mass flow controller repair tag
4
PASCALTECHNOLOGIES, INC.
Mass Flow Control
180 Series High Performance
Mass Flow Controller/Meter for Low to Medium Flow
(5 sccm—30 slm) with Elastomer Seals
Features At A Glance
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MTBF of over 300,000 hours
Repeatability ±0.15% of setpoint
Less than 1 second response
Range 5 sccm—30 slm (N2)
Control signal: 0-5 Vdc
Zero drift: <0.6% per year
1 x 10-9 atm-cc/sec (He)
316L stainless steel or aluminum block
2 year warranty
Worldwide service
Base Price
Standard 3% full scale accuracy
(1% full scale accuracy optional)
Flow range
Accuracy
Repeatability
Turn down ratio
Linearity
Operating pressure:
Maximum inlet pressure
Proof pressure
Pressure drop (controller)
Pressure drop (meter)
Response time:
Fast
Standard
Operating temperature
Temperature coefficient:
Zero
Span
Pressure coefficient
Leak integrity
Zero drift
Warm-up period
Control signal input/output
Power:
Controller:
Meter:
Dual supply
Electrical connection
Input impedance
Output impedance
Wetted materials
EMI/EFI resistance
electronics
Certification
Calibration
4.15
C
180
M
5 sccm to 30 slm
(N2 equivalent)
±1% full scale
±0.15% full scale
50:1
±0.15% full scale
Mass Flow Controller
$865
Mass Flow Meter
$670
A
Auto Shut-off
$ -
X
No auto Shut-off
$ -
A
Standard 3-5 Second Response
$ -
F
Fast Start <1 Second Response
$100
X
No Valve (Mass Flow Meter)
$ -
0013
Gas - Nitrogen calibration
$ -
xxxx
Specific Gas Calibration (See Gas Chart for Configuration)(Example: 0004 = Argon)
$ -
500 psig
1,500 psig
7 to 40 psid
<4 torr (0.08 psid)
xxxx
Range 5 sccm - 20 sccm N2 (Example: 005C = 5 sccm)
xxxx
Range >20 sccm - 10 slm N2 (Example: 005L = 5slm)
$ -
xxxx
Range > 10 slm - 30 slm N2 (Example: 015L = 15 slm)
$300
<1 second
3-5 seconds
0 to 50ºC
$100
8S
1/8" Swagelock
$ -
4S
1/4" Swagelok
$ -
4R
1/4" VCR
$25
4O
1/4" VCO
$25
±0.03% full scale per ºC
±0.05% full scale per ºC
0.0025% per psi
1x10-9 atm-cc/sec (He)
<0.60 % per year
without auto-zero
20 minutes
0-5 Vdc
HOS
Horizontal On Side
$ -
A
Atmosphere Calibation- (Downstream Calibration Pressure)
$ -
V
Vacuum Caligration- (Downstream Calibration Pressure)
$ -
V
V
Viton O-Ring/Viton Seat
$ -
V
F
Viton O-ring/Kel-F Seat - Standard
$ -
N
F
Neoprene O-ring/Kel-F Seat
$ -
R 9 Pin "D" Connector (UDP9) 0-5Vdc
$ -
+15 Vdc (120 mA max.)
-15 Vdc (120 mA max.)
3000
Standard Accuracy +/- 3%
$100
1000
High Accuracy +/-1% Full Scale
$ -
+15 Vdc (25 mA max.)
-15 Vdc (25 mA max.)
9 pin “D” type connector
100,000 ohm minimum
10 ohm maximum
316L stainless steel,
elastomer seal,
304 stainless steel spring
Completed shielded
Fully CE certified
(N.I.S.T.) traceable
A dder
C Normally Closed (Standard)
$ -
X
$ -
No Valve (Mass Flow Meter)
S
Standard (Valve Downstream)
$ -
X
No Valve (Mass Flow Meter)
$ -
X
Auto Zero (Not Incluced)
32X
32 Ra Finish (Standard)
$ $ -
00
0oC Reference Calibration (Standard)
$ -
xx
Custom Reference Calibration (20oC = 20)
$25
Example
C
180
X
A
0004
100C
4R
HOS
1-800-367-2919
A
V
F
R
3000
C
S
X
32X
00
$865
www.pascaltechnologies.com
PASCALTECHNOLOGIES, INC.
