Transducers` 11 Accepted Abstracts

Transducers` 11 Accepted Abstracts
ABSTRACT # FORMAT
01-003
Oral
01-008
Poster
01-012
Poster
01-015
Oral
01-018
Poster
01-020
Poster
01-021
Poster
01-022
Oral
01-024
Poster
01-025
Poster
01-031
Poster
01-047
Poster
01-048
Poster
01-050
Oral
01-054
Poster
01-059
Poster
01-060
Poster
01-061
Poster
01-062
Poster
01-063
Oral
01-066
Poster
01-068
Poster
01-069
Poster
01-070
01-071
Oral
Poster
01-074
Poster
01-077
Poster
01-079
Oral
01-084
Poster
01-088
Poster
01-092
Poster
01-093
Poster
PAPER TITLE
AN SOI THERMAL-DIFFUSIVITY-BASED TEMPERATURE SENSOR WITH ±0.6°C
(3Σ) UNTRIMMED INACCURACY FROM -70°C TO 170°C
PHASE-LOCKED DRIVE LOOP WITH AMPLITUDE REGULATION BASED ON
PHASE-SHIFTING FOR GYROSCOPES
DESIGN OF T-SHAPE VECTOR HYDROPHONE BASED ON MEMS
SAW-PIRANI VACUUM SENSOR WITH A NEW FUNCTIONING MODE AND A FAST
RESPONSE TIME
A CMOS CAPACITIVE PRESSURE SENSOR CHIP FOR FINGERPRINT DETECTION
GAAS/INXGA1-XAS/GAAS/ALAS RESONANT TUNNELING DIODES FOR NOVEL
MEMS GYROSCOPE APPLICATION
A WIDEBAND ANTI-HIGH-OVERLOAD THERMOELECTRIC MICROWAVE POWER
SENSOR BASED ON GAAS MMIC TECHNOLOGY
NOVEL COUPLING CONCEPT FOR FIVE-CONTACT VERTICAL HALL DEVICES
A 3-AXIS ACCELEROMETER AND STRAIN SENSOR SYSTEM FOR BUILDING
INTEGRITY MONITORING
COMPACT GYROSCOPE WITH SI NANOGAGE PIEZO-RESISTIVE DETECTION
A NEW LOW CONSUMPTION 3D COMPASS USING INTEGRATED MAGNETS AND
PIEZORESISTIVE NANO-GAUGES
OUT-OF-PLANE AXIS SOI MEMS GYROSCOPE WITH INITIALLY DISPLACED
VERTICAL SENSING COMB
ELECTRICAL PERFORMANCE OPTIMIZATION OF A SILICON-BASED EUV
PHOTODIODE WITH NEAR-THEORETICAL QUANTUM EFFICIENCY
SELF-POWERED HIGH SIGNAL-TO-NOISE RATIO ACOUSTIC EMISSION SENSOR
AND ITS DEMONSTRATION ON DETECTING DYNAMIC FRICTION VARIATION
A NEW N/MEMS-BASED NONVOLATILE CIRCUIT
CYLINDER-SHAPED THERMAL INERTIAL FORCE SENSOR FOR WEARABLE
FABRIC SENSOR SYSTEMS
HIGH FREQUENCY AND SENSITIVITY ELECTRON TUNNELING TRANSDUCER
USING FREQUENCY DOWNMIXING READOUT OF NANOMECHANICAL MOTION
PATCH-TYPE FLEXIBLE FLOW SENSOR FOR LARGE SCALE AIR-CONDITIONING
NETWORK SYSTEMS
A CMOS WIRELESS TWO-AXIS DIGITAL ACCELEROMETER USING BONDWIRE
INERTIAL SENSING
WAFER-LEVEL PACKAGING FOR A CMOS COMPATIBLE TWO-DIMENSIONAL
THERMAL WIND SENSOR BASED ON AU-AU BONDING TECHNOLOGY
DAMPING CHARACTERISTICS OF A MICROMACHINED PIEZOELECTRIC
DIAPHRAGM-BASED PRESSURE SENSOR FOR UNDERWATER APPLICATIONS
COMPACT ELECTRODE DESIGN FOR IN-PLANE ACCELEROMETER ON SOI
WITH REFILLED ISOLATION TRENCH
MICROFLUIDIC MICROSYSTEM FOR MAGNETIC SENSING OF NANOPARTICLES
WITH GMI TECHNOLOGY
A MEMS MICRO-REED SWITCH DESIGNED FOR PORTABLE APPLICATIONS
FIRST HIGH-G MEASUREMENT BY THERMAL ACCELEROMETERS
EFFECT OF KNUDSEN NUMBER ON MAXIMUM RESPONSE OF A THERMAL
CONDUCTIVITY DETECTOR
THREE DIMENSIONAL PHOTOACOUSTIC IMAGING USING A MONOLITHIC CMOS
MEMS CAPACITIVE ULTRASONIC SENSOR
MONOLITHIC-INTEGRATED SILICON BULK-MICROMACHINED ACCELEROMETER
AND PRESSURE-SENSOR FOR TIRE-PRESSURE-MONITORING-SYSTEM (TPMS)
APPLICATION
AN AERODYNAMICALLY EFFICIENT SPHERE ANEMOMETER WITH INTEGRATED
HOT-FILM SENSORS FOR 2-D ENVIRONMENTAL AIRFLOW MONITORING
A FILTER-LESS MULTI-WAVELENGTH FLUORESCENCE DETECTOR
MULTI-PARAMETERS DECOUPLING METHOD WITH LAMB WAVE SENSOR FOR
IMPROVING THE SELECTIVITY OF LABEL-FREE LIQUID DETECTION
A LOW-COST FLEXIBLE INTEGRATED MICROMACHINED HOT-FILM SENSOR
ARRAY FOR MEASURING SURFACE FLOW VECTOR
ABSTRACT # FORMAT
01-098
Oral
01-099
Poster
01-101
Poster
01-103
Poster
01-105
Oral
01-106
Poster
01-108
Poster
01-109
Poster
01-110
Oral
01-111
Oral
01-113
Poster
01-117
Poster
01-118
Poster
01-119
Oral
01-123
Poster
01-124
Poster
01-127
Oral
01-128
Poster
01-129
Poster
01-130
Poster
01-131
Poster
01-133
Poster
01-134
Oral
01-135
Poster
01-136
Poster
01-138
Poster
01-141
Poster
01-142
Oral
01-143
Poster
01-144
Poster
01-145
Poster
PAPER TITLE
MICROMECHANICAL MAGNETOMETER BASED ON A CLAMPED-CLAMPED HIGHQ NONLINEAR RESONATOR
A HIGH-SENSITIVE ULTRA-THIN MEMS CAPACITIVE PRESSURE SENSOR
ZERO TEMPERATURE COEFFICIENT GAS-SEALED PRESSURE SENSOR USING
MECHANICAL TEMPERATURE COMPENSATION
IMPROVEMENT OF CMOS-MEMS ACCELEROMETER USING POST-CMOS
SELECTIVE ELECTROPLATING TECHNIQUE
A 400X400UM2 ACCELEROMETER WITH VERTICALLY INTEGRATED 3-AXIS
SENSING ELECTRODES DESIGN USING 0.18UM CMOS PROCESS
MONOLITHIC PRESSURE+ACCELERATION SENSOR WITH SELF-TEST
FUNCTION FOR RELIABLE & LOW-COST TIRE-PRESSURE-MONITORINGSYSTEM (TPMS) APPLICATION
AN SOI 3-AXIS ACCELEROMETER WITH A ZIGZAG-SHAPED Z-ELECTRODE FOR
DIFFERENTIAL DETECTION
PIEZOELECTRIC SWITCH TO ACTIVATE EVENT-DRIVEN
SINGLE CHIP FLOW SENSING SYSTEM WITH A DYNAMIC FLOW RANGE OF
MORE THAN 4 DECADES
MINIATURE ULTRASOUND ACOUSTIC IMAGING DEVICES USING 2-D PMUTS
ARRAY ON EPITAXIAL PZT/SRRUO3/PT/Γ-AL2O3/SI STRUCTURE
MEMS SENSOR WITH GIANT PIEZORESISTIVE EFFECT USING METALLSEMICONDUCTOR HYBRID STRUCTURE
TRANSPARENT TOUCH PANEL BASED ON CONDUCTIVE LIQUID CHANNEL
STRUCTURE
DESIGN AND IMPLEMENTATION OF A NOVEL CMOS MEMS CONDENSER
MICROPHONE WITH CORRUGATED DIAPHRAGM
SINGE-STEP FABRICATION OF ORGANIC NANOFIBROUS MEMBRANE FOR
PIEZOELECTRIC VIBRATION SENSOR
OPTICAL PRESSURE SENSOR USING NANO-OPTO-MECHANICAL SYSTEMS
(NOMS)
A HIGH SENSITIVITY SOI ELECTRIC-FIELD SENSOR WITH NOVEL COMBSHAPED MICROELECTRODES
A HIGHLY SENSITIVE FLEXIBLE PRESSURE AND SHEAR SENSOR ARRAY FOR
MEASUREMENT OF GROUND REACTIONS IN PEDESTRIAN NAVIGATION
SELF-CLEANING MASS CALIBRATION OF A THERMOGRAVIMETRIC DEVICE
USING A THIN FILM MOLYBDENUM
DEVELOPMENT OF A SHEAR HORIZONTAL SURFACE ACOUSTIC WAVE
GYROSCOPE ON 36O YX LITAO3 SUBSTRATE
A ROBUST MICRO MECHANICAL-LATCH SHOCK SWITCH WITH LOW CONTACT
RESISTANCE
A NOVEL INTEGRATED TRANSPARENT FLEXIBLE TACTILE SENSOR
FABRICATION AND TESTING OF A ULTRA-HIGH RESOLUTION EXTENSOMETER
BASED ON RESONANT MEMS STRAIN SENSORS
IMPACT OF ENCAPSULATION MATERIALS ON THE PERFORMANCE OF SILICONBASED SOLID-STATE HIGH-PRESSURE SENSORS WITH SURFACE TRENCHES
MICRO-CANTILEVERS FOR NON-DESTRUCTIVE CHARACTERIZATION OF
NANOGRASS UNIFORMITY
IN-PROCESS PARAMETER CALIBRATION OF THERMOELECTRICAL FLOW
SENSORS WITH MONOLITHIC INTEGRATED CHANNEL
IN-PLANE COBALT-NICKEL MICRORESONATOR SENSOR WITH MAGNETIC
ACTUATION AND READOUT
ALN BASED PIEZOELECTRIC FORCE SENSOR FOR ENERGY AUTONOMOUS
SENSOR SYSTEMS
A DIFFERENTIAL DIFFERENCE AMPLIFIER WITH AUTOMATIC GAIN SELECTION
AS READOUT INTERFACE FOR CMOS STRESS SENSORS IN ORTHODONTIC
BRACKETS
A CMOS COMPATIBLE POLYCRYSTALLINE SILICON-GERMANIUM BASED
PIEZORESISTIVE PRESSURE SENSOR
DEVELOPMENT OF A STRAIN SENSOR FOR ROLLING CONTACT LOADS
AC CHARACTERISATION OF THERMAL FLOW SENSOR WITH FLUID
CHARACTERISATION FEATURE
ABSTRACT # FORMAT
01-146
Poster
01-147
Poster
01-149
Poster
01-151
Oral
01-154
Poster
01-160
Oral
01-162
Oral
01-163
Oral
01-171
Poster
01-174
Poster
01-177
Oral
01-179
Poster
01-180
Poster
01-181
Poster
01-188
Oral
01-189
Poster
01-197
Poster
01-203
Poster
01-209
Poster
01-210
Oral
01-213
Poster
01-215
Oral
01-223
Poster
01-233
Poster
01-237
Poster
01-238
Poster
01-239
Oral
01-249
Poster
01-251
Poster
PAPER TITLE
NOVEL METHOD FOR GATED INDUCTIVE READOUT FOR HIGHLY SENSITIVE
AND LOW COST VISCOSITY AND DENSITY SENSORS
MODULATED ELECTRO-MECHANICAL CONTINUOUS-TIME LOWPASS SIGMADELTA-MODULATOR FOR MICROMACHINED GYROSCOPES
DEFLECTION AMPLIFICATION MECHANISM IN A CAPACITIVE ACCELEROMETER
LOCALIZED STRAIN SENSING USING HIGH SPATIAL RESOLUTION, HIGHLY
SENSITIVE MEMS RESONANT STRAIN GAUGES FOR FAILURE PREVENTION
NOVEL SINGLE-DEVICE “XOR” AND “AND” GATES FOR HIGH SPEED, VERY LOW
POWER LSI MECHANICAL PROCESSORS
CAPACITIVE ABSOLUTE PRESSURE SENSOR WITH INDEPENDENT ELECTRODE
AND MEMBRANE SIZES FOR RELAXING SIGNAL CONDITIONING
NONLINEAR VIBRATION IN RESONANT SILICON BRIDGE PRESSURE SENSOR:
THEORY AND EXPERIMENT
DETECTION SYSTEM OF INCIDENT SLIPPAGE AND FRICTION COEFFICIENT
BASED ON A FLEXIBLE TACTILE SENSOR WITH STRUCTURAL ELECTRODES
DESIGN AND IMPLEMENTATION OF AN EXTREMELY LARGE PROOF-MASS
CMOS-MEMS CAPACITIVE TILT SENSOR FOR SENSITIVITY AND RESOLUTION
IMPROVEMENT
MEASUREMENT OF THE MAGNITUDE AND DIRECTION OF MAGNETIC FIELD BY
A MICROMACHINED CANTILEVER
IR THERMOCYCLER FOR CENTRIFUGAL MICROFLUIDIC PLATFORM WITH
DIRECT ON–DISK WIRELESS TEMPERATURE MEASUREMENT SYSTEM
LIGHTWEIGHT BIOCOMPATIBLE PHYSICAL FILM-BASED SENSORS: POLYMERS
“SELF-METALLIZED” WITH ORGANIC MOLECULAR CONDUCTORS
POSFET TOUCH SENSOR WITH ON-CHIP ELECTRONIC MODULE FOR SIGNAL
CONDITIONING
A NOVEL MEMS TUNABLE IONIZATION SENSOR BASED ON PATTERNED
FREESTANDING NICKEL NANOWIRES AND MOVING ELECTRODE
AN ACTIVE MATRIX ARRAYED MICROPHONE WITH ACOUSTIC BANDWIDTH
RESPONSE
CONTROL OF MEMS ON THE EDGE OF INSTABILITY
HIGH TEMPERATURE COMPATIBLE ALUMINUM NITRIDE RESONATING STRAIN
SENSOR
FABRICATION AND TESTING OF AN IONIC ELECTROSPRAY PROPULSION
SYSTEM DEVICE WITH A POROUS NI TIP ARRAY
ELECTRICAL COUPLING SUPPRESSING FOR A MICROGYROSCOPE USING
ASCENDING FREQUENCY DRIVE WITH 2-DOF PID CONTROLLER
CARBON NANOTUBE-INTEGRATED INERTIAL SWITCH WITH EXTENDED
CONTACT TIME
ANALYSIS OF ACCELERATION SENSITIVITY IN MEMS TUNING FORK
GYROSCOPE
A REEL-TO-REEL COMPATIBLE PRINTED ACCELEROMETER
ULTRASENSITIVE MASS SENSOR USING THE OUT-OF-PHASE VIBRATION
EIGENSTATE OF INTERCOUPLED DUAL-MICROCANTILEVERS
WIRELESS PASSIVE SENSING APPLICATION USING A CAVITY LOADED
EVANESCENT MODE HALF MODE SUBSTRATE INTEGRATED WAVEGUIDE
RESONATOR
A MONOLITHICALLY INTEGRATED 3-AXIS THERMAL-CONVECTIVE
ACCELEROMETER WITH A PNEUMATICALLY CURVED THERMOPILECANTILEVER FOR Z-AXIS SENSING
DIFFERENTIAL PRESSURE DISTRIBUTION MEASUREMENT OF A FREE-FLYING
BUTTERFLY WING
SENSITIVITY LINEARIZATION TECHNIQUE FOR A TIME BASED MEMS
ACCELEROMETER
SILICON CARBIDE PRESSURE SENSOR FOR HIGH TEMPERATURE AND HIGH
PRESSURE APPLICATIONS: INFLUENCE OF SUBSTRATE MATERIAL ON
PERFORMANCE
ACCELEROMETER USING MOSFET WITH MOVABLE GATE ELECTRODE:
