connected to each other
SonionMEMS intends to continue its research and development
by advanced packaging processes without sacrificing
automization and standardization. The modular concept added
activities at DANCHIP and PackLab, respectively, and hopes to be able
to bridge the gap between R&D and production environments by
flexibility and the possibility to outsource standard tasks,
allowing for a shorter time to market and reduced up-front
improved process control and uptime of critical equipment at these
two facilities.
2) From Research to Industrial Production
Grundfos has been an industrial partner of MIC right from its
inception in 1991. This longstanding collaboration has enabled
resistant protective coating. The launch of the new production facility
has been very successful and the first sensors are now being tested.
the company to start its own MEMS production of pressure
sensors two years ago in a facility based in Farum near
The company has also started a follow-up project at MIC on a „multi-
Copenhagen. The sensor is based on a traditional design of
the element with piezoresistors positioned on an anisotropically
sensor for pump control“. This new industrial PhD project will involve
a new sensor design at MIC, which will be processed at the new
etched membrane of silicon. A unique feature of this sensor is
its ability to operate in harsh environments due to very corrosion
DANCHIP facility. The sensors will be packged at the company head
quarter in Bjerringbro and evaluated in pumps.
3) SUM
(by Jens Branebjerg,Delta & Erik V. Thomsen, MIC)
In 2002 the SUM center contract project went into its final year. The SUM project is a collaboration on microsystem development
between MIC, the service provider Delta and the Danish companies Capres, Danfoss, Grundfos and SonionMEMS.
The project began in 1999 with an overall goal of bringing microsystems into production. The main results obtained are:
•
The partners have built a packaging laboratory (packlab) located in the CAT building next to
MIC.
•
The partners have established connections to production networks and microsystem devices
have been fabricated at foundries using Multi Project Wafer processes and engineering runs.
•
MIC has established a prototyping process for fabrication of piezo-resistive devices and a
database driven knowledge based process-composing and registration system.
•
Delta has built up new services within the field of micro system packaging.
•
Capres has realised packaging of micro four-point probes.
•
Grundfos is starting up mass production of pressure sensors in Denmark.
•
Danfoss has set pressure sensors in field test.
•
SonionMEMS has developed packaging for micro mechanical microphones and are setting
up mass production in Denmark.
To ensure a highly efficient collaboration with low communication barriers the partners established a set of common values governing
the collaboration and defined a vision for the SUM project: “All participants feel and work like a team. We use all available means
of communication in a team oriented method of work. Our method of collaboration is widely known and sets an example because
it has yielded better results: Professional, practical and commercial”. Throughout the project the focus on collaboration helped to
fulfil the mission of SUM.
The SUM project has placed high focus on microsystem production and the transfer process between research and production
environments. The results obtained from the SUM project has strengthed the position of Denmark within the area of microsystem
production. Mass production of MEMS sensors in Denmark is now a reality and the road is paved for newcomers to profit from this
pioneering work. The SUM project was supported by the Ministry for Science and Technology.
Partners
24
Brüel and Kjær
Foss
Development of high performance accelerometers and
microphones
Food quality analysis using micromechanical sensors
Grundfos
Cantion
Development of sensors for water circulation systems
Development of cantilever based biosensors
Haldor Topsøe
Capres
Catalyst and technology company
High-quality systems for accurate electrical characterization of
materials on the microscale
Hymite
Chempaq
Optical telecommunications equipment manufacturer:
decreasing cost/performance ratio
Development of new sensor technologies for medical
Ibsen Photonics
diagnostics
Industrialization of holographic elements, phase masks and
Cohaesio
integrated optical sensors
Advanced software for tracking cleanroom prototyping
activities
NKT Research Center
Micro optoelectromechanical systems
Danfoss
Development of total chemical analysis systems and industrial
Novo Nordisk
sensors
Microliquid handling systems for biochemical analysis
Danish Technological Institute
NUNC
Polymer-based oxygen sensors
Collaboration on development of plastic-based microsystems
for rapid screening
Danish Veterinary and Food
Administration
DNA mutation analysis on a chip
(Fødevaredirektoratet)
Oticon
Microtechnology for hearing aid applications
Dantec
SonionMEMS
Particle image velocimetry and computer simulations
Intelligent silicon-based transducers for hearing instruments
DELTA
Radiometer
Test and packaging of microsystems
Medical instruments manufacturer
DFM
SMB
Danish institute for Fundermental Metrologi
Development and manufacture of biochips
Dicon
Sophion
Microsystems for the graphics industry
Development of equipment for ion-channel high through-put
DME
Probes for scanning probe microscopy
Exiqon
DNA chip design and fabrication
screening of drug candidates for the pharmaceutical industry
Topsil
Fabrication of high-purity silicon crystals and wafer structures
Vir
Prototyping of polymer-based flow cells for surface plasmon
resonance (SPR) measurements
Collaboration
25
CFM
Microinstrument center supporting Ph.D. students, funded by
Thomas B. Thrige foundation.
DABIC
National competence center developing advanced instrumentation platform for biotechnology.
EU scientific networks
MIC is part of the European networks NANOFAB
(nanofabrication) ATOMS (nanolithography) NanoMass
(cantilever-based mass sensor) and Saneme (molecular
electronics).
Framework program
MIC is involved in three nationally-funded collaborative
framework programmes in nanoscale electrochemistry, micro
total analysis systems and silicon wafer bonding.
FREJA
National program for Female Researchers in Joint Action,
supporting Bioprobes project.
HISTACK
Industrialisation of microsystems, in particular silicon
microphones for hearing aids, in collaboration with Danish
company Microtronic (EU funded).
IMMUNALYZE
SUM
Microsystems for groundwater analysis, in collaboration with
biotech company Exiqon and other Danish research institutes.
Consortium of three Danish companies
and the technology service institute Delta, collaborating on prototype fabrication at MIC
NORMIC
Network including Norwegian company SensoNor and other
Talent Projects
other European partners, offering services for prototyping, testing
and qualification of microsystems (EU funded).