Features At A Glance
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4
Mass Flow Control
7300 Series High Performance
Control signal: 0-5 Vdc or 4-20 mA
Mass Flow Controller/Meter for Low to Medium Flow
(5 sccm—30 slm) with Elastomer Seals
Dual connector EIA-485
DeviceNet™ or Profibus™
Range 5 sccm—30 slm (N2 equivalent)
Reliable MTBF over 340,000 hours
Base Price
Repeatability ±0.15% of full scale
±1% full scale accuracy (analog)
C Mass Flow Controller
$1085
M Mass Flow Meter
$805
±1% of setpoint accuracy (digital)
Zero drift: <0.6% per year
7300
High Performance, Elastomer Seals - Analog Interface
$ -
7301
High Performance, Elastomer Seals - MultiFlo - RS 485 (Digital and Analog Interface) (Select Analog Connector Below)
$400
7304
High Performance, Elastomer Seals - Analog controller w/Digital Interface (DeviceNet or Profibus - Select Below)
$500
1 x 10-9 atm-cc/sec (He) leak rate
A
Auto Shut-off
$ -
X
No Auto Shut-off
$ -
2 year warranty
316L stainless steel
Attitude insensitive
Class 100 cleanroom manufacturing and
packaging
F
Fast Start Seconds
$ -
S
5 Second Linear Soft Start
$ -
T
6-10 Second Soft Start
$ -
V 10-15 Second Soft Start
$ -
Y
20-30 Second Soft Start
$ -
Z
40-60 Second Soft Start
$ -
X
No valve (Mass Flow Meter)
xxxx
Turn down ratio
Operating pressure:
Maximum inlet pressure
Proof pressure
Pressure drop (controller)
Pressure drop (meter)
Response:
Fast
Ramp
available
Operating temperature
Temperature coefficient:
Zero
Span
Pressure coefficient
Power:
Controller (analog)
Controller (EIA-485)
Controller (DeviceNet)
Meter (analog)
Input impedance
Output impedance
Wetted materials
Surface finish
EMI/EFI resistance
Certification
Calibration
A dder
50:1
$ -
Gas (See gas chart for Configuration) (Example: 0013 = N2)
$ -
xxxx
Range 5 sccm - 20 sccm (Example: 005C = 5sccm)
$380
xxxx
Range >20 sccm - 10 slm (Example: 005L = 5 slm) Standard Flow Range, No Additional Charge
$ -
xxxx
Range >10slm - 30 slm (Example: 015L = 15slm)
$120
8S
1/8" Swagelok
$ -
4S
1/4"Swagelok
$ -
4R
1/4" VCR
$ -
4O
1/4" VCO
$ -
DB
Downported - Large Bore - C Seal (Standard C Seal)
$100
HOV
Horizontal Or Vertical Mounting Attitude (Standard)
$ -
HOS
Horzontal On side
$ -
A
Atomosphere Calibration - (Downstream Calibration Pressure)
$ -
V
Vacuum Calibration - (Downstream Calibration Pressure)
$ -
V
F
Viton O-Ring/Kel-F Seat - Standard
$ -
N
F
Neoprene O-Ring/Kel-F Seat
$ -
V
M Viton O-ring/Metal Seat
$ -
V
X
viton O-ring - No vlave (Mass Flow Meter)
$ -
B
15 Pin "D" Connector (UDB15) brooks Pin-out 0-5Vdc (7300 Only)
$ -
D
Devicenet (7304 Only)
500 psig
1,500 psig
7 to 40 psid
<4 torr (0.08 psid)
<1 second
Various linear ramps
0 to 50ºC
±0.03% full scale per ºC
±0.05% full scale per ºC
0.0025% per psi
+15 Vdc (100 mA max.),
-15 Vdc (200 mA max.)
+15 Vdc (160 mA max.),
-15 Vdc (160 mA max.)
+11-25 Vdc per ODVA
requirements:[email protected]
Vdc, 300 mA @ 24 Vdc
+15 Vdc (50 mA max.),
-15 Vdc (50 mA max.)
100,000 ohm minimum
10 ohm maximum
316L stainless steel,
elastomer seal,
304 stainless steel
spring
32µ inch Ra
Completed shielded
electronics
Fully CE certified
(N.I.S.T.) traceable
E
I
K
$ -
Cardedge Connector 0-5Vdc (7300& 7301 Only)
$ -
15 Pin "D" connector (DUI15) 4-20mA (7300 Only)
$ -
15 Pin "D" connector (UDK15) MKS Pin-out 0-5Vdc (7300 Only)
L
Cardedge Lockdown Connector 0-5Vdc (7300 Only)
P
Profibus Connector (7304 Only)
$ $ $ -
S
9 Pin "D" Connector (UDS9) STEC pinout
$ -
T
9 Pin "D" Connector (UDU9) Unit 0-5Vdc (7300 & 7301 Only)
$ -
U 15 Pin "D" Connector (UDU15) 0-5Vdc (7300 & 7301 Only)
$ -
V
$ -
9 Pin "D" Connector (UDV 9) 0-10Vdc(7300 & 7301 Only)
xxxx
Customer Special request (CSR) Consult Factory
$ -
O Normally Open
$75
C Normally Closed (Standard)
$ -
X
$ -
No Valve (Mass Flow Meter)
S
Standeard (Valve Downstream)
$ -
B
buffered (Valve Upstream)
$110
X
No Valve (Mass Flow Meter)
$ -
A
Auto Zero Included (Need Auto Shut-off)(No charge for 7301 & 7304)
$150
X
Auto Zero Not Included
$ -
32X
32 Ra Finish
$ -
00
0oC Reference Calibration (Standard)
$ -
xx
Custon Reference Calibration (20oC = 20)
$25
Example
C
www.pascaltechnologies.com
7300
A
F
0013
100C
8S
HOV
A
V
F
U
xxxx
C
S
X
32X
00
$1085
4.16
4
PASCALTECHNOLOGIES, INC.