ELECTROPLATING THICK NICKEL PROOF MASS ON FLEXIBLE PARYLENE BEAM
FOR ENHANCING SENSITIVITY
ABSTRACT # FORMAT
01-252
Poster
01-255
Oral
01-257
Poster
01-259
Poster
01-260
Oral
01-261
Poster
01-262
Oral
01-264
Poster
01-265
Oral
01-266
Poster
01-267
Poster
01-270
Poster
01-274
Oral
01-276
Poster
01-278
Oral
01-280
Poster
01-281
Poster
01-284
Oral
01-286
Oral
01-287
Poster
01-290
Oral
02-004
Poster
02-005
Poster
02-012
Poster
02-015
Poster
02-016
Poster
02-020
Poster
02-021
Poster
02-022
Poster
02-025
Poster
02-026
Poster
02-029
Poster
PAPER TITLE
FLEXIBLE FORCE SENSOR MEASURING CHANGE IN CAPACITANCE DUE TO
DIELECTRIC OIL DISPLACEMENT OUT OF DOMED POLYMER INTO
SURROUNDING HANNELS
BAROMETRIC PRESSURE CHANGE MEASUREMENT
A TWO DEGREE-OF-FREEDOM SOI-MEMS TRANSLATION STAGE WITH CLOSED
LOOP POSITIONING
NON-DEGENERATE PARAMETRIC AMPLIFICATION AND FILTERING IN
BIOMIMETIC HAIR FLOW SENSORS
A FOURTH ORDER UNCONSTRAINED ΣΔ CAPACITIVE ACCELEROMETER
FORCE SENSOR FOR POWER TRANSFER BETWEEN THE HUMAN BODY AND
THE ENVIRONMENT
SUB-DEGREE-PER-HOUR SILICON MEMS RATE SENSOR WITH 1 MILLION QFACTOR
THIN FILM ENCAPSULATED SIGE ACCELEROMETER FOR MEMS ABOVE IC
INTEGRATION
ULTRAHIGH PRECISION MEMS ACCELEROMETER
PHOTODIODE WITH MICRO TEXTURE FOR IMPROVING SENSITIVITY AT LARGE
ANGLE OF INCIDENCE FOR PARTICLE SENSORS
ARTIFICIAL HAIR CELL WITH EMBEDED PIEZORESISTIVE FORCE SENSORS
THE SENSITIVITY ENHANCEMENT FOR THE RADIATION SENSOR BASED ON
FILM BULK ACOUSTIC-WAVE RESONATOR
IN-SITU WAFER-LEVEL POLARIZATION OF ELECTRET FILMS IN MEMS
ACOUSTIC SENSOR ARRAYS
ALUMINUM NITRIDE PMUT BASED ON A FLEXURALLY-SUSPENDED MEMBRANE
SINGLE-CRYSTAL-SILICON VIBRATORY CYLINDERICAL RATE INTEGRATING
GYROSCOPE (CING)
A NOVEL MICRO-G, EXTENDED RANGE, SOI-MEMS PIEZORESISTIVE TIMEACCELEROMETER OPERATING IN TWO DISTINCT TIME-BASED TRANSDUCTION
MODES
A MICROMECHANICAL ULTRASONIC DISTANCE SENSOR WITH >1 METER
RANGE
A CONTOUR-MODE FILM BULK ACOUSTIC RESONATOR FOR MONITORING
BLOOD COAGULATION IN REAL-TIME
MEMS ULTRASONIC TRANSDUCERS FOR HIGHLY SENSITIVE DOPPLER
VELOCITY SENSOR FOR LOW VELOCITY MEASUREMENT
A DESIGN WITH IMPROVED LINEARITY AND TEMPERATURE COMPENSATION
OF A HIGH PERFORMANCE MEMS CAPACITIVE STRAIN SENSOR
A MODE-MATCHED 0.9 MHZ SINGLE PROOF MASS DUAL-AXIS GYROSCOPE
DUAL PHOTONIC ELECTROCHEMICAL LAB ON A CHIP FOR LACTATE
DETECTION IN CONTINUOUS FLOW MODE
LOW-LEAKAGE GAS SAMPLE-INJECTION SYSTEM FOR GAS
CHROMATOGRAPHY IN HARSH ENVIRONMENTS
A MICROFLUIDIC SENSOR CHIP WITH RENEWABLE IN-SITU COPPER MODIFIED
MICROELECTRODE FOR CONTINUOUS MONITORING OF NITRATE
A RESONANT CANTILEVER SENSOR FOR MONITORING AIRBORNE
NANOPARTICLES
FLOW INSENSITIVE THERMAL CONDUCTIVITY DETECTOR FOR µGAS
CHROMATOGRAPHY
HYDROGEN GAS SENSING PERFORMANCE OF PT/GRAPHENE/SIC CONTACTS
WAVELENGTH-INTERROGATED INFRARED SURFACE PLASMON RESONANCE
SENSOR WITH HIGH REFRACTIVE-INDEX SENSITIVITY
A MICROFLUIDIC DEVICE FOR HIGH FREQUENCY CHARACTERIZATION OF
FLUIDS UNDER HIGH DC ELECTRIC FIELDS
A TEXTILE INTEGRATED SENSOR SYSTEM FOR MONITORING HUMIDITY AND
TEMPERATURE
FEM MODELING SAW HUMIDITY SENSOR BASED ON ZNO/IDTS/ALN/SI
STRUCTURES
GOLD NANOPARTICLES IMMOBILIZED QUARTZ CRYSTAL MICROBALANCE
BIOCHIP WITH ULTRASONIC STANDING WAVE ENHANCEMENT FOR REAL-TIME
SENSING PROTEIN-LIGAND INTERACTION
ABSTRACT # FORMAT
02-033
Oral
02-036
Oral
02-038
Oral
02-039
Poster
02-040
Poster
02-041
Poster
02-042
Poster
02-043
Poster
02-044
Poster
02-045
Poster
02-047
Oral
02-049
Poster
02-050
Poster
02-051
Poster
02-052
Poster
02-053
Poster
02-054
Poster
02-056
Oral
02-058
Poster
02-060
Poster
02-063
Oral
02-068
Poster
02-070
Poster
02-072
Poster
02-073
Poster
02-078
Poster
02-081
Poster
02-083
Oral
02-086
Poster
02-087
Oral
02-089
Poster
02-090
Poster
PAPER TITLE
OXYGEN PLASMA FUNCTIONALIZED PEDOT/PSS-SWCNTS THIN FILM
DEPOSITED BY ELECTROPHORESIS FOR GAS SENSING
ENHANCEMENT OF SENSITIVITY OF COULOMETRIC DETECTION USING A ONEELECTRODE SYSTEM
ENHANCED PERFORMANCE OF A CMOS INTERDIGITAL CAPACITIVE HUMIDITY
SENSOR BY GRAPHENE OXIDE
A MINIATURIZED NETWORKED SENSOR FOR TRACE EXPLOSIVES
MICROMECHANICAL OLFACTORY SYSTEM FOR SENSITIVE AND SELECTIVE
DETECTION OF EXPLOSIVES
MICROFABRICATED ELECTROSPRAY IONIZATION CHIP WITH 60 TIPS FOR HIGH
THROUGHPUT MASS SPECTROMETRIC ANALYSES
SELECTIVITY OF NITROGEN DIOXIDE SENSORS BASED ON TUNGSTEN OXIDE
FILMS WITH MANGANESE OXIDE THIN FILTERS
THIN FILM GAS SENSOR FOR DETECTION OF TOXIC GASES FROM MICROBIAL
ANALYTE FOCUSING AT SELF ASSEMBLING HOT SPOTS FOR SURFACE
ENHANCED RAMAN SPECTROSCOPY
PROGRAMABLE MICROFLUIDIC PROCESSOR WITH PUMPING AND
COULOMETRIC DETECTING FUNCTIONS
MULTIMODAL BIO-IMAGE SENSOR FOR REAL-TIME PROTON AND
FLUORESCENCE IMAGING
HIGH-PERFORMANCE NO2 SENSOR USING STABILIZED ZIRCONIA AND NIO
PREPARED BY MICROWAVE SYNTHESIS
MIXED-POTENTIAL TYPE NOX SENSOR USING STABILIZED ZIRCONIA AND
CR2O3-WO3 NANOCOMPOSITES
NASICON-BASED POTENTIOMETRIC CL2 SENSOR USING CR2O3 SENSING
ELECTRODE
FLEXIBLE POLYMER HUMIDITY SENSOR FABRICATED BY INKJET PRINTING
A MICROFABRICATED PRECONCENTRATING DEVICE FOR EXHALED BREATH
ANALYSIS
UV-ENHANCED ROOM TEMPERATURE GAS SENSOR BASED ON HOLLOW
SPHERE SNO2-TIO2
NANOPARTICLE SELF-ASSEMBLY BASED TRIPETALOID ARRAYED
STRUCTURES AS SURFACE-ENHANCED RAMAN SCATTERING SUBSTRATES
ANALYSIS OF C1 AND C2 HYDROCARBON GAS MIXTURES USING
MINIATURIZED GAS CHROMATOGRAPHY AND SNO2 GAS DETECTORS
CO2 MEASURMENT USING AN ALN/SI SAW SENSOR
FIELD TESTING OF A RUGGED MEMS GAS CHROMATOGRAPH PROTOTYPE:
SELECTIVE ANALYSIS OF TRACE-LEVEL TCE VAPORS IN CONTAMINATED
HOMES
HIGHLY SELECTIVE SENSORS FOR TOXIC AND FLAMMABLE GASES BASED ON
FLAME-SPRAY-MADE SNO2 NANOPARTICLES
SURFACE ACOUSTIC WAVE GAS SENSOR FOR MONITORING LOW
CONCENTRATION AMMONIA
MINIATURISED GAS CHROMATOGRAPHIC SYSTEM WITH METAL OXIDE GAS
SENSOR ARRAY FOR FAST DETEKTION OF OFF-FLAVOURS
HIGHLY SENSITIVE VAPOR DETECTION OF AMINES WITH FLUORESCENT
CONJUGATED POLYMER: A NOVEL LASING TURN-ON SENSORY MECHANISM
MULTI-WELL STRUCTURE FOR CELL CULTURE ON THE CHEMICAL IMAGING
SENSOR
RAPID HORMONE IMMUNOSENSOR WITH FLUID CONTROL MECHANISM
ULTRA-LOW POWER PALLADIUM-COATED MEMS RESONATORS FOR
HYDROGEN DETECTION UNDER AMBIENT CONDITIONS
FLUORENE-THIOPHENE-BASED THIN-FILM FLUORESCENCE TURN-ON
CHEMOSENSOR FOR METHAMPHETAMINE VAPOR
LOCALLY SYNTHESIZED METAL OXIDE NANOWIRE-DEVICES AND THEIR GAS
SENSING APPLICATIONS
MICRO TITRATION DEVICE AND ITS APPLICATION TO RICE FRESHNESS
MESUREMENT
FUNCTIONALIZATION OF NANOSCALED 2-NM-THICK ALD-HFO2 LAYER BY
RAPID THERMAL ANNEALING AND CF4 PLASMA FOR LAPS NH4+ DETECTION
ABSTRACT # FORMAT
PAPER TITLE
02-093
Poster
02-094
Poster
02-098
Oral
02-101
Poster
02-104
Poster
02-108
Poster
02-111
Poster
02-112
Poster
02-114
Poster
02-115
Poster
02-116
Oral
ADVANCES IN POLYMER-COATED SURFACE ACOUSTIC WAVE GAS SENSOR
A MEMS GAS CHROMATOGRAPH FOR RAPID DETERMINATIONS OF EXPLOSIVE
MARKER COMPOUNDS
MICROFLUIDIC SURFACE-ENHANCED RAMAN SCATTERING SENSORS FOR
ONLINE MONITORING TRACE CHEMICAL MIXING AND REACTION
DESIGN OF WIRELESS SENSOR NODE BASED ON A NOVEL HYBRID CHEMICAL
SENSOR FOR HEAVY METAL MONITORING
OZONE SENOSR USING ZNO BASED FILM BULK ACOUSTIC RESONATOR
A PHOTOVOLTAGE-BASED INTEGRATED SENSOR FOR NEPHROTOXICITY
EVALUATION UNDER DRUG STIMULATION
DEVELOPMENT OF A NOVEL MICROPRECONCENTRATOR FOR MICRO GAS
CHROMATOGRAPH
HYDROGEN SENSOR BASED ON PALLADIUM NANOTUBE ARRAYS FABRICATED
BY NOVEL LOW-TEMPERATURE HYDROTHERMAL SYNTHESIS
FLUORINATED-HFO2 LAYER FOR EIS STRUCTURE SENSITIVE TO POTASSIUM
IONS
MEASURING THE FREQUENCY RESOLUTION OF A MULTI DEGREE OF
FREEDOM RESONATOR FOR MASS DETECTION
SINGLE CHIP NANOTUBE SENSORS FOR CHEMICAL AGENT MONITORING
02-117
Poster
SENSING CHARATERISTICS OF RNA OLIGOMER COATED SWNT GAS SENSORS
02-118
Oral
02-119
Oral
02-120
Poster
02-122
Oral
02-123
Poster
02-124
Oral
02-125
Poster
02-127
Oral
02-129
Poster
02-130
Oral
02-132
Poster
02-133
Poster
02-134
Poster
03-001
Poster
03-003
Oral
03-009
Poster
03-012
Poster
03-015
Poster
03-016
Poster
TEMPERATURE DEPENDENCE OF VACUUM ENCAPSULATED RESONATORS
FOR HUMIDITY MEASUREMENT
INTEGRATED SILICON-BASED CHEMICAL MICROSYSTEM FOR PORTABLE
SENSING APPLICATIONS
ELECTROLYTIC CHARGE INVERSION AT PROGRAMMABLE CMOS SENSOR
INTERFACES
FREQUENCY-MULTIPLEXED COMBINATORY MASS SENSING WITH SINGLE DATA
LINE FROM MULTIPLE INTEGRATED FILM BULK ACOUSTIC RESONATORS
DMMP VAPOR DETECTION WITH 50NM THICK ALN FILMS BASED
MICROCANTILEVER
TOWARDS QUANTIFICATION OF BIOCOMPATIBILITY: MONITORING INGROWTH
BEHAVIOR OF BIOMATERIALS IN TISSUE WITH A MICROSENSOR IMPLANT
ON THE RELATIVE SENSITIVITY OF MASS-SENSITIVE CHEMICAL
MICROSENSORS
A PRESSURE PROGRAMMABLE GAS CHROMATOGRAPHY MICROSYSTEM
UTILIZING MOTIONLESS KNUDSEN PUMP, FIBER-INTEGRATED OPTICAL
DETECTOR, AND SILICON MICROMCHINED SEPARATION COLUMN
PH MEASUREMENTS WITH ZNO BASED SURFACE ACOUSTIC WAVE
RESONATOR
MEMS-BASED AC DIFFERENTIAL SCANNING CALORIMETRY
FLEXIBLE ELECTROCHEMICAL IMAGING BY LIGHT-ADDRESSABLE
POTENTIOMETRIC SENSOR WITH “ZOOM-IN” FUNCTIONALITY
A NOVEL FABRICATION OF PALLADIUM NANOROD ELECTRODE ENSEMBLE
FOR ELECTROCHEMICAL DETECTION OF HYDROGEN EVALUATION
CYCLODEXTRIN-BASED MICRO NEUROTRANSMITTER SENSOR FOR
SELECTIVE CATECHOLAMINE HORMONE DETECTION
COMPARISON OF EXTRACELLULAR SIGNALS BETWEEN GOLD AND CARBON
NANOTUBES BASED MICROELECTRODE ARRAYS
MULTI-SITE MONITORING OF CHOLINE AND GLUTAMATE USING BIOSENSOR
MICROPROBE ARRAYS IN COMBINATION WITH CMOS
MANIPULATION OF ELECTRICAL CHARGE OF PROTEINS FOR SENSITIVE
BIOSENSING USING FIELD-EFFECT TRANSISTORS
A MICRO DEVICE FOR IMPEDANCE AND MECHANICAL CHARACTERIZATION OF
BIOLOGICAL CELLS
REUSABLE HIGH-FREQUENCY ELECTRODELESS QCM BIOSENSOR WITH A
BARE QUARTZ RESONATOR EMBEDDED IN A SILICON MICROCHANNEL
TUNABLE SENSITIVITY AND LINEARITY OF SELF-ASSEMBLED CARON