Four national Talent Projects have been awarded to MIC
researchers in molecular electronics, integration of optical
Rapid Screening
detection with microliquid systems, cell sorting, and nanoscale
tweezers
Development of detection for Campylobacteria in poultry, in
collaboration with Danish Poultry Meat Association
µKAP
SeSiBon
Mirosystems for chemical and biochemical analyses based on
polymers
Consortium focussed on silicon wafer bonding for sensor
encapsulation, including Danish company Danfoss as well as
Norwegian firm SensoNor and Finnish firm Okmetic (EU funded)
Theses
26
Ph.D. theses
Jensenius, H. “Microcantilever-based studies of bio/chemical systems” (MIC,
Lyngby 2002) 153 pages ISBN: 87-89935-44-6
Mogensen, K. B. “Integration of Planar Waveguides for Optical Detection
in Microfabricated Analytical Devices” (MIC, Lyngby 2002) 90 pages
Petersen, N. J. “Electrophoretic Separations on Microchips: Performance
and Possibilities” (MIC, Lyngby 2002) 116 pages
Master theses – co-supervisors
from MIC
Alkauskas, A. “Coulomb drag in lateral superlattices”
(Vilnius University, Vilnius, Lithuania 2002) Supervisors:
Jauho, A.P., Flensberg, K.
Gjelstrup, H. “Strømninger i mikrosystemer” (DTU,
Lyngby 2002) Co supervisors: Larsen, P.S., Michelsen, J.A.,
Kutter, J.P.
Rehder, J. “Micromachined Loudspeaker for Hearing Instrument
Application” (MIC, Lyngby 2002) 130 pages
Lisby, T. “Interconnect Substrates in Silicon with Flexible Regions for Multi
Chip Microsystems” (MIC, Lyngby 2002) 123 pages
Master theses
Awards
Andersen, L. H. “Soft Magnetic Actuator membranes - Development and
Fabrication of a Stepped Membrane” (MIC, Lyngby 2002) 145 pages
Nielsen, T. Master thesis stipend from the Oticon
Foundation. The award consists of a grant of DKK
100.000 (2002)
Bitsch, L. “Blood flow in micro channels” (MIC, Lyngby 2002) 111 pages
ISBN: 87-89935-29-2
Brask, A. “Principles of electroosmotic pumps” (MIC, Lyngby 2002) 156
pages ISBN: 87-89935-31-4
Thomsen, E. V. “DTU Teacher of the Year”. The DTU
Teacher of the Year award is given to a teacher who has
showed outstanding performance. The award consists
of a grant of 3.600 Euro and a work of art (2002)
Eriksen, S. C. “DNA detection on cantilever-based sensors” (MIC, Lyngby
2002) 52 pages
Han, A. „Development and Characterization of a colorimetric Microarray
Immunoassay for detection of Pesticides in Water“ (MIC, Lyngby 2002) 69
pages
Hansen, F. R. “Dispersion in electrokinetically and pressure driven
microflows” (MIC, Lyngby 2002) 121 pages ISBN: 87-89935-33-0
He, J. “Micro-controller for Micro-analysis-system” (MIC, Lyngby 2002) 84
pages
Helbo, B. “Micro-Cavity Fluidic Dye Lasers” (MIC, Lyngby 2002) 143 pages
Jensen, M. J. “Bubbles in microchannels” (MIC, Lyngby 2002) 155 pages
ISBN: 87-89935-35-7
Johansen, W. J. “Modelling of a MEMS Actuator Array” (MIC, Lyngby 2002)
138 pages
Mateiu, R. “Fabrication and Assembly of Carbon Nanotubes on
Microelectrodes” (MIC, Lyngby 2002) 105 pages
Meelby, T. “Miniaturized Polymer-flow-cell for SPR-setup” (MIC, Lyngby
2002) 87 pages
Ruseng, H. “Fremstilling og karakterisering af biokompatible multipunkts
prober til måling af ionkanal aktivitet i nerveceller” (MIC, Lyngby 2002) 110
pages
Stangegaard, M. “Qualitative analysis of Campylobacter sp. by use of DNA
micro arrays” (MIC, Lyngby 2002) 92 pages
Patents
9 Patent discloseres filed with DTU
2 US patent applications filed
1 International patent application (PCT) filed
Publications
27
Journal articles
Calleja, M., Tello, M. and Garcia, R., “Size
determination of field-indiced water
menisci in noncontact atomic force
microscopy”, Journal of Applied Physics
92 pp. 5539 - 5542 (2002)
Brandbyge, M., Mozos, J. L., Ordejon,
P., Taylor, J. and Stokbro, K., “Density
functional method for nonequilibrium
electron transport”, Physical Review B 65
pp. 165401-165417 (2002)
Nielsen, S. K., Brandbyge, M., Hansen,
K., Stokbro, K., Van Ruitenbeek, J. M.
and Besenbacher, F., “Current-Voltage
Curves of Atomic-Sized Transition Metal
Contacts: Why Au is Ohmic and Pt is Not”,
Physical Review Letters 89 pp. 66804-1 66804-4 (2002)
Mozos, J. M., Ordejón, P., Brandbyge,
M., Taylor, J. and Stokbro, K.,
“Simulations of quantum transport in
nanoscale systems: application to atomic
gold and silver wires”, Nanotechnology
13 (3), pp. 346-351 (2002)
Christensen, C. B. V., “Arrays in
biological and chemical analysis”, Talanta
56 (2), pp. 289-299 (2002)
Hasegawa, S. and Grey, F., “Electronic
transport at semiconductor surfaces - from
point-contact transistor to micro-fourpoint probes”, Surface Science 500 (1-3),
pp. 84-104 (2002)
Hasegawa, S., Shiraki, I., Tanabe, F.,
Hobara, R., Kanagawa, T., Tanikawa, T.,
Iwao, M., Petersen, C. L., Hansen, T. M.,
Bøggild, P. and Grey, F., “Measurements
of Surface Electrical Conductance by
Microscopic Four-Point Probes”,
Proceedings of the Surface Science Society
of Japan 23 (12), pp. 740-752 (2002)
Alkauskas, A., Flensberg, K., Hu, B. Y. K.