Mass Flow Control
7320 Series High Performance
Mass Flow Controller/Meter with Shut-off Valve
and Elastomer Seals
Features At A Glance
•
Control signal: -0-5 Vdc, 4-20 mA, RS-485
and 0-5 Vdc (dual connector), DeviceNet™
or Profibus™
•
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•
•
•
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•
Range 5 sccm—30 slm (N2 equivalent)
Reliable MTBF over 300,000 hours (analog)
Reliable MTBF over 340,000 hours (digital)
Repeatability ±0.15% of setpoint
±1% full scale accuracy (analog)
±1% setpoint accuracy (digital)
Zero drift: <0.6% per year
1 x 10-9 atm-cc/sec (He) leak rate
2 year warranty
316L stainless steel
Attitude insensitive
Class 100 cleanroom manufacturing and
packaging
Air Actuated Shut-off Valve Features
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Downported pneumatic shut-off valve
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•
Cv = 0.17 standard or 0.5 for high flow
Less than 4 x 10-9 atm-cc/sec (He) leak rate
Low internal volume
Vespel® or PCTFE seats
No internal springs
Actuation pressure 70 psig (4.8 bar) minimum
to 125 psig (8.6 bar) minimum
Product Specifications
Accuracy
Analog
Digital
Repeatability
Turn down ratio
Linearity
Operating pressure:
Maximum inlet pressure
Proof pressure
Pressure drop (controller)
Pressure drop (meter)
Response:
Fast
Ramp
Operating temperature
Temperatrue coefficient:
Zero
Span
Pressure coefficient
Zero drift
Leak integrity
Warm-up time
Power:
Controller
Meter
Input impedance
Output impedance
Wetted materials
Color coded for normally open or closed
configuration
EMI/EFI Resistance
Certification
Calibration
±1% full scale
±1% setpoint
±0.15% full scale
50:1
±0.15% full scale
500 psig
1,500 psig
7 to 40 psid
<4 torr
<1 second
Various linear ramps available
0 to 50ºC
±0.03% per ºC
±0.05% per ºC
0.0025% per psi
<0.58% per year
1 x 10-9 atm-cc/sec (He)
20 minutes
+15 Vdc (100 mA max.),
-15 Vdc (200 mA max.)
+15 Vdc (50 mA max.),
-15 Vdc (50 mA max.)
100,000 ohm minimum
10 ohm maximum
316L stainless steel, elastomer
seal, 304 stainless
steel spring
Completely shielded electronics
Fully CE certified
(N.I.S.T.) traceable
Applications
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Non-corrosive
General process control
Laser welding or cutting
Fiber optics and glass coating
Vacuum processes
Combustion control
Leak testing
Purging
Gas chromatography
Chemical and petrochemical gas analysis
Pharmaceutical manufacturing
4.17
Shut-off valve specifications
Pressure rating
Per criteria of ANSI/ASME B31.3
Maximum pressure rating
125 psig (8.6 bar)
Materials in contact with media:
Body
316L VAR stainless steel
Valve seat
PCTFE
Diaphragm
Elgiloy
Remaining parts
316 stainless steel
Flow capacity
Cv = 0.17 standard model
Internal surface finish
10 Ra
Certified max. inboard leak rate:
Seat
4 x 10-9 atm cc/sec (He)
Diaphragm
1 x 10-9 atm cc/sec (He)
Actuator port
10-32 UNF
Media temperature PCTFE: -65ºF to +140ºF (-54ºC to +60ºC)
Actuation pressure70 psig min. (4.8 bar) to 125 psig max. (8.6 bar)
1-800-367-2919
www.pascaltechnologies.com
PASCALTECHNOLOGIES, INC.
Mass Flow Control
Base Price
C Mass Flow Controller
$1085
M Mass Flow Meter
$805
High Performance, Elastomer Seals - Analog Interface
$ -
7321
High Performance, Elastomer Seals - MultiFlo - RS 485 (Digital and Analog Interface) (Select Analog Connector Below)
$400
7324
High Performance, Elastomer Seals - Analog controller w/Digital Interface (DeviceNet or Profibus - Select Below)
$500
A
Auto Shut-off
$ -
X
No Auto Shut-off
$ -
F
Fast Start Seconds
$ -
S
5 Second Linear Soft Start
$ -
T
6-10 Second Soft Start
$ -
V 10-15 Second Soft Start
$ -
Y
20-30 Second Soft Start
$ -
Z
40-60 Second Soft Start
$ -
X
No valve (Mass Flow Meter)
$ -
Gas (See gas chart for Configuration) (Example: 0013 = N2)
$ -
xxxx
Range 5 sccm - 20 sccm (Example: 005C = 5sccm)
$380
xxxx
Range >20 sccm - 10 slm (Example: 005L = 5 slm) Standard Flow Range, No Additional Charge
$ -
xxxx
Range >10slm - 30 slm (Example: 015L = 15slm)
$120
8S
1/8" Swagelok
$ -
4S
1/4"Swagelok
$ -
4R
1/4" VCR
$ -
4O
1/4" VCO
$ -
HOV
Horizontal Or Vertical Mounting Attitude (Standard)
HOS
Horzontal On side
$ -
A Atomosphere Calibration - (Downstream Calibration Pressure)
$ -
V Vacuum Calibration - (Downstream Calibration Pressure)
$ -
V
F
Viton O-Ring/Kel-F Seat - Standard