NANOTUBE COMPOSITE BASED PH BIOSENSORS USING SILICA
NANOPARTICLES
ABSTRACT # FORMAT
03-019
Poster
03-023
Oral
03-024
Poster
03-026
Oral
03-030
Oral
03-031
Poster
03-032
Oral
03-035
Oral
03-038
Oral
03-050
Poster
03-051
Poster
03-054
Poster
03-059
Poster
03-060
Oral
03-061
Oral
03-063
Poster
03-065
Poster
03-066
Oral
03-070
Poster
03-072
Oral
03-076
Poster
03-078
Poster
03-080
Poster
03-081
Poster
03-090
Poster
03-093
Poster
03-098
Poster
03-099
Poster
03-106
Oral
PAPER TITLE
PCR ON A PDMS-BASED MICROCHIP WITH INTEGRATED BUBBLE REMOVAL
RESIDUAL STRESS-FREE 100 MHZ PZT-BASED CONCAVE DIAPHRAGM
RESONATOR FOR LABEL-FREE PROTEIN-LIGAND BIOSENSING WITH SELFENHANCING MECHANISM
INTEGRATED MICROFLUIDIC LOOP-MEDIATED-ISOTHERMAL-AMPLIFICATION
SYSTEMS FOR RAPID ISOLATION AND DETECTION OF AQUACULTURE
PATHOGENS
PROTOZOON CLASSIFICATIONS BASED ON SIZE, SHAPE AND REFRACTIVE
INDEX USING ON-CHIP IMMERSION REFRACTOMETER
MEMS MASS SENSOR WITH UNIFORM SENSITIVITY AND ITS APPLICATION TO
MONITORING OF CELLULAR APOPTOSIS
RAPID ON-SITE MEASUREMENT OF THE FRESHNESS OF RICE ON A MICRO
ELECTROCHEMICAL DEVICE
DIAGNOSTIC DEVICE FOR COW MASTITIS BASED ON THE DETECTION OF
SUPEROXIDE SECREATED FROM NEUTROPHILS
PULSATILE SHEAR STRESS AND HIGH GLUCOSE CONCENTRATIONS INDUCED
REACTIVE OXIGEN SPECIES PRODUCTION IN ENDOTHELIAL CELLS
DNA MICROARRAYS IMMOBILIZED ON UNMODIFIED PLASTICS IN A
MICROFLUIDIC BIOCHIP FOR RAPID TYPING OF AVIAN INFLUENZA VIRUS
MECHANICAL AND ELECTRICAL EVALUATION FOR THE LONG-TERM STABILITY
OF IMPLANTED 3D RETINAL MICROELECTRODE
IMPROVING SENSITIVITY OF PHOTONIC CRYSTAL-BASED BIOSENSORS BY A
CAVITY ARRANGEMENT
SI-NANOWIRE BIOSENSOR ARRAYS: FABRICATION AND CHARACTERIZATION
HIGH-DENSITY MICROELECTRODE ARRAY SYSTEM AND OPTIMAL FILTERING
FOR CLOSED-LOOP EXPERIMENTS
ULTRA-SENSITIVE CARBON NANOTUBES FOR SINGLE-MOLECULE DETECTION
OF DNA HYBRIDIZATION KINETICS USING CONDUCTANCE-BASED
CORRELATION SPECTROSCOPY
NANOPORE DNA SENSORS IN CMOS WITH ON-CHIP LOW-NOISE
PREAMPLIFIERS
EVALUATION OF THE PACKAGING AND ENCAPSULATION RELIABILITY IN FULLY
INTEGRATED, FULLY WIRELESS 100 CHANNEL UTAH SLANT ELECTRODE
ARRAY (USEA): IMPLICATIONS FOR LONG TERM FUNCTIONALITY
A CELL ELECTROPORATION AND VIABILITY MONITORING CHIP USING A SINGLE
CHANNEL WITH MULTIPLE ELECTRIC FIELD ZONES
HIGH-Q IN-PLANE RESONANCE-MODE CANTILEVER BIO/CHEMICAL SENSOR
FOR REAL-TIME DETECTION IN LIQUIDS
LOCALIZED ELECTROPORATION OF MOUSE EMBRYO USING DIELECTRIC
GUIDES
INDUCTIVELY COUPLED WIREBONDED MICROCOILS FOR WIRELESS ON-CHIP
NMR
TEMPERATURE MODULATED EXCITATION AND PHASE SENSITIVE DETECTION
TO SELECTIVELY IMAGE DNA SEQUENCES
STICTION-FREE POLY-SIGE RESONATORS FOR MONOLITHIC INTEGRATION OF
BIOSENSORS WITH CMOS
AN ALL-DIGITAL, TIME-GATED 128X128 SPAD ARRAY FOR ON-CHIP, FILTERLESS FLUORESCENCE DETECTION
MICROENGINEERED IRON AND IRON-OXIDE CONTRAST AGENT PARTICLES
FOR TUNABLE MULTISPECTRAL MAGNETIC RESONANCE IMAGING
LOW COST AND HIGH SPECIFIC ANESTHETIC BIOSENSORS WITH
FUNCTIONALLY IMPRINTED NANOCAVITIES ON POLYMER FILMS
A WIRELEE LOVE WAVE BIOSENSOR PLATFORM FOR SIMULTANEOUS
DETECTIONS OF TWO DIFFERENT BIOMOLECULES
SPECIFIC AND LABEL-FREE IMMUNOGLOBULIN G ANTIBODY DETECTION
USING NANO POROUS HYDROGEL PHOTONIC CRYSTALS
LABEL-FREE DNA DETECTION BASED ON SILICON NANOWIRES
SINGLE CELL REAL TIME SECRETION ASSAY USING AMORPHOUS
FLUOROPOLYMER MICROWELL ARRAY
ABSTRACT # FORMAT
03-109
Poster
03-110
Poster
03-111
Oral
03-112
Poster
03-113
Poster
03-125
Oral
03-126
Oral
03-129
Poster
03-130
Poster
03-131
Poster
03-132
Poster
03-138
Poster
03-152
Poster
03-153
Oral
03-158
Poster
03-162
Oral
03-163
Poster
03-166
Poster
03-170
Poster
03-171
Poster
03-172
Oral
03-173
Poster
03-174
Oral
03-175
Poster
03-178
Oral
03-180
Oral
03-182
Poster
03-183
Poster
03-184
Oral
03-185
Poster
PAPER TITLE
MAGNETIC MICROHEATERS FOR SINGLE CELL SEPARATION, MANIPULATION,
AND LYSING
A LATERALLY RESONATING GRAVIMETRIC SENSOR WITH UNIFORM MASS
SENSITIVITY AND HIGH LINEARITY
SEPARATION OF CAENORHABDITIS ELEGANS BY ELECTROTAXIS IN A
MICRODEVICE
PATTERN GENERATION OF MICROFLUIDIC-BASED BIOSENSOR TO DETECT CREACTIVE PROTEIN USING COMPETITIVE PROTEIN ADSORPTION
A HIGH-THROUGHPUT FULLY-AUTOMATED MICROFLUIDIC LIVE CELL ARRAY
FOR COMBINATION DRUG TREATMENT ANALYSIS OF COLORECTAL CANCER
CELLS
MECHANICAL STIMULATOR OF CULTURED VASCULAR ENDOTHELIAL CELL FOR
INVESTIGATION OF DRUG PERMEABILITY OF BLOOD VESSEL
LABEL-FREE REAL TIME IMAGING OF NEURAL COMMUNICATION USING
ACETYLCHOLINE IMAGE SENSOR
ULTRASENSITIVE DIELECTRIC FILLED LAMÉ MODE BIOMASS SENSOR
ON-DEMAND MICRO ENCAPSULATION UTILIZING ON-CHIP SYNTHESIS OF SEMIPERMEABLE ALGINATE-PLL CAPSULES
PRECISE SAMPLE POSITIONING FOR MULTIPOINT IMMUNOASSAY USING
NANOFLUIDIC PRECONCENTRATOR
RECORDING OF NEURAL ACTIVITY OF MOUSE RETINAL GANGLION CELLS BY
MEANS OF AN INTEGRATED HIGH-DENSITY MICROELECTRODE ARRAY
FLUORESCENT HYDROGEL FIBERS FOR LONG-TERM IN VIVO GLUCOSE
MONITORING
NANOSLIT BIOSENSOR WITH SINGLE-PIXEL RESOLVED KINETICS CAPABILITY:
FINITE ELEMENT METHOD AND EXPERIMENTAL RESULTS
MULTILAYER PHASED MICROCOIL ARRAY FOR MAGNETIC RESONANCE
IMAGING
THE EFFECT OF SEQUENCE LENGTH ON DNA DECORATED CNT GAS
SENSORS
GOLD NANOPARTICLE-BASED REDOX SIGNAL ENHANCEMENT TOWARDS THE
DETECTION OF SINGLE BACTERIUM
POLYMER OPTO-MECHANICAL TRANSDUCER FOR ABNORMAL CELL
CONTRACTION DIAGNOSTICS
CELL-BASED SURFACE ACOUSTIC WAVE RESONANT MICROSENSOR FOR
MULTI-SITE ELECTRORETINOGRAM RECORDINGS INSIDE ISOLATED MOUSE
RETINA USING FLEXIBLE SPATIALLY ARRANGED MICROELECTRODE PROBES
A NOVEL MICRONEEDLE-BASED NON-ENZYMATIC GLUCOSE SENSOR FOR
PAINLESS DIABETES TESTING APPLICATION
NEW CLASS OF CHRONIC RECORDING MULRICHANNEL NEURAL PROBES
WITH POST-IMPLANT SELF-DEPLOYED SATELLITE RECORDING SITESPARYLENE MICROPROBES WITH ENGINEERED STIFFNESS AND SHAPE FOR
IMPROVED INSERTION
3D LOBULE-MIMETIC CHIP VIA POSITIVE DIELECTROPHORESIS FORCE WITH
SINUSOIDAL SPACING POLY (ETHYLENE GLYCOL)-DIACRYLATE MICROWALLS
PARALLEL FOCUSING AND SWITCHING OF LEAKAGE FLUX FROM MAGNETIC
LOOP FOR ON-CHIP PATTERNING OF MAGNETICALLY LABELED CELLS
A COMPACT HALL-EFFECT SENSOR ARRAY FOR THE DETECTION AND
IMAGING OF SINGLE MAGNETIC BEADS IN BIOMEDICAL ASSAYS
A FLEXIBLE FISH-BONE-SHAPED NEURAL PROBE STRENGTHENED BY
BIODEGRADABLE SILK COATING FOR ENHANCED BIOCOMPATIBILITY
PATHOGEN DETECTION USING MICROFLUIDIC BEAD-BASED PCR
PLANT PATHOGEN SPORES IN MICROFLUIDIC DROPLETS: A HIGHTHROUGHPUT APPROACH TO ANTIGUNGAL DRUG SCREENING
SI NANO-PILLARS FOR MEASURING TRACTION FORCES EXERTED BY
FILOPODIA
MAGNETICALLY ACTUATED CELLULAR STRAIN ASSESSMENT TOOL; A STUDY
ON THE STRAIN INDUCED DIRECTIONAL MIGRATION OF HUMAN ENDOTHELIAL
CELLS
ABSTRACT # FORMAT
PAPER TITLE
A 3-D CAPILLARY-ENDOTHELIUM-MIMETIC MICROFLUIDIC CHIP FOR THE
STUDY THE EXTRAVASATION OF NEUTROPHIL
TEMPERATURE-MEDIATED CELL CAPTURE AND RELEASE USING SURFACEIMMOBILIZED APATMERS IN A MICROFLUIDIC DEVICE
MOTOR PROTEIN MOTION ALONG MICROTUBULES FOR MOLECULAR
DETECTION
CHEMICAL INDUCED IMPEDANCE SPECTROSCOPY FOR SINGLE CANCER CELL
DETECTION
A SUBMERSIBLE PIEZORESISTIVE MEMS LATERAL FORCE SENSOR FOR
CELLULAR BIOMECHANICS APPLICATIONS
A FULLY INTEGRATED, HIGH-THROUGHPUT, MULTI-PARAMETRIC FLOW
CYTOMETRY CHIP USING “MICROFLUIDIC DRIFTING” BASED THREEDIMENSIONAL (3D) HYDRODYNAMIC FOCUSING
POINT-OF-CARE PERITONITIS MONITORING USING AN IMMUNOASSAY BASED
MICROFLUIDIC CHIP
A GLUCOSE-RESPONSIVE INSULIN DELIVERY MICRO DEVICE EMBEDDED WITH
NANOHYDROGEL PARTILES AS “SMART VALVES”
FULLY INTEGRAED DROPLET BASED POINT-OF-CARE PLATFORM FOR
MOLECULAR DETECTION FROM CRUDE BIOSAMPLES
DISPOSABLE MICRO DEVICES FOR CLINICAL ICSI
FLEXIBLE MICRO-TACTILE SENSOR FOR NORMAL AND SHEAR ELASTICITY
MEASUREMENTS
A NOVEL IMPLANTABLE SAW SENSOR FOR BLOOD PRESSURE MONITORING
DELIVERY OF AN ANTI-CANCER DRUG FROM A MAGNETICALLY CONTROLLED
MEMS DEVICE SHOW APOPTOSIS IN PC3 AND HUVEC CELLS
ISOLATION OF TUMOR CELLS USING A NEW MICROFLUIDIC INCUBATOR WITH
MOVING-WALL STRUCTURES
LEUKOCYTE 5-PART DIFFERENTIAL COUNT USING A MICROFLUIDIC
CYTOMETER
A MICROFLUIDIC BLOOD-CLOGGING VALVE FOR ON-CHIP BLOOD ANALYSIS
SEMIPERMEABLE PARYLENE MEMBRANE AS AN ARTIFICIAL BRUCH’S
MEMBRANE
DEVELOPMENT OF A MICROFLUIDIC DEVICE WITH MICROCANTILEVER ARRAY
FOR PROBING SINGLE CANCER CELL MECHANICS
A MEMS INTRAOCULAR ORIGAMI COIL
ANIMAL EXPERIMENTAL STUDY ON THE NERVE ROOT RETRACTION WITH A
SILICON PRESSURE SENSOR
A PARYLENE-BASED FLEXIBLE ELECTROPORATION CHIP APPLICABLE FOR IN
VIVO GENE AND SIRNA DELIVERY
A WIRELESS AND BATTERYLESS MICROSYSTEM WITH IMPLANTABLE GRID
ELECTRODE/3-DIMENSIONAL PROBE ARRAY FOR ECOG AND EXTRACELLULAR
NEURAL RECORDING ON RAT
A HIGH-PERFORMANCE MICROSYSTEM FOR ISOLATING VIABLE CIRCULATING
TUMOR CELLS
TEMPERATURE SENSING PROBE INTEGRATED WITH AN SU-8 FLEXIBLE
RIBBON CABLE FOR HEART SURGERY APPLICATION
A MEMS DIFFERENTIAL AFFINITY SENSOR FOR CONTINUOUS GLUCOSE
DETECTION
MICRO-LIQUID HANDLING ON PAPER ANALYSIS CHIP TRIGGERED BY INK-JET
DROPLET
EASY AND STABLE LIPID BILAYER FORMATION:A DROPLETS-CONTACTINGMETHOD IN PARYLENE MICROPORES FOR MULTIPLE ION CHANNEL
RECORDINGS
AN INTEGRATED MICROFLUIDIC SYSTEM FOR INTERSTITIAL FLUID
TRANSDERMAL EXTRACTION
03-186
Poster
03-190
Oral
03-197
Oral
03-200
Poster
03-201
Poster
03-203
Poster
03-205
Poster
04-001
Oral
04-004
Oral
04-005
Oral
04-006
Poster
04-010
Poster
04-012
Oral
04-014
Oral
04-016
Oral
04-017
Oral
04-021
Oral
04-028
Poster
04-031
Poster
04-035
Poster
04-036
Oral
04-037
Poster
04-039
Poster
04-041
Poster
04-047
Oral
04-050
Poster
04-059
Poster
04-060
Poster
04-061
Poster
AN INTEGRATED LOBULE-MIMETIC LIVER CHIP FOR TESTING HEPATOTOXICITY
04-065
Poster
A PHOTOACOUSTIC IMAGER WITH INFRARED ILLUMINATION THROUGH THE
CMUT CHIP
ABSTRACT # FORMAT
04-066
Poster
04-069
Poster
04-070
Oral
04-072
Poster
04-073
Oral
04-075