and Jauho, A. P., “Sign reversal of drag
in bilayer systems with in-plane periodic
potential modulation”, Physical Review B
66 pp. 201304-1 - 201304-4 (2002)
Kageshima, M., Jensenius, H.,
Dienwiebel, M., Nakayama, Y., Tokumoto,
H., Jarvis, S. P. and Oosterkamp, T. H.,
“Noncontact atomic force microscopy in
liquid environment with quartz tuning
fork and carbon nanotube probe”,
Applied Surface Science 188 pp. 440-444
(2002)
Klank, H., Kutter, J. P. and Geschke, O.,
“CO2-Laser Micromachining and Backend Processing for Rapid Production of
PMMA-based Microfluidic Systems”, Labon-a-Chip 2 pp. 242-246 (2002)
Klank, H., Goranovic, G., Kutter, J. P.,
Gjelstrup, H., Michelsen, J. and
Westergaard, C. H., “PIV measurements
in a microfluidic 3D-sheathing structure
with three-dimensional flow behaviour”,
Journal of Micromechanics and
Microengineering 12 pp. 862-869 (2002)
Hasegawa, S., Shiraki, I., Tanikawa, T.,
Petersen, C. L. and Grey, F., “Surface
conductance properties studied by micro
four point probes”, Solid State Physics 37
(5), pp. 299-308 (2002)
Kristensen, A. and Bruus, H., “Bias
dependent subband edges and the 0.7
conductance anomaly”, Physica Scripta
T101 pp. 151-157 (2002)
Hasegawa, S., Shiraki, I., Tanikawa, T.,
Petersen, C. L., Hansen, T. M., Bøggild,
P. and Grey, F., “Direct measurement of
surface-state conductance by microscopic
four-point probe method”, Journal of
Physics-Condensed Matter 14 (35), pp.
8379-8392 (2002)
Lin, R., Galili, M., Quaade, U. J.,
Brandbyge, M., Bjørnholm, T., Esposti,
A. D., Biscarini, F. and Stokbro, K.,
“Spontaneous dissociation of a
conjugated molecule on the Si(100)
surface”, Journal of Chemical Physics 117
pp. 321-330 (2002)
Petersen, C. L., Hansen, T. M., Bøggild,
P., Boisen, A., Hansen, O., Hassenkam,
T. and Grey, F., “Scanning microscopic
four-point conductivity probes”, Sensors
and Actuators A-Physical 96 (1), pp. 5358 (2002)
D.N. Madsen, P. Yu, S. Balslev and
J.W. Thomsen, “Generation of 99-mW
continuouswave 285-nm radiation for
magneto-optical trapping of Mg
atoms”, Appl. Phys. B, 75 (2002) 835
D.N. Madsen and J.W. Thomsen,
“Measurement of absolute photoionization cross sections using
magnesium magneto-optical traps”,
J. Phys. B, 35 (2002) 2173
D.N. Madsen, K. Mølhave, R. Matieu,
A.M.Rasmussen, M. Brorson, C.J.H.
Jacobsen and P. Bøggild, “Soldering of
nanotubes onto microelectrodes”, Nano
Letters, 3 (2003) 47
Marie, R., Jensenius, H., Thaysen, J.,
Christensen, C. B. V. and Boisen, A.,
“Adsorption kinetics and mechanical
properties of thiol-modified DNA-oligos
on gold investigated by microcantilever
sensors”, Ultramicroscopy 91 pp. 29-36
(2002)
Mortensen, N. A., Flensberg, K. and
Jauho, A. P., “Mesoscopic fluctuations of
Coulomb drag between quasi-ballistic one
dimensional wires”, Physical Review B 65
pp. 085317-085326 (2002)
Mortensen, N. A., Flensberg, K. and
Jauho, A. P., “Coulomb drag in the
mesoscopic regime”, Physica Scripta T101
pp. 177-180 (2002)
Mortensen, N. A. and Egues, J. C.,
“Universal spin-polarization fluctuations
in one-dimensional wires with magnetic
impurities”, Physical Review B 66 pp.
153306-153309 (2002)
Petersen, N. J., Mogensen, K. B. and
Kutter, J. P., “Performance of an In-plane
Detection Cell with Integrated
Waveguides for UV/Vis Absorbance
Measurements on Microfluidic Separation
Devices”, Electrophoresis 23 pp. 35283536 (2002)
Nielsen, M., Poulsen, M., Bunk, O.,
Kumpf, C., Feidenhans’l, R., Johnson, R.
L., Jensen, F. and Grey, F., “Mapping
strain fields in ultrathin bonded Si wafers
by x-ray scattering”, Applied Physics
Letters 80 (18), pp. 3412-3414 (2002)
Quaade, U. J. and Oddershede, L.,
“Electrochemical etching of sharp tips for
STM reveals singularity”, Europhysics
Letters 57 (4), pp. 611-617 (2002)
Rehder, J., Rombach, P. and Hansen, O.,
“Magnetic flux generator for balanced
membrane loudspeaker”, Sensors and
Actuators A-Physical 97-98C pp. 61-67
(2002)
Publications
28
Journal articles
Lægsgaard, J. and Stokbro, K.,
“Electronic structure and hyperfine
parameters of substitutional Al and P
impurities in silica”, Physical Review B 65
pp. 75208-75217 (2002)
Taylor, J., Brandbyge, M. and Stokbro,
K., “Theory of rectification in Tour wires:
the role of electrode coupling”, Physical
Review Letters 89 pp. 138301-1 138301-4 (2002)
Kaun, C. C., Larade, B., Mehrez, H.,
Taylor, J. and Guo, H., “Current-voltage
characteristics of carbon nanotubes with
substitutional nitrogen”, Physical Review
B 65 (20), pp. 205416-1 - 205416-5
(2002)
Roland, C., Larade, B., Taylor, J. and Guo,
H., “Ab initio I-V characteristics of short
C-20 chains”, Physical Review B 65 (4),
pp. 41401-1 - 41401-4 (2002)
Thaysen, J., Yalçinkaya, A. D., Vettiger,
P. and Menon, A., “Polymer-based stress
sensor with integrated readout”, Journal
of Physics D: Applied Physics 35 pp. 26982703 (2002)
Yu, X., Thaysen, J., Hansen, O. and
Boisen, A., “Optimization of sensitivity
and noise in piezoresistive cantilevers”,
Journal of Applied Physics 92 pp. 62966301 (2002)
Marx, E., Ginger, D. S., Walzer, K.,
Stokbro, K. and Greenham, N. C., “SelfAssembled Monolayers of CdSe
Nanocrystals on Doped GaAs Substrates”,
Nano Letters 2 pp. 911-914 (2002)
Walzer, K., Stokbro, K., Quaade, U. J.,
Ginger, D. S. and Greenham, N. C.,
“Adsorption behaviour and currentvoltage characteristics of capped CdSe
nanocrystals on hydrogen passivated
silicon”, Journal of Applied Physics 92 pp.
