AFC/AFM series
ACE
AFC/AFM series
Laminar Flow Differential Pressure Mass Flow Controller
(Industrial Use)
The AFC/AFM series measures the differential pressure of the gas
generated which occurs when a small laminar flow element to measure the
pressure deference, and the miniaturization was achieved by adopting the
small laminar flow element.
By the appropriate selection of the flow rate, it is possible to correspond
from minute flow to high flow rate.
Feature
• It is possible to measure it from the
amount of minute to high flow.
• It is possible to correspond from
10nccm to 50 NLM according to the
selection of the element.
• It is a flow rate measurement and
control unit covering variety type of
flow rates. It is strong in a temporary
influx of moisture into the gas and the
condensation of the gas.
Patent Pending
Specifications
Target gas
Flow range
Control range
Accuracy
Repeatability
Response speed
Control range
Operation temperature range
Pressure
N2、Air、H2、CH4、Ar、CO2、CO、C3H8
10NCCM∼50NLM (℃ 0, rate 1 atm)
10∼100 % FS
1 % FS 1% FS
±0.2 % FS ± 0.2% FS
2 seconds (± 2% full scale setting of time to arrive)
2∼100 % 2-100%
0 ~ ℃ 50 (10 ~ ℃ 40: Quality assurance), No-due condensation
0.99MPaG
External seal
Input signal
Output signal
Supply Voltage
Wetted Material
Power Connector
Dimension
Fittings
1x10 -7 Pa · m 3 / sec (He) or less
0-5VDC, RS485 (4-20mA factory option)
0-5VDC, RS485 (4-20mA factory option)
DC24V ± 10% 200mA or less
SUS316, Viton Other (SUS316L available support)
15 Pin D-Sub (Box only requires)
Dimension 108mm Height 62mm (excluding connectors)
1 / 4 equivalent to Swagelok fittings (VCR fittings available equivalent)
Note: 100∼500NLM: Use DPFC-250 series, 1000 NLM or more: Use DFPC-500
ACE
応 用 例
AFC/AFM
AP300 Series
Laminar Flow Differential Pressure Mass Flow Controller
微小圧力制御用排気圧力コントローラ
(Industrial Use)
Flow Control devise: Actual flow rate result: 1000 SCCM FS
Mesurement device: BIOS manufacture ML -500-24 22 5 deg. C, 757.3 mmHg
Flow setting
SET %
OUT %
Actual flow SCCM
Accuracy (FS%)
1000
100
100.0
100.1
0.1
800
80
80.0
79.9
-0.1
600
60
60.0
60.0
0.0
400
40
40.0
39.9
-0.1
200
20
20.0
19.8
0.2
100
10
9.9
9.8
-0.2
50
5
4.9
49.3
-0.1
20
2
2.1
21.8
0.2
10
1
1.1
12.0
0.2
0
0
0
0
ACE Inc.
Shin Yokohama Hayama Building No. 3
3-13-6 Shin Yokohama Kohokuk-ku
Yokohama, kanagawa 222-0033, Japan
Tel: 81 45 478-5295 Fax: 81 45 478-5297
URL: hhp://www.kk-ace.co.jp
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