N
F
Neoprene O-Ring/Kel-F Seat
V
M Viton O-ring/Metal Seat
V
X
$ -
$ $ $ -
viton O-ring - No Valve (Mass Flow Meter)
$ -
B 15 Pin "D" Connector (UDB15) Brooks Pin-out 0-5Vdc (7200 Only)
$ -
D Devicenet (7324 Only)
$ -
E
Cardedge Connector 0-5Vdc (7320 & 7321 Only)
$ -
I
15 Pin "D" connector (DUI15) 4-20mA (7320 Only)
$ -
K 15 Pin "D" connector (UDK15) MKS Pin-out 0-5Vdc (7320 Only)
$ $ -
L
Cardedge Lockdown Connector 0-5Vdc (7320 Only)
P
Profibusr (7324 Only)
$ -
S
9 Pin "D" Connector (UDS9) STEC pinout
$ -
T
9 Pin "D" Connector (UDU9) Unit 0-5Vdc (7320 & 7321 Only)
$ -
U 15 Pin "D" Connector (UDU15) 0-5Vdc (7320 & 7321 Only)
$ -
1 Vespel (Standard) (Air Operated Valve Seat) (For external Shut-off Valve)
$ -
2
$ -
PCTFE (Air Operated Valve Seat) (For External Shut-off Valve)
17
CV = .17 (Standard) (Air Operated Valve) ( For External Shut-off Valve)
$75
50
CV = .5 (High Flow) (Air Operated Valve) ( For External Shut-off Valve
$ -
1 Normally Open (Air Operated Shutoff Valve)
$ -
2
Normally Closed (Air Operated Shutoff Valve)
$110
O Normally Open (MFC Valve)
$150
C Normally Closed (MFC Valve) (Standard)
$ -
X
No Valve (Mass Flow Meter)
$ -
S
Standard (Valve Downstream)
$ -
X
No Valve (Mass Flow Meter)
$ -
A
Auto Zero Included (Need Auto Shut-off) (DigitalNo Charge)
$ -
X
Auto Zero Not Included
$ -
32X
32 Ra Finish
$ -
00
0oC Reference Calibration (Standard)
$ -
xx
Custon Reference Calibration (20oC = 20)
$ -
Example
www.pascaltechnologies.com
A dder
7320
xxxx
C
4
7320
A
F
0013
100C
8S
HOV
A
V
F
U
1
17
1
C
S
X
32X
00
4.18
4
Features At A Glance
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PASCALTECHNOLOGIES, INC.
Mass Flow Control
High-integrity metal seals
Control signal: 0-5 Vdc or 4-20 mA
Dual connector EIA-485
7360 Series High Performance
Mass Flow Controller/Meter for Low to Medium Flow
(5 sccm—30 slm) with Metal Seals
DeviceNet™ or Profibus™
Range 5 sccm—30 slm (N2 equivalent)
Outstanding reliability MTBF over 380,000 hours
Repeatable ±0.15% full scale
±1% full scale accuracy (analog)
±1% of setpoint accuracy (digital)
Zero drift: <0.6% per year
Base Price
C Mass Flow Controller
$1085
M Mass Flow Meter
$805
1 x 10-10 atm-cc/sec (He) leak rate
3 year warranty
7360
High Performance, Elastomer Seals - Analog Interface
$ -
7361
High Performance, Elastomer Seals - MultiFlo - RS 485 (Digital and Analog Interface) (Select Analog Connector Below)
$400
7364
High Performance, Elastomer Seals - Analog controller w/Digital Interface (DeviceNet or Profibus - Select Below)
$500
316L stainless steel
A
Auto Shut-off
$ -
X
No Auto Shut-off
$ -
Attitude insensitive
16µ in Ra finish
Class 100 cleanroom manufacturing and packaging
Repeatability
Turn down ratio
Linearity
Operating pressure:
Maximum inlet pressure
Proof pressure
Pressure drop (controller)
Pressure drop (meter)
Response:
Fast
Ramp
Operating temperature
Temperature coefficient:
Zero
Span
Pressure coefficient
Zero drift
Leak integrity
Warm-up period
Control signal input/output
Power:
Controller (analog)
Controller
Controller (DeviceNet)
Meter (analog)
Input impedance
Output impedance
Wetted materials
Surface finish
EMI/EFI resistance
Certification
Calibration
4.19
F
Fast Start Seconds
$ -
S
5 Second Linear Soft Start
$ -
T
6-10 Second Soft Start
$ -
V 10-15 Second Soft Start
$ -
Y
20-30 Second Soft Start
$ -
Z
40-60 Second Soft Start
$ -
X
No valve (Mass Flow Meter)
$ -
±0.15% full scale
50:1
±0.15% full scale
xxxx
Gas (See gas chart for Configuration) (Example: 0013 = N2)
$ -
xxxx
Range 5 sccm - 20 sccm (Example: 010C = 10sccm)
$380
xxxx
Range >20 sccm - 10 slm (Example: 005L = 5 slm)
$ -
xxxx
Range >10 slm - 30 slm (Example: 015L = 15slm)
$120
4S
1/4"Swagelok
$ -
4R
1/4" VCR
$ -
3R
3/8" VCR
$ -
DB
Large Counter Bore - C Seal (Standard C Seal)
$100
DC
Dowported - C Seal
$100
HOV
Horizontal Or Vertical Mounting Attitude (Standard)
$ -
HOS
Horzontal On side
$ -
A Atomosphere Calibration - (Downstream Calibration Pressure)
$ -
V Vacuum Calibration - (Downstream Calibration Pressure)
$ -
500 psig
1,500 psig
7 to 40 psid
<4 torr (0.08 psid)
<1 second
Various linear ramps available
0 to 50ºC
M
±0.03% full scale per ºC
±0.05% full scale per ºC
0.0025% per psi
<0.60 % per year without
auto-zero
1 x 10-10 atm-cc/sec (He)
20 minutes
0-5 Vdc or 4-20 mA
+15 Vdc (100 mA max.),
-15 Vdc (200 mA max.)