1434-1440 (2002)
Visser, M. M., Weichel, S., De Reus, R.
and Hanneborg, A. B., “Strength and leak
testing of plasma activated bonded
interfaces”, Sensors and Actuators APhysical 97 (8), pp. 434-440 (2002)
Yalçinkaya, A. D., Ravnkilde, J. T. and
Hansen, O., “Fabrication of integrated
metallic MEMS devices”, Institute of
Electrical Engineers (IEE) Electronics Letters
38 (24), pp. 1526-1527 (2002)
Conf. proceedings
Belleville, E., Aamand, J., Koch, C.,
Bruun, L., Lerstrup, K., Jakobsen, M. H.
and Christensen, C. B. V., “Detection of
Pesticides using Immuno-Microarrays”,
International Symposium on Subsurface
Microbiology (ISSM) Copenhagen,
Denmark (2002)
Brandbyge, M., Stokbro, K., Mozos, J.
L., Taylor, J. and Ordejon, P., “Currentinduced forces in atomic gold wires”,
Trends in Nanotechnology (TNT2002)
179-180, Santiago de Compostela, Spain
(2002)
Brandbyge, M., Stokbro, K., Mozos, J.
L., Taylor, J. and Ordejon, P., “Currentinduced forces in atomic gold wires”,
Nano-7/Ecoss-21 Malmö, Sweden (2002)
Brask, A., Goranovic, G. and Bruus, H.,
“The low-voltage cascade EOF pump:
comparing theory with published data”,
MicroTAS 2002, Kluwer Academic
Publishers pp. 79-81, 1 Nara, Japan (2002)
Brask, A., Goranovic, G. and Bruus, H.,
“Electroosmotically driven two-liquid
viscous pump for nonconducting liquids”,
MicroTAS 2002, Kluwer Academic
Publishers pp. 145-147, 1 Nara, Japan
(2002)
Andersen, B. M., Hedegård, P. and Bruus,
H., “Electronic checkerboard pattern in
striped racetrak domains: a consistent
picture of recent netron and STM
experiments”, Physics and Chemistry of
Molecular and Oxide Superconductors
(MOS) Hsinchu, Taiwan (2002)
Bøggild, P., Mølhave, K. and Hansen,
T. M., “Nanotube Assembly Using
Customised Nanotweezers”, International
Conference on the Science and
Application of Nanotubes (NT02) Boston,
USA (2002)
Gómez-Moñivas, S., Calleja, M., García,
R. and Sáenz, J. J., “Electric Field effects
on the formation and stability of
nanometer size liquid bridges”, Trends in
Nanotechnology (TNT) Santiago de
Compostela, Spain (2002)
Calleja, M., Anguita, J. V., García, F. and
García, R., “Fabrication of a Field Effect
Transistor by non-contact AFM oxidation”,
Scanning Probe Microscopy, Sensors and
Nanostructures (SPM) Las Vegas, USA
(2002)
Christensen, C. B. V., “Pesticide
detection using Microarrays”, Lab-on-a
chip and Microarrays Conference Zürich,
Switzerland (2002)
Pérez-Murano, F., Davis, Z. J., Abadal, G.,
Hansen, O., Borrisé, X., Boisen, A. and
Barniol, N., “AFM characterization of a
resonating nanocantilever”, Nano-7/
Ecoss-21 Malmö, Sweden (2002)
Barniol, N., Abadal, G., Borrisé, X., PérezMurano, F., Verd, J., Villarroya, M., Davis,
Z. J., Boisen, A., Campabadal, F.,
Figueras, E., Esteve, J., Monserrat, J.,
Nilsson, S. G., Maximov, I., Sarwe, E.-L.
and Montelius, L., “A mass sensor with
atto-gram sensitivity using resonating
nanocantilevers”, Nano-7/Ecoss-21
Malmö, Sweden (2002)
Pérez-Murano, F., Davis, Z. J., Forsén, E.,
Dong, M., Montserrat, J., Abadal, G.,
Borrisé, X., Hansen, O., Boisen, A. and
Barniol, N., “Nanopatterning by AFM
nano-oxidation of thin aluminum layers
as a tool for the prototyping of
nanoelectromechanical systems”, Microand nanoengineering (MNE) Lugano,
Switzerland (2002)
Dimaki, M. I., Ruseng, H., Fléron, R.,
Boubour, E. and Bøggild, P., “Design of
microfabricated biocompatible multielectrode for single ion channel activity”,
Nano-7/Ecoss-21 Malmö, Sweden (2002)
Donarini, A., Ferrari, R., Jauho, A. P. and
Molin, L., “Photon-mediated drag in
double-layer electron gas”, 26 th
International Conference on the Physics
of Semiconductors (ICPS-26) Edinburgh,
UK (2002)
El-Ali, J., Mogensen, K. B., PerchNielsen, I. R., Kutter, J. P., Telleman, P.
and Wolff, A., “Integration of Polymer
Waveguides for Optical Detection in
Biochemical Microsystems”, MicroTAS
2002, Kluwer Academic Publishers pp.
260-262, Nara, Japan (2002)
El-Ali, J., Perch-Nielsen, I. R., Poulsen,
C. R., Telleman, P. and Wolff, A., “SU-8
based PCR chip with integrated heaters
and thermometer”, Eurosensor XVI pp.