Oral
04-076
Poster
04-078
Poster
04-080
Poster
04-081
Poster
05-005
Poster
05-006
Poster
05-008
Oral
05-011
Poster
05-019
Oral
05-023
05-024
Poster
Oral
05-026
Oral
05-028
Oral
05-030
Poster
05-031
Poster
05-034
Poster
05-035
Poster
05-036
Poster
05-037
Poster
05-038
Poster
05-040
Oral
05-042
Poster
05-043
05-045
Poster
Poster
05-046
Poster
05-047
Poster
PAPER TITLE
POST-OPERATIVE WIRELESS PLATFORM FOR IN-VIVO MONITORING AND
TREATMENT
MICROFLUIDIC DEVICE TO PERFORM IMPEDOMETRIC DETECTION OF
ACTIVATED PARTIAL THROMBOPLASTIN TIME OF BLOOD
CAPSULE MICROROBOT FOR TARGETTING IN MEDICAL DIAGNOSTIC
TREATMENT
A NOVEL SURFACE MODIFICATION METHOD TO ACHIEVE LOW IMPEDANCE
NEURAL MICROELECTRODE ARRAYS
ELECTROCHEMICALLY-BASED DOSE MEASUREMENT FOR CLOSED-LOOP
DRUG DELIVERY APPLICATIONS
A MEDICAL TACTILE SENSOR FOR MEASURING TISSUE HARDNESS FOR
ROBOTIC SURGICAL TOOLS
WIRELESS RECHARING OF BATTERY OVER LARGE DISTANCE FOR
IMPLANTABLE BLADDER PRESSURE CHRONIC MONITORING
INDIVIDUALLY-ADDRESSABLE PARYLENE MICRONEEDLE ARRAYS WITH
INTEGRATED MICROCHANNELS FOR RETINAL PROSTHESIS STUDY
PRELIMINARY THERMAL CHARACTERIZATION OF A FULLY-PASSIVE WIRELESS
BACKSCATTERING MEMS NEURO-RECORDER
A FABRY–PÉROT PRESSURE SENSOR FABRICATED ON LEFT VENTRICULAL
ASSIST DEVICE FOR HEART FAILURE IMPLANT
A MULTIPLEXED MICROFLUIDIC RESISTIVE PULSE SENSOR FOR HIGH
THROUGHPUT PARALLEL COUNTING OF MICROPARTICLES
A HYBRID ELECTROKINETIC BIOPROCESSOR FOR STATIC AND DYNAMIC
PATHOGEN MANIPULATION IN PHYSIOLOGICAL SAMPLES
AN ACTIVE GYROSCOPIC MAGNETIC MICROMIXER FOR RAPID FLUID MIXING
IN DROPLET BASED MICROFLUIDIC SYSTEMS
MICROFLUIDIC VALVES BASED ON TIO2 COATING WITH TUNABLE SURFACE
WETTABILITY BETWEEN SUPERHYDROPHILIC AND SUPERHYDROPHOBIC
ENHANCED MICRO-DROPLET SPLITTING, CONCENTRATION, SENSING AND
EJECTION BY INTEGRATING ELECTROWETTING-ON-DIELECTRICS AND
SURFACE ACOUSTIC WAVE TECHNOLOGIES
LASER-ACTUATED MICRO-VALVES AND MICRO-PUMPS
MICRO-AQUATIC-FARM: ON CHIP STIMULATION AND EVALUATION SYSTEM
ON-CHIP SYNTHESIS OF SILICA NANOPARTICLE ASSEMBLIES WITH
CONTROLLED SHAPE AND SIZE
FULLY INTEGRATED DILUTION SERIES GENERATION ON A LABORATORY
CENTRIFUGE
A MICROFLUIDIC “TREADMILL” FOR SPERM SELECTIVE TRAPPING ACCORDING
TO MOTILITY CLASSIFICATION
ACTIVE SURFACE TENSION DRIVEN MICROPUMP USING DROPLET/MENISCUS
PRESSURE GRADIENT
ON-CHIP GELATION OF TEMPORALLY CONTROLLED ALGINATE
MICRODROPLETS
CONDUCTOMETRIC AND OPTICAL SENSING OF STIMULI SENSTIVE
HYDROGELS INSIDE MICROFLUIDIC CHANNELS
SIZE FRACTIONATION OF PRIMARY MUSCLE CELLS USING HYDRODYNAMICS
IN MICROCHANNELS
HIGH-PERFORMANCE PROTEIN PRECONCENTRATOR USING MICROCHANNELINTEGRATED NAFION STRIP
OPTICAL-DRIVEN VORTEX AS A MICROPARTICLE CONCENTATOR
STAND-ALONE MICRO FLUIDIC SYSTEM USING PARTLY DISPOSABLE PDMS
MICROWELL ARRAY FOR HIGH THROUGHPUT CELL ANALYSIS
DYNAMICALLY CONTROLLABLE CONCENTRATION GRADIENT GENERATOR
FOR STUDYING CELLULAR RESPONSE TO CHEMICAL INSTIGATION
A BISTABLE SHAPE MEMORY MICROVALVE FOR THREE-WAY CONTROL
AN ABSORPTIVE FILTER USING MICROFLUIDIC SWITCHABLE METAMATERIALS
FRICTIONAL DRAG REDUCTION IN MICROCHANNEL USING SLIP ON CONVEX
AIR BUBBLES NATURALLY FORMED IN A SPECIFED CAVITY
HIGH–YIELD BLOOD PLASMA SEPARATION BY MODULATING INERTIAL
MIGRATION IN A CONTRACTION–EXPANSION ARRAY MICROCHANNEL
ABSTRACT # FORMAT
05-048
Oral
05-054
Poster
05-056
Poster
05-059
Poster
05-062
Poster
05-065
Poster
05-067
Oral
05-070
Poster
05-072
Poster
05-077
Poster
05-079
Oral
05-080
Oral
05-082
Poster
05-085
Oral
05-088
Poster
05-091
Poster
05-092
Oral
05-096
Poster
05-097
Poster
05-098
Poster
05-099
Poster
05-102
Poster
05-103
Poster
05-104
Poster
05-105
Poster
05-113
Poster
05-115
Oral
05-120
Poster
05-121
Poster
PAPER TITLE
A WAFER-LEVEL, HETEROGENEOUSLY INTEGRATED, HIGH FLOW SMA-SILICON
GAS MICROVALVE
OPTIMIZATION OF LIQUID DIELECTROPHORESIS (L-DEP) BASED DEVICES
TOWARDS CONDUCTIVE BIOLOGICAL LIQUIDS HANDLING
DIGITAL LIQUID-LIQUID MICROEXTRACTION
DYNAMIC EFFECTS OF DROPLET IMPINGEMENT ON NANOTEXTURED
SURFACE FOR HIGH EFFICIENT SPRAY COOLING
2-DIMENSIONAL SEPARATION OF BIOMIMETIC PARTICLES BY STOPPED-FLOW
CENTRIFUGO-MAGNETOPHORESIS
MILLILITER-TO-MICROLITER PLATFORM FOR ON-DEMAND LOADING OF
AQUEOUS AND NON-AQUEOUS DROPLETS TO DIGITAL MICROFLUIDICS
HIGH PRESSURE EWOD DIGITAL MICROFLUIDICS
ON-DEMAND DELIVERY OF OOCYTE IN MICROCHANNEL USING
MAGNETICALLY DRIVEN MICROTOOL
MEMS SILICON-BASED RESISTOJET MICRO-THRUSTER FOR ATTITUDE
CONTROL OF NANO-SATELLITES
DEPOSITION OF CARBON NANOPARTICLES USING OPTICALLY INDUCED
DIELECTROPHORESIS FORCE
IN-SITU GENERATION AND SHRINKAGE OF MONODISPERSE WATER-IN-OIL
EMULSION FOR FEMTOLITER COMPARTMENTALIZATION USING CAPILLARY
TRAPS
AMPLIFICATION OF CHEMOTACTIC RESPONSES OF MOTILE BACTERIAL CELLS
FOR CHARACTERIZING PREFERENTIAL CHEMOTAXIS TOWARD CARBON
SOURCES
OPTOELECTRONIC TWEEZERS INTEGRATION WITH MULTILAYER
MICROFLUIDIC DEIVCE USING SWNT EMBEDED PDMS MEMBRANE
ELECTRODE
ON-CHIP INTEGRATION OF EIGHT DIRECTIONAL DROPLET EJECTORS FOR
INKING A SPOT WITH EIGHT DROPLETS WITHOUT EJECTOR MOVEMENT
AN UNTETHERED MICROROBOT ACTUATED BY AN ELECTROMAGNETIC FIELD
WITH AN ACOUSTICALLY OSCILLAING BUBBLE FOR BIO/MICRO-OBJECT
MANIPULATION
FOCUSING MICROPARTICLES IN A MICROFLUIDIC CHANNEL WITH
FERROFLUIDS
MAGNETOPHORETIC LABEL-FREE CELL SEPARATION USING PARAMAGNETIC
SOLUTION
AN ELECTROSTATICALLY ACTUATED PARYLENE MICROVALVE FOR LAB-ON-ACHIP APPLICATIONS
IN-SITU CLOSED LOOP HYDROGEL MEMBRANE FORMATION BY ONE STEP
STAMPING
WIRELESS ACTUATED MICROVALVE SYSTEM USING INDUCTION HEATING AND
ITS THERMAL EFFECT ON THE MICROFLUIDIC SYSTEM
FLUORESCENCE ENHANCEMENT VIA SINGLE-CORE LIQUID WAVEGUIDES IN
MICROFLUIDIC CHANNELS
PLANAR ON-CHIP FLOW CYTOMETER USING EVANESCENT WAVES BASED ON
LIQUID TOTAL INTERNAL REFLECTION (L-TIR)
A NOVEL NARROW MIST SPRAY DEVICE USING SURFACE ACOUSTIC WAVE
WITH A CHANNEL
HIGH THROUGHPUT MELTING CURVE ANALYSIS (MCA) IN MONOLITHIC
SILICON-BASED MICROFLUIDIC DEVICE
HIGH-EFFICIENCY BLOOD SEPARATION UTILIZING SPIRAL FILTRATION
MICROCHANNEL WITH GRADUALLY VARIED WIDTH
ROTATIONALLY CONTROLLED CENTRIFUGO-PNEUMATIC VALVING UTILIZING
DISSOLVABLE FILMS
HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF
MICROPUMP DRIVING AND ITS APPRICATION TO NANOPARTICLE SYNTHESIS
DETERMINING THE EFFECTIVE ZETA POTENTIALS IN MICROCHANNELS WITH
NONUNIFORM ZETA POTENTIALS FOR FLOW CONTROL APPLICATIONS
DIODE CHARACTERISTIC OF ELECTROLYTE-OXIDE-SEMICONDUCTOR
STRUCTURE FOR POTENTIAL CHEMICAL AND BIOLOGICAL APPLICATIONS
ABSTRACT # FORMAT
05-123
Poster
05-124
Poster
05-125
Poster
05-126
Poster
05-127
Oral
05-131
Poster
05-132
Oral
05-133
Poster
05-134
Oral
05-138
Poster
05-141
Poster
05-142
Poster
05-143
Poster
06-004
Poster
06-012
Oral
06-014
Poster
06-016
Oral
06-018
Poster
06-019
Poster
06-020
Poster
06-022
Poster
06-025
Oral
06-027
Poster
06-029
Poster
06-032
Oral
06-033
Poster
06-037
Poster
06-039
Poster
06-042
Poster
06-043
Oral
06-045
Poster
PAPER TITLE
ROLLING, ALIGNING, AND TRAPPING DROPLETS ON A LASER BEAM USING
MARANGONI OPTOFLUIDIC TWEEZERS
A MICROFLUIDIC CONTROL SYSTEM WITH RE-USABLE MICROPUMP/VALVE
ACTUATOR AND INJECTION MOLDED DISPOSABLE POLYMER LAB-ON-A-SLIDE
MARANGONI-DRIVEN MICROMOTOR IN LIQUID MEDIUM
A DOUBLE TRAPPED SINGLE CELL CONTACT AND INTERACTION SYSTEM VIA
MOVEABLE POLY(ETHYLENE GLYCOL) DIACRYLATE (PEG-DA)
MICROSTRUCTURE FOR IMMUNE ANALYSIS
CONTINUOUS FLOW LAYER-BY-LAYER MICROBEAD FUNCTIONALIZATION VIA A
MICROPOST ARRAY RAILING SYSTEM
A DIGITAL MICROFLUIDICS NEAR JUNCTION EVAPORATIVE COOLING SYSTEM
USING NANOPOROUS SUPERHYDROPHYLIC COATING
A THIN PASSIVE CHECK VALVE USING MICROSPHERES FOR LOW PRESSURE
AND LOW FLOW RATE APPLICATIONS
A MICROFLUIDIC MIXER BASED ON PARALLEL, HIGH-SPEED CIRCULAR
MOTION OF INDIVIDUAL MICROBEADS IN A ROTATING MAGNETIC FIELD
INERTIAL PARTICLE FOCUSING IN PARALLEL MICROFLUIDIC CHANNELS FOR
HIGH-THROUGHPUT FILTRATION
HIGH THROUGHPUT SEPARATION OF BLOOD CELLS BY USING
HYDRODYNAMICS AND MAGNETOPHORESIS
ACOUSTIC TWEEZERS: ACHIEVING QUASI-DYNAMIC MICROPARTCLE
PATTERNING USING TUNABLE SURFACE ACOUSTIC WAVES
FINGER-POWERED MICRODROPLET GENERATOR
MICROEDDY DESIGN AND APPLICATION FOR SINGLE CELL TRAPPING AND
MONITORING
LOW-TEMPERATURE ZERO-LEVEL PACKAGING TECHNIQUE USING
PHOTOSENSITIVE FILM TYPE PERMX POLYMER
LOW TEMPERATURE ENCAPSULATION OF NANOCHANNELS WITH WATER
INSIDE
RELIABILITY OF MICRO-HOTPLATES ON POLYIMIDE FOIL
A NOVEL MEMS CONFIGURATION FOR THREE DIMENSIONAL FINE
POSITIONING AND MECHANICAL FIXING OF A BALL LENS IN THE PACKAGING
OF SILICON PHOTONICS
ELECTRICAL CONNECTION USING SUBMICRON POROUS GOLD BUMPS FOR
WAFER-LEVEL PACKAGING OF MEMS USING ANODICALLY-BONDABE LTCC
WAFER
MATERIAL OPTIMIZATION OF PHOSPHORUS-DOPED POLYCRYSTALLINE
SILICON GERMANIUM FOR MINIATURIZED THERMOELECTRIC GENERATOR
MONOCRYSTALLINE THIN-FILM WAFERLEVEL ENCAPSULATION OF
MICROSYSTEMS USING POROUS SILICON
BLACK SILICON WITH SUB-PERCENT REFLECTIVITY: INFLUENCE OF THE 3D
TEXTURIZATION GEOMETRY
VERY HIGH TEMPERATURE (800DEGC) OHMIC CONTACT OF AU/NI2SI ON NTYPE POLYCRYSTALLINE SILICON CARBIDE AGED IN AIR
INCREASE IN MECHANICAL STRENGTH BY SCALLOPING REMOVAL
TUNABLE DYNAMIC MECHANICAL PROPERTIES OF ELECTROPHORESIS
ASSEMBLED CARBON NANOTUBE-POLYMER PIEZOELECTRIC TRANSDUCERS
DIRECT WAFER BONDING OF ATOMIC LAYER DEPOSITED TIO2 AND AL2O3 THIN
FILMS
LOW TEMPERATURE PYREX/SILICON WAFER BONDING VIA A SINGLE
INTERMEDIATE PARYLENE LAYER
CONTINUOUS PHOTOLITHOGRAPHY SYSTEM AND TECHNOLOGY FOR FIBER
SUBSTRATE
A GENETIC ALGORITHM BASED KINETIC MONTE CARLO SIMULATION FOR THE
EVOLUTION OF COMPLEX SURFACE IN ANISOTROPIC WET ETCHING
HIGH DENSITY 256-CHANNEL CHIP INTEGRATION WITH FLEXIBLE PARYLENE
POCKET
PLANAR MEMS RF CAPACITOR INTEGRATION
WAFER-LEVEL TWO-STEP BONDING PROCESS FOR COMBINED SENSOR WITH
TWO DIFFERENT PRESSURE CHAMBERS
ABSTRACT # FORMAT