(EIA-485) +15 Vdc
(160 mA max.),
-15 Vdc (160 mA max.)
+11-25 Vdc per ODVA
requirements:600 mA
@ 12 Vdc, 300 mA @ 24 Vdc
+15 Vdc (50 mA max.),
-15 Vdc (50 mA max.)
100,000 ohm minimum
10 ohm maximum
316L stainless steel, elastomer
seal
16µ inch Ra
Completed shielded electronics
Fully CE certified
(N.I.S.T.) traceable
A dder
F
Metal O-Ring/Kel-F Seat
$ -
M M Metal O-Ring/Metal Seat
$ -
M X
Metal O-Ring - No Valve (Mass Flow Meter)
$ -
B 15 Pin "D" Connector (UDB15) Brooks Pin-out 0-5Vdc (7360 Only)
$ -
D Devicenet (7364 Only)
$ -
E
Cardedge Connector 0-5Vdc (7360 & 7361 Only)
$ -
I
15 Pin "D" connector (DUI15) 4-20mA (7360 Only)
$ -
K 15 Pin "D" connector (UDK15) MKS Pin-out 0-5Vdc (7360 Only)
$ $ -
L
Cardedge Lockdown Connector 0-5Vdc (7360 Only)
P
Profibus (7364 Only)
$ -
S
9 Pin "D" Connector (UDS9) STEC pinout
$ -
T
9 Pin "D" Connector (UDU9) Unit 0-5Vdc (7360 & 7361 Only)
$ -
U 15 Pin "D" Connector (UDU15) 0-5Vdc (7360 & 7361 Only)
$ -
V
$ -
9 Pin "D" Connector (UDV9) 0-10Vdc
xxxx
Customer Special request (CSR) Consult Factory
$ -
O Normally Open
$75
C Normally Closed (Standard)
$ -
X
$ -
No Valve (Mass Flow Meter)
S
Standard (Valve Downsteam)
$ -
B
Buffered (Valve Upstream)
$110
X
No Valve (Mass Flow Meter)
A
Auto Zero Included (Need Auto Shut-off) (DigitalNo Charge)
X
Auto Zero Not Included
16X
16 Ra Finish
$ $150
$ $ -
00
0oC Reference Calibration (Standard)
$ -
xx
Custon Reference Calibration (20oC = 20)
$25
Example
C
7360
A
F
0013
100C
4S
1-800-367-2919
HOV
A
M M
U
xxxx
C
S
X
16X
00
$1495
www.pascaltechnologies.com
PASCALTECHNOLOGIES, INC.
4
Mass Flow Control
URS Series Power Supplies
Model 10, 20, 40, 100-5
Features At A Glance
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High reliability
High resolution 10 turn setpoint potentiometers
Portable and compact design
Soft start control
Control up to 10 Unit mass flow instruments
Valve off and purge capability
Buffered outputs for flow and valve test point
Instrumentation packaging
Performance Advantage
Celerity manufactures a full line of premium power supplies
for all types of applications. Our power supplies utilize high
resolution 10 turn setpoint potentiometers with valve off
and purge capability. The LCD display provides 3 digits of
resolution for precise setpoint control.
Design Flexibility
The URS Series power supplies are designed to control up
to 10 Unit mass flow controllers or meters.They operate
from 110 Vac 50/60 Hz with 6 watts input power. Each power
supply has three modes of operation: valve control, valve purge
and valve off.
3-Digit LCD display for setpoint and flow
Manual and computer controlled options
Keyed manual purge switch with safety interlock (model 100-5)
110/220VAC—50/60 Hz
URS Series Power Supplies specifications
Model URS-20
Power input:
Output:
Over current
protection:
Temperature
ratings:
DVM:
Model URS-100-5
110 Vac ±10% between 47/420 Hz
Optional input voltage available
Accepts pressure transducer
ranges up to 10 Vdc
+15 Vdc ±0.15 Vdc, 100 mV ripple
-15 Vdc ±0.15 Vdc, 100 mV ripple
Fixed @ 120% of rated output current
32°F to 122°F (0°C to +50°C)
Zero input reading ±000.0 (zero voltage in)
Linearity ±.2 counts
Noise 15 µV
Zero reading drift ±2 µV/°C
Model URS-40
Model URS-40
Power input:
Output:
Over current
protection:
Temperature
ratings:
DVM:
Power input:
Output:
Over current
protection:
Temperature
ratings:
DVM:
Fixed @ 120% of rated output current
32°F to 122°F (0°C to +50°C)
Zero input reading ±000.0 (zero voltage in)
Linearity ±.2 counts
Noise 15 µV
Zero reading drift 0.2 µV/°C
www.pascaltechnologies.com
Fixed @ 120% of rated output current
32°F to 122°F (0°C to +50°C)
Zero input reading ±000.0 (zero voltage in)
Linearity ±.2 counts
Noise 15 µV
Zero reading drift 0.2 µV/°C
Model URS-10
Power input:
Output:
110 Vac ±10% between 50/60 Hz
Optional 220 Vac voltage available
+15 Vdc ±0.15 Vdc, 100 mV ripple
-15 Vdc ±0.15 Vdc, 100 mV ripple
110 Vac ±10% between 50/60 Hz
Optional 220 Vac voltage available
+15 Vdc ±0.15 Vdc, 100 mV ripple
-15 Vdc ±0.15 Vdc, 100 mV ripple
Over current
protection:
Temperature
ratings:
DVM:
110 Vac ±10% between 50/60 Hz
Optional 220 Vac voltage available
+15 Vdc ±0.15 Vdc, 100 mV ripple
-15 Vdc ±0.15 Vdc, 100 mV ripple
Fixed @ 120% of rated output current
32°F to 122°F (0°C to +50°C)
Zero input reading ±00.0 (zero voltage in)
Linearity ±.2 counts
Noise 15µV
Zero reading drift 0.2 µV/°C
4.20
4
PASCALTECHNOLOGIES, INC.