277-278, Prague, Czech Republic (2002)
Publications
29
Geschke, O., Petersen, D., Varjo, S.,
Riekkola, M.-L. and Kutter, J. P., “Glass
CE
Microfluidic
Devices
with
Monolithically Integrated Electrospray Tip
for Coupling to MS”, The 13 th
International Symposium on Capillary
Electroseparation Techniques (ITP)
Helsinki, Finland (2002)
Hales, J. H., Pedersen, M., Fléron, R.W.,
Utah State University, “Two-Axis MOEMS
Sun Sensor for Pico Satellites” Logan USA,
(2002)
Hansen, A. G., Boisen, A., Zhang, J.,
Wackerbarth, H., Andersen, J. E. T. and
Ulstrup, J., “In Situ STM and nanoscale
electronic
function
of
redox
metalloprotein monolayers on singlecrystal Au(111)-surfaces”, Nano-7/Ecoss21 Malmö, Sweden (2002)
Hansen, T. M. and Bøggild, P., “Towards
Nano-scale Conductivity Mapping”,
Nano-7/Ecoss-21 Malmö, Sweden (2002)
Rasmussen, F. E., Heschel, M. and
Hansen, O., “Batch Processing of CMOS
Compatible Feedthroughs”, Micro- and
nanoengineering (MNE) Lugano,
Switzerland (2002)
Holmberg, M., Kühle, A., Garnæs, J. and
Boisen, A., “Formation of self-assembled
monolayers of short DNA molecules,
investigated with in situ Atomic Force
Microscopy”, Scanning Probe Microscopy,
Sensors and Nanostructures (SPM) Las
Vegas, USA (2002)
Jensen, M. J., Goranovic, G. and Bruus,
H., “Dynamics of bubbles in
microchannels”, MicroTAS 2002, Kluwer
Academic Publishers pp. 733-735, 2 Nara,
Japan (2002)
Jensen, M. F., Prichystal, J., Christensen,
L. H., Meelby, T. and Geschke, O., “3D
Characterization
of
Polymer
Microstructures Formed by CO2 Laser
Micromachining”, Eurosensors XVI pp.
100-104, Prague, Czech Republic (2002)
Jensen, S. and Hansen, O., “Inverse
Microloading Effect in Reactive Ion
Etching of Silicon”, The International
Symposium on Plasma Processing XIV
Philadelphia, USA (2002)
Jorgensen, A. M., Anachkina, D. and
Geschke, O., “An integrated
chemiluminescence detector for
measuring enzymatically generated
hydrogene peroxide”, MicroTAS 2002
891-894, Nara, Japan (2002)
Jorgensen, A. M., Mogensen, K. B.,
Rong, W. and Kutter, J. P., “Biochemical
microdevice with an integrated
chemiluminescence detector”, The 6 th
European Conference on Optical
Chemical Sensors and Biosensors
(Europt(r)ode VI) Manchester, UK (2002)
A. Schönecker, D. Eikelboom, P.
Manshanden, M. Gorris, P. Wyers, S.
Roberts, T. Bruton, W. Jooss, K. Faika, A.
Kress, R. Kühn, W. Neu, H. Knauss, P.
Fath, F. Ferrazza, R. V. Nacci, E. van
Kerschaver, S. de Wolf, J. Szlufcik, O.
Leistiko, A. M. Jorgensen, S. W.
Glunz, J. Dicker, D. Kray, J. Sölter, S.
Schäefer, „ACE designs: The beauty of
rear contact solar cells“, presented at
29th IEEE Photovoltaic Specialists
Conference, New Orleans, USA, 2002.
Hansen, A. E., Kristensen, A. and Bruus,
H., “Temperature dependent deviations
from ideal quantization of plateau
conductances in GaAs quantum point
contacts”, 26th International Conference
on the Physics of Semiconductors (ICPS26) Edinburgh, UK (2002)
Hansen, A. E., Kristensen, A. and Bruus,
H., “Observation of novel temperature
dependencies in the conductanc of
quantum point contacts”, Nano-7/Ecoss21 Malmö, Sweden (2002)
Ravnkilde, J. T., Larsen, K. P. and
Henningsen, H., “Fabrication of Nickel
Microshutter Arrays for Spatial Light
Modulation”, Mesomechanics 161-165,
1 Aalborg, Denmark (2002)
Larsen, K. P., Ravnkilde, J. T., Ginnerup,
M. and Hansen, O., “Devices for Fatigue
Testing of Electroplated Nickel”, MEMS
pp. 443-446, Las Vegas, USA (2002)
Lisby, T., Hansen, O. and Branebjerg, J.,
“Fabrication and characterization of
Flexible Silicon Substrates with
Electroplated Leads”, Institute of Electrical
and Electronics Engineers Sensors
conference (IEEE) pp. 568-571, Orlando,
Florida, USA (2002)
Lisby, T., Hansen, O. and Branebjerg, J.,
“Flexible silicon substrates with Cu leads
and BCB dielectric”, Eurosensors XVI pp.
153-154, Prague, Czech Republic (2002)
Westergaard, C., Klank, H. and Kutter,
J. P., “Flow Mapping by PIV in
Microstructures with Three-dimensional
Flow Behavior”, Microfluidique Toulouse,
France (2002)
Kutter, J. P., Mogensen, K. B., Petersen,
N. J., Jørgensen, A. M., Denninger, M.,
Hübner, J. and Geschke, O., “Integrated
Optical Detection on Microfluidic
Devices”, LabAutomation Palm Springs,
CA, USA (2002)
Kutter, J. P., Petersen, N. J. and
Mogensen, K. B., “Performance of UV/
Vis Absorbance Detection on Miniaturized
Separation Devices using Integrated
Planar Waveguides”, The 13 th
International Symposium on Capillary
Electroseparation Techniques (ITP)
Helsinki, Finland (2002)
Jørgensen, H., Krogh, K. B. R., Kutter, J.