06-046
Oral
06-047
Poster
06-048
06-049
Oral
Poster
06-051
Poster
06-055
Oral
06-056
Poster
06-057
Poster
06-058
Poster
06-060
Oral
06-061
Poster
06-063
Poster
06-064
Poster
06-065
Poster
06-067
Oral
06-070
Poster
06-073
Oral
06-075
Poster
06-080
Poster
06-081
Oral
06-082
Oral
06-083
Poster
06-084
Poster
06-085
Poster
06-086
Poster
06-088
Poster
06-089
Oral
06-096
Poster
06-097
Poster
06-099
Poster
PAPER TITLE
ELECTRO-WETTING ENHANCED BONDING STRENGTH
SELF-ASSEMBLY AND TRANSFERRING OF PHOTORESIST AS PLANAR LAYER
FOR FABRICATION OF TSV AND FREE STANDING BEAMS
CREEP OF PARYLENE-C FILM
ADHESION-ENHANCING SURFACE TREATMENTS FOR PARYLENE DEPOSITION
PRECISE CELL TRAPPING WITH STRUCTURE-CONFINED
DIELECTROPHORESIS
A WAFER-LELVE POLY-SIGE-BASED THIN FILM PACKAGING TECHNOLOGY
DEMONSTRATED ON A SOI-BASED HIGH-Q MEM RESONATOR
LOW-COST FABRICATION OF PMMA AND PMMA BASED MAGNETIC COMPOSITE
CANTILEVERS
A TRANSFER METHOD FOR COMPLEX STRUCTURES FABRICATED ON NONPLANAR SURFACES
A BROADBAND 3D PACKAGE FOR RF MEMS DEVICES UTILIZING THROUGH
SILICON VIAS (TSV)
INTEGRATION AND PACKAGING TECHNOLOGY OF MEMS-ON-CMOS TACTILE
SENSOR FOR ROBOT APPLICATION USING MOLDED THICK BCB LAYER AND
BACKSIDE-GROOVED ELECTRICAL CONNECTION
A SINGLE-WAFER-BASED SINGLE-SIDED BULK-MICROMACHINING TECHNIQUE
FOR HIGH-YIELD AND LOW-COST VOLUME PRODUCTION OF PRESSURE
SENSORS
THE INTEGRATION OF CNTS-BASED FLEXIBLE TACTILE SENSOR AND FLEXIBLE
CIRCUIT BY POLYMER MOLDING PROCESS
ENTIRELY STRESS-FREE WAFER-LEVEL TRANSFER BONDING OF POLYMER
LAYERS USING FLOATATION
COMB-DRIVE III-NITRIDE MICRO MIRROR FABRICATED BY FAST ATOM BEAM
ETCHING
INVESTIGATIONS OF THERMOCOMPRESSION BONDING WITH THIN METAL
LAYERS
FABRICATION OF MICROPATTERNS ON CHANNEL SIDEWALLS USING STRAINRECOVERY PROPERTY OF A SHAPE MEMORY POLYMER
POLYMERIC DROPLET DEPOSITION AND SELF-RELEASE FORMING MICRO
PARTS ON HETEROGENEOUS SURFACES
ROOM-TEMPERATURE REACTIVE BONDING BY USING NANO SCALE
MULTILAYER SYSTEMS
LASER ANNEALED SIGE DEVICES FOR MEMS APPLICATIONS AT
TEMPERATURES BELOW 250°C
SPUTTERED MOLYBDENUM AS CONDUCTIVE MATERIAL FOR HIGHTEMPERATURE MICROHOTPLATES
HEATED MEMBRANES PREVENT CLOGGING OF APERTURES IN NANOSTENCIL
LITHOGRAPHY
PLASMA ENHANCED BONDING OF POLYDIMETHYLSILOXANE (PDMS) WITH
PARYLENE
SILICON RETAINER RING INTEGRATION IN MICRO-TURBINE WITH THRUST
BALL BEARING SUPPORT MECHANISM
TRANSFER TECHNOLOGY OF PYROLYZED POLYMER ONTO LOW THERMAL
TOLERANCE SUBSTRATE
NOVEL POST-PROCESS GAP REDUCTION TECHNOLOGY OF HIGH ASPECT
RATIO MICROSTRUCTURES UTILIZING MICRO WELDING
INKJET PRINTING ON PAPER FOR THE REALIZATION OF HUMIDITY AND
TEMPRATURE SENSORS
WAFER-LEVEL THIN FILM VACUUM PACKAGES FOR MEMS USING
NANOPOROUS ANODIC ALUMINA MEMBRANES
WAX-EMBEDDED MAGNETIC PATTERNING ON PAPER VIA LASER SURFACE
TREATMENT
ROOM-TEMPERATURE WAFER-LEVEL VACUUM SEALING BY COMPRESSION OF
HIGH-SPEED WIRE BONDED GOLD BUMPS
A STUDY OF SURFACE DIFFUSION OF METALS IN TUNGSTEN FOR NEMS
APPLICATIONS
ABSTRACT # FORMAT
06-101
Poster
06-102
Poster
06-104
Poster
06-109
Poster
06-110
Oral
06-111
Poster
06-116
Poster
06-117
Poster
06-118
Poster
06-120
Oral
06-121
Oral
06-122
Poster
06-123
Poster
06-126
Oral
06-127
Poster
06-131
Poster
06-133
Poster
06-134
Poster
06-136
Poster
06-137
Oral
06-138
Poster
06-139
Oral
06-140
Oral
06-143
Poster
06-146
Poster
06-151
Poster
06-154
Poster
06-156
Poster
PAPER TITLE
CRACK PROPAGATION DIRECTION CONTROL FOR CRACK-LESS SOLDER
BONDING USING AL/NI FLASH HEATING TECHNIQUE
DISPENSE AND SELF PLANARIZATION PROCESS ON A MODIFIED SURFACE
FOR MULTIPLE HEIGHT 3-D MICROFABRICATION
INFLUENCE OF THERMAL TREATMENT ON MECHANICAL CHARACTERISTICS
OF AL-SI-CU THIN FILMS EVALUATED BY BIAXIAL TENSILE TESTING
REFINED SI-CMOS-MEMS PROCESS USING AOE, DRIE AND PREFORM
BONDING
NIFE-AAO NANOCOMPOSITE FOR PERFORMANCE ENHANCEMENT OF ON-CHIP
SPIRAL INDUCTORS
LOW-TEMPERATURE SEALING FOR OPTICAL MICROSYSTEM PACKAGES USING
AU-AU SURFACE ACTIVATED BONDING IN ATMOSPHERIC PRESSURE
ENVIRONMENT
EFFICIENT SOLUTION TO SELECTIVE WET ETCHING OF ULTRA-THICK COPPER
SACRIFICIAL LAYER WITH HIGH SELECTIVE ETCHING RATIO
ELECTRODEPOSITION AND CHARACTERIZATION OF CONIMNP PERMANENT
MAGNET ARRAYS FOR MEMS APPLICATIONS
A POLYMER STACKING PROCESS WITH 3D ELECTRICAL ROUTINGS FOR
FLEXIBLE TEMPERATURE SENSOR ARRAY AND ITS HETEROGENEOUS
INTEGRATION
PIEZORESISTIVE BIOCOMPATIBLE MEMBRANES FOR FLEXIBLE PRESSURE
SENSORS
ONE STEP INTEGRATION OF GOLD COATED SENSORS IN OSTE POLYMER
CARTRIDGES BY LOW TEMPERATURE DRY BONDING
THE SENSITIVITY OF STICTION PERFORMANCE TO SURFACE CHEMISTRY
UNDER VARIOUS HUMIDITY REGIMES
ISOTROPIC ETCHING OF 111 SCS FOR WAFER-SCALE MANUFACTURING OF
PERFECTLY HEMISPHERICAL SILICON MOLDS
CONFORMAL COATING AND DEEP UV LITHOGRAPHY OF A POLY(GLYCIDYL
METHACRYLATE) THIN FILM FORMED BY INITIATED CHEMICAL VAPOR
DEPOSITION
EPOXY-LESS PACKAGING METHODS FOR ELECTRICAL CONTACT TO
PARYLENE-BASED FLAT FLEXIBLE CABLE
HERMETIC PACKAGING OF RESONATORS WITH VERTICAL FEEDTHROUGHS
USING A GLASS-IN-SILICON REFLOW PROCESS
INTEGRATION OF ORGANIC OPTO-ELECTROWETTING AND POLY(ETHYLENE)
GLYCOL DIACRYLATE (PEGDA) MICROFLUIDICS FOR DROPLET MANIPULATION
BIO-INSPIRED 3D SELF-PATTERNING OF FUNCTIONAL COATINGS FOR PDMS
MICROFLUIDICS
POLYMER MEMS FABRICATION PROCESS FOR SELF-ASSEMBLED MILLIMETERWAVE ON-CHIP ANTENNAS
DEVELOPMENT OF A “FLIP GLASS SUBSTRATE” LED PACKAGE TECHNOLOGY
FOR COLOR BIN YIELD AND VIEW ANGLE ENHANCEMENT
SUPPRESSION OF WEAR IN CYCLICALLY LOADED POLYCRYSTALLINE SILICON
MEMS VIA A THIN SILICON CARBIDE COATING
ORIENTATION-SPECIFIC SELF-ASSEMBLY AT AIR-WATER INTERFACE USING
MAGNETIC FIELD
NEGATIVE-PHOTORESIST MECHANICAL PROPERTY FOR NANO-FILTRATION
MEMBRANE EMBEDDED IN MICROFLUIDICS
OUT-OF-PLANE ASSEMBLY OF 3D NEURAL PROBE ARRAYS USING A
PLATFORM WITH SU-8-BASED THERMAL ACTUATORS
HIGH PERFORMANCE 18F- CONCENTRATION ELECTRODE FOR PET
APPLICATION BY USING INTERDIGITATED MICROSTRUCTURE AND PYROLYZED
POLYMER/GLASSY CARBON COMPOSITE
FABRICATION OF HIGH ASPECT RATIO CARBON NANOTUBE-CARBON
COMPOSITE MICROSTRUCTURES BASED ON SILICON MOLDING TECHNIQUE
DIELECTROPHORESIS FORMATION OF ELLIPSOIDAL PDMS MICRO-LENS
ARRAY DIAGONALLY ALIGNED ON FLEXIBLE MEMBRANE
UV LASER DICING WITHOUT FAILURE CAUSED BY CONTAMINATION AND HEAT
FOR THICK ANODICALLY BONDED SILICON/GLASS MEMS WAFERS
ABSTRACT # FORMAT
06-170
Poster
06-171
Poster
06-172
Poster
06-174
Oral
06-175
Oral
06-177
Poster
06-180
Poster
06-183
Poster
06-184
Poster
06-189
Oral
06-191
Poster
06-197
Poster
07-007
Oral
07-008
Oral
07-009
Oral
07-012
Poster
07-014
Poster
07-015
Oral
07-016
Poster
07-018
Poster
07-019
Poster
07-022
Poster
07-026
Oral
07-030
Oral
07-031
Poster
07-032
Oral
07-035
Poster
07-041
Poster
07-045
Poster
07-046
Poster
PAPER TITLE
PROGRAMMABLE MICROPATTERNING OF NANOFIBERS USING FLOATING
ELECTRODES FOR FUNCTIONAL TISSUE ENGINEERING
RAPID NON-LITHOGRAPHY BASED FABRICATION PROCESS AND
CHARACTERIZATION OF PARYLENE C BELLOWS FOR APPLICATIONS IN MEMS
ELECTROCHEMICAL ACTUATORS
ANODICALLY-BONDABLE LTCC SUBSTRATES WITH NOVEL NANO-STRUCTURED
ELECTRICAL INTERCONNECTION FOR MEMS PACKAGING
DIE-LEVEL TSV FABRICATION PLATFORM FOR CMOS-MEMS INTEGRATION
ELECTROLYTIC HYDROGENATION TECHNIQUE: NEW APPROACH FOR THE
MODIFICATION OF TI-FILM MECHANICAL PROPERTIES AND MEMS
APPLICATIONS
SIMIPLE AND LOW-COST PATTERNING OF CARBON NANOTUBE ON PDMS FOR
FLEXIBLE MEMS
FABRICATION AND TESTING OF CVD DIAMOND SINGLE-MATERIAL MEMS
RESONATORS WITH PIEZORESISTIVE DETECTION
NOVEL ISOTROPIC AND ANISOTROPIC ETCHING OF MEMS STRUCTURES BY
CONTROLLING THE DYNAMICS OF THE ETCHANT
A MAGNETOSTATIC 2-AXIS MEMS SCANNER WITH I-SECTION RIBREINFORCEMENT AND SLENDER PERMANT MAGNET PATTERNS
IMPROVED RELIABILITY OF SIC PRESSURE SENSORS FOR LONG TERM HIGH
TEMPERATURE APPLICATIONS
THE FABRICATION OF 3D ASPHERICAL SILICON MICROLENSES USING A
SHADOW MASK
MICROFLUIDIC CHANNELS FABRICATED USING A LITHOGRAPHY-FREE
METHOD
DESIGN EVALUATION OF SHOCK INDUCED FAILURE MECHANISMS OF MEMS
BY CORRELATION OF NUMERICAL AND EXPERIMENTAL RESULTS
CHARGE ACCUMUMLATION IN BULK PECVD DIELECTRIC MATERIALS USED
FOR ELECTROSTATIC RF MEMS SWITCHES
EXPERIMENTAL EVALUATION OF ALTERNATIVE DRIVE-MODE CONTROL
ELECTRONICS DEVELOPED FOR HIGH-PERFORMANCE MEMS GYROSCOPES
A PARYLENE-LED WINGBEATING INDICATOR FOR VISUAL REMOTE SENSING
ENGINEERING APPLICATION OF MEMS VECTOR HYDROPHONE AND SELFADAPTING ROOT-MUSIC ALGORITHM
EFM STUDY OF THE INFLUENCE OF HUMIDITY ON CHARGE INJECTION AND
CHARGE RELAXATION IN SILICON NITRIDE USED FOR ELECTROSTATICALLY
ACTUATED MEMS
CAPACITIVE DETECTION OF NANOLITER DROPLETS ON THE FLY INVESTIGATION OF ELECTRIC FIELD DURING DROPLET FORMATION USING
CFD-SIMULATION
TOWARDS MEASUREMENT OF THE CASIMIR FORCE BETWEEN PARALLEL
PLATES SEPARATED AT SUB-MICRON DISTANCE
THE INVESTIGATION OF POINT DEFECT MODES OF PHONONIC CRYSTAL FOR
HIGH Q RESONANCE
DYNAMIC OPTIMIZATION OF VALVELESS MICROPUMPS
SUBPIXEL TRANSLATION OF MEMS MEASURED BY DISCRETE FOURIER
TRANSFORM ANALYSIS OF CCD IMAGES
MIXED-LEVEL MODELING OF SQUEEZE FILM DAMPING IN MEMS: SIMULATION
AND PRESSURE-DEPENDENT EXPERIMENTAL VALIDATION
TIME-DEPENDENT CELL MEMBRANE DAMAGE UNDER MECHANICAL TENSION:
EXPERIMENTS AND MODELING
ANALYSIS OF ACOUSTIC RADIATION AND VISCOUS DAMPING ON THE
VIBRATION OF PIEZOEELCTRIC CIRCULAR MICRODIAPHRAGMS
USE OF A NEW ANISOTROPIC ETCHING SIMULATOR ON QUARTZ CRYSTAL
CHARACTERISTICS OF INVERTED PYRAMIDAL MICRODISCHARGE DEVICES
OPERATING IN CHF3 AND CHF3/AR FOR MASKLESS MICROPLASMA ETCHING
DESIGN OF PRECISION LIGHT INTENSITY MODULATION FOR LIGHTADDRESSABLE POTENTIOMETRIC SENSOR
THIN FILM THERMAL CONDUCTIVITY METROLOGY USING
PHOTOLUMINESCENCE OF QUANTUM DOTS
ABSTRACT # FORMAT
07-047
Poster
07-052
Poster
07-053
Poster
07-055
Poster
07-058
Poster
07-060
Poster
07-062
Poster
07-063
Oral
07-065
Poster