Mass Flow Control
Model URS-20
Exclusive Features
•
Supplies power to 1 Unit mass flow controller or meter
•
High resolution—10 turn setpoint potentiometers
•
3-Digit LCD display for setpoint and flow
•
Portable and compact
•
Soft start control
•
Valve off and purge capability
•
Buffered outputs for flow and valve test point
System Advantages
The URS-20 readout power supply is designed to control one Unit
flow controller or meter. Its small size makes it ideal for permanent
on-line installation or as preventative maintenance tools for
periodic on-line performance tests.
Operational Features
The power supply incorporates 10 turn high resolution
potentiometers to control the desired flow or pressure
setpoints.The valve switch on the front panel provides three
modes of operation: function switch provides visual reading of
flow, setpoint, and valve voltage on both units. Two buffered
output jacks on the back of the URS-20 provide flow meter and
valve test point outputs for strip chart recorders and other
monitoring devices. Indicated readouts are in percentage of full
scale for the URS 20.
Base Price
URS
20
1 Channel/Single Read-out Power Supply
$745
40
2 Channel/Single Read-out Power Supply
$890
5 Channel/5 Read-out Power Supply
$2445
100-5
E
Cardedge MFC connector 0-5Vdc - Standard
Adders
$ -
U 15 Pin "D" MFC Connector (UDU15) 0-5Vdc - Standard
$ -
T
$ -
9 Pin "D" MFC Connector (UDU9) 0-5Vdc - Standard
7
7' of Cable (Price Per Channel) - Included
$ -
10
10' of Cable (Price Per Channel)
$85
20
20' of Cable (Price Per Channel)
$90
30
30' of Cable (Price Per Channel)
$100
Example
URS
40
U
7
$890
Accessories:
550-100-1026
Panel Mount Brackets for URS 100-5
$35
250-00-1000
Valve Control Box for URS-100
$620
4.21
1-800-367-2919
www.pascaltechnologies.com
PASCALTECHNOLOGIES, INC.
4
Mass Flow Control
Model URS-40
Model URS-100-5
Exclusive Features
Exclusive Features
•
Supplies power and readout capability to 2 Unit mass
flow controllers or meters
Supplies power to 5 Unit mass flow controllers or meters
•
•
•
•
•
•
•
•
•
High resolution – 10 turn setpoint potentiometers
•
•
•
•
•
•
•
•
High resolution – 10 turn locking setpoint potentiometers
3-Digit LCD display for setpoint and flow
Portable and compact
Soft start control
Valve off and purge capability
Buffered outputs for flow and valve test point
Instrumentation packaging
System Advantages
The URS-40 readout power supply is designed to control
any combination of two Unit flow controllers or meters.
Its small size makes it ideal for permanent on-line installation
or as preventative maintenance tool for periodic online
performance tests.A 3-digit LCD displays the setpoint
or flow for any of the 2 channels in percentage of full
scale.The buffered output of the valve test point can be
used for on-line dynamic response maintenance checks. Its
size and dual channel capabilities make the URS-40 more
convenient and versatile than competitive models.
Operational Features
Each channel has its own 10-turn precision potentiometer
to set the external setpoint.The LCD readout provides
visual monitoring of the setpoint when the selector switch
is in the set position, and individual channel monitoring in
the flow position. Off, control, and purge modes of flow
are selectable with a three-position toggle switch for each
channel. Soft start for Unit flow controllers is initiated
when the flow mode is switched from off to control.
www.pascaltechnologies.com
5 Readouts allow for simultaneous viewing of up to 5
instruments
Five 3-Digit LCD display for setpoint and flow
Keyed manual purge with safety interlock
Manual or computer control of each channel
Portable and compact
Buffered steeping prevents loading in computer operation
Computer connector on back panel
Power supply outputs for computer auto test
System Advantages
The URS-100-5 readout power supply is designed to control up to
five Unit flow controllers or meters simultaneously.The URS100-5
allows the user to simultaneously monitor up to 5 set points or flows
during either computer or manual control. Each channel displays
set point or flow on a 3-digit LCD readout. It is portable and
rackmountable,
making it easy to use and operate.With each channel
fully operational in manual or computer mode, this power supply
provides greater flexibility than conventional models.
Operational Features
Computer interfacing is accomplished with a 34 pin connector which
accepts a 0-5 Vdc setpoint signal and a TTL level switch closure on
each channel. Power supply voltages are available to the computer for
diagnostic purposes.A switch closure which indicates when a channel
is in manual mode and is not under computer control is available.An
additional signal is provided to the computer to indicate manual purge
mode.Under manual control, each channel setpoint is adjusted by its
own 10-turn precision locking potentiometer. Indicated readout are
in percentage of full scale or engineering units.
4.22
4
PASCALTECHNOLOGIES, INC.