P. and Olsson, L., “Analysis of Proteins in
Complex Cultivation Samples Using
Capillary Electrophoresis”, 22 nd
International Symposium on the
Separation of Proteins, Peptides and
Polynucleotides (ISPPP) Heidelberg,
Germany (2002)
Marie, R., Christensen, C. B. V. and
Boisen, A., “DNA immobilisator on gold
surface for biosensors and microsystems;
a fluorescense scanning study”, Microand nanoengineering (MNE) Lugano,
Switzerland (2002)
Marie, R., Christensen, C. B. V. and
Boisen, A., “DNA immobilisator on gold
surface for biosensors and microsystems;
a fluorescense scanning study”, Medicon
Vally Academy Conference (MVA) Malmö,
Sweden (2002)
Menon, A., “Lithography Implications in
Magnetic Nanostructures for Digital
Recording”, Micro- and nanoengineering
(MNE) Lugano, Switzerland (2002)
Mogensen, K. B., Petersen, N. J. and
Kutter, J. P., “Integrated Planar
Waveguides for Optical Detection in
Biochemical
Microsystems”,
Mesomechanics 155-159, 1 Aalborg,
Denmark (2002)
Publications
30
Conf. proceedings
Mogensen, K. B., Kwok, Y. C., Eijkel, J.
C. T., Petersen, N. J., Manz, A. and
Kutter, J. P., “Shah Convolution Fourier
Transform Detection of Particle Velocities
by using an Integrated 1x128 Planar
Waveguide Beamsplitter”, MicroTAS 2002
pp. 636-638, Nara, Japan (2002)
Mølhave, K., Mateiu, R., Dimaki, M.,
Hansen, T. M., Madsen, D. N. and
Bøggild, P., “Assembly of Carbon
Nanotubes on Microelectrodes by
Nanomanipulation”, Nano-7/Ecoss-21
Malmö, Sweden (2002)
Nilsson, D., Jensen, S., Kristensen, A.
and Menon, A., “Silicon mold for casting
polymer optics”, Micromechanics Europe
(MME) pp. 111-114, Sinaia, Romania
(2002)
Nørholm, M., Prichystal, J., Snakenborg,
D., Christensen, L. H. and Telleman, P.,
“Polymer Microstructures for Microarray
Analysis”, SmallTalk San Diego, USA
(2002)
Workshops & courses
Thaysen, J., Yalçinkaya, A. D.,
Vestergaard, R. K., Jensen, S.,
Mortensen, M. W., Vettiger, P. and
Menon, A., “SU-8 Based Piezoresistive
Mechanical Sensor”, MEMS pp. 320-323,
Las Vegas, USA (2002)
Brandbyge, M. The International
Workshop on Total Energy Methods in
Computational Condensed Matter Physics
“Density Functional Method For
Nonequilibrium Electron Transport”
Tenerife, Spain. (2002)
Thaysen, J., Hansen, O. and Menon, A.,
“A Polymer-Metal Composite Surface
Stress Sensor”, 17th Annual Technical
Conference of the American Society for
Composites Purdue, USA (2002)
Bøggild, P. Nordic Baltic Scanning Probe
Microscopy Workshop “Nanohand:
Expanding the Nano Toolbox” Tartu,
Estonia (2002)
Thaysen, J. and Boisen, A., “Translating
molecular
interaction
into
a
nanomechanical signal”, Mesomechanics
pp. 167-171, 1 Aalborg, Denmark (2002)
Editor
Kutter, J. P. “Special issue Miniaturization in analytical chemistry Preface” pp. 221-221 56 (2002)
Petersen, D., Varjo, S., Geschke, O.,
Riekkola, M. L. and Kutter, J. P., “A New
Approach for Fabricating a Zero Dead
Volume Electrospray Tip for Non-aqueous
Microchip CE-MS”, MicroTAS pp. 691693, Nara, Japan (2002)
Rasmussen, P. A., Thaysen, J., Hansen,
O., Eriksen, S. C. and Boisen, A.,
“Cantilever Biosensor with Integrated
Read-out Optimised for Operation in
Liquid”, Proceedings of Eurosensors XVI
pp. 705-706, Prague, Czech Republic
(2002)
Rasmussen, P. A., Thaysen, J., Eriksen,
S. C. and Boisen, A., “Optimised
Cantilever Biosensor with Piezoresistive
Read-out”, Scanning Probe Microscopy,
Sensors and Nanostructures (SPM) pp. 41,
Las Vegas, USA (2002)
Rehder, J., Andersen, L. H., Rombach,
P. and Hansen, O., “Magnetic reluctance
change actuator for loudspeaker
application”, Eurosensors XVI pp. 435436, Prague, Czech Republic (2002)
Souza, F. M., Egues, J. C. and Jauho, A.
P., “Spin-dependent quantum shot
noise”, 26th International Conference on
the Physics of Semiconductors (ICPS-26)
Edinburgh, UK (2002)
Birkedal, D. and Jauho, A. P.
“Proceedings of the 19th
Semiconductor Meeting” Physica Scipta
242 pages T101 ISBN: 91-89621-07-7
Lyngby, Denmark (2002)
Christensen, C. B. V. and Telleman, P.
SmallTalk Conference - workshop on
Microarrays “Microarrays and their
applications” San Diego, USA (2002)
Fléron, R.W. Workshop on Wafer
Bonding, Barcelona “A MOEMS Sun
Sensor Assembled with Self-Aligning
Anodic Bonding”and Poulsen, M.
“Structural Studies of Plasma Assisted
Wafer Bonding” Barcelona, Spain (2002)
Kutter, J. P., Nilsson, J. and Verpoorte, S.