07-067
Poster
07-069
Poster
07-071
Poster
07-078
Poster
07-083
Oral
07-085
Poster
07-086
Oral
07-088
Oral
07-090
Poster
07-092
Poster
07-093
Poster
07-095
Poster
07-096
Poster
08-002
Poster
08-003
Poster
08-004
Oral
08-006
Poster
08-007
Oral
08-008
Poster
08-012
Poster
08-013
Oral
PAPER TITLE
A NOVEL STRESS ISOLATION GUARD RING DESIGN FOR THE IMPROVEMENT
OF THREE-AXIS PIEZORESISTIVE ACCELEROMETER
MODELING OF THE ELASTICITY OF CRYSTALLINE SILICON BASED ON A
LATTICE DYNAMICS APPROACH
ASSESSING POLYMER SORPTION KINETICS USING MICROMACHINED
RESONATORS
NONLINEAR AIR DRAG DAMPING OF TORSIONAL MICROSCANNERS
MICROFLUIDIC FLOW METER AND VISCOMETER UTILIZING FLOW-INDUCED
VIBRATION ON AN OPTIC FIBER CANTILEVER
EXTENDED TIMOSHENKO BEAM FORMULA FOR CELLULAR CONTRACTION
FOCE CALCULATION
DESIGN AND EXPERIMENTS OF A NANO-OPTO-MECHANICAL SWITCH USING
EIT-LIKE EFFECTS OF COUPLED-RING RESONATOR
A NOVEL TEST METHOD FOR SIMULTANEOUS MEASUREMENT OF THERMAL
CONDUCTIVITY, CTE, RESIDUAL STRESS AND YOUNG'S MODULUS OF
SUSPENDED THIN FILMS USING A LASER DOPPLER VIBROMETER
A NOVEL, SIMPLE, AND Q-INDEPENDENT SELF OSCILLATION LOOP DESIGNED
FOR VIBRATORY MEMS GYROSCOPES
INVESTIGATION OF TEMPORARY STICTION IN POLY-SIGE MICROMIRROR
ARRAYS
COMPREHENSIVE DYNAMIC AND STABILITY ANALYSIS OF ELECTROSTATIC
VIBRATION ENERGY HARVESTER (E-VEH)
THE MINIUMUM TIME ESTIMATION FOR INITIATING TUMOR-CELL ATTACHMENT
INTEGRATION AND INSTALLATION OF WATER-QUALITY MONITORING
NETWORK BASED ON MODEL-BASED DESIGN TECHNIQUE
A FRENKEL-POOLE MODEL OF DIELECTRIC CHARGING IN CMOS-MEMS
RATE AND RATE-INTEGRATING GYROSCOPE CONTROL SYSTEM USING
COMMERCIAL SOFTWARE DEFINED RADIO HARDWARE
A DESIGN OF LONGITUDINALLY-DIVIDED BALLOON STRUCTURE IN PDMS
PNEUMATIC BALLOON ACTUATOR BASED ON FEM SIMULATIONS
MECHANICAL REGULATION OF COLLECTIVE CELL BEHAVIOR VIA
MICROTOPOGRAPHIC SUBSTRATES
CMOS TEST CIRCUIT ARCHITECTURE FOR THE EXTRACTION OF FLUID
PROPERTIES USING INTERDIGITATED ELECTRODES MICROSENSORS
ELECTRICALLY DRIVEN CMOS-MEMS NONLINEAR PARAMETRIC RESONATOR
DESIGN USING A HIERARCHICAL MEMS CIRCUIT LIBRARY
DIRECT PICK AND PLACE OF CNT BUNDLES FOR STRAIN SENSING
APPLICATIONS
ANALYTICAL MODEL FOR PERTURBATION ANALYSIS IN COUPLED RESONATOR
SYSTEM FOR ELECTRONIC NOSE APPLICATIONS
MEASUREMENT OF ADHESION FORCE AT ELEVATED TEMPERATURES IN MEMS
USING THERMAL-STRUCTURAL ACTUATION
MICRO-BEAM ACTUATOR BASED ON CONDUCTING INTERPENETRATING
POLYMER NETWORKS: FROM PATTERNING PROCESS TO ACTUATION IN OPEN
AIR
A NOVEL SU-8 ELECTROTHERMAL MICROGRIPPER BASED ON TYPE
SYNTHESIS OF KINEMATIC CHAIN METHOD
A THREE-TERMINAL SINGLE-WALLED CARBON NANOTUBE THIN FILM MEMS
SWITCH FOR DIGITAL LOGIC APPLICATIONS
DESIGN AND CHARACTERIZATION OF A LOW-VOLTAGE PIEZOELECTRICACTUATED POLYMER MEMBRANE
3D OMNIDIECTIONAL CONTOLLABLE ELASTIC IPMC TWEEZER WITH SELFSENSING AND ADJUSTABLE CLAMPING FORCE ABILITIES FOR BIOMEDICAL
APPLICATIONS
A LATCHABLE HIGH-PRESSURE COMPOSITE VALVE ACTUATOR COMBINING
PARAFFIN AND A LOW MELTING POINT ALLOY
ELECTROMECHANICAL COUPLING OF POLYPYRROLE TRILAYER ACTUATORS
HYGROSCOPIC BIOMIMETIC TRANSDUCERS MADE FROM CNT-HYDROGEL
COMPOSITES
ABSTRACT # FORMAT
08-015
Poster
08-016
08-017
Poster
Oral
08-018
Poster
08-021
Poster
08-022
Poster
08-023
Oral
08-024
Poster
08-026
Poster
08-029
Poster
08-030
Poster
08-031
Poster
08-032
Poster
08-033
Oral
08-036
Poster
08-037
Poster
08-040
Poster
08-041
Poster
08-043
Poster
08-048
Poster
08-049
Poster
08-050
Oral
08-055
Poster
08-059
Poster
08-060
Oral
08-061
Poster
08-062
Poster
08-065
Poster
08-066
Oral
08-070
Poster
08-073
Poster
PAPER TITLE
NOVEL MINIATURIZATION ACTUATOR USING A SYMMETRIC PIEZOELECTRIC
PUSHER ELEMENT FOR POCKET SUN-TRACKING SYSTEM
GAN COMB-DRIBE ACTUATORS ON SI SUBSTRATE
NANO-OPTICAL LINEAR ACTUATOR UTILIZING GRADIENT OPTICAL FORCE
RAPID AND REPEATED BOLUS DRUG DELIVERY ENABLED BY HIGH
EFFICIENCY ELECTROCHEMICAL BELLOWS ACTUATORS
RELIABLE RF MEMS SWITCH FABRICATED WITH AN INNOVATIVE DIELECTRICLESS TECHNOLOGY
CYMBAL TYPE PIEZO-POLYMER-COMPOSITE ACTUATORS FOR ACTIVE
CANCELLATION OF FLOW INSTABILITIES ON AIRFOILS
DEVELOPMENT OF THE MICRO-MIRROR WITH LARGE SCANING ANGLE USING
FE-BASED METALLIC GLASS THIN FILM
A MICROGRIPPER WITH CHANGEABLE GRIPPING TIPS FOR MICRO AND NANO
MANIPULATION
WALKING OF A MAGNETICALLY BIPEDAL MICROROBOT
A MINIATURIZED OPTICALLY-INDUCED FLUORESCENCE-ACTIVATED CELL
SORTER
CONTROL OF THE RADIAL MOTION OF A SELF-PROPELLED MICROBOAT
THROUGHT A SIDE RUDDER
RAPID PROTOTYPING OF 3D MICROSTRUCTURES BY DIRECT PRINTING OF
LIQUID METAL AT TEMPERATURES UP TO 500°C USING THE STARJET
TECHNOLOGY
CHARACTERIZATION OF THE 2ND GENERATION MAGNETIC MICROBEARING
WITH INTEGRATED STABILIZATION FOR FRICTIONLESS DEVICES
A MICRO ELECTROSTATIC LINEAR ACCELERATOR BASED ON
ELECTROMAGNETIC LEVITATION
MONODISPERSE MICROPARTICLE GENERATION FROM AQUEOUS SOLUTIONS
INTEGRATED THIN-FILM PIEZOELECTRIC TRAVELING WAVE ULTRASONIC
MOTOR
A NANO-OPTICAL-MECHANICAL ACTUATOR DRIVEN BY OPTICAL RADIATION
FORCE
DISPOSABLE MICROFLUIDIC VACUUM MODULES USING INDUCTIVELY
TRIGGER TRANSFORMATIVE POLYMERS FOR POINT-OF-CARE DIAGNOSTICS
A HYBRID VERTICAL COMB-DRIVE ACTUATOR SUPPORTED BY FLEXIBLE PDMS
SUSPENSIONS
SILICON LINKAGE WITH NOVEL COMPLIANT MECHANISM FOR PIEZOELECTRIC
ACTUATION OF AN INTRAOCULAR IMPLANT
THERMALLY–ACTUATED HIGH SPEED DROPLET MANIPULATION PLATFORM
NANO-ELECTROMECHANICAL STORAGE ELEMENT FOR A LOW-POWER
COMPLIMENTARY LOGIC ARCHITECTURE USING PZT SWITCHES
THREE AXIS TACTILE DISPLAY USING PDMS PNEUMATIC ACTUATOR FOR
ROBOT ASSISTED SURGERY
BATCH MICROFABRICATED BIDIRECTIONAL DIELECTRIC ELASTOMER
ACTUATORS
A NOVEL TWEEZERS USING ACOUSTICALLY EXCITED OSCILLATING TWIN
BUBBLES
A DRUG-INJECTION SYSTEM WITH CHEMO-MECHANICAL ENERGY
CONVERSION FOR ACTIVE FEEDBACK CONTROL OF GLUCOSE
CONCENTRATION IN A BLOOD
MICROFLUIDIC ACTUATORS BASED ON INFRARED-LIGHT RESPONSIVE
PNIPAAM HYDROGEL NANOCOMPOSITE INCORPORATING GRAPHENE-OXIDE
LIGHT-CONTROLLED MIGRATION OF D.DISCOIDEUM SLUGS IN
MICROFABRICATED CONFINEMENTS
A FUNCTIONAL MICROPROBE INTEGRATED WITH SHARP TIP AND HUGE
DEFLECTION CRANK SLIDER STRUCTURAL CANTILEVER FOR VERSATILE
INSTRUMENT
NI-BASED MICROVALVES FOR FLOW MODULATION: TOWARD ACTIVE
COMBUSTION CONTROL
EFFICIENT ELECTROSTATIC INCHWORM MOTORS WITH SIMPLE CONTROL AND
HIGH FORCE DENSITY
ABSTRACT # FORMAT
08-077
Poster
08-079
Poster
08-081
Poster
08-082
Poster
09-001
Poster
09-002
Poster
09-005
Poster
09-008
Oral
09-009
Poster
09-011
Poster
09-015
Poster
09-019
Poster
09-020
Oral
09-023
Poster
09-025
Oral
09-027
Poster
09-029
Oral
09-033
Poster
09-036
Oral
09-039
Oral
09-040
Oral
09-042
Oral
09-044
Poster
09-045
Poster
09-048
Poster
09-052
Oral
09-053
Poster
09-055
Poster
09-057
Poster
09-058
Poster
09-059
Poster
PAPER TITLE
CHEMICAL SWITCHING OF MICRO JELLYFISH-SHAPED ROBOT CONSISTING
ONLY OF CARDIOMYOCYTE GEL
ACTIVE CMOS-MEMS CONDUCTIVE PROBES AND ARRAYS FOR TUNNELINGBASED ATOMIC-LEVEL SURFACE IMAGING
RESONANT STATOR ACTUATION OF GEAR COUPLED ULTRASONIC MOTORS
ALL-ELECTRICAL PERISTATIC VACUUM PUMP UTILIZING ELECTROMAGNETIC
AND HYDRAULIC ACUTATION WITH A HIGHLY FLEXIBLE LATEX MEMBRANE
FREQUENCY TUNING OF ALN MICROMECHANICAL RESONATORS
INFLUENCE OF THE A-F EFFECT ON THE TEMPERATURE STABITILY OF SILICON
MICROMECHANICAL RESONATORS
VERIFICATION OF THE PHASE-NOISE MODEL FOR MEMS OSCILLATORS
OPERATING IN THE NONLINEAR REGIME
ENCAPSULATED MECHANICALLY COUPLED FULLY-DIFFERENTIAL BREATHEMODE RING FILTERS WITH ULTRA-NARROW BANDWIDTH
MICRO DISK RESONATOR WITH ON-DISK PIEZOELECTRIC THIN FILM
TRANSDUCERS FOR INTEGRATED MEMS UBIQUITOUS APPLICATIONS
NOVEL MEMS OSCILLATOR USING IN-PLANE DISK RESONATOR WITH SENSING
PLATFORM AND ITS MASS SENSING CHARACTERISTICS
AN EWOD DRIVEN MILLIMETER-WAVE PHASE SHIFTER USING A MOVABLE
ULTRASOFT METALIZED PDMS GROUND PLANE
NOVEL FREQUENCY AGILE ELECTROMAGNETIC DECOUPLING MEMS DEVICE
BATTERY-FREE WIRELESS TOUCH DRIVEN TRANSMITTER WITH ON-CHIP
ANTENNAS FOR WIRELESS SENSOR SYSTEMS
PIEZOELECTRIC ALN MEMS RESONATORS WITH HIGH COUPLING
COEFFICIENT
SPONTANEOUS OSCILLATION DUE TO CHARGING EFFECT IN MEMS RF
SWITCHES
WIDEBAND TUNABLE LOVE WAVE FILTER USING ELECTROSTATICALLYACTUATED MEMS VARIABLE CAPACITORS INTEGRATED ON LITHIUM NIOBATE
VERY HIGH FREQUENCY DOUBLE-ENDED TUNING FORK NANO-MECHANICAL
FIN-FET RESONATOR
DOUBLING FREQUENCY RESPONSE USING SYNCHRONIZED OSCILLATION IN
MECHANICALLY COUPLED OPPOSITE C-SHAPED CANTILEVER-BASED
OSCILLATORS
3-D MICROCOILS AS A METAMATERIAL WITH ELECTRIC AND MAGNETIC
RESPONSE
RF MEMS SWITCHES INTEGRATED WITH SEALED SUSPENDED COPLANAR
WAVEGUIDES FOR RECONFIGURABLE RF CIRCUITS
HIGH-Q, LARGE-STOPBAND-REJECTION INTEGRATED CMOS-MEMS OXIDE
RESONATORS WITH EMBEDDED METAL ELECTRODES
WLAN(IEEE 802.11N)/M-WIMAX(IEEE 802.16E) 2×2 MIMO FRONT-END MODULE
USING MEMS & LTCC TECHNOLOGY
PIEZOELECTRIC MICRO-SCALE TUNING FORK RESONATORS FOR SENSING
APPLICATIONS
CMOS-MEMS TRANSVERSE-MODE SQUARE PLATE RESONATOR WITH HIGH Q
AND LOW MOTIONAL IMPEDANCE
A TUNABLE LASER USING DOUBLE-RING RESONATOR EXTERNAL CAVITY VIA
FREE-CARRIER DISPERSION EFFECT
ONE-DIMENSIONAL LINEAR ACOUSTIC BANDGAP STRUCTURES FOR
PERFORMANCE ENHANCEMENT OF ALN-ON-SILICON MICROMECHANICAL
RESONATORS
A DRY ETCHING METHOD USING DOUBLE-LAYERED ETCHING MASK FOR
MODULATING SHAPE OF DEEP-ETCHED QUARTZ SURFACE
QUALITY FACTOR ENHANCEMENT IN LAMB WAVE RESONATORS UTILIZING ALN
PLATES WITH CONVEX EDGES
A STATE-CONVERTING INLINE RF MEMS POWER SENSOR USING GAAS MMIC
TECHNOLOGY
LATERALLY-EXCITED SILICON BULK ACOUSTIC RESONATORS WITH SIDEWALL
ALN
LORENTZ FORCE TRANSDUCTION FOR RF MICROMECHANICAL FILTERS
ABSTRACT # FORMAT
09-060
Oral
09-062
Poster
09-063
Poster
09-064
Oral
09-066
Poster
09-067
Poster
09-073
Poster
09-074
Poster
09-079
Oral
09-085
Oral
09-086
Oral
09-088
Oral
09-090
Poster
09-092
Poster
10-002