Mass Flow Control
DX-5 Series
Digital Control System
Features At A Glance
•
Controls five mass flow controllers
or meters and one pressure controller
•
•
•
•
Depicts set point and actual readings
•
•
•
Easy to use touch screen display
•
•
100/120/220/240VAC—47 to 63 Hz
One pressure transducer input
Built-in program alarms
Flow set entered in percentage of
full scale
Remote monitoring via RS-232
Communication interface to LabView®
and other GUI’s
19" rack mount capability
Performance Advantage
The model DX-5 digital control system is capable of controlling up to five mass flow controllers or meters and one pressure controller. Setpoint and
output are clearly shown as a percentage of full scale on the blue/white touch screen display.
Proven Design And Performance
User friendly menu screens enable configuration on each channel. The DX-5 has a unique integrated pressure control loop which can be used
with a Unit pressure controller to maintain constant pressure in any flow system. Each channel can also be configured and monitored via a
remote RS-232 communication interface using a simplified ASCII command set. This highly
versatile system provides far greater flexibility than conventional power supplies offered in the industry today. Refine, monitor, or automate any
mass flow process with Unit’s easy to use
digital control system.
Remote monitoring and control via a RS-232 cable input. Through a predefined command set the DX-5 is capable of being operated remotely
through industry standard SCADA or laboratory GUI interfaces such as LabView.
Base Price
DX-5
Digital Control System
Adders
$2600
E
Cardedge MFC connector 0-5Vdc - Standard
$ -
U
15 Pin "D" MFC Connector (UDU15) 0-5Vdc - Standard
$ -
T
9 Pin "D" MFC Connector (UDU9) 0-5Vd
$ -
L
Local Control
$ -
R Remote Control - Generic Serial Output
$ -
6
7' of Cable Standard - Qty. 5 cables Included
12
10' of Cable
$ $85
20
20' of Cable
$90
30
30' of Cable
$100
Example
URS
40
U
7
$2600
Accessories:
4.23
550-100-1026
Panel Mount Brackets for URS 100-5
$35
250-00-1000
Valve Control Box for URS-100
$620
1-800-367-2919
www.pascaltechnologies.com
PASCALTECHNOLOGIES, INC.
4
Mass Flow Control
810/820 Mass Flow Controllers
810 Mass-Trak
Description
Accuracy
Range
Gases
Max Gas Pressure
Input Power
Wetted Materials
820 Top-Trak
Description
Accuracy
Range
Gases
Max Gas Pressure
Input Power
Wetted Materials
820-S Top-Trak
Description
Accuracy
Range
Gases
Max Gas Pressure
Input Power
Wetted Materials
Low-Cost mass flow controller with digital readout, on-board setpoint control
+/- 1.5% of full scale
0-10 sccm to 0-50 slpm
Air and non-corrosive, non-reactive gases
150 psig (10 barg)
0 to 15 slpm: 15 VDC +/- 10%
10% glass-filled Nylon 6/6: 316 stainless steel; 430F stainless steel; nickel plated;
Viton “O”-rings
Gas mass flow meter with tiltable digital display
+/- 1.5% of full scale
0-10 sccm to 0-50 slpm
Air and non-corrosive, non-reactive gases
150 psig (10 barg)
12 to 18 VDC Optional 24 VDC
10% glass-filled Nylon 6/6: 316 stainless steel; nickel plated; Viton, Neoprene or
4079 Kal-Rez “O”-rings
Mass flow meters for corrosive and toxic gases
+/- 1.5% of full scale
+/- 1% of full scale (optional)
0-10 sccm to 0-500 slpm
All clean gases including corrosives and reactives
1000 psig (68.9 barg) for low flow bodies only; 500 psig (35 barg)
12 to 18 VDC Optional 24 VDC
316 Stainless steel;nickel plated; Viton, Neoprene or 4079 Kal-Rez “O”-rings
Meter/Controller
Ordering
Prefix
M
810 Display Options
Description
810 Mass Flow Meter
Price
$558.00
C
810 Mass Flow Controller
$876.00
2
820 Meter with Display
$500.00
4
820 Meter Only
$450.00
Ordering Prefix
Display Options
N
810 No readout
D
810 3 1/2 digit display
N/C
820 Elastomers
V
Add'l Price
Fluorocarbon
N
Neoprene
K
Kalrez
Add'l Price
13
1/4" female NPT
N/C
10
1/8" compression
$35.00
20
1/4" compression
$35.00
N/C
$60.00
$295.00
Ordering Meter/Controller Prefix
M
Example
www.pascaltechnologies.com
$60.00
Inlet/Outlet Fittings
Ordering Prefix Inlet/Outlet Fittings
Ordering Prefix Elastomers for the 820
Add'l Price
Calibration
Ordering Prefix
Calibration
MP
Medium Pressure (40-150 psi)
LF
Low Flow (0-10 sccm)
Display Option
D
Inlet/Outlet
13
Add'l Price
$60.00
$120.00
Calibration
LF
Elastomers Price
--$1238.00
4.24
4
PASCALTECHNOLOGIES, INC.
Mass Flow Control
Repair of Mass Flow Controllers
Independent mass flow controller service organization appointed as an Authorized Service Facility (ASF) for the following
manufacturers: Advanced Semiconductor Materials (ASM), Aera (NT America), Brooks Instruments, DXL, Edwards
High Vacuum, Hitachi Metals America Ltd., MKS, Precision Flow Devices (PFD), and Sierra Instruments.
We provide a range of services designed to help you more effectively manage your mass flow controller needs and help
control downtime costs.
•
Expedite Service-24 hour emergency service.