LabAutomation 2002 “Microfluidics”
Palm Springs, USA (2002)
Kutter, J. P., Jacobson, S. C., Hergenröder,
R. and Ramsey, J. M. International
Symposium on Microscale Separations
and Analysis (HPCE) “Lab-on-a-Chip
Systems” Stockholm, Sweden (2002)
Kutter, J. P. and Verpoorte, S. Small Talk
Conference “Microfluidics” San Diego,
USA (2002)
Kutter, J. P., Stemme, G., Van den Berg,
A. and Verpoorte, S. Helsinki University
of Technology “Microsystem Technology
for Chemistry and the Life Sciences”
Espoo, Finland (2002)
Kutter, J. P. and Geschke, O. German
Chemical Society (GDCh) “Analytical
Chemistry on Microchips” Frankfurt,
Germany (2002)
Stokbro, K. The 10 th MEL-ARI/NID
Workshop and Finnish Workshop on
Nanoscience “First principles modelling of
molecular Rectifiers” Helsinki, Finland
(2002)
Telleman, P. EuroBiochips “Design,
Fabrication and Implementation of
Microfluidics Systems” Berlin, Germany
(2002)
Publications
31
Talks & lectures
Boisen, A. Danish Society for Biomedical
Engineering “Nanomechanics as a
diagnostic tool” Lyngby, Denmark (2002)
Geschke, O. Medical Plastics 2002
“Polymeric Microsystems” Copenhagen,
Denmark (2002)
Boisen, A. General Physics Colloquia at
Århus University “Micro-cantilevers as a
tool for molecular recognition and
adsorption studies” Århus, Denmark
(2002)
Gómez-Moñivas, S., Calleja, M.,
García, R. and Sáenz, J. J. IX
International Summer School Nicolás
Cabrera: Frontiers in Science and
Technology: Molecular Electronics
“Electric Field effects on the formation
and stability of nanometer size liquid
bridges” Madrid, Spain (2002)
Brandbyge, M. Electronic Structure:
Principles and Applications (ESPA2002)
“First-principles simulations of quantum
transport in nanoscale systems” Sevilla,
Spain (2002)
Brandbyge, M. Colloquium at IRSAMC,
University Paul Sabatier “First-principles
simulations of quantum transport in
nanoscale systems” Toulouse, France
(2002)
Brandbyge, M. SIESTA developer/user
meeting, Clark Hall, Cambridge University
“Current-induced forces in atomic gold
wires with TranSIESTA” Cambridge, UK
(2002)
Brandbyge, M. Kammerlingh Onnes Lab
“Transport and current-induced forces in
atomic wires from density functional
theory” Leiden, Holland (2002)
Bruus, H. Harvard University, Cambrigde
(MA) “Forces on bubbles in contracting
microchannels” USA (2002)
Bruus, H. MIT, Cambridge (MA)
“Microfluidics theory and simulation at
MIC” USA (2002)
Bøggild, P. 28th Heraus seminar: Quantum
Transport through Nano-Wires, Point
Contacts, and near Interfaces “Nanoscale
conductivity mapping using four-point
probe” Physik-Zentrum Bad Honnef,
Germany (2002)
Bøggild, P. University of Leiden
“Manipulation and Soldering of Carbon
Nanotubes” Leiden, The Netherlands
(2002)
Bøggild, P. University of Copenhagen
“The Nanohand: Expanding the nano
toolbox” Copenhagen, Denmark (2002)
Jauho, A. P. Annual Meeting of the
Finnish Physical Society “Moore’s Law:
what challenges and opportunities does
quantum physics present ?” Joensuu,
Finland (2002)
Madsen, D. N. The 2002 Fevik Meeting:
Condensed Matter and Nano Materials
“Nanomanipulation: Reaching into the
World of Small,” Fevik, Norway (2002)
Menon, A. Cambridge University
“Engineering seminar: Integrated
Microsystems using Functionalized Light
Sensitive Polymers” Cambridge, UK
(2002)
Menon, A. ASME Conference on Redefining Mechanical Engineering and its
impact on Engineering Education “Micro/
Nano Technologies and Mechanical
Engineering” Clearwater Beach, FL, USA
(2002)
Jauho, A. P. Max-Planck Institut for
Complex Systems “Mesoscopic Coulomb
Drag” Dresden, Germany (2002)
Menon, A. Danish Industry Conference
on Nanotechnology “Nanotechnology Business of Today” Copenhagen,
Denmark (2002)
Jauho, A. P. Progress in Nonequilibrium
Green’s Functions “Nonequilibrium Green
function modeling of transport in
mesoscopic systems” Dresden, Germany
(2002)
Menon, A. Purdue University
Nanotechnology
seminar
“Microelectromechanical Systems Perspectives and Challenges” West
Lafayette (2002)
Kutter, J. P. Technical University of Siegen
“Analytical Chemistry on Microchips:
Challenges and Applications” Siegen,
Germany (2002)
Menon, A. Carnegie Mellon University,
Data Storage Systems Center Seminar
“Micro to Nano: Scaling the Future”
Pittsburgh, USA (2002)
Kutter, J. P. Dantec Dynamics
“Microfluidics and Applications for
Microfluidic Devices” Naestved, Denmark
(2002)
Menon, A. Royal Danish Military College
Officers Training Course Lecture
“Introduction to Nanotechnology”
Copenhagen, Denmark (2002)
Kutter, J. P. Lund Technical University
“Microfluidic Devices for Analytical
Chemistry: Condsiderations, Challenges
and Possibilities” Lund, Sweden (2002)
Stokbro, K. Carbon based molecular
electronics “First principles modelling of
molecular electronic devices” Great
Malvern, UK (2002)
Kutter, J. P. University of Tokyo
“Integration of Optical Detection
Elements on Microfabricated Analytical
Devices” Tokyo, Japan (2002)
Stokbro, K. EMRS spring meeting “First
principles modelling of molecular
electronic devices” Strasbourg, France
(2002)
Kutter, J. P. Novo Nordisk, Symbion
“Micro-Total Analysis Systems Laboratories on a Chip” Copenhagen,
Denmark (2002)
Telleman, P. Philips Research “Micro Total
Analysis Systems” Eindhoven, The
Netherlands (2002)
Madsen, D. N. Fysisk Institutet, Bergen
Universitet “Micro and Nanotechnology:
When Tiny is Way Too Big” Bergen,
Norway (2002)
Telleman, P. Aarhus University,
Department of Physics and Astronomy
“Micro Total Analysis Systems” Aarhus,
Denmark (2002)
Publications
32
Telleman, P. BioMEMS “Microfabrication in Polymers” Boston,
USA (2002)
Telleman, P. European Press Meeting “Sustainable Production:
Nanotechnologies lead the way.” Kongens Lyngby, Denmark (2002)
Telleman, P. „Microtechnology - Golden Opportunities ? New
Technologies - New Challenges in Education - The MIC strategy“
Høje Taastrup, Denmark (2002)
Telleman, P. Branchefællesskab for IT, tele-, elektronik- og
kommunikationsvirkomsheder “The Mikroelektronik Centret” Nyborg, Denmark (2002)
Telleman, P. Instituto Superior Tecnico, Department of Materials
Engineering „Micro Total Analysis Systems“ Lisbon, Portugal (2002)
Wolff, A. Danish Society for Biomedical Engineering “Laboratories
on chip” Lyngby, Denmark (2002)
Press
33
MIC in the press
10. jan. 2003,
Ingeniøren: Sprøjtestøbte mikrosystemer på rekordtid
3. jun. 2002,
Ingeniøren-net: Han sætter Danmark på nano-tek. verdenskort
2. feb. 2003,
Nordjyske Stiftstidende: Mangemillionær i mikroverden
maj. 2002,
Biophotonics Research: Chemical sensors combine light and liquid
27. dec. 2002,
Ingeniøren: Produktpris 2002
31.maj. 2002,
Ingeniøren. Mikroteknologi bryder ud af laboratoriet
27. dec 2002,
Ingeniøren: Mini-mikrofon i verdensklasse
31. maj.2002,
Ingeniøren: Det mindste bliver det største
13. dec 2002,
Ingeniøren: Danske producenter af print er truet fra øst
31. maj 2002,
Ingeniøren: Mikrosensor i Grundfospumpe
09. dec 2002,
Ingeniøren net: DTU bygger nyt til nanoteknologi
31. maj 2002,
Ingeniøren: Han sætter Danmark på nano-tek. verdenskort
05. dec 2002,
Nature: Soldering of nanotubes onto microelectrodes
31. maj 2002, Ingeniøren: Øresund skal være en stor nano-region
02. dec 2002,
Berlingske Tidendes nyhedsmagasin: Det næste store hit er.....