Poster
10-009
Poster
10-011
Oral
10-012
Poster
10-014
Poster
10-015
Poster
10-017
Poster
10-021
Oral
10-023
Poster
10-026
Poster
10-027
Poster
10-030
Poster
10-032
Oral
10-034
Poster
10-036
Poster
10-038
10-044
Oral
Poster
PAPER TITLE
OPTO-ACOUSTIC OSCILLATOR USING SILICON MEMS OPTICAL MODULATOR
RELIABLE LOW-COST FABRICATION AND CHARACTERIZATION METHODS FOR
MICROMECHANICAL DISK RESONATORS
A LONG-TERM RELIABILITY ANALYSIS OF A CREEP IMMUNE RF-MEMS
TUNABLE CAPACITOR
VOLTAGE PROGRAMMABLE DUAL-BAND BANDPASS/BANDSTOP FILTER
RESPONSE IN A SINGLE MICRO-ELECTRO-MECHANICAL DEVICE
ELECTROTHERMALLY ACTUATED RF MEMS CAPACITIVE SWITCH WITH ATOMIC
LAYER DEPOSITED (ALD) DIELECTRICS
DIFFERENTIAL-INPUT PIEZORESISTIVELY-SENSED SQUARE-EXTENSIONAL
MODE RESONATOR FOR PARASITIC FEEDTHROUGH CANCELLATION
NANOSCALE INVESTIGATION OF DIFFERENT STICTION MECHANISMS IN
ELECTROSTATIC MEMS BASED ON ADHESION AND FRICTION MEASUREMENTS
MILLIMETER-WAVE FILTER USING NOVEL MICROMACHINED SUSBRATE
INTEGRATED WAVEGUIDE STRUCTURE WITH EMBEDDED SILICON VIAS IN BCB
DIELECTRICS
ON-CHIP RF INDUCTORS WITH MAGNETIC NANO PARTICLES MEDIUM
HIGH-PERFORMANCE BULK-MODE GALLIUM NITRIDE RESONATORS AND
FILTERS
A 1.75 GHZ PIEZOELECTRICALLY-TRANSDUCED SIC LATERAL OVERTONE BULK
ACOUSTIC-WAVE RESONATOR
ENGINEERING OF ACOUSTIC META-MATERIALS WITH APPLICATION TO MEMS
BAW RESONATORS
ULTRA HIGH FREQUENCY FRACTAL PHONONIC CRYSTAL IN SILICON CARBIDE
INDEPENDENT TUNING OF QUALITY FACTOR AND RESONANT FREQUENCY OF
TORSIONAL MICRO-RESONATORS FOR TIMING AND SENSING APPLICATIONS
MODE-SELECTIVE OPTICAL FILTERING AND WAVELENGTH-SELECTIVE
SWITCHING THROUGH FABRY-PEROT CAVITY WITH CYLINDRICAL
REFLECTORS
SPECKLE REDUCTION IN LASER DISPLAYS USING A MEMS TANDEM
MODULATOR
INTERFEROMETRIC MODULATORS USING MECHANICALLY COUPLED MIRROR
ACTUATORS FOR COLOR REPRODUCTION
A NOVEL ELECTROMAGNETIC MICROACTUATOR WITH LATERAL MAGNETIOSTATIC FORCE FOR SCANNING MICROMIRROR DEVICE
MICROMACHINED ARRAY-TYPE MIRAU INTERFEROMETER FOR MEMS
METROLOGY
A THERMAL TUNABLE BULK-MICROMACHNIED OPTICAL FILTER
MICRO-MIRRORS CONNECTED IN SERIES FOR LOSS-MECHANISM STUDY AND
LOW-VOLTAGE OPERATION
A MICROMACHINED OPTICAL DELAY LINE BY SWITCHABLE METAMATERIALS
DESIGN, FABRICATION, AND VACUUM PACKAGE PROCESS FOR HIGH
PERFORMANCE OF 2D SCANNING MEMS MICROMIRROR
A NOVEL DUAL SCREEN PROJECTION SYSTEM USING BALANCE-TYPE
MICROMIRROR WITH PIEZOELECTRIC ACTUATOR
NOVEL ULTRA-LIGHTWEIGHT AND HIGH-RESOLUTION MEMS X-RAY OPTICS
FOR SPACE ASTRONOMY
VARIFOCAL SCANNING MICRO-MIRROR FABRICATED FROM SILICON-ONINSULATOR WAFER
ELECTROSTATIC TORSIONAL VERTICAL FLAPS FOR REFLECTIVE MEMS
DISPLAY
METAL-BASED PIEZOELECTRIC MEMS SCANNER MIRRORS COMPOSED OF
PZT THIN FILMS ON TITANIUM SUBSTRATES
PROCESS OPTIMIZATION AND PERFORMANCE ANALYSIS OF AN
ELECTROSTATICALLY ACTUATED VARIFOCAL LIQUID LENS
ON-CHIP OPTICAL POWER MEASUREMENT BY OPTICAL FORCE
A NANO-OPTICAL-MECHANICAL RING RESONATOR PRESSURE SENSOR
ABSTRACT # FORMAT
10-050
Poster
10-051
Poster
10-053
Oral
10-054
Poster
10-055
Poster
10-056
Poster
10-057
Poster
10-058
Poster
10-059
Poster
10-061
Oral
10-066
Poster
10-067
Poster
10-068
Poster
10-070
Poster
10-071
Poster
10-072
Poster
10-073
Poster
10-074
Poster
10-075
Oral
10-078
Poster
10-079
Poster
10-080
Poster
10-082
Poster
10-084
Oral
10-085
Oral
10-087
Poster
10-088
Oral
10-090
Poster
10-091
Oral
10-094
Poster
10-095
Poster
PAPER TITLE
HOLLOW CORE MOEMS BRAGG GRATING MICROPHONE FOR DISTRIBUTED
AND REMOTE SENSING
2D IMAGING WITH 1D LED ARRAY INTEGRATED FR4 ACTUATOR
MICROFABRICATION AND PACKAGING OF A RUBIDIUM VAPOR CELL AS A
PLASMA LIGHT SOURCE FOR MEMS ATOMIC CLOCKS
MICRO-OPTO-MECHANICAL TECHNOLOGY FOR THE FABRICATION OF HIGHLY
MINIATURIZED FIBER-OPTIC ULTRASONIC DETECTORS
CONTINUOUS MEMBRAN DEFORMABLE MIRROR FOR ADAPTIVE OPTICS
USING BIMORPH SPRING
A MONOLITHIC MEMS MICHELSON INTERFEROMETER FOR FTIR
SPECTROSCOPY
A NOVEL VACUUM-PACKAGED LOW-POWER SCANNING MIRROR WITH
INCLINED 3D-SHAPED WINDOW
TUNABLE PHOTONIC CRYSTAL WITH 50 NANOMETER TUNING RANGE AND 100
MILLISECOND RESPONSE TIME
CAVITY OPTOMECHANICAL SENSORS
PHOTOTHERMAL NANOBLADE FOR LARGE CARGO DELIVERY INTO
MAMMALIAN CELLS
AN APODIZED SURFACE GRATING COUPLER ENABLING THE FABRICATION OF
SILICON PHOTONIC NANOWIRE SENSOR CIRCUITS IN ONE LITHOGRAPHY
STEP
TRANSMISSIVE COLOR SHIFT THROUGH LAYERED SUB-WAVELENGTH
GRATINGS BASED ON PLASMON ENHANCED COUPLING
INTEGRATED TRACKING AND FOCUSING MICRO LENS ACTUATORS BASED ON
SILICON BULK MICROMACHINING
BISTABLE OPTOFLUIDIC ATTENUATOR WITH INTEGRATED ELECTROWETTING
ACTUATION AND HIGH DYNAMIC RANGE
LOW POWER PECVD SIC DELAY LINES FOR OPTICAL COHERENCE
TOMOGRAPHY IN THE VISIBLE
ADAPTIVE PIEZOELECTRIC AXICON MIRRORS FOR HIGH POWER
FEMTOSECOND LASER APPLICATIONS
SPATIAL AND TEMPORAL MODULATION OF PICOSECOND X-RAYS USING MEMS
SPATIAL LIGHT MODULATORS TO PROBE MATERIALS AT THE NANOSCALE
MULTIFUNCTIONAL OPTICAL MEMS SENSOR PLATFORM FOR WIRELESS
OPTICAL SENSOR NETWORKS
"BOTTOM-UP" THREE DIMENSIONAL METAMATERIALS AT TERAHERTZ
FREQUENCIES
1-D ELECTRO-OPTIC BEAM STEERING DEVICE
A MECHANICAL RESONANT 2-D OPTICAL SCANNER USING PZT BASED PUSHPULL ACTUATOR
SILICON BULKMICROMACHINED PIEZOELECTRICALLY ACTUATED CORNER
CUBE RETROFLECTOR
A MICRO CAMERA UTILIZING A MICROLENS ARRAY FOR MULTIPLE VIEWPOINT
IMAGING
MULTISPECTRAL ANALYSIS OF CANCER CELLS USING QUANTUM DOT LEDS
PATTERNED ON-CHIP
CORTICAL BLOOD FLOW IMAGING WITH A PORTABLE MEMS BASED 2-PHOTON
FLUORESCENCE MICROENDOSCOPE
INDIRECT WAVELENGTH SELECTIVE INFRARED EMITTER USING SURFACE
PLASMON POLARITON
FRONTSIDE-ONLY PROCESSING OF 2-D MEMS SCANNERS FOR MINIATURE
DUAL-AXIS CONFOCAL MICROENDOSCOPES
TUNABLE SOLID-BODY ELASTOMERIC DIFFRACTIVE LENS
LENS SCANNING BASED MEMS CATHETER FOR FORWARD ENDOSCOPIC
OPTICAL COHERENCE TOMOGRAPHY
NANOPLASMONIC PHOTOCONDUCTIVE ANTENNA FOR HIGH POWER
TERAHERTZ EMISSION
SILICON/III-V MATERIAL ACTIVE LAYER HETEROINTEGRATED VERTICAL PIN
WAVEGUIDE PHOTODIODE BY DIRECT BONDING
ABSTRACT # FORMAT
10-096
Oral
10-102
Poster
10-103
Poster
10-106
Poster
10-109
Oral
10-111
Poster
10-112
Poster
10-113
Oral
10-115
Poster
10-118
Poster
10-119
Poster
10-121
Poster
10-122
Oral
10-123
Poster
10-124
Poster
10-125
Poster
10-127
Oral
10-128
10-129
Oral
Oral
10-130
Poster
10-131
Poster
11-001
Poster
11-003
Poster
11-004
Oral
11-005
Poster
11-006
Poster
11-009
Poster
11-010
Oral
11-012
Oral
11-013
Poster
11-015
Poster
11-017
Poster
PAPER TITLE
HIGHLY EFFICIENT LED LENS BIOLOGICALLY INSPIRED FROM CUTICLE
NANOSTRUCTURES OF FIREFLY LIGHT ORGANS
TIO2 FREESTANDING THIN FILM AS EVANESCENT WAVEGUIDE SENSOR FOR
BIOMEDICAL APPLICATION
INCORPORATION OF POLYMER REFRACTIVE MICROLENS ARRAY FOR
EFFICIENCY IMPROVEMENT OF CUINS2 QUANTUM DOT-BASED HYBRID PV
CELLS
SWITCHABLE PHOTONIC CRYSTALS BASED ON THE PHOTONIC
DEFORMATIONS OF
ACOUSTIC SPEAKER BASED ON HIGH-EFFICIENCY BROADBAND NANO-PILLAR
PHOTONIC CRYSTAL OPTO-THERMO-MECHANICAL MEMS EXCITATION
A COMPACT PROJECTION SYSTEM ENABLING TOPOGRAPHICAL
MEASUREMENTS FOR A MINIATURIZED SUBMERSIBLE EXPLORER
MEMS MIRRORS BASED ON CURVED CONCENTRIC ELECTROTHERMAL
ACTUATORS WITH VERY SMALL LATERAL SHIFT AND TILT
SPR PHOTO DIODE DETECTOR USING TRANSPORTATION PHENOMENON OF
PHOTON AND ELECTRON COUPLING
A WIRELESS PAIRED EMITTER DETECTOR DIODE DEVICE AS OPTICAL SENSOR
FOR LAB-ON-A-DISC APPLICATIONS
ELECTROLUMINESCENCE FROM A FREESTANDING INTEGRATABLE SIGNLE
ZNO QUANTUM DOT
INTEGRATED SELF-ALIGNED TIPS FOR DISPERSION TUNING IN A PHOTONIC
CRYSTAL MICRO-CAVITY
DUAL-BAND MEMS FABRY-PÉROT FILTER WITH TWO MOVABLE
REFLECTORS FOR MID- AND LONG-WAVE INFRARED MICROSPECTROMETERS
PORTABLE ORAL CANCER DETECTION USING MINIATURE CONFOCAL IMAGING
PROBE WITH LARGE FIELD OF VIEW
MEMS SCANNER BASED HANDHELD FLURORESCENT HYPERSPECTRAL
IMAGING SYSTEM
A HIGH-SPEED ELECTROSTATIC DOUBLE-LAYERED VIBRATORY GRATING
SCANNER WITH VERY HIGH OPTICAL RESOLUTION
DESIGN AND FABRICATION OF 2D FAST ELECTROTHERMAL MICROMIRRORS
WITH LARGE SCAN RANGE AND SMALL CENTER SHIFT
ALL-OPTICAL PROGRAMMABLE PHOTONIC INTEGRATED CIRCUIT: AN OPTICAL
ANALOGY TO ELECTRONIC FPGA
“MEMSEYE” FOR OPTICAL 3D POSITION AND ORIENTATION MEASUREMENT
REFLECTANCE-BASED TIO2 PHOTONIC CRYSTAL SENSORS
POLYMER-DISPERSED LIQUID CRYSTAL (PDLC) BASED LIGHT SHUTTER
DRIVEN BY SURFACE ACOUSTIC WAVES
ULTRA-COMPACT ELECTRO-THERMALLY TUNABLE PHOTONIC CRYSTAL PRISM
FOR ON-CHIP OPTICAL ROUTER APPLICATION
FORMATION OF SILICON NANO TIPS USING POST SAM-BASED WET ETCHING
HIGH PERFORMANCE SURFACE-TENSION-DRIVEN CAPILLARY PUMPING
BASED ON LAYER-BY-LAYER SELF-ASSEMBLY OF TIO2 NANOPARTICLES
REDUCING STICTION IN MICROELECTROMECHANICAL SYSTEMS BY
NANOMETER-SCALE FILMS GROWN BY ATOMIC LAYER DEPOSITION
WAFER-SCALE AU MEMBRANES WITH SUB-ΜM HOLE ARRAYS
HYBRID SOLAR CELL BASED ON CDSE NANOCRYSTAL AND CONJUGATED
POLYMER
ENHANCED ELECTRO-MECHENICAL PERFORMANCE OF TIO2 NANO-PARTICLE
MODIFIED POLYDIMETHYLSILOXANE (PDMS) AS ELECTROACTIVE POLYMERS
NANOELECTROMECHANICAL SWITCHES BASED ON DIAMOND-ON-DIAMOND
ELECTRICAL CATCHING AND TRANSFER OF NANOPARTICLES VIA NANOTIP
SILICON PROBE ARRAYS
ELECTRICAL INSULATION OF CARBON NANOTUBE SEPARATION COLUMNS
FOR MICROCHIP ELECTROCHROMATOGRAPHY
TECHNOLOGY AND CHARACTERISTICS OF MICROHUMIDITY SENSORS
SUSPENDED CARBON NANOTUBE THIN FILM STRUCTURES WITH A HIGH
DEGREE OF ALIGNMENT FOR NEMS SWITCH APPLICATIONS
ABSTRACT # FORMAT
11-018
Oral
11-019
Poster
11-022
Poster
11-023
Poster
11-024
Poster
11-025
Poster
11-030
Poster
11-031
Oral
11-033
Oral
11-035
Poster
11-038
Oral
11-039
Oral
11-040
Poster
11-048
Poster
11-050
Poster
11-058
11-059
Oral
Poster
11-071
Poster
11-073
Poster
11-074
Poster
11-076
Poster
11-077
Poster
11-079
Oral
11-083
Poster
11-084
Poster
11-089
Poster
11-092
Poster
11-096
Oral
11-098
Oral
11-099
Poster
11-100
Oral
11-102
Poster
11-104
Oral
PAPER TITLE