•
5 Day General Service-for less critical shipments.
•
Exchange Program-exchange your failing or defective mass flow controllers.
•
Build Program- Rebuilt mass flow controllers built to your specifications.
100% Unconditional Satisfaction Warranty
Customer Satisfaction is our highest priority. We are dedicated to providing high quality service to your mass flow
controller. If you are not completely satisfied with the operation of your mass flow controller, serviced by our specialist, we
warrant its repair at no labor charge.
Along with our 100% Customer Satisfaction Warranty goes our trust in our customer’s integrity. We trust our customer’s
judgment in the determination of a warranty repair and we sincerely hope this trust shall never be abused.
Please note that the average lifetime of a mass flow controller is not forever! Proper purging, installation, use of correct gas
and appropriate operating pressure are vital to the maximum life of your mass flow controller. Also with certain gases (such
as HCl, BC13, C12 and SiH4) the average life expectancy of a mass flow controller is decreased due to the corrosive and/or
clogging nature of the gas used. We trust you to consider these factors when determining a warranty repair.
Services Provided by Coastal Instruments
• Repair, Calibration & Range Changes performed by factory trained technicians of mass flow controllers,
•
•
•
•
•
•
•
•
•
•
•
•
•
•
backed by the industry’s only 100% UNCONDITIONAL SATISFACTION WARRANTY.
24-Hour Turn-Around Expedite Service for emergencies.
Exchange or Build Service for emergencies.
General Service 5 day turnaround
MFC Pre-Installation Calibration and functional analysis.
IN-SITU calibration and/or data acquisition.
N.I.S.T Traceable calibration with documentation.
Sales & Service of N.I.S.T Traceable Transfer Standards.
In-House Technical Training
Distribution of Technical Documentation to inform users on proper care & use of mass flow controllers.
Sales of Rebuilt mass flow controllers backed by our unique 100% Unconditional Satisfaction Warranty.
Purchase of used mass flow controllers & associated equipment from customers and associates.
Certificate of Compliance with service report information.
Telephone Consultation available SEVEN DAYS A WEEK, 24 HOURS A DAY.
Warranty Service for many mass flow controller manufacturers
4.25
1-800-367-2919
www.pascaltechnologies.com
PASCALTECHNOLOGIES, INC.
4
Mass Flow Control
Example Certificate of Compliance for Mass Flow Controller Repair
The following device has been calibrated in accord with MIL-STD 45662A using instruments
traceable to the National Institute of Standards and Technology.
Customer:
Actual Customer NC
STP Conditions: 0 Deg. C @ 760 mmHG
Model:
Coastal CO-1980
Calibration Temperature: Room Temperature
Serial Number:
1234567890
Range:
1000sccm
Gas:
N2
Inlet Pressure:
20 PSIG
Outlet Pressure:
0 PSIG
He pre-ship leak rate: 0.1 x 10 -8 Std cc/sec.
Initial Inspection:
No visible contamination
Positioning:
HBD-Attitude 1
Services:
Calibration Gas:
N2
Conversion Factor:
1.000
Purged sensor with methyl alcohol and nitrogen
Ship date:
17-May-96
Cleaned parts in solution of HF, HNO3, DI water
Disassembled
Calibration at full scale of flow
Calc. Flow
F/SDev
Range and/or gas change
No Flow
0.002V
0.04% Assembled with Viton® seals
1.000V
201.50sccm
0.15%
2.000V
401.90sccm
0.19%
Parts replaced:
3.000V
599.80sccm
-0.02%
No parts required
4.000V
798.20sccm
-0.18%
5.000V
999.50sccm
-0.05%
Calculated flow within ± .5% of Actual flow
Calculated-Target
% F.S. DEV.=
________________
Full scale
www.pascaltechnologies.com
* 100
NIST traceable numbers: 821/251185-93, 731/238042-87, 731/244755-89,
52138, 3105a, 811/249279-92, 222560-0001, 158433 & 845085
4.26
4
PASCALTECHNOLOGIES, INC.
Mass Flow Control
REPAIR TAG
Please take the time to answer and complete the information on our Repair Tag. This information can be critical in
order to service your mass flow device properly. If we need additional information we will contact the technician
indicated on the Repair Tag.
MASS FLOW CONTROLLER
REPAIR TAG
SERVICE LEVEL
EXPEDITE 24-HOUR SERVICE
EXPEDITE SAME DAY
GENERAL 5 DAY SERVICE
OTHER________________
Company Name__________________________________State_____
Manufacturer_____________________________________________
Model Number____________________________ Ser #____________
Technician________________________________________________
Phone # (____) _________-________________ Ext # ______
SCCM
Range________________________
SLM
Gas__________
Actual Gas Used________________________________________
PSIG
PSIG
Operating Pressure: In_____
TORR
Out_____
TORR
Operating ____________TO________% F.S.
Date___________
Range
Removed
CIRCLE CORRECT MOUNTING POSITION
HBD
VIU
HESD
VID
HUD
SERVICE REQUIRED
Clean & Calibrate
Warranty
Build
N.I.S.T. Data
Range/Gas Change
Pre-Cal Data
Exchange
SYMPTOMS
SHIP TO
Pascal Technologies:
5104 Park Drive, Suite 101 Fredericksburg, VA 22408
Phone: (540) 891-2800
Fax: (540) 891-2233
Please complete this form and attach to MFC.
4.27
1-800-367-2919
www.pascaltechnologies.com
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