25. nov. 2002,
Aktuel Elektronik: MEMS-dag
14. okt. 2002,
Politiken: Magtskifte på universiteter
09. okt. 2002,
Berlingske: Mikroskopiske maskiner skaber industriel revolution
08. okt. 2002,
MetroXpress: Milliarder til nano-teknologi
23. sep. 2002,
Aktuel Elektronik: Alt for få så lyset i Bella Centret
03. sep. 2002,
Børsen: EU sætter fokus på knapheden på IT-computancer
sep. 2002,
Alt om Data: Molekyle manden
sep 2002,
Aktuel Elektronik: Sensorer kombinerer intelligens med
mikosystemer
23. aug. 2002,
Ingeniøren: Blodanalyse på få sekunder
23. aug. 2002,
Ingeniøren: Nyt renrum på DTU
aug. 2002,
Data-Tid: DNA styrer fremtidens computer
aug. 2002,
Miljø Horisont: Jon Wulff Petersen Risøs nye vicedirektør
22. jun. 2002,
Information: Accepter forbrug-genforbrug
14. jun. 2002,
Ingeniøren: Topscorer i spidsen for halvlederfabrik
26. apr. 2002,
Berlingske: Forskere på valsen
maj. 2002,
Danvak Magasinet. Professor i nanoteknologi på DTU
maj. 2002,
Physics today: Quantum point contact Mysteries Reexamined
apr. 2002,
Dansk kemi: Første nanoteknologiprofessor på DTU
26. apr. 2002,
Politiken: Fysikere i træningslejr til OL
31. maj 2002,
Ingeniøren: Microcantilever
8. apr. 2002,
Børsens nyhedsmagasin: Nye millarder til forskning
25. mar. 2002, Aktuel Elektronik: Chip med 128 reagensglas om
bord
22. mar. 2002,
Ingeniøren: Store muligheder for danske sensorer
8. mar. 2002,
Ingeniøren: Professor i det mindste
28. feb. 2002,
Berlingske Tidende: Første professor i nanoteknologi
15. feb. 2002,
Politiken: Ole Olesen
4. feb. 2002,
Ugemagasinet Industrien: Nanoteknologi-fremtidens forretning
feb. 2002,
Jyllands Posten: To gymnasieelever fro Risskov til Ol i fysik
25. jan. 2002,
Ingeniøren: Nye nanouddanelser i Århus og København
Management
34
MIC´s Management team:
from left Vice Director, Lars Samuelsen,
Industrial Relations and Innovations Manager, Aric K. Menon,
Director, Pieter Telleman
and Vice Director, Ejner Mose Hansen
MIC Management Team:
Pieter Telleman, Director
Ejner Mose Hansen, Vice Director (Technical
Support)
Lars Samuelsen, Vice Director
(Nanotechnology)
Aric K. Menon, Professor (Industry and
Innovation, Microtechnology)
Faculty:
Pieter Telleman, Professor
Ejner Mose Hansen
Lars Samuelsen, Professor
Aric K. Menon, Professor
Antti-Pekka Jauho, Professor
Ole Hansen
Flemming Jensen
Jörg P. Kutter
Anja Boisen
Erik V. Thomsen
Oliver Geschke
Peter Bøggild
Anders Kristensen
Anders Wolff
Mikkel F. Hansen
Claus B. Christensen
Mads Brandbyge
Kurt Stokbro
Henrik Bruus
Board 2002:
Børge Diderichsen, Director Novo Nordisk A/S (Chairman)
Claus Elberling, General Manager, Research, Oticon Research Centre A/S
Peter Elvekjær, Vice President, Group R & T, Grundfos Management A/S
Mikael Ørum, General Partner, Ventac-Partners
Helge Elbrønd Jensen, Dean of Studies,Technical University of Denmark
Kristian Smistrup, Student Representative, Technical University of Denmark
Associate Professor Ole Hansen, MIC
Torben Støvhase Nielsen, MIC
Scientific Council:
Professor Martin A. Schmidt, Massachusetts Institute of Technology, Cambridge, MA
Dr. James McGroddy, Former Senior Vice President, Research, IBM Corporation
Professor Andreas Manz, Imperial College, UK
Professor Mark Welland, University of Cambridge, UK
Special thanks to:
Martin Dufva
Erik V. Thomsen and students
René Fléron and students
JEOL Japan
Students from the nanohand project
SonionMEMS
Mikroelektronik Centret (MIC) at the Technical University of Denmark (DTU), is a national
research and development centre for micro- and nanotechnologies.
Within this field, MIC is committed to educating scientists and engineers, conducting research
on an internationally competitive level, and transferring new technologies to Danish industry
through joint programmes.
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