GRAPHITIZATION OF N-TYPE POLYCRYSTALLINE SILICON CARBIDE AND ITS
APPLICATION FOR MICRO- SUPERCAPACITORS
MEASUREMENT OF SHEAR STRESS BETWEEN SINGLE-WALL CARBON
NANOTUBES AND SUBSTRATES USING NEMS DEVICES
A NEW PLATFORM FOR ASEEMBLY OF CARBON NANOTUBES ON NANO
SENSORS BY UTILIZING OPTICALLY-INDUCED DIELECTROPHORESIS AND
DIELECTROPHORESIS
GROWTH OF HORIZONTALLY ALIGNED CARBON NANOTUBES FROM
DESIGNATED SIDEWALL OF DRIE-ETCHED SILICON TRENCH
WAFER–LEVEL FABRICATION OF NANOSCALE PATTERNED SAPPHIRE
SUBSTRATES WITH BROADBAND OPTICAL TRANSMITTANCE
DIELECTRIC CONSTANTS OF PDMS NANOCOMPOSITES BY CONDUCTING
POLYMER NANOWIRES
VERTICAL SILICON NANO-PILLAR FOR NON-VOLATILE MEMORY
PROGRAMMABLE TRANSFORMATION OF VERTICALLY ALIGNED CARBON
NANOTUBES INTO 3D MICROSTRUCTURES
ULTRASENSITIVE PRESSURE SENSOR BASED ON GATE- ALL-AROUND
NANOWIRE FET
PARTICLE TRAPPING AND MANIPULATION BY DOUBLE COUPLED RING
RESONATORS (DCRR) THROUGH WAVELENGTH TUNING
GRAPHENE-BASED MICROELECTRODE FOR RECORDING NEURAL SIGNALS
NANOCRYSTALLINE SIC METAL-SEMICONDUCTOR-METAL PHOTODETECTOR
WITH ZNO NANOROD ARRAYS FOR HIGH TEMPERATURE APPLICATIONS
IC COMPATIBLE TOP DOWN PROCESS FOR SILICON NANOWIRE FET ARRAYS
WITH THREE {100} SURFACES FOR (BIO) CHEMICAL SENSING
LIGHT-ACTUATED CNT-DOPED ELASTOMER BLISTERS TOWARDS BRAILLE
DOTS
INTEGRATION OF PRE-SYNTHESIZED SINGLE NANOWIRES INTO MEMS
DEVICES
A NEMS OPTICAL SWITCH DRIVEN BY OPTICAL FORCE
CHEMO-RESISTIVITY OF SOLID STATE LAYERS OF PORPHYRIN NANOTUBES
MAGNETORESISTANCE BEHAVIORS OF UNDOPED AND N-DOPED GRAPHENE
GROWN BY CVD METHOD
DIAGNOSTIC OF MICROPLASMA REACTOR FOR SCANNING PLASMA ETCHING
ELECTROSTATIC GATING OF ION AND MOLECULE TRANSPORT THROUGH A
NANOCHANNEL-ARRAY MEMBRANE
PROTECTIVE ENCASEMENT OF BATCH-FABRICATED NANOMAGNETS FOR SUBNANOMETER SCANNED-PROBE MAGNETIC RESONANCE IMAGING
FUNCTIONALIZATION OF CERAMIC LIPOSOMAL NANOPARTICLES,
CERASOMES, WITH ANTIBODIES
THREE DIMENSIONAL NANOSCALE FABRICATION AND MODELING OF DYNAMIC
MODE MULTIDIRECTIONAL UV LITHOGRAPHY
3D MICROELECTRODE BASED ON INTEGRATED MICRO AND
NANOARCHITECTURES
FABRICATION OF PLASMA PROBE FOR CHEMICAL VAPOR DEPOSITION
CARBON NANOTUBE ARRAY AS REMOVABLE SOLID ADHESIVE FOR HIGH
TEMPERATURE SILICON PROCESSING
FABRICATION OF 3D HYBRID POLYMER-MAGNETITE NANOSTRUCTURES WITH
GEOMETRIC SHAPE ANISOTROPY
DENSELY PACKED CARBON NANOTUBE FOREST ON SILICON SUBSTRATE
SELF-ALIGNED DOUBLE-GATE SUSPENDED-BODY CARBON NANOTUBE FIELDEFFECT-TRANSISTORS FOR RF APPLICATIONS
NANO-PHOTONIC DISPLACEMENT SENSING MECHANISM
AUTONOMOUS PASSIVE LIGHT TRACKING UTILIZING SINGLE-WALL CARBON
NANOTUBE ENHANCED OPTO-THERMO-MECHANICAL ELASTOMER
ACTUATORS
2D PHOTONIC CRYSTAL TM POLARIZER FABRICATED BY ONE-STEP COMBINED
NANOIMPRINT AND PHOTOLITHOGRPAHY
BIONANO CRYSTALLIZAITON OF POLY-SI FILM FOR INCREASING TENSILE
STRESS IN MEMS/NEMS DEVICE STRUCTURES
ABSTRACT # FORMAT
11-109
Poster
11-114
Oral
11-123
Oral
11-124
Oral
11-126
Oral
11-128
Oral
11-133
Poster
11-134
Poster
11-135
Poster
11-141
Poster
11-144
Poster
11-148
Poster
11-150
Poster
11-152
Poster
11-153
Oral
11-155
Oral
11-158
Oral
11-161
Poster
11-162
Poster
11-163
Poster
11-164
Oral
11-165
Poster
11-166
Poster
11-168
Poster
12-001
Poster
12-014
12-015
Poster
Poster
12-017
Oral
12-021
Poster
12-023
Poster
12-024
Poster
12-025
Oral
PAPER TITLE
AMBIPOLAR SI NANOWIRE FIELD EFFECT TRANSISTORS FOR LOW CURRENT
AND TEMPERATURE SENSING
‘PICKUP AND PLACE’ INTEGRATION METHOD OF BRIDGING CARBON
NANOTUBES BY STAMPING TRANSFER
STRUCTURAL AND THERMOELECTRIC CHARACTERIZATION OF INDIVIDUAL
SINGLE CRYSTALLINE NANOWIRES
BIOASSISTED SELECTIVE-CAPTURE AND RELEASE OF NANOPARTICLES
TOWARD APPLICATION ON MICROFLUIDIC DEVICES
LAYER-BY-LAYER DEPOSITION OF COLLOIDAL SEMICONDUCTOR
NANOCRYSTALS FOR INTEGRATION OF INFRARED PHOTON-DETECTORS ON
3D TOPOGRAPHY
MONOLITHIC INTEGRATION OF NEMS TUNABLE COLOR FILTER AND LSI
DRIVER CIRCUITS
CARBON NANOTUBE BASED MULTI-SPECTRUM INFRARED DETECTOR ARRAY
NANOGAP-CONTROLLABLE SELF-ASSEMBLY OF GOLD NANOPARTICLES
USING NANOTRENCH TEMPLATE
AXIALLY STRETCHED NANO-THICK PIEZORESISTIVE SILICON CLAMPEDBEAMS TO SENSE SPECIFIC-REACTION-INDUCED DOUBLE-SIDE SURFACESTRESS WITH MUCH HIGHER SENSITIVITY THAN CANTILEVERS
DESIGN, FABRICATION AND HELIUM ION MICROSCOPE PATTERNING OF
SUSPENDED NANOMECHANICAL GRAPHENE STRUCTURES FOR NEMS
APPLICATIONS
ELECTRON-BEAM EFFECT ON ELECTRICAL CHARACTERIZATION OF
INDIVIDUAL NANOWIRES INSIDE SCANNING ELECTRON MICROSCOPE
NANOPROBE ELECTRODES CUT BY PHYSICAL STRETCH OF PARYLENEINSULATED CARBON NANOTUBE BRIDGES
DIRECT GROWTH OF SINGLE WALLED CARBON NANOTUBES ON PAPER
HIGH PERFORMANCE BIOFUEL CELLS WITH TAILORING CARBON-BASED THIN
FILM NANOCATALYSTS
HIGHLY SENSITIVE BILAYER STRUCTURED GRAPHENE SENSOR
IMPLEMENTATION OF INDUCTIVE PROXIMITY SENSOR USING NANOPOROUS
ANODIC ALUMINUM OXIDE LAYER
GATE-ALL-ARROUND SINGLE-CRYSTALLINE SILICON NANOWIRE
AN ULTRA-SENSITIVE NANOCOMPOSITE PRESSURE SENSOR PATTERNED IN A
PDMS DIAPHRAGM
LARGE-SURFACE-AREA 3D SELF-ASSEMBLED NANO-POROUS STRUCTURE
FOR HIGH-SENSITIVITY GAS-SENSING
MULTI-SPACER TECHNIQUE FOR LOW-VOLTAGE, HIGH-ASPECT-RATIO
LATERAL ELECTROSTATIC ACTUATORS
OPTIAL MEASUREMENT OF STRAIN USING SCATTERING FROM
NANOPARTICLE PAIRS ON ELASTOMER
DUAL SIDEWALL LATERAL NANOELECTROMECHANICAL RELAYS WITH BEAM
ISOLATION
CMOS-MEMS ATOMIC FORCE MICROSCOPE
MULTIPLE-MODE ELECTROMECHANICAL RESONATORS BASED ON
NANOSCALE THIN SIC MEMBRANES
A SELF-SUSTAINING PYROELECTRIC ENERGY HARVESTER UTILIZING SPATIAL
THERMAL GRADIENTS
A NOVEL FLAT HIGH PERFORMANCE MICRO ENERGY HARVESTER
A MICRO ENERGY HARVESTER WITH 3D WIREBONDED MICROCOILS
GREEN VEHICLE SHOCK ABSORBER: MICROMACHINED WAVY SHAPED
PIEZOELECTRIC CUSHION ENERGY HARVESTER AND ITS POWER
GENERATING DEMONSTRATION BASED ON REAL NAVIGATION
THERMAL ENERGY HARVESTING USING SHAPE MEMORY/PIEZOELECTRIC
COMPOSITES
A NEW APPROACH OF A SHAPE-OPTIMIZED PIEZOELECTRIC MEMS
GENERATOR FOR FLUID-ACTUATED ENERGY SCAVENGING
POWER SWITCH SYSTEM BASED ON MICROELECTROMECHANICAL SWITCH
DESIGN AND MICROFABRICATION OF INTEGRATED MAGNETIC MEMS ENERGY
HARVESTER FOR LOW FREQUENCY APPLICATION
ABSTRACT # FORMAT
12-030
Oral
12-031
Oral
12-033
Poster
12-034
Poster
12-036
Poster
12-038
Poster
12-043
Poster
12-044
Oral
12-047
Poster
12-048
Poster
12-053
Oral
12-056
Oral
12-057
Poster
12-060
Poster
12-061
Poster
12-068
Poster
12-069
Poster
12-072
Poster
12-077
Poster
12-078
Oral
12-080
Oral
12-082
Oral
12-084
Poster
12-085
Poster
12-086
Poster
12-089
Poster
12-091
12-096
Poster
Poster
12-097
Poster
12-098
Poster
12-100
Oral
PAPER TITLE
A MILLIMETER-SIZED ELECTRET-ENERGY-HARVESTER WITH
MICROFABRICATED HORIZONTAL ARRAYS AND VERTICAL PROTRUSIONS FOR
POWER GENERATION ENHANCEMENT
DESIGN, MODELING, FABRICATION AND CHARACTERIZATION OF AN ELECTRETBASED MEMS ELECTRO-STATIC ENERGY HARVESTER
SCREEN PRINTED PZT/PZT THICK FILM BIMORPH MEMS CANTILEVER DEVICE
FOR VIBRATION ENERGY HARVESTING
PIEZOELECTRIC MEMS ENERGY HARVESTING MODULE BASED ON NONRESONANT EXCITATION
NON-CONTACT REPULSIVE-FORCE EXCITATION FOR HIGHLY ENDURABLE
WIDE FREQUENCY-RANGE ENERGY-HARVESTING
PASSIVE-SELF-TUNABLE VIBRATIONAL ENERGY HARVESTER
ENERGY HARVESTING FROM A ROTATING GEAR USING AN IMPACT TYPE
PIEZOELECTRIC SCAVENGER
POWER ENHANCEMENT OF MICRO THERMOELECTRIC GENERATORS BY
MICRO FLUIDIC HEAT TRANSFER PACKAGING
BIOCOMPATIBLE ALN-BASED PIEZO ENERGY HARVESTERS FOR IMPLANTS
PHOTOVOLTAICALLY RECHARGEABLE FUEL CELL ACCUMULATOR FOR
ENERGY SELF-SUFFICIENT MICROSYSTEMS
DEVELOPMENT OF MEMS PIEZOELECTRIC ENERGY HARVESTERS FOR HIGH
POWER OUTPUT AND VARIOUS RESONANT FREQUENCIES
A HIERARCHICAL APPROACH FOR THE FABRICATION OF THREE-DIMENSIONAL
MICROBATTERY ELECTRODES
THINNED-PZT ON SOI PROCESS AND DESIGN OPTIMIZATION FOR
PIEZOELECTRIC INERTIAL ENERGY HARVESTING
HIGHLY SCALABLE AND SENSITIVE BROADBAND 1HZ~1KHZ VIBRATED
ENERGY HARVESTER WITH NOVEL SELF-ALTERNATION MAGNETIC-FLUX AND
3D COILS
MICROELECTROMAGNETIC ENERGY HARVESTER WITH INTEGRATED
MAGNETS
HARVESTING TRAFFIC INDUCED BRIDGE VIBRATIONS
A MICRO INITIATOR REALIZED BY REACTIVE NI/AL NANOLAMINATES FOR
MEMS APPLICATIONS
STUDY OF VIBRATION-INDUCED BROADBAND FLEXIBLE PIEZOELECTRIC ZNO
MICRO-HARVESTER WITH STORAGE SYSTEM
LIQUID-ENCAPSULATED ENERGY HARVESTER FOR LOW FREQUENCY
VIBRATIONS
AMORPHOUS SILICON-COATED CNT FOREST FOR ENERGY STORAGE
APPLICATIONS
LARGE ARRAY ELECTROSPUN PVDF NANOGENERATORS ON A FLEXIBLE
SUBSTRATE
HIGHLY EFFICIENT PIEZOELECTRIC MICRO HARVESTER FOR LOW LEVEL OF
ACCELERATION FABRICATED WITH A CMOS COMPATIBLE PROCESS
A NOVEL ASSEMBLY METHOD FOR MICRO DIRECT METHANOL FUEL CELLS
USING MULTI-LAYER BONDING TECHNIQUE
PIEZOELECTRIC PDMS FILMS FOR POWER MEMS
AGING CHARACTERISTICS OF ELECTRET USED IN A VIBRATION-BASED
ELECTROSTATIC INDUCTION ENERGY HARVESTER
VIBRATION-DRIVEN MEMS ENERGY HARVESTER WITH VACUUM UV-CHARGED
VERTICAL ELECTRETS
ELECTRET BASED ENERGY HARVESTER USING A SHARED SI ELECTRODE
INCREASED-BANDWIDTH MEANDERING VIBRATION ENERGY HARVESTER
FABRICATION OF HIGHLY DIELECTRIC NANO-BATIO3/EPOXY-RESIN
COMPOSITE PLATE HAVING TRENCHES BY MOLD CASTING AND ITS
APPLICATION TO CAPACITIVE ENERGY HARVESTING
EFFICIENT ENERGY HARVESTING FROM HUMAN MOTION USING WEARABLE
PIEZOELECTRIC SHELL STRUCTURES
BIOFUEL CELLS WITH TREHALOSE TOWARD AN INSECT-IMPLANTED POWER
SOURCE
ABSTRACT # FORMAT
12-106
Poster
12-108
Poster
12-109
Oral
12-111
Poster
PAPER TITLE
A VIBRATION-BASED ELECTROMAGNETIC ENERGY HARVESTER SYSTEM WITH
A HIGH CONVERSION EFFICIENCY INTERFACE ELECTRONICS
ELECTROSTATICALLY-DRIVEN ACTIVE SPACE RADIATOR USING NEAR-FIELD
THERMAL RADIATION
A MICRO TESLA TURBINE FOR POWER GENERATION FROM LOW PRESSURE
HEADS AND EVAPORATION DRIVEN FLOWS
EFFECT OF ILLUMINATION ON THERMIONIC EMISSION FROM
MICROFABRICATED SILICON CARBIDE STRUCTURES
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